US20080163699A1 - Flow meter probe with force sensors - Google Patents
Flow meter probe with force sensors Download PDFInfo
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- US20080163699A1 US20080163699A1 US11/650,987 US65098707A US2008163699A1 US 20080163699 A1 US20080163699 A1 US 20080163699A1 US 65098707 A US65098707 A US 65098707A US 2008163699 A1 US2008163699 A1 US 2008163699A1
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- 239000000523 sample Substances 0.000 title claims abstract description 99
- 239000012530 fluid Substances 0.000 claims abstract description 32
- 238000006073 displacement reaction Methods 0.000 claims abstract description 18
- 239000000919 ceramic Substances 0.000 claims abstract description 10
- 239000012141 concentrate Substances 0.000 claims abstract description 5
- 239000013598 vector Substances 0.000 claims description 15
- 230000002093 peripheral effect Effects 0.000 claims description 9
- 238000004519 manufacturing process Methods 0.000 claims description 5
- 239000007788 liquid Substances 0.000 description 4
- 238000012544 monitoring process Methods 0.000 description 4
- 238000007789 sealing Methods 0.000 description 4
- 238000005259 measurement Methods 0.000 description 3
- 239000007787 solid Substances 0.000 description 3
- 239000004020 conductor Substances 0.000 description 2
- 238000001816 cooling Methods 0.000 description 2
- 230000003247 decreasing effect Effects 0.000 description 2
- 230000002238 attenuated effect Effects 0.000 description 1
- 238000007405 data analysis Methods 0.000 description 1
- 238000013461 design Methods 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 238000004599 local-density approximation Methods 0.000 description 1
- 238000000691 measurement method Methods 0.000 description 1
- 238000000034 method Methods 0.000 description 1
- 238000000917 particle-image velocimetry Methods 0.000 description 1
- 238000012552 review Methods 0.000 description 1
- 230000003068 static effect Effects 0.000 description 1
- 238000007619 statistical method Methods 0.000 description 1
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 1
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01D—MEASURING NOT SPECIALLY ADAPTED FOR A SPECIFIC VARIABLE; ARRANGEMENTS FOR MEASURING TWO OR MORE VARIABLES NOT COVERED IN A SINGLE OTHER SUBCLASS; TARIFF METERING APPARATUS; MEASURING OR TESTING NOT OTHERWISE PROVIDED FOR
- G01D11/00—Component parts of measuring arrangements not specially adapted for a specific variable
- G01D11/24—Housings ; Casings for instruments
- G01D11/245—Housings for sensors
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01F—MEASURING VOLUME, VOLUME FLOW, MASS FLOW OR LIQUID LEVEL; METERING BY VOLUME
- G01F1/00—Measuring the volume flow or mass flow of fluid or fluent solid material wherein the fluid passes through a meter in a continuous flow
- G01F1/05—Measuring the volume flow or mass flow of fluid or fluent solid material wherein the fluid passes through a meter in a continuous flow by using mechanical effects
- G01F1/20—Measuring the volume flow or mass flow of fluid or fluent solid material wherein the fluid passes through a meter in a continuous flow by using mechanical effects by detection of dynamic effects of the flow
- G01F1/206—Measuring pressure, force or momentum of a fluid flow which is forced to change its direction
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01F—MEASURING VOLUME, VOLUME FLOW, MASS FLOW OR LIQUID LEVEL; METERING BY VOLUME
- G01F1/00—Measuring the volume flow or mass flow of fluid or fluent solid material wherein the fluid passes through a meter in a continuous flow
- G01F1/05—Measuring the volume flow or mass flow of fluid or fluent solid material wherein the fluid passes through a meter in a continuous flow by using mechanical effects
- G01F1/34—Measuring the volume flow or mass flow of fluid or fluent solid material wherein the fluid passes through a meter in a continuous flow by using mechanical effects by measuring pressure or differential pressure
Definitions
- the present invention relates to probes for measuring the velocity vector of a fluid flow, which may be a gas flow or a liquid flow, and particularly to a flow meter probe with force sensors that uses aerodynamic or hydrodynamic force sensors instead of pressure sensors.
