US20220352804A1 - Linear Motor for Vacuum and Vacuum Processing Apparatus - Google Patents
Linear Motor for Vacuum and Vacuum Processing Apparatus Download PDFInfo
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- US20220352804A1 US20220352804A1 US17/857,453 US202217857453A US2022352804A1 US 20220352804 A1 US20220352804 A1 US 20220352804A1 US 202217857453 A US202217857453 A US 202217857453A US 2022352804 A1 US2022352804 A1 US 2022352804A1
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Images
Classifications
-
- H—ELECTRICITY
- H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
- H02K—DYNAMO-ELECTRIC MACHINES
- H02K41/00—Propulsion systems in which a rigid body is moved along a path due to dynamo-electric interaction between the body and a magnetic field travelling along the path
- H02K41/02—Linear motors; Sectional motors
- H02K41/03—Synchronous motors; Motors moving step by step; Reluctance motors
- H02K41/031—Synchronous motors; Motors moving step by step; Reluctance motors of the permanent magnet type
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/02—Details
- H01J37/20—Means for supporting or positioning the objects or the material; Means for adjusting diaphragms or lenses associated with the support
-
- H—ELECTRICITY
- H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
- H02K—DYNAMO-ELECTRIC MACHINES
- H02K5/00—Casings; Enclosures; Supports
- H02K5/04—Casings or enclosures characterised by the shape, form or construction thereof
- H02K5/10—Casings or enclosures characterised by the shape, form or construction thereof with arrangements for protection from ingress, e.g. water or fingers
-
- H—ELECTRICITY
- H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
- H02K—DYNAMO-ELECTRIC MACHINES
- H02K5/00—Casings; Enclosures; Supports
- H02K5/04—Casings or enclosures characterised by the shape, form or construction thereof
- H02K5/20—Casings or enclosures characterised by the shape, form or construction thereof with channels or ducts for flow of cooling medium
-
- H—ELECTRICITY
- H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
- H02K—DYNAMO-ELECTRIC MACHINES
- H02K5/00—Casings; Enclosures; Supports
- H02K5/04—Casings or enclosures characterised by the shape, form or construction thereof
- H02K5/22—Auxiliary parts of casings not covered by groups H02K5/06-H02K5/20, e.g. shaped to form connection boxes or terminal boxes
- H02K5/225—Terminal boxes or connection arrangements
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J2237/00—Discharge tubes exposing object to beam, e.g. for analysis treatment, etching, imaging
- H01J2237/002—Cooling arrangements
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J2237/00—Discharge tubes exposing object to beam, e.g. for analysis treatment, etching, imaging
- H01J2237/20—Positioning, supporting, modifying or maintaining the physical state of objects being observed or treated
- H01J2237/2005—Seal mechanisms
- H01J2237/2006—Vacuum seals
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J2237/00—Discharge tubes exposing object to beam, e.g. for analysis treatment, etching, imaging
- H01J2237/20—Positioning, supporting, modifying or maintaining the physical state of objects being observed or treated
- H01J2237/202—Movement
- H01J2237/20221—Translation
- H01J2237/20235—Z movement or adjustment
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J2237/00—Discharge tubes exposing object to beam, e.g. for analysis treatment, etching, imaging
- H01J2237/20—Positioning, supporting, modifying or maintaining the physical state of objects being observed or treated
- H01J2237/202—Movement
- H01J2237/20278—Motorised movement
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/02—Details
- H01J37/023—Means for mechanically adjusting components not otherwise provided for
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/02—Details
- H01J37/18—Vacuum locks ; Means for obtaining or maintaining the desired pressure within the vessel
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/26—Electron or ion microscopes; Electron or ion diffraction tubes
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- H—ELECTRICITY
- H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
- H02K—DYNAMO-ELECTRIC MACHINES
- H02K5/00—Casings; Enclosures; Supports
- H02K5/04—Casings or enclosures characterised by the shape, form or construction thereof
- H02K5/20—Casings or enclosures characterised by the shape, form or construction thereof with channels or ducts for flow of cooling medium
- H02K5/203—Casings or enclosures characterised by the shape, form or construction thereof with channels or ducts for flow of cooling medium specially adapted for liquids, e.g. cooling jackets
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- H—ELECTRICITY
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- H02K9/00—Arrangements for cooling or ventilating
- H02K9/19—Arrangements for cooling or ventilating for machines with closed casing and closed-circuit cooling using a liquid cooling medium, e.g. oil
Definitions
- the present invention relates to a linear motor for driving a sample stage in a vacuum sample chamber.
- a vacuum processing apparatus represented by an electron microscope, an ion beam apparatus, a semiconductor manufacturing apparatus, and a semiconductor measurement and inspection apparatus, in which a sample is observed, inspected, measured, analyzed, processed and conveyed (hereinafter referred to as “processing”) in a vacuum space, it is normal to perform various processing on a target sample while moving the sample to be processed by a movable stage.
- a linear motor is employed as a driving mechanism for realizing high speed movement and high precision positioning of the movable stage used in the vacuum processing apparatus.
- the linear motor includes a moving magnet type linear motor.
- the moving magnet type linear motor includes a mover having a permanent magnet and a stator having a coil through which a control current passing, and there is no need for power supply wires to movable portions, so that it suitable for a case where it is desired to reduce a risk of disconnection and foreign matter generation caused by movement of the power supply wires.
