US20170082881A1 - Thin film transistor array substrate and liquid crystal display panel using same - Google Patents

Thin film transistor array substrate and liquid crystal display panel using same Download PDF

Info

Publication number
US20170082881A1
US20170082881A1 US15/013,713 US201615013713A US2017082881A1 US 20170082881 A1 US20170082881 A1 US 20170082881A1 US 201615013713 A US201615013713 A US 201615013713A US 2017082881 A1 US2017082881 A1 US 2017082881A1
Authority
US
United States
Prior art keywords
layer
transparent conductive
electrode
thin film
film transistor
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
US15/013,713
Other versions
US9897877B2 (en
Inventor
Ming-Tsung Wang
Chih-Chung Liu
Yi-Hsiu Cheng
Jian-Xin Liu
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Century Technology Shenzhen Corp Ltd
Original Assignee
Century Technology Shenzhen Corp Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Century Technology Shenzhen Corp Ltd filed Critical Century Technology Shenzhen Corp Ltd
Assigned to CENTURY TECHNOLOGY (SHENZHEN) CORPORATION LIMITED reassignment CENTURY TECHNOLOGY (SHENZHEN) CORPORATION LIMITED ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS). Assignors: CHENG, YI-HSIU, LIU, CHIH-CHUNG, LIU, Jian-xin, WANG, MING-TSUNG
Publication of US20170082881A1 publication Critical patent/US20170082881A1/en
Application granted granted Critical
Publication of US9897877B2 publication Critical patent/US9897877B2/en
Active legal-status Critical Current
Adjusted expiration legal-status Critical

Links

Images

Classifications

    • GPHYSICS
    • G02OPTICS
    • G02FOPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
    • G02F1/00Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
    • G02F1/01Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour 
    • G02F1/13Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour  based on liquid crystals, e.g. single liquid crystal display cells
    • G02F1/133Constructional arrangements; Operation of liquid crystal cells; Circuit arrangements
    • G02F1/136Liquid crystal cells structurally associated with a semi-conducting layer or substrate, e.g. cells forming part of an integrated circuit
    • G02F1/1362Active matrix addressed cells
    • G02F1/1368Active matrix addressed cells in which the switching element is a three-electrode device
    • GPHYSICS
    • G02OPTICS
    • G02FOPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
    • G02F1/00Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
    • G02F1/01Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour 
    • G02F1/13Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour  based on liquid crystals, e.g. single liquid crystal display cells
    • G02F1/133Constructional arrangements; Operation of liquid crystal cells; Circuit arrangements
    • G02F1/1333Constructional arrangements; Manufacturing methods
    • G02F1/1343Electrodes
    • G02F1/134309Electrodes characterised by their geometrical arrangement
    • GPHYSICS
    • G02OPTICS
    • G02FOPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
    • G02F1/00Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
    • G02F1/01Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour 
    • G02F1/13Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour  based on liquid crystals, e.g. single liquid crystal display cells
    • G02F1/133Constructional arrangements; Operation of liquid crystal cells; Circuit arrangements
    • G02F1/136Liquid crystal cells structurally associated with a semi-conducting layer or substrate, e.g. cells forming part of an integrated circuit
    • G02F1/1362Active matrix addressed cells
    • G02F1/136213Storage capacitors associated with the pixel electrode
    • GPHYSICS
    • G02OPTICS
    • G02FOPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
    • G02F1/00Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
    • G02F1/01Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour 
    • G02F1/13Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour  based on liquid crystals, e.g. single liquid crystal display cells
    • G02F1/133Constructional arrangements; Operation of liquid crystal cells; Circuit arrangements
    • G02F1/136Liquid crystal cells structurally associated with a semi-conducting layer or substrate, e.g. cells forming part of an integrated circuit
    • G02F1/1362Active matrix addressed cells
    • G02F1/136227Through-hole connection of the pixel electrode to the active element through an insulation layer
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L27/00Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate
    • H01L27/02Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components specially adapted for rectifying, oscillating, amplifying or switching and having potential barriers; including integrated passive circuit elements having potential barriers
    • H01L27/12Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components specially adapted for rectifying, oscillating, amplifying or switching and having potential barriers; including integrated passive circuit elements having potential barriers the substrate being other than a semiconductor body, e.g. an insulating body
    • H01L27/1214Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components specially adapted for rectifying, oscillating, amplifying or switching and having potential barriers; including integrated passive circuit elements having potential barriers the substrate being other than a semiconductor body, e.g. an insulating body comprising a plurality of TFTs formed on a non-semiconducting substrate, e.g. driving circuits for AMLCDs
    • H01L27/124Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components specially adapted for rectifying, oscillating, amplifying or switching and having potential barriers; including integrated passive circuit elements having potential barriers the substrate being other than a semiconductor body, e.g. an insulating body comprising a plurality of TFTs formed on a non-semiconducting substrate, e.g. driving circuits for AMLCDs with a particular composition, shape or layout of the wiring layers specially adapted to the circuit arrangement, e.g. scanning lines in LCD pixel circuits
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L27/00Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate
    • H01L27/02Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components specially adapted for rectifying, oscillating, amplifying or switching and having potential barriers; including integrated passive circuit elements having potential barriers
    • H01L27/12Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components specially adapted for rectifying, oscillating, amplifying or switching and having potential barriers; including integrated passive circuit elements having potential barriers the substrate being other than a semiconductor body, e.g. an insulating body
    • H01L27/1214Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components specially adapted for rectifying, oscillating, amplifying or switching and having potential barriers; including integrated passive circuit elements having potential barriers the substrate being other than a semiconductor body, e.g. an insulating body comprising a plurality of TFTs formed on a non-semiconducting substrate, e.g. driving circuits for AMLCDs
    • H01L27/1255Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components specially adapted for rectifying, oscillating, amplifying or switching and having potential barriers; including integrated passive circuit elements having potential barriers the substrate being other than a semiconductor body, e.g. an insulating body comprising a plurality of TFTs formed on a non-semiconducting substrate, e.g. driving circuits for AMLCDs integrated with passive devices, e.g. auxiliary capacitors
    • GPHYSICS
    • G02OPTICS
    • G02FOPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
    • G02F1/00Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
    • G02F1/01Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour 
    • G02F1/13Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour  based on liquid crystals, e.g. single liquid crystal display cells
    • G02F1/133Constructional arrangements; Operation of liquid crystal cells; Circuit arrangements
    • G02F1/1333Constructional arrangements; Manufacturing methods
    • G02F1/1343Electrodes
    • G02F1/134309Electrodes characterised by their geometrical arrangement
    • G02F1/134318Electrodes characterised by their geometrical arrangement having a patterned common electrode

