US20180273465A1 - High-purity carboxylic acid ester and method for producing same - Google Patents
High-purity carboxylic acid ester and method for producing same Download PDFInfo
- Publication number
- US20180273465A1 US20180273465A1 US15/763,590 US201615763590A US2018273465A1 US 20180273465 A1 US20180273465 A1 US 20180273465A1 US 201615763590 A US201615763590 A US 201615763590A US 2018273465 A1 US2018273465 A1 US 2018273465A1
- Authority
- US
- United States
- Prior art keywords
- carboxylic acid
- acid ester
- exchange resin
- anion
- impurities
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Abandoned
Links
Images
Classifications
-
- C—CHEMISTRY; METALLURGY
- C07—ORGANIC CHEMISTRY
- C07C—ACYCLIC OR CARBOCYCLIC COMPOUNDS
- C07C67/00—Preparation of carboxylic acid esters
- C07C67/48—Separation; Purification; Stabilisation; Use of additives
- C07C67/56—Separation; Purification; Stabilisation; Use of additives by solid-liquid treatment; by chemisorption
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01J—CHEMICAL OR PHYSICAL PROCESSES, e.g. CATALYSIS OR COLLOID CHEMISTRY; THEIR RELEVANT APPARATUS
- B01J39/00—Cation exchange; Use of material as cation exchangers; Treatment of material for improving the cation exchange properties
- B01J39/04—Processes using organic exchangers
- B01J39/05—Processes using organic exchangers in the strongly acidic form
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01J—CHEMICAL OR PHYSICAL PROCESSES, e.g. CATALYSIS OR COLLOID CHEMISTRY; THEIR RELEVANT APPARATUS
- B01J39/00—Cation exchange; Use of material as cation exchangers; Treatment of material for improving the cation exchange properties
- B01J39/08—Use of material as cation exchangers; Treatment of material for improving the cation exchange properties
- B01J39/16—Organic material
- B01J39/18—Macromolecular compounds
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01J—CHEMICAL OR PHYSICAL PROCESSES, e.g. CATALYSIS OR COLLOID CHEMISTRY; THEIR RELEVANT APPARATUS
- B01J39/00—Cation exchange; Use of material as cation exchangers; Treatment of material for improving the cation exchange properties
- B01J39/26—Cation exchangers for chromatographic processes
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01J—CHEMICAL OR PHYSICAL PROCESSES, e.g. CATALYSIS OR COLLOID CHEMISTRY; THEIR RELEVANT APPARATUS
- B01J41/00—Anion exchange; Use of material as anion exchangers; Treatment of material for improving the anion exchange properties
- B01J41/04—Processes using organic exchangers
- B01J41/07—Processes using organic exchangers in the weakly basic form
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01J—CHEMICAL OR PHYSICAL PROCESSES, e.g. CATALYSIS OR COLLOID CHEMISTRY; THEIR RELEVANT APPARATUS
- B01J41/00—Anion exchange; Use of material as anion exchangers; Treatment of material for improving the anion exchange properties
- B01J41/08—Use of material as anion exchangers; Treatment of material for improving the anion exchange properties
- B01J41/12—Macromolecular compounds
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01J—CHEMICAL OR PHYSICAL PROCESSES, e.g. CATALYSIS OR COLLOID CHEMISTRY; THEIR RELEVANT APPARATUS
- B01J41/00—Anion exchange; Use of material as anion exchangers; Treatment of material for improving the anion exchange properties
- B01J41/20—Anion exchangers for chromatographic processes
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01J—CHEMICAL OR PHYSICAL PROCESSES, e.g. CATALYSIS OR COLLOID CHEMISTRY; THEIR RELEVANT APPARATUS
- B01J47/00—Ion-exchange processes in general; Apparatus therefor
- B01J47/02—Column or bed processes
- B01J47/026—Column or bed processes using columns or beds of different ion exchange materials in series
- B01J47/028—Column or bed processes using columns or beds of different ion exchange materials in series with alternately arranged cationic and anionic exchangers
-
- C—CHEMISTRY; METALLURGY
- C07—ORGANIC CHEMISTRY
- C07C—ACYCLIC OR CARBOCYCLIC COMPOUNDS
- C07C69/00—Esters of carboxylic acids; Esters of carbonic or haloformic acids
- C07C69/66—Esters of carboxylic acids having esterified carboxylic groups bound to acyclic carbon atoms and having any of the groups OH, O—metal, —CHO, keto, ether, acyloxy, groups, groups, or in the acid moiety
- C07C69/67—Esters of carboxylic acids having esterified carboxylic groups bound to acyclic carbon atoms and having any of the groups OH, O—metal, —CHO, keto, ether, acyloxy, groups, groups, or in the acid moiety of saturated acids
- C07C69/675—Esters of carboxylic acids having esterified carboxylic groups bound to acyclic carbon atoms and having any of the groups OH, O—metal, —CHO, keto, ether, acyloxy, groups, groups, or in the acid moiety of saturated acids of saturated hydroxy-carboxylic acids
- C07C69/68—Lactic acid esters
Definitions
- the present invention relates to a method for purifying a carboxylic acid ester, wherein the metal impurity content and the anionic impurity content are reduced.
- the carboxylic acid ester of the present invention is useful for a wide range of applications such as synthetic raw materials, cleaning agents for electronic components and solvents for paints, adhesives and the like. Further, it is used as a treatment agent for cleaning of a semiconductor substrate, etching, development of a photoresist and the like in the production of integrated circuits and large-scale integrated circuits. In particular, in applications for semiconductors, very high purity is required because of contamination of semiconductor substrates, and a high-purity carboxylic acid ester containing impurities in an amount as small as possible is required.
- carboxylic acid esters conventionally used have high concentrations of metal impurities and anionic impurities, and have problems in which, for example, these cannot be used in applications for semiconductors.
- Patent Document 1 describes a method for limiting the water content in a carboxylic acid ester as a technique for improving storage stability and corrosiveness against metal materials of the carboxylic acid ester. Further, the document describes a method for limiting the water content to suppress hydrolysis of the carboxylic acid ester, thereby suppressing increase in an acid content (a hydrolyzate of the carboxylic acid ester) which causes corrosion of metal materials, etc., but does not describe reduction in metal impurities.
- Patent Document 2 describes a method for reducing an acid content in a carboxylic acid ester by means of neutralization or the like to improve storage stability (decomposition, discoloration, etc. during storage). In this method, just decomposition and discoloration of the carboxylic acid ester itself are suppressed, and the document does not describe reduction in metal impurities.
- Patent Document 3 describes a method for bringing a substantially anhydrous organic solution into contact with one or a plurality of cation-exchange resins for the purpose of reducing the content of alkali metal and alkaline earth metal cations.
- the type of metal cations to be reduced is limited to alkali metals and alkaline earth metals, and the document does not describe reduction in anionic impurities. Therefore, the method is insufficient as a method for purifying a carboxylic acid ester.
- Patent Documents 4 and 5 describe a method of purification with a very high purity at the time of removing metal ions and the like contained in a non-aqueous liquid material using an ion exchange resin, wherein the non-aqueous liquid material is brought into contact with a cation-exchange resin alone or a mixed ion exchange resin consisting of a cation-exchange resin and an anion-exchange resin to reduce the concentration of metal impurities in the non-aqueous liquid material to a very low level, and wherein an eluate from the resin itself is also removed.
