US20150340524A1 - Method of Fabricating a Flexible Photovoltaic Film Cell With an Iron Diffusion Barrier Layer - Google Patents
Method of Fabricating a Flexible Photovoltaic Film Cell With an Iron Diffusion Barrier Layer Download PDFInfo
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- US20150340524A1 US20150340524A1 US14/816,218 US201514816218A US2015340524A1 US 20150340524 A1 US20150340524 A1 US 20150340524A1 US 201514816218 A US201514816218 A US 201514816218A US 2015340524 A1 US2015340524 A1 US 2015340524A1
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- United States
- Prior art keywords
- diffusion barrier
- barrier layer
- iron
- layer
- molybdenum
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- XEEYBQQBJWHFJM-UHFFFAOYSA-N Iron Chemical compound [Fe] XEEYBQQBJWHFJM-UHFFFAOYSA-N 0.000 title claims abstract description 164
- 229910052742 iron Inorganic materials 0.000 title claims abstract description 80
- 230000004888 barrier function Effects 0.000 title claims abstract description 68
- 238000009792 diffusion process Methods 0.000 title claims abstract description 65
- 238000004519 manufacturing process Methods 0.000 title claims abstract description 9
- 239000000758 substrate Substances 0.000 claims abstract description 48
- 239000011888 foil Substances 0.000 claims abstract description 39
- 239000006096 absorbing agent Substances 0.000 claims abstract description 37
- 238000000034 method Methods 0.000 claims abstract description 28
- KTSFMFGEAAANTF-UHFFFAOYSA-N [Cu].[Se].[Se].[In] Chemical compound [Cu].[Se].[Se].[In] KTSFMFGEAAANTF-UHFFFAOYSA-N 0.000 claims description 42
- 150000001875 compounds Chemical class 0.000 claims description 14
- 238000000137 annealing Methods 0.000 claims description 11
- 229910052804 chromium Inorganic materials 0.000 claims description 10
- 239000011651 chromium Substances 0.000 claims description 10
- 238000000151 deposition Methods 0.000 claims description 10
- 230000008021 deposition Effects 0.000 claims description 10
- VYZAMTAEIAYCRO-UHFFFAOYSA-N Chromium Chemical compound [Cr] VYZAMTAEIAYCRO-UHFFFAOYSA-N 0.000 claims description 9
- WUPHOULIZUERAE-UHFFFAOYSA-N 3-(oxolan-2-yl)propanoic acid Chemical compound OC(=O)CCC1CCCO1 WUPHOULIZUERAE-UHFFFAOYSA-N 0.000 claims description 7
- 229910052980 cadmium sulfide Inorganic materials 0.000 claims description 7
- 229910052750 molybdenum Inorganic materials 0.000 claims description 7
- ZOKXTWBITQBERF-UHFFFAOYSA-N Molybdenum Chemical compound [Mo] ZOKXTWBITQBERF-UHFFFAOYSA-N 0.000 claims description 6
- 239000011733 molybdenum Substances 0.000 claims description 6
- CWQXQMHSOZUFJS-UHFFFAOYSA-N molybdenum disulfide Chemical compound S=[Mo]=S CWQXQMHSOZUFJS-UHFFFAOYSA-N 0.000 claims description 5
- 229910052982 molybdenum disulfide Inorganic materials 0.000 claims description 5
- 238000004070 electrodeposition Methods 0.000 claims description 4
- 238000002048 anodisation reaction Methods 0.000 claims description 3
- WILFBXOGIULNAF-UHFFFAOYSA-N copper sulfanylidenetin zinc Chemical compound [Sn]=S.[Zn].[Cu] WILFBXOGIULNAF-UHFFFAOYSA-N 0.000 claims description 3
- 238000009987 spinning Methods 0.000 claims description 3
- 238000005507 spraying Methods 0.000 claims description 3
- 238000001771 vacuum deposition Methods 0.000 claims description 3
- 238000007740 vapor deposition Methods 0.000 claims description 3
- WHDPTDWLEKQKKX-UHFFFAOYSA-N cobalt molybdenum Chemical compound [Co].[Co].[Mo] WHDPTDWLEKQKKX-UHFFFAOYSA-N 0.000 claims 4
- MHWZQNGIEIYAQJ-UHFFFAOYSA-N molybdenum diselenide Chemical compound [Se]=[Mo]=[Se] MHWZQNGIEIYAQJ-UHFFFAOYSA-N 0.000 claims 4
- DDTIGTPWGISMKL-UHFFFAOYSA-N molybdenum nickel Chemical compound [Ni].[Mo] DDTIGTPWGISMKL-UHFFFAOYSA-N 0.000 claims 4
- ACVSDIKGGNSZDR-UHFFFAOYSA-N [P].[W].[Ni] Chemical compound [P].[W].[Ni] ACVSDIKGGNSZDR-UHFFFAOYSA-N 0.000 claims 2
- LGLOITKZTDVGOE-UHFFFAOYSA-N boranylidynemolybdenum Chemical compound [Mo]#B LGLOITKZTDVGOE-UHFFFAOYSA-N 0.000 claims 2
- QDWJUBJKEHXSMT-UHFFFAOYSA-N boranylidynenickel Chemical compound [Ni]#B QDWJUBJKEHXSMT-UHFFFAOYSA-N 0.000 claims 2
- IGLTYURFTAWDMX-UHFFFAOYSA-N boranylidynetungsten nickel Chemical compound [Ni].B#[W] IGLTYURFTAWDMX-UHFFFAOYSA-N 0.000 claims 2
- JPNWDVUTVSTKMV-UHFFFAOYSA-N cobalt tungsten Chemical compound [Co].[W] JPNWDVUTVSTKMV-UHFFFAOYSA-N 0.000 claims 2
- SIBIBHIFKSKVRR-UHFFFAOYSA-N phosphanylidynecobalt Chemical compound [Co]#P SIBIBHIFKSKVRR-UHFFFAOYSA-N 0.000 claims 2
- AMWVZPDSWLOFKA-UHFFFAOYSA-N phosphanylidynemolybdenum Chemical compound [Mo]#P AMWVZPDSWLOFKA-UHFFFAOYSA-N 0.000 claims 2
- 239000010408 film Substances 0.000 description 20
- 239000000463 material Substances 0.000 description 20
- 229910001220 stainless steel Inorganic materials 0.000 description 12
- 239000010935 stainless steel Substances 0.000 description 12
- 239000010949 copper Substances 0.000 description 11
- 230000008569 process Effects 0.000 description 10
- RYGMFSIKBFXOCR-UHFFFAOYSA-N Copper Chemical compound [Cu] RYGMFSIKBFXOCR-UHFFFAOYSA-N 0.000 description 9
- GYHNNYVSQQEPJS-UHFFFAOYSA-N Gallium Chemical compound [Ga] GYHNNYVSQQEPJS-UHFFFAOYSA-N 0.000 description 8
- 229910052733 gallium Inorganic materials 0.000 description 8
- 239000011669 selenium Substances 0.000 description 8
- 239000010409 thin film Substances 0.000 description 8
- 229910052802 copper Inorganic materials 0.000 description 7
- 229910052751 metal Inorganic materials 0.000 description 7
- 239000002184 metal Substances 0.000 description 7
- 239000004065 semiconductor Substances 0.000 description 7
- 229910052738 indium Inorganic materials 0.000 description 6
- APFVFJFRJDLVQX-UHFFFAOYSA-N indium atom Chemical compound [In] APFVFJFRJDLVQX-UHFFFAOYSA-N 0.000 description 6
- 229910052711 selenium Inorganic materials 0.000 description 6
- 241000894007 species Species 0.000 description 6
- BUGBHKTXTAQXES-UHFFFAOYSA-N Selenium Chemical compound [Se] BUGBHKTXTAQXES-UHFFFAOYSA-N 0.000 description 5
- PXHVJJICTQNCMI-UHFFFAOYSA-N nickel Substances [Ni] PXHVJJICTQNCMI-UHFFFAOYSA-N 0.000 description 5
- 239000000243 solution Substances 0.000 description 5
- 239000000126 substance Substances 0.000 description 5
