US20040217367A1 - Znse diffraction type optical component and method for fabricating the same - Google Patents
Znse diffraction type optical component and method for fabricating the same Download PDFInfo
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- US20040217367A1 US20040217367A1 US10/486,544 US48654404A US2004217367A1 US 20040217367 A1 US20040217367 A1 US 20040217367A1 US 48654404 A US48654404 A US 48654404A US 2004217367 A1 US2004217367 A1 US 2004217367A1
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- 230000003287 optical effect Effects 0.000 title claims abstract description 27
- 238000000034 method Methods 0.000 title claims abstract description 19
- 239000000758 substrate Substances 0.000 claims abstract description 34
- SBIBMFFZSBJNJF-UHFFFAOYSA-N selenium;zinc Chemical compound [Se]=[Zn] SBIBMFFZSBJNJF-UHFFFAOYSA-N 0.000 claims abstract description 19
- 238000004519 manufacturing process Methods 0.000 claims abstract description 7
- 238000005530 etching Methods 0.000 claims description 24
- 239000007789 gas Substances 0.000 claims description 20
- VEXZGXHMUGYJMC-UHFFFAOYSA-M Chloride anion Chemical compound [Cl-] VEXZGXHMUGYJMC-UHFFFAOYSA-M 0.000 claims description 13
- 239000011261 inert gas Substances 0.000 claims description 9
- 229910015844 BCl3 Inorganic materials 0.000 claims description 8
- FAQYAMRNWDIXMY-UHFFFAOYSA-N trichloroborane Chemical compound ClB(Cl)Cl FAQYAMRNWDIXMY-UHFFFAOYSA-N 0.000 claims description 8
- PFNQVRZLDWYSCW-UHFFFAOYSA-N (fluoren-9-ylideneamino) n-naphthalen-1-ylcarbamate Chemical compound C12=CC=CC=C2C2=CC=CC=C2C1=NOC(=O)NC1=CC=CC2=CC=CC=C12 PFNQVRZLDWYSCW-UHFFFAOYSA-N 0.000 description 44
- 150000001768 cations Chemical class 0.000 description 16
- 150000002500 ions Chemical class 0.000 description 12
- 238000001020 plasma etching Methods 0.000 description 9
- 238000009616 inductively coupled plasma Methods 0.000 description 8
- 238000010884 ion-beam technique Methods 0.000 description 8
- 239000000463 material Substances 0.000 description 6
- 239000002245 particle Substances 0.000 description 6
- 239000006227 byproduct Substances 0.000 description 5
- CURLTUGMZLYLDI-UHFFFAOYSA-N Carbon dioxide Chemical compound O=C=O CURLTUGMZLYLDI-UHFFFAOYSA-N 0.000 description 4
- 238000010586 diagram Methods 0.000 description 3
- 238000005553 drilling Methods 0.000 description 3
- 230000015572 biosynthetic process Effects 0.000 description 2
- 229910002092 carbon dioxide Inorganic materials 0.000 description 2
- 239000001569 carbon dioxide Substances 0.000 description 2
- 238000005229 chemical vapour deposition Methods 0.000 description 2
- VIEXQFHKRAHTQS-UHFFFAOYSA-N chloroselanyl selenohypochlorite Chemical compound Cl[Se][Se]Cl VIEXQFHKRAHTQS-UHFFFAOYSA-N 0.000 description 2
- 238000000576 coating method Methods 0.000 description 2
- 230000007423 decrease Effects 0.000 description 2
- 230000000694 effects Effects 0.000 description 2
- LNBXMNQCXXEHFT-UHFFFAOYSA-N selenium tetrachloride Chemical compound Cl[Se](Cl)(Cl)Cl LNBXMNQCXXEHFT-UHFFFAOYSA-N 0.000 description 2
- 239000011592 zinc chloride Substances 0.000 description 2
- JIAARYAFYJHUJI-UHFFFAOYSA-L zinc dichloride Chemical compound [Cl-].[Cl-].[Zn+2] JIAARYAFYJHUJI-UHFFFAOYSA-L 0.000 description 2
- KZBUYRJDOAKODT-UHFFFAOYSA-N Chlorine Chemical compound ClCl KZBUYRJDOAKODT-UHFFFAOYSA-N 0.000 description 1
- -1 Cl+ Chemical class 0.000 description 1
- VEXZGXHMUGYJMC-UHFFFAOYSA-N Hydrochloric acid Chemical compound Cl VEXZGXHMUGYJMC-UHFFFAOYSA-N 0.000 description 1
- 230000015556 catabolic process Effects 0.000 description 1
- 238000006243 chemical reaction Methods 0.000 description 1
- 239000011248 coating agent Substances 0.000 description 1
- 238000007796 conventional method Methods 0.000 description 1
- 238000006731 degradation reaction Methods 0.000 description 1
- 230000005684 electric field Effects 0.000 description 1
- 230000002349 favourable effect Effects 0.000 description 1
- 230000001678 irradiating effect Effects 0.000 description 1
- 239000002994 raw material Substances 0.000 description 1
- 238000001878 scanning electron micrograph Methods 0.000 description 1
- SPVXKVOXSXTJOY-UHFFFAOYSA-N selane Chemical compound [SeH2] SPVXKVOXSXTJOY-UHFFFAOYSA-N 0.000 description 1
- 229910000058 selane Inorganic materials 0.000 description 1
- 238000004544 sputter deposition Methods 0.000 description 1
- 238000000992 sputter etching Methods 0.000 description 1