- the moving magnet type linear motor using the coil as the stator requires a coil whose length corresponds to a movable stroke of a stage. That is, if the stroke is intended to be long, the number of the coils needs to be increased accordingly, and therefore the number of wires to be introduced into a vacuum chamber in an electron microscope tends to increase.
- the increase in the number of the wires in the vacuum sample chamber leads to problems such as an increase in the number of assembly operations, an increase in cost, and an increase in an amount of outgassing generated from wire coating.
- PTL 1 discloses a linear motor in which an entire coil on a stator side is covered by a packaging member having a vacuum sealing structure, and a space between a mover having a permanent magnet and a stator having a coil is airtightly separated.
- the packaging member is required to separate the space between the coil and the permanent magnet, and a gap greater than or equal to a thickness of the packaging member is generated between the coil and the permanent magnet.
- a high vacuum of 10-5 Pa may be required, and in order to secure a mechanical strength of the packaging member for separating the vacuum environment and the atmospheric environment, a stainless packaging member requires to a thickness of several centimeters.
- thrust efficiency decreases as the gap between the coil and the permanent magnet increases, and therefore, when a distance between the stator and the mover is more than several centimeters, there is a problem that thrust generation efficiency of the linear motor is significantly reduced.
- the invention is made in view of the above problems, and an object thereof is to provide a linear motor capable of improving the thrust generation efficiency while reducing the amount of the outgassing generated from wire coating and the number of assembly operations of the linear motor.
- a linear motor for vacuum including: a mover having a permanent magnet; and a stator having a support member to which a coil is fixed, in which the support member includes a vacuum sealing portion that vacuum seals with a wall surface of a vacuum sample chamber, and a feed-through for supplying a current to the coil provided in the vacuum sample chamber.
- a linear motor for vacuum including: a mover having a permanent magnet; and a stator having a coil covered by a resin member, in which the stator includes a support member having a vacuum sealing portion that vacuum seals with a wall surface of a vacuum sample chamber and a first through hole portion, and a wire for supplying a current to the coil provided in the vacuum sample chamber.
- the wire is led out to an outside of the vacuum sample chamber through the first through hole portion.
- the first through hole portion is filled with the resin member integrally or with a filler that binds to the resin member, so that the through hole portion is sealed.
- a vacuum processing apparatus including a linear motor for vacuum.
- the linear motor for vacuum includes a mover having a permanent magnet, a stator having a coil covered by a resin member, and a wire for supplying a current to the coil provided in a vacuum sample chamber.
- the wire is led out to an outside of the vacuum sample chamber through a through hole portion provided in the wall surface of the vacuum sample chamber.
- the through hole portion is filled with the resin member integrally or with a filler that binds to the resin member, that the through hole portion is sealed.
- FIG. 1 is a view illustrating a sample stage which uses a linear motor of a first embodiment as a drive source.
- FIG. 2 is a cross-sectional view of the stage of FIG. 1 taken along a line A-A.
- FIG. 3 is a view illustrating the configuration of a peripheral portion of a stator according to the first embodiment.
- FIG. 4 is a view illustrating the configuration of a peripheral portion of a stator according to a second embodiment.
- FIG. 5 is a view illustrating the configuration of a peripheral portion of a stator according to a third embodiment.
- FIG. 6 is a view illustrating the configuration of a peripheral portion of a stator according to a forth embodiment.
- FIG. 7 is a view illustrating the configuration of a peripheral portion of a stator according to a fifth embodiment.
- FIG. 8 is a view illustrating the configuration of a peripheral portion of a stator according to an embodiment of the invention.
- a linear motor used for a sample stage in, for example, an electron microscope will be described as an example, the invention is not limited thereto, and can be applied to a vacuum processing apparatus, represented by an electron microscope, an ion beam apparatus, a semiconductor manufacturing apparatus, and a semiconductor measurement and inspection apparatus in which a sample is observed, inspected, measured, analyzed, processed, and conveyed in a vacuum space.
- a vacuum processing apparatus represented by an electron microscope, an ion beam apparatus, a semiconductor manufacturing apparatus, and a semiconductor measurement and inspection apparatus in which a sample is observed, inspected, measured, analyzed, processed, and conveyed in a vacuum space.
- FIGS. 1 to 3 An embodiment of the invention will be described with reference to FIGS. 1 to 3 .
- FIG. 1 illustrates a configuration example of a sample stage driven by a linear motor in a vacuum sample chamber of an electron microscope or the like.
- a space of a vacuum sample chamber inside 19 and an atmospheric environment 20 are separated by a vacuum sample chamber wall 10 .
- a sample stage 2 includes an X movable table 5 , a Y movable table 6 , an X roller guide 8 and a Y roller guide 9 for moving each table linearly in respective axial directions, and a chuck 7 for fixing a sample.
- a stator 3 and the vacuum sample chamber wall 10 are mechanically fixed by screws or the like.
- the X movable table 5 and a mover 4 are mechanically fixed by screws or the like, and thrust of a linear motor 1 is transmitted to the X movable table 5 .
- the linear motor 1 includes a stator 3 having a coil and a mover 4 having a magnet, and is disposed at the vacuum sample chamber inside 19 .
- FIG. 2 is a cross-sectional view of the sample stage of FIG. 1 , and a cross-sectional position and a direction are taken along a line A-A in FIG. 1 .
