US20220256715A1 - 5G mmWAVE COOLING THROUGH PCB - Google Patents

5G mmWAVE COOLING THROUGH PCB Download PDF

Info

Publication number
US20220256715A1
US20220256715A1 US17/390,601 US202117390601A US2022256715A1 US 20220256715 A1 US20220256715 A1 US 20220256715A1 US 202117390601 A US202117390601 A US 202117390601A US 2022256715 A1 US2022256715 A1 US 2022256715A1
Authority
US
United States
Prior art keywords
thermal
mainboard
tim
solder balls
module
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
US17/390,601
Inventor
Divya MANI
William J. Lambert
Shawna Liff
Sergio A. Chan Arguedas
Robert L. Sankman
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Intel Corp
Original Assignee
Intel Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Intel Corp filed Critical Intel Corp
Priority to US17/390,601 priority Critical patent/US20220256715A1/en
Assigned to INTEL CORPORATION reassignment INTEL CORPORATION ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS). Assignors: SANKMAN, ROBERT L., CHAN ARGUEDAS, Sergio A., LAMBERT, WILLIAM J., LIFF, Shawna, MANI, Divya
Publication of US20220256715A1 publication Critical patent/US20220256715A1/en
Pending legal-status Critical Current

Links

Images

Classifications

    • GPHYSICS
    • G06COMPUTING; CALCULATING OR COUNTING
    • G06FELECTRIC DIGITAL DATA PROCESSING
    • G06F1/00Details not covered by groups G06F3/00 - G06F13/00 and G06F21/00
    • G06F1/16Constructional details or arrangements
    • G06F1/20Cooling means
    • G06F1/203Cooling means for portable computers, e.g. for laptops
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L23/00Details of semiconductor or other solid state devices
    • H01L23/12Mountings, e.g. non-detachable insulating substrates
    • H01L23/13Mountings, e.g. non-detachable insulating substrates characterised by the shape
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L23/00Details of semiconductor or other solid state devices
    • H01L23/34Arrangements for cooling, heating, ventilating or temperature compensation ; Temperature sensing arrangements
    • H01L23/36Selection of materials, or shaping, to facilitate cooling or heating, e.g. heatsinks
    • H01L23/367Cooling facilitated by shape of device
    • H01L23/3677Wire-like or pin-like cooling fins or heat sinks
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L23/00Details of semiconductor or other solid state devices
    • H01L23/552Protection against radiation, e.g. light or electromagnetic waves
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L23/00Details of semiconductor or other solid state devices
    • H01L23/58Structural electrical arrangements for semiconductor devices not otherwise provided for, e.g. in combination with batteries
    • H01L23/64Impedance arrangements
    • H01L23/66High-frequency adaptations
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01QANTENNAS, i.e. RADIO AERIALS
    • H01Q23/00Antennas with active circuits or circuit elements integrated within them or attached to them
    • HELECTRICITY
    • H04ELECTRIC COMMUNICATION TECHNIQUE
    • H04BTRANSMISSION
    • H04B1/00Details of transmission systems, not covered by a single one of groups H04B3/00 - H04B13/00; Details of transmission systems not characterised by the medium used for transmission
    • H04B1/38Transceivers, i.e. devices in which transmitter and receiver form a structural unit and in which at least one part is used for functions of transmitting and receiving
    • H04B1/40Circuits
    • HELECTRICITY
    • H05ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05KPRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
    • H05K1/00Printed circuits
    • H05K1/02Details
    • H05K1/0201Thermal arrangements, e.g. for cooling, heating or preventing overheating
    • H05K1/0203Cooling of mounted components
    • H05K1/0204Cooling of mounted components using means for thermal conduction connection in the thickness direction of the substrate
    • HELECTRICITY
    • H05ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05KPRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
    • H05K3/00Apparatus or processes for manufacturing printed circuits
    • H05K3/30Assembling printed circuits with electric components, e.g. with resistor
    • H05K3/32Assembling printed circuits with electric components, e.g. with resistor electrically connecting electric components or wires to printed circuits
    • H05K3/34Assembling printed circuits with electric components, e.g. with resistor electrically connecting electric components or wires to printed circuits by soldering
    • H05K3/3494Heating methods for reflowing of solder
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2223/00Details relating to semiconductor or other solid state devices covered by the group H01L23/00
    • H01L2223/58Structural electrical arrangements for semiconductor devices not otherwise provided for
    • H01L2223/64Impedance arrangements
    • H01L2223/66High-frequency adaptations
    • H01L2223/6661High-frequency adaptations for passive devices
    • H01L2223/6677High-frequency adaptations for passive devices for antenna, e.g. antenna included within housing of semiconductor device
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2223/00Details relating to semiconductor or other solid state devices covered by the group H01L23/00
    • H01L2223/58Structural electrical arrangements for semiconductor devices not otherwise provided for
    • H01L2223/64Impedance arrangements
    • H01L2223/66High-frequency adaptations
    • H01L2223/6683High-frequency adaptations for monolithic microwave integrated circuit [MMIC]
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2224/00Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
    • H01L2224/01Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
    • H01L2224/10Bump connectors; Manufacturing methods related thereto
    • H01L2224/15Structure, shape, material or disposition of the bump connectors after the connecting process
    • H01L2224/16Structure, shape, material or disposition of the bump connectors after the connecting process of an individual bump connector
    • H01L2224/161Disposition
    • H01L2224/16151Disposition the bump connector connecting between a semiconductor or solid-state body and an item not being a semiconductor or solid-state body, e.g. chip-to-substrate, chip-to-passive
    • H01L2224/16221Disposition the bump connector connecting between a semiconductor or solid-state body and an item not being a semiconductor or solid-state body, e.g. chip-to-substrate, chip-to-passive the body and the item being stacked
    • H01L2224/16225Disposition the bump connector connecting between a semiconductor or solid-state body and an item not being a semiconductor or solid-state body, e.g. chip-to-substrate, chip-to-passive the body and the item being stacked the item being non-metallic, e.g. insulating substrate with or without metallisation
    • H01L2224/16227Disposition the bump connector connecting between a semiconductor or solid-state body and an item not being a semiconductor or solid-state body, e.g. chip-to-substrate, chip-to-passive the body and the item being stacked the item being non-metallic, e.g. insulating substrate with or without metallisation the bump connector connecting to a bond pad of the item
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2224/00Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
    • H01L2224/01Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
    • H01L2224/26Layer connectors, e.g. plate connectors, solder or adhesive layers; Manufacturing methods related thereto
    • H01L2224/31Structure, shape, material or disposition of the layer connectors after the connecting process
    • H01L2224/32Structure, shape, material or disposition of the layer connectors after the connecting process of an individual layer connector
    • H01L2224/321Disposition
    • H01L2224/32151Disposition the layer connector connecting between a semiconductor or solid-state body and an item not being a semiconductor or solid-state body, e.g. chip-to-substrate, chip-to-passive
    • H01L2224/32221Disposition the layer connector connecting between a semiconductor or solid-state body and an item not being a semiconductor or solid-state body, e.g. chip-to-substrate, chip-to-passive the body and the item being stacked
    • H01L2224/32245Disposition the layer connector connecting between a semiconductor or solid-state body and an item not being a semiconductor or solid-state body, e.g. chip-to-substrate, chip-to-passive the body and the item being stacked the item being metallic
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2224/00Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
    • H01L2224/73Means for bonding being of different types provided for in two or more of groups H01L2224/10, H01L2224/18, H01L2224/26, H01L2224/34, H01L2224/42, H01L2224/50, H01L2224/63, H01L2224/71
    • H01L2224/732Location after the connecting process
    • H01L2224/73251Location after the connecting process on different surfaces
    • H01L2224/73253Bump and layer connectors
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L23/00Details of semiconductor or other solid state devices
    • H01L23/34Arrangements for cooling, heating, ventilating or temperature compensation ; Temperature sensing arrangements
    • H01L23/42Fillings or auxiliary members in containers or encapsulations selected or arranged to facilitate heating or cooling
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L25/00Assemblies consisting of a plurality of individual semiconductor or other solid state devices ; Multistep manufacturing processes thereof
    • H01L25/03Assemblies consisting of a plurality of individual semiconductor or other solid state devices ; Multistep manufacturing processes thereof all the devices being of a type provided for in the same subgroup of groups H01L27/00 - H01L33/00, or in a single subclass of H10K, H10N, e.g. assemblies of rectifier diodes
    • H01L25/04Assemblies consisting of a plurality of individual semiconductor or other solid state devices ; Multistep manufacturing processes thereof all the devices being of a type provided for in the same subgroup of groups H01L27/00 - H01L33/00, or in a single subclass of H10K, H10N, e.g. assemblies of rectifier diodes the devices not having separate containers
    • H01L25/065Assemblies consisting of a plurality of individual semiconductor or other solid state devices ; Multistep manufacturing processes thereof all the devices being of a type provided for in the same subgroup of groups H01L27/00 - H01L33/00, or in a single subclass of H10K, H10N, e.g. assemblies of rectifier diodes the devices not having separate containers the devices being of a type provided for in group H01L27/00
    • H01L25/0655Assemblies consisting of a plurality of individual semiconductor or other solid state devices ; Multistep manufacturing processes thereof all the devices being of a type provided for in the same subgroup of groups H01L27/00 - H01L33/00, or in a single subclass of H10K, H10N, e.g. assemblies of rectifier diodes the devices not having separate containers the devices being of a type provided for in group H01L27/00 the devices being arranged next to each other
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2924/00Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
    • H01L2924/15Details of package parts other than the semiconductor or other solid state devices to be connected
    • H01L2924/151Die mounting substrate
    • H01L2924/153Connection portion
    • H01L2924/1532Connection portion the connection portion being formed on the die mounting surface of the substrate
    • H01L2924/15321Connection portion the connection portion being formed on the die mounting surface of the substrate being a ball array, e.g. BGA
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2924/00Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
    • H01L2924/15Details of package parts other than the semiconductor or other solid state devices to be connected
    • H01L2924/161Cap
    • H01L2924/1615Shape
    • H01L2924/16152Cap comprising a cavity for hosting the device, e.g. U-shaped cap
    • HELECTRICITY
    • H05ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05KPRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
    • H05K1/00Printed circuits
    • H05K1/02Details
    • H05K1/14Structural association of two or more printed circuits
    • H05K1/141One or more single auxiliary printed circuits mounted on a main printed circuit, e.g. modules, adapters
    • HELECTRICITY
    • H05ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05KPRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
    • H05K2201/00Indexing scheme relating to printed circuits covered by H05K1/00
    • H05K2201/06Thermal details
    • H05K2201/066Heatsink mounted on the surface of the PCB
    • HELECTRICITY
    • H05ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05KPRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
    • H05K2201/00Indexing scheme relating to printed circuits covered by H05K1/00
    • H05K2201/10Details of components or other objects attached to or integrated in a printed circuit board
    • H05K2201/10613Details of electrical connections of non-printed components, e.g. special leads
    • H05K2201/10621Components characterised by their electrical contacts
    • H05K2201/10734Ball grid array [BGA]; Bump grid array
    • HELECTRICITY
    • H05ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05KPRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
    • H05K3/00Apparatus or processes for manufacturing printed circuits
    • H05K3/0058Laminating printed circuit boards onto other substrates, e.g. metallic substrates
    • H05K3/0061Laminating printed circuit boards onto other substrates, e.g. metallic substrates onto a metallic substrate, e.g. a heat sink
    • YGENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10TTECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T29/00Metal working
    • Y10T29/49Method of mechanical manufacture
    • Y10T29/49002Electrical device making
    • Y10T29/49117Conductor or circuit manufacturing
    • Y10T29/49124On flat or curved insulated base, e.g., printed circuit, etc.
    • Y10T29/49128Assembling formed circuit to base
    • YGENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10TTECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T29/00Metal working
    • Y10T29/49Method of mechanical manufacture
    • Y10T29/49002Electrical device making
    • Y10T29/49117Conductor or circuit manufacturing
    • Y10T29/49124On flat or curved insulated base, e.g., printed circuit, etc.
    • Y10T29/4913Assembling to base an electrical component, e.g., capacitor, etc.
    • Y10T29/49144Assembling to base an electrical component, e.g., capacitor, etc. by metal fusion

