US20130284998A1 - Forming heaters for phase change memories - Google Patents
Forming heaters for phase change memories Download PDFInfo
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- US20130284998A1 US20130284998A1 US13/863,253 US201313863253A US2013284998A1 US 20130284998 A1 US20130284998 A1 US 20130284998A1 US 201313863253 A US201313863253 A US 201313863253A US 2013284998 A1 US2013284998 A1 US 2013284998A1
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- heater
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- phase change
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- 230000015654 memory Effects 0.000 title claims abstract description 31
- 230000008859 change Effects 0.000 title claims abstract description 11
- 239000000463 material Substances 0.000 claims abstract description 71
- 150000004770 chalcogenides Chemical class 0.000 claims abstract description 30
- 229910052751 metal Inorganic materials 0.000 claims abstract description 14
- 239000002184 metal Substances 0.000 claims abstract description 14
- ZOXJGFHDIHLPTG-UHFFFAOYSA-N Boron Chemical compound [B] ZOXJGFHDIHLPTG-UHFFFAOYSA-N 0.000 claims description 11
- 229910052796 boron Inorganic materials 0.000 claims description 11
- 239000012782 phase change material Substances 0.000 claims description 7
- 239000003989 dielectric material Substances 0.000 claims description 3
- 239000000758 substrate Substances 0.000 claims 9
- 239000007769 metal material Substances 0.000 claims 7
- 238000000151 deposition Methods 0.000 abstract description 9
- 230000008021 deposition Effects 0.000 abstract description 6
- 238000010438 heat treatment Methods 0.000 description 7
- 238000000231 atomic layer deposition Methods 0.000 description 5
- 239000004020 conductor Substances 0.000 description 2
- 238000005137 deposition process Methods 0.000 description 2
- 150000002739 metals Chemical class 0.000 description 2
- 238000000034 method Methods 0.000 description 2
- 230000004048 modification Effects 0.000 description 2
- 238000012986 modification Methods 0.000 description 2
- 150000004767 nitrides Chemical class 0.000 description 2
- 230000007704 transition Effects 0.000 description 2
- WFKWXMTUELFFGS-UHFFFAOYSA-N tungsten Chemical group [W] WFKWXMTUELFFGS-UHFFFAOYSA-N 0.000 description 2
- 229910052721 tungsten Inorganic materials 0.000 description 2
- 239000010937 tungsten Substances 0.000 description 2
- 101000635799 Homo sapiens Run domain Beclin-1-interacting and cysteine-rich domain-containing protein Proteins 0.000 description 1
- 102100030852 Run domain Beclin-1-interacting and cysteine-rich domain-containing protein Human genes 0.000 description 1
- BLRPTPMANUNPDV-UHFFFAOYSA-N Silane Chemical compound [SiH4] BLRPTPMANUNPDV-UHFFFAOYSA-N 0.000 description 1
- 230000009471 action Effects 0.000 description 1
- 230000015572 biosynthetic process Effects 0.000 description 1
- 239000013078 crystal Substances 0.000 description 1
- 238000002425 crystallisation Methods 0.000 description 1
- 230000008025 crystallization Effects 0.000 description 1
- 238000011065 in-situ storage Methods 0.000 description 1
- 230000004044 response Effects 0.000 description 1
- NXHILIPIEUBEPD-UHFFFAOYSA-H tungsten hexafluoride Chemical compound F[W](F)(F)(F)(F)F NXHILIPIEUBEPD-UHFFFAOYSA-H 0.000 description 1
Images
Classifications
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- H01L45/06—
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N70/00—Solid-state devices having no potential barriers, and specially adapted for rectifying, amplifying, oscillating or switching
- H10N70/20—Multistable switching devices, e.g. memristors
- H10N70/231—Multistable switching devices, e.g. memristors based on solid-state phase change, e.g. between amorphous and crystalline phases, Ovshinsky effect
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N70/00—Solid-state devices having no potential barriers, and specially adapted for rectifying, amplifying, oscillating or switching
- H10N70/011—Manufacture or treatment of multistable switching devices
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N70/00—Solid-state devices having no potential barriers, and specially adapted for rectifying, amplifying, oscillating or switching
- H10N70/801—Constructional details of multistable switching devices
- H10N70/841—Electrodes
- H10N70/8413—Electrodes adapted for resistive heating
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
- Y10T29/00—Metal working
- Y10T29/49—Method of mechanical manufacture
- Y10T29/49002—Electrical device making
- Y10T29/49082—Resistor making
- Y10T29/49083—Heater type
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
- Y10T29/00—Metal working
- Y10T29/49—Method of mechanical manufacture
- Y10T29/49002—Electrical device making
- Y10T29/49117—Conductor or circuit manufacturing
- Y10T29/49124—On flat or curved insulated base, e.g., printed circuit, etc.