- MARUHZGHZWCEQU-UHFFFAOYSA-N 5-phenyl-2h-tetrazole Chemical compound C1=CC=CC=C1C1=NNN=N1 MARUHZGHZWCEQU-UHFFFAOYSA-N 0.000 description 4
- 230000007797 corrosion Effects 0.000 description 4
- 238000005260 corrosion Methods 0.000 description 4
- 239000000203 mixture Substances 0.000 description 4
- 229910021417 amorphous silicon Inorganic materials 0.000 description 3
- 239000011889 copper foil Substances 0.000 description 3
- HVMJUDPAXRRVQO-UHFFFAOYSA-N copper indium Chemical compound [Cu].[In] HVMJUDPAXRRVQO-UHFFFAOYSA-N 0.000 description 3
- OFNHPGDEEMZPFG-UHFFFAOYSA-N phosphanylidynenickel Chemical compound [P].[Ni] OFNHPGDEEMZPFG-UHFFFAOYSA-N 0.000 description 3
- 229910052698 phosphorus Inorganic materials 0.000 description 3
- 230000035882 stress Effects 0.000 description 3
- OAICVXFJPJFONN-UHFFFAOYSA-N Phosphorus Chemical compound [P] OAICVXFJPJFONN-UHFFFAOYSA-N 0.000 description 2
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 2
- 229910000831 Steel Inorganic materials 0.000 description 2
- IQTMWNQRJYAGDL-UHFFFAOYSA-N [SeH2]=[Se] Chemical compound [SeH2]=[Se] IQTMWNQRJYAGDL-UHFFFAOYSA-N 0.000 description 2
- 238000013459 approach Methods 0.000 description 2
- QVGXLLKOCUKJST-UHFFFAOYSA-N atomic oxygen Chemical compound [O] QVGXLLKOCUKJST-UHFFFAOYSA-N 0.000 description 2
- DVRDHUBQLOKMHZ-UHFFFAOYSA-N chalcopyrite Chemical compound [S-2].[S-2].[Fe+2].[Cu+2] DVRDHUBQLOKMHZ-UHFFFAOYSA-N 0.000 description 2
- 229910052951 chalcopyrite Inorganic materials 0.000 description 2
- 238000006243 chemical reaction Methods 0.000 description 2
- 238000010586 diagram Methods 0.000 description 2
- 230000031700 light absorption Effects 0.000 description 2
- 229910052759 nickel Inorganic materials 0.000 description 2
- 229910052760 oxygen Inorganic materials 0.000 description 2
- 239000001301 oxygen Substances 0.000 description 2
- 239000011574 phosphorus Substances 0.000 description 2
- 239000007921 spray Substances 0.000 description 2
- 239000010959 steel Substances 0.000 description 2
- IJGRMHOSHXDMSA-UHFFFAOYSA-N Atomic nitrogen Chemical compound N#N IJGRMHOSHXDMSA-UHFFFAOYSA-N 0.000 description 1
- -1 CIGS compound Chemical class 0.000 description 1
- BWGNESOTFCXPMA-UHFFFAOYSA-N Dihydrogen disulfide Chemical compound SS BWGNESOTFCXPMA-UHFFFAOYSA-N 0.000 description 1
- 241000712469 Fowl plague virus Species 0.000 description 1
- 229910021205 NaH2PO2 Inorganic materials 0.000 description 1
- 229910018487 Ni—Cr Inorganic materials 0.000 description 1
- 229910001096 P alloy Inorganic materials 0.000 description 1
- VMHLLURERBWHNL-UHFFFAOYSA-M Sodium acetate Chemical compound [Na+].CC([O-])=O VMHLLURERBWHNL-UHFFFAOYSA-M 0.000 description 1
- 239000011358 absorbing material Substances 0.000 description 1
- 230000032683 aging Effects 0.000 description 1
- 229910052787 antimony Inorganic materials 0.000 description 1
- 239000007864 aqueous solution Substances 0.000 description 1
- 239000012298 atmosphere Substances 0.000 description 1
- 238000005452 bending Methods 0.000 description 1
- 230000015572 biosynthetic process Effects 0.000 description 1
- 229910052796 boron Inorganic materials 0.000 description 1
- 229910052793 cadmium Inorganic materials 0.000 description 1
- BDOSMKKIYDKNTQ-UHFFFAOYSA-N cadmium atom Chemical compound [Cd] BDOSMKKIYDKNTQ-UHFFFAOYSA-N 0.000 description 1
- 230000015556 catabolic process Effects 0.000 description 1
- 230000008859 change Effects 0.000 description 1
- VNNRSPGTAMTISX-UHFFFAOYSA-N chromium nickel Chemical compound [Cr].[Ni] VNNRSPGTAMTISX-UHFFFAOYSA-N 0.000 description 1
- 238000010549 co-Evaporation Methods 0.000 description 1
- 239000011248 coating agent Substances 0.000 description 1
- 238000000576 coating method Methods 0.000 description 1
- 229910052681 coesite Inorganic materials 0.000 description 1
- 239000000470 constituent Substances 0.000 description 1
- 229910052906 cristobalite Inorganic materials 0.000 description 1
- 239000013078 crystal Substances 0.000 description 1
- 230000007547 defect Effects 0.000 description 1
- 238000006731 degradation reaction Methods 0.000 description 1
- 238000005137 deposition process Methods 0.000 description 1
- 230000001627 detrimental effect Effects 0.000 description 1
- 229910001873 dinitrogen Inorganic materials 0.000 description 1
- 239000002019 doping agent Substances 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 238000007772 electroless plating Methods 0.000 description 1
- 238000009713 electroplating Methods 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 239000012467 final product Substances 0.000 description 1
- 230000004907 flux Effects 0.000 description 1
- 239000011521 glass Substances 0.000 description 1
- 238000007641 inkjet printing Methods 0.000 description 1
- 239000012212 insulator Substances 0.000 description 1
- 230000007774 longterm Effects 0.000 description 1
- 150000002739 metals Chemical class 0.000 description 1
- 229910052961 molybdenite Inorganic materials 0.000 description 1
- 239000005078 molybdenum compound Substances 0.000 description 1
- 150000002752 molybdenum compounds Chemical class 0.000 description 1
- LGQLOGILCSXPEA-UHFFFAOYSA-L nickel sulfate Chemical compound [Ni+2].[O-]S([O-])(=O)=O LGQLOGILCSXPEA-UHFFFAOYSA-L 0.000 description 1
- 229910000363 nickel(II) sulfate Inorganic materials 0.000 description 1
- 239000012299 nitrogen atmosphere Substances 0.000 description 1
- 239000003960 organic solvent Substances 0.000 description 1
- 239000011819 refractory material Substances 0.000 description 1
- 239000003870 refractory metal Substances 0.000 description 1
- 238000012552 review Methods 0.000 description 1
- 238000005096 rolling process Methods 0.000 description 1
- 239000000377 silicon dioxide Substances 0.000 description 1
- 235000012239 silicon dioxide Nutrition 0.000 description 1
- 239000011734 sodium Substances 0.000 description 1
- 235000017281 sodium acetate Nutrition 0.000 description 1
- 239000001632 sodium acetate Substances 0.000 description 1
- 239000006104 solid solution Substances 0.000 description 1
- 238000004528 spin coating Methods 0.000 description 1
- 229910052682 stishovite Inorganic materials 0.000 description 1
- 238000006467 substitution reaction Methods 0.000 description 1