- 238000003786 synthesis reaction Methods 0.000 description 1
- 239000011701 zinc Substances 0.000 description 1
Images
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/32—Gas-filled discharge tubes
- H01J37/32009—Arrangements for generation of plasma specially adapted for examination or treatment of objects, e.g. plasma sources
- H01J37/32082—Radio frequency generated discharge
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B5/00—Optical elements other than lenses
- G02B5/18—Diffraction gratings
- G02B5/1847—Manufacturing methods
- G02B5/1857—Manufacturing methods using exposure or etching means, e.g. holography, photolithography, exposure to electron or ion beams
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/04—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer
- H01L21/34—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer the devices having semiconductor bodies not provided for in groups H01L21/0405, H01L21/0445, H01L21/06, H01L21/16 and H01L21/18 with or without impurities, e.g. doping materials
- H01L21/46—Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/428
- H01L21/461—Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/428 to change their surface-physical characteristics or shape, e.g. etching, polishing, cutting
- H01L21/465—Chemical or electrical treatment, e.g. electrolytic etching
Definitions
- the present invention relates generally to a zinc selenide diffractive optical element, and specifically to a zinc selenide diffractive optical element having improved diffraction efficiency. This invention also relates to a method of producing the same.
- FIG. 4 illustrates a conventional method of producing a diffractive optical element (hereinafter referred to as a “DOE”) employing a polycrystalline zinc selenide (ZnSe).
- DOE diffractive optical element
- Zn and H 2 Se are used as raw materials in the synthesis of a zinc selenide polycrystalline body.
- a polycrystalline zinc selenide is cut out from the zinc selenide body to create a polycrystalline zinc selenide substrate 1 .
- a resist film 2 is formed on the polycrystalline ZnSe substrate 1 .
- a pattern is printed in the resist film 2 by selectively irradiating light 4 using a photomask 3 .
- the resist film 2 is developed for the formation of a resist pattern 5 .
- a pattern 1 a is formed using the resist pattern 5 for reactive ion etching of the polycrystalline ZnSe substrate 1 .
- the side walls of the pattern 1 a are illustrated as if they were perpendicular to the surface of the polycrystalline ZnSe substrate 1 . As described hereinafter, however, the sidewall of the pattern 1 a tends not to be angled at 90 degrees such as shown in the figures.
- a DOE is obtained by providing antireflection coatings (AR coating) on the polycrystalline ZnSe substrate 1 as shown in FIG. 4(H).
- the DOE produced by the aforementioned method utilizes optical diffraction, allowing the DOE to directly control the optical phase thereof.
- the DOE can be applied to various uses, such as a device having multipoint spectroscopic function.
- One such application is an optical element for carbon dioxide laser processing as illustrated in FIG. 5.
- a single working laser beam is split to drill a plurality of holes simultaneously, thereby realizing high-speed precision drilling.
- FIG. 6 illustrates applications of a DOE to laser material processing.
- Zinc selenium having high transparency with respect to infrared light is employed as the material of an optical element used for carbon-dioxide laser processing.
- a zinc selenium body having a diameter in the range of 1 to 3 inches and a thickness of several millimeters which is generally used for an optical element, a polycrystalline material rather than a monocrystalline material is used for cost-related reasons.
- zinc selenium polycrystals synthesized through chemical vapor deposition (CVD) and having high purity are often employed.
- the DOE needs to exhibit high diffraction efficiency. It has been recognized that the interior angle formed between the sidewall of the pattern 1 a and the surface of the polycrystalline ZnSe substrate 1 as illustrated in FIG. 4(G) is preferably 90 degrees for the sake of improved diffraction efficiency.
- FIG. 7 In a conventional reactive ion etching process illustrated in FIG. 4(G), a reactive ion beam etching apparatus with parallel-plate electrodes is employed as shown in FIG. 7.
