US20160238630A1 - Mems tilt sensor - Google Patents
Mems tilt sensor Download PDFInfo
- Publication number
- US20160238630A1 US20160238630A1 US15/138,502 US201615138502A US2016238630A1 US 20160238630 A1 US20160238630 A1 US 20160238630A1 US 201615138502 A US201615138502 A US 201615138502A US 2016238630 A1 US2016238630 A1 US 2016238630A1
- Authority
- US
- United States
- Prior art keywords
- back plate
- mems microphone
- proof
- mass
- electrode
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Abandoned
Links
Images
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01P—MEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION, OR SHOCK; INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT
- G01P15/00—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration
- G01P15/02—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses
- G01P15/08—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values
- G01P15/125—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values by capacitive pick-up
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01C—MEASURING DISTANCES, LEVELS OR BEARINGS; SURVEYING; NAVIGATION; GYROSCOPIC INSTRUMENTS; PHOTOGRAMMETRY OR VIDEOGRAMMETRY
- G01C9/00—Measuring inclination, e.g. by clinometers, by levels
- G01C9/02—Details
- G01C9/06—Electric or photoelectric indication or reading means
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01C—MEASURING DISTANCES, LEVELS OR BEARINGS; SURVEYING; NAVIGATION; GYROSCOPIC INSTRUMENTS; PHOTOGRAMMETRY OR VIDEOGRAMMETRY
- G01C9/00—Measuring inclination, e.g. by clinometers, by levels
- G01C9/12—Measuring inclination, e.g. by clinometers, by levels by using a single pendulum plumb lines G01C15/10
- G01C9/14—Measuring inclination, e.g. by clinometers, by levels by using a single pendulum plumb lines G01C15/10 movable in more than one direction
-
- H—ELECTRICITY
- H04—ELECTRIC COMMUNICATION TECHNIQUE
- H04R—LOUDSPEAKERS, MICROPHONES, GRAMOPHONE PICK-UPS OR LIKE ACOUSTIC ELECTROMECHANICAL TRANSDUCERS; DEAF-AID SETS; PUBLIC ADDRESS SYSTEMS
- H04R19/00—Electrostatic transducers
- H04R19/005—Electrostatic transducers using semiconductor materials
-
- H—ELECTRICITY
- H04—ELECTRIC COMMUNICATION TECHNIQUE
- H04R—LOUDSPEAKERS, MICROPHONES, GRAMOPHONE PICK-UPS OR LIKE ACOUSTIC ELECTROMECHANICAL TRANSDUCERS; DEAF-AID SETS; PUBLIC ADDRESS SYSTEMS
- H04R19/00—Electrostatic transducers
- H04R19/04—Microphones
-
- H—ELECTRICITY
- H04—ELECTRIC COMMUNICATION TECHNIQUE
- H04R—LOUDSPEAKERS, MICROPHONES, GRAMOPHONE PICK-UPS OR LIKE ACOUSTIC ELECTROMECHANICAL TRANSDUCERS; DEAF-AID SETS; PUBLIC ADDRESS SYSTEMS
- H04R3/00—Circuits for transducers, loudspeakers or microphones
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01C—MEASURING DISTANCES, LEVELS OR BEARINGS; SURVEYING; NAVIGATION; GYROSCOPIC INSTRUMENTS; PHOTOGRAMMETRY OR VIDEOGRAMMETRY
- G01C9/00—Measuring inclination, e.g. by clinometers, by levels
- G01C9/02—Details
- G01C9/06—Electric or photoelectric indication or reading means
- G01C2009/062—Electric or photoelectric indication or reading means capacitive
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01P—MEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION, OR SHOCK; INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT
- G01P15/00—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration
- G01P15/02—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses
- G01P15/08—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values
- G01P2015/0805—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values being provided with a particular type of spring-mass-system for defining the displacement of a seismic mass due to an external acceleration
- G01P2015/0822—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values being provided with a particular type of spring-mass-system for defining the displacement of a seismic mass due to an external acceleration for defining out-of-plane movement of the mass
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01P—MEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION, OR SHOCK; INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT
- G01P15/00—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration
- G01P15/02—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses
- G01P15/08—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values
- G01P2015/0805—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values being provided with a particular type of spring-mass-system for defining the displacement of a seismic mass due to an external acceleration