- 229910052717 sulfur Inorganic materials 0.000 description 1
- 229910052715 tantalum Inorganic materials 0.000 description 1
- 238000010345 tape casting Methods 0.000 description 1
- 229910052714 tellurium Inorganic materials 0.000 description 1
- 229910052718 tin Inorganic materials 0.000 description 1
- 229910052719 titanium Inorganic materials 0.000 description 1
- 231100000331 toxic Toxicity 0.000 description 1
- 230000002588 toxic effect Effects 0.000 description 1
- 229910052905 tridymite Inorganic materials 0.000 description 1
- 229910052721 tungsten Inorganic materials 0.000 description 1
- 229910052725 zinc Inorganic materials 0.000 description 1
- 239000011701 zinc Substances 0.000 description 1
Images
Classifications
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L31/00—Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof
- H01L31/02—Details
- H01L31/0224—Electrodes
- H01L31/022408—Electrodes for devices characterised by at least one potential jump barrier or surface barrier
- H01L31/022425—Electrodes for devices characterised by at least one potential jump barrier or surface barrier for solar cells
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L31/00—Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof
- H01L31/0248—Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof characterised by their semiconductor bodies
- H01L31/0256—Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof characterised by their semiconductor bodies characterised by the material
- H01L31/0264—Inorganic materials
- H01L31/032—Inorganic materials including, apart from doping materials or other impurities, only compounds not provided for in groups H01L31/0272 - H01L31/0312
- H01L31/0322—Inorganic materials including, apart from doping materials or other impurities, only compounds not provided for in groups H01L31/0272 - H01L31/0312 comprising only AIBIIICVI chalcopyrite compounds, e.g. Cu In Se2, Cu Ga Se2, Cu In Ga Se2
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L31/00—Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof
- H01L31/0248—Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof characterised by their semiconductor bodies
- H01L31/036—Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof characterised by their semiconductor bodies characterised by their crystalline structure or particular orientation of the crystalline planes
- H01L31/0392—Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof characterised by their semiconductor bodies characterised by their crystalline structure or particular orientation of the crystalline planes including thin films deposited on metallic or insulating substrates ; characterised by specific substrate materials or substrate features or by the presence of intermediate layers, e.g. barrier layers, on the substrate
- H01L31/03926—Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof characterised by their semiconductor bodies characterised by their crystalline structure or particular orientation of the crystalline planes including thin films deposited on metallic or insulating substrates ; characterised by specific substrate materials or substrate features or by the presence of intermediate layers, e.g. barrier layers, on the substrate comprising a flexible substrate
- H01L31/03928—Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof characterised by their semiconductor bodies characterised by their crystalline structure or particular orientation of the crystalline planes including thin films deposited on metallic or insulating substrates ; characterised by specific substrate materials or substrate features or by the presence of intermediate layers, e.g. barrier layers, on the substrate comprising a flexible substrate including AIBIIICVI compound, e.g. CIS, CIGS deposited on metal or polymer foils
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L31/00—Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof
- H01L31/04—Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof adapted as photovoltaic [PV] conversion devices
- H01L31/06—Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof adapted as photovoltaic [PV] conversion devices characterised by potential barriers
- H01L31/072—Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof adapted as photovoltaic [PV] conversion devices characterised by potential barriers the potential barriers being only of the PN heterojunction type
- H01L31/0749—Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof adapted as photovoltaic [PV] conversion devices characterised by potential barriers the potential barriers being only of the PN heterojunction type including a AIBIIICVI compound, e.g. CdS/CulnSe2 [CIS] heterojunction solar cells
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- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
- Y02E—REDUCTION OF GREENHOUSE GAS [GHG] EMISSIONS, RELATED TO ENERGY GENERATION, TRANSMISSION OR DISTRIBUTION
- Y02E10/00—Energy generation through renewable energy sources
- Y02E10/50—Photovoltaic [PV] energy
- Y02E10/541—CuInSe2 material PV cells
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- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
- Y02P—CLIMATE CHANGE MITIGATION TECHNOLOGIES IN THE PRODUCTION OR PROCESSING OF GOODS
- Y02P70/00—Climate change mitigation technologies in the production process for final industrial or consumer products
- Y02P70/50—Manufacturing or production processes characterised by the final manufactured product
Definitions
- the present invention relates to photovoltaic devices, and more particularly the present invention is related to a flexible photovoltaic film cell with an iron diffusion barrier layer.
- one aspect of the present invention provides a method of fabricating a flexible photovoltaic film cell with an iron diffusion barrier layer, the method including the steps of: providing a foil substrate including iron; forming an iron diffusion barrier layer on the foil substrate, where the iron diffusion barrier layer prevents the iron from diffusing; forming an electrode layer on the iron diffusion barrier layer; and forming at least one light absorber layer on the electrode layer.