- Y10T29/49155—Manufacturing circuit on or in base
- Y10T29/49165—Manufacturing circuit on or in base by forming conductive walled aperture in base
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
- Y10T428/00—Stock material or miscellaneous articles
- Y10T428/24—Structurally defined web or sheet [e.g., overall dimension, etc.]
- Y10T428/24479—Structurally defined web or sheet [e.g., overall dimension, etc.] including variation in thickness
- Y10T428/24612—Composite web or sheet
Definitions
- Phase change memories use a chalcogenide layer that changes phase between more amorphous and less amorphous or more crystalline phases.
- the phase transition is the result of Joule heating of the chalcogenide layer.
- the heating of the chalcogenide layer is due to electrical heating through a heating element proximate to the phase change material layer.
- FIG. 1 is an enlarged, partial, cross-sectional view alone embodiment of the present invention at an early stage
- FIG. 2 is an enlarged, cross-sectional view at a subsequent stage according to one embodiment
- FIG. 3 is an enlarged, cross-sectional view at still a subsequent stage in accordance with one embodiment
- FIG. 4 is an enlarged, cross-sectional view at a subsequent stage in accordance with one embodiment
- FIG. 5 is an enlarged, cross-sectional view at a subsequent stage according to one embodiment.
- FIG. 6 is an enlarged, cross-sectional view at a subsequent stage according to one embodiment.
- differential deposition can be used to form vertical high aspect ratio heaters for phase change memories.
- the vertical heaters may be more effective because they have a smaller point of contact with the chalcogenide material, that point of contact determined h the thickness in the horizontal dimension of the phase change material heater, which is deposited as a layer in the vertical direction.
- the heater can have a critical dimension thinner than any thickness possible with lithographic techniques. As a result of the thin area of contact between the heater and the phase change material layer, less material in the phase change layer must be required to change phase and, therefore, less energy is needed to make the phase transition. As a result, power consumption may be improved in some embodiments.
- a vertical wall dielectric 14 may be formed.
- the dielectric 14 may be formed with a trench, Figure I only showing the left side of a trench.
- the dielectric 14 in one embodiment, may be stacked oxide and nitride layers. However, any dielectric may be utilized.
- the dielectric 14 is formed on top of a metal layer 12 which acts as to conductor lower electrode, or address line.
- a deposition technique is used to form a layer composed of a thicker vertical portion 16 on the dielectric 14 and a thinner horizontal portion 18 on the metal 12 .
- the difference in deposition thickness is the result of the differential deposition that occurs on metal, compared to dielectric materials.
- some deposition processes such as atomic layer deposition, more material is deposited on dielectrics than on metals.
- the boron is well physisorbed on an oxide/nitride layer 14 and less effectively physisorbed on metals, resulting in differential thicknesses.
- Another technique that can be utilized is SiH 4 deposition, however, the film performance may not be as good as that achieved with boron.
- a heater material 20 is deposited, as indicated in FIG. 2 , using a deposition technique, such as atomic layer deposition.
- a deposition technique such as atomic layer deposition.
- the atomic layer deposition of tungsten may he used to form the heater material 20 which has a vertical portion and a horizontal portion 22 .