- G01P2015/0857—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values being provided with a particular type of spring-mass-system for defining the displacement of a seismic mass due to an external acceleration using a particular shape of the suspension spring
-
- H—ELECTRICITY
- H04—ELECTRIC COMMUNICATION TECHNIQUE
- H04R—LOUDSPEAKERS, MICROPHONES, GRAMOPHONE PICK-UPS OR LIKE ACOUSTIC ELECTROMECHANICAL TRANSDUCERS; DEAF-AID SETS; PUBLIC ADDRESS SYSTEMS
- H04R2307/00—Details of diaphragms or cones for electromechanical transducers, their suspension or their manufacture covered by H04R7/00 or H04R31/003, not provided for in any of its subgroups
- H04R2307/025—Diaphragms comprising polymeric materials
-
- H—ELECTRICITY
- H04—ELECTRIC COMMUNICATION TECHNIQUE
- H04R—LOUDSPEAKERS, MICROPHONES, GRAMOPHONE PICK-UPS OR LIKE ACOUSTIC ELECTROMECHANICAL TRANSDUCERS; DEAF-AID SETS; PUBLIC ADDRESS SYSTEMS
- H04R31/00—Apparatus or processes specially adapted for the manufacture of transducers or diaphragms therefor
Definitions
- This patent relates to MEMS devices and, more specifically, to MEMS assemblies that integrate multiple sensors including tilt sensing and microphone elements.
- microsensors have been used through the years in automotive and consumer electronics. Typically, a single sensor is housed together with necessary electronics in a packaging or in an assembly. Microsensors are typically characterized by their small size. For example, in microphones, the sensing parts have typical dimensions in the millimeter to sub-millimeter length.
- tilt or orientation sensors have recently seen various implementations in consumer electronic devices. These tilt sensors are typically capacitive devices which are low resolution accelerometers that respond to the force of gravity and provide a voltage or current representative of the orientation or acceleration of the sensor.
- Previous accelerometers used as tilt or orientation sensors have typically been surface micro-machined MicroElectroMechanical System (MEMS) devices comprising thick layers of polysilicon, typically on the order of several microns, to form the inertial or moving mass member and associated electrodes. These devices are generally not compatible for assembly with a microphone to form a miniature multipurpose device due to the largeness of their die size. In order to house a tilt sensor with a microphone to form a single miniature device it is desirable that the tilt sensor be as small, or smaller, than the microphone die.
- MEMS MicroElectroMechanical System
- FIG. 1 comprises a perspective view of a tilt sensor according to various embodiments of the present invention
- FIG. 2 comprises a top view of a spring used in tilt sensor of FIG. 1 according to various embodiments of the present invention
- FIG. 3 comprises a perspective cutaway view of the tilt sensor of FIG. 1 and FIG. 2 according to various embodiments of the present invention
- FIG. 4 comprises a side cutaway view of the tilt sensor of FIGS. 1-3 according to various embodiments of the present invention
- FIG. 5A and FIG. 5B comprise diagrams showing the operation of the tilt sensor of FIGS. 1-4 according to various embodiments of the present invention
- FIG. 6 comprises a view of a microphone and tilt sensor assembled together in one assembly or package according to various embodiments of the present invention.
- a MicroElectroMechanical System (MEMS) tilt sensor is provided that integrates components of a microphone and is a device that is easily manufacturable.
- the approaches provided are cost effective to manufacture and provide devices that are small so as to fit into a variety of different assemblies including assemblies with other sensing devices.
- an acoustic sensor includes a back plate; at least one back plate electrode coupled to the back plate; a proof of mass with the proof of mass elastically coupled to the back plate; and a proof of mass electrode coupled to the proof of mass. Movement of the sensor causes a capacitance between the proof of mass electrode and the at least one back plate electrode to vary and the capacitance represents a magnitude of the movement of the sensor.
- the proof of mass is coupled to the back plate via a spring.
- the proof of mass is generally cylindrical in shape.
- the proof of mass has a configuration such as a hollow configuration or a solid configuration. Other examples are possible.
- the capacitance represents at least one of a pitch of the back plate, a roll of the back plate, or a yaw of the back plate.
- the sensor is disposed in a device such as a personal computer, a cellular phone, a personal music player, a digital still camera, a digital video camera, a voice recorder, or a remote control unit. Other examples of devices are possible.
