US20130140581A1 - Optical device - Google Patents
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- US20130140581A1 US20130140581A1 US13/752,350 US201313752350A US2013140581A1 US 20130140581 A1 US20130140581 A1 US 20130140581A1 US 201313752350 A US201313752350 A US 201313752350A US 2013140581 A1 US2013140581 A1 US 2013140581A1
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- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 claims description 4
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Images
Classifications
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L33/00—Semiconductor devices having potential barriers specially adapted for light emission; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof
- H01L33/44—Semiconductor devices having potential barriers specially adapted for light emission; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof characterised by the coatings, e.g. passivation layer or anti-reflective coating
- H01L33/46—Reflective coating, e.g. dielectric Bragg reflector
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L33/00—Semiconductor devices having potential barriers specially adapted for light emission; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof
- H01L33/02—Semiconductor devices having potential barriers specially adapted for light emission; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof characterised by the semiconductor bodies
- H01L33/10—Semiconductor devices having potential barriers specially adapted for light emission; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof characterised by the semiconductor bodies with a light reflecting structure, e.g. semiconductor Bragg reflector
Definitions
- the present invention is an optical device, and more particularly is to form a multi-layer structure over the substrate to increase the light reflective efficiency of the optical device.
- the conventional light emitting diode (LED) as shown in FIG. 1A and FIG. 1B comprises a substrate 100 , a buffer layer 102 , a multi-layer structure, a transparent conductive layer 110 and two electrodes 112 , 114 .
- the multi-layer structure includes an active layer 106 between the N-type semiconductor layer 104 and the P-type semiconductor layer 108 .
- the active layer 106 is a single-layer structure or a multi-layer structure made by a reactive nitrogen semiconductor compound.
- the voltage inputted between the electrodes 112 , 114 of the LED will generate electrons and/or holes injecting into the N-type semiconductor layer 104 and P-type semiconductor layer 108 and passing through the active layer 106 .
- the electrons and the holes will rejoin in the active layer 106 to generate light.
- the light generated in the illuminant layer will transmit to anywhere and release at the exposed surfaces of the LED. In order to generate the light, the light should be rejected at the predetermined direction.
- the illuminant efficiency of the LED is based some parameters calculated at the LED.
- One is the light collection efficiency, which is the ratio of the light transmitted from the LED and the light generated by the LED. Practically, because of the absorption of the different layers within the LED, the light transmitted from the LED is less than the light generated by the LED.
- a reflective layer is added within the multi-layer structure of the LED in prior art to guide the light to transmit in the desired direction.
- a buffer layer 102 made by AlN is formed between the substrate 100 and the N-type semiconductor layer 104 .
- the crystal structure of the buffer layer 102 is non-single crystal such as microcrystal or polycrystal.
- the crystal structure of the buffer layer 102 is able to solve the problem of the crystal mismatching between the GaN compound layers.
- the refractive index generated by the light in the active layer restrains the illuminant efficiency of the optical device.
- the main object of the present invention is to use the insulated material layer forming multi-layer structure on the substrate to reduce dislocation and generate the reflective layer and anti-reflective layer by the multi-layer structure to enhance the illuminant efficiency.
- an optical device includes a first electrode; a plurality of multi-layer structures disposed on the substrate, wherein the multi-layer structure is consisted of at least two insulated layers with different refractive indices formed alternately; a first conductive semiconductor layer disposed on the substrate to cover the multi-layer structure; an active layer disposed on the first conductive semiconductor layer; a second conductive semiconductor layer disposed on the active layer; and a transparent conductive layer disposed on the second conductive semiconductor layer.
- the present invention also discloses an optical device including a substrate; a plurality of multi-layer structure disposed on the substrate and arranged separately from each other on the substrate, wherein each of the multi-layer structure is consisted of a plurality of insulated layers stacked together, the insulated layers have different refractive indices and the refractive indices of the insulated layers are consecutively increasing from the lowermost insulated layer to the uppermost insulated layer; a first conductive semiconductor layer disposed on the substrate to cover the multi-layer structure, wherein the first conductive semiconductor layer includes a first region and a second region; an active layer disposed on the first conductive semiconductor layer; a second conductive semiconductor layer disposed on the active layer; a transparent conductive layer disposed on the second conductive semiconductor layer; and a first electrode disposed on the first region of the first conductive semiconductor layer.
- FIG. 1A and FIG. 1B are views illustrating the conventional structure of the optical device.
- FIG. 2A to FIG. 2H are views illustrating the steps of forming the multi-layer structure in the optical device.
- FIG. 3A to FIG. 3D are views illustrating the steps of forming the multi-layer structure in the optical device of another embodiment.
- FIG. 2A to FIG. 2H are views showing an embodiment of the optical device in the present invention.
- FIG. 2A it is a view showing that a plurality of multi-layer structures formed on the substrate.
- a substrate 10 such as a substrate made by sapphire, is provided.
