US20060125050A1 - Semiconductor device manufacturing methods - Google Patents

Semiconductor device manufacturing methods Download PDF

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US20060125050A1
US20060125050A1 US11/270,310 US27031005A US2006125050A1 US 20060125050 A1 US20060125050 A1 US 20060125050A1 US 27031005 A US27031005 A US 27031005A US 2006125050 A1 US2006125050 A1 US 2006125050A1
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device region
voltage device
low
voltage
gate pattern
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US7442640B2 (en
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San Hong Kim
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DB HiTek Co Ltd
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Dongbu Electronics Co Ltd
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    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L27/00—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate
    • H01L27/02—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components specially adapted for rectifying, oscillating, amplifying or switching and having potential barriers; including integrated passive circuit elements having potential barriers
    • H01L27/04—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components specially adapted for rectifying, oscillating, amplifying or switching and having potential barriers; including integrated passive circuit elements having potential barriers the substrate being a semiconductor body
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/70—Manufacture or treatment of devices consisting of a plurality of solid state components formed in or on a common substrate or of parts thereof; Manufacture of integrated circuit devices or of parts thereof
    • H01L21/77—Manufacture or treatment of devices consisting of a plurality of solid state components or integrated circuits formed in, or on, a common substrate
    • H01L21/78—Manufacture or treatment of devices consisting of a plurality of solid state components or integrated circuits formed in, or on, a common substrate with subsequent division of the substrate into plural individual devices
    • H01L21/82—Manufacture or treatment of devices consisting of a plurality of solid state components or integrated circuits formed in, or on, a common substrate with subsequent division of the substrate into plural individual devices to produce devices, e.g. integrated circuits, each consisting of a plurality of components
    • H01L21/822—Manufacture or treatment of devices consisting of a plurality of solid state components or integrated circuits formed in, or on, a common substrate with subsequent division of the substrate into plural individual devices to produce devices, e.g. integrated circuits, each consisting of a plurality of components the substrate being a semiconductor, using silicon technology
    • H01L21/8232—Field-effect technology
    • H01L21/8234—MIS technology, i.e. integration processes of field effect transistors of the conductor-insulator-semiconductor type
    • H01L21/823418—MIS technology, i.e. integration processes of field effect transistors of the conductor-insulator-semiconductor type with a particular manufacturing method of the source or drain structures, e.g. specific source or drain implants or silicided source or drain structures or raised source or drain structures
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
    • H01L21/04—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer
    • H01L21/18—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer the devices having semiconductor bodies comprising elements of Group IV of the Periodic Table or AIIIBV compounds with or without impurities, e.g. doping materials
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L27/00—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate
    • H01L27/02—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components specially adapted for rectifying, oscillating, amplifying or switching and having potential barriers; including integrated passive circuit elements having potential barriers
    • H01L27/0203—Particular design considerations for integrated circuits
    • H01L27/0248—Particular design considerations for integrated circuits for electrical or thermal protection, e.g. electrostatic discharge [ESD] protection
    • H01L27/0251—Particular design considerations for integrated circuits for electrical or thermal protection, e.g. electrostatic discharge [ESD] protection for MOS devices
    • H01L27/0266—Particular design considerations for integrated circuits for electrical or thermal protection, e.g. electrostatic discharge [ESD] protection for MOS devices using field effect transistors as protective elements