- a flexible photovoltaic film cell including: a foil substrate comprising iron; an iron diffusion barrier layer formed on the foil substrate, where the iron diffusion barrier layer prevents the iron from diffusing; an electrode layer formed on the iron diffusion barrier layer; and at least one light absorber layer formed on the electrode layer.
- FIG. 1 shows a structure of a flexible photovoltaic film cell with an iron diffusion barrier layer according to an embodiment of the invention.
- FIG. 2 shows a schematic diagram of a method for producing a flexible photovoltaic film cell with an iron diffusion barrier layer according to an embodiment of the invention.
- FIG. 3 shows a cross section image of a flexible photovoltaic film cell with an iron diffusion barrier layer under scanning electron microscope according to an embodiment of the invention.
- FIG. 4A shows a depth profiling graph of iron in a flexible photovoltaic film cell with an iron diffusion barrier layer during an annealing process according to an embodiment of the invention.
- FIG. 4B shows a depth profiling graph of iron in a flexible photovoltaic film cell without an iron diffusion barrier layer during an annealing process according to an embodiment of the invention.
- FPV Flexible photovoltaics
- PV Photovoltaics
- Stainless steel foils and copper foils have been identified as potential FPV substrates for CIGS/CZTS light absorber layers, because stainless steel foils and copper foils have matching thermal expansion coefficients to CIGS/CZTS and good corrosion resistance.
- iron in stainless steel tends to diffuse up into the light absorber layer, dramatically lowering the light conversion efficiency.
- copper up-diffusion can also change the chemical composition of CIGS/CZTS, resulting in rapid aging of solar devices.
- the current solution to prevent the diffusion of detrimental elements from substrate is to coat the metal foil with a barrier layer.
- the barrier layer materials adopted so far include refractory metals and oxides such as Ti, Ta, and SiO2, but these refractory materials have limited effect in preventing iron from diffusing up into the light absorber layer.
- FIG. 1 illustrates a flexible photovoltaic film cell that forms a flexible photovoltaic device 100 including an iron diffusion barrier layer, according to an embodiment of the invention.
- the solar cell 100 can be formed according to method shown in FIG. 2 .
- the thin film solar cell 100 also includes Copper indium gallium di-selenide (CIGS), which is a semiconductor light absorbing material having a direct bandgap.
- CIGS Copper indium gallium di-selenide
- CuInxGa(1-x)Se2 CuInxGa(1-x)Se2
- the flexible photovoltaic film cell includes a substrate 110 , an iron diffusion barrier layer 120 , an electrode layer 130 , and a light absorber layer 140 .
- the substrate 110 is an iron foil layer upon or above which the other layers of the cell 100 are formed.
- the iron foil substrate can provide mechanical support for cell 100 .
- an iron foil substrate can provide corrosion resistance, flexibility, lower production costs and durability.
- the iron foil substrate can have a thickness of about 0.14 millimeters (mm).
- Other exemplary substrates include stainless steel foil and other foil substrates.
- Iron diffusion barrier layer 120 is a layer formed on the foil substrate 110 .
- Iron diffusion barrier layer 120 includes a material that has metallic species and a non-metallic species, and can include nickel-phosphorus (NiP).
- Iron diffusion barrier layer in the embodiment of the present invention has a thickness from 50 nm to 1000 nm, depending on the barrier diffusion properties, which can be affected by chemical composition of phospher in NiP barrier layer, as well as the processing temperature.
- a back contact electrode layer 130 is a layer formed upon the iron diffusion barrier layer that was annealed on the substrate 110 .
- the back electrode layer 130 typically includes a metal and can include, for example, molybdenum (Mo). Alternately or additionally, the back contact 130 can include a semiconductor.
- the back contact 130 is an electrical contact that provides back-side electrical contact to provide current from the flexible photovoltaic film cell 100 .
- An Exemplary back contact 130 is a layer having a thickness from about 0.5 micron to about 1 micron.
- Light absorber layer 140 includes CIGS, and can be, for example, about 1 to about 2 microns thick.
- the CIGS included within light absorber layer 140 can be, for example, nanocrystalline (microcrystalline) or polycrystalline and can be formed p-type, for example, formed p-type from intrinsic defects within the CIGS. Nanocrystalline and polycrystalline CIGS both include crystalline grains, but differ in, for example, the grain size of the crystalline grains. Alternately or additionally, the CIGS can be formed p-type by intentional inclusion (e.g., doping) of a p-type dopant (i.e., an additional material introduced into the CIGS in very small concentrations to make the CIGS semiconductor p-type or more p-type).
- the light absorber layer 140 can also include, alternatively, an approximately 0.7 microns thick layer of n-type CdS. The light absorber layer 140 is formed upon and abuts or is proximate to the electrode layer 130 .
- FIG. 2 shows a schematic diagram of a method for producing a flexible photovoltaic film cell with an iron diffusion barrier layer according to an embodiment of the invention.
- an iron foil substrate 110 is provided.
- Foil substrate 110 can contain iron only, or iron and chromium.
- foil substrate contains 5 atom percent to 30 atom percent chromium. 16.5% percent chromium stainless foil substrate can be preferred, because its coefficient of thermal expansion (CTE) matches with those of preferred absorber layer materials such as CIGS as well as superior corrosion resistance.
- CTE coefficient of thermal expansion
- Another steel foil, nickel chromium steel foil has higher CTE than chromium stainless foil.
- High Chromium Stainless Steel (SS) foil consisting of 84% Fe and 16% Cr of thickness 0.14 mm can be selected as the flexible substrate because its coefficient of thermal expansion (CTE) is close to that of CIGS/CZTS.
- Foil substrate 110 can be manufactured through cold forming by all standard process (bending, contour forming, drawing, flow turning etc.), and can be cleaned with organic solvents in an ultrasonic bath to remove oil residues from rolling.
- iron diffusion barrier layer 120 is formed on the foil substrate.
- Iron diffusion barrier layer in the embodiment of the present invention has a thickness from 50 nm to 1000 nm, depending on the barrier diffusion properties, which can be affected by chemical composition of phospher in NiP barrier layer, as well as the processing temperature.
- Iron diffusion barrier layer 120 includes a material that has metallic species and a non-metallic species.
- the metallic species consist of one or more elements in Group VIA including Mo and W, in group VIIIB including Ni, Co and Fe, as well as Zn, Sn and Sb.
- the non-metallic species consist of one element in B, P, S, Se and Te.
- typical binary compounds include NiP/B, CoP/B, MoP/B, MoSe2 and MoS2, and typical ternary compounds includes NiMoP/B, CoMoP/B, NiWP/B and CoWP/B.
