US20120261097A1 - Compact two sided cold plate with floating transfer tubes - Google Patents
Compact two sided cold plate with floating transfer tubes Download PDFInfo
- Publication number
- US20120261097A1 US20120261097A1 US13/490,564 US201213490564A US2012261097A1 US 20120261097 A1 US20120261097 A1 US 20120261097A1 US 201213490564 A US201213490564 A US 201213490564A US 2012261097 A1 US2012261097 A1 US 2012261097A1
- Authority
- US
- United States
- Prior art keywords
- cold plate
- transfer tube
- bore
- recited
- support structure
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Abandoned
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Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L23/00—Details of semiconductor or other solid state devices
- H01L23/34—Arrangements for cooling, heating, ventilating or temperature compensation ; Temperature sensing arrangements
- H01L23/46—Arrangements for cooling, heating, ventilating or temperature compensation ; Temperature sensing arrangements involving the transfer of heat by flowing fluids
- H01L23/473—Arrangements for cooling, heating, ventilating or temperature compensation ; Temperature sensing arrangements involving the transfer of heat by flowing fluids by flowing liquids
-
- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
- H05K7/00—Constructional details common to different types of electric apparatus
- H05K7/20—Modifications to facilitate cooling, ventilating, or heating
- H05K7/20218—Modifications to facilitate cooling, ventilating, or heating using a liquid coolant without phase change in electronic enclosures
- H05K7/20254—Cold plates transferring heat from heat source to coolant
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2924/00—Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
- H01L2924/0001—Technical content checked by a classifier
- H01L2924/0002—Not covered by any one of groups H01L24/00, H01L24/00 and H01L2224/00
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
- Y10T29/00—Metal working
- Y10T29/49—Method of mechanical manufacture
- Y10T29/4935—Heat exchanger or boiler making
- Y10T29/49373—Tube joint and tube plate structure
Definitions
- This disclosure generally relates to a cooling structure for cooling electronic components. More particularly, this disclosure relates to a cooling structure including a two sided cold plate support assembly.
- a cooling device Electronic components onboard aircraft or other vehicles that operate in extreme temperatures are typically protected from overheating by a cooling device. In some environments, air flow is either not available or insufficient to handle the thermal loads generated by the electronic components. In such applications, a cold plate is utilized through which a cooling fluid flows to remove heat from the electronic component. The cold plate is mounted adjacent the electronic component and supplied with fluid flow through appropriate conduits that lead to a fluid delivery system.
- a disclosed structural cold plate assembly includes cold plates mounted to opposing sides of a panel and in fluid communication through fluid passages through the panel.
- the disclosed structural cold plate assembly includes floating tubes that define a passage for fluid from one cold plate on one side of the panel to another cold plate on an opposing side of the panel.
- the disclosed tubes accommodate vibratory movement along with defining the passages that provide for fluid communication of a cooling medium between the cold plates and through the structural panel.
- FIG. 1 is a schematic view of a structural cold plate assembly.
- FIG. 2 is a sectional view of the example cold plate assembly.
- FIG. 3 is an exploded view of another example cold plate assembly.
- FIG. 4 is a perspective view of an example transfer tube.
- FIG. 5 is a cross-section of the example transfer tube.
- an example support assembly 10 includes a fixed structure 12 that supports a structural cold plate assembly 14 for thermally controlling and cooling heat generating devices 26 .
- the heat generating devices 26 are electronic devices that generate heat during operation.
- the disclosed structural cold plate assembly 14 would be useful for any application requiring thermal management.
- the example structural cold plate assembly 14 includes a panel 16 that includes a first side 18 and a second side 20 . Mounted to the first side 18 is a first cold plate 22 and mounted to the second side 20 is a second cold plate 24 . Each of the first and second cold plates 22 , 24 define passages through which a cooling medium flows to remove and control heat produced by the devices 26 . The panel 16 and thereby the first and second cold plates 22 , 24 are supported by at least one mount 28 to the fixed structure 12 .