- the stator 3 is a common design, and a plurality of the stators 3 are combined according to a desired stroke of the sample stage 2
- the embodiment of FIG. 2 illustrate an example in which four common design stators 3 a , 3 b , 3 c , and 3 d are arranged in the X direction.
- the stator can be commonly designed and a plurality of stators are used in combination according to the stroke, so that it is not necessary to prepare a stator having a new length for each sample stage with a different stroke, and a cost reduction effect can be expected when a sample stage of multiple types is desired to be manufactured.
- a stroke of the sample stage 2 is determined by the number of the stators 3 , when the stroke is increased, the number of the wires 12 connected to the stator 3 also increases with the increase of the number of the stators 3 .
- FIG. 3 illustrates an example of a peripheral portion of the stator according to the embodiment of the invention.
- the stator 3 includes a coil 11 , a supporting member 13 , wires 12 for connecting to the coil 11 , and a vacuum feed-through 21 for taking the wires 12 out of the vacuum sample chamber inside 19 to the atmospheric environment.
- the vacuum feed-through 21 that separates the vacuum sample chamber inside 19 and the atmospheric environment 20 from each other may be made of resin.
- the support member 13 and the coil 11 are fixed to each other by an adhesive or the like.
- the support member 13 is made of metal or resin.
- Epoxy resin is an example of the resin that can be used for forming the vacuum feed-through 21 and fixing the coil 11 . Since the epoxy resin is available in adhesive type and can be cured to a desired shape after covering the corresponding portion, it also can be easy to form the vacuum feed-through 21 and to fix the support member 13 and the coil 11 .
- the stator 3 is configured to be screwed to the vacuum sample chamber wall 10 , so that it is possible to singly attach and detach the stator 3 , and to easily perform component replacement.
- the support member 13 of the stator 3 is provided with a vacuum sealing structure.
- An example of the vacuum sealing structure is a sealing structure with an O-ring.
- an O-ring groove 16 for attaching an O-ring 15 to the support member 13 is provided, and a sealing surface is formed on an O-ring contact surface of the O-ring groove 16 by machining or the like, and a sealing surface is also formed on a surface of the vacuum sample chamber wall 10 that is also in contact with the O-ring 15 .
- a through hole 14 for taking the wires 12 to a side of the atmospheric environment 20 is formed in the vacuum sample chamber wall 10 .
- the wires 12 to the stator 3 that is routed in the vacuum sample chamber can be directly taken out to the atmospheric environment, so that the outgassing generated from the wire coating in the vacuum sample chamber can be prevented. Further, since the wire to the linear motor does not require to be taken into the vacuum sample chamber, efficiency of assembly operations is improved. Further, the stator having the coil 3 and the mover having the permanent magnet are not required to be separated spatially, and are both disposed in the vacuum sample chamber, so that a linear motor with a small gap between the coil and the permanent magnet can be realized, and thrust generation efficiency of the linear motor can be improved. Further, single component replacement can be performed on the stator 3 , so that workability such as maintenance is excellent.
- the vacuum feed-through 21 may be configured to supply a cooling fluid for cooling the coil. In this case, the same effects as those described in the fourth embodiment can be obtained.
- FIG. 4 illustrates the configuration of a peripheral portion of a stator according to another embodiment of the invention.
- a stator 3 includes a coil 11 , wires 12 for connecting to the coil 11 , and resin 17 .
- the resin 17 is configured to be a member that covers the coil 11 , the wires 12 and a through hole 14 , and separates a vacuum sample chamber inside 19 and an atmospheric environment 20 from each other.
- the through hole 14 is sealed by the resin 17 , so that the airtightness between the vacuum sample chamber inside 19 and the atmospheric environment 20 is ensured.
- the coil 11 is covered with the resin 17 to ensure rigidity and to prevent a shape change of the coil 11 , so that the performance of a linear motor can be stabilized over a long period.
- the shape of the resin 17 can be formed by a molding method such as injection molding or insert molding.
- the cost of the linear motor can be reduced since the number of components on a side of the stator having the coil 11 can be reduced.
- FIG. 5 illustrates the configuration of a peripheral portion of a stator in another embodiment of the invention.
- a stator 3 includes a coil 11 , wires 12 for connecting to the coil 11 , resin 17 , and a support member 22 .
- the resin 17 is configured to be a member that covers the coil 11 , the wires 12 and a through hole 14 of the support member 22 , and separates a vacuum sample chamber inside 19 and an atmospheric environment 20 form each other. That is, the through hole 14 is sealed by the resin 17 , so that the airtightness between the vacuum sample chamber inside 19 and the atmospheric environment 20 is ensured.
- the coil 11 is covered with the resin 17 to ensure rigidity and to prevent a shape change of the coil 11 , so that the performance of a linear motor can be stabilized over a long period.
- a hole for fixing a screw by which the stator 3 is attached to a vacuum sample chamber wall 10 is formed (not shown), such that attachment and detachment of the stator 3 can be singly performed.
- the support member 22 is provided with an O-ring groove 16 to which an O-ring 15 is attached, and a sealing surface is formed on an O-ring contact surface of the O-ring groove 16 by machining or the like.
- a sealing surface is also formed on a surface of the vacuum sample chamber wall 10 that is also in contact with the O-ring 15 .
- a vacuum sealing structure with the O-ring 15 maintains the airtightness between the support member 22 and the vacuum sample chamber wall 10 .
- FIG. 6 illustrates the configuration of a peripheral portion of a stator in another embodiment of the invention.
