US20090189619A1 - Systems and methods for detecting capacitor process variation - Google Patents

Systems and methods for detecting capacitor process variation Download PDF

Info

Publication number
US20090189619A1
US20090189619A1 US12/419,089 US41908909A US2009189619A1 US 20090189619 A1 US20090189619 A1 US 20090189619A1 US 41908909 A US41908909 A US 41908909A US 2009189619 A1 US2009189619 A1 US 2009189619A1
Authority
US
United States
Prior art keywords
oscillator
variation
circuit
capacitor
output
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
US12/419,089
Other versions
US8610442B2 (en
Inventor
Jan-Michael Stevenson
Timothy M. Magnusen
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
CSR Technology Inc
Microtune Inc
Original Assignee
Microtune Texas LP
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Microtune Texas LP filed Critical Microtune Texas LP
Priority to US12/419,089 priority Critical patent/US8610442B2/en
Publication of US20090189619A1 publication Critical patent/US20090189619A1/en
Assigned to MICROTUNE (TEXAS), L.P. reassignment MICROTUNE (TEXAS), L.P. ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS). Assignors: MAGNUSEN, TIMOTHY M., STEVENSON, JAN-MICHAEL
Assigned to MICROTUNE (LP), L.L.C. reassignment MICROTUNE (LP), L.L.C. MERGER (SEE DOCUMENT FOR DETAILS). Assignors: MICROTUNE (TEXAS), L.P.
Assigned to ZORAN CORPORATION reassignment ZORAN CORPORATION MERGER (SEE DOCUMENT FOR DETAILS). Assignors: MICROTUNE, INC.
Assigned to MICROTUNE, INC. reassignment MICROTUNE, INC. MERGER (SEE DOCUMENT FOR DETAILS). Assignors: MICROTUNE (LP), L.L.C.
Assigned to CSR TECHNOLOGY INC. reassignment CSR TECHNOLOGY INC. ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS). Assignors: ZORAN CORPORATION
Publication of US8610442B2 publication Critical patent/US8610442B2/en
Application granted granted Critical
Assigned to CSR TECHNOLOGY INC. reassignment CSR TECHNOLOGY INC. ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS). Assignors: ZORAN CORPORATION
Expired - Fee Related legal-status Critical Current
Adjusted expiration legal-status Critical

Links

Images

Classifications

    • GPHYSICS
    • G01MEASURING; TESTING
    • G01RMEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R27/00Arrangements for measuring resistance, reactance, impedance, or electric characteristics derived therefrom
    • G01R27/02Measuring real or complex resistance, reactance, impedance, or other two-pole characteristics derived therefrom, e.g. time constant
    • G01R27/26Measuring inductance or capacitance; Measuring quality factor, e.g. by using the resonance method; Measuring loss factor; Measuring dielectric constants ; Measuring impedance or related variables
    • G01R27/2605Measuring capacitance
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01RMEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R31/00Arrangements for testing electric properties; Arrangements for locating electric faults; Arrangements for electrical testing characterised by what is being tested not provided for elsewhere
    • G01R31/28Testing of electronic circuits, e.g. by signal tracer
    • G01R31/2832Specific tests of electronic circuits not provided for elsewhere
    • G01R31/2836Fault-finding or characterising
    • G01R31/2837Characterising or performance testing, e.g. of frequency response

