US20180082858A1 - Carrier ultra thin substrate - Google Patents
Carrier ultra thin substrate Download PDFInfo
- Publication number
- US20180082858A1 US20180082858A1 US15/826,509 US201715826509A US2018082858A1 US 20180082858 A1 US20180082858 A1 US 20180082858A1 US 201715826509 A US201715826509 A US 201715826509A US 2018082858 A1 US2018082858 A1 US 2018082858A1
- Authority
- US
- United States
- Prior art keywords
- build
- substrate
- layer
- routings
- package
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Abandoned
Links
Images
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L24/00—Arrangements for connecting or disconnecting semiconductor or solid-state bodies; Methods or apparatus related thereto
- H01L24/93—Batch processes
- H01L24/95—Batch processes at chip-level, i.e. with connecting carried out on a plurality of singulated devices, i.e. on diced chips
- H01L24/97—Batch processes at chip-level, i.e. with connecting carried out on a plurality of singulated devices, i.e. on diced chips the devices being connected to a common substrate, e.g. interposer, said common substrate being separable into individual assemblies after connecting
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/04—Manufacture or treatment of semiconductor devices or of parts thereof the devices having at least one potential-jump barrier or surface barrier, e.g. PN junction, depletion layer or carrier concentration layer
- H01L21/50—Assembly of semiconductor devices using processes or apparatus not provided for in a single one of the subgroups H01L21/06 - H01L21/326, e.g. sealing of a cap to a base of a container
- H01L21/56—Encapsulations, e.g. encapsulation layers, coatings
- H01L21/568—Temporary substrate used as encapsulation process aid
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/04—Manufacture or treatment of semiconductor devices or of parts thereof the devices having at least one potential-jump barrier or surface barrier, e.g. PN junction, depletion layer or carrier concentration layer
- H01L21/48—Manufacture or treatment of parts, e.g. containers, prior to assembly of the devices, using processes not provided for in a single one of the subgroups H01L21/06 - H01L21/326
- H01L21/4814—Conductive parts
- H01L21/4846—Leads on or in insulating or insulated substrates, e.g. metallisation
- H01L21/4857—Multilayer substrates
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/04—Manufacture or treatment of semiconductor devices or of parts thereof the devices having at least one potential-jump barrier or surface barrier, e.g. PN junction, depletion layer or carrier concentration layer
- H01L21/50—Assembly of semiconductor devices using processes or apparatus not provided for in a single one of the subgroups H01L21/06 - H01L21/326, e.g. sealing of a cap to a base of a container
- H01L21/56—Encapsulations, e.g. encapsulation layers, coatings
- H01L21/561—Batch processing
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L23/00—Details of semiconductor or other solid state devices
- H01L23/48—Arrangements for conducting electric current to or from the solid state body in operation, e.g. leads, terminal arrangements ; Selection of materials therefor
- H01L23/488—Arrangements for conducting electric current to or from the solid state body in operation, e.g. leads, terminal arrangements ; Selection of materials therefor consisting of soldered or bonded constructions
- H01L23/498—Leads, i.e. metallisations or lead-frames on insulating substrates, e.g. chip carriers
- H01L23/49822—Multilayer substrates
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L23/00—Details of semiconductor or other solid state devices
- H01L23/52—Arrangements for conducting electric current within the device in operation from one component to another, i.e. interconnections, e.g. wires, lead frames
- H01L23/522—Arrangements for conducting electric current within the device in operation from one component to another, i.e. interconnections, e.g. wires, lead frames including external interconnections consisting of a multilayer structure of conductive and insulating layers inseparably formed on the semiconductor body
- H01L23/5222—Capacitive arrangements or effects of, or between wiring layers
- H01L23/5225—Shielding layers formed together with wiring layers
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L23/00—Details of semiconductor or other solid state devices
- H01L23/552—Protection against radiation, e.g. light or electromagnetic waves
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2224/00—Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
- H01L2224/01—Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
- H01L2224/02—Bonding areas; Manufacturing methods related thereto
- H01L2224/04—Structure, shape, material or disposition of the bonding areas prior to the connecting process
- H01L2224/0401—Bonding areas specifically adapted for bump connectors, e.g. under bump metallisation [UBM]
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2224/00—Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
- H01L2224/01—Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
- H01L2224/10—Bump connectors; Manufacturing methods related thereto
- H01L2224/12—Structure, shape, material or disposition of the bump connectors prior to the connecting process
- H01L2224/13—Structure, shape, material or disposition of the bump connectors prior to the connecting process of an individual bump connector
- H01L2224/13001—Core members of the bump connector
- H01L2224/13099—Material
- H01L2224/131—Material with a principal constituent of the material being a metal or a metalloid, e.g. boron [B], silicon [Si], germanium [Ge], arsenic [As], antimony [Sb], tellurium [Te] and polonium [Po], and alloys thereof
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2224/00—Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
- H01L2224/01—Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
- H01L2224/10—Bump connectors; Manufacturing methods related thereto
- H01L2224/15—Structure, shape, material or disposition of the bump connectors after the connecting process
- H01L2224/16—Structure, shape, material or disposition of the bump connectors after the connecting process of an individual bump connector
- H01L2224/161—Disposition
- H01L2224/16151—Disposition the bump connector connecting between a semiconductor or solid-state body and an item not being a semiconductor or solid-state body, e.g. chip-to-substrate, chip-to-passive
- H01L2224/16221—Disposition the bump connector connecting between a semiconductor or solid-state body and an item not being a semiconductor or solid-state body, e.g. chip-to-substrate, chip-to-passive the body and the item being stacked
- H01L2224/16225—Disposition the bump connector connecting between a semiconductor or solid-state body and an item not being a semiconductor or solid-state body, e.g. chip-to-substrate, chip-to-passive the body and the item being stacked the item being non-metallic, e.g. insulating substrate with or without metallisation
- H01L2224/16227—Disposition the bump connector connecting between a semiconductor or solid-state body and an item not being a semiconductor or solid-state body, e.g. chip-to-substrate, chip-to-passive the body and the item being stacked the item being non-metallic, e.g. insulating substrate with or without metallisation the bump connector connecting to a bond pad of the item
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2224/00—Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
- H01L2224/01—Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
- H01L2224/10—Bump connectors; Manufacturing methods related thereto
- H01L2224/15—Structure, shape, material or disposition of the bump connectors after the connecting process
- H01L2224/16—Structure, shape, material or disposition of the bump connectors after the connecting process of an individual bump connector
- H01L2224/161—Disposition
- H01L2224/16151—Disposition the bump connector connecting between a semiconductor or solid-state body and an item not being a semiconductor or solid-state body, e.g. chip-to-substrate, chip-to-passive
- H01L2224/16221—Disposition the bump connector connecting between a semiconductor or solid-state body and an item not being a semiconductor or solid-state body, e.g. chip-to-substrate, chip-to-passive the body and the item being stacked
- H01L2224/16225—Disposition the bump connector connecting between a semiconductor or solid-state body and an item not being a semiconductor or solid-state body, e.g. chip-to-substrate, chip-to-passive the body and the item being stacked the item being non-metallic, e.g. insulating substrate with or without metallisation
- H01L2224/16235—Disposition the bump connector connecting between a semiconductor or solid-state body and an item not being a semiconductor or solid-state body, e.g. chip-to-substrate, chip-to-passive the body and the item being stacked the item being non-metallic, e.g. insulating substrate with or without metallisation the bump connector connecting to a via metallisation of the item
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2224/00—Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
- H01L2224/01—Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
- H01L2224/10—Bump connectors; Manufacturing methods related thereto
- H01L2224/15—Structure, shape, material or disposition of the bump connectors after the connecting process
- H01L2224/16—Structure, shape, material or disposition of the bump connectors after the connecting process of an individual bump connector
- H01L2224/161—Disposition
- H01L2224/16151—Disposition the bump connector connecting between a semiconductor or solid-state body and an item not being a semiconductor or solid-state body, e.g. chip-to-substrate, chip-to-passive
- H01L2224/16221—Disposition the bump connector connecting between a semiconductor or solid-state body and an item not being a semiconductor or solid-state body, e.g. chip-to-substrate, chip-to-passive the body and the item being stacked
- H01L2224/16245—Disposition the bump connector connecting between a semiconductor or solid-state body and an item not being a semiconductor or solid-state body, e.g. chip-to-substrate, chip-to-passive the body and the item being stacked the item being metallic
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2224/00—Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
- H01L2224/80—Methods for connecting semiconductor or other solid state bodies using means for bonding being attached to, or being formed on, the surface to be connected
- H01L2224/81—Methods for connecting semiconductor or other solid state bodies using means for bonding being attached to, or being formed on, the surface to be connected using a bump connector
- H01L2224/81001—Methods for connecting semiconductor or other solid state bodies using means for bonding being attached to, or being formed on, the surface to be connected using a bump connector involving a temporary auxiliary member not forming part of the bonding apparatus
- H01L2224/81005—Methods for connecting semiconductor or other solid state bodies using means for bonding being attached to, or being formed on, the surface to be connected using a bump connector involving a temporary auxiliary member not forming part of the bonding apparatus being a temporary or sacrificial substrate
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2224/00—Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
- H01L2224/93—Batch processes
- H01L2224/95—Batch processes at chip-level, i.e. with connecting carried out on a plurality of singulated devices, i.e. on diced chips
- H01L2224/97—Batch processes at chip-level, i.e. with connecting carried out on a plurality of singulated devices, i.e. on diced chips the devices being connected to a common substrate, e.g. interposer, said common substrate being separable into individual assemblies after connecting
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L23/00—Details of semiconductor or other solid state devices
- H01L23/28—Encapsulations, e.g. encapsulating layers, coatings, e.g. for protection
- H01L23/31—Encapsulations, e.g. encapsulating layers, coatings, e.g. for protection characterised by the arrangement or shape
- H01L23/3107—Encapsulations, e.g. encapsulating layers, coatings, e.g. for protection characterised by the arrangement or shape the device being completely enclosed
- H01L23/3121—Encapsulations, e.g. encapsulating layers, coatings, e.g. for protection characterised by the arrangement or shape the device being completely enclosed a substrate forming part of the encapsulation
- H01L23/3128—Encapsulations, e.g. encapsulating layers, coatings, e.g. for protection characterised by the arrangement or shape the device being completely enclosed a substrate forming part of the encapsulation the substrate having spherical bumps for external connection
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L24/00—Arrangements for connecting or disconnecting semiconductor or solid-state bodies; Methods or apparatus related thereto
- H01L24/01—Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
- H01L24/10—Bump connectors ; Manufacturing methods related thereto
- H01L24/12—Structure, shape, material or disposition of the bump connectors prior to the connecting process
- H01L24/13—Structure, shape, material or disposition of the bump connectors prior to the connecting process of an individual bump connector
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L24/00—Arrangements for connecting or disconnecting semiconductor or solid-state bodies; Methods or apparatus related thereto
- H01L24/01—Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
- H01L24/10—Bump connectors ; Manufacturing methods related thereto
- H01L24/15—Structure, shape, material or disposition of the bump connectors after the connecting process
- H01L24/16—Structure, shape, material or disposition of the bump connectors after the connecting process of an individual bump connector
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L24/00—Arrangements for connecting or disconnecting semiconductor or solid-state bodies; Methods or apparatus related thereto
- H01L24/80—Methods for connecting semiconductor or other solid state bodies using means for bonding being attached to, or being formed on, the surface to be connected
- H01L24/81—Methods for connecting semiconductor or other solid state bodies using means for bonding being attached to, or being formed on, the surface to be connected using a bump connector
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2924/00—Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
- H01L2924/10—Details of semiconductor or other solid state devices to be connected
- H01L2924/11—Device type
- H01L2924/14—Integrated circuits
- H01L2924/143—Digital devices
- H01L2924/1431—Logic devices
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2924/00—Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
- H01L2924/10—Details of semiconductor or other solid state devices to be connected
- H01L2924/11—Device type
- H01L2924/14—Integrated circuits
- H01L2924/143—Digital devices
- H01L2924/1434—Memory
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2924/00—Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
- H01L2924/10—Details of semiconductor or other solid state devices to be connected
- H01L2924/146—Mixed devices
- H01L2924/1461—MEMS
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2924/00—Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
- H01L2924/15—Details of package parts other than the semiconductor or other solid state devices to be connected
- H01L2924/151—Die mounting substrate
- H01L2924/153—Connection portion
- H01L2924/1531—Connection portion the connection portion being formed only on the surface of the substrate opposite to the die mounting surface
- H01L2924/15311—Connection portion the connection portion being formed only on the surface of the substrate opposite to the die mounting surface being a ball array, e.g. BGA
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2924/00—Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
- H01L2924/30—Technical effects
- H01L2924/301—Electrical effects
- H01L2924/3025—Electromagnetic shielding
-
- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
- H05K3/00—Apparatus or processes for manufacturing printed circuits
- H05K3/46—Manufacturing multilayer circuits
- H05K3/4644—Manufacturing multilayer circuits by building the multilayer layer by layer, i.e. build-up multilayer circuits
- H05K3/4682—Manufacture of core-less build-up multilayer circuits on a temporary carrier or on a metal foil
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
- Y10T29/00—Metal working
- Y10T29/49—Method of mechanical manufacture
- Y10T29/49002—Electrical device making
- Y10T29/49117—Conductor or circuit manufacturing
- Y10T29/49124—On flat or curved insulated base, e.g., printed circuit, etc.
