US20160377071A1 - Fluid apparatus - Google Patents
Fluid apparatus Download PDFInfo
- Publication number
- US20160377071A1 US20160377071A1 US15/039,506 US201415039506A US2016377071A1 US 20160377071 A1 US20160377071 A1 US 20160377071A1 US 201415039506 A US201415039506 A US 201415039506A US 2016377071 A1 US2016377071 A1 US 2016377071A1
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- United States
- Prior art keywords
- bellows
- portions
- fluid
- axial direction
- peak
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Abandoned
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Classifications
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- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
- F04B43/00—Machines, pumps, or pumping installations having flexible working members
- F04B43/08—Machines, pumps, or pumping installations having flexible working members having tubular flexible members
- F04B43/10—Pumps having fluid drive
- F04B43/113—Pumps having fluid drive the actuating fluid being controlled by at least one valve
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- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
- F04B43/00—Machines, pumps, or pumping installations having flexible working members
- F04B43/0009—Special features
- F04B43/0054—Special features particularities of the flexible members
- F04B43/0072—Special features particularities of the flexible members of tubular flexible members
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- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
- F04B43/00—Machines, pumps, or pumping installations having flexible working members
- F04B43/0009—Special features
- F04B43/0081—Special features systems, control, safety measures
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
- F04B43/00—Machines, pumps, or pumping installations having flexible working members
- F04B43/08—Machines, pumps, or pumping installations having flexible working members having tubular flexible members
- F04B43/10—Pumps having fluid drive
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
- F04B45/00—Pumps or pumping installations having flexible working members and specially adapted for elastic fluids
- F04B45/02—Pumps or pumping installations having flexible working members and specially adapted for elastic fluids having bellows
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- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
- F04B53/00—Component parts, details or accessories not provided for in, or of interest apart from, groups F04B1/00 - F04B23/00 or F04B39/00 - F04B47/00
- F04B53/16—Casings; Cylinders; Cylinder liners or heads; Fluid connections
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- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
- F16J—PISTONS; CYLINDERS; SEALINGS
- F16J3/00—Diaphragms; Bellows; Bellows pistons
- F16J3/04—Bellows
- F16J3/041—Non-metallic bellows
- F16J3/043—Non-metallic bellows with particular means for limiting wear
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- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
- F16J—PISTONS; CYLINDERS; SEALINGS
- F16J3/00—Diaphragms; Bellows; Bellows pistons
- F16J3/06—Bellows pistons
Abstract
A fluid apparatus includes a bellows that is configured to be extendable and contractible in an axial direction in order to suck a fluid from a suction flow passage and eject the fluid to an ejection flow passage. The bellows has peak portions and valley portions, which are alternately formed in the axial direction, and annular side surface portions, which are located between the peak portions and the valley portions and connect the peak and valley portions to each other. A ratio B/A of the thickness B of the axial middle part of each of the peak portions in a direction which is perpendicular to the axial direction, to the thickness A of each of the side surface portions in the axial direction is set within a range of 1.3 to 1.8.
Description
- The present invention relates to a fluid apparatus including a bellows.
- As a fluid apparatus including a bellows which is configured to be extendable and contractible in the axial direction in order to allow a fluid to flow, a bellows pump, a pulsation damping device, and the like are known (for example, see Patent Literature 1).
- In a fluid apparatus of this kind, as shown in
FIG. 11(a) , a bellows haspeak portions 157 andvalley portions 158 which are alternately formed in the axial direction, and annularside surface portions 159 which are located between thepeak portions 157 and thevalley portions 158, and which connect the both portions to each other. The bellows is configured so as to, when the fluid apparatus operates, extendable and contractible in the axial direction. - When the thickness of each of the
side surface portions 159 in the axial direction is indicated by A, and that of each of the axial middle parts (apex portions) of thepeak portions 157 in a direction which is perpendicular to the axial direction is indicated by B, the bellows are set so that a ratio B/A is 1. That is, the thickness A of the side surface portions and the thickness B of the peak portions are equal to each other. - When the bellows is extended, therefore, the
peak portion 157 is preferentially deformed to be stretched in the axial direction as shown inFIG. 11(b) , and large stress is concentrically generated in a specificnarrow place 160 which is in the inner side of the axial middle part of thepeak portion 157, and the axial middle part of thepeak portion 157 easily fatigues. As a result, there arises a possibility that acrack 161 which extends in a direction perpendicular to the axial direction occurs in the axial middle part of thepeak portion 157 where stress concentration occurs. - The inventors have thought that, the larger the thickness B of the middle part with respect to the thickness A of the side surface portion in order to prevent the
crack 161 from occurring, the higher the rigidity of the middle part, and thecrack 161 can be prevented from occurring. Even when the rigidity is enhanced, however, the stress concentration in the middle does not disappear. Therefore, there is a fear that, when the bellows is used for a long term, a crack may occur in the middle part because of fatigue. - When the inventors have repeated a process of trial and error in order to prevent a crack due to fatigue from occurring, the inventors have found that, when the ratio B/A of the thickness B of the peak portion in a direction which is perpendicular to the axial direction, to the thickness A of the side surface portion in the axial direction is limitedly set within a certain range, stress concentration in the middle part is remarkably reduced, and occurrence of a crack such as above described can be suppressed. The invention has been accomplished based on this finding.
- The invention has bee conducted in view of the above circumstances. It is an object of the invention to provide a fluid apparatus in which a crack due to extension and contraction of a bellows can be suppressed from occurring in an axial middle part of a peak portion of the bellows.
