US20160348241A1 - Vapor deposition apparatus and method of manufacturing organic light-emitting display apparatus - Google Patents
Vapor deposition apparatus and method of manufacturing organic light-emitting display apparatus Download PDFInfo
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- US20160348241A1 US20160348241A1 US15/231,647 US201615231647A US2016348241A1 US 20160348241 A1 US20160348241 A1 US 20160348241A1 US 201615231647 A US201615231647 A US 201615231647A US 2016348241 A1 US2016348241 A1 US 2016348241A1
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- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
- C23C16/44—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating
- C23C16/455—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating characterised by the method used for introducing gases into reaction chamber or for modifying gas flows in reaction chamber
- C23C16/45523—Pulsed gas flow or change of composition over time
- C23C16/45525—Atomic layer deposition [ALD]
- C23C16/45544—Atomic layer deposition [ALD] characterized by the apparatus
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- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
- C23C16/22—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the deposition of inorganic material, other than metallic material
- C23C16/30—Deposition of compounds, mixtures or solid solutions, e.g. borides, carbides, nitrides
- C23C16/40—Oxides
- C23C16/403—Oxides of aluminium, magnesium or beryllium
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- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
- C23C16/44—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating
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- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
- C23C16/44—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating
- C23C16/4412—Details relating to the exhausts, e.g. pumps, filters, scrubbers, particle traps
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- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
- C23C16/44—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating
- C23C16/455—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating characterised by the method used for introducing gases into reaction chamber or for modifying gas flows in reaction chamber
- C23C16/45519—Inert gas curtains
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- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
- C23C16/44—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating
- C23C16/455—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating characterised by the method used for introducing gases into reaction chamber or for modifying gas flows in reaction chamber
- C23C16/45563—Gas nozzles
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- H01L51/001—
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- H01L51/56—
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- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05B—ELECTRIC HEATING; ELECTRIC LIGHT SOURCES NOT OTHERWISE PROVIDED FOR; CIRCUIT ARRANGEMENTS FOR ELECTRIC LIGHT SOURCES, IN GENERAL
- H05B33/00—Electroluminescent light sources
- H05B33/10—Apparatus or processes specially adapted to the manufacture of electroluminescent light sources
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- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10K—ORGANIC ELECTRIC SOLID-STATE DEVICES
- H10K50/00—Organic light-emitting devices
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- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10K—ORGANIC ELECTRIC SOLID-STATE DEVICES
- H10K71/00—Manufacture or treatment specially adapted for the organic devices covered by this subclass
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- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10K—ORGANIC ELECTRIC SOLID-STATE DEVICES
- H10K71/00—Manufacture or treatment specially adapted for the organic devices covered by this subclass
- H10K71/10—Deposition of organic active material
- H10K71/16—Deposition of organic active material using physical vapour deposition [PVD], e.g. vacuum deposition or sputtering
- H10K71/164—Deposition of organic active material using physical vapour deposition [PVD], e.g. vacuum deposition or sputtering using vacuum deposition
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- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10K—ORGANIC ELECTRIC SOLID-STATE DEVICES
- H10K71/00—Manufacture or treatment specially adapted for the organic devices covered by this subclass
- H10K71/10—Deposition of organic active material
- H10K71/16—Deposition of organic active material using physical vapour deposition [PVD], e.g. vacuum deposition or sputtering
- H10K71/166—Deposition of organic active material using physical vapour deposition [PVD], e.g. vacuum deposition or sputtering using selective deposition, e.g. using a mask
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- H01L27/3244—
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- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10K—ORGANIC ELECTRIC SOLID-STATE DEVICES
- H10K59/00—Integrated devices, or assemblies of multiple devices, comprising at least one organic light-emitting element covered by group H10K50/00
- H10K59/10—OLED displays
- H10K59/12—Active-matrix OLED [AMOLED] displays
Definitions
- Embodiments of the present invention relate to a vapor deposition apparatus and a method of manufacturing an organic light-emitting display apparatus.
- Embodiments of the present invention more particularly relate to a vapor deposition apparatus, by which a deposition process is efficiently performed and deposition film characteristics are easily improved, and a method of manufacturing an organic light-emitting display apparatus.
- Semiconductor devices, display apparatuses, other electronic devices, and the like include a plurality of thin films.
- One of various methods of forming the plurality of thin films is a vapor deposition method.
- the vapor deposition method uses one or more gases as raw materials for forming a thin film.
- gases are chemical vapor deposition (CVD), atomic layer deposition (ALD), and the like.
- one raw material is injected and purged/pumped, one or more molecular layers are adsorbed onto a substrate, after which another raw material is injected and purged/pumped to thereby form a desired single atomic layer or multiple atomic layers.
- an organic light-emitting display apparatus has attracted attention as a next-generation display apparatus due to high-grade characteristics, such as wide angle of views, high contrast, and quick response speeds.
- the organic light-emitting display apparatus includes an intermediate layer having an organic emission layer between a first electrode and a second electrode that face the first electrode and further includes one or more thin films.
- a deposition process may be used to form the one or more thin films of the organic light-emitting display apparatus.
- aspects of embodiments of the present invention include a vapor deposition apparatus, by which a deposition process is efficiently performed and deposition film characteristics are easily improved, and a method of manufacturing an organic light-emitting display apparatus.
- a vapor deposition apparatus includes: a stage onto which a substrate is disposed; and a supply unit disposed to face the substrate and having a main body member and a nozzle member disposed on one surface of the main body member and facing the substrate, to sequentially supply a plurality of gases towards the substrate.
- the nozzle member may sequentially inject a first raw material gas, a second raw material gas, and a purge gas towards the substrate.
- the nozzle member may have a long extending shape.
- the nozzle member may be formed to have a length that is equal to or greater than a width of one direction of the substrate so as to correspond to the width of the one direction of the substrate.
- the nozzle member may be disposed to correspond to the center of the substrate.
- the vapor deposition apparatus may further include an exhaust unit defined as separated spaces between edges of the stage and edges of the supply unit.
- the stage may be disposed over the supply unit for the substrate to be disposed on the stage such that a surface of the substrate on which a deposition process is performed faces downward (e.g. towards the ground).
- the vapor deposition apparatus may further include a curtain unit disposed to face the stage and deviate from opposite edges of the substrate and having curtain nozzles for injecting a purge gas (e.g. an inert gas).
- a purge gas e.g. an inert gas
- the curtain nozzles may be disposed at the opposite edges of the substrate and facing the opposite edges.
- the curtain nozzles may be disposed and oriented to all edges of the substrate.
- the curtain nozzles may be formed in a rectangular ring shape.
- the supply unit may include a plurality of supply modules, each supply module including a main body member and a nozzle member.
- the exhaust unit may be disposed between every two adjacent supply modules.
- the nozzle member may include a first supply region, a second supply region, and a partition disposed between the first supply region and the second supply region.
- the first raw material gas may be injected from the first supply region, and the second raw material gas may be injected from the second supply region.
- the purge gas may be discharged from the second supply region while the first raw material gas is being injected from the first supply region.
- the purge gas may be discharged from the first supply region while the second raw material gas is being injected from the second supply region.
- the vapor deposition apparatus may further include a linear gas supply line for supplying gases to the nozzle member of the supply unit.
- the vapor deposition apparatus may further include a first valve, a second valve, and a third valve disposed to control a process of respectively delivering a first raw material gas, a second raw material gas, and a purge gas to the gas supply line.
- the vapor deposition apparatus may further include a first purge gas valve, a second purge gas valve, and a third purge gas valve disposed in a direction farther from the gas supply line than the first valve, the second valve, and the third valve to control injection of the purge gas.
- a method of manufacturing an organic light-emitting display apparatus including a thin film on a substrate by using a vapor deposition apparatus the vapor deposition apparatus including: a stage onto which the substrate is disposed; and a supply unit disposed to face the substrate and having a main body member and a nozzle member disposed on one surface of the main body member facing the substrate, to sequentially supply a plurality of gases towards the substrate, includes forming the thin film, wherein the forming of the thin film is performed by sequentially injecting different raw material gases from the nozzle member in a state where the substrate and the vapor deposition apparatus are fixed.
- the organic light-emitting display apparatus may include a first electrode, an intermediate layer having an organic emission layer, a second electrode, and an encapsulating layer, and the forming of the thin film may include forming the encapsulating layer.
- the forming of the thin film may include forming an insulating layer.
- the forming of the thin film may include forming a conductive layer.
- FIG. 1 is a schematic cross-sectional view of a vapor deposition apparatus according to an embodiment of the present invention
- FIG. 2 is a top view in a direction A of FIG. 1 ;
- FIGS. 3A to 3D are cross-sectional views illustrating a deposition process using the vapor deposition apparatus of FIG. 1 ;
- FIG. 4 is a schematic cross-sectional view of a vapor deposition apparatus according to another embodiment of the present invention.
- FIG. 5 is a top view in a direction A of FIG. 4 ;
- FIG. 6 is a schematic cross-sectional view of a vapor deposition apparatus according to another embodiment of the present invention.
- FIG. 7 is a schematic cross-sectional view of a vapor deposition apparatus according to another embodiment of the present invention.