- Y10T29/49155—Manufacturing circuit on or in base
- Y10T29/49156—Manufacturing circuit on or in base with selective destruction of conductive paths
Definitions
- Embodiments described herein relate to electronic packaging. More particularly, embodiments relate to electronic packaging substrates.
- Plastic ball grid array (BGA) substrates are commonly used for memory, controller, and chipset applications amongst others.
- BGA substrates are commonly sold in the strip form, and characterized as rigid substrates that include a core, such as a resin layer reinforced with glass cloth, and build-up layers on opposite sides of the core.
- the build-up layers can be interconnected by through vias extending through the core layer.
- z-height z-height
- a method of forming a coreless substrate includes forming a debond layer on a carrier substrate.
- the debond layer includes a first surface area and a second surface area on the carrier substrate, the first surface area surrounds the second surface area, and the first surface area has greater adhesion to the carrier substrate than the second surface area.
- a build-up structure is then formed on the debond layer, spanning across the first surface area and the second surface area of the debond layer, and a support substrate is attached to the build-up structure opposite the carrier substrate.
- the substrate stack is then cut through the build-up structure, the second surface area of the debond layer, and the carrier substrate, which allows for the carrier substrate to then be detached from the build-up structure.
- the support substrate and build-up structure are additionally cut into a plurality of panels after at least partially removing the debond layer.
- the debond layer may be formed using a variety of configurations.
- forming the debond layer includes placing a metal foil onto the carrier substrate, and laminating a cap layer over and laterally around the metal foil on the carrier substrate.
- forming the debond layer includes removing a portion of a metal layer around lateral edges of a carrier core, and forming a cap layer over and laterally around the metal layer on the carrier core.
- forming the debond layer includes roughening an area of the carrier substrate, and forming a cap layer over the roughed area of the carrier substrate and a non-roughened area of the carrier substrate.
- An electrical short layer may also be formed as part of the debond layer or on the debond layer.
- cutting through the second surface area of the debond layer may include cutting through a variety of structures.
- cutting through the second surface area of the debond layer includes cutting through the metal foil.
- cutting through the second surface area of the debond layer includes cutting through the metal layer.
- cutting through the second surface area of the debond layer includes cutting through the cap layer over the non-roughened area of the carrier substrate.
- forming the debond layer includes forming the electrical short layer.
- attaching the support substrate to the build-up structure may include attaching the support substrate to a BGA side of the build-up structure comprising a plurality of BGA bond pads that are electrically shorted together with the electrical short layer.
- the debond layer may be at least partially removed after detaching the carrier substrate. In an embodiment, this includes removing the electrical short layer to expose a plurality of surface mount technology (SMT) bond pads.
- SMT surface mount technology
- the electrical short layer is formed on the debond layer.
- the build-up structure is formed on the electrical short layer, and attaching the support substrate to the build-up structure may include attaching the support substrate to a BGA side of the build-up structure comprising a plurality of bond pads that are electrically shorted together with the electrical short layer.
- the electrical short layer is removed to expose a plurality of SMT bond pads after at least partially removing the debond layer.
- a method of forming a coreless substrate includes forming an electrical short layer on a carrier substrate, and forming a build-up structure on the electrical short layer.
- the build-up structure includes a plurality of contact pads (e.g. BGA contact pads) on a front side of the build-up structure shorted to each other through the electrical short layer on a back side of the build-up structure.
- a support substrate is attached to the front side of the build-up structure.
- the carrier substrate is detached, the electrical short layer is removed, and a second plurality of contact pads (e.g. SMT contact pads) is exposed on the back side of the build-up structure.
- the panel sized substrate stack is cut through the support substrate and build-up structure resulting to form a plurality of substrate strips.
- forming the electrical short layer includes placing a metal foil onto the carrier substrate, and laminating a cap layer over and laterally around the metal foil on the carrier substrate. In such an embodiment, the method may additionally include cutting through the metal foil, the cap layer, the build-up structure and the support substrate prior to detaching the carrier substrate. In an embodiment, forming the electrical short layer includes forming a cap layer on the carrier substrate, and forming a seed layer on the cap layer. In such an embodiment, the method may additionally include cutting through the cap layer, the seed layer, the build-up structure and the support substrate prior to detaching the carrier substrate.
- the BGA contact pads and SMT contact pads may be tested to verify “known good” substrates.
- the plurality of contact pads e.g. BGA contact pads
- the second plurality of contact pads e.g. SMT contact pads
- the second plurality of contact pads are tested to detect electrical shorts after exposing the second plurality of contact pads on the back side of the build-up structure.
- a coreless substrate strip includes a support substrate including rectangular lateral dimensions, an adhesive layer on the support substrate, and a build-up structure attached to the adhesive layer.
- the build-up structure may include a bottom surface including a plurality of BGA contact pads, and a top surface including a plurality of surface mount contact pads.
- the build-up structure is less than 100 ⁇ m thick.
- the bottom surface of the build-up structure additionally includes ground routing.
- the build-up structure may include an array of package routings arranged in a series of strips, with each of the strips arranged in molding groups, and each package routing including a ground routing around a periphery of the package routing.
- FIG. 1A is a flow chart illustrating a method of forming a build-up structure on a carrier substrate in accordance with an embodiment.
- FIG. 1B is a flow chart illustrating a method of forming a package using a build-up structure formed on a carrier substrate in accordance with an embodiment.
- FIGS. 2-3 are schematic top view illustrations of debond layers formed over a carrier substrate in accordance with embodiments.
- FIG. 4-5 are schematic top view illustrations of a debond layer formed over a carrier substrate in accordance with an embodiment.
- FIG. 6 is a schematic top view illustration of a build-up structure formed on a debond layer in accordance with an embodiment.
- FIG. 7 is a cross-sectional side view illustration of a substrate strip taken along section X-X of FIG. 6 in accordance with an embodiment.
- FIG. 8 is a cross-sectional side view illustration of a plurality of chips encapsulated on build-up structure
- FIG. 9 is a cross-sectional side view illustration of cutting through a debond layer in accordance with an embodiment.
- FIG. 10 is a cross-sectional side view illustration of a debonded panel in accordance with an embodiment.
- FIG. 11 is a cross-sectional side view illustration of a package including a multiple-layer build-up structure in accordance with an embodiment.
- FIG. 12 is a cross-sectional side view illustration of a package including a single layer build-up structure in accordance with an embodiment.
- FIGS. 13A-15B are schematic top view and cross-sectional side view illustrations of a process of forming a debond layer including a metal foil in accordance with an embodiment.
- FIGS. 16A-18B are schematic top view and cross-sectional side view illustrations of a process of forming a debond layer including a sacrificial layer coating in accordance with an embodiment.
- FIGS. 19A-21B are schematic top view and cross-sectional side view illustrations of a process of forming a debond layer on a roughened surface in accordance with an embodiment.
- FIG. 22A is a flow chart illustrating a method of forming a build-up structure on a support substrate in accordance with an embodiment.
- FIG. 22B is a flow chart illustrating a method of forming a build-up structure on a support substrate in accordance with an embodiment.
- FIGS. 23A-23G are cross-sectional side view illustrations of a method of forming a build-up structure on a support substrate in accordance with an embodiment.
- FIGS. 24A-24G are cross-sectional side view illustrations of a method of forming a build-up structure on a support substrate in accordance with an embodiment.
- FIG. 25A is a cross-sectional side view illustration of a die mounted on a build-up structure in accordance with an embodiment.
- FIG. 25B is a schematic top view illustration of a strip substrate including plurality of package areas in accordance with an embodiment.
- FIG. 26A is a cross-sectional side view illustration of a die encapsulated on a build-up structure in accordance with an embodiment.
- FIG. 26B is a schematic top view illustration of a strip substrate including plurality of encapsulated package areas in accordance with an embodiment.
- FIG. 27 is a cross-sectional side view illustration of a support substrate removed from a build-up structure in accordance with an embodiment.
- FIG. 28 is a cross-sectional side view illustration of a package including solder bumps applied on a multiple-layer build-up structure in accordance with an embodiment.
- Embodiments describe ultra thin coreless substrate processing techniques. More specifically, embodiments describe coreless substrate processes that are compatible with BGA fabrication and shipment of substrate strips. For example, conventional BGA chip assembly is implemented in batch on a substrate strip including a series of package substrate areas reserved for the fabrication of individual or multiple BGA package units. Conventionally, the substrate strip is rectangularly-shaped.
- embodiments describe coreless substrate fabrication processes that enable shipment of “known good” (i.e. verified electrical tests) coreless substrates on a support substrate (e.g. shipping substrate).
- the packaging processes can be “chip last” processes in which chips are only mounted onto “known good” substrates. In application this can increase assembly throughput, since the “known good” substrates can be prepared and stored prior to chip assembly.
- an electrical short layer can be formed on a carrier substrate, followed by formation of a build-up structure on the electrical short layer.
- testing for electrical opens can be performed on BGA contact pads of the build-up structure.
- the carrier substrate may then be removed, followed by testing for electrical shorts on the exposed surface mount (SMT) contact pads of the build-up structure.
- SMT exposed surface mount
- embodiments describe coreless substrate fabrication processes that can be used for the fabrication and shipment of ultra thin substrates (e.g. build-up structures in strip form) each supported on, and readily releasable from, a support substrate.
- the strip substrates may include a single layer build-up structure (1 L, one metal layer) or multiple layer build-up structure (e.g. 3 L, three metal layers).
- a 3 L build-up structure may be less than 60 ⁇ m thick, and a 1 L build-up structure may be less than 20 ⁇ m thick.
- the thickness of the build-up structure e.g. less than 100 ⁇ m thick
- warpage concern is significantly mitigated.
- embodiments describe coreless substrate fabrication processes in which a carrier substrate is debonded from a build-up structure after selective cutting through low adhesion areas of a debond layer that joins the build-up structure to the carrier substrate.
- the debond layer may include surface areas with different adhesion to the carrier substrate (e.g. high and low, respective to one another).
- carrier substrate debonding can be achieved by processing (e.g. cutting) of selective areas as opposed to processing an entire layer, for example, as is customary with ultraviolet (UV), thermal, or laser debonding technology.
- UV ultraviolet
- the terms “above”, “over”, “to”, “between”, “spanning” and “on” as used herein may refer to a relative position of one layer with respect to other layers.
- One layer “above”, “over”, “spanning” or “on” another layer or bonded “to” or in “contact” with another layer may be directly in contact with the other layer or may have one or more intervening layers.
- One layer “between” layers may be directly in contact with the layers or may have one or more intervening layers.
- FIG. 1A is a flow chart illustrating a method of forming a build-up structure on a carrier substrate in accordance with an embodiment.
- FIG. 1B is a flow chart illustrating a method of forming a package using a build-up structure formed on a carrier substrate in accordance with an embodiment.
- the sequences illustrated in FIGS. 1A-1B may be formed by a single actor, or performed by separate actors.
