US20150008586A1 - Semiconductor device and manufacturing method thereof - Google Patents
Semiconductor device and manufacturing method thereof Download PDFInfo
- Publication number
- US20150008586A1 US20150008586A1 US13/935,064 US201313935064A US2015008586A1 US 20150008586 A1 US20150008586 A1 US 20150008586A1 US 201313935064 A US201313935064 A US 201313935064A US 2015008586 A1 US2015008586 A1 US 2015008586A1
- Authority
- US
- United States
- Prior art keywords
- molding compound
- dielectric
- cover
- semiconductor
- divider
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 239000004065 semiconductor Substances 0.000 title claims abstract description 97
- 238000004519 manufacturing process Methods 0.000 title claims description 9
- 238000000465 moulding Methods 0.000 claims abstract description 101
- 150000001875 compounds Chemical class 0.000 claims abstract description 45
- 238000000034 method Methods 0.000 claims description 25
- 239000000463 material Substances 0.000 claims description 14
- 238000000059 patterning Methods 0.000 claims description 7
- 239000000758 substrate Substances 0.000 claims description 3
- JAXFJECJQZDFJS-XHEPKHHKSA-N gtpl8555 Chemical compound OC(=O)C[C@H](N)C(=O)N[C@@H](CCC(O)=O)C(=O)N[C@@H](C(C)C)C(=O)N[C@@H](C(C)C)C(=O)N1CCC[C@@H]1C(=O)N[C@H](B1O[C@@]2(C)[C@H]3C[C@H](C3(C)C)C[C@H]2O1)CCC1=CC=C(F)C=C1 JAXFJECJQZDFJS-XHEPKHHKSA-N 0.000 description 53
- 229940125810 compound 20 Drugs 0.000 description 52
- 239000010410 layer Substances 0.000 description 44
- 239000010408 film Substances 0.000 description 39
- 229920002577 polybenzoxazole Polymers 0.000 description 23
- PXHVJJICTQNCMI-UHFFFAOYSA-N Nickel Chemical compound [Ni] PXHVJJICTQNCMI-UHFFFAOYSA-N 0.000 description 14
- 239000004642 Polyimide Substances 0.000 description 12
- 229920001721 polyimide Polymers 0.000 description 12
- 239000002861 polymer material Substances 0.000 description 12
- 230000008569 process Effects 0.000 description 12
- 239000004593 Epoxy Substances 0.000 description 11
- KDLHZDBZIXYQEI-UHFFFAOYSA-N Palladium Chemical compound [Pd] KDLHZDBZIXYQEI-UHFFFAOYSA-N 0.000 description 10
- 229920000642 polymer Polymers 0.000 description 10
- 239000004020 conductor Substances 0.000 description 9
- 229910000679 solder Inorganic materials 0.000 description 9
- RYGMFSIKBFXOCR-UHFFFAOYSA-N Copper Chemical compound [Cu] RYGMFSIKBFXOCR-UHFFFAOYSA-N 0.000 description 8
- 229910052802 copper Inorganic materials 0.000 description 8
- 239000010949 copper Substances 0.000 description 8
- 239000003989 dielectric material Substances 0.000 description 8
- 238000011049 filling Methods 0.000 description 8
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 7
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 7
- BQCADISMDOOEFD-UHFFFAOYSA-N Silver Chemical compound [Ag] BQCADISMDOOEFD-UHFFFAOYSA-N 0.000 description 7
- 229910045601 alloy Inorganic materials 0.000 description 7
- 239000000956 alloy Substances 0.000 description 7
- 229910052782 aluminium Inorganic materials 0.000 description 7
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 description 7
- PCHJSUWPFVWCPO-UHFFFAOYSA-N gold Chemical compound [Au] PCHJSUWPFVWCPO-UHFFFAOYSA-N 0.000 description 7
- 229910052737 gold Inorganic materials 0.000 description 7
- 239000010931 gold Substances 0.000 description 7
- 229910052759 nickel Inorganic materials 0.000 description 7
- 229910052710 silicon Inorganic materials 0.000 description 7
- 239000010703 silicon Substances 0.000 description 7
- 229910052814 silicon oxide Inorganic materials 0.000 description 7
- 229910052709 silver Inorganic materials 0.000 description 7
- 239000004332 silver Substances 0.000 description 7
- WFKWXMTUELFFGS-UHFFFAOYSA-N tungsten Chemical compound [W] WFKWXMTUELFFGS-UHFFFAOYSA-N 0.000 description 7
- 229910052721 tungsten Inorganic materials 0.000 description 7
- 239000010937 tungsten Substances 0.000 description 7
- 239000011521 glass Substances 0.000 description 6
- 238000007747 plating Methods 0.000 description 6
- 238000007740 vapor deposition Methods 0.000 description 6
- 229910052763 palladium Inorganic materials 0.000 description 5
- 230000001902 propagating effect Effects 0.000 description 5
- 238000004528 spin coating Methods 0.000 description 5
- 238000009713 electroplating Methods 0.000 description 4
- 238000002161 passivation Methods 0.000 description 4
- 239000002131 composite material Substances 0.000 description 3
- 239000007788 liquid Substances 0.000 description 3
- 238000004544 sputter deposition Methods 0.000 description 3
- 239000010409 thin film Substances 0.000 description 3
- 229910052581 Si3N4 Inorganic materials 0.000 description 2
- 230000015572 biosynthetic process Effects 0.000 description 2
- 229920001971 elastomer Polymers 0.000 description 2
- 238000000227 grinding Methods 0.000 description 2
- 238000010030 laminating Methods 0.000 description 2
- 239000012778 molding material Substances 0.000 description 2
- HQVNEWCFYHHQES-UHFFFAOYSA-N silicon nitride Chemical compound N12[Si]34N5[Si]62N3[Si]51N64 HQVNEWCFYHHQES-UHFFFAOYSA-N 0.000 description 2
- 239000002356 single layer Substances 0.000 description 2
- 238000005019 vapor deposition process Methods 0.000 description 2
- ATJFFYVFTNAWJD-UHFFFAOYSA-N Tin Chemical compound [Sn] ATJFFYVFTNAWJD-UHFFFAOYSA-N 0.000 description 1
- RTAQQCXQSZGOHL-UHFFFAOYSA-N Titanium Chemical compound [Ti] RTAQQCXQSZGOHL-UHFFFAOYSA-N 0.000 description 1
- 238000010521 absorption reaction Methods 0.000 description 1
- 238000013459 approach Methods 0.000 description 1
- 230000004888 barrier function Effects 0.000 description 1
- 239000003054 catalyst Substances 0.000 description 1
- 238000006243 chemical reaction Methods 0.000 description 1
- 239000011248 coating agent Substances 0.000 description 1
- 238000000576 coating method Methods 0.000 description 1
- 238000005336 cracking Methods 0.000 description 1
- 239000003822 epoxy resin Substances 0.000 description 1
- 230000008020 evaporation Effects 0.000 description 1
- 238000001704 evaporation Methods 0.000 description 1
- 230000006870 function Effects 0.000 description 1
- LNEPOXFFQSENCJ-UHFFFAOYSA-N haloperidol Chemical compound C1CC(O)(C=2C=CC(Cl)=CC=2)CCN1CCCC(=O)C1=CC=C(F)C=C1 LNEPOXFFQSENCJ-UHFFFAOYSA-N 0.000 description 1
- 238000002955 isolation Methods 0.000 description 1
- 238000005272 metallurgy Methods 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 239000006082 mold release agent Substances 0.000 description 1
- ISWSIDIOOBJBQZ-UHFFFAOYSA-N phenol group Chemical group C1(=CC=CC=C1)O ISWSIDIOOBJBQZ-UHFFFAOYSA-N 0.000 description 1
- 238000000206 photolithography Methods 0.000 description 1
- 229920002120 photoresistant polymer Polymers 0.000 description 1
- 239000000049 pigment Substances 0.000 description 1
- 229920000647 polyepoxide Polymers 0.000 description 1
- 239000004848 polyfunctional curative Substances 0.000 description 1
- 230000000717 retained effect Effects 0.000 description 1
- 238000007650 screen-printing Methods 0.000 description 1
- -1 silicas Substances 0.000 description 1
- 238000004088 simulation Methods 0.000 description 1
- 229910052715 tantalum Inorganic materials 0.000 description 1
- GUVRBAGPIYLISA-UHFFFAOYSA-N tantalum atom Chemical compound [Ta] GUVRBAGPIYLISA-UHFFFAOYSA-N 0.000 description 1
- 229910052718 tin Inorganic materials 0.000 description 1
- 229910052719 titanium Inorganic materials 0.000 description 1
- 239000010936 titanium Substances 0.000 description 1
- MAKDTFFYCIMFQP-UHFFFAOYSA-N titanium tungsten Chemical compound [Ti].[W] MAKDTFFYCIMFQP-UHFFFAOYSA-N 0.000 description 1
Images
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L24/00—Arrangements for connecting or disconnecting semiconductor or solid-state bodies; Methods or apparatus related thereto
- H01L24/01—Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
- H01L24/18—High density interconnect [HDI] connectors; Manufacturing methods related thereto
- H01L24/19—Manufacturing methods of high density interconnect preforms
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L23/00—Details of semiconductor or other solid state devices
- H01L23/48—Arrangements for conducting electric current to or from the solid state body in operation, e.g. leads, terminal arrangements ; Selection of materials therefor
- H01L23/488—Arrangements for conducting electric current to or from the solid state body in operation, e.g. leads, terminal arrangements ; Selection of materials therefor consisting of soldered or bonded constructions
- H01L23/498—Leads, i.e. metallisations or lead-frames on insulating substrates, e.g. chip carriers
- H01L23/49811—Additional leads joined to the metallisation on the insulating substrate, e.g. pins, bumps, wires, flat leads
- H01L23/49816—Spherical bumps on the substrate for external connection, e.g. ball grid arrays [BGA]
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L23/00—Details of semiconductor or other solid state devices
- H01L23/48—Arrangements for conducting electric current to or from the solid state body in operation, e.g. leads, terminal arrangements ; Selection of materials therefor
- H01L23/481—Internal lead connections, e.g. via connections, feedthrough structures
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/04—Manufacture or treatment of semiconductor devices or of parts thereof the devices having at least one potential-jump barrier or surface barrier, e.g. PN junction, depletion layer or carrier concentration layer
- H01L21/48—Manufacture or treatment of parts, e.g. containers, prior to assembly of the devices, using processes not provided for in a single one of the subgroups H01L21/06 - H01L21/326
- H01L21/4814—Conductive parts
- H01L21/4846—Leads on or in insulating or insulated substrates, e.g. metallisation
- H01L21/486—Via connections through the substrate with or without pins
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/70—Manufacture or treatment of devices consisting of a plurality of solid state components formed in or on a common substrate or of parts thereof; Manufacture of integrated circuit devices or of parts thereof
- H01L21/71—Manufacture of specific parts of devices defined in group H01L21/70
- H01L21/768—Applying interconnections to be used for carrying current between separate components within a device comprising conductors and dielectrics
- H01L21/76838—Applying interconnections to be used for carrying current between separate components within a device comprising conductors and dielectrics characterised by the formation and the after-treatment of the conductors
- H01L21/76877—Filling of holes, grooves or trenches, e.g. vias, with conductive material
