US20110232730A1 - Lattice matchable alloy for solar cells - Google Patents

Lattice matchable alloy for solar cells Download PDF

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US20110232730A1
US20110232730A1 US12/749,076 US74907610A US2011232730A1 US 20110232730 A1 US20110232730 A1 US 20110232730A1 US 74907610 A US74907610 A US 74907610A US 2011232730 A1 US2011232730 A1 US 2011232730A1
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Prior art keywords
subcell
content
solar cell
enhanced
subcells
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US12/749,076
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Rebecca Elizabeth Jones
Homan Bernard Yuen
Ting Liu
Pranob Misra
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Cactus Materials Inc
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Solar Junction Corp
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Priority to US12/749,076 priority Critical patent/US20110232730A1/en
Assigned to SOLAR JUNCTION CORPORATION reassignment SOLAR JUNCTION CORPORATION ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS). Assignors: JONES, REBECCA ELIZABETH, LIU, TING, MISRA, PRANOB, YUEN, HOMAN BERNARD
Priority to EP18208211.5A priority patent/EP3471149A1/en
Priority to JP2013502560A priority patent/JP2013524505A/en
Priority to CN201090001501.7U priority patent/CN203707143U/en
Priority to SG2012070207A priority patent/SG184191A1/en
Priority to PCT/US2010/061635 priority patent/WO2011123164A1/en
Priority to EP10849171.3A priority patent/EP2553731B1/en
Priority to KR1020127028355A priority patent/KR20130018283A/en
Priority to ES10849171T priority patent/ES2720596T3/en
Priority to AU2010349711A priority patent/AU2010349711A1/en
Priority to SG10201503386SA priority patent/SG10201503386SA/en
Publication of US20110232730A1 publication Critical patent/US20110232730A1/en
Priority to US13/618,496 priority patent/US8575473B2/en
Priority to US13/739,989 priority patent/US8912433B2/en
Priority to US13/854,740 priority patent/US20130220409A1/en
Priority to US14/512,224 priority patent/US9018522B2/en
Priority to US14/597,621 priority patent/US20150122318A1/en
Priority to US14/678,737 priority patent/US9252315B2/en
Priority to US14/979,899 priority patent/US20160111569A1/en
Priority to US15/391,659 priority patent/US9985152B2/en
Assigned to ARRAY PHOTONICS, INC. reassignment ARRAY PHOTONICS, INC. CHANGE OF NAME (SEE DOCUMENT FOR DETAILS). Assignors: SOLAR JUNCTION CORPORATION
Assigned to CACTUS MATERIALS, INC. reassignment CACTUS MATERIALS, INC. ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS). Assignors: ARRAY PHOTONICS, INC.
Abandoned legal-status Critical Current

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Abstract

An alloy composition for a subcell of a solar cell is provided that has a bandgap of at least 0.9 eV, namely, Ga1-xInxNyAs1-y-zSbz with a low antimony (Sb) content and with enhanced indium (In) content and enhanced nitrogen (N) content, achieving substantial lattice matching to GaAs and Ge substrates and providing both high short circuit currents and high open circuit voltages in GaInNAsSb subcells for multijunction solar cells. The composition ranges for Ga1-xInxNyAs1-y-zSbz are 0.07≦x≦0.18, 0.025≦y≦0.04 and 0.001≦z≦0.03.

