US20140088232A1 - Silicone composition for sealing semiconductor - Google Patents
Silicone composition for sealing semiconductor Download PDFInfo
- Publication number
- US20140088232A1 US20140088232A1 US14/091,841 US201314091841A US2014088232A1 US 20140088232 A1 US20140088232 A1 US 20140088232A1 US 201314091841 A US201314091841 A US 201314091841A US 2014088232 A1 US2014088232 A1 US 2014088232A1
- Authority
- US
- United States
- Prior art keywords
- sio
- group
- formula
- represented
- polyorganosiloxane
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Abandoned
Links
- 239000000203 mixture Substances 0.000 title claims abstract description 76
- 229920001296 polysiloxane Polymers 0.000 title claims abstract description 47
- 239000004065 semiconductor Substances 0.000 title claims abstract description 36
- 238000007789 sealing Methods 0.000 title claims abstract description 27
- 125000003342 alkenyl group Chemical group 0.000 claims abstract description 50
- -1 siloxane unit Chemical group 0.000 claims abstract description 49
- 125000005375 organosiloxane group Chemical group 0.000 claims abstract description 37
- BASFCYQUMIYNBI-UHFFFAOYSA-N platinum Chemical compound [Pt] BASFCYQUMIYNBI-UHFFFAOYSA-N 0.000 claims abstract description 36
- 238000003860 storage Methods 0.000 claims abstract description 25
- 239000003054 catalyst Substances 0.000 claims abstract description 20
- 230000007423 decrease Effects 0.000 claims abstract description 19
- 229910052697 platinum Inorganic materials 0.000 claims abstract description 16
- 125000004435 hydrogen atom Chemical group [H]* 0.000 claims abstract description 14
- 238000006459 hydrosilylation reaction Methods 0.000 claims abstract description 14
- 230000001588 bifunctional effect Effects 0.000 claims abstract description 11
- 229910020447 SiO2/2 Inorganic materials 0.000 claims description 55
- 238000010438 heat treatment Methods 0.000 claims description 32
- 229910020388 SiO1/2 Inorganic materials 0.000 claims description 29
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical group [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 claims description 25
- 125000000217 alkyl group Chemical group 0.000 claims description 20
- 125000003118 aryl group Chemical group 0.000 claims description 19
- 125000001997 phenyl group Chemical group [H]C1=C([H])C([H])=C(*)C([H])=C1[H] 0.000 claims description 12
- 238000006243 chemical reaction Methods 0.000 claims description 11
- 125000004122 cyclic group Chemical group 0.000 claims description 10
- 229910020487 SiO3/2 Inorganic materials 0.000 claims description 9
- 238000010559 graft polymerization reaction Methods 0.000 claims description 8
- 125000003545 alkoxy group Chemical group 0.000 claims description 7
- 125000002887 hydroxy group Chemical group [H]O* 0.000 claims description 7
- 238000006116 polymerization reaction Methods 0.000 claims description 7
- 238000011067 equilibration Methods 0.000 claims description 6
- 239000002253 acid Substances 0.000 claims description 5
- 125000005843 halogen group Chemical group 0.000 claims description 4
- 230000003301 hydrolyzing effect Effects 0.000 claims description 4
- 229920000642 polymer Polymers 0.000 claims description 3
- 230000000379 polymerizing effect Effects 0.000 claims description 3
- 125000004429 atom Chemical group 0.000 claims description 2
- 125000000962 organic group Chemical group 0.000 claims description 2
- 229910000077 silane Inorganic materials 0.000 claims description 2
- 229920002050 silicone resin Polymers 0.000 description 75
- CTQNGGLPUBDAKN-UHFFFAOYSA-N O-Xylene Chemical compound CC1=CC=CC=C1C CTQNGGLPUBDAKN-UHFFFAOYSA-N 0.000 description 57
- 239000008096 xylene Substances 0.000 description 57
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 37
- 239000000243 solution Substances 0.000 description 30
- 125000000391 vinyl group Chemical group [H]C([*])=C([H])[H] 0.000 description 28
- 230000015572 biosynthetic process Effects 0.000 description 22
- 238000003786 synthesis reaction Methods 0.000 description 22
- OKKJLVBELUTLKV-UHFFFAOYSA-N Methanol Chemical compound OC OKKJLVBELUTLKV-UHFFFAOYSA-N 0.000 description 21
- VEXZGXHMUGYJMC-UHFFFAOYSA-N Hydrochloric acid Chemical compound Cl VEXZGXHMUGYJMC-UHFFFAOYSA-N 0.000 description 20
- 239000000047 product Substances 0.000 description 20
- 239000003795 chemical substances by application Substances 0.000 description 19
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 18
- 125000000956 methoxy group Chemical group [H]C([H])([H])O* 0.000 description 18
- 238000005406 washing Methods 0.000 description 18
- 239000007788 liquid Substances 0.000 description 15
- 238000013329 compounding Methods 0.000 description 14
- 238000001723 curing Methods 0.000 description 13
- IJOOHPMOJXWVHK-UHFFFAOYSA-N chlorotrimethylsilane Chemical compound C[Si](C)(C)Cl IJOOHPMOJXWVHK-UHFFFAOYSA-N 0.000 description 12
- 206010040844 Skin exfoliation Diseases 0.000 description 11
- 239000007795 chemical reaction product Substances 0.000 description 11
- 238000004898 kneading Methods 0.000 description 11
- 238000010521 absorption reaction Methods 0.000 description 10
- 238000010790 dilution Methods 0.000 description 10
- 239000012895 dilution Substances 0.000 description 10
- 229910052681 coesite Inorganic materials 0.000 description 9
- 230000000052 comparative effect Effects 0.000 description 9
- 229910052906 cristobalite Inorganic materials 0.000 description 9
- 125000002496 methyl group Chemical group [H]C([H])([H])* 0.000 description 9
- 229920005989 resin Polymers 0.000 description 9
- 239000011347 resin Substances 0.000 description 9
- 239000000377 silicon dioxide Substances 0.000 description 9
- 229910052682 stishovite Inorganic materials 0.000 description 9
- 229910052905 tridymite Inorganic materials 0.000 description 9
- 238000001816 cooling Methods 0.000 description 8
- 239000006185 dispersion Substances 0.000 description 8
- 239000003566 sealing material Substances 0.000 description 8
- 238000000926 separation method Methods 0.000 description 8
- 125000005372 silanol group Chemical group 0.000 description 8
- HUCVOHYBFXVBRW-UHFFFAOYSA-M caesium hydroxide Inorganic materials [OH-].[Cs+] HUCVOHYBFXVBRW-UHFFFAOYSA-M 0.000 description 7
- 239000013067 intermediate product Substances 0.000 description 7
- 238000010992 reflux Methods 0.000 description 7
- 229910052710 silicon Inorganic materials 0.000 description 7
- 239000000758 substrate Substances 0.000 description 7
- 238000006460 hydrolysis reaction Methods 0.000 description 6
- 239000005051 trimethylchlorosilane Substances 0.000 description 6
- MFGOFGRYDNHJTA-UHFFFAOYSA-N 2-amino-1-(2-fluorophenyl)ethanol Chemical compound NCC(O)C1=CC=CC=C1F MFGOFGRYDNHJTA-UHFFFAOYSA-N 0.000 description 5
- 239000002585 base Substances 0.000 description 5
- 230000007062 hydrolysis Effects 0.000 description 5
- 239000011259 mixed solution Substances 0.000 description 5
- 238000006386 neutralization reaction Methods 0.000 description 5
- 238000000862 absorption spectrum Methods 0.000 description 4
- 125000001301 ethoxy group Chemical group [H]C([H])([H])C([H])([H])O* 0.000 description 4
- 125000001183 hydrocarbyl group Chemical group 0.000 description 4
- 238000005259 measurement Methods 0.000 description 4
- 230000004580 weight loss Effects 0.000 description 4
- XDLMVUHYZWKMMD-UHFFFAOYSA-N 3-trimethoxysilylpropyl 2-methylprop-2-enoate Chemical compound CO[Si](OC)(OC)CCCOC(=O)C(C)=C XDLMVUHYZWKMMD-UHFFFAOYSA-N 0.000 description 3
- 238000007259 addition reaction Methods 0.000 description 3
- 230000003247 decreasing effect Effects 0.000 description 3
- OSXYHAQZDCICNX-UHFFFAOYSA-N dichloro(diphenyl)silane Chemical compound C=1C=CC=CC=1[Si](Cl)(Cl)C1=CC=CC=C1 OSXYHAQZDCICNX-UHFFFAOYSA-N 0.000 description 3
- LIKFHECYJZWXFJ-UHFFFAOYSA-N dimethyldichlorosilane Chemical compound C[Si](C)(Cl)Cl LIKFHECYJZWXFJ-UHFFFAOYSA-N 0.000 description 3
- KPUWHANPEXNPJT-UHFFFAOYSA-N disiloxane Chemical class [SiH3]O[SiH3] KPUWHANPEXNPJT-UHFFFAOYSA-N 0.000 description 3
- 239000003822 epoxy resin Substances 0.000 description 3
- 150000001282 organosilanes Chemical class 0.000 description 3
- 239000005054 phenyltrichlorosilane Substances 0.000 description 3
- 229920000647 polyepoxide Polymers 0.000 description 3
- 238000004382 potting Methods 0.000 description 3
- 239000002904 solvent Substances 0.000 description 3
- 239000007858 starting material Substances 0.000 description 3
- ORVMIVQULIKXCP-UHFFFAOYSA-N trichloro(phenyl)silane Chemical compound Cl[Si](Cl)(Cl)C1=CC=CC=C1 ORVMIVQULIKXCP-UHFFFAOYSA-N 0.000 description 3
- CSCPPACGZOOCGX-UHFFFAOYSA-N Acetone Chemical compound CC(C)=O CSCPPACGZOOCGX-UHFFFAOYSA-N 0.000 description 2
- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 description 2
- 239000004954 Polyphthalamide Substances 0.000 description 2
- KWYUFKZDYYNOTN-UHFFFAOYSA-M Potassium hydroxide Chemical compound [OH-].[K+] KWYUFKZDYYNOTN-UHFFFAOYSA-M 0.000 description 2
- 230000008901 benefit Effects 0.000 description 2
- 125000004106 butoxy group Chemical group [*]OC([H])([H])C([H])([H])C(C([H])([H])[H])([H])[H] 0.000 description 2
- 125000000484 butyl group Chemical group [H]C([*])([H])C([H])([H])C([H])([H])C([H])([H])[H] 0.000 description 2
- TVFDJXOCXUVLDH-UHFFFAOYSA-N caesium atom Chemical compound [Cs] TVFDJXOCXUVLDH-UHFFFAOYSA-N 0.000 description 2
- 229910052799 carbon Inorganic materials 0.000 description 2
- 239000007809 chemical reaction catalyst Substances 0.000 description 2
- 125000001309 chloro group Chemical group Cl* 0.000 description 2
- 238000005336 cracking Methods 0.000 description 2
- 125000000113 cyclohexyl group Chemical group [H]C1([H])C([H])([H])C([H])([H])C([H])(*)C([H])([H])C1([H])[H] 0.000 description 2
- 238000009826 distribution Methods 0.000 description 2
- 125000001495 ethyl group Chemical group [H]C([H])([H])C([H])([H])* 0.000 description 2
- 238000005227 gel permeation chromatography Methods 0.000 description 2
- 230000020169 heat generation Effects 0.000 description 2
- FFUAGWLWBBFQJT-UHFFFAOYSA-N hexamethyldisilazane Chemical compound C[Si](C)(C)N[Si](C)(C)C FFUAGWLWBBFQJT-UHFFFAOYSA-N 0.000 description 2
- 125000004051 hexyl group Chemical group [H]C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])* 0.000 description 2
- 125000000959 isobutyl group Chemical group [H]C([H])([H])C([H])(C([H])([H])[H])C([H])([H])* 0.000 description 2
- 125000001449 isopropyl group Chemical group [H]C([H])([H])C([H])(*)C([H])([H])[H] 0.000 description 2
- 238000000034 method Methods 0.000 description 2
- 238000002156 mixing Methods 0.000 description 2
- 125000002347 octyl group Chemical group [H]C([*])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])C([H])([H])[H] 0.000 description 2
- 230000003287 optical effect Effects 0.000 description 2
- 229920006375 polyphtalamide Polymers 0.000 description 2
- 125000002572 propoxy group Chemical group [*]OC([H])([H])C(C([H])([H])[H])([H])[H] 0.000 description 2
- 125000001436 propyl group Chemical group [H]C([*])([H])C([H])([H])C([H])([H])[H] 0.000 description 2
- 239000002683 reaction inhibitor Substances 0.000 description 2
- 230000003014 reinforcing effect Effects 0.000 description 2
- 125000000999 tert-butyl group Chemical group [H]C([H])([H])C(*)(C([H])([H])[H])C([H])([H])[H] 0.000 description 2
- 125000003944 tolyl group Chemical group 0.000 description 2
- BPSIOYPQMFLKFR-UHFFFAOYSA-N trimethoxy-[3-(oxiran-2-ylmethoxy)propyl]silane Chemical compound CO[Si](OC)(OC)CCCOCC1CO1 BPSIOYPQMFLKFR-UHFFFAOYSA-N 0.000 description 2
- WYTZZXDRDKSJID-UHFFFAOYSA-N (3-aminopropyl)triethoxysilane Chemical compound CCO[Si](OCC)(OCC)CCCN WYTZZXDRDKSJID-UHFFFAOYSA-N 0.000 description 1
- RNFJDJUURJAICM-UHFFFAOYSA-N 2,2,4,4,6,6-hexaphenoxy-1,3,5-triaza-2$l^{5},4$l^{5},6$l^{5}-triphosphacyclohexa-1,3,5-triene Chemical compound N=1P(OC=2C=CC=CC=2)(OC=2C=CC=CC=2)=NP(OC=2C=CC=CC=2)(OC=2C=CC=CC=2)=NP=1(OC=1C=CC=CC=1)OC1=CC=CC=C1 RNFJDJUURJAICM-UHFFFAOYSA-N 0.000 description 1
- 125000000022 2-aminoethyl group Chemical group [H]C([*])([H])C([H])([H])N([H])[H] 0.000 description 1
- 125000001731 2-cyanoethyl group Chemical group [H]C([H])(*)C([H])([H])C#N 0.000 description 1
- 125000003903 2-propenyl group Chemical group [H]C([*])([H])C([H])=C([H])[H] 0.000 description 1
- ZDZYGYFHTPFREM-UHFFFAOYSA-N 3-[3-aminopropyl(dimethoxy)silyl]oxypropan-1-amine Chemical compound NCCC[Si](OC)(OC)OCCCN ZDZYGYFHTPFREM-UHFFFAOYSA-N 0.000 description 1
- QYXVDGZUXHFXTO-UHFFFAOYSA-L 3-oxobutanoate;platinum(2+) Chemical compound [Pt+2].CC(=O)CC([O-])=O.CC(=O)CC([O-])=O QYXVDGZUXHFXTO-UHFFFAOYSA-L 0.000 description 1
- SJECZPVISLOESU-UHFFFAOYSA-N 3-trimethoxysilylpropan-1-amine Chemical compound CO[Si](OC)(OC)CCCN SJECZPVISLOESU-UHFFFAOYSA-N 0.000 description 1
