US20210296881A1 - Semiconductor device and overcurrent protection method - Google Patents
Semiconductor device and overcurrent protection method Download PDFInfo
- Publication number
- US20210296881A1 US20210296881A1 US17/184,816 US202117184816A US2021296881A1 US 20210296881 A1 US20210296881 A1 US 20210296881A1 US 202117184816 A US202117184816 A US 202117184816A US 2021296881 A1 US2021296881 A1 US 2021296881A1
- Authority
- US
- United States
- Prior art keywords
- overcurrent
- circuit
- switching element
- value
- semiconductor device
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Images
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L23/00—Details of semiconductor or other solid state devices
- H01L23/58—Structural electrical arrangements for semiconductor devices not otherwise provided for, e.g. in combination with batteries
- H01L23/62—Protection against overvoltage, e.g. fuses, shunts
-
- H—ELECTRICITY
- H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
- H02H—EMERGENCY PROTECTIVE CIRCUIT ARRANGEMENTS
- H02H5/00—Emergency protective circuit arrangements for automatic disconnection directly responsive to an undesired change from normal non-electric working conditions with or without subsequent reconnection
- H02H5/04—Emergency protective circuit arrangements for automatic disconnection directly responsive to an undesired change from normal non-electric working conditions with or without subsequent reconnection responsive to abnormal temperature
- H02H5/044—Emergency protective circuit arrangements for automatic disconnection directly responsive to an undesired change from normal non-electric working conditions with or without subsequent reconnection responsive to abnormal temperature using a semiconductor device to sense the temperature
-
- H—ELECTRICITY
- H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
- H02H—EMERGENCY PROTECTIVE CIRCUIT ARRANGEMENTS
- H02H7/00—Emergency protective circuit arrangements specially adapted for specific types of electric machines or apparatus or for sectionalised protection of cable or line systems, and effecting automatic switching in the event of an undesired change from normal working conditions
- H02H7/10—Emergency protective circuit arrangements specially adapted for specific types of electric machines or apparatus or for sectionalised protection of cable or line systems, and effecting automatic switching in the event of an undesired change from normal working conditions for converters; for rectifiers
- H02H7/12—Emergency protective circuit arrangements specially adapted for specific types of electric machines or apparatus or for sectionalised protection of cable or line systems, and effecting automatic switching in the event of an undesired change from normal working conditions for converters; for rectifiers for static converters or rectifiers
-
- G—PHYSICS
- G06—COMPUTING; CALCULATING OR COUNTING
- G06F—ELECTRIC DIGITAL DATA PROCESSING
- G06F1/00—Details not covered by groups G06F3/00 - G06F13/00 and G06F21/00
- G06F1/16—Constructional details or arrangements
- G06F1/20—Cooling means
- G06F1/206—Cooling means comprising thermal management
-
- G—PHYSICS
- G06—COMPUTING; CALCULATING OR COUNTING
- G06F—ELECTRIC DIGITAL DATA PROCESSING
- G06F1/00—Details not covered by groups G06F3/00 - G06F13/00 and G06F21/00
- G06F1/26—Power supply means, e.g. regulation thereof
-
- G—PHYSICS
- G06—COMPUTING; CALCULATING OR COUNTING
- G06F—ELECTRIC DIGITAL DATA PROCESSING
- G06F1/00—Details not covered by groups G06F3/00 - G06F13/00 and G06F21/00
- G06F1/26—Power supply means, e.g. regulation thereof
- G06F1/28—Supervision thereof, e.g. detecting power-supply failure by out of limits supervision
-
- G—PHYSICS
- G06—COMPUTING; CALCULATING OR COUNTING
- G06F—ELECTRIC DIGITAL DATA PROCESSING
- G06F1/00—Details not covered by groups G06F3/00 - G06F13/00 and G06F21/00
- G06F1/26—Power supply means, e.g. regulation thereof
- G06F1/30—Means for acting in the event of power-supply failure or interruption, e.g. power-supply fluctuations
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L23/00—Details of semiconductor or other solid state devices
- H01L23/34—Arrangements for cooling, heating, ventilating or temperature compensation ; Temperature sensing arrangements
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L25/00—Assemblies consisting of a plurality of individual semiconductor or other solid state devices ; Multistep manufacturing processes thereof
- H01L25/03—Assemblies consisting of a plurality of individual semiconductor or other solid state devices ; Multistep manufacturing processes thereof all the devices being of a type provided for in the same subgroup of groups H01L27/00 - H01L33/00, or in a single subclass of H10K, H10N, e.g. assemblies of rectifier diodes
- H01L25/04—Assemblies consisting of a plurality of individual semiconductor or other solid state devices ; Multistep manufacturing processes thereof all the devices being of a type provided for in the same subgroup of groups H01L27/00 - H01L33/00, or in a single subclass of H10K, H10N, e.g. assemblies of rectifier diodes the devices not having separate containers
- H01L25/07—Assemblies consisting of a plurality of individual semiconductor or other solid state devices ; Multistep manufacturing processes thereof all the devices being of a type provided for in the same subgroup of groups H01L27/00 - H01L33/00, or in a single subclass of H10K, H10N, e.g. assemblies of rectifier diodes the devices not having separate containers the devices being of a type provided for in group H01L29/00
- H01L25/072—Assemblies consisting of a plurality of individual semiconductor or other solid state devices ; Multistep manufacturing processes thereof all the devices being of a type provided for in the same subgroup of groups H01L27/00 - H01L33/00, or in a single subclass of H10K, H10N, e.g. assemblies of rectifier diodes the devices not having separate containers the devices being of a type provided for in group H01L29/00 the devices being arranged next to each other
-
- H—ELECTRICITY
- H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
- H02H—EMERGENCY PROTECTIVE CIRCUIT ARRANGEMENTS
- H02H1/00—Details of emergency protective circuit arrangements
- H02H1/0007—Details of emergency protective circuit arrangements concerning the detecting means
-
- H—ELECTRICITY
- H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
- H02H—EMERGENCY PROTECTIVE CIRCUIT ARRANGEMENTS
- H02H3/00—Emergency protective circuit arrangements for automatic disconnection directly responsive to an undesired change from normal electric working condition with or without subsequent reconnection ; integrated protection
- H02H3/08—Emergency protective circuit arrangements for automatic disconnection directly responsive to an undesired change from normal electric working condition with or without subsequent reconnection ; integrated protection responsive to excess current
-
- H—ELECTRICITY
- H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
- H02H—EMERGENCY PROTECTIVE CIRCUIT ARRANGEMENTS
- H02H5/00—Emergency protective circuit arrangements for automatic disconnection directly responsive to an undesired change from normal non-electric working conditions with or without subsequent reconnection
- H02H5/04—Emergency protective circuit arrangements for automatic disconnection directly responsive to an undesired change from normal non-electric working conditions with or without subsequent reconnection responsive to abnormal temperature
- H02H5/041—Emergency protective circuit arrangements for automatic disconnection directly responsive to an undesired change from normal non-electric working conditions with or without subsequent reconnection responsive to abnormal temperature additionally responsive to excess current
-
- H—ELECTRICITY
- H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
- H02H—EMERGENCY PROTECTIVE CIRCUIT ARRANGEMENTS
- H02H5/00—Emergency protective circuit arrangements for automatic disconnection directly responsive to an undesired change from normal non-electric working conditions with or without subsequent reconnection
- H02H5/04—Emergency protective circuit arrangements for automatic disconnection directly responsive to an undesired change from normal non-electric working conditions with or without subsequent reconnection responsive to abnormal temperature
- H02H5/047—Emergency protective circuit arrangements for automatic disconnection directly responsive to an undesired change from normal non-electric working conditions with or without subsequent reconnection responsive to abnormal temperature using a temperature responsive switch
-
- H—ELECTRICITY
- H03—ELECTRONIC CIRCUITRY
- H03K—PULSE TECHNIQUE
- H03K17/00—Electronic switching or gating, i.e. not by contact-making and –breaking
- H03K17/08—Modifications for protecting switching circuit against overcurrent or overvoltage
- H03K17/082—Modifications for protecting switching circuit against overcurrent or overvoltage by feedback from the output to the control circuit
- H03K17/0828—Modifications for protecting switching circuit against overcurrent or overvoltage by feedback from the output to the control circuit in composite switches
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2224/00—Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
- H01L2224/01—Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
- H01L2224/42—Wire connectors; Manufacturing methods related thereto
- H01L2224/44—Structure, shape, material or disposition of the wire connectors prior to the connecting process
- H01L2224/45—Structure, shape, material or disposition of the wire connectors prior to the connecting process of an individual wire connector
- H01L2224/45001—Core members of the connector
- H01L2224/45099—Material
- H01L2224/451—Material with a principal constituent of the material being a metal or a metalloid, e.g. boron (B), silicon (Si), germanium (Ge), arsenic (As), antimony (Sb), tellurium (Te) and polonium (Po), and alloys thereof
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2224/00—Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
- H01L2224/01—Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
- H01L2224/42—Wire connectors; Manufacturing methods related thereto
- H01L2224/47—Structure, shape, material or disposition of the wire connectors after the connecting process
- H01L2224/48—Structure, shape, material or disposition of the wire connectors after the connecting process of an individual wire connector
- H01L2224/481—Disposition
- H01L2224/48135—Connecting between different semiconductor or solid-state bodies, i.e. chip-to-chip
- H01L2224/48137—Connecting between different semiconductor or solid-state bodies, i.e. chip-to-chip the bodies being arranged next to each other, e.g. on a common substrate
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2224/00—Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
- H01L2224/01—Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
- H01L2224/42—Wire connectors; Manufacturing methods related thereto
- H01L2224/47—Structure, shape, material or disposition of the wire connectors after the connecting process
- H01L2224/48—Structure, shape, material or disposition of the wire connectors after the connecting process of an individual wire connector
- H01L2224/481—Disposition
- H01L2224/48151—Connecting between a semiconductor or solid-state body and an item not being a semiconductor or solid-state body, e.g. chip-to-substrate, chip-to-passive
- H01L2224/48221—Connecting between a semiconductor or solid-state body and an item not being a semiconductor or solid-state body, e.g. chip-to-substrate, chip-to-passive the body and the item being stacked
- H01L2224/48225—Connecting between a semiconductor or solid-state body and an item not being a semiconductor or solid-state body, e.g. chip-to-substrate, chip-to-passive the body and the item being stacked the item being non-metallic, e.g. insulating substrate with or without metallisation
- H01L2224/48227—Connecting between a semiconductor or solid-state body and an item not being a semiconductor or solid-state body, e.g. chip-to-substrate, chip-to-passive the body and the item being stacked the item being non-metallic, e.g. insulating substrate with or without metallisation connecting the wire to a bond pad of the item
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2224/00—Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
- H01L2224/01—Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
- H01L2224/42—Wire connectors; Manufacturing methods related thereto
- H01L2224/47—Structure, shape, material or disposition of the wire connectors after the connecting process
- H01L2224/49—Structure, shape, material or disposition of the wire connectors after the connecting process of a plurality of wire connectors
- H01L2224/491—Disposition
- H01L2224/4911—Disposition the connectors being bonded to at least one common bonding area, e.g. daisy chain
- H01L2224/49111—Disposition the connectors being bonded to at least one common bonding area, e.g. daisy chain the connectors connecting two common bonding areas, e.g. Litz or braid wires
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2224/00—Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
- H01L2224/01—Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
- H01L2224/42—Wire connectors; Manufacturing methods related thereto
- H01L2224/47—Structure, shape, material or disposition of the wire connectors after the connecting process
- H01L2224/49—Structure, shape, material or disposition of the wire connectors after the connecting process of a plurality of wire connectors
- H01L2224/491—Disposition
- H01L2224/4912—Layout
- H01L2224/4917—Crossed wires
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2224/00—Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
- H01L2224/01—Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
- H01L2224/42—Wire connectors; Manufacturing methods related thereto
- H01L2224/47—Structure, shape, material or disposition of the wire connectors after the connecting process
- H01L2224/49—Structure, shape, material or disposition of the wire connectors after the connecting process of a plurality of wire connectors
- H01L2224/491—Disposition
- H01L2224/4912—Layout
- H01L2224/49171—Fan-out arrangements
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2224/00—Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
