US20100072627A1 - Wafer including intercepting through-vias and method of making intercepting through-vias in a wafer - Google Patents
Wafer including intercepting through-vias and method of making intercepting through-vias in a wafer Download PDFInfo
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- US20100072627A1 US20100072627A1 US12/237,665 US23766508A US2010072627A1 US 20100072627 A1 US20100072627 A1 US 20100072627A1 US 23766508 A US23766508 A US 23766508A US 2010072627 A1 US2010072627 A1 US 2010072627A1
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L23/00—Details of semiconductor or other solid state devices
- H01L23/48—Arrangements for conducting electric current to or from the solid state body in operation, e.g. leads, terminal arrangements ; Selection of materials therefor
- H01L23/482—Arrangements for conducting electric current to or from the solid state body in operation, e.g. leads, terminal arrangements ; Selection of materials therefor consisting of lead-in layers inseparably applied to the semiconductor body
- H01L23/4824—Pads with extended contours, e.g. grid structure, branch structure, finger structure
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/70—Manufacture or treatment of devices consisting of a plurality of solid state components formed in or on a common substrate or of parts thereof; Manufacture of integrated circuit devices or of parts thereof
- H01L21/71—Manufacture of specific parts of devices defined in group H01L21/70
- H01L21/768—Applying interconnections to be used for carrying current between separate components within a device comprising conductors and dielectrics
- H01L21/76898—Applying interconnections to be used for carrying current between separate components within a device comprising conductors and dielectrics formed through a semiconductor substrate
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L23/00—Details of semiconductor or other solid state devices
- H01L23/48—Arrangements for conducting electric current to or from the solid state body in operation, e.g. leads, terminal arrangements ; Selection of materials therefor
- H01L23/481—Internal lead connections, e.g. via connections, feedthrough structures
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2924/00—Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
- H01L2924/0001—Technical content checked by a classifier
- H01L2924/0002—Not covered by any one of groups H01L24/00, H01L24/00 and H01L2224/00
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2924/00—Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
- H01L2924/30—Technical effects
- H01L2924/301—Electrical effects
- H01L2924/3011—Impedance
Definitions
- Through-wafer vias also known by other names such as substrate vias, or through-vias, or backside vias
- substrate vias or through-vias, or backside vias
- backside vias have been described and used for compound semiconductor integrated circuits for high frequency and high power applications. They provide a means to add a metal interconnect layer to the back of a wafer (e.g., a silicon, gallium arsenide (GaAs), indium phosphide, or other semiconductor wafer) to supplement the metal interconnect lines on the front side of the wafer, and their use is driven by multiple considerations.
- the backside metal of a wafer is a solid sheet of metal which forms a voltage ground.
- ground plane removes the need for ground lines on the top of the wafer, which would otherwise consume integrated circuit area and thus increase cost, and which may have unfavorable series resistance and inductance due to layout considerations which can degrade electrical performance, and which often need to be attached with bond wires which add to assembly costs. For high power applications, often backside ground planes can also drain additional heat away from the devices while under operation.
- alignment accuracy between features on the wafer front side is typically less than 1 ⁇ m, and often on the order of 0.1 to 1 ⁇ m, which can depend on the technology and/or material that is employed. Therefore, through-vias normally terminate on much larger front side metal pads, which partially nullifies the area advantage of using through-vias.
- FETs field-effect transistors
- a terminal to be grounded typically the source for an n-type FET
- that terminal can be directly connected to a backside ground plane by a through-via.
- FIG. 1A shows a cross-section view
- FIG. 1B shows a plan view, of an FET 100 produced on a wafer 10 which includes one or more through-vias 150 .
- Wafer 10 includes a first (front) side 12 and a second side (backside) 14 .
- a ground plane 16 is formed on backside 14 of wafer 10 .
- FET 100 includes drain terminal(s) 110 , gate terminal(s) 120 and source terminal(s) 130 .
- metalized through-vias 150 pass through wafer 10 to connect source terminal(s) 130 to ground plane 16 .
- a capacitor as a component of a passive network such as a filter.
- a through-via can make a direct connection between one terminal (e.g., the bottom plate) of a capacitor and a ground plane on the backside of a wafer.
- FIG. 2A shows a cross-section view
- FIG. 2B shows a plan view, of a capacitor 200 produced on a wafer 20 which includes one or more through-vias 250 .
- Wafer 20 includes a first (front) side 22 and a second side (backside) 24 .
- a ground plane 26 is formed on backside 24 of wafer 20 .
- Capacitor 200 includes one or more bottom plate(s) 210 , insulating layer(s) 220 , and top plate(s) 230 .
- metalized through-vias 250 pass through wafer 20 to connect bottom plate(s) 210 to ground plane 26 .
- FIGS. 2A-B The construction shown in FIGS. 2A-B is sometimes called a capacitor-over-via. Such a connection may be advantageous from the standpoint of minimizing the area required to fabricate an integrated circuit, but it also means that part of the mechanical support of capacitor 200 has been removed. This reduction in mechanical support can lead to premature failure of capacitor 200 .
- a large number of through-vias can mechanically weaken the substrate so that it becomes easier to fracture during assembly.
- a method for forming a through-via in a semiconductor wafer.
- the method comprises: forming a first via starting on a first side of a semiconductor wafer and extending a first depth into the semiconductor wafer from the first side of the semiconductor wafer, the first depth being less than a thickness of the semiconductor wafer and the first via having a first width in one direction; providing a first conductive material in the first via; providing one or more electronic components on the first side of the semiconductor wafer; forming a second via starting on a second side of the semiconductor wafer opposite the first side and extending a second depth into the semiconductor wafer from the second side of the semiconductor wafer so as to expose the first via, the second via having a second width in one direction, the second width being greater than the first width; and providing a second conductive material in the second via so as to make an electrical connection with the first conductive material deposited in the first via.
- a semiconductor device in another representative embodiment, includes a substrate; a first via provided in the substrate extending from a first side of the substrate to a first depth into the substrate, the first depth being less than a thickness of the substrate and the first via having a first width in one direction; a first conductive material provided in the first via; a second via provided in the substrate extending from a second side of the substrate to a second depth into the substrate, the second via having a second width in one direction, the second width being greater than the first width; and a second conductive material provided in the second via so as to form an electrical connection with the first conductive material provided in the first via.