Definitions

  • the present disclosure relates to semiconductor devices, and more particularly, to methods of manufacturing a semiconductor device simultaneously embodying a low-voltage device and a high-voltage device that are protected from static electricity.
  • a semiconductor manufacturing process enables simultaneous inclusion of low-voltage and high-voltage devices in a semiconductor device.
  • the low-voltage device is used as a high-speed and high-performance device, and the high-voltage device is used for input and output.
  • the semiconductor device is miniaturized for large capacity and high integration, it becomes necessary to protect the semiconductor device from electrostatic discharges.
  • an electrostatic discharge protection device should be manufactured together with the low-voltage and high-voltage devices.
  • the electrostatic discharge protection device when the electrostatic discharge protection device is separately formed, an additional ion implantation process using an additional mask is required. These additions increase manufacturing costs. Furthermore, the electrostatic discharge protection device may cause a capacitance increase at the junction and may lead to higher leakage currents, which degrades the reliability of the semiconductor device.
  • FIG. 1 is a schematic illustration of the formation of a lightly doped drain at a low-voltage device region, a high-voltage device region, and an electrostatic discharge protecting device region of an example semiconductor device constructed in accordance with the teachings of the present invention.
  • FIG. 2 is a flowchart illustrating an example method of manufacturing a semiconductor device performed in accordance with the teachings of the present invention.
  • FIG. 3 is a graph of an example current-voltage characteristic of an example electrostatic discharge protecting device region of an example semiconductor device constructed in accordance with the teachings of the present invention.
  • any part e.g., a layer, film, area, or plate
  • any part is in any way positioned on (e.g., positioned on, located on, disposed on, or formed on, etc.) another part
  • the referenced part is either in contact with the other part, or that the referenced part is above the other part with one or more intermediate part(s) located therebetween.
  • Stating that any part is in contact with another part means that there is no intermediate part between the two parts.
  • an example semiconductor device constructed in accordance with the teachings of the present invention includes a low-voltage (LV) device region 1 , a high-voltage (HV) device region 2 , and an electrostatic discharge protecting device region 3 formed over a portion of the high-voltage device region.
  • Devices (not shown) are respectively formed at the low-voltage device region 1 , the high-voltage device region 2 , and the electrostatic discharge protecting device region 3 .
  • FIG. 2 illustrates an example method of forming a gate pattern for the devices.
  • a device separating film is formed at field regions of a first conductive semiconductor substrate, (e.g., a P-type semiconductor substrate), to accomplish electrical insulation between the field regions of the semiconductor substrate.
  • the device separating film may be formed by a shallow-trench isolation process or by local oxidation of silicon.
  • a gate insulation film comprising silicon dioxide (SiO 2 ) is stacked on the field regions of the semiconductor substrate using a thermal oxidation process or a low pressure chemical vapor deposition process.
  • the gate insulation film is formed to a thickness of approximately 1,000 ⁇ , although the thickness of the gate insulation film may be changed depending upon the characteristics of the devices.
  • a polycrystalline silicon layer (for example, a P-type doped polycrystalline silicon layer), is stacked on the gate insulation film.
  • the polycrystalline silicon layer is formed to a thickness of approximately 2,000 ⁇ to 3,000 ⁇ .
  • the polycrystalline silicon layer is patterned by a photo etching process to form a gate pattern.
  • a lightly doped drain (LDD) structure is formed at a portion of the high-voltage device region 2 , under the same ion implantation conditions as the low-voltage device region 1 , to form the electrostatic discharge protecting device region 3 .
  • a lightly doped drain (LDD) is simultaneously formed at the electrostatic discharge protecting device region 3 and the low-voltage device region 1 using a single mask.
  • LDD lightly doped drain
  • One of the masks which will be referred to in this detailed description as a first mask, is provided to implant ions into the high-voltage device region 2 .
  • An opening is only formed at a region of the first mask corresponding to the high-voltage device region 2 such that a predetermined number of ions are implanted through the opening.
  • the other mask which will be referred to in this detailed description as a second mask, is provided to simultaneously implant ions into the low-voltage device region 1 and the electrostatic discharge protecting device region 3 .
  • An opening is formed at a region of the second mask corresponding to the low-voltage device region 1 and the electrostatic discharge protecting device region 3 such that a predetermined number of ions are implanted through the opening.