- The invention of
claim 1 is a fluid apparatus including a bellows which is configured to be extendable and contractible in an axial direction in order to suck a fluid from a suction flow passage and eject the fluid to an ejection flow passage, wherein the bellows has: peak portions and valley portions which are alternately formed in the axial direction; and annular side surface portions which are located between the peak portions and the valley portions, and which connect the both portions to each other, and a ratio B/A of a thickness B of the axial middle part of each of the peak portions in a direction which is perpendicular to the axial direction, to a thickness A of each of the side surface portions in the axial direction is set within a range of 1.3 to 1.8. - According to the configuration, when the bellows is extended, large stress dispersedly occurs on the side of the inner circumferential surface of each of the peak portions which are stretched in the axial direction. Namely, large stress which is caused in the peak portion in this case is not concentrated in a specific narrow place. Therefore, the axial middle part of the peak portion which is deformable in accordance with extension and contraction of the bellows can be made not easily fatigued. Consequently, a crack which is due to extension and contraction of the bellows, and which extends in a direction perpendicular to the axial direction can be suppressed from occurring in the axial middle part of the peak portion. As a result, the bellows is hardly broken, and a prolonged life period of the bellows can be realized.
- The invention of
claim 2 has a configuration where, in the fluid apparatus set forth inclaim 1, the ratio B/A of the thickness B of the axial middle part of each of the peak portions in the direction which is perpendicular to the axial direction, to the thickness A of each of the side surface portions in the axial direction is set within a range of 1.3 to 1.5. - According to the configuration, even in the case of severe use conditions such as those where the temperature of the fluid is higher than the ordinary temperature (room temperature), when the bellows is extended in the axial direction, large stress which is caused in the peak portion is not concentrated in a specific narrow place. Even in such a case, therefore, a crack which is due to extension and contraction of the bellows can be suppressed from occurring in the axial middle part of the peak portion of the bellows. A prolonged life period of the bellows can be realized.
- The invention of
claim 3 has a configuration where, in the fluid apparatus set forth inclaim - According to the invention, it is possible to provide a fluid apparatus in which a crack due to extension and contraction of a bellows can be suppressed from occurring in an axial middle part of a peak portion of the bellows.
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FIG. 1 is a side sectional view of a pump device which is a fluid apparatus of an embodiment of the invention. -
FIG. 2 is a partial enlarged sectional view of a bellows in the pump device. -
FIG. 3 is a partial enlarged sectional view of a bellows portion of the bellows. -
FIG. 4 is a comparison view of the maximum value of stress which, in the case where the temperature of a fluid is 20° C., occurs in a peak portion when the bellows is extended. -
FIG. 5 is a comparison view of the maximum value of stress which, in the case where the temperature of the fluid is 70° C., occurs in a peak portion when the bellows is extended. -
FIG. 6 is a partial enlarged sectional view of a modification of the bellows portion of the bellows. -
FIG. 7 is another partial enlarged sectional view of the bellows in the pump device. -
FIG. 8 is a partial enlarged sectional view of a bellows in another example. -
FIG. 9 is a side sectional view of a pulsation damping device which is a fluid apparatus of another embodiment of the invention. -
FIG. 10 is a side sectional view of a bellows pump which is a fluid apparatus of a further embodiment of the invention. -
FIG. 11 is a partial enlarged sectional view of a bellows in a fluid apparatus of a conventional example. - Preferred embodiments of the invention will be described with reference to the drawings.
- The fluid apparatus of the invention is a bellows pump, a pulsation damping device, or the like, and, for example, used for transporting a fluid such as ultrapure water or chemical liquid in a facility for producing a semiconductor or liquid crystal.
-
FIG. 1 is a side sectional view of apump device 1 which is a fluid apparatus of an embodiment of the invention. - As shown in
FIG. 1 , thepump device 1 includes abellows pump 2, and apulsation damping device 3 which is juxtaposed to thebellows pump 2. Thebellows pump 2 and thepulsation damping device 3 have acommon partition wall 5, and are placed coaxially with each other. In thepartition wall 5, asuction flow passage 6,intermediate flow passage 7, and ejection flow passage 8 for a fluid are formed. - The
bellows pump 2 includes thebellows 10. Thebellows 10 is configured so as to be extendable and contractible in the axial direction (the lateral direction inFIG. 1 ) in order to suck the fluid from thesuction flow passage 6 and eject the fluid to theintermediate flow passage 7 which functions as an ejection flow passage. In the embodiment, a bottomed cylinder-like pump casing 11 is attached to a side wall portion of thepartition wall 5 on one axial end side (the right side inFIG. 1 ), and thebellows 10 is placed in thepump casing 11. - The
bellows 10 is configured by a fluorine resin (in the embodiment, polytetrafluoroethylene (PTFE)). Thebellows 10 is formed by cutting a cylindrical member made of polytetrafluoroethylene on a lathe by using a stick bite or a knife. - The
bellows 10 has an openingperipheral edge portion 12 on the other axial end side (the left side inFIG. 1 ). The openingperipheral edge portion 12 is fixed in an airtight state to a side wall portion of thepartition wall 5 on the one axial end side by a firstannular fixing plate 13. In this way, the internal space of thepump casing 11 is hermetically partitioned by using the bellows into apump working chamber 14 which is located inside thebellows 10, and apump operating chamber 15 which is located outside thebellows 10. - The