- an electrical device is provided on a substrate.
- the electrical device comprises: a first conductive electrode provided on a first side of the substrate; a first via provided in the substrate extending from the first side of the substrate to a first depth into the substrate, the first depth being less than a thickness of the substrate, and the first via having a first width in one direction; a first conductive material provided in the first via so as to form an electrical connection with the first conductive electrode; a second via provided in the substrate extending from a second side of the substrate to a second depth into the substrate, the second via having a second width in one direction, the second width being greater than the first width; and a second conductive material provided in the second via so as to form an electrical connection with the first conductive material provided in the first via.
- FIGS. 1A-B show a field-effect transistor produced on a wafer which includes one or more through-vias.
- FIGS. 2A-B show a capacitor produced on a wafer which includes one or more through-vias.
- FIGS. 3A-J illustrate one embodiment of a process of producing a through-via in a wafer.
- FIGS. 4A-B show a through-via in a wafer.
- FIGS. 5A-B show one embodiment of a wafer which includes a through-via structure.
- FIGS. 6A-B show an embodiment of a field-effect transistor produced on a wafer which includes a through-via structure.
- FIGS. 7A-B show one embodiment of a capacitor produced on a wafer which includes a through-via structure.
- FIGS. 3A-J illustrate one embodiment of a process of producing a through-via in a wafer.
- the part of the process shown in FIGS. 3A-C is performed early in the processing of the wafer, since as the processing of the wafer continues, in general more space will be required between the front-side vias to be formed in this process and the various features or components that are formed on the front side of the wafer.
- a patterned mask 340 is formed on a first (front) side 302 of a wafer 300 so as to have one of more openings 342 therein.
- wafer 300 is a semiconductor wafer, for example a silicon wafer, a gallium arsenide (GaAs) wafer, or an indium phosphide wafer.
- wafer 300 is etched so as to form one or more first vias or first trenches 344 in wafer 300 .
- first via 344 is etched into wafer 300 from first side 302 of wafer 300 to a depth D 1 , where D 1 is less than the thickness of wafer 300 .
- first via 344 has a narrow width W 1 in at least one dimension. In some embodiments, W 1 may be about 5 ⁇ m.
- wafer 300 is etched using an anisotropic plasma-based etch according to techniques that are known in the art.
- patterned mask 340 is removed from first side 302 of wafer 300 and a first conductive material (e.g., metal) 346 is deposited into first via 344 from first side 302 of substrate 300 .
- first conductive material 346 is deposited into first via 344 so as to close the opening of first via 344 from first side 302 of wafer 300 .
- first conductive material 346 is deposited into first via 344 so as to completely fill first via 344 .
- first via 344 terminates inside wafer 300 and is not connected to the second side (backside) 304 of wafer 300 .
- first side 302 of wafer 300 is patterned and processed as necessary to construct any desired interconnections 310 and elements 320 (e.g., electronic components such as capacitors, transistors, resonators, diodes, conductors, connectors, etc.) to be formed thereon.
- elements 320 e.g., electronic components such as capacitors, transistors, resonators, diodes, conductors, connectors, etc.
- wafer 300 is mounted upside down and a thickness “T” of wafer 300 is removed by lapping or grinding or another technique so as to thin the wafer.
- thinned wafer 30 having a first side 32 and a second side (backside) 34 , with first via 344 having first conductive layer 346 deposited therein extending from the first side 32 into thinned wafer 30 to a depth D 1 .
- first via 344 having first conductive layer 346 deposited therein extending from the first side 32 into thinned wafer 30 to a depth D 1 .
- thinned wafer 30 has a thickness of 50-150 ⁇ m. In some embodiments, thinned wafer 30 has a thickness of about 100 ⁇ m.
- the portion of each thinned wafer 30 that is provided for each chip may be referred to as a substrate.
- pattern mask 350 is formed on second side (backside) 34 of thinned wafer 30 so as to have one or more openings 352 therein.
- thinned wafer 30 is etched so as to form one or more second vias or second trenches 354 in thinned wafer 30 .
- second via 354 is etched into wafer 30 from second side 34 of thinned wafer 30 to a depth D 2 so as to expose the bottom of first via 344 .
- the depth D 2 may be greater than 75 ⁇ m.
- the depth D 1 of first via 344 may be less than 20 ⁇ m. In some embodiments, D 1 is between 10-20 ⁇ m.
- second via 354 does not need to be relatively narrow in at least one dimension.
- second via 354 has a width W 2 in at least one dimension that is greater than W 1 . Accordingly, second via 354 can be formed with a larger width and therefore can be more easily etched to a particular depth. Also, because second via 354 can be formed with a larger width, alignment issues with respect to first via 344 are mitigated.
- W 2 may be about 30 ⁇ m.
- a second conductive material (e.g., a metal) is provided on second side (backside) 34 of wafer thinned 30 to form a ground plane 36 on second side (backside 34 ), and to form a conductive layer 356 inside of second via 354 .
- second conductive layer 356 of the second conductive material may or may not completely fill second via 354 , but beneficially provides an electrical connection between ground plane 36 and first conductive material 346 in first via 344 .
- FIG. 3J shows a completed intercepting through-via 360 for wafer 30 comprising first via 344 and second via 354 having first and second conductive materials deposited respectively therein in electrical connection with each other.
- interconnections 310 and elements 320 are formed after first via(s) 344 are formed and first conductive material 346 is deposited therein, in some embodiments some or all of the interconnections 310 and elements 320 may be formed before some or all of first via(s) 344 are formed and/or before first conductive material 346 is deposited therein or simultaneously with formation of some or all of first via(s) 344 or first conductive material 346 .
- FIGS. 4A-B show a through-via 460 in a wafer 40 produced with a conventional process, for comparison to intercepting through-via 360 as described above.