- the fixed structure 12 could be a cabinet, wall, bulkhead or other fixed structure that provides a desired location for the devices 26 .
- cold plates 22 , 24 are disclosed by way of example, any heat exchanging device could also be utilized and would benefit from the example disclosures.
- the first and second cold plates 22 , 24 include passages or circuits (Shown in FIG. 2 ) through which the cooling medium flows to remove heat generated by the devices 26 .
- the devices 26 are mounted in thermal contact with each of the cold plates 22 , 24 such that thermal energy is transferred to the fluid medium.
- the devices 26 are mounted on the corresponding cold plate 22 , 24 .
- other mounting configurations that place the cold plate in thermal contact with the devices 26 are within the contemplation of this disclosure.
- the cooling medium is supplied by the first and second inlets 30 , 32 that are mounted to the first cooling plate 22 .
- the cooling medium can include a cooling fluid, air, or gas along with a combination of fluid, air and gas that facilitate the removal of heat generated by the devices 26 .
- the cooling plates 22 , 24 each include two separate cooling circuits and therefore two inlets 30 , 32 are provided.
- the cooling medium is then directed through passages ( FIG. 2 ) through the panel 16 to the second cooling plate 24 .
- the second cooling plate 24 includes first and second outlets 34 and 36 that direct the cooling medium through other portions of cooling circulation system.
- the cooling system may include a heat exchanger to dissipate heat absorbed by the cooling medium and a pump to power circulation of the cooling medium.
- the example structural cold plate assembly 14 provides for the use of different cooling mediums such as different types of fluid in each of the separate circuits to provide desired thermal control capabilities. Further, although the example structural cooling plate assembly 14 includes two separate cooling circuits, one or more than two cooling circuits are also within the contemplation for use with the disclosed device.
- the example cold plate assembly 14 includes a bore 46 that is defined within the first cold plate 22 , the second cold plate 24 , and the panel 16 .
- the first cold plate 22 includes the passages 38 that communicate with the bore 46 .
- the second cold plate 24 includes passages 40 that communicate with the bore 46 .
- the second cold plate 24 also includes a cavity 42 that is also in communication with the cooling passages 40 .
- the example cavity 42 is disposed along an axis A of the bore 46 and includes a cap 44 that closes off the cavity 42 .
- FIG. 2 the example cold plate assembly 14 includes a bore 46 that is defined within the first cold plate 22 , the second cold plate 24 , and the panel 16 .
- the first cold plate 22 includes the passages 38 that communicate with the bore 46 .
- the second cold plate 24 includes passages 40 that communicate with the bore 46 .
- the second cold plate 24 also includes a cavity 42 that is also in communication with the cooling passages 40 .
- the example cavity 42 is disposed along an axis A
- the example bore 46 includes a portion 48 defined within the first cold plate 22 and a portion 50 defined within the second cold plate 24 .
- the bore 46 defines a passage between the first cold plate 22 and the second cold plate 24 through the panel 16 .
- passages between the example first and second cold plates 22 , 24 include conduits that accommodate vibrational effects.
- a transfer tube 52 Disposed within each of the bores 46 is a transfer tube 52 .
- the transfer tube 52 is movable within the bore 46 to accommodate vibrational movement between the cold plates 22 , 24 and the panel 16 .
- the transfer tubes 52 are movable but are not moved between specific positions. Instead the transfer tubes 52 are suspended within the bore 46 in a desired position between biasing members 62 .
- the biasing members 62 comprise pliable seals that maintain a position of the transfer tube 52 within the bore 46 .
- the biasing members 62 suspend the transfer tube 52 within the bores 46 to define a conduit or fluid passage between cold plates 22 , 24 .
- another example panel 15 includes an opening 78 for a shim member 76 .
- the example shim member 76 defines the portion of the bore 46 that extends through the panel 15 .
- the example panel 15 includes the bore features 46 provided as an integral feature.
- the panel 15 provides the bore 46 in the separate shim member 76 . Separating the bore 46 from the panel 15 provides for the panel 15 structure to be simplified while still providing the required bore configuration.