- a conventional semiconductor process is used to form a first insulated layer 12 A on the top surface of the substrate 10 and form a second insulated layer 12 B on the first insulated layer 12 A.
- the purpose to form the multi-layer structures 10 before a buffer layer (not shown) is formed on the substrate 10 is to have the effect of the reflector and anti-reflector by interlacedly stacking the first insulated layer 12 A and the second insulated layer 12 B and the reflective efficiency and anti-reflective efficiency of the light within the optical device will enhance. Therefore, a plurality of multi-layer structures formed on the substrate 10 are used to substitute the conventional SiO 2 single-layer film used by the lateral epitaxial overgrowth to increase the reflective efficiency and the anti-efficiency of the light in the optical device so as to enhance the illuminant efficiency of the optical device.
- each of the multi-layer structures 12 is made by at least two insulated layers 12 A and 12 B with different refractive index coefficients and the insulated layers 12 A and 12 B are interlacedly stacking, as shown in FIG. 2B .
- n 1 is the refractive index coefficient of the first insulated layer 12 A
- n 2 is the refractive index coefficient of the second insulated layer 12 B
- n 1 and n 2 are different.
- a and b are the interfaces of the insulated layers. As shown in FIG.
- Ra ⁇ Rb. Therefore, the phase difference of the reflective light between a interface and b interface is 180 degree.
- the thickness in each of the multi-layer structures is ⁇ /4 ( ⁇ is the symbol of wavelength)
- the thickness of the film is the product of the refractive index coefficient and the wavelength. Therefore, the thickness of the first insulated layer 12 A is n 1 ⁇ /4 and the thickness of the second insulated layer 12 B is n 2 ⁇ /4. Therefore, as the description above, the reflective waves in the adjacent interfaces will have 180 degree phase difference. After all the phase differences are added together, the wavelengths of the reflective waves in the adjacent interface are the same and it would have the constructive interference. Because of this characteristic, the multi-layer structures are used to be the mirror.
- the thickness in each of the multi-layer structures (such as 12 A, 12 B and so on) is 1 ⁇ 2 wavelength and the thicknesses of the thin films in each of the multi-layer structures are n 1 ⁇ /2 and n 2 ⁇ /2, the reflective waves in the adjacent interfaces are different and the phase different is 180 degree. Because the adjacent interface will have constructive interference, the multi-layer constructors are used to be the anti-reflective layer or the reflective layer.
- the refractive index coefficient of the first insulated layer 12 A is higher than the refractive index coefficient of the second insulated layer 12 B.
- the refractive index coefficient of the first insulated layer 12 A could be lower than the refractive index coefficient of the second insulated layer 12 B.
- the multi-layer structure 12 is made by the first insulated layer 12 A with low refractive index and the second insulated layer 12 B with high refractive index or the first insulated layer 12 A with high refractive index and the second insulated layer 12 B with low refractive index.
- the first insulated layer 12 A and the second insulated layer 12 B are interlacedly stacking, as shown in FIG. 2B .
- the multi-layer structure 12 is made by a plurality of insulated layers 121 , 123 , 125 and 127 and the insulated layers 121 , 123 , 125 and 127 are stacking according to their refractive indices, as shown in FIG. 2C .
- the refractive indices of the multi-layer structure 12 made by insulated layers 121 , 123 , 125 and 127 are between the refractive indices of the first conductive semiconductor layer 32 and the substrate 10 .
- the materials of the insulated layers are selected from the group consisting of: SiO x , Si x N y , SiO x N y , ZnSe, TiO 2 and Ta 2 O 2 .
- the material of the substrate 10 is selected from the group consisting of: MgAl 2 O 4 , GaN, AlN, SiC, GaAs, AlN, GaP, Si, Ge, ZnO, MgO, LAO, LGO and glasses.
- the following steps are based on the multi-layer structures 12 with at least two insulated layers 12 A and 12 B.
- a patterned photoresist layer (not shown) is formed on the second insulated layer 12 B and an etching process is sequentially used on the second insulated layer 12 B and the first insulated layer 12 A so as to remove a portion of the second insulated layer 12 B and the first insulated layer 12 A to expose a portion of the top surface of the substrate 10 , as shown in FIG. 2D .
- FIG. 2E is a view showing that a buffer layer formed on the substrate and the multi-layer structure.
- the substrate 10 with the multi-layer structure 12 is installed into a MOVPE (metalorganic vapour phase epitaxy) reactive container, and a buffer layer 20 is formed on the substrate 10 .
- the buffer layer 20 is a multi-strain releasing layer structure and used to get a high quality GaN layer.
- the buffer layer 20 is made by a compound layer (not shown) and an III-V group compound layer.
- the compound layer is made by GaN, such as AlGaN.
- FIG. 2F it is a view showing that a semiconductor epi-stacked structure is formed on the buffer layer.