- the sequence illustrated in FIG. 1A may be performed by a substrate manufacturer, while the sequence illustrated in FIG. 1B may be performed by a chip assembly manufacturer.
- the substrate manufactured in the sequence illustrated in FIG. 1A may be a shipped product, such as substrate strips for BGA chip assembly.
- FIGS. 1A-1B is made with regard to reference features found in other figures described herein.
- a debond layer 200 is formed on a carrier substrate 206 .
- the debond layer 200 includes a first surface area 202 and a second surface area 204 on the carrier substrate 206 , with the first surface area 202 having greater adhesion (e.g. high tack) to the carrier substrate 206 than the second surface area 204 (e.g. low tack, air gap).
- a build-up structure 220 is then formed on the debond layer 200 at operation 120 .
- the build-up structure 220 may span across the first surface area and the second surface area of the debond layer.
- the substrate stack e.g.
- the substrate stack is cut through the second surface area 204 , so that the build-up structure 220 is debonded from the carrier substrate 206 when cutting into substrate strips 300 .
- the substrate stack is cut through the first surface area 202 only, so that the build-up structure 220 is not debonded from the carrier substrate 206 when cutting into substrate strips 300 .
- the carrier substrate 206 may be useful as a shipping substrate, and for support during subsequent processing operations, for example with chip assembly.
- the substrate stack may be shipped as panel form or substrate strip form.
- the die 240 may include active components (e.g. logic, memory, system on chip, etc.) or passive components (e.g. capacitors or inductors, MEMS devices, sensors, etc.).
- the mounted die 240 may then be encapsulated with a molding compound 250 on the build-up structure 220 at operation 150 .
- the carrier substrate 206 may be debonded. In an embodiment, the carrier substrate 206 is debonded by cutting through the second surface area 204 of the debond layer 200 .
- the debond layer 200 may then be removed from the build-up structure 220 at operation 170 , and individual packages 310 may be singulated at operation 180 .
- the debond layer 200 includes a first surface area 202 and a second surface area 204 on the carrier substrate, the first surface area 202 surrounds the second surface area 204 , and the first surface area 202 has greater adhesion to the carrier substrate than does the second surface area 204 .
- there are a plurality of second surface areas 204 each surrounded by the first surface area 202 .
- Substrate strip 300 outlines are illustrated in the particular embodiment around the second surface areas 204 . In such an embodiment, a substrate stack (e.g.
- panel including the build-up structure 220 , debond layer 200 , and carrier substrate 206 may be cut into substrate strips 300 at operation 130 without debonding the build-up structure 220 from the carrier substrate 206 .
- a panel-sized build-up structure can be debonded from the carrier substrate 206 , followed by subsequent cutting into individual substrate strips 300 .
- FIG. 7 is a cross-sectional side view illustration of a substrate strip taken along section X-X of FIG. 6 in accordance with an embodiment.
- a debond layer 200 including an anti-stick coating is illustrated.
- embodiments are not so limited and a variety of debond layers 200 can be utilized such as, but not limited to, those illustrated and described with regard to FIGS. 13A-21B .
- carrier substrates 206 may be utilized in accordance with embodiments.
- the carrier substrates may be prepreg, glass, metal (e.g. stainless steel), etc.
- the carrier substrates may come with or without a metal surface layer.
- a plurality of second surface areas 204 is formed with a patterned sacrificial layer 212 over the carrier substrate 206 .
- a patterned metal layer 210 e.g. copper
- the sacrificial layer 212 may have anti-stick properties in order to form a low bond strength interface with the underlying layer (e.g. patterned metal layer 210 ).
- Exemplary materials may include polyvinyl fluoride (PVF), nickel, chromium. Exposed portions of the carrier substrate 206 may correspond to the first surface area 202 for forming a high bond strength interface.
- a cap layer 414 may then be formed over the carrier substrate 206 and patterned sacrificial layer 212 , and directly on both surface areas 202 , 204 .
- cap layer 414 is formed of a dielectric material.
- cap layer 414 is laminated.
- a build-up structure 220 including an array of package routings 221 is formed over the cap layer 414 .
- the build-up structure 220 and package routings 221 may include a single metal routing layer 224 (e.g. 1 L) or multiple metal routing layers 224 and dielectric layers 214 . In the particular embodiment illustrated in FIG.
- the build-up structure 220 is formed over both surface areas 202 , 204 , while the package routings 221 are formed over only the second surface areas 204 .
- the package routings 221 may be arranged in a series of strips, and within each of the strips arranged in molding groups 251 which will subsequently support die that will be molded together within a single molding compound.
- the substrate stack may optionally be cut through the first surface areas 202 to form a plurality of substrate strips 300 .
- FIG. 7 is a cross-sectional side view illustration of a substrate strip taken along section X-X of FIG. 6 in accordance with an embodiment.
- the build-up structure 220 may additionally include ground routing 222 .
- the ground routing 222 may completely surround individual package outlines, or optionally only partially surround package outlines.
- each package routing 221 includes a ground routing around a periphery of the package routing 221 .
- ground routing 222 may be a ground ring.
- ground routing 222 is electrically isolated from package routing 221 .
- the substrate stack in panel or strip form (e.g. substrate strip 300 ) is subjected to a chip assembly process.
- a plurality of die 240 are mounted on the multiple package routings 221 of the build-up structure 220 .
- the plurality of die 240 may be flip chip mounted, and bonded to the build-up structure 220 with solder joints.
- the die 240 are then encapsulated on the build-up structure 220 with a molding compound 250 .
- separate locations of the molding compound 250 may be formed over multiple die 240 in molding groups 251 . This is also illustrated in FIGS. 25B and 26B .
- the substrate stack (e.g. substrate strip 300 ) is cut in order to debond the carrier substrate 206 .
- the substrate stack is cut through the second surface areas 204 (e.g. low tack areas) including the sacrificial layer 212 .
- the build-up structure 220 may be debonded (e.g. peeled) from the carrier substrate 206 and metal layer 210 .
- the build-up structure 220 is processed to remove residual cap layer 414 and expose the contact pads 226 and ground routing 222 in the build-up structure 220 .
- residual cap layer 414 may be removed by plasma etching, or grinding.
- Solder bumps 312 may then be optionally applied to the exposed contact pads 226 and ground routing 222 , and individual packages 310 may then be singulated, as shown in FIG. 10 .
- cutting or sawing is performed through the ground routing 222 and optional solder bumps 312 attached thereto so that the ground routing 222 is exposed on the cut side surfaces.
- Exemplary multiple metal routing layer 224 package 310 and single metal routing layer 224 package 310 are illustrated in FIGS. 11-12 .
- contact pads or studs 242 of die 240 may be bonded to the SMT contact pads 227 of top surface 229 the build-up structure 220 with solder joints 244 .
- Solder 312 may optionally be applied to BGA contact pads 226 and ground routing 222 of the bottom surface 225 build-up structure 220 .
- an electrically conductive shielding 314 (e.g. metal layer) may be formed on the exposed side and top surfaces of the packages 310 , for example, by sputtering for electromagnetic interference (EMI) shielding. Shielding 314 may be in electrical contact with ground routing 222 .
- EMI electromagnetic interference
- the packages after cutting or sawing to singulate the packages 310 , the packages can be placed on another tape layer followed by sputtering to form the shielding 314 .
- the solder 312 may be embedded in the tape layer during sputtering so that shielding 314 does not cover the solder 312 .
- the packages 310 may then be removed from the tape layer.
- debond layer 200 includes a sacrificial layer (e.g. anti-stick coating).
- a sacrificial layer e.g. anti-stick coating
- the debond layers 200 include a first surface area 202 and a second surface area 204 on the carrier substrate 401 , the first surface area 202 surrounds the second surface area 204 , and the first surface area 202 has greater adhesion to the carrier substrate 401 than does the second surface area 204 .
- second surface area 204 there is a single second surface area 204 covering a majority of the carrier substrate (e.g. panel) area.
- a panel-sized build-up structure can be debonded from the carrier substrate 401 .
- Exemplary panel 500 outlines are illustrated by dashed lines.
- there may be a plurality of second surface areas 204 each surrounded by the first surface area 202 similarly as illustrated in FIG. 2 .
- Carrier substrate 401 may be formed of the same materials as carrier substrate 206 , and may optionally include conductive layers (e.g. metal layers) 410 on front and back surfaces.
- carrier substrate 401 includes a carrier core (e.g. glass, metal) and metal layers 410 on one or both sides of the carrier core.
- metal layers 410 may be formed of copper, and approximately 10-20 ⁇ m thick.
- the metal foil 412 layers and cap layers 414 are booked and laminated on one or both sides of the carrier substrate 401 , for example, using vacuum lamination.
- metal foil 412 layers are copper, and approximately 10-20 ⁇ m thick.
- cap layers 414 are formed of a suitable dielectric material such as poly(N-isopropylacrylamide-co-N,N-dimethylacrylamide) (PID), polybenzobisoxazole (PBO), epoxy Ajinomoto Build-up Film (ABF), etc.
- PID poly(N-isopropylacrylamide-co-N,N-dimethylacrylamide)
- PBO polybenzobisoxazole
- ABSF epoxy Ajinomoto Build-up Film
- metal foil layers 412 may additionally function as electrical short layers, for example, during electrical open testing the BGA side of the build-up structure.
- FIGS. 16A-18B are schematic top view and cross-sectional side view illustrations of a process of forming a debond layer 200 including a sacrificial (anti-stick) layer 413 coating in accordance with an embodiment.
- Carrier substrate 401 may be formed similarly as carrier substrate 401 described with regard to FIGS. 13A-15B .
- carrier substrate 401 may include a carrier core (e.g. glass, metal) and metal layers 410 on one or both sides of the carrier core. As shown in FIGS.
- sacrificial layer 413 may be coated onto the metal layers 410 , followed by etching of the metal layers 410 at the lateral edges, or perimeter, of the carrier substrate 401 to expose the substrate core, which has a higher bonding strength capability than the sacrificial layer 413 .
- the sacrificial layer 413 may have anti-stick properties in order to form a low bond strength interface with the underlying layer (e.g. patterned metal layer 210 ).
- Exemplary materials for sacrificial layer 413 may include polyvinyl fluoride (PVF), nickel, chromium. Exposed portions of the carrier substrate 401 may correspond to the first surface area 202 for forming a high bond strength interface.
- a cap layer 414 may then be formed over the carrier substrate 401 and sacrificial layer 413 , and directly on both surface areas 202 , 204 .
- cap layer 414 is laminated.
- FIGS. 19A-21B are schematic top view and cross-sectional side view illustrations of a process of forming a debond layer 200 on a roughened surface in accordance with an embodiment.
- Carrier substrate 401 may be a variety of materials including prepreg, glass, metal (e.g. stainless steel), etc.
- carrier substrate 401 is a metal carrier, and may optionally have an anti-stick surface coating.
- a perimeter area of the carrier substrate 401 is roughened using a suitable process such as jet blasting, laser etching, or chemical etching to for the first surface area 402 .
- a cap layer 414 is then formed over the surface areas 402 , 404 of the carrier substrate 401 using a suitable technique, such as vacuum lamination.
- FIGS. 22A-22B flow charts are provided illustrating methods of forming a build-up structure on a support substrate. While the sequences are illustrated separately in FIGS. 22A-22B , one or more of the operations may be combinable. Thus, the sequences are not intended to be exclusive of one another, and may be interpreted as different ways of characterizing a same process. In interest of clarity, the following description of FIGS. 22A-22B is made with regard to reference features found in other figures described herein.
- a debond layer 200 is formed on a carrier substrate 401 .
- forming the debond layer 200 includes placing a metal foil 412 onto the carrier substrate 401 and laminating a cap layer 414 over and laterally around the metal foil 412 on the carrier substrate 401 as described above with regard to FIGS. 13A-15B .
- forming the debond layer 200 includes removing a portion of a metal layer 410 around lateral edges of a carrier core, and forming a cap layer 414 over and laterally around the metal layer 410 on the carrier core as described above with regard to FIGS. 16A-18B .