- the measured capacitance is utilized by an application program in these or other devices.
- the sensor 100 includes a back plate 102 , a proof mass 104 , a proof mass electrode 108 (coupled to a proof mass electrode pad 114 via a connector 144 ), a first back plate electrode pad 109 coupled to a first back plate electrode 130 via a connector 140 and under the backplate 102 , a second back plate electrode pad 110 coupled to a second back plate electrode 141 via a connector 145 and under the back plate 102 , a third back plate electrode pad 112 coupled to a third back plate electrode 143 via a connector 147 and under the back plate 102 , and a fourth back plate electrode pad 116 coupled to a fourth back plate electrode 132 by a connector 142 .
- the proof mass electrode 108 is coupled to the proof mass 104 while the other electrodes are coupled to the back plate 102 .
- a polysilicon layer includes the sensing proof mass electrode 108 .
- the proof mass 104 is coupled to the back plate 102 via a spring 120 .
- a boss 122 on the back plate 102 is attached to the spiral spring 120 .
- the spiral spring 120 connects the proof mass 104 to the back plate 102 at the boss 122 .
- the back plate 102 may or may not be charged like the charge plate used in MEMS microphone systems as known to those skilled in the art.
- the proof mass 104 is a cylinder (or other suitable shape) that may or may not be hollow and in this example is approximately 500 microns in diameter.
- the proof mass 104 may be constructed from silicon in one example and may weigh approximately 0.2 mg. Other examples of dimensions and construction materials are possible.
- the proof mass electrode 108 , first back plate electrode 130 , second back plate 141 electrode, third back plate electrode 143 , and fourth back plate electrode 132 are electrical conductors that couple to either a portion of the back plate or the proof mass.
- the electrodes are constructed of a conductor such as a highly doped polysilicon. Other materials may also be used.
- the electrodes are disposed in a sensing area 150 .
- the polysilicon layer is a layer of conducting material and this layer includes the sensing electrode 108 .
- the sensing electrode 108 moves when the die is tilted.
- the spiral spring 120 connects the proof mass 104 to the back plate 102 via a boss 122 .
- the spiral spring 120 may be constructed of highly doped polysilicon. Other construction materials are possible.
- the tilting of the back plate 102 moves the proof mass 104 which changes the distance between the proof mass electrode 108 and one or more of the back plate electrodes 130 , 132 , 141 , 143 .
- This change in distance represents and causes a change in capacitance between one or more of the back plate electrodes 130 , 132 , 141 , 143 and the proof mass electrode 108 .
- the electrodes 108 , 130 , 132 , 141 , 143 may be disposed in any convenient pattern and that the pattern shown in FIGS. 1-4 is one example only.
- the capacitance may be measured in a separate integrated circuit from signals received from the electrodes.
- the sensing electrode 108 connects the proof mass 104 to the spiral spring 120 .
- the center of the spiral spring 120 is connected to the boss 122 of the backplate.
- Sensing electrode 108 moves relative to the back plate 102 (e.g., the sensing electrode 108 tilts, yaws, and rolls, and so forth).
- the back plate electrodes 130 , 132 , 141 , 143 are attached to the back plate 102 .
- the change in capacitance will be measured and will be potentially different as between each of the back plate electrodes 130 , 132 , 141 , 143 and the proof mass electrode 108 .
- a particular combination of capacitances represents a predetermined position of the back plate 102 relative to the proof mass electrode 108 .
- the pitch and yaw of the back plate 102 can be measured as the distance (and thereby the capacitance) changes between the proof mass electrode 108 and one or more of the back plate electrode 130 , 132 , 141 , 143 .
- This can be used by an application program coupled to the above-described sensing arrangement and the program can take various actions (e.g., move an image on a display screen) based upon the determined position.
- an acceleration of the back plate 102 can be determined (e.g., the sensor acts as an accelerometer) and this can be used to perform various actions as mentioned above).
- FIG. 5A and FIG. 5B are meant to be a simplified description of the operation of the tilt sensor.
- These drawings show that as the back plate 102 is tilted in relation to the center of the earth, the proof mass 104 tilts relative to the backplate and relative distances between the sensing electrode 108 connected to the proof mass 104 and the backplate electrodes 130 , 132 , 141 , 143 change resulting in changes in distances and hence capacitances (C 1 , C 2 , C 3 , C 4 ) between the sensing electrode 108 and backplate electrodes 130 , 132 , 141 , 143 .