- H01L2224/73—Means for bonding being of different types provided for in two or more of groups H01L2224/10, H01L2224/18, H01L2224/26, H01L2224/34, H01L2224/42, H01L2224/50, H01L2224/63, H01L2224/71
- H01L2224/732—Location after the connecting process
- H01L2224/73251—Location after the connecting process on different surfaces
- H01L2224/73265—Layer and wire connectors
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L24/00—Arrangements for connecting or disconnecting semiconductor or solid-state bodies; Methods or apparatus related thereto
- H01L24/01—Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
- H01L24/42—Wire connectors; Manufacturing methods related thereto
- H01L24/44—Structure, shape, material or disposition of the wire connectors prior to the connecting process
- H01L24/45—Structure, shape, material or disposition of the wire connectors prior to the connecting process of an individual wire connector
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L24/00—Arrangements for connecting or disconnecting semiconductor or solid-state bodies; Methods or apparatus related thereto
- H01L24/01—Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
- H01L24/42—Wire connectors; Manufacturing methods related thereto
- H01L24/47—Structure, shape, material or disposition of the wire connectors after the connecting process
- H01L24/48—Structure, shape, material or disposition of the wire connectors after the connecting process of an individual wire connector
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L24/00—Arrangements for connecting or disconnecting semiconductor or solid-state bodies; Methods or apparatus related thereto
- H01L24/01—Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
- H01L24/42—Wire connectors; Manufacturing methods related thereto
- H01L24/47—Structure, shape, material or disposition of the wire connectors after the connecting process
- H01L24/49—Structure, shape, material or disposition of the wire connectors after the connecting process of a plurality of wire connectors
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L25/00—Assemblies consisting of a plurality of individual semiconductor or other solid state devices ; Multistep manufacturing processes thereof
- H01L25/16—Assemblies consisting of a plurality of individual semiconductor or other solid state devices ; Multistep manufacturing processes thereof the devices being of types provided for in two or more different main groups of groups H01L27/00 - H01L33/00, or in a single subclass of H10K, H10N, e.g. forming hybrid circuits
- H01L25/162—Assemblies consisting of a plurality of individual semiconductor or other solid state devices ; Multistep manufacturing processes thereof the devices being of types provided for in two or more different main groups of groups H01L27/00 - H01L33/00, or in a single subclass of H10K, H10N, e.g. forming hybrid circuits the devices being mounted on two or more different substrates
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L25/00—Assemblies consisting of a plurality of individual semiconductor or other solid state devices ; Multistep manufacturing processes thereof
- H01L25/16—Assemblies consisting of a plurality of individual semiconductor or other solid state devices ; Multistep manufacturing processes thereof the devices being of types provided for in two or more different main groups of groups H01L27/00 - H01L33/00, or in a single subclass of H10K, H10N, e.g. forming hybrid circuits
- H01L25/165—Containers
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2924/00—Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
- H01L2924/10—Details of semiconductor or other solid state devices to be connected
- H01L2924/11—Device type
- H01L2924/13—Discrete devices, e.g. 3 terminal devices
- H01L2924/1304—Transistor
- H01L2924/1305—Bipolar Junction Transistor [BJT]
- H01L2924/13055—Insulated gate bipolar transistor [IGBT]
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2924/00—Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
- H01L2924/10—Details of semiconductor or other solid state devices to be connected
- H01L2924/11—Device type
- H01L2924/13—Discrete devices, e.g. 3 terminal devices
- H01L2924/1304—Transistor
- H01L2924/1306—Field-effect transistor [FET]
- H01L2924/13091—Metal-Oxide-Semiconductor Field-Effect Transistor [MOSFET]
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2924/00—Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
- H01L2924/19—Details of hybrid assemblies other than the semiconductor or other solid state devices to be connected
- H01L2924/191—Disposition
- H01L2924/19101—Disposition of discrete passive components
- H01L2924/19107—Disposition of discrete passive components off-chip wires
Definitions
- the present invention relates to a power semiconductor device, and more particularly to a protection method of a module having a control circuit and a switching element such as an IGBT.
- switching element modules configurations obtained by modularizing power switching elements such as insulated gate bipolar transistors (IGBTs) and metal-oxide-semiconductor field-effect transistors (MOSFETs) (hereinafter, referred to as switching element modules) have been known.
- IGBTs insulated gate bipolar transistors
- MOSFETs metal-oxide-semiconductor field-effect transistors
- Such switching element modules have various protection methods (protection functions), and as one of such methods (functions), an overcurrent protection method is provided.
- the overcurrent protection method includes at least a diode for chip temperature detection attached to a switching element and an IC for performing a protection operation as components.
- the diode for chip temperature detection may be integrated with the switching element (see Patent Literature 1 for instance), or may be provided on the same circuit board separately from the switching element or be provided together with the switching element in the same resin case (see the second embodiment of Patent Literature 2 for instance, and this is shown in FIG. 24 of this specification).
- a circuit board is an insulating substrate having a predetermined circuit pattern and having electronic components mounted thereon.
- FIG. 18 is a view illustrating an example of the internal configuration of an intelligent power module (IPM) of the related art which is a kind of switching element module.
- IPM intelligent power module
- the IPM 300 has a positive power supply terminal P, a negative power supply terminal N, and output terminals U, V, and W, and includes six IGBTs 301 to 306 .
- the IGBTs 301 to 306 are connected in reverse parallel by protective diodes 311 to 316 mounted on the same circuit pattern, respectively.
- the IGBT 301 the IGBT 303 , and the IGBT 305 are connected in series with the IGBT 302 , the IGBT 304 , and the IGBT 306 , respectively, so as to form three sets of arm parts.
- the intermediate connection parts of the individual arm parts for U, V, and W phases are connected to the output terminals U, V, and W, respectively (Patent Literature 1).
- the IGBTs 301 to 306 have temperature detection diodes having p-n junctions on the centers of their front surfaces (emitter terminals) with insulating layers interposed therebetween. As a result, each of the IGBTs 301 to 306 can observe the chip temperature close to the junction temperature by monitoring the forward voltage depending on the temperature of the temperature detection diode.
- the gate terminals and the temperature detection diodes of the IGBTs 301 to 306 are connected to control ICs 321 to 326 .
- the control ICs 321 to 326 perform switching control on the IGBTs 301 to 306 , and apply constant currents to the temperature detection diodes, thereby detecting overheat conditions of the IGBTs 301 to 306 .
- FIGS. 19 to 24 show semiconductor element modules which are a kind of switching element modules, and module units each of which includes a plurality of such semiconductor element modules.
- FIG. 19 is a bird's eye view of the internal structure of a semiconductor element module 500 .
- an emitter pattern 404 and a collector pattern 405 are provided, and on them, an IGBT 401 and a diode element 402 are further provided, and the IGBT is electrically coupled with a gate pattern 406 and a control emitter pattern 408 by metal wires 407 such that the gate pattern 406 and the control emitter pattern 408 are connected to a gate terminal 413 and a control emitter terminal 414 .
- FIG. 19 is a bird's eye view of the internal structure of a semiconductor element module 500 .
- an emitter pattern 404 and a collector pattern 405 are provided, and on them, an IGBT 401 and a diode element 402 are further provided, and the IGBT is electrically coupled with a gate pattern 406 and
- FIG. 20 is a view illustrating the semiconductor element module 500 as seen from above
- FIG. 21 is a side view of FIG. 20 as seen from an arrow A.
- FIGS. 20 and 21 show that the internal structure shown in FIG. 19 has been formed in a resin case 410 , and a main emitter terminal 411 , a main collector terminal 412 , and so on have been provided on the emitter pattern 404 and the collector pattern 405 .
- FIG. 22 is a view illustrating a module unit having eight semiconductor element modules 500
- FIG. 23 is a side view of FIG. 22 as seen from an arrow B.
- IGBTs 401 , the semiconductor element modules 500 including them, and a control board 420 exist, the control board 420 is mounted outside the semiconductor element modules 500 .
- FIG. 24 shows the second embodiment in which a thermistor 432 for detecting the temperature in a semiconductor element module 600 has been provided on an intermediate insulating substrate 431 and is covered with a resin case (Patent Literature 2).
- the power semiconductor device includes a control circuit 1 , a switching element 2 , and a diode 8 for switching-element temperature detection.
- the control circuit 1 includes an overcurrent reference voltage circuit 5 a , an overcurrent detection comparator 6 , a sense voltage detection resistor 7 , an overheat detection comparator 9 , an overheat reference voltage circuit 10 , and a filter 13 .
- the control circuit 1 is connected to the switching element 2 as shown in FIG. 13 .
- the control circuit 1 has an output terminal OUT for outputting a gate voltage, an overcurrent detection terminal OC, and an overheat detection terminal OH.
- the output terminal OUT is connected to the gate terminal of the switching element 2 , and the overcurrent detection terminal OC is connected to the emitter terminal of the switching element 2 for current sensing.
- the emitter terminal of the switching element 2 is connected to ground potential.
- the overheat detection terminal OH is connected to a constant-current source 11 and the inverting input terminal of the overheat detection comparator 9 , and the non-inverting input terminal of the overheat detection comparator 9 is connected to the overheat reference voltage circuit 10 .
- the overheat detection terminal OH is connected to the anode terminal of the diode 8 for switching-element temperature detection, and the cathode terminal of the diode 8 for switching-element temperature detection is connected to ground potential.
- a constant current produced by the constant-current source 11 always flows into the diode 8 for switching-element temperature detection, so forward voltage corresponding to the chip temperature of the switching element 2 is applied to the inverting input terminal of the overheat detection comparator 9 .
- the diode 8 for switching-element temperature detection has a negative temperature characteristic
- the overheat reference voltage circuit 10 outputs an overheat reference voltage VOH 1 corresponding to the temperature TH.
- the overheat detection comparator 9 outputs a low-level protection operation signal when the chip temperature is lower than TH, and outputs a high-level protection operation signal if the chip temperature becomes a temperature equal to or higher than TH. If this high-level protection operation signal is output, the control circuit 1 outputs an alarm signal from an alarm output circuit and simultaneously performs control to turn off the switching element 2 .
- the overcurrent detection terminal OC is connected to the sense voltage detection resistor 7 and the inverting input terminal of the overcurrent detection comparator 6 , and the non-inverting input terminal of the overcurrent detection comparator 6 is connected to the overcurrent reference voltage circuit 5 a .
- the output part of the overcurrent detection comparator 6 is connected to the input part of the filter 13 , such that voltages other than a voltage proportional to the collector current are removed.
- an overcurrent detecting method a method of shunting a current of about one ten thousandth of the emitter current in the switching element 2 , and comparing a voltage (sense voltage) which is obtained when the corresponding current flows in the sense voltage detection resistor 7 with an overcurrent reference voltage VOC which is generated in the overcurrent reference voltage circuit 5 a of the overcurrent detection comparator 6 , thereby detecting the current, and determining the magnitude of the current on the basis of the magnitude of the sense voltage, and performing alarm output and gate shut-off by a logic circuit for protection operation signal transmission is known.
- the relation between collector current and sense voltage is a relation in which the sense voltage becomes higher as the collector current increases as shown by a line 201 , and when the sense voltage is compared with a predetermined reference voltage value VB, if the sense voltage exceeds the reference voltage value, the collector current is regarded as exceeding the collector current value IC of the intersection of the predetermined reference voltage and the above-mentioned line, and is determined as being an overcurrent.
- the sense voltage becomes higher as the temperature of the switching element 2 rises, and the current detection voltage becomes higher as the temperature of the control circuit rises.
- FIG. 16 an overcurrent protection operation of a power semiconductor device of the related art is shown.
- a reference symbol “202” indicates sense voltage when the temperature is TH
- a reference symbol “204” indicates sense voltage when the temperature is TL.