- this apparatus achieved a limited success: the angle formed between the side wall of the pattern and the surface of the ZnSe substrate is no more than 70 degrees as shown in FIG. 8. This problem will be explained in further detail hereinafter.
- An object of the invention is to offer a ZnSe diffractive optical element having improved diffraction efficiency by effectively increasing the interior angles formed by the vertical sides of the pattern and the surface of the ZnSe substrate.
- Another object of the present invention is to offer a method of producing such a ZnSe diffractive optical element.
- a ZnSe diffractive optical element includes a ZnSe substrate and a pattern formed on the surface thereof.
- the side walls of the pattern are angled at or over 75 degrees to the surface of the ZnSe substrate.
- the interior angle formed between the sidewall of the pattern and the surface of the ZnSe substrate is in a range from 75 degrees to 85 degrees.
- a method of producing a ZnSe diffractive optical element is generated with an induced magnetic field produced by a coil.
- the surface of the ZnSe substrate is subjected to etching with the plasma.
- the plasma includes chloride-based gas plasma.
- the plasma includes chloride-based gas plasma and inert gas plasma.
- the inert gas which is employed for the purpose of improving the sputter effect, is also useful to stabilize the plasma.
- the chloride-based gas includes BCl 3 gas
- the inert gas includes Ar gas
- the etching process is conducted at 0.5 Pa or under.
- FIG. 1 is a conceptual diagram of an inductively-coupled-plasma reactive ion etching (ICP-RIE) apparatus employed for carrying out an embodiment of the present invention.
- ICP-RIE inductively-coupled-plasma reactive ion etching
- FIG. 2 is a conceptual diagram illustrating a mechanism of etching the surface of a ZnSe substrate.
- FIG. 3 illustrates a scanning electron microscopic (SEM) image of a cross section of a pattern formed on the ZnSe substrate according to the present invention.
- FIG. 4 shows a process of manufacturing a conventional diffractive optical element wherein a polycrystalline ZnSe is employed.
- FIG. 5 illustrates an application of a DOE to laser drilling.
- FIG. 6 shows an application of a DOE to laser material processing.
- FIG. 7 is a conceptual diagram of a conventional reactive ion beam etching apparatus with parallel-plate electrodes.
- FIG. 8 illustrates an SEM image of a cross section of the pattern produced on the ZnSe substrate using the conventional reactive ion beam etching apparatus with parallel-plate electrodes.
- FIG. 1 illustrates an inductively-coupled-plasma reactive ion etching (ICP-RIE) apparatus related to the method of producing a ZnSe diffractive optical element according to the present invention.
- ICP-RIE inductively-coupled-plasma reactive ion etching
- a high-frequency power supply 25 is applied both to a coil 20 and a cathode 26 .
- the coil 20 is used to create an induced magnetic field, wherein plasma is to be generated.
- the plasma includes cations 21 , together with uncharged particles 22 (hereinafter referred to as “particles 22 ”) represented by BCl 3 molecules and Ar atoms.
- a type of gas to be employed is a chloride-based gas such as BCl 3 .
- a conceivable etching mechanism is such that the active species (Cl or Cl 2 ) in the chloride-based gas which is in a state of plasma reacts with ZnSe to generate byproducts such as ZnCl 2 , Se 2 Cl 2 , or SeCl 4 on the ZnSe substrate, and the byproducts are subjected to sputtering with cations (e.g., Cl + , Cl 2 + , and BCl + ) accelerated in an electric field arising in a sheath region. Details of this mechanism are provided hereinafter.
- cations e.g., Cl + , Cl 2 + , and BCl +
- the plasma can be confined by the induced magnetic field generated by the coil.
- a high density of sputtered ions which are the cations 21 .
- the sputtered ion density achieved in this embodiment is equivalent to the level provided by the conventional etching apparatus with parallel-plates electrodes.
- the number of the particles 22 decreases, thus expanding the mean free path of the cations 21 . This decreases the collision between the cations 21 and the particles 22 , consequently increasing the verticality of the movement of the cations 21 , and enabling the sputtered ions to perpendicularly collide with a ZnSe substrate 23 .
- the lowest pressure ensuring stable plasma discharge is approximately 0.8 Pa and the density of the generated plasma ranges from 10 8 cm ⁇ 3 to 10 9 cm ⁇ 3 .
- the cations 21 accounted for roughly 0.01% of the total number of particles.
- many of the cations 21 tended to collide with other particles, which resulted in their curbed movement and failure in their achieving perpendicularity. Consequently, such angle of the sidewall of the pattern as obtainable was limited to approximately 70 degrees at maximum.