- capacitances C 1 , C 2 , C 3 , C 4
- an integrated microphone and tilt sensor 600 is formed on one assembly and this arrangement is integrated into another device such as a cellular phone or personal computer.
- the integrated sensor assembly can be installed on an interior circuit board.
- the cellular phone is tilted about one or more of the X, Y, or Z axis, the respective output of the corresponding tilt sensor would change as measured by the change in capacitances (as described above).
- the application program running in the cellular phone which is in connection with signals from the sensors, would then rotate the information shown on the screen. Any hand held appliance with a display could take advantage of this functionality. Benefit would particularly arise when these appliances also include an audio feature that requires a microphone.
- Devices contemplated include, but are not limited to, personal music players, digital still cameras, digital video cameras, voice recorders, remote control units, and similar devices.
- the assembly 600 includes a tilt sensor 602 (as has been described elsewhere herein), a MEMS microphone 604 , and an integrated circuit 606 all disposed on a substrate/base 608 and enclosed in a housing 610 .
- the relative location of each component with respect to others may differ from that shown in FIG. 6 .
- the integrated circuit 606 may be a chip that receives the signal from the MEMS microphone 604 and tilt sensor 602 .
- the assembly 600 may be disposed in another device such as a cellular phone or computer.
- the purpose of the circuit 606 is to condition signals from the tilt sensor die 602 as well as the microphone die 604 and interface with the device that the assembly 600 is located in (e.g., an application program in a cellular phone) for various purposes.
- the microphone 604 performs sound detection functions and the tilt sensor determines the tilt angle of the assembly 600 .
- the tilt angle can be used by the circuit 606 or the device the assembly is located in (e.g., an application program in a cellular phone) for various purposes.
Landscapes
- Physics & Mathematics (AREA)
- Engineering & Computer Science (AREA)
- General Physics & Mathematics (AREA)
- Acoustics & Sound (AREA)
- Signal Processing (AREA)
- Radar, Positioning & Navigation (AREA)
- Remote Sensing (AREA)
- Pressure Sensors (AREA)
- Micromachines (AREA)
- Electrostatic, Electromagnetic, Magneto- Strictive, And Variable-Resistance Transducers (AREA)
Abstract
An acoustic sensor includes a back plate; at least one back plate electrode coupled to the back plate; a proof of mass with the proof of mass elastically coupled to the back plate; and a proof of mass electrode coupled to the proof of mass. Movement of the sensor causes a capacitance between the proof of mass electrode and the at least one back plate electrode to vary and the capacitance represents a magnitude of the movement of the sensor.
Description
- This application is a continuation of U.S. patent application Ser. No. 13/705,722, filed Dec. 5, 2012, which claims the benefit of and priority to U.S. Provisional Patent Application No. 61/567,337, filed Dec. 6, 2011, the entire contents of which are incorporated herein by reference.
- This patent relates to MEMS devices and, more specifically, to MEMS assemblies that integrate multiple sensors including tilt sensing and microphone elements.
- Various microsensors have been used through the years in automotive and consumer electronics. Typically, a single sensor is housed together with necessary electronics in a packaging or in an assembly. Microsensors are typically characterized by their small size. For example, in microphones, the sensing parts have typical dimensions in the millimeter to sub-millimeter length.
- Various types of microphones have been used in consumer electronics, including condenser microphones and MEMS microphones. In addition, tilt or orientation sensors have recently seen various implementations in consumer electronic devices. These tilt sensors are typically capacitive devices which are low resolution accelerometers that respond to the force of gravity and provide a voltage or current representative of the orientation or acceleration of the sensor.
- Previous accelerometers used as tilt or orientation sensors have typically been surface micro-machined MicroElectroMechanical System (MEMS) devices comprising thick layers of polysilicon, typically on the order of several microns, to form the inertial or moving mass member and associated electrodes. These devices are generally not compatible for assembly with a microphone to form a miniature multipurpose device due to the largeness of their die size. In order to house a tilt sensor with a microphone to form a single miniature device it is desirable that the tilt sensor be as small, or smaller, than the microphone die.