Definitions

  • the subject matter herein generally relates to a thin film transistor array substrate and a liquid crystal display panel using the thin film transistor array substrate.
  • Liquid crystal display panels are widely used in electronic devices, such as mobile phones, panel computers, and televisions.
  • a liquid crystal display panel usually includes a thin film transistor array substrate.
  • FIG. 1 is a cross-sectional view of a first exemplary embodiment of a liquid crystal display (LCD) panel.
  • LCD liquid crystal display
  • FIG. 2 is a plan view of a first exemplary embodiment of a transparent conductive layer and storage capacitor in the LCD panel of FIG. 1 .
  • FIG. 3 is a plan view of a second exemplary embodiment of a transparent conductive layer and storage capacitor in the LCD panel of FIG. 1 .
  • FIG. 4 is a plan view of a third exemplary embodiment of a transparent conductive layer and storage capacitor in the LCD panel of FIG. 1 .
  • FIG. 5 is a flow chart of a method for making a thin film transistor (TFT) array substrate used in the LCD panel of FIG. 1 .
  • TFT thin film transistor
  • FIG. 6 is a cross-sectional view of a second exemplary embodiment of an LCD panel.
  • FIG. 7 is a flow chart of a method for making the TFT array substrate of FIG. 6 .
  • FIG. 8 is a cross-sectional view of a third exemplary embodiment of an LCD panel.
  • FIG. 9 is a plan view of a transparent conductive layer in the LCD panel of FIG. 8 .
  • FIG. 10 is a plan view of a transparent conductive layer of a fourth exemplary embodiment of an LCD panel.
  • Coupled is defined as connected, whether directly or indirectly through intervening components, and is not necessarily limited to physical connections.
  • the connection can be such that the objects are permanently connected or releasably connected.
  • comprising when utilized, means “including, but not necessarily limited to”; it specifically indicates open-ended inclusion or membership in the so-described combination, group, series and the like.
  • FIG. 1 illustrates an LCD panel 100 according to a first exemplary embodiment.
  • the LCD panel 100 includes a TFT array substrate 120 , an opposite substrate 140 facing the TFT array substrate 120 , and a liquid crystal layer 160 located between the TFT array substrate 120 and the opposite substrate 140 .
  • the opposite substrate 140 may be a color filter.
  • the opposite substrate 140 includes a base layer 142 and a color filter layer 144 formed on the base layer 142 and facing the liquid crystal layer 160 .
  • the TFT array substrate 120 includes a base 121 , a first metal layer 122 and a transparent conductive layer 123 formed on the base 121 , a first insulating layer 124 formed on and covering the base 121 , the first metal layer 122 , and the transparent conductive layer 123 .
  • the TFT array substrate 120 further includes a semiconductor layer 125 , a pixel electrode layer 126 , and a second metal layer 127 formed on the first insulating layer 124 .
  • the TFT array substrate 120 further includes a second insulating layer 128 formed on and covering the first insulating layer 124 , the semiconductor layer 125 , the pixel electrode layer 126 , and the second metal layer 127 .
  • the TFT array substrate 120 further includes a common electrode layer 129 formed on the second insulating layer 128 .
  • the first metal layer 122 partially covers a surface 1210 of the base 121 facing the common electrode layer 129 .
  • the second metal layer 127 , the semiconductor layer 125 , and the pixel electrode layer 126 partially cover a surface 1240 of the first insulating layer 124 , wherein the surface 1240 faces the common electrode layer 129 .
  • the TFT array substrate 120 defines a hole 130 through the second insulating layer 128 and the first insulating layer 124 .
  • the first metal layer 122 and the second metal layer 127 are made of a conductive metal material of a type or types known in the field.
  • the transparent conductive layer 123 is made of a transparent conductive material of a type or types known in the field.
  • the semiconductor layer 125 is made of a semiconductor material of a type or types known in the field.
  • the pixel electrode layer 126 and the common electrode layer 129 are made of a conductive metal material of a type or types also known in the field.
  • the first metal layer 122 comprises a gate electrode 1221 and a storage capacitor 1222 . At least a portion of the transparent conductive layer 123 partially covers the storage capacitor 1222 and is electrically connected to the storage capacitor 1222 . Other portion of the transparent conductive layer 123 is formed on and partially covers the surface 1210 of the base 121 but excluding the first metal layer 122 .
  • the first insulating layer 124 covers the first metal layer 122 , the transparent conductive layer 123 , and the surface 1210 of the base 121 which is not covered by the first metal layer 122 and the transparent conductive layer 123 .
  • the semiconductor layer 125 faces the gate electrode 1221 .
  • the first insulating layer 124 is interposed between the semiconductor layer 125 and the gate electrode 1221 . In other words, the semiconductor layer 125 is insulated from the gate electrode 1221 .
  • the second insulating layer 128 covers the semiconductor layer 125 , the pixel electrode layer 126 , the second metal layer 127 , and the surface 1240 of the first insulating layer 124 which is not covered by the semiconductor layer 125 , by the pixel electrode layer 126 , and by the second metal layer 127 .
  • the second metal layer 127 comprises a source electrode 1271 and a drain electrode 1272 .
  • the source electrode 1271 and the drain electrode 1272 are coupled to opposite ends of the semiconductor layer 125 , thus a thin film transistor is defined by the source electrode 1271 , the drain electrode 1272 , the semiconductor layer 125 , and the gate electrode 1221 .
  • the pixel electrode layer 126 is electrically coupled to either the source electrode 1271 or the drain electrode 1272 , and as such the thin film transistor is able to receive a display driving signal.
  • the pixel electrode layer 126 is electrically coupled to the drain electrode 1272 .
  • the second insulating layer 128 is interposed between the common electrode layer 129 and the pixel electrode layer 126 .
  • the common electrode layer 129 is insulated from the pixel electrode layer 126 .
  • the common electrode layer 129 can be configured to receive a common voltage and cooperate with the pixel electrode layer 126 to realize the display.
  • the common electrode layer 129 passes through the hole 130 and is electrically coupled to the transparent conductive layer 123 .
  • the common electrode layer 129 and the pixel electrode layer 126 are configured to form a planar electric field for driving liquid crystal molecules in the liquid crystal layer 160 to rotate in a plane.
  • the common electrode layer 129 defines a plurality of gaps 1291 through which the second insulating layer 128 is exposed.
  • the transparent conductive layer 123 and the common electrode layer 129 have a same pattern structure and are located at different layers of the TFT array substrate 120 . In other words, the transparent conductive layer 123 also defines a plurality of gaps 1231 exposing the first insulating layer 124 therethrough.
  • the transparent conductive layer 123 is insulated from the pixel electrode layer 126 .
  • the transparent conductive layer 123 can be used as an auxiliary storage capacitor and cooperates with the storage capacitor 1222 .
  • the transparent conductive layer 123 also receives a common voltage when a common voltage is applied to the common electrode layer 129 .
  • FIG. 2 illustrates the transparent conductive layer 123 and the storage capacitor 1222 shown in FIG. 1 .
