US20170327640A1 - Monomer for a hardmask composition, hardmask composition comprising the monomer, and method for forming a pattern using the hardmask composition - Google Patents

Monomer for a hardmask composition, hardmask composition comprising the monomer, and method for forming a pattern using the hardmask composition Download PDF

Info

Publication number
US20170327640A1
US20170327640A1 US15/668,159 US201715668159A US2017327640A1 US 20170327640 A1 US20170327640 A1 US 20170327640A1 US 201715668159 A US201715668159 A US 201715668159A US 2017327640 A1 US2017327640 A1 US 2017327640A1
Authority
US
United States
Prior art keywords
group
substituted
monomer
unsubstituted
hardmask
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Abandoned
Application number
US15/668,159
Inventor
Yun-Jun KIM
Hwan-Sung Cheon
Youn-Jin Cho
Yong-Woon YOON
Chung-Heon Lee
Hyo-Young KWON
Yoo-Jeong Choi
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Samsung SDI Co Ltd
Original Assignee
Samsung SDI Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Priority claimed from KR1020110147384A external-priority patent/KR101413071B1/en
Priority claimed from KR1020110147860A external-priority patent/KR101497132B1/en
Application filed by Samsung SDI Co Ltd filed Critical Samsung SDI Co Ltd
Priority to US15/668,159 priority Critical patent/US20170327640A1/en
Publication of US20170327640A1 publication Critical patent/US20170327640A1/en
Abandoned legal-status Critical Current

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C07—ORGANIC CHEMISTRY
    • C07C—ACYCLIC OR CARBOCYCLIC COMPOUNDS
    • C07C39/00—Compounds having at least one hydroxy or O-metal group bound to a carbon atom of a six-membered aromatic ring
    • C07C39/205—Compounds having at least one hydroxy or O-metal group bound to a carbon atom of a six-membered aromatic ring polycyclic, containing only six-membered aromatic rings as cyclic parts with unsaturation outside the rings
    • C07C39/21—Compounds having at least one hydroxy or O-metal group bound to a carbon atom of a six-membered aromatic ring polycyclic, containing only six-membered aromatic rings as cyclic parts with unsaturation outside the rings with at least one hydroxy group on a non-condensed ring
    • C—CHEMISTRY; METALLURGY
    • C07—ORGANIC CHEMISTRY
    • C07C—ACYCLIC OR CARBOCYCLIC COMPOUNDS
    • C07C39/00—Compounds having at least one hydroxy or O-metal group bound to a carbon atom of a six-membered aromatic ring
    • C07C39/205—Compounds having at least one hydroxy or O-metal group bound to a carbon atom of a six-membered aromatic ring polycyclic, containing only six-membered aromatic rings as cyclic parts with unsaturation outside the rings
    • C07C39/225—Compounds having at least one hydroxy or O-metal group bound to a carbon atom of a six-membered aromatic ring polycyclic, containing only six-membered aromatic rings as cyclic parts with unsaturation outside the rings with at least one hydroxy group on a condensed ring system
    • C—CHEMISTRY; METALLURGY
    • C08—ORGANIC MACROMOLECULAR COMPOUNDS; THEIR PREPARATION OR CHEMICAL WORKING-UP; COMPOSITIONS BASED THEREON
    • C08G—MACROMOLECULAR COMPOUNDS OBTAINED OTHERWISE THAN BY REACTIONS ONLY INVOLVING UNSATURATED CARBON-TO-CARBON BONDS
    • C08G65/00—Macromolecular compounds obtained by reactions forming an ether link in the main chain of the macromolecule
    • C08G65/02—Macromolecular compounds obtained by reactions forming an ether link in the main chain of the macromolecule from cyclic ethers by opening of the heterocyclic ring
    • C08G65/26—Macromolecular compounds obtained by reactions forming an ether link in the main chain of the macromolecule from cyclic ethers by opening of the heterocyclic ring from cyclic ethers and other compounds
    • C08G65/2603—Macromolecular compounds obtained by reactions forming an ether link in the main chain of the macromolecule from cyclic ethers by opening of the heterocyclic ring from cyclic ethers and other compounds the other compounds containing oxygen
    • C08G65/2606—Macromolecular compounds obtained by reactions forming an ether link in the main chain of the macromolecule from cyclic ethers by opening of the heterocyclic ring from cyclic ethers and other compounds the other compounds containing oxygen containing hydroxyl groups
    • C08G65/2612—Macromolecular compounds obtained by reactions forming an ether link in the main chain of the macromolecule from cyclic ethers by opening of the heterocyclic ring from cyclic ethers and other compounds the other compounds containing oxygen containing hydroxyl groups containing aromatic or arylaliphatic hydroxyl groups
    • C—CHEMISTRY; METALLURGY
    • C08—ORGANIC MACROMOLECULAR COMPOUNDS; THEIR PREPARATION OR CHEMICAL WORKING-UP; COMPOSITIONS BASED THEREON
    • C08G—MACROMOLECULAR COMPOUNDS OBTAINED OTHERWISE THAN BY REACTIONS ONLY INVOLVING UNSATURATED CARBON-TO-CARBON BONDS
    • C08G65/00—Macromolecular compounds obtained by reactions forming an ether link in the main chain of the macromolecule
    • C08G65/34—Macromolecular compounds obtained by reactions forming an ether link in the main chain of the macromolecule from hydroxy compounds or their metallic derivatives
    • C08G65/38—Macromolecular compounds obtained by reactions forming an ether link in the main chain of the macromolecule from hydroxy compounds or their metallic derivatives derived from phenols
    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F1/00—Originals for photomechanical production of textured or patterned surfaces, e.g., masks, photo-masks, reticles; Mask blanks or pellicles therefor; Containers specially adapted therefor; Preparation thereof
    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/004—Photosensitive materials
    • G03F7/09—Photosensitive materials characterised by structural details, e.g. supports, auxiliary layers
    • G03F7/094—Multilayer resist systems, e.g. planarising layers
    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/20—Exposure; Apparatus therefor
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
    • H01L21/02104—Forming layers
    • H01L21/02107—Forming insulating materials on a substrate
    • H01L21/02109—Forming insulating materials on a substrate characterised by the type of layer, e.g. type of material, porous/non-porous, pre-cursors, mixtures or laminates
    • H01L21/02112—Forming insulating materials on a substrate characterised by the type of layer, e.g. type of material, porous/non-porous, pre-cursors, mixtures or laminates characterised by the material of the layer
    • H01L21/02118—Forming insulating materials on a substrate characterised by the type of layer, e.g. type of material, porous/non-porous, pre-cursors, mixtures or laminates characterised by the material of the layer carbon based polymeric organic or inorganic material, e.g. polyimides, poly cyclobutene or PVC
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
    • H01L21/02104—Forming layers
    • H01L21/02107—Forming insulating materials on a substrate
    • H01L21/02225—Forming insulating materials on a substrate characterised by the process for the formation of the insulating layer
    • H01L21/0226—Forming insulating materials on a substrate characterised by the process for the formation of the insulating layer formation by a deposition process
    • H01L21/02282—Forming insulating materials on a substrate characterised by the process for the formation of the insulating layer formation by a deposition process liquid deposition, e.g. spin-coating, sol-gel techniques, spray coating
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
    • H01L21/027—Making masks on semiconductor bodies for further photolithographic processing not provided for in group H01L21/18 or H01L21/34
    • H01L21/033—Making masks on semiconductor bodies for further photolithographic processing not provided for in group H01L21/18 or H01L21/34 comprising inorganic layers
    • H01L21/0332—Making masks on semiconductor bodies for further photolithographic processing not provided for in group H01L21/18 or H01L21/34 comprising inorganic layers characterised by their composition, e.g. multilayer masks, materials
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
    • H01L21/04—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer
    • H01L21/18—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer the devices having semiconductor bodies comprising elements of Group IV of the Periodic Table or AIIIBV compounds with or without impurities, e.g. doping materials
    • H01L21/30—Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/26
    • H01L21/31—Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/26 to form insulating layers thereon, e.g. for masking or by using photolithographic techniques; After treatment of these layers; Selection of materials for these layers
    • H01L21/3105—After-treatment
    • H01L21/311—Etching the insulating layers by chemical or physical means
    • H01L21/31144—Etching the insulating layers by chemical or physical means using masks

