US20190123196A1 - Trench-Type Field Effect Transistor (Trench FET) With Improved Poly Gate Contact - Google Patents
Trench-Type Field Effect Transistor (Trench FET) With Improved Poly Gate Contact Download PDFInfo
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- US20190123196A1 US20190123196A1 US16/044,883 US201816044883A US2019123196A1 US 20190123196 A1 US20190123196 A1 US 20190123196A1 US 201816044883 A US201816044883 A US 201816044883A US 2019123196 A1 US2019123196 A1 US 2019123196A1
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- H01L29/40—Electrodes ; Multistep manufacturing processes therefor
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- H01L29/49—Metal-insulator-semiconductor electrodes, e.g. gates of MOSFET
- H01L29/4916—Metal-insulator-semiconductor electrodes, e.g. gates of MOSFET the conductor material next to the insulator being a silicon layer, e.g. polysilicon doped with boron, phosphorus or nitrogen
- H01L29/4925—Metal-insulator-semiconductor electrodes, e.g. gates of MOSFET the conductor material next to the insulator being a silicon layer, e.g. polysilicon doped with boron, phosphorus or nitrogen with a multiple layer structure, e.g. several silicon layers with different crystal structure or grain arrangement
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- H01L29/76—Unipolar devices, e.g. field effect transistors
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- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/04—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer
- H01L21/18—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer the devices having semiconductor bodies comprising elements of Group IV of the Periodic Table or AIIIBV compounds with or without impurities, e.g. doping materials
- H01L21/30—Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/26
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- H01L27/02—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components specially adapted for rectifying, oscillating, amplifying or switching and having potential barriers; including integrated passive circuit elements having potential barriers
- H01L27/04—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components specially adapted for rectifying, oscillating, amplifying or switching and having potential barriers; including integrated passive circuit elements having potential barriers the substrate being a semiconductor body
- H01L27/08—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components specially adapted for rectifying, oscillating, amplifying or switching and having potential barriers; including integrated passive circuit elements having potential barriers the substrate being a semiconductor body including only semiconductor components of a single kind
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- H01L27/088—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components specially adapted for rectifying, oscillating, amplifying or switching and having potential barriers; including integrated passive circuit elements having potential barriers the substrate being a semiconductor body including only semiconductor components of a single kind including field-effect components only the components being field-effect transistors with insulated gate
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- H01L29/66—Types of semiconductor device ; Multistep manufacturing processes therefor
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- H01L29/66075—Multistep manufacturing processes of devices having semiconductor bodies comprising group 14 or group 13/15 materials
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- H01L29/66409—Unipolar field-effect transistors
- H01L29/66477—Unipolar field-effect transistors with an insulated gate, i.e. MISFET
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- H01L29/66—Types of semiconductor device ; Multistep manufacturing processes therefor
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- H01L29/772—Field effect transistors
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- H01L29/7813—Vertical DMOS transistors, i.e. VDMOS transistors with trench gate electrode, e.g. UMOS transistors
Definitions
- the present disclosure relates to semiconductor devices, e.g., field-effect transistors (FETs) and, more particularly, to trench FETs or other trench-type semiconductor devices having front-side source and gate contacts.
- FETs field-effect transistors
- Trench-based transistors used in integrated circuits include field-effect transistors (FETs) such as power MOSFETs.
- FETs field-effect transistors
- Transistors formed using trenches may include gate electrodes that are buried in a trench etched in the silicon. This may result in a vertical channel. In many such FETs, the current may flow from front side of the semiconductor die to the back side of the semiconductor die. Transistors formed using trenches may be considered vertical transistors, as opposed to lateral devices. Trench FET devices may allow better density through use of the trench feature, as compared with lateral FETs.
- FIGS. 1A-1O illustrate a conventional method for forming an IC structure including multiple trench FET structures, including steps for forming poly gate contacts conductively coupled to the poly gates of each trench FET.
- FIGS. 1A-1C show an example technique for forming a plurality of poly gate trenches.
- a lightly-doped epitaxy (EPI) layer 12 may be formed over a highly-doped bulk silicon substrate 10 , and a transition region 14 may form between the EPI layer 12 and bulk substrate 10 .
- the transition region 14 may define a transition from the more lightly doped EPI layer 12 to the more heavily doped bulk substrate region 10 .
- the more lightly doped region may be light enough to survive a breakdown field. The resistance of this region may have consequences for operation of the FET because this area is typically not a pure metal.
- Body and source regions 20 may be formed in the EPI 12 by suitable dopant implants, as known in the art.
- An oxide or insulation layer 22 may be formed, e.g., grown, on the EPI layer 12 , and a nitride layer 24 may be deposited over the oxide layer 22 .
- a mask 30 (e.g., photoresist) may be formed and patterned to define trenches 32 in the mask 30 .
- At least one etch may be performed through the mask trenches 32 to remove portions of the nitride layer 24 , oxide layer 22 , and EPI region 12 , to define a plurality of poly gate trenches 34 .
- the mask 30 may be removed (e.g., stripped), and an oxide 40 may be deposited over the structure.
- a chemical mechanical planarization (CMP) process may be performed to remove the oxide 40 deposited on the nitride layer 24 .
- the nitride layer may be removed, e.g., stripped.
- a gate oxide 44 may be grown on the exposed sidewall surfaces in the poly gate trenches 34 .
- a poly layer 50 may be deposited over the structure and extending into the poly gate trenches 34 .
- the poly layer 50 may be doped, e.g., as known in the art.
- FIGS. 1I through 1O includes (a) an example first cross-sectional view (left side) corresponding with a first region of the device structure, e.g., at a laterally interior area of the structure, and (b) an example second cross-sectional view (right side) corresponding with a second region of the device structure where a top-side gate contact is provided, e.g., at or near a perimeter or lateral edge of the structure or at any other location selected for gate contact.
- 1I-1O could represent a 90 degree rotated view of the left-side view, e.g., a cross-section taken through one of the poly gate trenches 34 , or could represent a co-planar or parallel plane view as the example left-side, e.g., at a different location in the device (e.g., at a perimeter or edge region of the device).
- a photomask 56 may be formed over the poly material 50 in each gate poly trench 34 and patterned as shown.
- an etch may be performed to remove portions of the poly gate material 50 and thereby define a discrete poly gate 60 in each respective poly gate trench 34 (left side view), and to define a lateral extension 62 of the poly gate material (right side view) that is subsequently connected to a poly gate contact, as discussed below.
- remaining portions of the photomask 56 may be removed and an oxide layer 66 may be deposited over the structure.