- Interconnections 410 and elements (e.g., electronic components such as capacitors, transistors, resonators, diodes, conductors, connectors, etc.) 420 are formed on the top side 42 of wafer 40 , and a ground plane 46 is formed on backside 44 .
- the sides and bottom of through-via 460 are plated with the metallization of ground plane 46 .
- intercepting through-vias produced by one or more embodiments of the method illustrated in FIGS. 3A-J may provide one or more of the following features.
- First vias 344 can be made with very narrow or small widths since they do not have penetrate all the way through wafer 30 .
- Second vias 354 also can be made smaller since they too do not have penetrate all the way through wafer 30 .
- the preservation of wafer material means that they can be deployed closer together and parallelized where necessary to lower the total impedance without adversely affecting the mechanical integrity of the wafer or substrate.
- first vias 344 are aligned to first side 32 , which normally has a much higher alignment accuracy than second side (backside) 34 , first vias 344 can be deployed with smaller spacings to the elements or devices 320 on first side 32 of wafer 30 .
- the problem of poor backside alignment accuracy moves to an intercept plane inside wafer 30 where first via 344 contacts second via 354 , instead of being near the sensitive devices 320 .
- FIGS. 5A-B show an example of one embodiment of a wafer 50 which includes a through-via structure 500 comprising a plurality of top-side vias 544 , each having a conductive material (e.g., metal) deposited therein and being connected to a backside via 554 having a second conductive material (e.g., metal) deposited therein.
- Interconnections 510 and elements 520 e.g., electronic components such as capacitors, transistors, resonators, diodes, etc.
- ground plane 56 is electrically connected to the second conductive material deposited in second via 554 .
- the top-side vias could all be connected to a same element 520 , or different front-side vias could be connected to different elements 520 .
- Embodiments of intercepting through-vias as described above with respect to FIGS. 3A-J and FIGS. 5A-B can be employed in conjunction with a number of different types of components in an integrated circuit.
- Exemplary components include a field effect transistor having one terminal or electrode (e.g., a source) connected to ground, and a capacitor having one terminal or electrode connected to ground.
- a FET may have a number of source fingers each of which is to be connected to ground. It is generally desired to make each of the connections between the source fingers and ground with as low of a series impedance and series inductance as possible.
- a FET with conventional through-wafer vias will tend to have a small number of through-wafer vias connected to the source fingers with the other source fingers connected to these through-wafer vias with interconnects on the front side of the wafer, an example of which is shown in FIGS. 1A-B . Deploying a large number of conventional through-vias imposes an area penalty because of alignment difficulties, and/or will severely weaken the integrated circuit because too much wafer/substrate material is removed.
- FIGS. 6A-B show one embodiment of a field-effect transistor (FET) 600 produced on a wafer 60 which includes a through-via structure.
- Wafer 60 includes a first (front) side 62 and a second side (backside) 64 .
- a ground plane 66 is formed on second side 64 of wafer 60 .
- FET 600 includes drain terminal(s) 610 , gate terminal(s) 620 and source terminal(s) 630 .
- Each drain terminal 610 , gate terminal 620 and source terminal 630 comprises a conductive (e.g., metal) electrode.
- each source terminal 630 is provided a first via 644 having a first conductive material deposited therein.
- the first conductive material in each first via 644 is electrically connected with the corresponding source terminal/electrode 630 , and also electrically connected with a second conductive material deposited in a corresponding second via 654 formed on the second side (backside) 64 of wafer 60 .
- First vias 644 each extend from first side 62 of wafer 60 to a depth D 1 , where D 1 is less than the thickness of wafer 60 .
- D 1 may be less than 20 ⁇ m.
- D 1 is between 10-20 ⁇ m.
- first via 644 has a narrow width in at least one dimension. In some embodiments, the width may be about 5 ⁇ m.
- Second vias 654 are etched into wafer 60 from second side 64 of wafer 60 to a depth D 2 so as to expose the bottom of a corresponding one of the first via 644 .
- D 2 may be greater than 75 ⁇ m.
- each second via 654 has a width in at least one dimension that is greater than the width of the corresponding first via 644 , as shown in FIGS. 6A-B .
- second via 654 has a width of about 30 ⁇ m.
- a first source terminal/electrode 630 has a first via 644 beneath it that is electrically connected to a second via 654 beneath the first via 644 and which in turn is connected to a ground plane 66 ;
- a second source terminal/electrode 630 has a third via 644 beneath it that is electrically connected to a fourth via 654 beneath the third via 644 and which in turn is connected to the ground plane 66 ; etc.
- the front side alignment accuracy of the intercepting through-via structure as described above also reduces the need for capacitor-over-vias. Rather than deploy a conventional through-via directly under a capacitor, small front side (first) vias can be deployed with close spacing to the capacitor.
- FIGS. 7A-B show one embodiment of a capacitor 700 produced on a wafer 70 which includes a through-via structure.
- Wafer 70 includes a first (front) side 72 and a second side (backside) 74 .
- a ground plane 76 is formed on second side 74 of wafer 70 .
- Capacitor 700 includes one or more bottom plate(s) or conductive electrode(s) 710 , insulating layer(s) 720 , and top plate(s) or conductive electrode(s) 730 .
- first vias 744 each having a first conductive material deposited therein.
- the first conductive material in each first via 744 is electrically connected with the bottom electrode 710 , and also electrically connected with a second conductive material deposited in a corresponding second via 754 formed on the second side (backside) 74 of wafer 70 .
- First vias 744 each extend from first side 72 of wafer 70 to a depth D 1 , where D 1 is less than the thickness of wafer 70 .
- D 1 may be less than 20 ⁇ m.
- D 1 is between 10-20 ⁇ m.
- first via 744 has a narrow width in at least one dimension. In some embodiments, the width may be about 5 ⁇ m.
- Second vias 754 are etched into wafer 70 from second side 74 of wafer 70 to a depth D 2 so as to expose the bottom of a corresponding one of the first via 744 .
- D 2 may be greater than 75 ⁇ m.
- each second via 754 has a width in at least one dimension that is greater than the width of the corresponding first via 744 , as shown in FIGS. 7A-B .