- FIGS. 8A to 8D are cross-sectional views illustrating a deposition process using the vapor deposition apparatus of FIG. 7 ;
- FIG. 9 is a schematic cross-sectional view of a vapor deposition apparatus according to another embodiment of the present invention.
- FIG. 10 is a schematic cross-sectional view of an organic light-emitting display apparatus manufactured by a method of manufacturing an organic light-emitting display apparatus according to another embodiment of the present invention.
- FIG. 11 is a magnified view of F of FIG. 10 .
- FIG. 1 is a schematic cross-sectional view of a vapor deposition apparatus 100 according to an embodiment of the present invention
- FIG. 2 is a top view in a direction A of FIG. 1 ,
- the vapor deposition apparatus 100 may include a stage 105 and a supply unit 110 .
- a substrate 30 is disposed on the stage 105 .
- the stage 105 is formed to stably fix the substrate 30 during a deposition process and may further include a clamp and the like.
- the stage 105 is disposed on the supply unit 110 such that a surface of the substrate 30 , particularly, a surface on which the deposition process is to be performed, i.e., a lower surface of the substrate 30 , faces the ground.
- the stage 105 may be formed to have a set or predetermined groove, wherein the substrate 30 is disposed in the groove.
- the substrate 30 is relatively stable on the stage 105 , and an escape, vibration, and the like of the substrate 30 is prevented during the deposition process.
- stage 105 may include no groove.
- the supply unit 110 may include a main body member 111 and a nozzle member 112 .
- the main body member 111 supports the entire supply unit 110 , functions as a housing, and may include therein a connection pipe for delivering a raw material to the nozzle member 112 .
- the nozzle member 112 is disposed on one surface of the main body member 111 .
- the nozzle member 112 injects a gaseous raw material for performing the deposition process towards the substrate 30 .
- the nozzle member 112 injects a first raw material gas S towards the substrate 30 .
- this is only illustrative, and the nozzle member 112 may sequentially and repeatedly inject a plurality of gases towards the substrate 30 to perform the deposition process on the substrate 30 . A detailed description thereof will be made below.
- the nozzle member 112 is a linear nozzle member having a long extending shape. That is, as shown in FIG. 2 , the nozzle member 112 is formed to have a length that is greater than a width along one direction of the substrate 30 . As another example, the nozzle member 112 may have a length that is the same as the width along the one direction of the substrate 30 .
- the first raw material gas S injected from the nozzle member 112 uniformly reacts with the entire surface of the substrate 30 , thereby uniformly performing the deposition process.
- the nozzle member 112 may be disposed to correspond to the center of the substrate 30 to thereby easily perform the uniform deposition process.
- An exhaust unit 120 is formed to discharge residual gases after the deposition process.
- the exhaust unit 120 is defined by separated spaces between edges of the stage 105 and edges of the supply unit 110 .
- FIGS. 3A to 3D are cross-sectional views illustrating a deposition process using the vapor deposition apparatus 100 of FIG. 1 .
- the first raw material gas S is injected in a direction of the substrate 30 from the nozzle member 112 of the supply unit 110 .
- the first raw material gas S may include various suitable materials.
- the first raw material gas S may be a gas including aluminum (Al), e.g., trimethyl aluminum (TMA).
- Al aluminum
- TMA trimethyl aluminum
- an adsorption layer including Al is formed on the surface of the substrate 30 .
- a chemical adsorption layer and a physical adsorption layer are formed on the surface of the substrate 30 .
- a purge gas P is injected in the direction of the substrate 30 from the nozzle member 112 of the supply unit 110 .
- the purge gas P may include various suitable materials.
- the purge gas P may include an inert gas, e.g., argon or nitrogen.
- the physical adsorption layer having a weak molecular bonding force in the adsorption layer described above which is formed on the surface of the substrate 30 with the first raw material gas S is separated from the substrate 30 due to the purge gas P, and the separated gas or residual substances are removed through the exhaust unit 120 , thereby improving the purity of a deposition film to be finally formed on the substrate 30 .
- a second raw material gas R is injected in the direction of the substrate 30 from the nozzle member 112 of the supply unit 110 .
- the second raw material gas R may include various suitable materials.
- the second raw material gas R may include a gas including oxygen (O), e.g., hydrogen oxide (H 2 O), dioxygen (O 2 ), and/or nitrogen oxide (N 2 O).
- O oxygen
- the second raw material gas R may be converted into a radical form by generating plasma and injected to the substrate 30 .
- the second raw material gas R When the second raw material gas R is injected in the direction of the substrate 30 , the second raw material gas R reacts with the chemical adsorption layer formed of the first raw material gas S, which has been already adsorbed on the substrate 30 , or displaces a portion of the chemical adsorption layer, thereby finally forming a desired deposition film, e.g., an aluminum oxide (Al x O y ) layer. At this time, an excessive second raw material gas R remains by forming a physical adsorption layer or is discharged through the exhaust unit 120 .
- a desired deposition film e.g., an aluminum oxide (Al x O y ) layer.
- the purge gas P is injected in the direction of the substrate 30 from the nozzle member 112 of the supply unit 110 .
- the physical adsorption remaining on the surface of the substrate 30 is separated from the substrate 30 due to the purge gas P, and the separated gas or residual substances are removed through the exhaust unit 120 , thereby improving the purity of a deposition film to be finally formed on the substrate 30 .
- the supply unit 110 includes the nozzle member 112 , and the first and second raw material gases S and R and the purge gas P are sequentially injected from the nozzle member 112 towards the center of the substrate 30 . Accordingly, even during one cycle of the deposition process including a plurality of operations, the substrate 30 and the supply unit 110 do not have to move. In addition, the supply unit 110 does not have to be larger than necessary, and thus, the miniaturization of the vapor deposition apparatus 100 may be achieved.
- the first raw material gas S, the second raw material gas R, and the purge gas P are sequentially injected by the nozzle member 112 , and thus, an ALD process in which at least four operations form one cycle may be easily performed.
- an organic light-emitting display apparatus is manufactured using the substrate 30 by disposing the substrate 30 on the supply unit 110 such that a deposition surface of the substrate 30 faces the ground, the connectivity with a plurality of processes in which the substrate 30 faces the ground is improved.
- FIG. 4 is a schematic cross-sectional view of a vapor deposition apparatus 200 according to another embodiment of the present invention
- FIG. 5 is a top view in a direction A of FIG. 4 .
- the vapor deposition apparatus 200 may include a stage 205 , a supply unit 210 , an exhaust unit 220 , and curtain units 230 A and 230 B.
- a stage 205 may include a stage 205 , a supply unit 210 , an exhaust unit 220 , and curtain units 230 A and 230 B.
- curtain units 230 A and 230 B may be provided again.
- the substrate 30 is disposed on the stage 205 .
- the stage 205 is disposed on the supply unit 210 such that a surface of the substrate 30 , particularly, a surface on which a deposition process is to be performed, i.e., a lower surface of the substrate 30 , faces the ground.
- the supply unit 210 may include a main body member 211 and a nozzle member 212 .
- the nozzle member 212 has a long extending shape. That is, as shown in FIG. 5 , the nozzle member 212 is formed to have a length that is greater than a width of one direction of the substrate 30 . As another example, the nozzle member 212 may have a length that is the same as the width of the one direction of the substrate 30 .
- the nozzle member 212 may be disposed to correspond to the center of the substrate 30 to thereby easily perform the uniform deposition process.
- the two curtain units 230 A and 230 B are disposed to face the stage 205 .
- the curtain units 230 A and 230 B are disposed to deviate from edges of the substrate 30 , i.e., not to overlap the substrate 30 .
- the curtain units 230 A and 230 B include curtain main bodies 231 A and 231 B and curtain nozzles 232 A and 232 B, respectively.
- the curtain nozzles 232 A and 232 B inject a curtain gas towards the stage 205 .
- the curtain main bodies 231 A and 231 B may include therein connection pipes for supplying the curtain gas to the curtain nozzles 232 A and 232 B, respectively.
- the curtain nozzles 232 A and 232 B may be symmetrically disposed at both ends based on the nozzle member 212 . That is, the curtain nozzles 232 A and 232 B are disposed and oriented to one side of the substrate 30 and another side thereof facing the one side and not to overlap each other, respectively.
- the curtain gas injected by the curtain nozzles 232 A and 232 B may be an inert gas.
- the curtain gas prevents the escape of the first raw material gas S injected by the nozzle member 212 from the substrate 30 and largely from the stage 205 . By doing this, damage of the outer side surfaces of the stage 205 , the supply unit 210 , and other portions of the vapor deposition apparatus 200 due to the first raw material gas S is prevented.
- the vapor deposition apparatus 200 may be disposed in a chamber, and in this case, the curtain gas injected by the curtain nozzles 232 A and 232 B functions to block the movement of the first raw material gas S to thereby prevent contamination or damage of the inner wall of the chamber due to the first raw material gas S.
- curtain nozzles may be disposed and oriented to all of four sides of the substrate 30 . That is, although the curtain nozzles 232 A and 232 B are shown to be disposed and oriented to the left and right sides of the substrate 30 in FIG. 5 , curtain nozzles may be further disposed and oriented to the top and bottom sides of the substrate 30 , and all of these curtain nozzles may be connected to form a shape, such as a rectangular ring.