  • n-type dopant such as phosphorus (P), or a p-type dopant, such as boron (B) is lightly implanted through the masks.
  • ions are implanted to a concentration of 1 ⁇ 10 13 to 7 ⁇ 10 13 atoms/cm 2 into the high-voltage device region 2 .
  • High-voltage devices are used for input or output. Therefore, a reliability problem, such as hot carrier injection, may occur when ions are successively implanted. Consequently, ions are preferably doped with a small amount of implantation.
  • ions are implanted into the low-voltage device region 1 and the electrostatic discharge protecting device region 3 to a concentration of at least 5 ⁇ 10 14 atoms/cm 2 , preferably 5 ⁇ 10 14 to 5 ⁇ 10 15 atoms/cm 2 .
  • Low-voltage devices are generally used as high-speed and high-performance devices. Therefore, relatively high lightly doped drain (LDD) ion implantation is employed.
  • LDD lightly doped drain
  • the low-voltage device Due to the difference between such lightly doped drain (LDD) ion implantation conditions, the low-voltage device has a low junction breakdown voltage of approximately 5-7V while the high-voltage device has a high junction breakdown voltage of approximately 8-10V.
  • the high-voltage device region having a small amount of lightly doped drain ion implantation has a higher electrostatic discharge trigger voltage than the low-voltage device region. Therefore, the high-voltage device region has a higher electrostatic discharge clamp voltage than the low-voltage device region.
  • the electrostatic discharge protecting device when a portion of the high-voltage device region is formed as the electrostatic discharge protecting device, the electrostatic discharge protecting device has a lower electrostatic discharge trigger voltage (V t1 ) and a lower electrostatic discharge clamp voltage (V t2 ) than the high-voltage device region. Therefore, the electrostatic discharge protecting device can protect the devices from high-voltage electrostatic discharges. Also, the electrostatic discharge protecting device has higher second breakdown current (I t2 ) than the high-voltage device region, and therefore, power consumption of the electrostatic discharge protecting device is relatively low. Consequently, the electrostatic discharge protection effect is improved.
  • the electrostatic discharge protecting device manufactured as described above may be embodied as a gate-grounded metal oxide semiconductor (GGMOS) with normal circuit operation. Consequently, reliability problems, such as hot carrier injection, preferably do not occur.
  • GGMOS gate-grounded metal oxide semiconductor
  • a lightly doped drain is formed at the low-voltage device region 1 and the electrostatic discharge protecting device region 3 under the same ion implantation conditions.
  • Another lightly doped drain is formed at the high-voltage device region 2 under ion implantation conditions different from the ion implantation conditions applied to the low-voltage device region 1 and the electrostatic discharge protecting device region 3 .
  • an oxide film and a nitride film are sequentially stacked on the field regions, and the stack is etched using a dry etching process having an anisotropic etching property. As a result, a spacer is formed at the side surface of the gate pattern.
  • a dopant such as phosphorus (P)
  • P phosphorus
  • n+ high-concentration
  • LDD lightly doped drain
  • a metal layer having a low specific resistance such as nickel (Ni) is formed at the front surface of the semiconductor substrate, which includes the gate pattern, the source region, the drain region, and the spacer.
  • the metal layer on the gate pattern, the source region, and the drain source is changed into a silicide layer.
  • an inert gas atmosphere such as helium (He) or argon (Ar).
  • He helium
  • Ar argon
  • the metal layer on the gate pattern, the source region, and the drain source is changed into a silicide layer.
  • the manufactured semiconductor device is effectively protected from electrostatic discharge without the provision of additional processes. Therefore, the reliability of the resulting semiconductor device is improved.
  • a disclosed example semiconductor device manufacturing method is capable of protecting the resulting device from static electricity without requiring an additional process, thereby improving the reliability of the resulting semiconductor device.
  • a disclosed example method of manufacturing a semiconductor device which includes a high-voltage device region and a low-voltage device region, comprises forming, on a substrate, a gate pattern for a high-voltage device and a low-voltage device; implanting ions into opposite sides of the gate pattern to form a lightly doped drain (LDD) structure while implanting ions into a portion of the high-voltage device region under the same conditions as the ions are implanted into the low-voltage device region, to form an electrostatic discharge protecting device region; forming a spacer at the side surface of the gate pattern; forming a source region and a drain source at field regions disposed at the opposite sides of the gate pattern, respectively; and forming a metal layer on the front surface of the substrate including the gate pattern.
  • LDD lightly doped drain