- the third embodiment is a configuration example in which a pipe 18 is further added for supplying a cooling fluid for cooling a coil 3 .
- a pipe 18 is further added for supplying a cooling fluid for cooling a coil 3 .
- an orientation change of the movable table or deformation of the movable table occurs.
- Such orientation change or deformation of the movable table causes a change in a stage coordinate measurement position or an electron beam irradiation position in the vacuum processing apparatus, which may cause deterioration in processing performance of the vacuum processing apparatus.
- FIG. 8 there is a method of disposing the pipe 18 for cooling fluid on a bottom surface 25 of an atmospheric side of the sample chamber. If the pipe 18 is covered with a metal jacket 24 so as to bring the pipe 18 in close contact with the sample chamber bottom surface 25 , the pipe 18 can be mechanically fixed to the sample chamber bottom surface 25 by using screws or the like.
- FIG. 8 in the configuration of FIG.
- the heat, as shown in a heat flow 26 , generated in the coil 11 is transmitted to the pipe 18 for cooling fluid via the sample chamber bottom surface 25 , and thus, the heat is inevitably transmitted to the vacuum sample chamber or the movable table.
- the pipe 18 for cooling fluid can be disposed closer the coil 11 which is a heat source, the heat generated in the coil 11 can be more directly released to the cooling fluid, and the heat transmission to the vacuum sample chamber can be suppressed.
- water or an aqueous solution to which a specific substance is added is used as the cooling fluid.
- the stator 3 includes the coil 11 , wires 12 for connecting to the coil 11 , resin 17 , a support member 21 and the pipe 18 .
- a method in which the support member 22 is made of a cast-metal object is an example of a manufacturing method of the present embodiment shown in FIG. 6 . If the pipe 18 for cooling that is processed to a size that fits in the support member 22 in advance is disposed in the cast-metal object, and a metal material used as the support member 22 is melted and poured and cured, the pipe 18 for cooling can be easily disposed inside the support member 22 .
- Aluminum or the like which has good thermal conductivity and can be easily manufactured by a casting method is an example of the metal material.
- the resin 17 is configured to be a member that covers the coil 11 , the wires 12 , the pipe 18 and the through hole 23 of the support member 22 , and separates a vacuum sample chamber inside 19 and an atmospheric environment 20 form each other. That is, by sealing the through hole 23 with the resin 17 , the airtightness between the vacuum sample chamber inside 19 and the atmospheric environment 20 is ensured.
- heat generation of the coil 11 can be efficiently suppressed by cooling effect of the cooling fluid, and heat transmitted to the vacuum sample chamber and the movable table can be suppressed, so that deterioration in the processing performance of the vacuum processing apparatus can be prevented.
- the present embodiment is also suitable for a linear motor driving with a large current.
- the pipe 18 for supplying the cooling fluid for cooling the coil 11 needs to be disposed in the vacuum sample chamber inside 19
- the pipe 18 for cooling water of the present embodiment can be airtightly separated from the vacuum sample chamber inside 19 with the resin 17 , so that no water leaks into the vacuum sample chamber inside 19 even when there is water leakage from the pipe 18 for water cooling.
- FIG. 7 illustrates the configuration of a peripheral portion of a stator in another embodiment of the invention.
- a position of an O-ring groove 16 provided in a support member 22 is changed, and a stator 3 is attached to a vacuum sample chamber wall 10 from a side of an atmospheric environment 20 in the present embodiment.
- a sealing surface is formed by machining or the like on an O-ring contact surface of the O-ring groove 16 and an O-ring contact surface of the vacuum sample chamber wall 10 .
- stator 3 not only singly component replacement can be performed on the stator 3 , but also the stator 3 can be attached or detached from the side of the atmospheric environment 20 , workability such as maintenance is more excellent.
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- Analytical Chemistry (AREA)
- Linear Motors (AREA)
Abstract
A vacuum processing apparatus includes a linear motor. The linear motor includes a mover having a permanent magnet, a stator having a coil covered by a resin member, and a wire for supplying a current to the coil provided in a vacuum sample chamber. The wire is led out to an outside of the vacuum sample chamber through a through hole portion provided in the wall surface of the vacuum sample chamber. The through hole portion is filled with the resin member integrally or with a filler that binds to the resin member, so that the through hole portion is sealed.
Description
- This application is a continuation of U.S. patent application Ser. No. 16/600,010 filed Oct. 11, 2019, which claims priority from Japanese Patent Application No. 2018-196327, filed Oct. 18, 2018, the disclosures of which are expressly incorporated by reference herein.
- The present invention relates to a linear motor for driving a sample stage in a vacuum sample chamber.
- In a vacuum processing apparatus, represented by an electron microscope, an ion beam apparatus, a semiconductor manufacturing apparatus, and a semiconductor measurement and inspection apparatus, in which a sample is observed, inspected, measured, analyzed, processed and conveyed (hereinafter referred to as “processing”) in a vacuum space, it is normal to perform various processing on a target sample while moving the sample to be processed by a movable stage. A linear motor is employed as a driving mechanism for realizing high speed movement and high precision positioning of the movable stage used in the vacuum processing apparatus. The linear motor includes a moving magnet type linear motor. The moving magnet type linear motor includes a mover having a permanent magnet and a stator having a coil through which a control current passing, and there is no need for power supply wires to movable portions, so that it suitable for a case where it is desired to reduce a risk of disconnection and foreign matter generation caused by movement of the power supply wires.
