US20210183680A1 - V-shape seal band for a semiconductor processing chamber - Google Patents
V-shape seal band for a semiconductor processing chamber Download PDFInfo
- Publication number
- US20210183680A1 US20210183680A1 US17/184,454 US202117184454A US2021183680A1 US 20210183680 A1 US20210183680 A1 US 20210183680A1 US 202117184454 A US202117184454 A US 202117184454A US 2021183680 A1 US2021183680 A1 US 2021183680A1
- Authority
- US
- United States
- Prior art keywords
- seal band
- shaped body
- ring shaped
- top surface
- elastomer seal
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000004065 semiconductor Substances 0.000 title description 6
- 229920001971 elastomer Polymers 0.000 claims description 19
- 239000000806 elastomer Substances 0.000 claims description 19
- 239000000463 material Substances 0.000 claims description 19
- 230000006835 compression Effects 0.000 claims description 12
- 238000007906 compression Methods 0.000 claims description 12
- 239000000945 filler Substances 0.000 claims description 7
- 229920006169 Perfluoroelastomer Polymers 0.000 claims description 6
- 229910052731 fluorine Inorganic materials 0.000 claims description 4
- 239000011800 void material Substances 0.000 claims description 4
- 239000011737 fluorine Substances 0.000 claims description 3
- QVGXLLKOCUKJST-UHFFFAOYSA-N atomic oxygen Chemical compound [O] QVGXLLKOCUKJST-UHFFFAOYSA-N 0.000 claims description 2
- 229910052760 oxygen Inorganic materials 0.000 claims description 2
- 239000001301 oxygen Substances 0.000 claims description 2
- QQONPFPTGQHPMA-UHFFFAOYSA-N propylene Natural products CC=C QQONPFPTGQHPMA-UHFFFAOYSA-N 0.000 claims description 2
- BFKJFAAPBSQJPD-UHFFFAOYSA-N tetrafluoroethene Chemical group FC(F)=C(F)F BFKJFAAPBSQJPD-UHFFFAOYSA-N 0.000 claims description 2
- PXGOKWXKJXAPGV-UHFFFAOYSA-N Fluorine Chemical compound FF PXGOKWXKJXAPGV-UHFFFAOYSA-N 0.000 claims 1
- 239000000758 substrate Substances 0.000 abstract description 44
- 238000001816 cooling Methods 0.000 description 33
- 239000010410 layer Substances 0.000 description 14
- 239000012790 adhesive layer Substances 0.000 description 13
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- 239000013529 heat transfer fluid Substances 0.000 description 4
- 238000002347 injection Methods 0.000 description 4
- 239000007924 injection Substances 0.000 description 4
- -1 perfluoro compound Chemical class 0.000 description 4
- 238000005516 engineering process Methods 0.000 description 3
- 238000000034 method Methods 0.000 description 3
- YCKRFDGAMUMZLT-UHFFFAOYSA-N Fluorine atom Chemical compound [F] YCKRFDGAMUMZLT-UHFFFAOYSA-N 0.000 description 2
- PNEYBMLMFCGWSK-UHFFFAOYSA-N aluminium oxide Inorganic materials [O-2].[O-2].[O-2].[Al+3].[Al+3] PNEYBMLMFCGWSK-UHFFFAOYSA-N 0.000 description 2
- 230000015572 biosynthetic process Effects 0.000 description 2
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- 238000010943 off-gassing Methods 0.000 description 2
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- 238000005240 physical vapour deposition Methods 0.000 description 2
- 229920003223 poly(pyromellitimide-1,4-diphenyl ether) Polymers 0.000 description 2
- BLTXWCKMNMYXEA-UHFFFAOYSA-N 1,1,2-trifluoro-2-(trifluoromethoxy)ethene Chemical compound FC(F)=C(F)OC(F)(F)F BLTXWCKMNMYXEA-UHFFFAOYSA-N 0.000 description 1
- PIGFYZPCRLYGLF-UHFFFAOYSA-N Aluminum nitride Chemical compound [Al]#N PIGFYZPCRLYGLF-UHFFFAOYSA-N 0.000 description 1
- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 description 1
- 239000004696 Poly ether ether ketone Substances 0.000 description 1
- 239000004698 Polyethylene Substances 0.000 description 1
- 239000004642 Polyimide Substances 0.000 description 1
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 1
- 229920006355 Tefzel Polymers 0.000 description 1
- 239000000853 adhesive Substances 0.000 description 1
- 230000001070 adhesive effect Effects 0.000 description 1
- 229910052782 aluminium Inorganic materials 0.000 description 1
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 description 1
- 238000000137 annealing Methods 0.000 description 1
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- 230000003028 elevating effect Effects 0.000 description 1
- QHSJIZLJUFMIFP-UHFFFAOYSA-N ethene;1,1,2,2-tetrafluoroethene Chemical compound C=C.FC(F)=C(F)F QHSJIZLJUFMIFP-UHFFFAOYSA-N 0.000 description 1
- 239000012530 fluid Substances 0.000 description 1
- 229910002804 graphite Inorganic materials 0.000 description 1
- 239000010439 graphite Substances 0.000 description 1
- 229920006247 high-performance elastomer Polymers 0.000 description 1
- 239000012212 insulator Substances 0.000 description 1
- 230000000670 limiting effect Effects 0.000 description 1
- 239000007788 liquid Substances 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
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- 230000000149 penetrating effect Effects 0.000 description 1
- 230000035515 penetration Effects 0.000 description 1
- 238000009832 plasma treatment Methods 0.000 description 1
- 229920006260 polyaryletherketone Polymers 0.000 description 1
- 229920002530 polyetherether ketone Polymers 0.000 description 1
- 229920000573 polyethylene Polymers 0.000 description 1
- 229920001721 polyimide Polymers 0.000 description 1
- 229920000642 polymer Polymers 0.000 description 1
- 229920001296 polysiloxane Polymers 0.000 description 1
- 230000002028 premature Effects 0.000 description 1
- 238000005086 pumping Methods 0.000 description 1
- 230000002829 reductive effect Effects 0.000 description 1
- 238000007789 sealing Methods 0.000 description 1
- 229910052710 silicon Inorganic materials 0.000 description 1
- 239000010703 silicon Substances 0.000 description 1
- 239000003039 volatile agent Substances 0.000 description 1
- 230000004580 weight loss Effects 0.000 description 1
- 229910001845 yogo sapphire Inorganic materials 0.000 description 1
Images
Classifications
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/67005—Apparatus not specifically provided for elsewhere
- H01L21/67011—Apparatus for manufacture or treatment
- H01L21/67098—Apparatus for thermal treatment
- H01L21/67109—Apparatus for thermal treatment mainly by convection
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/683—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping
- H01L21/6831—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping using electrostatic chucks
- H01L21/6833—Details of electrostatic chucks
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
- F16B—DEVICES FOR FASTENING OR SECURING CONSTRUCTIONAL ELEMENTS OR MACHINE PARTS TOGETHER, e.g. NAILS, BOLTS, CIRCLIPS, CLAMPS, CLIPS OR WEDGES; JOINTS OR JOINTING
- F16B47/00—Suction cups for attaching purposes; Equivalent means using adhesives
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
- F16J—PISTONS; CYLINDERS; SEALINGS
- F16J15/00—Sealings
- F16J15/02—Sealings between relatively-stationary surfaces
- F16J15/021—Sealings between relatively-stationary surfaces with elastic packing
- F16J15/022—Sealings between relatively-stationary surfaces with elastic packing characterised by structure or material
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
- F16J—PISTONS; CYLINDERS; SEALINGS