  • the TFT array substrate 120 further includes a plurality of gate lines 131 , a plurality of source lines 132 insulated from the gate lines 131 , and a plurality of storage capacitor lines 134 .
  • the gate lines 131 are electrically coupled to the gate electrode 1221
  • the source lines 132 are electrically coupled to the source electrode 1271
  • the storage capacitor line 134 is electrically coupled to the storage capacitor 1222 .
  • the gate lines 131 and the source lines 132 may intersect to define a plurality of pixels areas 133 .
  • the plurality of gaps 1231 are located in the pixel area 133 .
  • each pixel area 14 is rectangular.
  • each gap 1231 has a strip shape and the strip-shaped gaps 1231 are parallel.
  • the source line 132 may have a zigzagging shape and each gap 1231 may also have a zigzagging shape, as shown in FIG. 3 .
  • the gate lines 131 may be a portion of the first metal layer 122 . In other words, both the gate lines 131 and the gate electrode 1221 may be simultaneously formed on the base 121 in one process.
  • the source line 132 may be a portion of the second metal layer 127 . In other words, the source line 132 , the source electrode 1271 , and the drain electrode 1272 may be simultaneously formed on the first insulating layer 124 in one process.
  • the storage capacitor line 134 , the gate electrode 1221 , and the gate lines 131 may be simultaneously formed on the base 121 in one process. In at least one embodiment, the storage capacitor line 134 is parallel to the gate lines 131 .
  • the storage capacitor lines 134 are configured to be electrically coupled to an outside driving circuit and apply a common voltage to the storage capacitor 1222 .
  • the storage capacitor 1222 may be a portion of the storage capacitor line 134 , or the storage capacitor 1222 may extend from the storage capacitor line 134 . In at least one embodiment, as shown in FIGS. 2 and 3 , the storage capacitor 1222 extends from the storage capacitor line 134 and is electrically coupled to the storage capacitor line 134 .
  • the storage capacitor 1222 may be a portion of the storage capacitor line 134 as shown in FIG. 4 .
  • FIG. 5 illustrates a flow chart of an example method for making a TFT array substrate shown in FIG. 1 .
  • the example method is provided by way of example, as there are a variety of ways to carry out the method.
  • Each block shown in FIG. 5 represents one or more processes, methods or subroutines, carried out in the exemplary method.
  • the exemplary method can begin at block M 1 .
  • a first metal layer is formed on a base.
  • the process of forming a first metal layer may comprise applying a coating of metal materials on the base and patterning the metal materials by a photo etching process (PEP) using a first mask to form the first metal layer.
  • PEP photo etching process
  • the PEP generally comprises coating photoresist, exposure and developing the photoresist, etching, peeling photoresist, and on.
  • a transparent conductive layer is formed on the first metal layer and the base.
  • the process of forming a transparent conductive layer may include applying a coating of transparent conductive materials on the first metal layer and the base, and patterning the transparent conductive materials by PEP using a second mask to form the transparent conductive layer.
  • a first insulating layer is formed the base, the transparent conductive layer, and the first metal layer.
  • a semiconductor layer is formed on the first insulating layer.
  • the process of forming a semiconductor layer may include applying a coating of semiconductor materials on the first insulating layer and patterning the semiconductor materials by PEP using a third mask to form the pixel electrode layer.
  • a pixel electrode layer is formed on the first insulating layer.
  • the process of forming a pixel electrode layer may include applying a coating of pixel electrode materials on the first insulating layer and patterning the pixel electrode materials by PEP using a fourth mask to form the pixel electrode layer.
  • a second metal layer is formed on the first insulating layer.
  • the process of forming a second metal layer may include applying a coating of metal materials on the first insulating layer and patterning such metal materials by PEP using a fifth mask to form the second metal layer.
  • a second insulating layer is formed on the semiconductor layer, pixel electrode layer, the second metal layer, and the first insulating layer.
  • a hole is defined in the first insulating layer and the second insulating layer.
  • a common electrode layer is formed on the second insulating layer.
  • the process of forming a common electrode layer may include applying a coating of common electrode materials on the second insulating layer and wall of the hole, and patterning the common electrode materials by PEP using a sixth mask to form the common electrode layer.
  • the second mask used in the forming of the transparent conductive layer and the sixth mask used in the forming of the common electrode layer may be the same mask.
  • FIG. 6 illustrates an LCD panel 200 according to a second exemplary embodiment.
  • the LCD panel 200 is substantially the same as the LCD panel 100 except that the transparent conductive layer 223 of the LCD panel 200 is directly formed on the base 221 and the first metal layer 222 is directly formed on the transparent conductive layer 223 .
  • the common electrode layer 229 passes through the hole 230 and is electrically coupled to the storage capacitor 2222 .
  • FIG. 7 illustrates a flow chart of a method for making the TFT array substrate shown in FIG. 6 .
  • the example method is provided by way of example, as there are a variety of ways to carry out the method.
  • Each block shown in FIG. 7 represents one or more processes, methods or subroutines, carried out in the exemplary method.
  • the exemplary method can begin at block N 1 .
  • a transparent conductive layer is formed on a base.
  • a first metal layer is formed on the transparent conductive layer.
  • a first insulating layer is formed on the base, the transparent conductive layer, and the first metal layer.
  • a semiconductor layer is formed on the first insulating layer.
  • a pixel electrode layer is formed on the first insulating layer.
  • a second metal layer is formed on the first insulating layer.
  • a second insulating layer is formed is formed on the semiconductor layer, pixel electrode layer, the second metal layer, and the first insulating layer.
  • a hole is defined in the first insulating layer and the second insulating layer.
  • a common electrode layer is formed on the second insulating layer.
  • FIGS. 8 and 9 illustrate an LCD panel 300 according to a third exemplary embodiment.
  • the LCD panel 300 is substantially the same as the LCD panel 100 except that the first metal layer 322 of the LCD panel 300 does not include a storage capacitor and a storage capacitor line.
  • the transparent conductive layer 323 of the LCD panel 300 includes an extending portion 3232 as a storage capacitor and at least one storage capacitor line 3231 electrically coupled to the extending portion 3232 .
  • the storage capacitor line 3231 is configured to electrically connect to an outside driving circuit to apply a common voltage to the extending portion 3232 .
  • FIG. 10 illustrates an LCD panel 400 according to a fourth exemplary embodiment.
  • the LCD panel 400 is substantially the same as the LCD panel 100 except that the transparent conductive layer 423 of the LCD panel 400 includes a first portion 4232 having the same structure as the common electrode layer 129 and two second portions 4233 coupled to opposite sides of the first portion 4232 .
  • the second portions 4233 in two adjacent pixel areas 433 around one source line 432 are coupled.
  • the second portions 4233 in the pixel areas 433 which extend along a line parallel to the gate line 431 are coupled.