- Such degradation in the perpendicularity of the etched sidewall resulted in an error of the cell width accuracy relative to the designed values. For instance, in the case of a beam-splitting DOE designed to split a beam into more than 10 beams, the overall signal intensity tends to be lowered, which has resulted in the drawback that zeroth-order light becomes prominent.
- the conventional reactive ion beam etching apparatus with parallel-plate electrodes is not used; and an inductively-coupled-plasma reactive ion etching apparatus, which is capable of etching at a lower pressure, is used for etching according to the present invention.
- the inductively-coupled-plasma reaction ion etching the generation of plasma having a high density of approximately 10 11 cm ⁇ 3 is possible since the coil generates an induced magnetic field which confines the plasma.
- Such a high density allows a larger proportion of ions to contribute to the etching process even at a lower pressure and achieve perpendicularity, as compared with the case of using a reactive ion beam etching apparatus with parallel plate electrodes.
- stable discharge is possible, resulting in a superior level of ion perpendicularity.
- etching of the polycrystalline ZnSe substrate 1 using BCl 3 generates byproducts 7 such as ZnCl 2 , Se 2 Cl 2 , and SeCl 4 having low vapor pressure.
- the byproducts 7 migrate to spread homogeneously on the surface of the polycrystalline ZnSe substrate 1 .
- inductively-coupled-plasma reactive ion etching allows the generation of high-density plasma of approximately 10 11 cm ⁇ 3 , thus enabling the pressure to be reduced to 0.5 Pa or under. Even in such a low pressure as 0.5 Pa or under, a larger proportion of ions contribute to the etching process and higher ion perpendicularity is achieved as compared with the cases employing reactive ion beam etching with parallel plates electrodes.
- FIG. 3 shows a cross section of the pattern obtained on the ZnSe substrate through the aforementioned process. According to this process, a smooth etched surface was achieved, and the interior angle formed between the sidewall of the pattern and the surface of the ZnSe substrate was in a range from 75 degrees to 85 degrees. The ZnSe diffractive optical element obtained through this process exhibited improved diffraction efficiency and excellent performance.
- Plasma may be generated with the combination of a chloride-based gas and an inert gas.
- BCl 3 accounts for one-third of the total gas, the remaining two-thirds being an inert gas. Such an inert gas is helpful to stabilize discharge of the chloride-based gas.
- BCl 3 is most preferable as it can generate heavy ions which are considered capable of creating a greater sputter effect.
- Ar gas which is relatively inexpensive and capable of generating heavy ions, has produced a favorable result.
- inductively-coupled-plasma reactive ion etching is used for producing plasma. Therefore, as compared with the cases of reactive ion beam etching with parallel plate electrodes, a larger proportion of ions contribute to etching even at a low pressure, and a higher level of ion perpendicularity is achieved. Since such inductively coupled plasma reactive ion etching is employed for etching a ZnSe substrate, in a pattern thereby produced a larger interior angle can be formed between the sidewall thereof and the surface of the ZnSe substrate. Consequently, a ZnSe diffractive optical element having improved diffraction efficiency and capable of higher performance can be obtained.
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- Engineering & Computer Science (AREA)
- Plasma & Fusion (AREA)
- Chemical & Material Sciences (AREA)
- Analytical Chemistry (AREA)
- Manufacturing & Machinery (AREA)
- General Physics & Mathematics (AREA)
- Optics & Photonics (AREA)
- Diffracting Gratings Or Hologram Optical Elements (AREA)
- Drying Of Semiconductors (AREA)
- ing And Chemical Polishing (AREA)
Abstract
Plasma is generated by an induced magnetic field produced with a coil, and the surface of a ZnSe substrate is etched by the plasma. Employing this method allows the production of a pattern in which the internal angle formed between the sidewall of the pattern and the surface of the ZnSe substrate is equal to or over 75 degrees. This makes it possible to offer a ZnSe diffractive optical element having improved diffraction efficiency and higher performance.
Description
- The present invention relates generally to a zinc selenide diffractive optical element, and specifically to a zinc selenide diffractive optical element having improved diffraction efficiency. This invention also relates to a method of producing the same.
- FIG. 4 illustrates a conventional method of producing a diffractive optical element (hereinafter referred to as a “DOE”) employing a polycrystalline zinc selenide (ZnSe).