Definitions

  • Embodiments of the invention are in the field of mmWave transceivers and, in particular, low-cost mmWave transceivers with thermal features integrated into the mainboard.
  • mmWave packaging concept currently of major interest in the industry is to place the die and second level interconnect (SLI) on the bottom side of the package, directly under the antenna layers implemented in the top layer of the package to form a compact, low cost RF module using organic prepreg packaging.
  • SLI second level interconnect
  • high power requirements in these kind of packages leads to bigger cooling challenges because the die is now on the SLI side of the package, where it cannot be cooled from the top as would be done for a conventional flip-chip package.
  • the die is cooled using heat sinks directly in contact with the chip with through holes in the PCB mainboard, which could result in manufacturing/assembly difficulties and thereby increased cost.
  • FIG. 1 is a cross-sectional illustration of a mmWave transceiver system that includes a hole through the mainboard through which a heatsink passes to provide thermal control of dies mounted on the mmWave package.
  • FIG. 2A is a cross-sectional illustration of a mmWave transceiver system that includes a plurality of thermal vias through the mainboard to provide thermal control of dies mounted on the mmWave package, according to an embodiment of the invention.
  • FIG. 2B is a cross-sectional illustration of a mmWave transceiver system that includes a thermally conductive slug through the mainboard to provide thermal control of dies mounted on the mmWave package, according to an embodiment of the invention.
  • FIG. 2C is a cross-sectional illustration of a mmWave transceiver system that includes a thermal feature embedded in the mainboard and directly coupled to a heatsink without thermal interface material, according to an embodiment of the invention.
  • FIG. 3A is a perspective view illustration of a mainboard for a mmWave transceiver system that includes a plurality of embedded thermal features, according to an embodiment of the invention.
  • FIG. 3B is a perspective view illustration of the mainboard for a mmWave transceiver system after a thermal interface material is formed over the embedded thermal features, according to an embodiment of the invention.
  • FIG. 3C is a perspective view illustration of an RF module being placed on the mainboard, according to an embodiment of the invention.
  • FIG. 3D is a perspective view illustration of a mmWave transceiver being reflown with the addition of pressure to mount the RF module to the mainboard, according to an embodiment of the invention.
  • FIG. 4 is a schematic of a computing device built in accordance with an embodiment of the invention.
  • mmWave transceiver systems that include embedded thermal features in the mainboard and methods of forming such mmWave transceiver systems.
  • various aspects of the illustrative implementations will be described using terms commonly employed by those skilled in the art to convey the substance of their work to others skilled in the art. However, it will be apparent to those skilled in the art that the present invention may be practiced with only some of the described aspects. For purposes of explanation, specific numbers, materials and configurations are set forth in order to provide a thorough understanding of the illustrative implementations. However, it will be apparent to one skilled in the art that the present invention may be practiced without the specific details. In other instances, well-known features are omitted or simplified in order not to obscure the illustrative implementations.
  • the RF module includes a plurality of antennas 180 formed on a package substrate 170 .
  • the dies 160 are formed over a bottom surface of the package substrate 170 .
  • An EMI shield 168 is formed over the dies 160 and is thermally coupled to the dies by a TIM layer 141 .
  • a hole 155 is formed through the mainboard 150 .
  • the heat sink 190 is separated from the EMI shield 168 by a second TIM layer 142 .
  • this configuration has a number of potential issues when used for a low-cost, volume product.
  • One such problem is that low-cost heat sinks 190 and EMI shields 168 are used. This is problematic because there will likely be large tolerances in the thickness of the TIM layers since the components are not fabricated with highly controlled and precise package processing technologies. Accordingly, the TIM layers 141 and 142 will have to be very thick and compliant.
  • the increased thickness of the TIM layers 141 and 142 results in a high thermal resistance between the dies 160 and the heat sink 190 and forces a reduction in the thermal design point (TDP).
  • TDP thermal design point
  • an EMI shield 190 and/or heat sink 190 with much thinner TIM layers 141 and 142 (and hence lower thermal resistance) requires precise tolerances in the vertical dimension of FIG. 1 , which requires more costly machining and assembly techniques. Accordingly, the use of such configurations does not allow for low cost mmWave transceivers.
  • embodiments of the present invention transfer the heat effectively from the die on the bottom side of the package to a heat sink on the backside of a mainboard by a low thermal resistance path composed of a thin bondline TIM and slugs and/or thermal vias formed through the thickness of the mainboard.
  • a heat sink or plate attached to the bottom side of the mainboard may aid in the transfer of the heat to the ambient, thereby maintaining the die within the junction temperature (Tj) limit.
  • the assembly process used to form embodiments of the invention will result in a thin TIM layer. Accordingly, the thermal performance is expected to be improved over the configurations requiring holes through the mainboard.
  • the opposite side of the mainboard can then be directly attached to an actively or passively cooled heat sink, which can be flat, and hence easy and low cost to manufacture.
  • the mmWave transceiver 200 may include an RF module that is coupled to a mainboard 250 .
  • the mmWave transceiver 200 may include a plurality of antennas 280 for transmitting and/or receiving radio frequencies that are positioned over or within a package substrate 270 .
  • the antennas 280 are shown as being on a top surface of the package substrate 270 , though it is to be appreciated that the antennas may be covered with solder mask, dielectric, or the like, and are omitted for clarity.
  • the antennas 280 may be used for transmitting and/or receiving mmWave frequencies (e.g., frequencies between approximately 30 GHz and 300 GHz). In some embodiments, the mmWave frequencies may be used in 5G communication networks.
  • the package substrate 270 may include typical organic packaging materials, such as layers of acrylonitrile butadiene styrene (ABS) or prepreg separated by a core material. Additionally, one or more layers of electrical routing (not shown) may be included in the packaging to communicatively couple components in the system.
  • one or more dies 260 may be mounted to a surface of the package substrate 270 opposite from the antennas 280 . As illustrated in FIG. 2A , the two dies 260 are mounted on a bottom surface of the package substrate 270 .
  • the package substrate may be electrically coupled to a mainboard 250 by a plurality of second level interconnects (SLI), such as ball grid array (BGA) balls 272 .
  • SLI second level interconnects
  • BGA ball grid array
  • the size of the BGA balls may be chosen so that after a reflow process (described in greater detail below), the dies 260 compress the TIM 241 to a specified thickness.
  • the BGA balls 272 may be between approximately 500 ⁇ m and 750 ⁇ m. In a particular embodiment, the BGA balls 272 may be between approximately 630 ⁇ m and 700 ⁇ m.
  • the main board may include additional components for processing signals, such as voltage regulators, crystal oscillators, CPUs, memory, baseband processors, low frequency RF transceivers, or the like.
  • the RF module is fed a baseband or intermediate frequency (IF) signal from the mainboard which is mixed to mmWave frequencies, amplified, then transmitted by the antennas 280 .
  • IF intermediate frequency
  • the mixing and amplification may be implemented partially or entirely by one or more of the dies 260 .
  • the reverse operation may be used for receiving mmWave signals.
  • embodiments of the invention may include a plurality of thermal features that are formed through the mainboard 250 . Integrating the thermal features within the mainboard 250 provides significant advantages over forming a hole through the mainboard, as described above. Particularly, the inclusion of integrated thermal features eliminates the need for a discrete heat sink. Instead, the integrated thermal features may be fabricated with more precise packaging processes, thereby allowing the tolerances of the integrated thermal features to be reduced with respect to the discretely fabricated heat sink.
  • the thickness of the TIM 241 between the dies 260 and the integrated thermal features may be reduced.
  • the thickness of the TIM 241 may be less than approximately 50 ⁇ m.
  • the thickness of the TIM 241 may be approximately equal to the average size of the fillers within the TIM 241 .
  • the thickness of the TIM 241 may be less than approximately 40 ⁇ m. Decreasing the thickness of the TIM 241 reduces the thermal resistance between the dies 260 and the thermal features, and therefore, improves the transfer of thermal energy away from the dies 260 .
  • the thickness of the TIM 241 may be reduced by applying pressure to the RF module during reflow of the BGA balls 272 .
  • the integrated thermal features may include a plurality of thermally conductive vias 221 formed through the mainboard 250 .
  • the conductive vias may be any thermally conductive material, such as copper or other metals.
  • the plurality of vias 221 may be formed with existing printed circuit board (PCB) fabrication technologies. In the illustrated embodiment, five vias 221 are formed below each die 260 , however, it is to be appreciated that any number of vias 221 (i.e., one or more vias 221 ) may be formed below each die 260 .
  • Embodiments may also include a heat spreader 230 formed on the opposite surface of the mainboard 250 .
  • the heat spreader 230 may be a passively cooled thermal device, or the heat spreader 230 may be an actively cooled thermal device.
  • the heat spreader 230 is a thermally conductive plate (e.g., a copper plate).
  • embodiments may also include any shaped heat spreader 230 , such as a heat spreader with fins or other features that may improve thermal regulation.
  • the heat spreader 230 has a footprint that is substantially equal to the footprint of the mainboard 250 .
  • embodiments may include a heat spreader 230 that has any sized footprint, depending on the needs of the device.
  • the heat spreader 230 may be a discrete component that is mounted to the main board 230 .
  • the heat spreader 230 may be thermally coupled to the integrated thermal features by a second TIM layer 242 .
  • the TIM layer may be a relatively thin TIM layer 242 due to the improved tolerances of the integrated thermal features and due to the pressure applied during attachment of the heat spreader 230 to the mainboard 250 .
  • the second TIM layer 242 may be less than approximately 50 ⁇ m thick. In an additional embodiment, the second TIM layer 242 may be less than approximately 40 ⁇ m thick.
  • FIG. 2B a cross-sectional illustration of a mmWave transceiver 201 is shown, according to an additional embodiment of the invention.
  • the mmWave transceiver 201 is substantially similar to the mmWave transceiver 200 , with the exception that the integrated thermal features in the mainboard 230 are plugs 222 instead of vias 221 .
  • the plugs 222 may be a thermally conductive material, such as copper or any other metal.
  • the plugs 222 may be formed with existing PCB fabrication processes. Due to the larger cross-section compared to the vias 221 , the plugs 222 may reduce the thermal resistance compared to embodiments where vias 221 are used. While FIGS. 2A and 2B show different integrated thermal features, it is to be appreciated that embodiments of the invention may include combinations of plugs 222 , vias 221 , or any other thermal pathway through the mainboard 230 .
  • FIG. 2C a cross-sectional illustration of a mmWave transceiver 202 is shown, according to an additional embodiment of the invention.
  • the mmWave transceiver 202 is substantially similar to the mmWave transceiver 201 illustrated in FIG. 2B , with the exception that the heat spreader 230 is also integrated with the mainboard 230 .
  • a copper plate may be plated over the backside of the mainboard 230 with known PCB fabrication processes.
  • Such an embodiment is beneficial because it allows for the second TIM layer 242 to be removed. Accordingly, the thermal resistance of the system is reduced.
  • the heat spreader 230 and the integrated thermal features may be considered to be a single component since there is no discernable junction between the two.