- a reference symbol “VBH” indicates reference voltage when the temperatures are TH
- a reference symbol “VBL” indicates reference voltage when the temperatures are TL.
- the temperatures of the switching element and the control circuit are almost the same, or the temperature of the switching element is slightly higher.
- the sense voltage is represented by the line 202 , and the reference voltage is VBH. Therefore, an overcurrent detection value becomes the intersection 203 of them, and a range equal to or higher than a collector current ICTH becomes an overcurrent protection range.
- the sense voltage is represented by the line 204 , and the reference voltage is VBL. Therefore, an overcurrent detection value becomes the intersection 205 of them, and a range equal to or higher than a collector current ICTL becomes an overcurrent protection range.
- Patent Literature 1 WO 2016/039342
- the intersection 206 of the sense voltage 202 and the reference voltage VBL becomes an overcurrent value, and a range equal to or higher than a collector current ICmin becomes an overcurrent protection range.
- a range equal to or higher than ICTH is an overcurrent protection range, and when the collector current is between ICmin and ICTH, originally unnecessary protection is performed.
- the overcurrent protection range has a redundant region 207.
- the present invention was made in view of the above-mentioned problem, and an object of the present invention is to provide a semiconductor device with a high-accuracy switching element protection function and a protection method thereof.
- the gist of the present invention is to provide a switching element, a control circuit configured to control the switching element and have an overcurrent protection method, and individual temperature detector for the switching element and the control circuit, and correct an overcurrent detection reference on the basis of two detection values detected by both temperature detector.
- the switching element may be mounted on a circuit board which is formed of an insulating substrate having a predetermined circuit pattern and having electronic components mounted thereon, and the control circuit may be mounted on another circuit board which is formed of an insulating substrate having a predetermined circuit pattern and having electronic components mounted thereon.
- the switching element and the control circuit may be mounted on the same circuit board.
- a resin case may be formed so as to cover it, and for the control circuit, another resin case is formed so as to cover it.
- the switching element and the control circuit may be mounted in the same resin case.
- the temperature detector for the switching element is provided in the same element, or on the circuit board where the switching element is mounted, or in the resin case where the switching element is stored, or in the vicinity thereof where it can measure the temperature of the switching element.
- the temperature detector for the control circuit is provided in the same control circuit, or on the circuit board where the control circuit is mounted, or in the resin case where the control circuit is stored, or in the vicinity thereof where it can measure the temperature of the control circuit.
- a MOSFET or an IGBT may be used, and as the temperature detector, diodes may be used.
- the circuit for correcting an overcurrent detection reference may determine a detection voltage obtained by the temperature detector for the switching element in a plurality of stages, and set a corrected voltage in the same number of stages, thereby performing conversion into an output voltage having the reversed magnitude relation with respect to the detection voltage, and output a value calculated on the basis of the sum of the output voltage and the detection voltage obtained by the temperature detector for the control circuit, as an overcurrent detection reference value.
- the circuit for correcting an overcurrent detection reference may determine a detection voltage obtained by the temperature detector for the control circuit in a plurality of stages, and set a corrected voltage in the same number of stages, thereby performing conversion into an output voltage having the reversed magnitude relation with respect to the detection voltage, and output a value calculated on the basis of the sum of the output voltage and a detection voltage obtained by the temperature detector for the switching element, as an overcurrent detection reference value.
- the circuit for correcting an overcurrent detection reference may perform conversion into an output voltage having the reversed magnitude relation with respect to a detection voltage obtained by the temperature detector for the switching element, and output a value calculated on the basis of the sum of the output voltage and a detection voltage obtained by the temperature detector for the control circuit, as an overcurrent detection reference value.
- the circuit for correcting an overcurrent detection reference may perform conversion into an output voltage having the reversed magnitude relation with respect to a detection voltage obtained by the temperature detector for the control circuit, and output a value calculated on the basis of the sum of the output voltage and a detection voltage obtained by the temperature detection means for the switching element, as an overcurrent detection reference value.
- the circuit for correcting an overcurrent detection reference may output a value calculated on the basis of the sum of detection voltages obtained by both temperature detectors, as an overcurrent detection reference value.
- the present invention by correcting an overcurrent protection detection level, it is possible to reduce a redundant region of overcurrent protection current, and it is possible to improve the accuracy of the overcurrent protection method.
- FIG. 1 is a block diagram illustrating a first embodiment of a power semiconductor device according to the present invention.
- FIG. 2 is a circuit diagram illustrating a first example of an overcurrent reference voltage correction circuit of the present invention.
- FIG. 3 is a view illustrating an example of the relation between T 1 and T 2 , and inputs VF 1 , VF 2 , and correction values VOCa in the first example of the overcurrent reference voltage correction circuit of the present invention.
- FIG. 4 is a view illustrating an example of the relation between T 1 and T 2 , and inputs VF 1 , VF 2 , uncorrected reference voltages VOCo, and outputs VOC in the first example of the overcurrent reference voltage correction circuit of the present invention.
- FIG. 5 shows a second example of the overcurrent reference voltage correction circuit of the present invention.
- FIG. 6 shows a third example of the overcurrent reference voltage correction circuit of the present invention.
- FIG. 7 is a view illustrating an example of the relation between T 1 and T 2 , and inputs VF 1 , VF 2 , and correction values VOCa in the third example of the overcurrent reference voltage correction circuit of the present invention.
- FIG. 8 is a view illustrating an example of the relation between T 1 and T 2 , and inputs VF 1 , VF 2 , uncorrected reference voltages VOCo, and outputs VOC in the third example of the overcurrent reference voltage correction circuit of the present invention.
- FIG. 9 is a circuit diagram illustrating a fourth example of the overcurrent reference voltage correction circuit of the present invention.
- FIG. 10 is a circuit diagram illustrating a fifth example of the overcurrent reference voltage correction circuit of the present invention.
- FIG. 11 is a view illustrating an expansion of the outputs of the drawing ( FIG. 3 ) illustrating the example of the relation between T 1 and T 2 , and inputs VF 1 and VF 2 and correction values VOCa in the first example of the overcurrent reference voltage correction circuit of the present invention to a range in which T 2 is higher than T 1 .
- FIG. 12 is a view illustrating an expansion of the outputs of the drawing ( FIG. 4 ) illustrating the example of the relation between T 1 and T 2 , and inputs VF 1 and VF 2 , the uncorrected reference voltages VOCo, and outputs VOC in the first example of the overcurrent reference voltage correction circuit of the present invention to a range in which T 2 is higher than T 1 .
- FIG. 13 is a block diagram illustrating an example of a power semiconductor device of the related art.
- FIG. 14 is a block diagram illustrating a second embodiment of the power semiconductor device according to the present invention.
- FIG. 15 is a view illustrating an overcurrent protection operation region of the power semiconductor device.
- FIG. 16 is a view illustrating a redundant region of an overcurrent protection operation of the power semiconductor device of the related art.
- FIG. 17 is a view illustrating a redundant region of the overcurrent protection operation of the power semiconductor device according to the embodiment of the present invention.
- FIG. 18 is a view illustrating an example of the internal structure of a switching element module (IPM) of the related art.
- IPM switching element module
- FIG. 19 is a view illustrating an example of the internal structure of a semiconductor element module of the related art in which a switching element and a control circuit are separated.
- FIG. 20 is a view illustrating the example of the internal structure of the semiconductor element module of the related art in which the switching element and the control circuit are separated.
- FIG. 21 is a view illustrating the example of the internal structure of the semiconductor element module of the related art in which the switching element and the control circuit are separated.
- FIG. 22 is a view illustrating an example of a module unit of the related art in which switching elements and control circuits are separated.
- FIG. 23 is a view illustrating the example of the module unit of the related art in which the switching elements and the control circuits are separated.
- FIG. 24 is a view illustrating an example of the internal structure of a semiconductor element module of the related art in which a semiconductor element and a control circuit are separated and which includes a temperature detector.
- a first embodiment of power semiconductor devices includes a control circuit 1 , a switching element 2 , and a diode 8 for switching-element temperature detection as shown in FIG. 1 .
- the diode 8 for switching-element temperature detection may be built in the switching element 2 .
- the switching element 2 is an IGBT, it is formed of polysilicon on the center of a front surface (an emitter terminal) with an insulating film interposed therebetween.
- the diode 8 for switching-element temperature detection may be disposed at a position where it can measure the temperature of the switching element 2 , separately from the switching element 2 .
- the diode may be mounted on a circuit board where the switching element 2 is mounted, or may be disposed together with the switching element 2 in the same resin case, or may be disposed in the vicinity of the resin case where the switching element 2 is formed.
- the circuit board is an insulating board having a predetermined circuit pattern.
- the control circuit 1 includes a diode 3 for control circuit temperature detection, an overcurrent reference voltage correction circuit 4 , an overcurrent reference voltage circuit 5 , an overcurrent detection comparator 6 , a sense voltage detection resistor 7 , an overheat detection comparator 9 , an overheat reference voltage circuit 10 , constant-current sources 11 and 12 , and a filter 13 .
- the control circuit 1 and the diode 3 for control circuit temperature detection may be integrated in the same semiconductor substrate. For example, they are formed of polysilicon on a semiconductor substrate with an insulating film interposed therebetween.
- the diode 3 for temperature detection may be disposed at a position where it can measure the temperature of the control circuit 1 , separately from the control circuit 1 .
- the diode may be mounted on a circuit board where the control circuit 1 is mounted, or may be disposed together with the control circuit 1 in the same resin case, or may be disposed in the vicinity of the resin case where the control circuit 1 is formed.
- the control circuit 1 is connected to the switching element 2 as shown in FIG. 1 .
- the switching element 2 includes a current sensing element arranged in parallel to an IGBT through which a main current flows.
- the control circuit 1 has an output terminal OUT for outputting a gate voltage, an overcurrent detection terminal OC, and an overheat detection terminal OH.
- the control circuit 1 and the switching element 2 include the diode 3 for control circuit temperature detection and the diode 8 for switching-element temperature detection, and may be provided in the same circuit board, or may be provided in the same resin case, or may be formed separately.
- the output terminal OUT is connected to the gate terminal of the switching element 2 , and the overcurrent detection terminal OC is connected to the current sensing terminal of the current sensing element of the switching element 2 .
- the emitter terminal of the switching element 2 is connected to ground potential.
- the overheat detection terminal OH is connected to the constant-current source 11 , the inverting input terminal of the overheat detection comparator 9 , and the overcurrent reference voltage correction circuit 4 , and the non-inverting input terminal of the overheat detection comparator 9 is connected to the overheat reference voltage circuit 10 .
- the overheat detection terminal OH is connected to the anode terminal of the diode 8 for switching-element temperature detection, and the cathode terminal of the diode 8 for switching-element temperature detection is connected to the ground potential of the control circuit 1 .
- a constant current produced by the constant-current source 11 always flows into the diode 8 for switching-element temperature detection, so forward voltage corresponding to the chip temperature of the switching element 2 is applied to the inverting input terminal of the overheat detection comparator 9 .
- the diode 8 for switching-element temperature detection has a negative temperature characteristic
- the overheat reference voltage circuit 10 outputs an overheat reference voltage VOH 1 corresponding to the temperature TH.
- the overheat detection comparator 9 outputs a low-level protection operation signal when the chip temperature is lower than TH, and outputs a high-level protection operation signal if the chip temperature becomes a temperature equal to or higher than TH. If this high-level protection operation signal is output, the control circuit 1 outputs an alarm signal from an alarm output circuit and simultaneously performs control to turn off the switching element 2 .
- the overcurrent detection terminal OC is connected to the sense voltage detection resistor 7 and the inverting input terminal of the overcurrent detection comparator 6 , and the non-inverting input terminal of the overcurrent detection comparator 6 is connected to the overcurrent reference voltage correction circuit 4 .
- the output part of the overcurrent detection comparator 6 is connected to the input part of the filter 13 , such that voltages other than a voltage proportional to the collector current is removed.