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  • Engineering & Computer Science (AREA)
  • Power Engineering (AREA)
  • Physics & Mathematics (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • General Physics & Mathematics (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Manufacturing & Machinery (AREA)
  • Insulated Gate Type Field-Effect Transistor (AREA)
  • Metal-Oxide And Bipolar Metal-Oxide Semiconductor Integrated Circuits (AREA)
  • Semiconductor Integrated Circuits (AREA)

Abstract

Methods of manufacturing a semiconductor device including a high-voltage device region and a low-voltage device region are provided. An illustrated method includes forming, on a substrate, a gate pattern for a high-voltage device and a low-voltage device; implanting ions into opposite sides of the gate pattern, to form a lightly doped drain structure while implanting ions into a portion of the high-voltage device region under the same conditions as the low-voltage device region to form an electrostatic discharge protecting device region; forming a spacer at the side surface of the gate pattern; forming a source region and a drain source at field regions disposed at the opposite sides of the gate pattern, respectively; and forming a metal layer on the front surface of the substrate including the gate pattern.

Description

    FIELD OF THE DISCLOSURE
  • The present disclosure relates to semiconductor devices, and more particularly, to methods of manufacturing a semiconductor device simultaneously embodying a low-voltage device and a high-voltage device that are protected from static electricity.
    • BACKGROUND
  • A semiconductor manufacturing process enables simultaneous inclusion of low-voltage and high-voltage devices in a semiconductor device. Generally, the low-voltage device is used as a high-speed and high-performance device, and the high-voltage device is used for input and output. As such a semiconductor device is miniaturized for large capacity and high integration, it becomes necessary to protect the semiconductor device from electrostatic discharges. To this end, an electrostatic discharge protection device should be manufactured together with the low-voltage and high-voltage devices.
  • However, when the electrostatic discharge protection device is separately formed, an additional ion implantation process using an additional mask is required. These additions increase manufacturing costs. Furthermore, the electrostatic discharge protection device may cause a capacitance increase at the junction and may lead to higher leakage currents, which degrades the reliability of the semiconductor device.
    • BRIEF DESCRIPTION OF THE DRAWINGS
  • FIG. 1 is a schematic illustration of the formation of a lightly doped drain at a low-voltage device region, a high-voltage device region, and an electrostatic discharge protecting device region of an example semiconductor device constructed in accordance with the teachings of the present invention.
  • FIG. 2 is a flowchart illustrating an example method of manufacturing a semiconductor device performed in accordance with the teachings of the present invention.
  • FIG. 3 is a graph of an example current-voltage characteristic of an example electrostatic discharge protecting device region of an example semiconductor device constructed in accordance with the teachings of the present invention.
  • To clarify multiple layers and regions, the thickness of the layers are enlarged in the drawings. Wherever possible, the same reference numbers will be used throughout the drawing(s) and accompanying written description to refer to the same or like parts. As used in this patent, stating that any part (e.g., a layer, film, area, or plate) is in any way positioned on (e.g., positioned on, located on, disposed on, or formed on, etc.) another part, means that the referenced part is either in contact with the other part, or that the referenced part is above the other part with one or more intermediate part(s) located therebetween. Stating that any part is in contact with another part means that there is no intermediate part between the two parts.
    • DETAILED DESCRIPTION
  • Referring to FIG. 1, an example semiconductor device constructed in accordance with the teachings of the present invention includes a low-voltage (LV) device region 1, a high-voltage (HV) device region 2, and an electrostatic discharge protecting device region 3 formed over a portion of the high-voltage device region. Devices (not shown) are respectively formed at the low-voltage device region 1, the high-voltage device region 2, and the electrostatic discharge protecting device region 3. FIG. 2 illustrates an example method of forming a gate pattern for the devices.
  • Referring to FIG. 2, a device separating film is formed at field regions of a first conductive semiconductor substrate, (e.g., a P-type semiconductor substrate), to accomplish electrical insulation between the field regions of the semiconductor substrate. The device separating film may be formed by a shallow-trench isolation process or by local oxidation of silicon.
  • Next, a gate insulation film comprising silicon dioxide (SiO2) is stacked on the field regions of the semiconductor substrate using a thermal oxidation process or a low pressure chemical vapor deposition process. Preferably, the gate insulation film is formed to a thickness of approximately 1,000 Å, although the thickness of the gate insulation film may be changed depending upon the characteristics of the devices.
  • Subsequently, a polycrystalline silicon layer, (for example, a P-type doped polycrystalline silicon layer), is stacked on the gate insulation film. In this example, the polycrystalline silicon layer is formed to a thickness of approximately 2,000 Å to 3,000 Å. Thereafter, the polycrystalline silicon layer is patterned by a photo etching process to form a gate pattern.
  • Subsequently, a lightly doped drain (LDD) structure is formed at a portion of the high-voltage device region 2, under the same ion implantation conditions as the low-voltage device region 1, to form the electrostatic discharge protecting device region 3. Preferably, a lightly doped drain (LDD) is simultaneously formed at the electrostatic discharge protecting device region 3 and the low-voltage device region 1 using a single mask.
  • As shown in FIG. 2, only masks for the high-voltage device region and the low-voltage device region are used when forming the lightly doped drain (LDD) in the example semiconductor device manufacturing process of FIG. 2. Therefore, no additional mask is required for the electrostatic discharge protection.
  • One of the masks, which will be referred to in this detailed description as a first mask, is provided to implant ions into the high-voltage device region 2. An opening is only formed at a region of the first mask corresponding to the high-voltage device region 2 such that a predetermined number of ions are implanted through the opening.