- F16J15/00—Sealings
- F16J15/02—Sealings between relatively-stationary surfaces
- F16J15/06—Sealings between relatively-stationary surfaces with solid packing compressed between sealing surfaces
- F16J15/10—Sealings between relatively-stationary surfaces with solid packing compressed between sealing surfaces with non-metallic packing
- F16J15/102—Sealings between relatively-stationary surfaces with solid packing compressed between sealing surfaces with non-metallic packing characterised by material
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
- F16J—PISTONS; CYLINDERS; SEALINGS
- F16J15/00—Sealings
- F16J15/02—Sealings between relatively-stationary surfaces
- F16J15/06—Sealings between relatively-stationary surfaces with solid packing compressed between sealing surfaces
- F16J15/10—Sealings between relatively-stationary surfaces with solid packing compressed between sealing surfaces with non-metallic packing
- F16J15/104—Sealings between relatively-stationary surfaces with solid packing compressed between sealing surfaces with non-metallic packing characterised by structure
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/67005—Apparatus not specifically provided for elsewhere
- H01L21/67011—Apparatus for manufacture or treatment
- H01L21/67126—Apparatus for sealing, encapsulating, glassing, decapsulating or the like
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/683—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping
- H01L21/6831—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping using electrostatic chucks
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/683—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping
- H01L21/687—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping using mechanical means, e.g. chucks, clamps or pinches
- H01L21/68714—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping using mechanical means, e.g. chucks, clamps or pinches the wafers being placed on a susceptor, stage or support
- H01L21/68785—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping using mechanical means, e.g. chucks, clamps or pinches the wafers being placed on a susceptor, stage or support characterised by the mechanical construction of the susceptor, stage or support
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/67005—Apparatus not specifically provided for elsewhere
- H01L21/67011—Apparatus for manufacture or treatment
- H01L21/67098—Apparatus for thermal treatment
- H01L21/67103—Apparatus for thermal treatment mainly by conduction
Definitions
- Examples described herein generally relate to a seal band that can be utilized in a substrate support assembly of a semiconductor processing chamber.
- VLSI very large scale integration
- ULSI ultra large-scale integration
- Reliably producing nanometer and smaller features is one of the key technology challenges for next generation very large scale integration (VLSI) and ultra large-scale integration (ULSI) of semiconductor devices.
- VLSI very large scale integration
- ULSI ultra large-scale integration
- Reliable formation of gate structures on the substrate is important to VLSI and ULSI success and to the continued effort to increase circuit density and quality of individual substrates and die.
- IC integrated chip
- ESC electrostatic chucks
- the bond may be protected with a seal.
- the electrostatic chuck may experience bonding problems within the substrate support assemblies due to fluorine radical penetration etching away the bonding layer once the seal has been compromised. Loss of bond material accelerates delamination of the ESC from the cooling plate. Additionally, a compromised seal may cause the bond material to outgas into the processing volume, thereby causing contamination in the chamber.
- the chamber may require down time to repair or replace the substrate support assembly, effecting costs, yield and performance.
- the seal band has a ring shaped body.
- the ring shaped body has an inner surface, a top surface, and a bottom surface. Each of the top surface and the bottom surface extend from the inner surface at a first angle of more than 110° from the inner surface.
- the seal band also has an outer surface that has an indent formed therein. The outer surface connects the top surface to the bottom surface.
- a second angle is formed between an imaginary line normal to the inner surface and the bottom surface. The second angle is between about 10° and about 30°.
- the ring shaped body has a cross-sectional profile forming a V-shape.
- an elastomer seal band has a ring shaped body that includes an inner surface, a top surface, and a bottom surface. Each of the top surface and the bottom surface extend from the inner surface at a first angle of more than 110° from the inner surface.
- the seal band includes an outer surface having an indent formed therein. The outer surface connects the top surface to the bottom surface. A second angle is formed between an imaginary line normal to the inner surface and the bottom surface. The second angle between about 10° and about 30°.
- the ring shaped body further includes a vertical height defined as a vertical distance between an intersection of the outer surface and the top surface, and an intersection of the outer surface and the bottom surface.
- the ring shaped body includes a horizontal length defined as a horizontal distance between the outer surface and the inner surface. The vertical height is greater than a horizontal length.
- the ring shaped body has a cross-sectional profile forming a V-shape.
- an elastomer seal band has a ring shaped body with an outer diameter between about 306 mm and about 310 mm.
- the ring shaped body is formed from a perfluoroelastomer void of fillers having a Shore D hardness between about 60 and 80.
- the ring shaped body has a tensile strength between about 10 Mpa and about 15 Mpa.
- the ring shaped body includes an inner surface, a top surface, and a bottom surface. Each of the top surface and the bottom surface extend from the inner surface at an angle of more than 110° from the inner surface.
- the ring shaped body has an outer surface that has an indent formed therein. The outer surface connects the top surface to the bottom surface. The indent forms a profile in the elastomer seal band having a V-shape.
- FIG. 1 is a cross-sectional schematic side view of a processing chamber having one embodiment of a substrate support assembly.
- FIG. 2A is a top plan view of a seal for the substrate support assembly.
- FIG. 2B is a cross sectional view of the seal taken across section line B-B in FIG. 2A .
- FIG. 3 is a partial cross-sectional schematic side view of the substrate support assembly detailing one embodiment of the seal disposed between an electrostatic substrate support and a cooling plate.
- a seal band for a substrate support assembly disposed within a semiconductor processing chamber.
- the seal band protects an adhesive layer that is disposed between an electrostatic chuck (ESC) and a cooling plate of the substrate support assembly.
- ESC electrostatic chuck
- the seal band is particularly advantageous for ESC applications that are exposed to high temperature operation.