- forming the debond layer 200 includes roughening an area 420 of the carrier substrate 401 , and forming a cap layer 414 over the roughened area of the carrier substrate 401 and a non-roughened area 400 of the carrier substrate 401 .
- a build-up structure 220 is then formed on the debond layer 200 at operation 2220 .
- a support substrate 600 is attached to the build-up structure at operation 2230 , followed by detaching (debonding) the carrier substrate 401 from the build-up structure 220 .
- Debonding of the carrier substrate 401 may include cutting through the second surface area 404 of the debond layer. In one embodiment, cutting through the second surface area 404 of the debond layer 200 includes cutting through the metal foil 412 .
- cutting through the second surface area 404 of the debond layer 200 includes cutting through the metal layer 210 . In one embodiment, cutting through the second surface area 404 of the debond layer 200 includes cutting through the cap layer 414 over the non-roughened area 400 of the carrier substrate 401 . Remaining residual debond layer 200 may then optionally be at least partially removed from the build-up structure 220 after debonding the carrier substrate 401 .
- an electrical short layer is formed on a carrier substrate 401 .
- the electrical short layer may be formed as a part of the debond layer 200 or on the debond layer 200 .
- metal foil 412 may function as the electrical short layer.
- a seed layer 450 formed on the debond layer 200 may function as the electrical short layer.
- a build-up structure 220 is then formed on the electrical short layer at operation 2222 .
- a test to detect electrical opens may be performed on the exposed contact pads 226 (e.g. BGA contact pads) of the build-up structure 220 .
- each of the exposed contact pads 226 are shorted together with the seed layer 450 or metal foil 412 .
- a support substrate 600 is attached to the build-up structure 220 at operation 2230 .
- the carrier substrate 401 is detached (debonded) from the build-up structure 220 .
- the electrical short layer is removed from the build-up structure at operation 2252 , and the contact pads 227 (e.g. SMT contact pads) on the build-up structure 220 are exposed at operation 2254 .
- a test to detect electrical shorts may be performed on the exposed contact pads 227 (e.g. SMT contact pads) of the build-up structure 220 .
- Panels 500 or substrate strips 300 passing the electrical tests may then be further processed as “known good” substrates.
- FIGS. 23A-23G and FIGS. 24A-24G are cross-sectional side view illustrations of a method utilizing the debond layer 200 illustrated in FIGS. 13A-15B in accordance with an embodiment.
- FIGS. 24A-24G are cross-sectional side view illustrations of a method utilizing the debond layer 200 illustrated in either FIGS. 16A-18B or FIGS. 19A-21B .
- the carrier substrates 401 are processed one both sides in order to fabricate two panels 500 from a single carrier substrate 401 .
- debond layers 200 are formed on opposite sides of the carrier substrate 401 similarly as illustrated in FIGS. 13A-15B .
- debond layers 200 are formed on opposite sides of the carrier substrate 401 similarly as illustrated in FIGS. 16A-18B . While the specific debond layers 200 from FIGS. 19A-21B are not separately shown in FIGS. 24A-24G , the processing sequences are substantially similar after the formation of debond layers 200 .
- bump openings 421 are formed in the cap layer 414 using a suitable technique such as lithography or laser etching.
- a barrier metal layer 223 is then plated in the bump openings 421 .
- the barrier metal layer 223 may be a material such as Au, Ni/Au, or Cu.
- a seed layer 450 is formed over cap layer 414 .
- see layer may be Cu, and may be formed using a technique such as sputtering or electroless plating.
- a dielectric layer 214 may then be formed over the seed layer 450 and patterned to form bump openings 211 .
- a barrier metal layer 223 is then plated in the bump openings 211 .
- the barrier metal layer 223 may be a material such as Au, Ni/Au, or Cu.
- Sequential build-up processes of metal routing layers 224 and dielectric layers 214 may then be performed to form the build-up structure 220 as illustrated in FIG. 23C and FIG. 24C .
- a BGA side passivation layer 215 may be formed, including openings 217 exposing contact pads 226 (e.g. BGA contact pads). Passivation layer 215 may be formed of the same or different materials than dielectric layers 214 .
- a test to detect electrical opens may be performed on the exposed contact pads 226 (e.g. BGA contact pads) of the bottom surface 225 of the build-up structures 220 .
- each of the exposed contact pads 226 are shorted together with the seed layer 450 or metal foil 412 .
- support substrates 600 are attached to the build-up structures 220 . As illustrated in FIGS. 23D and 24D , support substrates 600 may be attached using adhesive layers 602 .
- the top and bottom panels 500 are debonded from the carrier substrate 401 by cutting through the second surface area 404 .
- the metal foil 412 portion of debond layer 200
- the metal foil 412 may then be removed as illustrated in FIG. 23G by etching to reveal contact pads 227 (eg. SMT contact pads).
- the seed layer 450 and cap layer 414 portion of debond layer 200
- the cap layer 414 is removed by plasma etching followed by micro etching to remove the seed layer 450 to reveal contact pads 227 (eg. SMT contact pads), as illustrated in FIG. 24G .
- the resultant panels in FIGS. 23G and 24G may then be singulated into substrate strips 300 .
- a test to detect electrical shorts may be performed on the exposed contact pads 227 (e.g. SMT contact pads) of the top surface 229 of the build-up structure 220 .
- Panels 500 or substrate strips 300 passing the electrical tests may then be further processed as “known good” substrates.
- FIGS. 25A-28 cross-sectional side view and schematic top view illustrations are provided for a chip assembly process on a substrate strip 300 , similar to that previously described with regard to FIG. 1B .
- FIG. 25A is a cross-sectional side view illustration of a die mounted on a build-up structure in accordance with an embodiment.
- FIG. 25B is a schematic top view illustration of a strip substrate including plurality of package areas in accordance with an embodiment.
- a plurality of die 240 are mounted onto the build-up structure 220 . Similar to the above description with regard to FIG. 8 , a plurality of die 240 are mounted on the multiple package routings 221 of the build-up structure 220 .
- the plurality of die 240 may be flip chip mounted, and bonded to the build-up structure 220 with solder joints 244 .
- multiple die 240 are arranged in molding groups 251 which will each be encapsulated with the same molding compound.
- FIG. 26A is a cross-sectional side view illustration of a die encapsulated on a build-up structure in accordance with an embodiment.
- FIG. 26B is a schematic top view illustration of a strip substrate including plurality of encapsulated package areas in accordance with an embodiment. As shown in FIG. 26B , separate locations of the molding compound 250 are formed over multiple die 240 in the molding groups 251 .
- the build-up structure 220 may be debonded (e.g. peeled) from the adhesive layer 602 that held the build-up structure 220 on the support substrate 600 .
- Solder bumps 312 may then be optionally applied to the exposed contact pads 226 and ground routing 222 as shown in FIG. 27 , and individual packages 310 may then be singulated, as shown in FIG. 28 .
- cutting or sawing is performed through the ground routing 222 and optional solder bumps 312 attached thereto so that the ground routing 222 is exposed on the cut side surfaces.
- an electrically conductive shielding 314 (e.g. metal layer) may be formed on the exposed side and top surfaces of the packages 310 including the ground routing 222 , for example, by sputtering for EMI shielding, similarly as described with regard to FIGS. 11-12 .
Abstract
Method of forming ultra thin coreless substrates are described. In an embodiment, the method utilizes a debond layer including high and low adhesion surface areas to the carrier substrate, and cutting through the low adhesion surface areas to remove a build-up structure from the carrier substrate. An electrical short layer may be formed as a part of or on the debond layer to facilitate electrical testing of the build-up structure prior to debonding, and aid in the formation a “known good” substrate on a support substrate.
Description
- This application is a divisional of co-pending U.S. patent application Ser. No. 14/935,292 filed Nov. 6, 2015 which is incorporated herein by reference.
- Embodiments described herein relate to electronic packaging. More particularly, embodiments relate to electronic packaging substrates.
- Plastic ball grid array (BGA) substrates are commonly used for memory, controller, and chipset applications amongst others. BGA substrates are commonly sold in the strip form, and characterized as rigid substrates that include a core, such as a resin layer reinforced with glass cloth, and build-up layers on opposite sides of the core. The build-up layers can be interconnected by through vias extending through the core layer. In response to the continued trend for higher density and lower profile (z-height) packages, for example, in mobile devices, recent packaging developments have investigated reduction of the core layer thickness as well as fabrication of coreless substrates.
- Methods of forming coreless substrates are described. In an embodiment, a method of forming a coreless substrate includes forming a debond layer on a carrier substrate. The debond layer includes a first surface area and a second surface area on the carrier substrate, the first surface area surrounds the second surface area, and the first surface area has greater adhesion to the carrier substrate than the second surface area. A build-up structure is then formed on the debond layer, spanning across the first surface area and the second surface area of the debond layer, and a support substrate is attached to the build-up structure opposite the carrier substrate. The substrate stack is then cut through the build-up structure, the second surface area of the debond layer, and the carrier substrate, which allows for the carrier substrate to then be detached from the build-up structure. In an embodiment the support substrate and build-up structure are additionally cut into a plurality of panels after at least partially removing the debond layer.
- The debond layer may be formed using a variety of configurations. In one embodiment, forming the debond layer includes placing a metal foil onto the carrier substrate, and laminating a cap layer over and laterally around the metal foil on the carrier substrate. In one embodiment, forming the debond layer includes removing a portion of a metal layer around lateral edges of a carrier core, and forming a cap layer over and laterally around the metal layer on the carrier core. In one embodiment, forming the debond layer includes roughening an area of the carrier substrate, and forming a cap layer over the roughed area of the carrier substrate and a non-roughened area of the carrier substrate. An electrical short layer may also be formed as part of the debond layer or on the debond layer.
- Depending upon the debond layer, cutting through the second surface area of the debond layer may include cutting through a variety of structures. In an embodiment, cutting through the second surface area of the debond layer includes cutting through the metal foil. In an embodiment, cutting through the second surface area of the debond layer includes cutting through the metal layer. In an embodiment, cutting through the second surface area of the debond layer includes cutting through the cap layer over the non-roughened area of the carrier substrate.
- In one embodiment, forming the debond layer includes forming the electrical short layer. In such an embodiment attaching the support substrate to the build-up structure may include attaching the support substrate to a BGA side of the build-up structure comprising a plurality of BGA bond pads that are electrically shorted together with the electrical short layer. The debond layer may be at least partially removed after detaching the carrier substrate. In an embodiment, this includes removing the electrical short layer to expose a plurality of surface mount technology (SMT) bond pads.
- In one embodiment, the electrical short layer is formed on the debond layer. In such an embodiment, the build-up structure is formed on the electrical short layer, and attaching the support substrate to the build-up structure may include attaching the support substrate to a BGA side of the build-up structure comprising a plurality of bond pads that are electrically shorted together with the electrical short layer. In an embodiment, the electrical short layer is removed to expose a plurality of SMT bond pads after at least partially removing the debond layer.
- In an embodiment, a method of forming a coreless substrate includes forming an electrical short layer on a carrier substrate, and forming a build-up structure on the electrical short layer. The build-up structure includes a plurality of contact pads (e.g. BGA contact pads) on a front side of the build-up structure shorted to each other through the electrical short layer on a back side of the build-up structure. A support substrate is attached to the front side of the build-up structure. The carrier substrate is detached, the electrical short layer is removed, and a second plurality of contact pads (e.g. SMT contact pads) is exposed on the back side of the build-up structure. In an embodiment, after exposing the second plurality of contact pads the panel sized substrate stack is cut through the support substrate and build-up structure resulting to form a plurality of substrate strips.
- In an embodiment, forming the electrical short layer includes placing a metal foil onto the carrier substrate, and laminating a cap layer over and laterally around the metal foil on the carrier substrate. In such an embodiment, the method may additionally include cutting through the metal foil, the cap layer, the build-up structure and the support substrate prior to detaching the carrier substrate. In an embodiment, forming the electrical short layer includes forming a cap layer on the carrier substrate, and forming a seed layer on the cap layer. In such an embodiment, the method may additionally include cutting through the cap layer, the seed layer, the build-up structure and the support substrate prior to detaching the carrier substrate.