Description

    CROSS-REFERENCES TO RELATED APPLICATIONS
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  • BACKGROUND OF THE INVENTION
  • The present invention relates to multijunction solar cells, and in particular to high efficiency solar cells comprised of III-V semiconductor alloys.
  • Multijunction solar cells made primarily of III-V semiconductor alloys are known to produce solar cell efficiencies exceeding efficiencies of other types of photovoltaic materials. Such alloys are combinations of elements drawn from columns III and V of the standard Periodic Table, identified hereinafter by their standard chemical symbols, names and abbreviation. (Those of skill in the art can identify their class of semiconductor properties by class without specific reference to their column.) The high efficiencies of these solar cells make them attractive for terrestrial concentrating photovoltaic systems and systems designed to operate in outer space. Multijunction solar cells with efficiencies above 40% under concentrations equivalent to several hundred suns have been reported. The known highest efficiency devices have three subcells with each subcell consisting of a functional p-n junction and other layers, such as front and back surface field layers. These subcells are connected through tunnel junctions, and the dominant layers are either lattice matched to the underlying substrate or are grown over metamorphic layers. Lattice-matched devices and designs are desirable because they have proven reliability and because they use less semiconductor material than metamorphic solar cells, which require relatively thick buffer layers to accommodate differences in the lattice constants of the various materials. As set forth more fully in U.S. patent application Ser. No. 12/217,818, entitled “GaInNAsSb Solar Cells Grown by Molecular Beam Epitaxy,” which application is incorporated herein by reference, a layer made of GaInNAsSb material to create a third junction having a band gap of approximately 1.0 eV offers a promising approach to improving the efficiency of multijunction cells. Improvements are nevertheless to be considered on the cell described in that application.
  • The known highest efficiency, lattice-matched solar cells typically include a monolithic stack of three functional p-n junctions, or subcells, grown epitaxially on a germanium (Ge) substrate. The top subcell has been made of (Al)GaInP, the middle one of (In)GaAs, and the bottom junction included the Ge substrate. (The foregoing nomenclature for a III-V alloy, wherein a constituent element is shown parenthetically, denotes a condition of variability in which that particular element can be zero.) This structure is not optimal for efficiency, in that the bottom junction can generate roughly twice the short circuit current of the upper two junctions, as reported by J. F. Geisz et al., “Inverted GaInP/(In)GaAs/InGaAs triple junction solar cells with low-stress metamorphic bottom junctions,” Proceedings of the 33rd IEEE PVSC Photovoltaics Specialists Conference, 2008. This extra current capability is wasted, since the net current must be uniform through the entire stack, a design feature known as current matching.
  • In the disclosure of above noted U.S. patent application Ser. No. 12/217,818, it was shown that a material that is substantially lattice matched to Ge or GaAs with a band gap near 1.0 eV might be used to create a triple junction solar cell with efficiencies higher than the structure described above by replacing the bottom Ge junction with a junction made of a different material that produces a higher voltage.
  • In addition, it has been suggested that the use of this 1 eV material might be considered as a fourth junction to take advantage of the entire portion of the spectrum lying between 0.7 eV (the band gap for germanium) and 1.1 eV (the upper end of the range of bandgaps for the ˜1 eV layer). See for example, S. R. Kurtz, D. Myers, and J. M. Olson, “Projected Performance of Three and Four-Junction Devices Using GaAs and GaInP,” 26th IEEE Photovoltaics Specialists Conference, 1997, pp. 875-878. Ga1-xInxNyAs1-y has been identified as such a 1 eV material, but currents high enough to match the other subcells have not been achieved, see, e.g., A. J. Ptak et al., Journal of Applied Physics 98 (2005) 094501. This has been attributed to low minority carrier diffusion lengths that prevent effective photocarrier collection. Solar subcell design composed of gallium, indium, nitrogen, arsenic and various concentrations of antimony (GaInNAsSb) has been investigated with the reported outcome that antimony is helpful in decreasing surface roughness and allowing growth at higher substrate temperatures where annealing is not necessary, but the investigators reported that antimony, even in small concentrations is critical to be avoided as detrimental to adequate device performance. See Ptak et al., “Effects of temperature, nitrogen ion, and antimony on wide depletion width GaInNAs,” Journal of Vacuum Science Technology B 25(3) May/June 2007 pp. 955-959. Devices reported in that paper have short circuit currents far too low for integration into multijunction solar cells. Nevertheless, it is known that Ga1-xInxNyAs1-y-zSbz with 0.05≦x≦0.07, 0.01≦y≦0.02 and 0.02≦z≦0.06 can be used to produce a lattice-matched material with a band gap of approximately 1 eV that can provide sufficient current for integration into a multijunction solar cell. However, the voltages generated by subcells containing this material have not exceeded 0.30 V under 1 sun of illumination. See D. B. Jackrel et al., Journal of Applied Physics 101 (114916) 2007. Thus, a triple junction solar cell with this material as the bottom subcell has been expected to be only a small improvement upon an analogous triple junction solar cell with a bottom subcell of Ge, which produces an open circuit voltage of approximately 0.25 V. See H. Cotal et al., Energy and Environmental Science 2 (174) 2009. What is needed is a material that is lattice-matched to Ge and GaAs with a band gap near 1 eV that produces an open circuit voltage greater than 0.30 V and sufficient current to match (Al)InGaP and (In)GaAs subcells. Such a material would also be advantageous as a subcell in high efficiency solar cells with 4 or more junctions.
  • SUMMARY OF THE INVENTION
  • According to the invention, an alloy composition is provided that has a bandgap of at least 0.9 eV, namely, Ga1-xInxNyAs1-y-zSbz with a low antimony (Sb) content and with enhanced indium (In) content and enhanced nitrogen (N) content as compared with known alloys of GaInNAsSb, achieving substantial lattice matching to GaAs and Ge substrates and providing both high short circuit currents and high open circuit voltages in GaInNAsSb subcells suitable for use in multijunction solar cells. The composition ranges for Ga1-xInxNyAs1-y-zSbz are 0.07≦x≦0.18, 0.025≦y≦0.04 and 0.001≦z≦0.03. These composition ranges employ greater fractions of In and N in GaInNAsSb than previously taught and allow the creation of subcells with bandgaps that are design-tunable in the range of 0.9-1.1 eV, which is the range of interest for GaInNAsSb subcells. This composition range alloy will hereinafter be denoted “low-antimony, enhanced indium-and-nitrogen GaInNAsSb” alloy. Subcells of such an alloy can be grown by molecular beam epitaxy (MBE) and should be able to be grown by metallorganic chemical vapor deposition (MOCVD), using techniques known to one skilled in the art.
  • The invention described herein reflects a further refinement of work described in U.S. patent application Ser. No. 12/217,818, including the discovery and identification of specific ranges of elements, i.e., a specific alloy mix of the various elements in GaInNAsSb that improve significantly the performance of the disclosed solar cells.
  • The invention will be better understood by reference to the following detailed description in connection with the accompanying drawings.
  • BRIEF DESCRIPTION OF THE DRAWINGS
  • FIG. 1A is a schematic cross-section of a three junction solar cell incorporating the invention.