Definitions

  • a monomer for a hardmask composition, a hardmask composition including the monomer, and a method of forming a pattern using the hardmask composition are disclosed.
  • the typical lithographic technique includes providing a material layer on a semiconductor substrate; coating a photoresist layer thereon; exposing and developing the same to provide a photoresist pattern; and etching the material layer using the photoresist pattern as a mask.
  • a layer may be formed between the material layer and the photoresist layer to provide a fine pattern.
  • the hardmask layer plays a role of an intermediate layer for transferring the fine pattern of photoresist to the material layer through the selective etching process. Accordingly, the hardmask layer requires to have characteristics such as chemical resistance, heat resistance, and etch resistance or the like to be tolerated during the multiple etching processes.
  • the spin-on coating method may use the hardmask composition having dissolubility for a solvent.
  • the dissolubility and the characteristics required for the hardmask layer have the relationship against to each other, so a hardmask composition satisfying both is needed.
  • the hardmask layer may be formed on a predetermined pattern by the spin-on coating method.
  • the gap-fill characteristics of filling the hardmask composition in gap between patterns and the planarization characteristics are also required.
  • One embodiment provides a monomer for a hardmask composition that satisfies chemical resistance, heat resistance and etch resistance while ensures dissolubility for a solvent, gap-fill characteristics, and planarization characteristics.
  • Another embodiment provides a hardmask composition including the monomer.
  • Yet another embodiment provides a method of forming a pattern using the hardmask composition.
  • a monomer for a hardmask composition represented by the following Chemical Formula 1 is provided.
  • A, and A′ are the same or different and are a substituted or unsubstituted aromatic group
  • L is a single bond or a substituted or unsubstituted C1 to C6 alkylene group
  • n is an integer ranging from 1 to 5.
  • the aromatic group may include at least one selected from the following Group 1.
  • At least one of A and A′ may include a substituted or unsubstituted polycyclic aromatic group.
  • the monomer for a hardmask composition may be, for example represented by the following Chemical Formula 1a, 1b, or 1c.
  • a 1 to A 4 are each independently a substituted or unsubstituted benzene group, a naphthalene group, a pyrene group, a perylene group, a benzoperylene group, a coronene group, or a combination thereof
  • L 1 to L 3 are each independently a single bond or a substituted or unsubstituted C1 to C6 alkylene group.
  • the monomer may be, for example represented by the following Chemical
  • the monomer may have a molecular weight of about 200 to 3,000.
  • a hardmask composition including the monomer and a solvent is provided.
  • the monomer may be included in an amount of about 0.1 to 30 wt % based on the total amount of the hardmask composition.
  • a method of forming a pattern includes providing a material layer on a substrate, applying the hardmask composition on the material layer, heat-treating the hardmask composition to provide a hardmask layer, forming a silicon-containing thin layer on the hardmask layer, forming a photoresist layer on the silicon-containing thin layer, forming a photoresist pattern by exposing and developing the photoresist layer, exposing and developing the photoresist layer to form a photoresist pattern, selectively removing the silicon-containing thin layer and the hardmask layer using the photoresist pattern to expose a part of the material layer, and etching an exposed part of the material layer.
  • the hardmask composition may be applied using a spin-on coating method.
  • the hardmask layer may be heat-treated at about 100 to 500° C.
  • the hardmask composition may satisfy chemical resistance, heat resistance and etch resistance while ensures dissolubility for a solvent, gap-fill characteristics, and planarization characteristics.
  • substituted refers to one substituted with at least a substituent selected from a halogen (F, Br, Cl or I), a hydroxyl group, an alkoxy group, a nitro group, a cyano group, an amino group, an azido group, an amidino group, a hydrazino group, a hydrazono group, a carbonyl group, a carbamyl group, a thiol group, an ester group, a carboxyl group or a salt thereof, a sulfonic acid group or a salt thereof, a phosphoric acid or a salt thereof, a C1 to C20 alkyl group, a C2 to C20 alkenyl group, a C2 to C20 alkynyl group, a C6 to C30 aryl group, a C7 to C30 arylalkyl group, a C1 to C4 alkoxy
  • hetero refers to one including 1 to 3 heteroatoms selected from N, O, S, and P.
  • the monomer for a hardmask composition may be represented by the following Chemical Formula 1.
  • a and A′ are the same or different and are each independently a substituted or unsubstituted aromatic group.
  • a and A′ may include at least one selected from the following Group 1.
  • L is a linking group of a single bond or a substituted or unsubstituted Cl to C6 alkylene group
  • n is an integer ranging from 1 to 5.
  • At least one of A and A′ may include a substituted or unsubstituted polycyclic aromatic group.
  • the monomer may be, for example represented by the following Chemical Formula 1a, 1b, or 1c.
  • a 1 to A 4 are each independently a substituted or unsubstituted benzene group, a naphthalene group, a pyrene group, a perylene group, a benzoperylene group, a coronene group, or a combination thereof.
  • L 1 to L 3 are each independently a single bond or a substituted or unsubstituted C1 to C6 alkylene group.
  • the monomer may be, for example represented by the following Chemical Formula 1aa, 1bb, 1cc, 1dd, or 1ee.
  • the monomer may have rigid characteristics by the plurality of aromatic rings.
  • the monomer has a hydroxyl group and a hydroxyalkylene group, may be amplifying cross-linked due to the condensation reaction to provide excellent cross-linking characteristics.
  • the monomer may be cross-linked as a polymer having a high molecular weight within a short time during the heat treatment to provide excellent characteristics required for the hardmask layer such as excellent mechanical characteristics, heat resistance, chemical resistance, and etch resistance.
  • the monomer has a high dissolubility for a solvent by including a plurality of hydroxyl groups in the substituent, so as to provide as a solution and spin-coated to form a thin layer.
  • the monomer is spin-on coated on a lower layer having a predetermined pattern to provide excellent gap-fill characteristics to fill gaps between pattern, and planarization characteristics.
  • the monomer may have a molecular weight of about 200 to about 3,000.
  • solubility of the monomer having a high carbon content for a solvent is improved and an improved thin layer may be obtained through spin-on coating.
  • the hardmask composition according to one embodiment includes the monomer and a solvent.
  • the monomer is the same as described above, and one kind of monomer may be used singularly and two or more kinds of monomers may be mixed.
  • the solvent may be anyone having sufficient dissolubility or dispersion for the monomer and may be, for example at least one selected from propyleneglycol, propyleneglycol diacetate, methoxy propanediol, diethyleneglycol, diethyleneglycol butylether, tri(ethyleneglycol)monomethylether, propyleneglycol monomethylether, propyleneglycol monomethylether acetate, cyclohexanone, ethyllactate, gamma-butyrolactone, methylpyrrolidone, and acetylacetone.
  • the monomer may be included in an amount of about 0.1 to about 30 wt % based on the total amount of the hardmask composition. When the monomer is included in the above range, a thickness of a coated thin layer may be obtained.
  • the hardmask composition may further include a surfactant.
  • the surfactant may include, for example, an alkylbenzene sulfonate salt, an alkyl pyridinium salt, polyethylene glycol, or a quaternary ammonium salt, but is not limited thereto.
  • the surfactant may be included in an amount of about 0.001 to 3 parts by weight based on 100 parts by weight of the hardmask composition. Within the amount range, the solubility and the cross-linking may be secured while not changing the optical properties of the hardmask composition.
  • a method of forming a pattern according to one embodiment substrate includes providing a material layer on a substrate, applying a hardmask composition including the monomer and a solvent on the material layer, heat-treating the hardmask composition to provide a hardmask layer, forming a silicon-containing thin layer on the hardmask layer, forming a photoresist layer on the silicon-containing thin layer, forming a photoresist pattern by exposing and developing the photoresist layer, selectively removing the silicon-containing thin layer and the hardmask layer by using the photoresist pattern and exposing a part of the material layer, and etching the exposed part of the material layer.
  • the substrate may be, for example, a silicon wafer, a glass substrate, or a polymer substrate.
  • the material layer is a material to be finally patterned, for example a metal layer such as an aluminum layer and a copper layer, a semiconductor layer such as a silicon layer, or an insulation layer such as a silicon oxide layer and a silicon nitride layer.
  • the material layer may be formed through a method such as a chemical vapor deposition (CVD) process.
  • the hardmask composition may be applied by spin-on coating in a form of a solution.
  • the hardmask composition may be applied at a thickness, for example about 100 ⁇ to 10,000 ⁇ .
  • the heat-treating the hardmask composition may be performed, for example about 100 to 500° C. for about 10 seconds to 10 minutes.
  • the monomer may cause a self cross-linking and/or mutual cross-linking reaction.