- each of the transfer tubes 52 includes a central bore 54 that extends between a first flange 56 and a second flange 58 .
- the first and second flanges 56 , 58 include seals 60 that engage an inner surface of the bore 46 .
- the biasing members 62 exert a biasing force on the transfer tube 52 to maintain it in a relative position within the bore 46 .
- the example biasing members 62 comprise O-ring type seals that provide some sealing against leakage. However, the main operation of the example biasing member 62 is to provide and set a desired position between the bore portion 48 in the first cold plate 22 and the bore portion 50 in the second cold plate 24 .
- the example biasing members 62 exert a biasing force that is designed to maintain a position of the transfer tube 52 while allowing for relative movement between the cold plates 22 and 24 caused by vibration or other effects that might be encountered during operation.
- Additional seals 64 are provided at the interface between the panel 16 and each of the cold plates 22 , 24 .
- the seals 64 provide a secondary seal that provides a backup to the seals 60 , 62 disposed between the bore 46 and the transfer tube 52 .
- the first cold plate 22 is held to the second cold plate 24 by way of fasteners 72 .
- the example fasteners 72 include a bolt extending through each cold plate 22 , 24 and the panel 16 secured to a nut member.
- An alignment pin 74 is provided to align the panel 16 and the first cold plate 22 to the second cold plate 24 .
- the alignment pin 74 further acts as a shear pin to minimize relative lateral movement between the cold plates 22 , 24 and the panel 16 .
- the alignment pin 74 accommodates loads that are perpendicular to the bore 54 .
- the example alignment pin 74 can also be provided in different locations to provide the desired alignment between the first and second cold plates 22 , 24 . Alignment between the first and second cold plates 22 , 24 also aligns the bore portions 48 and 50 that comprise the bore 46 .
- the example transfer tube 52 includes the first flange 56 and second flange 58 .
- Each of the first flange 56 and second flange 58 includes an annular channel 66 that receives a sealing member 60 .
- the annular channel 66 is disposed between a first diameter 70 disposed at ends of the transfer tube 52 and a second diameter 68 spaced apart from the ends of the transfer tube.
- the second diameter 68 is greater than the first diameter 70 .
- the difference between the first diameter 70 and the second diameter 68 accommodate tilting movement of the transfer tube 52 . That is, the transfer tube 52 is disposed within the bore 46 such that it may compensate vibrational movement along the axis A. However, vibratory movement may also occur in a direction transverse to the axis A.
- the differences between the first diameter 70 and the second diameter 68 provide for a limited amount of tilting movement within the bore 46 . Accordingly, the transfer tube 52 is capable of tilting relative to the axis A without becoming lodged within the bore 46 to maintain its ability to move along the axis A and accommodate vibratory movement between the relative parts.
- the example transfer tube 52 of the cold plate assembly provides the desired fluid conduit between first and second cold plates 22 and 24 that is capable of accommodating high vibrational effects while maintaining the desired seal through a desired life cycle of the assembly.
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- Engineering & Computer Science (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Physics & Mathematics (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- General Physics & Mathematics (AREA)
- Computer Hardware Design (AREA)
- Power Engineering (AREA)
- Thermal Sciences (AREA)
- Cooling Or The Like Of Electrical Apparatus (AREA)
Abstract
A structural cold plate assembly includes cold plates mounted to opposing sides of a panel and in fluid communication through fluid passages that extend through the panel.
Description
- This application is a continuation in part of U.S. application Ser. No. 12/748,552 filed on Mar. 29, 2010.
- This subject of this disclosure was made with government support under Contract No.: NNJ06TA25C awarded by National Aeronautics and Space Administration. The Government has certain rights in this invention.
- This disclosure generally relates to a cooling structure for cooling electronic components. More particularly, this disclosure relates to a cooling structure including a two sided cold plate support assembly.