  • the heat spreader 230 and the thermal features may be different materials, and a clear junction between the two components may be discernable even when the heat spreader 230 is integrated with the mainboard 250 .
  • embodiments of the invention include a process flow for forming a mmWave transceiver that allows for the thickness of the TIM layer between the dies and the integrated thermal features to be minimized.
  • the minimization of the thickness of the TIM layer is enabled by applying pressure to the RF module during reflow of the BGA balls.
  • the dies compress the TIM layer until they bottom out (i.e., the dies compress the TIM layer as much as possible, leaving a TIM layer that has a thickness approximately equal to the average size of the filler particles in the TIM).
  • the thermal resistance is reduced and the removal of thermal energy from the dies is improved.
  • the mainboard 350 may include a plurality of thermal features 322 integrated into the mainboard 350 , as described above.
  • the thermal features 322 are plugs, but it is to be appreciated that embodiments may use vias with substantially the same process.
  • a plurality of pads 373 may be formed around the thermal features 322 .
  • the pads 373 may be pads on which BGA balls 372 will be placed in order to communicatively couple the mainboard 350 to the RF module.
  • a perspective view of the mainboard 350 after a TIM layer 341 is printed over the thermal features 322 is shown, according to an embodiment of the invention.
  • the TIM layer 341 may be printed over the thermal features with any suitable process, such as stencil printing, ink jetting, or the like.
  • BGA balls (not shown) may also be formed over the pads 373 . The BGA balls may be placed (e.g., pick and placed) or stencil printed onto the pads.
  • a perspective view of the system is shown as the RF module 370 is positioned and placed (as indicated by the arrow) onto the mainboard 350 , according to an embodiment of the invention.
  • the RF module may be placed onto the mainboard 350 so that the dies (mounted to the bottom of the RF module and not visible) are aligned over TIM layer 341 formed over the integrated thermal features.
  • the BGA balls may also be formed on the bottom side of the RF module 370 so that they are positioned on the pads 373 when the RF module 370 is placed on the mainboard 350 .
  • a plurality of antennas 380 are formed on the top surface of the RF module 370 , though it is to be appreciated that the antennas 380 may be embedded within the RF module, or covered by layers of other material, as is described above.
  • the reflow may be accompanied by the application of pressure (as indicated by the arrows) to the RF module in order to allow the dies to compress the TIM layer 341 .
  • the applied pressure may be between approximately 1 gram of downward force and 2000 grams of downward force.
  • Embodiments of the invention may include applying the downward force throughout the reflow process. In alternative embodiments, the downward force may be applied for a period shorter than the reflow of the BGA balls.
  • the application of downward force during the reflow process may also alter the shape of the BGA balls.
  • the downward force in conjunction with the warpage inherent in the reflow process may result in solder bridging between the BGA balls and/or the formation of non-contact opens (NCOs).
  • NCOs non-contact opens
  • the size of the BGA balls may be chosen in order to minimize these manufacturing defects.
  • the BGA balls need to be large enough to minimize the chance of a NCO, but small enough to minimize the chance of solder bridging.
  • BGA balls between approximately 500 ⁇ m and 750 ⁇ m may provide sufficient protection from these defects.
  • BGA balls between approximately 630 ⁇ m and 700 ⁇ m may provide sufficient protection from these defects.
  • FIG. 4 illustrates a computing device 400 in accordance with one implementation of the invention.
  • the computing device 400 houses a board 402 .
  • the board 402 may include a number of components, including but not limited to a processor 404 and at least one communication chip 406 .
  • the processor 404 is physically and electrically coupled to the board 402 .
  • the at least one communication chip 406 is also physically and electrically coupled to the board 402 .
  • the communication chip 406 is part of the processor 404 .
  • computing device 400 may include other components that may or may not be physically and electrically coupled to the board 402 .
  • these other components include, but are not limited to, volatile memory (e.g., DRAM), non-volatile memory (e.g., ROM), flash memory, a graphics processor, a digital signal processor, a crypto processor, a chipset, an antenna, a display, a touchscreen display, a touchscreen controller, a battery, an audio codec, a video codec, a power amplifier, a global positioning system (GPS) device, a compass, an accelerometer, a gyroscope, a speaker, a camera, and a mass storage device (such as hard disk drive, compact disk (CD), digital versatile disk (DVD), and so forth).
  • volatile memory e.g., DRAM
  • non-volatile memory e.g., ROM
  • flash memory e.g., a graphics processor, a digital signal processor, a crypto processor, a chipset, an
  • the communication chip 406 enables wireless communications for the transfer of data to and from the computing device 400 .
  • the term “wireless” and its derivatives may be used to describe circuits, devices, systems, methods, techniques, communications channels, etc., that may communicate data through the use of modulated electromagnetic radiation through a non-solid medium. The term does not imply that the associated devices do not contain any wires, although in some embodiments they might not.
  • the communication chip 406 may implement any of a number of wireless standards or protocols, including but not limited to Wi-Fi (IEEE 802.11 family), WiMAX (IEEE 802.16 family), IEEE 802.20, long term evolution (LTE), Ev-DO, HSPA+, HSDPA+, HSUPA+, EDGE, GSM, GPRS, CDMA, TDMA, DECT, Bluetooth, derivatives thereof, as well as any other wireless protocols that are designated as 3G, 4G, 5G, and beyond.
  • the computing device 400 may include a plurality of communication chips 406 .
  • a first communication chip 406 may be dedicated to shorter range wireless communications such as Wi-Fi and Bluetooth and a second communication chip 406 may be dedicated to longer range wireless communications such as GPS, EDGE, GPRS, CDMA, WiMAX, LTE, Ev-DO, and others.
  • the processor 404 of the computing device 400 includes an integrated circuit die packaged within the processor 404 .
  • the integrated circuit die of the processor may include a die that is mounted to an RF module and thermally coupled to a thermal feature integrated in the mainboard, in accordance with implementations of the invention.
  • the term “processor” may refer to any device or portion of a device that processes electronic data from registers and/or memory to transform that electronic data into other electronic data that may be stored in registers and/or memory.
  • the communication chip 406 also includes an integrated circuit die packaged within the communication chip 406 .
  • the integrated circuit die of the communication chip may include a die that is mounted to an RF module and thermally coupled to a thermal feature integrated in the mainboard, in accordance with implementations of the invention.
  • Example 1 a mmWave transceiver, comprising: an RF module, wherein the RF module comprises: a package substrate; a plurality of antennas formed on the package substrate; and a die attached to a surface of the package substrate; and a mainboard mounted to the RF module with one or more solder balls, wherein a thermal feature is embedded within the mainboard, and wherein the thermal feature is separated from the die by a thermal interface material (TIM) layer.
  • TIM thermal interface material
  • Example 2 the mmWave transceiver of Example 1, wherein the thermal feature is a slug that passes completely through the mainboard.
  • Example 3 the mmWave transceiver of Example 1, wherein the thermal feature is a plurality of vias that pass completely through the mainboard.
  • Example 4 the mmWave transceiver of Example 1, Example 2, or Example 3 further comprising: a heat spreader attached to the mainboard, wherein the heat spreader is coupled to the thermal feature.
  • Example 5 the mmWave transceiver of Example 4, wherein the heat spreader is coupled to the thermal feature by a second TIM layer.
  • Example 6 the mmWave transceiver of Example 4, wherein the heat spreader is directly attached to the thermal feature.
  • Example 7 the mmWave transceiver of Example 1, Example 2, Example 3, Example 4, Example 5, or Example 6, further comprising a plurality of dies and a plurality of thermal features, wherein each die is positioned over one of the thermal features.
  • Example 8 the mmWave transceiver of Example 1, Example 2, Example 3, Example 4, Example 5, Example 6, or Example 7, wherein the TIM layer is less than approximately 50 ⁇ m thick.
  • Example 9 the mmWave transceiver of Example 1, Example 2, Example 3, Example 4, Example 5, Example 6, Example 7, or Example 8, wherein the TIM layer is less than approximately 40 ⁇ m thick.
  • Example 10 the mmWave transceiver of Example 1, Example 2, Example 3, Example 4, Example 5, Example 6, Example 7, Example 8, or Example 9, wherein the TIM layer has a thickness that is approximately equal to the average size of filler particles in the TIM layer.
  • Example 11 the mmWave transceiver of Example 1, Example 2, Example 3, Example 4, Example 5, Example 6, Example 7, Example 8, Example 9, or Example 10, wherein the solder balls are ball grid array (BGA) balls.
  • BGA ball grid array
  • Example 12 the mmWave transceiver of Example 1, Example 2, Example 3, Example 4, Example 5, Example 6, Example 7, Example 8, Example 9, Example 10, or Example 11, wherein the solder balls are between approximately 500 ⁇ m and 750 ⁇ m.
  • Example 13 the mmWave transceiver of Example 1, Example 2, Example 3, Example 4, Example 5, Example 6, Example 7, Example 8, Example 9, Example 10, Example 11, or Example 12, wherein the solder balls are between approximately 630 ⁇ m and 700 ⁇ m.
  • Example 14 a method of forming a mmWave transceiver, comprising: fabricating a mainboard, wherein a plurality of thermal features are embedded within the mainboard; forming a thermal interface material (TIM) layer over the plurality of thermal features; positioning an RF module over the mainboard, wherein the RF module comprises: a plurality of antennas on a package substrate; a plurality of dies on the surface of the package substrate, wherein each of the plurality of dies are aligned over one of the plurality of thermal features and in contact with the TIM layer; and a plurality of solder balls; reflowing the solder balls; and applying pressure to the RF module during the reflowing of the solder balls.
  • TIM thermal interface material
  • Example 15 the method of Example 14, wherein the plurality of dies compress the TIM layer during the application of pressure to the RF module during the reflowing of the solder balls.
  • Example 16 the method of Example 14 or Example 15, wherein the compressed TIM layer has a thickness less than approximately 50 ⁇ m.
  • Example 17 the method of Example 14, Example 15, or Example 16, wherein the compressed TIM layer has a thickness less than approximately 40 ⁇ m.
  • Example 18 the method of Example 14, Example 15, Example 16, or Example 17, wherein the compressed TIM layer has a thickness that is approximately equal to an average thickness of filler particles in the TIM layer.
  • Example 19 the method of Example 14, Example 15, Example 16, Example 17, or Example 18, wherein the thermal features are slugs.
  • Example 20 the method of Example 14, Example 15, Example 16, Example 17, or Example 18, wherein the thermal features are a plurality of vias.
  • Example 21 the method of Example 14, Example 15, Example 16, Example 17, Example 18, Example 19, or Example 20, wherein the solder balls are ball grid array (BGA) balls.
  • BGA ball grid array
  • Example 22 the method of Example 14, Example 15, Example 16, Example 17, Example 18, Example 19, Example 20, or Example 21, wherein the solder balls are between approximately 500 ⁇ m and 750 ⁇ m.
  • Example 23 the method of Example 14, Example 15, Example 16, Example 17, Example 18, Example 19, Example 20, Example 21, or Example 22, wherein the solder balls are between approximately 630 ⁇ m and 700 ⁇ m.
  • Example 24 a mmWave transceiver, comprising: an RF module, wherein the RF module comprises: a package substrate; a plurality of antennas formed on the package substrate; and a plurality of dies attached to a surface of the package substrate; a mainboard mounted to the RF module with one or more solder balls, wherein a plurality of thermal features are embedded within the mainboard, wherein the thermal features are slugs and/or vias, and wherein the thermal features are separated from the dies by a thermal interface material (TIM) layer; and a heat spreader attached to the mainboard, wherein the heat spreader is coupled to the thermal feature.
  • TIM thermal interface material
  • Example 25 the mmWave transceiver of Example 24, wherein the TIM layer is less than approximately 40 ⁇ m thick.