- In accordance with embodiments the BGA contact pads and SMT contact pads may be tested to verify “known good” substrates. In an embodiment, the plurality of contact pads (e.g. BGA contact pads) are tested to detect electrical opens prior to attaching the support substrate to the front side of the build-up structure; and the second plurality of contact pads (e.g. SMT contact pads) are tested to detect electrical shorts after exposing the second plurality of contact pads on the back side of the build-up structure.
- In accordance with embodiments, ultra thin coreless substrate strips may be prepared. In an embodiment, a coreless substrate strip includes a support substrate including rectangular lateral dimensions, an adhesive layer on the support substrate, and a build-up structure attached to the adhesive layer. The build-up structure may include a bottom surface including a plurality of BGA contact pads, and a top surface including a plurality of surface mount contact pads. In an embodiment, the build-up structure is less than 100 μm thick. In an embodiment, the bottom surface of the build-up structure additionally includes ground routing. The build-up structure may include an array of package routings arranged in a series of strips, with each of the strips arranged in molding groups, and each package routing including a ground routing around a periphery of the package routing.
-
FIG. 1A is a flow chart illustrating a method of forming a build-up structure on a carrier substrate in accordance with an embodiment. -
FIG. 1B is a flow chart illustrating a method of forming a package using a build-up structure formed on a carrier substrate in accordance with an embodiment. -
FIGS. 2-3 are schematic top view illustrations of debond layers formed over a carrier substrate in accordance with embodiments. -
FIG. 4-5 are schematic top view illustrations of a debond layer formed over a carrier substrate in accordance with an embodiment. -
FIG. 6 is a schematic top view illustration of a build-up structure formed on a debond layer in accordance with an embodiment. -
FIG. 7 is a cross-sectional side view illustration of a substrate strip taken along section X-X ofFIG. 6 in accordance with an embodiment. -
FIG. 8 is a cross-sectional side view illustration of a plurality of chips encapsulated on build-up structure -
FIG. 9 is a cross-sectional side view illustration of cutting through a debond layer in accordance with an embodiment. -
FIG. 10 is a cross-sectional side view illustration of a debonded panel in accordance with an embodiment. -
FIG. 11 is a cross-sectional side view illustration of a package including a multiple-layer build-up structure in accordance with an embodiment. -
FIG. 12 is a cross-sectional side view illustration of a package including a single layer build-up structure in accordance with an embodiment. -
FIGS. 13A-15B are schematic top view and cross-sectional side view illustrations of a process of forming a debond layer including a metal foil in accordance with an embodiment. -
FIGS. 16A-18B are schematic top view and cross-sectional side view illustrations of a process of forming a debond layer including a sacrificial layer coating in accordance with an embodiment. -
FIGS. 19A-21B are schematic top view and cross-sectional side view illustrations of a process of forming a debond layer on a roughened surface in accordance with an embodiment. -
FIG. 22A is a flow chart illustrating a method of forming a build-up structure on a support substrate in accordance with an embodiment. -
FIG. 22B is a flow chart illustrating a method of forming a build-up structure on a support substrate in accordance with an embodiment. -
FIGS. 23A-23G are cross-sectional side view illustrations of a method of forming a build-up structure on a support substrate in accordance with an embodiment. -
FIGS. 24A-24G are cross-sectional side view illustrations of a method of forming a build-up structure on a support substrate in accordance with an embodiment. -
FIG. 25A is a cross-sectional side view illustration of a die mounted on a build-up structure in accordance with an embodiment. -
FIG. 25B is a schematic top view illustration of a strip substrate including plurality of package areas in accordance with an embodiment. -
FIG. 26A is a cross-sectional side view illustration of a die encapsulated on a build-up structure in accordance with an embodiment. -
FIG. 26B is a schematic top view illustration of a strip substrate including plurality of encapsulated package areas in accordance with an embodiment. -
FIG. 27 is a cross-sectional side view illustration of a support substrate removed from a build-up structure in accordance with an embodiment. -
FIG. 28 is a cross-sectional side view illustration of a package including solder bumps applied on a multiple-layer build-up structure in accordance with an embodiment. - Embodiments describe ultra thin coreless substrate processing techniques. More specifically, embodiments describe coreless substrate processes that are compatible with BGA fabrication and shipment of substrate strips. For example, conventional BGA chip assembly is implemented in batch on a substrate strip including a series of package substrate areas reserved for the fabrication of individual or multiple BGA package units. Conventionally, the substrate strip is rectangularly-shaped.
- In one aspect, embodiments describe coreless substrate fabrication processes that enable shipment of “known good” (i.e. verified electrical tests) coreless substrates on a support substrate (e.g. shipping substrate). Thus, the packaging processes can be “chip last” processes in which chips are only mounted onto “known good” substrates. In application this can increase assembly throughput, since the “known good” substrates can be prepared and stored prior to chip assembly. In accordance with embodiments, an electrical short layer can be formed on a carrier substrate, followed by formation of a build-up structure on the electrical short layer. In an embodiment, testing for electrical opens can be performed on BGA contact pads of the build-up structure. The carrier substrate may then be removed, followed by testing for electrical shorts on the exposed surface mount (SMT) contact pads of the build-up structure. The resultant “known good” substrates can be shipped in a variety of form factors, such as panel size, or strip substrate size compatible with BGA assembly tools.
- In another aspect, embodiments describe coreless substrate fabrication processes that can be used for the fabrication and shipment of ultra thin substrates (e.g. build-up structures in strip form) each supported on, and readily releasable from, a support substrate. Thus, not only can the strip substrates be “known good” substrates, the releasable build-up structures can be much thinner than traditional coreless substrates. In some embodiments, the strip substrates may include a single layer build-up structure (1 L, one metal layer) or multiple layer build-up structure (e.g. 3 L, three metal layers). In an embodiment, a 3 L build-up structure may be less than 60 μm thick, and a 1 L build-up structure may be less than 20 μm thick. Furthermore, due to the thickness of the build-up structure (e.g. less than 100 μm thick) warpage concern is significantly mitigated.
- In another aspect, embodiments describe coreless substrate fabrication processes in which a carrier substrate is debonded from a build-up structure after selective cutting through low adhesion areas of a debond layer that joins the build-up structure to the carrier substrate. In accordance with embodiments, the debond layer may include surface areas with different adhesion to the carrier substrate (e.g. high and low, respective to one another). In this manner, carrier substrate debonding can be achieved by processing (e.g. cutting) of selective areas as opposed to processing an entire layer, for example, as is customary with ultraviolet (UV), thermal, or laser debonding technology.
- In various embodiments, description is made with reference to figures. However, certain embodiments may be practiced without one or more of these specific details, or in combination with other known methods and configurations. In the following description, numerous specific details are set forth, such as specific configurations, dimensions and processes, etc., in order to provide a thorough understanding of the embodiments. In other instances, well-known semiconductor processes and manufacturing techniques have not been described in particular detail in order to not unnecessarily obscure the embodiments. Reference throughout this specification to “one embodiment” means that a particular feature, structure, configuration, or characteristic described in connection with the embodiment is included in at least one embodiment. Thus, the appearances of the phrase “in one embodiment” in various places throughout this specification are not necessarily referring to the same embodiment. Furthermore, the particular features, structures, configurations, or characteristics may be combined in any suitable manner in one or more embodiments.
- The terms “above”, “over”, “to”, “between”, “spanning” and “on” as used herein may refer to a relative position of one layer with respect to other layers. One layer “above”, “over”, “spanning” or “on” another layer or bonded “to” or in “contact” with another layer may be directly in contact with the other layer or may have one or more intervening layers. One layer “between” layers may be directly in contact with the layers or may have one or more intervening layers.
-
FIG. 1A is a flow chart illustrating a method of forming a build-up structure on a carrier substrate in accordance with an embodiment.FIG. 1B is a flow chart illustrating a method of forming a package using a build-up structure formed on a carrier substrate in accordance with an embodiment. The sequences illustrated inFIGS. 1A-1B may be formed by a single actor, or performed by separate actors. For example, the sequence illustrated inFIG. 1A may be performed by a substrate manufacturer, while the sequence illustrated inFIG. 1B may be performed by a chip assembly manufacturer. Thus, the substrate manufactured in the sequence illustrated inFIG. 1A may be a shipped product, such as substrate strips for BGA chip assembly. In interest of clarity, the following description ofFIGS. 1A-1B is made with regard to reference features found in other figures described herein. - Referring now to
FIG. 1A , at operation 110 adebond layer 200 is formed on acarrier substrate 206. In an embodiment, thedebond layer 200 includes afirst surface area 202 and asecond surface area 204 on thecarrier substrate 206, with thefirst surface area 202 having greater adhesion (e.g. high tack) to thecarrier substrate 206 than the second surface area 204 (e.g. low tack, air gap). A build-upstructure 220 is then formed on thedebond layer 200 atoperation 120. The build-upstructure 220 may span across the first surface area and the second surface area of the debond layer. The substrate stack (e.g. panel) including the build-upstructure 220,debond layer 200, andcarrier substrate 206 may then be optionally cut intosubstrate strips 300 atoperation 130. In an embodiment, the substrate stack is cut through thesecond surface area 204, so that the build-upstructure 220 is debonded from thecarrier substrate 206 when cutting into substrate strips 300. In an embodiment, the substrate stack is cut through thefirst surface area 202 only, so that the build-upstructure 220 is not debonded from thecarrier substrate 206 when cutting into substrate strips 300. For example, thecarrier substrate 206 may be useful as a shipping substrate, and for support during subsequent processing operations, for example with chip assembly. In accordance with embodiments, the substrate stack may be shipped as panel form or substrate strip form. - Referring now to
FIG. 1B , atoperation 140 one ormore die 240 are mounted onto the build-upstructure 220. Thedie 240 may include active components (e.g. logic, memory, system on chip, etc.) or passive components (e.g. capacitors or inductors, MEMS devices, sensors, etc.). The mounted die 240 may then be encapsulated with amolding compound 250 on the build-upstructure 220 atoperation 150. Atoperation 160 thecarrier substrate 206 may be debonded. In an embodiment, thecarrier substrate 206 is debonded by cutting through thesecond surface area 204 of thedebond layer 200. Thedebond layer 200 may then be removed from the build-upstructure 220 atoperation 170, andindividual packages 310 may be singulated atoperation 180. - Referring now