- the Na concentration after purification is 50 ppb or less and does not satisfy the concentration of metal impurities required for applications for semiconductors (1 ppb or less), and therefore the method is insufficient as a method for purifying a carboxylic acid ester.
- Patent Document 6 describes a method of removing metal ions in an organic solvent by using an ion exchange resin having OH or a weak acid as a counter ion of a strongly basic anion-exchange resin.
- the document describes only Fe and Pd as metal impurities that can be removed, and does not describe removal of impurities including other alkali metals. Therefore, the method is insufficient as a method for purifying a carboxylic acid ester. Thus, there is no known method for highly purifying a carboxylic acid ester.
- Patent Document 1 Japanese Patent No. 3813199
- Patent Document 2 Japanese Patent No. 4116104
- Patent Document 3 Japanese Patent No. 4302201
- Patent Document 4 Japanese Laid-Open Patent Publication No. 2004-181351
- Patent Document 5 Japanese Laid-Open Patent Publication No. 2004-181352
- Patent Document 6 Japanese Laid-Open Patent Publication No. 2005-247770
- the objective of the present invention is to provide a high-purity carboxylic acid ester, wherein the metal impurity content and the anionic impurity content are significantly reduced.
- the present inventors diligently made researches on methods for purifying a carboxylic acid ester in order to solve the problems and found that a carboxylic acid ester can be highly purified by using an ion exchange resin at the time of removing metal impurities and anionic impurities from carboxylic acid ester and by defining the order of a cation-exchange resin and anion-exchange resin for flowing through, and thus the present invention was achieved.
- the present invention is as follows:
- a high-purity carboxylic acid ester wherein the Ag, Al, Au, Ca, Cr, Cu, Fe, K, Mg, Na, Sn and Zn contents as metal impurity contents are each less than 1 ppb, and wherein the anionic impurity content is less than 1 ppm.
- a method for producing a high-purity carboxylic acid ester including: a step of bringing a crude carboxylic acid ester that contains anionic impurities and at least Ag, Al, Au, Ca, Cr, Cu, Fe, K, Mg, Na, Sn and Zn as metal impurities into contact with a cation-exchange resin (II); and a step of subsequently bringing the crude carboxylic acid ester into contact with an anion-exchange resin (III).
- ⁇ 3> The method for producing a high-purity carboxylic acid ester according to item ⁇ 2>, which includes a step of bringing the crude carboxylic acid ester into contact with an anion-exchange resin (I) before bringing the crude carboxylic acid ester into contact with the cation-exchange resin (II).
- ⁇ 4> The method for producing a high-purity carboxylic acid ester according to item ⁇ 2> or ⁇ 3>, wherein the carboxylic acid ester is at least one selected from the group consisting of methyl lactate, ethyl lactate, propyl lactate, methyl ⁇ -hydroxyisobutyrate, ethyl ⁇ -hydroxyisobutyrate, propyl ⁇ -hydroxyisobutyrate, butyl ⁇ -hydroxyisobutyrate, methyl ⁇ -hydroxyisobutyrate, ethyl ⁇ -hydroxyisobutyrate, propyl ⁇ -hydroxyisobutyrate and butyl ⁇ -hydroxyisobutyrate.
- ⁇ 5> The method for producing a high-purity carboxylic acid ester according to any one of items ⁇ 2> to ⁇ 4>, wherein in the obtained high-purity carboxylic acid ester, the Ag, Al, Au, Ca, Cr, Cu, Fe, K, Mg, Na, Sn and Zn contents as metal impurity contents are each less than 1 ppb and the anionic impurity content is less than 1 ppm.
- ⁇ 6> The method for producing a high-purity carboxylic acid ester according to any one of items ⁇ 2> to ⁇ 5>, wherein in the crude carboxylic acid ester, the Ag, Al, Au, Ca, Cr, Cu, Fe, K, Mg, Na, Sn and Zn contents as metal impurity contents are each 8 ppb or more and the anionic impurity content is 20 ppm or more.
- metal impurities and anionic impurities are highly reduced, and it can be suitably used for many applications in which a carboxylic acid ester is used, in particular, applications in the field of electronics industry. Specifically, it is used for a wide range of applications such as synthetic raw materials, cleaning agents for electronic components and solvents for paints, adhesives and the like, or it is used as a treatment agent for cleaning of a semiconductor substrate, etching, development of a photoresist and the like in the production of integrated circuits and large-scale integrated circuits. Accordingly, the present invention has industrial significance.
- FIG. 1 is a schematic view showing a process of obtaining a high-purity carboxylic acid ester by flowing a carboxylic acid ester through a weakly basic anion-exchange resin (I), a strongly acidic cation-exchange resin (II) and a weakly basic anion-exchange resin (III) in this order in Examples 1 and 2.
- a weakly basic anion-exchange resin I
- a strongly acidic cation-exchange resin II
- III weakly basic anion-exchange resin
- the present invention relates to a high-purity carboxylic acid ester in which metal impurity contents are each less than 1 ppb and the anionic impurity content is less than 1 ppm, and a method for producing the same.
- the high-purity carboxylic acid ester of the present invention is produced by bringing a crude carboxylic acid ester that contains metal impurities and anionic impurities into contact with a cation-exchange resin and an anion-exchange resin to remove the metal impurities with both the cation-exchange resin and the anion-exchange resin and remove the anionic impurities with the anion-exchange resin.
- the anionic impurities of the present invention include a carboxylic acid, which is contained in the crude carboxylic acid ester and is generated by a hydrolysis reaction of the carboxylic acid ester.
- the crude carboxylic acid ester of the present invention contains metal impurities and anionic impurities. It may also contain water as one of other components.
- the metal impurities include at least Ag, Al, Au, Ca, Cr, Cu, Fe, K, Mg, Na, Sn and Zn.
- the Ag, Al, Au, Ca, Cr, Cu, Fe, K, Mg, Na, Sn and Zn contents as the contents of the metal impurities are each preferably 8 ppb or more.
- the content of the anionic impurities is preferably 20 ppm or more. According to the present invention, it is possible to produce a high-purity carboxylic acid ester even when using such a crude carboxylic acid ester with a high impurity concentration.
- cation-exchange resin (II) to be used in the present invention an H-type strongly acidic cation-exchange resin and a Na-type strongly acidic cation-exchange resin are preferred, and among them, an H-type strongly acidic cation-exchange resin having a sulfonic acid group can be particularly suitably used.
- a commercially-available product can be used, and specific examples thereof include 15JS-HG DRY (manufactured by Organo Corporation).
- anion-exchange resins (I) and (III) to be used in the present invention include a strongly basic anion-exchange resin and a weakly basic anion-exchange resin, but a weakly basic anion-exchange resin is preferred, and a free base type weakly basic anion-exchange resin is more preferred. Among them, a weakly basic anion-exchange resin having a tertiary ammonium base can be particularly suitably used.
- anion-exchange resin a commercially-available product can be used, and specific examples thereof include B20-HG DRY (manufactured by Organo Corporation).
- the anion-exchange resin (I) and the anion-exchange resin (III) may be the same or different.