- H01L21/76879—Filling of holes, grooves or trenches, e.g. vias, with conductive material by selective deposition of conductive material in the vias, e.g. selective C.V.D. on semiconductor material, plating
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L23/00—Details of semiconductor or other solid state devices
- H01L23/48—Arrangements for conducting electric current to or from the solid state body in operation, e.g. leads, terminal arrangements ; Selection of materials therefor
- H01L23/488—Arrangements for conducting electric current to or from the solid state body in operation, e.g. leads, terminal arrangements ; Selection of materials therefor consisting of soldered or bonded constructions
- H01L23/498—Leads, i.e. metallisations or lead-frames on insulating substrates, e.g. chip carriers
- H01L23/49822—Multilayer substrates
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L23/00—Details of semiconductor or other solid state devices
- H01L23/48—Arrangements for conducting electric current to or from the solid state body in operation, e.g. leads, terminal arrangements ; Selection of materials therefor
- H01L23/488—Arrangements for conducting electric current to or from the solid state body in operation, e.g. leads, terminal arrangements ; Selection of materials therefor consisting of soldered or bonded constructions
- H01L23/498—Leads, i.e. metallisations or lead-frames on insulating substrates, e.g. chip carriers
- H01L23/49827—Via connections through the substrates, e.g. pins going through the substrate, coaxial cables
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L23/00—Details of semiconductor or other solid state devices
- H01L23/52—Arrangements for conducting electric current within the device in operation from one component to another, i.e. interconnections, e.g. wires, lead frames
- H01L23/538—Arrangements for conducting electric current within the device in operation from one component to another, i.e. interconnections, e.g. wires, lead frames the interconnection structure between a plurality of semiconductor chips being formed on, or in, insulating substrates
- H01L23/5389—Arrangements for conducting electric current within the device in operation from one component to another, i.e. interconnections, e.g. wires, lead frames the interconnection structure between a plurality of semiconductor chips being formed on, or in, insulating substrates the chips being integrally enclosed by the interconnect and support structures
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L25/00—Assemblies consisting of a plurality of individual semiconductor or other solid state devices ; Multistep manufacturing processes thereof
- H01L25/03—Assemblies consisting of a plurality of individual semiconductor or other solid state devices ; Multistep manufacturing processes thereof all the devices being of a type provided for in the same subgroup of groups H01L27/00 - H01L33/00, or in a single subclass of H10K, H10N, e.g. assemblies of rectifier diodes
- H01L25/10—Assemblies consisting of a plurality of individual semiconductor or other solid state devices ; Multistep manufacturing processes thereof all the devices being of a type provided for in the same subgroup of groups H01L27/00 - H01L33/00, or in a single subclass of H10K, H10N, e.g. assemblies of rectifier diodes the devices having separate containers
- H01L25/105—Assemblies consisting of a plurality of individual semiconductor or other solid state devices ; Multistep manufacturing processes thereof all the devices being of a type provided for in the same subgroup of groups H01L27/00 - H01L33/00, or in a single subclass of H10K, H10N, e.g. assemblies of rectifier diodes the devices having separate containers the devices being of a type provided for in group H01L27/00
-
- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
- H05K1/00—Printed circuits
- H05K1/18—Printed circuits structurally associated with non-printed electric components
- H05K1/182—Printed circuits structurally associated with non-printed electric components associated with components mounted in the printed circuit board, e.g. insert mounted components [IMC]
- H05K1/185—Components encapsulated in the insulating substrate of the printed circuit or incorporated in internal layers of a multilayer circuit
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/04—Manufacture or treatment of semiconductor devices or of parts thereof the devices having at least one potential-jump barrier or surface barrier, e.g. PN junction, depletion layer or carrier concentration layer
- H01L21/50—Assembly of semiconductor devices using processes or apparatus not provided for in a single one of the subgroups H01L21/06 - H01L21/326, e.g. sealing of a cap to a base of a container
- H01L21/56—Encapsulations, e.g. encapsulation layers, coatings
- H01L21/568—Temporary substrate used as encapsulation process aid
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2224/00—Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
- H01L2224/01—Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
- H01L2224/02—Bonding areas; Manufacturing methods related thereto
- H01L2224/04—Structure, shape, material or disposition of the bonding areas prior to the connecting process
- H01L2224/04105—Bonding areas formed on an encapsulation of the semiconductor or solid-state body, e.g. bonding areas on chip-scale packages
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2224/00—Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
- H01L2224/01—Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
- H01L2224/02—Bonding areas; Manufacturing methods related thereto
- H01L2224/04—Structure, shape, material or disposition of the bonding areas prior to the connecting process
- H01L2224/05—Structure, shape, material or disposition of the bonding areas prior to the connecting process of an individual bonding area
- H01L2224/0554—External layer
- H01L2224/0556—Disposition
- H01L2224/05569—Disposition the external layer being disposed on a redistribution layer on the semiconductor or solid-state body
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2224/00—Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
- H01L2224/01—Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
- H01L2224/02—Bonding areas; Manufacturing methods related thereto
- H01L2224/04—Structure, shape, material or disposition of the bonding areas prior to the connecting process
- H01L2224/05—Structure, shape, material or disposition of the bonding areas prior to the connecting process of an individual bonding area
- H01L2224/0554—External layer
- H01L2224/0556—Disposition
- H01L2224/05571—Disposition the external layer being disposed in a recess of the surface
- H01L2224/05572—Disposition the external layer being disposed in a recess of the surface the external layer extending out of an opening
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2224/00—Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
- H01L2224/01—Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
- H01L2224/10—Bump connectors; Manufacturing methods related thereto
- H01L2224/12—Structure, shape, material or disposition of the bump connectors prior to the connecting process
- H01L2224/12105—Bump connectors formed on an encapsulation of the semiconductor or solid-state body, e.g. bumps on chip-scale packages
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2224/00—Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
- H01L2224/01—Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
- H01L2224/10—Bump connectors; Manufacturing methods related thereto
- H01L2224/12—Structure, shape, material or disposition of the bump connectors prior to the connecting process
- H01L2224/13—Structure, shape, material or disposition of the bump connectors prior to the connecting process of an individual bump connector
- H01L2224/13001—Core members of the bump connector
- H01L2224/13099—Material
- H01L2224/131—Material with a principal constituent of the material being a metal or a metalloid, e.g. boron [B], silicon [Si], germanium [Ge], arsenic [As], antimony [Sb], tellurium [Te] and polonium [Po], and alloys thereof
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2224/00—Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
- H01L2224/01—Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
- H01L2224/26—Layer connectors, e.g. plate connectors, solder or adhesive layers; Manufacturing methods related thereto
- H01L2224/31—Structure, shape, material or disposition of the layer connectors after the connecting process
- H01L2224/32—Structure, shape, material or disposition of the layer connectors after the connecting process of an individual layer connector
- H01L2224/321—Disposition
- H01L2224/32135—Disposition the layer connector connecting between different semiconductor or solid-state bodies, i.e. chip-to-chip
- H01L2224/32145—Disposition the layer connector connecting between different semiconductor or solid-state bodies, i.e. chip-to-chip the bodies being stacked
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2224/00—Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
- H01L2224/01—Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
- H01L2224/26—Layer connectors, e.g. plate connectors, solder or adhesive layers; Manufacturing methods related thereto
- H01L2224/31—Structure, shape, material or disposition of the layer connectors after the connecting process
- H01L2224/32—Structure, shape, material or disposition of the layer connectors after the connecting process of an individual layer connector
- H01L2224/321—Disposition
- H01L2224/32151—Disposition the layer connector connecting between a semiconductor or solid-state body and an item not being a semiconductor or solid-state body, e.g. chip-to-substrate, chip-to-passive
- H01L2224/32221—Disposition the layer connector connecting between a semiconductor or solid-state body and an item not being a semiconductor or solid-state body, e.g. chip-to-substrate, chip-to-passive the body and the item being stacked
- H01L2224/32225—Disposition the layer connector connecting between a semiconductor or solid-state body and an item not being a semiconductor or solid-state body, e.g. chip-to-substrate, chip-to-passive the body and the item being stacked the item being non-metallic, e.g. insulating substrate with or without metallisation
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2224/00—Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
- H01L2224/01—Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
- H01L2224/42—Wire connectors; Manufacturing methods related thereto
- H01L2224/47—Structure, shape, material or disposition of the wire connectors after the connecting process