  • FIG. 1B is a schematic cross-section of a four junction solar cell incorporating the invention.
  • FIG. 2A is a schematic cross-section of a GaInNAsSb subcell according to the invention.
  • FIG. 2B is a detailed schematic cross-section illustrating an example GaInNAsSb subcell.
  • FIG. 3 is a graph showing the efficiency versus band gap energy of subcells formed from different alloy materials, for comparison.
  • FIG. 4 is a plot showing the short circuit current (Jsc) and open circuit voltage (Voc) of subcells formed from different alloy materials, for comparison.
  • FIG. 5 is a graph showing the photocurrent as a function of voltage for a triple junction solar cell incorporating a subcell according to the invention, under 1-sun AM1.5D illumination.
  • FIG. 6 is a graph showing the photocurrent as a function of voltage for a triple junction solar cell incorporating a subcell according to the invention, under AM1.5D illumination equivalent to 523 suns.
  • FIG. 7 is a graph of the short circuit current (Jsc) and open circuit voltage (Voc) of low Sb, enhanced In and N GaInNAsSb subcells distinguished by the strain imparted to the film by the substrate.
  • DETAILED DESCRIPTION OF THE INVENTION
  • FIG. 1A is a schematic cross-section showing an example of a triple junction solar cell 10 according to the invention consisting essentially of a low Sb, enhanced In and N
  • GaInNAsSb subcell 12 adjacent the Ge, GaAs or otherwise compatible substrate 14 with a top subcell 16 of (Al)InGaP and a middle subcell 18 using (In)GaAs. Tunnel junction 20 is between subcells 16 and 18, while tunnel junction 22 is between subcells 18 and 12. Each of the subcells 12, 16, 18 comprises several associated layers, including front and back surface fields, an emitter and a base. The named subcell material (e.g., (In)GaAs) forms the base layer, and may or may not form the other layers.
  • Low Sb, enhanced In and N GaInNAsSb subcells may also be incorporated into multijunction solar cells with four or more junctions without departing from the spirit and scope of the invention. FIG. 1B shows one such four-junction solar cell 100 with a specific low Sb, enhanced In and N GaInNAsSb subcell 12 as the third junction, and with a top subcell 16 of (Al)InGaP, a second subcell 18 of (In)GaAs and a bottom subcell 140 of Ge, which is also incorporated into a germanium (Ge) substrate. Each of the subcells 16, 18, 12, 140 is separated by respective tunnel junctions 20, 22, 24, and each of the subcells 16, 18, 12, 140 may comprise several associated layers, including optional front and back surface fields, an emitter and a base. The named subcell material (e.g., (In)GaAs) forms the base layer, and may or may not form the other layers.
  • By way of further illustration, FIG. 2A is a schematic cross-section in greater detail of a GaInNAsSb subcell 12, according to the invention. The low Sb, enhanced In and N GaInNAsSb subcell 12 is therefore characterized by its use of low Sb, enhanced In and N GaInNAsSb as the base layer 220 in the subcell 12. Other components of the GaInNAsSb subcell 12, including an emitter 26, an optional front surface field 28 and back surface field 30, are preferably III-V alloys, including by way of example GaInNAs(Sb), (In)(Al)GaAs, (Al)InGaP or Ge. The low Sb, enhanced In and N GaInNAsSb base 220 may either be p-type or n-type, with an emitter 26 of the opposite type.
  • To determine the effect of Sb on enhanced In and N GaInNAsSb subcell performance, various subcells of the type (12) of the structure shown in FIG. 2B were investigated. FIG. 2B is a representative example of the more general structure 12 in FIG. 2A. Base layers 220 with no Sb, low Sb (0.001≦z≦0.03) and high Sb (0.03≦z≦0.06) were grown by molecular beam epitaxy and were substantially lattice-matched to a GaAs substrate (not shown). These alloy compositions were verified by secondary ion mass spectroscopy. The subcells 12 were subjected to a thermal anneal, processed with generally known solar cell processing, and then measured under the AM1.5D spectrum (1 sun) below a filter that blocked all light above the GaAs band gap. This filter was appropriate because a GaInNAsSb subcell 12 is typically beneath an (In)GaAs subcell in a multijunction stack (e.g., FIGS. 1A and 1B), and thus light of higher energies will not reach the subcell 12.
  • FIG. 3 shows the efficiencies produced by the subcells 12 grown with different fractions of Sb as a function of their band gaps. The indium and nitrogen concentrations were each in the 0.07 to 0.18 and 0.025 to 0.04 ranges, respectively. It can be seen that the low Sb, enhanced In and N GaInNAsSb subcells (represented by triangles) have consistently higher subcell efficiencies than the other two candidates (represented by diamonds and squares). This is due to the combination of high voltage and high current capabilities in the low Sb, enhanced In and N GaInNAsSb devices. (See FIG. 4). As can be seen in FIG. 4, both the low and high concentration Sb devices have sufficient short-circuit current to match high efficiency (Al)InGaP subcells and (In)GaAs subcells (>13 mA/cm2 under the filtered AM1.5D spectrum), and thus they may be used in typical three junction or four junction solar cells 10, 100 without reducing the total current through the entire cell. This current-matching is essential for high efficiency.
  • The devices without Sb have relatively high subcell efficiencies due to their high open circuit voltages, but their short circuit currents are too low for high efficiency multijunction solar cells, as is shown in FIG. 4.
  • FIG. 4 also confirms that Sb has a deleterious effect on voltage, as previously reported for other alloy compositions. However, in contrast to what has been previously reported for other alloy compositions, the addition of antimony does NOT decrease the short circuit current. The low Sb-type subcells have roughly 100 mV higher open-circuit voltages than the high Sb-type subcells. To illustrate the effect of this improvement, a triple junction solar cell 10 with an open circuit voltage of 3.1 V is found to have 3.3% higher relative efficiency compared to an otherwise identical cell with an open circuit voltage of 3.0 V. Thus, the inclusion of Sb in GaInNAs(Sb) solar cells is necessary to produce sufficient current for a high efficiency solar cell, but only by using low Sb (0.1-3%) can both high voltages and high currents be achieved.
  • Compressive strain improves the open circuit voltage of low Sb, enhanced In and N GaInNAsSb subcells 10, 100. More specifically, low Sb, enhanced In and N GaInNAsSb layers 220 that have a lattice constant larger than that of a GaAs or Ge substrate when fully relaxed (≦0.5% larger), and are thus under compressive strain when grown pseudomorphically on those substrates. They also give better device performance than layers with a smaller, fully relaxed lattice constant (under tensile strain).
  • FIG. 7 shows the short circuit current and open circuit voltage of low Sb, enhanced In and N GaInNAsSb subcells grown on GaAs substrates under compressive strain (triangles) and tensile strain (diamonds). It can be seen that the subcells under compressive strain have consistently higher open circuit voltages than those under tensile strain.
  • Low Sb, enhanced In and N, compressively-strained GaInNAsSb subcells have been successfully integrated into high efficiency multijunction solar cells. FIG. 5 shows a current-voltage curve of a triple junction solar cell of the structure in FIG. 1A under AM1.5D illumination equivalent to 1 sun. The efficiency of this device is 30.5%. FIG. 6 shows the current-voltage curve of the triple junction solar cell operated under a concentration equivalent to 523 suns, with an efficiency of 39.2%.
  • The invention has been explained with reference to specific embodiments. Other embodiments will be evident to those of ordinary skill in the art. It is therefore not intended for the invention to be limited, except as indicated by the appended claims.