- the method for bringing the crude carboxylic acid ester into contact with the cation-exchange resin (II) and anion-exchange resins (I) and (III) is not particularly limited, but a method for flowing the crude carboxylic acid ester through the cation-exchange resin and anion-exchange resins is generally employed.
- the temperatures of the crude carboxylic acid ester, cation-exchange resin and anion-exchange resins are preferably 100° C. or lower.
- the production method of the present invention can be carried out by using either a batch method or a flow method, but in view of purification efficiency, the flow method in which the crude carboxylic acid ester is flowed through columns filled with ion exchange resins is preferably employed.
- the method of delivering a solution may be either upflow or downflow, and the space velocity of flowing through (SV: Hr ⁇ 1 ) is suitably determined depending on the type and viscosity of the solution, pressure loss of resin, etc. but is preferably 1 to 50 Hr ⁇ 1 , and more preferably 10 to 20 Hr ⁇ 1 .
- the concentration of moisture in the crude carboxylic acid ester is not defined, but when bringing a carboxylic acid ester containing moisture into contact with the cation-exchange resin and flowing it therethrough, an acid content is generated by hydrolysis. When subsequently bringing the carboxylic acid ester containing the increased acid content into contact with the anion-exchange resin and flowing it therethrough, the generated acid content is captured by the anion-exchange resin and shortens the life of the anion-exchange resin. For this reason, the concentration of moisture in the crude carboxylic acid ester is preferably 0.01% by weight or less.
- a method for producing the high-purity carboxylic acid ester of the present invention a method in which contact with the anion-exchange resin (I) is performed before contact with the cation-exchange resin (II) is more preferred.
- the hydrolysis reaction between moisture contained in the crude carboxylic acid ester and the carboxylic acid ester is caused to newly generate the anionic impurities.
- the anionic impurities (the carboxylic acid) contained in the crude carboxylic acid ester are brought into contact with the anion-exchange resin (I) to be captured before contact with the cation-exchange resin (II), thereby reducing the load of the anionic impurities to be subsequently captured by the anion-exchange resin (III). For this reason, the life of the anion-exchange resin (III) can be improved.
- the present invention will be specifically described by way of working examples and comparative examples. However, the present invention is not limited to the working examples. Note that the concentrations of the metal impurities and anionic impurities in the carboxylic acid ester were analyzed as described below.
- Quantitative analysis was carried out using an ICP mass spectrometer (Agilent 7900 ICP-MS manufactured by Agilent).
- Quantitative analysis was carried out using an automatic titrator (automatic titrator AT-510 manufactured by Kyoto Electronics Manufacturing Co., Ltd.) with 0.01 mol/L of sodium hydroxide. Analysis was carried out after 30 mL of methanol was added to 50 mL of carboxylic acid ester.
- each of an H-type strongly acidic cation-exchange resin (trade name: 15JS-HG DRY, manufactured by Organo Corporation) and a free base type weakly basic anion-exchange resin (trade name: B20-HG DRY, manufactured by Organo Corporation) was put into ethyl lactate separately and immersed therein for 1 hour or longer while being gently stirred suitably.
- one FEP column having an inner diameter of 16 mm was filled with 10 ml of strongly acidic cation-exchange resin, and each of two FEP columns having an inner diameter of 16 mm was filled with 10 ml of weakly basic anion-exchange resin.
- each of an H-type strongly acidic cation-exchange resin (trade name: 15JS-HG DRY, manufactured by Organo Corporation) and a free base type weakly basic anion-exchange resin (trade name: B20-HG DRY, manufactured by Organo Corporation) was put into methyl hydroxyisobutyrate separately and immersed therein for 1 hour or longer while being gently stirred suitably.
- one FEP column having an inner diameter of 16 mm was filled with 10 ml of strongly acidic cation-exchange resin, and each of two FEP columns having an inner diameter of 16 mm was filled with 10 ml of weakly basic anion-exchange resin.
- the anionic impurity concentrations after flowing through are shown in Table 3. According to Table 3, the anion content was highly removed during time between when flowing through was started and when the amount was 2000 ml, but the anion content was increased after the amount reached 2500 ml.
- H-type strongly acidic cation-exchange resin (trade name: 15JS-HG DRY, manufactured by Organo Corporation) and a free base type weakly basic anion-exchange resin (trade name: B20-HG DRY, manufactured by Organo Corporation) were pretreated with methyl hydroxyisobutyrate in a manner similar to that in Example 2.
- one FEP column having an inner diameter of 16 mm was filled with 10 ml of strongly acidic cation-exchange resin, and another FEP column having an inner diameter of 16 mm was filled with 10 ml of weakly basic anion-exchange resin.
- Example 2 the ability to remove the anion content can be more improved in Example 2 in which methyl hydroxyisobutyrate was flowed through the weakly basic anion-exchange resin (I) before it was flowed through the strongly acidic cation-exchange resin (II), and in addition, the life of the anion-exchange resin (III) can be improved.
- the carboxylic acid ester is a compound useful for a wide range of applications such as synthetic raw materials, cleaning agents for electronic components and solvents for paints, adhesives and the like, or as a treatment agent for cleaning of a semiconductor substrate, etching, development of a photoresist and the like in the production of integrated circuits and large-scale integrated circuits.
Abstract
The present invention makes it possible to provide a high-purity carboxylic acid ester in which the Ag, Al, Au, Ca, Cr, Cu, Fe, K, Mg, Na, Sn, and Zn contents as metal impurity contents are each less than 1 ppb and the anionic impurity content is less than 1 ppm. The present invention also makes it possible to provide a method for producing a high-purity carboxylic acid ester, the method including a step for bringing a crude carboxylic acid ester that contains anionic impurities and Ag, Al, Au, Ca, Cr, Cu, Fe, K, Mg, Na, Sn, and Zn as metal impurities into contact with a cation-exchange resin (II), followed by a step for bringing the crude carboxylic acid ester into contact with an anion-exchange resin (III).
Description
- The present invention relates to a method for purifying a carboxylic acid ester, wherein the metal impurity content and the anionic impurity content are reduced. The carboxylic acid ester of the present invention is useful for a wide range of applications such as synthetic raw materials, cleaning agents for electronic components and solvents for paints, adhesives and the like. Further, it is used as a treatment agent for cleaning of a semiconductor substrate, etching, development of a photoresist and the like in the production of integrated circuits and large-scale integrated circuits. In particular, in applications for semiconductors, very high purity is required because of contamination of semiconductor substrates, and a high-purity carboxylic acid ester containing impurities in an amount as small as possible is required.
- However, carboxylic acid esters conventionally used have high concentrations of metal impurities and anionic impurities, and have problems in which, for example, these cannot be used in applications for semiconductors.
- For example, Patent Document 1 describes a method for limiting the water content in a carboxylic acid ester as a technique for improving storage stability and corrosiveness against metal materials of the carboxylic acid ester. Further, the document describes a method for limiting the water content to suppress hydrolysis of the carboxylic acid ester, thereby suppressing increase in an acid content (a hydrolyzate of the carboxylic acid ester) which causes corrosion of metal materials, etc., but does not describe reduction in metal impurities.