-
- PTL 1: JP-A-2014-128177
- Meanwhile, the moving magnet type linear motor using the coil as the stator requires a coil whose length corresponds to a movable stroke of a stage. That is, if the stroke is intended to be long, the number of the coils needs to be increased accordingly, and therefore the number of wires to be introduced into a vacuum chamber in an electron microscope tends to increase. The increase in the number of the wires in the vacuum sample chamber leads to problems such as an increase in the number of assembly operations, an increase in cost, and an increase in an amount of outgassing generated from wire coating. In order to solve these problems, PTL 1 discloses a linear motor in which an entire coil on a stator side is covered by a packaging member having a vacuum sealing structure, and a space between a mover having a permanent magnet and a stator having a coil is airtightly separated.
- However, in the technology disclosed in PTL 1, since the stator having the coil is disposed in an atmospheric environment, and the mover having the permanent magnet is disposed in a vacuum environment, the packaging member is required to separate the space between the coil and the permanent magnet, and a gap greater than or equal to a thickness of the packaging member is generated between the coil and the permanent magnet. For example, in the vacuum sample chamber of the electron microscope, a high vacuum of 10-5 Pa may be required, and in order to secure a mechanical strength of the packaging member for separating the vacuum environment and the atmospheric environment, a stainless packaging member requires to a thickness of several centimeters. In the linear motor, thrust efficiency decreases as the gap between the coil and the permanent magnet increases, and therefore, when a distance between the stator and the mover is more than several centimeters, there is a problem that thrust generation efficiency of the linear motor is significantly reduced.
- The invention is made in view of the above problems, and an object thereof is to provide a linear motor capable of improving the thrust generation efficiency while reducing the amount of the outgassing generated from wire coating and the number of assembly operations of the linear motor.
- In order to the above problems, a linear motor for vacuum is provided, the linear motor for vacuum including: a mover having a permanent magnet; and a stator having a support member to which a coil is fixed, in which the support member includes a vacuum sealing portion that vacuum seals with a wall surface of a vacuum sample chamber, and a feed-through for supplying a current to the coil provided in the vacuum sample chamber.
- A linear motor for vacuum is further provided, the linear motor for vacuum including: a mover having a permanent magnet; and a stator having a coil covered by a resin member, in which the stator includes a support member having a vacuum sealing portion that vacuum seals with a wall surface of a vacuum sample chamber and a first through hole portion, and a wire for supplying a current to the coil provided in the vacuum sample chamber. The wire is led out to an outside of the vacuum sample chamber through the first through hole portion. The first through hole portion is filled with the resin member integrally or with a filler that binds to the resin member, so that the through hole portion is sealed.
- Further, a vacuum processing apparatus including a linear motor for vacuum is provided. The linear motor for vacuum includes a mover having a permanent magnet, a stator having a coil covered by a resin member, and a wire for supplying a current to the coil provided in a vacuum sample chamber. The wire is led out to an outside of the vacuum sample chamber through a through hole portion provided in the wall surface of the vacuum sample chamber. The through hole portion is filled with the resin member integrally or with a filler that binds to the resin member, that the through hole portion is sealed.
- According to the above configuration, it is possible to implement a linear motor capable of preventing outgassing generated from wire coating in a vacuum sample chamber, and having excellent assembly operation efficiency and maintainability and high thrust generation efficiency, and a vacuum processing apparatus using the linear motor.
-
FIG. 1 is a view illustrating a sample stage which uses a linear motor of a first embodiment as a drive source. -
FIG. 2 is a cross-sectional view of the stage ofFIG. 1 taken along a line A-A. -
FIG. 3 is a view illustrating the configuration of a peripheral portion of a stator according to the first embodiment. -
FIG. 4 is a view illustrating the configuration of a peripheral portion of a stator according to a second embodiment. -
FIG. 5 is a view illustrating the configuration of a peripheral portion of a stator according to a third embodiment. -
FIG. 6 is a view illustrating the configuration of a peripheral portion of a stator according to a forth embodiment. -
FIG. 7 is a view illustrating the configuration of a peripheral portion of a stator according to a fifth embodiment. -
FIG. 8 is a view illustrating the configuration of a peripheral portion of a stator according to an embodiment of the invention. - Hereinafter, embodiments will be described with reference to accompanying drawings. In the accompanying drawings, elements with the same functions may be denoted by the same number. Although the attached drawings show specific embodiments in accordance with the principles of the disclosure, they are for the purpose of understanding the disclosure, and are not to be used for limiting interpretation of the disclosure. The descriptions in this specification are merely exemplary, and are not intended to limit the scope of the claims or application in any way whatsoever.
- This embodiment has been described in sufficient detail for those skilled in the art to practice the present disclosure, but other implementations are possible and do not depart from the scope and spirit of the technical idea of the present disclosure. It is necessary to understand that it is possible to change the composition/structure and replace various elements. Therefore, the following description should not be interpreted as being limited to this.
- In the following embodiments, a linear motor used for a sample stage in, for example, an electron microscope will be described as an example, the invention is not limited thereto, and can be applied to a vacuum processing apparatus, represented by an electron microscope, an ion beam apparatus, a semiconductor manufacturing apparatus, and a semiconductor measurement and inspection apparatus in which a sample is observed, inspected, measured, analyzed, processed, and conveyed in a vacuum space.