- a constant current produced by the constant-current source 12 always flows into the diode 3 for control circuit temperature detection, so forward voltage corresponding to the temperature of the control circuit 1 is applied as VF 2 to the overcurrent reference voltage correction circuit 4 .
- the overcurrent reference voltage correction circuit 4 calculates a correction value VOCa for correcting an overcurrent reference voltage VOCo to be output from the overcurrent reference voltage circuit 5 , on the basis of a signal VF 1 obtained by the diode 8 for switching-element temperature detection and a signal VF 2 obtained by the above-mentioned diode 3 for control circuit temperature detection, and transmits a corrected overcurrent reference voltage VOC to the non-inverting input of the comparator 6 .
- the overcurrent detection comparator 6 compares a sense voltage which is obtained when a current of about one ten thousandth of the emitter current of the switching element 2 is shunted and the corresponding current flows in the sense voltage detection resistor 7 with the overcurrent reference voltage VOC, and transmits a protection operation signal.
- a second embodiment of power semiconductor devices includes a control circuit 1 , a switching element 2 a , and a diode 8 for switching-element temperature detection as shown in FIG. 14 .
- a MOSFET is used as the switching element 2 a
- the switching element 2 a and the diode 8 for switching-element temperature detection may be integrally formed as one chip, or may be provided in the same circuit board or in the same resin case, or the diode for switching-element temperature detection may be provided at a position where it can measure the temperature of the switching element, in the vicinity of the resin case in which the switching element 2 a is formed.
- the circuit board is an insulating substrate having a predetermined circuit pattern and having electronic components mounted thereon.
- the control circuit 1 includes a diode 3 for control circuit temperature detection, an overcurrent reference voltage correction circuit 4 , an overcurrent reference voltage circuit 5 , an overcurrent detection comparator 6 , a sense voltage detection resistor 7 , an overheat detection comparator 9 , an overheat reference voltage circuit 10 , constant-current sources 11 and 12 , and a filter 13 .
- the control circuit 1 and the diode 3 for control circuit temperature detection may be integrally formed as one chip, or may be provided in the same circuit board or in the same resin case, or the diode for control circuit temperature detection may be provided at a position where it can measure the temperature of the control circuit, in the vicinity of the resin case in which the control circuit 1 is formed.
- the control circuit 1 is connected to the switching element 2 a as shown in FIG. 14 .
- the switching element 2 includes a current sensing element arranged in parallel to a MOSFET through which a main current flows.
- the control circuit 1 has an output terminal OUT for outputting a gate voltage, an overcurrent detection terminal OC, and an overheat detection terminal OH.
- the drain terminal of the switching element 2 a is connected to the ground potential.
- the control circuit 1 and the switching element 2 a include the diode 3 for control circuit temperature detection and the diode 8 for switching-element temperature detection, and may be formed in the same resin case, or may be formed separately.
- the output terminal OUT is connected to the gate terminal of the switching element 2 a , and the overcurrent detection terminal OC is connected to the source terminal of the switching element 2 a.
- the overheat detection terminal OH is connected to the constant-current source 11 , the inverting input terminal of the overheat detection comparator 9 , and the overcurrent reference voltage correction circuit 4 , and the non-inverting input terminal of the overheat detection comparator 9 is connected to the overheat reference voltage circuit 10 .
- the overheat detection terminal OH is also connected to the anode terminal of the diode 8 for switching-element temperature detection provided in the switching element 2 a , and the cathode terminal of the diode 8 for switching-element temperature detection is connected to the ground potential of the control circuit 1 .
- a constant current produced by the constant-current source 11 always flows into the diode 8 for switching-element temperature detection, so forward voltage corresponding to the chip temperature of the switching element 2 a is applied to the inverting input terminal of the overheat detection comparator 9 .
- the diode 8 for switching-element temperature detection has a negative temperature characteristic
- the overheat reference voltage circuit 10 outputs an overheat reference voltage VOH 1 corresponding to the temperature TH.
- the overheat detection comparator 9 outputs a low-level protection operation signal when the chip temperature is lower than TH, and outputs a high-level protection operation signal if the chip temperature becomes a temperature equal to or higher than TH. If this high-level protection operation signal is output, the control circuit 1 outputs an alarm signal from an alarm output circuit and simultaneously performs control to turn off the switching element 2 a.
- the overcurrent detection terminal OC is connected to the sense voltage detection resistor 7 and the inverting input terminal of the overcurrent detection comparator 6 , and the non-inverting input terminal of the overcurrent detection comparator 6 is connected to the overcurrent reference voltage correction circuit 4 .
- the output part of the overcurrent detection comparator 6 is connected to the input part of the filter 13 , such that voltages other than a voltage proportional to the collector current is removed.
- a constant current produced by the constant-current source 12 always flows into the diode 3 for control circuit temperature detection, so forward voltage corresponding to the temperature of the control circuit 1 is applied as VF 2 to the overcurrent reference voltage correction circuit 4 .
- the overcurrent reference voltage correction circuit 4 calculates a correction value VOCa for correcting an overcurrent reference voltage VOCo to be output from the overcurrent reference voltage circuit 5 , on the basis of a signal VF 1 obtained by the diode 8 for switching-element temperature detection and a signal VF 2 obtained by the above-mentioned diode 3 for control circuit temperature detection, and transmits a corrected overcurrent reference voltage VOC to the non-inverting input of the overcurrent detection comparator 6 .
- the overcurrent detection comparator 6 compares the source voltage of the switching element 2 a with the overcurrent reference voltage VOC, and transmits a protection operation signal.
- FIG. 2 shows a first example of the overcurrent reference voltage correction circuit 4 of the present invention.
- the overcurrent reference voltage correction circuit is composed of differential amplifier circuits 121 and 131 arranged in two stages, and the first differential amplifier circuit 121 is composed of a comparator 122 and resistors 123 to 126 , and has VF 2 as an inverting input, and has VF 1 as an non-inverting input, and outputs a correction value VOCa for correcting an overcurrent reference voltage VOCo, and the second differential amplifier circuit 131 is composed of a comparator 132 and resistors 133 to 136 , and has VOCa as an inverting input, and has an uncorrected overcurrent reference voltage VOCo as an non-inverting input, and outputs a corrected overcurrent reference voltage VOC.
- the diodes have the negative temperature characteristics, as the temperature of the switching element drops, the VF 1 and the VF 2 become higher.
- VF 1 ⁇ VF 2 is calculated as a correction value VOCa
- VOCo ⁇ VOCa i.e. VOCo+VF 2 ⁇ VF 1 is output as a corrected overcurrent reference voltage VOC.
- the uncorrected overcurrent reference voltage VOCo of the control circuit has a positive temperature characteristic, and becomes higher as the temperature of the control circuit rises and becomes lower as the temperature of the control circuit drops.
- FIG. 3 shows an example of the relation between the temperatures of the switching element and the control circuit, and VF 1 , VF 2 , and VOCa output values in the first example of the overcurrent reference voltage correction circuit 4
- FIG. 4 shows an example of the relation of VOCo and VOC in addition to them.
- Celsius temperature is assumed as the unit for T 1 and T 2
- V is assumed as the unit for VF 1 , VF 2 , VOCa, VOCo, and VOC
- the resistance values of resistors 122 and 123 are the same
- VF 1 is (150 ⁇ T 1 ) ⁇ 10
- VF 2 is (150 ⁇ T 2 ) ⁇ 10
- the voltage of a power source 124 is 750 V
- VCC is 1500 V
- VF 0 is 1500 V
- VOCo is T 1 ⁇ 8.
- this is just one example.
- the correction value VOCa is 0; however, if T 1 becomes higher than T 2 , as the difference between T 1 and T 2 increases, a negative value having a larger absolute value is output, and VOCa is subtracted from VOCo having lowered due to the influence of the low temperature T 2 of the control circuit, such that the overcurrent reference voltage VOC is set to a value substantially depending only on the temperature of the switching element.
- FIG. 5 shows a second example of the overcurrent reference voltage correction circuit 4 of the present invention. This is obtained by assuming the case where the temperature detection means have positive temperature characteristics and reversing the inputs VF 1 and VF 2 with respect to the first differential amplifier circuit 121 of the first example.
- VF 2 ⁇ VF 1 is calculated as a correction value VOCa
- VOCo ⁇ VOCa i.e. VOCo+VF 1 ⁇ VF 2 is output as a corrected overcurrent reference voltage VOC
- T 1 becomes higher than T 2
- a negative value having a larger absolute value is output as a correction value VOCa, such that the overcurrent reference voltage VOC is set to a value substantially depending only on the switching element.
- FIG. 6 shows a third example of the overcurrent reference voltage correction circuit 4 of the present invention.
- the third example is obtained by inserting a digitizing circuit 101 into the inverting input side of the first differential amplifier circuit 121 of the first example of the overcurrent reference voltage correction circuit 4 , and the digitizing circuit 101 performs digitization on an input value in a plurality of stages, and outputs the digitized value, and the digitizing circuit 101 of FIG. 6 is for performing digitization in three stages.
- the number of stages for digitization is not limited to three.
- the digitizing circuit 101 is composed of two comparators 102 and 103 which have a signal from VF 1 as their inverting input and have two kinds of reference potentials as their non-inverting inputs, two switches 104 and 105 for three kinds of potentials, three upstream-side resistors 106 to 108 , and four downstream-side resistors 109 to 112 , and outputs a potential VF 1 a which is obtained from the resistors 109 to 112 .
- VF 1 is input to the non-inverting input terminals of the comparators 102 and 103 of the digitizing circuit 101 .
- the resistors 106 , 107 , and 108 are connected in series with potential VCC in this order, and one end of the resistor 108 which is not connected to the resistor 107 is grounded.
- the non-inverting input terminal of the comparator 102 is connected between the resistor 106 and the resistor 107
- the non-inverting input terminal of the comparator 103 is connected between the resistor 107 and the resistor 108 .
- the resistors 109 , 110 , 111 , and 112 are connected in series with the potential VCC in this order, and one end of the resistor 112 which is not connected to the resistor 111 is grounded.
- the switch 104 is connected to the contact point of the resistor 110 and the resistor 111 , and the switch 104 is turned on and off according to whether the output signal of the comparator 102 represents “true” or “false”.
- the switch 105 is connected to the contact point of the resistor 111 and the resistor 112 , and the switch 105 is turned on and off according to whether the output signal of the comparator 103 represents “true” or “false”.
- the other ends of the switches 104 and 105 are connected to the contact point of the resistor 109 and the resistor 110 , and VF 1 a is output to the first differential amplifier circuit 121 .
- VF 1 is compared with the overcurrent reference voltages generated by the resistors 106 to 108 , and the switch 104 is turned on and off according to whether the output signal of the comparator 102 represents “true” or “false”, and the switch 105 is turned on and off according to whether the output of the comparator 103 represents “true” or “false”.
- VF 1 becomes a high value, and a value representing “false” is output from both of the comparators 102 and 103 , and the switches 104 and 105 are turned off, and a high potential which is obtained between the resistors 109 and 110 in the serial connection of the resistors 109 to 112 is output as VF 1 a.
- VF 1 becomes a low value, whereby the value representing “true” is output from both of the comparators 102 and 103 . Therefore, the switches 104 and 105 are turned on, and a higher potential which is obtained between the resistors 109 and 112 in the serial connection of the resistors 109 to 112 is output as VF 1 a.
- VF 1 a -VF 2 is calculated as a correction value VOCa
- VOCo ⁇ VOCa i.e. VOCo+VF 2 ⁇ VF 1 a is output as a corrected overcurrent reference voltage VOC.
- FIG. 7 shows an example of the relation of the temperatures between the temperatures of the switching element and the control circuit, and VF 1 , VF 2 , VF 1 a , and VOCa output values in the third example of the overcurrent reference voltage correction circuit 4
- FIG. 8 shows an example of the relation of VOCo and VOC in addition to them.