- a semiconductor epi-stacked structure 30 is formed on the buffer layer 20 and includes a first conductive semiconductor layer 32 formed on the buffer layer 20 , an active layer 34 formed on the first conductive semiconductor layer 32 and a second conductive semiconductor layer 36 formed on the active layer 34 .
- the first conductive semiconductor layer 32 and the second conductive semiconductor layer 36 is compound conductive semiconductor layer made by III-V group material, such as Nitrogen semiconductor layer.
- the doping type of the first conductive semiconductor layer 32 is different from the doping type of the second conductive semiconductor layer 36 .
- the second conductive semiconductor layer 36 must be P-type conductive semiconductor layer. It is very clear to know that the active layer 34 is formed between the N-type conductive semiconductor layer and the P-type conductive semiconductor layer. The electrons and holes between the N-type conductive semiconductor layer and the P-type conductive semiconductor layer will be driven to the active layer 34 by adding some voltage and the recombination is generated to emit the light.
- first conductive semiconductor layer 32 and the second conductive semiconductor layer 36 can be N-type conductive semiconductor layer or P-type conductive semiconductor layer in the semiconductor epi-stacked structure 30 of the optical device of the present invention.
- the first conductive semiconductor layer 32 when the second conductive semiconductor layer 36 is P-type conductive semiconductor layer, the first conductive semiconductor layer 32 must be a N-type conductive semiconductor layer and vice versa.
- the semiconductor epi-stacked structure 30 of the optical device disclosed in the present invention can be a conventional semiconductor epi-stacked structure such as, light emitting diode (LED), laser, photo-detector or VCSEL (vertical-cavity surface emitting laser).
- FIG. 2F there is a transparent conductive layer 40 formed on the semiconductor epi-stacked structure 30 .
- a first electrode 50 and a second electrode 60 are formed on the structure.
- the transparent conductive layer 40 is formed on the surface of the second conductive semiconductor layer 36 of the semiconductor epi-stacked structure 30 .
- the material of the transparent conductive layer 40 may be Ni/Au, NiO/Au, Ta/Au, TiWN, TiN, Indium Tin Oxide (ITO), Antimony Doped Tin Oxide (ATO), AZO or Zn 2 SnO 4 , and for example, a thickness of the transparent conductive layer 40 made of ITO is about 2500 A.
- FIG. 2G and FIG. 2H are views showing that a first electrode 50 and a second electrode 60 are formed on the structure shown in FIG. 2F .
- the second electrode 60 is formed on the transparent conductive layer 40 .
- the second conductive semiconductor layer 36 is a P-type nitrogen conductive semiconductor layer, so the material of the second electrode 60 is Au/Ge/Ni, Ti/Al, Ti/Au, Ti/Al/Ti/Au, Cr/Au or a compound thereof.
- the optical device is formed. It should be noted that manufacture process of the first electrode 50 and the second electrode 60 is well know in the conventional art, therefore the detail description of the manufacture process is omitted herein.
- a photoresist layer (not shown) formed on the transparent conductive layer by using a semiconductor process.
- a lithography process such as etching step, is used to remove a portion of the transparent conductive layer 40 to expose a portion of the surface of the second conductive semiconductor layer 36 to remove the photoresist layer.
- the material of the second electrode 60 is Au/Ge/Ni, Ti/Al, Ti/Au, Ti/Al/Ti/Au, Cr/Au or an ally thereof.
- the first electrode 50 is formed on the bottom surface of the substrate 10 .
- the material of the first electrode 50 is Au/Ge/Ni, Ti/Al, Ti/Au, Ti/Al/Ti/Au, Cr/Au ally or W/Al alloy. Therefore, according to the description above, the optical device is formed. It should be noted that manufacture process of the first electrode 50 and the second electrode 60 is well know in the conventional art, therefore the detail description of the manufacture process is omitted herein.
- the optical device is made by the insulated layers 121 , 123 , 125 and 127 respectively stacking from bottom to top in accordance with the refractive indices or at least two multi-layer structures 12 with different refractive indices, because of the multi-layer structure with high refractive indices, a flip-chip method is used in the semiconductor process to turn over the optical device and the optical device is electrically connected to another circuit board (not shown) to complete the packing process of the optical device.
- FIG. 3A to FIG. 3D are views showing the steps to enhance the illuminant efficiency of the optical device with multi-layer structure.
- a multi-layer structure 12 , a buffer layer 20 , and semiconductor epi-stacked structure 30 are formed on the substrate 10 .
- the steps of forming the multi-layer structure 12 , the buffer layer 20 , and semiconductor epi-stacked structure 30 are the same as the description above, so the detail descriptions are omitted therein.
- the multi-layer 12 is made by a plurality of insulated layers 121 , 123 , 125 and 127 in an embodiment and they are respectively stacking from bottom to top in accordance with the refractive indices, as shown in FIG. 2C . Therefore, the refractive indices of the insulated layers 121 , 123 , 125 and 127 of the multi-layer structure 12 are between the refractive indices of the first conductive semiconductor layer 32 and the substrate 10 .