bellows 10 further has a closedend portion 21 on the one axial end side (the right side inFIG. 1 ). Thebellows 10 has acylindrical bellows portion 22 between the closedend portion 21 and the openingperipheral edge portion 12 so as to be extendable and contractible in the axial direction. In thebellows portion 22,peak portions 17,valley portions 18, andside surface portions 19, which will be described later, are provided (seeFIG. 2 ). - In the
bellows pump 2, moreover, asuction port 41 anddischarge port 42 for a fluid communicate with the interior of thepump working chamber 14. Thesuction port 41 communicates with thesuction flow passage 6, and thedischarge port 42 communicates with theintermediate flow passage 7. Afirst check valve 43 andsecond check valve 44 which can be alternately opened and closed in accordance with extending and contracting operations of thebellows 10, and which are of the resin-made spring type are disposed in the middles of thesuction flow passage 6 and theintermediate flow passage 7. - A
coupling member 46 is disposed in thepump operating chamber 15. Thecoupling member 46 is fixed to theclosed end portion 21 of thebellows 10 by using a secondannular fixing plate 206 andbolts 207. Ashaft member 47 is coupled to thecoupling member 46. Theshaft member 47 is disposed so as to be passed from the interior of thepump operating chamber 15 through a substantially middle of a bottom wall portion of thepump casing 11 to be projected to the outside. Apiston 48 is fixed to a projected portion of theshaft member 47. - The
piston 48 is fitted into acylinder 49 fixed to the bottom wall portion of thepump casing 11, in an axially slidable manner. Anair cylinder 53 which is driving means for extending and contracting thebellows 10 is configured so as to be able to alternately supply pressurized air from an air compressor or the like which is not shown, to thepump operating chamber 15 and the internal space surrounded by thecylinder 49 and thepiston 48 throughair holes pump casing 11, and thecylinder 49, respectively. -
Proximity sensors air cylinder 53, and asensor sensing plate 57 is attached to thepiston 48. In accordance with the axial reciprocal motion of thepiston 48, thesensor sensing plate 57 alternately approaches theproximity sensors cylinder 49, and that into thepump operating chamber 15 are automatically switched over. - As shown in
FIG. 1 , thepulsation damping device 3 further includes a bellows 60. The bellows 60 is configured so as to be extendable and contractible in the axial direction (the lateral direction inFIG. 1 ) in order to suck a fluid from theintermediate flow passage 7 which functions as a suction flow passage, and eject the fluid to the ejection flow passage 8. In the embodiment, a bottomed cylinder-like casing 61 is attached to a side wall portion of thepartition wall 5 on the other axial end side (the left side inFIG. 1 ), and thebellows 60 is placed in thecasing 61. - The bellows 60 has an opening
peripheral edge portion 62 on the one axial end side (the right side inFIG. 1 ). The openingperipheral edge portion 62 is fixed in an airtight state to a side wall portion of thepartition wall 5 on the other axial end side by anannular fixing plate 63. In this way, the internal space of thecasing 61 is hermetically partitioned by using thebellows 60 into aliquid chamber 64 which is located inside thebellows 60, and anair chamber 65 which is located outside the bellows 60. - The bellows 60 further has a
closed end portion 71 on the other axial end side. The bellows 60 has a cylindrical bellowsportion 72 between theclosed end portion 71 and the openingperipheral edge portion 62 so as to be extendable and contractible in the axial direction. In thebellows portion 72,peak portions 67,valley portions 68, andside surface portions 69 are provided (seeFIG. 2 ). - In the
pulsation damping device 3, moreover, theintermediate flow passage 7 and the ejection flow passage 8 communicate with the interior of theliquid chamber 64. Astopper wall 74 for restricting excessive extension of thebellows 60 which may be possibly caused by an unexpected situation is disposed at a position opposed to theclosed end portion 71 of thebellows 60, with forming a predetermined gap with respect to theclosed end portion 71. - A
bottom wall portion 75 is disposed on the other axial end side with respect to thestopper wall 74 of thecasing 61. In thebottom wall portion 75, anopening 76 is formed, and automatic ventilation adjusting means 77 for adjusting the filling pressure of the interior of theair chamber 65 is detachably attached by bolts or the like to the bottom wall portion in a state where the means is inserted into theopening 76. - The automatic ventilation adjusting means 77 is configured so as to balance the liquid pressure in the
liquid chamber 64 with the air pressure in theair chamber 65 in order to prevent excessive extending and contracting deformation from occurring in thebellows 60. Specifically, when the capacity of theliquid chamber 64 is increased to exceed a predetermined range, the automatic ventilation adjusting means 77 causes the air to be sucked into theair chamber 65 to raise the filling pressure, and, when the capacity of theliquid chamber 64 is decreased to exceed a predetermined range, the means discharges the air from theair chamber 65 to lower the filling pressure. - A
valve push rod 78 for opening and closing a suction valve (not shown) disposed in the automatic ventilation adjusting means 77, and aslider 81 attached to a tip end of avalve pull rod 79 for opening and closing a discharge valve (not shown) are disposed so as to face the interior of theair chamber 65 through a throughhole 82 which is formed in thestopper wall 74. Theslider 81 is always urged by aspring 83 toward the bellows 60. - Next, the operation of the pump device 1 (the bellows pump 2 and the pulsation damping device 3) will be described.