- For a more complete understanding of the disclosure, reference should be made to the following detailed description and accompanying drawings wherein:
-
FIG. 1 comprises a perspective view of a tilt sensor according to various embodiments of the present invention; -
FIG. 2 comprises a top view of a spring used in tilt sensor ofFIG. 1 according to various embodiments of the present invention; -
FIG. 3 comprises a perspective cutaway view of the tilt sensor ofFIG. 1 andFIG. 2 according to various embodiments of the present invention; -
FIG. 4 comprises a side cutaway view of the tilt sensor ofFIGS. 1-3 according to various embodiments of the present invention; -
FIG. 5A andFIG. 5B comprise diagrams showing the operation of the tilt sensor ofFIGS. 1-4 according to various embodiments of the present invention; -
FIG. 6 comprises a view of a microphone and tilt sensor assembled together in one assembly or package according to various embodiments of the present invention. - Skilled artisans will appreciate that elements in the figures are illustrated for simplicity and clarity. It will further be appreciated that certain actions and/or steps may be described or depicted in a particular order of occurrence while those skilled in the art will understand that such specificity with respect to sequence is not actually required. It will also be understood that the terms and expressions used herein have the ordinary meaning as is accorded to such terms and expressions with respect to their corresponding respective areas of inquiry and study except where specific meanings have otherwise been set forth herein.
- A MicroElectroMechanical System (MEMS) tilt sensor is provided that integrates components of a microphone and is a device that is easily manufacturable. The approaches provided are cost effective to manufacture and provide devices that are small so as to fit into a variety of different assemblies including assemblies with other sensing devices.
- In some of these embodiments, an acoustic sensor includes a back plate; at least one back plate electrode coupled to the back plate; a proof of mass with the proof of mass elastically coupled to the back plate; and a proof of mass electrode coupled to the proof of mass. Movement of the sensor causes a capacitance between the proof of mass electrode and the at least one back plate electrode to vary and the capacitance represents a magnitude of the movement of the sensor.
- In some aspects, the proof of mass is coupled to the back plate via a spring. In other aspects, the proof of mass is generally cylindrical in shape. In still other aspects, the proof of mass has a configuration such as a hollow configuration or a solid configuration. Other examples are possible.
- In other aspects, the capacitance represents at least one of a pitch of the back plate, a roll of the back plate, or a yaw of the back plate. In some examples, the sensor is disposed in a device such as a personal computer, a cellular phone, a personal music player, a digital still camera, a digital video camera, a voice recorder, or a remote control unit. Other examples of devices are possible. In some aspects, the measured capacitance is utilized by an application program in these or other devices.
- Referring to
FIGS. 1-4 , one example of an integratedtilt sensor 100 is described. Thesensor 100 includes aback plate 102, aproof mass 104, a proof mass electrode 108 (coupled to a proofmass electrode pad 114 via a connector 144), a first backplate electrode pad 109 coupled to a firstback plate electrode 130 via aconnector 140 and under thebackplate 102, a second backplate electrode pad 110 coupled to a secondback plate electrode 141 via aconnector 145 and under theback plate 102, a third backplate electrode pad 112 coupled to a thirdback plate electrode 143 via aconnector 147 and under theback plate 102, and a fourth backplate electrode pad 116 coupled to a fourthback plate electrode 132 by aconnector 142. Theproof mass electrode 108 is coupled to theproof mass 104 while the other electrodes are coupled to theback plate 102. A polysilicon layer includes the sensingproof mass electrode 108. Theproof mass 104 is coupled to theback plate 102 via aspring 120. Aboss 122 on theback plate 102 is attached to thespiral spring 120. Thespiral spring 120 connects theproof mass 104 to theback plate 102 at theboss 122. - The
back plate 102 may or may not be charged like the charge plate used in MEMS microphone systems as known to those skilled in the art. Theproof mass 104 is a cylinder (or other suitable shape) that may or may not be hollow and in this example is approximately 500 microns in diameter. Theproof mass 104 may be constructed from silicon in one example and may weigh approximately 0.2 mg. Other examples of dimensions and construction materials are possible. - The
proof mass electrode 108, firstback plate electrode 130,second back plate 141 electrode, thirdback plate electrode 143, and fourthback plate electrode 132 are electrical conductors that couple to either a portion of the back plate or the proof mass. In one example, the electrodes are constructed of a conductor such as a highly doped polysilicon. Other materials may also be used. The electrodes are disposed in asensing area 150. - The polysilicon layer is a layer of conducting material and this layer includes the