- the measurement of velocity vectors in fluid flow fields is of critical importance for several applications, including the operation and monitoring of petrochemical plants, weather monitoring and forecast, air-transportation traffic control, electronic cooling, and several biomedical engineering applications.
- a number of flow measurement techniques have been used by researchers, including Laser-Doppler Velocimetry, Particle Image Velocimetry, multi-hole pressure probes, thermal anemometry using hot wires and hot films, etc.
- multi-hole pressure probes are the more practical, relatively easy to use, and cost effective tools.
- the multi-hole probes suffer a few disadvantages, including: (i) a requirement of relatively clean fluid to avoid clogging the holes; (ii) most probes have been adopted for air-flows, while some have been modified for water with limited capabilities; (iii) limitations on fluid temperature operation; and (iv) as the pressure hole size is decreased for miniaturization purposes, the probes have a limited frequency response.
- Multi-hole pressure probes are generally of the pitot tube variety, with multiple tubes extending between pressure sensing ports in the tip and sides of the probe to a pressure transducer in the body of the probe for measuring the total pressure and stagnation pressure.
- the total pressure p t is equal to the static pressure p s plus the dynamic pressure:
- Equation (1) can then be solved for the velocity as follows:
- V 2 2 ⁇ ( p t - p s ) ⁇ ( 2 )
- the flow meter probe with force sensors has the body of a frustum of a regular pyramid with a force sensor disposed upon each face.
- the force sensors are mounted in bores defined in the probe body and include a pin that may be displaced in the bore to exert pressure on an electrical transducer.
- the transducer may be a ceramic, piezoelectric sensor or a Micro-Electro-Mechanical System (MEMS) sensor.
- MEMS Micro-Electro-Mechanical System
- the pin has an aerodynamically- or hydrodynamically-shaped head, a cylindrical body, and a frustoconical tail to concentrate force exerted upon the sensor.
- the head of the pin protrudes slightly above the face of the probe body so that aerodynamic and hydrodynamic forces are exerted directly against the pin, and pin displacement measures the forces directly.
- a plurality of probes may be placed in the path of fluid flow in a variety of configurations, as desired.
- the probe body may be a frustum of a triangular pyramid, having four faces with a force sensor disposed in each face; a frustum of a square or rectangular pyramid, having five faces with a force sensor disposed in each face; or a frustum of a regular pyramid having a polygonal base of any desired number of sides, with each face having a force sensor disposed therein.
- the pin head has a shallow, concave central recess formed therein in order to increase pressure drag force and to minimize eddy production, cavitation, and flow disturbances.
- the body of the pin may be cylindrical.
- the transducer is a ceramic sensor
- the body may be disposed in a cylindrical gasket to ensure rectilinear pin movement and to provide sealing, and may have an O-ring at the top of the gasket to provide further sealing.
- the pin body may be a somewhat flexible, lubricated element, and the head of the pin may be raised above the gasket and the face of the probe body by a micromillimeter-sized gap.
- the transducer is a MEMS sensor
- the body of the pin may be disposed within a cylindrical mechanical spring, the head of the pin having a peripheral flange supported on the top of the spring.
- FIG. 1A is a side view of a flow meter probe with force sensors according to the present invention.
- FIG. 1B is a top view of a flow meter probe with force sensors according to the present invention.
- FIG. 2 is a diagrammatic side view in section of a flow meter probe with force sensors according to the present invention.
- FIG. 3 is a diagrammatic view of a force sensor with a ceramic, piezoelectric transducer for a flow meter probe with force sensors according to the present invention.
- FIG. 4 is a diagrammatic view of a force sensor with a MEMS transducer for a flow meter probe with force sensors according to the present invention.
- FIG. 5 is a diagrammatic detail side view of a force sensor pin for use with a ceramic, piezoelectric transducer of a flow meter probe with force sensors according to the present invention.
- FIG. 6 is a diagrammatic detail side view of a force sensor pin for use with a MEMS transducer of a flow meter probe with force sensors according to the present invention.
- FIG. 7 is a top view of an alternative embodiment of a flow meter probe with force sensors according to the present invention.