- Patent Document 2 describes a method for reducing an acid content in a carboxylic acid ester by means of neutralization or the like to improve storage stability (decomposition, discoloration, etc. during storage). In this method, just decomposition and discoloration of the carboxylic acid ester itself are suppressed, and the document does not describe reduction in metal impurities.
- Patent Document 3 describes a method for bringing a substantially anhydrous organic solution into contact with one or a plurality of cation-exchange resins for the purpose of reducing the content of alkali metal and alkaline earth metal cations. In the document, the type of metal cations to be reduced is limited to alkali metals and alkaline earth metals, and the document does not describe reduction in anionic impurities. Therefore, the method is insufficient as a method for purifying a carboxylic acid ester.
- Patent Documents 4 and 5 describe a method of purification with a very high purity at the time of removing metal ions and the like contained in a non-aqueous liquid material using an ion exchange resin, wherein the non-aqueous liquid material is brought into contact with a cation-exchange resin alone or a mixed ion exchange resin consisting of a cation-exchange resin and an anion-exchange resin to reduce the concentration of metal impurities in the non-aqueous liquid material to a very low level, and wherein an eluate from the resin itself is also removed. However, the Na concentration after purification is 50 ppb or less and does not satisfy the concentration of metal impurities required for applications for semiconductors (1 ppb or less), and therefore the method is insufficient as a method for purifying a carboxylic acid ester.
- Patent Document 6 describes a method of removing metal ions in an organic solvent by using an ion exchange resin having OH or a weak acid as a counter ion of a strongly basic anion-exchange resin. However, the document describes only Fe and Pd as metal impurities that can be removed, and does not describe removal of impurities including other alkali metals. Therefore, the method is insufficient as a method for purifying a carboxylic acid ester. Thus, there is no known method for highly purifying a carboxylic acid ester.
- Patent Document 1: Japanese Patent No. 3813199
- Patent Document 2: Japanese Patent No. 4116104
- Patent Document 3: Japanese Patent No. 4302201
- Patent Document 4: Japanese Laid-Open Patent Publication No. 2004-181351
- Patent Document 5: Japanese Laid-Open Patent Publication No. 2004-181352
- Patent Document 6: Japanese Laid-Open Patent Publication No. 2005-247770
- The objective of the present invention is to provide a high-purity carboxylic acid ester, wherein the metal impurity content and the anionic impurity content are significantly reduced.
- The present inventors diligently made researches on methods for purifying a carboxylic acid ester in order to solve the problems and found that a carboxylic acid ester can be highly purified by using an ion exchange resin at the time of removing metal impurities and anionic impurities from carboxylic acid ester and by defining the order of a cation-exchange resin and anion-exchange resin for flowing through, and thus the present invention was achieved.
- Specifically, the present invention is as follows:
- <1> A high-purity carboxylic acid ester, wherein the Ag, Al, Au, Ca, Cr, Cu, Fe, K, Mg, Na, Sn and Zn contents as metal impurity contents are each less than 1 ppb, and wherein the anionic impurity content is less than 1 ppm.
<2> A method for producing a high-purity carboxylic acid ester, the method including: a step of bringing a crude carboxylic acid ester that contains anionic impurities and at least Ag, Al, Au, Ca, Cr, Cu, Fe, K, Mg, Na, Sn and Zn as metal impurities into contact with a cation-exchange resin (II); and a step of subsequently bringing the crude carboxylic acid ester into contact with an anion-exchange resin (III).
<3> The method for producing a high-purity carboxylic acid ester according to item <2>, which includes a step of bringing the crude carboxylic acid ester into contact with an anion-exchange resin (I) before bringing the crude carboxylic acid ester into contact with the cation-exchange resin (II).
<4> The method for producing a high-purity carboxylic acid ester according to item <2> or <3>, wherein the carboxylic acid ester is at least one selected from the group consisting of methyl lactate, ethyl lactate, propyl lactate, methyl α-hydroxyisobutyrate, ethyl α-hydroxyisobutyrate, propyl α-hydroxyisobutyrate, butyl α-hydroxyisobutyrate, methyl β-hydroxyisobutyrate, ethyl β-hydroxyisobutyrate, propyl β-hydroxyisobutyrate and butyl β-hydroxyisobutyrate.
<5> The method for producing a high-purity carboxylic acid ester according to any one of items <2> to <4>, wherein in the obtained high-purity carboxylic acid ester, the Ag, Al, Au, Ca, Cr, Cu, Fe, K, Mg, Na, Sn and Zn contents as metal impurity contents are each less than 1 ppb and the anionic impurity content is less than 1 ppm.
<6> The method for producing a high-purity carboxylic acid ester according to any one of items <2> to <5>, wherein in the crude carboxylic acid ester, the Ag, Al, Au, Ca, Cr, Cu, Fe, K, Mg, Na, Sn and Zn contents as metal impurity contents are each 8 ppb or more and the anionic impurity content is 20 ppm or more. - In the high-purity carboxylic acid ester obtained by the method of the present invention, metal impurities and anionic impurities are highly reduced, and it can be suitably used for many applications in which a carboxylic acid ester is used, in particular, applications in the field of electronics industry. Specifically, it is used for a wide range of applications such as synthetic raw materials, cleaning agents for electronic components and solvents for paints, adhesives and the like, or it is used as a treatment agent for cleaning of a semiconductor substrate, etching, development of a photoresist and the like in the production of integrated circuits and large-scale integrated circuits. Accordingly, the present invention has industrial significance.
-
FIG. 1 is a schematic view showing a process of obtaining a high-purity carboxylic acid ester by flowing a carboxylic acid ester through a weakly basic anion-exchange resin (I), a strongly acidic cation-exchange resin (II) and a weakly basic anion-exchange resin (III) in this order in Examples 1 and 2. - Hereinafter, the present invention will be described in detail. The present invention relates to a high-purity carboxylic acid ester in which metal impurity contents are each less than 1 ppb and the anionic impurity content is less than 1 ppm, and a method for producing the same.
- The high-purity carboxylic acid ester of the present invention is produced by bringing a crude carboxylic acid ester that contains metal impurities and anionic impurities into contact with a cation-exchange resin and an anion-exchange resin to remove the metal impurities with both the cation-exchange resin and the anion-exchange resin and remove the anionic impurities with the anion-exchange resin. Examples of the anionic impurities of the present invention include a carboxylic acid, which is contained in the crude carboxylic acid ester and is generated by a hydrolysis reaction of the carboxylic acid ester.
- The crude carboxylic acid ester of the present invention contains metal impurities and anionic impurities. It may also contain water as one of other components. Examples of the metal impurities include at least Ag, Al, Au, Ca, Cr, Cu, Fe, K, Mg, Na, Sn and Zn. In the crude carboxylic acid ester of the present invention, the Ag, Al, Au, Ca, Cr, Cu, Fe, K, Mg, Na, Sn and Zn contents as the contents of the metal impurities are each preferably 8 ppb or more. Further, the content of the anionic impurities is preferably 20 ppm or more. According to the present invention, it is possible to produce a high-purity carboxylic acid ester even when using such a crude carboxylic acid ester with a high impurity concentration.