- a photomask 70 may be formed and patterned as shown, to define openings for forming source contact trenches and poly gate contact trenches.
- At least one etch may be performed through the patterned openings in the photomask and through any underlying oxide or insulation layer(s) (e.g., layer 22 ) to form (a) source contact trenches 72 that expose areas of the top surface of the EPI layer 12 , as shown in the left side view, and (b) poly gate contact trenches 74 that expose a top surface of respective poly gate material extensions 62 , as shown in the right side view.
- any underlying oxide or insulation layer(s) e.g., layer 22
- a conductive material 80 e.g., tungsten or other metal, may be deposited over the structure and extending into the source contact trenches 72 and poly gate contact trenches 74 (e.g., using a tungsten plug process).
- a CMP process may be performed to remove upper portions of the conductive material 80 , e.g., tungsten, and thereby define (a) a plurality of discrete source contacts 82 , each contacting a doped source region in the EPI 12 , indicated at 90 (left side view), and (b) a plurality of poly gate contacts 84 , each contacting a respective poly gate material extension 62 (right side view).
- the conductive material 80 e.g., tungsten
- Some embodiments of the present disclosure provide a trench FET structure including a lateral gate coupling element, e.g., a “strap” formed from metal (e.g., tungsten) or other electrically conductive material and extending laterally over or adjacent the poly gate and coupled to a front-side poly gate contact.
- a lateral gate coupling element e.g., a “strap” formed from metal (e.g., tungsten) or other electrically conductive material and extending laterally over or adjacent the poly gate and coupled to a front-side poly gate contact.
- Some embodiments include an integrated circuit (IC) structure including a plurality of such trench FETs.
- IC integrated circuit
- One embodiment provides an IC device may include a plurality of trench FETs.
- Each trench FET may include a poly gate trench formed in an epitaxy region, a poly gate formed in the poly gate trench, a front-side poly gate contact, and a lateral gate coupling element (e.g., a lateral “strap”) extending over or adjacent at least one surface of the poly gate formed in the trench and electrically connecting the poly gate to the front-side poly gate contact.
- a lateral gate coupling element e.g., a lateral “strap”
- the lateral gate coupling element may be formed from a material having a higher electrical conductivity than the poly gate.
- the lateral gate coupling element may be formed from tungsten or other metal.
- the lateral gate coupling element may be at least partially located in the poly gate trench.
- Another embodiment provides a method of forming an integrated circuit (IC) structure including a plurality of trench-type field-effect transistors (trench FETs).
- the method may include forming a poly gate trench in an epitaxy region, forming a poly gate in the poly gate trench, forming a lateral gate coupling element extending over or adjacent and coupled to at least one surface of the poly gate, and forming a front-side poly gate contact coupled to the lateral gate coupling element, wherein the lateral gate coupling element forms an electrical connection between the poly gate and the front-side poly gate contact.
- the method includes etching a top portion of the poly gate in the poly gate trench to define a recess in the poly gate, and forming the lateral gate coupling element such that the lateral gate coupling element extends at least partially into the etched recess in the poly gate.
- FIGS. 1A-1O illustrate a conventional process for forming an integrated circuit structure including trench FET structures, including steps for forming poly gate contacts conductively coupled to the poly gates of each trench FET;
- FIGS. 2A-2P illustrate an example process for forming an integrated circuit structure including trench FET structures, including steps for forming poly gate contacts and a lateral gate coupling element, e.g., a “strap” conductively connecting each poly gate to a respective gate contact, according to one embodiment of the present invention
- FIGS. 3A-3M illustrate another example process for forming an integrated circuit structure including trench FET structures, including steps for forming poly gate contacts and a lateral gate coupling element conductively connecting each poly gate to a respective gate contact, according to one embodiment of the present invention.
- FIGS. 2A-2P illustrate an example method for forming an integrated circuit (IC) structure including multiple trench FET structures, including steps for forming poly gate contacts and a lateral gate coupling element or “strap” conductively connecting each poly gate to a respective gate contact, according to one embodiment of the present invention.
- IC integrated circuit
- FIGS. 2A-2C show an example technique for forming a plurality of poly gate trenches.
- a lightly-doped epitaxy (EPI) layer 12 may be formed over a highly-doped bulk silicon substrate 10 , and a transition region 14 may form between the EPI layer 12 and bulk substrate 10 .
- the transition region 14 may define a transition from the more lightly doped EPI layer 12 to the more heavily doped bulk substrate region 10 .
- the more lightly doped region may be light enough to survive a breakdown field. The resistance of this region may have consequences for operation of the FET because this area is typically not a pure metal.
- Body and source regions 20 may be formed in the EPI 12 by suitable dopant implants, as known in the art.
- An oxide or insulation layer 22 may be formed, e.g., grown, on the EPI layer 12 .
- a nitride layer 24 may be deposited over the oxide layer 22 .
- the nitride layer 24 may be provided to act as a CMP stop for a CMP to remove oxide deposited outside the poly gate trenches.
- the nitride layer 24 may be omitted and a thicker oxide or insulation layer 22 may be used.
- a thick oxide is not deposited in the bottom of the poly gate trenches, and nitride layer 24 is thus omitted, is embodiment shown in FIGS. 3A-3M discussed below.
- a mask 30 (e.g., photoresist) may be formed and patterned to define trenches 32 in the mask 30 .
- At least one etch may be performed through the mask trenches 32 to remove portions of the nitride layer 24 , oxide layer 22 , and EPI region 12 , to define a plurality of poly gate trenches 34 .
- the mask 30 may be removed (e.g., stripped), and an oxide 40 may be deposited over the structure.
- a chemical mechanical planarization (CMP) process may be performed to remove the oxide 40 deposited on the nitride layer 24 .
- the nitride layer 24 may act as a stop for the CMP process.
- nitride layer 24 may be removed, e.g., stripped.
- a gate oxide 44 may be grown on the exposed sidewall surfaces in the poly gate trenches 34 .
- a poly layer 50 may be deposited over the structure and extending into the poly gate trenches 34 .
- the poly layer 50 may be doped, e.g., as known in the art.
- a blanket poly etch may be performed to remove upper portions of the deposited poly layer 50 , and thereby define a discrete poly gate 100 in each respective poly gate trench 34 .
- the poly etch may be extended to etch a depression or recess 102 in the top of each poly gate 100 within each respective poly gate trench 34 , as shown in FIG. 2I .
- This recess 102 may be formed to subsequently accept a respective lateral gate coupling element (e.g., “strap”) 112 , as discussed below.
