US20060044648A1 - Three-dimensional confocal microscope - Google Patents

Three-dimensional confocal microscope Download PDF

Info

Publication number
US20060044648A1
US20060044648A1 US10/929,554 US92955404A US2006044648A1 US 20060044648 A1 US20060044648 A1 US 20060044648A1 US 92955404 A US92955404 A US 92955404A US 2006044648 A1 US2006044648 A1 US 2006044648A1
Authority
US
United States
Prior art keywords
confocal
microscope
variable
focus lens
image
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
US10/929,554
Other versions
US7002737B1 (en
Inventor
Takashi Akiyama
Takayuki Kei
Kenta Mikuriya
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Yokogawa Electric Corp
Original Assignee
Yokogawa Electric Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Yokogawa Electric Corp filed Critical Yokogawa Electric Corp
Priority to US10/929,554 priority Critical patent/US7002737B1/en
Assigned to YOKOGAWA ELECTRIC CORPORATION reassignment YOKOGAWA ELECTRIC CORPORATION ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS). Assignors: AKIYAMA, TAKASHI, KEI, TAKAYUKI, MIKURIYA, KENTA
Application granted granted Critical
Publication of US7002737B1 publication Critical patent/US7002737B1/en
Publication of US20060044648A1 publication Critical patent/US20060044648A1/en
Expired - Fee Related legal-status Critical Current
Anticipated expiration legal-status Critical

Links

Images

Classifications

    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B3/00—Simple or compound lenses
    • G02B3/12—Fluid-filled or evacuated lenses
    • G02B3/14—Fluid-filled or evacuated lenses of variable focal length
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B21/00—Microscopes
    • G02B21/0004—Microscopes specially adapted for specific applications
    • G02B21/002—Scanning microscopes
    • G02B21/0024—Confocal scanning microscopes (CSOMs) or confocal "macroscopes"; Accessories which are not restricted to use with CSOMs, e.g. sample holders
    • G02B21/0052—Optical details of the image generation
    • G02B21/006—Optical details of the image generation focusing arrangements; selection of the plane to be imaged
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B21/00—Microscopes
    • G02B21/0004—Microscopes specially adapted for specific applications
    • G02B21/002—Scanning microscopes
    • G02B21/0024—Confocal scanning microscopes (CSOMs) or confocal "macroscopes"; Accessories which are not restricted to use with CSOMs, e.g. sample holders
    • G02B21/008—Details of detection or image processing, including general computer control
    • G02B21/0084—Details of detection or image processing, including general computer control time-scale detection, e.g. strobed, ultra-fast, heterodyne detection
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B26/00—Optical devices or arrangements for the control of light using movable or deformable optical elements
    • G02B26/004—Optical devices or arrangements for the control of light using movable or deformable optical elements based on a displacement or a deformation of a fluid
    • G02B26/005—Optical devices or arrangements for the control of light using movable or deformable optical elements based on a displacement or a deformation of a fluid based on electrowetting