- H01L2224/48—Structure, shape, material or disposition of the wire connectors after the connecting process of an individual wire connector
- H01L2224/4805—Shape
- H01L2224/4809—Loop shape
- H01L2224/48091—Arched
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2224/00—Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
- H01L2224/01—Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
- H01L2224/42—Wire connectors; Manufacturing methods related thereto
- H01L2224/47—Structure, shape, material or disposition of the wire connectors after the connecting process
- H01L2224/48—Structure, shape, material or disposition of the wire connectors after the connecting process of an individual wire connector
- H01L2224/481—Disposition
- H01L2224/48151—Connecting between a semiconductor or solid-state body and an item not being a semiconductor or solid-state body, e.g. chip-to-substrate, chip-to-passive
- H01L2224/48221—Connecting between a semiconductor or solid-state body and an item not being a semiconductor or solid-state body, e.g. chip-to-substrate, chip-to-passive the body and the item being stacked
- H01L2224/48225—Connecting between a semiconductor or solid-state body and an item not being a semiconductor or solid-state body, e.g. chip-to-substrate, chip-to-passive the body and the item being stacked the item being non-metallic, e.g. insulating substrate with or without metallisation
- H01L2224/48227—Connecting between a semiconductor or solid-state body and an item not being a semiconductor or solid-state body, e.g. chip-to-substrate, chip-to-passive the body and the item being stacked the item being non-metallic, e.g. insulating substrate with or without metallisation connecting the wire to a bond pad of the item
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2224/00—Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
- H01L2224/73—Means for bonding being of different types provided for in two or more of groups H01L2224/10, H01L2224/18, H01L2224/26, H01L2224/34, H01L2224/42, H01L2224/50, H01L2224/63, H01L2224/71
- H01L2224/732—Location after the connecting process
- H01L2224/73251—Location after the connecting process on different surfaces
- H01L2224/73265—Layer and wire connectors
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2224/00—Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
- H01L2224/73—Means for bonding being of different types provided for in two or more of groups H01L2224/10, H01L2224/18, H01L2224/26, H01L2224/34, H01L2224/42, H01L2224/50, H01L2224/63, H01L2224/71
- H01L2224/732—Location after the connecting process
- H01L2224/73251—Location after the connecting process on different surfaces
- H01L2224/73267—Layer and HDI connectors
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2225/00—Details relating to assemblies covered by the group H01L25/00 but not provided for in its subgroups
- H01L2225/03—All the devices being of a type provided for in the same subgroup of groups H01L27/00 - H01L33/648 and H10K99/00
- H01L2225/04—All the devices being of a type provided for in the same subgroup of groups H01L27/00 - H01L33/648 and H10K99/00 the devices not having separate containers
- H01L2225/065—All the devices being of a type provided for in the same subgroup of groups H01L27/00 - H01L33/648 and H10K99/00 the devices not having separate containers the devices being of a type provided for in group H01L27/00
- H01L2225/06503—Stacked arrangements of devices
- H01L2225/0651—Wire or wire-like electrical connections from device to substrate
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2225/00—Details relating to assemblies covered by the group H01L25/00 but not provided for in its subgroups
- H01L2225/03—All the devices being of a type provided for in the same subgroup of groups H01L27/00 - H01L33/648 and H10K99/00
- H01L2225/04—All the devices being of a type provided for in the same subgroup of groups H01L27/00 - H01L33/648 and H10K99/00 the devices not having separate containers
- H01L2225/065—All the devices being of a type provided for in the same subgroup of groups H01L27/00 - H01L33/648 and H10K99/00 the devices not having separate containers the devices being of a type provided for in group H01L27/00
- H01L2225/06503—Stacked arrangements of devices
- H01L2225/06555—Geometry of the stack, e.g. form of the devices, geometry to facilitate stacking
- H01L2225/06568—Geometry of the stack, e.g. form of the devices, geometry to facilitate stacking the devices decreasing in size, e.g. pyramidical stack
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2225/00—Details relating to assemblies covered by the group H01L25/00 but not provided for in its subgroups
- H01L2225/03—All the devices being of a type provided for in the same subgroup of groups H01L27/00 - H01L33/648 and H10K99/00
- H01L2225/10—All the devices being of a type provided for in the same subgroup of groups H01L27/00 - H01L33/648 and H10K99/00 the devices having separate containers
- H01L2225/1005—All the devices being of a type provided for in the same subgroup of groups H01L27/00 - H01L33/648 and H10K99/00 the devices having separate containers the devices being of a type provided for in group H01L27/00
- H01L2225/1011—All the devices being of a type provided for in the same subgroup of groups H01L27/00 - H01L33/648 and H10K99/00 the devices having separate containers the devices being of a type provided for in group H01L27/00 the containers being in a stacked arrangement
- H01L2225/1017—All the devices being of a type provided for in the same subgroup of groups H01L27/00 - H01L33/648 and H10K99/00 the devices having separate containers the devices being of a type provided for in group H01L27/00 the containers being in a stacked arrangement the lowermost container comprising a device support
- H01L2225/1035—All the devices being of a type provided for in the same subgroup of groups H01L27/00 - H01L33/648 and H10K99/00 the devices having separate containers the devices being of a type provided for in group H01L27/00 the containers being in a stacked arrangement the lowermost container comprising a device support the device being entirely enclosed by the support, e.g. high-density interconnect [HDI]
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2225/00—Details relating to assemblies covered by the group H01L25/00 but not provided for in its subgroups
- H01L2225/03—All the devices being of a type provided for in the same subgroup of groups H01L27/00 - H01L33/648 and H10K99/00
- H01L2225/10—All the devices being of a type provided for in the same subgroup of groups H01L27/00 - H01L33/648 and H10K99/00 the devices having separate containers
- H01L2225/1005—All the devices being of a type provided for in the same subgroup of groups H01L27/00 - H01L33/648 and H10K99/00 the devices having separate containers the devices being of a type provided for in group H01L27/00
- H01L2225/1011—All the devices being of a type provided for in the same subgroup of groups H01L27/00 - H01L33/648 and H10K99/00 the devices having separate containers the devices being of a type provided for in group H01L27/00 the containers being in a stacked arrangement
- H01L2225/1047—Details of electrical connections between containers
- H01L2225/1058—Bump or bump-like electrical connections, e.g. balls, pillars, posts
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L23/00—Details of semiconductor or other solid state devices
- H01L23/52—Arrangements for conducting electric current within the device in operation from one component to another, i.e. interconnections, e.g. wires, lead frames
- H01L23/538—Arrangements for conducting electric current within the device in operation from one component to another, i.e. interconnections, e.g. wires, lead frames the interconnection structure between a plurality of semiconductor chips being formed on, or in, insulating substrates
- H01L23/5384—Conductive vias through the substrate with or without pins, e.g. buried coaxial conductors
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L24/00—Arrangements for connecting or disconnecting semiconductor or solid-state bodies; Methods or apparatus related thereto
- H01L24/73—Means for bonding being of different types provided for in two or more of groups H01L24/10, H01L24/18, H01L24/26, H01L24/34, H01L24/42, H01L24/50, H01L24/63, H01L24/71
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2924/00—Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
- H01L2924/15—Details of package parts other than the semiconductor or other solid state devices to be connected
- H01L2924/151—Die mounting substrate
- H01L2924/153—Connection portion
- H01L2924/1531—Connection portion the connection portion being formed only on the surface of the substrate opposite to the die mounting surface
- H01L2924/15311—Connection portion the connection portion being formed only on the surface of the substrate opposite to the die mounting surface being a ball array, e.g. BGA
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2924/00—Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
- H01L2924/15—Details of package parts other than the semiconductor or other solid state devices to be connected
- H01L2924/181—Encapsulation
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2924/00—Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
- H01L2924/15—Details of package parts other than the semiconductor or other solid state devices to be connected
- H01L2924/181—Encapsulation
- H01L2924/1815—Shape
- H01L2924/1816—Exposing the passive side of the semiconductor or solid-state body
- H01L2924/18162—Exposing the passive side of the semiconductor or solid-state body of a chip with build-up interconnect
-
- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
- H05K2203/00—Indexing scheme relating to apparatus or processes for manufacturing printed circuits covered by H05K3/00
- H05K2203/14—Related to the order of processing steps
- H05K2203/1461—Applying or finishing the circuit pattern after another process, e.g. after filling of vias with conductive paste, after making printed resistors
- H05K2203/1469—Circuit made after mounting or encapsulation of the components
-
- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
- H05K3/00—Apparatus or processes for manufacturing printed circuits
- H05K3/46—Manufacturing multilayer circuits
- H05K3/4644—Manufacturing multilayer circuits by building the multilayer layer by layer, i.e. build-up multilayer circuits
- H05K3/4647—Manufacturing multilayer circuits by building the multilayer layer by layer, i.e. build-up multilayer circuits by applying an insulating layer around previously made via studs
Abstract
Description
- The disclosure relates to a semiconductor device, and more particularly to a three dimensional integrated fan out package.