- the curtain main bodies 231 A and 231 B of the curtain units 230 A and 230 B may have various shapes.
- the curtain main bodies 231 A and 231 B may be formed as one body with the main body member 211 of the supply unit 210 or formed independently.
- the exhaust unit 220 may include a first exhaust unit 221 and a second exhaust unit 222 .
- the first exhaust unit 221 and the second exhaust unit 222 of the exhaust unit 220 are disposed between the nozzle member 212 and the curtain units 230 A and 230 B, respectively.
- the exhaust unit 220 is disposed to correspond to or deviate from edges of the substrate 30 .
- the exhaust unit 220 is formed to discharge gasses and the like towards the ground.
- residual gases are discharged through the exhaust unit 220 , and in this case, since the residual gases are discharged in a direction that is opposite to a direction of injecting the first raw material gas S from the nozzle member 212 , i.e., a direction of orienting to the ground, an exhaust characteristic is improved.
- the deposition process using the vapor deposition apparatus 200 according to the current embodiment is similar to the above-described embodiment.
- the curtain gas injected from the curtain units 230 A and 230 B functions as a curtain for blocking the movement of the first raw material gas S, thereby preventing contamination or damage of the inner wall of the chamber due to the first raw material gas S.
- FIG. 6 is a schematic cross-sectional view of a vapor deposition apparatus 300 according to another embodiment of the present invention.
- the vapor deposition apparatus 300 may include a stage 305 , a supply unit 310 , an exhaust unit 320 , and curtain units 330 A and 330 B.
- a stage 305 may include a stage 305 , a supply unit 310 , an exhaust unit 320 , and curtain units 330 A and 330 B.
- curtain units 330 A and 330 B may be provided again.
- the substrate 30 is disposed on the stage 305 .
- the stage 305 is disposed on the supply unit 310 such that a surface of the substrate 30 , particularly, a surface on which a deposition process is to be performed, i.e., a lower surface of the substrate 30 , faces the ground.
- the supply unit 310 may include a plurality of supply modules 310 - 1 , 310 - 2 , 310 - 3 , 310 - 4 , and 310 - 5 .
- the supply module 310 - 1 may include a main body member 311 and a nozzle member 312 .
- the nozzle member 312 has a long extending shape.
- the nozzle member 312 is formed to have a length that is greater than a width of one direction of the substrate 30 .
- the nozzle member 312 may have a length that is the same as the width of the one direction of the substrate 30 .
- the other supply modules 310 - 2 , 310 - 3 , 310 - 4 , and 310 - 5 are the same as the supply module 310 - 1 , and thus, a detailed description thereof is not provided.
- the plurality of supply modules 310 - 1 , 310 - 2 , 310 - 3 , 310 - 4 , and 310 - 5 may have various forms, e.g., independent from each other or in one body.
- the plurality of supply modules 310 - 1 , 310 - 2 , 310 - 3 , 310 - 4 , and 310 - 5 may have an integrated main body member and independent nozzle members.
- the two curtain units 330 A and 330 B are disposed to face the stage 305 .
- the curtain units 330 A and 330 B are disposed to deviate from edges of the substrate 30 , i.e., not to overlap the substrate 30 .
- the curtain units 330 A and 330 B include curtain main bodies 331 A and 331 B and curtain nozzles 332 A and 332 B, respectively.
- the curtain nozzles 332 A and 332 B inject a curtain gas towards the stage 305 .
- the curtain units 330 A and 330 B are the same as the curtain units 230 A and 230 B described above, and thus a detailed description thereof is not provided.
- the exhaust unit 320 may include a first exhaust unit 321 , a second exhaust unit 322 , and a third exhaust unit 323 .
- the first exhaust unit 321 and the second exhaust unit 322 of the exhaust unit 320 are disposed between the outermost nozzle members 312 and the curtain units 330 A and 330 B, respectively. That is, the first exhaust unit 321 is disposed between the nozzle member 312 of the supply module 310 - 1 and the curtain unit 330 B, and the second exhaust unit 322 is disposed between the nozzle member 312 of the supply module 310 - 5 and the curtain unit 330 B.
- the third exhaust unit 323 is disposed between every two adjacent supply modules among the plurality of supply modules 310 - 1 , 310 - 2 , 310 - 3 , 310 - 4 , and 310 - 5 . That is, four exhaust units 323 may be disposed.
- a detailed description of the exhaust unit 320 is the same as the embodiment described above, and thus the detailed description of the exhaust unit 320 is not provided.
- the vapor deposition apparatus 300 includes the supply unit 310 having the plurality of supply modules 310 - 1 , 310 - 2 , 310 - 3 , 310 - 4 , and 310 - 5 .
- the supply unit 310 By this configuration of the supply unit 310 , a uniform deposition film may be easily formed on the entire surface of the substrate 30 even in a state of fixing the substrate 30 and the vapor deposition apparatus 300 .
- the third exhaust unit 323 is disposed between every two adjacent supply modules in addition to the first exhaust unit 321 and the second exhaust unit 322 , thereby improving the exhaust capability during the deposition process.
- FIG. 7 is a schematic cross-sectional view of a vapor deposition apparatus 400 according to another embodiment of the present invention.
- the vapor deposition apparatus 400 may include a stage 405 , a supply unit 410 , an exhaust unit 420 , and curtain units 430 A and 430 B.
- a stage 405 a supply unit 410 , an exhaust unit 420 , and curtain units 430 A and 430 B.
- the substrate 30 is disposed on the stage 405 .
- the stage 405 is disposed on the supply unit 410 such that a surface of the substrate 30 , particularly, a surface on which a deposition process is to be performed, i.e., a lower surface of the substrate 30 , faces the ground.
- the supply unit 410 may include a plurality of supply modules 410 - 1 , 410 - 2 , 410 - 3 , 410 - 4 , and 410 - 5 .
- the supply module 410 - 1 may include a main body member 411 and a nozzle member 412 .
- the nozzle member 412 has a long extending shape.
- the nozzle member 412 is formed to have a length that is greater than a width of one direction of the substrate 30 .
- the nozzle member 412 may have a length that is the same as the width of the one direction of the substrate 30 .
- the nozzle member 412 may include a first injection region 412 A, a second injection region 4126 , and a partition 412 C.
- the first injection region 412 A and the second injection region 412 B are formed to inject their respective raw material gases towards the substrate 30 .
- the partition 412 C is disposed between the first injection region 412 A and the second injection region 412 B to block mixing of the raw material gases injected by the first injection region 412 A and the second injection region 412 B.
- the other supply modules 410 - 2 , 410 - 3 , 410 - 4 , and 410 - 5 are the same as the supply module 410 - 1 , and thus, a detailed description thereof is not provided.
- the two curtain units 430 A and 430 B are disposed to face the stage 405 .
- the curtain units 430 A and 430 B are the same as the curtain units 230 A and 230 B described above, and thus a detailed description thereof is not provided.
- the exhaust unit 420 may include a first exhaust unit 421 , a second exhaust unit 422 , and a third exhaust unit 423 .
- a detailed configuration of the exhaust unit 420 is the same as that of the exhaust unit 320 described above, and thus a detailed description thereof is not provided.
- the current embodiment includes the plurality of supply modules 410 - 1 , 410 - 2 , 410 - 3 , 410 - 4 , and 410 - 5 , but embodiments of the present invention are not limited thereto. That is, the configuration of the first injection region 412 A, the second injection region 412 B, and the partition 412 C may be applied to the vapor deposition apparatuses 100 and 200 of FIGS. 1 and 4 .
- FIGS. 8A to 8D are cross-sectional views illustrating a deposition process using the vapor deposition apparatus 400 of FIG. 7 .
- the first raw material gas S is injected in a direction of the substrate 30 from the first injection region 412 A of the nozzle member 412 .
- an inert gas e.g., the purge gas P
- the inert gas discharged from the second injection region 412 B prevents contamination or damage of the second injection region 412 B due to the first raw material gas S injected from the first injection region 412 A.
- the partition 412 C is disposed between the first injection region 412 A and the second injection region 412 B to thereby effectively distinguish the second injection region 412 B from the first injection region 412 A.
- a curtain gas that is an inert gas, e.g., the purge gas P, is injected from the curtain nozzles 432 A and 432 B of the curtain units 430 A and 430 B.
- the exhaust unit 420 discharges residual gases and unnecessary foreign substances therethrough.
- the purge gas P is injected in the direction of the substrate 30 from the first injection region 412 A and the second injection region 412 B of the nozzle member 412 .
- the purge gas P may include various materials.
- the purge gas P may include an inert gas.
- the curtain gas that is an inert gas, e.g., the purge gas P, is injected from the curtain nozzles 432 A and 432 B of the curtain units 430 A and 430 B. That is, the purge gas P may be concurrently or simultaneously injected from the first injection region 412 A, the second injection region 412 B, and the curtain nozzles 432 A and 432 B.
- the purge gas P may be concurrently or simultaneously injected from the first injection region 412 A, the second injection region 412 B, and the curtain nozzles 432 A and 432 B.