- Celsius temperature is assumed as the unit for T 1 and T 2
- V is assumed as the unit for VF 1 , VF 2 , VF 1 a , VOCa, VOCo, and VOC
- the resistance values R 106 to R 112 of resistors 106 to 112 satisfies the relation in which the resistance values R 106 , R 107 , and R 108 are the same, and the resistance values R 123 , R 124 , R 125 , and R 126 are the same, and the resistance values R 133 , R 134 , R 135 , and R 136 are the same
- the ratio of the resistance values R 109 , R 110 , R 111 , and R 112 is 1:4:20:5, and VF 1 is (150 ⁇ T 1 ) ⁇ 10, and VF 2 is (150 ⁇ T 2 ) ⁇ 10, and VCC is 1500 V, and VF 0 is 1500 V, and VOCo is
- VF 1 is in a range exceeding 1000 V, a range exceeding 500 V and lower than 1000 V, and a range lower than 500 V, respectively, 250 W, 750 W, and 1250 W are output as VF 1 a , respectively, and the correction value VOCa for the overcurrent reference voltage VOC is close to 0 when T 1 is close to T 2 ; however, if T 1 becomes higher than T 2 , as the difference between T 1 and T 2 increases, a negative value having a larger absolute value as T 1 is output, and VOCa is subtracted from VOCo lowered by the influence of the low temperature T 2 of the control circuit, such that the overcurrent reference voltage VOC is set to a value substantially depending only on the temperature of the switching element.
- the third example treats the inverting input VF 1 a of the first differential amplifier circuit 121 as discrete numeric values of a plurality of stages, i.e. a standard stage, a slightly high stage, and a high stage, whereby the correction value VOCa for the overcurrent reference voltage and the overcurrent reference voltage VOC which are outputs also become slightly discrete values.
- the digitizing circuit 101 may be connected to the non-inverting input side of the first differential amplifier circuit 121 , or may be connected to the output side of the second differential amplifier circuit 131 , or a plurality of digitizing circuits may be combined in the same way. Similarly, even in the case where the means for detecting the temperatures of the switching element and the control circuit have positive temperature characteristics, the same connection may be performed.
- FIG. 9 shows an example in which a digitizing circuit 101 has been inserted on the non-inverting input side of the differential amplifier circuit 121 , as a fourth example of the overcurrent reference voltage correction circuit 4 .
- the digitizing circuit 101 has VF 2 as an input value, and has a value VF 2 a which is obtained by digitizing the input value as an output value, and inputs VF 1 and VF 2 a to the inverting input side and non-inverting input side of the first differential amplifier circuit 121 , respectively.
- FIG. 10 shows an example in which a digitizing circuit 101 has been inserted on the output side of a differential amplifier circuit 122 , as a fifth example of the overcurrent reference voltage correction circuit 4 .
- the digitizing circuit 101 has the output voltage VOCb of the second differential amplifier circuit 131 as an input value and has a value VOC which is obtained by digitizing the input value as an output value.
- FIGS. 11 and 12 shows an example of the relation between the temperatures T 1 and T 2 , and VOCa, and VOC in the case where the means for detecting the temperatures of the switching element and the control circuit have negative temperature characteristics, i.e. the first example of the overcurrent reference voltage correction circuit 4 .
- They are expansions of the display ranges of FIG. 3 and FIG. 4 to the range in which T 2 is higher than T 1 , and definition of each value is the same as that in the above-mentioned first embodiment of the circuit.
- VOC to be output by the above-mentioned circuit becomes a value substantially depending only on the temperature of the switching element.
- the overcurrent protection operation region of the power semiconductor device of the present invention according to the first example of the overcurrent reference voltage correction circuit 4 is shown in FIG. 17 . Further, the maximum value and minimum value of operating temperature assumed for the power semiconductor device are denoted by TH and TL.
- the intersection 203 of the sense voltage 202 and the overcurrent reference voltage VBH i.e. a collector current ICTH becomes an overcurrent value, and the redundant range becomes narrow as shown by a reference symbol “208”.
Abstract
Description
- The present application claims priority from Japanese Patent Application No. 2020-049108, filed Mar. 19, 2020, the entire content of which is incorporated herein by reference.
- The present invention relates to a power semiconductor device, and more particularly to a protection method of a module having a control circuit and a switching element such as an IGBT.
- In the related art, configurations obtained by modularizing power switching elements such as insulated gate bipolar transistors (IGBTs) and metal-oxide-semiconductor field-effect transistors (MOSFETs) (hereinafter, referred to as switching element modules) have been known.
- Such switching element modules have various protection methods (protection functions), and as one of such methods (functions), an overcurrent protection method is provided.
- The overcurrent protection method includes at least a diode for chip temperature detection attached to a switching element and an IC for performing a protection operation as components. The diode for chip temperature detection may be integrated with the switching element (see
Patent Literature 1 for instance), or may be provided on the same circuit board separately from the switching element or be provided together with the switching element in the same resin case (see the second embodiment ofPatent Literature 2 for instance, and this is shown inFIG. 24 of this specification). Herein, a circuit board is an insulating substrate having a predetermined circuit pattern and having electronic components mounted thereon. -
FIG. 18 is a view illustrating an example of the internal configuration of an intelligent power module (IPM) of the related art which is a kind of switching element module. - In an
IPM 300 shown inFIG. 18 , an inverter for outputting three-phase AC voltage is configured. Therefore, theIPM 300 has a positive power supply terminal P, a negative power supply terminal N, and output terminals U, V, and W, and includes sixIGBTs 301 to 306. TheIGBTs 301 to 306 are connected in reverse parallel byprotective diodes 311 to 316 mounted on the same circuit pattern, respectively. Between the positive power supply terminal P and the negative power supply terminal N, theIGBT 301 theIGBT 303, and the IGBT 305 are connected in series with theIGBT 302, the IGBT 304, and theIGBT 306, respectively, so as to form three sets of arm parts. Further, the intermediate connection parts of the individual arm parts for U, V, and W phases are connected to the output terminals U, V, and W, respectively (Patent Literature 1). - The
IGBTs 301 to 306 have temperature detection diodes having p-n junctions on the centers of their front surfaces (emitter terminals) with insulating layers interposed therebetween. As a result, each of theIGBTs 301 to 306 can observe the chip temperature close to the junction temperature by monitoring the forward voltage depending on the temperature of the temperature detection diode. - Furthermore, the gate terminals and the temperature detection diodes of the
IGBTs 301 to 306 are connected to controlICs 321 to 326. Thecontrol ICs 321 to 326 perform switching control on theIGBTs 301 to 306, and apply constant currents to the temperature detection diodes, thereby detecting overheat conditions of theIGBTs 301 to 306. -
FIGS. 19 to 24 show semiconductor element modules which are a kind of switching element modules, and module units each of which includes a plurality of such semiconductor element modules.FIG. 19 is a bird's eye view of the internal structure of asemiconductor element module 500. On an insulatingsubstrate 403 provided on abottom metal substrate 409, anemitter pattern 404 and acollector pattern 405 are provided, and on them, anIGBT 401 and adiode element 402 are further provided, and the IGBT is electrically coupled with agate pattern 406 and acontrol emitter pattern 408 bymetal wires 407 such that thegate pattern 406 and thecontrol emitter pattern 408 are connected to agate terminal 413 and acontrol emitter terminal 414.FIG. 20 is a view illustrating thesemiconductor element module 500 as seen from above, andFIG. 21 is a side view ofFIG. 20 as seen from an arrow A.FIGS. 20 and 21 show that the internal structure shown inFIG. 19 has been formed in aresin case 410, and amain emitter terminal 411, amain collector terminal 412, and so on have been provided on theemitter pattern 404 and thecollector pattern 405.FIG. 22 is a view illustrating a module unit having eightsemiconductor element modules 500, andFIG. 23 is a side view ofFIG. 22 as seen from an arrow B. AlthoughIGBTs 401, thesemiconductor element modules 500 including them, and acontrol board 420 exist, thecontrol board 420 is mounted outside thesemiconductor element modules 500. Reference symbols “501” and “502” indicate the unit frame.FIG. 24 shows the second embodiment in which athermistor 432 for detecting the temperature in asemiconductor element module 600 has been provided on an intermediate insulatingsubstrate 431 and is covered with a resin case (Patent Literature 2). - In the following description of the drawings, identical or similar parts are denoted by the same or similar reference symbols. Further, the maximum value and minimum value of operating temperature assumed for a power semiconductor device are denoted by TH and TL.
- In
FIG. 13 , an example of a power semiconductor device of the related art is shown. The power semiconductor device includes acontrol circuit 1, aswitching element 2, and adiode 8 for switching-element temperature detection. Thecontrol circuit 1 includes an overcurrentreference voltage circuit 5 a, anovercurrent detection comparator 6, a sensevoltage detection resistor 7, anoverheat detection comparator 9, an overheatreference voltage circuit 10, and afilter 13. - The
control circuit 1 is connected to theswitching element 2 as shown inFIG. 13 . In other words, thecontrol circuit 1 has an output terminal OUT for outputting a gate voltage, an overcurrent detection terminal OC, and an overheat detection terminal OH. - The output terminal OUT is connected to the gate terminal of the
switching element 2, and the overcurrent detection terminal OC is connected to the emitter terminal of theswitching element 2 for current sensing. The emitter terminal of theswitching element 2 is connected to ground potential. - In the
control circuit 1, the overheat detection terminal OH is connected to a constant-current source 11 and the inverting input terminal of theoverheat detection comparator 9, and the non-inverting input terminal of theoverheat detection comparator 9 is connected to the overheatreference voltage circuit 10. The overheat detection terminal OH is connected to the anode terminal of thediode 8 for switching-element temperature detection, and the cathode terminal of thediode 8 for switching-element temperature detection is connected to ground potential. - A constant current produced by the constant-
current source 11 always flows into thediode 8 for switching-element temperature detection, so forward voltage corresponding to the chip temperature of theswitching element 2 is applied to the inverting input terminal of theoverheat detection comparator 9. Herein, it is assumed that thediode 8 for switching-element temperature detection has a negative temperature characteristic, and the overheatreference voltage circuit 10 outputs an overheat reference voltage VOH1 corresponding to the temperature TH. In this case, theoverheat detection comparator 9 outputs a low-level protection operation signal when the chip temperature is lower than TH, and outputs a high-level protection operation signal if the chip temperature becomes a temperature equal to or higher than TH. If this high-level protection operation signal is output, thecontrol circuit 1 outputs an alarm signal from an alarm output circuit and simultaneously performs control to turn off theswitching element 2. - In the
control circuit 1, the overcurrent detection terminal OC is connected to the sensevoltage detection resistor 7 and the inverting input terminal of theovercurrent detection comparator 6, and the non-inverting input terminal of theovercurrent detection comparator 6 is connected to the overcurrentreference voltage circuit 5 a. The output part of theovercurrent detection comparator 6 is connected to the input part of thefilter 13, such that voltages other than a voltage proportional to the collector current are removed. - In general, as an overcurrent detecting method, a method of shunting a current of about one ten thousandth of the emitter current in the
switching element 2, and comparing a voltage (sense voltage) which is obtained when the corresponding current flows in the sensevoltage detection resistor 7 with an overcurrent reference voltage VOC which is generated in the overcurrentreference voltage circuit 5 a of theovercurrent detection comparator 6, thereby detecting the current, and determining the magnitude of the current on the basis of the magnitude of the sense voltage, and performing alarm output and gate shut-off by a logic circuit for protection operation signal transmission is known. - In
FIG. 15 , a condition for overcurrent detection/determination is shown. The relation between collector current and sense voltage is a relation in which the sense voltage becomes higher as the collector current increases as shown by aline 201, and when the sense voltage is compared with a predetermined reference voltage value VB, if the sense voltage exceeds the reference voltage value, the collector current is regarded as exceeding the collector current value IC of the intersection of the predetermined reference voltage and the above-mentioned line, and is determined as being an overcurrent. - The sense voltage becomes higher as the temperature of the
switching element 2 rises, and the current detection voltage becomes higher as the temperature of the control circuit rises. - In
FIG. 16 , an overcurrent protection operation of a power semiconductor device of the related art is shown. A reference symbol “202” indicates sense voltage when the temperature is TH, and a reference symbol “204” indicates sense voltage when the temperature is TL. Further, a reference symbol “VBH” indicates reference voltage when the temperatures are TH, and a reference symbol “VBL” indicates reference voltage when the temperatures are TL. - In general, the temperatures of the switching element and the control circuit are almost the same, or the temperature of the switching element is slightly higher.