FIGS. 2-3 schematic top view illustrations are provided of debond layers 200 formed over a carrier substrate in accordance with embodiments. In both embodiments, thedebond layer 200 includes afirst surface area 202 and asecond surface area 204 on the carrier substrate, thefirst surface area 202 surrounds thesecond surface area 204, and thefirst surface area 202 has greater adhesion to the carrier substrate than does thesecond surface area 204. In the embodiment illustrated inFIG. 2 , there are a plurality ofsecond surface areas 204, each surrounded by thefirst surface area 202.Substrate strip 300 outlines are illustrated in the particular embodiment around thesecond surface areas 204. In such an embodiment, a substrate stack (e.g. panel) including the build-upstructure 220,debond layer 200, andcarrier substrate 206 may be cut intosubstrate strips 300 atoperation 130 without debonding the build-upstructure 220 from thecarrier substrate 206. In the embodiment illustrated inFIG. 3 , there is a singlesecond surface area 204 covering a majority of the carrier substrate (e.g. panel) area. In such an embodiment, a panel-sized build-up structure can be debonded from thecarrier substrate 206, followed by subsequent cutting into individual substrate strips 300. - Referring now to
FIGS. 4-6 , schematic top view illustrations are provided for a method of forming a debond layer and build-up structure in accordance with an embodiment.FIG. 7 is a cross-sectional side view illustration of a substrate strip taken along section X-X ofFIG. 6 in accordance with an embodiment. In the particular embodiments illustrated inFIGS. 4-7 , adebond layer 200 including an anti-stick coating is illustrated. However, embodiments are not so limited and a variety ofdebond layers 200 can be utilized such as, but not limited to, those illustrated and described with regard toFIGS. 13A-21B . Additionally, a variety ofcarrier substrates 206 may be utilized in accordance with embodiments. For example, the carrier substrates may be prepreg, glass, metal (e.g. stainless steel), etc. The carrier substrates may come with or without a metal surface layer. - Referring now to
FIG. 4 , a plurality ofsecond surface areas 204 is formed with a patternedsacrificial layer 212 over thecarrier substrate 206. A patterned metal layer 210 (e.g. copper) may optionally be formed underneath thesacrificial layer 212. Thesacrificial layer 212 may have anti-stick properties in order to form a low bond strength interface with the underlying layer (e.g. patterned metal layer 210). Exemplary materials may include polyvinyl fluoride (PVF), nickel, chromium. Exposed portions of thecarrier substrate 206 may correspond to thefirst surface area 202 for forming a high bond strength interface. - A
cap layer 414 may then be formed over thecarrier substrate 206 and patternedsacrificial layer 212, and directly on bothsurface areas cap layer 414 is formed of a dielectric material. In an embodiment,cap layer 414 is laminated. Following the formation of cap layer 414 a build-upstructure 220 including an array ofpackage routings 221 is formed over thecap layer 414. The build-upstructure 220 andpackage routings 221 may include a single metal routing layer 224 (e.g. 1 L) or multiple metal routing layers 224 anddielectric layers 214. In the particular embodiment illustrated inFIG. 6 , the build-upstructure 220 is formed over bothsurface areas package routings 221 are formed over only thesecond surface areas 204. The package routings 221 may be arranged in a series of strips, and within each of the strips arranged inmolding groups 251 which will subsequently support die that will be molded together within a single molding compound. Following the formation of the build-upstructure 220, the substrate stack may optionally be cut through thefirst surface areas 202 to form a plurality of substrate strips 300. -
FIG. 7 is a cross-sectional side view illustration of a substrate strip taken along section X-X ofFIG. 6 in accordance with an embodiment. In the embodiment illustrated, in addition to the one or more metal routing layers 224 anddielectric layers 214, the build-upstructure 220 may additionally includeground routing 222. Theground routing 222 may completely surround individual package outlines, or optionally only partially surround package outlines. In an embodiment, eachpackage routing 221 includes a ground routing around a periphery of thepackage routing 221. For example, ground routing 222 may be a ground ring. In an embodiment, ground routing 222 is electrically isolated frompackage routing 221. - Referring now to
FIGS. 8-10 the substrate stack in panel or strip form (e.g. substrate strip 300) is subjected to a chip assembly process. In the embodiment illustrated inFIG. 8 , a plurality ofdie 240 are mounted on themultiple package routings 221 of the build-upstructure 220. For example, the plurality ofdie 240 may be flip chip mounted, and bonded to the build-upstructure 220 with solder joints. Thedie 240 are then encapsulated on the build-upstructure 220 with amolding compound 250. Referring briefly toFIG. 6 , separate locations of themolding compound 250 may be formed over multiple die 240 inmolding groups 251. This is also illustrated inFIGS. 25B and 26B . - Referring now to
FIG. 8 , the substrate stack (e.g. substrate strip 300) is cut in order to debond thecarrier substrate 206. As shown, the substrate stack is cut through the second surface areas 204 (e.g. low tack areas) including thesacrificial layer 212. After cutting the build-upstructure 220 may be debonded (e.g. peeled) from thecarrier substrate 206 andmetal layer 210. Following debonding, the build-upstructure 220 is processed to removeresidual cap layer 414 and expose thecontact pads 226 andground routing 222 in the build-upstructure 220. For example,residual cap layer 414 may be removed by plasma etching, or grinding. Solder bumps 312 may then be optionally applied to the exposedcontact pads 226 andground routing 222, andindividual packages 310 may then be singulated, as shown inFIG. 10 . In an embodiment, cutting or sawing is performed through theground routing 222 and optional solder bumps 312 attached thereto so that theground routing 222 is exposed on the cut side surfaces. - Exemplary multiple
metal routing layer 224package 310 and singlemetal routing layer 224package 310 are illustrated inFIGS. 11-12 . As shown, contact pads orstuds 242 ofdie 240 may be bonded to theSMT contact pads 227 oftop surface 229 the build-upstructure 220 with solder joints 244.Solder 312 may optionally be applied toBGA contact pads 226 and ground routing 222 of thebottom surface 225 build-upstructure 220. In an embodiment, an electrically conductive shielding 314 (e.g. metal layer) may be formed on the exposed side and top surfaces of thepackages 310, for example, by sputtering for electromagnetic interference (EMI) shielding. Shielding 314 may be in electrical contact withground routing 222. In an embodiment, after cutting or sawing to singulate thepackages 310, the packages can be placed on another tape layer followed by sputtering to form the shielding 314. Thesolder 312 may be embedded in the tape layer during sputtering so that shielding 314 does not cover thesolder 312. Thepackages 310 may then be removed from the tape layer. - In the above description, packaging methods are described and illustrated in which debond
layer 200 includes a sacrificial layer (e.g. anti-stick coating). However, embodiments are not so limited and a variety ofdebond layers 200 can be utilized such as, but not limited to, those illustrated and described with regard toFIGS. 13A-21B . In the particular embodiments illustrated inFIGS. 13A-21B , the debond layers 200 include afirst surface area 202 and asecond surface area 204 on thecarrier substrate 401, thefirst surface area 202 surrounds thesecond surface area 204, and thefirst surface area 202 has greater adhesion to thecarrier substrate 401 than does thesecond surface area 204. In the embodiments illustrated, there is a singlesecond surface area 204 covering a majority of the carrier substrate (e.g. panel) area. In such an embodiment, a panel-sized build-up structure can be debonded from thecarrier substrate 401.Exemplary panel 500 outlines are illustrated by dashed lines. Alternatively, there may be a plurality ofsecond surface areas 204, each surrounded by thefirst surface area 202 similarly as illustrated inFIG. 2 . - Referring now to
FIGS. 13A-15B schematic top view and cross-sectional side view illustrations are provided of a process of forming adebond layer 200 including ametal foil 412 in accordance with an embodiment.Carrier substrate 401 may be formed of the same materials ascarrier substrate 206, and may optionally include conductive layers (e.g. metal layers) 410 on front and back surfaces. In an embodiment,carrier substrate 401 includes a carrier core (e.g. glass, metal) andmetal layers 410 on one or both sides of the carrier core. For example,metal layers 410 may be formed of copper, and approximately 10-20 μm thick. In the embodiment illustrated, themetal foil 412 layers andcap layers 414 are booked and laminated on one or both sides of thecarrier substrate 401, for example, using vacuum lamination. In an embodiment,metal foil 412 layers are copper, and approximately 10-20 μm thick. In an embodiment, cap layers 414 are formed of a suitable dielectric material such as poly(N-isopropylacrylamide-co-N,N-dimethylacrylamide) (PID), polybenzobisoxazole (PBO), epoxy Ajinomoto Build-up Film (ABF), etc. In an embodiment illustrated inFIGS. 13A-15B , there may be an air gap in thesecond surface area 204 between themetal foil layer 412 andmetal layer 410 of the carrier substrate. In accordance with some embodiments, metal foil layers 412 may additionally function as electrical short layers, for example, during electrical open testing the BGA side of the build-up structure. -
FIGS. 16A-18B are schematic top view and cross-sectional side view illustrations of a process of forming adebond layer 200 including a sacrificial (anti-stick)layer 413 coating in accordance with an embodiment.Carrier substrate 401 may be formed similarly ascarrier substrate 401 described with regard toFIGS. 13A-15B . For example,carrier substrate 401 may include a carrier core (e.g. glass, metal) andmetal layers 410 on one or both sides of the carrier core. As shown inFIGS. 17A-17B ,sacrificial layer 413 may be coated onto the metal layers 410, followed by etching of the metal layers 410 at the lateral edges, or perimeter, of thecarrier substrate 401 to expose the substrate core, which has a higher bonding strength capability than thesacrificial layer 413. Thesacrificial layer 413 may have anti-stick properties in order to form a low bond strength interface with the underlying layer (e.g. patterned metal layer 210). Exemplary materials forsacrificial layer 413 may include polyvinyl fluoride (PVF), nickel, chromium. Exposed portions of thecarrier substrate 401 may correspond to thefirst surface area 202 for forming a high bond strength interface. - A
cap layer 414 may then be formed over thecarrier substrate 401 andsacrificial layer 413, and directly on bothsurface areas cap layer 414 is laminated. -
FIGS. 19A-21B are schematic top view and cross-sectional side view illustrations of a process of forming adebond layer 200 on a roughened surface in accordance with an embodiment.Carrier substrate 401 may be a variety of materials including prepreg, glass, metal (e.g. stainless steel), etc. In an embodiment,carrier substrate 401 is a metal carrier, and may optionally have an anti-stick surface coating. In an embodiment, a perimeter area of thecarrier substrate 401 is roughened using a suitable process such as jet blasting, laser etching, or chemical etching to for thefirst surface area 402. Acap layer 414 is then formed over thesurface areas carrier substrate 401 using a suitable technique, such as vacuum lamination. - Referring now to
FIGS. 22A-22B , flow charts are provided illustrating methods of forming a build-up structure on a support substrate. While the sequences are illustrated separately inFIGS. 22A-22B , one or more of the operations may be combinable. Thus, the sequences are not intended to be exclusive of one another, and may be interpreted as different ways of characterizing a same process. In interest of clarity, the following description ofFIGS. 22A-22B is made with regard to reference features found in other figures described herein. - Referring to