- second via 754 has a width of about 30 ⁇ m.
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Abstract
A semiconductor device includes a substrate; a first via provided in the substrate extending from a first side of the substrate to a first depth into the substrate, the first depth being less than a thickness of the substrate and the first via having a first width in one direction; a first conductive material provided in the first via; a second via provided in the substrate extending from a second side of the substrate to a second depth into the substrate, the second via having a second width in one direction, the second width being greater than the first width; and a second conductive material provided in the second via so as to form an electrical connection with the first conductive material provided in the first via.
Description
- Through-wafer vias (also known by other names such as substrate vias, or through-vias, or backside vias) have been described and used for compound semiconductor integrated circuits for high frequency and high power applications. They provide a means to add a metal interconnect layer to the back of a wafer (e.g., a silicon, gallium arsenide (GaAs), indium phosphide, or other semiconductor wafer) to supplement the metal interconnect lines on the front side of the wafer, and their use is driven by multiple considerations. Often, the backside metal of a wafer is a solid sheet of metal which forms a voltage ground. This backside “ground plane” removes the need for ground lines on the top of the wafer, which would otherwise consume integrated circuit area and thus increase cost, and which may have unfavorable series resistance and inductance due to layout considerations which can degrade electrical performance, and which often need to be attached with bond wires which add to assembly costs. For high power applications, often backside ground planes can also drain additional heat away from the devices while under operation.
- There are some considerations in the fabrication of through-vias and their applications whose impact can be observed in the reported literature, e.g. Bonneau et al., 2002 GaAs MANTECH, pp 113-16; Hendricks et al. 2002 GaAs MANTECH, pp 105-8. In general, these known through-vias are fabricated from the wafer backside after a desired amount or thickness of the backside of the wafer has been removed by backlapping or grinding the wafer. Alignment of through-vias from the backside to features on the front side tends to be crude, with an accuracy on the order of 1 to 10 μm, and the effective accuracy can become worse due to process bias such as the growth of features. By comparison, alignment accuracy between features on the wafer front side is typically less than 1 μm, and often on the order of 0.1 to 1 μm, which can depend on the technology and/or material that is employed. Therefore, through-vias normally terminate on much larger front side metal pads, which partially nullifies the area advantage of using through-vias.
- Also, the processes used to etch these known through-vias impose considerations as well. In the past, through-vias have been produced by using a wet chemical etch (see, e.g. D'Asaro et al., IEEE T
RANS . ELECTRON DEVICES v. 25 pp 1218-21 (1978). However, this method greatly expands the size of the through-via on the backside of the wafer and is now uncommon. Nowadays, through-vias more commonly are etched by a plasma-based etch through wafers which typically have been thinned to a thickness of 50 to 100 μm. Such plasma-based etches will slow down as the through-via sizes get smaller and as the through-via goes deeper into the wafer. This means that through-vias which are too small are impractical or impossible to etch, and typical through-via plan-view linear dimensions (i.e., “widths” of the through-vias) are on the order of 10 to 100 μm. - When a device has a terminal which is to be grounded by means of a through-via to a backside ground plane, in general it is desired to provide the through-via to be as close as possible to the ground terminal in order to reduce series resistance and/or inductance. For example, field-effect transistors (FETs) formed on the front surface may have a terminal to be grounded (typically the source for an n-type FET), and that terminal can be directly connected to a backside ground plane by a through-via.
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FIG. 1A shows a cross-section view, andFIG. 1B shows a plan view, of an FET 100 produced on awafer 10 which includes one or more through-vias 150. Wafer 10 includes a first (front)side 12 and a second side (backside) 14. Aground plane 16 is formed onbackside 14 ofwafer 10. Whenwafer 10 is ultimately diced into individual integrated circuit “chips,” the portion of eachwafer 10 that is provided for each chip may be referred to as a substrate. FET 100 includes drain terminal(s) 110, gate terminal(s) 120 and source terminal(s) 130. As best seen inFIG. 1A , metalized through-vias 150 pass throughwafer 10 to connect source terminal(s) 130 toground plane 16. - Another type of device which often has one terminal connected to ground is a capacitor as a component of a passive network such as a filter. A through-via can make a direct connection between one terminal (e.g., the bottom plate) of a capacitor and a ground plane on the backside of a wafer.
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FIG. 2A shows a cross-section view, andFIG. 2B shows a plan view, of acapacitor 200 produced on awafer 20 which includes one or more through-vias 250. Wafer 20 includes a first (front)side 22 and a second side (backside) 24. Aground plane 26 is formed onbackside 24 ofwafer 20. As before, whenwafer 20 is ultimately diced into individual integrated circuit “chips,” the portion ofwafer 20 that is provided for each chip is sometimes referred to as the substrate.Capacitor 200 includes one or more bottom plate(s) 210, insulating layer(s) 220, and top plate(s) 230. As best seen inFIG. 2A , metalized through-vias 250 pass throughwafer 20 to connect bottom plate(s) 210 toground plane 26. - The construction shown in
FIGS. 2A-B is sometimes called a capacitor-over-via. Such a connection may be advantageous from the standpoint of minimizing the area required to fabricate an integrated circuit, but it also means that part of the mechanical support ofcapacitor 200 has been removed. This reduction in mechanical support can lead to premature failure ofcapacitor 200. - Another consideration is the impact of adding a large number of through-vias to an integrated circuit. A large number of through-vias, especially if deployed in a line, can mechanically weaken the substrate so that it becomes easier to fracture during assembly.
- So it would be desirable to provide a though-via for a wafer that can provide sufficient mechanical support and a reliable connection. It would also be desirable to provide a method of making such through-vias in a wafer. It would further be desirable to provide a wafer including one or more such through-vias.
- In a representative embodiment, a method is provided for forming a through-via in a semiconductor wafer. The method comprises: forming a first via starting on a first side of a semiconductor wafer and extending a first depth into the semiconductor wafer from the first side of the semiconductor wafer, the first depth being less than a thickness of the semiconductor wafer and the first via having a first width in one direction; providing a first conductive material in the first via; providing one or more electronic components on the first side of the semiconductor wafer; forming a second via starting on a second side of the semiconductor wafer opposite the first side and extending a second depth into the semiconductor wafer from the second side of the semiconductor wafer so as to expose the first via, the second via having a second width in one direction, the second width being greater than the first width; and providing a second conductive material in the second via so as to make an electrical connection with the first conductive material deposited in the first via.