- High temperature is intended to refer to temperatures in excess of about 150 degrees Celsius, for example, temperatures in excess of about 250 degrees Celsius, such as temperatures of about 250 degrees Celsius to about 300 degrees Celsius.
- the seal band is disposed on the outer perimeter of the bonding layer to prevent the bonding material from outgassing or being attacked by the harsh chamber environment.
- the seal band is configured to have increased contact area for maintaining the integrity and longevity of the seal.
- the substrate support assembly is described below in an etch processing chamber, the substrate support assembly may be utilized in other types of plasma processing chambers, such as physical vapor deposition chambers, chemical vapor deposition chambers, ion implantation chambers, among others, and other systems where protection of the bonding layer is desirable.
- FIG. 1 is a cross-sectional schematic view of an exemplary plasma processing chamber 100 , shown configured as an etch chamber, having a substrate support assembly 126 .
- the substrate support assembly 126 may be utilized in other types of processing plasma chambers, for example plasma treatment chambers, annealing chambers, physical vapor deposition chambers, chemical vapor deposition chambers, and ion implantation chambers, among others, as well as other systems where the ability to control processing uniformity for a surface or workpiece, such as a substrate, is desirable.
- the plasma processing chamber 100 includes a chamber body 102 having sidewalls 104 , a bottom 106 and a lid 108 that enclose a processing region 110 .
- An injection apparatus 112 is coupled to the sidewalls 104 and/or lid 108 of the chamber body 102 .
- a gas panel 114 is coupled to the injection apparatus 112 to allow process gases to be provided into the processing region 110 .
- the injection apparatus 112 may be one or more nozzle or inlet ports, or alternatively a showerhead. Processing gas, along with any processing by-products, are removed from the processing region 110 through an exhaust port 128 formed in the sidewalls 104 or bottom 106 of the chamber body 102 .
- the exhaust port 128 is coupled to a pumping system 132 , which includes throttle valves and pumps utilized to control the vacuum levels within the processing region 110 .
- the processing gas may be energized to form a plasma within the processing region 110 .
- the processing gas may be energized by capacitively or inductively coupling RF power to the processing gases.
- a plurality of coils 116 are disposed above the lid 108 of the plasma processing chamber 100 and coupled through a matching circuit 118 to an RF power source 120 .
- the substrate support assembly 126 is disposed in the processing region 110 below the injection apparatus 112 .
- the substrate support assembly 126 includes an electrostatic chuck 174 and a cooling plate 130 .
- the cooling plate 130 is supported by a base plate 176 .
- the base plate 176 is supported by one of the sidewalls 104 or bottom 106 of the processing chamber.
- the substrate support assembly 126 may additionally include a heater assembly (not shown). Additionally, the substrate support assembly 126 may include a facility plate 145 and/or an insulator plate (not shown) disposed between the cooling plate 130 and the base plate 176 .
- the cooling plate 130 may be formed from a metal material or other suitable material.
- the cooling plate 130 may be formed from aluminum (Al).
- the cooling plate 130 may include cooling channels 190 formed therein.
- the cooling channels 190 may be connected to a heat transfer fluid source 122 .
- the heat transfer fluid source 122 provides a heat transfer fluid, such as a liquid, gas or combination thereof, which is circulated through one or more cooling channels 190 disposed in the cooling plate 130 .
- the fluid flowing through neighboring cooling channels 190 may be isolated to enabling local control of the heat transfer between the electrostatic chuck 174 and different regions of the cooling plate 130 , which assists in controlling the lateral temperature profile of the substrate 124 .
- the heat transfer fluid circulating through the cooling channels 190 of the cooling plate 130 maintains the cooling plate 130 at a temperature between about 90 degrees Celsius and about 80 degrees Celsius, or at a temperature lower than 90 degrees Celsius.
- the electrostatic chuck 174 includes a chucking electrode 186 disposed in a dielectric body 175 .
- the dielectric body 175 has a workpiece support surface 137 and a bottom surface 133 opposite the workpiece support surface 137 .
- the dielectric body 175 of the electrostatic chuck 174 may be fabricated from a ceramic material, such as alumina (Al 2 O 3 ), aluminum nitride (AlN) or other suitable material.
- the dielectric body 175 may be fabricated from a polymer, such as polyimide, polyetheretherketone, polyaryletherketone and the like.
- the dielectric body 175 may also include one or more resistive heaters 188 embedded therein.
- the resistive heaters 188 may be provided to elevate the temperature of the substrate support assembly 126 to a temperature suitable for processing a substrate 124 disposed on the workpiece support surface 137 of the substrate support assembly 126 .
- the resistive heaters 188 are coupled through the facility plate 145 to a heater power source 189 .
- the heater power source 189 may provide 900 watts or more power to the resistive heaters 188 .
- a controller (not shown) may control the operation of the heater power source 189 , which is generally set to heat the substrate 124 to a predefined temperature.
- the resistive heaters 188 include a plurality of laterally separated heating zones, wherein the controller enables at least one zone of the resistive heaters 188 to be preferentially heated relative to the resistive heaters 188 located in one or more of the other zones.
- the resistive heaters 188 may be arranged concentrically in a plurality of separated heating zones.
- the resistive heaters 188 may maintain the substrate 124 at a temperature suitable for processing. In some embodiments utilizing elevated processing temperatures, the resistive heaters 188 may maintain the substrate 124 at a temperature between about 180 degrees Celsius to about 500 degrees Celsius.
- the electrostatic chuck 174 generally includes a chucking electrode 186 embedded in the dielectric body 175 .
- the chucking electrode 186 may be configured as a mono polar or bipolar electrode, or other suitable arrangement.
- the chucking electrode 186 is coupled through an RF filter to a chucking power source 187 , which provides a RF or DC power to electrostatically secure the substrate 124 to the workpiece support surface 137 of the electrostatic chuck 174 .
- the RF filter prevents RF power utilized to form a plasma (not shown) within the plasma processing chamber 100 from damaging electrical equipment or presenting an electrical hazard outside the chamber.
- the workpiece support surface 137 of the electrostatic chuck 174 may include gas passages (not shown) for providing backside heat transfer gas to the interstitial space defined between the substrate 124 and the workpiece support surface 137 of the electrostatic chuck 174 .
- the electrostatic chuck 174 may also include lift pin holes for accommodating lift pins (not shown) for elevating the substrate 124 above the workpiece support surface 137 of the electrostatic chuck 174 to facilitate robotic transfer into and out of the plasma processing chamber 100 .
- a bonding layer 150 is disposed between the electrostatic chuck 174 and the cooling plate 130 .
- the bonding layer 150 may be formed from several layers which provide for different thermal expansions of the electrostatic chuck 174 and the cooling plate 130 .