  • The other mask, which will be referred to in this detailed description as a second mask, is provided to simultaneously implant ions into the low-voltage device region 1 and the electrostatic discharge protecting device region 3. An opening is formed at a region of the second mask corresponding to the low-voltage device region 1 and the electrostatic discharge protecting device region 3 such that a predetermined number of ions are implanted through the opening.
  • An n-type dopant (n−), such as phosphorus (P), or a p-type dopant, such as boron (B), is lightly implanted through the masks.
  • In the illustrated example, ions are implanted to a concentration of 1×1013 to 7×1013 atoms/cm2 into the high-voltage device region 2. High-voltage devices are used for input or output. Therefore, a reliability problem, such as hot carrier injection, may occur when ions are successively implanted. Consequently, ions are preferably doped with a small amount of implantation.
  • On the other hand, ions are implanted into the low-voltage device region 1 and the electrostatic discharge protecting device region 3 to a concentration of at least 5×1014 atoms/cm2, preferably 5×1014 to 5×1015 atoms/cm2. Low-voltage devices are generally used as high-speed and high-performance devices. Therefore, relatively high lightly doped drain (LDD) ion implantation is employed.
  • Due to the difference between such lightly doped drain (LDD) ion implantation conditions, the low-voltage device has a low junction breakdown voltage of approximately 5-7V while the high-voltage device has a high junction breakdown voltage of approximately 8-10V. As a result, the high-voltage device region having a small amount of lightly doped drain ion implantation has a higher electrostatic discharge trigger voltage than the low-voltage device region. Therefore, the high-voltage device region has a higher electrostatic discharge clamp voltage than the low-voltage device region.
  • Consequently, when the electrostatic discharge protecting device region is formed over a portion of the high-voltage device region under the lightly doped drain (LDD) ion implantation conditions applied to the low-voltage device region, it is possible to embody a semiconductor device having an improved electrostatic discharge property without providing additional masks and, thus, without incurring additional costs.
  • It can be seen from FIG. 3 that, when a portion of the high-voltage device region is formed as the electrostatic discharge protecting device, the electrostatic discharge protecting device has a lower electrostatic discharge trigger voltage (Vt1) and a lower electrostatic discharge clamp voltage (Vt2) than the high-voltage device region. Therefore, the electrostatic discharge protecting device can protect the devices from high-voltage electrostatic discharges. Also, the electrostatic discharge protecting device has higher second breakdown current (It2) than the high-voltage device region, and therefore, power consumption of the electrostatic discharge protecting device is relatively low. Consequently, the electrostatic discharge protection effect is improved.
  • Furthermore, the electrostatic discharge protecting device manufactured as described above may be embodied as a gate-grounded metal oxide semiconductor (GGMOS) with normal circuit operation. Consequently, reliability problems, such as hot carrier injection, preferably do not occur.
  • As described above, a lightly doped drain (LDD) is formed at the low-voltage device region 1 and the electrostatic discharge protecting device region 3 under the same ion implantation conditions. Another lightly doped drain (LDD) is formed at the high-voltage device region 2 under ion implantation conditions different from the ion implantation conditions applied to the low-voltage device region 1 and the electrostatic discharge protecting device region 3.
  • Next, an oxide film and a nitride film are sequentially stacked on the field regions, and the stack is etched using a dry etching process having an anisotropic etching property. As a result, a spacer is formed at the side surface of the gate pattern.
  • Subsequently, a dopant, such as phosphorus (P), is heavily (n+) implanted into the field regions at opposite sides of the gate pattern to form high-concentration (n+) source and drain regions. Then, thermal processing is performed to activate the ions. Consequently, the source region and the drain region, both of which have a lightly doped drain (LDD) structure, are formed while the gate pattern is disposed between the source region and the drain region.
  • Thereafter, a metal layer having a low specific resistance, such as nickel (Ni), is formed at the front surface of the semiconductor substrate, which includes the gate pattern, the source region, the drain region, and the spacer.
  • Subsequently, rapid thermal processing or common thermal processing is performed to thermally process the metal layer under an inert gas atmosphere, such as helium (He) or argon (Ar). In this example, the metal layer on the gate pattern, the source region, and the drain source is changed into a silicide layer.
  • As apparent from the above example description, the manufactured semiconductor device is effectively protected from electrostatic discharge without the provision of additional processes. Therefore, the reliability of the resulting semiconductor device is improved.
  • In view of the foregoing, persons of ordinary skill in the art will appreciate that semiconductor device manufacturing methods have been disclosed that substantially obviate one or more problems due to limitations and disadvantages of the prior art.
  • A disclosed example semiconductor device manufacturing method is capable of protecting the resulting device from static electricity without requiring an additional process, thereby improving the reliability of the resulting semiconductor device.
  • A disclosed example method of manufacturing a semiconductor device which includes a high-voltage device region and a low-voltage device region, comprises forming, on a substrate, a gate pattern for a high-voltage device and a low-voltage device; implanting ions into opposite sides of the gate pattern to form a lightly doped drain (LDD) structure while implanting ions into a portion of the high-voltage device region under the same conditions as the ions are implanted into the low-voltage device region, to form an electrostatic discharge protecting device region; forming a spacer at the side surface of the gate pattern; forming a source region and a drain source at field regions disposed at the opposite sides of the gate pattern, respectively; and forming a metal layer on the front surface of the substrate including the gate pattern.
  • It is noted that this patent claims priority from Korean Patent Application Serial Number 10-2004-0090863, which was filed on Nov. 9, 2004, and is hereby incorporated by reference in its entirety.
  • Although certain example methods, apparatus and articles of manufacture have been described herein, the scope of coverage of this patent is not limited thereto. On the contrary, this patent covers all methods, apparatus and articles of manufacture fairly falling within the scope of the appended claims either literally or under the doctrine of equivalents.

