US20220011085A1 - Inductive position sensor comprising at least one transmit coil, an absolute position receive coil pair, a high-resolution position receive coil pair and a conductive moving target - Google Patents

Inductive position sensor comprising at least one transmit coil, an absolute position receive coil pair, a high-resolution position receive coil pair and a conductive moving target Download PDF

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Publication number
US20220011085A1
US20220011085A1 US17/371,908 US202117371908A US2022011085A1 US 20220011085 A1 US20220011085 A1 US 20220011085A1 US 202117371908 A US202117371908 A US 202117371908A US 2022011085 A1 US2022011085 A1 US 2022011085A1
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United States
Prior art keywords
position sensor
receive coil
inductive position
inductive
coil pair
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Pending
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US17/371,908
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English (en)
Inventor
Rudolf Pichler
Andreas Buchinger
Ruggero Leoncavallo
Bence Gombor
Harald Hartl
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Renesas Electronics America Inc
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Renesas Electronics America Inc
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Publication of US20220011085A1 publication Critical patent/US20220011085A1/en
Assigned to RENESAS ELECTRONICS AMERICA INC. reassignment RENESAS ELECTRONICS AMERICA INC. ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS). Assignors: BUCHINGER, Andreas, GOMBOR, Bence, HARTL, Harald, LEONCAVALLO, RUGGERO, PICHLER, RUDOLF
Pending legal-status Critical Current

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    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B7/00—Measuring arrangements characterised by the use of electric or magnetic techniques
    • G01B7/003—Measuring arrangements characterised by the use of electric or magnetic techniques for measuring position, not involving coordinate determination
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01D—MEASURING NOT SPECIALLY ADAPTED FOR A SPECIFIC VARIABLE; ARRANGEMENTS FOR MEASURING TWO OR MORE VARIABLES NOT COVERED IN A SINGLE OTHER SUBCLASS; TARIFF METERING APPARATUS; MEASURING OR TESTING NOT OTHERWISE PROVIDED FOR
    • G01D5/00—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable
    • G01D5/12—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable using electric or magnetic means
    • G01D5/14—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable using electric or magnetic means influencing the magnitude of a current or voltage
    • G01D5/20—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable using electric or magnetic means influencing the magnitude of a current or voltage by varying inductance, e.g. by a movable armature
    • G01D5/204—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable using electric or magnetic means influencing the magnitude of a current or voltage by varying inductance, e.g. by a movable armature by influencing the mutual induction between two or more coils
    • G01D5/2053—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable using electric or magnetic means influencing the magnitude of a current or voltage by varying inductance, e.g. by a movable armature by influencing the mutual induction between two or more coils by a movable non-ferromagnetic conductive element
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01D—MEASURING NOT SPECIALLY ADAPTED FOR A SPECIFIC VARIABLE; ARRANGEMENTS FOR MEASURING TWO OR MORE VARIABLES NOT COVERED IN A SINGLE OTHER SUBCLASS; TARIFF METERING APPARATUS; MEASURING OR TESTING NOT OTHERWISE PROVIDED FOR
    • G01D5/00—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable
    • G01D5/12—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable using electric or magnetic means
    • G01D5/14—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable using electric or magnetic means influencing the magnitude of a current or voltage
    • G01D5/20—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable using electric or magnetic means influencing the magnitude of a current or voltage by varying inductance, e.g. by a movable armature
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01D—MEASURING NOT SPECIALLY ADAPTED FOR A SPECIFIC VARIABLE; ARRANGEMENTS FOR MEASURING TWO OR MORE VARIABLES NOT COVERED IN A SINGLE OTHER SUBCLASS; TARIFF METERING APPARATUS; MEASURING OR TESTING NOT OTHERWISE PROVIDED FOR
    • G01D5/00—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable
    • G01D5/12—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable using electric or magnetic means
    • G01D5/14—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable using electric or magnetic means influencing the magnitude of a current or voltage
    • G01D5/20—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable using electric or magnetic means influencing the magnitude of a current or voltage by varying inductance, e.g. by a movable armature
    • G01D5/204—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable using electric or magnetic means influencing the magnitude of a current or voltage by varying inductance, e.g. by a movable armature by influencing the mutual induction between two or more coils
    • G01D5/2073—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable using electric or magnetic means influencing the magnitude of a current or voltage by varying inductance, e.g. by a movable armature by influencing the mutual induction between two or more coils by movement of a single coil with respect to two or more coils
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01F—MAGNETS; INDUCTANCES; TRANSFORMERS; SELECTION OF MATERIALS FOR THEIR MAGNETIC PROPERTIES
    • H01F5/00—Coils
    • H01F5/003—Printed circuit coils