- Electronic components onboard aircraft or other vehicles that operate in extreme temperatures are typically protected from overheating by a cooling device. In some environments, air flow is either not available or insufficient to handle the thermal loads generated by the electronic components. In such applications, a cold plate is utilized through which a cooling fluid flows to remove heat from the electronic component. The cold plate is mounted adjacent the electronic component and supplied with fluid flow through appropriate conduits that lead to a fluid delivery system.
- A disclosed structural cold plate assembly includes cold plates mounted to opposing sides of a panel and in fluid communication through fluid passages through the panel. The disclosed structural cold plate assembly includes floating tubes that define a passage for fluid from one cold plate on one side of the panel to another cold plate on an opposing side of the panel. The disclosed tubes accommodate vibratory movement along with defining the passages that provide for fluid communication of a cooling medium between the cold plates and through the structural panel.
- These and other features disclosed herein can be best understood from the following specification and drawings, the following of which is a brief description.
-
FIG. 1 is a schematic view of a structural cold plate assembly. -
FIG. 2 is a sectional view of the example cold plate assembly. -
FIG. 3 is an exploded view of another example cold plate assembly. -
FIG. 4 is a perspective view of an example transfer tube. -
FIG. 5 is a cross-section of the example transfer tube. - Referring to
FIG. 1 , anexample support assembly 10 includes afixed structure 12 that supports a structuralcold plate assembly 14 for thermally controlling and coolingheat generating devices 26. In the disclosed example, the heat generatingdevices 26 are electronic devices that generate heat during operation. As appreciated, although electronic devices are described as examples, the disclosed structuralcold plate assembly 14 would be useful for any application requiring thermal management. - The example structural
cold plate assembly 14 includes apanel 16 that includes afirst side 18 and asecond side 20. Mounted to thefirst side 18 is a firstcold plate 22 and mounted to thesecond side 20 is a secondcold plate 24. Each of the first and secondcold plates devices 26. Thepanel 16 and thereby the first and secondcold plates mount 28 to thefixed structure 12. Thefixed structure 12 could be a cabinet, wall, bulkhead or other fixed structure that provides a desired location for thedevices 26. Moreover, althoughcold plates - The first and second
cold plates FIG. 2 ) through which the cooling medium flows to remove heat generated by thedevices 26. Thedevices 26 are mounted in thermal contact with each of thecold plates devices 26 are mounted on the correspondingcold plate devices 26 are within the contemplation of this disclosure. - The cooling medium is supplied by the first and
second inlets first cooling plate 22. The cooling medium can include a cooling fluid, air, or gas along with a combination of fluid, air and gas that facilitate the removal of heat generated by thedevices 26. In this example thecooling plates inlets FIG. 2 ) through thepanel 16 to thesecond cooling plate 24. Thesecond cooling plate 24 includes first andsecond outlets - As appreciated, the cooling system may include a heat exchanger to dissipate heat absorbed by the cooling medium and a pump to power circulation of the cooling medium. Moreover, the example structural
cold plate assembly 14 provides for the use of different cooling mediums such as different types of fluid in each of the separate circuits to provide desired thermal control capabilities. Further, although the example structuralcooling plate assembly 14 includes two separate cooling circuits, one or more than two cooling circuits are also within the contemplation for use with the disclosed device. - Referring to
FIG. 2 , the examplecold plate assembly 14 includes abore 46 that is defined within the firstcold plate 22, the secondcold plate 24, and thepanel 16. The firstcold plate 22 includes thepassages 38 that communicate with thebore 46. The secondcold plate 24 includespassages 40 that communicate with thebore 46. The secondcold plate 24 also includes acavity 42 that is also in communication with thecooling passages 40. Theexample cavity 42 is disposed along an axis A of thebore 46 and includes acap 44 that closes off thecavity 42. As appreciated, although severalexample cooling passages cold plates cold plate - The