- UUEWCQRISZBELL-UHFFFAOYSA-N 3-trimethoxysilylpropane-1-thiol Chemical compound CO[Si](OC)(OC)CCCS UUEWCQRISZBELL-UHFFFAOYSA-N 0.000 description 1
- KBQVDAIIQCXKPI-UHFFFAOYSA-N 3-trimethoxysilylpropyl prop-2-enoate Chemical compound CO[Si](OC)(OC)CCCOC(=O)C=C KBQVDAIIQCXKPI-UHFFFAOYSA-N 0.000 description 1
- WKBOTKDWSSQWDR-UHFFFAOYSA-N Bromine atom Chemical compound [Br] WKBOTKDWSSQWDR-UHFFFAOYSA-N 0.000 description 1
- NUKMREQIHDLEHR-UHFFFAOYSA-N C.C.C.C.C.[H][Si]1(C)CCCCO[Si](C)(C)O1 Chemical compound C.C.C.C.C.[H][Si]1(C)CCCCO[Si](C)(C)O1 NUKMREQIHDLEHR-UHFFFAOYSA-N 0.000 description 1
- CCAUMUCXUARIGW-UHFFFAOYSA-N C.C.C.C.[H][Si]1(C)CCCCO[Si](C)(C)O1 Chemical compound C.C.C.C.[H][Si]1(C)CCCCO[Si](C)(C)O1 CCAUMUCXUARIGW-UHFFFAOYSA-N 0.000 description 1
- ZAMOUSCENKQFHK-UHFFFAOYSA-N Chlorine atom Chemical compound [Cl] ZAMOUSCENKQFHK-UHFFFAOYSA-N 0.000 description 1
- 229920001875 Ebonite Polymers 0.000 description 1
- LFQSCWFLJHTTHZ-UHFFFAOYSA-N Ethanol Chemical compound CCO LFQSCWFLJHTTHZ-UHFFFAOYSA-N 0.000 description 1
- PXGOKWXKJXAPGV-UHFFFAOYSA-N Fluorine Chemical compound FF PXGOKWXKJXAPGV-UHFFFAOYSA-N 0.000 description 1
- AFCARXCZXQIEQB-UHFFFAOYSA-N N-[3-oxo-3-(2,4,6,7-tetrahydrotriazolo[4,5-c]pyridin-5-yl)propyl]-2-[[3-(trifluoromethoxy)phenyl]methylamino]pyrimidine-5-carboxamide Chemical compound O=C(CCNC(=O)C=1C=NC(=NC=1)NCC1=CC(=CC=C1)OC(F)(F)F)N1CC2=C(CC1)NN=N2 AFCARXCZXQIEQB-UHFFFAOYSA-N 0.000 description 1
- 239000004793 Polystyrene Substances 0.000 description 1
- 229910020485 SiO4/2 Inorganic materials 0.000 description 1
- WYURNTSHIVDZCO-UHFFFAOYSA-N Tetrahydrofuran Chemical compound C1CCOC1 WYURNTSHIVDZCO-UHFFFAOYSA-N 0.000 description 1
- 239000000853 adhesive Substances 0.000 description 1
- 230000001070 adhesive effect Effects 0.000 description 1
- 125000001931 aliphatic group Chemical group 0.000 description 1
- 150000001336 alkenes Chemical class 0.000 description 1
- 125000003277 amino group Chemical group 0.000 description 1
- 230000003064 anti-oxidating effect Effects 0.000 description 1
- 125000003710 aryl alkyl group Chemical group 0.000 description 1
- 229920005601 base polymer Polymers 0.000 description 1
- 239000003637 basic solution Substances 0.000 description 1
- 125000001797 benzyl group Chemical group [H]C1=C([H])C([H])=C(C([H])=C1[H])C([H])([H])* 0.000 description 1
- GDTBXPJZTBHREO-UHFFFAOYSA-N bromine Substances BrBr GDTBXPJZTBHREO-UHFFFAOYSA-N 0.000 description 1
- 229910052794 bromium Inorganic materials 0.000 description 1
- 125000001246 bromo group Chemical group Br* 0.000 description 1
- 125000005998 bromoethyl group Chemical group 0.000 description 1
- 125000004369 butenyl group Chemical group C(=CCC)* 0.000 description 1
- 230000015556 catabolic process Effects 0.000 description 1
- 229910052801 chlorine Inorganic materials 0.000 description 1
- 239000000460 chlorine Substances 0.000 description 1
- 125000004218 chloromethyl group Chemical group [H]C([H])(Cl)* 0.000 description 1
- 238000004132 cross linking Methods 0.000 description 1
- 239000003431 cross linking reagent Substances 0.000 description 1
- 125000004093 cyano group Chemical group *C#N 0.000 description 1
- 238000006731 degradation reaction Methods 0.000 description 1
- YLJJAVFOBDSYAN-UHFFFAOYSA-N dichloro-ethenyl-methylsilane Chemical compound C[Si](Cl)(Cl)C=C YLJJAVFOBDSYAN-UHFFFAOYSA-N 0.000 description 1
- 229920005645 diorganopolysiloxane polymer Polymers 0.000 description 1
- 238000004821 distillation Methods 0.000 description 1
- FWDBOZPQNFPOLF-UHFFFAOYSA-N ethenyl(triethoxy)silane Chemical compound CCO[Si](OCC)(OCC)C=C FWDBOZPQNFPOLF-UHFFFAOYSA-N 0.000 description 1
- NKSJNEHGWDZZQF-UHFFFAOYSA-N ethenyl(trimethoxy)silane Chemical compound CO[Si](OC)(OC)C=C NKSJNEHGWDZZQF-UHFFFAOYSA-N 0.000 description 1
- WOXXJEVNDJOOLV-UHFFFAOYSA-N ethenyl-tris(2-methoxyethoxy)silane Chemical compound COCCO[Si](OCCOC)(OCCOC)C=C WOXXJEVNDJOOLV-UHFFFAOYSA-N 0.000 description 1
- 238000011156 evaluation Methods 0.000 description 1
- 239000000945 filler Substances 0.000 description 1
- 239000010419 fine particle Substances 0.000 description 1
- 239000003063 flame retardant Substances 0.000 description 1
- 229910052731 fluorine Inorganic materials 0.000 description 1
- 239000011737 fluorine Substances 0.000 description 1
- 125000001153 fluoro group Chemical group F* 0.000 description 1
- 238000013007 heat curing Methods 0.000 description 1
- 125000006038 hexenyl group Chemical group 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
- 238000000691 measurement method Methods 0.000 description 1
- 125000005641 methacryl group Chemical group 0.000 description 1
- 239000005055 methyl trichlorosilane Substances 0.000 description 1
- SNVLJLYUUXKWOJ-UHFFFAOYSA-N methylidenecarbene Chemical compound C=[C] SNVLJLYUUXKWOJ-UHFFFAOYSA-N 0.000 description 1
- JLUFWMXJHAVVNN-UHFFFAOYSA-N methyltrichlorosilane Chemical compound C[Si](Cl)(Cl)Cl JLUFWMXJHAVVNN-UHFFFAOYSA-N 0.000 description 1
- KBJFYLLAMSZSOG-UHFFFAOYSA-N n-(3-trimethoxysilylpropyl)aniline Chemical compound CO[Si](OC)(OC)CCCNC1=CC=CC=C1 KBJFYLLAMSZSOG-UHFFFAOYSA-N 0.000 description 1
- 229920006136 organohydrogenpolysiloxane Polymers 0.000 description 1
- 125000002255 pentenyl group Chemical group C(=CCCC)* 0.000 description 1
- 239000013500 performance material Substances 0.000 description 1
- 125000000286 phenylethyl group Chemical group [H]C1=C([H])C([H])=C(C([H])=C1[H])C([H])([H])C([H])([H])* 0.000 description 1
- 230000000704 physical effect Effects 0.000 description 1
- 239000000049 pigment Substances 0.000 description 1
- CLSUSRZJUQMOHH-UHFFFAOYSA-L platinum dichloride Chemical compound Cl[Pt]Cl CLSUSRZJUQMOHH-UHFFFAOYSA-L 0.000 description 1
- 229920002223 polystyrene Polymers 0.000 description 1
- 238000002360 preparation method Methods 0.000 description 1
- 239000011253 protective coating Substances 0.000 description 1
- 239000000376 reactant Substances 0.000 description 1
- 239000011541 reaction mixture Substances 0.000 description 1
- 239000010703 silicon Substances 0.000 description 1
- 238000006884 silylation reaction Methods 0.000 description 1
- 238000003756 stirring Methods 0.000 description 1
- 230000002123 temporal effect Effects 0.000 description 1
- 125000003396 thiol group Chemical group [H]S* 0.000 description 1
- 125000000725 trifluoropropyl group Chemical group [H]C([H])(*)C([H])([H])C(F)(F)F 0.000 description 1
- DQZNLOXENNXVAD-UHFFFAOYSA-N trimethoxy-[2-(7-oxabicyclo[4.1.0]heptan-4-yl)ethyl]silane Chemical compound C1C(CC[Si](OC)(OC)OC)CCC2OC21 DQZNLOXENNXVAD-UHFFFAOYSA-N 0.000 description 1
- 238000004383 yellowing Methods 0.000 description 1
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L33/00—Semiconductor devices having potential barriers specially adapted for light emission; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof
- H01L33/48—Semiconductor devices having potential barriers specially adapted for light emission; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof characterised by the semiconductor body packages
- H01L33/52—Encapsulations
- H01L33/56—Materials, e.g. epoxy or silicone resin
-
- C—CHEMISTRY; METALLURGY
- C08—ORGANIC MACROMOLECULAR COMPOUNDS; THEIR PREPARATION OR CHEMICAL WORKING-UP; COMPOSITIONS BASED THEREON
- C08G—MACROMOLECULAR COMPOUNDS OBTAINED OTHERWISE THAN BY REACTIONS ONLY INVOLVING UNSATURATED CARBON-TO-CARBON BONDS
- C08G77/00—Macromolecular compounds obtained by reactions forming a linkage containing silicon with or without sulfur, nitrogen, oxygen or carbon in the main chain of the macromolecule
- C08G77/04—Polysiloxanes
-
- C—CHEMISTRY; METALLURGY
- C08—ORGANIC MACROMOLECULAR COMPOUNDS; THEIR PREPARATION OR CHEMICAL WORKING-UP; COMPOSITIONS BASED THEREON
- C08K—Use of inorganic or non-macromolecular organic substances as compounding ingredients
- C08K5/00—Use of organic ingredients
- C08K5/56—Organo-metallic compounds, i.e. organic compounds containing a metal-to-carbon bond
-
- C—CHEMISTRY; METALLURGY
- C08—ORGANIC MACROMOLECULAR COMPOUNDS; THEIR PREPARATION OR CHEMICAL WORKING-UP; COMPOSITIONS BASED THEREON
- C08L—COMPOSITIONS OF MACROMOLECULAR COMPOUNDS
- C08L83/00—Compositions of macromolecular compounds obtained by reactions forming in the main chain of the macromolecule a linkage containing silicon with or without sulfur, nitrogen, oxygen or carbon only; Compositions of derivatives of such polymers
-
- C—CHEMISTRY; METALLURGY
- C08—ORGANIC MACROMOLECULAR COMPOUNDS; THEIR PREPARATION OR CHEMICAL WORKING-UP; COMPOSITIONS BASED THEREON
- C08L—COMPOSITIONS OF MACROMOLECULAR COMPOUNDS
- C08L83/00—Compositions of macromolecular compounds obtained by reactions forming in the main chain of the macromolecule a linkage containing silicon with or without sulfur, nitrogen, oxygen or carbon only; Compositions of derivatives of such polymers
- C08L83/04—Polysiloxanes
-
- C—CHEMISTRY; METALLURGY
- C08—ORGANIC MACROMOLECULAR COMPOUNDS; THEIR PREPARATION OR CHEMICAL WORKING-UP; COMPOSITIONS BASED THEREON
- C08L—COMPOSITIONS OF MACROMOLECULAR COMPOUNDS
- C08L83/00—Compositions of macromolecular compounds obtained by reactions forming in the main chain of the macromolecule a linkage containing silicon with or without sulfur, nitrogen, oxygen or carbon only; Compositions of derivatives of such polymers
- C08L83/10—Block- or graft-copolymers containing polysiloxane sequences
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L23/00—Details of semiconductor or other solid state devices
- H01L23/28—Encapsulations, e.g. encapsulating layers, coatings, e.g. for protection
- H01L23/29—Encapsulations, e.g. encapsulating layers, coatings, e.g. for protection characterised by the material, e.g. carbon
-
- C—CHEMISTRY; METALLURGY
- C08—ORGANIC MACROMOLECULAR COMPOUNDS; THEIR PREPARATION OR CHEMICAL WORKING-UP; COMPOSITIONS BASED THEREON
- C08G—MACROMOLECULAR COMPOUNDS OBTAINED OTHERWISE THAN BY REACTIONS ONLY INVOLVING UNSATURATED CARBON-TO-CARBON BONDS
- C08G77/00—Macromolecular compounds obtained by reactions forming a linkage containing silicon with or without sulfur, nitrogen, oxygen or carbon in the main chain of the macromolecule
- C08G77/04—Polysiloxanes
- C08G77/12—Polysiloxanes containing silicon bound to hydrogen
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- C—CHEMISTRY; METALLURGY
- C08—ORGANIC MACROMOLECULAR COMPOUNDS; THEIR PREPARATION OR CHEMICAL WORKING-UP; COMPOSITIONS BASED THEREON
- C08G—MACROMOLECULAR COMPOUNDS OBTAINED OTHERWISE THAN BY REACTIONS ONLY INVOLVING UNSATURATED CARBON-TO-CARBON BONDS
- C08G77/00—Macromolecular compounds obtained by reactions forming a linkage containing silicon with or without sulfur, nitrogen, oxygen or carbon in the main chain of the macromolecule
- C08G77/04—Polysiloxanes
- C08G77/20—Polysiloxanes containing silicon bound to unsaturated aliphatic groups
-
- C—CHEMISTRY; METALLURGY
- C08—ORGANIC MACROMOLECULAR COMPOUNDS; THEIR PREPARATION OR CHEMICAL WORKING-UP; COMPOSITIONS BASED THEREON
- C08G—MACROMOLECULAR COMPOUNDS OBTAINED OTHERWISE THAN BY REACTIONS ONLY INVOLVING UNSATURATED CARBON-TO-CARBON BONDS
- C08G77/00—Macromolecular compounds obtained by reactions forming a linkage containing silicon with or without sulfur, nitrogen, oxygen or carbon in the main chain of the macromolecule
- C08G77/80—Siloxanes having aromatic substituents, e.g. phenyl side groups
Definitions
- the present invention relates to a silicone composition for sealing a semiconductor, and relates to a silicone composition suitable as a sealing material for sealing, for example, an optical semiconductor element such as an LED (light emitting diode).
- an optical semiconductor element such as an LED (light emitting diode).
- An LED lamp known as the optical semiconductor device has a structure in which an LED die-bonded to a support substrate is sealed with a sealing material composed of transparent resin.
- a sealing material a composition mainly containing an epoxy resin has been conventionally used.
- a composition containing silicone (polyorganosiloxane) as a main component is increasingly used because of its excellent heat resistance.
- an addition reaction type silicone composition is excellent in productivity because it cures in a short time by heating, and is thus suitable as the sealing material for LED.
- a silicone cured product with high hardness is free from surface tack and thus has advantages such as capability of preventing adhesion of debris, adhesion between LEDs and the like.
- the silicone cured product with high hardness is more fragile than the epoxy resin and generates cracks or peelings from the substrate during curing or in a reliability test of moisture absorption reflow.