FIG. 22A , at operation 2210 adebond layer 200 is formed on acarrier substrate 401. In an embodiment, forming thedebond layer 200 includes placing ametal foil 412 onto thecarrier substrate 401 and laminating acap layer 414 over and laterally around themetal foil 412 on thecarrier substrate 401 as described above with regard toFIGS. 13A-15B . In an embodiment, forming thedebond layer 200 includes removing a portion of ametal layer 410 around lateral edges of a carrier core, and forming acap layer 414 over and laterally around themetal layer 410 on the carrier core as described above with regard toFIGS. 16A-18B . In an embodiment, forming thedebond layer 200 includes roughening anarea 420 of thecarrier substrate 401, and forming acap layer 414 over the roughened area of thecarrier substrate 401 and anon-roughened area 400 of thecarrier substrate 401. A build-upstructure 220 is then formed on thedebond layer 200 atoperation 2220. Asupport substrate 600 is attached to the build-up structure atoperation 2230, followed by detaching (debonding) thecarrier substrate 401 from the build-upstructure 220. Debonding of thecarrier substrate 401 may include cutting through thesecond surface area 404 of the debond layer. In one embodiment, cutting through thesecond surface area 404 of thedebond layer 200 includes cutting through themetal foil 412. In one embodiment, cutting through thesecond surface area 404 of thedebond layer 200 includes cutting through themetal layer 210. In one embodiment, cutting through thesecond surface area 404 of thedebond layer 200 includes cutting through thecap layer 414 over thenon-roughened area 400 of thecarrier substrate 401. Remainingresidual debond layer 200 may then optionally be at least partially removed from the build-upstructure 220 after debonding thecarrier substrate 401. - Referring to
FIG. 22B , atoperation 2202 an electrical short layer is formed on acarrier substrate 401. In accordance with embodiments the electrical short layer may be formed as a part of thedebond layer 200 or on thedebond layer 200. For example,metal foil 412 may function as the electrical short layer. Alternatively, aseed layer 450 formed on thedebond layer 200 may function as the electrical short layer. A build-upstructure 220 is then formed on the electrical short layer atoperation 2222. At this point, a test to detect electrical opens may be performed on the exposed contact pads 226 (e.g. BGA contact pads) of the build-upstructure 220. In an embodiment, each of the exposedcontact pads 226 are shorted together with theseed layer 450 ormetal foil 412. In an embodiment, once testing is completed asupport substrate 600 is attached to the build-upstructure 220 atoperation 2230. Atoperation 2242 thecarrier substrate 401 is detached (debonded) from the build-upstructure 220. The electrical short layer is removed from the build-up structure atoperation 2252, and the contact pads 227 (e.g. SMT contact pads) on the build-upstructure 220 are exposed atoperation 2254. At this point, a test to detect electrical shorts may be performed on the exposed contact pads 227 (e.g. SMT contact pads) of the build-upstructure 220.Panels 500 orsubstrate strips 300 passing the electrical tests may then be further processed as “known good” substrates. - Methods of forming a build-up
structure 220 on asupport substrate 600 are illustrated inFIGS. 23A-23G andFIGS. 24A-24G .FIGS. 23A-23G are cross-sectional side view illustrations of a method utilizing thedebond layer 200 illustrated inFIGS. 13A-15B in accordance with an embodiment.FIGS. 24A-24G are cross-sectional side view illustrations of a method utilizing thedebond layer 200 illustrated in eitherFIGS. 16A-18B orFIGS. 19A-21B . In the particular embodiments illustrated, thecarrier substrates 401 are processed one both sides in order to fabricate twopanels 500 from asingle carrier substrate 401. - As shown in
FIG. 23A debond layers 200 are formed on opposite sides of thecarrier substrate 401 similarly as illustrated inFIGS. 13A-15B . As shown inFIG. 24A debond layers 200 are formed on opposite sides of thecarrier substrate 401 similarly as illustrated inFIGS. 16A-18B . While thespecific debond layers 200 fromFIGS. 19A-21B are not separately shown inFIGS. 24A-24G , the processing sequences are substantially similar after the formation of debond layers 200. - In the embodiment illustrated in
FIG. 23B bump openings 421 are formed in thecap layer 414 using a suitable technique such as lithography or laser etching. Abarrier metal layer 223 is then plated in thebump openings 421. For example, thebarrier metal layer 223 may be a material such as Au, Ni/Au, or Cu. In the embodiment illustrated inFIG. 23 aseed layer 450 is formed overcap layer 414. For example, see layer may be Cu, and may be formed using a technique such as sputtering or electroless plating. Adielectric layer 214 may then be formed over theseed layer 450 and patterned to formbump openings 211. Abarrier metal layer 223 is then plated in thebump openings 211. For example, thebarrier metal layer 223 may be a material such as Au, Ni/Au, or Cu. - Sequential build-up processes of metal routing layers 224 and
dielectric layers 214 may then be performed to form the build-upstructure 220 as illustrated inFIG. 23C andFIG. 24C . Optionally, a BGAside passivation layer 215 may be formed, includingopenings 217 exposing contact pads 226 (e.g. BGA contact pads).Passivation layer 215 may be formed of the same or different materials thandielectric layers 214. At this point, a test to detect electrical opens may be performed on the exposed contact pads 226 (e.g. BGA contact pads) of thebottom surface 225 of the build-upstructures 220. In an embodiment, each of the exposedcontact pads 226 are shorted together with theseed layer 450 ormetal foil 412. In an embodiment, once testing is completedsupport substrates 600 are attached to the build-upstructures 220. As illustrated inFIGS. 23D and 24D , supportsubstrates 600 may be attached usingadhesive layers 602. - Referring now to
FIGS. 23E-23G andFIGS. 24E-24G , the top andbottom panels 500 are debonded from thecarrier substrate 401 by cutting through thesecond surface area 404. In the embodiment illustrated inFIG. 23F , the metal foil 412 (portion of debond layer 200) may be retained on the build-upstructure 220 after debonding. Themetal foil 412 may then be removed as illustrated inFIG. 23G by etching to reveal contact pads 227 (eg. SMT contact pads). In the embodiment illustrated inFIG. 24F , theseed layer 450 and cap layer 414 (portion of debond layer 200) may be retained on the build-upstructure 220 after debonding. In an embodiment, thecap layer 414 is removed by plasma etching followed by micro etching to remove theseed layer 450 to reveal contact pads 227 (eg. SMT contact pads), as illustrated inFIG. 24G . The resultant panels inFIGS. 23G and 24G may then be singulated into substrate strips 300. At this point, a test to detect electrical shorts may be performed on the exposed contact pads 227 (e.g. SMT contact pads) of thetop surface 229 of the build-upstructure 220.Panels 500 orsubstrate strips 300 passing the electrical tests may then be further processed as “known good” substrates. - Referring now to
FIGS. 25A-28 cross-sectional side view and schematic top view illustrations are provided for a chip assembly process on asubstrate strip 300, similar to that previously described with regard toFIG. 1B .FIG. 25A is a cross-sectional side view illustration of a die mounted on a build-up structure in accordance with an embodiment.FIG. 25B is a schematic top view illustration of a strip substrate including plurality of package areas in accordance with an embodiment. As shown a plurality ofdie 240 are mounted onto the build-upstructure 220. Similar to the above description with regard toFIG. 8 , a plurality ofdie 240 are mounted on themultiple package routings 221 of the build-upstructure 220. For example, the plurality ofdie 240 may be flip chip mounted, and bonded to the build-upstructure 220 with solder joints 244. In the embodiment illustrated, multiple die 240 are arranged inmolding groups 251 which will each be encapsulated with the same molding compound. -
FIG. 26A is a cross-sectional side view illustration of a die encapsulated on a build-up structure in accordance with an embodiment.FIG. 26B is a schematic top view illustration of a strip substrate including plurality of encapsulated package areas in accordance with an embodiment. As shown inFIG. 26B , separate locations of themolding compound 250 are formed over multiple die 240 in themolding groups 251. - Following encapsulation, the build-up
structure 220 may be debonded (e.g. peeled) from theadhesive layer 602 that held the build-upstructure 220 on thesupport substrate 600. Solder bumps 312 may then be optionally applied to the exposedcontact pads 226 andground routing 222 as shown inFIG. 27 , andindividual packages 310 may then be singulated, as shown inFIG. 28 . In an embodiment, cutting or sawing is performed through theground routing 222 and optional solder bumps 312 attached thereto so that theground routing 222 is exposed on the cut side surfaces. In an embodiment, an electrically conductive shielding 314 (e.g. metal layer) may be formed on the exposed side and top surfaces of thepackages 310 including theground routing 222, for example, by sputtering for EMI shielding, similarly as described with regard toFIGS. 11-12 . - In utilizing the various aspects of the embodiments, it would become apparent to one skilled in the art that combinations or variations of the above embodiments are possible for forming a carrier ultra thin substrate. Although the embodiments have been described in language specific to structural features and/or methodological acts, it is to be understood that the appended claims are not necessarily limited to the specific features or acts described. The specific features and acts disclosed are instead to be understood as embodiments of the claims useful for illustration.
Claims (20)
1. A substrate strip comprising:
a support substrate including rectangular lateral dimensions;
an adhesive layer on the support substrate;
a build-up structure attached to the adhesive layer, the build-up structure comprising a bottom surface including a bottom plurality of contact pads, and a top surface including a top plurality of contact pads.
2. The substrate strip of claim 1 , wherein the build-up structure is less than 100 μm thick.
3. The substrate strip of claim 1 , wherein the bottom surface of the build-up structure additionally includes ground routing.
4. The substrate strip of claim 1 , wherein the build-up structure includes an array of package routings and an array of ground routings arranged in molding groups, arranged such that each package routing includes a ground routing around a periphery of the package routing.
5. The substrate strip of claim 4 , wherein each molding group contains a plurality of package routings and a plurality of ground routings.
6. The substrate strip of claim 5 , wherein adjacent package routings within a molding group share a ground routing.
7. The substrate strip of claim 4 , wherein the array of ground routings is electrically separated from the array of package routings.
8. The substrate strip of claim 4 , further comprising a barrier metal on the plurality of surface mount contact pads.
9. The substrate strip of claim 4 , wherein the build-up structure comprises a single metal routing layer.
10. The substrate strip of claim 4 , wherein the build-up structure comprises one to three metal routing layers.
11. The substrate strip of claim 4 , wherein each molding group contains a plurality of rows and columns of package routings.
12. The substrate strip of claim 11 , wherein the molding groups are arranged in single line along a length of the substrate strip.
13. The substrate strip of claim 4 , wherein a first portion of the bottom plurality of contact pads is in contact with the array of ground routings.
14. The substrate strip of claim 13 , wherein a second portion of the top plurality of contact pads is in contact with the array of ground routings.
15. The substrate strip of claim 13 , wherein the bottom plurality of contact pads is a plurality of ball grid array (B GA) contact pads.
16. The substrate strip of claim 15 , wherein the top plurality of contacts pads is a plurality of surface mount contact pads.
17. A packaging substrate comprising:
a support substrate;
an adhesive layer on the support substrate;
a build-up structure attached to the adhesive layer, the build-up structure comprising:
a bottom surface including a bottom plurality of contact pads;
a top surface including a top plurality of contact pads; and
an array of package routings and an array of ground routings arranged in molding groups, arranged such that each package routing includes a ground routing around a periphery of the package routing.
18. The packaging substrate of claim 17 , wherein each molding group contains a plurality of package routings and a plurality of ground routings.
19. The packaging substrate of claim 18 , wherein adjacent package routings within a molding group share a ground routing.
20. The packaging substrate of claim 17 , wherein the array of ground routings is electrically separated from the array of package routings.