Claims (9)

1. An alloy composition suitable for substantial lattice matching to a substrate comprising:
Ga1-xInxAs1-y-zSbz, with a low antimony (Sb) content and an enhanced indium (In) content and enhanced nitrogen (N) content for use in a selected subcell of a multijunction solar cell, to achieve a bandgap of at least 0.9 eV.
2. The composition according to claim 1, the adjacent substrate being selected from the group GaAs and Ge.
3. The composition according to claim 1, the composition ranges for Ga1-xInxNyAs1-y-zSbz being 0.07≦x≦0.18, 0.025≦y≦0.04 and 0.001≦z≦0.03.
4. A multijunction solar cell comprising:
at least one subcell comprising Ga1-xInxNyAs1-y-zSbz, with a low antimony (Sb) content and enhanced indium (In) content and enhanced nitrogen (N) content to achieve a bandgap of at least 0.9 eV.
5. The multijunction solar cell according to claim 4, the adjacent substrate being selected from the group GaAs and Ge.
6. The multijunction solar cell according to claim 4, the composition ranges for Ga1-xInxNyAs1-y-zSbz being 0.07≦x≦0.18, 0.025≦y≦0.04 and 0.001≦z≦0.03.
7. A method for manufacturing a multijunction solar cell comprising:
forming a first subcell of an alloy of Ga1-xInxNyAs1-y-zSbz, with a low antimony (Sb) content and enhanced indium (In) content and enhanced nitrogen (N) content, the composition being selected to achieve at least a 0.9 eV bandgap; and
joining the first subcell with at least one adjacent subcell to form the multijunction solar cell.
8. The method according to claim 7, the composition ranges for Ga1-xInxNyAs1-y-zSbz being 0.07≦x≦0.18, 0.025≦y≦0.04 and 0.001≦z≦0.03.
9. The method according to claim 7, the Ga1-xInxNyAs1-y-zSbz subcell being substantially lattice matched to a substrate selected from the group GaAs and Ge.
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AU2010349711A AU2010349711A1 (en) 2010-03-29 2010-12-21 Lattice matchable alloy for solar cells
JP2013502560A JP2013524505A (en) 2010-03-29 2010-12-21 Lattice-matchable alloys for solar cells.
CN201090001501.7U CN203707143U (en) 2010-03-29 2010-12-21 Multijunction solar cell
EP18208211.5A EP3471149A1 (en) 2010-03-29 2010-12-21 Lattice matchable alloy for solar cells
SG2012070207A SG184191A1 (en) 2010-03-29 2010-12-21 Lattice matchable alloy for solar cells
PCT/US2010/061635 WO2011123164A1 (en) 2010-03-29 2010-12-21 Lattice matchable alloy for solar cells
EP10849171.3A EP2553731B1 (en) 2010-03-29 2010-12-21 Subcell for use in a multijunction solar cell
KR1020127028355A KR20130018283A (en) 2010-03-29 2010-12-21 Lattice matchable alloy for solar cells
ES10849171T ES2720596T3 (en) 2010-03-29 2010-12-21 Subcell for use in a multi-junction solar cell
US13/618,496 US8575473B2 (en) 2010-03-29 2012-09-14 Lattice matchable alloy for solar cells
US13/739,989 US8912433B2 (en) 2010-03-29 2013-01-11 Lattice matchable alloy for solar cells
US13/854,740 US20130220409A1 (en) 2010-03-29 2013-04-01 Lattice matchable alloy for solar cells
US14/512,224 US9018522B2 (en) 2010-03-29 2014-10-10 Lattice matchable alloy for solar cells
US14/597,621 US20150122318A1 (en) 2010-03-29 2015-01-15 Lattice matchable alloy for solar cells
US14/678,737 US9252315B2 (en) 2010-03-29 2015-04-03 Lattice matchable alloy for solar cells
US14/979,899 US20160111569A1 (en) 2010-03-29 2015-12-28 Lattice matchable alloy for solar cells
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Cited By (19)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US20100319764A1 (en) * 2009-06-23 2010-12-23 Solar Junction Corp. Functional Integration Of Dilute Nitrides Into High Efficiency III-V Solar Cells
US20110114163A1 (en) * 2009-11-18 2011-05-19 Solar Junction Corporation Multijunction solar cells formed on n-doped substrates
WO2013030529A1 (en) 2011-08-29 2013-03-07 Iqe Plc. Photovoltaic device
US20130099287A1 (en) * 2011-10-20 2013-04-25 Rf Micro Devices, Inc. Gallium arsenide heterojunction semiconductor structure
US20130122638A1 (en) * 2011-11-15 2013-05-16 Solar Junction Corporation High Efficiency Multijunction Solar Cells
WO2013162466A1 (en) * 2012-04-23 2013-10-31 Nanyang Technological University A cell arrangement
US8575473B2 (en) 2010-03-29 2013-11-05 Solar Junction Corporation Lattice matchable alloy for solar cells
US8766087B2 (en) 2011-05-10 2014-07-01 Solar Junction Corporation Window structure for solar cell
US20140261653A1 (en) * 2011-10-11 2014-09-18 Soitec Multi junctions in a semiconductor device formed by different deposition techniques
US8962991B2 (en) 2011-02-25 2015-02-24 Solar Junction Corporation Pseudomorphic window layer for multijunction solar cells
US20150221803A1 (en) * 2014-02-05 2015-08-06 Solar Junction Corporation Monolithic multijunction power converter
US9153724B2 (en) 2012-04-09 2015-10-06 Solar Junction Corporation Reverse heterojunctions for solar cells
US9214580B2 (en) 2010-10-28 2015-12-15 Solar Junction Corporation Multi-junction solar cell with dilute nitride sub-cell having graded doping
US10087535B2 (en) 2015-03-23 2018-10-02 Alliance For Sustainable Energy, Llc Devices and methods for photoelectrochemical water splitting
US20180358499A1 (en) * 2011-11-15 2018-12-13 Solar Junction Corporation High efficiency multijunction solar cells
US10916675B2 (en) 2015-10-19 2021-02-09 Array Photonics, Inc. High efficiency multijunction photovoltaic cells
US10930808B2 (en) 2017-07-06 2021-02-23 Array Photonics, Inc. Hybrid MOCVD/MBE epitaxial growth of high-efficiency lattice-matched multijunction solar cells
US11211514B2 (en) 2019-03-11 2021-12-28 Array Photonics, Inc. Short wavelength infrared optoelectronic devices having graded or stepped dilute nitride active regions
US11271122B2 (en) 2017-09-27 2022-03-08 Array Photonics, Inc. Short wavelength infrared optoelectronic devices having a dilute nitride layer

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* Cited by examiner, † Cited by third party
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US20170338357A1 (en) 2016-05-23 2017-11-23 Solar Junction Corporation Exponential doping in lattice-matched dilute nitride photovoltaic cells
US9768339B2 (en) 2015-06-22 2017-09-19 IQE, plc Optoelectronic detectors having a dilute nitride layer on a substrate with a lattice parameter nearly matching GaAs
JP2017105101A (en) * 2015-12-11 2017-06-15 株式会社ミマキエンジニアリング Three-dimensional molded object, and three-dimensional molding apparatus and method for producing the same
US10090420B2 (en) 2016-01-22 2018-10-02 Solar Junction Corporation Via etch method for back contact multijunction solar cells
US9680035B1 (en) 2016-05-27 2017-06-13 Solar Junction Corporation Surface mount solar cell with integrated coverglass
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GB2555409B (en) * 2016-10-25 2020-07-15 Iqe Plc Photovoltaic Device
WO2019143776A1 (en) 2018-01-19 2019-07-25 Solar Junction Corporation Surface mount solar cell having low stress passivation layers
WO2019177962A1 (en) 2018-03-12 2019-09-19 Solar Junction Corporation Chirped distributed bragg reflectors for photovoltaic cells and other light absorption devices
US10991835B2 (en) 2018-08-09 2021-04-27 Array Photonics, Inc. Hydrogen diffusion barrier for hybrid semiconductor growth
WO2020072458A1 (en) 2018-10-03 2020-04-09 Array Photonics, Inc. Optically-transparent semiconductor buffer layers and structures employing the same
EP3980586A1 (en) * 2019-06-04 2022-04-13 Solar Junction Corporation Dilute nitride optical absorption layers having graded doping
US20210305442A1 (en) 2020-03-27 2021-09-30 Array Photonics, Inc. Dilute nitride optoelectronic absorption devices having graded or stepped interface regions