- Semiconductor device is widely adopted in various applications. The geometry is trending down rapidly as user's demands increases on the performance and functionality. For example, a 3G mobile phone presented in the market is expected to be capable of telecommunicating, capturing images and processing high stream data. In order to fulfill the requirements, the 3G mobile phone needs to be equipped with different devices such as a processor, a memory and an image sensor in a limited space.
- Combining several semiconductor devices in one package is one of the approaches to enhance the performance by integrating devices with various functions into a single component. Roadmap in the field shows a three dimensional package with a multi-level structure for a superior and miniature sized semiconductor component.
- A three dimensional integrated semiconductor package contains several different sub-structures. The sub-structures are arranged in a stack manner and are either in contact with each other or linked by interconnects. However, on the other hand, different properties of the sub-structures also create challenges to a designer. Compared to a two dimensional semiconductor package, failure modes increase for a comparatively more complex three dimensional integrated semiconductor package. As such, improvements in the structure and method for a three dimensional semiconductor package continue to be sought.
- Aspects of the present disclosure are best understood from the following detailed description when read with the accompanying figures. It is emphasized that, in accordance with the standard practice in the industry, various features are not drawn to scale. In fact, the dimensions of the various features may be arbitrarily increased or reduced for clarity of discussion.
-
FIG. 1 is a schematic of a three dimensional semiconductor structure. -
FIG. 2A-2B respectively represents a semiconductor structure including a molding compound and a conductive plug from different perspective views. -
FIG. 3A-3B respectively represents a semiconductor structure including a molding compound and a conductive plug from different perspective views. -
FIG. 4 is a three dimensional semiconductor structure configured as an integrated package. -
FIG. 5 is a three dimensional semiconductor structure with a through filled-via. -
FIG. 6A-6B respectively represents a three dimensional semiconductor package configured to have a divider on the molding compound from different perspective views. -
FIG. 7A-7H are operations of a method of manufacturing a three dimensional semiconductor structure. -
FIGS. 8A-8D are operations of a method of manufacturing a three dimensional semiconductor structure. -
FIGS. 9A-9F are operations of a method of manufacturing a three dimensional semiconductor structure. -
FIG. 10A-10B are operations of a method of manufacturing a three dimensional semiconductor structure. -
FIG. 11 is an integrated 3D IC package according to some embodiments of the present disclosure. - In the present disclosure, a three dimensional (3D) semiconductor structure or package is designed to prevent an in-film crack propagating in the structure of the package. The semiconductor structure or package is an integrated component and includes various materials with different coefficient of thermal expansion (CTE). A CTE difference between a conductor and surrounding dielectric, usually a molding compound, can cause a crack to develop during subsequent processing. Such crack has been found to propagate through overlying layers and may cause an overlying conductor to also crack or to weaken, causing an open circuit during manufacturing or product operation. An undesired open circuit can result in a failure of the product. Thus, improved structure to prevent such in-film crack from propagating to overlying layers is developed.
- According to various embodiments, the 3D semiconductor structure includes thin film layers to prevent a crack from an interface of a conductive post and surrounding molding compound from causing a crack to an overlying conductor. This thin film layers protect an embedded semiconductor chip and some interconnects. The thin film layers are also referred to as dividers and covers and are disposed on a certain interface prone to cracking to prevent a propagation of a crack generated therein.
-
FIG. 1 is a3D semiconductor structure 10. The3D semiconductor structure 10 has asemiconductor chip 15 disposed at the bottom of thestructure 10. On the sidewalls of thesemiconductor chip 15,molding compound 20 surrounds thesemiconductor chip 15. The3D semiconductor structure 10 has aconductive plug 30 in themolding compound 20 and theconductive plug 30 runs through themolding compound 20. - The
semiconductor chip 15 has apassivation 152. Thepassivation 152 is formed with dielectric materials, such as spin-on glass (SOG), silicon oxide, silicon oxynitride, silicon nitride or the like. Thesemiconductor chip 15 has abond pad 154 on its top surface. An opening in the passivation is provided in order to expose a portion of thebond pad 154. - The
molding compound 20 can be a single layer film or a composite stack. It includes various materials, for example, one or more of epoxy resins, phenolic hardeners, silicas, catalysts, pigments, mold release agents, and the like. Material for forming a molding compound has a high thermal conductivity, a low moisture absorption rate, a high flexural strength at board-mounting temperatures, or a combination of these. - In some embodiments, the
3D semiconductor structure 10 has a polymer buffer layer (not shown inFIG. 1 ) and the polymer buffer layer is at the bottom of themolding compound 20. - The
conductive plug 30 has one end at atop surface 23 of themolding compound 20 and the other end at abottom surface 21 of themolding compound 20. In some embodiments, a conductive plug is a via filled with a conductive material. The conductive material for the filled via or the conductive plug is formed with gold, silver, copper, nickel, tungsten, aluminum, tin and/or alloys thereof. - A
top meeting joint 25 is defined as the top of an interface between theconductive plug 30 and themolding compound 20. From a top view perspective, thetop meeting joint 25 is a line or border that separates theconductive plug 30 and themolding compound 20. The top meeting join 25 surrounds theconductive plug 30. By adding a film or layer on thetop meeting joint 25, the added film or layer, theconductive plug 30 and the molding compound form a triple interface. When the added film or layer is the same material as theconductive plug 30, the interface formed with the molding compound is an angled interface of two materials at the top meeting joint 25. - A
conductive pillar 45 is disposed on the top surface of thebond pad 154. At one end of theconductive pillar 45, theconductive pillar 45 is electrically connected to thebond pad 154 of thesemiconductor chip 15. At the other end of theconductive pillar 45, theconductive pillar 45 is electrically connected with an interconnect. Theconductive pillar 45 is formed with gold, silver, copper, nickel, tungsten, aluminum, palladium and/or alloys thereof. Formation of theconductive pillar 45 can be by a process such as evaporation, electroplating, vapor deposition, sputtering or screen printing. - Interconnects such as some redistribution layers (RDL) 471 and 472 are included in the
semiconductor structure 10. In some embodiments as inFIG. 1 , theRDL seed layer 480. The RDL is an electrical connection to and/or between thesemiconductor chip 15 and an external circuit. InFIG. 1 , theRDL 471 is electrically connected with theconductive pillar 45 at one end. At the other end of theRDL 471, theRDL 471 is electrically connected with theRDL 472. The interconnects such asRDL - An under bump metallurgy (UBM) 48 is placed on a top surface of the
semiconductor structure 10. TheUBM 48 has a bottom portion and the bottom portion is electrically connected with one end of theRDL 472. TheUBM 48 has atop surface 482, which receives a solder ball or a solder paste. In some embodiments, theUBM 48 is formed with gold, silver, copper, nickel, tungsten, aluminum, palladium and/or alloys thereof. - Referring to
FIG. 1 , acover 40 is located over the top meeting joint 25 and disposed on theconductive plug 30 and over themolding compound 20. Thecover 40, theconductive plug 30 and themolding compound 20 form a triple interface. Thecover 40 includes anextension 42, which represents a portion of thecover 40 that is overlaid on thetop surface 23 of themolding compound 20. A length d of theextension 42 is measured from the top meeting joint 25 to anend 421 of theextension 42. In some embodiments, the length d of theextension 42 is approximately equal to 2.5 μm. In some embodiments, the length d of theextension 42 is greater than 2.5 μm. In some embodiments, the length of theextension 42 is greater than 7.5 μm. - For some embodiments, as in
FIG. 1 , thecover 40 includes twoextensions 42 in a cross section. Theextensions 42 are arranged symmetrically to theconductive plug 30, i.e. eachextension 42 travels along thetop surface 23 of themolding compound 20 for a same distance. In some embodiments with two extensions, an extension on one side of a conductive plug is longer than another extension. In some embodiments, a cover is electrically conductive. The cover is formed with gold, silver, copper, nickel, tungsten, aluminum, palladium and/or alloys thereof. In some embodiments, a cover is not electrically conductive. The cover is formed with silicon oxide, silicon nitride, or silicon oxynitride. In some embodiments, a cover is formed with a rubber or a polymer material such as epoxy, polyimide, polybenzoxazole (PBO), and the like. - A dielectric stack is formed in a 3D semiconductor structure in order to provide electrical isolations between conductive elements or interconnects. The dielectric stack also protects the internal structures being exposed to ambient conditions. For some embodiments, as in