- In reference to FIG. 4(A), Zn and H2Se are used as raw materials in the synthesis of a zinc selenide polycrystalline body. Referring to FIG. 4(B), a polycrystalline zinc selenide is cut out from the zinc selenide body to create a polycrystalline
zinc selenide substrate 1. With reference to FIG. 4(C), aresist film 2 is formed on thepolycrystalline ZnSe substrate 1. - Referring to FIG. 4(D), a pattern is printed in the
resist film 2 by selectively irradiatinglight 4 using aphotomask 3. - In reference to FIGS.4(D) and 4(E), the
resist film 2 is developed for the formation of aresist pattern 5. In reference to FIGS. 4(F) and 4(G), a pattern 1 a is formed using theresist pattern 5 for reactive ion etching of thepolycrystalline ZnSe substrate 1. In FIGS. 4(F) and 4(G), for convenience in producing drawings, the side walls of the pattern 1 a are illustrated as if they were perpendicular to the surface of thepolycrystalline ZnSe substrate 1. As described hereinafter, however, the sidewall of the pattern 1 a tends not to be angled at 90 degrees such as shown in the figures. - A DOE is obtained by providing antireflection coatings (AR coating) on the
polycrystalline ZnSe substrate 1 as shown in FIG. 4(H). - Unlike conventional optical elements utilizing refraction and reflection, the DOE produced by the aforementioned method utilizes optical diffraction, allowing the DOE to directly control the optical phase thereof. With this special feature, the DOE can be applied to various uses, such as a device having multipoint spectroscopic function.
- One such application is an optical element for carbon dioxide laser processing as illustrated in FIG. 5. As disclosed in Japanese Patent Laid-Open Nos. 2000-280226 and 2000-280225, a single working laser beam is split to drill a plurality of holes simultaneously, thereby realizing high-speed precision drilling.
- With the downsizing of electronic components and devices used for mobile phones, personal computers, and other equipment, higher speed and accuracy are required in drilling. In light of this, the DOE is a promising key device to meet such needs.
- FIG. 6 illustrates applications of a DOE to laser material processing. Zinc selenium having high transparency with respect to infrared light is employed as the material of an optical element used for carbon-dioxide laser processing. As for a zinc selenium body having a diameter in the range of 1 to 3 inches and a thickness of several millimeters, which is generally used for an optical element, a polycrystalline material rather than a monocrystalline material is used for cost-related reasons. In particular, zinc selenium polycrystals synthesized through chemical vapor deposition (CVD) and having high purity are often employed.
- In any application, the DOE needs to exhibit high diffraction efficiency. It has been recognized that the interior angle formed between the sidewall of the pattern1 a and the surface of the
polycrystalline ZnSe substrate 1 as illustrated in FIG. 4(G) is preferably 90 degrees for the sake of improved diffraction efficiency. - In a conventional reactive ion etching process illustrated in FIG. 4(G), a reactive ion beam etching apparatus with parallel-plate electrodes is employed as shown in FIG. 7. However, this apparatus achieved a limited success: the angle formed between the side wall of the pattern and the surface of the ZnSe substrate is no more than 70 degrees as shown in FIG. 8. This problem will be explained in further detail hereinafter.
- The present invention has been achieved in order to solve the aforementioned problem. An object of the invention is to offer a ZnSe diffractive optical element having improved diffraction efficiency by effectively increasing the interior angles formed by the vertical sides of the pattern and the surface of the ZnSe substrate.
- Another object of the present invention is to offer a method of producing such a ZnSe diffractive optical element.
- A ZnSe diffractive optical element according to this invention includes a ZnSe substrate and a pattern formed on the surface thereof. The side walls of the pattern are angled at or over 75 degrees to the surface of the ZnSe substrate.
- In a preferable embodiment of the present invention, the interior angle formed between the sidewall of the pattern and the surface of the ZnSe substrate is in a range from 75 degrees to 85 degrees.
- In a method of producing a ZnSe diffractive optical element according to another aspect of the invention, plasma is generated with an induced magnetic field produced by a coil. The surface of the ZnSe substrate is subjected to etching with the plasma.
- In a preferable embodiment of the present invention, the plasma includes chloride-based gas plasma.
- In a more preferable embodiment of this invention, the plasma includes chloride-based gas plasma and inert gas plasma. The inert gas, which is employed for the purpose of improving the sputter effect, is also useful to stabilize the plasma.
- In a further preferable embodiment of the present invention, the chloride-based gas includes BCl3 gas, while the inert gas includes Ar gas.
- According to a preferable embodiment of this invention, the etching process is conducted at 0.5 Pa or under.
- FIG. 1 is a conceptual diagram of an inductively-coupled-plasma reactive ion etching (ICP-RIE) apparatus employed for carrying out an embodiment of the present invention.
- FIG. 2 is a conceptual diagram illustrating a mechanism of etching the surface of a ZnSe substrate.