- tungsten or other suitable metal or electrically conductive material 106 may be deposited over the structure, and extending into the etched recess 102 in the top of each poly gate 100 .
- a CMP process may be performed to remove upper portions of the deposited conductive material (e.g., tungsten) 106 , and thereby define a lateral gate coupling element (e.g., “strap”) 112 over each respective poly gate 110 .
- a lateral gate coupling element e.g., “strap”
- FIGS. 2L through 2P includes (a) an example first cross-sectional view (left side) corresponding with a first region of the device structure where no top-side gate contact is formed, e.g., at a laterally interior area of the structure, and (b) an example second cross-sectional view (right side) corresponding with a second region of the device structure where a top-side gate contact is formed, e.g., at or near a perimeter or lateral edge of the structure or at any other location selected for top-side gate contact.
- 2L-2P may represent a 90 degree rotated view of the example left-side view, e.g., a cross-section taken through one of the poly gate trenches 34 .
- the example second cross-sectional view shown in the right side of each FIG. 2L-2P may represent a co-planar or parallel plane view as the example left-side, e.g., at a different location in the device (e.g., at a perimeter or edge region of the device).
- an oxide layer 120 may be deposited over the structure.
- a photomask 124 may be formed over the oxide layer 120 and patterned to define openings for forming source contact trenches (left side view) and poly gate contact trenches (right side view).
- At least one etch may be performed through the patterned openings in the photomask 124 and through the underlying oxide layer(s) (including oxide layer 22 ) to form (a) source contact trenches 130 that expose areas of the top surface of the EPI layer 12 (left side view), and (b) poly gate contact trenches 132 that expose a top surface of respective lateral gate coupling element 112 , e.g., tungsten “strap” (right side view).
- tungsten or other metal or conductive material 140 may be deposited over the structure and extending into the source contact trenches 130 (left side view) and poly gate contact trenches 132 (right side view), e.g., using a tungsten plug process.
- a CMP process may be performed to remove upper portions of the deposited tungsten, and thereby define (a) a plurality of discrete source contacts 150 , each contacting a doped source region 152 in the EPI 12 (left side view), and (b) a plurality of poly gate contacts 156 , each contacting a respective lateral gate coupling element 112 , e.g., tungsten “strap” (right side view).
- each poly gate 100 may be electrically coupled to a respective gate contact 156 by a lateral gate coupling element (e.g., “strap”) 112 .
- each lateral gate coupling element 112 may be formed from a different material than the respective poly gate 100 .
- each lateral gate coupling element 112 may be formed from a metal, e.g., tungsten, or other electrically conductive material.
- Each lateral gate coupling element 112 may have a higher electrical conductivity than the gate poly material of the poly gate 100 to which the lateral gate coupling element 112 is coupled.
- the lateral gate coupling elements 112 as disclosed herein may provide a reduced gate resistance for a trench FET, as compared with conventional FET designs that use poly material to connect the poly gate to a gate contact.
- typical poly resistance may be about 80-100 ohms/sq, whereas tungsten has a resistance of about 10 ohms/sq.
- FIGS. 3A-3M illustrate another example method for forming an integrated circuit (IC) structure including multiple trench FET structures, including steps for forming poly gate contacts and a lateral gate coupling element or “strap” conductively connecting each poly gate to a respective gate contact, according to one embodiment of the present invention.
- the example method shown in FIGS. 3A-3M may produce a lateral gate coupling elements/straps that extend further down in to the respective poly gate trenches than the lateral gate coupling elements/straps produced by the method shown in FIGS. 2A-2P .
- FIGS. 3A-3C show an example technique for forming a plurality of poly gate trenches.
- a lightly-doped epitaxy (EPI) layer 12 may be formed over a highly-doped bulk silicon substrate 10 , and a transition region 14 may form between the EPI layer 12 and bulk substrate 10 .
- the transition region 14 may define a transition from the more lightly doped EPI layer 12 to the more heavily doped bulk substrate region 10 .
- the more lightly doped region may be light enough to survive a breakdown field. The resistance of this region may have consequences for operation of the FET because this area is typically not a pure metal.
- Body and source regions 20 may be formed in the EPI 12 by suitable dopant implants, as known in the art.
- An oxide or insulation layer 22 may be formed, e.g., grown, on the EPI layer 12 .
- a nitride layer 24 may be deposited over the oxide layer 22 , which may act as a CMP stop during a CMP performed after depositing the thick oxide extending into the poly gate trenches.
- a mask 30 (e.g., photoresist) may be formed and patterned to define trenches 32 in the mask 30 .
- At least one etch may be performed through the mask trenches 32 to remove portions of the oxide layer 22 and EPI region 12 , to define a plurality of poly gate trenches 34 .
- the mask 30 may be removed (e.g., stripped), and a gate oxide 44 may be grown on the exposed sidewall and bottom surfaces of the poly gate trenches 34 .
- a thin conformal poly layer 202 may be deposited over the structure and extending into the poly gate trenches 34 .
- the thickness of the thin poly layer 202 may be selected such that a trench opening 204 is defined in each trench 34 .
- the poly layer 202 may be doped, e.g., as known in the art.
- tungsten or other suitable metal or electrically conductive material 210 may be deposited over the structure, and extending down into the trench openings 204 within each poly gate trench 34 .
- a CMP process may be performed to remove upper portions of the deposited conductive material (e.g., tungsten) 210 .
- FIGS. 3H through 3M includes (a) an example first cross-sectional view (left side) corresponding with a first region of the device structure where no top-side gate contact is formed, e.g., at a laterally interior area of the structure, and (b) an example second cross-sectional view (right side) corresponding with a second region of the device structure where a top-side gate contact is formed, e.g., at or near a perimeter or lateral edge of the structure or at any other location selected for top-side gate contact.
- 3H-3M may represent a 90 degree rotated view of the example left-side view, e.g., a cross-section taken through one of the poly gate trenches 34 .
- the example second cross-sectional view shown in the right side of each FIG. 3H-3M may represent a co-planar or parallel plane view as the example left-side, e.g., at a different location in the device (e.g., at a perimeter or edge region of the device).
- a resist is deposited and patterned over the area where the top-side gate contact is to be formed.
- An etch may then be performed, to remove upper portions of the deposited poly layer 202 , and thereby define a discrete poly gate 225 in each respective poly gate trench 34 .
- the oxide layer 22 and/or the conductive material (e.g., tungsten) 210 in each trench 34 may act as an etch stop.
- each poly gate 225 may include a poly liner 202 within the respective trench 34 and a tungsten (or other conductive material) insert 210 extending down into the trench.