- FIG. 3B is a view showing that a first region and a second region of the semiconductor epi-stacked structure 30 on the buffer layer 20 .
- a lithography process or an etching process is used to form a patterned photoresist layer (not shown) on the second conductive semiconductor layer 36 of the semiconductor epi-stacked structure 30 .
- the etching process is used to remove a portion of the conductive semiconductor layer 36 , the active layer 34 and the first conductive semiconductor layer 32 to expose a portion of the surface of the first conductive semiconductor layer 32 to form a semiconductor epi-stacked structure 30 with a first region 30 A (the exposed portion of the first conductive semiconductor layer 32 ) and the second region 30 B (the region covered by the active layer 34 and the second conductive semiconductor layer 36 ).
- FIGS. 3C and 3D are views showing that a first electrode and a second electrode of the transparent conductive layer are formed on the lateral epitaxial structure.
- a transparent conductive layer 40 is formed on the second conductive semiconductor layer 36 of the second region 30 B of the lateral epitaxial structure 30 .
- the material of the transparent conductive layer 40 may be Ni/Au, NiO/Au, Ta/Au, TiWN, TiN, Indium Tin Oxide (ITO), Antimony Doped Tin Oxide (ATO), AZO or Zn 2 SnO 4 , and for example, a thickness of the transparent conductive layer 40 made of ITO is about 2500 A.
- FIGS. 3C and 3D show that the first electrode 50 is formed on the first region 30 A of the first conductive semiconductor layer 32 and the second electrode 60 is formed on the transparent conductive layer 40 to complete the optical device structure.
- a photoresist layer (not shown) formed on the transparent conductive layer 40 by using a semiconductor process.
- a lithography process such as etching step, is used to remove a portion of the transparent conductive layer 40 to expose a portion of the surface of the second conductive semiconductor layer 36 to remove the photoresist layer.
- the material of the second electrode 60 is Au/Ge/Ni, Ti/Al, Ti/Au, Ti/Al/Ti/Au, Cr/Au or an ally thereof.
- the first electrode 50 is formed on the first region 30 A of the first conductive semiconductor layer 32 .
- the material of the first electrode 50 is Au/Ge/Ni, Ti/Al, Ti/Au, Ti/Al/Ti/Au, Cr/Au ally or W/Al ally. Therefore, according to the description above, the optical device is formed. It should be noted that manufacture process of the first electrode 50 and the second electrode 60 is well know in the conventional art, therefore the detail description of the manufacture process is omitted herein.
- the purpose of forming the multi-layer structure 12 on the substrate 10 is to let the insulated layer 12 A and 12 B be a reflective mirror or anti-reflective layer because the insulated material layers 12 A and 12 B are interlacedly stacking with reflective or anti-reflective ability.
- the reflective or anti-reflective efficiency of the optical device (as shown in FIG. 2E and FIG. 3C ) is enhanced. Therefore, a plurality of multi-layer structures are to replace the conventional single layer SiO to increase the reflective or anti-reflective efficiency of the light in the device and the illuminant efficiency of the optical device is enhanced.
- the optical device is made by the insulated materials 121 , 123 , 125 and 127 respectively stacking from bottom to top in accordance with the refractive indices or at least two multi-layer structures 12 with different refractive indices, because of the multi-layer structure with high refractive indices, a flip-chip method is used in the semiconductor process to turn over the optical device and the optical device is electrically connected to another circuit board (not shown) to complete the packing process of the optical device.
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Abstract
Description
- This application is a divisional application of and claims priority benefit of an U.S. application Ser. No. 12/408,795, filed on Mar. 23, 2009, now allowed. The prior application Ser. No. 12/408,795 claims the priority benefit of Taiwan application serial no. 98103349, filed on Feb. 3, 2009. The entirety of each of the above-mentioned patent applications is hereby incorporated by reference herein and made a part of this specification.
- 1. Field of the Invention
- The present invention is an optical device, and more particularly is to form a multi-layer structure over the substrate to increase the light reflective efficiency of the optical device.
- 2. Description of Related Art
- The conventional light emitting diode (LED) as shown in
FIG. 1A andFIG. 1B comprises asubstrate 100, abuffer layer 102, a multi-layer structure, a transparentconductive layer 110 and twoelectrodes active layer 106 between the N-type semiconductor layer 104 and the P-type semiconductor layer 108. Theactive layer 106 is a single-layer structure or a multi-layer structure made by a reactive nitrogen semiconductor compound. The voltage inputted between theelectrodes type semiconductor layer 104 and P-type semiconductor layer 108 and passing through theactive layer 106. The electrons and the holes will rejoin in theactive layer 106 to generate light. The light generated in the illuminant layer will transmit to anywhere and release at the exposed surfaces of the LED. In order to generate the light, the light should be rejected at the predetermined direction. - Generally, the illuminant efficiency of the LED is based some parameters calculated at the LED. One is the light collection efficiency, which is the ratio of the light transmitted from the LED and the light generated by the LED. Practically, because of the absorption of the different layers within the LED, the light transmitted from the LED is less than the light generated by the LED. In order to increase the light collection efficiency, a reflective layer is added within the multi-layer structure of the LED in prior art to guide the light to transmit in the desired direction.