sensing electrode 108. Thesensing electrode 108 moves when the die is tilted. Thespiral spring 120 connects theproof mass 104 to theback plate 102 via aboss 122. Thespiral spring 120 may be constructed of highly doped polysilicon. Other construction materials are possible. - In one example of the operation of the system of
FIGS. 1-4 , the tilting of theback plate 102 moves theproof mass 104 which changes the distance between theproof mass electrode 108 and one or more of theback plate electrodes back plate electrodes proof mass electrode 108. It will be appreciated that theelectrodes FIGS. 1-4 is one example only. In one aspect, the capacitance may be measured in a separate integrated circuit from signals received from the electrodes. - The
sensing electrode 108 connects theproof mass 104 to thespiral spring 120. The center of thespiral spring 120 is connected to theboss 122 of the backplate.Sensing electrode 108 moves relative to the back plate 102 (e.g., thesensing electrode 108 tilts, yaws, and rolls, and so forth). Theback plate electrodes back plate 102. The change in capacitance will be measured and will be potentially different as between each of theback plate electrodes mass electrode 108. In one aspect, a particular combination of capacitances represents a predetermined position of theback plate 102 relative to the proofmass electrode 108. Thus, the pitch and yaw of theback plate 102 can be measured as the distance (and thereby the capacitance) changes between the proofmass electrode 108 and one or more of theback plate electrode back plate 102 can be determined (e.g., the sensor acts as an accelerometer) and this can be used to perform various actions as mentioned above). -
FIG. 5A andFIG. 5B are meant to be a simplified description of the operation of the tilt sensor. These drawings show that as theback plate 102 is tilted in relation to the center of the earth, theproof mass 104 tilts relative to the backplate and relative distances between thesensing electrode 108 connected to theproof mass 104 and thebackplate electrodes sensing electrode 108 andbackplate electrodes - Referring now to
FIG. 6 , an integrated microphone andtilt sensor 600 is formed on one assembly and this arrangement is integrated into another device such as a cellular phone or personal computer. The integrated sensor assembly can be installed on an interior circuit board. When the cellular phone is tilted about one or more of the X, Y, or Z axis, the respective output of the corresponding tilt sensor would change as measured by the change in capacitances (as described above). The application program running in the cellular phone, which is in connection with signals from the sensors, would then rotate the information shown on the screen. Any hand held appliance with a display could take advantage of this functionality. Benefit would particularly arise when these appliances also include an audio feature that requires a microphone. Devices contemplated include, but are not limited to, personal music players, digital still cameras, digital video cameras, voice recorders, remote control units, and similar devices. - As shown in
FIG. 6 , theassembly 600 includes a tilt sensor 602 (as has been described elsewhere herein), aMEMS microphone 604, and anintegrated circuit 606 all disposed on a substrate/base 608 and enclosed in ahousing 610. The relative location of each component with respect to others may differ from that shown inFIG. 6 . Theintegrated circuit 606 may be a chip that receives the signal from theMEMS microphone 604 andtilt sensor 602. Theassembly 600 may be disposed in another device such as a cellular phone or computer. The purpose of thecircuit 606 is to condition signals from the tilt sensor die 602 as well as the microphone die 604 and interface with the device that theassembly 600 is located in (e.g., an application program in a cellular phone) for various purposes. In operation, themicrophone 604 performs sound detection functions and the tilt sensor determines the tilt angle of theassembly 600. The tilt angle can be used by thecircuit 606 or the device the assembly is located in (e.g., an application program in a cellular phone) for various purposes. - Preferred embodiments of this invention are described herein, including the best mode known to the inventors for carrying out the invention. It should be understood that the illustrated embodiments are exemplary only, and should not be taken as limiting the scope of the invention.
Claims (14)
1. A microelectromechanical system (MEMS) microphone comprising:
a substrate;
a MEMS microphone disposed on the substrate;
an integrated circuit coupled to the MEMS microphone;
a tilt sensor disposed on the substrate, the tilt sensor comprising:
a back plate;
at least one back plate electrode disposed on the back plate;
a proof of mass coupled to the back plate; and
a sensing electrode coupled to the proof of mass that moves relative to the back plate, wherein movement of the MEMS microphone moves the sensing element relative to the back plate such that the distance between the sensing electrode and the at least one back plate electrode changes, wherein a capacitance between the sensing electrode and the at least one back plate electrode is communicated to the integrated circuit, wherein the integrated circuit determines an orientation of the MEMS microphone based upon the capacitance.