- the tungsten insert in each trench 225 may define a lateral gate coupling element (e.g., “strap”) 226 to provide an improved conductive path from the poly material 202 to a respective gate contact (which may be formed as discussed below), thereby providing an improved conductive path between source regions adjacent each poly gate 225 and the respective gate contacts.
- a lateral gate coupling element e.g., “strap”
- each lateral gate coupling element 226 may extend substantially down into the respective trench 34 .
- each lateral gate coupling element 226 may extend down to a depth of at least 25% of the depth of the respective trench 34 .
- each lateral gate coupling element 226 may extend down to a depth of at least 50% of the depth of the respective trench 34 .
- each lateral gate coupling element 226 may extend down to a depth of at least 75% of the depth of the respective trench 34 .
- an oxide layer 230 may be deposited over the structure.
- a photomask 240 may be formed over the oxide layer 230 and patterned to define openings 242 for forming source contact trenches (left side view) and poly gate contact trenches (right side view).
- At least one etch may be performed through the patterned openings 242 in the photomask 240 and through the underlying oxide layer(s) 230 and 22 to form (a) source contact trenches 246 that expose areas of the top surface of the EPI layer 12 (left side view), and (b) poly gate contact trenches 248 that expose a top surface of respective lateral gate coupling element 226 , e.g., tungsten “strap” (right side view).
- tungsten or other metal or conductive material 250 may be deposited over the structure and extending into the source contact trenches 246 (left side view) and poly gate contact trenches 248 (right side view), e.g., using a tungsten plug process.
- a CMP process may be performed to remove upper portions of the deposited tungsten, and thereby define (a) a plurality of discrete source contacts 260 , each contacting a doped source region 270 in the EPI 12 (left side view), and (b) a plurality of poly gate contacts 262 , each contacting a respective lateral gate coupling element 226 , e.g., tungsten “strap” (right side view).
- each poly gate 225 may be electrically coupled to a respective gate contact 262 by a lateral gate coupling element (e.g., “strap”) 226 .
- each lateral gate coupling element 226 may be formed from a different material than the respective poly material 202 .
- each lateral gate coupling element 226 may be formed from a metal, e.g., tungsten, or other electrically conductive material.
- Each lateral gate coupling element 226 may have a higher electrical conductivity than the gate poly material 202 of the poly gate 225 .
- the lateral gate coupling elements 226 as disclosed herein may provide a reduced gate resistance for a trench FET, as compared with conventional FET designs that use poly material to connect the poly gate to a gate contact.
- typical poly resistance may be about 80-100 ohms/sq, whereas tungsten has a resistance of about 10 ohms/sq.
- EPI layer 12 transition region 14 , and bulk silicon substrate 10 are omitted from FIGS. 2K-2P and FIGS. 3H-3M for illustrative purposes only, and that such regions are in fact present in the structures shown in each figure.
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Abstract
An integrated circuit (IC) device may include a plurality of trench-type field-effect transistors (trench FETs). Each trench FET may include a poly gate trench formed in an epitaxy region, a poly gate formed in the poly gate trench, a front-side poly gate contact, and a lateral gate coupling element (e.g., a lateral “strap”) extending over or adjacent, and in contact with, at least one surface of the poly gate formed in the trench and electrically connecting the poly gate to the front-side poly gate contact. The lateral gate coupling element may be formed from a material having a higher electrical conductivity than the poly gate, e.g., tungsten or other metal. The lateral gate coupling element may be at least partially located in the poly gate trench.
Description
- This application claims priority to U.S. Provisional Patent Application No. 62/576,999 filed Oct. 25, 2017, the entire contents of which are hereby incorporated by reference for all purposes.
- The present disclosure relates to semiconductor devices, e.g., field-effect transistors (FETs) and, more particularly, to trench FETs or other trench-type semiconductor devices having front-side source and gate contacts.
- Trench-based transistors used in integrated circuits (ICs) include field-effect transistors (FETs) such as power MOSFETs. Transistors formed using trenches may include gate electrodes that are buried in a trench etched in the silicon. This may result in a vertical channel. In many such FETs, the current may flow from front side of the semiconductor die to the back side of the semiconductor die. Transistors formed using trenches may be considered vertical transistors, as opposed to lateral devices. Trench FET devices may allow better density through use of the trench feature, as compared with lateral FETs.
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FIGS. 1A-1O illustrate a conventional method for forming an IC structure including multiple trench FET structures, including steps for forming poly gate contacts conductively coupled to the poly gates of each trench FET. -
FIGS. 1A-1C show an example technique for forming a plurality of poly gate trenches. As shown inFIG. 1A , a lightly-doped epitaxy (EPI)layer 12 may be formed over a highly-dopedbulk silicon substrate 10, and atransition region 14 may form between theEPI layer 12 andbulk substrate 10. Thetransition region 14 may define a transition from the more lightly dopedEPI layer 12 to the more heavily dopedbulk substrate region 10. The more lightly doped region may be light enough to survive a breakdown field. The resistance of this region may have consequences for operation of the FET because this area is typically not a pure metal. - Body and
source regions 20 may be formed in theEPI 12 by suitable dopant implants, as known in the art. An oxide orinsulation layer 22 may be formed, e.g., grown, on theEPI layer 12, and anitride layer 24 may be deposited over theoxide layer 22. - As shown in
FIG. 1B , a mask 30 (e.g., photoresist) may be formed and patterned to definetrenches 32 in themask 30. - As shown in
FIG. 1C , at least one etch may be performed through themask trenches 32 to remove portions of thenitride layer 24,oxide layer 22, andEPI region 12, to define a plurality ofpoly gate trenches 34. - As shown in
FIG. 1D , themask 30 may be removed (e.g., stripped), and anoxide 40 may be deposited over the structure. - As shown in
FIG. 1E , a chemical mechanical planarization (CMP) process may be performed to remove theoxide 40 deposited on thenitride layer 24. - As shown in
FIG. 1F , the nitride layer may be removed, e.g., stripped. - As shown in
FIG. 1G , agate oxide 44 may be grown on the exposed sidewall surfaces in thepoly gate trenches 34. - As shown in
FIG. 1H , apoly layer 50 may be deposited over the structure and extending into thepoly gate trenches 34. Thepoly layer 50 may be doped, e.g., as known in the art. - Each of