Definitions

  • This invention relates to a three-dimensional confocal microscope and particularly to a three-dimensional confocal microscope for observing the three-dimensional shape of an observation target.
  • a confocal microscope can condense light (laser beam) to a fine pinpoint illuminating the sample to be observed, and thus accurately measure one point in a three-dimensional space while eliminating redundant scattered light from the sample and poor focus.
  • a confocal microscope of this type is described, for example, in JP-A-2002-72102.
  • the confocal microscope is used for observation of physiological reactions and morphological observation of live cells in the fields of biology and biotechnology, or for surface observation of LSI devices in the semiconductor market.
  • FIG. 1 is a block diagram showing a conventional confocal microscope as described above.
  • a confocal scanner 2 is attached to a camera port (not shown) of an optical microscope (hereinafter simply referred to as microscope) 3 , and acquires a confocal image of a sample (not shown) after passing through the microscope 3 , an actuator (for example, piezo-actuator) 4 and an objective lens 5 .
  • the image is picked up by a camera (for example, video rate camera) 1 .
  • the video rate camera 1 outputs the picked-up image as a video signal 1 a to the confocal scanner 2 and an image processing unit 6 .
  • the image processing unit 6 converts the video signal 1 a to video data and stores the video data.
  • the confocal scanner 2 performs rotational synchronization control of an internally installed Nipkow disk (not shown) in synchronization with the video signal 1 a.
  • the actuator 4 is driven by a scanning control signal 7 a outputted from a controller 7 and scans the objective lens 5 in the direction of the optical axis. As the focal plane of the objective lens 5 is scanned in the direction of optical axis, consecutive confocal slice images of cross sections of the sample are acquired.
  • a Z-axis motor may be used instead of the actuator.
  • FIGS. 2A and 2B are schematic views showing shift of the focal plane due to expansion and contraction of the actuator 4 .
  • FIG. 2A shows a case where the actuator is expanded.
  • FIG. 2B shows a case where the actuator is contracted.
  • FIG. 1 is a block diagram showing a conventional confocal microscope.
  • FIGS. 2A and 2B are schematic views showing shift of the focal plane due to expansion and contraction of an actuator in the confocal microscope shown in FIG. 1 .
  • FIGS. 3A and 3B are block diagrams showing an embodiment of a three-dimensional confocal microscope according to this invention.
  • FIG. 4 is a theoretical structural view (cross-sectional view) showing an example of a variable-focus lens.
  • FIGS. 3A and 3B are block diagrams showing an embodiment of a three-dimensional confocal microscope according to this invention.
  • the image processing unit of this invention equivalent to the image processing unit 6 shown in FIG. 1 , will not be shown in the drawings and will not be described in detail.
  • FIGS. 3A and 3B parts equivalent to those in FIG. 1 are denoted by the same numerals.
  • FIGS. 3A and 3B differ from FIG. 1 in that a variable-focus lens of surface tension control type 10 and a driving circuit 20 are used instead of the actuator and the controller.
  • the variable-focus lens of surface tension control type (hereinafter simply referred to as variable-focus lens) 10 is used as a field lens.
  • FIG. 4 shows a theoretical structural view (cross-sectional view) of a variable-focus lens manufactured by VARIOPTIC, which is an example of the variable-focus lens 10 .
  • This variable-focus lens is formed by constituent elements including transparent glass or plastic plates 11 and 12 , electrically connected first electrodes 13 a and 13 b , supporting stands 14 a and 14 b , and second electrodes 15 a and 15 b buried in the supporting stands 14 a and 14 b , respectively, and electrically connected with each other.
  • a box comprising and also sealed by the plates 11 , 12 , the first electrodes 13 a , 13 b and the supporting stands 14 a , 14 b is filled with a first liquid (for example, oil) 16 and a second liquid (for example, water) 17 that do not mix with each other.
  • a first liquid for example, oil
  • a second liquid for example, water
  • a voltage V (pulse width signal) outputted from the driving circuit 20 is applied between the first electrode 13 a and the second electrode 15 a.
  • a contact angle ⁇ between the first liquid 16 and the supporting stand 14 a (or 14 b ) varies according to the applied voltage V. Therefore, if the applied voltage V is changed, the contact angle ⁇ , that is, the focal length f of this variable-focus lens can be changed.
  • variable-focus lens is characterized in that when the focal length f is changed, no mechanical vibrations occur because of the absence of any moving part, and high-speed change of f (for example, at 50 Hz) can be realized without generating hysteresis.
  • the corresponding image plane position is b 1 .
  • the confocal scanner 2 scans in this state, one confocal slice image at the image plane position b 1 can be acquired. The image can be picked up by the camera 1 .
  • the confocal scanner 2 can usually acquire cross-sectional slice images at a rate of 100 images per second.
  • the timing of scanning by the confocal scanner 2 and the timing of switching the applied voltage by the driving circuit 20 are synchronous with each other and are controlled so that the focal length of the variable-focus lens 10 will not be switched during the scanning by the scanner.
  • variable-focus lens 10 in the above-described embodiment is arranged between the objective lens 5 and the microscope 3 , its arrangement is not limited to this.
  • the variable-focus lens 10 may be arranged within the confocal scanner 2 or between the confocal scanner 2 and the microscope 3 .
  • the variable-focus lens 10 may be arranged at any position from within the confocal scanner 2 to the objective lens 5 as long as it functions as a field lens.
  • a confocal microscope that uses a variable-focus lens of surface tension control type having no moving part as a field lens and thus can scan the focal plane of the microscope at a high speed (several tens of Hz) and can acquire a three-dimensional image at a high speed without being affected by mechanical vibrations.