2. The MEMS microphone of claim 1 , wherein the back plate has a plurality of openings through the back plate.
3. The MEMS microphone of claim 1 , further comprising a housing, coupled to the substrate, which encloses the MEMS microphone and the tilt sensor.
4. The MEMS microphone of claim 1 , wherein at least one back plate electrode comprises two back plate electrodes.
5. The MEMS microphone of claim 1 , wherein at least one back plate electrode comprises four back plate electrodes.
6. The MEMS microphone of claim 1 , wherein the integrated circuit is configured to calculate a pitch of the back plate.
7. The MEMS microphone of claim 1 , wherein the proof of mass is coupled to the back plate via a spring.
8. The MEMS microphone of claim 1 , wherein the integrated circuit is configured to calculate an acceleration
9. The MEMS microphone of claim 1 , wherein the proof of mass weighs 0.2 milligrams.
10. The MEMS microphone of claim 1 , wherein the proof of mass is cylindrical.
11. The MEMS microphone of claim 10 , wherein the proof of mass has a diameter of 500 microns.
12. The MEMS microphone of claim 1 , wherein the proof of mass comprises silicon.
13. The MEMS microphone of claim 1 , further comprising a polysilicon layer that comprises the sensing electrode.
14. The MEMS microphone of claim 1 , wherein the back plate is charged.
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
US15/138,502 US20160238630A1 (en) | 2011-12-06 | 2016-04-26 | Mems tilt sensor |
Applications Claiming Priority (3)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
US201161567337P | 2011-12-06 | 2011-12-06 | |
US13/705,722 US9329199B2 (en) | 2011-12-06 | 2012-12-05 | MEMS tilt sensor |
US15/138,502 US20160238630A1 (en) | 2011-12-06 | 2016-04-26 | Mems tilt sensor |
Related Parent Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
US13/705,722 Continuation US9329199B2 (en) | 2011-12-06 | 2012-12-05 | MEMS tilt sensor |
Publications (1)
Publication Number | Publication Date |
---|---|
US20160238630A1 true US20160238630A1 (en) | 2016-08-18 |
Family
ID=48653262
Family Applications (2)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
US13/705,722 Expired - Fee Related US9329199B2 (en) | 2011-12-06 | 2012-12-05 | MEMS tilt sensor |
US15/138,502 Abandoned US20160238630A1 (en) | 2011-12-06 | 2016-04-26 | Mems tilt sensor |
Family Applications Before (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
US13/705,722 Expired - Fee Related US9329199B2 (en) | 2011-12-06 | 2012-12-05 | MEMS tilt sensor |
Country Status (1)
Country | Link |
---|---|
US (2) | US9329199B2 (en) |
Families Citing this family (7)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US9329199B2 (en) * | 2011-12-06 | 2016-05-03 | Knowles Electronics, Llc | MEMS tilt sensor |
US20140003632A1 (en) * | 2012-06-28 | 2014-01-02 | Ams Ag | Microphone arrangement |
TWI449882B (en) * | 2012-09-27 | 2014-08-21 | Sagatek Co Ltd | A liquid capacitive micro inclinometer |
CN105848074B (en) * | 2015-01-15 | 2020-07-28 | 联华电子股份有限公司 | Micro-electromechanical microphone |
CN105674957A (en) * | 2016-02-03 | 2016-06-15 | 浙江荣胜工具有限公司 | Electronic circuit achieving acoustic and photoelectric angle indication and leveling instrument with acoustic and photoelectric indication function |
US10495663B2 (en) * | 2016-02-19 | 2019-12-03 | The Regents Of The University Of Michigan | High aspect-ratio low noise multi-axis accelerometers |
US10554153B2 (en) | 2016-06-17 | 2020-02-04 | Globalfoundries Singapore Pte. Ltd. | MEMS device for harvesting sound energy and methods for fabricating same |
Citations (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US6535460B2 (en) * | 2000-08-11 | 2003-03-18 | Knowles Electronics, Llc | Miniature broadband acoustic transducer |
US20100172518A1 (en) * | 2009-01-07 | 2010-07-08 | Knowles Electronics, Llc | Microphone and orientation sensor assembly |