- the exhaust unit 420 discharges residual gases and unnecessary foreign substances therethrough.
- the second raw material gas R is injected in the direction of the substrate 30 from the second injection region 4126 of the nozzle member 412 .
- an inert gas e.g. the purge gas P
- the inert gas discharged from the first injection region 412 A prevents contamination or damage of the first injection region 412 A due to the second raw material gas R injected from the second injection region 412 B.
- the partition 412 C is disposed between the first injection region 412 A and the second injection region 412 B to thereby effectively distinguish the first injection region 412 A from the second injection region 412 B.
- the curtain gas that is an inert gas, e.g., the purge gas P, is injected from the curtain nozzles 432 A and 432 B of the curtain units 430 A and 430 B.
- the exhaust unit 420 discharges residual gases and unnecessary foreign substances therethrough.
- the purge gas P is injected in the direction of the substrate 30 from the first injection region 412 A and the second injection region 412 B of the nozzle member 412 .
- the purge gas P may include various materials.
- the purge gas P may include an inert gas.
- the curtain gas that is an inert gas, e.g., the purge gas P, is injected from the curtain nozzles 432 A and 432 B of the curtain units 430 A and 430 B. That is, the purge gas P may be concurrently or simultaneously injected from the first injection region 412 A, the second injection region 412 B, and the curtain nozzles 432 A and 432 B.
- the purge gas P may be concurrently or simultaneously injected from the first injection region 412 A, the second injection region 412 B, and the curtain nozzles 432 A and 432 B.
- the exhaust unit 420 discharges residual gases and unnecessary foreign substances therethrough.
- a deposition film including the first raw material gas S and the second raw material gas R may be formed.
- the first raw material gas S and the second raw material gas Rare sequentially injected from the nozzle member 412 towards the substrate 30 . Accordingly, the substrate 30 and the vapor deposition apparatus 400 do not have to move.
- the plurality of supply modules 410 - 1 , 410 - 2 , 410 - 3 , 410 - 4 , and 410 - 5 are provided to form a uniform deposition film on the substrate 30 .
- the nozzle member 412 includes the first injection region 412 A and the second injection region 412 B, the first raw material gas S is injected from the first injection region 412 A, and the second raw material gas R is injected from the second injection region 412 B.
- the inert gas is discharged from the second injection region 412 B while the first raw material gas S is being injected from the first injection region 412 A, and the inert gas is discharged from the first injection region 412 A while the second raw material gas R is being injected from the second injection region 412 B.
- FIG. 9 is a schematic cross-sectional view of a vapor deposition apparatus 500 according to another embodiment of the present invention.
- the vapor deposition apparatus 500 may include a stage 505 , a supply unit 510 , an exhaust unit 520 , curtain units 530 A and 530 B, and a gas supply line 570 .
- a stage 505 a supply unit 510 , an exhaust unit 520 , curtain units 530 A and 530 B, and a gas supply line 570 .
- the substrate 30 is disposed on the stage 505 .
- a mask 550 is disposed between the substrate 30 and the supply unit 510 to form a desired deposition pattern.
- the mask 550 may move and be aligned by a mask holder 551 and be disposed to be adjacent to the substrate 30 .
- the substrate 30 may be supported and move by a substrate driving unit 560 and be stably disposed on the stage 505 .
- a housing 590 is disposed to surround the supply unit 510 , the exhaust unit 520 , and the curtain units 530 A and 530 B to protect the supply unit 510 , the exhaust unit 520 , and the curtain units 530 A and 530 B and to easily form a desired pressure atmosphere, e.g., a vacuum atmosphere, in a region in which a deposition process while the deposition process is being performed on the substrate 30 .
- a desired pressure atmosphere e.g., a vacuum atmosphere
- the supply unit 510 may include a plurality of supply modules 510 - 1 , 510 - 2 , 510 - 3 , 510 - 4 , and 510 - 5 .
- a configuration of the supply unit 510 , the exhaust unit 520 , and the curtain units 530 A and 530 B is similar to that of the vapor deposition apparatus 300 according to the embodiment of FIG. 6 described above, and thus, a detailed description thereof is not provided.
- the gas supply line 570 supplies the first and second raw material gases S and R and the purge gas P to the supply unit 510 .
- the gas supply line 570 has a linear as shown in FIG. 9 .
- the first raw material gas S, the second raw material gas R, and the purge gas P are individually delivered to the gas supply line 570 , in more detail, delivered through a first valve 571 , a second valve 572 , and a third valve 573 , respectively.
- a first inert gas valve 5711 , a second inert gas valve 5721 , and a third inert gas valve 5731 for controlling injection of an inert gas I are disposed in a direction farther from the gas supply line 570 than the first valve 571 , the second valve 572 , and the third valve 573 , respectively.
- the inert gas I may be delivered to the first valve 571 , the second valve 572 , and the third valve 573 through the first inert gas valve 5711 , the second inert gas valve 5721 , and the third inert gas valve 5731 .
- the second raw material gas R is not delivered to the supply line 570 .
- a method of closing the second valve 572 may be used, but when opening and closing of the second valve 572 are repeated, the accurate control of the flow of the second raw material gas R is not easy.
- the inert gas I may be delivered through the second valve 572 under control of the second inert gas valve 5721 by opening the second valve 572 without closing to thereby block the inflow of the second raw material gas R to the gas supply line 570 .
- only a desired gas may be delivered to the gas supply line 570 by using the first inert gas valve 5711 , the second inert gas valve 5721 , and the third inert gas valve 5731 without repeating opening and closing of the first valve 571 , the second valve 572 , and the third valve 573 .
- FIG. 10 is a schematic cross-sectional view of an organic light-emitting display apparatus 10 manufactured by a method of manufacturing an organic light-emitting display apparatus according to another embodiment of the present invention
- FIG. 11 is a magnified view of F of FIG. 10 .
- FIGS. 10 and 11 show the organic light-emitting display apparatus 10 manufactured using any one of the vapor deposition apparatuses 100 , 200 , 300 , 400 , and 500 described above.
- a description below is made by using the vapor deposition apparatus 100 as an example.
- the organic light-emitting display apparatus 10 includes the substrate 30 .
- the substrate 30 may be formed of a glass material, a plastic material, or a metallic material.
- a buffer layer 31 including an insulating material is formed on the substrate 30 to provide a planarization surface on the substrate 30 and prevent permeation of moisture and foreign substances into the substrate 30 .
- a thin film transistor (TFT), a capacitor 50 , and an organic light-emitting device (OLED) 60 are formed on the buffer layer 31 .
- the TFT largely includes an active layer 41 , a gate electrode 42 , and source and drain electrodes 43 .
- the OLED may include a first electrode 61 , a second electrode 62 , and an intermediate layer 63 .
- the capacitor 50 may include a first capacitor electrode 51 and a second capacitor electrode 52 .
- the active layer 41 formed in a set or predetermined pattern is disposed on the upper surface of the buffer layer 31 .
- the active layer 41 may include an inorganic semiconductor material, such as silicon, an organic semiconductor material, or an oxide semiconductor material and may be formed by doping a p- or n-type dopant thereinto.
- a gate insulating layer 32 is formed on the active layer 41 .
- the gate electrode 42 is formed on the gate insulating layer 32 to correspond to the active layer 41 .
- the first capacitor electrode 51 is formed in the same layer and of the same material as the gate electrode 42 .
- An interlayer insulating layer 33 is formed to cover the gate electrode 42 , and the source and drain electrodes 43 are formed on the interlayer insulating layer 33 to contact a set or predetermined regions of the active layer 41 .
- the second capacitor electrode 52 is formed in the same layer and of the same material as the source and drain electrodes 43 .
- a passivation layer 34 is formed to cover the source and drain electrodes 43 , and a separate insulating layer may be further formed on the passivation layer 34 for planarization of the TFT 40 .
- the first electrode 61 is formed on the passivation layer 34 .
- the first electrode 61 is formed to electrically connect to any one of the source and drain electrodes 43 .
- a pixel defining layer 35 is formed to cover the first electrode 61 .
- a set or predetermined opening 64 is formed in the pixel defining layer 35 , and the intermediate layer 63 having an organic emission layer is formed in a region limited to the opening 64 .
- the second electrode 62 is formed on the intermediate layer 63 .
- the encapsulating layer 70 is formed on the second electrode 62 .
- the encapsulating layer 70 may include an organic material or an inorganic material or may have a structure in which an organic material and an inorganic material are alternately stacked.
- the encapsulating layer 70 may be formed using one of the vapor deposition apparatuses 100 , 200 , 300 , 400 , 500 described above.
- a desired layer may be formed by passing, through the vapor deposition apparatus 100 , the substrate 30 on which the second electrode 62 is formed.
- the encapsulating layer 70 may include an inorganic layer 71 and an organic layer 72
- the inorganic layer 71 may include a plurality of layers 71 a , 71 b , and 71 c
- the organic layer 72 may include a plurality of layers 72 a , 72 b , and 72 c .
- the plurality of layers 71 a , 71 b , and 71 c of the inorganic layer 71 may be formed using one of the vapor deposition apparatuses 100 , 200 , 300 , 400 , 500 .