- Hereinafter, an embodiment of the invention will be described with reference to
FIGS. 1 to 3 . -
FIG. 1 illustrates a configuration example of a sample stage driven by a linear motor in a vacuum sample chamber of an electron microscope or the like. A space of a vacuum sample chamber inside 19 and anatmospheric environment 20 are separated by a vacuumsample chamber wall 10. Asample stage 2 includes an X movable table 5, a Y movable table 6, anX roller guide 8 and aY roller guide 9 for moving each table linearly in respective axial directions, and a chuck 7 for fixing a sample. Astator 3 and the vacuumsample chamber wall 10 are mechanically fixed by screws or the like. The X movable table 5 and amover 4 are mechanically fixed by screws or the like, and thrust of a linear motor 1 is transmitted to the X movable table 5. The linear motor 1 includes astator 3 having a coil and amover 4 having a magnet, and is disposed at the vacuum sample chamber inside 19. -
FIG. 2 is a cross-sectional view of the sample stage ofFIG. 1 , and a cross-sectional position and a direction are taken along a line A-A inFIG. 1 . In this embodiment, thestator 3 is a common design, and a plurality of thestators 3 are combined according to a desired stroke of thesample stage 2, and the embodiment ofFIG. 2 illustrate an example in which fourcommon design stators sample stage 2 is determined by the number of thestators 3, when the stroke is increased, the number of thewires 12 connected to thestator 3 also increases with the increase of the number of thestators 3. InFIG. 2 , since fourstators sample stage 2, fourwires FIG. 3 . -
FIG. 3 illustrates an example of a peripheral portion of the stator according to the embodiment of the invention. Thestator 3 includes acoil 11, a supportingmember 13,wires 12 for connecting to thecoil 11, and a vacuum feed-through 21 for taking thewires 12 out of the vacuum sample chamber inside 19 to the atmospheric environment. The vacuum feed-through 21 that separates the vacuum sample chamber inside 19 and theatmospheric environment 20 from each other may be made of resin. Thesupport member 13 and thecoil 11 are fixed to each other by an adhesive or the like. Thesupport member 13 is made of metal or resin. Epoxy resin is an example of the resin that can be used for forming the vacuum feed-through 21 and fixing thecoil 11. Since the epoxy resin is available in adhesive type and can be cured to a desired shape after covering the corresponding portion, it also can be easy to form the vacuum feed-through 21 and to fix thesupport member 13 and thecoil 11. - In the
support member 13 of thestator 3, a hole for fixing the screw by which thestator 3 is attached to the vacuumsample chamber wall 10 is formed (not shown). Thestator 3 is configured to be screwed to the vacuumsample chamber wall 10, so that it is possible to singly attach and detach thestator 3, and to easily perform component replacement. Thesupport member 13 of thestator 3 is provided with a vacuum sealing structure. An example of the vacuum sealing structure is a sealing structure with an O-ring. In the embodiment ofFIG. 3 , an O-ring groove 16 for attaching an O-ring 15 to thesupport member 13 is provided, and a sealing surface is formed on an O-ring contact surface of the O-ring groove 16 by machining or the like, and a sealing surface is also formed on a surface of the vacuumsample chamber wall 10 that is also in contact with the O-ring 15. A throughhole 14 for taking thewires 12 to a side of theatmospheric environment 20 is formed in the vacuumsample chamber wall 10. - According to the above configuration, in the related art, the
wires 12 to thestator 3 that is routed in the vacuum sample chamber can be directly taken out to the atmospheric environment, so that the outgassing generated from the wire coating in the vacuum sample chamber can be prevented. Further, since the wire to the linear motor does not require to be taken into the vacuum sample chamber, efficiency of assembly operations is improved. Further, the stator having thecoil 3 and the mover having the permanent magnet are not required to be separated spatially, and are both disposed in the vacuum sample chamber, so that a linear motor with a small gap between the coil and the permanent magnet can be realized, and thrust generation efficiency of the linear motor can be improved. Further, single component replacement can be performed on thestator 3, so that workability such as maintenance is excellent. - Further, as will be described later in a fourth embodiment, the vacuum feed-through 21 may be configured to supply a cooling fluid for cooling the coil. In this case, the same effects as those described in the fourth embodiment can be obtained.