Abstract

This invention realizes a three-dimensional confocal microscope in which mechanical vibrations do not occur in the scanning unit for scanning in the direction of optical axis, and in which scanning in the direction of optical axis can be carried out at a high speed. This invention has the following features. In the confocal microscope having a confocal scanner attached to an optical microscope and constructed to enable acquisition of an image of a sample as a confocal image by the confocal scanner, a variable-focus lens of surface tension control type having no moving part is uses as the field lens.

Description

    BACKGROUND OF THE INVENTION
  • 1. Field of the Invention
  • This invention relates to a three-dimensional confocal microscope and particularly to a three-dimensional confocal microscope for observing the three-dimensional shape of an observation target.
  • 2. Description of the Related Art
  • By employing the Nipkow disk method that improves spatial resolution using a pinhole, a confocal microscope can condense light (laser beam) to a fine pinpoint illuminating the sample to be observed, and thus accurately measure one point in a three-dimensional space while eliminating redundant scattered light from the sample and poor focus. A confocal microscope of this type is described, for example, in JP-A-2002-72102.
  • With such a three-dimensional confocal microscope, it is possible to acquire slice images of individual layers of a sample without actually cutting the sample very thinly and to construct a precise three-dimensional image from the slice image data. Therefore, the confocal microscope is used for observation of physiological reactions and morphological observation of live cells in the fields of biology and biotechnology, or for surface observation of LSI devices in the semiconductor market.
  • FIG. 1 is a block diagram showing a conventional confocal microscope as described above. A confocal scanner 2 is attached to a camera port (not shown) of an optical microscope (hereinafter simply referred to as microscope) 3, and acquires a confocal image of a sample (not shown) after passing through the microscope 3, an actuator (for example, piezo-actuator) 4 and an objective lens 5. The image is picked up by a camera (for example, video rate camera) 1.
  • The video rate camera 1 outputs the picked-up image as a video signal 1 a to the confocal scanner 2 and an image processing unit 6. The image processing unit 6 converts the video signal 1 a to video data and stores the video data. On the other hand, the confocal scanner 2 performs rotational synchronization control of an internally installed Nipkow disk (not shown) in synchronization with the video signal 1 a.
  • The actuator 4 is driven by a scanning control signal 7 a outputted from a controller 7 and scans the objective lens 5 in the direction of the optical axis. As the focal plane of the objective lens 5 is scanned in the direction of optical axis, consecutive confocal slice images of cross sections of the sample are acquired.
  • For the scanning of the objective lens 5 in the direction of optical axis, a Z-axis motor may be used instead of the actuator.
  • FIGS. 2A and 2B are schematic views showing shift of the focal plane due to expansion and contraction of the actuator 4. FIG. 2A shows a case where the actuator is expanded. FIG. 2B shows a case where the actuator is contracted.
  • However, since the conventional confocal microscope as described above uses moving units having moving parts such as actuator and motor, mechanical vibrations necessarily occur and such vibrations adversely affect the observation.
  • For example, when the frequency component of the vibration coincides with the eigen frequency of the microscope body, resonance occurs. This would lead to a problem that the surface of the sample becomes unstable and cannot be correctly observed.
  • Moreover, in the conventional confocal microscope, since the moving speeds of the moving units are low and the scanning speed on the focal plane of the objective lens is as low as a few Hz, a three-dimensional confocal laser microscope for high-speed scanning cannot be realized.
    • SUMMARY OF THE INVENTION
  • It is an object of this invention to solve the foregoing problems and to realize a three-dimensional confocal microscope capable of high-speed scanning in the direction of the optical axis without generating mechanical vibrations in a scanning unit for scanning in the direction of optical axis.
    • BRIEF DESCRIPTION OF THE DRAWINGS
  • FIG. 1 is a block diagram showing a conventional confocal microscope.
  • FIGS. 2A and 2B are schematic views showing shift of the focal plane due to expansion and contraction of an actuator in the confocal microscope shown in FIG. 1.
  • FIGS. 3A and 3B are block diagrams showing an embodiment of a three-dimensional confocal microscope according to this invention.