- In order to improve the crystallized quality of the GaN compound layer, the problem of the lattice between the sapphire and the active layer of the GaN compound layer is needed to be solved. Therefore, in prior art, as shown in
FIG. 1A andFIG. 1B , abuffer layer 102 made by AlN is formed between thesubstrate 100 and the N-type semiconductor layer 104. The crystal structure of thebuffer layer 102 is non-single crystal such as microcrystal or polycrystal. The crystal structure of thebuffer layer 102 is able to solve the problem of the crystal mismatching between the GaN compound layers. However, the prior art described above, the refractive index generated by the light in the active layer restrains the illuminant efficiency of the optical device. - According to the problems described above, the main object of the present invention is to use the insulated material layer forming multi-layer structure on the substrate to reduce dislocation and generate the reflective layer and anti-reflective layer by the multi-layer structure to enhance the illuminant efficiency.
- According to the object described above, the present invention discloses an optical device includes a first electrode; a plurality of multi-layer structures disposed on the substrate, wherein the multi-layer structure is consisted of at least two insulated layers with different refractive indices formed alternately; a first conductive semiconductor layer disposed on the substrate to cover the multi-layer structure; an active layer disposed on the first conductive semiconductor layer; a second conductive semiconductor layer disposed on the active layer; and a transparent conductive layer disposed on the second conductive semiconductor layer.
- The present invention also discloses an optical device including a substrate; a plurality of multi-layer structure disposed on the substrate and arranged separately from each other on the substrate, wherein each of the multi-layer structure is consisted of a plurality of insulated layers stacked together, the insulated layers have different refractive indices and the refractive indices of the insulated layers are consecutively increasing from the lowermost insulated layer to the uppermost insulated layer; a first conductive semiconductor layer disposed on the substrate to cover the multi-layer structure, wherein the first conductive semiconductor layer includes a first region and a second region; an active layer disposed on the first conductive semiconductor layer; a second conductive semiconductor layer disposed on the active layer; a transparent conductive layer disposed on the second conductive semiconductor layer; and a first electrode disposed on the first region of the first conductive semiconductor layer.
- The foregoing aspects and many of the attendant advantages of this invention will become more readily appreciated as the same becomes better understood by reference to the following detailed description, when taken in conjunction with the accompanying drawings.
-
FIG. 1A andFIG. 1B are views illustrating the conventional structure of the optical device. -
FIG. 2A toFIG. 2H are views illustrating the steps of forming the multi-layer structure in the optical device. -
FIG. 3A toFIG. 3D are views illustrating the steps of forming the multi-layer structure in the optical device of another embodiment. - Reference will now be made in detail to the present preferred embodiments of the invention, examples of which are illustrated in the accompanying drawings. Wherever possible, the same reference counting numbers are used in the drawings and the description to refer to the same or like parts.
-
FIG. 2A toFIG. 2H are views showing an embodiment of the optical device in the present invention. Now referring toFIG. 2A , it is a view showing that a plurality of multi-layer structures formed on the substrate. As shown inFIG. 2A , asubstrate 10, such as a substrate made by sapphire, is provided. A conventional semiconductor process is used to form a first insulatedlayer 12A on the top surface of thesubstrate 10 and form a second insulatedlayer 12B on the first insulatedlayer 12A. In this embodiment, the purpose to form themulti-layer structures 10 before a buffer layer (not shown) is formed on thesubstrate 10 is to have the effect of the reflector and anti-reflector by interlacedly stacking the first insulatedlayer 12A and the second insulatedlayer 12B and the reflective efficiency and anti-reflective efficiency of the light within the optical device will enhance. Therefore, a plurality of multi-layer structures formed on thesubstrate 10 are used to substitute the conventional SiO2 single-layer film used by the lateral epitaxial overgrowth to increase the reflective efficiency and the anti-efficiency of the light in the optical device so as to enhance the illuminant efficiency of the optical device. - It should be noted that, in one embodiment, each of the
multi-layer structures 12 is made by at least two insulatedlayers layers FIG. 2B . InFIG. 2B , n1 is the refractive index coefficient of the first insulatedlayer 12A and n2 is the refractive index coefficient of the second insulatedlayer 12B, and n1 and n2 are different. a and b are the interfaces of the insulated layers. As shown inFIG. 2B , the refractive index coefficient in a interface is Ra and Ra=(n2−n1)/(n1+n2) and the refractive index coefficient in b interface is Rb=(n1−n2)/(n1+n2). As the description above, Ra=−Rb. Therefore, the phase difference of the reflective light between a interface and b interface is 180 degree. - If the thickness in each of the multi-layer structures is λ/4 (λ is the symbol of wavelength), the thickness of the film is the product of the refractive index coefficient and the wavelength. Therefore, the thickness of the first