- a curing silicone composition containing: (A) a solvent-soluble organopolysiloxane obtained by subjecting an organopolysiloxane having at least two alkenyl groups per molecule represented by an average composition formula: R 1 a SiO (4 ⁇ a)/2 (where R 1 represents a monovalent hydrocarbon group and 0.1 to 40 mol % of all of R 1 s are alkenyl groups, a is a positive number satisfying 1 ⁇ a ⁇ 2) to a hydrosilylation reaction, with a diorganopolysiloxane represented by a general formula: HR 2 2 Si (R 2 2 SiO) n R 2 2 SiH (where R 2 represents a monovalent hydrocarbon group containing no aliphatic unsaturated bond, n is an integer of 0 to 1,000); (B) an organohydrogenpolysiloxane represented by an average composition formula: R 2 b
- a cured product obtained from the silicon composition described in JP-A 2009-242627 (KOKAI) is not so large in decrease in modulus due to heating, and thus cannot sufficiently relax the stress caused by thermal expansion of the cured product itself and has difficulty in preventing generation of cracks.
- the solvent-soluble organopolysiloxane being the (A) component is prepared by the hydrosilylation reaction using a catalyst of the same kind as the hydrosilylation reaction catalyst being the (C) component and thus has a disadvantage that the stability after mixed with the (B) component degrades because of a remnant of the catalyst used for the preparation of the (A) component.
- the present invention has been made to solve the problems and its object is to provide a silicone composition for sealing a semiconductor which forms a cured product having an appropriate modulus and can greatly decrease the modulus of the cured product by heating.
- the present inventors have found that a great decrease in storage modulus of the cured product by heating is possible by using, as a base polymer, a polyorganosiloxane which contains siloxane units not taking part in the hydrosilylation reaction including a trifunctional unit at a predetermined percentage and contains a bifunctional siloxane unit and/or a monofunctional siloxane unit containing an alkenyl group, and reached the present invention.
- a silicone composition for sealing a semiconductor of the present invention comprises: (A) 100 parts by weight of a polyorganosiloxane having one or more alkenyl groups, on average, per molecule, obtained by reacting (a1) 60 to 99 parts by weight of an organosiloxane containing at least a trifunctional siloxane unit represented by a formula: R 1 SiO 3/2 (where R 1 represents an alkyl group or an aryl group) and not taking part in a hydrosilylation reaction, with (a2) 40 to 1 parts by weight of an organosiloxane containing a bifunctional siloxane unit represented by a formula: R 2 2 SiO 2/2 (where R 2 represents an alkenyl group, an alkyl group, or an aryl group, and at least one of groups in a molecule is an alkenyl group) and/or a monofunctional siloxane unit represented by a formula: R 2 3 SiO 1/2 (where R 2 is as described above); (B) an amount
- a cured product having an appropriate storage modulus and greatly decreased in storage modulus by heating can be formed, so that when the silicone composition is used as a sealing material for a semiconductor element such as an LED, the cured product can relax the stress caused by thermal expansion due to heat generation from the semiconductor element or the like. Consequently, it is possible to prevent generation of cracks and decrease peelings from the substrate so as to greatly improve the reliability of a semiconductor device.
- the (A) component is a main component for imparting a large decrease in storage modulus of a cured product by heating (decrease of 40% or more by heating from 25° C. to 50° C.).
- the (A) component is a polyorganosiloxane having one or more alkenyl groups, on average, per molecule, and obtained by reacting (a1) 60 to 99 parts by weight of an organosiloxane not taking part in a hydrosilylation reaction, with (a2) 40 to 1 parts by weight of an organosiloxane containing a bifunctional siloxane unit and/or a monofunctional siloxane unit, both the bifunctional siloxane unit and the monofunctional siloxane unit having an alkenyl group taking part in the hydrosilylation reaction.
- the (a2) component may contain one or both of the bifunctional siloxane unit having an alkenyl group and the monofunctional siloxane unit having an alkenyl group. Further, the (a2) component may contain a bifunctional siloxane unit and/or a monofunctional siloxane which contain no alkenyl group.
- the (a1) organosiloxane not taking part in the hydrosilylation reaction contains at least a trifunctional siloxane unit represented by a formula: R 1 SiO 3/2 .
- the (a2) bifunctional siloxane unit having an alkenyl group is represented by a formula: R 2 2 SiO 2/2
- the monofunctional siloxane unit having an alkenyl group is represented by a formula: R 2 3 SiO 1/2 .
- R 1 represents an alkyl group or an aryl group
- R 2 represents an alkenyl group, an alkyl group, or an aryl group.
- the alkyl group include a methyl group, an ethyl group, a propyl group, an isopropyl group, a butyl group, an isobutyl group, a tert-butyl group, a hexyl group, a cyclohexyl group, an octyl group and the like, and the methyl group is more preferable.
- the aryl group include a phenyl group, a tolyl group and the like, and the phenyl group is more preferable.
- the alkenyl group include a vinyl group, an allyl group, a butenyl group, a pentenyl group, a hexenyl group and the like, and the vinyl group is more preferable.
- R 2 contained in the bifunctional siloxane unit constituting (a2) at least one R 2 is an alkenyl group, and among R 2 contained in the monofunctional siloxane unit, at least one R 2 is an alkenyl group.
- the (A) component has one or more alkenyl groups, on average, per molecule. From the viewpoint of increasing the refractive index of a cured product, it is preferable that 20 to 70 mol %, and more preferably 40 to 60 mol %, of all of organic groups bonded to silicon atoms in the (a1) component are phenyl groups.
- Polyorganosiloxane being the (A) component is a polymer obtained, for example, by reacting a first organosiloxane represented by an average unit formula: (R 1 SiO 3/2 ) a (R 1 2 SiO 2/2 ) b (R 1 SiO (3 ⁇ n)/2 Y n ) c (R 1 2 SiO (2 ⁇ m)/2 Y m ) d , a second organosiloxane represented by a formula: (R 2 3 SiO 1/2 ) 2 (R 2 2 SiO 2/2 ) e , and a third organosiloxane represented by a formula: (R 2 2 SiO 2/2 ) f , at a weight ratio (%) of g:h:i.
- a first organosiloxane represented by an average unit formula: (R 1 SiO 3/2 ) a (R 1 2 SiO 2/2 ) b (R 1 SiO (3 ⁇ n)/2 Y n ) c (R
- R 1 represents an alkyl group or an aryl group
- R 2 represents an alkenyl group, an alkyl group, or an aryl group
- Y represents an alkoxy group or a hydroxyl group.
- the alkyl group, the aryl group, and the alkenyl group are the same as those in the above, and they are preferably the methyl group, the phenyl group, and the vinyl group respectively.
- the alkoxy group include a methoxy group, an ethoxy group, a propoxy group, a butoxy group and the like, and the methoxy group and the ethoxy group are more preferable.
- n 1 or 2
- m 1 or 2
- the siloxane unit represented by a formula: R 1 SiO (3 ⁇ n)/2 Y n is a bifunctional siloxane unit or a monofunctional siloxane unit
- the siloxane unit represented by a formula: R 1 2 SiO (2 ⁇ m)/2 Y m is a monofunctional siloxane unit.
- a and b are positive numbers
- e is 0 or a positive number
- f is a positive number, which are numbers satisfying 0 ⁇ e ⁇ 100, and 3 ⁇ f ⁇ 20.
- the bonding position of the alkenyl group is not limited.
- the alkenyl group may be bonded to a silicon atom of R 2 3 SiO 1/2 unit, bonded to a silicon atom of R 2 2 SiO 2/2 unit in (R 2 2 SiO 2/2 ) e , or bonded to a silicon atom of R 2 2 SiO 2/2 unit in (R 2 2 SiO 2/2 ) f .
- Polyorganosiloxane being the (A) component represented by the aforementioned unit formula only needs to have one or more alkenyl groups, on average, per molecule.
- the weight loss (weight loss on heating) of the (A) component after heating at 150° C. for 1 hour is preferably 3 weight % or less.
- the nonvolatile content after heating at 150° C. for 1 hour is preferably 97 weight % or more.
- the weight loss on heating of the (A) component exceeding 3 weight % is not preferable because of generation of cracking during and after curing.
- Polyorganosiloxane being the (A) component is preferably manufactured by subjecting, in a step (2), an organosiloxane (II) and/or an organosiloxane (III) which contain an alkenyl group to block polymerization or graft polymerization and equilibration reaction with a polyorganosiloxane (I) obtained in the following step (1).
- the step (1) is a step of polymerizing (condensing), in the presence of a basic catalyst, a polyorganosiloxane obtained by hydrolyzing or partially hydrolyzing a silane compound represented by a formula: R 1 SiX 3 and R 1 2 SiX 2 under acid condition.
- R 1 represents an alkyl group or an aryl group.
- the alkyl group and the aryl group are the same as those in the above, and they are preferably the methyl group and the phenyl group respectively.
- X represents a halogen group, an alkoxy group or a hydroxyl group.
- the halogen group include a chloro group, a bromo group, a fluoro group and the like, and the chloro group is more preferable.
- the alkoxy group include a methoxy group, an ethoxy group, a propoxy group, a butoxy group and the like, and the methoxy group and the ethoxy group are more preferable.
- the heating temperature and time of the polymerizing (condensing) reaction are preferably set to 80° C. to 150° C. and three hours or longer.
- organosiloxane (I) represented by an average unit formula: (R 1 SiO 3/2 ) a (R 1 2 SiO 2/2 ) b (R 1 SiO (3 ⁇ n)/2 Y n ) c (R 1 2 SiO (2 ⁇ m)/2 Y m ) d can be obtained.
- a, b, n, m are positive numbers in the aforementioned ranges, and both of c and d are 0 or positive numbers in the aforementioned ranges.
- the step (2) is a step of subjecting the polyorganosiloxane (I) represented by the above average unit formula obtained in the step (1) to block polymerization or graft polymerization and equilibration reaction, in the presence of a basic catalyst, with a linear polyorganosiloxane (II) containing an alkenyl group and/or a cyclic polyorganosiloxane (III) containing an alkenyl group.
- the linear polyorganosiloxane (II) is represented by a formula: (R 2 3 SiO 1/2 ) 2 (R 2 2 SiO 2/2 ) e
- the cyclic polyorganosiloxane (III) is represented by a formula: (R 2 2 SiO 2/2 ) f .
- R 2 represents an alkenyl group, an alkyl group, or an aryl group. Examples of the alkyl group, the aryl group, and the alkenyl group are the same as those in the above, and they are preferably the methyl group, the phenyl group, and the vinyl group respectively.
- the bonding position of the alkenyl group is not limited. At least one of the linear polyorganosiloxane (II) and the cyclic polyorganosiloxane (III) only needs to have the alkenyl group.
- the heating temperature and time of the block polymerization and equilibration reaction or graft polymerization and equilibration reaction are preferably set to 130° C. to 150° C. and three hours or longer.
- the (B) component is a cross-linking agent which is a polyorganohydrogensiloxane containing two or more, preferably, three or more hydrogen atoms bonded to silicon atoms per molecule (Si—H group).
- the number of silicon atoms per molecule is preferably 2 to 50, and more preferably 4 to 20.
- R 3 represents a substituted or unsubstituted monovalent hydrocarbon group except an alkenyl group.
- R 3 examples include alkyl groups such as a methyl group, an ethyl group, a propyl group, an isopropyl group, a butyl group, an isobutyl group, a tert-butyl group, a hexyl group, a cyclohexyl group, and an octyl group; aryl groups such as a phenyl group and a tolyl group; aralkyl groups such as a benzyl group and a phenylethyl group; and any of these groups with part or all of hydrogen atoms being substituted by halogen atoms such as fluorine, chlorine, or bromine or by a cyano group, for example, hydrocarbon groups such as a chloromethyl group, a bromoethyl group, a trifluoropropyl group, a cyanoethyl group and the like having a carbon number of 1 to 12.
- an alkyl groups such
- Both x and y are positive numbers satisfying 0.8 ⁇ x ⁇ 2.2, 0.002 ⁇ y ⁇ 1, 0.8 ⁇ x+y ⁇ 3, and more preferably satisfying 1 ⁇ x ⁇ 2.2, 0.01 ⁇ y ⁇ 1, 1.8 ⁇ x+y ⁇ 2.5.
- the hydrogen atom may be bonded to a silicon atom at a terminal of a chain, bonded to a silicon atom at the middle of the chain, or bonded to both of them.
- the molecular structure of the (B) component may be any of a straight chain, a branched chain, a cyclic chain and a three-dimensional network, and is preferably a three-dimensional network having a R 3 2 HSiO 1/2 unit (R 3 is as described above) and a SiO 4/2 unit.
- the viscosity of the (B) component at 25° C. is preferably equal to or less than 1000 mPa ⁇ s, and more preferably in a range of 1 to 500 mPa ⁇ s.
- a compounding amount of the (B) component is set so that an amount of hydrogen atoms bonded to silicon atoms is 0.5 to 3.0 mol, more preferably, 0.7 to 2.0 mol, per mol of alkenyl groups bonded to the silicon atoms in the (A) component (alkenyl groups bonded to the silicon atoms in (a2)). If the compounding amount is less than 0.5 mol, sufficient crosslinking cannot be achieved On the other hand, if the compounding amount exceeds 3.0 mol, unreacted Si—H groups remain and tend to cause temporal change in physical property after curing.
- a platinum-based catalyst being the (C) component is a catalyst to accelerate the hydrosilylation reaction between the alkenyl group in the (A) component and the hydrogen atom bonded to the silicon atom in the (B) component to accelerate curing of the composition.
- the (C) component a well-known platinum-based catalyst used for the hydrosilylation reaction can be used.
- the platinum-based catalyst include, platinum black, platinum chloride, chloroplatinic acid, a reactant of chloroplatinic acid and monohydric alcohol, complexes of chloroplatinic acid with olefins or vinylsiloxane, platinum bisacetoacetate and the like.
- a compounding amount of the (C) component only needs to be an amount necessary for curing, and can be appropriately adjusted according to a desired curing rate or the like.
- the compounding amount may be, in terms of platinum element, from 0.5 to 300 ppm relative to the total weight of the composition and is preferably from 1 to 20 ppm in view of transparency of the cured product and cost.
- an adhesion imparting agent can be compounded.
- an organosilane or an organosiloxane oligomer having a number of silicon atoms of 2 to 50, and preferably 4 to 20 can be used.
- alkoxysilanes including: epoxy-functional group-containing alkoxysilanes such as ⁇ -glycidoxypropyltrimethoxysilane, ⁇ -(3,4-epoxycyclohexyl)ethyltrimethoxysilane and the like; alkenyl group-containing alkoxysilanes such as vinyltrimethoxysilane, vinyltriethoxysilane, vinyltri(methoxyethoxy) silane and the like; amino group-containing alkoxysilanes such as ⁇ -aminopropyltrimethoxysilane, ⁇ -aminopropyltriethoxysilane, (aminoethyl)- ⁇ -aminopropyltrimethoxysilane, N- ⁇ (aminoethyl)- ⁇ -aminopropylmethyldimethoxysilane, N-phenyl- ⁇ -aminopropyltri
- organosiloxane oligomer examples include a 1:1 addition reaction product of a SiH group-containing siloxane oligomer represented by:
- ⁇ -methacryloxypropyltrimethoxysilane represented by a formula: CH 2 ⁇ C(CH 3 ) COO(CH 2 ) 3 Si (OCH 3 ) 3 .
- a compounding amount of the (D) adhesion imparting agent is preferably set to 10 parts by weight or less with respect to 100 parts by weight of the (A) component.
- the compounding amount exceeds 10 parts by weight leads to diseconomy in view of cost.
- the silicone composition for sealing a semiconductor of the present invention can contain a reaction inhibitor, a reinforcing or non-reinforcing fine particle filler, a dye, a pigment, a flame retardant, a heat resistance improver, an anti-oxidation degradation agent, a wavelength adjusting agent, a solvent and so on as needed in a range not affecting the transparency after curing and not impairing the object of the present invention.