- the bonding layer 150 includes an adhesive layer (shown as 308 in FIG. 3 ) and a seal band 140 .
- the seal band 140 is configured to protect the adhesive material forming the adhesive layer of bonding layer 150 disposed between the electrostatic chuck 174 and the cooling plate 130 from the gases and plasma present in the processing region 110 .
- FIG. 2A is a top plan view of the seal band 140 .
- the seal band 140 has a ring shaped body 201 .
- the ring shaped body 201 has a center 202 about which the seal band 140 is substantially congruent.
- the ring shaped body 201 has an inner surface 212 and an outer surface 210 .
- the outer surface 210 of the ring shaped body 201 has a diameter 208 that defines the outside diameter of the seal band 140 .
- the diameter 208 may be between about 306 mm and about 310 mm, such as about 308 mm.
- the diameter 208 may be between about 206 mm and about 210 mm, such as about 208 mm.
- the diameter 208 may be between about 456 mm and about 460 mm, such as about 458 mm.
- the seal band 140 may be formed from a soft elastomeric material, for example, having a Shore D hardness of between about 60 and about 80, such as about 72 .
- the seal band 140 may additionally have a tensile strength between about 10 Mpa and about 15 Mpa, such as about 11.1 Mpa.
- the elastomeric material forming the seal band 140 may be elongated to about 160% of its original size prior to breaking.
- the seal band 140 may be formed from a high performance elastomer such as a tetrafluoro ethylene/propylene, a perfluoroelastomer such as Fluoritz-TR® or Perlast G67P®, or other suitable material.
- the seal band 140 is formed from Fluoritz-TR®.
- the material of the seal band 140 is void of fillers and is resistant to fluorine and oxygen chemistries for enhanced resistance to cracking and plasma radicals.
- the absence of filler material prevents premature crack formation that happens to conventional filled seals at the filler's material boundaries where the base elastomer has etched away. There may be an increase in the material erosion rate in absence of the filler material, but the larger contact and absence of cracks beneficially improves the service life of the seal band 140 .
- FIG. 2B is a cross sectional view of the seal band 140 taken across section line B-B in FIG. 2A .
- the seal band 140 has a top surface 254 and a bottom surface 252 .
- the top surface 254 and the bottom surface 252 are connected by the inner surface 212 .
- An imaginary normal line 253 may be disposed at 90° from the inner surface 212 .
- An angle 220 may be formed between the imaginary normal line 253 and the bottom surface 252 .
- the top surface 254 may be similarly angled with the imaginary normal line 253 as the bottom surface 252 .
- the angled 220 may be between about 10 degrees and about 30 degrees, such as about 20 degrees.
- the top surface 254 and the bottom surface 252 may have an angled 221 from the inner surface 212 of between about 100° and about 120°, such as more than about 110°.
- the top surface 254 and the bottom surface 252 may have a length 262 measured along the normal between the inner surface 212 and the outer surface 210 .
- the length 262 may be between about 1.55 mm and about 1.25 mm such as about 1.40 mm.
- the outer surface 210 may have a height 264 extending between the top surface 254 to the bottom surface 252 .
- the height 264 may be between about 2 . 075 mm and about 2.125 mm such as about 2.100 mm.
- the outer surface 210 may have an indent 230 formed therein.
- the indent 230 may produce a V-shaped profile for the seal band 140 .
- the indent 230 may have a depth 232 between about 0.30 mm and about 0.50 mm such as about 0.40 mm.
- the indent 230 permits the seal band 140 to be easily compressed for ease of installation, and to orientate the top surface 254 and bottom surface 252 in a substantially parallel orientation that enhances the contact area with the electrostatic chuck 174 and the cooling plate 130 when making a seal therebetween when disposed in the substrate support assembly 127 .
- the seal band 140 is symmetrical about an imaginary line bifurcating the indent 230 and inner surface 212 .
- FIG. 3 is a partial cross-sectional schematic side view of the substrate support assembly 126 detailing one embodiment of the seal band 140 disposed between an electrostatic chuck 174 and the cooling plate 130 .
- the bonding layer 150 disposed between the electrostatic chuck 174 and the cooling plate 130 may be formed from different materials.
- An electrical socket 360 may provide connections to the resistive heaters 188 and chucking electrode 186 embedded in the dielectric body 175 .
- the resistive heaters 188 may heat the bottom 133 of the electrostatic chuck 174 to temperatures above 250° Celsius.
- the bonding layer 150 may extend to about an outer diameter 352 of the electrostatic chuck 174 or the cooling plate 130 .
- the bonding layer 150 is flexible to account for thermal expansion between the electrostatic chuck 174 and the cooling plate 130 , to substantially prevent cracking, and to reduce the potential for the electrostatic chuck 174 delaminating from the cooling plate 130 .
- the bonding layer 150 includes at least one adhesive layer 308 .
- the adhesive layer 308 may be formed from a perfluoro compound, silicone, porous graphite, an acrylic compound, perfluoromethyl vinyl ether, alkoxy vinyl ether, CIRLEX®, TEFZEL®, KAPTON®, VESPEL®, KERIMID®, polyethylene, or other suitable material.
- the adhesive layer 308 may have a thickness 302 of about 1 mm to about 5 mm, such as about 1.75 mm.
- the adhesive layer 308 may have a thermal conductivity between about 0.1 W/mK and about 1 W/mK, such as about 0.17 W/mK.
- a notch 342 is formed between an outer periphery 350 of the adhesive layer 308 and the outer diameter 352 of the electrostatic chuck 174 .
- the diameter 208 of the seal band 140 is less than the outer diameter 352 of the electrostatic chuck 174 . Additionally, the diameter 208 of the seal band 140 is less than the outer diameter of the cooling plate 130 .
- the seal band 140 disposed about, i.e., circumscribes, the outer periphery 350 of the adhesive layer 308 .
- the notch 342 may be sized to permit the seal band 140 to sealingly engage the electrostatic chuck 174 and cooling plate 130 .
- the seal band 140 may optionally form a vacuum tight seal between the electrostatic chuck 174 and the cooling plate 130 , the primary function of the seal is to protect the exposed outer periphery 350 of the adhesive layer 308 from the environment within the processing region 110 .
- the seal band 140 prevents the process gas exposure to the bond material (adhesive layer 308 ) of the substrate support assembly 126 . That is, the seal band 140 protects the inner portions of the substrate support assembly 126 from exposure to the plasma environment. The seal band 140 prevents volatized gases from the adhesive layer 308 from contaminating the plasma environment. The seal band 140 protects the adhesive layer 308 and other internal structures of the substrate support assembly 127 from the plasma environment.
- the seal band 140 may be V-shaped.