- the horizontal portion 18 on the metal 12 is consumed during the heater material 20 deposition process As a result, physical contact is achieved between the heater material 20 and the metal 12 .
- to second boron layer may be deposited, again, using B 2 H 6 flow, in one embodiment, to form the capping layer 24 , as shown in FIG. 3 .
- atomic layer deposition may be used, for example.
- the reason for the consumption of the baron forming the horizontal portion 18 at the bottom of the trench is that tungsten fluoride (WF 6 ) reacts with any boron at the metal surface, achieving Ohmic contact to the metal surface, Good adhesion between the tungsten based layer and the dielectric 14 is guaranteed by the residual of boron deposited on the dielectric and still remaining on the dielectric 14 .
- the second B 2 H 6 atomic layer caps the in situ heater material 20 .
- a dielectric layer 26 is blanket deposited over the structure and then planarized down to the upper surface 28 of the dielectric 14 , as shown in FIG. 5 ,
- a chalcogenide layer 30 is deposited, as indicated in FIG. 6 .
- the vertical heater material 20 makes a small area or point contact with the chalcogenide layer 30 .
- the chalcogenide layer may be covered with additional layers, including another electrode or metal layer (not shown).
- additional layers also not shown may be deposited, such as the layers forming an ovonic threshold switch, as one example.
- the surface area of contact between the vertically oriented heater material 20 and the chalcogenide layer 30 is governed by the thickness of the deposition of the heater material 20 . Using atomic layer deposition, this layer can be made extremely is small, resulting in a very small area of contact between the chalcogenide layer 30 and the heater material 20 .
- a large number of cells may be formed at the same time, for example, by forming a plurality of spaced trenches in a dielectric 14 . Then, in each trench, the layers shown in FIGS. 1-6 may be deposited and processed in the fashion indicated. As a result, a number of cells may be formed, initially, with a common chalcogenide layer 30 . In some embodiments, the chalcogenide layer may then be singulated so that the chalcogenide layer is no longer continuous across the plurality of cells, but is distinct and constitutes a dot at each cell.
- a plurality of cells may be formed along a line, defined by the metal 12 and perpendicular lines may be defined by conductors extending transversely to the length of the metal 12 , contacting the upper surface of the chalcogenide 30 after it has been singulated.
- Programming to alter the state or phase of the material may be accomplished by applying voltage potentials to the address lines, thereby generating a voltage potential across a memory element including a phase change layer 30 .
- the voltage potential is greater than the threshold voltages of any select device and memory element, then an electrical current may flow through the phase change layer 30 in response to the applied voltage potentials, and may result in heating of the phase change layer 30 through the action of the heater 20 .
- This heating may alter the memory state or phase of the layer 30 , in one embodiment. Altering the phase or state of the layer 30 may alter the electrical characteristic of memory material, e.g., the resistance or threshold voltage of the material may be altered by altering the phase of the memory material. Memory material may also be referred to as a programmable resistance material.
- memory material In the “reset” state, memory material may be in an amorphous or semi-amorphous state and in the “set” state, memory material may be in a crystalline or semi-crystalline state.
- the resistance of memory material in the amorphous or semi-amorphous state may be greater than the resistance of memory material in the crystalline or semi-crystalline state.
- the association of reset and set with amorphous and crystal line states, respectively is a convention and that at least an opposite convention may be adopted.
- memory material may be heated to a relatively higher temperature to melt and then quenched to vitrify and “reset” memory material in an amorphous state (e.g., program memory material to a logic “0” value).
- Heating the volume of memory material to a relatively lower crystallization temperature may crystallize or devitrify memory material and “set” memory material (e.g., program memory material to a logic “1” value).
- set memory material e.g., program memory material to a logic “1” value.
- Various resistances of memory material may be achieved to store information by varying the amount of current flow and duration through the volume of memory material.