- In another representative embodiment, a semiconductor device includes a substrate; a first via provided in the substrate extending from a first side of the substrate to a first depth into the substrate, the first depth being less than a thickness of the substrate and the first via having a first width in one direction; a first conductive material provided in the first via; a second via provided in the substrate extending from a second side of the substrate to a second depth into the substrate, the second via having a second width in one direction, the second width being greater than the first width; and a second conductive material provided in the second via so as to form an electrical connection with the first conductive material provided in the first via.
- In another representative embodiment, an electrical device is provided on a substrate. The electrical device comprises: a first conductive electrode provided on a first side of the substrate; a first via provided in the substrate extending from the first side of the substrate to a first depth into the substrate, the first depth being less than a thickness of the substrate, and the first via having a first width in one direction; a first conductive material provided in the first via so as to form an electrical connection with the first conductive electrode; a second via provided in the substrate extending from a second side of the substrate to a second depth into the substrate, the second via having a second width in one direction, the second width being greater than the first width; and a second conductive material provided in the second via so as to form an electrical connection with the first conductive material provided in the first via.
- The example embodiments are best understood from the following detailed description when read with the accompanying figures. It is emphasized that the various features are not necessarily drawn to scale. In fact, the dimensions may be arbitrarily increased or decreased for clarity of discussion. Wherever applicable and practical, like reference numerals refer to like elements.
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FIGS. 1A-B show a field-effect transistor produced on a wafer which includes one or more through-vias. -
FIGS. 2A-B show a capacitor produced on a wafer which includes one or more through-vias. -
FIGS. 3A-J illustrate one embodiment of a process of producing a through-via in a wafer. -
FIGS. 4A-B show a through-via in a wafer. -
FIGS. 5A-B show one embodiment of a wafer which includes a through-via structure. -
FIGS. 6A-B show an embodiment of a field-effect transistor produced on a wafer which includes a through-via structure. -
FIGS. 7A-B show one embodiment of a capacitor produced on a wafer which includes a through-via structure. - In the following detailed description, for purposes of explanation and not limitation, representative embodiments disclosing specific details are set forth in order to provide a thorough understanding of an embodiment according to the present teachings. However, it will be apparent to one having ordinary skill in the art having had the benefit of the present disclosure that other embodiments according to the present teachings that depart from the specific details disclosed herein remain within the scope of the appended claims. Moreover, descriptions of well-known apparatuses and methods may be omitted so as to not obscure the description of the example embodiments. Such methods and apparatuses are clearly within the scope of the present teachings.
- Moreover, when used herein the context of describing a value or range of values, the terms “about” and “approximately” will be understood to encompass variations of ±10% with respect to the nominal value or range of values.
-
FIGS. 3A-J illustrate one embodiment of a process of producing a through-via in a wafer. Beneficially, the part of the process shown inFIGS. 3A-C is performed early in the processing of the wafer, since as the processing of the wafer continues, in general more space will be required between the front-side vias to be formed in this process and the various features or components that are formed on the front side of the wafer. - As shown in
FIG. 3A , apatterned mask 340 is formed on a first (front)side 302 of awafer 300 so as to have one ofmore openings 342 therein. Beneficially,wafer 300 is a semiconductor wafer, for example a silicon wafer, a gallium arsenide (GaAs) wafer, or an indium phosphide wafer. - Then, as shown in
FIG. 3B ,wafer 300 is etched so as to form one or more first vias orfirst trenches 344 inwafer 300. Beneficially, first via 344 is etched intowafer 300 fromfirst side 302 ofwafer 300 to a depth D1, where D1 is less than the thickness ofwafer 300. Beneficially, first via 344 has a narrow width W1 in at least one dimension. In some embodiments, W1 may be about 5 μm. In one embodiment,wafer 300 is etched using an anisotropic plasma-based etch according to techniques that are known in the art. - Next, as shown in
FIG. 3C ,patterned mask 340 is removed fromfirst side 302 ofwafer 300 and a first conductive material (e.g., metal) 346 is deposited into first via 344 fromfirst side 302 ofsubstrate 300. Beneficially, firstconductive material 346 is deposited into first via 344 so as to close the opening of first via 344 fromfirst side 302 ofwafer 300. In some embodiments, firstconductive material 346 is deposited into first via 344 so as to completely fill first via 344. - At this point, the bottom of first via 344 terminates inside
wafer 300 and is not connected to the second side (backside) 304 ofwafer 300. - Then, as shown in
FIG. 3D ,first side 302 ofwafer 300 is patterned and processed as necessary to construct any desiredinterconnections 310 and elements 320 (e.g., electronic components such as capacitors, transistors, resonators, diodes, conductors, connectors, etc.) to be formed thereon. - Next, as shown in
FIG. 3E ,wafer 300 is mounted upside down and a thickness “T” ofwafer 300 is removed by lapping or grinding or another technique so as to thin the wafer. - As shown in
FIG. 3F , the foregoing processes yield a thinnedwafer 30 having afirst side 32 and a second side (backside) 34, with first via 344 having firstconductive layer 346 deposited therein extending from thefirst side 32 into thinnedwafer 30 to a depth D1. Beneficially, after thinning, thinnedwafer 30 has a thickness of 50-150 μm. In some embodiments, thinnedwafer 30 has a thickness of about 100 μm. When thinnedwafer 30 is ultimately diced into individual integrated circuit “chips,” the portion of each thinnedwafer 30 that is provided for each chip may be referred to as a substrate. - Next, as shown in
FIG. 3G ,pattern mask 350 is formed on second side (backside) 34 of thinnedwafer 30 so as to have one ormore openings 352 therein. - Next, as shown in