- the buffer layer 31 , the gate insulating layer 32 , the interlayer insulating layer 33 , the passivation layer 34 , the pixel defining layer 35 , and other insulating layers may be formed using one of the vapor deposition apparatuses 100 , 200 , 300 , 400 , 500 .
- the active layer 41 , the gate electrode 42 , the source and drain electrodes 43 , the first electrode 61 , the intermediate layer 63 , the second electrode 62 , and other thin films may also be formed using the vapor deposition apparatus 100 .
- characteristics of deposition films formed in the organic light-emitting display apparatus 10 may be improved, resulting in improving electrical characteristics and image-quality characteristics of the organic light-emitting display apparatus 10 .
- one or more embodiments of the present invention provide a vapor deposition apparatus and a method of manufacturing an organic light-emitting display apparatus, wherein a deposition process may be efficiently performed and deposition film characteristics may be easily improved.
Abstract
Description
- This application is a divisional of U.S. patent application Ser. No. 14/078,422, filed Nov. 12, 2013, which claims priority to and the benefit of Korean Patent Application No. 10-2012-0128370, filed Nov. 13, 2012, the entire contents of both of which are incorporated herein by reference.
- 1. Field
- Embodiments of the present invention relate to a vapor deposition apparatus and a method of manufacturing an organic light-emitting display apparatus. Embodiments of the present invention more particularly relate to a vapor deposition apparatus, by which a deposition process is efficiently performed and deposition film characteristics are easily improved, and a method of manufacturing an organic light-emitting display apparatus.
- 2. Description of the Related Art
- Semiconductor devices, display apparatuses, other electronic devices, and the like include a plurality of thin films. One of various methods of forming the plurality of thin films is a vapor deposition method.
- The vapor deposition method uses one or more gases as raw materials for forming a thin film. Examples of the vapor deposition method are chemical vapor deposition (CVD), atomic layer deposition (ALD), and the like.
- During ALD, one raw material is injected and purged/pumped, one or more molecular layers are adsorbed onto a substrate, after which another raw material is injected and purged/pumped to thereby form a desired single atomic layer or multiple atomic layers.
- Among display apparatuses, an organic light-emitting display apparatus has attracted attention as a next-generation display apparatus due to high-grade characteristics, such as wide angle of views, high contrast, and quick response speeds.
- The organic light-emitting display apparatus includes an intermediate layer having an organic emission layer between a first electrode and a second electrode that face the first electrode and further includes one or more thin films. A deposition process may be used to form the one or more thin films of the organic light-emitting display apparatus.
- However, it is not easy to deposit a large-area thin film having desired characteristics for a large-sized and high-resolution organic light-emitting display apparatus.
- Aspects of embodiments of the present invention include a vapor deposition apparatus, by which a deposition process is efficiently performed and deposition film characteristics are easily improved, and a method of manufacturing an organic light-emitting display apparatus.
- Additional aspects will be set forth in part in the description which follows and, in part, will be apparent from the description, or may be learned by practice of the presented embodiments.
- According to one or more embodiments of the present invention, a vapor deposition apparatus includes: a stage onto which a substrate is disposed; and a supply unit disposed to face the substrate and having a main body member and a nozzle member disposed on one surface of the main body member and facing the substrate, to sequentially supply a plurality of gases towards the substrate.
- The nozzle member may sequentially inject a first raw material gas, a second raw material gas, and a purge gas towards the substrate.
- The nozzle member may have a long extending shape.
- The nozzle member may be formed to have a length that is equal to or greater than a width of one direction of the substrate so as to correspond to the width of the one direction of the substrate.
- The nozzle member may be disposed to correspond to the center of the substrate.
- The vapor deposition apparatus may further include an exhaust unit defined as separated spaces between edges of the stage and edges of the supply unit.
- The stage may be disposed over the supply unit for the substrate to be disposed on the stage such that a surface of the substrate on which a deposition process is performed faces downward (e.g. towards the ground).
- The vapor deposition apparatus may further include a curtain unit disposed to face the stage and deviate from opposite edges of the substrate and having curtain nozzles for injecting a purge gas (e.g. an inert gas).
- The curtain nozzles may be disposed at the opposite edges of the substrate and facing the opposite edges.
- The curtain nozzles may be disposed and oriented to all edges of the substrate.
- The curtain nozzles may be formed in a rectangular ring shape.
- The supply unit may include a plurality of supply modules, each supply module including a main body member and a nozzle member.
- The exhaust unit may be disposed between every two adjacent supply modules.
- The nozzle member may include a first supply region, a second supply region, and a partition disposed between the first supply region and the second supply region.
- The first raw material gas may be injected from the first supply region, and the second raw material gas may be injected from the second supply region.
- The purge gas may be discharged from the second supply region while the first raw material gas is being injected from the first supply region.
- The purge gas may be discharged from the first supply region while the second raw material gas is being injected from the second supply region.
- The vapor deposition apparatus may further include a linear gas supply line for supplying gases to the nozzle member of the supply unit.
- The vapor deposition apparatus may further include a first valve, a second valve, and a third valve disposed to control a process of respectively delivering a first raw material gas, a second raw material gas, and a purge gas to the gas supply line.
- The vapor deposition apparatus may further include a first purge gas valve, a second purge gas valve, and a third purge gas valve disposed in a direction farther from the gas supply line than the first valve, the second valve, and the third valve to control injection of the purge gas.
- According to one or more embodiments of the present invention, a method of manufacturing an organic light-emitting display apparatus including a thin film on a substrate by using a vapor deposition apparatus, the vapor deposition apparatus including: a stage onto which the substrate is disposed; and a supply unit disposed to face the substrate and having a main body member and a nozzle member disposed on one surface of the main body member facing the substrate, to sequentially supply a plurality of gases towards the substrate, includes forming the thin film, wherein the forming of the thin film is performed by sequentially injecting different raw material gases from the nozzle member in a state where the substrate and the vapor deposition apparatus are fixed.
- The organic light-emitting display apparatus may include a first electrode, an intermediate layer having an organic emission layer, a second electrode, and an encapsulating layer, and the forming of the thin film may include forming the encapsulating layer.
- The forming of the thin film may include forming an insulating layer.
- The forming of the thin film may include forming a conductive layer.
- Example embodiments will now be described more fully hereinafter with reference to the accompanying drawings; however, they may be embodied in different forms and should not be construed as limited to the embodiments set forth herein. Rather, these embodiments are provided so that this disclosure will be thorough and complete, and will fully convey the scope of the example embodiments to those skilled in the art.
- In the drawing figures, dimensions may be exaggerated for clarity of illustration. It will be understood that when an element is referred to as being “between” two elements, it can be the only element between the two elements, or one or more intervening elements may also be present. Like reference numerals refer to like elements throughout.
- Embodiments of the present invention will become apparent and more readily appreciated from the following description of the embodiments, taken in conjunction with the accompanying drawings in which:
-
FIG. 1 is a schematic cross-sectional view of a vapor deposition apparatus according to an embodiment of the present invention; -
FIG. 2 is a top view in a direction A ofFIG. 1 ; -
FIGS. 3A to 3D are cross-sectional views illustrating a deposition process using the vapor deposition apparatus ofFIG. 1 ; -
FIG. 4 is a schematic cross-sectional view of a vapor deposition apparatus according to another embodiment of the present invention; -
FIG. 5 is a top view in a direction A ofFIG. 4 ; -
FIG. 6 is a schematic cross-sectional view of a vapor deposition apparatus according to another embodiment of the present invention; -
FIG. 7 is a schematic cross-sectional view of a vapor deposition apparatus according to another embodiment of the present invention; -
FIGS. 8A to 8D are cross-sectional views illustrating a deposition process using the vapor deposition apparatus ofFIG. 7 ; -
FIG. 9 is a schematic cross-sectional view of a vapor deposition apparatus according to another embodiment of the present invention; -
FIG. 10 is a schematic cross-sectional view of an organic light-emitting display apparatus manufactured by a method of manufacturing an organic light-emitting display apparatus according to another embodiment of the present invention; and -
FIG. 11 is a magnified view of F ofFIG. 10 . - Reference will now be made in detail to embodiments, examples of which are illustrated in the accompanying drawings, wherein like reference numerals refer to the like elements throughout. In this regard, the present embodiments may have different forms and should not be construed as being limited to the descriptions set forth herein. Accordingly, the embodiments are merely described below, by referring to the figures, to explain aspects of the present description. As used herein, the term “and/or” includes any and all combinations of one or more of the associated listed items.
- Expressions such as “at least one of,” when preceding a list of elements, modify the entire list of elements and do not modify the individual elements of the list. Further, the use of “may” when describing embodiments of the present invention refers to “one or more embodiments of the present invention.”