Landscapes

  • Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • Nonlinear Science (AREA)
  • Power Engineering (AREA)
  • General Physics & Mathematics (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Chemical & Material Sciences (AREA)
  • Crystallography & Structural Chemistry (AREA)
  • Mathematical Physics (AREA)
  • Optics & Photonics (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • Computer Hardware Design (AREA)
  • Liquid Crystal (AREA)
  • Geometry (AREA)
  • Thin Film Transistor (AREA)

Abstract

A thin film transistor array substrate includes a base, a first metal layer having a gate electrode and a first insulating layer covering the base and the first metal layer. A semiconductor layer is formed on the first insulating layer facing but insulated from the gate electrode. The first insulating layer also supports a second metal layer having a source electrode and a drain electrode. A pixel electrode layer is electrically coupled to the source electrode or the drain electrode. A common electrode layer is insulated from the pixel electrode and is configured to receive a common voltage. A transparent conductive layer is formed on the base and is insulated from the pixel electrode. The semiconductor layer, electrically coupled to the source electrode and the drain electrode, is located between the source electrode and the drain electrode.

Description

    FIELD
  • The subject matter herein generally relates to a thin film transistor array substrate and a liquid crystal display panel using the thin film transistor array substrate.
  • BACKGROUND
  • Liquid crystal display panels are widely used in electronic devices, such as mobile phones, panel computers, and televisions. A liquid crystal display panel usually includes a thin film transistor array substrate.
  • BRIEF DESCRIPTION OF THE DRAWINGS
  • Implementations of the present technology will now be described, by way of example only, with reference to the attached figures.
  • FIG. 1 is a cross-sectional view of a first exemplary embodiment of a liquid crystal display (LCD) panel.
  • FIG. 2 is a plan view of a first exemplary embodiment of a transparent conductive layer and storage capacitor in the LCD panel of FIG. 1.
  • FIG. 3 is a plan view of a second exemplary embodiment of a transparent conductive layer and storage capacitor in the LCD panel of FIG. 1.
  • FIG. 4 is a plan view of a third exemplary embodiment of a transparent conductive layer and storage capacitor in the LCD panel of FIG. 1.
  • FIG. 5 is a flow chart of a method for making a thin film transistor (TFT) array substrate used in the LCD panel of FIG. 1.
  • FIG. 6 is a cross-sectional view of a second exemplary embodiment of an LCD panel.
  • FIG. 7 is a flow chart of a method for making the TFT array substrate of FIG. 6.
  • FIG. 8 is a cross-sectional view of a third exemplary embodiment of an LCD panel.
  • FIG. 9 is a plan view of a transparent conductive layer in the LCD panel of FIG. 8.
  • FIG. 10 is a plan view of a transparent conductive layer of a fourth exemplary embodiment of an LCD panel.
  • DETAILED DESCRIPTION
  • It will be appreciated that for simplicity and clarity of illustration, where appropriate, reference numerals have been repeated among the different figures to indicate corresponding or analogous elements. In addition, numerous specific details are set forth in order to provide a thorough understanding of the embodiments described herein. However, it will be understood by those of ordinary skill in the art that the embodiments described herein may be practiced without these specific details. In other instances, methods, procedures, and components have not been described in detail so as not to obscure the related relevant feature being described. Also, the description is not to be considered as limiting the scope of the embodiments described herein. The drawings are not necessarily to scale and the proportions of certain parts may be exaggerated to better illustrate details and features of the present disclosure.
  • The term “coupled” is defined as connected, whether directly or indirectly through intervening components, and is not necessarily limited to physical connections. The connection can be such that the objects are permanently connected or releasably connected. The term “comprising,” when utilized, means “including, but not necessarily limited to”; it specifically indicates open-ended inclusion or membership in the so-described combination, group, series and the like.
  • FIG. 1 illustrates an LCD panel 100 according to a first exemplary embodiment. The LCD panel 100 includes a TFT array substrate 120, an opposite substrate 140 facing the TFT array substrate 120, and a liquid crystal layer 160 located between the TFT array substrate 120 and the opposite substrate 140. The opposite substrate 140 may be a color filter. The opposite substrate 140 includes a base layer 142 and a color filter layer 144 formed on the base layer 142 and facing the liquid crystal layer 160.
  • The TFT array substrate 120 includes a base 121, a first metal layer 122 and a transparent conductive layer 123 formed on the base 121, a first insulating layer 124 formed on and covering the base 121, the first metal layer 122, and the transparent conductive layer 123. The TFT array substrate 120 further includes a semiconductor layer 125, a pixel electrode layer 126, and a second metal layer 127 formed on the first insulating layer 124. The TFT array substrate 120 further includes a second insulating layer 128 formed on and covering the first insulating layer 124, the semiconductor layer 125, the pixel electrode layer 126, and the second metal layer 127. The TFT array substrate 120 further includes a common electrode layer 129 formed on the second insulating layer 128. The first metal layer 122 partially covers a surface 1210 of the base 121 facing the common electrode layer 129. The second metal layer 127, the semiconductor layer 125, and the pixel electrode layer 126 partially cover a surface 1240 of the first insulating layer 124, wherein the surface 1240 faces the common electrode layer 129. The TFT array substrate 120 defines a hole 130 through the second insulating layer 128 and the first insulating layer 124.
  • The first metal layer 122 and the second metal layer 127 are made of a conductive metal material of a type or types known in the field. The transparent conductive layer 123 is made of a transparent conductive material of a type or types known in the field. The semiconductor layer 125 is made of a semiconductor material of a type or types known in the field. The pixel electrode layer 126 and the common electrode layer 129 are made of a conductive metal material of a type or types also known in the field.