Citations (35)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4404421A (en) * 1982-02-26 1983-09-13 Chevron Research Company Ternary III-V multicolor solar cells and process of fabrication
US4881979A (en) * 1984-08-29 1989-11-21 Varian Associates, Inc. Junctions for monolithic cascade solar cells and methods
US5009719A (en) * 1989-02-17 1991-04-23 Mitsubishi Denki Kabushiki Kaisha Tandem solar cell
US5166761A (en) * 1991-04-01 1992-11-24 Midwest Research Institute Tunnel junction multiple wavelength light-emitting diodes
US5223043A (en) * 1991-02-11 1993-06-29 The United States Of America As Represented By The United States Department Of Energy Current-matched high-efficiency, multijunction monolithic solar cells
US5316593A (en) * 1992-11-16 1994-05-31 Midwest Research Institute Heterojunction solar cell with passivated emitter surface
US5342453A (en) * 1992-11-13 1994-08-30 Midwest Research Institute Heterojunction solar cell
US5405453A (en) * 1993-11-08 1995-04-11 Applied Solar Energy Corporation High efficiency multi-junction solar cell
US5689123A (en) * 1994-04-07 1997-11-18 Sdl, Inc. III-V aresenide-nitride semiconductor materials and devices
US5911839A (en) * 1996-12-16 1999-06-15 National Science Council Of Republic Of China High efficiency GaInP NIP solar cells
US5944913A (en) * 1997-11-26 1999-08-31 Sandia Corporation High-efficiency solar cell and method for fabrication
US6252287B1 (en) * 1999-05-19 2001-06-26 Sandia Corporation InGaAsN/GaAs heterojunction for multi-junction solar cells
US6281426B1 (en) * 1997-10-01 2001-08-28 Midwest Research Institute Multi-junction, monolithic solar cell using low-band-gap materials lattice matched to GaAs or Ge
US6340788B1 (en) * 1999-12-02 2002-01-22 Hughes Electronics Corporation Multijunction photovoltaic cells and panels using a silicon or silicon-germanium active substrate cell for space and terrestrial applications
US6504091B2 (en) * 2000-02-14 2003-01-07 Sharp Kabushiki Kaisha Photoelectric converting device
US6617618B2 (en) * 1997-03-21 2003-09-09 Ricoh Company Ltd. Light emitting semiconductor device with GaInNAs active layer and GaAs spacer layers
US6756325B2 (en) * 2002-05-07 2004-06-29 Agilent Technologies, Inc. Method for producing a long wavelength indium gallium arsenide nitride(InGaAsN) active region
US6765238B2 (en) * 2002-09-12 2004-07-20 Agilent Technologies, Inc. Material systems for semiconductor tunnel-junction structures
US6764926B2 (en) * 2002-03-25 2004-07-20 Agilent Technologies, Inc. Method for obtaining high quality InGaAsN semiconductor devices
US6787385B2 (en) * 2001-05-31 2004-09-07 Midwest Research Institute Method of preparing nitrogen containing semiconductor material
US20040200523A1 (en) * 2003-04-14 2004-10-14 The Boeing Company Multijunction photovoltaic cell grown on high-miscut-angle substrate
US6815736B2 (en) * 2001-02-09 2004-11-09 Midwest Research Institute Isoelectronic co-doping
US6951819B2 (en) * 2002-12-05 2005-10-04 Blue Photonics, Inc. High efficiency, monolithic multijunction solar cells containing lattice-mismatched materials and methods of forming same
US20050274409A1 (en) * 2004-06-15 2005-12-15 The Boeing Company Multijunction solar cell having a lattice mismatched GrIII-GrV-X layer and a composition-graded buffer layer
US7071407B2 (en) * 2002-10-31 2006-07-04 Emcore Corporation Method and apparatus of multiplejunction solar cell structure with high band gap heterojunction middle cell
US7123638B2 (en) * 2003-10-17 2006-10-17 Avago Technologies General Ip (Singapore) Pte. Ltd. Tunnel-junction structure incorporating N-type layer comprising nitrogen and a group VI dopant
US7122733B2 (en) * 2002-09-06 2006-10-17 The Boeing Company Multi-junction photovoltaic cell having buffer layers for the growth of single crystal boron compounds
US7122734B2 (en) * 2002-10-23 2006-10-17 The Boeing Company Isoelectronic surfactant suppression of threading dislocations in metamorphic epitaxial layers
US7126052B2 (en) * 2002-10-02 2006-10-24 The Boeing Company Isoelectronic surfactant induced sublattice disordering in optoelectronic devices
US20070034853A1 (en) * 2005-08-15 2007-02-15 Robbins Virginia M Structures for reducing operating voltage in a semiconductor device
US7255746B2 (en) * 2002-09-04 2007-08-14 Finisar Corporation Nitrogen sources for molecular beam epitaxy
US7279732B2 (en) * 2002-08-26 2007-10-09 Micron Technology, Inc. Enhanced atomic layer deposition
US20080149173A1 (en) * 2006-12-21 2008-06-26 Sharps Paul R Inverted metamorphic solar cell with bypass diode
US20080245400A1 (en) * 2007-04-09 2008-10-09 Amberwave Systems Corporation Nitride-based multi-junction solar cell modules and methods for making the same
US20090057721A1 (en) * 2007-09-03 2009-03-05 Sumitomo Electric Industries, Ltd. Semiconductor device, epitaxial wafer, and method of manufacturing the same