- references throughout this specification to “one embodiment” or “an embodiment” mean that a particular feature, structure, or characteristic described in connection with the embodiment is included in at least one implementation encompassed within the present invention. Thus, appearances of the phrase “one embodiment” or “in an embodiment” are not necessarily referring to the same embodiment. Furthermore, the particular features, structures, or characteristics may be instituted in other suitable forms other than the particular embodiment illustrated and all such forms may be encompassed within the claims of the present application.
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- Engineering & Computer Science (AREA)
- Manufacturing & Machinery (AREA)
- Semiconductor Memories (AREA)
Abstract
Description
- This application is a divisional of pending U.S. patent application Ser. No. 12/944,134, filed Nov. 11, 2010, which application is incorporated herein by reference, in its entirety, for any purpose.
- This relates generally to phase change memories. Phase change memories use a chalcogenide layer that changes phase between more amorphous and less amorphous or more crystalline phases. Generally, the phase transition is the result of Joule heating of the chalcogenide layer. In sonic cases, the heating of the chalcogenide layer is due to electrical heating through a heating element proximate to the phase change material layer.
-
FIG. 1 is an enlarged, partial, cross-sectional view alone embodiment of the present invention at an early stage; -
FIG. 2 is an enlarged, cross-sectional view at a subsequent stage according to one embodiment; -
FIG. 3 is an enlarged, cross-sectional view at still a subsequent stage in accordance with one embodiment; -
FIG. 4 is an enlarged, cross-sectional view at a subsequent stage in accordance with one embodiment; -
FIG. 5 is an enlarged, cross-sectional view at a subsequent stage according to one embodiment; and -
FIG. 6 is an enlarged, cross-sectional view at a subsequent stage according to one embodiment. - In accordance with some embodiments, differential deposition can be used to form vertical high aspect ratio heaters for phase change memories. The vertical heaters may be more effective because they have a smaller point of contact with the chalcogenide material, that point of contact determined h the thickness in the horizontal dimension of the phase change material heater, which is deposited as a layer in the vertical direction.
- Therefore, the heater can have a critical dimension thinner than any thickness possible with lithographic techniques. As a result of the thin area of contact between the heater and the phase change material layer, less material in the phase change layer must be required to change phase and, therefore, less energy is needed to make the phase transition. As a result, power consumption may be improved in some embodiments.
- Referring to
FIG. 1 , in some embodiments, a vertical wall dielectric 14 may be formed. In some cases, the dielectric 14 may be formed with a trench, Figure I only showing the left side of a trench. The dielectric 14, in one embodiment, may be stacked oxide and nitride layers. However, any dielectric may be utilized. The dielectric 14 is formed on top of ametal layer 12 which acts as to conductor lower electrode, or address line. - In some embodiments, a deposition technique is used to form a layer composed of a thicker
vertical portion 16 on the dielectric 14 and a thinnerhorizontal portion 18 on themetal 12. The difference in deposition thickness is the result of the differential deposition that occurs on metal, compared to dielectric materials. Specifically, with some deposition processes, such as atomic layer deposition, more material is deposited on dielectrics than on metals. For example, in a flow of boron B2H6, the boron is well physisorbed on an oxide/nitride layer 14 and less effectively physisorbed on metals, resulting in differential thicknesses. Another technique that can be utilized is SiH4 deposition, however, the film performance may not be as good as that achieved with boron. - Next, a
heater material 20 is deposited, as indicated inFIG. 2 , using a deposition technique, such as atomic layer deposition. For example, the atomic layer deposition of tungsten may he used to form theheater material 20 which has a vertical portion and ahorizontal portion 22. However, thehorizontal portion 18 on themetal 12 is consumed during theheater material 20 deposition process As a result, physical contact is achieved between theheater material 20 and themetal 12. Next, to second boron layer may be deposited, again, using B2H6 flow, in one embodiment, to form thecapping layer 24, as shown inFIG. 3 . Again, atomic layer deposition may be used, for example. - More specifically, the reason for the consumption of the baron forming the