- FIG. 8A is side view of a single flow meter probe with force sensors according to the present invention.
- FIG. 8B is a side view of a pair of flow meter probes with force sensors according to the present invention joined by a shaft.
- FIG. 8C is a side view of a pair of flow meter probes with force sensors according to the present invention joined by a solid body.
- FIG. 8D is a side view of four flow meter probes with force sensors according to the present invention joined by a pair of orthogonal shafts.
- FIG. 9 is a perspective view of a triangular flow meter probe with force sensors according to the present invention mounted on a corner of a box-shaped device.
- the present invention is a flow meter probe with force sensors for determining the velocity vector and other flow parameters of either a gaseous or a liquid medium.
- the probe design is based upon the concept of fluid flow dynamic force (aerodynamic, hydrodynamic, etc.) sensing.
- any moving fluid exerts a dynamic force on any “obstacle” within the flow field.
- the amount or magnitude of the fluid dynamic force is, in general, proportional to (1 ⁇ 2) ⁇ V 2 , where ⁇ is the fluid density and V is the magnitude of the velocity vector.
- ⁇ is the fluid density
- V is the magnitude of the velocity vector.
- a system composed of three force sensors, which are strategically placed to face at least three mutually orthogonal directions corresponding to the force and velocity vector components should be enough to deduce the velocity vector components. For practical reasons, more force sensors will be needed to be able to obtain the unknown velocity vector field covering all possible directions (all around a 360° angle).
- the force sensors should be small enough (or even imbedded) to minimize disturbance of the measured flow parameters. After measuring the fluid flow force at four or more locations of the flow field, the three vector components of velocity are deduced from rigorous calibration of the probe. The proper choice of force sensors with good dynamic response will enable the probe to obtain a real time velocity vector with an acceptable frequency response. Proper statistical analysis of the data (by conventional data analysis techniques well known to those skilled in the art, and therefore not discussed herein) will result in determination of the velocity fluctuations, and hence all turbulence quantities required.
- FIGS. 1A and 1B show an exemplary flow meter probe with force sensors, designated generally as 10 in the drawings, according to the present invention.
- the probe 10 has a body 12 having the shape of a frustum of a regular pyramid, in this case, a square or rectangular pyramid.
- the probe body 12 is mounted on a platform 14 supported by a shaft 16 .
- the platform 14 and shaft 16 may be hollow in order to house a printed circuit board and other electrical components associated with the sensors, and to act as a conduit for wiring or cables connecting the probe 10 to a data processor or the like.
- the probe body 12 has five faces 18 exposed to the flow field, indicated by arrows 19 .
- Each face designated individually as 18 a , 18 b , 18 c , 18 d , and 18 e in FIG. 1B , has an independent force sensor 20 (designated individually as sensors 20 a , 20 b , 20 c , 20 d and 20 e in FIG. 1B ) mounted therein.
- FIG. 2 it is shown diagrammatically that each force sensor 20 is disposed in a bore 22 defined in probe body 12 , which may be solid or hollow, as desired.
- Each force sensor 20 includes a pin 24 slidable in bore 22 and a transducer 26 disposed below the pin 24 .
- the pin 24 has a head 28 that is at, or slightly above, the surface of face 18 .
- FIG. 3 shows a first embodiment of a force sensor, designated as sensor 20 f .
- the transducer is a piezoelectric ceramic transducer 26 f disposed in the base of bore 22 .
- Pin 24 f is axially movable in bore 22 to exert pressure against piezoelectric transducer 26 f to produce a voltage (or an oscillating voltage) at a magnitude (or frequency) proportional to the force exerted by displacement of pin 24 f in bore 22 due to aerodynamic or hydrodynamic force exerted on the head 28 f of pin 24 f .
- Transducer 26 f is connected by appropriate electrical conductors 30 f to a sensing circuit 32 f , which, in turn, may be connected to a data processor for analyzing the measurement.
- a cylindrical gasket 34 lines the bore 22 to guide movement of the pin 24 f and to provide a seal that prevents gas or liquid from the fluid field from entering the bore 22 and collecting along the sides or bottom of the pin 24 f .