FIG. 1 , adielectric stack 50 has three different layers, afirst dielectric 501, asecond dielectric 502, and athird dielectric 503. Thefirst dielectric 501 is formed on thesemiconductor chip 15 with a polymer material such as epoxy, polyimide, polybenzoxazole (PBO), solder resist (SR), ABF film, and the like. In some embodiments, thefirst dielectric 501 isolates thesemiconductor chip 15 and theRDL 471. In some embodiments, the first dielectric is a stress buffer between thepassivation 152 and thesecond dielectric 502. - The
second dielectric 502 is on thefirst dielectric 501 and themolding compound 20. Thesecond dielectric 502 isolates theRDL 471 and theRDL 472. Thesecond dielectric 502 has a throughstructure 512. TheRDL 472 is electrically connected with theRDL 471 in the throughstructure 512. Thesecond dielectric 502 is formed with a polymer material such as epoxy, polyimide, polybenzoxazole (PBO), SR, ABF film and the like. Thesecond dielectric 502 can be also formed with dielectric materials, such as spin-on glass (SOG), silicon oxide, silicon oxynitride, or the like, by any suitable method such as spin coating or vapor deposition. For some embodiments as inFIG. 1 , thesecond dielectric 502 is also on thecover 40 and theRDL 471. - The
third dielectric 503 is formed on thesecond dielectric 502 and theRDL 472 with a polymer material such as epoxy, polyimide, polybenzoxazole (PBO), SR, liquid molding material and the like. Thethird dielectric 503 protects theRDL 472 from being exposed to ambient conditions. Thethird dielectric 503 has a throughstructure 513. TheUBM 48 is formed in the throughstructure 513 and electrically connected with theRDL 472. Thethird dielectric 503 can be also formed with dielectric materials, such as spin-on glass (SOG), silicon oxide, silicon oxynitride, or the like, by any suitable method such as spin coating or vapor deposition. InFIG. 1 , thecover 40 separates thesecond dielectric 502 from the top meeting joint 25. In some embodiments, thecover 40 also separates thesecond dielectric 502 from a triple interface. The triple interface is between thecover 40, theconductive plug 30 and themolding compound 20. If there is any crack generated at the meeting joint 25, thecover 40 can prevent the crack propagating into thesecond dielectric 502. - In some embodiments, the CTE of the
conductive plug 30 is between about 5×10−6 m/m K and 20×10−6 m/m K, and the CTE of themolding compound 20 is between about 5×10−6 m/m K and 75×10−6 m/m K. If a thermal cycle is applied on the3D semiconductor structure 10, a crack may generate at the top meeting joint 25 due to CTE mismatch between theconductive plug 30 and themolding compound 20. Thecover 40 on the top meeting joint 25 provides a barrier for the semiconductor structure so that the crack can not propagate from the top meeting joint 25 into thesecond dielectric 502. - According to various embodiments, a cover or a divider in a 3D semiconductor structure is designed to prevent crack propagation. In some embodiments, the cover is a plate covering on a top meeting joint between a molding compound and a conductive plug. In some embodiments, the cover is a loop or ring. Referring to
FIG. 2A , asemiconductor structure 10 includes amolding compound 20 and aconductive plug 30. Theconductive plug 30 is in themolding compound 20. Sidewalls of theconductive plug 30 are surrounded by themolding compound 20. An interface is between themolding compound 20 and theconductive plug 30. A top meeting joint 25 is at the top of the interface. From a top view perspective, the top meeting joint 25 is a line or border that separates theconductive plug 30 and themolding compound 20. Acover 40 is over the top meeting joint 25 and on a portion of theconductive plug 30. Thecover 40 is also on a portion of themolding compound 20.FIG. 2B is a top view of thecover 40. Thecover 40 is a loop and has aninner edge 45 and anouter edge 44. A dottedline 46 is between theinner edge 45 and theouter edge 44. The dottedline 46 represents the top meeting joint 25. Acavity 43 is inside theinner edge 45. Thecavity 43 is filled with thesecond dielectric 502. The outer width ofcover 40 is d1 and the width of thecavity 43 or theinner edge 45 is d2. In some embodiments, half of the difference between the cover outer width and the cavity or the inner edge width is greater than 2.5 μm, i.e. (d1−d2)/2>2.5 μm. In other words, the thickness of the loop, distance from the outer edge to the inner edge, is greater than about 3 μm. In some embodiments, the difference between the outer edge width and the cavity width is greater than 15 μm, i.e. d1−d2>15 μm. - For some embodiments as in
FIG. 3A , thecover 40 has a ring shape. Thecover 40 is on a top meeting joint 25, on a portion of theconductive plug 30 and a portion of themolding compound 20.FIG. 3B is a top view of thecover 40. Thecover 40 has aninner edge 45 and anouter edge 44. A dottedline 46 is between theinner edge 45 and theouter edge 44. The dottedline 46 represents the interface between theconductive plug 30 and themolding compound 20. Acavity 43 is inside theinner edge 45. Thecavity 43 is filled with asecond dielectric 502. For thecover 40, the outer width ofcover 40 is d1 and the width of thecavity 43 or theinner edge 45 is d2. In some embodiments, half of the difference between the outer width d1 and the cavity or inner edge width d2 is greater than 2.5 μm, i.e. (d1−d2)/2>2.5 μm. In some embodiments, the difference between the outer width d1 and the cavity or inner edge width d2 is greater than 15 μm, i.e. d1−d2>15 μm. - In some embodiments, the
cover 40 is a polygonal ring. In some embodiments, thecover 40 is a triangular ring. In some embodiments, thecover 40 is a quadrilateral shaped ring. In some embodiments, the meeting joint is between an outer edge and an inner edge of the polygonal ring. The polygonal ring also has a cavity inside and the cavity is inside the meeting joint. - In some embodiments, a cover is not in direct contact with molding compound and a conductive plug. The cover is over a meeting joint where the molding compound and the conductive plug interfaces. A crack generated at the meeting joint can only extend underneath the cover. The crack can not propagate into any other regions above the cover.
- In
FIG. 4 , according to some embodiments of the present disclosure, asemiconductor structure 10 is a 3D semiconductor package. The3D semiconductor package 10 has amolding compound 20 surrounding aconductive plug 30. There is a top meeting joint 25 on the top of the interface between themolding compound 20 and theconductive plug 30. From a top view perspective, the top meeting joint 25 is a line or border that separates theconductive plug 30 and themolding compound 20. The width of the conductive plug is w1. In some embodiments, the width w1 is the diameter of theconductive plug 30. Asecond dielectric 502 is on theconductive plug 30. Acover 40 is on thesecond dielectric 502 and over the top meeting joint 25. Thecover 40 has a width w2. The width w2 of thecover 40 is greater than the width w1 of the conductive plug, i.e. w2>w1. In some embodiments, w2−w1 is approximately equal to 5 μm. In some embodiment, w2−w1 is greater than 5 μm. In some embodiment, w2−w1 is greater than 15 μm. A raisedportion 32 is on theconductive plug 30 and supports thecover 40. The raisedportion 32 is connected with theconductive plug 30 at one end and connected with thecover 40 at the other end. In some embodiments, thecover 40 is formed during a same step of forming anRDL 472. In some embodiments, the raisedportion 32 is formed at the same step of forming anRDL 471. In some embodiments, the raisedportion 32 is electrically conductive. - In some embodiments, a cover or a divider is a part of an RDL. The cover or divider provides electrical connections to and/or between a through conductive plug, formed by filling a via, and an external circuit. Referring to
FIG. 5 , a3D semiconductor structure 10 has a filled-via 30. The filled-via 30 is formed with gold, silver, copper, nickel, tungsten, aluminum, and/or alloys thereof. The filled-via 30 is in amolding compound 20 and has two ends. One end is connected to acover 40 and the other end is connected with an external circuit located at the bottom surface of thesemiconductor structure 10. In certain embodiments, one end of the filled-via 30 is connected to thecover 40 and the other end is connected with an external circuit located at a buffer layer. The buffer layer is disposed on the bottom surface of thesemiconductor structure 10. Thecover 40 is on a top meeting joint 25 and has two sections. Afirst section 47 substantially runs along atop surface 23 of themolding compound 20. Thefirst section 47 is over the top meeting joint 25 and has an extension on themolding compound 20. The minimum coverage of the extension on themolding compound 20 for each side is at least 2.5 μm. Thecover 40 has asecond section 48. Thesecond section 48 substantially runs along sidewalls of asecond dielectric 502. Thecover 40 is formed during the same operation of forming anRDL 471. In some embodiments, thecover 40 is also a part of an RDL. - The
3D semiconductor structure 10 has four dielectric layers. Afirst dielectric 501 is disposed on asemiconductor chip 15. Thefirst dielectric 501 is a polymer material such as epoxy, polyimide, polybenzoxazole (PBO), SR, ABF film and the like. Thefirst dielectric 501 isolates thesemiconductor chip 15 and theRDL 471. Thesecond dielectric 502 is formed on thefirst polymer layer 501, themolding compound 20 and aconductive pillar 45 with a polymer material such as epoxy, polyimide, polybenzoxazole (PBO), SR, ABF film and the like. Thesecond dielectric 502 can be also formed with dielectric materials, such as spin-on glass (SOG), silicon oxide, silicon oxynitride, or the like, by any suitable method such as spin coating or vapor deposition. AnRDL 471 is formed on thesecond dielectric 502. Thesecond dielectric 502 has a throughstructure 512. A part of theRDL 471 is formed on the sidewalls of the throughstructure 512. TheRDL 471 is connected with aconductive pillar 45 at one end. - A