- Therefore, as shown in
FIG. 16 , when both temperatures are TH, the sense voltage is represented by theline 202, and the reference voltage is VBH. Therefore, an overcurrent detection value becomes theintersection 203 of them, and a range equal to or higher than a collector current ICTH becomes an overcurrent protection range. When both temperatures are TL, the sense voltage is represented by theline 204, and the reference voltage is VBL. Therefore, an overcurrent detection value becomes theintersection 205 of them, and a range equal to or higher than a collector current ICTL becomes an overcurrent protection range. - [Patent Literature 1] WO 2016/039342
- [Patent Literature 2] JP2002-184940A
- The case where the temperature of the switching element and the temperature of the control circuit are extremely different may occur. Especially, in the case where the control circuit is provided outside the switching element as disclosed in
Patent Literature 2, heat generated on one side may not be sufficiently transmitted to the other side, so such a case may occur. - In the case where the temperature of the switching element is extremely higher than the temperature of the control circuit, an overcurrent detection value which is calculated in the related art becomes a value lower than a value originally required, so excessive protection is performed.
- For example, in the case where the temperature of the switching element is TH, and the temperature of the control circuit is TL, the
intersection 206 of thesense voltage 202 and the reference voltage VBL becomes an overcurrent value, and a range equal to or higher than a collector current ICmin becomes an overcurrent protection range. However, when the temperature of the switching element is taken into consideration, originally, a range equal to or higher than ICTH is an overcurrent protection range, and when the collector current is between ICmin and ICTH, originally unnecessary protection is performed. - Therefore, in the related art, the overcurrent protection range has a
redundant region 207. - The present invention was made in view of the above-mentioned problem, and an object of the present invention is to provide a semiconductor device with a high-accuracy switching element protection function and a protection method thereof.
- In order to achieve the object, the gist of the present invention is to provide a switching element, a control circuit configured to control the switching element and have an overcurrent protection method, and individual temperature detector for the switching element and the control circuit, and correct an overcurrent detection reference on the basis of two detection values detected by both temperature detector.
- The switching element may be mounted on a circuit board which is formed of an insulating substrate having a predetermined circuit pattern and having electronic components mounted thereon, and the control circuit may be mounted on another circuit board which is formed of an insulating substrate having a predetermined circuit pattern and having electronic components mounted thereon. The switching element and the control circuit may be mounted on the same circuit board.
- For the switching element, a resin case may be formed so as to cover it, and for the control circuit, another resin case is formed so as to cover it. The switching element and the control circuit may be mounted in the same resin case.
- The temperature detector for the switching element is provided in the same element, or on the circuit board where the switching element is mounted, or in the resin case where the switching element is stored, or in the vicinity thereof where it can measure the temperature of the switching element.
- Further, the temperature detector for the control circuit is provided in the same control circuit, or on the circuit board where the control circuit is mounted, or in the resin case where the control circuit is stored, or in the vicinity thereof where it can measure the temperature of the control circuit.
- As the switching element, a MOSFET or an IGBT may be used, and as the temperature detector, diodes may be used.
- In the case of using means having negative temperature characteristics like diodes as the temperature detector, the circuit for correcting an overcurrent detection reference may determine a detection voltage obtained by the temperature detector for the switching element in a plurality of stages, and set a corrected voltage in the same number of stages, thereby performing conversion into an output voltage having the reversed magnitude relation with respect to the detection voltage, and output a value calculated on the basis of the sum of the output voltage and the detection voltage obtained by the temperature detector for the control circuit, as an overcurrent detection reference value.
- Also, in the case of using means having positive temperature characteristics as the temperature detector, the circuit for correcting an overcurrent detection reference may determine a detection voltage obtained by the temperature detector for the control circuit in a plurality of stages, and set a corrected voltage in the same number of stages, thereby performing conversion into an output voltage having the reversed magnitude relation with respect to the detection voltage, and output a value calculated on the basis of the sum of the output voltage and a detection voltage obtained by the temperature detector for the switching element, as an overcurrent detection reference value.
- Also, in the case of using means having negative temperature characteristics as the temperature detector for the switching element and the control circuit, the circuit for correcting an overcurrent detection reference may perform conversion into an output voltage having the reversed magnitude relation with respect to a detection voltage obtained by the temperature detector for the switching element, and output a value calculated on the basis of the sum of the output voltage and a detection voltage obtained by the temperature detector for the control circuit, as an overcurrent detection reference value.
- Also, in the case of using means having positive temperature characteristics as the temperature detector for the switching element and the control circuit, the circuit for correcting an overcurrent detection reference may perform conversion into an output voltage having the reversed magnitude relation with respect to a detection voltage obtained by the temperature detector for the control circuit, and output a value calculated on the basis of the sum of the output voltage and a detection voltage obtained by the temperature detection means for the switching element, as an overcurrent detection reference value.
- Also, in the case of using a means having a positive temperature characteristic and a means having a negative temperature characteristic as the temperature detector for the switching element and the temperature detector for the control circuit, respectively, the circuit for correcting an overcurrent detection reference may output a value calculated on the basis of the sum of detection voltages obtained by both temperature detectors, as an overcurrent detection reference value.
- According to the present invention, by correcting an overcurrent protection detection level, it is possible to reduce a redundant region of overcurrent protection current, and it is possible to improve the accuracy of the overcurrent protection method.
-
FIG. 1 is a block diagram illustrating a first embodiment of a power semiconductor device according to the present invention. -
FIG. 2 is a circuit diagram illustrating a first example of an overcurrent reference voltage correction circuit of the present invention. -
FIG. 3 is a view illustrating an example of the relation between T1 and T2, and inputs VF1, VF2, and correction values VOCa in the first example of the overcurrent reference voltage correction circuit of the present invention. -
FIG. 4 is a view illustrating an example of the relation between T1 and T2, and inputs VF1, VF2, uncorrected reference voltages VOCo, and outputs VOC in the first example of the overcurrent reference voltage correction circuit of the present invention. -
FIG. 5 shows a second example of the overcurrent reference voltage correction circuit of the present invention. -
FIG. 6 shows a third example of the overcurrent reference voltage correction circuit of the present invention. -
FIG. 7 is a view illustrating an example of the relation between T1 and T2, and inputs VF1, VF2, and correction values VOCa in the third example of the overcurrent reference voltage correction circuit of the present invention. -
FIG. 8 is a view illustrating an example of the relation between T1 and T2, and inputs VF1, VF2, uncorrected reference voltages VOCo, and outputs VOC in the third example of the overcurrent reference voltage correction circuit of the present invention. -
FIG. 9 is a circuit diagram illustrating a fourth example of the overcurrent reference voltage correction circuit of the present invention. -
FIG. 10 is a circuit diagram illustrating a fifth example of the overcurrent reference voltage correction circuit of the present invention. -
FIG. 11 is a view illustrating an expansion of the outputs of the drawing (FIG. 3 ) illustrating the example of the relation between T1 and T2, and inputs VF1 and VF2 and correction values VOCa in the first example of the overcurrent reference voltage correction circuit of the present invention to a range in which T2 is higher than T1. -
FIG. 12 is a view illustrating an expansion of the outputs of the drawing (FIG. 4 ) illustrating the example of the relation between T1 and T2, and inputs VF1 and VF2, the uncorrected reference voltages VOCo, and outputs VOC in the first example of the overcurrent reference voltage correction circuit of the present invention to a range in which T2 is higher than T1. -
FIG. 13 is a block diagram illustrating an example of a power semiconductor device of the related art. -
FIG. 14 is a block diagram illustrating a second embodiment of the power semiconductor device according to the present invention. -
FIG. 15 is a view illustrating an overcurrent protection operation region of the power semiconductor device. -
FIG. 16 is a view illustrating a redundant region of an overcurrent protection operation of the power semiconductor device of the related art. -
FIG. 17 is a view illustrating a redundant region of the overcurrent protection operation of the power semiconductor device according to the embodiment of the present invention. -
FIG. 18 is a view illustrating an example of the internal structure of a switching element module (IPM) of the related art. -
FIG. 19 is a view illustrating an example of the internal structure of a semiconductor element module of the related art in which a switching element and a control circuit are separated. -
FIG. 20 is a view illustrating the example of the internal structure of the semiconductor element module of the related art in which the switching element and the control circuit are separated. -
FIG. 21 is a view illustrating the example of the internal structure of the semiconductor element module of the related art in which the switching element and the control circuit are separated. -
FIG. 22 is a view illustrating an example of a module unit of the related art in which switching elements and control circuits are separated. -
FIG. 23 is a view illustrating the example of the module unit of the related art in which the switching elements and the control circuits are separated. -
FIG. 24 is a view illustrating an example of the internal structure of a semiconductor element module of the related art in which a semiconductor element and a control circuit are separated and which includes a temperature detector. - A first embodiment of power semiconductor devices according to embodiments of the present invention includes a
control circuit 1, aswitching element 2, and adiode 8 for switching-element temperature detection as shown inFIG. 1 . In the present embodiment, an example in which an IGBT is used as the switchingelement 2 is shown. Thediode 8 for switching-element temperature detection may be built in theswitching element 2. In the case where the switchingelement 2 is an IGBT, it is formed of polysilicon on the center of a front surface (an emitter terminal) with an insulating film interposed therebetween. Alternatively, thediode 8 for switching-element temperature detection may be disposed at a position where it can measure the temperature of theswitching element 2, separately from the switchingelement 2. For example, the diode may be mounted on a circuit board where the switchingelement 2 is mounted, or may be disposed together with the switchingelement 2 in the same resin case, or may be disposed in the vicinity of the resin case where the switchingelement 2 is formed. Herein, the circuit board is an insulating board having a predetermined circuit pattern. - The