-
FIG. 4 illustrates the configuration of a peripheral portion of a stator according to another embodiment of the invention. Astator 3 includes acoil 11,wires 12 for connecting to thecoil 11, andresin 17. Theresin 17 is configured to be a member that covers thecoil 11, thewires 12 and a throughhole 14, and separates a vacuum sample chamber inside 19 and anatmospheric environment 20 from each other. In other words, the throughhole 14 is sealed by theresin 17, so that the airtightness between the vacuum sample chamber inside 19 and theatmospheric environment 20 is ensured. In addition, thecoil 11 is covered with theresin 17 to ensure rigidity and to prevent a shape change of thecoil 11, so that the performance of a linear motor can be stabilized over a long period. In this case, in order to support thecoil 11, not only theresin 17 but also a new support member may be added. The shape of theresin 17 can be formed by a molding method such as injection molding or insert molding. - In this embodiment, compared with the first embodiment, although the singly component replacement cannot be performed, the cost of the linear motor can be reduced since the number of components on a side of the stator having the
coil 11 can be reduced. -
FIG. 5 illustrates the configuration of a peripheral portion of a stator in another embodiment of the invention. Astator 3 includes acoil 11,wires 12 for connecting to thecoil 11,resin 17, and asupport member 22. Theresin 17 is configured to be a member that covers thecoil 11, thewires 12 and a throughhole 14 of thesupport member 22, and separates a vacuum sample chamber inside 19 and anatmospheric environment 20 form each other. That is, the throughhole 14 is sealed by theresin 17, so that the airtightness between the vacuum sample chamber inside 19 and theatmospheric environment 20 is ensured. In addition, thecoil 11 is covered with theresin 17 to ensure rigidity and to prevent a shape change of thecoil 11, so that the performance of a linear motor can be stabilized over a long period. In thesupport member 22, a hole for fixing a screw by which thestator 3 is attached to a vacuumsample chamber wall 10 is formed (not shown), such that attachment and detachment of thestator 3 can be singly performed. Further, thesupport member 22 is provided with an O-ring groove 16 to which an O-ring 15 is attached, and a sealing surface is formed on an O-ring contact surface of the O-ring groove 16 by machining or the like. Similarly, a sealing surface is also formed on a surface of the vacuumsample chamber wall 10 that is also in contact with the O-ring 15. A vacuum sealing structure with the O-ring 15 maintains the airtightness between thesupport member 22 and the vacuumsample chamber wall 10. - In the present embodiment, the same effect as the first embodiment can be acquired.
-
FIG. 6 illustrates the configuration of a peripheral portion of a stator in another embodiment of the invention. The third embodiment is a configuration example in which apipe 18 is further added for supplying a cooling fluid for cooling acoil 3. When heat of the coil is transmitted to a sample chamber or a movable table, an orientation change of the movable table or deformation of the movable table occurs. Such orientation change or deformation of the movable table causes a change in a stage coordinate measurement position or an electron beam irradiation position in the vacuum processing apparatus, which may cause deterioration in processing performance of the vacuum processing apparatus. Therefore, it can be said that suppressing heat generation of the coil generated during stage operations is a serious problem for achieving both acceleration of the stage (large current of the coil) and high accuracy of the stage. As an example of a cooling method of the vacuum sample chamber and the stage, as shown inFIG. 8 , there is a method of disposing thepipe 18 for cooling fluid on abottom surface 25 of an atmospheric side of the sample chamber. If thepipe 18 is covered with ametal jacket 24 so as to bring thepipe 18 in close contact with the samplechamber bottom surface 25, thepipe 18 can be mechanically fixed to the samplechamber bottom surface 25 by using screws or the like. However, in the configuration ofFIG. 8 , the heat, as shown in aheat flow 26, generated in thecoil 11 is transmitted to thepipe 18 for cooling fluid via the samplechamber bottom surface 25, and thus, the heat is inevitably transmitted to the vacuum sample chamber or the movable table. Compared with the configuration ofFIG. 8 , in this embodiment ofFIG. 6 , since thepipe 18 for cooling fluid can be disposed closer thecoil 11 which is a heat source, the heat generated in thecoil 11 can be more directly released to the cooling fluid, and the heat transmission to the vacuum sample chamber can be suppressed. For example, water or an aqueous solution to which a specific substance is added is used as the cooling fluid. Thestator 3 includes thecoil 11,wires 12 for connecting to thecoil 11,resin 17, asupport member 21 and thepipe 18. A method in which thesupport member 22 is made of a cast-metal object is an example of a manufacturing method of the present embodiment shown inFIG. 6 . If thepipe 18 for cooling that is processed to a size that fits in thesupport member 22 in advance is disposed in the cast-metal object, and a metal material used as thesupport member 22 is melted and poured and cured, thepipe 18 for cooling can be easily disposed inside thesupport member 22. Aluminum or the like which has good thermal conductivity and can be easily manufactured by a casting method is an example of the metal material. Theresin 17 is configured to be a member that covers thecoil 11, thewires 12, thepipe 18 and the throughhole 23 of thesupport member 22, and separates a vacuum sample chamber inside 19 and anatmospheric environment 20 form each other. That is, by sealing the throughhole 23 with theresin 17, the airtightness between the vacuum sample chamber inside 19 and theatmospheric environment 20 is ensured. - In the present embodiment, heat generation of the
coil 11 can be efficiently suppressed by cooling effect of the cooling fluid, and heat transmitted to the vacuum sample chamber and the movable table can be suppressed, so that deterioration in the processing performance of the vacuum processing apparatus can be prevented. In addition, the present embodiment is also suitable for a linear motor driving with a large current. In addition, thepipe 18 for supplying the cooling fluid for cooling thecoil 11 needs to be disposed in the vacuum sample chamber inside 19, thepipe 18 for cooling water of the present embodiment can be airtightly separated from the vacuum sample chamber inside 19 with theresin 17, so that no water leaks into the vacuum sample chamber inside 19 even when there is water leakage from thepipe 18 for water cooling. -
FIG. 7 illustrates the configuration of a peripheral portion of a stator in another embodiment of the invention. With respect to the third embodiment, a position of an O-ring groove 16 provided in asupport member 22 is changed, and astator 3 is attached to a vacuumsample chamber wall 10 from a side of anatmospheric environment 20 in the present embodiment. A sealing surface is formed by machining or the like on an O-ring contact surface of the O-ring groove 16 and an O-ring contact surface of the vacuumsample chamber wall 10. - In the present embodiment, not only singly component replacement can be performed on the
stator 3, but also thestator 3 can be attached or detached from the side of theatmospheric environment 20, workability such as maintenance is more excellent. -
- 1 Linear motor
- 2 Sample stage
- 3 Stator
- 4 Mover
- 5 X movable table
- 6 Y movable table
- 7 Chunk
- 8 X roller guide
- 9 Y roller guide
- 10 Vacuum sample chamber wall
- 11 Coil
- 12 Wire
- 13 Support member
- 14 Through hole
- 15 O-ring
- 16 O-ring groove
- 17 Resin
- 18 Pipe
- 19 Vacuum sample chamber inside
- 20 Atmospheric environment
- 21 Vacuum feed-through
- 22 Support member
- 23 Through hole
- 24 Jacket
- 25 Bottom surface of sample chamber
- 26 Heat flow
Claims (7)
1. A vacuum processing apparatus comprising:
a linear motor for vacuum that includes a mover having a permanent magnet, a stator having a coil covered by a resin member, and a wire for supplying a current to the coil provided in a vacuum sample chamber, wherein
the wire is led out to an outside of the vacuum sample chamber through a through hole portion provided in the wall surface of the vacuum sample chamber, and
the through hole portion is filled with the resin member integrally or with a filler that binds to the resin member, so that the through hole portion is sealed.