FIGS. 1I through 1O includes (a) an example first cross-sectional view (left side) corresponding with a first region of the device structure, e.g., at a laterally interior area of the structure, and (b) an example second cross-sectional view (right side) corresponding with a second region of the device structure where a top-side gate contact is provided, e.g., at or near a perimeter or lateral edge of the structure or at any other location selected for gate contact. The example second cross-sectional view shown in the right side of eachFIG. 1I-1O could represent a 90 degree rotated view of the left-side view, e.g., a cross-section taken through one of thepoly gate trenches 34, or could represent a co-planar or parallel plane view as the example left-side, e.g., at a different location in the device (e.g., at a perimeter or edge region of the device). - As shown in
FIG. 1I (right side view), aphotomask 56 may be formed over thepoly material 50 in eachgate poly trench 34 and patterned as shown. - As shown in
FIG. 1J , an etch may be performed to remove portions of thepoly gate material 50 and thereby define adiscrete poly gate 60 in each respective poly gate trench 34 (left side view), and to define alateral extension 62 of the poly gate material (right side view) that is subsequently connected to a poly gate contact, as discussed below. - As shown in
FIG. 1K (left and right side views), remaining portions of thephotomask 56 may be removed and anoxide layer 66 may be deposited over the structure. - As shown in
FIG. 1L (left and right side views), aphotomask 70 may be formed and patterned as shown, to define openings for forming source contact trenches and poly gate contact trenches. - As shown in
FIG. 1M (left and right side views), at least one etch may be performed through the patterned openings in the photomask and through any underlying oxide or insulation layer(s) (e.g., layer 22) to form (a)source contact trenches 72 that expose areas of the top surface of theEPI layer 12, as shown in the left side view, and (b) polygate contact trenches 74 that expose a top surface of respective polygate material extensions 62, as shown in the right side view. - As shown in
FIG. 1N , aconductive material 80, e.g., tungsten or other metal, may be deposited over the structure and extending into thesource contact trenches 72 and poly gate contact trenches 74 (e.g., using a tungsten plug process). - As shown in
FIG. 1O , a CMP process may be performed to remove upper portions of theconductive material 80, e.g., tungsten, and thereby define (a) a plurality ofdiscrete source contacts 82, each contacting a doped source region in theEPI 12, indicated at 90 (left side view), and (b) a plurality ofpoly gate contacts 84, each contacting a respective poly gate material extension 62 (right side view). - Some embodiments of the present disclosure provide a trench FET structure including a lateral gate coupling element, e.g., a “strap” formed from metal (e.g., tungsten) or other electrically conductive material and extending laterally over or adjacent the poly gate and coupled to a front-side poly gate contact. Some embodiments include an integrated circuit (IC) structure including a plurality of such trench FETs.
- One embodiment provides an IC device may include a plurality of trench FETs. Each trench FET may include a poly gate trench formed in an epitaxy region, a poly gate formed in the poly gate trench, a front-side poly gate contact, and a lateral gate coupling element (e.g., a lateral “strap”) extending over or adjacent at least one surface of the poly gate formed in the trench and electrically connecting the poly gate to the front-side poly gate contact.
- In some embodiments, the lateral gate coupling element may be formed from a material having a higher electrical conductivity than the poly gate. For example, the lateral gate coupling element may be formed from tungsten or other metal.
- In some embodiments, the lateral gate coupling element may be at least partially located in the poly gate trench.
- Another embodiment provides a method of forming an integrated circuit (IC) structure including a plurality of trench-type field-effect transistors (trench FETs). The method may include forming a poly gate trench in an epitaxy region, forming a poly gate in the poly gate trench, forming a lateral gate coupling element extending over or adjacent and coupled to at least one surface of the poly gate, and forming a front-side poly gate contact coupled to the lateral gate coupling element, wherein the lateral gate coupling element forms an electrical connection between the poly gate and the front-side poly gate contact.
- In one embodiment, the method includes etching a top portion of the poly gate in the poly gate trench to define a recess in the poly gate, and forming the lateral gate coupling element such that the lateral gate coupling element extends at least partially into the etched recess in the poly gate.
- Example aspects and embodiments are discussed below with reference to the drawings, in which:
-
FIGS. 1A-1O illustrate a conventional process for forming an integrated circuit structure including trench FET structures, including steps for forming poly gate contacts conductively coupled to the poly gates of each trench FET; -
FIGS. 2A-2P illustrate an example process for forming an integrated circuit structure including trench FET structures, including steps for forming poly gate contacts and a lateral gate coupling element, e.g., a “strap” conductively connecting each poly gate to a respective gate contact, according to one embodiment of the present invention; and -
FIGS. 3A-3M illustrate another example process for forming an integrated circuit structure including trench FET structures, including steps for forming poly gate contacts and a lateral gate coupling element conductively connecting each poly gate to a respective gate contact, according to one embodiment of the present invention. -
FIGS. 2A-2P illustrate an example method for forming an integrated circuit (IC) structure including multiple trench FET structures, including steps for forming poly gate contacts and a lateral gate coupling element or “strap” conductively connecting each poly gate to a respective gate contact, according to one embodiment of the present invention. -
FIGS. 2A-2C show an example technique for forming a plurality of poly gate trenches. As shown inFIG. 2A , a lightly-doped epitaxy (EPI)layer 12 may be formed over a highly-dopedbulk silicon substrate 10, and atransition region 14 may form between theEPI layer 12 andbulk substrate 10. Thetransition region 14 may define a transition from the more lightly dopedEPI layer 12 to the more heavily dopedbulk substrate region 10. The more lightly doped region may be light enough to survive a breakdown field. The resistance of this region may have consequences for operation of the FET because this area is typically not a pure metal. - Body and
source regions 20 may be formed in theEPI 12 by suitable dopant implants, as known in the art. An oxide orinsulation layer 22 may be formed, e.g., grown, on theEPI layer 12. In some embodiments, e.g., wherein a thick oxide is deposited in the bottom of the (later-formed) poly gate trenches, as discussed below with reference toFIG. 2D , anitride layer 24 may be deposited over theoxide layer 22. Thenitride layer 24 may be provided to act as a CMP stop for a CMP to remove oxide deposited outside the poly gate trenches. - In other embodiments, e.g., where a thick oxide is not deposited in the bottom of the poly gate trenches, the
nitride layer 24 may be omitted and a thicker oxide orinsulation layer 22 may be used. (An example of this technique in which a thick oxide is not deposited in the bottom of the poly gate trenches, andnitride layer 24 is thus omitted, is embodiment shown inFIGS. 3A-3M discussed below.) - As shown in