Landscapes

  • Engineering & Computer Science (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Computer Hardware Design (AREA)
  • Theoretical Computer Science (AREA)
  • Power Engineering (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • Human Computer Interaction (AREA)
  • General Engineering & Computer Science (AREA)
  • Signal Processing (AREA)
  • Computer Networks & Wireless Communication (AREA)
  • Manufacturing & Machinery (AREA)
  • Chemical & Material Sciences (AREA)
  • Materials Engineering (AREA)
  • Health & Medical Sciences (AREA)
  • Electromagnetism (AREA)
  • Toxicology (AREA)
  • Cooling Or The Like Of Semiconductors Or Solid State Devices (AREA)
  • Transceivers (AREA)

Abstract

Embodiments of the invention include a mmWave transceiver and methods of forming such devices. In an embodiment, the mmWave transceiver includes an RF module. The RF module may include a package substrate, a plurality of antennas formed on the package substrate, and a die attached to a surface of the package substrate. In an embodiment, the mmWave transceiver may also include a mainboard mounted to the RF module with one or more solder balls. In an embodiment, a thermal feature is embedded within the mainboard, and the thermal feature is separated from the die by a thermal interface material (TIM) layer. According to an embodiment, the thermal features are slugs and/or vias. In an embodiment, the die compresses the TIM layer resulting in a TIM layer with minimal thickness.