- the shape of the seal band 140 provides a contact surface 310 for sealing which is substantially larger than conventional O-ring seals. Additionally, the V-shaped provides for easier installation of the seal band 140 .
- the force required to install the seal band 140 is decreased by about 40% compared to the force required to install a conventional O-ring.
- the seal band 140 has an installation force of about 0.63 N/mm whereas conventional O-rings have an installation force of about 1.00 N/mm.
- the contact surface 310 of the seal band 140 having the V-shaped, is substantially larger (in width) compared to the contact area of traditional O-rings.
- the contact surface 310 of the seal band 140 is about 30% greater than the contact area of conventional O-rings. As the temperature increases from 0 degrees Celsius to 50 degrees Celsius, the contact surface 310 of the seal band 140 increases from about 0.62 mm to about 0.74 mm.
- a compression load on the seal band 140 varies with the temperature of the seal band 140 .
- the seal band 140 may be compressed as much as 20%.
- the increase in compression of the seal band 140 at the higher temperature improves the seal-ability even after some erosion.
- the erosion profile of the seal band 140 may be indicative of the longevity for the seal band 140 .
- the erosion profile at 800 RF hours and 1700 RF hours have shown little wear requiring replacement of the seal band 140 .
- the compression load is not linear as thermal expansion of the seal band 140 leads to an increase squeeze of the seal band 140 resulting in an increase compression load.
- the material of the seal band 140 is softened by the heat and results in a decrease in the compression load.
- the compression load on the seal band 140 is about 0.23 N/mm; at 25 degrees Celsius, the compression load on the seal band 140 increases to about 0.26 N/mm; and at 50 degrees Celsius, the compression load on the seal band 140 decreases to about 0.15 N/mm.
- the resistance of the seal band 140 to initial cracking was tested on a metallic drum.
- the seal band 140 was stretched 28% on the metallic drum.
- the seal band 140 was exposed to plasma having O 2 and CF 4 flowing at a 196:4 ratio by weight.
- the seal band 140 formed from Fluoritz-TR demonstrated a greater than 100% increase in longevity from cracking compared to seal bands 140 formed from Fluoritz-T20, transparent perfluoro-elastomers (FFKM) B or D, white FFKM F, K or L, and POR. Additionally, the weight loss due to erosion was less than all the aforementioned materials except for Fuoritz-T20.
- the compression load and material of the seal band 140 significantly reduced cracking which may compromise the seal. For example, after 320 RF hours and 600 RF hours, the seal band 140 formed from Fluoritz-TR had no visible signs of erosion or cracking.
- the seal band 140 having a V-shaped substantially prevents cracking or degradation of the seal from harsh radical chemistries in the processing chamber, such as fluorine radicals penetrating and etching away the seal protecting the bonding layer.
- the seal band 140 having a V-shaped substantially minimizes the degradation of the bond between the ESC and the cooling plate while substantially preventing volatiles outgassing from the bonding layer from entering the processing environment.
- the seal band 140 having a V-shaped prevents contamination in the chamber and reduces chamber downtime which may affect process yields and costs of operations.
- Examples described herein generally relate to a seal band that can be utilized in a substrate support assembly of a semiconductor processing chamber. While the foregoing is directed to implementations of the present invention, other and further implementations of the invention may be devised without departing from the basic scope thereof, and the scope thereof is determined by the claims that follow.
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Abstract
Description
- This application is a continuation of and claims the benefit of U.S. patent application Ser. No. 15/361,365, filed Nov. 25, 2016, the contents of which is incorporated herein by reference in its entirety.
- Examples described herein generally relate to a seal band that can be utilized in a substrate support assembly of a semiconductor processing chamber.
- Reliably producing nanometer and smaller features is one of the key technology challenges for next generation very large scale integration (VLSI) and ultra large-scale integration (ULSI) of semiconductor devices. However, as the limits of circuit technology are pushed, the shrinking dimensions of VLSI and ULSI interconnect technology have placed additional demands on processing capabilities. Reliable formation of gate structures on the substrate is important to VLSI and ULSI success and to the continued effort to increase circuit density and quality of individual substrates and die.
- To drive down manufacturing cost, integrated chip (IC) manufactures demand higher throughput and better device yield and performance from every silicon substrate processed. Conventional electrostatic chucks (ESC) are typically bonded to a cooling plate in a substrate support assembly. The bond may be protected with a seal. However, the seals only provide a marginal protection due to a minimal surface contact between the ESC and the cooling plate. The electrostatic chuck may experience bonding problems within the substrate support assemblies due to fluorine radical penetration etching away the bonding layer once the seal has been compromised. Loss of bond material accelerates delamination of the ESC from the cooling plate. Additionally, a compromised seal may cause the bond material to outgas into the processing volume, thereby causing contamination in the chamber. The chamber may require down time to repair or replace the substrate support assembly, effecting costs, yield and performance.
- Thus, there is a need for an improved substrate support assembly.
- Examples described herein provide a seal band for use in a substrate support assembly for semiconductor processing. The seal band has a ring shaped body. The ring shaped body has an inner surface, a top surface, and a bottom surface. Each of the top surface and the bottom surface extend from the inner surface at a first angle of more than 110° from the inner surface. The seal band also has an outer surface that has an indent formed therein. The outer surface connects the top surface to the bottom surface. A second angle is formed between an imaginary line normal to the inner surface and the bottom surface. The second angle is between about 10° and about 30°. The ring shaped body has a cross-sectional profile forming a V-shape.
- In another example, an elastomer seal band has a ring shaped body that includes an inner surface, a top surface, and a bottom surface. Each of the top surface and the bottom surface extend from the inner surface at a first angle of more than 110° from the inner surface. The seal band includes an outer surface having an indent formed therein. The outer surface connects the top surface to the bottom surface. A second angle is formed between an imaginary line normal to the inner surface and the bottom surface. The second angle between about 10° and about 30°. The ring shaped body further includes a vertical height defined as a vertical distance between an intersection of the outer surface and the top surface, and an intersection of the outer surface and the bottom surface. The ring shaped body includes a horizontal length defined as a horizontal distance between the outer surface and the inner surface. The vertical height is greater than a horizontal length. The ring shaped body has a cross-sectional profile forming a V-shape.
- In another example, an elastomer seal band has a ring shaped body with an outer diameter between about 306 mm and about 310 mm. The ring shaped body is formed from a perfluoroelastomer void of fillers having a Shore D hardness between about 60 and 80. The ring shaped body has a tensile strength between about 10 Mpa and about 15 Mpa. The ring shaped body includes an inner surface, a top surface, and a bottom surface. Each of the top surface and the bottom surface extend from the inner surface at an angle of more than 110° from the inner surface. The ring shaped body has an outer surface that has an indent formed therein. The outer surface connects the top surface to the bottom surface. The indent forms a profile in the elastomer seal band having a V-shape.