  • the silicon-containing thin layer may be made of, for example silicon nitride or silicon oxide.
  • a bottom anti-reflective coating may be formed on the silicon-containing thin layer.
  • the exposure of the photoresist layer may be performed using for example ArF, KrF, or EUV. Also, after the exposure, heat-treating may be performed at about 100 to 500° C.
  • the etching process of the exposed part of the material layer may be performed through a dry etching process using an etching gas, and the etching gas may be, for example CHF 3 , CF 4 , Cl 2 , BCl 3 , and a mixed gas thereof.
  • the etched material layer may be formed in a plurality of pattern, and the plurality of pattern may be a metal pattern, a semiconductor pattern, an insulation pattern, and the like, for example diverse pattern of a semiconductor integrated circuit device.
  • a polymerized product was diluted using methylamylketone and methanol, and a solution of methylamylketone/methanol mixed in a weight ratio of 4/1 and having 15 wt % of a concentration was added thereto to adjust its concentration.
  • This solution was put in a separatory funnel, and n-heptane was added thereto to remove a monomer and a low molecular sieve, obtaining a polymer represented by the following Chemical Formula 4.
  • the polymer had a weight average molecular weight of 12,000 and dispersity of 2.04.
  • a hardmask composition was prepared by dissolving the monomer according to Synthesis Example 1 in a mixed solvent prepared by mixing propyleneglycol monomethylether acetate (PGMEA) and cyclohexanone (7:3 (v/v)) and filtering the mixture.
  • the monomer may be included in a weight of 10.0 wt % or 13.0 wt % based on the total weight of the hardmask composition depending on a desired thickness.
  • a hardmask composition was prepared in accordance with the same procedure as Example 1, except that the monomer obtained from Synthesis Example 2 was used instead of the monomer obtained from Synthesis Example 1.
  • a hardmask composition was prepared in accordance with the same procedure as Example 1, except that the monomer obtained from Synthesis Example 3 was used instead of the monomer obtained from Synthesis Example 1.
  • a hardmask composition was prepared in accordance with the same procedure as Example 1, except that the monomer obtained from Synthesis Example 4 was used instead of the monomer obtained from Synthesis Example 1.
  • a hardmask composition was prepared in accordance with the same procedure as Example 1, except that the monomer obtained from Synthesis Example 5 was used instead of the monomer obtained from Synthesis Example 1.
  • a hardmask composition was prepared in accordance with the same procedure as Example 1, except that the monomer obtained from Comparative Synthesis Example 1 was used instead of the monomer obtained from Synthesis Example 1.
  • a hardmask composition was prepared in accordance with the same procedure as Example 1, except that the monomer obtained from Comparative Synthesis Example 2 was used instead of the monomer obtained from Synthesis Example 1.
  • a hardmask composition was prepared in accordance with the same procedure as Example 1, except that the monomer obtained from Comparative Synthesis Example 3 was used instead of the monomer obtained from Synthesis Example 1.
  • Each hardmask composition including 10.0 wt % of the monomer according to Examples 1 to 5 and Comparative Examples 1 and 2 was spin-on coated on a silicon wafer and then heat-treated on a hot plate at 240° C. for 1 minute to provide a thin layer. Initial thicknesses of the thin layers were measured by a thin layer thickness gauge manufactured by K-MAC.
  • the thin layer was dipped in a mixed solvent of ethyl 3-ethoxypropinonate (EEP) and ethyl lactate (EL) (7:3 (v/v)) as a peeling solution for one minute and measured regarding thickness.
  • EEP ethyl 3-ethoxypropinonate
  • EL ethyl lactate
  • each thin layer formed of the hardmask composition according to Examples 1 to 5 had a less thickness decrease rate than ones formed of the hardmask compositions according to Comparative Examples 1 and 2.
  • the hardmask compositions according to Examples 1 to 5 were sufficiently cross-linked through a heat treatment at a relatively low temperature of 240° C. compared with the ones according to Comparative Examples 1 and 2 and formed a thin layer having high chemical resistance.
  • Each hardmask composition including 10.0 wt % of the monomer according to Examples 1 to 5 and Comparative Examples 1 and 2 was spin-on coated on a silicon wafer and then heat-treated on a hot plate at 240° C. for 1 minute to provide a thin layer. Thicknesses of the thin layers were measured by a thin layer thickness gauge manufactured by K-MAC.
  • the thin layer was heat-treated again at 400° C. for 2 minutes and measured regarding thickness.
  • each thin layer formed of the hardmask compositions according to Examples 1 to 5 had a less thickness decrease rate than the ones formed of the hardmask compositions according to Comparative Examples 1 and 2 during the heat treatment at 400° C.
  • the hardmask compositions according to Examples 1 to 5 were highly cross-linked compared with the ones according to Comparative Examples 1 and 2 and high heat resistance during the heat treatment at a high temperature of 400° C.
  • the hardmask compositions including 13 wt % of the monomer according to Examples 1 to 3 and Comparative Example 1 were spin-on coated on a silicon wafer and then heat-treated on a hot plate at 240° C. for 1 minute to provide a thin layer.
  • the thin layers were measured regarding thicknesses by a thin layer thickness gauge manufactured by K-MAC.
  • the thin layers were dry-etched using a N 2 /O 2 mixed gas for 60 seconds and measured regarding thickness, and its etching rate was calculated from the thickness measurements.
  • the thin layers formed of the hardmask compositions according to Examples 1 to 3 had a lower etching rate than the ones formed of the hardmask compositions according to Comparative Example 1.
  • the thin layers formed of the hardmask compositions according to Examples 1 to 3 were highly cross-linked compared with the one formed of the hardmask composition according to Comparative Example 1 had high etching resistance.
  • Each hardmask composition including 13 wt % of the monomer according to Examples 4 and 5 and Comparative Examples 2 and 3 was spin-on coated on a silicon wafer and then heat-treated on a hot plate at 240° C. for 1 minute to provide a thin layer. Thicknesses of the thin layers were measured by a thin layer thickness gauge manufactured by K-MAC.
  • the thin layers were dry-etched for 60 seconds using a N 2 /O 2 mixed gas and measured regarding thickness.
  • the thin layers were dry-etched for 100 seconds using a CFx mixed gas and measured regarding thickness.
  • the thin layers formed of the hardmask compositions according to Examples 4 and 5 had a lower etching rate than the ones formed of the hardmask compositions according to Comparative Examples 2 and 3.
  • the thin layers formed of the hardmask compositions according to Examples 4 and 5 had higher etching resistance than the ones formed of the hardmask compositions according to Comparative Examples 2 and 3.
  • a 3,000 ⁇ -thick silicon oxide SiO 2 layer was formed on a silicon wafer in a chemical vapor deposition method.
  • the hardmask compositions including 13.0 wt % of a monomer or a polymer according to Examples 1 to 5 and Comparative Examples 1 to 3 were respectively coated on the silicon oxide layer in a spin-on coating method and heat-treated on a hot plate at 240° C. for 1 minute, forming a hardmask layer.
  • a nitride silicon (SiN) layer was formed on the hardmask layer in a chemical vapor deposition method.
  • a photoresist for KrF was coated, heat-treated at 110° C.
  • TMAH aqueous solution tetramethylammonium hydroxide (a 2.38 wt % TMAH aqueous solution).
  • the patterned photoresist as a mask and a CHF 3 /CF 4 mixed gas were used to dry-etch the silicon nitride layer.
  • the patterned silicon nitride layer as a mask and a N 2 /O 2 mixed gas were used to dry-etch a hardmask layer.
  • the patterned hardmask layer as a mask and a CHF 3 /CF 4 mixed gas were used to dry-etch a silicon oxide layer, and an organic material remaining after the dry etching was all removed using O 2 gas.
  • the hardmask layer and the silicon oxide layer were examined about the cross sections using a scanning electronic microscope (SEM). The results are shown in Table 5.
  • the hardmask layers formed of the hardmask compositions according to Examples 1 to 5 and the silicon oxide layers beneath them were all vertically patterned, while the hardmask layers formed of the hardmask compositions according to Comparative Examples 1 to 3 were not vertically patterned but tapered.
  • the hardmask layers formed of the hardmask compositions according to Examples 1 to 5 had excellent etching resistance and were well patterned compared with the ones formed of the hardmask compositions according to Comparative Examples 1 to 3, and thus, the underlayer beneath the hardmask layers were well patterned.
  • the hardmask composition including 13.0 wt % of a monomer or a polymer according to Examples 4 and 5 and Comparative Examples 2 and 3 were spin-on coated on a patterned silicon wafer and heat-treated at 240° C. for 60 seconds and then, examined regarding gap-filling and planarization characteristics using a FE-SEM equipment.
  • the gap-filling characteristics were determined by observing the cross sectional surface of pattern using a scanning electron microscope (SEM) and counting void, and the planarization characteristics were calculated according to the following Equation 1 after measuring the thickness of hardmask layer from the image of pattern cross-sectional surface observed from SEM. Since the planarization characteristics are more excellent, as a difference between h 1 and h 2 is smaller, the planarization characteristics are better as the number is smaller.
  • SEM scanning electron microscope