Definitions

  • Various embodiments of the present invention relate to measuring variation of one or more capacitors in semiconductor components.
  • Process variation in general, is the difference between an actual quality of a circuit element and its nominal quality. For instance, capacitors formed in semiconductor chips tend to have process variation of up to approximately plus or minus 20%, depending on the process. Thus, the actual capacitance of a given capacitor on a chip, measured in Farads, may be significantly different from the intended or nominal value specified in the design.
  • tuner circuits may include input filtering functions to condition input signals before they are passed to other tuner components.
  • Most such filters are Inductive-Capacitive (LC) circuits.
  • LC Inductive-Capacitive
  • the frequency response of a given LC filter depends on the values of the capacitor(s) and inductor(s) in the circuit.
  • capacitor variation can cause frequency response shifts in filters, causing non-ideal operation.
  • Prior art solutions have compensated for capacitor variation by measuring time-constant change in one or more Resistive-Capacitive (RC) circuits.
  • RC Resistive-Capacitive
  • time constant deviation fails to allow for the isolation of capacitor process variation.
  • capacitor variation can only be approximated or guessed from the time constant deviation.
  • the prior art offers no system that can accurately measure capacitor variation for a group of capacitors in an application.
  • Various embodiments of the present invention are directed to systems and methods which evaluate capacitor variation for one capacitor or a plurality of capacitors in a device. Such embodiments assess capacitor process variation in the device accurately because the measurement of the variation isolates capacitor variation from other factors, such as resistor process variation.
  • a capacitor under test is part of an LC oscillator.
  • the LC oscillator includes at least one inductor of known value. Generally, inductors disposed on chips have minimal process variation (i.e., within 1% of nominal value); thus, the value of a given inductor is often assumed to be its nominal value.
  • the IC oscillator is operated, and its output is captured. The output is compared to a value that represents the output of the oscillator under ideal performance. If process variation has caused the capacitor under test to have a smaller than nominal capacitance, then the LC oscillator will oscillate at higher frequency than it would had the capacitor been at nominal value. On the other hand, larger than nominal capacitance will cause the LC oscillator to exhibit lower frequency performance.
  • the captured output in one example, is a count of cycles of the LC oscillator, and the count is compared to a number of ideal cycles. The difference represents a percentage change in frequency.
  • the percentage change in frequency can then be used to evaluate the capacitor variation.
  • capacitor variation is the same or approximately the same for all such capacitors.
  • the evaluated variation may be associated with variation of the other capacitors in the device. Evaluation of the variation may be performed, for example, by circuit-based logic or machine executable code.
  • capacitor variation causes some shift in frequency response for each such filter.
  • a tuning component based on circuit logic and/or machine executable code can use the evaluated capacitor variation to compensate for the change in frequency response.
  • a filter component includes a plurality of individual filter elements, each with a passband that is centered at a different frequency. Each individual filter element is associated with a frequency range. As an application selects different frequency components of an input signal a tuning component selects one of the filter elements based on the range that the desired signal component falls in. The frequency values at which filters are switched may be referred to as “breakpoints.” In this example system, a tuning component uses the evaluated capacitor variation to adjust the breakpoints to compensate for capacitor variation in each of the individual filter elements.
  • selecting one or more individual filter elements is performed during manufacturing or testing. For instance, once the capacitor variation is ascertained, one or more connections may be made or broken (e.g., as in a programmable logic device) in a permanent or semi-permanent way, thereby setting the operating parameters of the filter.
  • a filter is preceded in the RF signal path by a first mixer and followed in the RF signal path by a second mixer. Either or both of the mixers may be adjusted to adapt to the offset center frequency of the filter.
  • FIG. 1 is an illustration of an exemplary system adapted according to one embodiment of the invention
  • FIG. 2A is an illustration of an exemplary system adapted according to one embodiment of the invention.
  • FIG. 2B shows a capacitor under test in a parallel LC configuration
  • FIG. 2C shows a capacitor under test in a series LC configuration
  • FIG. 3A is an illustration of an exemplary system adapted according to one embodiment of the invention.
  • FIG. 3B is an illustration of an exemplary filter component adapted according to one embodiment
  • FIG. 4 is an illustration of an exemplary system adapted according to one embodiment of the invention.
  • FIG. 5 is an illustration of an exemplary method adapted according to one embodiment of the invention.
  • FIG. 1 is an illustration of system 100 adapted according to one embodiment of the invention.
  • System 100 is a system for measuring the capacitor variation in a semiconductor device, wherein variation is the difference between an intended or nominal value and the actual value of a capacitor.
  • System 100 includes LC oscillator 101 , circuit 102 for capturing the output of LC oscillator 101 , and computational unit 103 for comparing the captured output to a reference output and to evaluate the variation based thereon.
  • System 100 is formed on a semiconductor chip with other circuits that include capacitors.
  • the capacitor variation evaluated by system 100 is a measure of capacitor variation for all or nearly all capacitors in the chip.
  • Systems according to the principles of system 100 can be designed in a variety of configurations, and one such configuration is shown in FIG. 2A .
  • FIG. 2A is an illustration of exemplary system 200 adapted according to one embodiment of the invention.
  • System 200 is operable to measure variation in a capacitor under test in LC oscillator 220 .
  • LC oscillator 220 can take a variety of forms and is shown in two basic configurations in FIGS. 2B and 2C .
  • FIG. 2B shows capacitor under test 225 in a parallel LC configuration
  • FIG. 2C shows capacitor under test 225 in a series LC configuration.
  • LC oscillator 220 is not limited to any specific design, as long as it outputs a periodic signal, such as a sinusoid, square wave, or the like.
  • Capacitor under test 225 is paired with inductor 226 , which is of a known value, and negative resistance 227 (e.g., an active element providing positive feedback) to form an oscillator circuit.
  • negative resistance 227 e.g., an active element providing positive feedback
  • the first step is providing a start pulse to control logic 210 .
  • Control logic 210 then enables LC oscillator 220 .
  • control logic 210 also sends a high signal to AND gate 265 , thereby enabling input of the 16 MHz (f ref ) reference signal to divider 260 .
  • the output of divider 260 is the input for divider 270 , the output of which is fed to AND gate 240 .
  • System 200 is designed to allow LC oscillator 220 to come to steady state before any measurements are made, and such feature is provided by dividers 260 and 270 and AND gate 240 .
  • the output of divider 270 is a square wave that starts low (i.e., binary zero), such that the first f ref /16 cycles cause a zero to be input into AND gate 240 .
  • the zero causes AND gate 240 to output a zero, thereby zeroing any pulses received from divider 230 .
  • the second f ref /16 cycles cause a high value (i.e., binary one) to be input to AND gate 240 .
  • the one causes AND gate 240 to output the pulses that it receives from divider 230 .
  • the first f ref /16 cycles is used to allow LC oscillator 220 to reach steady state before its output is captured.
  • the second f ref /16 cycles are the measurement period, wherein counter 250 captures the divided output of LC oscillator 220 . In this design, the measurement period lasts 1 ⁇ sec.
  • Control logic 210 disables LC oscillator after the end of the second f ref /16 cycles.
  • LC oscillator 220 is designed such that if there is zero variation in capacitor under test 225 , then LC oscillator 220 will output a 1.024 GHz pulse. If capacitor under test 225 has a larger than nominal capacitance, then the frequency of LC oscillator 220 will be lower than 1.024 GHz. On the other hand, if the capacitance of capacitor under test 225 is smaller than its nominal value, then the frequency will be higher.
  • the capacitor change is an inverse squared function of the frequency change.
  • System 200 captures the output of LC oscillator 220 by counting the pulses of its divided output.
  • LC oscillator 220 ideally causes counter 250 to store a value of one hundred twenty-eight during the 1 ⁇ sec measurement period.
  • capacitor variation is measured by comparing the value stored in counter 250 to the ideal one hundred twenty-eight reference output.
  • Each least significant bit difference in the stored value represents a 0.78125% change in frequency of LC oscillator 220 from its ideal frequency of 1.024 GHz.
  • the contents of counter 250 is sent to computational unit 280 , which compares the stored value to one hundred twenty-eight, and from that comparison, evaluates the capacitor variation.
  • Different techniques to evaluate capacitor variation from difference in the stored output are possible.
  • the difference in the stored output is used to calculate the frequency of LC oscillator 220 .
  • Computational unit 280 uses the frequency to find the capacitor variation in a look-up table.
  • computational unit 280 inputs the oscillator frequency into a mathematical algorithm that calculates the capacitor variation from the frequency, the inductor value, and the nominal value of capacitor under test 225 .
  • Other embodiments evaluate the capacitor variation without actually calculating it. For example, one embodiment categorizes variation according to its degree in a finite number of classes. The invention is not limited to any particular technique to evaluate capacitor variation.
  • system 200 is meant to be an example only, and other embodiments may deviate from the configuration of system 200 .
  • the specific frequencies of LC oscillator 220 and the reference signal are not required by other embodiments, and the use of different values are within the scope of the invention.
  • the various frequencies are not required in some embodiments, the number and values of dividers in a given circuit are also not required in some embodiments.