- the iron diffusion barrier layer can be formed by spinning, spraying, anodization, electroless deposition, electrodeposition, vacuum deposition, and vapor deposition. Iron diffusion barrier layer 120 can be annealed on the foil substrate at a range from 400° C. to 600° C. in nitrogen gas atmosphere to improve the adhesion of the iron diffusion barrier layer on the foil substrate.
- barrier layer materials can be electroplated in aqueous solution and demonstrate their barrier property on metal foils.
- Deposition of nickel-phosphorus (NiP) with an electroless solution have some properties that are superior to those of electrolytically formed NiP, because the electrolessly deposited NiP can be controlled to have specific phosphorus content.
- Electrolessly deposited NiP is harder, has great corrosion resistance, and has uniform surface coverage due to the control of the phosphorus.
- solution-based electroplating is considered as a low-cost method for thin-film fabrication.
- electroplated diffusion barrier solves the problem of FPV without introducing significant extra cost compared to vacuum process, which leads to the high final cost of flexible solar panels. (see Daly et al., “Electrochemical nickel-phosphorus alloy formation” International Materials Reviews 2003 Vol. 48 No. 5, pp. 326-338).
- NiP of thickness about 300 nm can be electrolessly formed on the SS using commercial electroless plating bath (Technic EN 8200).
- a preferred amount percentage of P in the NiP barrier is around 12%.
- the deposition rate is approximately 200 nm per minute, resulting in less than two minutes processing time.
- the as-formed NiP film is then soft-annealed at 200° C. for 30 minutes in nitrogen atmosphere to improve adhesion.
- the temperature of the annealing is preferred to be kept at 200° C., for 30 minutes because there may be structural changes of NiP if it is annealed beyond the preferred temperature and time. (see Paunovic et al., “Electrical Resistance and Stress of Bilayer Co(P)/Cu and Ni(P)/Cu Thin Films,” J. Electrochem. Soc ., Vol. 140, No. 9, September 199).
- the NiP will survive high temperatures due to NiP layer's thickness.
- the pulse deposition consists of two types of pulses: one is at 50 mA/cm2, 500 Hz for 10 s, the other is at 10 mA/cm2, 1 Hz for 10 minutes. This method leads to higher P content as shown in Table 1. NiP film with higher P content can suppress the Fe diffusion more effectively.
- Electrode layer 130 is a back contact layer, and is 600 nm thick. Electrode layer 130 includes compounds such as molybdenum. Molybdenum compound is preferred due to its widely application as a back contact material in CIGS/CZTS solar cells, because it forms a good Ohmic contact with the absorber layer. Molybdenum electrodes have low stress, high conductivity, and good adhesion to the rear substrate. To provide this combination of features, oxygen is introduced into the molybdenum electrode at the initial stage of deposition on the substrate. The application of the oxygen reduces the overall stress of the rear electrode. (see U.S. Pat. No. 7,875,945 B2, published on Jan. 25, 2011) The electrode layer is sputtered on the diffusion barrier layer 120 .
- a light absorber layer 140 is formed on electrode layer 130 .
- Light absorber layer 140 uses thin-film technology, which includes direct bandgap materials, such as amorphous Si, cadmium telluride (CdTe) and copper indium gallium selenide (CuInGaSe 2 also commonly abbreviated as “CIGS”).
- Direct bandgap absorbers have strong light absorption at a thickness of only a few micrometers. Reduced thickness means reduced material and production costs.
- a bandgap (also called an energy gap) of a material, is an energy range of the material where no electron states exist.
- the bandgap generally refers to the energy difference between the top of the valence band of the material and the bottom of the conduction band of the material.
- the bandgap is the amount of energy required to free an outer-shell electron from its orbit about the nucleus to a free state. Bandgaps are usually expressed in electron volts.
- Copper indium gallium di-selenide is an I-III-VI 2 , compound semiconductor material (e.g., a p-type semiconductor material).
- CIGS is also known as copper indium gallium selenide.
- CIGS indicates a compound comprised of copper, indium, and either or both of gallium and selenium. That is, CIGS may be the compound CIS, the compound CGS or a compound containing all the elements copper, indium, gallium and selenium.
- CIGS may be a solid solution of the constituent elements of CIGS.
- CIGS has a chemical formula of CuIn x Ga (1-x) Se 2 , where the value of X can vary from 1 to 0.
- CIGS is a tetrahedrally-bonded semiconductor, with a chalcopyrite crystal structure, and a bandgap varying continuously with X from about 1.0 eV (electron volts) at 300 K (degrees Kelvin) for CIS, to about 1.7 eV at 300 K for CGS.
- CIGS is a preferred material for the light absorber layer 140 .
- CIGS-based photovoltaic devices with an efficiency of as high as 19.5 percent (%) have been demonstrated (as compared with 16.5% and 12% efficiencies for CdTe and amorphous Si absorbers, respectively).
- Cd toxic cadmium
- light absorber layer 140 includes copper indium gallium selenide (CIGS), copper zinc tin sulfide (CZTS), and/or Cadmium Sulfide (CdS), because their high light absorption coefficients and satisfactory long-term stability.
- CIGS copper indium gallium selenide
- CZTS copper zinc tin sulfide
- CdS Cadmium Sulfide
- Very-high-efficiency CIGS absorber layers have been achieved using vacuum-based deposition processes, such as the “three-stage process” adopted by the National Renewable Energy Lab (NREL) which is a vacuum co-evaporation process wherein individual metal sources of copper (Cu), indium (In), gallium (Ga) and selenium (Se) are evaporated toward a heated substrate.
- NREL National Renewable Energy Lab
- the carefully controlled metal fluxes deliver a desired amount of metals, which react at the substrate under an overpressure of Se and form the CIGS compound.
- Light absorber layer 140 can be annealed onto the electrode layer at a range of 400° C. and 600° C.
- Some of the other solution-based approaches include solution-based deposition, electrodeposition, spray processes, doctor blading, ink jet printing and spin-coating.
- Spray processes offer high throughput and high material utilization, and can be used to produce large-area uniform thin films with good adhesion to the substrate.
- Deposition of chalcopyrite materials such as, copper indium disulfide (CuInS 2 ) and copper indium diselenide (CuInSe 2 ), which is commonly abbreviated as “CIS,” have been demonstrated using this method.
- light absorber layer 140 can be annealed onto the electrode layer at a range of 400° C. and 600° C.
- FIG. 3 shows an image of a flexible photovoltaic film cell with an iron diffusion barrier layer under scanning electron microscope.
- the stack of the films Cu (80 nm)/Mo (600 nm)/NiP (300 nm)/SS is clearly shown in the scanning electron microscope (SEM) cross-section image.