- As the cation-exchange resin (II) to be used in the present invention, an H-type strongly acidic cation-exchange resin and a Na-type strongly acidic cation-exchange resin are preferred, and among them, an H-type strongly acidic cation-exchange resin having a sulfonic acid group can be particularly suitably used. As the above-described cation-exchange resin, a commercially-available product can be used, and specific examples thereof include 15JS-HG DRY (manufactured by Organo Corporation).
- In the present invention, as described later, there are: 1. a method of bringing a crude carboxylic acid ester into contact with a cation-exchange resin and then with an anion-exchange resin; and 2. a method of bringing a crude carboxylic acid ester into contact with an anion-exchange resin, then with a cation-exchange resin, and then with an anion-exchange resin. Hereinafter, the anion-exchange resin that is contacted after contact with the cation-exchange resin is sometimes referred to as an anion-exchange resin (III), and the anion-exchange resin that is contacted before contact with the cation-exchange resin is sometimes referred to as an anion-exchange resin (I).
- Examples of the anion-exchange resins (I) and (III) to be used in the present invention include a strongly basic anion-exchange resin and a weakly basic anion-exchange resin, but a weakly basic anion-exchange resin is preferred, and a free base type weakly basic anion-exchange resin is more preferred. Among them, a weakly basic anion-exchange resin having a tertiary ammonium base can be particularly suitably used. As the above-described anion-exchange resin, a commercially-available product can be used, and specific examples thereof include B20-HG DRY (manufactured by Organo Corporation). In the present invention, the anion-exchange resin (I) and the anion-exchange resin (III) may be the same or different.
- In the present invention, the method for bringing the crude carboxylic acid ester into contact with the cation-exchange resin (II) and anion-exchange resins (I) and (III) is not particularly limited, but a method for flowing the crude carboxylic acid ester through the cation-exchange resin and anion-exchange resins is generally employed. Regarding the temperature conditions at the time of contact, in consideration of durability of ion exchange resins, the temperatures of the crude carboxylic acid ester, cation-exchange resin and anion-exchange resins are preferably 100° C. or lower. Further, the production method of the present invention can be carried out by using either a batch method or a flow method, but in view of purification efficiency, the flow method in which the crude carboxylic acid ester is flowed through columns filled with ion exchange resins is preferably employed. When purification is performed using the flow method, the method of delivering a solution may be either upflow or downflow, and the space velocity of flowing through (SV: Hr−1) is suitably determined depending on the type and viscosity of the solution, pressure loss of resin, etc. but is preferably 1 to 50 Hr−1, and more preferably 10 to 20 Hr−1. The concentration of moisture in the crude carboxylic acid ester is not defined, but when bringing a carboxylic acid ester containing moisture into contact with the cation-exchange resin and flowing it therethrough, an acid content is generated by hydrolysis. When subsequently bringing the carboxylic acid ester containing the increased acid content into contact with the anion-exchange resin and flowing it therethrough, the generated acid content is captured by the anion-exchange resin and shortens the life of the anion-exchange resin. For this reason, the concentration of moisture in the crude carboxylic acid ester is preferably 0.01% by weight or less.
- As the method for producing the high-purity carboxylic acid ester of the present invention, a method in which contact with the anion-exchange resin (I) is performed before contact with the cation-exchange resin (II) is more preferred. When bringing the crude carboxylic acid ester into contact with the cation-exchange resin (II), as described above, the hydrolysis reaction between moisture contained in the crude carboxylic acid ester and the carboxylic acid ester is caused to newly generate the anionic impurities. According to the above-described method, the anionic impurities (the carboxylic acid) contained in the crude carboxylic acid ester are brought into contact with the anion-exchange resin (I) to be captured before contact with the cation-exchange resin (II), thereby reducing the load of the anionic impurities to be subsequently captured by the anion-exchange resin (III). For this reason, the life of the anion-exchange resin (III) can be improved.
- Hereinafter, the present invention will be specifically described by way of working examples and comparative examples. However, the present invention is not limited to the working examples. Note that the concentrations of the metal impurities and anionic impurities in the carboxylic acid ester were analyzed as described below.
- Quantitative analysis was carried out using an ICP mass spectrometer (Agilent 7900 ICP-MS manufactured by Agilent).
- Quantitative analysis was carried out using an automatic titrator (automatic titrator AT-510 manufactured by Kyoto Electronics Manufacturing Co., Ltd.) with 0.01 mol/L of sodium hydroxide. Analysis was carried out after 30 mL of methanol was added to 50 mL of carboxylic acid ester.
- As a pretreatment, each of an H-type strongly acidic cation-exchange resin (trade name: 15JS-HG DRY, manufactured by Organo Corporation) and a free base type weakly basic anion-exchange resin (trade name: B20-HG DRY, manufactured by Organo Corporation) was put into ethyl lactate separately and immersed therein for 1 hour or longer while being gently stirred suitably. After that, one FEP column having an inner diameter of 16 mm was filled with 10 ml of strongly acidic cation-exchange resin, and each of two FEP columns having an inner diameter of 16 mm was filled with 10 ml of weakly basic anion-exchange resin. After that, ethyl lactate was flowed through the weakly basic anion-exchange resin (I), the strongly acidic cation-exchange resin (II) and the weakly basic anion-exchange resin (III) in this order at 25° C. with SV=20 Hr−1 as shown in
FIG. 1 . Respective concentrations of impurities after flowing through are shown in Table 1. From Table 1, it is understood that all the metal and anion contents described therein were highly removed. - As a pretreatment, each of an H-type strongly acidic cation-exchange resin (trade name: 15JS-HG DRY, manufactured by Organo Corporation) and a free base type weakly basic anion-exchange resin (trade name: B20-HG DRY, manufactured by Organo Corporation) was put into methyl hydroxyisobutyrate separately and immersed therein for 1 hour or longer while being gently stirred suitably. After that, one FEP column having an inner diameter of 16 mm was filled with 10 ml of strongly acidic cation-exchange resin, and each of two FEP columns having an inner diameter of 16 mm was filled with 10 ml of weakly basic anion-exchange resin. After that, methyl hydroxyisobutyrate was flowed through the weakly basic anion-exchange resin (I), the strongly acidic cation-exchange resin (II) and the weakly basic anion-exchange resin (III) in this order at 25° C. with SV=20 Hr−1 as shown in
FIG. 1 . Respective concentrations of impurities after flowing through are shown in Table 2. From Table 2, it is understood that all the metal and anion contents described therein were highly removed. - Further, the amount of methyl hydroxyisobutyrate flowed through was increased. The anionic impurity concentrations after flowing through are shown in Table 3. According to Table 3, the anion content was highly removed during time between when flowing through was started and when the amount was 2000 ml, but the anion content was increased after the amount reached 2500 ml.
- An H-type strongly acidic cation-exchange resin (trade name: 15JS-HG DRY, manufactured by Organo Corporation) and a free base type weakly basic anion-exchange resin (trade name: B20-HG DRY, manufactured by Organo Corporation) were pretreated with methyl hydroxyisobutyrate in a manner similar to that in Example 2. After that, one FEP column having an inner diameter of 16 mm was filled with 10 ml of strongly acidic cation-exchange resin, and another FEP column having an inner diameter of 16 mm was filled with 10 ml of weakly basic anion-exchange resin. After that, methyl hydroxyisobutyrate was flowed through the strongly acidic cation-exchange resin (II) and the weakly basic anion-exchange resin (III) in this order at 25° C. with SV=20 Hr−1. Respective concentrations of impurities after flowing through are shown in Table 4. From Table 4, it is understood that all the metals described therein were highly removed. The anion content was highly removed during time between when flowing through was started and when the amount was 1500 ml, but the anion content was increased after the amount reached 1500 ml.