control circuit 1 includes a diode 3 for control circuit temperature detection, an overcurrent referencevoltage correction circuit 4, an overcurrentreference voltage circuit 5, anovercurrent detection comparator 6, a sensevoltage detection resistor 7, anoverheat detection comparator 9, an overheatreference voltage circuit 10, constant-current sources filter 13. Thecontrol circuit 1 and the diode 3 for control circuit temperature detection may be integrated in the same semiconductor substrate. For example, they are formed of polysilicon on a semiconductor substrate with an insulating film interposed therebetween. Alternatively, the diode 3 for temperature detection may be disposed at a position where it can measure the temperature of thecontrol circuit 1, separately from thecontrol circuit 1. For example, the diode may be mounted on a circuit board where thecontrol circuit 1 is mounted, or may be disposed together with thecontrol circuit 1 in the same resin case, or may be disposed in the vicinity of the resin case where thecontrol circuit 1 is formed. - The
control circuit 1 is connected to theswitching element 2 as shown inFIG. 1 . The switchingelement 2 includes a current sensing element arranged in parallel to an IGBT through which a main current flows. Thecontrol circuit 1 has an output terminal OUT for outputting a gate voltage, an overcurrent detection terminal OC, and an overheat detection terminal OH. Further, thecontrol circuit 1 and theswitching element 2 include the diode 3 for control circuit temperature detection and thediode 8 for switching-element temperature detection, and may be provided in the same circuit board, or may be provided in the same resin case, or may be formed separately. - The output terminal OUT is connected to the gate terminal of the
switching element 2, and the overcurrent detection terminal OC is connected to the current sensing terminal of the current sensing element of theswitching element 2. The emitter terminal of theswitching element 2 is connected to ground potential. - In the
control circuit 1, the overheat detection terminal OH is connected to the constant-current source 11, the inverting input terminal of theoverheat detection comparator 9, and the overcurrent referencevoltage correction circuit 4, and the non-inverting input terminal of theoverheat detection comparator 9 is connected to the overheatreference voltage circuit 10. The overheat detection terminal OH is connected to the anode terminal of thediode 8 for switching-element temperature detection, and the cathode terminal of thediode 8 for switching-element temperature detection is connected to the ground potential of thecontrol circuit 1. - A constant current produced by the constant-
current source 11 always flows into thediode 8 for switching-element temperature detection, so forward voltage corresponding to the chip temperature of theswitching element 2 is applied to the inverting input terminal of theoverheat detection comparator 9. Herein, it is assumed that thediode 8 for switching-element temperature detection has a negative temperature characteristic, and the overheatreference voltage circuit 10 outputs an overheat reference voltage VOH1 corresponding to the temperature TH. In this case, theoverheat detection comparator 9 outputs a low-level protection operation signal when the chip temperature is lower than TH, and outputs a high-level protection operation signal if the chip temperature becomes a temperature equal to or higher than TH. If this high-level protection operation signal is output, thecontrol circuit 1 outputs an alarm signal from an alarm output circuit and simultaneously performs control to turn off theswitching element 2. - In the
control circuit 1, the overcurrent detection terminal OC is connected to the sensevoltage detection resistor 7 and the inverting input terminal of theovercurrent detection comparator 6, and the non-inverting input terminal of theovercurrent detection comparator 6 is connected to the overcurrent referencevoltage correction circuit 4. The output part of theovercurrent detection comparator 6 is connected to the input part of thefilter 13, such that voltages other than a voltage proportional to the collector current is removed. - A constant current produced by the constant-
current source 12 always flows into the diode 3 for control circuit temperature detection, so forward voltage corresponding to the temperature of thecontrol circuit 1 is applied as VF2 to the overcurrent referencevoltage correction circuit 4. - The overcurrent reference
voltage correction circuit 4 calculates a correction value VOCa for correcting an overcurrent reference voltage VOCo to be output from the overcurrentreference voltage circuit 5, on the basis of a signal VF1 obtained by thediode 8 for switching-element temperature detection and a signal VF2 obtained by the above-mentioned diode 3 for control circuit temperature detection, and transmits a corrected overcurrent reference voltage VOC to the non-inverting input of thecomparator 6. - The
overcurrent detection comparator 6 compares a sense voltage which is obtained when a current of about one ten thousandth of the emitter current of theswitching element 2 is shunted and the corresponding current flows in the sensevoltage detection resistor 7 with the overcurrent reference voltage VOC, and transmits a protection operation signal. - A second embodiment of power semiconductor devices according to embodiments of the present invention includes a
control circuit 1, aswitching element 2 a, and adiode 8 for switching-element temperature detection as shown inFIG. 14 . In the present embodiment, an example in which a MOSFET is used as the switchingelement 2 a is shown. The switchingelement 2 a and thediode 8 for switching-element temperature detection may be integrally formed as one chip, or may be provided in the same circuit board or in the same resin case, or the diode for switching-element temperature detection may be provided at a position where it can measure the temperature of the switching element, in the vicinity of the resin case in which theswitching element 2 a is formed. Herein, the circuit board is an insulating substrate having a predetermined circuit pattern and having electronic components mounted thereon. - The
control circuit 1 includes a diode 3 for control circuit temperature detection, an overcurrent referencevoltage correction circuit 4, an overcurrentreference voltage circuit 5, anovercurrent detection comparator 6, a sensevoltage detection resistor 7, anoverheat detection comparator 9, an overheatreference voltage circuit 10, constant-current sources filter 13. Thecontrol circuit 1 and the diode 3 for control circuit temperature detection may be integrally formed as one chip, or may be provided in the same circuit board or in the same resin case, or the diode for control circuit temperature detection may be provided at a position where it can measure the temperature of the control circuit, in the vicinity of the resin case in which thecontrol circuit 1 is formed. - The
control circuit 1 is connected to theswitching element 2 a as shown inFIG. 14 . The switchingelement 2 includes a current sensing element arranged in parallel to a MOSFET through which a main current flows. Thecontrol circuit 1 has an output terminal OUT for outputting a gate voltage, an overcurrent detection terminal OC, and an overheat detection terminal OH. The drain terminal of theswitching element 2 a is connected to the ground potential. Thecontrol circuit 1 and theswitching element 2 a include the diode 3 for control circuit temperature detection and thediode 8 for switching-element temperature detection, and may be formed in the same resin case, or may be formed separately. - The output terminal OUT is connected to the gate terminal of the
switching element 2 a, and the overcurrent detection terminal OC is connected to the source terminal of theswitching element 2 a. - In the
control circuit 1, the overheat detection terminal OH is connected to the constant-current source 11, the inverting input terminal of theoverheat detection comparator 9, and the overcurrent referencevoltage correction circuit 4, and the non-inverting input terminal of theoverheat detection comparator 9 is connected to the overheatreference voltage circuit 10. The overheat detection terminal OH is also connected to the anode terminal of thediode 8 for switching-element temperature detection provided in theswitching element 2 a, and the cathode terminal of thediode 8 for switching-element temperature detection is connected to the ground potential of thecontrol circuit 1. - A constant current produced by the constant-
current source 11 always flows into thediode 8 for switching-element temperature detection, so forward voltage corresponding to the chip temperature of theswitching element 2 a is applied to the inverting input terminal of theoverheat detection comparator 9. Herein, it is assumed that thediode 8 for switching-element temperature detection has a negative temperature characteristic, and the overheatreference voltage circuit 10 outputs an overheat reference voltage VOH1 corresponding to the temperature TH. In this case, theoverheat detection comparator 9 outputs a low-level protection operation signal when the chip temperature is lower than TH, and outputs a high-level protection operation signal if the chip temperature becomes a temperature equal to or higher than TH. If this high-level protection operation signal is output, thecontrol circuit 1 outputs an alarm signal from an alarm output circuit and simultaneously performs control to turn off theswitching element 2 a. - In the
control circuit 1, the overcurrent detection terminal OC is connected to the sensevoltage detection resistor 7 and the inverting input terminal of theovercurrent detection comparator 6, and the non-inverting input terminal of theovercurrent detection comparator 6 is connected to the overcurrent referencevoltage correction circuit 4. The output part of theovercurrent detection comparator 6 is connected to the input part of thefilter 13, such that voltages other than a voltage proportional to the collector current is removed. - A constant current produced by the constant-
current source 12 always flows into the diode 3 for control circuit temperature detection, so forward voltage corresponding to the temperature of thecontrol circuit 1 is applied as VF2 to the overcurrent referencevoltage correction circuit 4. - The overcurrent reference
voltage correction circuit 4 calculates a correction value VOCa for correcting an overcurrent reference voltage VOCo to be output from the overcurrentreference voltage circuit 5, on the basis of a signal VF1 obtained by thediode 8 for switching-element temperature detection and a signal VF2 obtained by the above-mentioned diode 3 for control circuit temperature detection, and transmits a corrected overcurrent reference voltage VOC to the non-inverting input of theovercurrent detection comparator 6. - The
overcurrent detection comparator 6 compares the source voltage of theswitching element 2 a with the overcurrent reference voltage VOC, and transmits a protection operation signal. -
FIG. 2 shows a first example of the overcurrent referencevoltage correction circuit 4 of the present invention. The overcurrent reference voltage correction circuit is composed ofdifferential amplifier circuits differential amplifier circuit 121 is composed of acomparator 122 andresistors 123 to 126, and has VF2 as an inverting input, and has VF1 as an non-inverting input, and outputs a correction value VOCa for correcting an overcurrent reference voltage VOCo, and the seconddifferential amplifier circuit 131 is composed of acomparator 132 andresistors 133 to 136, and has VOCa as an inverting input, and has an uncorrected overcurrent reference voltage VOCo as an non-inverting input, and outputs a corrected overcurrent reference voltage VOC. - Since the diodes have the negative temperature characteristics, as the temperature of the switching element drops, the VF1 and the VF2 become higher.
- In the first
differential amplifier circuit 121, VF1−VF2 is calculated as a correction value VOCa, and in the seconddifferential amplifier circuit 131, VOCo−VOCa, i.e. VOCo+VF2−VF1 is output as a corrected overcurrent reference voltage VOC. - The uncorrected overcurrent reference voltage VOCo of the control circuit has a positive temperature characteristic, and becomes higher as the temperature of the control circuit rises and becomes lower as the temperature of the control circuit drops.