Family Cites Families (65)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4179702A (en) 1978-03-09 1979-12-18 Research Triangle Institute Cascade solar cells
JPS63100781A (en) 1986-10-17 1988-05-02 Nippon Telegr & Teleph Corp <Ntt> Semiconductor element
US5016562A (en) 1988-04-27 1991-05-21 Glasstech Solar, Inc. Modular continuous vapor deposition system
US4935384A (en) 1988-12-14 1990-06-19 The United States Of America As Represented By The United States Department Of Energy Method of passivating semiconductor surfaces
JPH07101753B2 (en) 1992-08-05 1995-11-01 日立電線株式会社 Stacked solar cells
JPH0661516A (en) 1992-08-06 1994-03-04 Japan Energy Corp Manufacture of solar battery
US5330585A (en) 1992-10-30 1994-07-19 Spectrolab, Inc. Gallium arsenide/aluminum gallium arsenide photocell including environmentally sealed ohmic contact grid interface and method of fabricating the cell
US5800630A (en) 1993-04-08 1998-09-01 University Of Houston Tandem solar cell with indium phosphide tunnel junction
US5376185A (en) 1993-05-12 1994-12-27 Midwest Research Institute Single-junction solar cells with the optimum band gap for terrestrial concentrator applications
FR2722612B1 (en) 1994-07-13 1997-01-03 Centre Nat Rech Scient METHOD FOR MANUFACTURING A PHOTOVOLTAIC MATERIAL OR DEVICE, MATERIAL OR DEVICE THUS OBTAINED AND PHOTOPILE COMPRISING SUCH A MATERIAL OR DEVICE
JPH1012905A (en) 1996-06-27 1998-01-16 Hitachi Ltd Solar cell and manufacture thereof
US6150603A (en) 1999-04-23 2000-11-21 Hughes Electronics Corporation Bilayer passivation structure for photovoltaic cells
US7345327B2 (en) 2000-11-27 2008-03-18 Kopin Corporation Bipolar transistor
US7233028B2 (en) * 2001-02-23 2007-06-19 Nitronex Corporation Gallium nitride material devices and methods of forming the same
US6586669B2 (en) 2001-06-06 2003-07-01 The Boeing Company Lattice-matched semiconductor materials for use in electronic or optoelectronic devices
US20030070707A1 (en) 2001-10-12 2003-04-17 King Richard Roland Wide-bandgap, lattice-mismatched window layer for a solar energy conversion device
US7119271B2 (en) 2001-10-12 2006-10-10 The Boeing Company Wide-bandgap, lattice-mismatched window layer for a solar conversion device
US6660928B1 (en) 2002-04-02 2003-12-09 Essential Research, Inc. Multi-junction photovoltaic cell
US20060162768A1 (en) 2002-05-21 2006-07-27 Wanlass Mark W Low bandgap, monolithic, multi-bandgap, optoelectronic devices
US8067687B2 (en) 2002-05-21 2011-11-29 Alliance For Sustainable Energy, Llc High-efficiency, monolithic, multi-bandgap, tandem photovoltaic energy converters
US8173891B2 (en) 2002-05-21 2012-05-08 Alliance For Sustainable Energy, Llc Monolithic, multi-bandgap, tandem, ultra-thin, strain-counterbalanced, photovoltaic energy converters with optimal subcell bandgaps
JP2004296658A (en) 2003-03-26 2004-10-21 Sharp Corp Multijunction solar cell and its current matching method
BRPI0506541A (en) 2004-01-20 2007-02-27 Cyrium Technologies Inc solar cell with epitaxially grown quantum dot material
JP5008874B2 (en) 2005-02-23 2012-08-22 住友電気工業株式会社 Receiving module for optical communication using light receiving element and light receiving element, and measuring instrument using light receiving element
US11211510B2 (en) 2005-12-13 2021-12-28 The Boeing Company Multijunction solar cell with bonded transparent conductive interlayer
US20070227588A1 (en) 2006-02-15 2007-10-04 The Regents Of The University Of California Enhanced tunnel junction for improved performance in cascaded solar cells
US20100229926A1 (en) 2009-03-10 2010-09-16 Emcore Solar Power, Inc. Four Junction Inverted Metamorphic Multijunction Solar Cell with a Single Metamorphic Layer
US20090078310A1 (en) 2007-09-24 2009-03-26 Emcore Corporation Heterojunction Subcells In Inverted Metamorphic Multijunction Solar Cells
US7872252B2 (en) 2006-08-11 2011-01-18 Cyrium Technologies Incorporated Method of fabricating semiconductor devices on a group IV substrate with controlled interface properties and diffusion tails
US7842881B2 (en) 2006-10-19 2010-11-30 Emcore Solar Power, Inc. Solar cell structure with localized doping in cap layer
JP5515162B2 (en) 2007-03-23 2014-06-11 住友電気工業株式会社 Manufacturing method of semiconductor wafer
US20080257405A1 (en) 2007-04-18 2008-10-23 Emcore Corp. Multijunction solar cell with strained-balanced quantum well middle cell
JP2009010175A (en) 2007-06-28 2009-01-15 Sumitomo Electric Ind Ltd Light-receiving element and manufacturing method therefor
WO2009009111A2 (en) * 2007-07-10 2009-01-15 The Board Of Trustees Of The Leland Stanford Junior University GaInNAsSB SOLAR CELLS GROWN BY MOLECULAR BEAM EPITAXY
US8895342B2 (en) 2007-09-24 2014-11-25 Emcore Solar Power, Inc. Heterojunction subcells in inverted metamorphic multijunction solar cells
GB0719554D0 (en) 2007-10-05 2007-11-14 Univ Glasgow semiconductor optoelectronic devices and methods for making semiconductor optoelectronic devices
TW200924214A (en) 2007-11-16 2009-06-01 Univ Nat Chunghsing Solar cell
US20090155952A1 (en) 2007-12-13 2009-06-18 Emcore Corporation Exponentially Doped Layers In Inverted Metamorphic Multijunction Solar Cells
US20090188561A1 (en) 2008-01-25 2009-07-30 Emcore Corporation High concentration terrestrial solar array with III-V compound semiconductor cell
US20090255575A1 (en) 2008-04-04 2009-10-15 Michael Tischler Lightweight solar cell
US20090255576A1 (en) 2008-04-04 2009-10-15 Michael Tischler Window solar cell
US20090272438A1 (en) 2008-05-05 2009-11-05 Emcore Corporation Strain Balanced Multiple Quantum Well Subcell In Inverted Metamorphic Multijunction Solar Cell
US20090288703A1 (en) 2008-05-20 2009-11-26 Emcore Corporation Wide Band Gap Window Layers In Inverted Metamorphic Multijunction Solar Cells
US8309374B2 (en) 2008-10-07 2012-11-13 Applied Materials, Inc. Advanced platform for processing crystalline silicon solar cells
US8912428B2 (en) 2008-10-22 2014-12-16 Epir Technologies, Inc. High efficiency multijunction II-VI photovoltaic solar cells
KR20100084843A (en) 2009-01-19 2010-07-28 삼성전자주식회사 Multijunction solar cell
US20100282306A1 (en) 2009-05-08 2010-11-11 Emcore Solar Power, Inc. Multijunction Solar Cells with Group IV/III-V Hybrid Alloys
US20100282305A1 (en) 2009-05-08 2010-11-11 Emcore Solar Power, Inc. Inverted Multijunction Solar Cells with Group IV/III-V Hybrid Alloys
US20100319764A1 (en) 2009-06-23 2010-12-23 Solar Junction Corp. Functional Integration Of Dilute Nitrides Into High Efficiency III-V Solar Cells
CA2769318A1 (en) 2009-07-29 2011-02-03 Cyrium Technologies Incorporated Solar cell and method of fabrication thereof
JP5649157B2 (en) 2009-08-01 2015-01-07 住友電気工業株式会社 Semiconductor device and manufacturing method thereof
US20110114163A1 (en) 2009-11-18 2011-05-19 Solar Junction Corporation Multijunction solar cells formed on n-doped substrates
TWI436488B (en) 2010-03-12 2014-05-01 Epistar Corp A solar cell having a graded buffer layer
US20110232730A1 (en) 2010-03-29 2011-09-29 Solar Junction Corp. Lattice matchable alloy for solar cells
US20110303268A1 (en) 2010-06-15 2011-12-15 Tan Wei-Sin HIGH EFFICIENCY InGaAsN SOLAR CELL AND METHOD OF MAKING
US9853478B2 (en) 2010-07-28 2017-12-26 Qualcomm Incorporated Low power detection of wireless power devices
US8642883B2 (en) 2010-08-09 2014-02-04 The Boeing Company Heterojunction solar cell
US20170338357A1 (en) 2016-05-23 2017-11-23 Solar Junction Corporation Exponential doping in lattice-matched dilute nitride photovoltaic cells
US9214580B2 (en) 2010-10-28 2015-12-15 Solar Junction Corporation Multi-junction solar cell with dilute nitride sub-cell having graded doping
US8962991B2 (en) 2011-02-25 2015-02-24 Solar Junction Corporation Pseudomorphic window layer for multijunction solar cells
US8927857B2 (en) 2011-02-28 2015-01-06 International Business Machines Corporation Silicon: hydrogen photovoltaic devices, such as solar cells, having reduced light induced degradation and method of making such devices
US8766087B2 (en) 2011-05-10 2014-07-01 Solar Junction Corporation Window structure for solar cell
WO2013074530A2 (en) 2011-11-15 2013-05-23 Solar Junction Corporation High efficiency multijunction solar cells
US9153724B2 (en) 2012-04-09 2015-10-06 Solar Junction Corporation Reverse heterojunctions for solar cells
US20170110613A1 (en) 2015-10-19 2017-04-20 Solar Junction Corporation High efficiency multijunction photovoltaic cells