  • FIG. 4 is a theoretical structural view (cross-sectional view) showing an example of a variable-focus lens.
    • DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS
  • Hereinafter, this invention will be described in detail with reference to the drawings. FIGS. 3A and 3B are block diagrams showing an embodiment of a three-dimensional confocal microscope according to this invention. In this embodiment, since processing of an image picked up by a camera 1 is not directly related to this invention, the image processing unit of this invention, equivalent to the image processing unit 6 shown in FIG. 1, will not be shown in the drawings and will not be described in detail.
  • In FIGS. 3A and 3B, parts equivalent to those in FIG. 1 are denoted by the same numerals. FIGS. 3A and 3B differ from FIG. 1 in that a variable-focus lens of surface tension control type 10 and a driving circuit 20 are used instead of the actuator and the controller. The variable-focus lens of surface tension control type (hereinafter simply referred to as variable-focus lens) 10 is used as a field lens.
  • FIG. 4 shows a theoretical structural view (cross-sectional view) of a variable-focus lens manufactured by VARIOPTIC, which is an example of the variable-focus lens 10. This variable-focus lens is formed by constituent elements including transparent glass or plastic plates 11 and 12, electrically connected first electrodes 13 a and 13 b, supporting stands 14 a and 14 b, and second electrodes 15 a and 15 b buried in the supporting stands 14 a and 14 b, respectively, and electrically connected with each other.
  • A box comprising and also sealed by the plates 11, 12, the first electrodes 13 a, 13 b and the supporting stands 14 a, 14 b is filled with a first liquid (for example, oil) 16 and a second liquid (for example, water) 17 that do not mix with each other.
  • A voltage V (pulse width signal) outputted from the driving circuit 20 is applied between the first electrode 13 a and the second electrode 15 a.
  • A contact angle θ between the first liquid 16 and the supporting stand 14 a (or 14 b) varies according to the applied voltage V. Therefore, if the applied voltage V is changed, the contact angle θ, that is, the focal length f of this variable-focus lens can be changed.
  • Such a variable-focus lens is characterized in that when the focal length f is changed, no mechanical vibrations occur because of the absence of any moving part, and high-speed change of f (for example, at 50 Hz) can be realized without generating hysteresis.
  • The description now returns to FIG. 3. When the voltage is applied to the variable-focus lens 10 from the driving circuit 20 and the focal length of the variable-focus lens 10 is set to f1 as shown in FIG. 3A, the corresponding image plane position is b1. As the confocal scanner 2 scans in this state, one confocal slice image at the image plane position b1 can be acquired. The image can be picked up by the camera 1.
  • The confocal scanner 2 can usually acquire cross-sectional slice images at a rate of 100 images per second.
  • Next, when the applied voltage V is switched by the driving circuit 20 and the focal length of the variable-focus lens 10 is changed to f2 as shown in FIG. 3B, a confocal slice image at the image plane position b2 can be acquired accordingly.
  • Therefore, if the focal length of the variable-focus lens is continuously changed, cross-sectional confocal slice images at different image plane positions can be continuously acquired and three-dimensional information of the sample can be observed.
  • The timing of scanning by the confocal scanner 2 and the timing of switching the applied voltage by the driving circuit 20 are synchronous with each other and are controlled so that the focal length of the variable-focus lens 10 will not be switched during the scanning by the scanner.
  • This invention is not limited to the above-described embodiment and includes various changes and modifications without departing from the scope of the invention.
  • For example, while the variable-focus lens 10 in the above-described embodiment is arranged between the objective lens 5 and the microscope 3, its arrangement is not limited to this. The variable-focus lens 10 may be arranged within the confocal scanner 2 or between the confocal scanner 2 and the microscope 3. In short, the variable-focus lens 10 may be arranged at any position from within the confocal scanner 2 to the objective lens 5 as long as it functions as a field lens.
  • As described above, according to this invention, it is possible to easily realize a confocal microscope that uses a variable-focus lens of surface tension control type having no moving part as a field lens and thus can scan the focal plane of the microscope at a high speed (several tens of Hz) and can acquire a three-dimensional image at a high speed without being affected by mechanical vibrations.