Description

    CROSS-REFERENCE TO RELATED APPLICATION
  • This patent application is a divisional of U.S. patent application Ser. No. 16/481,396, filed Jul. 26, 2019, which is a U.S. National Phase application under 35 U.S.C. § 371 of International Application No. PCT/US2017/025664, filed Apr. 1, 2017, entitled “5G mmWAVE COOLING THROUGH PCB,” which designates the United States of America, the entire disclosure of which are hereby incorporated by reference in their entirety and for all purposes.
  • FIELD OF THE INVENTION
  • Embodiments of the invention are in the field of mmWave transceivers and, in particular, low-cost mmWave transceivers with thermal features integrated into the mainboard.
  • BACKGROUND OF THE INVENTION
  • Methods for manufacturing mmWave transceiver systems for phones, tablets, and laptops, as well as small base stations (“pico cells”) at low cost must be developed in order for the market to adopt mmWave communications products. A mmWave packaging concept currently of major interest in the industry is to place the die and second level interconnect (SLI) on the bottom side of the package, directly under the antenna layers implemented in the top layer of the package to form a compact, low cost RF module using organic prepreg packaging. However, high power requirements in these kind of packages leads to bigger cooling challenges because the die is now on the SLI side of the package, where it cannot be cooled from the top as would be done for a conventional flip-chip package. For current RF module designs the die is cooled using heat sinks directly in contact with the chip with through holes in the PCB mainboard, which could result in manufacturing/assembly difficulties and thereby increased cost.
  • BRIEF DESCRIPTION OF THE DRAWINGS
  • FIG. 1 is a cross-sectional illustration of a mmWave transceiver system that includes a hole through the mainboard through which a heatsink passes to provide thermal control of dies mounted on the mmWave package.
  • FIG. 2A is a cross-sectional illustration of a mmWave transceiver system that includes a plurality of thermal vias through the mainboard to provide thermal control of dies mounted on the mmWave package, according to an embodiment of the invention.
  • FIG. 2B is a cross-sectional illustration of a mmWave transceiver system that includes a thermally conductive slug through the mainboard to provide thermal control of dies mounted on the mmWave package, according to an embodiment of the invention.
  • FIG. 2C is a cross-sectional illustration of a mmWave transceiver system that includes a thermal feature embedded in the mainboard and directly coupled to a heatsink without thermal interface material, according to an embodiment of the invention.
  • FIG. 3A is a perspective view illustration of a mainboard for a mmWave transceiver system that includes a plurality of embedded thermal features, according to an embodiment of the invention.
  • FIG. 3B is a perspective view illustration of the mainboard for a mmWave transceiver system after a thermal interface material is formed over the embedded thermal features, according to an embodiment of the invention.
  • FIG. 3C is a perspective view illustration of an RF module being placed on the mainboard, according to an embodiment of the invention.
  • FIG. 3D is a perspective view illustration of a mmWave transceiver being reflown with the addition of pressure to mount the RF module to the mainboard, according to an embodiment of the invention.
  • FIG. 4 is a schematic of a computing device built in accordance with an embodiment of the invention.
  • DETAILED DESCRIPTION OF THE INVENTION
  • Described herein are mmWave transceiver systems that include embedded thermal features in the mainboard and methods of forming such mmWave transceiver systems. In the following description, various aspects of the illustrative implementations will be described using terms commonly employed by those skilled in the art to convey the substance of their work to others skilled in the art. However, it will be apparent to those skilled in the art that the present invention may be practiced with only some of the described aspects. For purposes of explanation, specific numbers, materials and configurations are set forth in order to provide a thorough understanding of the illustrative implementations. However, it will be apparent to one skilled in the art that the present invention may be practiced without the specific details. In other instances, well-known features are omitted or simplified in order not to obscure the illustrative implementations.
  • Various operations will be described as multiple discrete operations, in turn, in a manner that is most helpful in understanding the present invention, however, the order of description should not be construed to imply that these operations are necessarily order dependent. In particular, these operations need not be performed in the order of presentation.
  • As noted above, current systems for low-cost mmWave transceivers require a hole in the mainboard through which a heatsink, heat pipe, or other thermal solution either directly contact the die, or contact an electromagnetic interference (EMI) shield or integrated heat spreader (IHS) which is in thermal contact with the die. An example of such a configuration is shown in the cross-sectional illustration in FIG. 1. As shown in FIG. 1, the RF module includes a plurality of antennas 180 formed on a package substrate 170. The dies 160 are formed over a bottom surface of the package substrate 170. An EMI shield 168 is formed over the dies 160 and is thermally coupled to the dies by a TIM layer 141. In order to allow for a heat sink 190 to mate with the EMI shield 168 over the die 160, a hole 155 is formed through the mainboard 150. The heat sink 190 is separated from the EMI shield 168 by a second TIM layer 142. However, this configuration has a number of potential issues when used for a low-cost, volume product. One such problem is that low-cost heat sinks 190 and EMI shields 168 are used. This is problematic because there will likely be large tolerances in the thickness of the TIM layers since the components are not fabricated with highly controlled and precise package processing technologies. Accordingly, the TIM layers 141 and 142 will have to be very thick and compliant. The increased thickness of the TIM layers 141 and 142 results in a high thermal resistance between the dies 160 and the heat sink 190 and forces a reduction in the thermal design point (TDP). With this configuration, an EMI shield 190 and/or heat sink 190 with much thinner TIM layers 141 and 142 (and hence lower thermal resistance) requires precise tolerances in the vertical dimension of FIG. 1, which requires more costly machining and assembly techniques. Accordingly, the use of such configurations does not allow for low cost mmWave transceivers.
  • Accordingly, embodiments of the present invention transfer the heat effectively from the die on the bottom side of the package to a heat sink on the backside of a mainboard by a low thermal resistance path composed of a thin bondline TIM and slugs and/or thermal vias formed through the thickness of the mainboard. To reduce the die temperatures, the thermal resistance from the die to bottom of the board should be minimal. Additionally, a heat sink or plate attached to the bottom side of the mainboard may aid in the transfer of the heat to the ambient, thereby maintaining the die within the junction temperature (Tj) limit.
  • By transferring heat directly from the die through the mainboard, no holes in the mainboard are required. Furthermore, the assembly process used to form embodiments of the invention will result in a thin TIM layer. Accordingly, the thermal performance is expected to be improved over the configurations requiring holes through the mainboard. The opposite side of the mainboard can then be directly attached to an actively or passively cooled heat sink, which can be flat, and hence easy and low cost to manufacture.
  • Referring now to FIG. 2A, a cross-sectional illustration of a mmWave transceiver 200 is shown according to an embodiment of the invention. According to an embodiment, the mmWave transceiver 200 may include an RF module that is coupled to a mainboard 250. The mmWave transceiver 200 may include a plurality of antennas 280 for transmitting and/or receiving radio frequencies that are positioned over or within a package substrate 270. In the illustrated embodiment, the antennas 280 are shown as being on a top surface of the package substrate 270, though it is to be appreciated that the antennas may be covered with solder mask, dielectric, or the like, and are omitted for clarity. In a particular embodiment, the antennas 280 may be used for transmitting and/or receiving mmWave frequencies (e.g., frequencies between approximately 30 GHz and 300 GHz). In some embodiments, the mmWave frequencies may be used in 5G communication networks. In an embodiment, the package substrate 270 may include typical organic packaging materials, such as layers of acrylonitrile butadiene styrene (ABS) or prepreg separated by a core material. Additionally, one or more layers of electrical routing (not shown) may be included in the packaging to communicatively couple components in the system.
  • In an embodiment, one or more dies 260 may be mounted to a surface of the package substrate 270 opposite from the antennas 280. As illustrated in FIG. 2A, the two dies 260 are mounted on a bottom surface of the package substrate 270. The package substrate may be electrically coupled to a mainboard 250 by a plurality of second level interconnects (SLI), such as ball grid array (BGA) balls 272. In an embodiment, the size of the BGA balls may be chosen so that after a reflow process (described in greater detail below), the dies 260 compress the TIM 241 to a specified thickness. For example, the BGA balls 272 may be between approximately 500 μm and 750 μm. In a particular embodiment, the BGA balls 272 may be between approximately 630 μm and 700 μm.
  • In an embodiment, the main board may include additional components for processing signals, such as voltage regulators, crystal oscillators, CPUs, memory, baseband processors, low frequency RF transceivers, or the like. According to an embodiment, the RF module is fed a baseband or intermediate frequency (IF) signal from the mainboard which is mixed to mmWave frequencies, amplified, then transmitted by the antennas 280. In an embodiment, the mixing and amplification may be implemented partially or entirely by one or more of the dies 260. Similarly, the reverse operation may be used for receiving mmWave signals.
  • In order to regulate the temperature of the dies 260, embodiments of the invention may include a plurality of thermal features that are formed through the mainboard 250. Integrating the thermal features within the mainboard 250 provides significant advantages over forming a hole through the mainboard, as described above. Particularly, the inclusion of integrated thermal features eliminates the need for a discrete heat sink. Instead, the integrated thermal features may be fabricated with more precise packaging processes, thereby allowing the tolerances of the integrated thermal features to be reduced with respect to the discretely fabricated heat sink.
  • Accordingly, the thickness of the TIM 241 between the dies 260 and the integrated thermal features may be reduced. For example, the thickness of the TIM 241 may be less than approximately 50 μm. In an embodiment, the thickness of the TIM 241 may be approximately equal to the average size of the fillers within the TIM 241. In a particular embodiment, the thickness of the TIM 241 may be less than approximately 40 μm. Decreasing the thickness of the TIM 241 reduces the thermal resistance between the dies 260 and the thermal features, and therefore, improves the transfer of thermal energy away from the dies 260. As will be described in greater detail below, the thickness of the TIM 241 may be reduced by applying pressure to the RF module during reflow of the BGA balls 272.
  • In one embodiment, the integrated thermal features may include a plurality of thermally conductive vias 221 formed through the mainboard 250. For example, the conductive vias may be any thermally conductive material, such as copper or other metals. In an embodiment, the plurality of vias 221 may be formed with existing printed circuit board (PCB) fabrication technologies. In the illustrated embodiment, five vias 221 are formed below each die 260, however, it is to be appreciated that any number of vias 221 (i.e., one or more vias 221) may be formed below each die 260.
  • Embodiments may also include a heat spreader 230 formed on the opposite surface of the mainboard 250. In an embodiment, the heat spreader 230 may be a passively cooled thermal device, or the heat spreader 230 may be an actively cooled thermal device. In the particular embodiment illustrated in FIG. 2A, the heat spreader 230 is a thermally conductive plate (e.g., a copper plate). However, embodiments may also include any shaped heat spreader 230, such as a heat spreader with fins or other features that may improve thermal regulation. In the illustrated embodiment, the heat spreader 230 has a footprint that is substantially equal to the footprint of the mainboard 250. However, embodiments may include a heat spreader 230 that has any sized footprint, depending on the needs of the device.
  • According to an embodiment, the heat spreader 230 may be a discrete component that is mounted to the main board 230. In such embodiments, the heat spreader 230 may be thermally coupled to the integrated thermal features by a second TIM layer 242. Similar to above, the TIM layer may be a relatively thin TIM layer 242 due to the improved tolerances of the integrated thermal features and due to the pressure applied during attachment of the heat spreader 230 to the mainboard 250. For example, the second TIM layer 242 may be less than approximately 50 μm thick. In an additional embodiment, the second TIM layer 242 may be less than approximately 40 μm thick.
  • Referring now to FIG. 2B, a cross-sectional illustration of a mmWave transceiver 201 is shown, according to an additional embodiment of the invention. The mmWave transceiver 201 is substantially similar to the mmWave transceiver 200, with the exception that the integrated thermal features in the mainboard 230 are plugs 222 instead of vias 221. In an embodiment, the plugs 222 may be a thermally conductive material, such as copper or any other metal. The plugs 222 may be formed with existing PCB fabrication processes. Due to the larger cross-section compared to the vias 221, the plugs 222 may reduce the thermal resistance compared to embodiments where vias 221 are used. While FIGS. 2A and 2B show different integrated thermal features, it is to be appreciated that embodiments of the invention may include combinations of plugs 222, vias 221, or any other thermal pathway through the mainboard 230.