- In actuation of the
pump device 1, in the bellows pump 2, when the pressurized air from the air compressor or the like is supplied through theair hole 52 to the internal space surrounded by thecylinder 49 and thepiston 48, thebellows 10 is extended in the rightward direction inFIG. 1 to cause thepump working chamber 14 to have a negative pressure. In accordance with the extension of thebellows 10, thefirst check valve 43 on the side of thesuction port 41 is opened, and the fluid fed from thesuction flow passage 6 is sucked into thepump working chamber 14 through thefirst check valve 43. - By contrast, when the pressurized air which is fed from the air compressor or the like is supplied through the
air hole 51 into thepump operating chamber 15, thebellows 10 is contracted in the leftward direction inFIG. 1 . In accordance with the contraction of thebellows 10, thesecond check valve 44 on the side of thedischarge port 42 is opened, and the fluid which is sucked into thepump working chamber 14 is ejected toward theintermediate flow passage 7 from thesecond check valve 44. - As described above, when the bellows 10 is extended and contracted by the operation of the
air cylinder 53, thefirst check valve 43 andsecond check valve 44 in thepump working chamber 14 are alternately opened and closed, and the operation of sucking the fluid from thesuction flow passage 6 into thepump working chamber 14, and that of discharging the fluid from thepump working chamber 14 into theintermediate flow passage 7 are repeated. In this way, the pumping operation of the bellows pump 2 is executed. - During execution of the pumping operation, the pressurized air is adequately controlled so that the pressure (external pressure) of the pressurized air of the
pump operating chamber 15 which acts on thebellows portion 22 of thebellows 10 is always maintained to be higher than the pressure (internal pressure) of the fluid of thepump working chamber 14 which acts on thebellows portion 22. - The fluid ejected from the
discharge port 42 of the bellows pump 2 is formed into a pulsating flow by the extending and contracting operations of the bellows pump 2, and then fed through theintermediate flow passage 7 into theliquid chamber 64 which is formed in thebellows 60 of thepulsation damping device 3. After the fluid is temporarily stored in theliquid chamber 64, the fluid is ejected to the outside from the ejection flow passage 8. - In this case, when the ejection pressure of the fluid has an increasing tendency, the
bellows 60 of thepulsation damping device 3 is extended, and the capacity of theliquid chamber 64 is increased to absorb the ejection pressure. At this time, the liquid amount of the fluid which is flown out from theliquid chamber 64 is smaller than that elected from the bellows pump 2. - When, in this state, the ejection pressure of the fluid is changed to a decreasing tendency, the pressure of the fluid is lower than the filling pressure of the interior of the
air chamber 65 which is compressed by the extension of thebellows 60, and therefore thebellows 60 is contracted to decrease the capacity of theliquid chamber 64. At this time, the liquid amount of the fluid which is flown out from theliquid chamber 64 is larger than that elected from the bellows pump 2. - By the above-described repeated operation of changing the capacity of the
liquid chamber 64 which is caused by the extending and contracting operations of thebellows 60, the fluid is caused to be continuously and smoothly flown out from thepulsation damping device 3 while the pulsation is damped. - When the capacity of the
liquid chamber 64 of thepulsation damping device 3 is increased to exceed a predetermined range by the extending and contracting operations of thebellows 60, specifically, by the variation of the ejection pressure in the bellows pump 2, theclosed end portion 71 of thebellows 60 butts against thevalve push rod 78 of the automatic ventilation adjusting means 77, and then pushes thevalve push rod 78 in the leftward direction inFIG. 1 . Therefore, the suction valve is opened, the air is sucked into theair chamber 65, the filling pressure is raised, and excessive extending deformation of thebellows 60 is suppressed. Consequently, the capacity of theliquid chamber 64 is prevented from being excessively increased. - By contrast, when the capacity of the liquid chamber 20 a is decreased to exceed a predetermined range, the
slider 81 is engaged with the tip end of thevalve pull rod 79, and thevalve pull rod 79 is rightwardly pushed by thespring 83. Therefore, the discharge valve is opened, the air is discharged from the interior of theair chamber 65, the filling pressure is lowered, and excessive contracting deformation of thebellows 60 is suppressed. Consequently, the capacity of theliquid chamber 64 is prevented from being excessively decreased. - In this way, the amounts of extending and contracting deformations of the
bellows 60 can be restricted within a constant range irrespective of variation of the ejection pressure of the bellows pump 2, and pulsation can be reduced. - Next, the
bellows 10 of the bellows pump 2 will be described in more detail. The bellows 60 of thepulsation damping device 3 is configured in a substantially same manner as thebellows 10, and hence its description is omitted. -
FIG. 2 is a partial enlarged sectional view of the bellows 10(60) in thepump device 1.FIG. 3(a) is a partial enlarged sectional view of thebellows portion 22 when the bellows 10 is contracted.FIG. 3(b) is a partial enlarged sectional view of thebellows portion 22 when the bellows 10 is maximally extended. - As shown in
FIG. 2 , thebellows 10 has thepeak portions 17 andvalley portions 18 which are alternately formed in the direction of the axis 16 (the lateral direction inFIG. 1 ), and the annularside surface portions 19 which are located between thepeak portions 17 and thevalley portions 18, and which connect the both portions to each other. Each of thepeak portions 17 is provided in an outer circumferential surface portion of the bellows 10 (the bellows portion 22), and each of thevalley portions 18 is placed at a position which is closer to theaxis 16 than thepeak portion 17. Theside surface portions 19 which are adjacent to each other in the direction of theaxis 16 are placed to be opposed to each other. - In the