  • In at least one embodiment, the first metal layer 122 comprises a gate electrode 1221 and a storage capacitor 1222. At least a portion of the transparent conductive layer 123 partially covers the storage capacitor 1222 and is electrically connected to the storage capacitor 1222. Other portion of the transparent conductive layer 123 is formed on and partially covers the surface 1210 of the base 121 but excluding the first metal layer 122. The first insulating layer 124 covers the first metal layer 122, the transparent conductive layer 123, and the surface 1210 of the base 121 which is not covered by the first metal layer 122 and the transparent conductive layer 123. The semiconductor layer 125 faces the gate electrode 1221. The first insulating layer 124 is interposed between the semiconductor layer 125 and the gate electrode 1221. In other words, the semiconductor layer 125 is insulated from the gate electrode 1221.
  • The second insulating layer 128 covers the semiconductor layer 125, the pixel electrode layer 126, the second metal layer 127, and the surface 1240 of the first insulating layer 124 which is not covered by the semiconductor layer 125, by the pixel electrode layer 126, and by the second metal layer 127. The second metal layer 127 comprises a source electrode 1271 and a drain electrode 1272. The source electrode 1271 and the drain electrode 1272 are coupled to opposite ends of the semiconductor layer 125, thus a thin film transistor is defined by the source electrode 1271, the drain electrode 1272, the semiconductor layer 125, and the gate electrode 1221. The pixel electrode layer 126 is electrically coupled to either the source electrode 1271 or the drain electrode 1272, and as such the thin film transistor is able to receive a display driving signal. In at least one embodiment, the pixel electrode layer 126 is electrically coupled to the drain electrode 1272. The second insulating layer 128 is interposed between the common electrode layer 129 and the pixel electrode layer 126. In other words, the common electrode layer 129 is insulated from the pixel electrode layer 126. The common electrode layer 129 can be configured to receive a common voltage and cooperate with the pixel electrode layer 126 to realize the display. The common electrode layer 129 passes through the hole 130 and is electrically coupled to the transparent conductive layer 123.
  • The common electrode layer 129 and the pixel electrode layer 126 are configured to form a planar electric field for driving liquid crystal molecules in the liquid crystal layer 160 to rotate in a plane. The common electrode layer 129 defines a plurality of gaps 1291 through which the second insulating layer 128 is exposed. The transparent conductive layer 123 and the common electrode layer 129 have a same pattern structure and are located at different layers of the TFT array substrate 120. In other words, the transparent conductive layer 123 also defines a plurality of gaps 1231 exposing the first insulating layer 124 therethrough. The transparent conductive layer 123 is insulated from the pixel electrode layer 126. The transparent conductive layer 123 can be used as an auxiliary storage capacitor and cooperates with the storage capacitor 1222. As the common electrode layer 129 is electrically coupled to the transparent conductive layer 123, the transparent conductive layer 123 also receives a common voltage when a common voltage is applied to the common electrode layer 129.
  • FIG. 2 illustrates the transparent conductive layer 123 and the storage capacitor 1222 shown in FIG. 1. The TFT array substrate 120 further includes a plurality of gate lines 131, a plurality of source lines 132 insulated from the gate lines 131, and a plurality of storage capacitor lines 134. As is known in the field, the gate lines 131 are electrically coupled to the gate electrode 1221, the source lines 132 are electrically coupled to the source electrode 1271, and the storage capacitor line 134 is electrically coupled to the storage capacitor 1222. The gate lines 131 and the source lines 132 may intersect to define a plurality of pixels areas 133. The plurality of gaps 1231 are located in the pixel area 133. In at least one embodiment, the gate lines 131 extend along a first direction while the source lines 132 extend along a second direction perpendicular to the first direction. Thus, each pixel area 14 is rectangular. In at least one embodiment, each gap 1231 has a strip shape and the strip-shaped gaps 1231 are parallel.
  • In other embodiment, the source line 132 may have a zigzagging shape and each gap 1231 may also have a zigzagging shape, as shown in FIG. 3.
  • The gate lines 131 may be a portion of the first metal layer 122. In other words, both the gate lines 131 and the gate electrode 1221 may be simultaneously formed on the base 121 in one process. The source line 132 may be a portion of the second metal layer 127. In other words, the source line 132, the source electrode 1271, and the drain electrode 1272 may be simultaneously formed on the first insulating layer 124 in one process. The storage capacitor line 134, the gate electrode 1221, and the gate lines 131 may be simultaneously formed on the base 121 in one process. In at least one embodiment, the storage capacitor line 134 is parallel to the gate lines 131. The storage capacitor lines 134 are configured to be electrically coupled to an outside driving circuit and apply a common voltage to the storage capacitor 1222. The storage capacitor 1222 may be a portion of the storage capacitor line 134, or the storage capacitor 1222 may extend from the storage capacitor line 134. In at least one embodiment, as shown in FIGS. 2 and 3, the storage capacitor 1222 extends from the storage capacitor line 134 and is electrically coupled to the storage capacitor line 134.
  • In other embodiments, the storage capacitor 1222 may be a portion of the storage capacitor line 134 as shown in FIG. 4.
  • FIG. 5 illustrates a flow chart of an example method for making a TFT array substrate shown in FIG. 1. The example method is provided by way of example, as there are a variety of ways to carry out the method. Each block shown in FIG. 5 represents one or more processes, methods or subroutines, carried out in the exemplary method. The exemplary method can begin at block M1.