example bore 46 includes aportion 48 defined within the firstcold plate 22 and aportion 50 defined within the secondcold plate 24. Thebore 46 defines a passage between the firstcold plate 22 and the secondcold plate 24 through thepanel 16. As appreciated, in some applications that cold plate assembly 14 encounters and experiences a great deal of vibration. Vibrations can disrupt fixed members attached between separate structures. Accordingly, passages between the example first and secondcold plates - Disposed within each of the
bores 46 is atransfer tube 52. Thetransfer tube 52 is movable within thebore 46 to accommodate vibrational movement between thecold plates panel 16. Thetransfer tubes 52 are movable but are not moved between specific positions. Instead thetransfer tubes 52 are suspended within thebore 46 in a desired position between biasingmembers 62. In this example, thebiasing members 62 comprise pliable seals that maintain a position of thetransfer tube 52 within thebore 46. Thebiasing members 62 suspend thetransfer tube 52 within thebores 46 to define a conduit or fluid passage betweencold plates - Referring to
FIG. 3 with continued reference toFIG. 2 ,another example panel 15 includes anopening 78 for ashim member 76. Theexample shim member 76 defines the portion of thebore 46 that extends through thepanel 15. Theexample panel 15 includes the bore features 46 provided as an integral feature. Thepanel 15 provides thebore 46 in theseparate shim member 76. Separating thebore 46 from thepanel 15 provides for thepanel 15 structure to be simplified while still providing the required bore configuration. - Referring to
FIGS. 4 and 5 with continued reference toFIG. 2 , each of thetransfer tubes 52 includes acentral bore 54 that extends between afirst flange 56 and asecond flange 58. The first andsecond flanges seals 60 that engage an inner surface of thebore 46. The biasingmembers 62 exert a biasing force on thetransfer tube 52 to maintain it in a relative position within thebore 46. Theexample biasing members 62 comprise O-ring type seals that provide some sealing against leakage. However, the main operation of theexample biasing member 62 is to provide and set a desired position between thebore portion 48 in the firstcold plate 22 and thebore portion 50 in the secondcold plate 24. - The
example biasing members 62 exert a biasing force that is designed to maintain a position of thetransfer tube 52 while allowing for relative movement between thecold plates -
Additional seals 64 are provided at the interface between thepanel 16 and each of thecold plates seals 64 provide a secondary seal that provides a backup to theseals bore 46 and thetransfer tube 52. - In this example, the first
cold plate 22 is held to the secondcold plate 24 by way offasteners 72. Theexample fasteners 72 include a bolt extending through eachcold plate panel 16 secured to a nut member. Analignment pin 74 is provided to align thepanel 16 and the firstcold plate 22 to the secondcold plate 24. Thealignment pin 74 further acts as a shear pin to minimize relative lateral movement between thecold plates panel 16. Thealignment pin 74 accommodates loads that are perpendicular to thebore 54. Theexample alignment pin 74 can also be provided in different locations to provide the desired alignment between the first and secondcold plates cold plates bore portions bore 46. - The
example transfer tube 52 includes thefirst flange 56 andsecond flange 58. Each of thefirst flange 56 andsecond flange 58 includes anannular channel 66 that receives a sealingmember 60. Theannular channel 66 is disposed between afirst diameter 70 disposed at ends of thetransfer tube 52 and asecond diameter 68 spaced apart from the ends of the transfer tube. - The
second diameter 68 is greater than thefirst diameter 70. The difference between thefirst diameter 70 and thesecond diameter 68 accommodate tilting movement of thetransfer tube 52. That is, thetransfer tube 52 is disposed within thebore 46 such that it may compensate vibrational movement along the axis A. However, vibratory movement may also occur in a direction transverse to the axis A. The differences between thefirst diameter 70 and thesecond diameter 68 provide for a limited amount of tilting movement within thebore 46. Accordingly, thetransfer tube 52 is capable of tilting relative to the axis A without becoming lodged within thebore 46 to maintain its ability to move along the axis A and accommodate vibratory movement between the relative parts. - Accordingly, the
example transfer tube 52 of the cold plate assembly provides the desired fluid conduit between first and secondcold plates - Although an example embodiment has been disclosed, a worker of ordinary skill in this art would recognize that certain modifications would come within the scope of this disclosure. For that reason, the following claims should be studied to determine the scope and content of this invention.