bellows 10, as shown inFIG. 3(a) , when the thickness of theside surface portions 19 in the direction of the axis 16 (the lateral direction inFIG. 1 ) is indicated by A, and that of the axial middle parts (an apex portion, the position of apath 0 which will be described later) of thepeak portions 17 in a direction (radial direction) which is perpendicular to the direction of theaxis 16 is indicated by B, a ratio B/A of the thicknesses is set within a range of 1.3 to 1.8. In the embodiment, the thickness A of theside surface portions 19 is set to be uniform in a direction which is perpendicular to the direction of theaxis 16. - According to the configuration, during extension of the
bellows 10 due to the operation thepump device 1, in the innercircumferential surface side 17 a of thepeak portion 17 which is extended in the direction of theaxis 16 as shown inFIG. 3(b) , large stress (maximum value) dispersedly occurs in arange 30 which extends along the inner circumferential surface across the middle portion in the direction of theaxis 16. Namely, large stress which is caused in thepeak portion 17 is not concentrated in a specific narrow place. This function effect will be described in Paragraphs Nos. [0054] to [0059]. In the case where the thickness ratio B/A is 1, stress is concentrated in a focused manner in the inner circumferential surface side of the axial middle portion of the peak portion which is extended in the axial direction (see thereference numeral 160 inFIG. 11 ). - Therefore, the middle part in the direction of the
axis 16 of thepeak portion 17 which is deformable in accordance with extension and contraction of thebellows 10 can be made not easily fatigued. Consequently, a crack which is due to extension and contraction of thebellows 10, and which extends in a direction perpendicular to the direction of theaxis 16 can be suppressed from occurring in the middle part in the direction of theaxis 16 of thepeak portion 17. As a result, thebellows 10 is hardly broken, and a prolonged life period of the bellows can be realized. - More preferably, the ratio B/A of the thickness B of the middle part in the direction of the
axis 16 of each ofpeak portions 17 in the direction which is perpendicular to the direction of theaxis 16, to the thickness A of each ofside surface portions 19 in the direction of theaxis 16 is set within a range of 1.3 to 1.5, and, further preferably, the ratio is set to 1.5. - According to the configuration, even in the case of severe use conditions such as those where the temperature of the fluid is higher (for example, 70° C.) than the ordinary temperature (room temperature), when the bellows 10 is extended in the direction of the
axis 16, large stress which is caused in thepeak portion 17 is not concentrated in a specific narrow place. Even in such a case, therefore, a crack which is due to extension and contraction of thebellows 10 can be suppressed from occurring in the middle part in the direction of theaxis 16 of thepeak portion 17 of thebellows 10. - Next, the phenomenon in which the embodiment achieves the function effect that large stress occurring in the
peak portion 17 is not concentrated in a specific narrow place will be described. The stress occurring in thepeak portion 17 of thebellows 10 was analyzed by calculating the Von Mises stress.FIG. 4 is a comparison view of the maximum value (maximum of Von Mises stress) of stress which, in the case where the temperature of the fluid is 20° C., occurs in thepeak portion 17 when the bellows 10 is extended.FIG. 5 is a comparison view of the maximum value (maximum Von Mises stress) of stress which, in the case where the temperature of the fluid is 70° C., occurs in thepeak portion 17 when the bellows 10 is extended. - In the case where, among paths which extend from one end in the direction of the
axis 16 of the innercircumferential surface side 17 a of thepeak portion 17 to the other end, the middle portion (apex portion) in the direction of theaxis 16 of thepeak portion 17 is indicated by apath 0, the maximum value (maximum Von Mises stress) of stress occurring in thepeak portion 17 which is stretched in the direction of theaxis 16 when the bellows 10 is extended is distributed in thearcuate range 30 that includes the position of thepath 0 in the inner circumferential surface side of thepeak portion 17. - From
FIG. 4 , it can be confirmed that, when the largest maximum Von Mises stress at the thickness ratio B/A=1 is set to 1, the maximum Von Mises stress has the largest value (i.e., 1) in a specific place which is the position of thepath 0, while being is steeply changed, but, in the embodiment, the maximum Von Mises stress is reduced to about 0.9 in a predetermined range in the direction of theaxis 16 and across the position of thepath 0, and the value of about 0.9 is substantially maintained. - From this, it is seen that, in the embodiment, the maximum Von Mises stress has an approximately same value in a relatively wide predetermined range (the flat-like portions in
FIG. 4 ) across the position of thepath 0 with respect to the path, at each of thickness ratios B/A=1.3, 1.5, and 1.8. Namely, it is seen that large stress (maximum value) occurring in thepeak portion 17 when the bellows 10 is extended has a relatively small value, and is distributed in the periphery of the position of thepath 0 without being concentrated to the position thereof. - From
FIG. 5 , moreover, it can be confirmed that, when the largest maximum Von Mises stress at the thickness ratio B/A=1 is set to 1, in the embodiment, the maximum Von Mises stress is reduced to about 0.85 in a predetermined range in the direction of theaxis 16 and across the position of thepath 0, and the value of about 0.85 is substantially maintained. - From this, it is seen that, even in the case where the temperature of the fluid is high (specifically, 70° C.), the maximum Von Mises stress has an approximately same value in a relatively wide predetermined range (the flat-like portions in
FIG. 5 ) across the position of thepath 0 with respect to the path, at each of thickness ratios B/A=1.3 and 1.5. Namely, it is seen that large stress (maximum value) occurring in thepeak portion 17 when the bellows 10 is extended has a relatively small value, and is distributed in the periphery of the position of thepath 0 without being concentrated to the position thereof. - In the embodiment, as shown in
FIG. 3(a) , the sectional shape of the innercircumferential surface side 17 a of thepeak portion 17 in the direction of theaxis 16 is formed into an arcuate shape having a first radius of curvature. The sectional shape of the outercircumferential surface side 17 b of thepeak portion 17 in the direction of theaxis 16 is formed into an arcuate shape having a second radius of curvature which is larger than the first radius of curvature. Here, thecenter 24 of the arc having the second radius of curvature which is placed on the same axis as thecenter 23 of the arc having the first radius of curvature is deviated toward the radially outer side with respect to thecenter 23. - In the embodiment, as shown in