- SEM scanning electron microscope
- iron diffusion barrier layer is compact and uniform, conformally coating the Stainless Steel substrate.
- the cross-section image of the embodiment of the present invention shows as-formed multi-layer structure, highlighting the continuous dense iron diffusion barrier layer between the back contact Mo layer and the stainless steel substrate.
- FIG. 4A shows a depth profiling graph of iron in a flexible photovoltaic film cell with an iron diffusion barrier layer during an annealing process according to an embodiment of the invention.
- FIG. 4 A shows a depth profiling graph of iron in a flexible photovoltaic film cell with an iron diffusion barrier layer during an annealing process according to an embodiment of the invention.
- FIG. 4B shows a depth profiling graph of iron in a flexible photovoltaic film cell without an iron diffusion barrier layer during an annealing process according to an embodiment of the invention.
- Ni contents significantly increase after 30 minutes annealing at 600° C. across the whole Mo layer, especially near the Cu/Mo interface.
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Abstract
Description
- This application is a continuation of U.S. patent application Ser. No. 13/245,016, filed Sep. 26, 2011, the entire contents of which are incorporated herein by reference.
- The present invention relates to photovoltaic devices, and more particularly the present invention is related to a flexible photovoltaic film cell with an iron diffusion barrier layer.
- Today, Stainless steel foils and copper foils have been identified as potential flexible photovoltaic substrates for CIGS/CZTS. However, the past flexible photovoltaic film cells have significantly lower light conversion efficiency, because iron in stainless steel tends to diffuse up into the light absorber layer and interfere with the light absorber layer.
- Accordingly, one aspect of the present invention provides a method of fabricating a flexible photovoltaic film cell with an iron diffusion barrier layer, the method including the steps of: providing a foil substrate including iron; forming an iron diffusion barrier layer on the foil substrate, where the iron diffusion barrier layer prevents the iron from diffusing; forming an electrode layer on the iron diffusion barrier layer; and forming at least one light absorber layer on the electrode layer.
- Another aspect of the present invention provides a flexible photovoltaic film cell, including: a foil substrate comprising iron; an iron diffusion barrier layer formed on the foil substrate, where the iron diffusion barrier layer prevents the iron from diffusing; an electrode layer formed on the iron diffusion barrier layer; and at least one light absorber layer formed on the electrode layer.
- The foregoing features are of representative embodiments and are presented to assist in understanding the invention. It should be understood that they are not intended to be considered limitations on the invention as defined by the claims, or limitations on equivalents to the claims. Therefore, this summary of features should not be considered dispositive in determining equivalents. Additional features of the invention will become apparent in the following description, from the drawings and from the claims.
-
FIG. 1 shows a structure of a flexible photovoltaic film cell with an iron diffusion barrier layer according to an embodiment of the invention. -
FIG. 2 shows a schematic diagram of a method for producing a flexible photovoltaic film cell with an iron diffusion barrier layer according to an embodiment of the invention. -
FIG. 3 shows a cross section image of a flexible photovoltaic film cell with an iron diffusion barrier layer under scanning electron microscope according to an embodiment of the invention. -
FIG. 4A shows a depth profiling graph of iron in a flexible photovoltaic film cell with an iron diffusion barrier layer during an annealing process according to an embodiment of the invention. -
FIG. 4B shows a depth profiling graph of iron in a flexible photovoltaic film cell without an iron diffusion barrier layer during an annealing process according to an embodiment of the invention. - The above and other features of the present invention will become more distinct by a detailed description of embodiments shown in combination with attached drawings. Identical reference numbers represent the same or similar parts in the attached drawings of the invention.
- Flexible photovoltaics (FPV) have many advantages over conventional Photovoltaics (PV) which are fabricated on rigid, heavy, and fragile glass substrates. FPVs use thin metal foils which is light but more robust—only a few kilogram for solar panels of tens of square meters, and hard to break. Furthermore, because of their flexibility, they can be not only incorporated onto building sectors, but also on automobile sectors and consumable electronics sectors, therefore open up avenue for new applications of PV devices.
- Stainless steel foils and copper foils have been identified as potential FPV substrates for CIGS/CZTS light absorber layers, because stainless steel foils and copper foils have matching thermal expansion coefficients to CIGS/CZTS and good corrosion resistance. However, iron in stainless steel tends to diffuse up into the light absorber layer, dramatically lowering the light conversion efficiency. In addition, copper up-diffusion can also change the chemical composition of CIGS/CZTS, resulting in rapid aging of solar devices. The current solution to prevent the diffusion of detrimental elements from substrate is to coat the metal foil with a barrier layer. The barrier layer materials adopted so far include refractory metals and oxides such as Ti, Ta, and SiO2, but these refractory materials have limited effect in preventing iron from diffusing up into the light absorber layer.
- A detailed description of a method and apparatus for fabricating a flexible photovoltaic film cell as provided by an embodiment of the present invention is made with reference to attached drawings.