Definitions

  • the invention relates to an inductive position sensor comprising at least one transmit coil, an absolute position receive coil pair, a high-resolution position receive coil pair and a conductive moving target.
  • the invention further relates to a use of such an inductive position sensor.
  • Inductive position sensors are very popular because of their robustness against environmental influences. Especially for through-shaft applications the inductive sensors are attractive because of the design flexibility in coil design which easily allows to adapt for example on-axis and off-axis position sensing applications.
  • An inductive position sensor setup usually consists of a sensor printed circuit board (PCB) inside a housing and a conductive target moving near to the sensor.
  • PCB sensor printed circuit board
  • the sensor PCB includes a signal conditioning and processing unit which is usually an application-specific integrated circuit (ASIC) and a sensor coil system connected to the ASIC.
  • the sensor coil system consisting of one or more transmit coils and one or more receive coils.
  • the two receiver coils are arranged such that one generates a sine and the other a cosine signal every 360° mechanical rotation of the target for a rotational position sensor. This configuration provides the absolute position of the target (absolute embodiment).
  • state of the art sensor can be implemented by using two separate absolute and incremental sensors and separate targets or by using two separate coil systems next to each other, but such implementation has quite high space requirement.
  • the drawbacks of separate sensors are for example: Thicker sensor, 2 ⁇ PCB, 2 ⁇ target, additional wiring to connect to the evaluation unit—MCU, leads to higher cost.
  • the drawbacks of separate coils next to each other are for example: size of the PCB (cost), limited chances to scale it down.
  • an inductive position sensor comprising at least one transmit coil, an absolute position receive coil pair, a high-resolution position receive coil pair and a conductive moving target,
  • the absolute position receive coil pair and the high-resolution receive coil pair together define a measurement area of the inductive position sensor and the moving target can move in this measurement area
  • the absolute position coil pair has a first sine receive coil and a first cosine receive coil, both having one period over the measurement area of the inductive position sensor,
  • the high-resolution position receive coil pair has a second sine receive coil and a second cosine receive coil, both having at least two periods over the measurement area of the inductive position sensor,
  • the absolute position receive coil pair and the high-resolution position receive coil pair are arranged in the same area of a printed-circuit board of the inductive position sensor.
  • the invention describes a new way of combining a lower resolution absolute sensor with a high-resolution incremental sensor. Generally, it is simply possible by just using a combination of an absolute inductive position sensor next to an incremental high-resolution position sensor, but this approach needs a lot of space which is typically not available.
  • This invention is about an innovative embodiment which consists of overlapping the absolute position sensor with the multi-period high-resolution sensor to increase the mechanical accuracy and resolution without losing the absolute position. As a result a high-accuracy, high-resolution absolute sensor can be designed.
  • the new implementation according to the invention incorporates both absolute and high-resolution coil at the same PCB area.
  • the inductive position sensor is a radial position sensor and the measurement area is a 360° circle.
  • the inductive sensor is a linear position sensor and the measurement area is a straight line.
  • the inductive position sensor comprises a signal processing unit, for providing a signal to the at least one transmit coil and/or for processing the signals of the absolute position receive coil pair and the high-resolution receive coil pair.
  • the signal processing unit is arranged on the same printed-circuit board as the inductive position sensor or externally connected to the printed-circuit board of the inductive position sensor.
  • the sensor configuration can be used with different target configuration.
  • the performance of the implementation strongly depends on the target configuration.
  • the conductive target comprises multiple sections spaced apart from each other.
  • the multiple sections of the conductive moving target have the same shape and/or spacing.
  • the moving target comprises at least one first target element and at least one second target element, wherein the shape of the at least one first target element is different to the shape of the at least one second target element.
  • the at least one first target element and the at least one second target element are preferably arranged on a common substrate, like a printed-circuit board.
  • the first target element and/or the second target element comprise multiple sections.
  • the radial area covered by the at least one first target element, particularly of each section of the at least one first target element, is constant in the radial direction, i.e. the width of each section increases constantly from the center to the radial outside.