third dielectric 503 may be a polymer material or a deposited dielectric material. Athird dielectric 503 may be formed on thesecond polymer layer 502 and theRDL 471 with a polymer material such as epoxy, polyimide, polybenzoxazole (PBO), SR, ABF film and the like. Thethird dielectric 503 may be formed with dielectric materials, such as spin-on glass (SOG), silicon oxide, silicon oxynitride, or the like, by any suitable methods such as spin coating, laminating or vapor deposition. Thethird dielectric 503 isolates theRDL 471 and theRDL 472. AnRDL 471 is connected with anRDL 472 using a throughstructure 513 in thethird dielectric 503. A throughstructure 513 connects anRDL 471 andRDL 472. TheRDL 472 is formed on thethird dielectric 503. The throughstructure 513 of thethird dielectric 503 provides sidewalls for the formation of theRDL 472 in order to have a connection with theRDL 471. - The
fourth dielectric 504 is formed on thethird polymer layer 503 and theRDL 472. Thefourth dielectric 504 is formed with a polymer material such as epoxy, polyimide, polybenzoxazole (PBO), SR (solder resist), ABF film, liquid molding material and the like. Thefourth dielectric 504 can be also formed with dielectric materials, such as spin-on glass (SOG), silicon oxide, silicon oxynitride, or the like, by any suitable method such as spin coating, laminating, compress molding, or vapor deposition. Thefourth dielectric 504 protects theRDL 472 being exposed to the ambient conditions. Thefourth dielectric 504 has a throughstructure 514. AUBM 48 is disposed on the throughstructure 514 and connected with theRDL 472. Thefourth dielectric 504 protects theRDL 472 from being exposed to the ambient conditions. - A
solder ball 60 is disposed on theUBM 48. Thesolder ball 60 is mounted on the top surface of theUBM 48 and is electrically connected with an external circuit. In some embodiments, thesolder ball 60 is a solder paste. - Referring to
FIG. 6A , according to some embodiments of the present disclosure, a3D semiconductor package 10 has amolding compound 20. Themolding compound 20 is adjacent to asemiconductor chip 15. A filled-via 30 is in themolding compound 20. The filled-via 30 is a through via inside themolding compound 20. Aninterface 35 is between themolding compound 20 and the filled-via 30. Asecond dielectric 502 is on themolding compound 20 and the filled-via 30. Adivider 40 is located over theinterface 35. Thedivider 40, themolding compound 20 and the filled-via 30 together form atriple interface 37. In some embodiments, the filled-via 30 has a linear temperature expansion coefficient ranging from 4×10−6 m/m K to 20×10−6 m/m K. Themolding compound 20 has a linear temperature expansion coefficient ranging from 30×10−6 m/m K to 100×10−6 m/m K. Difference in the temperature expansion coefficient between themolding compound 20 and the filled-via 30 is significant. To avoid any crack propagating into thesecond dielectric 502. Thedivider 40 separates thetriple interface 37 from thesecond dielectric 502. - For some embodiments as in
FIG. 6A , thedivider 40 has a height H1 extending substantially along the axial direction of the filled-via 30.FIG. 6B is the top view of thedivider 40. From the top view perspective, thedivider 40 is a loop. In some embodiments, thedivider 40 is a quadrilateral loop. In some embodiments, the divider is a triangle loop. In some embodiments, the divider is a ring. Thecover 40 has aninner edge 45 and anouter edge 44. A dottedline 46 represents the interface between theconductive plug 30 and themolding compound 20. Acavity 43 is inside theinner rim 45. Thecavity 43 is filled with thesecond dielectric 502. The width of the outer edge is d1 and the width of the inner edge is d2. In some embodiments, half of the difference between the outer edge width d1 and the inner edge width d2 is greater than 2.5 μm, i.e. (d1−d2)/2>2.5 μm. In some embodiments, the difference between the outer edge width and the inner edge width is greater than 15 μm i.e. d1−d2>15 μm. - Because of CTE mismatch, an interface between a filled-via and a molding compound has high stress. By arranging a cover or a divider on the interface, the stress experienced by the dielectric layers over the filled via is reduced. According to simulation results, the stress measured over the interface is substantially equivalent to the stress measured at the center of the plug. In some embodiments, the stress measured at the interface is about 5% to 10% greater than the stress measured at the center of the plug when the cover or divider is used. Without a cover or a divider, the stress measured at the interface is about 50% or greater than the stress measured at the center of the plug.
- A method of manufacturing a 3D semiconductor structure and the semiconductor structure has a cover or divider to prevent a crack propagating into a dielectric layer. The method includes a number of operations and the description and illustration are not deemed as a limitation as the order of the operations.
- A term “patterning” or “patterned” is used in the present disclosure to describe an operation of forming a predetermined pattern on a surface. The patterning operation includes various steps and processes and varies in accordance with the features of embodiments. In some embodiments, a patterning operation is adopted to pattern an existing film or layer. The patterning operation includes forming a mask on the existing film or layer and removing the unmasked film or layer with an etch or other removal process. The mask is a photo resist, or a hardmask. In some embodiments, a patterning operation is adopted to form a patterned layer directly on a surface. The patterning operation includes forming a photosensitive film on the surface, conducting a photolithography process and a developing process. The remaining photosensitive film is retained and integrated into the 3D semiconductor structure.
- A term “plating” or “plated” is used in the present disclosure to describe an operation of forming a film or a layer on a surface. The plating operation includes various steps and processes and varies in accordance with the features of embodiments. The film or layer been plated on the surface is a single film or a composite stack. In some embodiments, a plating operation is adopted to form a metallic film. In some embodiments, a plating operation includes forming a seed layer and electroplating a metallic film on the seed layer. In some embodiments, a plating operation is a vapor deposition process. In some embodiments, a plating operation is a sputtering process.
- A term “filling” or “filled” is used in the present disclosure to describe an operation of forming material in a hole. The filling operation includes various steps and processes and varies in accordance with the features of embodiments. In some embodiments, a filling operation includes forming a conductive material in a hole. In some embodiments, a filling operation includes forming a liner on the sidewalls of the hole and forming a conductive film on the liner. In some embodiments, a filling operation includes a electroplating process. In some embodiments, a filling operation includes a vapor deposition process. In some embodiments, a filling operation includes a sputtering process.
- In
FIG. 7A , acarrier 700 is provided to form a 3D semiconductor structure thereon. Apolymer buffer layer 702 is formed on the top surface of thecarrier 700. Thepolymer buffer layer 702 includes polyimide, PBO, SR, LTHC (light to heat conversion film), wafer backside coating tape, and ABF. In some embodiments, thepolymer buffer 702 includes at least two layers with different materials. Aseed layer 705 is formed on the top of thepolymer buffer layer 702. Theseed layer 705 is a single layer or a composite stack and formed with material such as cooper, titanium tungsten, tantalum, titanium/copper, or combination thereof.FIG. 7B is an operation of forming apatterned layer 708 on theseed layer 705. The patternedlayer 708 hasseveral holes 718. - In
FIG. 7C , aconductive material 710 is filled into theholes 718. In some embodiments, theconductive material 710 is filled with electroplating. InFIG. 7D , the patterned layer is removed and severalconductive posts 710 remain on theseed layer 705.FIG. 7E is an operation of removing a portion of the seed layer. Several independentconductive plugs 30 are formed on the top surface of thecarrier 700. Each conductive plugs 30 include a seed layer and aconductive post 710. - In
FIG. 7F , asemiconductor chip 15 is placed on thecarrier 700 and located between the conductive plugs 30. In some embodiments as shown inFIG. 7F , there is a die attachment film (DAF) 703 formed on thepolymer buffer layer 703 before placing thesemiconductor chip 15 on thecarrier 700. Thesemiconductor chip 15 is covered by afirst dielectric 501. Aconductive pillar 45 is disposed on thesemiconductor chip 15 in order to electrically communicate with an interconnect. In some embodiments, thefirst dielectric 501 is formed on thesemiconductor chip 15 after placing on thecarrier 700. In some embodiments, thefirst dielectric 501 and/or theconductive pillar 45 is pre-formed on thesemiconductor chip 15 before placing thechip 15 on thecarrier 700. - In
FIG. 7G , amolding compound 20 is disposed on thecarrier 700. Themolding compound 20 covers thesemiconductor chip 15, thefirst dielectric 501, theconductive pillar 45 and the conductive plugs 30. For some embodiments as inFIG. 7G , themolding compound 20 covers the top surface of the conductive plugs 30. - An operation of the method includes a grinding process to remove a portion of the molding compound. As in