-
FIG. 3 shows an example of the relation between the temperatures of the switching element and the control circuit, and VF1, VF2, and VOCa output values in the first example of the overcurrent referencevoltage correction circuit 4, andFIG. 4 shows an example of the relation of VOCo and VOC in addition to them. As for the numeric values shown in the drawings, Celsius temperature is assumed as the unit for T1 and T2, and V is assumed as the unit for VF1, VF2, VOCa, VOCo, and VOC, and it is assumed that the resistance values ofresistors power source 124 is 750 V, and VCC is 1500 V, and VF0 is 1500 V, and VOCo is T1×8. However, this is just one example. In the drawings, when T1 is equal to T2, the correction value VOCa is 0; however, if T1 becomes higher than T2, as the difference between T1 and T2 increases, a negative value having a larger absolute value is output, and VOCa is subtracted from VOCo having lowered due to the influence of the low temperature T2 of the control circuit, such that the overcurrent reference voltage VOC is set to a value substantially depending only on the temperature of the switching element. -
FIG. 5 shows a second example of the overcurrent referencevoltage correction circuit 4 of the present invention. This is obtained by assuming the case where the temperature detection means have positive temperature characteristics and reversing the inputs VF1 and VF2 with respect to the firstdifferential amplifier circuit 121 of the first example. - In the first
differential amplifier circuit 121, VF2−VF1 is calculated as a correction value VOCa, and in the seconddifferential amplifier circuit 131, VOCo−VOCa, i.e. VOCo+VF1−VF2 is output as a corrected overcurrent reference voltage VOC, and if T1 becomes higher than T2, as the difference between T1 and T2 increases, a negative value having a larger absolute value is output as a correction value VOCa, such that the overcurrent reference voltage VOC is set to a value substantially depending only on the switching element. -
FIG. 6 shows a third example of the overcurrent referencevoltage correction circuit 4 of the present invention. The third example is obtained by inserting a digitizingcircuit 101 into the inverting input side of the firstdifferential amplifier circuit 121 of the first example of the overcurrent referencevoltage correction circuit 4, and the digitizingcircuit 101 performs digitization on an input value in a plurality of stages, and outputs the digitized value, and the digitizingcircuit 101 ofFIG. 6 is for performing digitization in three stages. However, the number of stages for digitization is not limited to three. - The digitizing
circuit 101 is composed of twocomparators switches side resistors 106 to 108, and four downstream-side resistors 109 to 112, and outputs a potential VF1 a which is obtained from theresistors 109 to 112. - To the non-inverting input terminals of the
comparators circuit 101, VF1 is input. Theresistors resistor 108 which is not connected to theresistor 107 is grounded. The non-inverting input terminal of thecomparator 102 is connected between theresistor 106 and theresistor 107, and the non-inverting input terminal of thecomparator 103 is connected between theresistor 107 and theresistor 108. - The
resistors resistor 112 which is not connected to theresistor 111 is grounded. - The
switch 104 is connected to the contact point of theresistor 110 and theresistor 111, and theswitch 104 is turned on and off according to whether the output signal of thecomparator 102 represents “true” or “false”. Theswitch 105 is connected to the contact point of theresistor 111 and theresistor 112, and theswitch 105 is turned on and off according to whether the output signal of thecomparator 103 represents “true” or “false”. - The other ends of the
switches resistor 109 and theresistor 110, and VF1 a is output to the firstdifferential amplifier circuit 121. - In the
comparators resistors 106 to 108, and theswitch 104 is turned on and off according to whether the output signal of thecomparator 102 represents “true” or “false”, and theswitch 105 is turned on and off according to whether the output of thecomparator 103 represents “true” or “false”. - In the case where the temperature of the switching element is in a standard range, VF1 becomes a high value, and a value representing “false” is output from both of the
comparators switches resistors resistors 109 to 112 is output as VF1 a. - However, in the case where the temperature of the switching element is slightly higher than the standard range, a value representing “true” is output from the
comparator 102, and the value representing “false” is output from thecomparator 103, whereby theswitch 104 is turned on, and the a slightly high potential which is obtained between theresistors resistors - Further, in the case where the temperature of the switching element is higher than the standard range, VF1 becomes a low value, whereby the value representing “true” is output from both of the
comparators switches resistors resistors 109 to 112 is output as VF1 a. - In the first
differential amplifier circuit 121, VF1 a-VF2 is calculated as a correction value VOCa, and in the seconddifferential amplifier circuit 131, VOCo−VOCa, i.e. VOCo+VF2−VF1 a is output as a corrected overcurrent reference voltage VOC. -
FIG. 7 shows an example of the relation of the temperatures between the temperatures of the switching element and the control circuit, and VF1, VF2, VF1 a, and VOCa output values in the third example of the overcurrent referencevoltage correction circuit 4, andFIG. 8 shows an example of the relation of VOCo and VOC in addition to them. As for the numeric values shown in the drawings, Celsius temperature is assumed as the unit for T1 and T2, and V is assumed as the unit for VF1, VF2, VF1 a, VOCa, VOCo, and VOC, and it is assumed that the resistance values R106 to R112 ofresistors 106 to 112 satisfies the relation in which the resistance values R106, R107, and R108 are the same, and the resistance values R123, R124, R125, and R126 are the same, and the resistance values R133, R134, R135, and R136 are the same, and the ratio of the resistance values R109, R110, R111, and R112 is 1:4:20:5, and VF1 is (150−T1)×10, and VF2 is (150−T2)×10, and VCC is 1500 V, and VF0 is 1500 V, and VOCo is T1×8. However, this is just one example. In the drawing, with respect to three stages in which T1 is in a range lower than 50° C., a range equal to or higher than 50° C. and lower than 100° C., and a range higher than 100° C., respectively, i.e. three stages in which VF1 is in a range exceeding 1000 V, a range exceeding 500 V and lower than 1000 V, and a range lower than 500 V, respectively, 250 W, 750 W, and 1250 W are output as VF1 a, respectively, and the correction value VOCa for the overcurrent reference voltage VOC is close to 0 when T1 is close to T2; however, if T1 becomes higher than T2, as the difference between T1 and T2 increases, a negative value having a larger absolute value as T1 is output, and VOCa is subtracted from VOCo lowered by the influence of the low temperature T2 of the control circuit, such that the overcurrent reference voltage VOC is set to a value substantially depending only on the temperature of the switching element. - While the first example and the second example treat VF1 and VF2 as continuous analog values, the third example treats the inverting input VF1 a of the first
differential amplifier circuit 121 as discrete numeric values of a plurality of stages, i.e. a standard stage, a slightly high stage, and a high stage, whereby the correction value VOCa for the overcurrent reference voltage and the overcurrent reference voltage VOC which are outputs also become slightly discrete values. - The digitizing
circuit 101 may be connected to the non-inverting input side of the firstdifferential amplifier circuit 121, or may be connected to the output side of the seconddifferential amplifier circuit 131, or a plurality of digitizing circuits may be combined in the same way. Similarly, even in the case where the means for detecting the temperatures of the switching element and the control circuit have positive temperature characteristics, the same connection may be performed. -
FIG. 9 shows an example in which adigitizing circuit 101 has been inserted on the non-inverting input side of thedifferential amplifier circuit 121, as a fourth example of the overcurrent referencevoltage correction circuit 4. In the present example, the digitizingcircuit 101 has VF2 as an input value, and has a value VF2 a which is obtained by digitizing the input value as an output value, and inputs VF1 and VF2 a to the inverting input side and non-inverting input side of the firstdifferential amplifier circuit 121, respectively. -
FIG. 10 shows an example in which adigitizing circuit 101 has been inserted on the output side of adifferential amplifier circuit 122, as a fifth example of the overcurrent referencevoltage correction circuit 4. In the fifth example, the digitizingcircuit 101 has the output voltage VOCb of the seconddifferential amplifier circuit 131 as an input value and has a value VOC which is obtained by digitizing the input value as an output value. - Even in the case where a so-called overcurrent protection insufficiency range occurs, such as the case where the temperature of the control circuit is extremely higher than the temperature of the switching element, i.e. the case where the overcurrent detection value becomes a value higher than a value originally required in the related art and thus protection is not performed in a current range in which protection is required, all of these overcurrent reference
voltage correction circuits 4 can narrow the overcurrent protection insufficiency range. -
FIGS. 11 and 12 shows an example of the relation between the temperatures T1 and T2, and VOCa, and VOC in the case where the means for detecting the temperatures of the switching element and the control circuit have negative temperature characteristics, i.e. the first example of the overcurrent referencevoltage correction circuit 4. They are expansions of the display ranges ofFIG. 3 andFIG. 4 to the range in which T2 is higher than T1, and definition of each value is the same as that in the above-mentioned first embodiment of the circuit. As shown in the drawings, for example, even in the case where the temperature of the control circuit is higher than the temperature of the switching element, VOC to be output by the above-mentioned circuit becomes a value substantially depending only on the temperature of the switching element. - The overcurrent protection operation region of the power semiconductor device of the present invention according to the first example of the overcurrent reference
voltage correction circuit 4 is shown inFIG. 17 . Further, the maximum value and minimum value of operating temperature assumed for the power semiconductor device are denoted by TH and TL. - For example, in the case where the temperature of the switching element is TH and the temperature of the control circuit is TL, the
intersection 203 of thesense voltage 202 and the overcurrent reference voltage VBH, i.e. a collector current ICTH becomes an overcurrent value, and the redundant range becomes narrow as shown by a reference symbol “208”.
Claims (24)
Applications Claiming Priority (3)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2020-049108 | 2020-03-19 | ||
JP2020049108A JP2021150820A (en) | 2020-03-19 | 2020-03-19 | Semiconductor device and over-current protection function of the same |
JPJP2020-049108 | 2020-03-19 |
Publications (2)
Publication Number | Publication Date |
---|---|
US20210296881A1 true US20210296881A1 (en) | 2021-09-23 |
US11594873B2 US11594873B2 (en) | 2023-02-28 |
Family
ID=77748946
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
US17/184,816 Active 2041-04-04 US11594873B2 (en) | 2020-03-19 | 2021-02-25 | Semiconductor device and overcurrent protection method |
Country Status (3)
Country | Link |
---|---|
US (1) | US11594873B2 (en) |
JP (1) | JP2021150820A (en) |
CN (1) | CN113497438A (en) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US20220069815A1 (en) * | 2020-08-25 | 2022-03-03 | Fuji Electric Co., Ltd. | Semiconductor device |
Families Citing this family (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
WO2023089661A1 (en) * | 2021-11-16 | 2023-05-25 | 三菱電機株式会社 | Power semiconductor device and control system |
Family Cites Families (7)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP4040838B2 (en) | 2000-12-18 | 2008-01-30 | 三菱電機株式会社 | Power semiconductor device |
EP1289014B1 (en) * | 2001-04-02 | 2013-06-19 | Mitsubishi Denki Kabushiki Kaisha | Power semiconductor device |
JP4924086B2 (en) | 2007-02-21 | 2012-04-25 | 三菱電機株式会社 | Semiconductor device |
DE112015000606T5 (en) * | 2014-09-09 | 2016-11-03 | Fuji Electric Co., Ltd. | Semiconductor module |
DE102018219957A1 (en) * | 2018-11-21 | 2020-05-28 | Conti Temic Microelectronic Gmbh | Power electronics assembly with a temperature sensor |
US11183835B2 (en) * | 2019-07-16 | 2021-11-23 | Infineon Technologies Austria Ag | Short circuit detection and protection for a gate driver circuit and methods of detecting the same using logic analysis |
KR20210015261A (en) * | 2019-08-01 | 2021-02-10 | 현대자동차주식회사 | Overcurrent detection reference compensation system of switching element for inverter and overcurrent detection system using the same |
-
2020
- 2020-03-19 JP JP2020049108A patent/JP2021150820A/en active Pending
-
2021
- 2021-02-25 US US17/184,816 patent/US11594873B2/en active Active
- 2021-03-01 CN CN202110225926.0A patent/CN113497438A/en active Pending
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US20220069815A1 (en) * | 2020-08-25 | 2022-03-03 | Fuji Electric Co., Ltd. | Semiconductor device |
US11575371B2 (en) * | 2020-08-25 | 2023-02-07 | Fuji Electric Co., Ltd. | Semiconductor device |
Also Published As
Publication number | Publication date |
---|---|
CN113497438A (en) | 2021-10-12 |
JP2021150820A (en) | 2021-09-27 |
US11594873B2 (en) | 2023-02-28 |
Similar Documents
Publication | Publication Date | Title |
---|---|---|
US11594873B2 (en) | Semiconductor device and overcurrent protection method | |
US7414867B2 (en) | Power conversion device | |
US8155916B2 (en) | Semiconductor component and method of determining temperature | |
EP1993131A2 (en) | Method and apparatus for thermal protection in an integrated circuit | |
US8848330B2 (en) | Circuit with a temperature protected electronic switch | |
US9300198B2 (en) | Semiconductor device, including temperature sensing circut | |
KR960026762A (en) | Complex MOSFET | |
US9985552B2 (en) | Power conversion apparatus configured to include plurality of power converter circuits of inverter circuits | |
US20210033649A1 (en) | Current detection apparatus | |
US10031162B2 (en) | Current detection device and method for sensing an electric current | |
US20220069815A1 (en) | Semiconductor device | |
WO2016039342A1 (en) | Semiconductor module | |
US7573687B2 (en) | Power semiconductor device | |
US11171639B2 (en) | Overvoltage protection | |
US11462445B2 (en) | Semiconductor module and semiconductor-module deterioration detecting method | |
JP3311498B2 (en) | Semiconductor device | |
Jeong et al. | Effective resistor selection method for over current protection when using sense IGBT solution | |
US11469750B2 (en) | Switching apparatus and determination apparatus | |
US20190207599A1 (en) | Detection device, protection system and method | |
CN111220838B (en) | Semiconductor device with a plurality of semiconductor chips | |
US20240003960A1 (en) | Semiconductor device | |
JPH11340459A (en) | Temperature detecting circuit | |
US11929354B2 (en) | Power semiconductor module | |
US11552629B1 (en) | Semiconductor device and manufacturing method thereof | |
JP4171238B2 (en) | Overheat detection circuit |
Legal Events
Date | Code | Title | Description |
---|---|---|---|
AS | Assignment |
Owner name: FUJI ELECTRIC CO., LTD., JAPAN Free format text: ASSIGNMENT OF ASSIGNORS INTEREST;ASSIGNOR:MINAGAWA, KEI;REEL/FRAME:055407/0927 Effective date: 20210219 |
|
FEPP | Fee payment procedure |
Free format text: ENTITY STATUS SET TO UNDISCOUNTED (ORIGINAL EVENT CODE: BIG.); ENTITY STATUS OF PATENT OWNER: LARGE ENTITY |
|
STPP | Information on status: patent application and granting procedure in general |
Free format text: DOCKETED NEW CASE - READY FOR EXAMINATION |
|
STPP | Information on status: patent application and granting procedure in general |
Free format text: NON FINAL ACTION MAILED |
|
STPP | Information on status: patent application and granting procedure in general |
Free format text: NOTICE OF ALLOWANCE MAILED -- APPLICATION RECEIVED IN OFFICE OF PUBLICATIONS |
|
STCF | Information on status: patent grant |
Free format text: PATENTED CASE |
|
CC | Certificate of correction |