- Examples of the manufacturing method of the silicone composition for sealing a semiconductor of the present invention include a method of kneading the basic components (A) to (C) and the above-described optional components using a well-known kneading machine. It is also adoptable to store the silicone composition as two separate liquids and mix the two liquids before use. In this case, a mixture obtained by mixing the (A) component and the (C) component is regarded as a first liquid and a mixture obtained by mixing the (B) component and the other optional components (for example, a reaction inhibitor and so on) is regarded as a second liquid, and both of the liquids can be mixed together for use.
- Examples of the kneading machine include a planetary mixer, a three-roll, a kneader, a Shinagawa mixer and the like, which are provided with heating means and cooling means as needed and can be used independently or in combination.
- the silicone composition for sealing a semiconductor of the present invention is preferably liquid and has a viscosity of 0.5 to 50 Pa ⁇ s at 25° C. If the viscosity exceeds 50 Pa ⁇ s, for example, workability when potting to an LED is deteriorated. On the other hand, if the viscosity is less than 0.5 Pa ⁇ s, liquid dripping is likely to occur in potting.
- a method of curing the silicone composition for sealing a semiconductor is not particularly limited. Curing proceeds at room temperature or by heating at 50 to 200° C. It is preferable to perform heating in order to rapidly cure the silicone composition. In the case of heating, the heating time can be appropriately adjusted according to the heating temperature.
- the cured product is in the form of hard rubber or flexible resin.
- the storage modulus of the cured product of the silicone composition of the present invention decreases 40% or more by heating from 25° C. to 50° C., preferably decreases 70% or more.
- the storage modulus of the cured product at 50° C. is lower by 40% or more, and more preferably 70% or more, than the storage modulus at 25° C. Accordingly, when the silicone composition is used as a sealing material of a semiconductor element, the stress caused by thermal expansion due to generation of heat from the semiconductor element or the like can be relaxed to prevent cracks and peelings from a substrate.
- a cured product which decreases in storage modulus due to heating but shows a decreasing rate of the storage modulus is less than 40%, or a cured product which increases in storage modulus due to heating cannot prevent cracks and peelings from a substrate because it cannot sufficiently relax the stress caused by thermal expansion when used as the sealing material of the semiconductor element.
- the storage modulus of the cured product can be appropriately controlled by changing the percentage (weight %) of the (a1) siloxane unit not taking part in the hydrosilylation reaction in the (A) component or the composition of the components (A) to (C). For example, it can be adjusted so that the storage modulus at 25° C. is 1 ⁇ 10 6 to 2 ⁇ 10 7 Pa, the storage modulus decreases 40 to 98% and more preferably 70 to 80% at 50° C. Note that the storage modulus can be measured by a viscoelasticity measuring apparatus. If the percentage of decrease in storage modulus at 50° C. is less than 40%, it is impossible to sufficiently prevent generation of cracks and peelings from a substrate because the stress caused by thermal expansion cannot be relaxed.
- Me represents a methyl group
- Ph represents a phenyl group
- Vi represents a vinyl group.
- the viscosity is a value at 25° C.
- a weight average molecular weight is a value in terms of standard polystyrene measured by a gel permeation chromatography (GPC) using THF (tetrahydrofuran) as a solvent.
- GPC gel permeation chromatography
- the hardness was measured at 23° C. by a type A hardness meter.
- the silicone composition (a diameter of 8 mm, a thickness of 1 mm) was set in an ARES viscoelasticity measuring device (manufactured by Reometric Scientific, Inc.) and raised in temperature by 50° C. per minute, then cured at 150° C. for 1 hour, and cooled at a rate of 5° C. per minute in a temperature range of 150° C. to ⁇ 50° C., and its storage modulus was measured under conditions of a torsion strain of 0.5% and a frequency of 1 Hz.
- the silicone composition was filled a PPA (polyphthalamide) resin package (5 ⁇ 5 ⁇ 1 mm) using a syringe.
- the silicone composition was cured by heating at 100° C. for 3 hours and then heating at 150° C. for 1 hour. After cooling, the numbers of cracks and peelings were investigated using a microscope. Thereafter, the composition was subjected to moisture absorption at 85° C. and 85% RH for 3 hours and then heated in a reflow oven (Max 260° C.). After cooling, the number of cracks and peelings were investigated using a microscope.
- a mixture of 129 g (1 mol) of (Aa1) dimethyldichlorosilane, 255 g (1 mol) of (Aa2) diphenyldichlorosilane, and 212 g (1 mol) of (Aa3) phenyltrichlorosilane was subjected to cohydrolysis by dripping a methanol solution composed of 38 g of water and 237 g of methanol into the mixture. After the dripping, a resultant was heated at a reflux temperature of 60 to 70° C. for 30 minutes, and the cohydrolysis was completed. Thereafter, a reaction mixture was cooled and stirred for 15 minutes with addition of 254 g of methanol and then kept still standing for 30 minutes for liquid separation. A resultant was separated into a mixed solution of hydrochloric acid and methanol at an upper layer and a reaction product at a lower layer.
- a silicone resin AA having methoxy groups represented by an average unit formula: (Me 2 SiO 2/2 ) 0.30 (Me 2 SiO 1/2 OMe) 0.03 (Ph 2 SiO 2/2 ) 0.30 (Ph 2 SiO 1/2 OMe) 0.04 (PhSiO 3/2 ) 0.27 ⁇ PhSiO 1/2 (OMe) 2 ⁇ 0.03 (PhSiO 2/2 OMe) 0.03 was obtained.
- the hydrochloric acid solution at the lower layer was removed, and the xylene solution of silanol group-containing resin at the upper layer was returned back to the flask and heated with 1200 g of ion-exchanged water added thereto, and a mixture was subjected to a heat water-washing operation at a reflux temperature (70 to 80° C.) thereof for 10 minutes. Thereafter, the mixture was returned back to the separating funnel and kept still standing for 45 minutes to separate into a xylene solution of silanol group-containing resin at an upper layer and a hydrochloric acid solution at a lower layer. The same operation was repeated, and it was confirmed that the hydrochloric acid content in the xylene solution of silanol group-containing resin reached 0.1 ppm or less.
- xylene solution of silanol group-containing resin was heated under a reduced pressure condition to distill away a solvent, and a non-volatile content (the non-volatile content was measured by heating at 105° C. for 3 hours) was concentrated to 65 weight %, and xylene was then added thereto to adjust the non-volatile content to 60 weight %.
- organosiloxane G represented by an average unit formula: (Me 2 SiO 2/2 ) 0.33 (Ph 2 SiO 2/2 ) 0.34 (PhSiO 3/2 ) 0.33
- an organosiloxane H represented by a formula: (Me 2 ViSiO 1/2 ) 2 (P
- the silicone resin A1 had a viscosity of 120 Pa ⁇ s, a non-volatile content measured after heated at 150° C. for 1 hour of 99.0 weight % (hereinafter, indicated only by %, and meaning a weight loss on heating of 1.0%), a weight average molecular weight of 1056, and a degree of dispersion of 1.35.
- the degree of dispersion is a numerical value representing the molecular weight distribution and obtained by weight average molecular weight (Mw)/number average molecular weight (Mn). The degree of dispersion means that as it becomes closer to 1, the molecular weight distribution is narrower. Note the number of vinyl groups per molecule in the silicone resin A1 is 1.2 on average.
- organosiloxane G represented by an average unit formula: (Me 2 SiO 2/2 ) 0.33 (Ph 2 SiO 2/2 ) 0.34 (PhSiO 3/2 ) 0.33
- an organosiloxane H represented by a formula: (Me 2 ViSiO 1/2 ) 2 (P
- the obtained silicone resin A2 had a viscosity of 7500 Pa ⁇ s, a non-volatile content measured after heated at 150° C. for 1 hour of 99.0%, a weight average molecular weight of 2950, and a degree of dispersion of 2.05. Note the number of vinyl groups per molecule in the silicone resin A2 is 1.8 on average.
- organosiloxane G represented by an average unit formula: (Me 2 SiO 2/2 ) 0.30 (Me 2 SiO 1/2 OMe) 0.03 (Ph 2 SiO 1/2 OMe) 0.04 (Ph 2 SiO 3/2 ) 0.27 ⁇ PhSiO 1/2 (OMe) 2 ⁇ 0.03
- the obtained silicone resin A3 had a viscosity of 0.6 Pa ⁇ s, a non-volatile content measured after heated at 150° C. for 1 hour of 99.0%, a weight average molecular weight of 870, and a degree of dispersion of 1.24. Note the number of vinyl groups per molecule in the silicone resin A3 is 1.0 on average.
- organosiloxane G represented by an average unit formula: (Me 2 SiO 2/2 ) 0.05 (MeSiO 3/2 ) 0.29 (Ph 2 SiO 2/2 ) 0.23 (Ph 2 SiO 3/2 ) 0.43
- the silicone resin A4 had a non-volatile content measured after heated at 150° C. for 1 hour of 99.0%, a weight average molecular weight of 1550, and a degree of dispersion of 1.49. Note the number of vinyl groups per molecule in the silicone resin A4 is 1.8 on average.
- organosiloxane G represented by an average unit formula: (Me 2 SiO 2/2 ) 0.33 (Ph 2 SiO 2/2 ) 0.34 (PhSiO 3/2 ) 0.33
- an organosiloxane H represented by a formula: (Me 2 ViSiO 1/2 ) 2 (P
- the silicone resin A5 had a viscosity of 100 Pa ⁇ s, a non-volatile content measured after heated at 150° C. for 1 hour of 98.0%, a weight average molecular weight of 3370, and a degree of dispersion of 2.40. Note the number of vinyl groups per molecule in the silicone resin A5 is 4.2 on average.
- the hydrochloric acid solution at the lower layer was removed, and the xylene solution of silicone resin at the upper layer was returned back to the flask and heated with 1000 g of ion-exchanged water added thereto, and a resultant was subjected to a water-washing operation while being heated at 70 to 80° C. for 10 minutes. Then, the mixture was transferred to the separating funnel and kept still standing for 45 minutes to separate into a xylene solution of silicone resin at an upper layer and a hydrochloric acid solution at a lower layer. The same operation was repeated, and it was confirmed that the hydrochloric acid content in the xylene solution of silicone resin reached 0.1 ppm or less. Thereafter, the xylene amount was controlled to adjust the non-volatile content to 50%.
- the mixture was transferred to the separating funnel and kept still standing for 45 minutes to separate into a xylene solution of silicone resin at an upper layer and a basic solution at a lower layer. The same operation was repeated. After the water layer was neutralized, water remaining in a xylene layer was removed by subjecting the water and xylene to azeotropy.
- the silicone resin A6 had a viscosity of 200 Pa ⁇ s, a non-volatile content measured after heated at 150° C. for 1 hour of 99.4%, a weight average molecular weight of 1905, and a degree of dispersion of 1.52. Note the number of vinyl groups per molecule in the silicone resin A6 is 1.4 on average.
- a silicone composition for sealing a semiconductor was obtained by adding (B) 9 parts by weight of a polyorganohydrogensiloxane having a viscosity of 20 mPa ⁇ s and represented by an average unit formula: (SiO 2 )[H(CH 3 ) 2 SiO 1/2 )] 2 and (C) 3 ppm of a vinyl dimer platinum complex in terms of platinum amount to 100 ppm by weight of the silicone resin A1 obtained in the synthesis example 1 and kneading them. Characteristics of the composition were measured and results were shown in Table 1. Note that, in Table 1, an H/Vi ratio shows the molar ratio between hydrogen atoms bonded to silicon atoms and vinyl groups bonded to silicon atoms in the (A) component and the (B) component.
- M H 2 Q is a polyorganohydrogensiloxane represented by an average unit formula: (SiO 2 )[H(CH 3 ) 2 SiO 1/2 )] 2 and M h 2 D Ph2 is a polyorganohydrogensiloxane represented by a formula:
- M Vi is a linear polyorganosiloxane represented by a formula: (Me 2 ViSiO 1/2 ) 2 (Ph 2 SiO 2/2 ) 15 (Me 2 SiO 2/2 ) 20 used in later-described comparative examples 1 to 4.
- Silicone compositions for sealing a semiconductor were obtained by compounding the silicone resins A2 to A5 obtained in the synthesis examples 2 to 5, (B) a polyorganohydrogensiloxane represented by an average unit formula: (SiO 2 )[H(CH 3 ) 2 SiO 1/2 )] 2 , and (C) a vinyl dimer platinum complex at compositions shown in Table 1 respectively and kneading them. Characteristics of the compositions were measured and results were shown in Table 1.
- Silicone compositions for sealing a semiconductor were obtained by compounding the silicone resins A1 to A5 obtained in the synthesis examples 1 to 5, (B) a polyorganohydrogensiloxane represented by an average unit formula: (SiO 2 )[H(CH 3 ) 2 SiO 1/2 )] 2 , (C) a vinyl dimer platinum complex, and adhesion imparting agents (D1), (D2) at compositions shown in Table 2 respectively and kneading them. Characteristics of the compositions were measured and results were shown in Table 2.
- Ad1 a ⁇ -methacryloxypropyltrimethoxysilane was used as the adhesion imparting agent (D1)
- a ⁇ -glycidoxypropyltrimethoxysilane brand name TSL8350, manufactured by Momentive Performance Material Japan LLC
- An H/Vi ratio in Table 2 shows the molar ratio between hydrogen atoms bonded to silicon atoms and vinyl groups bonded to silicon atoms in the (A) component and the (B) component except the adhesion imparting agent (D1).
- a silicone composition for sealing a semiconductor was obtained by compounding the silicone resin A1 obtained in the synthesis example 1, (B) a polyorganohydrogensiloxane (viscosity of 20 mPa ⁇ s) represented by an average unit formula: (SiO 2 )[H(CH 3 ) 2 SiO 1/2 )] 2 , and a polyorganohydrogensiloxane (viscosity of 10 mPa ⁇ s) represented by a formula: [H(CH 3 ) 2 SiO 1/2 ] 2 [(C 6 H 5 ) 2 SiO 2/2 )], and (C) a vinyl dimer platinum complex at a composition shown in Table 1 and kneading them. Characteristics of the composition were measured and results were shown in Table 1.
- a silicone composition for sealing a semiconductor was obtained by compounding the silicone resin A1 obtained in the synthesis example 1, (B) a polyorganohydrogensiloxane (viscosity of 20 mPa ⁇ s) represented by an average unit formula: (SiO 2 )[H(CH 3 ) 2 SiO 1/2 )] 2 , and a polyorganohydrogensiloxane (viscosity of 10 mPa ⁇ s) represented by a formula: [H(CH 3 ) 2 SiO 1/2 ] 2 [(C 6 H 5 ) 2 SiO 2/2 ], (C) a vinyl dimer platinum complex, and adhesion imparting agents (D1), (D2) at a composition shown in Table 2 and kneading them. Characteristics of the composition were measured and results were shown in Table 2.
- a silicone composition for sealing a semiconductor was obtained by compounding the silicone resin A6 obtained in the synthesis example 6, a linear polyorganosiloxane represented by a formula: (Me 2 ViSiO 1/2 ) 2 (Ph 2 SiO 2/2 ) 15 (Me 2 SiO 2/2 ) 20 , (B) a polyorganohydrogensiloxane represented by an average unit formula: (SiO 2 )[H(CH 3 ) 2 SiO 1/2 ] 2 , and (C) a vinyl dimer platinum complex at a composition shown in Table 3 and kneading them. Characteristics of the composition were measured and results were shown in Table 3.