- FIG. 3 illustrates a scanning electron microscopic (SEM) image of a cross section of a pattern formed on the ZnSe substrate according to the present invention.
- FIG. 4 shows a process of manufacturing a conventional diffractive optical element wherein a polycrystalline ZnSe is employed.
- FIG. 5 illustrates an application of a DOE to laser drilling.
- FIG. 6 shows an application of a DOE to laser material processing.
- FIG. 7 is a conceptual diagram of a conventional reactive ion beam etching apparatus with parallel-plate electrodes.
- FIG. 8 illustrates an SEM image of a cross section of the pattern produced on the ZnSe substrate using the conventional reactive ion beam etching apparatus with parallel-plate electrodes.
- Preferred embodiments of the present invention are described hereinafter with reference to the accompanying drawings.
- FIG. 1 illustrates an inductively-coupled-plasma reactive ion etching (ICP-RIE) apparatus related to the method of producing a ZnSe diffractive optical element according to the present invention. A high-
frequency power supply 25 is applied both to acoil 20 and acathode 26. In the inductively-coupled-plasma reactive ion etching apparatus of FIG. 1, thecoil 20 is used to create an induced magnetic field, wherein plasma is to be generated. The plasma includescations 21, together with uncharged particles 22 (hereinafter referred to as “particles 22”) represented by BCl3 molecules and Ar atoms. A type of gas to be employed is a chloride-based gas such as BCl3. - If a ZnSe substrate is selected as a material to be subjected to etching, a conceivable etching mechanism is such that the active species (Cl or Cl2) in the chloride-based gas which is in a state of plasma reacts with ZnSe to generate byproducts such as ZnCl2, Se2Cl2, or SeCl4 on the ZnSe substrate, and the byproducts are subjected to sputtering with cations (e.g., Cl+, Cl2 +, and BCl+) accelerated in an electric field arising in a sheath region. Details of this mechanism are provided hereinafter.
- In this embodiment, the plasma can be confined by the induced magnetic field generated by the coil. Thus, it is possible to secure a high density of sputtered ions, which are the
cations 21. Even if the density of the chloride-based gas is thinner (in other words, even at a lower pressure), the sputtered ion density achieved in this embodiment is equivalent to the level provided by the conventional etching apparatus with parallel-plates electrodes. When a lower pressure is applied, the number of theparticles 22 decreases, thus expanding the mean free path of thecations 21. This decreases the collision between thecations 21 and theparticles 22, consequently increasing the verticality of the movement of thecations 21, and enabling the sputtered ions to perpendicularly collide with aZnSe substrate 23. - When a conventional reactive ion beam etching, apparatus with parallel-plate electrodes is used, the lowest pressure ensuring stable plasma discharge is approximately 0.8 Pa and the density of the generated plasma ranges from 108 cm−3 to 109 cm−3. Under this condition, the
cations 21 accounted for roughly 0.01% of the total number of particles. Before reaching the ZnSe substrate, many of thecations 21 tended to collide with other particles, which resulted in their curbed movement and failure in their achieving perpendicularity. Consequently, such angle of the sidewall of the pattern as obtainable was limited to approximately 70 degrees at maximum. Such degradation in the perpendicularity of the etched sidewall resulted in an error of the cell width accuracy relative to the designed values. For instance, in the case of a beam-splitting DOE designed to split a beam into more than 10 beams, the overall signal intensity tends to be lowered, which has resulted in the drawback that zeroth-order light becomes prominent. - As provided heretofore, the conventional reactive ion beam etching apparatus with parallel-plate electrodes is not used; and an inductively-coupled-plasma reactive ion etching apparatus, which is capable of etching at a lower pressure, is used for etching according to the present invention. In the inductively-coupled-plasma reaction ion etching, the generation of plasma having a high density of approximately 1011 cm−3 is possible since the coil generates an induced magnetic field which confines the plasma. Such a high density allows a larger proportion of ions to contribute to the etching process even at a lower pressure and achieve perpendicularity, as compared with the case of using a reactive ion beam etching apparatus with parallel plate electrodes. Furthermore, even with a pressure of 0.5 Pa or under, stable discharge is possible, resulting in a superior level of ion perpendicularity.