FIG. 2B , a mask 30 (e.g., photoresist) may be formed and patterned to definetrenches 32 in themask 30. - As shown in
FIG. 2C , at least one etch may be performed through themask trenches 32 to remove portions of thenitride layer 24,oxide layer 22, andEPI region 12, to define a plurality ofpoly gate trenches 34. - As shown in
FIG. 2D , themask 30 may be removed (e.g., stripped), and anoxide 40 may be deposited over the structure. - As shown in
FIG. 2E , a chemical mechanical planarization (CMP) process may be performed to remove theoxide 40 deposited on thenitride layer 24. Thenitride layer 24 may act as a stop for the CMP process. - As shown in
FIG. 2F ,nitride layer 24 may be removed, e.g., stripped. - As shown in
FIG. 2G , agate oxide 44 may be grown on the exposed sidewall surfaces in thepoly gate trenches 34. - As shown in
FIG. 2H , apoly layer 50 may be deposited over the structure and extending into thepoly gate trenches 34. Thepoly layer 50 may be doped, e.g., as known in the art. - As shown in
FIG. 2I , a blanket poly etch may be performed to remove upper portions of the depositedpoly layer 50, and thereby define adiscrete poly gate 100 in each respectivepoly gate trench 34. The poly etch may be extended to etch a depression orrecess 102 in the top of eachpoly gate 100 within each respectivepoly gate trench 34, as shown inFIG. 2I . Thisrecess 102 may be formed to subsequently accept a respective lateral gate coupling element (e.g., “strap”) 112, as discussed below. - As shown in
FIG. 2J , tungsten or other suitable metal or electrically conductive material 106 (e.g., having a higher electrical conductivity than the gate poly material) may be deposited over the structure, and extending into theetched recess 102 in the top of eachpoly gate 100. - As shown in
FIG. 2K , a CMP process may be performed to remove upper portions of the deposited conductive material (e.g., tungsten) 106, and thereby define a lateral gate coupling element (e.g., “strap”) 112 over each respective poly gate 110. - Each of
FIGS. 2L through 2P includes (a) an example first cross-sectional view (left side) corresponding with a first region of the device structure where no top-side gate contact is formed, e.g., at a laterally interior area of the structure, and (b) an example second cross-sectional view (right side) corresponding with a second region of the device structure where a top-side gate contact is formed, e.g., at or near a perimeter or lateral edge of the structure or at any other location selected for top-side gate contact. In one example embodiment, the example second cross-sectional view shown in the right side of eachFIG. 2L-2P may represent a 90 degree rotated view of the example left-side view, e.g., a cross-section taken through one of thepoly gate trenches 34. In another example embodiment, the example second cross-sectional view shown in the right side of eachFIG. 2L-2P may represent a co-planar or parallel plane view as the example left-side, e.g., at a different location in the device (e.g., at a perimeter or edge region of the device). - As shown in
FIG. 2L (lefts and right side views), anoxide layer 120 may be deposited over the structure. - As shown in
FIG. 2M , aphotomask 124 may be formed over theoxide layer 120 and patterned to define openings for forming source contact trenches (left side view) and poly gate contact trenches (right side view). - As shown in
FIG. 2N (left and right side views), at least one etch may be performed through the patterned openings in thephotomask 124 and through the underlying oxide layer(s) (including oxide layer 22) to form (a)source contact trenches 130 that expose areas of the top surface of the EPI layer 12 (left side view), and (b) polygate contact trenches 132 that expose a top surface of respective lateralgate coupling element 112, e.g., tungsten “strap” (right side view). - As shown in
FIG. 2O , tungsten or other metal orconductive material 140 may be deposited over the structure and extending into the source contact trenches 130 (left side view) and poly gate contact trenches 132 (right side view), e.g., using a tungsten plug process. - As shown in
FIG. 2P , a CMP process may be performed to remove upper portions of the deposited tungsten, and thereby define (a) a plurality ofdiscrete source contacts 150, each contacting adoped source region 152 in the EPI 12 (left side view), and (b) a plurality ofpoly gate contacts 156, each contacting a respective lateralgate coupling element 112, e.g., tungsten “strap” (right side view). - Thus, each
poly gate 100 may be electrically coupled to arespective gate contact 156 by a lateral gate coupling element (e.g., “strap”) 112. In some embodiments, each lateralgate coupling element 112 may be formed from a different material than therespective poly gate 100. For example, as discussed above, each lateralgate coupling element 112 may be formed from a metal, e.g., tungsten, or other electrically conductive material. Each lateralgate coupling element 112 may have a higher electrical conductivity than the gate poly material of thepoly gate 100 to which the lateralgate coupling element 112 is coupled. As a result, the lateralgate coupling elements 112 as disclosed herein may provide a reduced gate resistance for a trench FET, as compared with conventional FET designs that use poly material to connect the poly gate to a gate contact. For example, typical poly resistance may be about 80-100 ohms/sq, whereas tungsten has a resistance of about 10 ohms/sq. -
FIGS. 3A-3M illustrate another example method for forming an integrated circuit (IC) structure including multiple trench FET structures, including steps for forming poly gate contacts and a lateral gate coupling element or “strap” conductively connecting each poly gate to a respective gate contact, according to one embodiment of the present invention. The example method shown inFIGS. 3A-3M may produce a lateral gate coupling elements/straps that extend further down in to the respective poly gate trenches than the lateral gate coupling elements/straps produced by the method shown inFIGS. 2A-2P . -
FIGS. 3A-3C show an example technique for forming a plurality of poly gate trenches. As shown inFIG. 3A , a lightly-doped epitaxy (EPI)layer 12 may be formed over a highly-dopedbulk silicon substrate 10, and atransition region 14 may form between theEPI layer 12 andbulk substrate 10. Thetransition region 14 may define a transition from the more lightly dopedEPI layer 12 to the more heavily dopedbulk substrate region 10. The more lightly doped region may be light enough to survive a breakdown field. The resistance of this region may have consequences for operation of the FET because this area is typically not a pure metal. - Body and
source regions 20 may be formed in theEPI 12 by suitable dopant implants, as known in the art. An oxide orinsulation layer 22 may be formed, e.g., grown, on theEPI layer 12. In an alternative embodiment, e.g., wherein a thick oxide is deposited in the bottom of the (later-formed) poly gate trenches, as discussed above with respect to embodiment shown inFIGS. 2A-2P , anitride layer 24 may be deposited over theoxide layer 22, which may act as a CMP stop during a CMP performed after depositing the thick oxide extending into the poly gate trenches. - As shown in
FIG. 3B , a mask 30 (e.g., photoresist) may be formed and patterned to definetrenches 32 in themask 30. - As shown in