- So that the manner in which the above recited features of the present invention can be understood in detail, a more particular description of the invention, briefly summarized above, may be had by reference to implementations, some of which are illustrated in the appended drawings. It is to be noted, however, that the appended drawings illustrate only typical implementations of this invention and are therefore not to be considered limiting of its scope, for the invention may admit to other equally effective implementations.
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FIG. 1 is a cross-sectional schematic side view of a processing chamber having one embodiment of a substrate support assembly. -
FIG. 2A is a top plan view of a seal for the substrate support assembly. -
FIG. 2B is a cross sectional view of the seal taken across section line B-B inFIG. 2A . -
FIG. 3 is a partial cross-sectional schematic side view of the substrate support assembly detailing one embodiment of the seal disposed between an electrostatic substrate support and a cooling plate. - To facilitate understanding, identical reference numerals have been used, where possible, to designate identical elements that are common to the figures. It is contemplated that elements disclosed in one implementation may be beneficially used in other implementations without specific recitation.
- Disclosed herein is a seal band for a substrate support assembly disposed within a semiconductor processing chamber. The seal band protects an adhesive layer that is disposed between an electrostatic chuck (ESC) and a cooling plate of the substrate support assembly. The seal band is particularly advantageous for ESC applications that are exposed to high temperature operation. High temperature is intended to refer to temperatures in excess of about 150 degrees Celsius, for example, temperatures in excess of about 250 degrees Celsius, such as temperatures of about 250 degrees Celsius to about 300 degrees Celsius. The seal band is disposed on the outer perimeter of the bonding layer to prevent the bonding material from outgassing or being attacked by the harsh chamber environment. The seal band is configured to have increased contact area for maintaining the integrity and longevity of the seal. Although the substrate support assembly is described below in an etch processing chamber, the substrate support assembly may be utilized in other types of plasma processing chambers, such as physical vapor deposition chambers, chemical vapor deposition chambers, ion implantation chambers, among others, and other systems where protection of the bonding layer is desirable.
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FIG. 1 is a cross-sectional schematic view of an exemplaryplasma processing chamber 100, shown configured as an etch chamber, having asubstrate support assembly 126. Thesubstrate support assembly 126 may be utilized in other types of processing plasma chambers, for example plasma treatment chambers, annealing chambers, physical vapor deposition chambers, chemical vapor deposition chambers, and ion implantation chambers, among others, as well as other systems where the ability to control processing uniformity for a surface or workpiece, such as a substrate, is desirable. Control of the dielectric properties tan(δ), i.e., dielectric loss, or ρ, i.e., the volume resistivity, for the substrate support at elevated temperature ranges and beneficially enables azimuthal processing uniformity for asubstrate 124 thereon. - The
plasma processing chamber 100 includes achamber body 102 havingsidewalls 104, a bottom 106 and alid 108 that enclose aprocessing region 110. Aninjection apparatus 112 is coupled to thesidewalls 104 and/orlid 108 of thechamber body 102. Agas panel 114 is coupled to theinjection apparatus 112 to allow process gases to be provided into theprocessing region 110. Theinjection apparatus 112 may be one or more nozzle or inlet ports, or alternatively a showerhead. Processing gas, along with any processing by-products, are removed from theprocessing region 110 through anexhaust port 128 formed in thesidewalls 104 or bottom 106 of thechamber body 102. Theexhaust port 128 is coupled to apumping system 132, which includes throttle valves and pumps utilized to control the vacuum levels within theprocessing region 110. - The processing gas may be energized to form a plasma within the
processing region 110. The processing gas may be energized by capacitively or inductively coupling RF power to the processing gases. In the embodiment depicted inFIG. 1 , a plurality ofcoils 116 are disposed above thelid 108 of theplasma processing chamber 100 and coupled through amatching circuit 118 to anRF power source 120. - The
substrate support assembly 126 is disposed in theprocessing region 110 below theinjection apparatus 112. Thesubstrate support assembly 126 includes anelectrostatic chuck 174 and acooling plate 130. Thecooling plate 130 is supported by abase plate 176. Thebase plate 176 is supported by one of thesidewalls 104 or bottom 106 of the processing chamber. Thesubstrate support assembly 126 may additionally include a heater assembly (not shown). Additionally, thesubstrate support assembly 126 may include afacility plate 145 and/or an insulator plate (not shown) disposed between the coolingplate 130 and thebase plate 176. - The
cooling plate 130 may be formed from a metal material or other suitable material. For example, thecooling plate 130 may be formed from aluminum (Al). Thecooling plate 130 may include coolingchannels 190 formed therein. The coolingchannels 190 may be connected to a heattransfer fluid source 122. The heattransfer fluid source 122 provides a heat transfer fluid, such as a liquid, gas or combination thereof, which is circulated through one ormore cooling channels 190 disposed in thecooling plate 130. The fluid flowing through neighboring coolingchannels 190 may be isolated to enabling local control of the heat transfer between theelectrostatic chuck 174 and different regions of thecooling plate 130, which assists in controlling the lateral temperature profile of thesubstrate 124. In one embodiment, the heat transfer fluid circulating through the coolingchannels 190 of thecooling plate 130 maintains thecooling plate 130 at a temperature between about 90 degrees Celsius and about 80 degrees Celsius, or at a temperature lower than 90 degrees Celsius. - The
electrostatic chuck 174 includes a chuckingelectrode 186 disposed in adielectric body 175. Thedielectric body 175 has aworkpiece support surface 137 and abottom surface 133 opposite theworkpiece support surface 137. Thedielectric body 175 of theelectrostatic chuck 174 may be fabricated from a ceramic material, such as alumina (Al2O3), aluminum nitride (AlN) or other suitable material. Alternately, thedielectric body 175 may be fabricated from a polymer, such as polyimide, polyetheretherketone, polyaryletherketone and the like. - The