  • Referring now to FIG. 2C, a cross-sectional illustration of a mmWave transceiver 202 is shown, according to an additional embodiment of the invention. The mmWave transceiver 202 is substantially similar to the mmWave transceiver 201 illustrated in FIG. 2B, with the exception that the heat spreader 230 is also integrated with the mainboard 230. For example, a copper plate may be plated over the backside of the mainboard 230 with known PCB fabrication processes. Such an embodiment is beneficial because it allows for the second TIM layer 242 to be removed. Accordingly, the thermal resistance of the system is reduced. In embodiments where the heat spreader 230 and the integrated thermal features (e.g., a plug 222 or a via 221) are the same material, the heat spreader 230 and the thermal feature 222 may be considered to be a single component since there is no discernable junction between the two. In an additional embodiment, the heat spreader 230 and the thermal features (e.g., a plug 222 or via 221) may be different materials, and a clear junction between the two components may be discernable even when the heat spreader 230 is integrated with the mainboard 250.
  • Referring now to FIGS. 3A-3D, a process flow for forming a mmWave transceiver is shown, according to embodiments of the invention. Particularly, embodiments of the invention include a process flow for forming a mmWave transceiver that allows for the thickness of the TIM layer between the dies and the integrated thermal features to be minimized. The minimization of the thickness of the TIM layer is enabled by applying pressure to the RF module during reflow of the BGA balls. As such, the dies compress the TIM layer until they bottom out (i.e., the dies compress the TIM layer as much as possible, leaving a TIM layer that has a thickness approximately equal to the average size of the filler particles in the TIM). By reducing the thickness of the TIM layer, the thermal resistance is reduced and the removal of thermal energy from the dies is improved.
  • Referring now to FIG. 3A, a perspective view of the mainboard 350 is shown, according to an embodiment of the invention. As illustrated, the mainboard 350 may include a plurality of thermal features 322 integrated into the mainboard 350, as described above. In the illustrated embodiment, the thermal features 322 are plugs, but it is to be appreciated that embodiments may use vias with substantially the same process. In an embodiment, a plurality of pads 373 may be formed around the thermal features 322. The pads 373 may be pads on which BGA balls 372 will be placed in order to communicatively couple the mainboard 350 to the RF module.
  • Referring now to FIG. 3B, a perspective view of the mainboard 350 after a TIM layer 341 is printed over the thermal features 322 is shown, according to an embodiment of the invention. In an embodiment, the TIM layer 341 may be printed over the thermal features with any suitable process, such as stencil printing, ink jetting, or the like. In an embodiment, BGA balls (not shown) may also be formed over the pads 373. The BGA balls may be placed (e.g., pick and placed) or stencil printed onto the pads.
  • Referring now to FIG. 3C, a perspective view of the system is shown as the RF module 370 is positioned and placed (as indicated by the arrow) onto the mainboard 350, according to an embodiment of the invention. In an embodiment, the RF module may be placed onto the mainboard 350 so that the dies (mounted to the bottom of the RF module and not visible) are aligned over TIM layer 341 formed over the integrated thermal features. In an embodiment, the BGA balls may also be formed on the bottom side of the RF module 370 so that they are positioned on the pads 373 when the RF module 370 is placed on the mainboard 350. In the illustrated embodiment, a plurality of antennas 380 are formed on the top surface of the RF module 370, though it is to be appreciated that the antennas 380 may be embedded within the RF module, or covered by layers of other material, as is described above.
  • Referring now to FIG. 3D, a perspective view of the system is shown during a reflow of the BGA balls, according to an embodiment of the invention. As noted above, the reflow may be accompanied by the application of pressure (as indicated by the arrows) to the RF module in order to allow the dies to compress the TIM layer 341. In an embodiment, the applied pressure may be between approximately 1 gram of downward force and 2000 grams of downward force. Embodiments of the invention may include applying the downward force throughout the reflow process. In alternative embodiments, the downward force may be applied for a period shorter than the reflow of the BGA balls.
  • It is to be appreciated that the application of downward force during the reflow process may also alter the shape of the BGA balls. Particularly, the downward force in conjunction with the warpage inherent in the reflow process may result in solder bridging between the BGA balls and/or the formation of non-contact opens (NCOs). Accordingly, the size of the BGA balls may be chosen in order to minimize these manufacturing defects. Generally, the BGA balls need to be large enough to minimize the chance of a NCO, but small enough to minimize the chance of solder bridging. In an embodiment, BGA balls between approximately 500 μm and 750 μm may provide sufficient protection from these defects. In an particular embodiment, BGA balls between approximately 630 μm and 700 μm may provide sufficient protection from these defects.
  • FIG. 4 illustrates a computing device 400 in accordance with one implementation of the invention. The computing device 400 houses a board 402. The board 402 may include a number of components, including but not limited to a processor 404 and at least one communication chip 406. The processor 404 is physically and electrically coupled to the board 402. In some implementations the at least one communication chip 406 is also physically and electrically coupled to the board 402. In further implementations, the communication chip 406 is part of the processor 404.
  • Depending on its applications, computing device 400 may include other components that may or may not be physically and electrically coupled to the board 402. These other components include, but are not limited to, volatile memory (e.g., DRAM), non-volatile memory (e.g., ROM), flash memory, a graphics processor, a digital signal processor, a crypto processor, a chipset, an antenna, a display, a touchscreen display, a touchscreen controller, a battery, an audio codec, a video codec, a power amplifier, a global positioning system (GPS) device, a compass, an accelerometer, a gyroscope, a speaker, a camera, and a mass storage device (such as hard disk drive, compact disk (CD), digital versatile disk (DVD), and so forth).
  • The communication chip 406 enables wireless communications for the transfer of data to and from the computing device 400. The term “wireless” and its derivatives may be used to describe circuits, devices, systems, methods, techniques, communications channels, etc., that may communicate data through the use of modulated electromagnetic radiation through a non-solid medium. The term does not imply that the associated devices do not contain any wires, although in some embodiments they might not. The communication chip 406 may implement any of a number of wireless standards or protocols, including but not limited to Wi-Fi (IEEE 802.11 family), WiMAX (IEEE 802.16 family), IEEE 802.20, long term evolution (LTE), Ev-DO, HSPA+, HSDPA+, HSUPA+, EDGE, GSM, GPRS, CDMA, TDMA, DECT, Bluetooth, derivatives thereof, as well as any other wireless protocols that are designated as 3G, 4G, 5G, and beyond. The computing device 400 may include a plurality of communication chips 406. For instance, a first communication chip 406 may be dedicated to shorter range wireless communications such as Wi-Fi and Bluetooth and a second communication chip 406 may be dedicated to longer range wireless communications such as GPS, EDGE, GPRS, CDMA, WiMAX, LTE, Ev-DO, and others.
  • The processor 404 of the computing device 400 includes an integrated circuit die packaged within the processor 404. In some implementations of the invention, the integrated circuit die of the processor may include a die that is mounted to an RF module and thermally coupled to a thermal feature integrated in the mainboard, in accordance with implementations of the invention. The term “processor” may refer to any device or portion of a device that processes electronic data from registers and/or memory to transform that electronic data into other electronic data that may be stored in registers and/or memory.
  • The communication chip 406 also includes an integrated circuit die packaged within the communication chip 406. In accordance with another implementation of the invention, the integrated circuit die of the communication chip may include a die that is mounted to an RF module and thermally coupled to a thermal feature integrated in the mainboard, in accordance with implementations of the invention.
  • The above description of illustrated implementations of the invention, including what is described in the Abstract, is not intended to be exhaustive or to limit the invention to the precise forms disclosed. While specific implementations of, and examples for, the invention are described herein for illustrative purposes, various equivalent modifications are possible within the scope of the invention, as those skilled in the relevant art will recognize.
  • These modifications may be made to the invention in light of the above detailed description. The terms used in the following claims should not be construed to limit the invention to the specific implementations disclosed in the specification and the claims. Rather, the scope of the invention is to be determined entirely by the following claims, which are to be construed in accordance with established doctrines of claim interpretation.
  • Example 1: a mmWave transceiver, comprising: an RF module, wherein the RF module comprises: a package substrate; a plurality of antennas formed on the package substrate; and a die attached to a surface of the package substrate; and a mainboard mounted to the RF module with one or more solder balls, wherein a thermal feature is embedded within the mainboard, and wherein the thermal feature is separated from the die by a thermal interface material (TIM) layer.
  • Example 2: the mmWave transceiver of Example 1, wherein the thermal feature is a slug that passes completely through the mainboard.
  • Example 3: the mmWave transceiver of Example 1, wherein the thermal feature is a plurality of vias that pass completely through the mainboard.
  • Example 4: the mmWave transceiver of Example 1, Example 2, or Example 3 further comprising: a heat spreader attached to the mainboard, wherein the heat spreader is coupled to the thermal feature.
  • Example 5: the mmWave transceiver of Example 4, wherein the heat spreader is coupled to the thermal feature by a second TIM layer.
  • Example 6: the mmWave transceiver of Example 4, wherein the heat spreader is directly attached to the thermal feature.
  • Example 7: the mmWave transceiver of Example 1, Example 2, Example 3, Example 4, Example 5, or Example 6, further comprising a plurality of dies and a plurality of thermal features, wherein each die is positioned over one of the thermal features.
  • Example 8: the mmWave transceiver of Example 1, Example 2, Example 3, Example 4, Example 5, Example 6, or Example 7, wherein the TIM layer is less than approximately 50 μm thick.
  • Example 9: the mmWave transceiver of Example 1, Example 2, Example 3, Example 4, Example 5, Example 6, Example 7, or Example 8, wherein the TIM layer is less than approximately 40 μm thick.
  • Example 10: the mmWave transceiver of Example 1, Example 2, Example 3, Example 4, Example 5, Example 6, Example 7, Example 8, or Example 9, wherein the TIM layer has a thickness that is approximately equal to the average size of filler particles in the TIM layer.
  • Example 11: the mmWave transceiver of Example 1, Example 2, Example 3, Example 4, Example 5, Example 6, Example 7, Example 8, Example 9, or Example 10, wherein the solder balls are ball grid array (BGA) balls.
  • Example 12: the mmWave transceiver of Example 1, Example 2, Example 3, Example 4, Example 5, Example 6, Example 7, Example 8, Example 9, Example 10, or Example 11, wherein the solder balls are between approximately 500 μm and 750 μm.
  • Example 13: the mmWave transceiver of Example 1, Example 2, Example 3, Example 4, Example 5, Example 6, Example 7, Example 8, Example 9, Example 10, Example 11, or Example 12, wherein the solder balls are between approximately 630 μm and 700 μm.
  • Example 14: a method of forming a mmWave transceiver, comprising: fabricating a mainboard, wherein a plurality of thermal features are embedded within the mainboard; forming a thermal interface material (TIM) layer over the plurality of thermal features; positioning an RF module over the mainboard, wherein the RF module comprises: a plurality of antennas on a package substrate; a plurality of dies on the surface of the package substrate, wherein each of the plurality of dies are aligned over one of the plurality of thermal features and in contact with the TIM layer; and a plurality of solder balls; reflowing the solder balls; and applying pressure to the RF module during the reflowing of the solder balls.
  • Example 15: the method of Example 14, wherein the plurality of dies compress the TIM layer during the application of pressure to the RF module during the reflowing of the solder balls.
  • Example 16: the method of Example 14 or Example 15, wherein the compressed TIM layer has a thickness less than approximately 50 μm.
  • Example 17: the method of Example 14, Example 15, or Example 16, wherein the compressed TIM layer has a thickness less than approximately 40 μm.
  • Example 18: the method of Example 14, Example 15, Example 16, or Example 17, wherein the compressed TIM layer has a thickness that is approximately equal to an average thickness of filler particles in the TIM layer.
  • Example 19: the method of Example 14, Example 15, Example 16, Example 17, or Example 18, wherein the thermal features are slugs.
  • Example 20: the method of Example 14, Example 15, Example 16, Example 17, or Example 18, wherein the thermal features are a plurality of vias.
  • Example 21: the method of Example 14, Example 15, Example 16, Example 17, Example 18, Example 19, or Example 20, wherein the solder balls are ball grid array (BGA) balls.
  • Example 22: the method of Example 14, Example 15, Example 16, Example 17, Example 18, Example 19, Example 20, or Example 21, wherein the solder balls are between approximately 500 μm and 750 μm.
  • Example 23: the method of Example 14, Example 15, Example 16, Example 17, Example 18, Example 19, Example 20, Example 21, or Example 22, wherein the solder balls are between approximately 630 μm and 700 μm.
  • Example 24: a mmWave transceiver, comprising: an RF module, wherein the RF module comprises: a package substrate; a plurality of antennas formed on the package substrate; and a plurality of dies attached to a surface of the package substrate; a mainboard mounted to the RF module with one or more solder balls, wherein a plurality of thermal features are embedded within the mainboard, wherein the thermal features are slugs and/or vias, and wherein the thermal features are separated from the dies by a thermal interface material (TIM) layer; and a heat spreader attached to the mainboard, wherein the heat spreader is coupled to the thermal feature.
  • Example 25: the mmWave transceiver of Example 24, wherein the TIM layer is less than approximately 40 μm thick.