FIG. 3C , at least one etch may be performed through themask trenches 32 to remove portions of theoxide layer 22 andEPI region 12, to define a plurality ofpoly gate trenches 34. - As shown in
FIG. 3D , themask 30 may be removed (e.g., stripped), and agate oxide 44 may be grown on the exposed sidewall and bottom surfaces of thepoly gate trenches 34. - As shown in
FIG. 3E , a thinconformal poly layer 202 may be deposited over the structure and extending into thepoly gate trenches 34. The thickness of thethin poly layer 202 may be selected such that atrench opening 204 is defined in eachtrench 34. Thepoly layer 202 may be doped, e.g., as known in the art. - As shown in
FIG. 3F , tungsten or other suitable metal or electrically conductive material 210 (e.g., having a higher electrical conductivity than the gate poly material) may be deposited over the structure, and extending down into thetrench openings 204 within eachpoly gate trench 34. - As shown in
FIG. 3G , a CMP process may be performed to remove upper portions of the deposited conductive material (e.g., tungsten) 210. - Each of
FIGS. 3H through 3M includes (a) an example first cross-sectional view (left side) corresponding with a first region of the device structure where no top-side gate contact is formed, e.g., at a laterally interior area of the structure, and (b) an example second cross-sectional view (right side) corresponding with a second region of the device structure where a top-side gate contact is formed, e.g., at or near a perimeter or lateral edge of the structure or at any other location selected for top-side gate contact. In one example embodiment, the example second cross-sectional view shown in the right side of eachFIG. 3H-3M may represent a 90 degree rotated view of the example left-side view, e.g., a cross-section taken through one of thepoly gate trenches 34. In another example embodiment, the example second cross-sectional view shown in the right side of eachFIG. 3H-3M may represent a co-planar or parallel plane view as the example left-side, e.g., at a different location in the device (e.g., at a perimeter or edge region of the device). - As shown in
FIG. 3H , a resist is deposited and patterned over the area where the top-side gate contact is to be formed. An etch may then be performed, to remove upper portions of the depositedpoly layer 202, and thereby define adiscrete poly gate 225 in each respectivepoly gate trench 34. Theoxide layer 22 and/or the conductive material (e.g., tungsten) 210 in eachtrench 34 may act as an etch stop. - As shown, each
poly gate 225 may include apoly liner 202 within therespective trench 34 and a tungsten (or other conductive material) insert 210 extending down into the trench. The tungsten insert in eachtrench 225 may define a lateral gate coupling element (e.g., “strap”) 226 to provide an improved conductive path from thepoly material 202 to a respective gate contact (which may be formed as discussed below), thereby providing an improved conductive path between source regions adjacent eachpoly gate 225 and the respective gate contacts. - As shown, each lateral
gate coupling element 226 may extend substantially down into therespective trench 34. For example, in some embodiments, each lateralgate coupling element 226 may extend down to a depth of at least 25% of the depth of therespective trench 34. In some embodiments, each lateralgate coupling element 226 may extend down to a depth of at least 50% of the depth of therespective trench 34. In particular embodiments, each lateralgate coupling element 226 may extend down to a depth of at least 75% of the depth of therespective trench 34. - As shown in
FIG. 3I (lefts and right side views), anoxide layer 230 may be deposited over the structure. - As shown in
FIG. 3J , aphotomask 240 may be formed over theoxide layer 230 and patterned to defineopenings 242 for forming source contact trenches (left side view) and poly gate contact trenches (right side view). - As shown in
FIG. 3K (left and right side views), at least one etch may be performed through the patternedopenings 242 in thephotomask 240 and through the underlying oxide layer(s) 230 and 22 to form (a)source contact trenches 246 that expose areas of the top surface of the EPI layer 12 (left side view), and (b) polygate contact trenches 248 that expose a top surface of respective lateralgate coupling element 226, e.g., tungsten “strap” (right side view). - As shown in
FIG. 3L , tungsten or other metal orconductive material 250 may be deposited over the structure and extending into the source contact trenches 246 (left side view) and poly gate contact trenches 248 (right side view), e.g., using a tungsten plug process. - As shown in
FIG. 3M , a CMP process may be performed to remove upper portions of the deposited tungsten, and thereby define (a) a plurality ofdiscrete source contacts 260, each contacting adoped source region 270 in the EPI 12 (left side view), and (b) a plurality ofpoly gate contacts 262, each contacting a respective lateralgate coupling element 226, e.g., tungsten “strap” (right side view). - Thus, each
poly gate 225 may be electrically coupled to arespective gate contact 262 by a lateral gate coupling element (e.g., “strap”) 226. In some embodiments, each lateralgate coupling element 226 may be formed from a different material than therespective poly material 202. For example, as discussed above, each lateralgate coupling element 226 may be formed from a metal, e.g., tungsten, or other electrically conductive material. Each lateralgate coupling element 226 may have a higher electrical conductivity than thegate poly material 202 of thepoly gate 225. As a result, the lateralgate coupling elements 226 as disclosed herein may provide a reduced gate resistance for a trench FET, as compared with conventional FET designs that use poly material to connect the poly gate to a gate contact. For example, typical poly resistance may be about 80-100 ohms/sq, whereas tungsten has a resistance of about 10 ohms/sq. - It should be noted that the reference labels for
EPI layer 12,transition region 14, andbulk silicon substrate 10 are omitted fromFIGS. 2K-2P andFIGS. 3H-3M for illustrative purposes only, and that such regions are in fact present in the structures shown in each figure.
Claims (25)
1. An integrated circuit (IC) device, comprising:
a plurality of trench-type field-effect transistors (trench FETs), each trench FET comprising:
a poly gate trench formed in an epitaxy region;
a poly gate formed in the poly gate trench;
a front-side poly gate contact; and
a lateral gate coupling element extending over or adjacent at least one surface of the poly gate formed in the trench and electrically connecting the poly gate to the front-side poly gate contact.
2. The device of claim 1 , wherein each trench FET further comprises:
a doped source region formed in the epitaxy region; and
a front-side source contact coupled to the doped source region.
3. The device of claim 1 , wherein the lateral gate coupling element is formed from a different material than the poly gate.
4. The device of claim 1 , wherein the lateral gate coupling element has a higher electrical conductivity than the poly gate.
5. The device of claim 1 , wherein the lateral gate coupling element comprises a metal.
6. The device of claim 1 , wherein the lateral gate coupling element comprises tungsten.
7. The device of claim 1 , wherein the lateral gate coupling element is at least partially located in the poly gate trench.