FIG. 3H , thinnedwafer 30 is etched so as to form one or more second vias orsecond trenches 354 in thinnedwafer 30. Beneficially, second via 354 is etched intowafer 30 fromsecond side 34 of thinnedwafer 30 to a depth D2 so as to expose the bottom of first via 344. - In some beneficial embodiments, where thinned
wafer 30 has a thickness of about 100 μm the depth D2 may be greater than 75 μm. Meanwhile, beneficially, the depth D1 of first via 344 may be less than 20 μm. In some embodiments, D1 is between 10-20 μm. - In an advantageous feature, because second side (backside) 34 of
wafer 30 does not generally have a large number of elements or features (indeed, in many cases it does not have any elements or features formed thereon) second via 354 does not need to be relatively narrow in at least one dimension. Beneficially, second via 354 has a width W2 in at least one dimension that is greater than W1. Accordingly, second via 354 can be formed with a larger width and therefore can be more easily etched to a particular depth. Also, because second via 354 can be formed with a larger width, alignment issues with respect to first via 344 are mitigated. In some embodiments, W2 may be about 30 μm. - Next, as shown in
FIG. 3I , a second conductive material (e.g., a metal) is provided on second side (backside) 34 of wafer thinned 30 to form aground plane 36 on second side (backside 34), and to form aconductive layer 356 inside of second via 354. In this case, secondconductive layer 356 of the second conductive material may or may not completely fill second via 354, but beneficially provides an electrical connection betweenground plane 36 and firstconductive material 346 in first via 344. - Finally,
FIG. 3J shows a completed intercepting through-via 360 forwafer 30 comprising first via 344 and second via 354 having first and second conductive materials deposited respectively therein in electrical connection with each other. - Although in the process described above with respect to
FIGS. 3A- J interconnections 310 andelements 320 are formed after first via(s) 344 are formed and firstconductive material 346 is deposited therein, in some embodiments some or all of theinterconnections 310 andelements 320 may be formed before some or all of first via(s) 344 are formed and/or before firstconductive material 346 is deposited therein or simultaneously with formation of some or all of first via(s) 344 or firstconductive material 346. -
FIGS. 4A-B show a through-via 460 in awafer 40 produced with a conventional process, for comparison to intercepting through-via 360 as described above.Interconnections 410 and elements (e.g., electronic components such as capacitors, transistors, resonators, diodes, conductors, connectors, etc.) 420 are formed on thetop side 42 ofwafer 40, and aground plane 46 is formed onbackside 44. The sides and bottom of through-via 460 are plated with the metallization ofground plane 46. - In some embodiments, intercepting through-vias produced by one or more embodiments of the method illustrated in
FIGS. 3A-J may provide one or more of the following features.First vias 344 can be made with very narrow or small widths since they do not have penetrate all the way throughwafer 30.Second vias 354 also can be made smaller since they too do not have penetrate all the way throughwafer 30. Although such vias are smaller and therefore typically contain less metal, and consequently have greater series resistance and inductance values, the preservation of wafer material means that they can be deployed closer together and parallelized where necessary to lower the total impedance without adversely affecting the mechanical integrity of the wafer or substrate. - Because
first vias 344 are aligned tofirst side 32, which normally has a much higher alignment accuracy than second side (backside) 34,first vias 344 can be deployed with smaller spacings to the elements ordevices 320 onfirst side 32 ofwafer 30. The problem of poor backside alignment accuracy moves to an intercept plane insidewafer 30 where first via 344 contacts second via 354, instead of being near thesensitive devices 320. Accordingly, in some embodiments, it may be possible to reduce the resistance and inductance to ground, because conventional through-vias 460 often only have metal formed on their sides (e.g., in a case where the metal is deposited by electroplating), whereas a collection of smallerfirst vias 344 may actually contain a larger total volume of conductive material (e.g., metal). -
FIGS. 5A-B show an example of one embodiment of awafer 50 which includes a through-viastructure 500 comprising a plurality of top-side vias 544, each having a conductive material (e.g., metal) deposited therein and being connected to a backside via 554 having a second conductive material (e.g., metal) deposited therein.Interconnections 510 and elements 520 (e.g., electronic components such as capacitors, transistors, resonators, diodes, etc.) are formed on the first (top)side 52 ofwafer 50, and aground plane 56 is formed on second side (backside) 54.Ground plane 56 is electrically connected to the second conductive material deposited in second via 554. The top-side vias could all be connected to asame element 520, or different front-side vias could be connected todifferent elements 520. - Embodiments of intercepting through-vias as described above with respect to
FIGS. 3A-J andFIGS. 5A-B can be employed in conjunction with a number of different types of components in an integrated circuit. Exemplary components include a field effect transistor having one terminal or electrode (e.g., a source) connected to ground, and a capacitor having one terminal or electrode connected to ground. - For example, a FET may have a number of source fingers each of which is to be connected to ground. It is generally desired to make each of the connections between the source fingers and ground with as low of a series impedance and series inductance as possible. A FET with conventional through-wafer vias will tend to have a small number of through-wafer vias connected to the source fingers with the other source fingers connected to these through-wafer vias with interconnects on the front side of the wafer, an example of which is shown in
FIGS. 1A-B . Deploying a large number of conventional through-vias imposes an area penalty because of alignment difficulties, and/or will severely weaken the integrated circuit because too much wafer/substrate material is removed. - However, with intercepting through-wafer vias, it becomes possible to provide a through-vias for each source finger without consuming a large amount of area and while retaining the mechanical integrity of the integrated circuit.