- Pin 24 f may be somewhat resilient and may be lubricated at the interface between the body of the pin 24 f and the gasket 34 .
- the head 28 f of pin 24 f has a peripheral flange 36 f that is separated or raised above gasket 34 and face 18 by a micrometer gap 38 f to allow for displacement of the head 28 f while preventing the pin 24 f from sliding too far into bore 22 .
- FIG. 5 shows pin 24 f in greater detail.
- Pin 24 f has a head 28 f , an elongated, cylindrical body 40 f , and a tail 42 f .
- Tail 42 f is preferably frustoconical in shape in order to concentrate force generated by displacement of pin 24 f against the piezoelectric transducer 26 f .
- the head 28 f has a shallow, concave, centrally-located recess 44 f defined therein to provide an aerodynamically- and hydrodynamically-shaped head to increase the pressure drag force exerted against the pin 24 f while minimizing the production of eddies and other fluid flow disturbances.
- the head 28 f may have a peripheral lip 46 f depending from peripheral flange 36 f , if desired.
- An O-ring 48 f may be disposed around pin body 40 f immediately below head 28 f to seat on top of gasket 34 in order to provide further sealing of the bore 22 , if desired.
- FIG. 4 shows an alternative embodiment of a force sensor 20 for use in probe 10 , designated as sensor 20 g .
- Force sensor 20 g has a Micro-Electro-Mechanical System (MEMS) transducer 26 g disposed in the base of bore 22 .
- the MEMS transducer 26 g has a plurality of engaged interdigital fingers and mechanical springs. Movement of the fingers towards each other results in a change in electrical charge, which can be measured to quantify displacement of pin 24 g in bore 22 .
- the MEMS transducer 26 g produces an electrical signal proportional to displacement of pin 24 g in bore 22 due to aerodynamic or hydrodynamic forces exerted against the head 28 g of pin 28 g by flow field 19 .
- the electrical signal produced by MEMS transducer 26 g is communicated to sensing circuit 32 g by conductors 30 g .
- Sensing circuit 32 g may, in turn, be connected to a data processor for analyzing the measurements.
- Pin 24 g may be supported by a mechanical spring 50 g .
- pin 24 g has a head 28 g , an elongated cylindrical body 40 g , and a tail 42 g .
- Tail 42 g may have a frustoconical shape for increasing or decreasing the pressure (depending upon the size of the frustum) exerted against MEMS transducer 26 g by displacement of pin 24 g in bore 22 .
- the body 40 g of pin 24 g is concentrically disposed within mechanical spring 50 g , which may have a cylindrical shape for uniformity and to provide sealing of the bore 22 against the body 40 g of pin 24 g.
- the head 28 g of pin 24 g has a peripheral flange 36 g that bears against the top or upper end of spring 50 g .
- the peripheral flange 36 g may be separated or raised above bore 22 and face 18 by a micrometer gap 38 g to allow for displacement of the head 28 g while preventing the pin 24 g from sliding too far into bore 22 .
- the head 28 g also has a shallow, concave, centrally-located recess 44 g defined therein to provide an aerodynamically- and hydrodynamically-shaped head to increase the pressure drag force exerted against the pin 24 g while minimizing the production of eddies, cavitation, and other fluid flow disturbances.
- FIG. 7 shows an alternative embodiment of a flow meter probe with force sensors according to the present invention, designated generally as 60 in the drawing.
- Probe 60 has a body 62 having the shape of a frustum of a regular pyramid, in this case, a triangular pyramid.
- the body 62 has four faces 68 a , 68 b , 68 c , and 68 d exposed to the fluid field.
- Each of the faces 68 a - 68 d has a force sensor 20 disposed thereon.
- the force sensors 20 may have a transducer of the piezoelectric type, as in force sensor 20 f , or of the MEMS type, as in force sensor 20 g.
- a flow meter probe of the present invention may have a regular frustopyramidal shape of any type, with the base of the pyramid having any desired polygonal shape, with a corresponding number of faces exposed to the fluid flow field, the probe having at least three force sensors and preferably with each face having a force sensor disposed thereon. This structure helps in isolating each force sensor, and hence minimizes flow disturbance effects on each sensor.