8. The device of claim 1 , wherein the lateral gate coupling element extends down to at least 25% of a depth of the poly gate trench.
9. The device of claim 1 , wherein the lateral gate coupling element extends down to at least 50% of a depth of the poly gate trench.
10. The device of claim 1 , wherein the lateral gate coupling element extends down to at least 75% of a depth of the poly gate trench.
11. The device of claim 1 , wherein the lateral gate coupling element extends over a top surface of the poly gate formed in the trench.
12. The device of claim 1 , wherein the lateral gate coupling element extends down into a cavity defined by poly material deposited in the trench.
13. A field-effect transistor (FET), comprising:
a poly gate trench formed in an epitaxy region;
a poly gate formed in the poly gate trench;
a front-side poly gate contact; and
a lateral gate coupling element extending over or adjacent at least one surface of the poly gate formed in the trench and electrically connecting the poly gate to the front-side poly gate contact.
14. The FET of claim 8 , further comprising:
a doped source region formed in the epitaxy region; and
a front-side source contact coupled to the doped source region.
15. The FET of claim 8 , wherein the lateral gate coupling element is formed from a different material than the poly gate.
16. The FET of claim 8 , wherein the lateral gate coupling element has a higher electrical conductivity than the poly gate.
17. The FET of claim 8 , wherein the lateral gate coupling element comprises tungsten.
18. The FET of claim 8 , wherein the lateral gate coupling element is at least partially located in the poly gate trench.
19. An electronic device, comprising:
an integrated circuit (IC) device, comprising:
a plurality of trench-type field-effect transistors (trench FETs), each trench FET comprising:
a poly gate trench formed in an epitaxy region;
a poly gate formed in the poly gate trench;
a front-side poly gate contact; and
a lateral gate coupling element extending over or adjacent at least one surface of the poly gate formed in the trench and electrically connecting the poly gate to the front-side poly gate contact.
20. A method of forming an integrated circuit (IC) structure including a plurality of trench-type field-effect transistors (trench FETs), the method comprising:
forming a poly gate trench in an epitaxy region;
forming a poly gate in the poly gate trench;
forming a lateral gate coupling element extending over or adjacent, and coupled to, at least one surface of the poly gate;
forming a front-side poly gate contact coupled to the lateral gate coupling element; and
wherein the lateral gate coupling element forms an electrical connection between the poly gate and the front-side poly gate contact.
21. The method of claim 16 , wherein the lateral gate coupling element is formed from a different material than the poly gate.
22. The method of claim 16 , wherein the lateral gate coupling element has a higher electrical conductivity than the poly gate.
23. The method of claim 16 , wherein the lateral gate coupling element comprises tungsten.
24. The method of claim 16 , wherein the lateral gate coupling element is at least partially located in the poly gate trench.
25. The method of claim 16 , comprising:
etching a top portion of the poly gate in the poly gate trench to define a recess in the poly gate; and
forming the lateral gate coupling element such that the lateral gate coupling element extends at least partially into the etched recess in the poly gate.
Priority Applications (3)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
US16/044,883 US20190123196A1 (en) | 2017-10-25 | 2018-07-25 | Trench-Type Field Effect Transistor (Trench FET) With Improved Poly Gate Contact |
TW107133303A TW201924067A (en) | 2017-10-25 | 2018-09-21 | Trench-type field effect transistor (trench FET) with improved poly gate contact |
PCT/US2018/056650 WO2019083830A1 (en) | 2017-10-25 | 2018-10-19 | Trench-type field effect transistor with improved polysilicon gate contact |
Applications Claiming Priority (2)
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US201762576999P | 2017-10-25 | 2017-10-25 | |
US16/044,883 US20190123196A1 (en) | 2017-10-25 | 2018-07-25 | Trench-Type Field Effect Transistor (Trench FET) With Improved Poly Gate Contact |
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US20190123196A1 true US20190123196A1 (en) | 2019-04-25 |
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US16/044,883 Abandoned US20190123196A1 (en) | 2017-10-25 | 2018-07-25 | Trench-Type Field Effect Transistor (Trench FET) With Improved Poly Gate Contact |
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US (1) | US20190123196A1 (en) |
TW (1) | TW201924067A (en) |
WO (1) | WO2019083830A1 (en) |
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US11329050B2 (en) | 2019-12-18 | 2022-05-10 | Samsung Electronics Co., Ltd. | Semiconductor memory devices having contact plugs |
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US6525373B1 (en) * | 1998-06-30 | 2003-02-25 | Fairchild Korea Semiconductor Ltd. | Power semiconductor device having trench gate structure and method for manufacturing the same |
US20030227050A1 (en) * | 2002-04-30 | 2003-12-11 | Kenichi Yoshimochi | Semiconductor device and manufacturing method thereof |
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US4971929A (en) * | 1988-06-30 | 1990-11-20 | Microwave Modules & Devices, Inc. | Method of making RF transistor employing dual metallization with self-aligned first metal |
US8227860B2 (en) * | 2003-02-28 | 2012-07-24 | Micrel, Inc. | System for vertical DMOS with slots |
US8058684B2 (en) * | 2007-09-13 | 2011-11-15 | Rohm Co., Ltd. | Semiconductor device and method for manufacturing the same |
US8552535B2 (en) * | 2008-11-14 | 2013-10-08 | Semiconductor Components Industries, Llc | Trench shielding structure for semiconductor device and method |
TWI438901B (en) * | 2010-05-27 | 2014-05-21 | Sinopower Semiconductor Inc | Power semiconductor device having low gate input resistance and manufacturing method thereof |
-
2018
- 2018-07-25 US US16/044,883 patent/US20190123196A1/en not_active Abandoned
- 2018-09-21 TW TW107133303A patent/TW201924067A/en unknown
- 2018-10-19 WO PCT/US2018/056650 patent/WO2019083830A1/en active Application Filing
Patent Citations (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US6525373B1 (en) * | 1998-06-30 | 2003-02-25 | Fairchild Korea Semiconductor Ltd. | Power semiconductor device having trench gate structure and method for manufacturing the same |
US20030227050A1 (en) * | 2002-04-30 | 2003-12-11 | Kenichi Yoshimochi | Semiconductor device and manufacturing method thereof |
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
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US11329050B2 (en) | 2019-12-18 | 2022-05-10 | Samsung Electronics Co., Ltd. | Semiconductor memory devices having contact plugs |
US11968823B2 (en) | 2019-12-18 | 2024-04-23 | Samsung Electronics Co., Ltd. | Semiconductor memory devices having contact plugs |
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TW201924067A (en) | 2019-06-16 |
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