2. The vacuum processing apparatus according to claim 1 , wherein
a pipe configured to supply a fluid for cooling the coil is led out to the outside of the vacuum sample chamber through the through hole portion.
3. The vacuum processing apparatus according to claim 1 , wherein
the resin member covers the coil, the wire and the through hole portion, and is configured to separate the vacuum sample chamber and atmosphere environment.
4. The vacuum processing apparatus according to claim 1 , wherein the resin member is formed by injection molding or insert molding.
5. The vacuum processing apparatus according to claim 1 , further comprising a support member for supporting the coil.
6. The vacuum processing apparatus according to claim 2 , wherein
the resin member covers the coil, the wire, the pipe, and the through hole portion,
and is configured to separate the vacuum sample chamber and atmosphere environment.
7. The vacuum processing apparatus according to claim 1 , wherein the resin member or the filler is epoxy resin.
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US17/857,453 US20220352804A1 (en) | 2018-10-18 | 2022-07-05 | Linear Motor for Vacuum and Vacuum Processing Apparatus |
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JP2018196327A JP2020065383A (en) | 2018-10-18 | 2018-10-18 | Linear motor for vacuum and vacuum processor |
JP2018-196327 | 2018-10-18 | ||
US16/600,010 US11418101B2 (en) | 2018-10-18 | 2019-10-11 | Linear motor for vacuum and vacuum processing apparatus |
US17/857,453 US20220352804A1 (en) | 2018-10-18 | 2022-07-05 | Linear Motor for Vacuum and Vacuum Processing Apparatus |
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US16/600,010 Continuation US11418101B2 (en) | 2018-10-18 | 2019-10-11 | Linear motor for vacuum and vacuum processing apparatus |
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US20220352804A1 true US20220352804A1 (en) | 2022-11-03 |
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US16/600,010 Active 2040-06-15 US11418101B2 (en) | 2018-10-18 | 2019-10-11 | Linear motor for vacuum and vacuum processing apparatus |
US17/857,453 Pending US20220352804A1 (en) | 2018-10-18 | 2022-07-05 | Linear Motor for Vacuum and Vacuum Processing Apparatus |
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US16/600,010 Active 2040-06-15 US11418101B2 (en) | 2018-10-18 | 2019-10-11 | Linear motor for vacuum and vacuum processing apparatus |
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Citations (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US5723933A (en) * | 1994-04-26 | 1998-03-03 | Orto Holding A.G. | Electronically commutated DC machine |
US20110031827A1 (en) * | 2008-04-07 | 2011-02-10 | Energiestro | Energy storage device comprising a flywheel |
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US7184123B2 (en) * | 2004-03-24 | 2007-02-27 | Asml Netherlands B.V. | Lithographic optical system |
EP1806828A4 (en) * | 2004-10-01 | 2016-11-09 | Nikon Corp | Linear motor, stage apparatus and exposure apparatus |
DE102006032765A1 (en) * | 2006-07-14 | 2008-01-17 | Leybold Vacuum Gmbh | vacuum pump |
JP6098923B2 (en) | 2012-12-27 | 2017-03-22 | シンフォニアテクノロジー株式会社 | Transport device |
JP2018151359A (en) * | 2017-03-15 | 2018-09-27 | 株式会社村田製作所 | Contact probe |
WO2020031657A1 (en) * | 2018-08-10 | 2020-02-13 | 東レエンジニアリング株式会社 | Linear motor mechanism and two-axis stage |
-
2018
- 2018-10-18 JP JP2018196327A patent/JP2020065383A/en active Pending
-
2019
- 2019-10-11 US US16/600,010 patent/US11418101B2/en active Active
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Patent Citations (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US5723933A (en) * | 1994-04-26 | 1998-03-03 | Orto Holding A.G. | Electronically commutated DC machine |
US20110031827A1 (en) * | 2008-04-07 | 2011-02-10 | Energiestro | Energy storage device comprising a flywheel |
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US20200126749A1 (en) | 2020-04-23 |
JP2020065383A (en) | 2020-04-23 |
US11418101B2 (en) | 2022-08-16 |
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