- With reference to FIGS.2(A) and 2(B), etching of the
polycrystalline ZnSe substrate 1 using BCl3 generatesbyproducts 7 such as ZnCl2, Se2Cl2, and SeCl4 having low vapor pressure. - Referring to FIGS.2(B) and 2(C), the
byproducts 7 migrate to spread homogeneously on the surface of thepolycrystalline ZnSe substrate 1. - As illustrated in FIGS.2(D) and 2(E), sputtered ions (cations) etch to remove the
byproducts 7, and subsequently etch thepolycrystalline ZnSe substrate 1 as shown in FIG. 2(F). - The process illustrated in FIGS.2(A), (B), (C), (D) and (E) is repeated to conduct the etching of the surface of the
polycrystalline ZnSe substrate 1. As clarified by the aforementioned mechanism, a very smooth etched surface that has been less affected by the crystalline direction of the polycrystalline ZnSe was obtained according to the present invention. - In this case, employing inductively-coupled-plasma reactive ion etching allows the generation of high-density plasma of approximately 1011 cm−3, thus enabling the pressure to be reduced to 0.5 Pa or under. Even in such a low pressure as 0.5 Pa or under, a larger proportion of ions contribute to the etching process and higher ion perpendicularity is achieved as compared with the cases employing reactive ion beam etching with parallel plates electrodes.
- FIG. 3 shows a cross section of the pattern obtained on the ZnSe substrate through the aforementioned process. According to this process, a smooth etched surface was achieved, and the interior angle formed between the sidewall of the pattern and the surface of the ZnSe substrate was in a range from 75 degrees to 85 degrees. The ZnSe diffractive optical element obtained through this process exhibited improved diffraction efficiency and excellent performance.
- Although the embodiments disclosed herein employ a chloride-based gas, the present invention should not be considered as excluding other embodiments. Plasma may be generated with the combination of a chloride-based gas and an inert gas. In this case, it is preferable that BCl3 accounts for one-third of the total gas, the remaining two-thirds being an inert gas. Such an inert gas is helpful to stabilize discharge of the chloride-based gas.
- Aside from BCl3, HCl or Cl2 is also employed as the chloride based gas. However, BCl3 is most preferable as it can generate heavy ions which are considered capable of creating a greater sputter effect. As for the inert gas, Ar gas, which is relatively inexpensive and capable of generating heavy ions, has produced a favorable result.
- As provided heretofore, according to the present invention, high density plasma can be obtained since inductively-coupled-plasma reactive ion etching is used for producing plasma. Therefore, as compared with the cases of reactive ion beam etching with parallel plate electrodes, a larger proportion of ions contribute to etching even at a low pressure, and a higher level of ion perpendicularity is achieved. Since such inductively coupled plasma reactive ion etching is employed for etching a ZnSe substrate, in a pattern thereby produced a larger interior angle can be formed between the sidewall thereof and the surface of the ZnSe substrate. Consequently, a ZnSe diffractive optical element having improved diffraction efficiency and capable of higher performance can be obtained.
Claims (8)
1. A ZnSe diffractive optical element, comprising:
a ZnSe substrate; and
a pattern formed on a surface of the ZnSe substrate and which has an internal angle formed between a sidewall of the pattern and the surface of the ZnSe substrate;
wherein the internal angle is equal to or larger than 75 degrees.
2. A ZnSe diffractive optical element according to claim 1 , wherein the interior angle between the sidewall of the pattern and the surface of the ZnSe substrate is in a range from 75 degrees to 85 degrees.
3. A method of manufacturing a ZnSe diffractive optical element, comprising:
a process of generating plasma with an induced magnetic field produced by a coil; and
a process of etching the surface of a ZnSe substrate by the plasma.
4. A method of manufacturing a ZnSe diffractive optical element according to claim 3 , wherein the plasma includes chloride-based gas plasma.
5. A method of manufacturing a ZnSe diffractive optical element according to claim 3 , wherein the plasma includes chloride-based gas plasma and inert gas plasma.
6. A method of manufacturing a ZnSe diffractive optical element according to claim 5 , the chloride-based gas including BCl3 gas and the inert gas including Ar gas.
7. A method of manufacturing a ZnSe diffractive optical element according to claim 3 , the etching being conducted at or under 0.5 Pa.