FIGS. 2 and 3 , the sectional shape of an outercircumferential surface side 18 b of thevalley portion 18 in the direction of theaxis 16 is formed into a shape (arcuate shape) corresponding to the sectional shape of the innercircumferential surface side 17 a of thepeak portion 17 in the direction of theaxis 16. The sectional shape of an innercircumferential surface side 18 a of thevalley portion 18 in the direction of theaxis 16 is formed into a shape (arcuate shape) corresponding to the sectional shape of the outercircumferential surface side 17 b of thepeak portion 17 in the direction of theaxis 16. - Although, in the embodiment, the peak portion of the bellows in the invention is the
peak portion 17 in which a ridge portion of the outercircumferential surface side 17 b is formed into an arcuate shape in sectional, the peak portion is not limited to this. As shown inFIG. 6(a) , the peak portion may be formed as apeak portion 33 having, in a sectional view, an angular shape in which ridge portions of an outercircumferential surface side 33 b are formed intoedge portions 33 c in the both end sides in the direction of theaxis 16, or, as shown inFIG. 6(b) , apeak portion 35 in which theedge portions 33 c of thepeak portion 33 are chamfered. From the viewpoint of relaxation of stress concentration, however, the peak portion of the bellows in the invention is preferably thepeak portion 17 shown inFIG. 3 as compared with thepeak portions FIGS. 6(a) and (b) . - In the embodiment, as shown in
FIG. 3 , aspace portion 201 is formed between theside surface portions 19 which are adjacent to each other in the direction of theaxis 16. Also when the bellows 10 is contracted, thespace portion 201 is held. The width (the width of the space portion in the direction of the axis 16) C between theside surface portions 19 which are adjacent to each other in the direction of theaxis 16 is set to be substantially equal to the thickness A of theside surface portions 19 when the bellows 10 is contracted (maximally contracted). - In the embodiment, the
side surface portions 19 are configured so as to, when the bellows 10 is maximally contracted in the axial direction, be located on a plane which is substantially perpendicular to the axial direction of thebellows 10 as shown inFIG. 3(a) . The state of thebellows 10 is adequately controlled by theair cylinder 53 so that thespace portion 201 having the width C of a predetermined dimension is formed between theside surface portions 19 which are opposed to each other on the side of thepump working chamber 14. - Specifically, the
side surface portions 19 of thebellows 10 has an innercircumferential surface 202 which faces toward thepump working chamber 14, and an outercircumferential surface 203 which faces toward thepump operating chamber 15. Each of the innercircumferential surface 202 and the outercircumferential surface 203 is formed into a planar shape. The innercircumferential surface 202 and the outercircumferential surface 203 are placed in parallel to each other so that the thickness A of theside surface portions 19 is substantially constant in a radial direction of thebellows 10. - When the bellows 10 is maximally contracted in the axial direction, then, the inner
circumferential surface 202 and the outercircumferential surface 203 are configured to constitute planes which are substantially perpendicular to the axial direction of thebellows 10. When the bellows 10 is maximally contracted, therefore, thespace portion 201 has the width C which is approximately equal to thepeak portion 17 on the side of thevalley portion 18, and namely has the width C which is substantially constant in a radial direction of thebellows 10. - The maximally contracted state of the
bellows 10 can be realized by, in theair cylinder 53, contacting thepiston 48 which is moved for contracting thebellows 10, to the cylinder 49 (the bottom wall portion of the pump casing 11), thereby restricting the position of thepiston 48, or controlling the pressurized air by using theproximity sensors sensor sensing plate 57. - In the
bellows 10 in the maximally contracted state, therefore, it is possible to, in thepump working chamber 14, ensure the width C which does not impede ingress of the fluid into thespace portion 201, and thepump working chamber 14 is easily filled with the fluid. Consequently, the operation of switching the contracted state of thebellows 10 to the extended state in accordance with the inflow of the fluid into thepump working chamber 14 can be smoothly performed. -
FIG. 7(a) is an enlarged sectional view of a vicinity of the openingperipheral edge portion 12 when the bellows 10 is maximally contracted.FIG. 7(b) is an enlarged sectional view of a vicinity of theclosed end portion 21 when the bellows 10 is maximally contracted. - In the embodiment, as shown in
FIG. 7(a) , thebellows 10 is disposed so that, when the bellows 10 is maximally contracted, the side surface portion 19(19A) which is closest to the openingperipheral edge portion 12 is not contacted with the firstannular fixing plate 13. The side surface portion 19(19A) is placed so that, when the bellows 10 is maximally contracted, afirst gap 205 is formed between the side surface portion and the firstannular fixing plate 13. - In the embodiment, as shown in
FIG. 7(b) , thebellows 10 is disposed so that, when the bellows 10 is maximally contracted, the side surface portion 19(19B) which is closest to theclosed end portion 21 is not contacted with the secondannular fixing plate 206. The side surface portion 19(19B) is placed so that, when the bellows 10 is maximally contracted, asecond gap 208 is formed between the side surface portion and the secondannular fixing plate 206. - According to the configuration, when the bellows 10 is extension-driven, it is possible to block the side surface portion 19(19A) from repeatedly contacting with the first
annular fixing plate 13. In this case, furthermore, it is possible to block the side surface portion 19(19B) from repeatedly contacting with the secondannular fixing plate 206. Therefore, deterioration of the bellows 10 (the side surface portions 19(19A), (19B)) caused by contact with the firstannular fixing plate 13 and the secondannular fixing plate 206 can be prevented from occurring. - In the fluid apparatus of the invention, a