- According to the results of Examples 2 and 3, the ability to remove the anion content can be more improved in Example 2 in which methyl hydroxyisobutyrate was flowed through the weakly basic anion-exchange resin (I) before it was flowed through the strongly acidic cation-exchange resin (II), and in addition, the life of the anion-exchange resin (III) can be improved.
- An H-type strongly acidic cation-exchange resin (trade name: 15JS-HG DRY, manufactured by Organo Corporation) was pretreated with ethyl lactate in a manner similar to that in Example 1. After that, an FEP column having an inner diameter of 16 mm was filled with 20 ml of strongly acidic cation-exchange resin, and after that, ethyl lactate was flowed therethrough at 25° C. with SV=20 Hr−1. Respective concentrations of impurities after flowing through are shown in Table 5. From Table 5, it is understood that Ag, Au, Cr, Fe and Sn were hardly removed, and that it was impossible to remove the anionic impurities.
- A free base type weakly basic anion-exchange resin (trade name: B20-HG DRY, manufactured by Organo Corporation) was pretreated with ethyl lactate in a manner similar to that in Example 1. After that, an FEP column having an inner diameter of 16 mm was filled with 20 ml of free base type weakly basic anion-exchange resin, and after that, ethyl lactate was flowed therethrough at 25° C. with SV=20 Hr−1. Respective concentrations of impurities after flowing through are shown in Table 6. From Table 6, it is understood that K and Na were hardly removed.
- 10 ml of an H-type strongly acidic cation-exchange resin (trade name: 15JS-HG DRY, manufactured by Organo Corporation) was mixed with 20 ml of a free base type weakly basic anion-exchange resin (trade name: B20-HG DRY, manufactured by Organo Corporation), and the mixture was pretreated with ethyl lactate in a manner similar to that in Example 1. After that, an FEP column having an inner diameter of 16 mm was filled with 30 ml of the mixture, and then ethyl lactate was flowed therethrough at 25° C. with SV=20 Hr−1. Respective concentrations of impurities after flowing through are shown in Table 7. From Table 7, it is understood that Ca and Cr were insufficiently removed.
- An H-type strongly acidic cation-exchange resin (trade name: 15JS-HG DRY, manufactured by Organo Corporation) was pretreated with methyl hydroxyisobutyrate in a manner similar to that in Example 2. After that, an FEP column having an inner diameter of 16 mm was filled with 20 ml of strongly acidic cation-exchange resin, and after that, methyl hydroxyisobutyrate was flowed therethrough at 25° C. with SV=20 Respective concentrations of impurities after flowing through are shown in Table 8. From Table 8, it is understood that Ag, Au, Fe and Sn were hardly removed, and that it was impossible to remove the anionic impurities.
- A free base type weakly basic anion-exchange resin (trade name: B20-HG DRY, manufactured by Organo Corporation) was pretreated with methyl hydroxyisobutyrate in a manner similar to that in Example 2. After that, an FEP column having an inner diameter of 16 mm was filled with 20 ml of the free base type weakly basic anion-exchange resin, and after that, methyl hydroxyisobutyrate was flowed therethrough at 25° C. with SV=20 Hr−1. Respective concentrations of impurities after flowing through are shown in Table 9. From Table 9, it is understood that K and Na were hardly removed.
- 10 ml of an H-type strongly acidic cation-exchange resin (trade name: 15JS-HG DRY, manufactured by Organo Corporation) was mixed with 20 ml of a free base type weakly basic anion-exchange resin (trade name: B20-HG DRY, manufactured by Organo Corporation), and the mixture was pretreated with methyl hydroxyisobutyrate in a manner similar to that in Example 2. After that, an FEP column having an inner diameter of 16 mm was filled with 30 ml of the mixture, and then methyl hydroxyisobutyrate was flowed therethrough at 25° C. with SV=20 Respective concentrations of impurities after flowing through are shown in Table 10. From Table 10, it is understood that Ca and Cr were insufficiently removed.
-
TABLE 1 Before After Metallic element flowing flowing content (unit: ppb) through through Ag 10 <1 Al 10 <1 Au 10 <1 Ca 10 <1 Cr 10 <1 Cu 10 <1 Fe 10 <1 K 10 <1 Mg 10 <1 Na 10 <1 Sn 10 <1 Zn 10 <1 Anionic impurities 30 <1 (unit: ppm) -
TABLE 2 Before After Metallic element flowing flowing content (unit: ppb) through through Ag 10 <1 Al 10 <1 Au 10 <1 Ca 10 <1 Cr 10 <1 Cu 10 <1 Fe 10 <1 K 10 <1 Mg 10 <1 Na 10 <1 Sn 10 <1 Zn 10 <1 Anionic impurities 30 <1 (unit: ppm) -
TABLE 3 Flow-through amount Before flowing 500 1000 1500 2000 2500 through ml ml ml ml ml Anionic impurities 30 <1 <1 <1 <1 10 (unit: ppm) -
TABLE 4 Metallic element content (unit: ppb) Element Before flowing through After flowing through Ag 10 <1 Al 10 <1 Au 10 <1 Ca 10 <1 Cr 10 <1 Cu 10 <1 Fe 10 <1 K 10 <1 Mg 10 <1 Na 10 <1 Sn 10 <1 Zn 10 <1 Flow-through amount Before flowing 500 1000 1500 2000 2500 through ml ml ml ml ml Anionic impurities 30 <1 <1 <1 10 20 (unit: ppm) ppm ppm ppm ppm ppm ppm -
TABLE 5 Before After Metallic element flowing flowing content (unit: ppb) through through Ag 10 10 Al 10 2 Au 10 10 Ca 10 2 Cr 10 10 Cu 10 <1 Fe 10 10 K 10 <1 Mg 10 <1 Na 10 <1 Sn 10 10 Zn 10 <1 Anionic impurities 30 110 (unit: ppm) -
TABLE 6 Before After Metallic element flowing flowing content (unit: ppb) through through Ag 10 <1 Al 10 <1 Au 10 <1 Ca 10 <1 Cr 10 <1 Cu 10 <1 Fe 10 <1 K 10 8 Mg 10 <1 Na 10 8 Sn 10 <1 Zn 10 <1 Anionic impurities 30 <1 (unit: ppm) -
TABLE 7 Before After Metallic element flowing flowing content (unit: ppb) through through Ag 10 <1 Al 10 <1 Au 10 <1 Ca 10 3 Cr 10 6 Cu 10 <1 Fe 10 <1 K 10 <1 Mg 10 <1 Na 10 <1 Sn 10 <1 Zn 10 <1 Anionic impurities 30 <1 (unit: ppm) -
TABLE 8 Before After Metallic element flowing flowing content (unit: ppb) through through Ag 10 10 Al 10 2 Au 10 10 Ca 10 3 Cr 10 6 Cu 10 <1 Fe 10 10 K 10 <1 Mg 10 <1 Na 10 <1 Sn 10 10 Zn 10 <1 Anionic impurities 30 120 (unit: ppm) -
TABLE 9 Before After Metallic element flowing flowing content (unit: ppb) through through Ag 10 <1 Al 10 <1 Au 10 <1 Ca 10 <1 Cr 10 <1 Cu 10 <1 Fe 10 <1 K 10 7 Mg 10 <1 Na 10 7 Sn 10 <1 Zn 10 <1 Anionic impurities 30 <1 (unit: ppm) -
TABLE 10 Before After Metallic element flowing flowing content (unit: ppb) through through Ag 10 <1 Al 10 <1 Au 10 <1 Ca 10 2 Cr 10 5 Cu 10 <1 Fe 10 <1 K 10 <1 Mg 10 <1 Na 10 <1 Sn 10 <1 Zn 10 <1 Anionic impurities 30 <1 (unit: ppm) - In the high-purity carboxylic acid ester provided by the present invention, metal impurities and anionic impurities are highly reduced, and therefore it is industrially useful. The carboxylic acid ester is a compound useful for a wide range of applications such as synthetic raw materials, cleaning agents for electronic components and solvents for paints, adhesives and the like, or as a treatment agent for cleaning of a semiconductor substrate, etching, development of a photoresist and the like in the production of integrated circuits and large-scale integrated circuits.