Claims (3)

1. A three-dimensional confocal microscope having a confocal scanner attached to an optical microscope, the three-dimensional confocal microscope being constructed to enable acquisition of an image of a sample as a confocal image by the confocal scanner,
wherein a variable-focus lens of surface tension control type having no moving part is used as a field lens.
2. The three-dimensional confocal microscope as claimed in claim 1, wherein the variable-focus lens is arranged within the region from the confocal scanner to an objective lens of a microscope.
3. The three-dimensional confocal microscope as claimed in claim 1, wherein switching of focal length of the variable-focus lens of surface tension type and scanning by the confocal scanner are carried out synchronously.
US10/929,554 2004-08-31 2004-08-31 Three-dimensional confocal microscope Expired - Fee Related US7002737B1 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
US10/929,554 US7002737B1 (en) 2004-08-31 2004-08-31 Three-dimensional confocal microscope

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
US10/929,554 US7002737B1 (en) 2004-08-31 2004-08-31 Three-dimensional confocal microscope

Publications (2)

Publication Number Publication Date
US7002737B1 US7002737B1 (en) 2006-02-21
US20060044648A1 true US20060044648A1 (en) 2006-03-02

Family

ID=35810671

Family Applications (1)

Application Number Title Priority Date Filing Date
US10/929,554 Expired - Fee Related US7002737B1 (en) 2004-08-31 2004-08-31 Three-dimensional confocal microscope

Country Status (1)

Country Link
US (1) US7002737B1 (en)

Cited By (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP1837689A1 (en) * 2006-03-23 2007-09-26 Mitutoyo Corporation Variable focal length constant magnification lens assembly
DE102007049651A1 (en) * 2007-10-10 2009-04-23 Technische Universität Dresden Video microscopy arrangement for e.g. animal or human organ, has imaging lens system and lens systems to form telecentric imaging system, where lens system adjusts distance of position-changed objects by maintaining constant ratio
JP2013235122A (en) * 2012-05-09 2013-11-21 National Institute Of Advanced Industrial & Technology Three-dimensional operation device for micro object
US9720218B2 (en) 2013-08-06 2017-08-01 Howard Hughes Medical Institute Volume imaging
WO2019147834A1 (en) * 2018-01-24 2019-08-01 Cyberoptics Corporation Structured light projection for specular surfaces