Landscapes

  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Organic Chemistry (AREA)
  • General Physics & Mathematics (AREA)
  • Physics & Mathematics (AREA)
  • Manufacturing & Machinery (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • Polymers & Plastics (AREA)
  • Medicinal Chemistry (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Health & Medical Sciences (AREA)
  • Inorganic Chemistry (AREA)
  • Architecture (AREA)
  • Structural Engineering (AREA)
  • Addition Polymer Or Copolymer, Post-Treatments, Or Chemical Modifications (AREA)
  • Photosensitive Polymer And Photoresist Processing (AREA)
  • Polyethers (AREA)
  • Drying Of Semiconductors (AREA)
  • Formation Of Insulating Films (AREA)
  • Exposure Of Semiconductors, Excluding Electron Or Ion Beam Exposure (AREA)

Abstract

Disclosed are a monomer for a hardmask composition represented by the following Chemical Formula 1, a hardmask composition including the monomer, and a method of forming a pattern using the same.
Figure US20170327640A1-20171116-C00001
In Chemical Formula 1, A, A′, L and n are the same as in the detailed description.

Description

    CROSS REFERENCE TO RELATED APPLICATION
  • This is a continuaation application based on pending application Ser. No. 14/364,829, filed Jun. 12, 2014, the entire contents of which is hereby incorporated by reference.
    • BACKGROUND OF THE INVENTION (a) Field of the Invention
  • A monomer for a hardmask composition, a hardmask composition including the monomer, and a method of forming a pattern using the hardmask composition are disclosed.
    • (b) Description of the Related Art
  • Recently, the semiconductor industry has developed to an ultra-fine technique having a pattern of several to several tens nanometer size. Such ultra-fine technique essentially needs effective lithographic techniques. The typical lithographic technique includes providing a material layer on a semiconductor substrate; coating a photoresist layer thereon; exposing and developing the same to provide a photoresist pattern; and etching the material layer using the photoresist pattern as a mask.
  • Nowadays, according to small-sizing the pattern to be formed, it is difficult to provide a fine pattern having an excellent profile by only above-mentioned typical lithographic technique. Accordingly, a layer, called a hardmask layer, may be formed between the material layer and the photoresist layer to provide a fine pattern.
  • The hardmask layer plays a role of an intermediate layer for transferring the fine pattern of photoresist to the material layer through the selective etching process. Accordingly, the hardmask layer requires to have characteristics such as chemical resistance, heat resistance, and etch resistance or the like to be tolerated during the multiple etching processes.
  • On the other hand, it has been recently suggested to form a hardmask layer by a spin-on coating method instead of the chemical vapor deposition. The spin-on coating method may use the hardmask composition having dissolubility for a solvent.
  • However, the dissolubility and the characteristics required for the hardmask layer have the relationship against to each other, so a hardmask composition satisfying both is needed.
  • In addition, according to widening the application range of hardmask layer, the hardmask layer may be formed on a predetermined pattern by the spin-on coating method. In this case, the gap-fill characteristics of filling the hardmask composition in gap between patterns and the planarization characteristics are also required.
    • SUMMARY OF THE INVENTION
  • One embodiment provides a monomer for a hardmask composition that satisfies chemical resistance, heat resistance and etch resistance while ensures dissolubility for a solvent, gap-fill characteristics, and planarization characteristics.
  • Another embodiment provides a hardmask composition including the monomer.
  • Yet another embodiment provides a method of forming a pattern using the hardmask composition.
  • According to one embodiment, a monomer for a hardmask composition represented by the following Chemical Formula 1 is provided.
  • Figure US20170327640A1-20171116-C00002
  • In Chemical Formula 1,
  • A, and A′ are the same or different and are a substituted or unsubstituted aromatic group,
  • L is a single bond or a substituted or unsubstituted C1 to C6 alkylene group, and
  • n is an integer ranging from 1 to 5.
  • The aromatic group may include at least one selected from the following Group 1.
    • [Group 1]
  • Figure US20170327640A1-20171116-C00003
    Figure US20170327640A1-20171116-C00004
  • At least one of A and A′ may include a substituted or unsubstituted polycyclic aromatic group.
  • The monomer for a hardmask composition may be, for example represented by the following Chemical Formula 1a, 1b, or 1c.
  • Figure US20170327640A1-20171116-C00005
  • In Chemical Formula 1a, 1b, or 1c,
  • A1 to A4 are each independently a substituted or unsubstituted benzene group, a naphthalene group, a pyrene group, a perylene group, a benzoperylene group, a coronene group, or a combination thereof
  • L1 to L3 are each independently a single bond or a substituted or unsubstituted C1 to C6 alkylene group.
  • The monomer may be, for example represented by the following Chemical
  • Formula 1aa, 1bb, 1cc, 1dd, or 1ee.
  • Figure US20170327640A1-20171116-C00006
  • The monomer may have a molecular weight of about 200 to 3,000.
  • According to another embodiment, a hardmask composition including the monomer and a solvent is provided.
  • The monomer may be included in an amount of about 0.1 to 30 wt % based on the total amount of the hardmask composition.
  • According to yet another embodiment, provided is a method of forming a pattern that includes providing a material layer on a substrate, applying the hardmask composition on the material layer, heat-treating the hardmask composition to provide a hardmask layer, forming a silicon-containing thin layer on the hardmask layer, forming a photoresist layer on the silicon-containing thin layer, forming a photoresist pattern by exposing and developing the photoresist layer, exposing and developing the photoresist layer to form a photoresist pattern, selectively removing the silicon-containing thin layer and the hardmask layer using the photoresist pattern to expose a part of the material layer, and etching an exposed part of the material layer.
  • The hardmask composition may be applied using a spin-on coating method.
  • The hardmask layer may be heat-treated at about 100 to 500° C.
  • According to the embodiment of the present invention, the hardmask composition may satisfy chemical resistance, heat resistance and etch resistance while ensures dissolubility for a solvent, gap-fill characteristics, and planarization characteristics.
    • DETAILED DESCRIPTION
  • Exemplary embodiments of the present invention will hereinafter be described in detail. However, these embodiments are only exemplary and do not limit the present invention. As those skilled in the art would realize, the described embodiments may be modified in various different ways, all without departing from the spirit or scope of the present invention.
  • As used herein, when a definition is not otherwise provided, the term ‘substituted’ refers to one substituted with at least a substituent selected from a halogen (F, Br, Cl or I), a hydroxyl group, an alkoxy group, a nitro group, a cyano group, an amino group, an azido group, an amidino group, a hydrazino group, a hydrazono group, a carbonyl group, a carbamyl group, a thiol group, an ester group, a carboxyl group or a salt thereof, a sulfonic acid group or a salt thereof, a phosphoric acid or a salt thereof, a C1 to C20 alkyl group, a C2 to C20 alkenyl group, a C2 to C20 alkynyl group, a C6 to C30 aryl group, a C7 to C30 arylalkyl group, a C1 to C4 alkoxy group, a C1 to C20 heteroalkyl group, a C3 to C20 heteroarylalkyl group, a C3 to C30 cycloalkyl group, a C3 to C15 cycloalkenyl group, a C6 to C15 cycloalkynyl group, a C2 to C20 heterocycloalkyl group, and a combination thereof, instead of hydrogen of a compound.
  • As used herein, when a definition is not otherwise provided, the prefix “hetero” refers to one including 1 to 3 heteroatoms selected from N, O, S, and P.
  • Hereinafter, a monomer for a hardmask composition according to one embodiment is described.
  • The monomer for a hardmask composition according to one embodiment may be represented by the following Chemical Formula 1.
  • Figure US20170327640A1-20171116-C00007
  • In Chemical Formula 1,
  • A and A′ are the same or different and are each independently a substituted or unsubstituted aromatic group. A and A′ may include at least one selected from the following Group 1.
    • [Group 1]
  • Figure US20170327640A1-20171116-C00008
    Figure US20170327640A1-20171116-C00009
  • L is a linking group of a single bond or a substituted or unsubstituted Cl to C6 alkylene group, and
  • n is an integer ranging from 1 to 5.
  • At least one of A and A′ may include a substituted or unsubstituted polycyclic aromatic group.
  • The monomer may be, for example represented by the following Chemical Formula 1a, 1b, or 1c.
  • Figure US20170327640A1-20171116-C00010
  • In Chemical Formula 1a, 1b, or 1c,
  • A1 to A4 are each independently a substituted or unsubstituted benzene group, a naphthalene group, a pyrene group, a perylene group, a benzoperylene group, a coronene group, or a combination thereof.
  • L1 to L3 are each independently a single bond or a substituted or unsubstituted C1 to C6 alkylene group.
  • The monomer may be, for example represented by the following Chemical Formula 1aa, 1bb, 1cc, 1dd, or 1ee.
  • Figure US20170327640A1-20171116-C00011
  • The monomer may have rigid characteristics by the plurality of aromatic rings.
  • Particularly, the monomer has a hydroxyl group and a hydroxyalkylene group, may be amplifying cross-linked due to the condensation reaction to provide excellent cross-linking characteristics.
  • Accordingly, the monomer may be cross-linked as a polymer having a high molecular weight within a short time during the heat treatment to provide excellent characteristics required for the hardmask layer such as excellent mechanical characteristics, heat resistance, chemical resistance, and etch resistance.
  • In addition, the monomer has a high dissolubility for a solvent by including a plurality of hydroxyl groups in the substituent, so as to provide as a solution and spin-coated to form a thin layer.
  • The monomer is spin-on coated on a lower layer having a predetermined pattern to provide excellent gap-fill characteristics to fill gaps between pattern, and planarization characteristics.
  • The monomer may have a molecular weight of about 200 to about 3,000. When the monomer has a molecular weight within the above range, solubility of the monomer having a high carbon content for a solvent is improved and an improved thin layer may be obtained through spin-on coating.
  • Hereinafter, a hardmask composition according to one embodiment is described.
  • The hardmask composition according to one embodiment includes the monomer and a solvent.
  • The monomer is the same as described above, and one kind of monomer may be used singularly and two or more kinds of monomers may be mixed.
  • The solvent may be anyone having sufficient dissolubility or dispersion for the monomer and may be, for example at least one selected from propyleneglycol, propyleneglycol diacetate, methoxy propanediol, diethyleneglycol, diethyleneglycol butylether, tri(ethyleneglycol)monomethylether, propyleneglycol monomethylether, propyleneglycol monomethylether acetate, cyclohexanone, ethyllactate, gamma-butyrolactone, methylpyrrolidone, and acetylacetone.
  • The monomer may be included in an amount of about 0.1 to about 30 wt % based on the total amount of the hardmask composition. When the monomer is included in the above range, a thickness of a coated thin layer may be obtained.
  • The hardmask composition may further include a surfactant.
  • The surfactant may include, for example, an alkylbenzene sulfonate salt, an alkyl pyridinium salt, polyethylene glycol, or a quaternary ammonium salt, but is not limited thereto.
  • The surfactant may be included in an amount of about 0.001 to 3 parts by weight based on 100 parts by weight of the hardmask composition. Within the amount range, the solubility and the cross-linking may be secured while not changing the optical properties of the hardmask composition.
  • Hereafter, a method for forming patterns by using the hardmask composition is described.
  • A method of forming a pattern according to one embodiment substrate includes providing a material layer on a substrate, applying a hardmask composition including the monomer and a solvent on the material layer, heat-treating the hardmask composition to provide a hardmask layer, forming a silicon-containing thin layer on the hardmask layer, forming a photoresist layer on the silicon-containing thin layer, forming a photoresist pattern by exposing and developing the photoresist layer, selectively removing the silicon-containing thin layer and the hardmask layer by using the photoresist pattern and exposing a part of the material layer, and etching the exposed part of the material layer.