  • At block M1, a first metal layer is formed on a base. In at least one embodiment, the process of forming a first metal layer may comprise applying a coating of metal materials on the base and patterning the metal materials by a photo etching process (PEP) using a first mask to form the first metal layer. The PEP generally comprises coating photoresist, exposure and developing the photoresist, etching, peeling photoresist, and on.
  • At block M2, a transparent conductive layer is formed on the first metal layer and the base. The process of forming a transparent conductive layer may include applying a coating of transparent conductive materials on the first metal layer and the base, and patterning the transparent conductive materials by PEP using a second mask to form the transparent conductive layer.
  • At block M3, a first insulating layer is formed the base, the transparent conductive layer, and the first metal layer.
  • At block M4, a semiconductor layer is formed on the first insulating layer. The process of forming a semiconductor layer may include applying a coating of semiconductor materials on the first insulating layer and patterning the semiconductor materials by PEP using a third mask to form the pixel electrode layer.
  • At block M5, a pixel electrode layer is formed on the first insulating layer. The process of forming a pixel electrode layer may include applying a coating of pixel electrode materials on the first insulating layer and patterning the pixel electrode materials by PEP using a fourth mask to form the pixel electrode layer.
  • At block M6, a second metal layer is formed on the first insulating layer. The process of forming a second metal layer may include applying a coating of metal materials on the first insulating layer and patterning such metal materials by PEP using a fifth mask to form the second metal layer.
  • At block M7, a second insulating layer is formed on the semiconductor layer, pixel electrode layer, the second metal layer, and the first insulating layer.
  • At block M8, a hole is defined in the first insulating layer and the second insulating layer.
  • At block M9, a common electrode layer is formed on the second insulating layer. The process of forming a common electrode layer may include applying a coating of common electrode materials on the second insulating layer and wall of the hole, and patterning the common electrode materials by PEP using a sixth mask to form the common electrode layer.
  • When the transparent conductive layer and the common electrode layer have a same pattern structure, the second mask used in the forming of the transparent conductive layer and the sixth mask used in the forming of the common electrode layer may be the same mask.
  • FIG. 6 illustrates an LCD panel 200 according to a second exemplary embodiment. The LCD panel 200 is substantially the same as the LCD panel 100 except that the transparent conductive layer 223 of the LCD panel 200 is directly formed on the base 221 and the first metal layer 222 is directly formed on the transparent conductive layer 223. The common electrode layer 229 passes through the hole 230 and is electrically coupled to the storage capacitor 2222.
  • FIG. 7 illustrates a flow chart of a method for making the TFT array substrate shown in FIG. 6. The example method is provided by way of example, as there are a variety of ways to carry out the method. Each block shown in FIG. 7 represents one or more processes, methods or subroutines, carried out in the exemplary method. The exemplary method can begin at block N1. At block N1, a transparent conductive layer is formed on a base. At block N2, a first metal layer is formed on the transparent conductive layer. At block N3, a first insulating layer is formed on the base, the transparent conductive layer, and the first metal layer. At block N4, a semiconductor layer is formed on the first insulating layer. At block N5, a pixel electrode layer is formed on the first insulating layer. At block N6, a second metal layer is formed on the first insulating layer. At block N7, a second insulating layer is formed is formed on the semiconductor layer, pixel electrode layer, the second metal layer, and the first insulating layer. At block N8, a hole is defined in the first insulating layer and the second insulating layer. At block N9, a common electrode layer is formed on the second insulating layer. Each forming process may be implemented according to the above-described process. In at least one embodiment, the forming of the transparent conductive layer and the forming of the first metal layer may be implemented in one process using a single mask.
  • FIGS. 8 and 9 illustrate an LCD panel 300 according to a third exemplary embodiment. The LCD panel 300 is substantially the same as the LCD panel 100 except that the first metal layer 322 of the LCD panel 300 does not include a storage capacitor and a storage capacitor line. Further, the transparent conductive layer 323 of the LCD panel 300 includes an extending portion 3232 as a storage capacitor and at least one storage capacitor line 3231 electrically coupled to the extending portion 3232. The storage capacitor line 3231 is configured to electrically connect to an outside driving circuit to apply a common voltage to the extending portion 3232.
  • FIG. 10 illustrates an LCD panel 400 according to a fourth exemplary embodiment. The LCD panel 400 is substantially the same as the LCD panel 100 except that the transparent conductive layer 423 of the LCD panel 400 includes a first portion 4232 having the same structure as the common electrode layer 129 and two second portions 4233 coupled to opposite sides of the first portion 4232. In at least one embodiment, the second portions 4233 in two adjacent pixel areas 433 around one source line 432 are coupled. In other embodiment, the second portions 4233 in the pixel areas 433 which extend along a line parallel to the gate line 431 are coupled.
  • It is to be understood, even though information and advantages of the present embodiments have been set forth in the foregoing description, together with details of the structures and functions of the present embodiments, the disclosure is illustrative only; changes may be made in detail, especially in matters of shape, size, and arrangement of parts within the principles of the present embodiments to the full extent indicated by the plain meaning of the terms in which the appended claims are expressed.