  • LC oscillator 220 may be designed to have an ideal operating frequency of 0.128 GHz, while divider 230 is eliminated from the system.
  • the values of the frequencies of LC oscillator 220 and the reference signal may be influenced, in part, by one or more constraints, such as the size of inductor 226 needed to produce a given nominal frequency value, and the availability of a reference signal, such as a clock, in a larger system into which system 200 is adapted.
  • Another constraint is the speed at which counter 250 can accurately operate, especially when implemented in Complementary Metal Oxide Semiconductor (CMOS) logic.
  • CMOS Complementary Metal Oxide Semiconductor
  • a system uses a phase frequency detector in a phase lock loop.
  • any configuration that changes frequency to measurable quantity can be used in some embodiments.
  • Embodiments may include a variety of configurations.
  • LC oscillator 220 is part of a system under test, and the other parts of system 200 are included as equipment in a separate testing system adapted to test any LC oscillator.
  • a user may reconnect the equipment to test another LC oscillator, by, for example, connecting to inputs on another chip with another LC oscillator.
  • system 200 may be part of a larger system, such as an on-chip tuner or other kind of application.
  • FIG. 3A is an illustration of exemplary system 300 adapted according to one embodiment of the invention.
  • FIG. 3B is an illustration of exemplary filter component 302 adapted according to one embodiment.
  • System 300 is built on semiconductor chip 304 and includes system 200 ( FIG. 2A ), tuning unit 301 , and filter component 302 .
  • capacitor variation is detected and evaluated.
  • Information associated with the capacitor variation is passed to tuning component 301 , which tunes filter 302 based, at least in part, on the capacitor variation.
  • Tuning unit 301 may be, for example, hard-wired logic built on chip 304 or may be a functional unit that is based on machine-executable code.
  • system 300 employs filter component 302 to condition a signal, such as a Radio Frequency (RF) signal.
  • Filter 302 includes three filter elements 310 , 320 , 330 . Each filter element 310 , 320 , 330 has a different frequency response, and the frequency response of filter 302 is a function of the selection of one or more of filter elements 310 , 320 , 330 .
  • Filter elements 310 , 320 , 330 include capacitors that are similar to capacitor under test 225 ( FIG. 2B and 2C ).
  • Tuning unit 301 accounts for the capacitor process variation by selecting filters with appropriate actual responses.
  • tuning unit 301 receives the information associated with capacitor variation, inputs the information into an algorithm, calculates the frequency responses of filter elements 310 , 320 , 330 therefrom, and selects one or more of filter elements 310 , 320 , 330 for a desired frequency response.
  • a filter may be selected by closing its respective switch 315 , 325 , 335 .
  • tuning unit 301 may select a filter element based on its actual passband.
  • tuning unit 301 may access a look-up table indexed by passband variations that specifies filter combinations. Any method to select one or more filter elements based on evaluated capacitor variation is within the scope of various embodiments.
  • selecting one or more filter elements may be performed during a manufacturing process, such that the making and breaking of connections to the filter elements is permanent or semi-permanent. In other embodiments, it is performed during operation of the chip, for example, at power-up or during selection of frequency components of an input RF signal.
  • switches 315 , 325 , and 335 may be made from transistors that can be turned on and off.
  • each filter element 310 , 320 , 330 has a different passband, and elements 310 , 320 , 330 are arranged in increasing or decreasing order of center passband frequency.
  • each filter element is associated with a frequency component of an input signal.
  • system 300 switches from one filter element to another. Points at which filters are switched may be referred to as “breakpoints.”
  • breakpoints In such a system tuning unit 301 tunes filter 302 by adjusting the breakpoints to compensate for frequency response shift due to capacitor variation.
  • filter tuning is described as making/breaking connections to select discrete filter elements.
  • various embodiments are not limited to any particular technique for tuning a filter.
  • circuitry before or after a given filter circuit may be adjusted to account for the effects of process variation in the capacitors.
  • other elements inside a filter circuit may be adjusted to tune the frequency response of a filter, based at least in part on capacitor process variation.
  • FIGS. 3A and 3B describes adjusting the behavior of a filter
  • various embodiments are not limited to adjusting filters.
  • the principles described above may be used to adjust a variety of other circuit components that include capacitors. Examples of such components include oscillators.
  • FIG. 4 is an illustration of example system 400 adapted according to one embodiment of the invention.
  • System 400 is an example RF tuner circuit, wherein filter 302 is preceded in the signal path by first mixer 403 and followed in the signal path by second mixer 404 .
  • the behavior of mixer 403 is controlled by local oscillator 401
  • the behavior of mixer 404 is controlled by local oscillator 402 .
  • Either or both of oscillators 401 and 402 may be adjusted to change a center frequency of the signal to adapt to the offset center frequency of filter 302 .
  • FIG. 5 is an illustration of exemplary method 500 adapted according to one embodiment of the invention.
  • Method 500 may be performed, for example, by one or more devices on a semiconductor chip, and may even be performed entirely on a single semiconductor chip.
  • an oscillator is operated the oscillator being an LC oscillator and including an inductor of known value and a capacitor under test.
  • Step 501 may include, for example, enabling the LC oscillator and/or other parts of a testing circuit.
  • an output of the oscillator is compared to a reference output.
  • the output is captured by a counter than counts pulses from the oscillator during a defined time period. Then, the number of pulses counted is compared to a reference number that represents an ideal output.
  • Various factors may influence the choice of the time period for capturing the output. For example, a longer time period may allow for more accuracy, while a shorter time period may allow for use of a smaller counter.
  • Step 502 may also include allowing the LC oscillator to reach steady state before beginning capturing the output.
  • a variation of the capacitor under test is evaluated based on the comparing.
  • the variation can be evaluated, for example, by determining the actual frequency of the LC oscillator and using the actual frequency to calculate the actual value of the capacitor under test.
  • the variation is the difference between the actual and nominal values of the capacitance of the capacitor under test. Evaluating capacitor variation can be performed a variety of ways in various embodiments. In some embodiments, variation is calculated in Farads. In other embodiments, variation is calculated in percentage of nominal value. In still other embodiments, variation is approximated and classified in one or more categories of degree. Any technique for evaluating capacitor variation is within the scope of the invention.
  • step 504 information associated with the evaluated variation is passed to a tuning element adapted to change the frequency response of a filter.
  • the information may be an actual calculated value measured in Farads, a percentage value representing the variation, the actual capacitance value, or the like.
  • the tuning element may be hardware-based or may be made of machine executable code and is operable to receive the information and adjust the frequency response of the filter accordingly.
  • the filter includes one or more capacitors with the same or similar process variation as the capacitor under test so that the variation information is relevant to the operation of the filter.
  • a frequency response of the filter is adjusted based at least in part on the variation.
  • the filter includes a plurality of selectable filter elements, and the tuning element includes logic that selects one or more the filter elements in response to the variation.
  • the filter may have other adjustable components that are manipulated to change the frequency response of the filter.
  • method 500 is performed as a system operates, such that the tuning component may perform step 505 continually, at specified times, in response to certain stimuli, or the like.
  • method 500 is performed during manufacturing of a system, and the frequency response of the filter is set somewhat permanently.
  • An advantage of some embodiments is that process variation can be narrowed, effectively, to only that attributable to capacitors.
  • Some prior art systems detect deviations in a time constant, and in RC circuits, the time constant depends on the capacitor and resistor. Because resistors formed on semiconductor chips often have significant variation, it is difficult to discern which portion of the deviation in time constant is due to resistor variation and which is due to process variation.
  • Various embodiments of the present invention pair a capacitor with an inductor of known value. Thus, the deviation from ideal can be assumed to be wholly attributable to the capacitor. Further, once capacitor variation for a chip is known, values for those capacitors that are in RC circuits can be known.
  • components to calculate capacitor variation can be formed on a single semiconductor chip along with other applications. For instance, such components can be added to a tuner on a chip, and the resulting system can be contained on that chip. The result is a chip-specific capacitor variation solution. Providing an accurate and dependable technique for measuring capacitor variation may facilitate the use of single-chip systems, thereby allowing for increases in miniaturization.
  • the components to calculate capacitor variation may be added to a chip design separate from the other logic. Variation of all or nearly all capacitors in the chip can be calculated accurately since the capacitor under test is formed in the same processes as the other capacitors that are in filters and other on-chip components. Accordingly, evaluating and compensating for capacitor variation can be performed continually or periodically. For example, evaluating and compensating for capacitor variation can take place during power on of a chip, when input frequency is changed, at regular intervals, or the like. Further, as chips age and components “drift,” the drift can be evaluated and compensated for.
  • the reference frequency may be taken from a clock that is used for another purpose. Therefore, some embodiments do not require additional clock circuitry.