  • The substrate may be, for example, a silicon wafer, a glass substrate, or a polymer substrate.
  • The material layer is a material to be finally patterned, for example a metal layer such as an aluminum layer and a copper layer, a semiconductor layer such as a silicon layer, or an insulation layer such as a silicon oxide layer and a silicon nitride layer. The material layer may be formed through a method such as a chemical vapor deposition (CVD) process.
  • The hardmask composition may be applied by spin-on coating in a form of a solution. Herein, the hardmask composition may be applied at a thickness, for example about 100 Å to 10,000 Å.
  • The heat-treating the hardmask composition may be performed, for example about 100 to 500° C. for about 10 seconds to 10 minutes. During heat-treating, the monomer may cause a self cross-linking and/or mutual cross-linking reaction.
  • The silicon-containing thin layer may be made of, for example silicon nitride or silicon oxide.
  • A bottom anti-reflective coating (BARC) may be formed on the silicon-containing thin layer.
  • The exposure of the photoresist layer may be performed using for example ArF, KrF, or EUV. Also, after the exposure, heat-treating may be performed at about 100 to 500° C.
  • The etching process of the exposed part of the material layer may be performed through a dry etching process using an etching gas, and the etching gas may be, for example CHF3, CF4, Cl2, BCl3, and a mixed gas thereof.
  • The etched material layer may be formed in a plurality of pattern, and the plurality of pattern may be a metal pattern, a semiconductor pattern, an insulation pattern, and the like, for example diverse pattern of a semiconductor integrated circuit device.
  • Hereinafter, the present invention is illustrated in more detail with reference to examples. However, they are exemplary embodiments of the present invention and are not limiting.
    • Synthesis of Monomer SYNTHESIS EXAMPLE 1 First Step: Friedel-Craft Acylation Reaction
  • 50.0 g (0.166 mol) of coronene, 28.4 g (0.1666 mol) of 4-methoxybenzoylchloride, and 235 g of 1,2-dichloroethane were put in a flask, preparing a solution. Then, 22.2 g (0.166 mol) of aluminum chloride was slowly added to the solution at room temperature. The mixture was heated up to 60° C. and then, agitated for 8 hours. When the reaction was complete, methanol was added to the agitated solution. Then, a precipitate produced therein was filtrated, obtaining 4-methoxybenzoyl coronene.
    • Second Step: Demethylation
  • 50.0 g (0.115 mol) of the 4-methoxybenzoyl coronene obtained in the first step, 58.2 g (0.288 mol) of 1-dodecanethiol, 19.4 g (0.345 mol) of potassium hydroxide, and 191 g of N,N-dimethylformamide was put in a flask, and the mixture was agitated for 120° C. for 8 hours. The agitated mixture was cooled down, neutralized with a 10% hydrogen chloride solution into about pH 7, and extracted with ethyl acetate, obtaining 4-hydroxybenzoyl coronene.
    • Third Step: Reduction Reaction
  • 25.0 g (0.0595 mol) of the 4-hydroxybenzoyl coronene obtained in the second step and 145 g of tetrahydrofuran were put in a flask, preparing a solution. Then, 11.3 g (0.297 mol) of a sodium borohydride aqueous solution was slowly added to the solution, and the mixture was agitated at room temperature for 24 hours. When the reaction was complete, the agitated mixture was neutralized with a 10% hydrogen chloride solution into about pH 7 and extracted with ethyl acetate, obtaining a monomer represented by the following Chemical Formula 1 aa.
  • Figure US20170327640A1-20171116-C00012
    • SYNTHESIS EXAMPLE 2 First Step: Friedel-Craft Acylation Reaction
  • 50.0 g (0.166 mol) of coronene, 56.8 g (0.333 mol) of 4-methoxybenzoylchloride, and 353 g of 1,2-dichloroethane were put in a flask, preparing a solution. Then, 44.4 g (0.333 mol) of aluminum chloride was slowly added to the solution at room temperature, and the mixture was heated up to 60° C. and agitated for 8 hours. When the reaction was complete, methanol was added to the solution. Then, a precipitate produced therein was filtrated, obtaining double substituted 4-methoxybenzoyl coronene.
    • Second Step: Demethylation
  • 50.0 g (0.880 mol) of the double substituted 4-methoxybenzoyl coronene obtained in the first step, 89.0 g (0.440 mol) of 1-dodecanethiol, 29.6 g (0.528 mol) of potassium hydroxide, and 253 g of N,N-dimethylformamide were put in a flask. The mixture was agitated at 120° C. for 8 hours. Then, the agitated mixture was cooled down, neutralized with a 10% hydrogen chloride solution into about pH 7, and extracted with ethyl acetate, obtaining double substituted 4-hydroxybenzoyl coronene.
  • Third Step: Reduction reaction
  • 25.0 g (0.0463 mol) of the double substituted 4-hydroxybenzoyl coronene obtained in the second step and 170 g of tetrahydrofuran were put in a flask, preparing a solution. Then, 17.5 g (0.463 mol) of a sodium borohydride aqueous solution was slowly added to the solution. The mixture was agitated at room temperature for 24 hours. When the reaction was complete, the agitated mixture was neutralized with a 10% hydrogen chloride solution into about pH 7 and extracted with ethyl acetate, obtaining a monomer represented by the following Chemical Formula 1bb.
  • Figure US20170327640A1-20171116-C00013
    • SYNTHESIS EXAMPLE 3 First Step: Friedel-Craft Acylation Reaction
  • 50.0 g (0.166 mol) of coronene, 85.2 g (0.499 mol) of 4-methoxybenzoylchloride, and 471 g of 1,2-dichloroethane were put in a flask, preparing a solution. Then, 66.6 g (0.499 mol) of aluminum chloride was slowly added to the solution at room temperature. The mixture was heated up to 60° C. and agitated for 8 hours. When the reaction was complete, methanol was added to the solution. Then, a precipitate produced therein was filtrated triple substituted 4-methoxybenzoyl coronene.
    • Second Step: Demethylation
  • 50.0 g (0.0712 mol) of the triple substituted 4-methoxybenzoyl coronene flask obtained in the first step, 108.0 g (0.534 mol) of 1-dodecanethiol, 35.9 g (0.640 mol) of potassium hydroxide, and 291 g of N,N-dimethylformamide were put in a flask. The mixture was agitated at 120° C. and agitated for 8 hours. Then, the agitated mixture was cooled down, neutralized with a 10% hydrogen chloride solution into about pH 7, and extracted with ethyl acetate, obtaining triple substituted 4-hydroxybenzoyl coronene.
    • Third Step: Reduction Reaction
  • 25.0 g (0.0378 mol) of the triple substituted 4-hydroxybenzoyl coronene obtained in the second step and 186 g of tetrahydrofuran were put in a flask, preparing a solution. Then, 21.5 g (0.567 mol) of a sodium borohydride aqueous solution was slowly added to the solution. The mixture was agitated at room temperature for 24 hours. When the reaction was complete, the agitated mixture was neutralized into about pH 7 with a 10% hydrogen chloride solution, and extracted with ethyl acetate, obtaining a monomer represented by the following Chemical Formula 1cc.
  • Figure US20170327640A1-20171116-C00014
    • SYNTHESIS EXAMPLE 4 First Step: Friedel-Craft Acylation Reaction
  • 20.6 g (0.101 mol) of terephthaloyl chloride, 47.0 g (0.203 mol) of 1-methoxypyrene, and 221 g of 1,2-dichloroethane were put in a flask, preparing a solution. Then, 27 g (0.203 mol) of aluminum chloride was slowly added to the solution at room temperature. The mixture was heated up to 60° C. and agitated for 8 hours. When the reaction was complete, methanol was added to the solution. Then, a precipitate produced therein was filtrated, obtaining bis(methoxypyrenyl carbonyl)benzene.
    • Second Step: Demethylation
  • 53.5 g (0.0900 mol) of bis(methoxypyrenyl carbonyl)benzene obtained in the first step, 91.1 g (0.450 mol) of 1-dodecanethiol, 30.3 g (0.540 mol) of potassium hydroxide, and 262 g of N,N-dimethylformamide were put in a flask and then, agitated at 120° C. for 8 hours. Then, the agitated mixture was cooled down and neutralized into about pH 7 with a 5% hydrogen chloride solution. Then, a precipitate produced therein was filtrated, obtaining bis(hydroxypyrenyl carbonyl)benzene.
    • Third Step: Reduction Reaction
  • 24.0 g (0.0424 mol) of bis(hydroxypyrenyl carbonyl)benzene obtained in the second step and 160 g of tetrahydrofuran were put in a flask, obtaining a solution. Then, 16.0 g (0.424 mol) of a sodium borohydride aqueous solution was slowly added to the solution, and the mixture was agitated at room temperature for 24 hours. When the reaction was complete, the agitated mixture was neutralized into about pH 7 with a 5% hydrogen chloride solution and extracted with ethyl acetate, obtaining a monomer represented by the following Chemical Formula 1dd.
  • Figure US20170327640A1-20171116-C00015
    • SYNTHESIS EXAMPLE 5 First Step: Friedel-Craft Acylation Reaction
  • 20.0 g (0.0985 mol) of isophthaloyl chloride, 45.8 g (0.197 mol) of 1-methoxypyrene, and 215 g of 1,2-dichloroethane were put in a flask, preparing a solution. Then, 26.3 g (0.197 mol) of aluminum chloride was slowly added to the solution at room temperature, and the mixture was heated up to 60° C. for 8 hours. When the reaction was complete, methanol was added to the agitated solution. Then, a precipitate produced therein was filtrated, obtaining bis(methoxypyrenyl carbonyl)benzene.
    • Second Step: Demethylation
  • 50.0 g (0.0840 mol) of the bis(methoxypyrenyl carbonyl)benzene obtained in the first step, 85.1 g (0.420 mol) of 1-dodecanethiol, 28.3 g (0.504 mol) of potassium hydroxide, and 245 g of N,N-dimethylformamide were put in a flask and agitated at 120° C. for 8 hours. The agitated mixture was cooled down and neutralized into about pH 7 with a 5% hydrogen chloride solution. Then, a precipitate produced therein was filtrated, obtaining bis(hydroxypyrenyl carbonyl)benzene.
    • Third Step: Reduction Reaction
  • 24.0 g (0.0424 mol) of the bis(hydroxypyrenyl carbonyl)benzene obtained in the second step and 160 g of tetrahydrofuran were put in a flask, preparing a solution. Then, 16.0 g (0.424 mol) of a sodium borohydride aqueous solution was slowly added to the solution, and the mixture was agitated at room temperature for 24 hours. When the reaction was complete, the agitated mixture was neutralized into about pH 7 with a 5% hydrogen chloride solution and extracted with ethyl acetate, obtaining a monomer represented by the following Chemical Formula 1 ee.
  • Figure US20170327640A1-20171116-C00016
    • COMPARATIVE SYNTHESIS EXAMPLE 1 First Step: Friedel-Craft Acylation Reaction
  • 50.0 g (0.166 mol) of coronene, 46.8 g (0.333 mol) of benzoylchloride, and 330 g of 1,2-dichloroethane were put in a flask, preparing a solution. Then, 44.4 g (0.333 mol) of aluminum chloride was slowly added to the solution at room temperature, and the mixture was heated up to 60° C. and agitated for 8 hours. When the reaction was complete, methanol was added to the solution. Then, a precipitate produced therein was filtrated, obtaining double substituted benzoyl coronene.
    • Second Step: Reduction Reaction
  • 25.0 g (0.0492 mol) of the double substituted benzoyl coronene obtained in the first step and 174 g of tetrahydrofuran were put in a flask, preparing a solution. Then, 18.6 g (0.492 mol) of a sodium borohydride aqueous solution was slowly added to the solution, and the mixture was agitated at room temperature for 24 hours. When the reaction was complete, the agitated mixture was neutralized into about pH 7 with a 10% hydrogen chloride solution and extracted with ethyl acetate, obtaining a monomer represented by the following Chemical Formula 2.
  • Figure US20170327640A1-20171116-C00017
    • COMPARATIVE SYNTHESIS EXAMPLE 2 First Step: Friedel-Craft Acylation Reaction
  • 13.9 g (0.0989 mol) of benzoyl chloride, 10.0 g (0.0495 mol) of pyrene, and 87 g of 1,2-dichloroethane were put in a flask. Then, 13.2 g (0.0989 mol) of aluminum chloride was slowly added to the solution at room temperature, and the mixture was heated up to 60° C. and agitated for 8 hours. When the reaction was complete, methanol was added to the agitated mixture. Then, a precipitate produced therein was filtrated, obtaining dibenzoyl pyrene.
    • Second Step: Reduction Reaction
  • 5.00 g (0.0122 mol) of dibenzoyl pyrene and 57 g of tetrahydrofuran were put in a flask. Then, 4.60 g (0.122 mol) of a sodium borohydride aqueous solution was slowly added to the solution. The mixture was agitated at room temperature for 24 hours. When the reaction was complete, the agitated mixture was neutralized into about pH 7 with a 5% hydrogen chloride solution and extracted with ethylacetate, obtaining a monomer represented by the following Chemical Formula 3.
  • Figure US20170327640A1-20171116-C00018
    • COMPARATIVE SYNTHESIS EXAMPLE 3
  • 8.75 g (0.05 mol) of a, a′-dichloro-p-xylene, 26.66 g of aluminum chloride, and 200 g of γ-butyrolactone were put in a flask. Then, a solution prepared by dissolving 35.03 g (0.10 mol) of 4,4′-(9-fluorenylidene)diphenol in 200 g of γ-butyrolactone was slowly added to the solution. The mixture was agitated at 120 ° C. for 12 hours. After the polymerization, acid was removed from the agitated mixture using water, and the remnant was concentrated. Then, a polymerized product was diluted using methylamylketone and methanol, and a solution of methylamylketone/methanol mixed in a weight ratio of 4/1 and having 15 wt % of a concentration was added thereto to adjust its concentration. This solution was put in a separatory funnel, and n-heptane was added thereto to remove a monomer and a low molecular sieve, obtaining a polymer represented by the following Chemical Formula 4.