Families Citing this family (18)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US7121998B1 (en) * 2004-06-08 2006-10-17 Eurica Califorrniaa Vented microcradle for prenidial incubator
DE102004029057A1 (en) * 2004-06-16 2006-01-12 Carl Zeiss Lighting device and optical observation device
FR2880135B1 (en) * 2004-12-23 2007-03-16 Varioptic Sa VARIABLE FOCAL LENS WITH WIDE RANGE OF VARIATION
EP1816493A1 (en) * 2006-02-07 2007-08-08 ETH Zürich Tunable diffraction grating
DE102006018302A1 (en) * 2006-04-20 2007-10-25 Carl Zeiss Microimaging Gmbh Laser Scanning Microscope and Laser Scanning Microscopy
US7903331B2 (en) * 2006-07-31 2011-03-08 Volk Optical, Inc. Flexible positioner and ophthalmic microscope incorporating the same
US7940479B2 (en) * 2007-04-02 2011-05-10 Volk Optical, Inc. Positioners and microscopes incorporating the same
DE102007038579A1 (en) * 2007-08-16 2009-02-19 Carl Zeiss Microimaging Gmbh Microscope with internal focus
US8184365B2 (en) * 2007-10-19 2012-05-22 University Of Central Florida Research Foundation, Inc. Optical instruments having dynamic focus
US8275226B2 (en) 2008-12-09 2012-09-25 Spectral Applied Research Ltd. Multi-mode fiber optically coupling a radiation source module to a multi-focal confocal microscope
US8670178B2 (en) * 2009-12-08 2014-03-11 Spectral Applied Research Inc. Imaging distal end of multimode fiber
US8212915B1 (en) * 2010-03-27 2012-07-03 Lloyd Douglas Clark Externally actuable photo-eyepiece relay lens system for focus and photomontage in a wide-field imaging system
DE102017203492A1 (en) * 2017-03-03 2018-09-06 Witec Wissenschaftliche Instrumente Und Technologie Gmbh Method and device for imaging a sample surface
US20160274346A1 (en) * 2015-03-18 2016-09-22 National Tsing Hua University Optical System for Fast Three-Dimensional Imaging
JP2017044871A (en) * 2015-08-26 2017-03-02 オリンパス株式会社 Scanning microscope
US20180045937A1 (en) * 2016-08-10 2018-02-15 Zeta Instruments, Inc. Automated 3-d measurement
US11385180B2 (en) 2017-03-03 2022-07-12 Witec Wissenschaftliche Instrumente Und Technologie Gmbh Method and device for imaging a specimen surface
CN110596877B (en) * 2019-09-17 2022-05-24 四川大学 Optical zoom microscope with continuously adjustable focal lengths of objective lens and ocular lens

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6804041B1 (en) * 2003-06-09 2004-10-12 The University Of Akron Photonic processors and optical guiding structures for lightwave applications, systems, and techniques
US6898021B1 (en) * 2003-12-18 2005-05-24 Yin S. Tang Motionless zoom lens

Family Cites Families (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP4158077B2 (en) 2000-09-01 2008-10-01 横河電機株式会社 Confocal microscope

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6804041B1 (en) * 2003-06-09 2004-10-12 The University Of Akron Photonic processors and optical guiding structures for lightwave applications, systems, and techniques
US6898021B1 (en) * 2003-12-18 2005-05-24 Yin S. Tang Motionless zoom lens

Cited By (15)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP1837689A1 (en) * 2006-03-23 2007-09-26 Mitutoyo Corporation Variable focal length constant magnification lens assembly
US20070221821A1 (en) * 2006-03-23 2007-09-27 Micro Encoder Inc. Variable focal length constant magnification lens assembly
US7436587B2 (en) 2006-03-23 2008-10-14 Mitutoyo Corporation Variable focal length constant magnification lens assembly
DE102007049651A1 (en) * 2007-10-10 2009-04-23 Technische Universität Dresden Video microscopy arrangement for e.g. animal or human organ, has imaging lens system and lens systems to form telecentric imaging system, where lens system adjusts distance of position-changed objects by maintaining constant ratio
DE102007049651B4 (en) * 2007-10-10 2017-02-16 Technische Universität Dresden Arrangement for video microscopy of objects
JP2013235122A (en) * 2012-05-09 2013-11-21 National Institute Of Advanced Industrial & Technology Three-dimensional operation device for micro object
US9720218B2 (en) 2013-08-06 2017-08-01 Howard Hughes Medical Institute Volume imaging
WO2019147834A1 (en) * 2018-01-24 2019-08-01 Cyberoptics Corporation Structured light projection for specular surfaces
CN111656260A (en) * 2018-01-24 2020-09-11 赛博光学公司 Structured light projection for mirrored surfaces
KR20200109360A (en) * 2018-01-24 2020-09-22 사이버옵틱스 코포레이션 Projection of structured light for mirror surfaces
US11073380B2 (en) 2018-01-24 2021-07-27 Cyberoptics Corporation Structured light projection for specular surfaces
US11421983B2 (en) 2018-01-24 2022-08-23 Cyberoptics Corporation Structured light projection for specular surfaces
KR20220128453A (en) * 2018-01-24 2022-09-20 사이버옵틱스 코포레이션 Structured light projection for specular surfaces
KR102461481B1 (en) * 2018-01-24 2022-10-31 사이버옵틱스 코포레이션 Projection of structured light for a mirror surface
KR102597197B1 (en) * 2018-01-24 2023-11-01 사이버옵틱스 코포레이션 Structured light projection for specular surfaces