bellows 210 which, as shown inFIG. 8 , is directly fixed in an openingperipheral edge portion 213 to apartition wall 211 and apump casing 12 may be used in place of thebellows 10. In this case, it is preferable that, when thebellows 210 is maximally contracted, agap 217 is formed between a side surface portion 215(215A) which is included in thebellows 210, and which is closest to the openingperipheral edge portion 213, and the openingperipheral edge portion 213, thereby preventing the both portions from contacting with each other. -
FIG. 9 is a side sectional view showing the whole of apulsation damping device 93 which is a fluid apparatus of another embodiment of the invention. The portions corresponding to the places shown inFIG. 1 are denoted by the same reference numerals. - As shown in
FIG. 9 , thepulsation damping device 93 is substantially identical with thepulsation damping device 3 of the above-described embodiment. Thepulsation damping device 93 includes a cylindricalperipheral wall member 102, and acasing 101 having anupper wall member 103 andlower wall member 104 which are fixed to the upper and lower ends of the peripheral wall member, respectively. The bellows 60 which is configured so as to be extendable and contractible in the axial direction (the vertical direction) is placed in thecasing 101. - Then, the opening
peripheral edge portion 62 of thebellows 60 is fixed in an airtight state to a side wall portion of thelower wall member 104 by theannular fixing plate 63. Therefore, the internal space of thecasing 101 is hermetically partitioned into theliquid chamber 64 which is located inside thebellows 60, and theair chamber 65 which is located outside the bellows 60. In thelower wall member 104, thesuction flow passage 6 and ejection flow passage 8 for a fluid are formed, and the bothpassages 7, 8 communicate with theliquid chamber 64. The automatic ventilation adjusting means 77 is disposed in theupper wall member 103. - The bellows 60 has a configuration which is substantially identical with that used in the
pulsation damping device 3 shown inFIG. 1 , and the configuration of the automatic ventilation adjusting means 77 is identical with that used in thepulsation damping device 3. Therefore, detailed description of their function operations is omitted. -
FIG. 10 is a longitudinal sectional view showing the whole of a bellows pump 112 which is a fluid apparatus of a further embodiment of the invention. - In the bellows pump 112, as shown in
FIG. 10 , a pair of right and left pump portions are symmetrically placed. The pump portions complementarily operate, and therefore a large transportation amount can be obtained. - Namely, the bellows pump 112 includes a cylindrical peripheral wall member 121, and a pump casing 120 having
sidewall members 122, 123 which are fixed to the left and right ends of the peripheral wall member 121, respectively. In the pump casing 120, a pair of bellows 125, 126 are placed in a bilaterally symmetrical manner across a partition wall 124. - The bellows 125, 126 have a configuration which is substantially identical with the
bellows 10 used in the bellows pump 2 shown inFIG. 1 . In the bellows 125, 126, their opening peripheral edge portions are fixed in an airtight state to side wall portions of the partition wall 124 by annular fixing plates 128, 129, and their closed end portions are coupled to pressure receiving plates 131, 132. The pressure receiving plates 131, 132 are coupled to each other by a plurality of coupling rods 133 which are passed through the partition wall 124. - In the partition wall 124, a suction flow passage 134 and ejection flow passage 135 for a fluid are formed. Between the suction flow passage 134 and the ejection flow passage 135, check valves 136, 137 which can be alternately opened and closed in accordance with extending and contracting operations of the bellows 125 are disposed, and check valves 138, 139 which can be alternately opened and closed in accordance with extending and contracting operations of the bellows 126 are disposed.
- Furthermore, air holes 141, 142 for supplying pressurized air from a compressor or the like which is not shown, to the pump casing 120, and air holes 143, 144 for discharging the air in the pump casing 120 are formed in the
sidewall members 122, 123 of the pump casing 120, respectively. - In the bellows pump 112, therefore, the pressurized air from the compressor or the like is alternately supplied from the air holes 141, 142 to cause the left and right bellows 125, 126 to alternately perform extending and contracting operations. When the fluid is sucked from the suction flow passage 134 through the check valve 139 by the right bellows 126, for example, the fluid stored in the left bellows 125 is ejected from the ejection flow passage 135 through the check valve 136 by the left bellows 125. When the fluid is sucked from the suction flow passage 134 through the check valve 137 by the left bellows 125, the fluid stored in the right bellows 126 is ejected from the ejection flow passage 135 through the check valve 138 by the right bellows 126.
- When the left and right bellows 125, 126 are caused to alternately perform extending and contracting operations in this way, the suction of the fluid from the suction flow passage 134, and the ejection to the ejection flow passage 135 are repeated, whereby the predetermined pumping operation is executed.
-
- 1 pump device (fluid apparatus)
- 6 suction flow passage
- 7 intermediate flow passage (ejection flow passage or suction flow passage)
- 8 ejection flow passage
- 10 bellows
- 16 axis
- 17 peak portion
- 18 valley portion
- 19 side surface portion
- 33 peak portion
- 35 peak portion
- 60 bellows
- 67 peak portion
- 68 valley portion
- 69 side surface portion
- 93 pulsation damping device (fluid apparatus)
- 112 bellows pump (fluid apparatus)
- 125 bellows
- 126 bellows
Claims (4)
1. A fluid apparatus including a bellows which is configured to be extendable and contractible in an axial direction in order to suck a fluid from a suction flow passage and eject the fluid to an ejection flow passage, wherein
the bellows comprises: peak portions and valley portions which are alternately formed in the axial direction; and annular side surface portions which are located between the peak portions and the valley portions, and which connect the both portions to each other, and
a ratio B/A of a thickness B of the axial middle part of each of the peak portions in a direction which is perpendicular to the axial direction, to a thickness A of each of the side surface portions in the axial direction is set within a range of 1.3 to 1.8.