  • Figure US20170327640A1-20171116-C00019
  • The polymer had a weight average molecular weight of 12,000 and dispersity of 2.04.
    • Preparation of Hardmask Composition EXAMPLE 1
  • A hardmask composition was prepared by dissolving the monomer according to Synthesis Example 1 in a mixed solvent prepared by mixing propyleneglycol monomethylether acetate (PGMEA) and cyclohexanone (7:3 (v/v)) and filtering the mixture. The monomer may be included in a weight of 10.0 wt % or 13.0 wt % based on the total weight of the hardmask composition depending on a desired thickness.
    • EXAMPLE 2
  • A hardmask composition was prepared in accordance with the same procedure as Example 1, except that the monomer obtained from Synthesis Example 2 was used instead of the monomer obtained from Synthesis Example 1.
    • EXAMPLE 3
  • A hardmask composition was prepared in accordance with the same procedure as Example 1, except that the monomer obtained from Synthesis Example 3 was used instead of the monomer obtained from Synthesis Example 1.
    • EXAMPLE 4
  • A hardmask composition was prepared in accordance with the same procedure as Example 1, except that the monomer obtained from Synthesis Example 4 was used instead of the monomer obtained from Synthesis Example 1.
    • EXAMPLE 5
  • A hardmask composition was prepared in accordance with the same procedure as Example 1, except that the monomer obtained from Synthesis Example 5 was used instead of the monomer obtained from Synthesis Example 1.
    • COMPARATIVE EXAMPLE 1
  • A hardmask composition was prepared in accordance with the same procedure as Example 1, except that the monomer obtained from Comparative Synthesis Example 1 was used instead of the monomer obtained from Synthesis Example 1.
    • COMPARATIVE EXAMPLE 2
  • A hardmask composition was prepared in accordance with the same procedure as Example 1, except that the monomer obtained from Comparative Synthesis Example 2 was used instead of the monomer obtained from Synthesis Example 1.
    • COMPARATIVE EXAMPLE 3
  • A hardmask composition was prepared in accordance with the same procedure as Example 1, except that the monomer obtained from Comparative Synthesis Example 3 was used instead of the monomer obtained from Synthesis Example 1.
    • Evaluation 1: Chemical Resistance
  • Each hardmask composition including 10.0 wt % of the monomer according to Examples 1 to 5 and Comparative Examples 1 and 2 was spin-on coated on a silicon wafer and then heat-treated on a hot plate at 240° C. for 1 minute to provide a thin layer. Initial thicknesses of the thin layers were measured by a thin layer thickness gauge manufactured by K-MAC.
  • Then, the thin layer was dipped in a mixed solvent of ethyl 3-ethoxypropinonate (EEP) and ethyl lactate (EL) (7:3 (v/v)) as a peeling solution for one minute and measured regarding thickness.
  • The results are shown in Table 1.
  • TABLE 1
    Decrease
    Initial Thickness of ratio of
    thickness of thin layer thickness of
    thin layer after dipping thin layer
    (Å) (Å) (%)
    Example 1 2,342 2,125 −9.27
    Example 2 2,733 2,725 −0.29
    Example 3 2,940 2,937 −0.10
    Example 4 2,663 2,660 −0.11
    Example 5 2,996 2,972 −0.80
    Comparative 2,042 342 −83.3
    Example 1
    Comparative 2,490 123 −95.1
    Example 2
  • Referring to Table 1, each thin layer formed of the hardmask composition according to Examples 1 to 5 had a less thickness decrease rate than ones formed of the hardmask compositions according to Comparative Examples 1 and 2.
  • Accordingly, the hardmask compositions according to Examples 1 to 5 were sufficiently cross-linked through a heat treatment at a relatively low temperature of 240° C. compared with the ones according to Comparative Examples 1 and 2 and formed a thin layer having high chemical resistance.
    • Evaluation 2: Heat Resistance
  • Each hardmask composition including 10.0 wt % of the monomer according to Examples 1 to 5 and Comparative Examples 1 and 2 was spin-on coated on a silicon wafer and then heat-treated on a hot plate at 240° C. for 1 minute to provide a thin layer. Thicknesses of the thin layers were measured by a thin layer thickness gauge manufactured by K-MAC.
  • Then, the thin layer was heat-treated again at 400° C. for 2 minutes and measured regarding thickness.
  • The results are shown in Table 2.
  • TABLE 2
    Thickness of Thickness of Decrease
    thin layer thin layer ratio of
    (Å) after (Å) after thickness
    240° C. heat 400° C. heat of thin
    treating treating layer (%)
    Example 1 2,338 2,050 −12.31
    Example 2 2,736 2,518 −7.97
    Example 3 2,948 2,813 −4.58
    Example 4 2,713 2,408 −11.2
    Example 5 3,053 2,767 −9.37
    Comparative 2,045 1,348 −34.08
    Example 1
    Comparative 2,479 310 −87.5
    Example 2
  • Referring to Table 2, each thin layer formed of the hardmask compositions according to Examples 1 to 5 had a less thickness decrease rate than the ones formed of the hardmask compositions according to Comparative Examples 1 and 2 during the heat treatment at 400° C.
  • Accordingly, the hardmask compositions according to Examples 1 to 5 were highly cross-linked compared with the ones according to Comparative Examples 1 and 2 and high heat resistance during the heat treatment at a high temperature of 400° C.
    • Evaluation 3-1: Etching Resistance (1)
  • The hardmask compositions including 13 wt % of the monomer according to Examples 1 to 3 and Comparative Example 1 were spin-on coated on a silicon wafer and then heat-treated on a hot plate at 240° C. for 1 minute to provide a thin layer. The thin layers were measured regarding thicknesses by a thin layer thickness gauge manufactured by K-MAC.
  • Then, the thin layers were dry-etched using a N2/O2 mixed gas for 60 seconds and measured regarding thickness, and its etching rate was calculated from the thickness measurements.
  • The results are shown in Table 3.
  • TABLE 3
    Initial Thickness
    thickness of thin of thin layer etching
    layer (Å) (Å) after etching rate (Å/s)
    Example 1 4,427 3,012 23.6
    Example 2 4,532 3,117 23.6
    Example 3 4,708 3,322 23.1
    Comparative 4,112 2,535 26.3
    Example 1
    *etching rate (bulk etching rate, BER)
    :(Initial thickness of thin layer − thickness of thin layer after etching)/etching time (second)
  • Referring to Table 3, the thin layers formed of the hardmask compositions according to Examples 1 to 3 had a lower etching rate than the ones formed of the hardmask compositions according to Comparative Example 1.
  • Accordingly, the thin layers formed of the hardmask compositions according to Examples 1 to 3 were highly cross-linked compared with the one formed of the hardmask composition according to Comparative Example 1 had high etching resistance.
    • Evaluation 3-2: Etching Resistance 2
  • Each hardmask composition including 13 wt % of the monomer according to Examples 4 and 5 and Comparative Examples 2 and 3 was spin-on coated on a silicon wafer and then heat-treated on a hot plate at 240° C. for 1 minute to provide a thin layer. Thicknesses of the thin layers were measured by a thin layer thickness gauge manufactured by K-MAC.
  • Then, the thin layers were dry-etched for 60 seconds using a N2/O2 mixed gas and measured regarding thickness. In addition, the thin layers were dry-etched for 100 seconds using a CFx mixed gas and measured regarding thickness.
  • The results are shown in Table 4.
  • TABLE 4
    N2/O2 CFx
    Initial Thickness Initial Thickness
    thickness of thin thickness of thin
    of thin layer (Å) Etching of thin layer (Å) Etching
    layer (Å) after etching rate (Å/s) layer (Å) after etching rate (Å/s)
    Example 4 4,093 2,765 22.1 4,090 1,540 25.5
    Example 5 4,048 2,704 22.4 4,056 1,496 25.6
    Comparative 3,503 1,673 30.5 3,518 418 31.0
    Example 2
    Comparative 4,081 2,570 25.2 4,061 1,276 27.9
    Example 3
    * etching rate (bulk etching rate, BER): (Thickness of initial thickness of thin layer − Thickness of thin layer after etching)/etching time (seconds)
  • Referring to Table 4, the thin layers formed of the hardmask compositions according to Examples 4 and 5 had a lower etching rate than the ones formed of the hardmask compositions according to Comparative Examples 2 and 3.
  • Accordingly, the thin layers formed of the hardmask compositions according to Examples 4 and 5 had higher etching resistance than the ones formed of the hardmask compositions according to Comparative Examples 2 and 3.
    • Evaluation 4: Formation of Pattern
  • A 3,000 Å-thick silicon oxide SiO2 layer was formed on a silicon wafer in a chemical vapor deposition method. Next, the hardmask compositions including 13.0 wt % of a monomer or a polymer according to Examples 1 to 5 and Comparative Examples 1 to 3 were respectively coated on the silicon oxide layer in a spin-on coating method and heat-treated on a hot plate at 240° C. for 1 minute, forming a hardmask layer. Then, a nitride silicon (SiN) layer was formed on the hardmask layer in a chemical vapor deposition method. On the nitride silicon (SiN) layer, a photoresist for KrF was coated, heat-treated at 110° C. for 60 seconds, exposed to a light using ASML (XT: 1400, NA 0.93) using an exposure equipment, and developed with tetramethylammonium hydroxide (a 2.38 wt % TMAH aqueous solution). The patterned photoresist as a mask and a CHF3/CF4 mixed gas were used to dry-etch the silicon nitride layer. The patterned silicon nitride layer as a mask and a N2/O2 mixed gas were used to dry-etch a hardmask layer. The patterned hardmask layer as a mask and a CHF3/CF4 mixed gas were used to dry-etch a silicon oxide layer, and an organic material remaining after the dry etching was all removed using O2 gas.
  • The hardmask layer and the silicon oxide layer were examined about the cross sections using a scanning electronic microscope (SEM). The results are shown in Table 5.
  • TABLE 5
    Pattern profile of Pattern profile of
    hardmask layer silicon oxide layer
    Example 1 vertical shape vertical shape
    Example 2 vertical shape vertical shape
    Example 3 vertical shape vertical shape
    Example 4 vertical shape vertical shape
    Example 5 vertical shape vertical shape
    Comparative Example 1 tapered shape tapered shape
    Comparative Example 2 tapered shape tapered shape
    Comparative Example 3 tapered shape tapered shape
  • Referring to Table 5, the hardmask layers formed of the hardmask compositions according to Examples 1 to 5 and the silicon oxide layers beneath them were all vertically patterned, while the hardmask layers formed of the hardmask compositions according to Comparative Examples 1 to 3 were not vertically patterned but tapered.
  • Accordingly, the hardmask layers formed of the hardmask compositions according to Examples 1 to 5 had excellent etching resistance and were well patterned compared with the ones formed of the hardmask compositions according to Comparative Examples 1 to 3, and thus, the underlayer beneath the hardmask layers were well patterned.
    • Evaluation 5: Gap-Filling and Planarization Characteristics
  • The hardmask composition including 13.0 wt % of a monomer or a polymer according to Examples 4 and 5 and Comparative Examples 2 and 3 were spin-on coated on a patterned silicon wafer and heat-treated at 240° C. for 60 seconds and then, examined regarding gap-filling and planarization characteristics using a FE-SEM equipment.
  • The gap-filling characteristics were determined by observing the cross sectional surface of pattern using a scanning electron microscope (SEM) and counting void, and the planarization characteristics were calculated according to the following Equation 1 after measuring the thickness of hardmask layer from the image of pattern cross-sectional surface observed from SEM. Since the planarization characteristics are more excellent, as a difference between h1 and h2 is smaller, the planarization characteristics are better as the number is smaller.
  • Figure US20170327640A1-20171116-C00020
  • The results are shown in Table 6.
  • TABLE 6
    Planarization Gap-filling
    characteristic characteristic
    Example 4 10.3 No void
    Example 5 10.8 No void
    Comparative Example 2 17.0 Void
    Comparative Example 3 128.0 No void
  • Referring to Table 6, the case of using the hardmask compositions according to Examples 4 and 5 had better planarization and no void than the case of using hardmask compositions according to Comparative Examples 2 and 3, so it is understood that had excellent gap-fill characteristics.
  • While this invention has been described in connection with what is presently considered to be practical exemplary embodiments, it is to be understood that the invention is not limited to the disclosed embodiments, but, on the contrary, is intended to cover various modifications and equivalent arrangements included within the spirit and scope of the appended claims.