  • the at least one first target element covers the complete measurement area of the inductive position sensor or the measurement area of the inductive position sensor not covered by the at least one second target element.
  • the at least one second target element covers a part of the measurement area of the inductive position sensor.
  • the at least one second target element has a semi-circular shape, an arc segment of a full ring shape, a rectangular shape or an arrow shape.
  • the radial area covered by the at least one second target element changes in the radial direction, i.e. for example the width of the at least one second target element is constant in the radial direction (rectangular) or changes in a rate different than the radially covered area (arrow).
  • the at least one first target element and the at least one second target element are arranged next to each other or are at least partially overlapping each other.
  • the at least one first target element and the at least one second target element are totally overlapping but having different sizes.
  • one target element is bigger than the other target element, so that the bigger target element completely covers the smaller target element.
  • the invention further relates to a use of an inductive position sensor according to the invention together with another inductive position sensor according to the invention or any other position sensor to calculate further output signals such as torque, diagnostic information or error compensation.
  • FIG. 1 a schematic view of a first embodiment of an inductive position sensor according to the invention
  • FIG. 2 a schematic view of a second embodiment of an inductive position sensor according to the invention
  • FIG. 3 a first embodiment of a conductive moving target
  • FIG. 4 a second embodiment of a conductive moving target
  • FIG. 5 a third embodiment of a conductive moving target
  • FIG. 6 a fourth embodiment of a conductive moving target
  • FIG. 7 a fifth embodiment of a conductive moving target
  • FIG. 8 a sixth embodiment of a conductive moving target
  • FIGS. 9 a , 9 b performance comparisons for different embodiments of the conductive moving target
  • FIG. 10 outputs of an inductive position sensor according to the invention after signal processing
  • FIG. 11 a schematic view of a third embodiment of an inductive position sensor according to the invention.
  • FIG. 1 shows a schematic view of a first embodiment of an inductive position sensor 1 according to the invention.
  • the inductive position sensor 1 comprises a transmit coil 2 , an absolute position receive coil pair 3 , 4 , a high-resolution receive coil pair 5 , 6 and a conductive moving target 7 .
  • the absolute position receive coil pair 3 , 4 and the high-resolution receive coil pair 5 , 6 together define a measurement area of the inductive position sensor 1 and the moving target 7 can move in this measurement area.
  • the first embodiment shown in FIG. 1 refers to a radial inductive position sensor 1 and the measurement area is a 360° circle.
  • the absolute position coil pair 3 , 4 has a first sine receive coil 3 and a first cosine receive coil 4 , both 3 , 4 having one period over the measurement area of the inductive position sensor 1 .
  • the high-resolution position receive coil pair 5 , 6 has a second sine receive coil 5 and a second cosine receive coil 6 , both 5 , 6 having at least two periods over the measurement area of the inductive position sensor 1 .
  • the second sine receive coil 5 and a second cosine receive coil 6 each have 8-periods over the measurement area.
  • the absolute position receive coil pair 3 , 4 and the high-resolution position receive coil pair 5 , 6 are arranged in the same area of a printed-circuit board 8 of the inductive position sensor 1 .
  • the inductive position sensor 1 shown in FIG. 1 further comprises a signal processing unit 9 , for providing a signal to the at least one transmit coil 2 and for processing the signals of the absolute position receive coil pair 3 , 4 and the high-resolution receive coil pair 5 , 6 .
  • the signal processing unit 9 is externally connected to the printed-circuit board 8 of the inductive position sensor 1 .
  • the signal processing unit 9 is arranged on the same printed-circuit board 8 as the inductive position sensor 1 .
  • the connections between the signal processing unit 9 and the transmit coil 2 , the absolute position receive coil pair 3 , 4 and the high-resolution receive coil pair 5 , 6 have been numbered identically to the respective coil.
  • the signal processing unit 9 provides an excitation current to the transmit coil 2 , which creates an electro-magnetic field due to the excitation current.
  • the conductive moving target 7 is located inside this created electro-magnetic field of the transmit coil 2 and therefore modifies the electro-magnetic field due to eddy currents induced into the conductive moving target 7 .
  • the absolute position receive coil pair 3 , 4 and the high-resolution receive coil pair 5 , 6 can sense the modifications in the electro-magnetic field due to the conductive moving target 7 and the position of the conductive moving target 7 .