Patent Citations (35)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4404421A (en) * 1982-02-26 1983-09-13 Chevron Research Company Ternary III-V multicolor solar cells and process of fabrication
US4881979A (en) * 1984-08-29 1989-11-21 Varian Associates, Inc. Junctions for monolithic cascade solar cells and methods
US5009719A (en) * 1989-02-17 1991-04-23 Mitsubishi Denki Kabushiki Kaisha Tandem solar cell
US5223043A (en) * 1991-02-11 1993-06-29 The United States Of America As Represented By The United States Department Of Energy Current-matched high-efficiency, multijunction monolithic solar cells
US5166761A (en) * 1991-04-01 1992-11-24 Midwest Research Institute Tunnel junction multiple wavelength light-emitting diodes
US5342453A (en) * 1992-11-13 1994-08-30 Midwest Research Institute Heterojunction solar cell
US5316593A (en) * 1992-11-16 1994-05-31 Midwest Research Institute Heterojunction solar cell with passivated emitter surface
US5405453A (en) * 1993-11-08 1995-04-11 Applied Solar Energy Corporation High efficiency multi-junction solar cell
US5689123A (en) * 1994-04-07 1997-11-18 Sdl, Inc. III-V aresenide-nitride semiconductor materials and devices
US5911839A (en) * 1996-12-16 1999-06-15 National Science Council Of Republic Of China High efficiency GaInP NIP solar cells
US6617618B2 (en) * 1997-03-21 2003-09-09 Ricoh Company Ltd. Light emitting semiconductor device with GaInNAs active layer and GaAs spacer layers
US6281426B1 (en) * 1997-10-01 2001-08-28 Midwest Research Institute Multi-junction, monolithic solar cell using low-band-gap materials lattice matched to GaAs or Ge
US5944913A (en) * 1997-11-26 1999-08-31 Sandia Corporation High-efficiency solar cell and method for fabrication
US6252287B1 (en) * 1999-05-19 2001-06-26 Sandia Corporation InGaAsN/GaAs heterojunction for multi-junction solar cells
US6340788B1 (en) * 1999-12-02 2002-01-22 Hughes Electronics Corporation Multijunction photovoltaic cells and panels using a silicon or silicon-germanium active substrate cell for space and terrestrial applications
US6504091B2 (en) * 2000-02-14 2003-01-07 Sharp Kabushiki Kaisha Photoelectric converting device
US6815736B2 (en) * 2001-02-09 2004-11-09 Midwest Research Institute Isoelectronic co-doping
US6787385B2 (en) * 2001-05-31 2004-09-07 Midwest Research Institute Method of preparing nitrogen containing semiconductor material
US6764926B2 (en) * 2002-03-25 2004-07-20 Agilent Technologies, Inc. Method for obtaining high quality InGaAsN semiconductor devices
US6756325B2 (en) * 2002-05-07 2004-06-29 Agilent Technologies, Inc. Method for producing a long wavelength indium gallium arsenide nitride(InGaAsN) active region
US7279732B2 (en) * 2002-08-26 2007-10-09 Micron Technology, Inc. Enhanced atomic layer deposition
US7255746B2 (en) * 2002-09-04 2007-08-14 Finisar Corporation Nitrogen sources for molecular beam epitaxy
US7122733B2 (en) * 2002-09-06 2006-10-17 The Boeing Company Multi-junction photovoltaic cell having buffer layers for the growth of single crystal boron compounds
US6765238B2 (en) * 2002-09-12 2004-07-20 Agilent Technologies, Inc. Material systems for semiconductor tunnel-junction structures
US7126052B2 (en) * 2002-10-02 2006-10-24 The Boeing Company Isoelectronic surfactant induced sublattice disordering in optoelectronic devices
US7122734B2 (en) * 2002-10-23 2006-10-17 The Boeing Company Isoelectronic surfactant suppression of threading dislocations in metamorphic epitaxial layers
US7071407B2 (en) * 2002-10-31 2006-07-04 Emcore Corporation Method and apparatus of multiplejunction solar cell structure with high band gap heterojunction middle cell
US6951819B2 (en) * 2002-12-05 2005-10-04 Blue Photonics, Inc. High efficiency, monolithic multijunction solar cells containing lattice-mismatched materials and methods of forming same
US20040200523A1 (en) * 2003-04-14 2004-10-14 The Boeing Company Multijunction photovoltaic cell grown on high-miscut-angle substrate
US7123638B2 (en) * 2003-10-17 2006-10-17 Avago Technologies General Ip (Singapore) Pte. Ltd. Tunnel-junction structure incorporating N-type layer comprising nitrogen and a group VI dopant
US20050274409A1 (en) * 2004-06-15 2005-12-15 The Boeing Company Multijunction solar cell having a lattice mismatched GrIII-GrV-X layer and a composition-graded buffer layer
US20070034853A1 (en) * 2005-08-15 2007-02-15 Robbins Virginia M Structures for reducing operating voltage in a semiconductor device
US20080149173A1 (en) * 2006-12-21 2008-06-26 Sharps Paul R Inverted metamorphic solar cell with bypass diode
US20080245400A1 (en) * 2007-04-09 2008-10-09 Amberwave Systems Corporation Nitride-based multi-junction solar cell modules and methods for making the same
US20090057721A1 (en) * 2007-09-03 2009-03-05 Sumitomo Electric Industries, Ltd. Semiconductor device, epitaxial wafer, and method of manufacturing the same