Claims (6)
1. A high-purity carboxylic acid ester, wherein Ag, Al, Au, Ca, Cr, Cu, Fe, K, Mg, Na, Sn and Zn contents as metal impurity contents are each less than 1 ppb, and wherein an anionic impurity content is less than 1 ppm.
2. A method for producing a high-purity carboxylic acid ester, the method comprising: bringing a crude carboxylic acid ester that contains anionic impurities and at least Ag, Al, Au, Ca, Cr, Cu, Fe, K, Mg, Na, Sn and Zn as metal impurities into contact with a cation-exchange resin (II); and subsequently bringing the crude carboxylic acid ester into contact with an anion-exchange resin (III).
3. The method for producing a high-purity carboxylic acid ester according to claim 2 , which comprises bringing the crude carboxylic acid ester into contact with an anion-exchange resin (I) before bringing the crude carboxylic acid ester into contact with the cation-exchange resin (II).
4. The method for producing a high-purity carboxylic acid ester according to claim 2 , wherein the carboxylic acid ester is at least one selected from the group consisting of methyl lactate, ethyl lactate, propyl lactate, methyl α-hydroxyisobutyrate, ethyl α-hydroxyisobutyrate, propyl α-hydroxyisobutyrate, butyl α-hydroxyisobutyrate, methyl β-hydroxyisobutyrate, ethyl β-hydroxyisobutyrate, propyl β-hydroxyisobutyrate and butyl β-hydroxyisobutyrate.
5. The method for producing a high-purity carboxylic acid ester according to claim 2 , wherein in the obtained high-purity carboxylic acid ester, the Ag, Al, Au, Ca, Cr, Cu, Fe, K, Mg, Na, Sn and Zn contents as metal impurity contents are each less than 1 ppb and the anionic impurity content is less than 1 ppm.
6. The method for producing a high-purity carboxylic acid ester according to claim 2 , wherein in the crude carboxylic acid ester, the Ag, Al, Au, Ca, Cr, Cu, Fe, K, Mg, Na, Sn and Zn contents as metal impurity contents are each 8 ppb or more and the anionic impurity content is 20 ppm or more.
Applications Claiming Priority (3)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2015-196769 | 2015-10-02 | ||
JP2015196769 | 2015-10-02 | ||
PCT/JP2016/078379 WO2017057320A1 (en) | 2015-10-02 | 2016-09-27 | High-purity carboxylic acid ester and method for producing same |
Related Parent Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
PCT/JP2016/078379 A-371-Of-International WO2017057320A1 (en) | 2015-10-02 | 2016-09-27 | High-purity carboxylic acid ester and method for producing same |
Related Child Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
US16/565,767 Division US11046634B2 (en) | 2015-10-02 | 2019-09-10 | High-purity carboxylic acid ester and method for producing same |
Publications (1)
Publication Number | Publication Date |
---|---|
US20180273465A1 true US20180273465A1 (en) | 2018-09-27 |
Family
ID=58423857
Family Applications (2)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
US15/763,590 Abandoned US20180273465A1 (en) | 2015-10-02 | 2016-09-27 | High-purity carboxylic acid ester and method for producing same |
US16/565,767 Active US11046634B2 (en) | 2015-10-02 | 2019-09-10 | High-purity carboxylic acid ester and method for producing same |
Family Applications After (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
US16/565,767 Active US11046634B2 (en) | 2015-10-02 | 2019-09-10 | High-purity carboxylic acid ester and method for producing same |
Country Status (6)
Country | Link |
---|---|
US (2) | US20180273465A1 (en) |
JP (1) | JP6760299B2 (en) |
KR (1) | KR102605799B1 (en) |
CN (1) | CN108137476B (en) |
TW (1) | TWI698425B (en) |
WO (1) | WO2017057320A1 (en) |
Cited By (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
EP3397386A4 (en) * | 2015-12-28 | 2019-08-21 | Dow Global Technologies, LLC | Purification process for hydrolysable organic solvent |
WO2023169810A1 (en) | 2022-03-11 | 2023-09-14 | Röhm Gmbh | Process for producing alpha-hydroxyisobutyric acid methyl ester, and its use in the electronics industry |
US11759774B2 (en) * | 2015-12-28 | 2023-09-19 | Dow Global Technologies Llc | Purification process for hydrophilic organic solvent |
Families Citing this family (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN107389834B (en) * | 2017-07-12 | 2022-11-01 | 中国地质大学(武汉) | Visual low pressure isotope separation chromatographic column |
JP7229023B2 (en) * | 2019-01-24 | 2023-02-27 | 倉敷繊維加工株式会社 | Method for Filtration of Chemical Solution Containing Carboxylic Acid Derivative |
Citations (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US6642350B1 (en) * | 1999-10-28 | 2003-11-04 | Organo Corporation | Method of purifying bishydroxyalkyl terephthalate |
US20050096481A1 (en) * | 2001-10-05 | 2005-05-05 | Rainer Hildebrandt | Method for producing a hydroxyacid esters |
US7306738B2 (en) * | 2001-12-18 | 2007-12-11 | Aies Co., Ltd. | Method of deionizing solution yielded by polyester decomposition with ethylene glycol |
CN102381973A (en) * | 2011-09-19 | 2012-03-21 | 南京大学 | Production process of ultra-high purity (electronic grade) lactate product |
Family Cites Families (13)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS54157504A (en) * | 1978-05-31 | 1979-12-12 | Asahi Chem Ind Co Ltd | Preparation of carboxylic acid |
JPS61207345A (en) * | 1985-03-12 | 1986-09-13 | Nippon Paint Co Ltd | Deionization of organic substance |
JP4116104B2 (en) | 1995-04-07 | 2008-07-09 | 三菱レイヨン株式会社 | Hydroxyisobutyric acid ester with improved storage stability |
JP3813199B2 (en) * | 1995-04-07 | 2006-08-23 | 三菱レイヨン株式会社 | Hydroxyisobutyric acid ester with improved storage stability and metal corrosivity |
FR2763330B1 (en) * | 1997-05-15 | 1999-07-30 | Atochem Elf Sa | PROCESS FOR THE PURIFICATION OF NEAR ANHYDROUS ORGANIC LIQUIDS |
JP2004181352A (en) * | 2002-12-03 | 2004-07-02 | Japan Organo Co Ltd | Method for refining non-aqueous liquid material |
JP2004181351A (en) | 2002-12-03 | 2004-07-02 | Japan Organo Co Ltd | Method for refining non-aqueous liquid material |