Abstract

A method for detecting capacitor variation in a device comprises operating an oscillator in the device, the oscillator being an Inductive-Capacitive (LC) oscillator and including an inductor of known value and a capacitor under test, comparing an output of the oscillator to a reference output, and evaluating variation for a plurality of capacitors in the device based on the comparing.

Description

    CROSS-REFERENCE TO RELATED APPLICATIONS
  • This application is a Continuation claiming priority benefit of co-pending and commonly assigned U.S. patent application Ser. No. 11/513,521 filed Aug. 31, 2006, the disclosure of which is hereby incorporated herein by reference.
  • TECHNICAL FIELD
  • Various embodiments of the present invention relate to measuring variation of one or more capacitors in semiconductor components.
  • BACKGROUND OF THE INVENTION
  • Currently, it is common to form various systems on semiconductor chips. General purpose processors, digital signal processors, Application Specific Integrated Circuits (ASICs), and the like are manufactured by forming a variety of transistors, resistors, capacitors, inductors, etc., on a semiconductor substrate.
  • The processes that are used to form the circuit elements on a semiconductor substrate are sometimes less than ideal and cause some amount of process variation in the circuit elements. Process variation, in general, is the difference between an actual quality of a circuit element and its nominal quality. For instance, capacitors formed in semiconductor chips tend to have process variation of up to approximately plus or minus 20%, depending on the process. Thus, the actual capacitance of a given capacitor on a chip, measured in Farads, may be significantly different from the intended or nominal value specified in the design.
  • One application that uses capacitors is a tuner circuit. Specifically, such tuner circuits may include input filtering functions to condition input signals before they are passed to other tuner components. Most such filters are Inductive-Capacitive (LC) circuits. The frequency response of a given LC filter depends on the values of the capacitor(s) and inductor(s) in the circuit. Thus, capacitor variation can cause frequency response shifts in filters, causing non-ideal operation.
  • Prior art solutions have compensated for capacitor variation by measuring time-constant change in one or more Resistive-Capacitive (RC) circuits. However, since the time constant in an RC circuit is equal to resistance times capacitance, and since resisters also usually include a non-negligible amount of variation, time constant deviation fails to allow for the isolation of capacitor process variation. Thus, capacitor variation can only be approximated or guessed from the time constant deviation. The prior art offers no system that can accurately measure capacitor variation for a group of capacitors in an application.
  • BRIEF SUMMARY OF THE INVENTION
  • Various embodiments of the present invention are directed to systems and methods which evaluate capacitor variation for one capacitor or a plurality of capacitors in a device. Such embodiments assess capacitor process variation in the device accurately because the measurement of the variation isolates capacitor variation from other factors, such as resistor process variation.
  • In one example system, a capacitor under test is part of an LC oscillator. The LC oscillator includes at least one inductor of known value. Generally, inductors disposed on chips have minimal process variation (i.e., within 1% of nominal value); thus, the value of a given inductor is often assumed to be its nominal value. The IC oscillator is operated, and its output is captured. The output is compared to a value that represents the output of the oscillator under ideal performance. If process variation has caused the capacitor under test to have a smaller than nominal capacitance, then the LC oscillator will oscillate at higher frequency than it would had the capacitor been at nominal value. On the other hand, larger than nominal capacitance will cause the LC oscillator to exhibit lower frequency performance. The captured output, in one example, is a count of cycles of the LC oscillator, and the count is compared to a number of ideal cycles. The difference represents a percentage change in frequency.
  • The percentage change in frequency can then be used to evaluate the capacitor variation. When the capacitor under test and other capacitors are formed on a same device during the same processes, it may generally be assumed that capacitor variation is the same or approximately the same for all such capacitors. Thus, the evaluated variation may be associated with variation of the other capacitors in the device. Evaluation of the variation may be performed, for example, by circuit-based logic or machine executable code.
  • One example use for evaluated capacitor variation is in the tuning of filters. Many filters for conditioning signals employ capacitors in LC, and/or RC circuits. Thus, capacitor variation causes some shift in frequency response for each such filter. A tuning component based on circuit logic and/or machine executable code can use the evaluated capacitor variation to compensate for the change in frequency response.
  • In one embodiment, a filter component includes a plurality of individual filter elements, each with a passband that is centered at a different frequency. Each individual filter element is associated with a frequency range. As an application selects different frequency components of an input signal a tuning component selects one of the filter elements based on the range that the desired signal component falls in. The frequency values at which filters are switched may be referred to as “breakpoints.” In this example system, a tuning component uses the evaluated capacitor variation to adjust the breakpoints to compensate for capacitor variation in each of the individual filter elements.
  • In another embodiment, selecting one or more individual filter elements is performed during manufacturing or testing. For instance, once the capacitor variation is ascertained, one or more connections may be made or broken (e.g., as in a programmable logic device) in a permanent or semi-permanent way, thereby setting the operating parameters of the filter.
  • Rather than (or in addition to) tuning a filter based upon evaluated capacitor variation, it is also possible in some embodiments to adjust one or more other circuit components. For instance, in an example RF tuner circuit, a filter is preceded in the RF signal path by a first mixer and followed in the RF signal path by a second mixer. Either or both of the mixers may be adjusted to adapt to the offset center frequency of the filter.
  • The foregoing has outlined rather broadly the features and technical advantages of the present invention in order that the detailed description of the invention that follows may be better understood. Additional features and advantages of the invention will be described hereinafter which form the subject of the claims of the invention. It should be appreciated by those skilled in the art that the conception and specific embodiment disclosed may be readily utilized as a basis for modifying or designing other structures for carrying out the same purposes of the present invention. It should also be realized by those skilled in the art that such equivalent constructions do not depart from the spirit and scope of the invention as set forth in the appended claims. The novel features which are believed to be characteristic of the invention, both as to its organization and method of operation, together with further objects and advantages will be better understood from the following description when considered in connection with the accompanying figures. It is to be expressly understood, however, that each of the figures is provided for the purpose of illustration and description only and is not intended as a definition of the limits of the present invention.
  • BRIEF DESCRIPTION OF THE DRAWINGS
  • For a more complete understanding of the present invention, reference is now made to the following descriptions taken in conjunction with the accompanying drawings, in which:
  • FIG. 1 is an illustration of an exemplary system adapted according to one embodiment of the invention;
  • FIG. 2A is an illustration of an exemplary system adapted according to one embodiment of the invention;
  • FIG. 2B shows a capacitor under test in a parallel LC configuration, and FIG. 2C shows a capacitor under test in a series LC configuration;
  • FIG. 3A is an illustration of an exemplary system adapted according to one embodiment of the invention;
  • FIG. 3B is an illustration of an exemplary filter component adapted according to one embodiment;
  • FIG. 4 is an illustration of an exemplary system adapted according to one embodiment of the invention; and
  • FIG. 5 is an illustration of an exemplary method adapted according to one embodiment of the invention.
  • DETAILED DESCRIPTION OF THE INVENTION
  • FIG. 1 is an illustration of system 100 adapted according to one embodiment of the invention. System 100 is a system for measuring the capacitor variation in a semiconductor device, wherein variation is the difference between an intended or nominal value and the actual value of a capacitor. System 100 includes LC oscillator 101, circuit 102 for capturing the output of LC oscillator 101, and computational unit 103 for comparing the captured output to a reference output and to evaluate the variation based thereon. System 100 is formed on a semiconductor chip with other circuits that include capacitors. The capacitor variation evaluated by system 100 is a measure of capacitor variation for all or nearly all capacitors in the chip. Systems according to the principles of system 100 can be designed in a variety of configurations, and one such configuration is shown in FIG. 2A.
  • FIG. 2A is an illustration of exemplary system 200 adapted according to one embodiment of the invention. System 200 is operable to measure variation in a capacitor under test in LC oscillator 220. LC oscillator 220 can take a variety of forms and is shown in two basic configurations in FIGS. 2B and 2C. FIG. 2B shows capacitor under test 225 in a parallel LC configuration, and FIG. 2C shows capacitor under test 225 in a series LC configuration. LC oscillator 220 is not limited to any specific design, as long as it outputs a periodic signal, such as a sinusoid, square wave, or the like. Capacitor under test 225 is paired with inductor 226, which is of a known value, and negative resistance 227 (e.g., an active element providing positive feedback) to form an oscillator circuit. In many applications, inductors (especially those made on-chip) tend to have little variation, such that it is possible to know the value of the given inductor to a high degree of accuracy.
  • In operation of system 200 according to one embodiment, the first step is providing a start pulse to control logic 210. Control logic 210 then enables LC oscillator 220. At the same time, control logic 210 also sends a high signal to AND gate 265, thereby enabling input of the 16 MHz (fref) reference signal to divider 260. The output of divider 260 is the input for divider 270, the output of which is fed to AND gate 240.
  • System 200 is designed to allow LC oscillator 220 to come to steady state before any measurements are made, and such feature is provided by dividers 260 and 270 and AND gate 240. The output of divider 270 is a square wave that starts low (i.e., binary zero), such that the first fref/16 cycles cause a zero to be input into AND gate 240. The zero causes AND gate 240 to output a zero, thereby zeroing any pulses received from divider 230. The second fref/16 cycles cause a high value (i.e., binary one) to be input to AND gate 240. The one causes AND gate 240 to output the pulses that it receives from divider 230. Thus, the first fref/16 cycles is used to allow LC oscillator 220 to reach steady state before its output is captured. The second fref/16 cycles are the measurement period, wherein counter 250 captures the divided output of LC oscillator 220. In this design, the measurement period lasts 1 μsec. Control logic 210 disables LC oscillator after the end of the second fref/16 cycles.
  • Returning to the operation of LC oscillator 220, the output thereof is fed to divider 230 and to AND gate 240. LC oscillator 220 is designed such that if there is zero variation in capacitor under test 225, then LC oscillator 220 will output a 1.024 GHz pulse. If capacitor under test 225 has a larger than nominal capacitance, then the frequency of LC oscillator 220 will be lower than 1.024 GHz. On the other hand, if the capacitance of capacitor under test 225 is smaller than its nominal value, then the frequency will be higher. The capacitor change is an inverse squared function of the frequency change.
  • System 200 captures the output of LC oscillator 220 by counting the pulses of its divided output. In this specific example, LC oscillator 220 ideally causes counter 250 to store a value of one hundred twenty-eight during the 1 μsec measurement period. Thus, capacitor variation is measured by comparing the value stored in counter 250 to the ideal one hundred twenty-eight reference output. Each least significant bit difference in the stored value represents a 0.78125% change in frequency of LC oscillator 220 from its ideal frequency of 1.024 GHz.
  • The contents of counter 250 is sent to computational unit 280, which compares the stored value to one hundred twenty-eight, and from that comparison, evaluates the capacitor variation. Different techniques to evaluate capacitor variation from difference in the stored output are possible. In one example, the difference in the stored output is used to calculate the frequency of LC oscillator 220. Computational unit 280 then uses the frequency to find the capacitor variation in a look-up table. In another example, computational unit 280 inputs the oscillator frequency into a mathematical algorithm that calculates the capacitor variation from the frequency, the inductor value, and the nominal value of capacitor under test 225. Other embodiments evaluate the capacitor variation without actually calculating it. For example, one embodiment categorizes variation according to its degree in a finite number of classes. The invention is not limited to any particular technique to evaluate capacitor variation.