8. A ZnSe diffractive optical element produced by a method defined in any one of claims 3, 4, 5, 6 and 7.
Applications Claiming Priority (3)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2002-131442 | 2002-05-07 | ||
JP2002131442A JP2003328160A (en) | 2002-05-07 | 2002-05-07 | ZnSe DIFFRACTIVE OPTICAL PART AND ITS PRODUCTION METHOD |
PCT/JP2003/005304 WO2003095703A1 (en) | 2002-05-07 | 2003-04-24 | ZnSe DIFFRACTION TYPE OPTICAL COMPONENT AND METHOD FOR FABRICATING THE SAME |
Publications (1)
Publication Number | Publication Date |
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US20040217367A1 true US20040217367A1 (en) | 2004-11-04 |
Family
ID=29416610
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
US10/486,544 Abandoned US20040217367A1 (en) | 2002-05-07 | 2003-04-24 | Znse diffraction type optical component and method for fabricating the same |
Country Status (6)
Country | Link |
---|---|
US (1) | US20040217367A1 (en) |
EP (1) | EP1502970A1 (en) |
JP (1) | JP2003328160A (en) |
AU (1) | AU2003231491A1 (en) |
IL (1) | IL160339A0 (en) |
WO (1) | WO2003095703A1 (en) |
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US20110011831A1 (en) * | 2009-01-19 | 2011-01-20 | Sumitomo Electric Industries, Ltd. | Method for manufacturing diffractive optical element |
US11724582B2 (en) | 2020-12-03 | 2023-08-15 | Leer Group | Pinch latch assembly |
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US4828356A (en) * | 1987-12-22 | 1989-05-09 | Hughes Aircraft Company | Method for fabrication of low efficiency diffraction gratings and product obtained thereby |
US5304514A (en) * | 1990-04-19 | 1994-04-19 | Kabushiki Kaisha Toshiba | Dry etching method |
US5420446A (en) * | 1993-04-07 | 1995-05-30 | Sony Corporation | Optoelectronic semiconductor laser device having compound semiconductor first and second layers |
US5624529A (en) * | 1995-05-10 | 1997-04-29 | Sandia Corporation | Dry etching method for compound semiconductors |
US6566149B1 (en) * | 1998-09-16 | 2003-05-20 | Hitachi, Ltd. | Method for manufacturing substrate for inspecting semiconductor device |
Family Cites Families (5)
Publication number | Priority date | Publication date | Assignee | Title |
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EP0386518B1 (en) * | 1989-02-23 | 1999-06-09 | Seiko Epson Corporation | Etching method for compound semiconductors |
JPH06267908A (en) * | 1993-03-15 | 1994-09-22 | Matsushita Electric Ind Co Ltd | Etching of compound semiconductor |
US5417799A (en) * | 1993-09-20 | 1995-05-23 | Hughes Aircraft Company | Reactive ion etching of gratings and cross gratings structures |
JPH1092795A (en) * | 1996-09-18 | 1998-04-10 | Toshiba Corp | Plasma treatment device |
US6567226B2 (en) * | 1998-03-03 | 2003-05-20 | Sumitomo Electric Industries, Ltd. | Method for designing a refractive or reflective optical system and method for designing a diffraction optical element |
-
2002
- 2002-05-07 JP JP2002131442A patent/JP2003328160A/en active Pending
-
2003
- 2003-04-24 AU AU2003231491A patent/AU2003231491A1/en not_active Abandoned
- 2003-04-24 EP EP03725665A patent/EP1502970A1/en not_active Withdrawn
- 2003-04-24 US US10/486,544 patent/US20040217367A1/en not_active Abandoned
- 2003-04-24 IL IL16033903A patent/IL160339A0/en unknown
- 2003-04-24 WO PCT/JP2003/005304 patent/WO2003095703A1/en not_active Application Discontinuation
Patent Citations (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US4828356A (en) * | 1987-12-22 | 1989-05-09 | Hughes Aircraft Company | Method for fabrication of low efficiency diffraction gratings and product obtained thereby |
US5304514A (en) * | 1990-04-19 | 1994-04-19 | Kabushiki Kaisha Toshiba | Dry etching method |
US5420446A (en) * | 1993-04-07 | 1995-05-30 | Sony Corporation | Optoelectronic semiconductor laser device having compound semiconductor first and second layers |
US5624529A (en) * | 1995-05-10 | 1997-04-29 | Sandia Corporation | Dry etching method for compound semiconductors |
US6566149B1 (en) * | 1998-09-16 | 2003-05-20 | Hitachi, Ltd. | Method for manufacturing substrate for inspecting semiconductor device |
Cited By (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US20110011831A1 (en) * | 2009-01-19 | 2011-01-20 | Sumitomo Electric Industries, Ltd. | Method for manufacturing diffractive optical element |
US8404136B2 (en) * | 2009-01-19 | 2013-03-26 | Sumitomo Electric Industries, Ltd. | Method for manufacturing diffractive optical element |
US11724582B2 (en) | 2020-12-03 | 2023-08-15 | Leer Group | Pinch latch assembly |
Also Published As
Publication number | Publication date |
---|---|
WO2003095703A1 (en) | 2003-11-20 |
IL160339A0 (en) | 2004-07-25 |
AU2003231491A1 (en) | 2003-11-11 |
JP2003328160A (en) | 2003-11-19 |
EP1502970A1 (en) | 2005-02-02 |
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