-
FIG. 1 is a schematic cross-sectional view of avapor deposition apparatus 100 according to an embodiment of the present invention, andFIG. 2 is a top view in a direction A ofFIG. 1 , - Referring to
FIGS. 1 and 2 , thevapor deposition apparatus 100 may include astage 105 and asupply unit 110. - A
substrate 30 is disposed on thestage 105. Thestage 105 is formed to stably fix thesubstrate 30 during a deposition process and may further include a clamp and the like. Thestage 105 is disposed on thesupply unit 110 such that a surface of thesubstrate 30, particularly, a surface on which the deposition process is to be performed, i.e., a lower surface of thesubstrate 30, faces the ground. - As shown in
FIG. 1 , thestage 105 may be formed to have a set or predetermined groove, wherein thesubstrate 30 is disposed in the groove. In this case, thesubstrate 30 is relatively stable on thestage 105, and an escape, vibration, and the like of thesubstrate 30 is prevented during the deposition process. - However, one or more embodiments of the present invention are not limited thereto, and the
stage 105 may include no groove. - The
supply unit 110 may include amain body member 111 and anozzle member 112. - The
main body member 111 supports theentire supply unit 110, functions as a housing, and may include therein a connection pipe for delivering a raw material to thenozzle member 112. - The
nozzle member 112 is disposed on one surface of themain body member 111. Thenozzle member 112 injects a gaseous raw material for performing the deposition process towards thesubstrate 30. For example, thenozzle member 112 injects a first raw material gas S towards thesubstrate 30. However, this is only illustrative, and thenozzle member 112 may sequentially and repeatedly inject a plurality of gases towards thesubstrate 30 to perform the deposition process on thesubstrate 30. A detailed description thereof will be made below. - The
nozzle member 112 is a linear nozzle member having a long extending shape. That is, as shown inFIG. 2 , thenozzle member 112 is formed to have a length that is greater than a width along one direction of thesubstrate 30. As another example, thenozzle member 112 may have a length that is the same as the width along the one direction of thesubstrate 30. - By doing this, the first raw material gas S injected from the
nozzle member 112 uniformly reacts with the entire surface of thesubstrate 30, thereby uniformly performing the deposition process. In particular, thenozzle member 112 may be disposed to correspond to the center of thesubstrate 30 to thereby easily perform the uniform deposition process. - An
exhaust unit 120 is formed to discharge residual gases after the deposition process. Theexhaust unit 120 is defined by separated spaces between edges of thestage 105 and edges of thesupply unit 110. -
FIGS. 3A to 3D are cross-sectional views illustrating a deposition process using thevapor deposition apparatus 100 ofFIG. 1 . - Referring to
FIG. 3A , the first raw material gas S is injected in a direction of thesubstrate 30 from thenozzle member 112 of thesupply unit 110. The first raw material gas S may include various suitable materials. The first raw material gas S may be a gas including aluminum (Al), e.g., trimethyl aluminum (TMA). In this case, when the first raw material gas S is injected in the direction of thesubstrate 30, an adsorption layer including Al is formed on the surface of thesubstrate 30. In more detail, a chemical adsorption layer and a physical adsorption layer are formed on the surface of thesubstrate 30. - Thereafter, referring to
FIG. 3B , a purge gas P is injected in the direction of thesubstrate 30 from thenozzle member 112 of thesupply unit 110. The purge gas P may include various suitable materials. For example, the purge gas P may include an inert gas, e.g., argon or nitrogen. - The physical adsorption layer having a weak molecular bonding force in the adsorption layer described above which is formed on the surface of the
substrate 30 with the first raw material gas S is separated from thesubstrate 30 due to the purge gas P, and the separated gas or residual substances are removed through theexhaust unit 120, thereby improving the purity of a deposition film to be finally formed on thesubstrate 30. - Thereafter, referring to
FIG. 3C , a second raw material gas R is injected in the direction of thesubstrate 30 from thenozzle member 112 of thesupply unit 110. The second raw material gas R may include various suitable materials. The second raw material gas R may include a gas including oxygen (O), e.g., hydrogen oxide (H2O), dioxygen (O2), and/or nitrogen oxide (N2O). In addition, although not shown, when the second raw material gas R is injected, the second raw material gas R may be converted into a radical form by generating plasma and injected to thesubstrate 30. - When the second raw material gas R is injected in the direction of the
substrate 30, the second raw material gas R reacts with the chemical adsorption layer formed of the first raw material gas S, which has been already adsorbed on thesubstrate 30, or displaces a portion of the chemical adsorption layer, thereby finally forming a desired deposition film, e.g., an aluminum oxide (AlxOy) layer. At this time, an excessive second raw material gas R remains by forming a physical adsorption layer or is discharged through theexhaust unit 120. - Thereafter, referring to
FIG. 3D , the purge gas P is injected in the direction of thesubstrate 30 from thenozzle member 112 of thesupply unit 110. The physical adsorption remaining on the surface of thesubstrate 30 is separated from thesubstrate 30 due to the purge gas P, and the separated gas or residual substances are removed through theexhaust unit 120, thereby improving the purity of a deposition film to be finally formed on thesubstrate 30. - According to the current embodiment, the
supply unit 110 includes thenozzle member 112, and the first and second raw material gases S and R and the purge gas P are sequentially injected from thenozzle member 112 towards the center of thesubstrate 30. Accordingly, even during one cycle of the deposition process including a plurality of operations, thesubstrate 30 and thesupply unit 110 do not have to move. In addition, thesupply unit 110 does not have to be larger than necessary, and thus, the miniaturization of thevapor deposition apparatus 100 may be achieved. - In particular, the first raw material gas S, the second raw material gas R, and the purge gas P are sequentially injected by the
nozzle member 112, and thus, an ALD process in which at least four operations form one cycle may be easily performed. - In addition, when an organic light-emitting display apparatus is manufactured using the
substrate 30 by disposing thesubstrate 30 on thesupply unit 110 such that a deposition surface of thesubstrate 30 faces the ground, the connectivity with a plurality of processes in which thesubstrate 30 faces the ground is improved. -
FIG. 4 is a schematic cross-sectional view of avapor deposition apparatus 200 according to another embodiment of the present invention, andFIG. 5 is a top view in a direction A ofFIG. 4 . - Referring to
FIGS. 4 and 5 , thevapor deposition apparatus 200 may include astage 205, asupply unit 210, anexhaust unit 220, andcurtain units - The
substrate 30 is disposed on thestage 205. Thestage 205 is disposed on thesupply unit 210 such that a surface of thesubstrate 30, particularly, a surface on which a deposition process is to be performed, i.e., a lower surface of thesubstrate 30, faces the ground. - The
supply unit 210 may include amain body member 211 and anozzle member 212. Thenozzle member 212 has a long extending shape. That is, as shown inFIG. 5 , thenozzle member 212 is formed to have a length that is greater than a width of one direction of thesubstrate 30. As another example, thenozzle member 212 may have a length that is the same as the width of the one direction of thesubstrate 30. Thenozzle member 212 may be disposed to correspond to the center of thesubstrate 30 to thereby easily perform the uniform deposition process. - The two
curtain units stage 205. In addition, thecurtain units substrate 30, i.e., not to overlap thesubstrate 30. Thecurtain units main bodies curtain nozzles curtain nozzles stage 205. The curtainmain bodies curtain nozzles curtain nozzles nozzle member 212. That is, thecurtain nozzles substrate 30 and another side thereof facing the one side and not to overlap each other, respectively. The curtain gas injected by thecurtain nozzles nozzle member 212 from thesubstrate 30 and largely from thestage 205. By doing this, damage of the outer side surfaces of thestage 205, thesupply unit 210, and other portions of thevapor deposition apparatus 200 due to the first raw material gas S is prevented. In particular, thevapor deposition apparatus 200 may be disposed in a chamber, and in this case, the curtain gas injected by thecurtain nozzles - According to another embodiment of the present invention, curtain nozzles may be disposed and oriented to all of four sides of the
substrate 30. That is, although thecurtain nozzles substrate 30 inFIG. 5 , curtain nozzles may be further disposed and oriented to the top and bottom sides of thesubstrate 30, and all of these curtain nozzles may be connected to form a shape, such as a rectangular ring. - The curtain
main bodies curtain units main bodies main body member 211 of thesupply unit 210 or formed independently. - The
exhaust unit 220 may include afirst exhaust unit 221 and asecond exhaust unit 222. Thefirst exhaust unit 221 and thesecond exhaust unit 222 of theexhaust unit 220 are disposed between thenozzle member 212 and thecurtain units exhaust unit 220 is disposed to correspond to or deviate from edges of thesubstrate 30. In addition, theexhaust unit 220 is formed to discharge gasses and the like towards the ground. - After the deposition process, residual gases are discharged through the
exhaust unit 220, and in this case, since the residual gases are discharged in a direction that is opposite to a direction of injecting the first raw material gas S from thenozzle member 212, i.e., a direction of orienting to the ground, an exhaust characteristic is improved. - The deposition process using the
vapor deposition apparatus 200 according to the current embodiment is similar to the above-described embodiment. - In the
vapor deposition apparatus 200 according to the current embodiment, the curtain gas injected from thecurtain units -
FIG. 6 is a schematic cross-sectional view of avapor deposition apparatus 300 according to another embodiment of the present invention. - Referring to
FIG. 6 , thevapor deposition apparatus 300 may include astage 305, asupply unit 310, anexhaust unit 320, andcurtain units - The
substrate 30 is disposed on thestage 305. Thestage 305 is disposed on thesupply unit 310 such that a surface of thesubstrate 30, particularly, a surface on which a deposition process is to be performed, i.e., a lower surface of thesubstrate 30, faces the ground. - The
supply unit 310 may include a plurality of supply modules 310-1, 310-2, 310-3, 310-4, and 310-5. The supply module 310-1 may include amain body member 311 and anozzle member 312. Thenozzle member 312 has a long extending shape. - That is, the
nozzle member 312 is formed to have a length that is greater than a width of one direction of thesubstrate 30. As another example, thenozzle member 312 may have a length that is the same as the width of the one direction of thesubstrate 30. - The other supply modules 310-2, 310-3, 310-4, and 310-5 are the same as the supply module 310-1, and thus, a detailed description thereof is not provided.