horizontal portion 18 at the bottom of the trench is that tungsten fluoride (WF6) reacts with any boron at the metal surface, achieving Ohmic contact to the metal surface, Good adhesion between the tungsten based layer and the dielectric 14 is guaranteed by the residual of boron deposited on the dielectric and still remaining on the dielectric 14. The second B2H6 atomic layer caps the insitu heater material 20. - Next as shown in
FIG. 4 , adielectric layer 26 is blanket deposited over the structure and then planarized down to theupper surface 28 of the dielectric 14, as shown inFIG. 5 , - Finally, a
chalcogenide layer 30 is deposited, as indicated inFIG. 6 . Thevertical heater material 20 makes a small area or point contact with thechalcogenide layer 30. Thereafter, the chalcogenide layer may be covered with additional layers, including another electrode or metal layer (not shown). Then, additional layers (also not shown may be deposited, such as the layers forming an ovonic threshold switch, as one example. In some embodiments, the surface area of contact between the vertically orientedheater material 20 and thechalcogenide layer 30 is governed by the thickness of the deposition of theheater material 20. Using atomic layer deposition, this layer can be made extremely is small, resulting in a very small area of contact between thechalcogenide layer 30 and theheater material 20. - While the figures depict the formation of the single cell, a large number of cells may be formed at the same time, for example, by forming a plurality of spaced trenches in a dielectric 14. Then, in each trench, the layers shown in
FIGS. 1-6 may be deposited and processed in the fashion indicated. As a result, a number of cells may be formed, initially, with acommon chalcogenide layer 30. In some embodiments, the chalcogenide layer may then be singulated so that the chalcogenide layer is no longer continuous across the plurality of cells, but is distinct and constitutes a dot at each cell. Thus, a plurality of cells may be formed along a line, defined by themetal 12 and perpendicular lines may be defined by conductors extending transversely to the length of themetal 12, contacting the upper surface of thechalcogenide 30 after it has been singulated. - Programming to alter the state or phase of the material may be accomplished by applying voltage potentials to the address lines, thereby generating a voltage potential across a memory element including a
phase change layer 30. When the voltage potential is greater than the threshold voltages of any select device and memory element, then an electrical current may flow through thephase change layer 30 in response to the applied voltage potentials, and may result in heating of thephase change layer 30 through the action of theheater 20. - This heating may alter the memory state or phase of the
layer 30, in one embodiment. Altering the phase or state of thelayer 30 may alter the electrical characteristic of memory material, e.g., the resistance or threshold voltage of the material may be altered by altering the phase of the memory material. Memory material may also be referred to as a programmable resistance material. - In the “reset” state, memory material may be in an amorphous or semi-amorphous state and in the “set” state, memory material may be in a crystalline or semi-crystalline state. The resistance of memory material in the amorphous or semi-amorphous state may be greater than the resistance of memory material in the crystalline or semi-crystalline state. It is to be appreciated that the association of reset and set with amorphous and crystal line states, respectively, is a convention and that at least an opposite convention may be adopted. Using electrical current, memory material may be heated to a relatively higher temperature to melt and then quenched to vitrify and “reset” memory material in an amorphous state (e.g., program memory material to a logic “0” value). Heating the volume of memory material to a relatively lower crystallization temperature may crystallize or devitrify memory material and “set” memory material (e.g., program memory material to a logic “1” value). Various resistances of memory material may be achieved to store information by varying the amount of current flow and duration through the volume of memory material.
- References throughout this specification to “one embodiment” or “an embodiment” mean that a particular feature, structure, or characteristic described in connection with the embodiment is included in at least one implementation encompassed within the present invention. Thus, appearances of the phrase “one embodiment” or “in an embodiment” are not necessarily referring to the same embodiment. Furthermore, the particular features, structures, or characteristics may be instituted in other suitable forms other than the particular embodiment illustrated and all such forms may be encompassed within the claims of the present application.
- While the present invention has been described with respect to a limited number of embodiments, those skilled in the art will appreciate numerous modifications and variations therefrom. It is intended that the appended claims cover all such modifications and variations as fall within the true spirit and scope of this present invention.