FIG. 7H , the thickness of themolding compound 20 is reduced to a predetermined height H in order to have theconductive pillar 45 exposed. In certain embodiments, the predetermined height H is between 50 μm and 250 μm. The height of theconductive plug 30 may be also reduced during the grinding process to have the top surface of theconductive plug 30 exposed. -
FIG. 8A-8D are the operations of forming a divider over a top meeting joint between a molding compound and a conductive according to some embodiments in the present disclosure. InFIG. 8A , afilm 715 is disposed on a top surface of themolding compound 20. In some embodiments, thickness of thefilm 715 is between 1 μm and 20 μm. Thefilm 715 is an electrically conductive material and is formed with gold, silver, copper, nickel, tungsten, aluminum, palladium and/or alloys thereof. In some embodiments, thefilm 715 is not electrically conductive and is formed with rubber or a polymer material such as epoxy, polyimide, polybenzoxazole (PBO), SR, ABF film and the like. - In
FIG. 8B thefilm 715 is patterned to formdividers 40. Thedivider 40 is over a top meeting joint 25 between themolding compound 20 and theconductive plug 30. Thedivider 40 has anextension 42 extending from the top meeting joint 25 and covering a portion of themolding compound 20 top surface. In some embodiments, theextension 42 on themolding compound 20 top surface is about 2.5 μm. - For some embodiments as in
FIG. 8C ,dividers 40 are formed with a same material for a redistribution layer (RDL) 471. Thefilm 715 is patterned to form theRDL 471 and thedividers 40 during a same operation. In some embodiments, thedivider 40 has acavity 43 as inFIG. 8D . - In some embodiments, a second dielectric is formed before forming a divider over a top meeting joint between a molding compound and a conductive plug. In
FIG. 9A , asecond dielectric 502 is formed on amolding compound 20 and afirst dielectric 501. In some embodiments, thesecond dielectric 502 is formed with a material same as thefirst dielectric 501. In some embodiments, thesecond dielectric 502 and thefirst dielectric 501 are formed with a polymer material such as epoxy, polyimide, polybenzoxazole (PBO), SR, ABF film and the like. In some embodiments, the material for thesecond dielectric 502 is different from thefirst dielectric 501. - In
FIG. 9B , thesecond dielectric 502 is patterned to have several throughstructures 512. Top surfaces of theconductive plug 30 and theRDL 571 are exposed at the bottom opening of the throughstructures 512. For a through structure arranged on a conductive plug, the diameter of the bottom opening of the thorough hole is larger than the diameter of the conductive plug. InFIG. 9C , aconductive film 725 is formed on thesecond dielectric 502, the conductive plugs 30 and theRDL 571. Theconductive film 725 is patterned to have several sections as inFIG. 9D . The sections includeseveral dividers 40 and anRDL 572. Thedividers 40 are formed on the conductive plugs 30 and sidewalls of the throughstructures 512. Eachdivider 40 is over a top meeting joint 25 that the top meeting joint 25 is between themolding compound 20 and theconductive plug 30. In some embodiments, a divider is electrically connected to a conductive plug. TheRDL 572 is formed on theRDL 571, sidewalls of the throughstructures 512 and on thesecond dielectric 502. TheRDL 572 is electrically connected to theRDL 571. In some embodiments, a divider is also a part of the RDL. - In some embodiments, the size of a though hole in the second dielectric is designed to form a pillar-type divider on a conductive plug. In
FIG. 9E , throughstructures 512 on the conductive plugs are adjusted to be filled with aconductive film 725. The size of the throughstructure 512 is designed to be filled with theconductive film 725. The diameter of the bottom opening is larger than the diameter of theconductive plug 30. InFIG. 9F , a portion of the conductive film on thesecond dielectric 502 is removed. Several pillar-type dividers 40 are formed on the conductive plugs 30. AnRDL 572 is formed on theRDL 571. TheRDL 572 is connected with theRDL 571 at one end. In some embodiments, there are at least two pillar-like dividers on a conductive plug. -
FIG. 10A represents some embodiments according to the present disclosure. InFIG. 10A , athird dielectric 503 is formed on asecond dielectric 502. Thethird dielectric 503 is also on anRDL 572 anddividers 40. In some embodiments, thethird dielectric 503 is formed with a different material from the second dielectric. In some embodiments, the third dielectric is formed with a polymer material such as epoxy, polyimide, polybenzoxazole (PBO), SR(solder resist), liquid mold material, ABF film and the like. InFIG. 10B , a throughstructure 513 is formed in thethird dielectric 503. A portion of the top surface of theRDL 572 is exposed at the bottom opening of the throughstructure 513. The bottom opening is designed to have a UBM formed on the exposed portion of theRDL 572. -
FIG. 11 is an integrated3D IC package 600. The integrated3D IC package 600 includes the3D semiconductor structure 10 as inFIG. 5 and amemory chip 11. Thememory chip 11 is electrically connect with the3D semiconductor structure 10. - In some embodiments, there are more than three dielectrics formed in a 3D semiconductor structure. In some embodiments, there are more than two RDL formed in a 3D semiconductor structure.
- In some embodiments, a semiconductor structure includes a molding compound, a conductive plug, and a cover. The conductive plug is in the molding compound. The cover is over a top meeting joint between the conductive plug and the molding compound. The semiconductor structure further has a dielectric. The dielectric is on the cover and the molding compound.
- In some embodiments, a semiconductor 3D package includes a molding compound, a filled-via, and a dielectric. The filled-via is in the molding compound. The dielectric is on the molding compound. The semiconductor 3D package further includes a divider. The divider is on the molding compound. The divider, the filled-via and the molding form a triple interface. The divider separates the dielectric from the triple interface.
- In some embodiments, a method of manufacturing a semiconductor structure includes forming a conductive plug on a substrate. The method also includes surrounding the sidewall of the conductive plug with a molding compound. The method also includes disposing a divider covering an upper top meeting point joint between the molding compound and the conductive plug.
- The methods and features of this invention have been sufficiently described in the above examples and descriptions. It should be understood that any modifications or changes without departing from the spirit of the invention are intended to be covered in the protection scope of the invention.
Claims (20)
Priority Applications (4)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
US13/935,064 US8941244B1 (en) | 2013-07-03 | 2013-07-03 | Semiconductor device and manufacturing method thereof |
TW103104684A TWI538065B (en) | 2013-07-03 | 2014-02-13 | Semiconductor 3d package, semiconductor structure and fabrication thereof |
KR1020140078357A KR101644692B1 (en) | 2013-07-03 | 2014-06-25 | Semiconductor device and manufacturing method thereof |
CN201410299937.3A CN104282580B (en) | 2013-07-03 | 2014-06-27 | Semiconductor device and manufacturing method thereof |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
US13/935,064 US8941244B1 (en) | 2013-07-03 | 2013-07-03 | Semiconductor device and manufacturing method thereof |
Publications (2)
Publication Number | Publication Date |
---|---|
US20150008586A1 true US20150008586A1 (en) | 2015-01-08 |
US8941244B1 US8941244B1 (en) | 2015-01-27 |
Family
ID=52132245
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
US13/935,064 Active US8941244B1 (en) | 2013-07-03 | 2013-07-03 | Semiconductor device and manufacturing method thereof |
Country Status (4)
Country | Link |
---|---|
US (1) | US8941244B1 (en) |
KR (1) | KR101644692B1 (en) |
CN (1) | CN104282580B (en) |
TW (1) | TWI538065B (en) |
Cited By (10)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US20150076713A1 (en) * | 2013-09-13 | 2015-03-19 | Taiwan Semiconductor Manufacturing Company, Ltd. | Integrated Fan-Out Package Structures with Recesses in Molding Compound |
US20170186736A1 (en) * | 2015-10-13 | 2017-06-29 | Taiwan Semiconductor Manufacturing Company, Ltd. | Structure and Formation Method for Chip Package |
US10049996B2 (en) * | 2016-04-01 | 2018-08-14 | Intel Corporation | Surface finishes for high density interconnect architectures |
US10217709B2 (en) | 2016-10-10 | 2019-02-26 | Samsung Electro-Mechanics Co., Ltd. | Fan-out semiconductor package |
TWI655721B (en) * | 2016-06-21 | 2019-04-01 | Samsung Electronics Co., Ltd. | Fan-out type semiconductor package |
KR20190112628A (en) * | 2018-03-26 | 2019-10-07 | 타이완 세미콘덕터 매뉴팩쳐링 컴퍼니 리미티드 | Semiconductor device and method of manufacture |
US20190341376A1 (en) * | 2014-01-17 | 2019-11-07 | Taiwan Semiconductor Manufacturing Company, Ltd. | Integrated Circuit Package and Methods of Forming Same |
US10872852B2 (en) | 2016-10-12 | 2020-12-22 | Micron Technology, Inc. | Wafer level package utilizing molded interposer |
US11462462B2 (en) * | 2019-07-22 | 2022-10-04 | Samsung Electronics Co., Ltd. | Semiconductor packages including a recessed conductive post |
US11488881B2 (en) | 2018-03-26 | 2022-11-01 | Taiwan Semiconductor Manufacturing Company, Ltd. | Semiconductor device and method of manufacture |
Families Citing this family (10)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US9343417B2 (en) * | 2013-09-18 | 2016-05-17 | Taiwan Semiconductor Manufacturing Company, Ltd. | Hollow metal pillar packaging scheme |
US10115647B2 (en) * | 2015-03-16 | 2018-10-30 | Taiwan Semiconductor Manufacturing Company, Ltd. | Non-vertical through-via in package |
KR101731700B1 (en) * | 2015-03-18 | 2017-04-28 | 앰코 테크놀로지 코리아 주식회사 | Semiconductor device and manufacturing method thereof |