Claims (20)

What is claimed is:
1. A thin film transistor array substrate comprising:
a base;
a first metal layer formed on the base and having a gate electrode;
a first insulating layer formed on and covering the base and the first metal layer;
a semiconductor layer formed on the first insulating layer and facing the gate electrode, the semiconductor layer being insulated from the gate electrode;
a second metal layer formed on the first insulating layer and comprising a source electrode and a drain electrode, the semiconductor layer being located between the source electrode and the drain electrode and coupled to the source electrode and the drain electrode, wherein a thin film transistor is provided by the source electrode, the drain electrode, the semiconductor layer and the gate electrode;
a pixel electrode layer formed on the first insulating layer and electrically coupled to the source electrode or the drain electrode to allow the thin film transistor to receive a display driving signal;
a common electrode layer being insulated from the pixel electrode and being configured to receive a common voltage and cooperate with the pixel electrode layer to implement display; and
a transparent conductive layer formed on the base and being insulated from the pixel electrode, the transparent conductive layer and the common electrode layer located at different layers of the thin film transistor array substrate, the transparent conductive layer being configured as an auxiliary storage capacitor.
2. The thin film transistor array substrate of claim 1, further comprising a second insulating layer; the first insulating layer covers the transparent conductive layer; the second insulating layer is formed on and covers the first insulating layer, the second metal layer, the semiconductor layer, and the pixel electrode layer; and the common electrode layer is formed on the second insulating layer.
3. The thin film transistor array substrate of claim 2, wherein the thin film transistor array substrate defines a hole through the second insulating layer and the first insulating layer; the common electrode layer is electrically coupled to the transparent conductive layer by passing through the hole.
4. The thin film transistor array substrate of claim 1, wherein the transparent conductive layer comprises a first portion and two second portions coupled to two opposite sides of the first portion; and the first portion has a same pattern structure as the common electrode layer.
5. The thin film transistor array substrate of claim 4, further comprising a plurality of gate lines and a plurality of source lines insulated from the gate lines; the gate lines and the source lines intersect to define a plurality of pixels areas; and two adjacent second portions in two adjacent pixel areas around one source line are coupled.
6. The thin film transistor array substrate of claim 1, wherein the transparent conductive layer is electrically coupled to the common electrode layer.
7. The thin film transistor array substrate of claim 1, wherein the first metal layer further comprises a storage capacitor electrically coupled to the transparent conductive layer.
8. The thin film transistor array substrate of claim 7, wherein a portion of the transparent conductive layer is formed on and partially covers the storage capacitor, and other portion of the transparent conductive layer is formed on and partially covers a surface of the base.
9. The thin film transistor array substrate of claim 7, wherein the transparent conductive layer is formed on and partially covers a surface of the base; and the first metal layer is formed on the transparent conductive layer.
10. The thin film transistor array substrate of claim 1, wherein the transparent conductive layer comprises an extending portion as the auxiliary storage capacitor and at least one storage capacitor line electrically coupled to the extending portion.
11. A liquid crystal display panel comprising:
a thin film transistor array substrate;
an opposite substrate; and
a liquid crystal layer between the thin film transistor array substrate and the opposite substrate;
the thin film transistor array substrate comprising:
a base;
a first metal layer formed on the base and having a gate electrode;
a first insulating layer formed on and covering the base and the first metal layer;
a semiconductor layer formed on the first insulating layer and facing the gate electrode, the semiconductor layer being insulated from the gate electrode;
a second metal layer formed on the first insulating layer and comprising a source electrode and a drain electrode, the semiconductor layer being located between the source electrode and the drain electrode and coupled to the source electrode and the drain electrode, wherein a thin film transistor is provided by the source electrode, the drain electrode, the semiconductor layer and the gate electrode;
a pixel electrode layer formed on the first insulating layer and electrically coupled to the source electrode or the drain electrode to allow the thin film transistor to receive a display driving signal;
a common electrode layer being insulated from the pixel electrode and being configured to receive a common voltage and cooperate with the pixel electrode layer to implement display; and
a transparent conductive layer formed on the base and being insulated from the pixel electrode, the transparent conductive layer and the common electrode layer located at different layers of the thin film transistor array substrate, the transparent conductive layer being configured as an auxiliary storage capacitor.
12. The liquid crystal display panel of claim 11, wherein the thin film transistor array substrate further comprises a second insulating layer; the first insulating layer covers the transparent conductive layer; the second insulating layer is formed on and covers the first insulating layer, the second metal layer, the semiconductor layer, and the pixel electrode layer; and the common electrode layer is formed on the second insulating layer.
13. The liquid crystal display panel of claim 12, wherein the thin film transistor array substrate defines a hole through the second insulating layer and the first insulating layer;
the common electrode layer is electrically coupled to the transparent conductive layer by passing through the hole.
14. The liquid crystal display panel of claim 11, wherein the transparent conductive layer comprises a first portion and two second portions coupled to two opposite sides of the first portion; and the first portion has a same pattern structure as the common electrode layer.
15. The liquid crystal display panel of claim 14, wherein the thin film transistor array substrate further comprises a plurality of gate lines, and a plurality of source lines insulated from the gate lines; the gate lines and the source lines are intersect to define a plurality of pixels areas; and two adjacent second portions in two adjacent pixel areas around one source line are coupled.
16. The liquid crystal display panel of claim 11, wherein the transparent conductive layer is electrically coupled to the common electrode layer.
17. The liquid crystal display panel of claim 11, wherein the first metal layer further comprises a storage capacitor electrically coupled to the transparent conductive layer.
18. The liquid crystal display panel of claim 17, wherein a portion of the transparent conductive layer is formed on and partially covers the storage capacitor, and other portion of the transparent conductive layer is formed on and partially covers a surface of the base.
19. The liquid crystal display panel of claim 17, wherein the transparent conductive layer is formed on and partially covers a surface of the base; and the first metal layer is formed on the transparent conductive layer.
20. The liquid crystal display panel of claim 11, wherein the transparent conductive layer comprises an extending portion as the auxiliary storage capacitor and at least one storage capacitor line electrically coupled to the extending portion.
US15/013,713 2015-09-23 2016-02-02 Thin film transistor array substrate and liquid crystal display panel using same Active 2036-04-07 US9897877B2 (en)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
CN201510610512.4 2015-09-23
CN201510610512 2015-09-23
CN201510610512.4A CN105204252A (en) 2015-09-23 2015-09-23 Thin film transistor array substrate and liquid crystal display panel

Publications (2)

Publication Number Publication Date
US20170082881A1 true US20170082881A1 (en) 2017-03-23
US9897877B2 US9897877B2 (en) 2018-02-20

Family

ID=54952012

Family Applications (1)

Application Number Title Priority Date Filing Date
US15/013,713 Active 2036-04-07 US9897877B2 (en) 2015-09-23 2016-02-02 Thin film transistor array substrate and liquid crystal display panel using same

Country Status (2)

Country Link
US (1) US9897877B2 (en)
CN (1) CN105204252A (en)

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US10403227B2 (en) * 2015-12-22 2019-09-03 Shenzhen China Star Optoelectronics Technology Co., Ltd. Integrated Liquid crystal display device and electrochromic device and driving method for displaying images
US11086178B1 (en) 2018-11-22 2021-08-10 Beijing Boe Optoelectronics Technology Co., Ltd. Array substrate, display panel, display apparatus, and method of fabricating array substrate
US20220043289A1 (en) * 2020-08-07 2022-02-10 Century Technology (Shenzhen) Corporation Limited Thin film transistor array substrate and display panel using same
US11921388B2 (en) 2020-10-30 2024-03-05 Beijing Boe Display Technology Co., Ltd. Array substrate and manufacturing method thereof, and display device