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
US15/826,509 US20180082858A1 (en) | 2015-11-06 | 2017-11-29 | Carrier ultra thin substrate |
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
US14/935,292 US9899239B2 (en) | 2015-11-06 | 2015-11-06 | Carrier ultra thin substrate |
US15/826,509 US20180082858A1 (en) | 2015-11-06 | 2017-11-29 | Carrier ultra thin substrate |
Related Parent Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
US14/935,292 Division US9899239B2 (en) | 2015-11-06 | 2015-11-06 | Carrier ultra thin substrate |
Publications (1)
Publication Number | Publication Date |
---|---|
US20180082858A1 true US20180082858A1 (en) | 2018-03-22 |
Family
ID=57047303
Family Applications (2)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
US14/935,292 Active US9899239B2 (en) | 2015-11-06 | 2015-11-06 | Carrier ultra thin substrate |
US15/826,509 Abandoned US20180082858A1 (en) | 2015-11-06 | 2017-11-29 | Carrier ultra thin substrate |
Family Applications Before (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
US14/935,292 Active US9899239B2 (en) | 2015-11-06 | 2015-11-06 | Carrier ultra thin substrate |
Country Status (6)
Country | Link |
---|---|
US (2) | US9899239B2 (en) |
JP (1) | JP6527640B2 (en) |
KR (1) | KR102069986B1 (en) |
CN (1) | CN108604582B (en) |
TW (1) | TWI634821B (en) |
WO (1) | WO2017078849A1 (en) |
Families Citing this family (15)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
WO2017149810A1 (en) * | 2016-02-29 | 2017-09-08 | 三井金属鉱業株式会社 | Copper foil with carrier, production method for same, production method for coreless support with wiring layer, and production method for printed circuit board |
US9793222B1 (en) | 2016-04-21 | 2017-10-17 | Apple Inc. | Substrate designed to provide EMI shielding |
US10804119B2 (en) * | 2017-03-15 | 2020-10-13 | STATS ChipPAC Pte. Ltd. | Method of forming SIP module over film layer |
US10224254B2 (en) * | 2017-04-26 | 2019-03-05 | Powertech Technology Inc. | Package process method including disposing a die within a recess of a one-piece material |
US10714431B2 (en) * | 2017-08-08 | 2020-07-14 | UTAC Headquarters Pte. Ltd. | Semiconductor packages with electromagnetic interference shielding |
KR102525490B1 (en) | 2017-10-24 | 2023-04-24 | 삼성전자주식회사 | Printed circuit board, semiconductor package and method for fabricating semiconductor package |
JP7153438B2 (en) * | 2017-10-26 | 2022-10-14 | 日東電工株式会社 | Substrate assembly sheet |
US10368448B2 (en) | 2017-11-11 | 2019-07-30 | At&S Austria Technologie & Systemtechnik Aktiengesellschaft | Method of manufacturing a component carrier |
KR102179165B1 (en) | 2017-11-28 | 2020-11-16 | 삼성전자주식회사 | Carrier substrate and manufacturing method of semiconductor package using the carrier substrate |
CN108269766A (en) * | 2017-12-20 | 2018-07-10 | 深南电路股份有限公司 | A kind of ultra-thin packed substrate structure and its processing method |
KR102499039B1 (en) * | 2018-11-08 | 2023-02-13 | 삼성전자주식회사 | Carrier substrate and manufacturing method of semiconductor package using the carrier substrate |
US11545455B2 (en) | 2019-05-28 | 2023-01-03 | Apple Inc. | Semiconductor packaging substrate fine pitch metal bump and reinforcement structures |
AT17082U1 (en) * | 2020-04-27 | 2021-05-15 | Zkw Group Gmbh | METHOD OF FASTENING AN ELECTRONIC COMPONENT |
WO2023060432A1 (en) * | 2021-10-12 | 2023-04-20 | 华为技术有限公司 | Packaging structure, circuit board assembly and electronic device |
CN116631883B (en) * | 2023-05-31 | 2024-04-16 | 苏州兴德森电子科技有限公司 | Packaging substrate and manufacturing method thereof, chip and manufacturing method thereof |
Citations (10)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US6246015B1 (en) * | 1998-05-27 | 2001-06-12 | Anam Semiconductor, Inc. | Printed circuit board for ball grid array semiconductor packages |
US20040140573A1 (en) * | 2003-01-22 | 2004-07-22 | Siliconware Precision Industries, Ltd. | Semiconductor package and fabrication method thereof |
US20050205978A1 (en) * | 2003-01-22 | 2005-09-22 | Han-Ping Pu | Semiconductor package and fabrication method thereof |
US20080067677A1 (en) * | 2001-03-05 | 2008-03-20 | Megica Corporation | Structure and manufacturing method of a chip scale package |
US20080088004A1 (en) * | 2006-10-17 | 2008-04-17 | Advanced Chip Engineering Technology Inc. | Wafer level package structure with build up layers |
US20090096098A1 (en) * | 2007-10-15 | 2009-04-16 | Advanced Chip Engineering Technology Inc. | Inter-connecting structure for semiconductor package and method of the same |
US20100081269A1 (en) * | 2008-10-01 | 2010-04-01 | Fujitsu Microelectronics Limited | Method for manufacturing semiconductor device having electrode for external connection |
US20110134612A1 (en) * | 2009-12-04 | 2011-06-09 | Stmicroelectronics (Grenoble) Sas | Rebuilt wafer assembly |
US20130335928A1 (en) * | 2012-06-18 | 2013-12-19 | Unimicron Technology Corporation | Carrier and method for fabricating coreless packaging substrate |
US20150084150A1 (en) * | 2013-09-25 | 2015-03-26 | Delphi Technologies, Inc. | Ball grid array packaged camera device soldered to a substrate |
Family Cites Families (27)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US5505321A (en) * | 1994-12-05 | 1996-04-09 | Teledyne Industries, Inc. | Fabrication multilayer combined rigid/flex printed circuit board |
JP2000091743A (en) * | 1998-07-16 | 2000-03-31 | Sumitomo Metal Electronics Devices Inc | Build-up multilayered substrate and its manufacture |
EP1009206A3 (en) * | 1998-12-02 | 2003-01-15 | Ajinomoto Co., Inc. | Method of vacuum-laminating adhesive film |
US7148561B2 (en) | 2001-03-29 | 2006-12-12 | Siliconware Precision Industries Co., Ltd. | Ball grid array substrate strip with warpage-preventive linkage structure |
JP4897281B2 (en) * | 2005-12-07 | 2012-03-14 | 新光電気工業株式会社 | Wiring board manufacturing method and electronic component mounting structure manufacturing method |
JP4334005B2 (en) * | 2005-12-07 | 2009-09-16 | 新光電気工業株式会社 | Wiring board manufacturing method and electronic component mounting structure manufacturing method |
JP2007335698A (en) * | 2006-06-16 | 2007-12-27 | Fujitsu Ltd | Manufacturing method of wiring board |
JP4866268B2 (en) * | 2007-02-28 | 2012-02-01 | 新光電気工業株式会社 | Wiring board manufacturing method and electronic component device manufacturing method |
JP5092662B2 (en) | 2007-10-03 | 2012-12-05 | 凸版印刷株式会社 | Method for manufacturing printed wiring board |
JP4981712B2 (en) * | 2008-02-29 | 2012-07-25 | 新光電気工業株式会社 | Wiring board manufacturing method and semiconductor package manufacturing method |
JP5284147B2 (en) * | 2008-03-13 | 2013-09-11 | 日本特殊陶業株式会社 | Multilayer wiring board |
JP4533449B2 (en) * | 2008-10-16 | 2010-09-01 | 新光電気工業株式会社 | Wiring board manufacturing method |
JP2010118635A (en) * | 2008-11-12 | 2010-05-27 | Ibiden Co Ltd | Multilayer printed wiring board |
TW201041469A (en) * | 2009-05-12 | 2010-11-16 | Phoenix Prec Technology Corp | Coreless packaging substrate, carrier thereof, and method for manufacturing the same |
KR101058621B1 (en) | 2009-07-23 | 2011-08-22 | 삼성전기주식회사 | Semiconductor package and manufacturing method thereof |
KR101055462B1 (en) * | 2010-01-07 | 2011-08-08 | 삼성전기주식회사 | Carrier for manufacturing printed circuit board, manufacturing method thereof and manufacturing method of printed circuit board using same |
JP5896200B2 (en) | 2010-09-29 | 2016-03-30 | 日立化成株式会社 | Manufacturing method of package substrate for mounting semiconductor device |
WO2012077738A1 (en) * | 2010-12-09 | 2012-06-14 | 旭化成株式会社 | Fine-structure laminate, method for preparing fine-structure laminate, and production method for fine-structure laminate |
JP5848110B2 (en) * | 2011-02-15 | 2016-01-27 | 日本特殊陶業株式会社 | Manufacturing method of multilayer wiring board |
TWI413475B (en) * | 2011-03-09 | 2013-10-21 | Subtron Technology Co Ltd | Process of electronic structure and electronic structure |
JP5902931B2 (en) * | 2011-12-06 | 2016-04-13 | 新光電気工業株式会社 | WIRING BOARD MANUFACTURING METHOD AND WIRING BOARD MANUFACTURING SUPPORT |
JP5750400B2 (en) | 2012-05-17 | 2015-07-22 | 新光電気工業株式会社 | Wiring board manufacturing method, wiring board manufacturing structure |
US9320149B2 (en) * | 2012-12-21 | 2016-04-19 | Intel Corporation | Bumpless build-up layer package including a release layer |
JP6092752B2 (en) * | 2013-10-30 | 2017-03-08 | 京セラ株式会社 | Wiring board |
JP2015115558A (en) * | 2013-12-13 | 2015-06-22 | 株式会社東芝 | Semiconductor device |
US9768090B2 (en) * | 2014-02-14 | 2017-09-19 | Taiwan Semiconductor Manufacturing Company, Ltd. | Substrate design for semiconductor packages and method of forming same |
JP6240007B2 (en) * | 2014-03-18 | 2017-11-29 | 日本メクトロン株式会社 | Method for manufacturing flexible printed circuit board and intermediate product used for manufacturing flexible printed circuit board |
-
2015
- 2015-11-06 US US14/935,292 patent/US9899239B2/en active Active
-
2016
- 2016-09-13 CN CN201680064430.7A patent/CN108604582B/en active Active
- 2016-09-13 JP JP2018521658A patent/JP6527640B2/en active Active
- 2016-09-13 KR KR1020187010891A patent/KR102069986B1/en active IP Right Grant
- 2016-09-13 WO PCT/US2016/051479 patent/WO2017078849A1/en active Application Filing
- 2016-09-30 TW TW105131518A patent/TWI634821B/en active
-
2017
- 2017-11-29 US US15/826,509 patent/US20180082858A1/en not_active Abandoned
Patent Citations (10)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US6246015B1 (en) * | 1998-05-27 | 2001-06-12 | Anam Semiconductor, Inc. | Printed circuit board for ball grid array semiconductor packages |
US20080067677A1 (en) * | 2001-03-05 | 2008-03-20 | Megica Corporation | Structure and manufacturing method of a chip scale package |
US20040140573A1 (en) * | 2003-01-22 | 2004-07-22 | Siliconware Precision Industries, Ltd. | Semiconductor package and fabrication method thereof |
US20050205978A1 (en) * | 2003-01-22 | 2005-09-22 | Han-Ping Pu | Semiconductor package and fabrication method thereof |
US20080088004A1 (en) * | 2006-10-17 | 2008-04-17 | Advanced Chip Engineering Technology Inc. | Wafer level package structure with build up layers |
US20090096098A1 (en) * | 2007-10-15 | 2009-04-16 | Advanced Chip Engineering Technology Inc. | Inter-connecting structure for semiconductor package and method of the same |
US20100081269A1 (en) * | 2008-10-01 | 2010-04-01 | Fujitsu Microelectronics Limited | Method for manufacturing semiconductor device having electrode for external connection |
US20110134612A1 (en) * | 2009-12-04 | 2011-06-09 | Stmicroelectronics (Grenoble) Sas | Rebuilt wafer assembly |
US20130335928A1 (en) * | 2012-06-18 | 2013-12-19 | Unimicron Technology Corporation | Carrier and method for fabricating coreless packaging substrate |
US20150084150A1 (en) * | 2013-09-25 | 2015-03-26 | Delphi Technologies, Inc. | Ball grid array packaged camera device soldered to a substrate |
Also Published As
Publication number | Publication date |
---|---|
KR102069986B1 (en) | 2020-01-23 |
TW201735745A (en) | 2017-10-01 |
US20170135219A1 (en) | 2017-05-11 |
JP6527640B2 (en) | 2019-06-05 |
US9899239B2 (en) | 2018-02-20 |
KR20180056698A (en) | 2018-05-29 |
WO2017078849A1 (en) | 2017-05-11 |
JP2018533848A (en) | 2018-11-15 |
CN108604582B (en) | 2022-10-18 |
CN108604582A (en) | 2018-09-28 |
TWI634821B (en) | 2018-09-01 |
Similar Documents
Publication | Publication Date | Title |
---|---|---|
US9899239B2 (en) | Carrier ultra thin substrate | |
US9437459B2 (en) | Aluminum clad copper structure of an electronic component package and a method of making an electronic component package with an aluminum clad copper structure | |
US10242887B2 (en) | Semiconductor device and method of making embedded wafer level chip scale packages | |
US10192835B2 (en) | Substrate designed to provide EMI shielding | |
US10283376B2 (en) | Chip encapsulating method and chip encapsulating structure | |
US9929072B2 (en) | Packaged semiconductor devices | |
US11410913B2 (en) | Multi-layer die attachment | |
US9455159B2 (en) | Fabrication method of packaging substrate | |
KR101590453B1 (en) | Semiconductor chip die structure for improving warpage and method thereof | |
US20230017445A1 (en) | Scalable Extreme Large Size Substrate Integration | |
US9806012B2 (en) | IC carrier of semiconductor package and manufacturing method thereof | |
US20150279796A1 (en) | Quad-flat no-leads package structure and method of manufacturing the same | |
TWI425580B (en) | Process for manufacturing semiconductor chip packaging module | |
KR101523274B1 (en) | Semiconductor package manufacturing method | |
US9466553B2 (en) | Package structure and method for manufacturing package structure | |
TWM506372U (en) | Leads for die packages | |
US20120074561A1 (en) | Backmetal replacement for use in the packaging of integrated circuits | |
US20120238059A1 (en) | Sacrificial substrate film for ball land protection |
Legal Events
Date | Code | Title | Description |
---|---|---|---|
STPP | Information on status: patent application and granting procedure in general |
Free format text: NON FINAL ACTION MAILED |
|
STPP | Information on status: patent application and granting procedure in general |
Free format text: FINAL REJECTION MAILED |
|
STPP | Information on status: patent application and granting procedure in general |
Free format text: ADVISORY ACTION MAILED |
|
STPP | Information on status: patent application and granting procedure in general |
Free format text: DOCKETED NEW CASE - READY FOR EXAMINATION |
|
STPP | Information on status: patent application and granting procedure in general |
Free format text: NON FINAL ACTION MAILED |
|
STPP | Information on status: patent application and granting procedure in general |
Free format text: FINAL REJECTION MAILED |
|
STCB | Information on status: application discontinuation |
Free format text: ABANDONED -- FAILURE TO RESPOND TO AN OFFICE ACTION |