-
FIG. 1 illustrates a flexible photovoltaic film cell that forms a flexiblephotovoltaic device 100 including an iron diffusion barrier layer, according to an embodiment of the invention. For example, thesolar cell 100 can be formed according to method shown inFIG. 2 . The thin filmsolar cell 100 also includes Copper indium gallium di-selenide (CIGS), which is a semiconductor light absorbing material having a direct bandgap. The term CIGS (CuInxGa(1-x)Se2), which will be explained in detail later, is a compound included of copper, indium, and either or both of gallium and selenium. In the broad sense, at one extreme CIGS can be the compound CIS that does not include gallium (X=1); at the other extreme CIGS can be the compound CGS that does not include indium (X=0); or CIGS can be a compound containing all of the elements: copper, indium, gallium and selenium (X is between 0 and 1, but not including 0 and 1). Also, CIGS (CuInxGa(1-x)Se2) has a bandgap varying continuously with X from about 1.0 eV (electron volts) at 300 K (degrees Kelvin) for CIS (X=1), to about 1.7 eV at 300 K for CGS (X=0). - The flexible photovoltaic film cell includes a
substrate 110, an irondiffusion barrier layer 120, anelectrode layer 130, and alight absorber layer 140. Thesubstrate 110 is an iron foil layer upon or above which the other layers of thecell 100 are formed. The iron foil substrate can provide mechanical support forcell 100. In addition to the mechanical support, an iron foil substrate can provide corrosion resistance, flexibility, lower production costs and durability. The iron foil substrate can have a thickness of about 0.14 millimeters (mm). Other exemplary substrates include stainless steel foil and other foil substrates. - Iron
diffusion barrier layer 120 is a layer formed on thefoil substrate 110. Irondiffusion barrier layer 120 includes a material that has metallic species and a non-metallic species, and can include nickel-phosphorus (NiP). Iron diffusion barrier layer in the embodiment of the present invention has a thickness from 50 nm to 1000 nm, depending on the barrier diffusion properties, which can be affected by chemical composition of phospher in NiP barrier layer, as well as the processing temperature. - A back
contact electrode layer 130 is a layer formed upon the iron diffusion barrier layer that was annealed on thesubstrate 110. Theback electrode layer 130 typically includes a metal and can include, for example, molybdenum (Mo). Alternately or additionally, theback contact 130 can include a semiconductor. Theback contact 130 is an electrical contact that provides back-side electrical contact to provide current from the flexiblephotovoltaic film cell 100. AnExemplary back contact 130 is a layer having a thickness from about 0.5 micron to about 1 micron. -
Light absorber layer 140 includes CIGS, and can be, for example, about 1 to about 2 microns thick. The CIGS included withinlight absorber layer 140 can be, for example, nanocrystalline (microcrystalline) or polycrystalline and can be formed p-type, for example, formed p-type from intrinsic defects within the CIGS. Nanocrystalline and polycrystalline CIGS both include crystalline grains, but differ in, for example, the grain size of the crystalline grains. Alternately or additionally, the CIGS can be formed p-type by intentional inclusion (e.g., doping) of a p-type dopant (i.e., an additional material introduced into the CIGS in very small concentrations to make the CIGS semiconductor p-type or more p-type). Thelight absorber layer 140 can also include, alternatively, an approximately 0.7 microns thick layer of n-type CdS. Thelight absorber layer 140 is formed upon and abuts or is proximate to theelectrode layer 130. -
FIG. 2 shows a schematic diagram of a method for producing a flexible photovoltaic film cell with an iron diffusion barrier layer according to an embodiment of the invention. In step 810 ofFIG. 2 , aniron foil substrate 110 is provided.Foil substrate 110 can contain iron only, or iron and chromium. In an embodiment of the present invention, foil substrate contains 5 atom percent to 30 atom percent chromium. 16.5% percent chromium stainless foil substrate can be preferred, because its coefficient of thermal expansion (CTE) matches with those of preferred absorber layer materials such as CIGS as well as superior corrosion resistance. Another steel foil, nickel chromium steel foil has higher CTE than chromium stainless foil. For example, high Chromium Stainless Steel (SS) foil consisting of 84% Fe and 16% Cr of thickness 0.14 mm can be selected as the flexible substrate because its coefficient of thermal expansion (CTE) is close to that of CIGS/CZTS.Foil substrate 110 can be manufactured through cold forming by all standard process (bending, contour forming, drawing, flow turning etc.), and can be cleaned with organic solvents in an ultrasonic bath to remove oil residues from rolling. - In step S20 of
FIG. 2 , irondiffusion barrier layer 120 is formed on the foil substrate. Iron diffusion barrier layer in the embodiment of the present invention has a thickness from 50 nm to 1000 nm, depending on the barrier diffusion properties, which can be affected by chemical composition of phospher in NiP barrier layer, as well as the processing temperature. Irondiffusion barrier layer 120 includes a material that has metallic species and a non-metallic species. The metallic species consist of one or more elements in Group VIA including Mo and W, in group VIIIB including Ni, Co and Fe, as well as Zn, Sn and Sb. The non-metallic species consist of one element in B, P, S, Se and Te. To be more specific, typical binary compounds include NiP/B, CoP/B, MoP/B, MoSe2 and MoS2, and typical ternary compounds includes NiMoP/B, CoMoP/B, NiWP/B and CoWP/B. The iron diffusion barrier layer can be formed by spinning, spraying, anodization, electroless deposition, electrodeposition, vacuum deposition, and vapor deposition. Irondiffusion barrier layer 120 can be annealed on the foil substrate at a range from 400° C. to 600° C. in nitrogen gas atmosphere to improve the adhesion of the iron diffusion barrier layer on the foil substrate. - Referring to step S20 of
FIG. 2 , barrier layer materials can be electroplated in aqueous solution and demonstrate their barrier property on metal foils. Deposition of nickel-phosphorus (NiP) with an electroless solution have some properties that are superior to those of electrolytically formed NiP, because the electrolessly deposited NiP can be controlled to have specific phosphorus content. Electrolessly deposited NiP is harder, has great corrosion resistance, and has uniform surface coverage due to the control of the phosphorus. Furthermore, without the costly equipment and energy to sustain a vacuum environment, solution-based electroplating is considered as a low-cost method for thin-film fabrication. Thus, electroplated diffusion barrier solves the problem of FPV without introducing significant extra cost compared to vacuum process, which leads to the high final cost of flexible solar panels. (see Daly et al., “Electrochemical nickel-phosphorus alloy formation” International Materials Reviews 2003 Vol. 48 No. 5, pp. 326-338). - NiP of thickness about 300 nm can be electrolessly formed on the SS using commercial electroless plating bath (Technic EN 8200). A preferred amount percentage of P in the NiP barrier is around 12%. The deposition rate is approximately 200 nm per minute, resulting in less than two minutes processing time. The as-formed NiP film is then soft-annealed at 200° C. for 30 minutes in nitrogen atmosphere to improve adhesion. The temperature of the annealing is preferred to be kept at 200° C., for 30 minutes because there may be structural changes of NiP if it is annealed beyond the preferred temperature and time. (see Paunovic et al., “Electrical Resistance and Stress of Bilayer Co(P)/Cu and Ni(P)/Cu Thin Films,” J. Electrochem. Soc., Vol. 140, No. 9, September 199). In the embodiment of the present invention, however, the NiP will survive high temperatures due to NiP layer's thickness.