Claims (11)

1-11. (canceled)
12. A monomer for a hardmask composition represented by the following Chemical Formula 1:
Figure US20170327640A1-20171116-C00021
wherein, in Chemical Formula 1,
A and A′ are the same or different and are each independently a substituted or unsubstituted aromatic group,
at least one of A and A′ is a substituted or unsubstituted perylene group, a substituted or unsubstituted benzoperylene group, or a substituted or unsubstituted coronene group,
L is a single bond or a substituted or unsubstituted C1 to C6 alkylene group, and
n is an integer ranging from 1 to 5, provided that when at least one of A and A′ is a substituted or unsubstituted perylene group, n is an interger ranging from 2 to 5.
13. The monomer for a hardmask composition of claim 12, wherein the aromatic group comprises at least one selected from the following Group 1:
[Group 1]
Figure US20170327640A1-20171116-C00022
Figure US20170327640A1-20171116-C00023
14. The monomer for a hardmask composition of claim 12, wherein the monomer is represented by the following Chemical Formula 1a, 1b or 1c:
Figure US20170327640A1-20171116-C00024
wherein, in Chemical Formula 1 a, 1 b , and 1 c,
A1 to A4 are each independently a substituted or unsubstituted benzene group, a substituted or unsubstituted naphthalene group, a substituted or unsubstituted pyrene group, a substituted or unsubstituted perylene group, a substituted or unsubstituted benzoperylene group, a substituted or unsubstituted coronene group, or a combination thereof,
at least one of A1 and A2 of Chemical Formula 1a is a substituted or unsubstituted benzoperylene group, or a substituted or unsubstituted coronene group,
at least one of A1 to A3 of Chemical Formula 1 b is a substituted or unsubstituted perylene group, a substituted or unsubstituted benzoperylene group, or a substituted or unsubstituted coronene group,
at least one of A1 to A4 of Chemical Formula 1c is a substituted or unsubstituted perylene group, a substituted or unsubstituted benzoperylene group, or a substituted or unsubstituted coronene group, and
L1 to L3 are each independently a single bond or a substituted or unsubstituted Cl to C6 alkylene group.
15. The monomer for a hardmask composition of claim 14, wherein the monomer is represented by the following Chemical Formula 1aa, 1bb, or 1cc,:
Figure US20170327640A1-20171116-C00025
16. The monomer for a hardmask composition of claim 12, wherein the monomer has a molecular weight of about 200 to 3,000.
17. A hardmask composition, comprising
the monomer of claim 1, and
a solvent.
18. The hardmask composition of claim 17, wherein the monomer is included in an amount of about 0.1 to 30 wt % based on the total amount of the hardmask composition.
19. A method of forming a pattern, comprising:
providing a material layer on a substrate,
applying the hardmask composition according to claim 6 on the material layer,
heat-treating the hardmask composition to provide a hardmask layer,
forming a silicon-containing thin layer on the hardmask layer,
forming a photoresist layer on the silicon-containing thin layer,
forming a photoresist pattern by exposing and developing the photoresist layer,
selectively removing the silicon-containing thin layer and the hardmask layer using the photoresist pattern to expose a part of the material layer, and
etching an exposed part of the material layer.
20. The method of claim 19, wherein the hardmask composition is applied using a spin-on coating method.
21. The method of claim 19, wherein, in the heat-treating of the hardmask composition to provide the hardmask layer, the hardmask composition is heat-treated at about 100 to 500° C.
US15/668,159 2011-12-30 2017-08-03 Monomer for a hardmask composition, hardmask composition comprising the monomer, and method for forming a pattern using the hardmask composition Abandoned US20170327640A1 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
US15/668,159 US20170327640A1 (en) 2011-12-30 2017-08-03 Monomer for a hardmask composition, hardmask composition comprising the monomer, and method for forming a pattern using the hardmask composition

Applications Claiming Priority (7)

Application Number Priority Date Filing Date Title
KR1020110147384A KR101413071B1 (en) 2011-12-30 2011-12-30 Monomer for hardmask composition and hardmask composition including the monomer and method of forming patterns using the hardmask composition
KR1020110147860A KR101497132B1 (en) 2011-12-30 2011-12-30 Monomer for hardmask composition and hardmask composition including the monomer and method of forming patterns using the hardmask composition
KR10-2011-0147384 2011-12-30
KR10-2011-0147860 2011-12-30
PCT/KR2012/010203 WO2013100409A1 (en) 2011-12-30 2012-11-29 Monomer for a hardmask composition, hardmask composition comprising the monomer, and method for forming a pattern using the hardmask composition
US201414364829A 2014-06-12 2014-06-12
US15/668,159 US20170327640A1 (en) 2011-12-30 2017-08-03 Monomer for a hardmask composition, hardmask composition comprising the monomer, and method for forming a pattern using the hardmask composition

Related Parent Applications (2)

Application Number Title Priority Date Filing Date
US14/364,829 Continuation US9725389B2 (en) 2011-12-30 2012-11-29 Monomer for a hardmask composition, hardmask composition comprising the monomer, and method for forming a pattern using the hardmask composition
PCT/KR2012/010203 Continuation WO2013100409A1 (en) 2011-12-30 2012-11-29 Monomer for a hardmask composition, hardmask composition comprising the monomer, and method for forming a pattern using the hardmask composition

Publications (1)

Publication Number Publication Date
US20170327640A1 true US20170327640A1 (en) 2017-11-16

Family

ID=48697808

Family Applications (2)

Application Number Title Priority Date Filing Date
US14/364,829 Active US9725389B2 (en) 2011-12-30 2012-11-29 Monomer for a hardmask composition, hardmask composition comprising the monomer, and method for forming a pattern using the hardmask composition
US15/668,159 Abandoned US20170327640A1 (en) 2011-12-30 2017-08-03 Monomer for a hardmask composition, hardmask composition comprising the monomer, and method for forming a pattern using the hardmask composition

Family Applications Before (1)

Application Number Title Priority Date Filing Date
US14/364,829 Active US9725389B2 (en) 2011-12-30 2012-11-29 Monomer for a hardmask composition, hardmask composition comprising the monomer, and method for forming a pattern using the hardmask composition

Country Status (5)

Country Link
US (2) US9725389B2 (en)
JP (1) JP6084986B2 (en)
CN (1) CN104024940B (en)
TW (1) TWI548946B (en)
WO (1) WO2013100409A1 (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US10345706B2 (en) * 2013-06-26 2019-07-09 Cheil Industries, Inc. Monomer for hardmask composition and hardmask composition including the monomer and method of forming patterns using the hardmask composition

Families Citing this family (26)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR102356815B1 (en) * 2013-11-14 2022-01-27 롬 앤드 하스 일렉트로닉 머트어리얼즈 엘엘씨 Gap-fill methods
KR101667788B1 (en) * 2013-12-31 2016-10-19 제일모직 주식회사 Hardmask composition, and method of forming patterns using the hardmask composition
US9583358B2 (en) 2014-05-30 2017-02-28 Samsung Electronics Co., Ltd. Hardmask composition and method of forming pattern by using the hardmask composition
KR102287343B1 (en) * 2014-07-04 2021-08-06 삼성전자주식회사 Hardmask composition and method of forming patterning using the hardmask composition
KR102287344B1 (en) 2014-07-25 2021-08-06 삼성전자주식회사 Hardmask composition and method of forming patterning using the hardmask composition
US10394124B2 (en) * 2014-11-04 2019-08-27 Nissan Chemical Industries, Ltd. Resist underlayer film-forming composition containing polymer having arylene group
KR101804260B1 (en) * 2015-02-17 2017-12-04 삼성에스디아이 주식회사 Monomer, organic layer composition, organic layer, and method of forming patterns
KR102384226B1 (en) 2015-03-24 2022-04-07 삼성전자주식회사 Hardmask composition and method of forming pattern using the same
KR102463893B1 (en) 2015-04-03 2022-11-04 삼성전자주식회사 Hardmask composition and method of forming patterning using the hardmask composition
KR101814671B1 (en) * 2015-06-02 2018-01-04 삼성에스디아이 주식회사 Organic layer composition, organic layer, and method of forming patterns
KR101895908B1 (en) * 2015-06-10 2018-10-24 삼성에스디아이 주식회사 Polymer, organic layer composition, organic layer, and method of forming patterns
US9971243B2 (en) * 2015-06-10 2018-05-15 Samsung Sdi Co., Ltd. Polymer, organic layer composition, organic layer, and method of forming patterns
KR101884447B1 (en) 2015-07-06 2018-08-01 삼성에스디아이 주식회사 Monomer, organic layer composition, organic layer, and method of forming patterns
KR102368068B1 (en) 2015-08-24 2022-02-25 삼성전자주식회사 Composition for manufacturing semiconductor device and method of manufacturing semiconductor device using the composition
KR102539857B1 (en) * 2016-04-29 2023-06-07 동우 화인켐 주식회사 Composition for hard mask
CN106187709B (en) * 2016-07-13 2019-10-11 上海引盛生物科技有限公司 A kind of preparation method of 1-hydroxypyrene
US11034847B2 (en) 2017-07-14 2021-06-15 Samsung Electronics Co., Ltd. Hardmask composition, method of forming pattern using hardmask composition, and hardmask formed from hardmask composition
KR102433666B1 (en) 2017-07-27 2022-08-18 삼성전자주식회사 Hardmask composition, method of forming patterning using the hardmask composition, and hardmask formed from the hardmask composition
KR102486388B1 (en) 2017-07-28 2023-01-09 삼성전자주식회사 Method of preparing graphene quantum dot, hardmask composition including the graphene quantum dot obtained by the method, method of forming patterning using the hardmask composition, and hardmask formed from the hardmask composition
US11022882B2 (en) * 2018-06-20 2021-06-01 Shin-Etsu Chemical Co., Ltd. Compound and composition for forming organic film
JP6981945B2 (en) 2018-09-13 2021-12-17 信越化学工業株式会社 Pattern formation method
KR102343221B1 (en) * 2018-12-28 2021-12-23 삼성에스디아이 주식회사 Polymer and hardmask composition and method of forming patterns
KR102745436B1 (en) * 2021-09-15 2024-12-19 삼성에스디아이 주식회사 Hardmask composition, hardmask layer and method of forming patterns
CN116224714B (en) * 2022-12-29 2023-12-05 广东粤港澳大湾区黄埔材料研究院 Hard mask composition and method for manufacturing semiconductor device
JP2024116011A (en) 2023-02-15 2024-08-27 信越化学工業株式会社 Pattern Formation Method
JP2025117967A (en) 2024-01-31 2025-08-13 信越化学工業株式会社 Pattern forming method and laminate