Claims (20)

What is claimed is:
1. A method of forming a mmWave transceiver, comprising:
fabricating a mainboard, wherein a plurality of thermal features are embedded within the mainboard;
forming a thermal interface material (TIM) layer over the plurality of thermal features;
positioning an RF module over the mainboard, wherein the RF module comprises:
a plurality of antennas on a package substrate;
a plurality of dies on the surface of the package substrate, wherein each of the plurality of dies are aligned over one of the plurality of thermal features and in contact with the TIM layer; and
a plurality of solder balls;
reflowing the solder balls; and
applying pressure to the RF module during the reflowing of the solder balls.
2. The method of claim 1, wherein the plurality of dies compress the TIM layer during the application of pressure to the RF module during the reflowing of the solder balls.
3. The method of claim 2, wherein the compressed TIM layer has a thickness less than approximately 50 μm.
4. The method of claim 3, wherein the compressed TIM layer has a thickness less than approximately 40 μm.
5. The method of claim 2, wherein the compressed TIM layer has a thickness that is approximately equal to an average thickness of filler particles in the TIM layer.
6. The method of claim 1, wherein the thermal features are slugs.
7. The method of claim 1, wherein the thermal features are a plurality of vias.
8. The method of claim 1, wherein the solder balls are ball grid array (BGA) balls.
9. The method of claim 8, wherein the solder balls are between approximately 500 μm and 750 μm.
10. The method of claim 9, wherein the solder balls are between approximately 630 μm and 700 μm.
11. A method of fabricating a mmWave transceiver, the method comprising:
forming an RF module, wherein the RF module comprises:
a package substrate;
a plurality of antennas formed on the package substrate;
a first die attached to a surface of the package substrate; and
a second die attached to the surface of the package substrate; and
mounting a mainboard to the RF module with a plurality of solder balls, wherein a thermal feature is embedded within the mainboard, wherein the thermal feature is separated from the first die and the second die by a thermal interface material (TIM) layer, and wherein the first die and the second die are within a region inside of a footprint of the plurality of solder balls.
12. The method of claim 11, wherein the thermal feature is a slug that passes completely through the mainboard.
13. The method of claim 11, wherein the thermal feature is a plurality of vias that pass completely through the mainboard.
14. The method of claim 11, further comprising:
attaching a heat spreader to the mainboard, wherein the heat spreader is coupled to the thermal feature.
15. The method of claim 14, wherein the heat spreader is coupled to the thermal feature by a second TIM layer.
16. The method of claim 14, wherein the heat spreader is directly attached to the thermal feature.
17. The method of claim 11, wherein the TIM layer is less than approximately 50 μm thick.
18. The method of claim 17, wherein the TIM layer is less than approximately 40 μm thick.
19. The method of claim 11, wherein the TIM layer has a thickness that is approximately equal to the average size of filler particles in the TIM layer.
20. The method of claim 11, wherein the solder balls are ball grid array (BGA) balls.
US17/390,601 2017-04-01 2021-07-30 5G mmWAVE COOLING THROUGH PCB Pending US20220256715A1 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
US17/390,601 US20220256715A1 (en) 2017-04-01 2021-07-30 5G mmWAVE COOLING THROUGH PCB