CN104810332A (en) * | 2015-05-05 | 2015-07-29 | 三星半导体(中国)研究开发有限公司 | Fan-out wafer level package part and manufacture method thereof |
TWI594380B (en) | 2015-05-21 | 2017-08-01 | 穩懋半導體股份有限公司 | Package structure and three dimensional package structure |
US20170098628A1 (en) * | 2015-10-05 | 2017-04-06 | Mediatek Inc. | Semiconductor package structure and method for forming the same |
US9922964B1 (en) * | 2016-09-19 | 2018-03-20 | Taiwan Semiconductor Manufacturing Co., Ltd. | Package structure with dummy die |
US10103119B2 (en) * | 2017-01-31 | 2018-10-16 | Globalfoundries Inc. | Methods of forming integrated circuit structure for joining wafers and resulting structure |
US11195788B2 (en) * | 2019-10-18 | 2021-12-07 | Taiwan Semiconductor Manufacturing Company, Ltd. | Hybrid dielectric scheme in packages |
CN112770542B (en) * | 2020-12-10 | 2021-10-29 | 珠海越亚半导体股份有限公司 | Substrate manufacturing method for realizing three-dimensional packaging |
Citations (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US20090039523A1 (en) * | 2007-08-07 | 2009-02-12 | Tongbi Jiang | Packaged integrated circuit devices with through-body conductive vias, and methods of making same |
US7944038B2 (en) * | 2008-05-21 | 2011-05-17 | Advanced Semiconductor Engineering, Inc. | Semiconductor package having an antenna on the molding compound thereof |
US20130119560A1 (en) * | 2008-07-18 | 2013-05-16 | United Test And Assembly Center Ltd. | Packaging structural member |
US20140110841A1 (en) * | 2012-10-19 | 2014-04-24 | Infineon Technologies Ag | Semiconductor Packages with Integrated Antenna and Methods of Forming Thereof |
US20140131858A1 (en) * | 2012-11-14 | 2014-05-15 | Taiwan Semiconductor Manufacturing Company, Ltd. | Warpage Control of Semiconductor Die Package |
Family Cites Families (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US5353498A (en) * | 1993-02-08 | 1994-10-11 | General Electric Company | Method for fabricating an integrated circuit module |
JP3813402B2 (en) * | 2000-01-31 | 2006-08-23 | 新光電気工業株式会社 | Manufacturing method of semiconductor device |
US9324672B2 (en) * | 2009-08-21 | 2016-04-26 | Stats Chippac, Ltd. | Semiconductor device and method of forming dual-active sided semiconductor die in fan-out wafer level chip scale package |
KR101060842B1 (en) * | 2010-01-07 | 2011-08-31 | 삼성전기주식회사 | Manufacturing method of semiconductor package |
US8343810B2 (en) * | 2010-08-16 | 2013-01-01 | Stats Chippac, Ltd. | Semiconductor device and method of forming Fo-WLCSP having conductive layers and conductive vias separated by polymer layers |
-
2013
- 2013-07-03 US US13/935,064 patent/US8941244B1/en active Active
-
2014
- 2014-02-13 TW TW103104684A patent/TWI538065B/en active
- 2014-06-25 KR KR1020140078357A patent/KR101644692B1/en active IP Right Grant
- 2014-06-27 CN CN201410299937.3A patent/CN104282580B/en active Active
Patent Citations (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US20090039523A1 (en) * | 2007-08-07 | 2009-02-12 | Tongbi Jiang | Packaged integrated circuit devices with through-body conductive vias, and methods of making same |
US7944038B2 (en) * | 2008-05-21 | 2011-05-17 | Advanced Semiconductor Engineering, Inc. | Semiconductor package having an antenna on the molding compound thereof |
US20130119560A1 (en) * | 2008-07-18 | 2013-05-16 | United Test And Assembly Center Ltd. | Packaging structural member |
US20140110841A1 (en) * | 2012-10-19 | 2014-04-24 | Infineon Technologies Ag | Semiconductor Packages with Integrated Antenna and Methods of Forming Thereof |
US20140131858A1 (en) * | 2012-11-14 | 2014-05-15 | Taiwan Semiconductor Manufacturing Company, Ltd. | Warpage Control of Semiconductor Die Package |
Cited By (23)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US9142432B2 (en) * | 2013-09-13 | 2015-09-22 | Taiwan Semiconductor Manufacturing Company, Ltd. | Integrated fan-out package structures with recesses in molding compound |
US9953955B2 (en) | 2013-09-13 | 2018-04-24 | Taiwan Semiconductor Manufacturing Company, Ltd. | Integrated fan-out package structures with recesses in molding compound |
US10062662B2 (en) | 2013-09-13 | 2018-08-28 | Taiwan Semiconductor Manufacturing Company, Ltd. | Integrated fan-out package structures with recesses in molding compound |
US20150076713A1 (en) * | 2013-09-13 | 2015-03-19 | Taiwan Semiconductor Manufacturing Company, Ltd. | Integrated Fan-Out Package Structures with Recesses in Molding Compound |
US10720403B2 (en) | 2013-09-13 | 2020-07-21 | Taiwan Semiconductor Manufacturing Company, Ltd. | Integrated fan-out package structures with recesses in molding compound |
US20190341376A1 (en) * | 2014-01-17 | 2019-11-07 | Taiwan Semiconductor Manufacturing Company, Ltd. | Integrated Circuit Package and Methods of Forming Same |
US11152344B2 (en) * | 2014-01-17 | 2021-10-19 | Taiwan Semiconductor Manufacturing Company, Ltd. | Integrated circuit package and methods of forming same |
US20170186736A1 (en) * | 2015-10-13 | 2017-06-29 | Taiwan Semiconductor Manufacturing Company, Ltd. | Structure and Formation Method for Chip Package |
US10074637B2 (en) * | 2015-10-13 | 2018-09-11 | Taiwan Semiconductor Manufacturing Company, Ltd. | Structure and formation method for chip package |
US10748882B2 (en) | 2015-10-13 | 2020-08-18 | Taiwan Semiconductor Manufacturing Co., Ltd. | Structure and formation method for chip package |
US11329031B2 (en) | 2015-10-13 | 2022-05-10 | Taiwan Semiconductor Manufacturing Co., Ltd. | Structure and formation method for chip package |
US10049996B2 (en) * | 2016-04-01 | 2018-08-14 | Intel Corporation | Surface finishes for high density interconnect architectures |
US10438914B2 (en) | 2016-04-01 | 2019-10-08 | Intel Corporation | Surface finishes for high density interconnect architectures |
US10998282B2 (en) | 2016-04-01 | 2021-05-04 | Intel Corporation | Surface finishes for high density interconnect architectures |
US10332855B2 (en) | 2016-06-21 | 2019-06-25 | Samsung Electro-Mechanics Co., Ltd. | Fan-out semiconductor package |
TWI655721B (en) * | 2016-06-21 | 2019-04-01 | Samsung Electronics Co., Ltd. | Fan-out type semiconductor package |
US10217709B2 (en) | 2016-10-10 | 2019-02-26 | Samsung Electro-Mechanics Co., Ltd. | Fan-out semiconductor package |
US10872852B2 (en) | 2016-10-12 | 2020-12-22 | Micron Technology, Inc. | Wafer level package utilizing molded interposer |
US11710693B2 (en) | 2016-10-12 | 2023-07-25 | Micron Technology, Inc. | Wafer level package utilizing molded interposer |
KR102379087B1 (en) * | 2018-03-26 | 2022-03-25 | 타이완 세미콘덕터 매뉴팩쳐링 컴퍼니 리미티드 | Semiconductor device and method of manufacture |
KR20190112628A (en) * | 2018-03-26 | 2019-10-07 | 타이완 세미콘덕터 매뉴팩쳐링 컴퍼니 리미티드 | Semiconductor device and method of manufacture |
US11488881B2 (en) | 2018-03-26 | 2022-11-01 | Taiwan Semiconductor Manufacturing Company, Ltd. | Semiconductor device and method of manufacture |
US11462462B2 (en) * | 2019-07-22 | 2022-10-04 | Samsung Electronics Co., Ltd. | Semiconductor packages including a recessed conductive post |
Also Published As
Publication number | Publication date |
---|---|
CN104282580A (en) | 2015-01-14 |
KR20150004739A (en) | 2015-01-13 |
KR101644692B1 (en) | 2016-08-01 |
TW201503268A (en) | 2015-01-16 |
CN104282580B (en) | 2017-05-24 |
TWI538065B (en) | 2016-06-11 |
US8941244B1 (en) | 2015-01-27 |
Similar Documents
Publication | Publication Date | Title |
---|---|---|
US8941244B1 (en) | Semiconductor device and manufacturing method thereof | |
US9111914B2 (en) | Fan out package, semiconductor device and manufacturing method thereof | |
KR102249680B1 (en) | Semiconductor device with shield for electromagnetic interference | |
KR101496085B1 (en) | Packaging with interposer frame | |
US10522439B2 (en) | Semiconductor package device | |
US10074584B2 (en) | Method of forming a semiconductor component comprising a second passivation layer having a first opening exposing a bond pad and a plurality of second openings exposing a top surface of an underlying first passivation layer | |
TWI492354B (en) | Semiconductor apparatus and method for manufacturing the same | |
US8035215B2 (en) | Semiconductor device and manufacturing method of the same | |
US20190109098A1 (en) | Semiconductor Device Structure Comprising a Plurality of Metal Oxide Fibers and Method for Forming the Same | |
US9391026B2 (en) | Semiconductor packages and methods of packaging semiconductor devices | |
US20130026632A1 (en) | Semiconductor element-embedded wiring substrate | |
US8294265B1 (en) | Semiconductor device for improving electrical and mechanical connectivity of conductive pillers and method therefor | |
TW201724361A (en) | Semiconductor device | |
US10319692B2 (en) | Semiconductor structure and manufacturing method thereof | |
TWI635579B (en) | Package structure and manufacturing method thereof | |
US10879166B2 (en) | Package structure having redistribution structure with photosensitive and non-photosensitive dielectric materials and fabricating method thereof | |
US11798872B2 (en) | Interconnection structure and semiconductor package including the same | |
CN220021087U (en) | Semiconductor package | |
TWI524488B (en) | Chip structure and the manufacturing method thereof | |
CN115101482A (en) | Semiconductor packaging structure and forming method thereof |
Legal Events
Date | Code | Title | Description |
---|---|---|---|
AS | Assignment |
Owner name: TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY LTD., T Free format text: ASSIGNMENT OF ASSIGNORS INTEREST;ASSIGNORS:TSAI, PO-HAO;HUNG, JUI-PIN;LIN, JING-CHENG;AND OTHERS;SIGNING DATES FROM 20130621 TO 20130624;REEL/FRAME:030738/0151 |
|
STCF | Information on status: patent grant |
Free format text: PATENTED CASE |
|
MAFP | Maintenance fee payment |
Free format text: PAYMENT OF MAINTENANCE FEE, 4TH YEAR, LARGE ENTITY (ORIGINAL EVENT CODE: M1551) Year of fee payment: 4 |
|
MAFP | Maintenance fee payment |
Free format text: PAYMENT OF MAINTENANCE FEE, 8TH YEAR, LARGE ENTITY (ORIGINAL EVENT CODE: M1552); ENTITY STATUS OF PATENT OWNER: LARGE ENTITY Year of fee payment: 8 |