- a silicone composition for sealing a semiconductor was obtained by compounding a linear polyorganosiloxane represented by a formula: (Me 2 ViSiO 1/2 ) 2 (Ph 2 SiO 2/2 ) 15 (Me 2 SiO 2/2 ) 20 , (B) a polyorganohydrogensiloxane represented by an average unit formula: (SiO 2 )[H(CH 3 ) 2 SiO 1/2 ] 2 , and (C) a vinyl dimer platinum complex at a composition shown in Table 3 and kneading them. Characteristics of the composition were measured and results were shown in Table 3.
- Silicone compositions for sealing a semiconductor were obtained by compounding the silicone resin A6 obtained in the synthesis example 6, a linear polyorganosiloxane represented by a formula: (Me 2 ViSiO 1/2 ) 2 (Ph 2 SiO 2/2 ) 15 (Me 2 SiO 2/2 ) 20 , (B) a polyorganohydrogensiloxane represented by an average unit formula: (SiO 2 )[H(CH 3 ) 2 SiO 1/2 ] 2 , (C) a vinyl dimer platinum complex, and adhesion imparting agents (D1), (D2) at compositions shown in Table 3 respectively and kneading them. Characteristics of the compositions were measured and results were shown in Table 3. Note that an H/Vi ratio in Table 3 shows the molar ratio between hydrogen atoms bonded to silicon atoms and vinyl groups bonded to silicon atoms in the (A) component and the (B) component except the adhesion imparting agent (D1).
- the compositions in the examples 1 to 12 can provide cured products with high hardness, and storage moduli of the cured produces are easily and greatly decreased by heating. Consequently, it is found that the use of the compositions makes it possible to relax the stress generated during heat curing and during moisture absorption reflow, and improve generation of cracks and peelings from the substrate so as to greatly improve the reliability of a semiconductor device such as an LED and the like.
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Abstract
The silicone composition for sealing a semiconductor, comprises: (A) 100 parts of a polyorganosiloxane having one or more alkenyl groups, obtained by reacting (a1) 60 to 99 parts of an organosiloxane containing at least a trifunctional siloxane unit not taking part in a hydrosilylation reaction, with (a2) 40 to 1 parts of an organosiloxane containing a bifunctional siloxane unit having an alkenyl group and/or a monofunctional siloxane unit having an alkenyl group; (B) an amount of a polyorganohydrogensiloxane having two or more hydrogen atoms having a viscosity at 25° C. of 1 to 1000 mPa·s so that an amount of the hydrogen atoms is 0.5 to 3.0 mol per mol of the alkenyl groups; and (C) a platinum-based catalyst, wherein a decrease in storage modulus of a cured product thereof from 25° C. to 50° C. is 40% or more.
Description
- This application is a continuation of prior International Application No. PCT/JP2011/006287 filed on Nov. 10, 2011, which is based upon and claims the benefit of priority from International Patent Application No. PCT/JP2011/003053 filed on May 31, 2011; the entire contents of all of which are incorporated herein by reference.
- The present invention relates to a silicone composition for sealing a semiconductor, and relates to a silicone composition suitable as a sealing material for sealing, for example, an optical semiconductor element such as an LED (light emitting diode).
- An LED lamp known as the optical semiconductor device has a structure in which an LED die-bonded to a support substrate is sealed with a sealing material composed of transparent resin. As the sealing material, a composition mainly containing an epoxy resin has been conventionally used.
- However, in use of an epoxy resin-based sealing material, due to an increase in heat generation and reduction of the wavelength of light in accordance with the recent increase in luminance of LED, cracking and yellowing have been likely to occur to cause a decrease in reliability. Hence, a composition containing silicone (polyorganosiloxane) as a main component is increasingly used because of its excellent heat resistance. In particular, an addition reaction type silicone composition is excellent in productivity because it cures in a short time by heating, and is thus suitable as the sealing material for LED. Further, a silicone cured product with high hardness is free from surface tack and thus has advantages such as capability of preventing adhesion of debris, adhesion between LEDs and the like.
- However, the silicone cured product with high hardness is more fragile than the epoxy resin and generates cracks or peelings from the substrate during curing or in a reliability test of moisture absorption reflow.
- As an adhesive, a potting agent, a protective coating agent, or an underfiller for the semiconductor element, there is proposed a curing silicone composition containing: (A) a solvent-soluble organopolysiloxane obtained by subjecting an organopolysiloxane having at least two alkenyl groups per molecule represented by an average composition formula: R1 aSiO(4−a)/2 (where R1 represents a monovalent hydrocarbon group and 0.1 to 40 mol % of all of R1s are alkenyl groups, a is a positive number satisfying 1≦a<2) to a hydrosilylation reaction, with a diorganopolysiloxane represented by a general formula: HR2 2Si (R2 2SiO)nR2 2SiH (where R2 represents a monovalent hydrocarbon group containing no aliphatic unsaturated bond, n is an integer of 0 to 1,000); (B) an organohydrogenpolysiloxane represented by an average composition formula: R2 bHcSiO(4−b−c)/2 (where R2 is as described above, b and c are positive numbers satisfying 0.7≦b≦2.1, 0.001≦c≦1.0, and 0.8≦b+c≦2.6); and (C) a hydrosilylation reaction catalyst (refer to JP-A 2009-242627 (KOKAI), for example).
- However, a cured product obtained from the silicon composition described in JP-A 2009-242627 (KOKAI) is not so large in decrease in modulus due to heating, and thus cannot sufficiently relax the stress caused by thermal expansion of the cured product itself and has difficulty in preventing generation of cracks. Further, the solvent-soluble organopolysiloxane being the (A) component is prepared by the hydrosilylation reaction using a catalyst of the same kind as the hydrosilylation reaction catalyst being the (C) component and thus has a disadvantage that the stability after mixed with the (B) component degrades because of a remnant of the catalyst used for the preparation of the (A) component.
- The present invention has been made to solve the problems and its object is to provide a silicone composition for sealing a semiconductor which forms a cured product having an appropriate modulus and can greatly decrease the modulus of the cured product by heating.
- As a result of earnest study to achieve the above object, the present inventors have found that a great decrease in storage modulus of the cured product by heating is possible by using, as a base polymer, a polyorganosiloxane which contains siloxane units not taking part in the hydrosilylation reaction including a trifunctional unit at a predetermined percentage and contains a bifunctional siloxane unit and/or a monofunctional siloxane unit containing an alkenyl group, and reached the present invention.
- Namely, a silicone composition for sealing a semiconductor of the present invention comprises: (A) 100 parts by weight of a polyorganosiloxane having one or more alkenyl groups, on average, per molecule, obtained by reacting (a1) 60 to 99 parts by weight of an organosiloxane containing at least a trifunctional siloxane unit represented by a formula: R1SiO3/2 (where R1 represents an alkyl group or an aryl group) and not taking part in a hydrosilylation reaction, with (a2) 40 to 1 parts by weight of an organosiloxane containing a bifunctional siloxane unit represented by a formula: R2 2SiO2/2 (where R2 represents an alkenyl group, an alkyl group, or an aryl group, and at least one of groups in a molecule is an alkenyl group) and/or a monofunctional siloxane unit represented by a formula: R2 3SiO1/2 (where R2 is as described above); (B) an amount of a polyorganohydrogensiloxane having two or more hydrogen atoms bonded to silicone atoms per molecule and having a viscosity at 25° C. of 1 to 1000 mPa·s so that an amount of the hydrogen atoms bonded to the silicon atoms is 0.5 to 3.0 mol per mol of the alkenyl groups bonded to silicon atoms in the (A) component; and (C) a catalyst amount of a platinum-based catalyst, wherein a decrease in storage modulus of a cured product thereof from 25° C. to 50° C. is 40% or more.
- According to the silicone composition with the above structure, a cured product having an appropriate storage modulus and greatly decreased in storage modulus by heating can be formed, so that when the silicone composition is used as a sealing material for a semiconductor element such as an LED, the cured product can relax the stress caused by thermal expansion due to heat generation from the semiconductor element or the like. Consequently, it is possible to prevent generation of cracks and decrease peelings from the substrate so as to greatly improve the reliability of a semiconductor device.
- Hereinafter, a silicone composition for sealing a semiconductor of the present invention will be described in detail.
- The (A) component is a main component for imparting a large decrease in storage modulus of a cured product by heating (decrease of 40% or more by heating from 25° C. to 50° C.).
- The (A) component is a polyorganosiloxane having one or more alkenyl groups, on average, per molecule, and obtained by reacting (a1) 60 to 99 parts by weight of an organosiloxane not taking part in a hydrosilylation reaction, with (a2) 40 to 1 parts by weight of an organosiloxane containing a bifunctional siloxane unit and/or a monofunctional siloxane unit, both the bifunctional siloxane unit and the monofunctional siloxane unit having an alkenyl group taking part in the hydrosilylation reaction. The (a2) component may contain one or both of the bifunctional siloxane unit having an alkenyl group and the monofunctional siloxane unit having an alkenyl group. Further, the (a2) component may contain a bifunctional siloxane unit and/or a monofunctional siloxane which contain no alkenyl group.
- The (a1) organosiloxane not taking part in the hydrosilylation reaction contains at least a trifunctional siloxane unit represented by a formula: R1SiO3/2. Further, the (a2) bifunctional siloxane unit having an alkenyl group is represented by a formula: R2 2SiO2/2, and the monofunctional siloxane unit having an alkenyl group is represented by a formula: R2 3SiO1/2.
- In these formulas, R1 represents an alkyl group or an aryl group, R2 represents an alkenyl group, an alkyl group, or an aryl group. Examples of the alkyl group include a methyl group, an ethyl group, a propyl group, an isopropyl group, a butyl group, an isobutyl group, a tert-butyl group, a hexyl group, a cyclohexyl group, an octyl group and the like, and the methyl group is more preferable. Examples of the aryl group include a phenyl group, a tolyl group and the like, and the phenyl group is more preferable. Examples of the alkenyl group include a vinyl group, an allyl group, a butenyl group, a pentenyl group, a hexenyl group and the like, and the vinyl group is more preferable.
- Among R2 contained in the bifunctional siloxane unit constituting (a2), at least one R2 is an alkenyl group, and among R2 contained in the monofunctional siloxane unit, at least one R2 is an alkenyl group. Further, the (A) component has one or more alkenyl groups, on average, per molecule. From the viewpoint of increasing the refractive index of a cured product, it is preferable that 20 to 70 mol %, and more preferably 40 to 60 mol %, of all of organic groups bonded to silicon atoms in the (a1) component are phenyl groups.
- Polyorganosiloxane being the (A) component is a polymer obtained, for example, by reacting a first organosiloxane represented by an average unit formula: (R1SiO3/2)a(R1 2SiO2/2)b(R1SiO(3−n)/2Yn)c(R1 2SiO(2−m)/2Ym)d, a second organosiloxane represented by a formula: (R2 3SiO1/2)2(R2 2SiO2/2)e, and a third organosiloxane represented by a formula: (R2 2SiO2/2)f, at a weight ratio (%) of g:h:i.
- Note that in the above formulas, R1 represents an alkyl group or an aryl group, R2 represents an alkenyl group, an alkyl group, or an aryl group. Further, Y represents an alkoxy group or a hydroxyl group. Examples of the alkyl group, the aryl group, and the alkenyl group are the same as those in the above, and they are preferably the methyl group, the phenyl group, and the vinyl group respectively. Examples of the alkoxy group include a methoxy group, an ethoxy group, a propoxy group, a butoxy group and the like, and the methoxy group and the ethoxy group are more preferable.
- Further, n is 1 or 2, and m is 1. More specifically, the siloxane unit represented by a formula: R1SiO(3−n)/2Yn is a bifunctional siloxane unit or a monofunctional siloxane unit, and the siloxane unit represented by a formula: R1 2SiO(2−m)/2Ym is a monofunctional siloxane unit.
- Further, a and b are positive numbers, c and d are 0 or positive numbers, which are numbers satisfying a+b+c+d=1.0, 0.2<(a+c)/(a+b+c+d)<0.8, 0.2<(b+d)/(a+b+c+d)<0.8, 0≦c/(a+b+c+d)<0.15, 0≦d/(a+b+c+d)<0.15. Further, e is 0 or a positive number and f is a positive number, which are numbers satisfying 0≦e≦100, and 3≦f≦20.
- Furthermore, g, h and i represent weight ratios (%) of first organosiloxane, second organosiloxane, and third organosiloxane respectively, and are numbers satisfying 60≦g≦99, 0≦h≦20, 0≦i≦20. They are numbers satisfying g+h+i=100 where h and i do not take 0 at the same time.
- The bonding position of the alkenyl group is not limited. The alkenyl group may be bonded to a silicon atom of R2 3SiO1/2 unit, bonded to a silicon atom of R2 2SiO2/2 unit in (R2 2SiO2/2)e, or bonded to a silicon atom of R2 2SiO2/2 unit in (R2 2SiO2/2)f. Polyorganosiloxane being the (A) component represented by the aforementioned unit formula only needs to have one or more alkenyl groups, on average, per molecule.
- The weight loss (weight loss on heating) of the (A) component after heating at 150° C. for 1 hour is preferably 3 weight % or less. In other words, the nonvolatile content after heating at 150° C. for 1 hour is preferably 97 weight % or more. The weight loss on heating of the (A) component exceeding 3 weight % is not preferable because of generation of cracking during and after curing.
- Polyorganosiloxane being the (A) component is preferably manufactured by subjecting, in a step (2), an organosiloxane (II) and/or an organosiloxane (III) which contain an alkenyl group to block polymerization or graft polymerization and equilibration reaction with a polyorganosiloxane (I) obtained in the following step (1).
- The step (1) is a step of polymerizing (condensing), in the presence of a basic catalyst, a polyorganosiloxane obtained by hydrolyzing or partially hydrolyzing a silane compound represented by a formula: R1SiX3 and R1 2SiX2 under acid condition.
- In the above formulas, R1 represents an alkyl group or an aryl group. Examples of the alkyl group and the aryl group are the same as those in the above, and they are preferably the methyl group and the phenyl group respectively. X represents a halogen group, an alkoxy group or a hydroxyl group. Examples of the halogen group include a chloro group, a bromo group, a fluoro group and the like, and the chloro group is more preferable. Examples of the alkoxy group include a methoxy group, an ethoxy group, a propoxy group, a butoxy group and the like, and the methoxy group and the ethoxy group are more preferable.
- As the basic catalyst, cesium hydroxide or the like can be used. Further, the heating temperature and time of the polymerizing (condensing) reaction are preferably set to 80° C. to 150° C. and three hours or longer.
- Thus, the organosiloxane (I) represented by an average unit formula: (R1SiO3/2)a(R1 2SiO2/2)b(R1SiO(3−n)/2Yn)c(R1 2SiO(2−m)/2Ym)d can be obtained. Note that all of a, b, n, m are positive numbers in the aforementioned ranges, and both of c and d are 0 or positive numbers in the aforementioned ranges.
- The step (2) is a step of subjecting the polyorganosiloxane (I) represented by the above average unit formula obtained in the step (1) to block polymerization or graft polymerization and equilibration reaction, in the presence of a basic catalyst, with a linear polyorganosiloxane (II) containing an alkenyl group and/or a cyclic polyorganosiloxane (III) containing an alkenyl group.
- Here, the linear polyorganosiloxane (II) is represented by a formula: (R2 3SiO1/2)2(R2 2SiO2/2)e, and the cyclic polyorganosiloxane (III) is represented by a formula: (R2 2SiO2/2)f. In the formulas, R2 represents an alkenyl group, an alkyl group, or an aryl group. Examples of the alkyl group, the aryl group, and the alkenyl group are the same as those in the above, and they are preferably the methyl group, the phenyl group, and the vinyl group respectively. The bonding position of the alkenyl group is not limited. At least one of the linear polyorganosiloxane (II) and the cyclic polyorganosiloxane (III) only needs to have the alkenyl group.