  • The embodiment of system 200 is meant to be an example only, and other embodiments may deviate from the configuration of system 200. For instance, the specific frequencies of LC oscillator 220 and the reference signal are not required by other embodiments, and the use of different values are within the scope of the invention. Just as the various frequencies are not required in some embodiments, the number and values of dividers in a given circuit are also not required in some embodiments. For instance, in an alternate embodiment, LC oscillator 220 may be designed to have an ideal operating frequency of 0.128 GHz, while divider 230 is eliminated from the system. However, the values of the frequencies of LC oscillator 220 and the reference signal may be influenced, in part, by one or more constraints, such as the size of inductor 226 needed to produce a given nominal frequency value, and the availability of a reference signal, such as a clock, in a larger system into which system 200 is adapted. Another constraint is the speed at which counter 250 can accurately operate, especially when implemented in Complementary Metal Oxide Semiconductor (CMOS) logic.
  • Further, some embodiments may not use the digital counter configuration shown in system 200 to determine variation. In an alternate embodiment, a system uses a phase frequency detector in a phase lock loop. In fact, any configuration that changes frequency to measurable quantity can be used in some embodiments.
  • Embodiments may include a variety of configurations. In one example configuration, LC oscillator 220 is part of a system under test, and the other parts of system 200 are included as equipment in a separate testing system adapted to test any LC oscillator. Thus, after the testing system tests LC oscillator 220, a user may reconnect the equipment to test another LC oscillator, by, for example, connecting to inputs on another chip with another LC oscillator.
  • Alternatively, system 200 may be part of a larger system, such as an on-chip tuner or other kind of application. FIG. 3A is an illustration of exemplary system 300 adapted according to one embodiment of the invention. FIG. 3B is an illustration of exemplary filter component 302 adapted according to one embodiment. System 300 is built on semiconductor chip 304 and includes system 200 (FIG. 2A), tuning unit 301, and filter component 302. As explained above with regard to system 200, capacitor variation is detected and evaluated. Information associated with the capacitor variation is passed to tuning component 301, which tunes filter 302 based, at least in part, on the capacitor variation. Tuning unit 301 may be, for example, hard-wired logic built on chip 304 or may be a functional unit that is based on machine-executable code.
  • In this example, system 300 employs filter component 302 to condition a signal, such as a Radio Frequency (RF) signal. Filter 302 includes three filter elements 310, 320, 330. Each filter element 310, 320, 330 has a different frequency response, and the frequency response of filter 302 is a function of the selection of one or more of filter elements 310, 320, 330. Filter elements 310, 320, 330 include capacitors that are similar to capacitor under test 225 (FIG. 2B and 2C). In fact, because they are formed on the same chip, capacitor 225 and the capacitors of filter elements 310, 320, 330 are created in the same processes, and, therefore, will exhibit minimal relative variation (i.e., process variations within 1-2% of each other). Because of the capacitor variation, filter elements 310, 320, 330 will each differ somewhat from their nominal frequency responses. Tuning unit 301 accounts for the capacitor process variation by selecting filters with appropriate actual responses.
  • In one example, tuning unit 301 receives the information associated with capacitor variation, inputs the information into an algorithm, calculates the frequency responses of filter elements 310, 320, 330 therefrom, and selects one or more of filter elements 310, 320, 330 for a desired frequency response. In this example, a filter may be selected by closing its respective switch 315, 325, 335. Thus, if the capacitor variation causes each of filters 310, 320, 330 to shift its passband down by 10%, then tuning unit 301 may select a filter element based on its actual passband. In an alternate embodiment, tuning unit 301 may access a look-up table indexed by passband variations that specifies filter combinations. Any method to select one or more filter elements based on evaluated capacitor variation is within the scope of various embodiments.
  • In some embodiments, selecting one or more filter elements may be performed during a manufacturing process, such that the making and breaking of connections to the filter elements is permanent or semi-permanent. In other embodiments, it is performed during operation of the chip, for example, at power-up or during selection of frequency components of an input RF signal. For real-time tuning, switches 315, 325, and 335 may be made from transistors that can be turned on and off.
  • In one example real-time tuning application, each filter element 310, 320, 330 has a different passband, and elements 310, 320, 330 are arranged in increasing or decreasing order of center passband frequency. Thus, each filter element is associated with a frequency component of an input signal. As a tuner selects one or more frequency components of the input signal, system 300 switches from one filter element to another. Points at which filters are switched may be referred to as “breakpoints.” In such a system tuning unit 301 tunes filter 302 by adjusting the breakpoints to compensate for frequency response shift due to capacitor variation.
  • In the example above, filter tuning is described as making/breaking connections to select discrete filter elements. However, various embodiments are not limited to any particular technique for tuning a filter. For instance, in one embodiment, circuitry before or after a given filter circuit may be adjusted to account for the effects of process variation in the capacitors. In another embodiment, other elements inside a filter circuit may be adjusted to tune the frequency response of a filter, based at least in part on capacitor process variation.
  • While the example in FIGS. 3A and 3B describes adjusting the behavior of a filter, various embodiments are not limited to adjusting filters. In fact, the principles described above may be used to adjust a variety of other circuit components that include capacitors. Examples of such components include oscillators.
  • FIG. 4 is an illustration of example system 400 adapted according to one embodiment of the invention. System 400 is an example RF tuner circuit, wherein filter 302 is preceded in the signal path by first mixer 403 and followed in the signal path by second mixer 404. The behavior of mixer 403 is controlled by local oscillator 401, and the behavior of mixer 404 is controlled by local oscillator 402. Either or both of oscillators 401 and 402 may be adjusted to change a center frequency of the signal to adapt to the offset center frequency of filter 302.
  • FIG. 5 is an illustration of exemplary method 500 adapted according to one embodiment of the invention. Method 500 may be performed, for example, by one or more devices on a semiconductor chip, and may even be performed entirely on a single semiconductor chip. In step 501, an oscillator is operated the oscillator being an LC oscillator and including an inductor of known value and a capacitor under test. Step 501 may include, for example, enabling the LC oscillator and/or other parts of a testing circuit.
  • In step 502, an output of the oscillator is compared to a reference output. In one example, the output is captured by a counter than counts pulses from the oscillator during a defined time period. Then, the number of pulses counted is compared to a reference number that represents an ideal output. Various factors may influence the choice of the time period for capturing the output. For example, a longer time period may allow for more accuracy, while a shorter time period may allow for use of a smaller counter. Step 502 may also include allowing the LC oscillator to reach steady state before beginning capturing the output.
  • In step 503, a variation of the capacitor under test is evaluated based on the comparing. In the embodiment described above wherein cycles of the LC oscillator are compared to a reference number, the variation can be evaluated, for example, by determining the actual frequency of the LC oscillator and using the actual frequency to calculate the actual value of the capacitor under test. The variation is the difference between the actual and nominal values of the capacitance of the capacitor under test. Evaluating capacitor variation can be performed a variety of ways in various embodiments. In some embodiments, variation is calculated in Farads. In other embodiments, variation is calculated in percentage of nominal value. In still other embodiments, variation is approximated and classified in one or more categories of degree. Any technique for evaluating capacitor variation is within the scope of the invention.
  • In step 504, information associated with the evaluated variation is passed to a tuning element adapted to change the frequency response of a filter. The information may be an actual calculated value measured in Farads, a percentage value representing the variation, the actual capacitance value, or the like. The tuning element may be hardware-based or may be made of machine executable code and is operable to receive the information and adjust the frequency response of the filter accordingly. In this example, the filter includes one or more capacitors with the same or similar process variation as the capacitor under test so that the variation information is relevant to the operation of the filter.
  • In step 505, a frequency response of the filter is adjusted based at least in part on the variation. Different ways of adjusting the frequency response of the filter are possible. In one example, the filter includes a plurality of selectable filter elements, and the tuning element includes logic that selects one or more the filter elements in response to the variation. In another example embodiment, the filter may have other adjustable components that are manipulated to change the frequency response of the filter.
  • In one example, method 500 is performed as a system operates, such that the tuning component may perform step 505 continually, at specified times, in response to certain stimuli, or the like. In another example, method 500 is performed during manufacturing of a system, and the frequency response of the filter is set somewhat permanently.
  • An advantage of some embodiments is that process variation can be narrowed, effectively, to only that attributable to capacitors. Some prior art systems detect deviations in a time constant, and in RC circuits, the time constant depends on the capacitor and resistor. Because resistors formed on semiconductor chips often have significant variation, it is difficult to discern which portion of the deviation in time constant is due to resistor variation and which is due to process variation. Various embodiments of the present invention pair a capacitor with an inductor of known value. Thus, the deviation from ideal can be assumed to be wholly attributable to the capacitor. Further, once capacitor variation for a chip is known, values for those capacitors that are in RC circuits can be known.
  • In some embodiments components to calculate capacitor variation can be formed on a single semiconductor chip along with other applications. For instance, such components can be added to a tuner on a chip, and the resulting system can be contained on that chip. The result is a chip-specific capacitor variation solution. Providing an accurate and dependable technique for measuring capacitor variation may facilitate the use of single-chip systems, thereby allowing for increases in miniaturization.
  • In some embodiments the components to calculate capacitor variation may be added to a chip design separate from the other logic. Variation of all or nearly all capacitors in the chip can be calculated accurately since the capacitor under test is formed in the same processes as the other capacitors that are in filters and other on-chip components. Accordingly, evaluating and compensating for capacitor variation can be performed continually or periodically. For example, evaluating and compensating for capacitor variation can take place during power on of a chip, when input frequency is changed, at regular intervals, or the like. Further, as chips age and components “drift,” the drift can be evaluated and compensated for.
  • Yet another advantage of some embodiments is that the reference frequency may be taken from a clock that is used for another purpose. Therefore, some embodiments do not require additional clock circuitry.
  • Although the present invention and its advantages have been described in detail, it should be understood that various changes, substitutions and alterations can be made herein without departing from the spirit and scope of the invention as defined by the appended claims. Moreover, the scope of the present application is not intended to be limited to the particular embodiments of the process, machine, manufacture, composition of matter, means, methods and steps described in the specification. As one of ordinary skill in the art will readily appreciate from the disclosure of the present invention, processes, machines, manufacture, compositions of matter, means, methods, or steps, presently existing or later to be developed that perform substantially the same function or achieve substantially the same result as the corresponding embodiments described herein may be utilized according to the present invention. Accordingly, the appended claims are intended to include within their scope such processes, machines, manufacture, compositions of matter, means, methods, or steps.