Claims (5)

1. A method of manufacturing a semiconductor device including a high-voltage device region and a low-voltage device region, the method comprising:
forming a gate pattern for a high-voltage device and a low-voltage device on a substrate;
implanting ions into opposite sides of the gate pattern to form a lightly doped drain (LDD) structure in the low-voltage device region while implanting ions into a portion of the high-voltage device region under substantially identical conditions as are used to implant the low-voltage device region to form an electrostatic discharge protecting device region;
forming a spacer at a side surface of the gate pattern;
forming a source region and a drain source at field regions disposed at the opposite sides of the gate pattern, respectively; and
forming a metal layer on a front surface of the substrate including the gate pattern.
2. A method as defined in claim 1, wherein, when forming the lightly doped drain (LDD) structure, ions are implanted to a concentration of about 5×1014 to about 5×1015 atoms/cm2 into the electrostatic discharge protecting device region.
3. A method as defined in claim 1, wherein, when forming the lightly doped drain (LDD) structure, the ion implantation into the electrostatic discharge protecting device region and the ion implantation into the low-voltage device region are simultaneously performed using a same mask.
4. A method as defined in claim 1, wherein the electrostatic discharge protecting device region is formed at an edge of the high-voltage device region.
5. A method as defined in claim 1, wherein, when forming the lightly doped drain (LDD) structure, ions are implanted to a concentration of about 1×1013 to about 7×1013 atoms/cm2 into the high-voltage device region.
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