insulated layer 12A is n1×λ/4 and the thickness of the secondinsulated layer 12B is n2×λ/4. Therefore, as the description above, the reflective waves in the adjacent interfaces will have 180 degree phase difference. After all the phase differences are added together, the wavelengths of the reflective waves in the adjacent interface are the same and it would have the constructive interference. Because of this characteristic, the multi-layer structures are used to be the mirror. On the contrary, if the thickness in each of the multi-layer structures (such as 12A, 12B and so on) is ½ wavelength and the thicknesses of the thin films in each of the multi-layer structures are n1×λ/2 and n2λλ/2, the reflective waves in the adjacent interfaces are different and the phase different is 180 degree. Because the adjacent interface will have constructive interference, the multi-layer constructors are used to be the anti-reflective layer or the reflective layer. - Therefore, in the embodiment of the present invention, the refractive index coefficient of the first
insulated layer 12A is higher than the refractive index coefficient of the secondinsulated layer 12B. However, in a different embodiment, the refractive index coefficient of the firstinsulated layer 12A could be lower than the refractive index coefficient of the secondinsulated layer 12B. - Therefore, the
multi-layer structure 12 is made by the firstinsulated layer 12A with low refractive index and the secondinsulated layer 12B with high refractive index or the firstinsulated layer 12A with high refractive index and the secondinsulated layer 12B with low refractive index. The firstinsulated layer 12A and the secondinsulated layer 12B are interlacedly stacking, as shown inFIG. 2B . In another embodiment, themulti-layer structure 12 is made by a plurality ofinsulated layers insulated layers FIG. 2C . The refractive indices of themulti-layer structure 12 made byinsulated layers conductive semiconductor layer 32 and thesubstrate 10. - Besides, in the embodiments of the present invention, the materials of the insulated layers are selected from the group consisting of: SiOx, SixNy, SiOxNy, ZnSe, TiO2 and Ta2O2. The material of the
substrate 10 is selected from the group consisting of: MgAl2O4, GaN, AlN, SiC, GaAs, AlN, GaP, Si, Ge, ZnO, MgO, LAO, LGO and glasses. - Now, the following steps are based on the
multi-layer structures 12 with at least twoinsulated layers insulated layer 12B and an etching process is sequentially used on the secondinsulated layer 12B and the firstinsulated layer 12A so as to remove a portion of the secondinsulated layer 12B and the firstinsulated layer 12A to expose a portion of the top surface of thesubstrate 10, as shown inFIG. 2D . - Now, referring to
FIG. 2E ,FIG. 2E is a view showing that a buffer layer formed on the substrate and the multi-layer structure. Thesubstrate 10 with themulti-layer structure 12 is installed into a MOVPE (metalorganic vapour phase epitaxy) reactive container, and abuffer layer 20 is formed on thesubstrate 10. Thebuffer layer 20 is a multi-strain releasing layer structure and used to get a high quality GaN layer. In the present embodiment, thebuffer layer 20 is made by a compound layer (not shown) and an III-V group compound layer. The compound layer is made by GaN, such as AlGaN. - Please refer to
FIG. 2F , it is a view showing that a semiconductor epi-stacked structure is formed on the buffer layer. As shown inFIG. 2F , a semiconductor epi-stackedstructure 30 is formed on thebuffer layer 20 and includes a firstconductive semiconductor layer 32 formed on thebuffer layer 20, anactive layer 34 formed on the firstconductive semiconductor layer 32 and a secondconductive semiconductor layer 36 formed on theactive layer 34. The firstconductive semiconductor layer 32 and the secondconductive semiconductor layer 36 is compound conductive semiconductor layer made by III-V group material, such as Nitrogen semiconductor layer. Besides, the doping type of the firstconductive semiconductor layer 32 is different from the doping type of the secondconductive semiconductor layer 36. For example, when the firstconductive semiconductor layer 32 is an N-type conductive semiconductor layer, the secondconductive semiconductor layer 36 must be P-type conductive semiconductor layer. It is very clear to know that theactive layer 34 is formed between the N-type conductive semiconductor layer and the P-type conductive semiconductor layer. The electrons and holes between the N-type conductive semiconductor layer and the P-type conductive semiconductor layer will be driven to theactive layer 34 by adding some voltage and the recombination is generated to emit the light. - Therefore, as the description above, first