US7825484B2 (en) * | 2005-04-25 | 2010-11-02 | Analog Devices, Inc. | Micromachined microphone and multisensor and method for producing same |
US9329199B2 (en) * | 2011-12-06 | 2016-05-03 | Knowles Electronics, Llc | MEMS tilt sensor |
Family Cites Families (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
EP2227733B1 (en) | 2007-11-26 | 2011-04-13 | Nxp B.V. | Input device for an electronic device |
CN102349311B (en) * | 2009-03-09 | 2014-09-17 | Nxp股份有限公司 | Device comprising microphone and accelerometer, manufacturing method and using method |
EP2486471A2 (en) | 2009-10-06 | 2012-08-15 | Knowles Electronics, LLC | A low profile human interface device |
EP2485112A1 (en) | 2011-02-07 | 2012-08-08 | Knowles Electronics Asia PTE. Ltd. | Joystick input device |
-
2012
- 2012-12-05 US US13/705,722 patent/US9329199B2/en not_active Expired - Fee Related
-
2016
- 2016-04-26 US US15/138,502 patent/US20160238630A1/en not_active Abandoned
Patent Citations (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US6535460B2 (en) * | 2000-08-11 | 2003-03-18 | Knowles Electronics, Llc | Miniature broadband acoustic transducer |
US7825484B2 (en) * | 2005-04-25 | 2010-11-02 | Analog Devices, Inc. | Micromachined microphone and multisensor and method for producing same |
US20100172518A1 (en) * | 2009-01-07 | 2010-07-08 | Knowles Electronics, Llc | Microphone and orientation sensor assembly |
US9329199B2 (en) * | 2011-12-06 | 2016-05-03 | Knowles Electronics, Llc | MEMS tilt sensor |
Also Published As
Publication number | Publication date |
---|---|
US20130160547A1 (en) | 2013-06-27 |
US9329199B2 (en) | 2016-05-03 |
Similar Documents
Publication | Publication Date | Title |
---|---|---|
US20160238630A1 (en) | Mems tilt sensor | |
US8973439B1 (en) | MEMS accelerometer with proof masses moving in anti-phase direction normal to the plane of the substrate | |
EP3542553B1 (en) | Mems microphone system having an electrode assembly | |
US7368312B1 (en) | MEMS sensor suite on a chip | |
US7258011B2 (en) | Multiple axis accelerometer | |
US8443670B2 (en) | 3-axis accelerometer with gap-closing capacitive electrodes | |
US7301212B1 (en) | MEMS microphone | |
US8950259B2 (en) | Element structure, inertia sensor, and electronic device | |
CN110169085B (en) | System of non-acoustic sensors combined with MEMS microphones | |
EP2363717B1 (en) | Accelerometer and production method | |
US20140090485A1 (en) | MEMS Pressure Sensor Assembly | |
US8457332B2 (en) | Microphone and orientation sensor assembly | |
US10024738B2 (en) | Capacitive micro-electro-mechanical force sensor and corresponding force sensing method | |
US10972821B2 (en) | MEMS microphone system with low pressure gap and back volume | |
EP3544927B1 (en) | Mems transducer system for pressure and acoustic sensing | |
US20110115038A1 (en) | Physical quantity sensor, electronic device, and method of manufacturing physical quantity sensor | |
JP2016044978A (en) | Physical quantity sensor, electronic apparatus, and movable body | |
CN112114163B (en) | MEMS inertial sensor with high viscosity resistance | |
JP2011075543A (en) | Physical quantity sensor, method for manufacturing the same, and electronic apparatus | |
JP2008164365A (en) | Inertial sensor, method of producing the same, and electric and electronic device provided with the inertial sensor | |
JP2014119383A (en) | Electronic device | |
TW201120451A (en) | Biaxial acceleration sensing component. | |
KR20140028991A (en) | Overlay type inertial sensor and control methode thereof |
Legal Events
Date | Code | Title | Description |
---|---|---|---|
AS | Assignment |
Owner name: KNOWLES ELECTRONICS, LLC, ILLINOIS Free format text: ASSIGNMENT OF ASSIGNORS INTEREST;ASSIGNORS:LEE, SUNG BOK;LAUTENSCHLAGER, ERIC J.;REEL/FRAME:038386/0423 Effective date: 20130401 |
|
STCB | Information on status: application discontinuation |
Free format text: ABANDONED -- FAILURE TO RESPOND TO AN OFFICE ACTION |