2. The fluid apparatus according to claim 1 , wherein the ratio B/A of the thickness B of the axial middle part of each of the peak portions in the direction which is perpendicular to the axial direction, to the thickness A of each of the side surface portions in the axial direction is set within a range of 1.3 to 1.5.
3. The fluid apparatus according to claim 1 , wherein, when the bellows is maximally contracted in the axial direction, each of side surface portions is located in a plane which is substantially perpendicular to the axial direction of the bellows.
4. The fluid apparatus according to claim 2 , wherein, when the bellows is maximally contracted in the axial direction, each of side surface portions is located in a plane which is substantially perpendicular to the axial direction of the bellows.
Applications Claiming Priority (3)
Application Number | Priority Date | Filing Date | Title |
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JP2013252114 | 2013-12-05 | ||
JP2013-252114 | 2013-12-05 | ||
PCT/JP2014/080761 WO2015083553A1 (en) | 2013-12-05 | 2014-11-20 | Fluid machine |
Publications (1)
Publication Number | Publication Date |
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US20160377071A1 true US20160377071A1 (en) | 2016-12-29 |
Family
ID=53273320
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
US15/039,506 Abandoned US20160377071A1 (en) | 2013-12-05 | 2014-11-20 | Fluid apparatus |
Country Status (7)
Country | Link |
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US (1) | US20160377071A1 (en) |
EP (1) | EP3078856B1 (en) |
JP (1) | JPWO2015083553A1 (en) |
KR (1) | KR20160068912A (en) |
CN (1) | CN105745446A (en) |
TW (1) | TW201533321A (en) |
WO (1) | WO2015083553A1 (en) |
Families Citing this family (2)
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NO344401B1 (en) * | 2017-07-04 | 2019-11-25 | Rsm Imagineering As | Method, system and use, of controlling working range of a pump bellows |
DE102021003639A1 (en) * | 2021-07-14 | 2023-01-19 | Hydac Technology Gmbh | conveyor |
Citations (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2001093836A (en) * | 1999-09-20 | 2001-04-06 | Canon Inc | Substrate structure and manufacturing method therefor |
Family Cites Families (9)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH0650265A (en) | 1992-07-30 | 1994-02-22 | Daikin Ind Ltd | Bellows pump and manufacture thereof |
JPH10148258A (en) * | 1996-11-18 | 1998-06-02 | Nissan Motor Co Ltd | Bellows |
JP2001193836A (en) * | 2000-01-11 | 2001-07-17 | Nippon Pillar Packing Co Ltd | Bellows and fluid equipment using the bellows |
JP3337206B2 (en) * | 2000-01-11 | 2002-10-21 | 日本ピラー工業株式会社 | Bellows and fluid equipment using the same |
JP3974512B2 (en) * | 2002-12-20 | 2007-09-12 | 日本ピラー工業株式会社 | Fluid equipment |
JP3874416B2 (en) * | 2003-05-02 | 2007-01-31 | 日本ピラー工業株式会社 | Reciprocating pump |
JP4324568B2 (en) * | 2005-01-26 | 2009-09-02 | 日本ピラー工業株式会社 | Bellows pump |
JP4982515B2 (en) * | 2009-02-24 | 2012-07-25 | 日本ピラー工業株式会社 | Bellows pump |
JP2013050187A (en) * | 2011-08-31 | 2013-03-14 | Dainippon Screen Mfg Co Ltd | Bellows and substrate treatment apparatus using the same |
-
2014
- 2014-11-20 WO PCT/JP2014/080761 patent/WO2015083553A1/en active Application Filing
- 2014-11-20 US US15/039,506 patent/US20160377071A1/en not_active Abandoned
- 2014-11-20 KR KR1020167012275A patent/KR20160068912A/en not_active Application Discontinuation
- 2014-11-20 JP JP2015551459A patent/JPWO2015083553A1/en active Pending
- 2014-11-20 EP EP14868590.2A patent/EP3078856B1/en active Active
- 2014-11-20 CN CN201480063489.5A patent/CN105745446A/en active Pending
- 2014-12-01 TW TW103141590A patent/TW201533321A/en unknown
Patent Citations (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2001093836A (en) * | 1999-09-20 | 2001-04-06 | Canon Inc | Substrate structure and manufacturing method therefor |
Also Published As
Publication number | Publication date |
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JPWO2015083553A1 (en) | 2017-03-16 |
WO2015083553A1 (en) | 2015-06-11 |
TW201533321A (en) | 2015-09-01 |
EP3078856B1 (en) | 2021-01-27 |
CN105745446A (en) | 2016-07-06 |
EP3078856A4 (en) | 2017-08-02 |
KR20160068912A (en) | 2016-06-15 |
EP3078856A1 (en) | 2016-10-12 |
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Legal Events
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AS | Assignment |
Owner name: NIPPON PILLAR PACKING CO., LTD., JAPAN Free format text: ASSIGNMENT OF ASSIGNORS INTEREST;ASSIGNORS:FUJII, TATSUYA;FUJII, MAKOTO;MIYAMOTO, MASAKI;AND OTHERS;REEL/FRAME:038732/0907 Effective date: 20160518 |
|
STCB | Information on status: application discontinuation |
Free format text: ABANDONED -- FAILURE TO RESPOND TO AN OFFICE ACTION |