conductive semiconductor layer 32 and the secondconductive semiconductor layer 36 can be N-type conductive semiconductor layer or P-type conductive semiconductor layer in the semiconductor epi-stackedstructure 30 of the optical device of the present invention. In the embodiment of the present invention, when the secondconductive semiconductor layer 36 is P-type conductive semiconductor layer, the firstconductive semiconductor layer 32 must be a N-type conductive semiconductor layer and vice versa. The semiconductor epi-stackedstructure 30 of the optical device disclosed in the present invention can be a conventional semiconductor epi-stacked structure such as, light emitting diode (LED), laser, photo-detector or VCSEL (vertical-cavity surface emitting laser). - Now, referring to
FIG. 2F , there is a transparentconductive layer 40 formed on the semiconductor epi-stackedstructure 30. Afirst electrode 50 and asecond electrode 60 are formed on the structure. After the semiconductor epi-stackedstructure 30 is formed on thebuffer layer 20, the temperature of the reactive container is reduced to the room temperature and the semiconductor epi-stacked structure die is taken out from the reactive container. Therefore, the transparentconductive layer 40 is formed on the surface of the secondconductive semiconductor layer 36 of the semiconductor epi-stackedstructure 30. The material of the transparentconductive layer 40 may be Ni/Au, NiO/Au, Ta/Au, TiWN, TiN, Indium Tin Oxide (ITO), Antimony Doped Tin Oxide (ATO), AZO or Zn2SnO4, and for example, a thickness of the transparentconductive layer 40 made of ITO is about 2500 A. - Please refer to
FIG. 2G andFIG. 2H .FIG. 2G andFIG. 2H which are views showing that afirst electrode 50 and asecond electrode 60 are formed on the structure shown inFIG. 2F . Thesecond electrode 60 is formed on the transparentconductive layer 40. In the present invention, the secondconductive semiconductor layer 36 is a P-type nitrogen conductive semiconductor layer, so the material of thesecond electrode 60 is Au/Ge/Ni, Ti/Al, Ti/Au, Ti/Al/Ti/Au, Cr/Au or a compound thereof. - Therefore, according to the description above, the optical device is formed. It should be noted that manufacture process of the
first electrode 50 and thesecond electrode 60 is well know in the conventional art, therefore the detail description of the manufacture process is omitted herein. - In another embodiment, there is a photoresist layer (not shown) formed on the transparent conductive layer by using a semiconductor process. A lithography process, such as etching step, is used to remove a portion of the transparent
conductive layer 40 to expose a portion of the surface of the secondconductive semiconductor layer 36 to remove the photoresist layer. The material of thesecond electrode 60 is Au/Ge/Ni, Ti/Al, Ti/Au, Ti/Al/Ti/Au, Cr/Au or an ally thereof. Thefirst electrode 50 is formed on the bottom surface of thesubstrate 10. The material of thefirst electrode 50 is Au/Ge/Ni, Ti/Al, Ti/Au, Ti/Al/Ti/Au, Cr/Au ally or W/Al alloy. Therefore, according to the description above, the optical device is formed. It should be noted that manufacture process of thefirst electrode 50 and thesecond electrode 60 is well know in the conventional art, therefore the detail description of the manufacture process is omitted herein. - Therefore, as the description above, no matter the optical device is made by the
insulated layers multi-layer structures 12 with different refractive indices, because of the multi-layer structure with high refractive indices, a flip-chip method is used in the semiconductor process to turn over the optical device and the optical device is electrically connected to another circuit board (not shown) to complete the packing process of the optical device. -
FIG. 3A toFIG. 3D are views showing the steps to enhance the illuminant efficiency of the optical device with multi-layer structure. As shown inFIG. 3A , amulti-layer structure 12, abuffer layer 20, and semiconductor epi-stackedstructure 30 are formed on thesubstrate 10. The steps of forming themulti-layer structure 12, thebuffer layer 20, and semiconductor epi-stackedstructure 30 are the same as the description above, so the detail descriptions are omitted therein. - It should be noted that the multi-layer 12 is made by a plurality of
insulated layers FIG. 2C . Therefore, the refractive indices of theinsulated layers multi-layer structure 12 are between the refractive indices of the firstconductive semiconductor layer 32 and thesubstrate 10. -
FIG. 3B is a view showing that a first region and a second region of the semiconductor epi-stackedstructure 30 on thebuffer layer 20. As shown inFIG. 3B , a lithography process or an etching process is used to form a patterned photoresist layer (not shown) on the secondconductive semiconductor layer 36 of the semiconductor epi-stackedstructure 30. Then, the etching process is used to remove a portion of theconductive semiconductor layer 36, theactive layer 34 and the firstconductive semiconductor layer 32 to expose a portion of the surface of the firstconductive semiconductor layer 32 to form a semiconductor epi-stackedstructure 30 with afirst region 30A (the exposed portion of the first conductive semiconductor layer 32) and thesecond region 30B (the region covered by theactive layer 34 and the second conductive semiconductor layer 36). -