- The plurality of supply modules 310-1, 310-2, 310-3, 310-4, and 310-5 may have various forms, e.g., independent from each other or in one body. As a detailed example, the plurality of supply modules 310-1, 310-2, 310-3, 310-4, and 310-5 may have an integrated main body member and independent nozzle members.
- The two
curtain units stage 305. In addition, thecurtain units substrate 30, i.e., not to overlap thesubstrate 30. Thecurtain units main bodies 331A and 331B andcurtain nozzles 332A and 332B, respectively. Thecurtain nozzles 332A and 332B inject a curtain gas towards thestage 305. - The
curtain units curtain units - The
exhaust unit 320 may include afirst exhaust unit 321, asecond exhaust unit 322, and athird exhaust unit 323. Thefirst exhaust unit 321 and thesecond exhaust unit 322 of theexhaust unit 320 are disposed between theoutermost nozzle members 312 and thecurtain units first exhaust unit 321 is disposed between thenozzle member 312 of the supply module 310-1 and thecurtain unit 330B, and thesecond exhaust unit 322 is disposed between thenozzle member 312 of the supply module 310-5 and thecurtain unit 330B. - The
third exhaust unit 323 is disposed between every two adjacent supply modules among the plurality of supply modules 310-1, 310-2, 310-3, 310-4, and 310-5. That is, fourexhaust units 323 may be disposed. - A detailed description of the
exhaust unit 320 is the same as the embodiment described above, and thus the detailed description of theexhaust unit 320 is not provided. - The
vapor deposition apparatus 300 according to the current embodiment includes thesupply unit 310 having the plurality of supply modules 310-1, 310-2, 310-3, 310-4, and 310-5. By this configuration of thesupply unit 310, a uniform deposition film may be easily formed on the entire surface of thesubstrate 30 even in a state of fixing thesubstrate 30 and thevapor deposition apparatus 300. - In addition, the
third exhaust unit 323 is disposed between every two adjacent supply modules in addition to thefirst exhaust unit 321 and thesecond exhaust unit 322, thereby improving the exhaust capability during the deposition process. -
FIG. 7 is a schematic cross-sectional view of avapor deposition apparatus 400 according to another embodiment of the present invention. - Referring to
FIG. 7 , thevapor deposition apparatus 400 may include astage 405, asupply unit 410, anexhaust unit 420, andcurtain units - The
substrate 30 is disposed on thestage 405. Thestage 405 is disposed on thesupply unit 410 such that a surface of thesubstrate 30, particularly, a surface on which a deposition process is to be performed, i.e., a lower surface of thesubstrate 30, faces the ground. - The
supply unit 410 may include a plurality of supply modules 410-1, 410-2, 410-3, 410-4, and 410-5. The supply module 410-1 may include amain body member 411 and anozzle member 412. Thenozzle member 412 has a long extending shape. - That is, the
nozzle member 412 is formed to have a length that is greater than a width of one direction of thesubstrate 30. As another example, thenozzle member 412 may have a length that is the same as the width of the one direction of thesubstrate 30. - The
nozzle member 412 may include afirst injection region 412A, a second injection region 4126, and apartition 412C. Thefirst injection region 412A and thesecond injection region 412B are formed to inject their respective raw material gases towards thesubstrate 30. Thepartition 412C is disposed between thefirst injection region 412A and thesecond injection region 412B to block mixing of the raw material gases injected by thefirst injection region 412A and thesecond injection region 412B. A detailed description of a deposition process using thefirst injection region 412A and thesecond injection region 412B will be described below. - The other supply modules 410-2, 410-3, 410-4, and 410-5 are the same as the supply module 410-1, and thus, a detailed description thereof is not provided.
- The two
curtain units stage 405. Thecurtain units curtain units - The
exhaust unit 420 may include afirst exhaust unit 421, asecond exhaust unit 422, and athird exhaust unit 423. A detailed configuration of theexhaust unit 420 is the same as that of theexhaust unit 320 described above, and thus a detailed description thereof is not provided. - The current embodiment includes the plurality of supply modules 410-1, 410-2, 410-3, 410-4, and 410-5, but embodiments of the present invention are not limited thereto. That is, the configuration of the
first injection region 412A, thesecond injection region 412B, and thepartition 412C may be applied to thevapor deposition apparatuses FIGS. 1 and 4 . -
FIGS. 8A to 8D are cross-sectional views illustrating a deposition process using thevapor deposition apparatus 400 ofFIG. 7 . - Referring to
FIG. 8A , the first raw material gas S is injected in a direction of thesubstrate 30 from thefirst injection region 412A of thenozzle member 412. At this time, an inert gas, e.g., the purge gas P, is discharged from thesecond injection region 412B. The inert gas discharged from thesecond injection region 412B prevents contamination or damage of thesecond injection region 412B due to the first raw material gas S injected from thefirst injection region 412A. In addition, thepartition 412C is disposed between thefirst injection region 412A and thesecond injection region 412B to thereby effectively distinguish thesecond injection region 412B from thefirst injection region 412A. - A curtain gas that is an inert gas, e.g., the purge gas P, is injected from the
curtain nozzles curtain units - When the first raw material gas S is injected in the direction of the
substrate 30, a chemical adsorption layer and a physical adsorption layer which include the first raw material gas S are formed on the surface of thesubstrate 30. During this operation, theexhaust unit 420 discharges residual gases and unnecessary foreign substances therethrough. - Thereafter, referring to
FIG. 8B , the purge gas P is injected in the direction of thesubstrate 30 from thefirst injection region 412A and thesecond injection region 412B of thenozzle member 412. The purge gas P may include various materials. For example, the purge gas P may include an inert gas. - The curtain gas that is an inert gas, e.g., the purge gas P, is injected from the
curtain nozzles curtain units first injection region 412A, thesecond injection region 412B, and thecurtain nozzles - The
exhaust unit 420 discharges residual gases and unnecessary foreign substances therethrough. - Thereafter, referring to
FIG. 8C , the second raw material gas R is injected in the direction of thesubstrate 30 from the second injection region 4126 of thenozzle member 412. At this time, an inert gas, e.g. the purge gas P, is discharged from thefirst injection region 412A. The inert gas discharged from thefirst injection region 412A prevents contamination or damage of thefirst injection region 412A due to the second raw material gas R injected from thesecond injection region 412B. In addition, thepartition 412C is disposed between thefirst injection region 412A and thesecond injection region 412B to thereby effectively distinguish thefirst injection region 412A from thesecond injection region 412B. - The curtain gas that is an inert gas, e.g., the purge gas P, is injected from the
curtain nozzles curtain units - During this operation, the
exhaust unit 420 discharges residual gases and unnecessary foreign substances therethrough. - Thereafter, referring to
FIG. 8D , the purge gas P is injected in the direction of thesubstrate 30 from thefirst injection region 412A and thesecond injection region 412B of thenozzle member 412. The purge gas P may include various materials. For example, the purge gas P may include an inert gas. - The curtain gas that is an inert gas, e.g., the purge gas P, is injected from the
curtain nozzles curtain units first injection region 412A, thesecond injection region 412B, and thecurtain nozzles - The
exhaust unit 420 discharges residual gases and unnecessary foreign substances therethrough. - By these operations, a deposition film including the first raw material gas S and the second raw material gas R may be formed.