Families Citing this family (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN106647079B (en) * 2017-01-16 2019-02-15 京东方科技集团股份有限公司 Array substrate, the driving method of array substrate, preparation method and display device
JP2019053105A (en) * 2017-09-13 2019-04-04 シャープ株式会社 Method for manufacturing substrate for display panels
CN108803161B (en) * 2018-06-29 2021-07-09 上海天马微电子有限公司 Display panel, method for manufacturing display panel, and display device
CN112363353A (en) * 2020-11-18 2021-02-12 信利(仁寿)高端显示科技有限公司 Low-frequency low-power-consumption array substrate and manufacturing method thereof
CN113299716B (en) * 2021-05-21 2023-03-17 武汉华星光电半导体显示技术有限公司 Display panel
WO2024197878A1 (en) * 2023-03-31 2024-10-03 京东方科技集团股份有限公司 Array substrate and preparation method therefor, and display device

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US20130107151A1 (en) * 2007-09-04 2013-05-02 Tohru Sasaki Liquid crystal display device having first, second, and third transparent electrodes wherein a second region of the second electrode protrudes from a first region

Family Cites Families (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP4047586B2 (en) * 2002-01-10 2008-02-13 Nec液晶テクノロジー株式会社 Horizontal electric field type active matrix liquid crystal display device
KR100895016B1 (en) * 2002-10-04 2009-04-30 엘지디스플레이 주식회사 In plane switching mode liquid crystal display device and fabrication method thereof
JP4449953B2 (en) * 2006-07-27 2010-04-14 エプソンイメージングデバイス株式会社 Liquid crystal display
US20110085121A1 (en) 2009-10-08 2011-04-14 Hydis Technologies Co., Ltd. Fringe Field Switching Mode Liquid Crystal Display Device and Method of Fabricating the Same
CN104280951A (en) * 2014-09-23 2015-01-14 京东方科技集团股份有限公司 Array substrate, manufacturing method thereof, and display device

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US20130107151A1 (en) * 2007-09-04 2013-05-02 Tohru Sasaki Liquid crystal display device having first, second, and third transparent electrodes wherein a second region of the second electrode protrudes from a first region

Cited By (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US10403227B2 (en) * 2015-12-22 2019-09-03 Shenzhen China Star Optoelectronics Technology Co., Ltd. Integrated Liquid crystal display device and electrochromic device and driving method for displaying images
US11086178B1 (en) 2018-11-22 2021-08-10 Beijing Boe Optoelectronics Technology Co., Ltd. Array substrate, display panel, display apparatus, and method of fabricating array substrate
US20220043289A1 (en) * 2020-08-07 2022-02-10 Century Technology (Shenzhen) Corporation Limited Thin film transistor array substrate and display panel using same
US11579504B2 (en) * 2020-08-07 2023-02-14 Century Technology (Shenzhen) Corporation Limited Thin film transistor array substrate and display panel using same
US11921388B2 (en) 2020-10-30 2024-03-05 Beijing Boe Display Technology Co., Ltd. Array substrate and manufacturing method thereof, and display device

Also Published As

Publication number Publication date
CN105204252A (en) 2015-12-30
US9897877B2 (en) 2018-02-20

Similar Documents

Publication Publication Date Title
US9897877B2 (en) Thin film transistor array substrate and liquid crystal display panel using same
US10139685B2 (en) Array substrate, manufacturing method thereof and display device
US20180246369A1 (en) Liquid Crystal Display Panel, Manufacturing Method Thereof and Display Device
WO2017049842A1 (en) Array substrate, manufacturing method thereof, and display device
US10978493B2 (en) Display substrate and manufacturing method thereof, and display device
US20120105778A1 (en) Liquid crystal display device
JP2006048006A (en) Liquid crystal display device and manufacturing method thereof
US10353251B2 (en) Display panel and manufacturing method thereof
US9773817B2 (en) Thin film transistor and manufacturing method thereof, array substrate and display device
US9472582B2 (en) Thin film transistor array panel and manufacturing method thereof
US9632369B2 (en) Array substrate and manufacturing method thereof, as well as display device
US20170139247A1 (en) Thin Film Transistor Array Substrate, Manufacturing for the Same, and Liquid Crystal Display Panel Having the Same
US9720292B2 (en) Liquid crystal display panel and method for making same
WO2018068542A1 (en) Array substrate and display device
US20180337202A1 (en) Tft substrate manufacturing method
US9690146B2 (en) Array substrate, its manufacturing method, and display device
US9647011B2 (en) Thin film transistor array panel and manufacturing method thereof
EP3686664A1 (en) Display panel and manufacturing method thereof and display device
CN108873511B (en) Flat display panel and manufacturing method thereof
US10153305B2 (en) Array substrate, manufacturing method thereof, and display device
CN104020621A (en) Array substrate and preparation method thereof and display device
US9715147B2 (en) Array substrate for LCD panel and manufacturing method thereof
US9885928B2 (en) Array substrate, manufacturing method thereof, and display device
US11698545B2 (en) Liquid crystal panel and liquid crystal panel etching method
US10180610B2 (en) Thin film transistor array substrate and manufacturing method thereof, and display device

Legal Events

Date Code Title Description
AS Assignment

Owner name: CENTURY TECHNOLOGY (SHENZHEN) CORPORATION LIMITED,

Free format text: ASSIGNMENT OF ASSIGNORS INTEREST;ASSIGNORS:WANG, MING-TSUNG;LIU, CHIH-CHUNG;CHENG, YI-HSIU;AND OTHERS;REEL/FRAME:037649/0039

Effective date: 20160129

STCF Information on status: patent grant

Free format text: PATENTED CASE

MAFP Maintenance fee payment

Free format text: PAYMENT OF MAINTENANCE FEE, 4TH YEAR, LARGE ENTITY (ORIGINAL EVENT CODE: M1551); ENTITY STATUS OF PATENT OWNER: LARGE ENTITY

Year of fee payment: 4