Also Published As

Publication number Publication date
US7002737B1 (en) 2006-02-21

Similar Documents

Publication Publication Date Title
US7002737B1 (en) Three-dimensional confocal microscope
AU2012306571B2 (en) Focus and imaging system and techniques using error signal
US6664537B2 (en) Scanning microscope, optical arrangement and method for imaging in scanning microscopy
US9383568B2 (en) Objective-coupled selective plane illumination microscopy
US20060072191A1 (en) Confocal microscope
CN108056754B (en) Fast axial scanning photoacoustic microimaging device based on acoustic gradient refractive index mirror
US6300618B1 (en) High speed 3-dimensional confocal microscopic equipment
US20170146781A1 (en) Light sheet generator
US8072586B2 (en) Arrangement and method for focusing a multiplane image acquisition on a prober
WO2004025331A2 (en) Microscope with extended field of vision
JP2009075309A (en) Optical scanning element and driving method for the same, and optical scanning probe employing optical scanning element
US7796314B2 (en) Method and apparatus for two-axis, high-speed beam steering
JP2014163976A (en) Image acquisition device and image acquisition system
US20080158664A1 (en) Arrangement and method for image acquisition on a prober
JP2004317704A (en) Three-dimensional confocal microscope
JP2008052177A (en) Confocal optical system
US20190011478A1 (en) Observation method using compound microscope including an inverted optical microscope and atomic force microscope, program to perform observation method, and compound microscope
US20240061228A1 (en) High-speed rotary/galvo planar-mirror-based optical-path-length-shift subsystem and method, and related systems and methods
KR102116199B1 (en) Observation device and method and observation device control program
US20140211305A1 (en) Laser scanning microscope
JP2000275534A (en) Confocal microscope
CN114994892A (en) Laser confocal microscopic imaging system and method
JP4222895B2 (en) Optical deflector and scanning optical microscope using the optical deflector
JP2005010516A (en) Microscope
KR20110121497A (en) Confocal microscopy system usning of pzt stage and scan method

Legal Events

Date Code Title Description
AS Assignment

Owner name: YOKOGAWA ELECTRIC CORPORATION, JAPAN

Free format text: ASSIGNMENT OF ASSIGNORS INTEREST;ASSIGNORS:AKIYAMA, TAKASHI;KEI, TAKAYUKI;MIKURIYA, KENTA;REEL/FRAME:015761/0315

Effective date: 20040803

FEPP Fee payment procedure

Free format text: PAYOR NUMBER ASSIGNED (ORIGINAL EVENT CODE: ASPN); ENTITY STATUS OF PATENT OWNER: LARGE ENTITY

FPAY Fee payment

Year of fee payment: 4

REMI Maintenance fee reminder mailed
LAPS Lapse for failure to pay maintenance fees
STCH Information on status: patent discontinuation

Free format text: PATENT EXPIRED DUE TO NONPAYMENT OF MAINTENANCE FEES UNDER 37 CFR 1.362

FP Lapsed due to failure to pay maintenance fee

Effective date: 20140221