Claims (19)
1. A cold plate assembly comprising:
a support structure including first and second opposing sides;
a first cold plate disposed on the first side of the support structure;
a second cold plate disposed on a second side of the support structure; and
a bore defined within the first cold plate and the second cold plate; and
a transfer tube movable within the bore and extending through the support structure for communicating fluid between the first cold plate and the second cold plate.
2. The cold plate assembly as recited in claim 1 , including first and second flanges disposed on opposing ends of the transfer tube.
3. The cold plate assembly as recited in claim 2 , wherein the transfer tube includes a central bore extending between the first and second flanges.
4. The cold plate assembly as recited in claim 1 , including first and second biasing members at opposite ends of the transfer tube for holding the transfer tube in a desired position within the bore.
5. The cold plate assembly as recited in claim 2 , including a first seal between the first flange and the bore and a second seal between the second flange and the bore.
6. The cold plate assembly as recited in claim 5 , wherein each of the first flange and the second flange includes an annular channel defined between a first outer diameter at an end of the transfer tube and a second outer diameter spaced apart from the end of the transfer tube, the second outer diameter is greater than the first outer diameter.
7. The cold plate assembly as recited in claim 1 , wherein the bore extends partially through each of the first and second cold plates.
8. The cold plate assembly as recited in claim 1 , wherein each of the first and second cold plates comprises passages for a cooling medium.
9. The cold plate assembly as recited in claim 8 , wherein the transfer tube communicates cooling medium through the support structure between the passages in the first cold plate and the passages in the second cold plate.
10. The cold plate assembly as recited in claim 1 , including a shim defining a portion of the bore through the support structure.
11. A support structure comprising:
a panel including a first side and a second side;
a first cold plate supported on the first side of the panel;
a second cold plate supported on the second side of the panel; and
a bore defined within the first cold plate and the second cold plate; and
a transfer tube movable within the bore and extending through the support structure for communicating fluid between the first cold plate and the second cold plate.
12. The support structure as recited in claim 11 , including first and second flanges disposed on opposing ends of the transfer tube.
13. The support structure as recited in claim 12 , wherein in the transfer tube includes a central bore extending between the first and second flanges.
14. The support structure as recited in claim 11 , including first and second biasing members at opposite ends of the transfer tube for holding the transfer tube in a desired position within the bore.
15. The support structure as recited in claim 12 , wherein a first passage is defined within the first cold plate and a second passage is defined within the second cold plate.
16. The support structure as recited in claim 15 , wherein the transfer tube communicates cooling medium through the support structure between the passages in the first cold plate and in the second cold plate.
17. A method of assembling a structural support for a heat generating device, the method comprising:
assembling a panel including a first side and a second side;
mounting a first cold plate to the first side of the panel;
mounting a second cold plate to the second side of the panel;
inserting a transfer tube within a bore defined within the panel, first cold plate and the second cold plate to create a passage for a cooling medium through the panel between the first cold plate and the second cold plate; and
suspending the transfer tube in a desired position within the bore between first and second biasing members.
18. The method as recited in claim 17 , including the step of sealing each end of the transfer tube to a portion of the bore corresponding to the first and second cold plates.
19. The method as recited in claim 17 , including the step of defining a first diameter of the transfer tube at opposing ends and a second diameter spaced apart from the opposing end such that the second diameter is greater than the first diameter.