- As the basic catalyst, cesium hydroxide or the like can be used. Further, the heating temperature and time of the block polymerization and equilibration reaction or graft polymerization and equilibration reaction are preferably set to 130° C. to 150° C. and three hours or longer.
- The (B) component is a cross-linking agent which is a polyorganohydrogensiloxane containing two or more, preferably, three or more hydrogen atoms bonded to silicon atoms per molecule (Si—H group). The number of silicon atoms per molecule is preferably 2 to 50, and more preferably 4 to 20.
- As the (B) component, the one represented by an average composition formula: R3 xHySiO[4−(x+y)]/2 is used. In the formula, R3 represents a substituted or unsubstituted monovalent hydrocarbon group except an alkenyl group. Examples of R3 include alkyl groups such as a methyl group, an ethyl group, a propyl group, an isopropyl group, a butyl group, an isobutyl group, a tert-butyl group, a hexyl group, a cyclohexyl group, and an octyl group; aryl groups such as a phenyl group and a tolyl group; aralkyl groups such as a benzyl group and a phenylethyl group; and any of these groups with part or all of hydrogen atoms being substituted by halogen atoms such as fluorine, chlorine, or bromine or by a cyano group, for example, hydrocarbon groups such as a chloromethyl group, a bromoethyl group, a trifluoropropyl group, a cyanoethyl group and the like having a carbon number of 1 to 12. Among them, an alkyl group having a carbon number of 1 to 4 is preferable and a methyl group is more preferable in view of easiness of synthesis and cost.
- Both x and y are positive numbers satisfying 0.8≦x≦2.2, 0.002≦y≦1, 0.8≦x+y≦3, and more preferably satisfying 1≦x≦2.2, 0.01≦y≦1, 1.8≦x+y≦2.5.
- The hydrogen atom may be bonded to a silicon atom at a terminal of a chain, bonded to a silicon atom at the middle of the chain, or bonded to both of them.
- The molecular structure of the (B) component may be any of a straight chain, a branched chain, a cyclic chain and a three-dimensional network, and is preferably a three-dimensional network having a R3 2HSiO1/2 unit (R3 is as described above) and a SiO4/2 unit.
- The viscosity of the (B) component at 25° C. is preferably equal to or less than 1000 mPa·s, and more preferably in a range of 1 to 500 mPa·s.
- A compounding amount of the (B) component is set so that an amount of hydrogen atoms bonded to silicon atoms is 0.5 to 3.0 mol, more preferably, 0.7 to 2.0 mol, per mol of alkenyl groups bonded to the silicon atoms in the (A) component (alkenyl groups bonded to the silicon atoms in (a2)). If the compounding amount is less than 0.5 mol, sufficient crosslinking cannot be achieved On the other hand, if the compounding amount exceeds 3.0 mol, unreacted Si—H groups remain and tend to cause temporal change in physical property after curing.
- A platinum-based catalyst being the (C) component is a catalyst to accelerate the hydrosilylation reaction between the alkenyl group in the (A) component and the hydrogen atom bonded to the silicon atom in the (B) component to accelerate curing of the composition. As the (C) component, a well-known platinum-based catalyst used for the hydrosilylation reaction can be used. Examples of the platinum-based catalyst include, platinum black, platinum chloride, chloroplatinic acid, a reactant of chloroplatinic acid and monohydric alcohol, complexes of chloroplatinic acid with olefins or vinylsiloxane, platinum bisacetoacetate and the like.
- A compounding amount of the (C) component only needs to be an amount necessary for curing, and can be appropriately adjusted according to a desired curing rate or the like. Generally, the compounding amount may be, in terms of platinum element, from 0.5 to 300 ppm relative to the total weight of the composition and is preferably from 1 to 20 ppm in view of transparency of the cured product and cost.
- In the silicone composition for sealing a semiconductor of the present invention, (D) an adhesion imparting agent can be compounded. As the (D) adhesion imparting agent, an organosilane or an organosiloxane oligomer having a number of silicon atoms of 2 to 50, and preferably 4 to 20 can be used. Examples of the (D) adhesion imparting agent are alkoxysilanes including: epoxy-functional group-containing alkoxysilanes such as γ-glycidoxypropyltrimethoxysilane, β-(3,4-epoxycyclohexyl)ethyltrimethoxysilane and the like; alkenyl group-containing alkoxysilanes such as vinyltrimethoxysilane, vinyltriethoxysilane, vinyltri(methoxyethoxy) silane and the like; amino group-containing alkoxysilanes such as γ-aminopropyltrimethoxysilane, γ-aminopropyltriethoxysilane, (aminoethyl)-γ-aminopropyltrimethoxysilane, N-β(aminoethyl)-γ-aminopropylmethyldimethoxysilane, N-phenyl-γ-aminopropyltrimethoxysilane and the like; acryl group or methacryl group-containing alkoxysilanes such as γ-methacryloxypropyltrimethoxysilane, γ-acryloxypropyltrimethoxysilane and the like; and a mercapto group-containing alkoxysilane such as mercaptopropyltrimethoxysilane and the like.
- Further, examples of the organosiloxane oligomer include a 1:1 addition reaction product of a SiH group-containing siloxane oligomer represented by:
- and γ-methacryloxypropyltrimethoxysilane represented by a formula: CH2═C(CH3) COO(CH2)3Si (OCH3)3.
- A compounding amount of the (D) adhesion imparting agent is preferably set to 10 parts by weight or less with respect to 100 parts by weight of the (A) component. The compounding amount exceeds 10 parts by weight leads to diseconomy in view of cost.
- The silicone composition for sealing a semiconductor of the present invention can contain a reaction inhibitor, a reinforcing or non-reinforcing fine particle filler, a dye, a pigment, a flame retardant, a heat resistance improver, an anti-oxidation degradation agent, a wavelength adjusting agent, a solvent and so on as needed in a range not affecting the transparency after curing and not impairing the object of the present invention.
- Examples of the manufacturing method of the silicone composition for sealing a semiconductor of the present invention, in which the order of addition of the components is not particularly limited, include a method of kneading the basic components (A) to (C) and the above-described optional components using a well-known kneading machine. It is also adoptable to store the silicone composition as two separate liquids and mix the two liquids before use. In this case, a mixture obtained by mixing the (A) component and the (C) component is regarded as a first liquid and a mixture obtained by mixing the (B) component and the other optional components (for example, a reaction inhibitor and so on) is regarded as a second liquid, and both of the liquids can be mixed together for use. Examples of the kneading machine include a planetary mixer, a three-roll, a kneader, a Shinagawa mixer and the like, which are provided with heating means and cooling means as needed and can be used independently or in combination.
- The silicone composition for sealing a semiconductor of the present invention is preferably liquid and has a viscosity of 0.5 to 50 Pa·s at 25° C. If the viscosity exceeds 50 Pa·s, for example, workability when potting to an LED is deteriorated. On the other hand, if the viscosity is less than 0.5 Pa·s, liquid dripping is likely to occur in potting.
- A method of curing the silicone composition for sealing a semiconductor is not particularly limited. Curing proceeds at room temperature or by heating at 50 to 200° C. It is preferable to perform heating in order to rapidly cure the silicone composition. In the case of heating, the heating time can be appropriately adjusted according to the heating temperature. The cured product is in the form of hard rubber or flexible resin.
- The storage modulus of the cured product of the silicone composition of the present invention decreases 40% or more by heating from 25° C. to 50° C., preferably decreases 70% or more. Specifically, the storage modulus of the cured product at 50° C. is lower by 40% or more, and more preferably 70% or more, than the storage modulus at 25° C. Accordingly, when the silicone composition is used as a sealing material of a semiconductor element, the stress caused by thermal expansion due to generation of heat from the semiconductor element or the like can be relaxed to prevent cracks and peelings from a substrate. A cured product which decreases in storage modulus due to heating but shows a decreasing rate of the storage modulus is less than 40%, or a cured product which increases in storage modulus due to heating cannot prevent cracks and peelings from a substrate because it cannot sufficiently relax the stress caused by thermal expansion when used as the sealing material of the semiconductor element.
- The storage modulus of the cured product can be appropriately controlled by changing the percentage (weight %) of the (a1) siloxane unit not taking part in the hydrosilylation reaction in the (A) component or the composition of the components (A) to (C). For example, it can be adjusted so that the storage modulus at 25° C. is 1×106 to 2×107 Pa, the storage modulus decreases 40 to 98% and more preferably 70 to 80% at 50° C. Note that the storage modulus can be measured by a viscoelasticity measuring apparatus. If the percentage of decrease in storage modulus at 50° C. is less than 40%, it is impossible to sufficiently prevent generation of cracks and peelings from a substrate because the stress caused by thermal expansion cannot be relaxed.
- Hereinafter, the present invention will be described with reference to examples but is not limited to the described examples. In the following description, “Me” represents a methyl group, “Ph” represents a phenyl group, and “Vi” represents a vinyl group. Further, the viscosity is a value at 25° C., and a weight average molecular weight is a value in terms of standard polystyrene measured by a gel permeation chromatography (GPC) using THF (tetrahydrofuran) as a solvent. A measurement and evaluation method of characteristics of silicone compositions obtained in examples and comparative examples is described below.
- The hardness was measured at 23° C. by a type A hardness meter.
- The silicone composition (a diameter of 8 mm, a thickness of 1 mm) was set in an ARES viscoelasticity measuring device (manufactured by Reometric Scientific, Inc.) and raised in temperature by 50° C. per minute, then cured at 150° C. for 1 hour, and cooled at a rate of 5° C. per minute in a temperature range of 150° C. to −50° C., and its storage modulus was measured under conditions of a torsion strain of 0.5% and a frequency of 1 Hz.
- The silicone composition was filled a PPA (polyphthalamide) resin package (5×5×1 mm) using a syringe. The silicone composition was cured by heating at 100° C. for 3 hours and then heating at 150° C. for 1 hour. After cooling, the numbers of cracks and peelings were investigated using a microscope. Thereafter, the composition was subjected to moisture absorption at 85° C. and 85% RH for 3 hours and then heated in a reflow oven (Max 260° C.). After cooling, the number of cracks and peelings were investigated using a microscope.
- A mixture of 129 g (1 mol) of (Aa1) dimethyldichlorosilane, 255 g (1 mol) of (Aa2) diphenyldichlorosilane, and 212 g (1 mol) of (Aa3) phenyltrichlorosilane was subjected to cohydrolysis by dripping a methanol solution composed of 38 g of water and 237 g of methanol into the mixture. After the dripping, a resultant was heated at a reflux temperature of 60 to 70° C. for 30 minutes, and the cohydrolysis was completed. Thereafter, a reaction mixture was cooled and stirred for 15 minutes with addition of 254 g of methanol and then kept still standing for 30 minutes for liquid separation. A resultant was separated into a mixed solution of hydrochloric acid and methanol at an upper layer and a reaction product at a lower layer.
- Subsequently, 254 g of methanol was added to the reaction product at the lower layer, and a resultant was subjected to heating and distillation to distill away the hydrochloric acid in the reaction product together with methanol. Thus, a silicone resin AA having methoxy groups represented by an average unit formula: (Me2SiO2/2)0.30(Me2SiO1/2OMe)0.03(Ph2SiO2/2)0.30(Ph2SiO1/2OMe)0.04(PhSiO3/2)0.27{PhSiO1/2 (OMe)2}0.03(PhSiO2/2OMe)0.03 was obtained.
- In the average unit formula representing the silicone resin AA, (aa1) a unit: (Me2SiO2/2)0.30(Me2SiO1/2OMe)0.03 was generated from the starting material (Aa1), (aa2) a unit: (Ph2SiO2/2)0.30(Ph2SiO1/2OMe)0.04 was generated from the starting material (Aa2), (aa3) a unit: (PhSiO3/2)0.27{PhSiO1/2 (OMe)2}0.03(PhSiO2/2OMe)0.03 was generated from the starting material (Aa3). The molar ratio of the units is (aa1):(aa2):(aa3)=0.33:0.34:0.33≈1:1:1.
- 400 g of xylene, 214.2 g (1.4 mol) of methyltrichlorosilane, 34.1 g (0.26 mol) of dimethyldichlorosilane, 282.4 g (1.1 mol) of diphenyldichlorosilane, and 454.0 g (2.1 mol) of phenyltrichlorosilane were charged into a flask and mixed to prepare a xylene solution of organosilane. Further, 1950 g of ion-exchanged water, 850 g of acetone, and 245 g of methanol were charged into another flask to prepare a mixed solution. While this mixed solution was being stirred, the xylene solution of organosilane was dripped into the mixed solution over 30 minutes, the stirring was continued for 10 minutes after the finish of the dripping for hydrolysis. Thereafter, a resultant was transferred to a separating funnel and kept still standing for 45 minutes for liquid separation. The resultant was separated into a xylene solution of silicone resin having silanol groups at an upper layer and a hydrochloric acid solution at a lower layer.
- Subsequently, the hydrochloric acid solution at the lower layer was removed, and the xylene solution of silanol group-containing resin at the upper layer was returned back to the flask and heated with 1200 g of ion-exchanged water added thereto, and a mixture was subjected to a heat water-washing operation at a reflux temperature (70 to 80° C.) thereof for 10 minutes. Thereafter, the mixture was returned back to the separating funnel and kept still standing for 45 minutes to separate into a xylene solution of silanol group-containing resin at an upper layer and a hydrochloric acid solution at a lower layer. The same operation was repeated, and it was confirmed that the hydrochloric acid content in the xylene solution of silanol group-containing resin reached 0.1 ppm or less.
- Thus obtained xylene solution of silanol group-containing resin was heated under a reduced pressure condition to distill away a solvent, and a non-volatile content (the non-volatile content was measured by heating at 105° C. for 3 hours) was concentrated to 65 weight %, and xylene was then added thereto to adjust the non-volatile content to 60 weight %. Thus, a silicone resin BB having silanol groups represented by an average unit formula: (Me2SiO2/2)0.04(Me2SiO1/2OH)0.01(MeSiO3/2)0.23(MeSiO2/2OH)0.03{MeSiO1/2 (OH)2}0.03(Ph2SiO2/2)0.20(Ph2SiO1/2OH)0.03(PhSiO3/2)0.37(PhSiO2/2OH)0.03{PhSiO1/2(OH)2}0.03 was obtained.
- 700 g of xylene was added to 255 g of the intermediate product AA (silicone resin having methoxy groups) for dilution, and a dilution was subjected to hydrolysis by adding 0.6 g of cesium hydroxide solution with a concentration of 50 weight % (hereinafter, indicated only by 50%) and 200 g of water thereto and heating. The reaction was continued until characteristic absorption due to the methoxy groups at a wave number of 2800 cm−1 disappeared in infrared absorption spectrum measurement. Thus, a xylene solution of a silicone resin polymer having no methoxy group represented by an average molecular formula (unit formula) (Me2SiO2/2)0.33 (Ph2SiO2/2)0.34 (PhSiO3/2)0.33 was obtained.
- To the reaction product obtained in the first step, 15 g of polyphenylsiloxane having vinyl groups at both terminals (Vi amount of 0.43 mmol/g) and 30 g of cyclic polymethylvinylsiloxane (Vi amount of 11.6 mmol/g) were added, and a resultant was reacted at a xylene reflux temperature for 5 hours for graft polymerization and equilibrium. After cooling, 0.3 g of trimethylchlorosilane was added for neutralization, an operation (water-washing operation) of washing the xylene solution with water and removing a water layer by a liquid separation was performed. After the water layer was neutralized by repeating the water-washing operation, water remaining in a xylene layer was removed by subjecting the water and xylene to azeotropy. After the xylene layer dehydrated was filtrated, a silicone resin A1 was obtained by distilling xylene away under reduced pressure.