Claims (28)

1. A method for detecting capacitor variation in a device, said method comprising:
operating an oscillator in said device, said oscillator being an Inductive-Capacitive (LC) oscillator and including an inductor of known value and a capacitor under test;
comparing an output of said oscillator to a reference output; and
evaluating respective variation for each of a plurality of other capacitors in said device based on said comparing.
2. The method of claim 1 wherein said capacitor variation is the difference between a nominal value of a capacitor and an actual, after-process value of said capacitor.
3. The method of claim 1 wherein comparing said output comprises:
capturing cycles of said oscillator in a counter;
outputting the contents of said counter to a computational circuit; and
comparing said counter contents to a reference value by said computational circuit.
4. The method of claim 1 further comprising:
receiving information associated with said calculated variation by an executing software program;
based upon said information, controlling by said software program the behavior of a filter component said filter component including one or more of said plurality of other capacitors on a same semiconductor chip as said capacitor under test.
5. The method of claim 4 wherein said filter component includes a plurality of filter elements, each said element having a different pass band, and wherein said controlling said behavior of said filter element comprises selecting at least one of said plurality of filter elements based upon its passband and said information.
6. The method of claim 1 wherein said capacitor under test is formed on a same semiconductor chip with said plurality of other capacitors, said method further comprising:
adjusting an operation of a circuit component in response to said evaluated variation.
7. The method of claim 1 wherein said evaluating is performed by circuit logic disposed on a same semiconductor chip with said plurality of other capacitors and said capacitor under test.
8. A system for detecting capacitor variation, said system comprising:
an Inductive-Capacitive (LC) oscillator, said LC oscillator including a capacitor under test and an inductor of known value;
a circuit adapted to capture an output of said LC oscillator; and
a computational unit adapted to compare said output with a reference output and to evaluate respective variation of each of a plurality of other capacitors based thereon, said plurality of other capacitors in a same device as said capacitor under test.
9. The system of claim 8 wherein said circuit comprises a divider such that said captured output is divided output.
10. The system of claim 8 further comprising a reference oscillator that defines a period for capturing said output of said LC oscillator.
11. The system of claim 10 wherein said circuit comprises a counter adapted to count cycles of said output of said LC oscillator during said period for capturing.
12. The system of claim 8 wherein said computational unit is adapted to adjust a response of a functional unit in said device based on said evaluated variation
13. The system of claim 8 wherein said computational unit is a software unit adapted to tune a filter based on said evaluated variation.
14. The system of claim 8 wherein said computational unit is a logic circuit adapted to tune a filter based on said evaluated variation.
15. A method for tuning an on-chip circuit, said method comprising:
measuring a variation of a first capacitor by oscillating said first capacitor in an Inductive-Capacitive (LC) circuit with an inductor of known value and comparing the output of the oscillator with a reference value; and
adjusting a frequency response of said on-chip circuit based at least in part on said variation, said on-chip circuit including at least a second capacitor.
16. The method of claim 15 wherein said on-chip circuit is a filter.
17. The method of claim 16 wherein said filter includes a plurality of filter components, each with a different frequency response, and wherein adjusting a frequency response comprises:
selecting a filter element based on said measured variation.
18. The method of claim 17 wherein said filter element is formed on a same chip as said first capacitor.
19. The method of claim 15 wherein said measuring and said adjusting are performed at power-up of a device.
20. The method of claim 15 wherein said measuring and said adjusting are performed at a change of frequency of a Radio Frequency (RF) input signal of a device.
21. The method of claim 15 wherein comparing said output comprises:
capturing cycles of said LC circuit in a counter;
outputting the contents of said counter to a computational circuit; and
comparing said counter contents to a reference value by said computational circuit, wherein said LC circuit, said on-chip circuit, and said counter are formed on a same chip.
22. The method of claim 21 wherein adjusting a frequency response comprises:
passing said measured variation to a tuning element adapted to change said frequency response.
23. The method of claim 15 wherein said on-chip circuit is a mixer controlled by a local oscillator, and wherein said adjusting a frequency response comprises:
adjusting said local oscillator, thereby changing a frequency of an output signal of said mixer.
24. A method for detecting capacitor variation said method comprising:
operating an oscillator, said oscillator being an Inductive-Capacitive (LC) oscillator and including an inductor of known value and a capacitor under test, wherein said capacitor under test is formed on a same semiconductor chip as a circuit component that comprises a plurality of other capacitors;
comparing an output of said oscillator to a reference output;
determining variation for said plurality of other capacitors based on said comparing; and
adjusting an operation of said circuit component in response to said determined variation.
25. The method of claim 24 wherein comparing said output comprises:
capturing cycles of said oscillator in a counter; and
outputting the contents of said counter to a computational circuit; and
comparing said counter contents to a reference value by said computational circuit.
26. The method of claim 24 wherein operating said oscillator comprises:
enabling said oscillator;
allowing said oscillator to reach steady state; and
capturing said output of said oscillator after steady state is reached.
27. The method of claim 24 wherein said capacitor under test is formed on a same semiconductor chip as a plurality of capacitors, said method further comprising:
adjusting an operation of a circuit component in response to said evaluated variation.
28. The method of claim 24 wherein said circuit component comprises a filter component the method further comprising:
receiving information associated with said determined variation by an executing software program; and
based upon said information, controlling by said software program the behavior of the filter component, said filter component including one or more of said plurality of other capacitors.
US12/419,089 2006-08-31 2009-04-06 Systems and methods for detecting capacitor process variation Expired - Fee Related US8610442B2 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
US12/419,089 US8610442B2 (en) 2006-08-31 2009-04-06 Systems and methods for detecting capacitor process variation