- the ceramic piezoelectric transducer and the MEMS transducer are exemplary, so that the force sensor of a flow meter probe of the present invention may have any type of transducer producing an electrical signal proportional to displacement of the pin in the probe body due to aerodynamic or hydrodynamic force exerted against the head of the pin at the surface of the probe body.
- FIG. 8A shows a single probe 10 disposed on a platform 14 supported by a shaft 16 , similar to FIG. 1 .
- FIG. 8B shows a pair of probes 10 disposed 180° apart on a single shaft 16 .
- FIG. 8C shows a pair of probes 10 disposed 180° apart at opposite ends of a solid body, such as a square or rectangular post 70 having the same cross-sectional dimension as the base of the probe body 12 .
- FIG. 8D shows four probes 10 disposed 90° apart, being mounted at opposite ends of a pair of orthogonal shafts 72 .
- FIG. 9 shows a triangular flow meter probe 60 mounted on a corner of a rectangular parallelepiped, e.g., a box 74 .
- the force sensors 20 or probes 10 may be embedded in the internal walls of reactor vessels and mixing chambers for measuring velocity vector components for internal fluid flow fields.
- a flow meter probe with force sensors can be used in any fluid flow path or field where it is desired to measure a velocity vector, aerodynamic or hydrodynamic forces, or other flow parameters.
- the probe may be used for such diverse applications as the operation and monitoring of petrochemical plants, weather monitoring and forecast, air-transportation traffic control, electronic cooling, and biomedical engineering applications, among others.
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Abstract
Description
- 1. Field of the Invention
- The present invention relates to probes for measuring the velocity vector of a fluid flow, which may be a gas flow or a liquid flow, and particularly to a flow meter probe with force sensors that uses aerodynamic or hydrodynamic force sensors instead of pressure sensors.
- 2. Description of the Related Art
- The measurement of velocity vectors in fluid flow fields is of critical importance for several applications, including the operation and monitoring of petrochemical plants, weather monitoring and forecast, air-transportation traffic control, electronic cooling, and several biomedical engineering applications. A number of flow measurement techniques have been used by researchers, including Laser-Doppler Velocimetry, Particle Image Velocimetry, multi-hole pressure probes, thermal anemometry using hot wires and hot films, etc.
- Of these devices, multi-hole pressure probes are the more practical, relatively easy to use, and cost effective tools. Despite their advantages, the multi-hole probes suffer a few disadvantages, including: (i) a requirement of relatively clean fluid to avoid clogging the holes; (ii) most probes have been adopted for air-flows, while some have been modified for water with limited capabilities; (iii) limitations on fluid temperature operation; and (iv) as the pressure hole size is decreased for miniaturization purposes, the probes have a limited frequency response.
- Multi-hole pressure probes are generally of the pitot tube variety, with multiple tubes extending between pressure sensing ports in the tip and sides of the probe to a pressure transducer in the body of the probe for measuring the total pressure and stagnation pressure. By Bernouli's equation, the total pressure pt is equal to the static pressure ps plus the dynamic pressure:
-
- where ρ is the density and V is the velocity. Equation (1) can then be solved for the velocity as follows:
-
- However, because of the length of the tubing, conventional multi-hole probes do not have a rapid response time, which limits their use where the velocity of fluid flow is changing rapidly. In addition, the magnitude of the response is attenuated.
- Thus, a flow meter probe with force sensors solving the aforementioned problems is desired.
- The flow meter probe with force sensors has the body of a frustum of a regular pyramid with a force sensor disposed upon each face. The force sensors are mounted in bores defined in the probe body and include a pin that may be displaced in the bore to exert pressure on an electrical transducer. The transducer may be a ceramic, piezoelectric sensor or a Micro-Electro-Mechanical System (MEMS) sensor. The pin has an aerodynamically- or hydrodynamically-shaped head, a cylindrical body, and a frustoconical tail to concentrate force exerted upon the sensor. The head of the pin protrudes slightly above the face of the probe body so that aerodynamic and hydrodynamic forces are exerted directly against the pin, and pin displacement measures the forces directly. A plurality of probes may be placed in the path of fluid flow in a variety of configurations, as desired.