- The silicone resin A1 was obtained by reacting an organosiloxane G represented by an average unit formula: (Me2SiO2/2)0.33 (Ph2SiO2/2)0.34 (PhSiO3/2)0.33, an organosiloxane H represented by a formula: (Me2ViSiO1/2)2 (Ph2SiO2/2)15 (Me2SiO2/2)20, and an organosiloxane I represented by a formula: (MeViSiO2/2)4 at a weight ratio (%) of G:H:I=85:5:10 in terms of charge amount base.
- In the second step, a polyphenylsiloxane having vinyl groups at both terminals and a cyclic methylvinylsiloxane split and graft-polymerized with the reaction product obtained in the first step, whereby the silicone resin A1 was obtained.
- The silicone resin A1 had a viscosity of 120 Pa·s, a non-volatile content measured after heated at 150° C. for 1 hour of 99.0 weight % (hereinafter, indicated only by %, and meaning a weight loss on heating of 1.0%), a weight average molecular weight of 1056, and a degree of dispersion of 1.35. The degree of dispersion is a numerical value representing the molecular weight distribution and obtained by weight average molecular weight (Mw)/number average molecular weight (Mn). The degree of dispersion means that as it becomes closer to 1, the molecular weight distribution is narrower. Note the number of vinyl groups per molecule in the silicone resin A1 is 1.2 on average.
- 300 g of xylene was added to 595 g of the intermediate product AA (silicone resin having methoxy groups) for dilution, and a dilution was subjected to hydrolysis by adding 0.7 g of 50% cesium hydroxide solution and 200 g of water thereto and heating. The reaction was continued until characteristic absorption due to the methoxy groups at 2800 cm−1 disappeared, in infrared absorption spectrum measurement.
- To the reaction product obtained in the first step, 70 g of polyphenylsiloxane having vinyl groups at both terminals (Vi amount of 0.43 mmol/g) and 35 g of cyclic polymethylvinylsiloxane (Vi amount of 11.6 mmol/g) were added, and a resultant was reacted at a xylene reflux temperature for 5 hours for graft polymerization and equilibrium. After cooling, 0.5 g of trimethylchlorosilane was added for neutralization, an operation (water-washing operation) of washing the xylene solution with water and removing a water layer by a liquid separation was performed. After the water layer was neutralized by repeating the water-washing operation, water remaining in a xylene layer was removed by subjecting the water and xylene to azeotropy. Thus, after the xylene layer dehydrated was filtrated, a silicone resin A2 was obtained by distilling xylene away under reduced pressure.
- The silicone resin A2 was obtained by reacting an organosiloxane G represented by an average unit formula: (Me2SiO2/2)0.33 (Ph2SiO2/2)0.34 (PhSiO3/2)0.33, an organosiloxane H represented by a formula: (Me2ViSiO1/2)2(Ph2SiO2/2)15(Me2SiO2/2)20, and an organosiloxane I represented by a formula: (MeViSiO2/2)4 at a weight ratio (%) of G:H:I=85:10:5 in terms of charge amount base.
- In the second step, a polyphenylsiloxane having vinyl groups at both terminals and a cyclic methylvinylsiloxane split and graft-polymerized with the reaction product obtained in the first step, whereby the silicone resin A2 was obtained.
- The obtained silicone resin A2 had a viscosity of 7500 Pa·s, a non-volatile content measured after heated at 150° C. for 1 hour of 99.0%, a weight average molecular weight of 2950, and a degree of dispersion of 2.05. Note the number of vinyl groups per molecule in the silicone resin A2 is 1.8 on average.
- 30 g of cyclic polymethylvinylsiloxane (Vi amount of 11.6 mmol/g) was added to 270 g of the intermediate product AA (silicone resin having methoxy groups), and then 700 g of xylene was added to them for dilution. 0.3 g of 50% cesium hydroxide solution was added to a dilution, and a resultant was heated and reacted at a xylene reflux temperature for 5 hours for block polymerization and equilibrium. After cooling, 0.3 g of trimethylchlorosilane was added for neutralization, an operation (water-washing operation) of washing the xylene solution with water and removing a water layer by a liquid separation operation was performed. After the water layer was neutralized by repeating the water-washing operation, water remaining in a xylene layer was removed by subjecting the water and xylene to azeotropy. Thus, after the xylene layer dehydrated was filtrated, a silicone resin A3 was obtained by distilling xylene away under reduced pressure.
- The silicone resin A3 was obtained by reacting an organosiloxane G represented by an average unit formula: (Me2SiO2/2)0.30(Me2SiO1/2OMe)0.03(Ph2SiO2/2)0.30(Ph2SiO1/2OMe)0.04(Ph2SiO3/2) 0.27{PhSiO1/2 (OMe)2}0.03(PhSiO2/2OMe)0.03, and an organosiloxane I represented by a formula: (MeViSiO2/2)4 at a weight ratio (%) of G:I=90:10 in terms of charge amount base.
- The obtained silicone resin A3 had a viscosity of 0.6 Pa·s, a non-volatile content measured after heated at 150° C. for 1 hour of 99.0%, a weight average molecular weight of 870, and a degree of dispersion of 1.24. Note the number of vinyl groups per molecule in the silicone resin A3 is 1.0 on average.
- 30 g of cyclic polymethylvinylsiloxane (Vi amount of 11.6 mmol/g) was added to 450 g (270 g of effective resin content) of an intermediate product BB (silicone resin having silanol groups), and 230 g of xylene was added to them for dilution. 0.3 g of 50% cesium/potassium hydroxide solution was added to a dilution, and a resultant was heated and reacted at a xylene reflux temperature for 5 hours for block polymerization and equilibrium. After cooling, 0.7 g of trimethylchlorosilane was added for neutralization, an operation (water-washing operation) of washing the xylene solution with water and removing a water layer by a liquid separation was performed. After the water layer was neutralized by repeating the water-washing operation, water remaining in a xylene layer was removed by subjecting the water and xylene to azeotropy. Thus, after the xylene layer dehydrated was filtrated, a silicone resin A4 was obtained by distilling xylene away under reduced pressure.
- The silicone resin A4 was obtained by reacting an organosiloxane G represented by an average unit formula: (Me2SiO2/2)0.05 (MeSiO3/2)0.29 (Ph2SiO2/2)0.23(Ph2SiO3/2)0.43, and an organosiloxane I represented by a formula: (MeViSiO2/2)4 at a weight ratio (%) of G:I=90:10 in terms of charge amount base.
- The silicone resin A4 had a non-volatile content measured after heated at 150° C. for 1 hour of 99.0%, a weight average molecular weight of 1550, and a degree of dispersion of 1.49. Note the number of vinyl groups per molecule in the silicone resin A4 is 1.8 on average.
- 300 g of xylene was added to 490 g of the intermediate product AA (silicone resin having methoxy groups) for dilution, and a dilution was subjected to hydrolysis by adding 1.4 g of 50% cesium/potassium hydroxide solution and 200 g of water thereto and heating. The hydrolysis reaction was continued until characteristic absorption due to the methoxy groups at 2800 cm−1 disappeared in infrared absorption spectrum measurement.
- To the reaction product obtained in the first step, 140 g of polyphenylsiloxane having vinyl groups at both terminals (Vi amount of 0.43 mmol/g) and 70 g of cyclic polymethylvinylsiloxane (Vi amount of 11.6 mmol/g) were added, and a resultant was reacted at a xylene reflux temperature for 5 hours for graft polymerization and equilibrium. After cooling, 1.3 g of trimethylchlorosilane was added for neutralization, an operation (water-washing operation) of washing the xylene solution with water and removing a water layer by a liquid separation was performed. After the water layer was neutralized by repeating the water-washing operation, water remaining in a xylene layer was removed by subjecting the water and xylene to azeotropy. Thus, after the xylene layer dehydrated was filtrated, a silicone resin A5 was obtained by distilling xylene away under reduced pressure.
- The silicone resin A5 was obtained by reacting an organosiloxane G represented by an average unit formula: (Me2SiO2/2)0.33 (Ph2SiO2/2)0.34 (PhSiO3/2)0.33, an organosiloxane H represented by a formula: (Me2ViSiO1/2)2 (Ph2SiO2/2)15 (Me2SiO2/2)20, and an organosiloxane I represented by a formula: (MeViSiO2/2)4 at a weight ratio (%) of G:H:I=70:20:10 in terms of charge amount base.
- In the second step, a polyphenylsiloxane having vinyl groups at both terminals and a cyclic methylvinylsiloxane split and graft-polymerized with the reaction product obtained in the first step, whereby the silicone resin A5 was obtained.
- The silicone resin A5 had a viscosity of 100 Pa·s, a non-volatile content measured after heated at 150° C. for 1 hour of 98.0%, a weight average molecular weight of 3370, and a degree of dispersion of 2.40. Note the number of vinyl groups per molecule in the silicone resin A5 is 4.2 on average.
- 800 g of xylene and 2000 g of ion-exchanged water were charged into a flask and heated while being stirred until reaching 80° C. Then, a mixed solution of 356.1 g of phenyltrichlorosilane, 688.5 g of diphenyldichlorosilane, 86.4 g of vinylmethyldichlorosilane, and 6.6 g of dimethyldichlorosilane was dripped into the above over 3 hours and subjected to hydrolysis at 80° C. Thereafter, a resultant was transferred to a separating funnel and kept still standing for 45 minutes for liquid separation. The resultant was separated into a xylene solution of silicone resin at an upper layer and a hydrochloric acid solution at a lower layer.
- Subsequently, the hydrochloric acid solution at the lower layer was removed, and the xylene solution of silicone resin at the upper layer was returned back to the flask and heated with 1000 g of ion-exchanged water added thereto, and a resultant was subjected to a water-washing operation while being heated at 70 to 80° C. for 10 minutes. Then, the mixture was transferred to the separating funnel and kept still standing for 45 minutes to separate into a xylene solution of silicone resin at an upper layer and a hydrochloric acid solution at a lower layer. The same operation was repeated, and it was confirmed that the hydrochloric acid content in the xylene solution of silicone resin reached 0.1 ppm or less. Thereafter, the xylene amount was controlled to adjust the non-volatile content to 50%.
- 1400 g (700 g of effective resin content) of the obtained xylene solution of silicone resin was mixed with 150 g of hexamethyldisilazane and 90 g of trimethylchlorosilane, and a mixture was subjected to silylation of hydroxyl groups at 80° C. The reaction was continued until characteristic absorption due to the hydroxyl groups near 3600 cm−1 disappeared in infrared absorption spectrum measurement. Thereafter, 500 g of water was added to a reaction solution, and a resultant was subjected to a water-washing operation while being heated at 70 to 80° C. for 10 minutes. Then, the mixture was transferred to the separating funnel and kept still standing for 45 minutes to separate into a xylene solution of silicone resin at an upper layer and a basic solution at a lower layer. The same operation was repeated. After the water layer was neutralized, water remaining in a xylene layer was removed by subjecting the water and xylene to azeotropy. Thus, after the xylene layer dehydrated was filtrated, xylene was distilled away under reduced pressure, whereby a silicone resin A6 represented by an average unit formula: (Me2SiO2/2)0.01(MeViSiO2/2)0.11(Ph2SiO2/2)0.48(PhSiO3/2)0.27(Me3SiO1/2)0.13 was obtained.
- The silicone resin A6 had a viscosity of 200 Pa·s, a non-volatile content measured after heated at 150° C. for 1 hour of 99.4%, a weight average molecular weight of 1905, and a degree of dispersion of 1.52. Note the number of vinyl groups per molecule in the silicone resin A6 is 1.4 on average.
- A silicone composition for sealing a semiconductor was obtained by adding (B) 9 parts by weight of a polyorganohydrogensiloxane having a viscosity of 20 mPa·s and represented by an average unit formula: (SiO2)[H(CH3)2SiO1/2)]2 and (C) 3 ppm of a vinyl dimer platinum complex in terms of platinum amount to 100 ppm by weight of the silicone resin A1 obtained in the synthesis example 1 and kneading them. Characteristics of the composition were measured and results were shown in Table 1. Note that, in Table 1, an H/Vi ratio shows the molar ratio between hydrogen atoms bonded to silicon atoms and vinyl groups bonded to silicon atoms in the (A) component and the (B) component.
- Further, in Table 1 and later-described Table 2 and Table 3, MH 2Q is a polyorganohydrogensiloxane represented by an average unit formula: (SiO2)[H(CH3)2SiO1/2)]2 and Mh 2DPh2 is a polyorganohydrogensiloxane represented by a formula:
- [H(CH3)2SiO1/2)]2 [(C6H5)2SiO2/2)]. Further, MViDPh 15D20MVi is a linear polyorganosiloxane represented by a formula: (Me2ViSiO1/2)2 (Ph2SiO2/2)15 (Me2SiO2/2)20 used in later-described comparative examples 1 to 4.
- Silicone compositions for sealing a semiconductor were obtained by compounding the silicone resins A2 to A5 obtained in the synthesis examples 2 to 5, (B) a polyorganohydrogensiloxane represented by an average unit formula: (SiO2)[H(CH3)2SiO1/2)]2, and (C) a vinyl dimer platinum complex at compositions shown in Table 1 respectively and kneading them. Characteristics of the compositions were measured and results were shown in Table 1.
- Silicone compositions for sealing a semiconductor were obtained by compounding the silicone resins A1 to A5 obtained in the synthesis examples 1 to 5, (B) a polyorganohydrogensiloxane represented by an average unit formula: (SiO2)[H(CH3)2SiO1/2)]2, (C) a vinyl dimer platinum complex, and adhesion imparting agents (D1), (D2) at compositions shown in Table 2 respectively and kneading them. Characteristics of the compositions were measured and results were shown in Table 2.
- Note that a 1:1 addition reaction product of a SiH group-containing siloxane oligomer represented by a formula:
- and a γ-methacryloxypropyltrimethoxysilane was used as the adhesion imparting agent (D1), and a γ-glycidoxypropyltrimethoxysilane (brand name TSL8350, manufactured by Momentive Performance Material Japan LLC) was used as the adhesion imparting agent (D2). An H/Vi ratio in Table 2 shows the molar ratio between hydrogen atoms bonded to silicon atoms and vinyl groups bonded to silicon atoms in the (A) component and the (B) component except the adhesion imparting agent (D1).
- A silicone composition for sealing a semiconductor was obtained by compounding the silicone resin A1 obtained in the synthesis example 1, (B) a polyorganohydrogensiloxane (viscosity of 20 mPa·s) represented by an average unit formula: (SiO2)[H(CH3)2SiO1/2)]2, and a polyorganohydrogensiloxane (viscosity of 10 mPa·s) represented by a formula: [H(CH3)2SiO1/2]2[(C6H5)2SiO2/2)], and (C) a vinyl dimer platinum complex at a composition shown in Table 1 and kneading them. Characteristics of the composition were measured and results were shown in Table 1.
- A silicone composition for sealing a semiconductor was obtained by compounding the silicone resin A1 obtained in the synthesis example 1, (B) a polyorganohydrogensiloxane (viscosity of 20 mPa·s) represented by an average unit formula: (SiO2)[H(CH3)2SiO1/2)]2, and a polyorganohydrogensiloxane (viscosity of 10 mPa·s) represented by a formula: [H(CH3)2SiO1/2]2 [(C6H5)2SiO2/2], (C) a vinyl dimer platinum complex, and adhesion imparting agents (D1), (D2) at a composition shown in Table 2 and kneading them. Characteristics of the composition were measured and results were shown in Table 2.