  • the signals of the absolute position receive coil pair 3 , 4 and the high-resolution receive coil pair 5 , 6 are used by the signal processing unit 9 to determine the absolute position and the high-resolution position of the conductive moving target 7 in the measurement area.
  • FIG. 2 shows a schematic view of a second embodiment of an inductive position sensor 1 according to the invention.
  • the second embodiment shown in FIG. 2 differs from the first embodiment shown in FIG. 1 in that the inductive position sensor comprises two transmit coils 2 and in that the second sine receive coil 5 and a second cosine receive coil 6 each have 32-periods over the measurement area. Otherwise, the second embodiment corresponds to the first embodiment.
  • a high-resolution absolute sensor 1 with a 32-periodic receive coil pair 5 , 6 , an absolute 1 ⁇ 360 deg receive coil pair 3 , 4 , two separate transmitter coils 2 and a signal processing unit 9 with two inductive position sensor ICs (not shown) with a 12 bit signal acquisition the theoretic resolution is 32 ⁇ 12 bit which is 131072 counts or 17 bit.
  • the implementation of the high-resolution absolute sensor 1 with a 32-periodic receive coil pair 5 , 6 , a 1 ⁇ 360 absolute receive coil pair 3 , 4 and one shared signal processing unit 9 is shown in FIG. 2 .
  • FIG. 3 shows a first embodiment of a conductive moving target 7 .
  • the conductive moving target 7 comprises multiple sections 12 spaced apart from each other.
  • the multiple sections 12 of the conductive moving target 7 have the same shape and spacing.
  • One or more portions of the incremental n-period sensor target 7 are removed to generate sufficient signal on the 1-periodic absolute position receive coil pair 3 , 4 .
  • FIG. 4 shows a second embodiment of a conductive moving target 7 .
  • FIG. 4 shows the upper and lower side of a substrate, wherein one side comprises a first target element 10 and the other side comprises a second target element 11 , wherein the shape of the first target element 10 is different to the shape of the at least one second target element 11 .
  • the first target element 10 comprises multiple sections 12 , spaced apart from each other.
  • the multiple sections 12 of the conductive moving target 7 have the same shape and spacing and cover the complete circumference of the circular substrate building the conductive moving target 7 .
  • the multiple sections 12 of the first target element 10 cover the complete measurement area of the inductive position sensor 1 .
  • the second target element 11 has a semi-circular shape and overs a half-circle of the circular substrate of the conductive moving target 7 .
  • the first element 10 and second element 11 of the conductive moving target 7 overlap with each other, as FIG. 4 shows the two sides of the same substrate of the same conductive moving target 7 .
  • FIG. 4 shows high-resolution segments 12 for the n-periodic receive coil pair 5 , 6 and stacked target 11 for the 1-periodic absolute position receive coil pair 3 , 4 .
  • FIG. 5 shows a third embodiment of a conductive moving target 7 .
  • the third embodiment of the conductive moving target 7 shown in FIG. 5 differs from the second embodiment of the conductive moving target 7 shown in FIG. 4 in that the second element 11 has the shape of an arc segment of a full ring, which is arranged on the same side as the first element 10 comprising the segments 12 .
  • the first element 10 and the second element 11 of the conductive moving target 7 are arranged next to each other, particularly the second element 11 is arranged inside the first element 10 , and the first element 10 and the second element 11 do not overlap.
  • FIG. 6 shows a fourth embodiment of a conductive moving target 7 .
  • the fourth embodiment of the conductive moving target 7 shown in FIG. 6 differs from the third embodiment of the conductive moving target 7 shown in FIG. 5 in that the second element 11 has a rectangular shape and overlaps with the first element 10 .
  • the first element 10 comprising the segments 12 completely overlaps the second element 11 if the gaps between the segments 12 are considered to belong to the first element 10 .
  • FIG. 7 shows a fifth embodiment of a conductive moving target 7 .
  • the fifth embodiment of the conductive moving target 7 shown in FIG. 7 differs from the fourth embodiment of the conductive moving target 7 shown in FIG. 6 in that the second element 11 has the shape of an arrow.
  • FIG. 8 shows a sixth embodiment of a conductive moving target 7 , wherein the second element 11 has a bigger arrow shape compared to the fifth embodiment shown in FIG. 7 .
  • FIGS. 9 a and 9 b show a target configuration comparisons for:
  • FIGS. 9 a and 9 b show a performance comparison based on 32 ⁇ coil.
  • Step2 Check the actual period
  • Step4 Check Plausibility and correct period if needed
  • FIG. 10 shows a high-resolution output after processing, particularly signal plot of 32 periodic high-resolution sensor and processed high resolution absolute sensor.
  • FIG. 11 shows a schematic view of a third embodiment of an inductive position sensor 1 according to the invention.
  • the inductive position sensor 1 shown in FIG. 11 is a linear position sensor with a straight measurement area, along which the conductive target 7 moves. Otherwise, the third embodiment of the inductive position sensor 1 shown in FIG. 11 corresponds to the first embodiment of the inductive position sensor 1 shown in FIG. 1 .