- The probe body may be a frustum of a triangular pyramid, having four faces with a force sensor disposed in each face; a frustum of a square or rectangular pyramid, having five faces with a force sensor disposed in each face; or a frustum of a regular pyramid having a polygonal base of any desired number of sides, with each face having a force sensor disposed therein.
- The pin head has a shallow, concave central recess formed therein in order to increase pressure drag force and to minimize eddy production, cavitation, and flow disturbances. The body of the pin may be cylindrical. When the transducer is a ceramic sensor, the body may be disposed in a cylindrical gasket to ensure rectilinear pin movement and to provide sealing, and may have an O-ring at the top of the gasket to provide further sealing. The pin body may be a somewhat flexible, lubricated element, and the head of the pin may be raised above the gasket and the face of the probe body by a micromillimeter-sized gap. When the transducer is a MEMS sensor, the body of the pin may be disposed within a cylindrical mechanical spring, the head of the pin having a peripheral flange supported on the top of the spring.
- These and other features of the present invention will become readily apparent upon further review of the following specification and drawings.
-
FIG. 1A is a side view of a flow meter probe with force sensors according to the present invention. -
FIG. 1B is a top view of a flow meter probe with force sensors according to the present invention. -
FIG. 2 is a diagrammatic side view in section of a flow meter probe with force sensors according to the present invention. -
FIG. 3 is a diagrammatic view of a force sensor with a ceramic, piezoelectric transducer for a flow meter probe with force sensors according to the present invention. -
FIG. 4 is a diagrammatic view of a force sensor with a MEMS transducer for a flow meter probe with force sensors according to the present invention. -
FIG. 5 is a diagrammatic detail side view of a force sensor pin for use with a ceramic, piezoelectric transducer of a flow meter probe with force sensors according to the present invention. -
FIG. 6 is a diagrammatic detail side view of a force sensor pin for use with a MEMS transducer of a flow meter probe with force sensors according to the present invention. -
FIG. 7 is a top view of an alternative embodiment of a flow meter probe with force sensors according to the present invention. -
FIG. 8A is side view of a single flow meter probe with force sensors according to the present invention. -
FIG. 8B is a side view of a pair of flow meter probes with force sensors according to the present invention joined by a shaft. -
FIG. 8C is a side view of a pair of flow meter probes with force sensors according to the present invention joined by a solid body. -
FIG. 8D is a side view of four flow meter probes with force sensors according to the present invention joined by a pair of orthogonal shafts. -
FIG. 9 is a perspective view of a triangular flow meter probe with force sensors according to the present invention mounted on a corner of a box-shaped device. - Similar reference characters denote corresponding features consistently throughout the attached drawings.
- The present invention is a flow meter probe with force sensors for determining the velocity vector and other flow parameters of either a gaseous or a liquid medium. The probe design is based upon the concept of fluid flow dynamic force (aerodynamic, hydrodynamic, etc.) sensing.
- Any moving fluid, whether gas or liquid, exerts a dynamic force on any “obstacle” within the flow field. The amount or magnitude of the fluid dynamic force is, in general, proportional to (½)ρV2, where ρ is the fluid density and V is the magnitude of the velocity vector. Ideally, in order to determine the fluid velocity vector V=(u,v,w) with three space components u, v and w, a system composed of three force sensors, which are strategically placed to face at least three mutually orthogonal directions corresponding to the force and velocity vector components, should be enough to deduce the velocity vector components. For practical reasons, more force sensors will be needed to be able to obtain the unknown velocity vector field covering all possible directions (all around a 360° angle).
- The force sensors should be small enough (or even imbedded) to minimize disturbance of the measured flow parameters. After measuring the fluid flow force at four or more locations of the flow field, the three vector components of velocity are deduced from rigorous calibration of the probe. The proper choice of force sensors with good dynamic response will enable the probe to obtain a real time velocity vector with an acceptable frequency response. Proper statistical analysis of the data (by conventional data analysis techniques well known to those skilled in the art, and therefore not discussed herein) will result in determination of the velocity fluctuations, and hence all turbulence quantities required.