Family Cites Families (35)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS62252734A (en) 1986-04-24 1987-11-04 General Sekiyu Kagaku Kogyo Kk Coronenevinyl derivative
JPH05113663A (en) * 1991-10-22 1993-05-07 Hitachi Chem Co Ltd Production of photosensitive resin composition and resist image
JPH06145307A (en) * 1992-11-16 1994-05-24 Matsushita Electric Ind Co Ltd Epoxy resin composition for electronic equipment
JPH06219973A (en) 1993-01-25 1994-08-09 Ricoh Co Ltd New pyrene derivative
JP3501427B2 (en) * 1995-06-13 2004-03-02 富士写真フイルム株式会社 Positive photoresist composition
EP1072955B1 (en) * 1999-07-27 2006-03-01 Fuji Photo Film Co., Ltd. Image forming material
JP4510186B2 (en) 1999-09-28 2010-07-21 株式会社アルバック Carbon thin film manufacturing method
US6576562B2 (en) * 2000-12-15 2003-06-10 Kabushiki Kaisha Toshiba Manufacturing method of semiconductor device using mask pattern having high etching resistance
JP4429584B2 (en) 2002-11-07 2010-03-10 旭化成株式会社 Vertical field effect transistor
KR100896451B1 (en) 2006-12-30 2009-05-14 제일모직주식회사 Highly etch resistant anti-reflective hard mask composition with improved carbon content, method of manufacturing patterned material shape using same
WO2008120855A1 (en) * 2007-04-02 2008-10-09 Cheil Industries Inc. Hardmask composition having antireflective property and method of patterning materials using the same
KR100908601B1 (en) * 2007-06-05 2009-07-21 제일모직주식회사 Anti-reflective hard mask composition and patterning method of substrate material using same
KR100930673B1 (en) * 2007-12-24 2009-12-09 제일모직주식회사 Method for patterning materials using antireflective hard mask compositions
KR100950318B1 (en) * 2008-05-20 2010-03-31 제일모직주식회사 Aromatic ring-containing polymers, antireflective hardmask compositions comprising the same, and methods of patterning materials using fibers
JPWO2010041626A1 (en) * 2008-10-10 2012-03-08 日産化学工業株式会社 Lithographic resist underlayer film forming composition comprising a resin containing fluorene
JP5336306B2 (en) 2008-10-20 2013-11-06 信越化学工業株式会社 Resist underlayer film forming method, pattern forming method using the same, and resist underlayer film material
US20100119979A1 (en) 2008-11-13 2010-05-13 Rahman M Dalil Antireflective Coating Composition Comprising Fused Aromatic Rings
EP2253226B1 (en) * 2009-05-15 2015-07-15 Leibniz-Institut für Pflanzenbiochemie (IPB) Use of hydroxyflavone derivatives for modifying taste
US20100316949A1 (en) * 2009-06-10 2010-12-16 Rahman M Dalil Spin On Organic Antireflective Coating Composition Comprising Polymer with Fused Aromatic Rings
KR101414278B1 (en) 2009-11-13 2014-07-02 제일모직 주식회사 Polymer for under-layer of resist, polymer composition, under-layer composition of resist, of patterning device using same
CN201566281U (en) 2009-12-08 2010-09-01 周文卿 Multifunctional chalk holder
KR101311942B1 (en) 2009-12-31 2013-09-26 제일모직주식회사 Aromatic ring-containing compound for resist underlayer, and resist underlayer composition
KR101432605B1 (en) * 2010-12-16 2014-08-21 제일모직주식회사 Hardmask composition and method of forming patterns and semiconductor integrated circuit device including the patterns
KR101423171B1 (en) * 2010-12-30 2014-07-25 제일모직 주식회사 Hardmask composition and method of forming patterns and semiconductor integrated circuit device including the patterns
KR101413071B1 (en) 2011-12-30 2014-07-02 제일모직 주식회사 Monomer for hardmask composition and hardmask composition including the monomer and method of forming patterns using the hardmask composition
KR101413069B1 (en) 2011-12-30 2014-07-02 제일모직 주식회사 Monomer for hardmask composition and hardmask composition including the monomer and method of forming patterns using the hardmask composition
KR101531610B1 (en) * 2011-12-30 2015-06-24 제일모직주식회사 Composition for hardmask, method of forming patterns using the same, and semiconductor integrated circuit device including the patterns
KR101497132B1 (en) 2011-12-30 2015-03-02 제일모직 주식회사 Monomer for hardmask composition and hardmask composition including the monomer and method of forming patterns using the hardmask composition
CN104812729B (en) * 2012-12-26 2017-05-10 第一毛织株式会社 Monomer, hard mask composition comprising same and method for forming pattern using same
KR101566531B1 (en) * 2012-12-27 2015-11-05 제일모직 주식회사 Monomer for hardmask composition and hardmask composition including the monomer and method of forming patterns using the hardmask composition
KR101556275B1 (en) * 2012-12-28 2015-09-30 제일모직 주식회사 Monomer for hardmask composition and hardmask composition including the monomer and method of forming patterns using the hardmask composition
TWI541611B (en) * 2013-06-26 2016-07-11 第一毛織股份有限公司 Monomer for hardmask composition and hardmask composition including the monomer and method of forming patterns using the hardmask composition
CN104253024B (en) * 2013-06-27 2017-07-28 第一毛织株式会社 Hard mask compositions, the method using its formation pattern and the conductor integrated circuit device including the pattern
KR20150079199A (en) * 2013-12-31 2015-07-08 제일모직주식회사 Hardmask composition, method of forming patterns using the hardmask composition and semiconductor integrated circuit device including the patterns
KR102287343B1 (en) * 2014-07-04 2021-08-06 삼성전자주식회사 Hardmask composition and method of forming patterning using the hardmask composition

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US10345706B2 (en) * 2013-06-26 2019-07-09 Cheil Industries, Inc. Monomer for hardmask composition and hardmask composition including the monomer and method of forming patterns using the hardmask composition

Also Published As

Publication number Publication date
CN104024940B (en) 2018-05-01
US9725389B2 (en) 2017-08-08
JP6084986B2 (en) 2017-02-22
US20140342273A1 (en) 2014-11-20
CN104024940A (en) 2014-09-03
WO2013100409A1 (en) 2013-07-04
TWI548946B (en) 2016-09-11
TW201333632A (en) 2013-08-16
JP2015515112A (en) 2015-05-21

Similar Documents

Publication Publication Date Title
US20170327640A1 (en) Monomer for a hardmask composition, hardmask composition comprising the monomer, and method for forming a pattern using the hardmask composition
US9359276B2 (en) Monomer for hardmask composition, hardmask composition including monomer, and pattern forming method using hardmask composition
US10345706B2 (en) Monomer for hardmask composition and hardmask composition including the monomer and method of forming patterns using the hardmask composition
US9158201B2 (en) Monomer for hardmask composition and hardmask composition including the monomer and method of forming patterns using the hardmask composition
US20160090449A1 (en) Polymer, organic layer composition, organic layer, and method of forming patterns
US9513546B2 (en) Monomer, hard mask composition comprising said monomer, and method for forming pattern using said hard mask composition
US9556094B2 (en) Monomer, hardmask composition including monomer, and method for forming pattern by using hardmask composition
KR101497132B1 (en) Monomer for hardmask composition and hardmask composition including the monomer and method of forming patterns using the hardmask composition
US10323159B2 (en) Organic layer composition and method of forming patterns
KR101413071B1 (en) Monomer for hardmask composition and hardmask composition including the monomer and method of forming patterns using the hardmask composition
US9671688B2 (en) Monomer for hardmask composition, hardmask composition including said monomer, and method for forming pattern using said hardmask composition
KR101767080B1 (en) Hardmask composition, and method of forming patterns using the hardmask composition
US9606438B2 (en) Resist underlayer composition, method of forming patterns, and semiconductor integrated circuit device including the pattern
US9823566B2 (en) Monomer, hardmask composition comprising monomer, and pattern forming method using hardmask composition
KR101696197B1 (en) Hardmask composition, method of forming patterns using the hardmask composition and semiconductor integrated circuit device including the patterns including the patterns
US10332751B2 (en) Monomer, organic layer composition, organic layer, and method of forming patterns
KR101693612B1 (en) Monomer for hardmask composition and hardmask composition including the monomer and method of forming patterns using the hardmask composition
KR101705756B1 (en) Monomer for hardmask composition and hardmask composition including the monomer and method of forming patterns using the hardmask composition
KR101590810B1 (en) Monomer for hardmask composition and hardmask composition including the monomer and method of forming patterns using the hardmask composition
KR20150013415A (en) Monomer for hardmask composition and hardmask composition including the monomer and method of forming patterns using the hardmask composition

Legal Events

Date Code Title Description
STCB Information on status: application discontinuation

Free format text: ABANDONED -- FAILURE TO RESPOND TO AN OFFICE ACTION