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US11/513,521 US7619421B2 (en) 2006-08-31 2006-08-31 Systems and methods for detecting capacitor process variation
US12/419,089 US8610442B2 (en) 2006-08-31 2009-04-06 Systems and methods for detecting capacitor process variation

Related Parent Applications (1)

Application Number Title Priority Date Filing Date
US11/513,521 Continuation US7619421B2 (en) 2006-08-31 2006-08-31 Systems and methods for detecting capacitor process variation

Publications (2)

Publication Number Publication Date
US20090189619A1 true US20090189619A1 (en) 2009-07-30
US8610442B2 US8610442B2 (en) 2013-12-17

Family

ID=39118477

Family Applications (2)

Application Number Title Priority Date Filing Date
US11/513,521 Expired - Fee Related US7619421B2 (en) 2006-08-31 2006-08-31 Systems and methods for detecting capacitor process variation
US12/419,089 Expired - Fee Related US8610442B2 (en) 2006-08-31 2009-04-06 Systems and methods for detecting capacitor process variation

Family Applications Before (1)

Application Number Title Priority Date Filing Date
US11/513,521 Expired - Fee Related US7619421B2 (en) 2006-08-31 2006-08-31 Systems and methods for detecting capacitor process variation

Country Status (3)

Country Link
US (2) US7619421B2 (en)
EP (1) EP2062063A2 (en)
WO (1) WO2008027710A2 (en)

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2013108082A1 (en) * 2012-01-20 2013-07-25 Freescale Semiconductor, Inc. On-die capacitance measurement module and method for measuring an on-die capacitive load
US20160011291A1 (en) * 2014-07-09 2016-01-14 Stmicroelectronics S.R.I. Method of interfacing a lc sensor and related system
US20170331240A1 (en) * 2015-04-09 2017-11-16 Fisher-Rosemount Systems, Inc. Two-Prong Plug of a Single Lead Set for Supplying Fieldbus Communication and Power from a Handheld Maintenance Tool in a Hazardous Area
CN109991478A (en) * 2017-12-29 2019-07-09 致茂电子(苏州)有限公司 Inductance measurement device and inductance measurement method

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US8760176B2 (en) 2010-11-10 2014-06-24 St-Ericsson Sa Methods and systems for production testing of DCO capacitors
US9464934B2 (en) * 2011-01-11 2016-10-11 Chemimage Technologies Llc System and method for correcting spectral response using a radiometric correction filter

Citations (21)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3281698A (en) * 1963-08-01 1966-10-25 Gen Electric Noise balanced afc system
US3626285A (en) * 1969-08-04 1971-12-07 Kev Electronics Corp Testing apparatus for voltage-variable capacitors employing phase-locked oscillators
US4272718A (en) * 1977-11-30 1981-06-09 Sumitomo Electric Industries, Ltd. Moisture meter
US4763063A (en) * 1985-07-26 1988-08-09 Allied-Signal Inc. Compact digital pressure sensor circuitry
US4791379A (en) * 1985-02-13 1988-12-13 U.S. Philips Corporation Electrical filter with adjustable RC product
US5204972A (en) * 1989-07-18 1993-04-20 Nec Corporation Arrangement for compensating for temperature dependent performance characteristics of surface acoustic wave filter
US5425272A (en) * 1993-11-30 1995-06-20 Quatro Corporation Relative resonant frequency shifts to detect cracks
US5973633A (en) * 1996-12-20 1999-10-26 Texas Instruments Incorporated Weighted capacitor array with selective grouping to form array elements
US6285865B1 (en) * 1998-11-12 2001-09-04 Broadcom Corporation System and method for on-chip filter tuning
US20020105331A1 (en) * 1999-06-01 2002-08-08 Brune Guenter W. Multi-frequency boring tool locating system and method
US20020126792A1 (en) * 2001-01-13 2002-09-12 Johann Fuhrmann Electric or electronic circuit arrangement and method of protecting said circuit arrangement from manipulation and/or abuse
US20030025563A1 (en) * 2001-07-31 2003-02-06 Christensen Kaare Tais Tunable filter and method of tuning a filter
US20030076139A1 (en) * 2001-10-18 2003-04-24 Hitachi, Ltd. Semiconductor Integrated circuit
US6750565B2 (en) * 2001-01-11 2004-06-15 Siemens Aktiengesellschaft Method of switching on an inductive load
US6784754B1 (en) * 2002-06-24 2004-08-31 Skyworks,Solutions, Inc. VCO resonance tuning
US20050052225A1 (en) * 2003-09-08 2005-03-10 Paolo Cusinato Calibrated fully differential rc filter
US6915114B2 (en) * 2002-05-07 2005-07-05 Broadcom, Corp. Direct tuning of embedded integrated circuit components
US20060003720A1 (en) * 2004-02-20 2006-01-05 Lee Kang Y System and method for tuning a frequency generator using an LC oscillator
US20060071718A1 (en) * 2004-03-22 2006-04-06 Mobius Microsystems, Inc. Frequency calibration for a monolithic clock generator and timing/frequency reference
US20060152293A1 (en) * 2004-03-22 2006-07-13 Mobius Microsystems, Inc. Integrated clock generator and timing/frequency reference
US7095287B2 (en) * 2004-12-28 2006-08-22 Silicon Laboratories Inc. Method and apparatus to achieve a process, temperature and divider modulus independent PLL loop bandwidth and damping factor using open-loop calibration techniques

Family Cites Families (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0697246B2 (en) 1991-07-25 1994-11-30 株式会社ジャルコ Method for detecting change in stray capacitance using PLL circuit
JP4437699B2 (en) 2004-05-14 2010-03-24 富士通マイクロエレクトロニクス株式会社 Sensor