-
FIGS. 1A and 1B show an exemplary flow meter probe with force sensors, designated generally as 10 in the drawings, according to the present invention. Theprobe 10 has abody 12 having the shape of a frustum of a regular pyramid, in this case, a square or rectangular pyramid. Theprobe body 12 is mounted on aplatform 14 supported by ashaft 16. Theplatform 14 andshaft 16 may be hollow in order to house a printed circuit board and other electrical components associated with the sensors, and to act as a conduit for wiring or cables connecting theprobe 10 to a data processor or the like. - The
probe body 12 has five faces 18 exposed to the flow field, indicated byarrows 19. Each face, designated individually as 18 a, 18 b, 18 c, 18 d, and 18 e inFIG. 1B , has an independent force sensor 20 (designated individually assensors FIG. 1B ) mounted therein. Referring toFIG. 2 , it is shown diagrammatically that eachforce sensor 20 is disposed in abore 22 defined inprobe body 12, which may be solid or hollow, as desired. Eachforce sensor 20 includes apin 24 slidable inbore 22 and atransducer 26 disposed below thepin 24. Thepin 24 has ahead 28 that is at, or slightly above, the surface offace 18. -
FIG. 3 shows a first embodiment of a force sensor, designated assensor 20 f. In this embodiment, the transducer is a piezoelectricceramic transducer 26 f disposed in the base ofbore 22.Pin 24 f is axially movable inbore 22 to exert pressure againstpiezoelectric transducer 26 f to produce a voltage (or an oscillating voltage) at a magnitude (or frequency) proportional to the force exerted by displacement ofpin 24 f inbore 22 due to aerodynamic or hydrodynamic force exerted on thehead 28 f ofpin 24 f.Transducer 26 f is connected by appropriateelectrical conductors 30 f to asensing circuit 32 f, which, in turn, may be connected to a data processor for analyzing the measurement. - A
cylindrical gasket 34 lines thebore 22 to guide movement of thepin 24 f and to provide a seal that prevents gas or liquid from the fluid field from entering thebore 22 and collecting along the sides or bottom of thepin 24 f.Pin 24 f may be somewhat resilient and may be lubricated at the interface between the body of thepin 24 f and thegasket 34. Thehead 28 f ofpin 24 f has aperipheral flange 36 f that is separated or raised abovegasket 34 and face 18 by amicrometer gap 38 f to allow for displacement of thehead 28 f while preventing thepin 24 f from sliding too far intobore 22. -
FIG. 5 showspin 24 f in greater detail.Pin 24 f has ahead 28 f, an elongated,cylindrical body 40 f, and atail 42 f.Tail 42 f is preferably frustoconical in shape in order to concentrate force generated by displacement ofpin 24 f against thepiezoelectric transducer 26 f. Thehead 28 f has a shallow, concave, centrally-locatedrecess 44 f defined therein to provide an aerodynamically- and hydrodynamically-shaped head to increase the pressure drag force exerted against thepin 24 f while minimizing the production of eddies and other fluid flow disturbances. Thehead 28 f may have aperipheral lip 46 f depending fromperipheral flange 36 f, if desired. An O-ring 48 f may be disposed aroundpin body 40 f immediately belowhead 28 f to seat on top ofgasket 34 in order to provide further sealing of thebore 22, if desired. -
FIG. 4 shows an alternative embodiment of aforce sensor 20 for use inprobe 10, designated assensor 20 g.Force sensor 20 g has a Micro-Electro-Mechanical System (MEMS) transducer 26 g disposed in the base ofbore 22. TheMEMS transducer 26 g has a plurality of engaged interdigital fingers and mechanical springs. Movement of the fingers towards each other results in a change in electrical charge, which can be measured to quantify displacement ofpin 24 g inbore 22. Thus, theMEMS transducer 26 g produces an electrical signal proportional to displacement ofpin 24 g inbore 22 due to aerodynamic or hydrodynamic forces exerted against thehead 28 g ofpin 28 g byflow field 19. The electrical signal produced byMEMS transducer 26 g is communicated to sensingcircuit 32 g byconductors 30 g.Sensing circuit 32 g may, in turn, be connected to a data processor for analyzing the measurements. -