- According to the current embodiment, the first raw material gas S and the second raw material gas Rare sequentially injected from the
nozzle member 412 towards thesubstrate 30. Accordingly, thesubstrate 30 and thevapor deposition apparatus 400 do not have to move. - In addition, the plurality of supply modules 410-1, 410-2, 410-3, 410-4, and 410-5 are provided to form a uniform deposition film on the
substrate 30. - In addition, the
nozzle member 412 includes thefirst injection region 412A and thesecond injection region 412B, the first raw material gas S is injected from thefirst injection region 412A, and the second raw material gas R is injected from thesecond injection region 412B. In addition, the inert gas is discharged from thesecond injection region 412B while the first raw material gas S is being injected from thefirst injection region 412A, and the inert gas is discharged from thefirst injection region 412A while the second raw material gas R is being injected from thesecond injection region 412B. By doing this, contamination of thefirst injection region 412A due to the second raw material gas R is prevented, and contamination of thesecond injection region 412B due to the first raw material gas S is prevented. In particular, this contamination prevention effect increases by thepartition 412C. -
FIG. 9 is a schematic cross-sectional view of avapor deposition apparatus 500 according to another embodiment of the present invention. - Referring to
FIG. 9 , thevapor deposition apparatus 500 may include astage 505, asupply unit 510, anexhaust unit 520,curtain units gas supply line 570. For convenience, descriptions of similar components to those described above may not be provided. - The
substrate 30 is disposed on thestage 505. Amask 550 is disposed between thesubstrate 30 and thesupply unit 510 to form a desired deposition pattern. Themask 550 may move and be aligned by amask holder 551 and be disposed to be adjacent to thesubstrate 30. In addition, thesubstrate 30 may be supported and move by asubstrate driving unit 560 and be stably disposed on thestage 505. - A
housing 590 is disposed to surround thesupply unit 510, theexhaust unit 520, and thecurtain units supply unit 510, theexhaust unit 520, and thecurtain units substrate 30. - The
supply unit 510 may include a plurality of supply modules 510-1, 510-2, 510-3, 510-4, and 510-5. A configuration of thesupply unit 510, theexhaust unit 520, and thecurtain units vapor deposition apparatus 300 according to the embodiment ofFIG. 6 described above, and thus, a detailed description thereof is not provided. - The
gas supply line 570 supplies the first and second raw material gases S and R and the purge gas P to thesupply unit 510. Thegas supply line 570 has a linear as shown inFIG. 9 . The first raw material gas S, the second raw material gas R, and the purge gas P are individually delivered to thegas supply line 570, in more detail, delivered through afirst valve 571, asecond valve 572, and athird valve 573, respectively. - In addition, a first
inert gas valve 5711, a secondinert gas valve 5721, and a thirdinert gas valve 5731 for controlling injection of an inert gas I are disposed in a direction farther from thegas supply line 570 than thefirst valve 571, thesecond valve 572, and thethird valve 573, respectively. The inert gas I may be delivered to thefirst valve 571, thesecond valve 572, and thethird valve 573 through the firstinert gas valve 5711, the secondinert gas valve 5721, and the thirdinert gas valve 5731. By doing this, injection times and injection purities of the first raw material gas S, the second raw material gas R, and the purge gas P through thegas supply line 570 are easily controlled. - For example, when the first raw material gas S is delivered to the
gas supply line 570 through thefirst valve 571, the second raw material gas R is not delivered to thesupply line 570. To this end, a method of closing thesecond valve 572 may be used, but when opening and closing of thesecond valve 572 are repeated, the accurate control of the flow of the second raw material gas R is not easy. Thus, the inert gas I may be delivered through thesecond valve 572 under control of the secondinert gas valve 5721 by opening thesecond valve 572 without closing to thereby block the inflow of the second raw material gas R to thegas supply line 570. That is, only a desired gas may be delivered to thegas supply line 570 by using the firstinert gas valve 5711, the secondinert gas valve 5721, and the thirdinert gas valve 5731 without repeating opening and closing of thefirst valve 571, thesecond valve 572, and thethird valve 573. -
FIG. 10 is a schematic cross-sectional view of an organic light-emittingdisplay apparatus 10 manufactured by a method of manufacturing an organic light-emitting display apparatus according to another embodiment of the present invention, andFIG. 11 is a magnified view of F ofFIG. 10 . - In more detail,
FIGS. 10 and 11 show the organic light-emittingdisplay apparatus 10 manufactured using any one of thevapor deposition apparatuses vapor deposition apparatus 100 as an example. - The organic light-emitting
display apparatus 10 includes thesubstrate 30. Thesubstrate 30 may be formed of a glass material, a plastic material, or a metallic material. - A
buffer layer 31 including an insulating material is formed on thesubstrate 30 to provide a planarization surface on thesubstrate 30 and prevent permeation of moisture and foreign substances into thesubstrate 30. - A thin film transistor (TFT), a
capacitor 50, and an organic light-emitting device (OLED) 60 are formed on thebuffer layer 31. The TFT largely includes anactive layer 41, agate electrode 42, and source and drainelectrodes 43. The OLED may include afirst electrode 61, asecond electrode 62, and anintermediate layer 63. Thecapacitor 50 may include afirst capacitor electrode 51 and asecond capacitor electrode 52. - In more detail, the
active layer 41 formed in a set or predetermined pattern is disposed on the upper surface of thebuffer layer 31. Theactive layer 41 may include an inorganic semiconductor material, such as silicon, an organic semiconductor material, or an oxide semiconductor material and may be formed by doping a p- or n-type dopant thereinto. - A
gate insulating layer 32 is formed on theactive layer 41. Thegate electrode 42 is formed on thegate insulating layer 32 to correspond to theactive layer 41. Thefirst capacitor electrode 51 is formed in the same layer and of the same material as thegate electrode 42. - An interlayer insulating
layer 33 is formed to cover thegate electrode 42, and the source and drainelectrodes 43 are formed on theinterlayer insulating layer 33 to contact a set or predetermined regions of theactive layer 41. Thesecond capacitor electrode 52 is formed in the same layer and of the same material as the source and drainelectrodes 43. - A
passivation layer 34 is formed to cover the source and drainelectrodes 43, and a separate insulating layer may be further formed on thepassivation layer 34 for planarization of theTFT 40. - The
first electrode 61 is formed on thepassivation layer 34. Thefirst electrode 61 is formed to electrically connect to any one of the source and drainelectrodes 43. Apixel defining layer 35 is formed to cover thefirst electrode 61. A set orpredetermined opening 64 is formed in thepixel defining layer 35, and theintermediate layer 63 having an organic emission layer is formed in a region limited to theopening 64. Thesecond electrode 62 is formed on theintermediate layer 63. - An
encapsulating layer 70 is formed on thesecond electrode 62. The encapsulatinglayer 70 may include an organic material or an inorganic material or may have a structure in which an organic material and an inorganic material are alternately stacked. - The encapsulating
layer 70 may be formed using one of thevapor deposition apparatuses vapor deposition apparatus 100, thesubstrate 30 on which thesecond electrode 62 is formed. - In particular, the encapsulating
layer 70 may include aninorganic layer 71 and anorganic layer 72, theinorganic layer 71 may include a plurality oflayers organic layer 72 may include a plurality oflayers layers inorganic layer 71 may be formed using one of thevapor deposition apparatuses - However, embodiments of the present invention are not limited thereto. That is, the
buffer layer 31, thegate insulating layer 32, theinterlayer insulating layer 33, thepassivation layer 34, thepixel defining layer 35, and other insulating layers may be formed using one of thevapor deposition apparatuses - In addition, the
active layer 41, thegate electrode 42, the source and drainelectrodes 43, thefirst electrode 61, theintermediate layer 63, thesecond electrode 62, and other thin films may also be formed using thevapor deposition apparatus 100. - As described above, when the
vapor deposition apparatus 100 is used, characteristics of deposition films formed in the organic light-emittingdisplay apparatus 10 may be improved, resulting in improving electrical characteristics and image-quality characteristics of the organic light-emittingdisplay apparatus 10. - As described above, one or more embodiments of the present invention provide a vapor deposition apparatus and a method of manufacturing an organic light-emitting display apparatus, wherein a deposition process may be efficiently performed and deposition film characteristics may be easily improved.
- It should be understood that the embodiments herein are non-limiting examples and should be considered in a descriptive sense only. Descriptions of features or aspects within each embodiment should be considered as available for other similar features or aspects in other embodiments.
- While embodiments of the present invention have been described with reference to the figures, it will be understood by those of ordinary skill in the art that various changes in form and details may be made therein without departing from the spirit and scope of the present invention as defined by the following claims and equivalents thereof.
Claims (20)
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US15/231,647 US20160348241A1 (en) | 2012-11-13 | 2016-08-08 | Vapor deposition apparatus and method of manufacturing organic light-emitting display apparatus |
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KR10-2012-0128370 | 2012-11-13 | ||
KR1020120128370A KR102003768B1 (en) | 2012-11-13 | 2012-11-13 | Vapor deposition apparatus and method for manufacturing organic light emitting display apparatus |
US14/078,422 US9412961B2 (en) | 2012-11-13 | 2013-11-12 | Method of manufacturing organic light-emitting display apparatus |
US15/231,647 US20160348241A1 (en) | 2012-11-13 | 2016-08-08 | Vapor deposition apparatus and method of manufacturing organic light-emitting display apparatus |
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US15/231,647 Abandoned US20160348241A1 (en) | 2012-11-13 | 2016-08-08 | Vapor deposition apparatus and method of manufacturing organic light-emitting display apparatus |
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MX2014013233A (en) * | 2014-10-30 | 2016-05-02 | Ct Investig Materiales Avanzados Sc | Injection nozzle for aerosols and their method of use to deposit different coatings via vapor chemical deposition assisted by aerosol. |
US11124877B2 (en) * | 2015-10-19 | 2021-09-21 | Toshiba Mitsubishi-Electric Industrial Systems Corporation | Film forming device including a detachable bottom plate for forming a film on a substrate |
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KR20140061139A (en) | 2014-05-21 |
US20140134768A1 (en) | 2014-05-15 |
US9412961B2 (en) | 2016-08-09 |
KR102003768B1 (en) | 2019-07-26 |
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