-
FIGS. 6A-B show one embodiment of a field-effect transistor (FET) 600 produced on awafer 60 which includes a through-via structure.Wafer 60 includes a first (front)side 62 and a second side (backside) 64. Aground plane 66 is formed onsecond side 64 ofwafer 60. Whenwafer 60 is ultimately diced into individual integrated circuit “chips,” the portion of eachwafer 60 that is provided for each chip may be referred to as a substrate.FET 600 includes drain terminal(s) 610, gate terminal(s) 620 and source terminal(s) 630. Eachdrain terminal 610,gate terminal 620 andsource terminal 630 comprises a conductive (e.g., metal) electrode. - As best seen in
FIG. 6A , beneath eachsource terminal 630 is provided a first via 644 having a first conductive material deposited therein. The first conductive material in each first via 644 is electrically connected with the corresponding source terminal/electrode 630, and also electrically connected with a second conductive material deposited in a corresponding second via 654 formed on the second side (backside) 64 ofwafer 60. -
First vias 644 each extend fromfirst side 62 ofwafer 60 to a depth D1, where D1 is less than the thickness ofwafer 60. Beneficially, D1 may be less than 20 μm. In some embodiments, D1 is between 10-20 μm. Beneficially, first via 644 has a narrow width in at least one dimension. In some embodiments, the width may be about 5 μm. -
Second vias 654 are etched intowafer 60 fromsecond side 64 ofwafer 60 to a depth D2 so as to expose the bottom of a corresponding one of the first via 644. In some embodiments, D2 may be greater than 75 μm. In a beneficial arrangement, in some embodiments each second via 654 has a width in at least one dimension that is greater than the width of the corresponding first via 644, as shown inFIGS. 6A-B . In some embodiments, second via 654 has a width of about 30 μm. - As a result, in
FIGS. 6A-B : a first source terminal/electrode 630 has a first via 644 beneath it that is electrically connected to a second via 654 beneath the first via 644 and which in turn is connected to aground plane 66; a second source terminal/electrode 630 has a third via 644 beneath it that is electrically connected to a fourth via 654 beneath the third via 644 and which in turn is connected to theground plane 66; etc. - The front side alignment accuracy of the intercepting through-via structure as described above also reduces the need for capacitor-over-vias. Rather than deploy a conventional through-via directly under a capacitor, small front side (first) vias can be deployed with close spacing to the capacitor.
-
FIGS. 7A-B show one embodiment of acapacitor 700 produced on awafer 70 which includes a through-via structure.Wafer 70 includes a first (front)side 72 and a second side (backside) 74. Aground plane 76 is formed onsecond side 74 ofwafer 70. As before, whenwafer 70 is ultimately diced into individual integrated circuit “chips,” the portion ofwafer 70 that is provided for each chip is sometimes referred to as the substrate.Capacitor 700 includes one or more bottom plate(s) or conductive electrode(s) 710, insulating layer(s) 720, and top plate(s) or conductive electrode(s) 730. - As best seen in
FIG. 7A , beneathbottom electrode 710 is provided one or morefirst vias 744 each having a first conductive material deposited therein. The first conductive material in each first via 744 is electrically connected with thebottom electrode 710, and also electrically connected with a second conductive material deposited in a corresponding second via 754 formed on the second side (backside) 74 ofwafer 70. -
First vias 744 each extend fromfirst side 72 ofwafer 70 to a depth D1, where D1 is less than the thickness ofwafer 70. Beneficially, D1 may be less than 20 μm. In some embodiments, D1 is between 10-20 μm. Beneficially, first via 744 has a narrow width in at least one dimension. In some embodiments, the width may be about 5 μm. -
Second vias 754 are etched intowafer 70 fromsecond side 74 ofwafer 70 to a depth D2 so as to expose the bottom of a corresponding one of the first via 744. In some embodiments, D2 may be greater than 75 μm. In a beneficial arrangement, in some embodiments each second via 754 has a width in at least one dimension that is greater than the width of the corresponding first via 744, as shown inFIGS. 7A-B . In some embodiments, second via 754 has a width of about 30 μm. - While example embodiments are disclosed herein, one of ordinary skill in the art appreciates that many variations that are in accordance with the present teachings are possible and remain within the scope of the appended claims. After a careful reading of the teachings of this specification and the drawings provided together herewith, such variations would be recognized by those of skill in the art. The embodiments therefore are not to be restricted except within the scope of the appended claims.
Claims (20)
1. A method of providing a through-via in a semiconductor wafer, the method comprising:
forming a first via starting on a first side of a semiconductor wafer and extending a first depth into the semiconductor wafer from the first side of the semiconductor wafer, the first depth being less than a thickness of the semiconductor wafer and the first via having a first width in one direction;
providing a first conductive material in the first via;
providing one or more electronic components on the first side of the semiconductor wafer;
forming a second via starting on a second side of the semiconductor wafer opposite the first side and extending a second depth into the semiconductor wafer from the second side of the semiconductor wafer so as to expose the first via, the second via having a second width in one direction, the second width being greater than the first width; and
providing a second conductive material in the second via so as to make an electrical connection with the first conductive material deposited in the first via.
2. The method of claim 1 , wherein forming the first via comprises:
forming a pattern mask on the first side of the substrate, the pattern mask having an opening where the first via is to be formed; and
etching the semiconductor wafer using an anisotropic plasma-based etch to form the first via.
3. The method of claim 1 , wherein providing the first conductive material in the first via comprises depositing the first conductive material into the first via so as to close an opening of the first via from the first side of the wafer.
4. The method of claim 1 , wherein providing the first conductive material in the first via comprises depositing the first conductive material into the first via so as to completely fill the first via.
5. The method of claim 1 , further comprising removing a thickness of the semiconductor wafer from the second side of the semiconductor wafer before forming the second via.
6. The method of claim 1 , wherein providing the second conductive material in the second via comprises depositing the second conductive material over the second side of the semiconductor substrate and so as to cover at least one sidewall of the second via.
7. The method of claim 1 , wherein the step of providing one or more electronic components on the first side of the semiconductor wafer occurs before the step of forming the first via.
8. A device, comprising:
a substrate;
a first via provided in the substrate extending from a first side of the substrate to a first depth into the substrate, the first depth being less than a thickness of the substrate and the first via having a first width in one direction;
a first conductive material provided in the first via;
a second via provided in the substrate extending from a second side of the substrate to a second depth into the substrate, the second via having a second width in one direction, the second width being greater than the first width; and
a second conductive material provided in the second via so as to form an electrical connection with the first conductive material provided in the first via.
9. The device of claim 8 , wherein the substrate is one of silicon, gallium arsenide, and indium phosphide.
10. The device of claim 8 , wherein when the substrate has a thickness of about 100 μm, then the first depth is less than about 20 μm and the second depth is greater than about 75 μm.