Priority Applications (3)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
US13/490,564 US20120261097A1 (en) | 2010-03-29 | 2012-06-07 | Compact two sided cold plate with floating transfer tubes |
EP13169613.0A EP2672798B1 (en) | 2012-06-07 | 2013-05-29 | Compact two sided cold plate with floating transfer tubes |
CN201310225335.9A CN103486895A (en) | 2012-06-07 | 2013-06-07 | Compact two sided cold plate with floating transfer tubes |
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
US12/748,552 US8991478B2 (en) | 2010-03-29 | 2010-03-29 | Compact two sided cold plate with transfer tubes |
US13/490,564 US20120261097A1 (en) | 2010-03-29 | 2012-06-07 | Compact two sided cold plate with floating transfer tubes |
Related Parent Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
US12/748,552 Continuation-In-Part US8991478B2 (en) | 2010-03-29 | 2010-03-29 | Compact two sided cold plate with transfer tubes |
Publications (1)
Publication Number | Publication Date |
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US20120261097A1 true US20120261097A1 (en) | 2012-10-18 |
Family
ID=47005526
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
US13/490,564 Abandoned US20120261097A1 (en) | 2010-03-29 | 2012-06-07 | Compact two sided cold plate with floating transfer tubes |
Country Status (1)
Country | Link |
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US (1) | US20120261097A1 (en) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US20150340255A1 (en) * | 2014-05-20 | 2015-11-26 | Vijay Parkhe | Electrostatic chuck with independent zone cooling and reduced crosstalk |
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US2900199A (en) * | 1953-04-20 | 1959-08-18 | Gen Electric | Pipe seal |
US3676642A (en) * | 1970-04-17 | 1972-07-11 | Nordson Corp | Modular apparatus for heating circulating coating material |
US4218080A (en) * | 1978-01-30 | 1980-08-19 | Halliburton Company | Repairable composite seal ring |
US5480196A (en) * | 1994-08-15 | 1996-01-02 | American Cast Iron Pipe Company | Ductile iron pipe joint employing a coupling and coupling therefor |
US6443223B2 (en) * | 1998-04-30 | 2002-09-03 | Showa Denko K.K. | Connecting device for heat exchanger |
US20070023168A1 (en) * | 2005-07-27 | 2007-02-01 | Behr Industry Gmbh & Co. Kg | Apparatus for cooling electronic components |
US20080048440A1 (en) * | 2006-08-25 | 2008-02-28 | Anderson Herbert G | Direct port connection for tubes |
US7417857B2 (en) * | 2003-10-31 | 2008-08-26 | Valeo Equipements Electriques Moteur | Power-electronic-cooling device |
-
2012
- 2012-06-07 US US13/490,564 patent/US20120261097A1/en not_active Abandoned
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Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US2900199A (en) * | 1953-04-20 | 1959-08-18 | Gen Electric | Pipe seal |
US3676642A (en) * | 1970-04-17 | 1972-07-11 | Nordson Corp | Modular apparatus for heating circulating coating material |
US4218080A (en) * | 1978-01-30 | 1980-08-19 | Halliburton Company | Repairable composite seal ring |
US5480196A (en) * | 1994-08-15 | 1996-01-02 | American Cast Iron Pipe Company | Ductile iron pipe joint employing a coupling and coupling therefor |
US6443223B2 (en) * | 1998-04-30 | 2002-09-03 | Showa Denko K.K. | Connecting device for heat exchanger |
US7417857B2 (en) * | 2003-10-31 | 2008-08-26 | Valeo Equipements Electriques Moteur | Power-electronic-cooling device |
US20070023168A1 (en) * | 2005-07-27 | 2007-02-01 | Behr Industry Gmbh & Co. Kg | Apparatus for cooling electronic components |
US20080048440A1 (en) * | 2006-08-25 | 2008-02-28 | Anderson Herbert G | Direct port connection for tubes |
Cited By (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US20150340255A1 (en) * | 2014-05-20 | 2015-11-26 | Vijay Parkhe | Electrostatic chuck with independent zone cooling and reduced crosstalk |
US10079165B2 (en) * | 2014-05-20 | 2018-09-18 | Applied Materials, Inc. | Electrostatic chuck with independent zone cooling and reduced crosstalk |
US10622229B2 (en) | 2014-05-20 | 2020-04-14 | Applied Materials, Inc. | Electrostatic chuck with independent zone cooling and reduced crosstalk |
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Owner name: HAMILTON SUNDSTRAND SPACE SYSTEMS INTERNATIONAL, I Free format text: ASSIGNMENT OF ASSIGNORS INTEREST;ASSIGNOR:ZAFFETTI, MARK A.;REEL/FRAME:028333/0478 Effective date: 20120606 |
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