dielectric body 175 may also include one or moreresistive heaters 188 embedded therein. Theresistive heaters 188 may be provided to elevate the temperature of thesubstrate support assembly 126 to a temperature suitable for processing asubstrate 124 disposed on theworkpiece support surface 137 of thesubstrate support assembly 126. Theresistive heaters 188 are coupled through thefacility plate 145 to aheater power source 189. Theheater power source 189 may provide 900 watts or more power to theresistive heaters 188. A controller (not shown) may control the operation of theheater power source 189, which is generally set to heat thesubstrate 124 to a predefined temperature. In one embodiment, theresistive heaters 188 include a plurality of laterally separated heating zones, wherein the controller enables at least one zone of theresistive heaters 188 to be preferentially heated relative to theresistive heaters 188 located in one or more of the other zones. For example, theresistive heaters 188 may be arranged concentrically in a plurality of separated heating zones. Theresistive heaters 188 may maintain thesubstrate 124 at a temperature suitable for processing. In some embodiments utilizing elevated processing temperatures, theresistive heaters 188 may maintain thesubstrate 124 at a temperature between about 180 degrees Celsius to about 500 degrees Celsius. - The
electrostatic chuck 174 generally includes a chuckingelectrode 186 embedded in thedielectric body 175. The chuckingelectrode 186 may be configured as a mono polar or bipolar electrode, or other suitable arrangement. The chuckingelectrode 186 is coupled through an RF filter to achucking power source 187, which provides a RF or DC power to electrostatically secure thesubstrate 124 to theworkpiece support surface 137 of theelectrostatic chuck 174. The RF filter prevents RF power utilized to form a plasma (not shown) within theplasma processing chamber 100 from damaging electrical equipment or presenting an electrical hazard outside the chamber. - The
workpiece support surface 137 of theelectrostatic chuck 174 may include gas passages (not shown) for providing backside heat transfer gas to the interstitial space defined between thesubstrate 124 and theworkpiece support surface 137 of theelectrostatic chuck 174. Theelectrostatic chuck 174 may also include lift pin holes for accommodating lift pins (not shown) for elevating thesubstrate 124 above theworkpiece support surface 137 of theelectrostatic chuck 174 to facilitate robotic transfer into and out of theplasma processing chamber 100. - A
bonding layer 150 is disposed between theelectrostatic chuck 174 and thecooling plate 130. Thebonding layer 150 may be formed from several layers which provide for different thermal expansions of theelectrostatic chuck 174 and thecooling plate 130. Thebonding layer 150 includes an adhesive layer (shown as 308 inFIG. 3 ) and aseal band 140. Theseal band 140 is configured to protect the adhesive material forming the adhesive layer ofbonding layer 150 disposed between theelectrostatic chuck 174 and thecooling plate 130 from the gases and plasma present in theprocessing region 110. -
FIG. 2A is a top plan view of theseal band 140. Theseal band 140 has a ring shapedbody 201. The ring shapedbody 201 has acenter 202 about which theseal band 140 is substantially congruent. The ring shapedbody 201 has aninner surface 212 and anouter surface 210. Theouter surface 210 of the ring shapedbody 201 has adiameter 208 that defines the outside diameter of theseal band 140. In one embodiment, thediameter 208 may be between about 306 mm and about 310 mm, such as about 308 mm. In another embodiment, thediameter 208 may be between about 206 mm and about 210 mm, such as about 208 mm. In yet another embodiment, thediameter 208 may be between about 456 mm and about 460 mm, such as about 458 mm. - The
seal band 140 may be formed from a soft elastomeric material, for example, having a Shore D hardness of between about 60 and about 80, such as about 72. Theseal band 140 may additionally have a tensile strength between about 10 Mpa and about 15 Mpa, such as about 11.1 Mpa. The elastomeric material forming theseal band 140 may be elongated to about 160% of its original size prior to breaking. Theseal band 140 may be formed from a high performance elastomer such as a tetrafluoro ethylene/propylene, a perfluoroelastomer such as Fluoritz-TR® or Perlast G67P®, or other suitable material. In one embodiment, theseal band 140 is formed from Fluoritz-TR®. The material of theseal band 140 is void of fillers and is resistant to fluorine and oxygen chemistries for enhanced resistance to cracking and plasma radicals. The absence of filler material prevents premature crack formation that happens to conventional filled seals at the filler's material boundaries where the base elastomer has etched away. There may be an increase in the material erosion rate in absence of the filler material, but the larger contact and absence of cracks beneficially improves the service life of theseal band 140. -
FIG. 2B is a cross sectional view of theseal band 140 taken across section line B-B inFIG. 2A . Theseal band 140 has atop surface 254 and abottom surface 252. Thetop surface 254 and thebottom surface 252 are connected by theinner surface 212. An imaginarynormal line 253 may be disposed at 90° from theinner surface 212. Anangle 220 may be formed between the imaginarynormal line 253 and thebottom surface 252. Thetop surface 254 may be similarly angled with the imaginarynormal line 253 as thebottom surface 252. The angled 220 may be between about 10 degrees and about 30 degrees, such as about 20 degrees. Thus, thetop surface 254 and thebottom surface 252 may have an angled 221 from theinner surface 212 of between about 100° and about 120°, such as more than about 110°. Thetop surface 254 and thebottom surface 252 may have alength 262 measured along the normal between theinner surface 212 and theouter surface 210. Thelength 262 may be between about 1.55 mm and about 1.25 mm such as about 1.40 mm. - The
outer surface 210 may have aheight 264 extending between thetop surface 254 to thebottom surface 252. Theheight 264 may be between about 2.075 mm and about 2.125 mm such as about 2.100 mm. Theouter surface 210 may have anindent 230 formed therein. Theindent 230 may produce a V-shaped profile for theseal band 140. Theindent 230 may have adepth 232 between about 0.30 mm and about 0.50 mm such as about 0.40 mm. Theindent 230 permits theseal band 140 to be easily compressed for ease of installation, and to orientate thetop surface 254 andbottom surface 252 in a substantially parallel orientation that enhances the contact area with theelectrostatic chuck 174 and thecooling plate 130 when making a seal therebetween when disposed in the substrate support assembly 127. In one embodiment, theseal band 140 is symmetrical about an imaginary line bifurcating theindent 230 andinner surface 212. - Use of the
seal band 140 in the substrate support assembly 127 will now be discussed relative toFIG. 3 .FIG. 3 is a partial cross-sectional schematic side view of thesubstrate support assembly 126 detailing one embodiment of theseal band 140 disposed between anelectrostatic chuck 174 and thecooling plate 130. Thebonding layer 150 disposed between theelectrostatic chuck 174 and thecooling plate 130 may be formed from different materials. Anelectrical socket 360 may provide connections to theresistive heaters 188 and chuckingelectrode 186 embedded in thedielectric body 175. Theresistive heaters 188 may heat thebottom 133 of theelectrostatic chuck 174 to temperatures above 250° Celsius. Thebonding layer 150 may extend to about anouter diameter 352 of theelectrostatic chuck 174 or thecooling plate 130. Thebonding layer 150 is flexible to account for thermal expansion between theelectrostatic chuck 174 and thecooling plate 130, to substantially prevent cracking, and to reduce the potential for theelectrostatic chuck 174 delaminating from thecooling plate 130. - The