- Referring again to step S20 of
FIG. 2 , an iron diffusion barrier layer can alternatively be formed by electrolytic pulse deposition from a bath containing 0.11 M NiSO4, 0.17M NaH2PO2, 0.12M sodium acetate and 0.3 mM SDS (C12H25O4S—Na) with pH=4.4. The pulse deposition consists of two types of pulses: one is at 50 mA/cm2, 500 Hz for 10 s, the other is at 10 mA/cm2, 1 Hz for 10 minutes. This method leads to higher P content as shown in Table 1. NiP film with higher P content can suppress the Fe diffusion more effectively. -
TABLE 1 Chemical composition and thickness of pulse electroformed NiP thin film Sample [Ni] at. % [P] at. % t (Å) SS1110E 73.4 ± 2 26.6 ± 2 3188 ± 200 SS1110B 74.4 ± 2 25.6 ± 2 2328 ± 200 - In step S30 of
FIG. 2 , a backcontact electrode layer 130 is formed on irondiffusion barrier layer 120.Electrode layer 130 is a back contact layer, and is 600 nm thick.Electrode layer 130 includes compounds such as molybdenum. Molybdenum compound is preferred due to its widely application as a back contact material in CIGS/CZTS solar cells, because it forms a good Ohmic contact with the absorber layer. Molybdenum electrodes have low stress, high conductivity, and good adhesion to the rear substrate. To provide this combination of features, oxygen is introduced into the molybdenum electrode at the initial stage of deposition on the substrate. The application of the oxygen reduces the overall stress of the rear electrode. (see U.S. Pat. No. 7,875,945 B2, published on Jan. 25, 2011) The electrode layer is sputtered on thediffusion barrier layer 120. - In step S40 of
FIG. 2 , alight absorber layer 140 is formed onelectrode layer 130.Light absorber layer 140. Light absorber layer uses thin-film technology, which includes direct bandgap materials, such as amorphous Si, cadmium telluride (CdTe) and copper indium gallium selenide (CuInGaSe2 also commonly abbreviated as “CIGS”). Direct bandgap absorbers have strong light absorption at a thickness of only a few micrometers. Reduced thickness means reduced material and production costs. - A bandgap (also called an energy gap) of a material, is an energy range of the material where no electron states exist. For insulators and semiconductors, the bandgap generally refers to the energy difference between the top of the valence band of the material and the bottom of the conduction band of the material. The bandgap is the amount of energy required to free an outer-shell electron from its orbit about the nucleus to a free state. Bandgaps are usually expressed in electron volts.
- Copper indium gallium di-selenide (CIGS) is an I-III-VI2, compound semiconductor material (e.g., a p-type semiconductor material). CIGS is also known as copper indium gallium selenide. In the broad sense, CIGS, as used herein, indicates a compound comprised of copper, indium, and either or both of gallium and selenium. That is, CIGS may be the compound CIS, the compound CGS or a compound containing all the elements copper, indium, gallium and selenium. CIGS may be a solid solution of the constituent elements of CIGS. CIGS has a chemical formula of CuInxGa(1-x)Se2, where the value of X can vary from 1 to 0. CIGS is a tetrahedrally-bonded semiconductor, with a chalcopyrite crystal structure, and a bandgap varying continuously with X from about 1.0 eV (electron volts) at 300 K (degrees Kelvin) for CIS, to about 1.7 eV at 300 K for CGS.
- Of the three above-mentioned thin-film materials, CIGS is a preferred material for the
light absorber layer 140. CIGS-based photovoltaic devices with an efficiency of as high as 19.5 percent (%) have been demonstrated (as compared with 16.5% and 12% efficiencies for CdTe and amorphous Si absorbers, respectively). In addition, in CIGS there is no toxic cadmium (Cd) involved as with CdTe, and there are no degradation issues as with amorphous Si. (See U.S. Pat. No. 7,838,403 B1, published on Nov. 23, 2010). Furthermore, It is preferred forlight absorber layer 140 to include copper indium gallium selenide (CIGS), copper zinc tin sulfide (CZTS), and/or Cadmium Sulfide (CdS), because their high light absorption coefficients and satisfactory long-term stability. - Very-high-efficiency CIGS absorber layers have been achieved using vacuum-based deposition processes, such as the “three-stage process” adopted by the National Renewable Energy Lab (NREL) which is a vacuum co-evaporation process wherein individual metal sources of copper (Cu), indium (In), gallium (Ga) and selenium (Se) are evaporated toward a heated substrate. The carefully controlled metal fluxes deliver a desired amount of metals, which react at the substrate under an overpressure of Se and form the CIGS compound. (See U.S. Pat. No. 7,838,403 B1, published on Nov. 23, 2010).
Light absorber layer 140 can be annealed onto the electrode layer at a range of 400° C. and 600° C. - Some of the other solution-based approaches include solution-based deposition, electrodeposition, spray processes, doctor blading, ink jet printing and spin-coating. Spray processes, in particular, offer high throughput and high material utilization, and can be used to produce large-area uniform thin films with good adhesion to the substrate. Deposition of chalcopyrite materials, such as, copper indium disulfide (CuInS2) and copper indium diselenide (CuInSe2), which is commonly abbreviated as “CIS,” have been demonstrated using this method.
- After other approaches,
light absorber layer 140 can be annealed onto the electrode layer at a range of 400° C. and 600° C. -
FIG. 3 shows an image of a flexible photovoltaic film cell with an iron diffusion barrier layer under scanning electron microscope. Referring toFIG. 3 , the stack of the films Cu (80 nm)/Mo (600 nm)/NiP (300 nm)/SS is clearly shown in the scanning electron microscope (SEM) cross-section image. In the image, iron diffusion barrier layer is compact and uniform, conformally coating the Stainless Steel substrate. The cross-section image of the embodiment of the present invention shows as-formed multi-layer structure, highlighting the continuous dense iron diffusion barrier layer between the back contact Mo layer and the stainless steel substrate. -
FIG. 4A shows a depth profiling graph of iron in a flexible photovoltaic film cell with an iron diffusion barrier layer during an annealing process according to an embodiment of the invention. As can be seen from FIG. 4A., there is no observable increase of Ni content in the whole Mo layer after 30 minutes annealing at 600° C. - On the other hand,
FIG. 4B shows a depth profiling graph of iron in a flexible photovoltaic film cell without an iron diffusion barrier layer during an annealing process according to an embodiment of the invention. As can be seen fromFIG. 4B , Ni contents significantly increase after 30 minutes annealing at 600° C. across the whole Mo layer, especially near the Cu/Mo interface. - It is to be understood that the sequence between the process steps shown in the accompanying figures and described herein can differ depending on the manner in which the present invention is used to create a final product such as a photovoltaic thin film structure. Given the teachings of the present invention, one of ordinary skill in the art will be able to contemplate these and similar implementations or configurations of the present invention.
- It should also be understood that the above description is only representative of illustrative embodiments. For the convenience of the reader, the above description has focused on a representative sample of possible embodiments, a sample that is illustrative of the principles of the invention. The description has not attempted to exhaustively enumerate all possible variations. Thus, alternative embodiments that are not presented herein regarding a specific portion of the invention or further alternatives that may be available but are not described herein should not be considered to be a disclaimer of those alternate embodiments. Other applications and embodiments can be implemented without departing from the spirit and scope of the present invention.
- It is therefore intended that the present invention not be limited to the specific embodiments described herein, because numerous permutations and combinations of the above and implementations involving non-inventive substitutions for the above can be created, but the invention is to be defined in accordance with the claims that follow. It can be appreciated that many such embodiments are within the literal scope of the appended claims and that others are equivalents thereto.
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US20130074915A1 (en) | 2013-03-28 |
DE102012216026B4 (en) | 2021-12-02 |
US9105779B2 (en) | 2015-08-11 |
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