Patent Citations (21)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3281698A (en) * 1963-08-01 1966-10-25 Gen Electric Noise balanced afc system
US3626285A (en) * 1969-08-04 1971-12-07 Kev Electronics Corp Testing apparatus for voltage-variable capacitors employing phase-locked oscillators
US4272718A (en) * 1977-11-30 1981-06-09 Sumitomo Electric Industries, Ltd. Moisture meter
US4791379A (en) * 1985-02-13 1988-12-13 U.S. Philips Corporation Electrical filter with adjustable RC product
US4763063A (en) * 1985-07-26 1988-08-09 Allied-Signal Inc. Compact digital pressure sensor circuitry
US5204972A (en) * 1989-07-18 1993-04-20 Nec Corporation Arrangement for compensating for temperature dependent performance characteristics of surface acoustic wave filter
US5425272A (en) * 1993-11-30 1995-06-20 Quatro Corporation Relative resonant frequency shifts to detect cracks
US5973633A (en) * 1996-12-20 1999-10-26 Texas Instruments Incorporated Weighted capacitor array with selective grouping to form array elements
US6285865B1 (en) * 1998-11-12 2001-09-04 Broadcom Corporation System and method for on-chip filter tuning
US20020105331A1 (en) * 1999-06-01 2002-08-08 Brune Guenter W. Multi-frequency boring tool locating system and method
US6750565B2 (en) * 2001-01-11 2004-06-15 Siemens Aktiengesellschaft Method of switching on an inductive load
US20020126792A1 (en) * 2001-01-13 2002-09-12 Johann Fuhrmann Electric or electronic circuit arrangement and method of protecting said circuit arrangement from manipulation and/or abuse
US20030025563A1 (en) * 2001-07-31 2003-02-06 Christensen Kaare Tais Tunable filter and method of tuning a filter
US20030076139A1 (en) * 2001-10-18 2003-04-24 Hitachi, Ltd. Semiconductor Integrated circuit
US6915114B2 (en) * 2002-05-07 2005-07-05 Broadcom, Corp. Direct tuning of embedded integrated circuit components
US6784754B1 (en) * 2002-06-24 2004-08-31 Skyworks,Solutions, Inc. VCO resonance tuning
US20050052225A1 (en) * 2003-09-08 2005-03-10 Paolo Cusinato Calibrated fully differential rc filter
US20060003720A1 (en) * 2004-02-20 2006-01-05 Lee Kang Y System and method for tuning a frequency generator using an LC oscillator
US20060071718A1 (en) * 2004-03-22 2006-04-06 Mobius Microsystems, Inc. Frequency calibration for a monolithic clock generator and timing/frequency reference
US20060152293A1 (en) * 2004-03-22 2006-07-13 Mobius Microsystems, Inc. Integrated clock generator and timing/frequency reference
US7095287B2 (en) * 2004-12-28 2006-08-22 Silicon Laboratories Inc. Method and apparatus to achieve a process, temperature and divider modulus independent PLL loop bandwidth and damping factor using open-loop calibration techniques

Cited By (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2013108082A1 (en) * 2012-01-20 2013-07-25 Freescale Semiconductor, Inc. On-die capacitance measurement module and method for measuring an on-die capacitive load
US9459297B2 (en) 2012-01-20 2016-10-04 Freescale Semiconductor, Inc. On-die capacitance measurement module and method for measuring an on-die capacitive load
US20160011291A1 (en) * 2014-07-09 2016-01-14 Stmicroelectronics S.R.I. Method of interfacing a lc sensor and related system
US10162038B2 (en) * 2014-07-09 2018-12-25 Stmicroelectronics S.R.L. Method of interfacing a LC sensor and related system
US10451703B2 (en) * 2014-07-09 2019-10-22 Stimicroelectronics S.R.L. Method of interfacing a LC sensor and related system
US20170331240A1 (en) * 2015-04-09 2017-11-16 Fisher-Rosemount Systems, Inc. Two-Prong Plug of a Single Lead Set for Supplying Fieldbus Communication and Power from a Handheld Maintenance Tool in a Hazardous Area
US10270215B2 (en) * 2015-04-09 2019-04-23 Fisher-Rosemount Systems, Inc. Two-prong plug of a single lead set for supplying fieldbus communication and power from a handheld maintenance tool in a hazardous area
CN109991478A (en) * 2017-12-29 2019-07-09 致茂电子(苏州)有限公司 Inductance measurement device and inductance measurement method

Also Published As

Publication number Publication date
EP2062063A2 (en) 2009-05-27
US7619421B2 (en) 2009-11-17
WO2008027710A3 (en) 2008-05-08
WO2008027710A2 (en) 2008-03-06
US20080068108A1 (en) 2008-03-20
US8610442B2 (en) 2013-12-17

Similar Documents

Publication Publication Date Title
US8610442B2 (en) Systems and methods for detecting capacitor process variation
US7636559B2 (en) RF filter adjustment based on LC variation
US7477098B2 (en) Method and apparatus for tuning an active filter
US6842710B1 (en) Calibration of integrated circuit time constants
US7046097B2 (en) Highly stable integrated time reference
US20090316847A1 (en) Automatic Synchronization of an Internal Oscillator to an External Frequency Reference
US7653170B2 (en) Electrical circuit for measuring times and method for measuring times
KR100831651B1 (en) Calibrating a loop-filter of a phase locked loop
US10498308B2 (en) Circuit for calibration measurements, method, computer program, and electronic device
US10868544B2 (en) Digitally reconfigurable ultra-high precision internal oscillator
US7619465B2 (en) filter circuit and semiconductor device
US8643391B2 (en) RC calibration using chopping
JP5202324B2 (en) Calibration apparatus, calibration method, and test apparatus
EP2064810B1 (en) Systems and methods for filter center frequency location
DK155263B (en) COUNTING CONNECTION TO DETERMINE THE RECEIVING FREQUENCY respectively. THE RECEIVING CHANNEL IN A SUPERHERODY DYNAMIC RECEIVER
US6005447A (en) Method and device for adjusting the frequency of oscillator built in an integrated circuit
TW202125244A (en) Integrated circuit having trim function for component
JP3877502B2 (en) Voltage controlled temperature compensated oscillator
CN112910461A (en) Self-calibration method and self-calibration circuit of RC oscillator

Legal Events

Date Code Title Description
AS Assignment

Owner name: MICROTUNE (TEXAS), L.P., TEXAS

Free format text: ASSIGNMENT OF ASSIGNORS INTEREST;ASSIGNORS:STEVENSON, JAN-MICHAEL;MAGNUSEN, TIMOTHY M.;REEL/FRAME:023127/0580

Effective date: 20060830

AS Assignment

Owner name: MICROTUNE (LP), L.L.C., TEXAS

Free format text: MERGER;ASSIGNOR:MICROTUNE (TEXAS), L.P.;REEL/FRAME:025782/0065

Effective date: 20101217

Owner name: MICROTUNE, INC., TEXAS

Free format text: MERGER;ASSIGNOR:MICROTUNE (LP), L.L.C.;REEL/FRAME:025782/0057

Effective date: 20101217

Owner name: ZORAN CORPORATION, CALIFORNIA

Free format text: MERGER;ASSIGNOR:MICROTUNE, INC.;REEL/FRAME:025782/0047

Effective date: 20101217

AS Assignment

Owner name: CSR TECHNOLOGY INC., CALIFORNIA

Free format text: ASSIGNMENT OF ASSIGNORS INTEREST;ASSIGNOR:ZORAN CORPORATION;REEL/FRAME:027550/0695

Effective date: 20120101

STCF Information on status: patent grant

Free format text: PATENTED CASE

CC Certificate of correction
AS Assignment

Owner name: CSR TECHNOLOGY INC., CALIFORNIA

Free format text: ASSIGNMENT OF ASSIGNORS INTEREST;ASSIGNOR:ZORAN CORPORATION;REEL/FRAME:036642/0395

Effective date: 20150915

FPAY Fee payment

Year of fee payment: 4

FEPP Fee payment procedure

Free format text: MAINTENANCE FEE REMINDER MAILED (ORIGINAL EVENT CODE: REM.); ENTITY STATUS OF PATENT OWNER: LARGE ENTITY

LAPS Lapse for failure to pay maintenance fees

Free format text: PATENT EXPIRED FOR FAILURE TO PAY MAINTENANCE FEES (ORIGINAL EVENT CODE: EXP.); ENTITY STATUS OF PATENT OWNER: LARGE ENTITY

STCH Information on status: patent discontinuation

Free format text: PATENT EXPIRED DUE TO NONPAYMENT OF MAINTENANCE FEES UNDER 37 CFR 1.362

FP Lapsed due to failure to pay maintenance fee

Effective date: 20211217