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  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • Power Engineering (AREA)
  • Transmission And Conversion Of Sensor Element Output (AREA)
US17/371,908 2020-07-10 2021-07-09 Inductive position sensor comprising at least one transmit coil, an absolute position receive coil pair, a high-resolution position receive coil pair and a conductive moving target Pending US20220011085A1 (en)

Applications Claiming Priority (4)

Application Number Priority Date Filing Date Title
EP20185164.9 2020-07-10
EP20185164 2020-07-10
EP21178772.6A EP3936829B1 (de) 2020-07-10 2021-06-10 Induktiver positionssensor mit mindestens einer sendespule, einem absolutpositionsempfangsspulenpaar, einem hochauflösenden positionsbestimmungsspulenpaar und einem leitfähigen geber
EP21178772.6 2021-06-10

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US18/618,193 Continuation US20240230307A1 (en) 2020-07-10 2024-03-27 Inductive position sensor comprising at least one transmit coil, an absolute position receive coil pair, a high-resolution position receive coil pair and a conductive moving target

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US20220011085A1 true US20220011085A1 (en) 2022-01-13

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US (1) US20220011085A1 (de)
EP (1) EP3936829B1 (de)
JP (1) JP2022016420A (de)
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CN115435668A (zh) * 2022-09-13 2022-12-06 Oppo广东移动通信有限公司 测量装置及电子设备
CN115435669A (zh) * 2022-09-13 2022-12-06 Oppo广东移动通信有限公司 测量装置及电子设备

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EP3936829B1 (de) 2023-08-30
EP3936829A1 (de) 2022-01-12
JP2022016420A (ja) 2022-01-21

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