JP2005247770A (en) * | 2004-03-05 | 2005-09-15 | Nippon Kayaku Co Ltd | Process for removing trace metal ion |
JP4441472B2 (en) * | 2005-10-24 | 2010-03-31 | オルガノ株式会社 | Method for reducing the amount of metal impurities contained in a cation exchange resin |
JP5096907B2 (en) * | 2007-12-25 | 2012-12-12 | オルガノ株式会社 | Ester purification method |
CN102320969A (en) * | 2011-06-10 | 2012-01-18 | 天津大学 | System and method for rectifying and purifying food grade ethyl lactate into electronic grade ethyl lactate |
CN104610061B (en) * | 2015-02-06 | 2016-09-28 | 孝感市易生新材料有限公司 | The preparation method of electron level ethyl lactate |
CN105037156A (en) * | 2015-07-13 | 2015-11-11 | 苏州晶瑞化学股份有限公司 | Production method for ultra-clean high-purity ethyl acetate |
-
2016
- 2016-09-27 WO PCT/JP2016/078379 patent/WO2017057320A1/en active Application Filing
- 2016-09-27 JP JP2017543410A patent/JP6760299B2/en active Active
- 2016-09-27 US US15/763,590 patent/US20180273465A1/en not_active Abandoned
- 2016-09-27 KR KR1020187010671A patent/KR102605799B1/en active IP Right Grant
- 2016-09-27 CN CN201680056934.4A patent/CN108137476B/en active Active
- 2016-09-30 TW TW105131442A patent/TWI698425B/en active
-
2019
- 2019-09-10 US US16/565,767 patent/US11046634B2/en active Active
Patent Citations (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US6642350B1 (en) * | 1999-10-28 | 2003-11-04 | Organo Corporation | Method of purifying bishydroxyalkyl terephthalate |
US20050096481A1 (en) * | 2001-10-05 | 2005-05-05 | Rainer Hildebrandt | Method for producing a hydroxyacid esters |
US7306738B2 (en) * | 2001-12-18 | 2007-12-11 | Aies Co., Ltd. | Method of deionizing solution yielded by polyester decomposition with ethylene glycol |
CN102381973A (en) * | 2011-09-19 | 2012-03-21 | 南京大学 | Production process of ultra-high purity (electronic grade) lactate product |
Non-Patent Citations (2)
Title |
---|
738 7306738 * |
Nutrivita, p. 1-8, Published 2011 (Year: 2011) * |
Cited By (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
EP3397386A4 (en) * | 2015-12-28 | 2019-08-21 | Dow Global Technologies, LLC | Purification process for hydrolysable organic solvent |
US10913058B2 (en) | 2015-12-28 | 2021-02-09 | Dow Global Technologies Llc | Purification process for hydrolysable organic solvent |
US11759774B2 (en) * | 2015-12-28 | 2023-09-19 | Dow Global Technologies Llc | Purification process for hydrophilic organic solvent |
WO2023169810A1 (en) | 2022-03-11 | 2023-09-14 | Röhm Gmbh | Process for producing alpha-hydroxyisobutyric acid methyl ester, and its use in the electronics industry |
Also Published As
Publication number | Publication date |
---|---|
JPWO2017057320A1 (en) | 2018-07-19 |
TWI698425B (en) | 2020-07-11 |
US11046634B2 (en) | 2021-06-29 |
WO2017057320A1 (en) | 2017-04-06 |
TW201730144A (en) | 2017-09-01 |
CN108137476A (en) | 2018-06-08 |
KR20180059472A (en) | 2018-06-04 |
KR102605799B1 (en) | 2023-11-23 |
JP6760299B2 (en) | 2020-09-23 |
US20200002264A1 (en) | 2020-01-02 |
CN108137476B (en) | 2021-03-02 |
Similar Documents
Publication | Publication Date | Title |
---|---|---|
US11046634B2 (en) | High-purity carboxylic acid ester and method for producing same | |
US10604478B1 (en) | Method for producing taurine and method for removing impurity from reaction system for producing taurine | |
US10913058B2 (en) | Purification process for hydrolysable organic solvent | |
JPH01153509A (en) | Production of high-purity hydrogen peroxide | |
KR20160010832A (en) | Purification of phosphoric acid | |
KR101005378B1 (en) | Removal of metal ions from onium hydroxides and onium salt solutions | |
CN114890889A (en) | Purification method of electronic-grade citric acid | |
JP5483958B2 (en) | Method for producing tetraalkylammonium hydroxide | |
DE19936594A1 (en) | Process for the preparation of high-purity stabilized hydroxylamine solutions | |
KR101467349B1 (en) | Recovering Method of high concentration Tin from waste containing tin | |
EP1431276B1 (en) | Preparation and purification of hydroxylamine stabilizers | |
US5614165A (en) | Process for purification of hydrogen peroxide | |
WO2013062100A1 (en) | Method for producing tetraalkylammonium salt solution | |
CN102730744B (en) | Process of removing calcium and magnesium from high-purity plating-stage copper sulfate | |
US7399885B2 (en) | Method for preparing hydroxylamine | |
US7045655B2 (en) | Preparation and purification of hydroxylamine stabilizers | |
KR102346921B1 (en) | Mixed bed ion exchange resin comprising anion exchange resin and cation exchange resin, method for preparing the same and method for purifying hydrogen peroxide solution using the same | |
EP3945099A1 (en) | Process for removal of fluoroorganic compounds from aqueous media | |
US20020001559A1 (en) | Aqueous zinc nitrite solution and method for preparing the same | |
JP2534861B2 (en) | Method for producing high-purity hydrazine hydrate | |
JP2009167035A (en) | Method for producing high purity alkali metal carbonate aqueous solution | |
JP2009167036A (en) | Method for producing high purity alkali metal carbonate aqueous solution |
Legal Events
Date | Code | Title | Description |
---|---|---|---|
AS | Assignment |
Owner name: MITSUBISHI GAS CHEMICAL COMPANY, INC., JAPAN Free format text: ASSIGNMENT OF ASSIGNORS INTEREST;ASSIGNOR:MUNEYASU, KUNIAKI;REEL/FRAME:045372/0488 Effective date: 20180216 |
|
STPP | Information on status: patent application and granting procedure in general |
Free format text: NON FINAL ACTION MAILED |
|
STPP | Information on status: patent application and granting procedure in general |
Free format text: RESPONSE TO NON-FINAL OFFICE ACTION ENTERED AND FORWARDED TO EXAMINER |
|
STPP | Information on status: patent application and granting procedure in general |
Free format text: FINAL REJECTION MAILED |
|
STCB | Information on status: application discontinuation |
Free format text: ABANDONED -- FAILURE TO RESPOND TO AN OFFICE ACTION |