FIGS. 3C and 3D are views showing that a first electrode and a second electrode of the transparent conductive layer are formed on the lateral epitaxial structure. Similarly, a transparentconductive layer 40 is formed on the secondconductive semiconductor layer 36 of thesecond region 30B of thelateral epitaxial structure 30. After the semiconductor epi-stackedstructure 30 is formed on thebuffer layer 20, the temperature of the reactive container is reduced to the room temperature and the semiconductor epi-stacked structure die is taken out from the reactive container. Therefore, the transparentconductive layer 40 is formed on the surface of the secondconductive semiconductor layer 36 of the semiconductor epi-stackedstructure 30. The material of the transparentconductive layer 40 may be Ni/Au, NiO/Au, Ta/Au, TiWN, TiN, Indium Tin Oxide (ITO), Antimony Doped Tin Oxide (ATO), AZO or Zn2SnO4, and for example, a thickness of the transparentconductive layer 40 made of ITO is about 2500 A. - Please refer to
FIGS. 3C and 3D . The views show that thefirst electrode 50 is formed on thefirst region 30A of the firstconductive semiconductor layer 32 and thesecond electrode 60 is formed on the transparentconductive layer 40 to complete the optical device structure. In a different embodiment, there is a photoresist layer (not shown) formed on the transparentconductive layer 40 by using a semiconductor process. A lithography process, such as etching step, is used to remove a portion of the transparentconductive layer 40 to expose a portion of the surface of the secondconductive semiconductor layer 36 to remove the photoresist layer. The material of thesecond electrode 60 is Au/Ge/Ni, Ti/Al, Ti/Au, Ti/Al/Ti/Au, Cr/Au or an ally thereof. Thefirst electrode 50 is formed on thefirst region 30A of the firstconductive semiconductor layer 32. The material of thefirst electrode 50 is Au/Ge/Ni, Ti/Al, Ti/Au, Ti/Al/Ti/Au, Cr/Au ally or W/Al ally. Therefore, according to the description above, the optical device is formed. It should be noted that manufacture process of thefirst electrode 50 and thesecond electrode 60 is well know in the conventional art, therefore the detail description of the manufacture process is omitted herein. - The purpose of forming the
multi-layer structure 12 on thesubstrate 10 is to let theinsulated layer insulated material layers - Therefore, the reflective or anti-reflective efficiency of the optical device (as shown in
FIG. 2E andFIG. 3C ) is enhanced. Therefore, a plurality of multi-layer structures are to replace the conventional single layer SiO to increase the reflective or anti-reflective efficiency of the light in the device and the illuminant efficiency of the optical device is enhanced. - Therefore, no matter the optical device is made by the
insulated materials multi-layer structures 12 with different refractive indices, because of the multi-layer structure with high refractive indices, a flip-chip method is used in the semiconductor process to turn over the optical device and the optical device is electrically connected to another circuit board (not shown) to complete the packing process of the optical device. - It will be apparent to those skilled in the art that various modifications and variations can be made to the structure of the present invention without departing from the scope or spirit of the invention. In view of the foregoing, it is intended that the present invention cover modifications and variations of this invention provided they fall within the scope of the following claims and their equivalents.
Claims (12)
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TW098103349A TWI399871B (en) | 2009-02-03 | 2009-02-03 | Optical device and the forming method thereof |
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US12/408,795 US8362505B2 (en) | 2009-02-03 | 2009-03-23 | Optical device and the forming method thereof |
US13/752,350 US20130140581A1 (en) | 2009-02-03 | 2013-01-28 | Optical device |
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CN104201270A (en) * | 2014-09-24 | 2014-12-10 | 杭州士兰明芯科技有限公司 | LED substrate structure and production method thereof |
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CN101937960B (en) * | 2010-08-20 | 2012-08-22 | 厦门市三安光电科技有限公司 | AlGaInP light-emitting diode in vertical structure and manufacturing method thereof |
KR20130137295A (en) * | 2012-06-07 | 2013-12-17 | 엘지이노텍 주식회사 | Light emitting device and light emitting device package |
KR102135092B1 (en) * | 2013-06-03 | 2020-07-17 | 엘지전자 주식회사 | Operating Method for Image Display apparatus |
CN113223943B (en) * | 2020-01-21 | 2023-03-24 | 济南晶正电子科技有限公司 | Piezoelectric thin film composite substrate and preparation method thereof |
CN113224187A (en) * | 2020-01-21 | 2021-08-06 | 济南晶正电子科技有限公司 | Composite film and method for producing same |
CN113534336B (en) * | 2020-04-20 | 2023-07-11 | 济南晶正电子科技有限公司 | Composite film structure, preparation method thereof and electronic component |
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US20090032830A1 (en) * | 2007-08-03 | 2009-02-05 | Chi Mei Lighting Technology Corp. | Light emitting diode and manufacturing method thereof |
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US6818328B2 (en) * | 2003-02-20 | 2004-11-16 | Fuji Electric Co., Ltd. | Color conversion filter substrate, color conversion type multicolor organic EL display having the color conversion filter substrate, and methods of manufacturing these |
TWI300277B (en) * | 2006-06-16 | 2008-08-21 | Uni Light Touchtek Corp | Method for manufacturing gallium nitride light emitting diode devices |
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US20100193810A1 (en) | 2010-08-05 |
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