11. The device of claim 8 , wherein the first width is less than about 10 μm and the second width is greater than about 20 μm.
12. The device of claim 8 , wherein the first conductive material closes an opening of the first via from the first side of the wafer.
13. The device of claim 8 , wherein the first conductive material completely fills the first via.
14. An electrical device provided on a substrate, the electrical device comprising:
a first conductive electrode provided on a first side of the substrate;
a first via provided in the substrate extending from the first side of the substrate to a first depth into the substrate, the first depth being less than a thickness of the substrate, and the first via having a first width in one direction;
a first conductive material provided in the first via so as to form an electrical connection with the first conductive electrode;
a second via provided in the substrate extending from a second side of the substrate to a second depth into the substrate, the second via having a second width in one direction, the second width being greater than the first width; and
a second conductive material provided in the second via so as to form an electrical connection with the first conductive material provided in the first via.
15. The device of claim 14 , further comprising:
an insulating layer disposed on the first conductive electrode; and
a second conductive electrode disposed on the insulating layer.
16. The device of claim 14 , further comprising:
a third via provided in the substrate extending from the first side of the substrate to the first depth into the substrate, the third via having a third width in one direction, the third width being less than the second width; and
the third conductive material being provided in the third via,
wherein the second conductive material provided in the second via forms an electrical connection with the third conductive material provided in the third via.
17. The device of claim 16 , wherein both the first and third vias are provided immediately beneath the first conductive electrode.
18. The device of claim 14 , wherein the first via is provided laterally adjacent to the first conductive electrode, and is connected to the first conductive electrode by a conductive material provided on the first side of the substrate.
19. The device of claim 14 , further comprising:
a second electrode disposed laterally with respect to the first electrode on the first side of the substrate; and
a gate electrode disposed on the first side of the substrate between the first and second electrodes;
wherein the device is a field-effect transistor; and
wherein the first and second electrodes comprises first source and first drain electrodes.
20. The device of claim 19 , wherein the first electrode is the first source electrode, the device further comprising:
a second source electrode provided on the first side of the substrate;
a third via provided in the substrate extending from the first side of the substrate to the first depth into the substrate, the third via having a third width in one direction, the first conductive material being provided in the third via so as to form an electrical connection with the second source electrode; and
a fourth via provided in the substrate extending from the second side of the substrate to the second depth into the substrate, the fourth via having a fourth width in one direction, the fourth width being greater than the third width, and the second conductive material being provided in the fourth via so as to form an electrical connection with the first conductive material provided in the third via.
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US12/237,665 US20100072627A1 (en) | 2008-09-25 | 2008-09-25 | Wafer including intercepting through-vias and method of making intercepting through-vias in a wafer |
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CN102237300A (en) * | 2010-04-27 | 2011-11-09 | 南亚科技股份有限公司 | Through-substrate via and fabrication method thereof |
US20120068342A1 (en) * | 2010-09-16 | 2012-03-22 | Lee Kevin J | Electrically conductive adhesive for temporary bonding |
US20120228778A1 (en) * | 2011-03-07 | 2012-09-13 | Valentin Kosenko | Substrates with through vias with conductive features for connection to integrated circuit elements, and methods for forming through vias in substrates |
US8431431B2 (en) | 2011-07-12 | 2013-04-30 | Invensas Corporation | Structures with through vias passing through a substrate comprising a planar insulating layer between semiconductor layers |
US9455214B2 (en) * | 2014-05-19 | 2016-09-27 | Globalfoundries Inc. | Wafer frontside-backside through silicon via |
US11398415B2 (en) * | 2018-09-19 | 2022-07-26 | Intel Corporation | Stacked through-silicon vias for multi-device packages |
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Cited By (13)
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CN102237300A (en) * | 2010-04-27 | 2011-11-09 | 南亚科技股份有限公司 | Through-substrate via and fabrication method thereof |
TWI447850B (en) * | 2010-04-27 | 2014-08-01 | Nanya Technology Corp | Through-substrate via and fabrication method thereof |
US20120068342A1 (en) * | 2010-09-16 | 2012-03-22 | Lee Kevin J | Electrically conductive adhesive for temporary bonding |
US20150228570A1 (en) * | 2011-03-07 | 2015-08-13 | Invensas Corporation | Substrates with through vias with conductive features for connection to integrated circuit elements, and methods for forming through vias in substrates |
US20120228778A1 (en) * | 2011-03-07 | 2012-09-13 | Valentin Kosenko | Substrates with through vias with conductive features for connection to integrated circuit elements, and methods for forming through vias in substrates |
US9589879B2 (en) * | 2011-03-07 | 2017-03-07 | Invensas Corporation | Substrates with through vias with conductive features for connection to integrated circuit elements, and methods for forming through vias in substrates |
US9018094B2 (en) * | 2011-03-07 | 2015-04-28 | Invensas Corporation | Substrates with through vias with conductive features for connection to integrated circuit elements, and methods for forming through vias in substrates |
US8431431B2 (en) | 2011-07-12 | 2013-04-30 | Invensas Corporation | Structures with through vias passing through a substrate comprising a planar insulating layer between semiconductor layers |
US9142511B2 (en) | 2011-07-12 | 2015-09-22 | Invensas Corporation | Structures with through vias passing through a substrate comprising a planar insulating layer between semiconductor layers |
US9515024B2 (en) | 2011-07-12 | 2016-12-06 | Invensas Corporation | Structures with through vias passing through a substrate comprising a planar insulating layer between semiconductor |
US8829683B2 (en) | 2011-07-12 | 2014-09-09 | Invensas Corporation | Structures with through vias passing through a substrate comprising a planar insulating layer between semiconductor layers |
US9455214B2 (en) * | 2014-05-19 | 2016-09-27 | Globalfoundries Inc. | Wafer frontside-backside through silicon via |
US11398415B2 (en) * | 2018-09-19 | 2022-07-26 | Intel Corporation | Stacked through-silicon vias for multi-device packages |
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