Non-Patent Citations (1)

* Cited by examiner, † Cited by third party
Title
Kudrawiec, Contactless electroreflectance of GaInNAsSb/GaAs single quantum wells with indium content of 8%-32%, Jan. 2007, Journal of Applied Physics, Vol. 101, pgs. 013504-1 - 013504-9 *

Cited By (39)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US20100319764A1 (en) * 2009-06-23 2010-12-23 Solar Junction Corp. Functional Integration Of Dilute Nitrides Into High Efficiency III-V Solar Cells
US20110114163A1 (en) * 2009-11-18 2011-05-19 Solar Junction Corporation Multijunction solar cells formed on n-doped substrates
US8912433B2 (en) 2010-03-29 2014-12-16 Solar Junction Corporation Lattice matchable alloy for solar cells
US9985152B2 (en) 2010-03-29 2018-05-29 Solar Junction Corporation Lattice matchable alloy for solar cells
US9252315B2 (en) 2010-03-29 2016-02-02 Solar Junction Corporation Lattice matchable alloy for solar cells
US8575473B2 (en) 2010-03-29 2013-11-05 Solar Junction Corporation Lattice matchable alloy for solar cells
US9018522B2 (en) 2010-03-29 2015-04-28 Solar Junction Corporation Lattice matchable alloy for solar cells
US9214580B2 (en) 2010-10-28 2015-12-15 Solar Junction Corporation Multi-junction solar cell with dilute nitride sub-cell having graded doping
US10355159B2 (en) 2010-10-28 2019-07-16 Solar Junction Corporation Multi-junction solar cell with dilute nitride sub-cell having graded doping
US8962991B2 (en) 2011-02-25 2015-02-24 Solar Junction Corporation Pseudomorphic window layer for multijunction solar cells
US8766087B2 (en) 2011-05-10 2014-07-01 Solar Junction Corporation Window structure for solar cell
US10367107B2 (en) 2011-08-29 2019-07-30 Iqe Plc Multijunction photovoltaic device having an Si barrier between cells
WO2013030530A1 (en) 2011-08-29 2013-03-07 Iqe Plc. Photovoltaic device
US10263129B2 (en) 2011-08-29 2019-04-16 Iqe Plc Multijunction photovoltaic device having SiGe(Sn) and (In)GaAsNBi cells
WO2013030529A1 (en) 2011-08-29 2013-03-07 Iqe Plc. Photovoltaic device
US20140261653A1 (en) * 2011-10-11 2014-09-18 Soitec Multi junctions in a semiconductor device formed by different deposition techniques
US10490688B2 (en) * 2011-10-11 2019-11-26 Soitec Multi junctions in a semiconductor device formed by different deposition techniques
US20130099287A1 (en) * 2011-10-20 2013-04-25 Rf Micro Devices, Inc. Gallium arsenide heterojunction semiconductor structure
US9761678B2 (en) * 2011-10-20 2017-09-12 Qorvo Us, Inc. Gallium arsenide heterojunction semiconductor structure
US20180358499A1 (en) * 2011-11-15 2018-12-13 Solar Junction Corporation High efficiency multijunction solar cells
US8962993B2 (en) 2011-11-15 2015-02-24 Solar Junction Corporation High efficiency multijunction solar cells
US8697481B2 (en) * 2011-11-15 2014-04-15 Solar Junction Corporation High efficiency multijunction solar cells
US20130122638A1 (en) * 2011-11-15 2013-05-16 Solar Junction Corporation High Efficiency Multijunction Solar Cells
US9153724B2 (en) 2012-04-09 2015-10-06 Solar Junction Corporation Reverse heterojunctions for solar cells
EP2842166A4 (en) * 2012-04-23 2015-12-09 Univ Nanyang Tech A cell arrangement
CN104247032A (en) * 2012-04-23 2014-12-24 南洋理工大学 A cell arrangement
WO2013162466A1 (en) * 2012-04-23 2013-10-31 Nanyang Technological University A cell arrangement
CN106133923A (en) * 2014-02-05 2016-11-16 太阳结公司 One chip many knots energy transducer
CN108807571A (en) * 2014-02-05 2018-11-13 太阳结公司 One chip ties energy converter more
US20150221803A1 (en) * 2014-02-05 2015-08-06 Solar Junction Corporation Monolithic multijunction power converter
TWI656651B (en) * 2014-02-05 2019-04-11 美商太陽光電公司 Monolithic multijunction power converter
EP3761375A1 (en) * 2014-02-05 2021-01-06 Array Photonics, Inc. Monolithic multijunction power converter
US11233166B2 (en) * 2014-02-05 2022-01-25 Array Photonics, Inc. Monolithic multijunction power converter
US20220102569A1 (en) * 2014-02-05 2022-03-31 Array Photonics, Inc. Monolithic multijunction power converter
US10087535B2 (en) 2015-03-23 2018-10-02 Alliance For Sustainable Energy, Llc Devices and methods for photoelectrochemical water splitting
US10916675B2 (en) 2015-10-19 2021-02-09 Array Photonics, Inc. High efficiency multijunction photovoltaic cells
US10930808B2 (en) 2017-07-06 2021-02-23 Array Photonics, Inc. Hybrid MOCVD/MBE epitaxial growth of high-efficiency lattice-matched multijunction solar cells
US11271122B2 (en) 2017-09-27 2022-03-08 Array Photonics, Inc. Short wavelength infrared optoelectronic devices having a dilute nitride layer
US11211514B2 (en) 2019-03-11 2021-12-28 Array Photonics, Inc. Short wavelength infrared optoelectronic devices having graded or stepped dilute nitride active regions

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