Pin 24 g may be supported by amechanical spring 50 g. Referring toFIG. 6 , pin 24 g has a head 28 g, an elongatedcylindrical body 40 g, and atail 42 g.Tail 42 g may have a frustoconical shape for increasing or decreasing the pressure (depending upon the size of the frustum) exerted againstMEMS transducer 26 g by displacement ofpin 24 g inbore 22. Thebody 40 g ofpin 24 g is concentrically disposed withinmechanical spring 50 g, which may have a cylindrical shape for uniformity and to provide sealing of thebore 22 against thebody 40 g ofpin 24 g. - The
head 28 g ofpin 24 g has aperipheral flange 36 g that bears against the top or upper end ofspring 50 g. Theperipheral flange 36 g may be separated or raised abovebore 22 and face 18 by amicrometer gap 38 g to allow for displacement of the head 28 g while preventing thepin 24 g from sliding too far intobore 22. Thehead 28 g also has a shallow, concave, centrally-locatedrecess 44 g defined therein to provide an aerodynamically- and hydrodynamically-shaped head to increase the pressure drag force exerted against thepin 24 g while minimizing the production of eddies, cavitation, and other fluid flow disturbances. -
FIG. 7 shows an alternative embodiment of a flow meter probe with force sensors according to the present invention, designated generally as 60 in the drawing.Probe 60 has abody 62 having the shape of a frustum of a regular pyramid, in this case, a triangular pyramid. Thebody 62 has four faces 68 a, 68 b, 68 c, and 68 d exposed to the fluid field. Each of the faces 68 a-68 d has aforce sensor 20 disposed thereon. Theforce sensors 20 may have a transducer of the piezoelectric type, as inforce sensor 20 f, or of the MEMS type, as inforce sensor 20 g. - It will be understood that a flow meter probe of the present invention may have a regular frustopyramidal shape of any type, with the base of the pyramid having any desired polygonal shape, with a corresponding number of faces exposed to the fluid flow field, the probe having at least three force sensors and preferably with each face having a force sensor disposed thereon. This structure helps in isolating each force sensor, and hence minimizes flow disturbance effects on each sensor. It will also be understood that the ceramic piezoelectric transducer and the MEMS transducer are exemplary, so that the force sensor of a flow meter probe of the present invention may have any type of transducer producing an electrical signal proportional to displacement of the pin in the probe body due to aerodynamic or hydrodynamic force exerted against the head of the pin at the surface of the probe body.
- A flow meter probe with force sensors according to the present invention may be deployed in a fluid flow field in any desired number or configuration.
FIG. 8A shows asingle probe 10 disposed on aplatform 14 supported by ashaft 16, similar toFIG. 1 .FIG. 8B shows a pair ofprobes 10 disposed 180° apart on asingle shaft 16.FIG. 8C shows a pair ofprobes 10 disposed 180° apart at opposite ends of a solid body, such as a square orrectangular post 70 having the same cross-sectional dimension as the base of theprobe body 12.FIG. 8D shows fourprobes 10 disposed 90° apart, being mounted at opposite ends of a pair oforthogonal shafts 72. - Further, a flow meter probe with force sensors according to the present invention may be mounted on any desired structure.
FIG. 9 shows a triangularflow meter probe 60 mounted on a corner of a rectangular parallelepiped, e.g., abox 74. Further, theforce sensors 20 or probes 10 may be embedded in the internal walls of reactor vessels and mixing chambers for measuring velocity vector components for internal fluid flow fields. - It is contemplated that a flow meter probe with force sensors can be used in any fluid flow path or field where it is desired to measure a velocity vector, aerodynamic or hydrodynamic forces, or other flow parameters. Thus, the probe may be used for such diverse applications as the operation and monitoring of petrochemical plants, weather monitoring and forecast, air-transportation traffic control, electronic cooling, and biomedical engineering applications, among others.
- It is to be understood that the present invention is not limited to the embodiments described above, but encompasses any and all embodiments within the scope of the following claims.
Claims (20)
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