- A silicone composition for sealing a semiconductor was obtained by compounding the silicone resin A6 obtained in the synthesis example 6, a linear polyorganosiloxane represented by a formula: (Me2ViSiO1/2)2 (Ph2SiO2/2)15 (Me2SiO2/2)20, (B) a polyorganohydrogensiloxane represented by an average unit formula: (SiO2)[H(CH3)2SiO1/2]2, and (C) a vinyl dimer platinum complex at a composition shown in Table 3 and kneading them. Characteristics of the composition were measured and results were shown in Table 3.
- A silicone composition for sealing a semiconductor was obtained by compounding a linear polyorganosiloxane represented by a formula: (Me2ViSiO1/2)2 (Ph2SiO2/2)15 (Me2SiO2/2)20, (B) a polyorganohydrogensiloxane represented by an average unit formula: (SiO2)[H(CH3)2SiO1/2]2, and (C) a vinyl dimer platinum complex at a composition shown in Table 3 and kneading them. Characteristics of the composition were measured and results were shown in Table 3.
- Silicone compositions for sealing a semiconductor were obtained by compounding the silicone resin A6 obtained in the synthesis example 6, a linear polyorganosiloxane represented by a formula: (Me2ViSiO1/2)2 (Ph2SiO2/2)15 (Me2SiO2/2)20, (B) a polyorganohydrogensiloxane represented by an average unit formula: (SiO2)[H(CH3)2SiO1/2]2, (C) a vinyl dimer platinum complex, and adhesion imparting agents (D1), (D2) at compositions shown in Table 3 respectively and kneading them. Characteristics of the compositions were measured and results were shown in Table 3. Note that an H/Vi ratio in Table 3 shows the molar ratio between hydrogen atoms bonded to silicon atoms and vinyl groups bonded to silicon atoms in the (A) component and the (B) component except the adhesion imparting agent (D1).
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TABLE 1 Example Example Example Example Example Example 1 2 3 4 5 11 Compo- (A) Silicone resin A1 100 80 100 sition component Silicone resin A2 80 (parts Silicone resin A3 20 55 20 by Silicone resin A4 45 weight) Silicone resin A5 100 Silicone resin A6 MViDPh 15D20MVi (B) MH 2Q 9 7 15 12 19 18 MH 2DPh2 9 (C) Pt catalyst 3 ppm 3 ppm 3 ppm 3 ppm 3 ppm 3 ppm H/Vi ratio in (A) and (B) 0.8 1.0 1.3 1.0 1.7 2.0 Charac- Hardness (Type A) 80 70 85 80 90 85 teristics Storage modulus 25° C. 2 × 106 1 × 106 1 × 107 4 × 106 2 × 107 9 × 106 (Pa) 50° C. 5 × 104 2 × 105 2 × 106 2 × 106 2 × 106 3 × 105 60° C. 4 × 104 2 × 105 2 × 106 2 × 106 2 × 106 3 × 105 100° C. 4 × 104 3 × 105 3 × 106 2 × 106 3 × 106 3 × 105 Decrease in modulus observed observed observed observed observed observed Number of After curing 0 0 0 0 0 0 generated cracks After moisture 0 0 0 0 0 0 and peelings absorption reflow -
Table 2 Example Example Example Example Example Example 6 7 8 9 10 12 Compo- (A) Silicone resin A1 100 80 100 sition component Silicone resin A2 80 (parts Silicone resin A3 20 55 20 by Silicone resin A4 45 weight) Silicone resin A5 100 Silicone resin A6 MViDPh 15D20MVi (B) MH 2Q 9 7 15 12 19 18 MH 2DPh2 9 (C) Pt catalyst 3 ppm 3 ppm 3 ppm 3 ppm 3 ppm 3 ppm Adhesion imparting agent D1 0.9 0.9 0.9 0.9 0.9 0.9 Adhesion imparting agent D2 0.3 0.3 0.3 0.3 0.3 0.3 H/Vi ratio in (A) and (B) 0.8 1.0 1.3 1.0 1.7 2.0 Charac- Hardness (Type A) 78 68 84 79 88 83 teristics Storage modulus 25° C. 2 × 106 1 × 106 1 × 107 4 × 106 2 × 107 9 × 106 (Pa) 50° C. 5 × 104 2 × 105 2 × 106 2 × 106 2 × 106 3 × 105 60° C. 4 × 104 2 × 105 2 × 106 2 × 106 2 × 106 3 × 105 100° C. 4 × 104 3 × 105 3 × 106 2 × 106 3 × 106 3 × 105 Decrease in modulus observed observed observed observed observed observed Number of After curing 0 0 0 0 0 0 generated cracks After moisture 0 0 0 1 0 0 and peelings absorption reflow -
TABLE 3 Comparative Comparative Comparative Comparative Example 1 Example 2 Example 3 Example 4 Compo- (A) Silicone resin A1 sition component Silicone resin A2 (parts Silicone resin A3 by Silicone resin A4 weight) Silicone resin A5 Silicone resin A6 40 40 MViDPh 15D20MVi 60 100 60 100 (B) MH 2Q 9 6 9 6 MH 2DPh2 (C) Pt catalyst 3 ppm 3 ppm 3 ppm 3 ppm Adhesion imparting agent D1 0.9 0.9 Adhesion imparting agent D2 0.3 0.3 H/Vi ratio in (A) and (B) 1.7 1.4 1.7 1.4 Charac- Hardness (Type A) 60 30 59 29 teristics Storage modulus 25° C. 8 × 105 2 × 105 8 × 105 2 × 105 (Pa) 50° C. 1 × 106 3 × 105 1 × 106 3 × 105 60° C. 1 × 106 3 × 105 1 × 106 3 × 105 100° C. 1 × 106 3 × 105 1 × 106 3 × 105 Decrease in modulus Not observed Not observed Not observed Not observed Number of After curing 6 2 6 3 generated cracks After moisture Not 6 Not 6 and peelings absorption reflow investigated investigated - As can be seen in Table 1 and Table 2, the compositions in the examples 1 to 12 can provide cured products with high hardness, and storage moduli of the cured produces are easily and greatly decreased by heating. Consequently, it is found that the use of the compositions makes it possible to relax the stress generated during heat curing and during moisture absorption reflow, and improve generation of cracks and peelings from the substrate so as to greatly improve the reliability of a semiconductor device such as an LED and the like.
- The present invention has been described in detail while referring to specific embodiments, but, it is obvious for a person skilled in the art that the invention can be variously modified and changed without departing from the scope and the spirit of the present invention.
Claims (6)
1. A silicone composition for sealing a semiconductor, comprising:
(A) 100 parts by weight of a polyorganosiloxane having one or more alkenyl groups, on average, per molecule, obtained by reacting (a1) 60 to 99 parts by weight of an organosiloxane containing at least a trifunctional siloxane unit represented by a formula: R1SiO3/2 (where R1 represents an alkyl group or an aryl group) and not taking part in a hydrosilylation reaction, with (a2) 40 to 1 parts by weight of an organosiloxane containing a bifunctional siloxane unit represented by a formula: R2 2SiO2/2 (where R2 represents an alkenyl group, an alkyl group, or an aryl group, and at least one of groups in a molecule is an alkenyl group) and/or a monofunctional siloxane unit represented by a formula: R2 3SiO1/2 (where R2 is as described above);
(B) an amount of a polyorganohydrogensiloxane having two or more hydrogen atoms bonded to silicone atoms per molecule and having a viscosity at 25° C. of 1 to 1000 mPa·s so that an amount of the hydrogen atoms bonded to the silicon atoms is 0.5 to 3.0 mol per mol of the alkenyl groups bonded to silicon atoms in the (A) component; and
(C) a catalyst amount of a platinum-based catalyst,
wherein a decrease in storage modulus of a cured product thereof from 25° C. to 50° C. is 40% or more.
2. The silicone composition for sealing a semiconductor according to claim 1 ,
wherein the decrease in storage modulus of the cured product of the silicone composition for sealing a semiconductor from 25° C. to 50° C. is 70% or more.
3. The silicone composition for sealing a semiconductor according to claim 1 ,
wherein a nonvolatile content of the (A) component after heating at 150° C. for 1 hour is 97 weight % or more.
4. The silicone composition for sealing a semiconductor according to claim 1 ,
wherein 20 to 70 mol % of all of organic groups bonded to silicon atoms in the (a1) component are phenyl groups.
5. The silicone composition for sealing a semiconductor according to claim 1 ,
wherein the polyorganosiloxane being the (A) component is a polymer obtained by reacting a first organosiloxane represented by an average unit formula:
(R1SiO3/2)a(R1 2SiO2/2)b(R1SiO(3−n)/2Yn)c(R1 2SiO(2−m)/2Ym)d a second organosiloxane represented by a formula: (R2 3SiO1/2)2 (R2 2SiO2/2)e and a third organosiloxane represented by a formula: (R2 2SiO2/2)f at a weight ratio (%) of g:h:i,
(where, R1 represents an alkyl group or an aryl group, R2 represents an alkenyl group, an alkyl group, or an aryl group, Y represents an alkoxy group or a hydroxyl group, n is 1 or 2, m is 1, a is a positive number, b is a positive number, c is 0 or a positive number, and d is 0 or a positive number, which are numbers satisfying a+b+c+d=1.0, 0.2<(a+c)/(a+b+c+d)<0.8, 0.2<(b+d)/(a+b+c+d)<0.8, 0≦c/(a+b+c+d)<0.15, 0≦d/(a+b+c+d)<0.15. Further, e is 0 or a positive number, and f is a positive number, which are numbers satisfying 0≦e≦100, 3≦f≦20. Furthermore, g, h, i are numbers satisfying 60≦g≦99, 0≦h≦20, 0≦i≦20, and g+h+i=100.)
6. The silicone composition for sealing a semiconductor according to claim 5 ,
wherein the polyorganosiloxane being the (A) component is obtained by subjecting, in a step (2), a linear organosiloxane (II) containing an alkenyl group and/or a cyclic organosiloxane (III) containing an alkenyl group to block polymerization or graft polymerization and equilibration reaction with a polyorganosiloxane (I) obtained in a following step (1):
the step (1) of polymerizing, in the presence of a basic catalyst, a polyorganosiloxane obtained by hydrolyzing or partially hydrolyzing, under acid condition, a silane compound represented by a formula: R1SiX3 and R1 2SiX2 (where R1 represents an alkyl group or an aryl group, X represents a halogen group, an alkoxy group, or a hydroxyl group), to obtain the polyorganosiloxane (I) represented by an average unit formula:
(R1SiO3/2)a(R1 2SiO2/2)b(R1SiO(3−n/2Yn)c(R1 2SiO(2−m)/2Ym)d (where, Y represents an alkoxy group or a hydroxyl group, n is 1 or 2, m is 1, a is a positive number, b is a positive number, c is 0 or a positive number, and d is 0 or a positive number, which are numbers satisfying a+b+c+d=1.0, 0.2<(a+c)/(a+b+c+d)<0.8, 0.2<(b+d)/(a+b+c+d)<0.8, 0≦c/(a+b+c+d)<0.15, 0≦d/(a+b+c+d)<0.15); and
the step (2) of subjecting the linear polyorganosiloxane (II) containing an alkenyl group represented by a formula: (R2 3SiO1/2)2 (R2 2SiO2/2)e (where R2 represents an alkenyl group, an alkyl group, or an aryl group, and e is 0 or a positive number satisfying 0≦e≦100) and/or the cyclic polyorganosiloxane containing an alkenyl group represented by a formula: (R2 2SiO)f (where R2 is as described above, and f is a positive number satisfying 3≦f≦20) to block polymerization or graft polymerization and equilibration reaction, in the presence of a basic catalyst, with the polyorganosiloxane (I).
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US14/730,810 US9564562B2 (en) | 2011-05-31 | 2015-06-04 | Silicone composition for sealing semiconductor |
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JPPCT/JP2011/003053 | 2011-05-31 | ||
JP2011003053 | 2011-05-31 | ||
PCT/JP2011/006287 WO2012164636A1 (en) | 2011-05-31 | 2011-11-10 | Silicone composition for sealing semiconductor |
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PCT/JP2011/006287 Continuation WO2012164636A1 (en) | 2011-05-31 | 2011-11-10 | Silicone composition for sealing semiconductor |
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US14/730,810 Active US9564562B2 (en) | 2011-05-31 | 2015-06-04 | Silicone composition for sealing semiconductor |
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US (2) | US20140088232A1 (en) |
EP (1) | EP2716717B1 (en) |
KR (1) | KR101851423B1 (en) |
CN (1) | CN103562321B (en) |
RU (1) | RU2013158135A (en) |
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Cited By (6)
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US20140031509A1 (en) * | 2012-07-27 | 2014-01-30 | Lg Chem, Ltd. | Curable composition |
US20150141608A1 (en) * | 2012-07-27 | 2015-05-21 | Lg Chem, Ltd. | Curable composition |
WO2016151205A1 (en) * | 2015-03-24 | 2016-09-29 | Bluestar Silicones France Sas | Process for preparing a storage-stable silicone resin |
EP3159369A4 (en) * | 2014-06-20 | 2018-02-14 | Dow Corning Toray Co., Ltd. | Silicone exhibiting hot-melt properties, and curable hot-melt composition |
US20180258332A1 (en) * | 2015-11-12 | 2018-09-13 | Dongwoo Fine-Chem Co., Ltd. | Optical laminate and image display device including the same |
US10470982B2 (en) * | 2013-10-18 | 2019-11-12 | Shofu Inc. | Curable silicone composition having optical transparency and method of fabricating molded material of photocurable resin using the same |
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TWI521032B (en) * | 2012-06-28 | 2016-02-11 | 羅門哈斯公司 | Wet glue |
JP6643985B2 (en) | 2014-01-28 | 2020-02-12 | エルジー・ケム・リミテッド | Cured body |
CN105199397B (en) * | 2014-06-17 | 2018-05-08 | 广州慧谷化学有限公司 | A kind of curable organopolysiloxane composition and semiconductor devices |
WO2016098883A1 (en) * | 2014-12-18 | 2016-06-23 | モメンティブ・パフォーマンス・マテリアルズ・ジャパン合同会社 | Flame-retardant polyorganosiloxane composition, flame-retardant cured product, optical member, lens or cover for light source, and molding method |
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- 2011-11-10 RU RU2013158135/05A patent/RU2013158135A/en not_active Application Discontinuation
- 2011-11-10 KR KR1020137028774A patent/KR101851423B1/en active IP Right Grant
- 2011-11-10 EP EP11866569.4A patent/EP2716717B1/en not_active Not-in-force
- 2011-11-10 CN CN201180071255.1A patent/CN103562321B/en not_active Expired - Fee Related
- 2011-11-10 WO PCT/JP2011/006287 patent/WO2012164636A1/en active Application Filing
- 2011-11-29 TW TW100143733A patent/TWI544665B/en active
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2013
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Also Published As
Publication number | Publication date |
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TWI544665B (en) | 2016-08-01 |
EP2716717B1 (en) | 2016-04-06 |
TW201248938A (en) | 2012-12-01 |
EP2716717A1 (en) | 2014-04-09 |
US20150270460A1 (en) | 2015-09-24 |
CN103562321A (en) | 2014-02-05 |
KR101851423B1 (en) | 2018-04-23 |
US9564562B2 (en) | 2017-02-07 |
CN103562321B (en) | 2016-01-20 |
KR20140052990A (en) | 2014-05-07 |
EP2716717A4 (en) | 2015-02-18 |
WO2012164636A1 (en) | 2012-12-06 |
RU2013158135A (en) | 2015-07-10 |
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