Claims (25)
Priority Applications (1)
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US13/863,253 US20130284998A1 (en) | 2010-11-11 | 2013-04-15 | Forming heaters for phase change memories |
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US12/944,134 US8420171B2 (en) | 2010-11-11 | 2010-11-11 | Forming heaters for phase change memories |
US13/863,253 US20130284998A1 (en) | 2010-11-11 | 2013-04-15 | Forming heaters for phase change memories |
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US12/944,134 Division US8420171B2 (en) | 2010-11-11 | 2010-11-11 | Forming heaters for phase change memories |
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US13/863,253 Abandoned US20130284998A1 (en) | 2010-11-11 | 2013-04-15 | Forming heaters for phase change memories |
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Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
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CN108122923A (en) * | 2016-11-30 | 2018-06-05 | 三星电子株式会社 | Memory device and the method for manufacturing it |
US20180269393A1 (en) * | 2017-03-17 | 2018-09-20 | Semiconductor Manufacturing International (Shanghai) Corporation | Phase change memory and fabrication method thereof |
Families Citing this family (2)
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US9093266B2 (en) * | 2011-04-11 | 2015-07-28 | Micron Technology, Inc. | Forming high aspect ratio isolation structures |
US8803118B2 (en) | 2012-05-29 | 2014-08-12 | Micron Technology, Inc. | Semiconductor constructions and memory arrays |
Citations (4)
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US20060073631A1 (en) * | 2004-09-24 | 2006-04-06 | Karpov Ilya V | Phase change memory with damascene memory element |
US7439536B2 (en) * | 2005-04-08 | 2008-10-21 | Fabio Pellizzer | Phase change memory cell with tubular heater and manufacturing method thereof |
US7442602B2 (en) * | 2005-06-20 | 2008-10-28 | Samsung Electronics Co., Ltd. | Methods of fabricating phase change memory cells having a cell diode and a bottom electrode self-aligned with each other |
US20080315171A1 (en) * | 2007-06-21 | 2008-12-25 | Thomas Happ | Integrated circuit including vertical diode |
Family Cites Families (2)
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US7910904B2 (en) * | 2005-05-12 | 2011-03-22 | Ovonyx, Inc. | Multi-level phase change memory |
JP4267013B2 (en) * | 2006-09-12 | 2009-05-27 | エルピーダメモリ株式会社 | Manufacturing method of semiconductor device |
-
2010
- 2010-11-11 US US12/944,134 patent/US8420171B2/en active Active
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- 2013-04-15 US US13/863,253 patent/US20130284998A1/en not_active Abandoned
Patent Citations (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US20060073631A1 (en) * | 2004-09-24 | 2006-04-06 | Karpov Ilya V | Phase change memory with damascene memory element |
US7439536B2 (en) * | 2005-04-08 | 2008-10-21 | Fabio Pellizzer | Phase change memory cell with tubular heater and manufacturing method thereof |
US7442602B2 (en) * | 2005-06-20 | 2008-10-28 | Samsung Electronics Co., Ltd. | Methods of fabricating phase change memory cells having a cell diode and a bottom electrode self-aligned with each other |
US20080315171A1 (en) * | 2007-06-21 | 2008-12-25 | Thomas Happ | Integrated circuit including vertical diode |
Cited By (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN108122923A (en) * | 2016-11-30 | 2018-06-05 | 三星电子株式会社 | Memory device and the method for manufacturing it |
US20180269393A1 (en) * | 2017-03-17 | 2018-09-20 | Semiconductor Manufacturing International (Shanghai) Corporation | Phase change memory and fabrication method thereof |
US10497869B2 (en) * | 2017-03-17 | 2019-12-03 | Semiconductor Manufacturing International (Shanghai) Corporation | Phase change memory and fabrication method thereof |
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US8420171B2 (en) | 2013-04-16 |
US20120121864A1 (en) | 2012-05-17 |
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