bonding layer 150 includes at least oneadhesive layer 308. Theadhesive layer 308 may be formed from a perfluoro compound, silicone, porous graphite, an acrylic compound, perfluoromethyl vinyl ether, alkoxy vinyl ether, CIRLEX®, TEFZEL®, KAPTON®, VESPEL®, KERIMID®, polyethylene, or other suitable material. Theadhesive layer 308 may have a thickness 302 of about 1 mm to about 5 mm, such as about 1.75 mm. Theadhesive layer 308 may have a thermal conductivity between about 0.1 W/mK and about 1 W/mK, such as about 0.17 W/mK. - A
notch 342 is formed between anouter periphery 350 of theadhesive layer 308 and theouter diameter 352 of theelectrostatic chuck 174. Thediameter 208 of theseal band 140 is less than theouter diameter 352 of theelectrostatic chuck 174. Additionally, thediameter 208 of theseal band 140 is less than the outer diameter of thecooling plate 130. Theseal band 140 disposed about, i.e., circumscribes, theouter periphery 350 of theadhesive layer 308. Thenotch 342 may be sized to permit theseal band 140 to sealingly engage theelectrostatic chuck 174 andcooling plate 130. Although theseal band 140 may optionally form a vacuum tight seal between theelectrostatic chuck 174 and thecooling plate 130, the primary function of the seal is to protect the exposedouter periphery 350 of theadhesive layer 308 from the environment within theprocessing region 110. - In one embodiment, the
seal band 140 prevents the process gas exposure to the bond material (adhesive layer 308) of thesubstrate support assembly 126. That is, theseal band 140 protects the inner portions of thesubstrate support assembly 126 from exposure to the plasma environment. Theseal band 140 prevents volatized gases from theadhesive layer 308 from contaminating the plasma environment. Theseal band 140 protects theadhesive layer 308 and other internal structures of the substrate support assembly 127 from the plasma environment. - The
seal band 140 may be V-shaped. The shape of theseal band 140 provides acontact surface 310 for sealing which is substantially larger than conventional O-ring seals. Additionally, the V-shaped provides for easier installation of theseal band 140. For example, the force required to install theseal band 140, having the V-shaped, is decreased by about 40% compared to the force required to install a conventional O-ring. For example, at 0° Celsius, theseal band 140 has an installation force of about 0.63 N/mm whereas conventional O-rings have an installation force of about 1.00 N/mm. Thecontact surface 310 of theseal band 140, having the V-shaped, is substantially larger (in width) compared to the contact area of traditional O-rings. For example, thecontact surface 310 of theseal band 140 is about 30% greater than the contact area of conventional O-rings. As the temperature increases from 0 degrees Celsius to 50 degrees Celsius, thecontact surface 310 of theseal band 140 increases from about 0.62 mm to about 0.74 mm. - After installation, a compression load on the
seal band 140 varies with the temperature of theseal band 140. In operation, theseal band 140 may be compressed as much as 20%. The increase in compression of theseal band 140 at the higher temperature improves the seal-ability even after some erosion. The erosion profile of theseal band 140 may be indicative of the longevity for theseal band 140. The erosion profile at 800 RF hours and 1700 RF hours have shown little wear requiring replacement of theseal band 140. The compression load is not linear as thermal expansion of theseal band 140 leads to an increase squeeze of theseal band 140 resulting in an increase compression load. At the same time, the material of theseal band 140 is softened by the heat and results in a decrease in the compression load. For example, at 0 degrees Celsius, the compression load on theseal band 140 is about 0.23 N/mm; at 25 degrees Celsius, the compression load on theseal band 140 increases to about 0.26 N/mm; and at 50 degrees Celsius, the compression load on theseal band 140 decreases to about 0.15 N/mm. - The resistance of the
seal band 140 to initial cracking was tested on a metallic drum. Theseal band 140 was stretched 28% on the metallic drum. Theseal band 140 was exposed to plasma having O2 and CF4 flowing at a 196:4 ratio by weight. Theseal band 140 formed from Fluoritz-TR demonstrated a greater than 100% increase in longevity from cracking compared to sealbands 140 formed from Fluoritz-T20, transparent perfluoro-elastomers (FFKM) B or D, white FFKM F, K or L, and POR. Additionally, the weight loss due to erosion was less than all the aforementioned materials except for Fuoritz-T20. Advantageously, the compression load and material of theseal band 140 significantly reduced cracking which may compromise the seal. For example, after 320 RF hours and 600 RF hours, theseal band 140 formed from Fluoritz-TR had no visible signs of erosion or cracking. - Advantageously, the
seal band 140 having a V-shaped substantially prevents cracking or degradation of the seal from harsh radical chemistries in the processing chamber, such as fluorine radicals penetrating and etching away the seal protecting the bonding layer. Theseal band 140 having a V-shaped substantially minimizes the degradation of the bond between the ESC and the cooling plate while substantially preventing volatiles outgassing from the bonding layer from entering the processing environment. Thus, theseal band 140 having a V-shaped prevents contamination in the chamber and reduces chamber downtime which may affect process yields and costs of operations. - Examples described herein generally relate to a seal band that can be utilized in a substrate support assembly of a semiconductor processing chamber. While the foregoing is directed to implementations of the present invention, other and further implementations of the invention may be devised without departing from the basic scope thereof, and the scope thereof is determined by the claims that follow.
Claims (20)
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WO2024059276A1 (en) * | 2022-09-16 | 2024-03-21 | Lam Research Corporation | Spring-loaded seal cover band for protecting a substrate support |
WO2024097077A1 (en) * | 2022-11-04 | 2024-05-10 | Lam Research Corporation | Electrostatic chuck e-seal with offset sealing surface |
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US10943808B2 (en) * | 2016-11-25 | 2021-03-09 | Applied Materials, Inc. | Ceramic electrostatic chuck having a V-shape seal band |
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Also Published As
Publication number | Publication date |
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JP2019537262A (en) | 2019-12-19 |
US10943808B2 (en) | 2021-03-09 |
TW201834108A (en) | 2018-09-16 |
CN109844928B (en) | 2023-10-10 |
WO2018097888A1 (en) | 2018-05-31 |
CN117267243A (en) | 2023-12-22 |
KR20220162854A (en) | 2022-12-08 |
US20180151402A1 (en) | 2018-05-31 |
KR102630741B1 (en) | 2024-01-29 |
TW202310235A (en) | 2023-03-01 |
CN109844928A (en) | 2019-06-04 |
KR102471167B1 (en) | 2022-11-24 |
JP7225093B2 (en) | 2023-02-20 |
TWI786067B (en) | 2022-12-11 |
KR20190078656A (en) | 2019-07-04 |
JP2023030013A (en) | 2023-03-07 |
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