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
PCT/US2017/025664 WO2018182756A1 (en) 2017-04-01 2017-04-01 5G mmWAVE COOLING THROUGH PCB
US201916481396A 2019-07-26 2019-07-26
US17/390,601 US20220256715A1 (en) 2017-04-01 2021-07-30 5G mmWAVE COOLING THROUGH PCB

Related Parent Applications (2)

Application Number Title Priority Date Filing Date
PCT/US2017/025664 Continuation WO2018182756A1 (en) 2017-04-01 2017-04-01 5G mmWAVE COOLING THROUGH PCB
US16/481,396 Continuation US11112841B2 (en) 2017-04-01 2017-04-01 5G mmWave cooling through PCB

Publications (1)

Publication Number Publication Date
US20220256715A1 true US20220256715A1 (en) 2022-08-11

Family

ID=63678159

Family Applications (2)

Application Number Title Priority Date Filing Date
US16/481,396 Active US11112841B2 (en) 2017-04-01 2017-04-01 5G mmWave cooling through PCB
US17/390,601 Pending US20220256715A1 (en) 2017-04-01 2021-07-30 5G mmWAVE COOLING THROUGH PCB

Family Applications Before (1)

Application Number Title Priority Date Filing Date
US16/481,396 Active US11112841B2 (en) 2017-04-01 2017-04-01 5G mmWave cooling through PCB

Country Status (2)

Country Link
US (2) US11112841B2 (en)
WO (1) WO2018182756A1 (en)

Families Citing this family (12)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2019066998A1 (en) * 2017-09-30 2019-04-04 Intel Corporation Stacked package with electrical connections created using high throughput additive manufacturing
KR102209123B1 (en) 2017-12-19 2021-01-28 삼성전자 주식회사 A module including an antenna and a radio frequency device and base station including the module
US11304334B2 (en) * 2018-06-14 2022-04-12 Microsoft Technology Licensing, Llc Vapor chamber having an electromagnetic shielding layer and methods of manufacturing the same
CN110798961B (en) * 2018-08-01 2022-10-21 苏州旭创科技有限公司 Circuit board and optical module with same
CN110190376B (en) * 2018-12-31 2020-12-04 杭州臻镭微波技术有限公司 Radio frequency system-in-package module with antenna combined with liquid cooling heat dissipation structure and manufacturing method thereof
CN111725607B (en) * 2019-03-20 2021-09-14 Oppo广东移动通信有限公司 Millimeter wave antenna module and electronic equipment
WO2020200444A1 (en) * 2019-04-03 2020-10-08 Huawei Technologies Co., Ltd. Partitioning of antenna device
CN110797624B (en) * 2019-11-08 2021-11-30 成都华芯天微科技有限公司 High-power tile-type phased array antenna
WO2022093996A1 (en) * 2020-10-27 2022-05-05 Mixcomm, Inc. Methods and apparatus for implementing antenna assemblies and/or combining antenna assemblies to form arrays
CN116670822A (en) * 2020-12-28 2023-08-29 京瓷株式会社 Antenna device
US11910518B2 (en) 2021-05-26 2024-02-20 Huawei Technologies Canada Co., Ltd. Method and apparatus for heat sink mounting
US11733154B2 (en) * 2021-08-16 2023-08-22 International Business Machines Corporation Thermal interface material detection through compression

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US20150262904A1 (en) * 2014-03-14 2015-09-17 Taiwan Semiconductor Manufacturing Company, Ltd. Package with Embedded Heat Dissipation Features
US20160372448A1 (en) * 2015-05-20 2016-12-22 Broadpak Corporation Semiconductor structure and a method of making thereof

Family Cites Families (15)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6882042B2 (en) * 2000-12-01 2005-04-19 Broadcom Corporation Thermally and electrically enhanced ball grid array packaging
US6900535B2 (en) * 2002-05-01 2005-05-31 Stmicroelectronics, Inc. BGA/LGA with built in heat slug/spreader
JP3533665B1 (en) * 2002-12-17 2004-05-31 オムロン株式会社 A method for manufacturing an electronic component module and a method for manufacturing a data carrier capable of reading electromagnetic waves.
US7042729B2 (en) * 2003-06-24 2006-05-09 Intel Corporation Thermal interface apparatus, systems, and fabrication methods
US7199466B2 (en) * 2004-05-03 2007-04-03 Intel Corporation Package design using thermal linkage from die to printed circuit board
US7411281B2 (en) * 2004-06-21 2008-08-12 Broadcom Corporation Integrated circuit device package having both wire bond and flip-chip interconnections and method of making the same
US7915081B2 (en) * 2006-03-31 2011-03-29 Intel Corporation Flexible interconnect pattern on semiconductor package
US8411444B2 (en) * 2010-09-15 2013-04-02 International Business Machines Corporation Thermal interface material application for integrated circuit cooling
US20120159118A1 (en) * 2010-12-16 2012-06-21 Wong Shaw Fong Lower IC Package Structure for Coupling with an Upper IC Package to Form a Package-On-Package (PoP) Assembly and PoP Assembly Including Such a Lower IC Package Structure
US9297971B2 (en) * 2013-04-26 2016-03-29 Oracle International Corporation Hybrid-integrated photonic chip package with an interposer
KR20140130920A (en) * 2013-05-02 2014-11-12 삼성전자주식회사 Package on package device and method of fabricating the device
GB2530675B (en) 2013-06-18 2019-03-06 Intel Corp Integrated thermoelectric cooling
KR20150058940A (en) * 2013-11-21 2015-05-29 삼성전자주식회사 Semiconductor package having heat spreader
DE112015006975T5 (en) * 2015-09-25 2019-05-09 Intel Corporation Microelectronic package with wireless interconnection
US9881908B2 (en) * 2016-01-15 2018-01-30 Taiwan Semiconductor Manufacturing Company, Ltd. Integrated fan-out package on package structure and methods of forming same

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US20150262904A1 (en) * 2014-03-14 2015-09-17 Taiwan Semiconductor Manufacturing Company, Ltd. Package with Embedded Heat Dissipation Features
US20160372448A1 (en) * 2015-05-20 2016-12-22 Broadpak Corporation Semiconductor structure and a method of making thereof

Also Published As

Publication number Publication date
US20190377392A1 (en) 2019-12-12
WO2018182756A1 (en) 2018-10-04
US11112841B2 (en) 2021-09-07

Similar Documents

Publication Publication Date Title
US20220256715A1 (en) 5G mmWAVE COOLING THROUGH PCB
US10593636B2 (en) Platform with thermally stable wireless interconnects
US10763217B2 (en) Semiconductor package and antenna module including the same
US11430751B2 (en) Microelectronic devices designed with 3D stacked ultra thin package modules for high frequency communications
US10887439B2 (en) Microelectronic devices designed with integrated antennas on a substrate
US10867882B2 (en) Semiconductor package, semiconductor device and method for packaging semiconductor device
US11676907B2 (en) Semiconductor package and antenna module comprising the same
US11387175B2 (en) Interposer package-on-package (PoP) with solder array thermal contacts
TWI578450B (en) Techniques and configurations associated with a package load assembly
US20230343723A1 (en) Soldered metallic reservoirs for enhanced transient and steady-state thermal performance
US10424559B2 (en) Thermal management of molded packages
US10128205B2 (en) Embedded die flip-chip package assembly
US11259399B2 (en) Socket with thermal conductor
WO2018063624A1 (en) A package with thermal coupling
US10276483B2 (en) Coaxial vias
US11538731B2 (en) Thermal solutions for package on package (PoP) architectures
US11616283B2 (en) 5G mmWave antenna architecture with thermal management
CN107851622B (en) Low thermal resistance suspension die package
US20230397323A1 (en) Package bottom side thermal solution with discrete hat-shaped copper spreader component
US20170092618A1 (en) Package topside ball grid array for ultra low z-height

Legal Events

Date Code Title Description
AS Assignment

Owner name: INTEL CORPORATION, CALIFORNIA

Free format text: ASSIGNMENT OF ASSIGNORS INTEREST;ASSIGNORS:MANI, DIVYA;LAMBERT, WILLIAM J.;LIFF, SHAWNA;AND OTHERS;SIGNING DATES FROM 20170602 TO 20170605;REEL/FRAME:057108/0700

STPP Information on status: patent application and granting procedure in general

Free format text: DOCKETED NEW CASE - READY FOR EXAMINATION

STPP Information on status: patent application and granting procedure in general

Free format text: NON FINAL ACTION MAILED

STPP Information on status: patent application and granting procedure in general

Free format text: RESPONSE TO NON-FINAL OFFICE ACTION ENTERED AND FORWARDED TO EXAMINER

STPP Information on status: patent application and granting procedure in general

Free format text: FINAL REJECTION MAILED