US20040105750A1 - Method for picking semiconductor chips from a foil - Google Patents
Method for picking semiconductor chips from a foil Download PDFInfo
- Publication number
- US20040105750A1 US20040105750A1 US10/719,829 US71982903A US2004105750A1 US 20040105750 A1 US20040105750 A1 US 20040105750A1 US 71982903 A US71982903 A US 71982903A US 2004105750 A1 US2004105750 A1 US 2004105750A1
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- Prior art keywords
- chip
- bondhead
- chip gripper
- gripper
- semiconductor
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/04—Manufacture or treatment of semiconductor devices or of parts thereof the devices having at least one potential-jump barrier or surface barrier, e.g. PN junction, depletion layer or carrier concentration layer
- H01L21/50—Assembly of semiconductor devices using processes or apparatus not provided for in a single one of the subgroups H01L21/06 - H01L21/326, e.g. sealing of a cap to a base of a container
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/67005—Apparatus not specifically provided for elsewhere
- H01L21/67011—Apparatus for manufacture or treatment
- H01L21/67132—Apparatus for placing on an insulating substrate, e.g. tape
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2221/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof covered by H01L21/00
- H01L2221/67—Apparatus for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components; Apparatus not specifically provided for elsewhere
- H01L2221/683—Apparatus for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components; Apparatus not specifically provided for elsewhere for supporting or gripping
- H01L2221/68304—Apparatus for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components; Apparatus not specifically provided for elsewhere for supporting or gripping using temporarily an auxiliary support
- H01L2221/68318—Auxiliary support including means facilitating the separation of a device or wafer from the auxiliary support
- H01L2221/68322—Auxiliary support including means facilitating the selective separation of some of a plurality of devices from the auxiliary support
Definitions
- the invention concerns a method for picking semiconductor chips from a foil.
- the substrate is fed by a transport device in steps to a dispensing station where adhesive is applied and then to a bonding station where the next semiconductor chip is placed.
- the semiconductor chips adhere to a foil clamped in a frame and are presented on a so-called wafer table, there they are picked one after the other by a device known as a Pick and Place, transported and placed onto the substrate.
- the Pick and Place device comprises a bondhead with a chip gripper for picking the semiconductor chips whereby the chip gripper can be deflected in vertical direction in relation to the bondhead against a force, the so-called pick force when picking from the foil or bond force when placing onto the substrate.
- the picking and detaching of the semiconductor chip from the foil as well as the placing of the semiconductor chip onto the substrate are meticulous processes.
- the chip gripper should be lowered at the highest speed possible so that the cycle time stays as short as possible.
- the chip gripper should strike the semiconductor chip with as little impulse as possible and therefore at lower speed so that the semiconductor chip is not damaged.
- the object of the invention is to further improve the process for picking the semiconductor chip from the foil.
- the picking of a semiconductor chip from a foil takes place by means of a chip gripper, which can be deflected on a bondhead in a predetermined direction designated as the z direction, and with the aid of a needle.
- the chip gripper bears pneumatically on the bondhead so that the pick force exerted by the chip gripper on the semiconductor chip is independent of the degree of deflection of the chip gripper.
- an inductive sensor is integrated into the bondhead for the precise measurement of the deflection of the chip gripper in z direction, ie, the z height of the chip gripper.
- the inductive sensor also serves as a touchdown sensor.
- the height z 0 is re-determined in an adjustment phase with the aid of the inductive sensor.
- the height is also designated as z position.
- step c the chip gripper is moved away from the needle at the highest possible speed in order to avoid turning and/or shifting of the semiconductor chip.
- step b it is possible to measure the deflection of the chip gripper in relation to the bondhead and from this to determine the actual height of the surface of the picked semiconductor chip in order to continuously or periodically update the height z 0 .
- the height z 0 can be determined with very high accuracy. For this reason, in step a, it is also possible to lower the bondhead to a height z 0 which is less than the average height z M of the surface of the semiconductor chips so that the chip gripper is deflected in relation to the bondhead on striking the semiconductor chip. However an adequate condition is that the chip gripper bears pneumatically on the bondhead.
- the distance by which the height z 0 in this case is less than the height z M can be kept much lower than normal in prior art on the one hand because of the precise knowledge of the height z M and on the other hand because of the pneumatic bearing of the chip gripper which delivers a force independent of the degree of deflection. In this way, when the chip gripper strikes the semiconductor chip, the bondhead is already immediately before the end of the braking phase. As a result, the striking speed of the chip gripper and therefore the impact on the semiconductor chip is less than in prior art.
- FIG. 1 is a front elevational diagram illustrating a first embodiment of a bondhead of a Die Bonder that has an integrated touchdown sensor.
- FIG. 2 is a characteristic curve of the touchdown sensor.
- FIG. 3 is a diagram illustrating the operation of an embodiment of the invention.
- FIGS. 4A, 4B and 4 C are snapshots illustrating motion of the bondhead.
- FIG. 5 is a diagram illustrating the operation of an embodiment of the invention.
- FIG. 6 is a front elevational diagram illustrating a second embodiment of a bondhead of a Die Bonder.
- FIG. 7 is a diagram illustrating the operating of an embodiement of the invention.
- FIG. 1 shows a first embodiment of a bondhead 1 of a Die Bonder whereby only those components of the bondhead 1 are presented and described that are necessary for the understanding of the invention.
- the bondhead 1 belongs to a Pick and Place system, that serves to pick semiconductor chips presented on a wafer table and to place them onto a substrate. With this embodiment, the bondhead 1 is lowered in a direction designated as z direction for picking the semiconductor chip, raised again, transported to the substrate and lowered again for placing the semiconductor chip onto the substrate. For the precise movement of the bondhead 1 in z direction, a not presented drive and a not presented measuring system for measuring the z position of the bondhead 1 are present.
- the drive can either lower and raise the bondhead 1 in z direction in relation to the Pick and Place system or it can lower and raise the entire Pick and Place system together with the bondhead 1 in z direction.
- a Pick and Place system is known, for example, from U.S. Pat. No. 6,185,815.
- the bondhead 1 comprises a chip gripper 2 that can be deflected in z direction in relation to the bondhead.
- the chip gripper 2 consists of a metal shaft 3 at the lower end of which a suction organ 4 is attached to which vacuum can be applied.
- the chip gripper 2 bears pneumatically, as frictionless as possible in the bondhead 1 .
- the bondhead 1 has a shaft 5 movable in z direction at the lower end of which a magnet 6 is attached so that the chip gripper 2 is secured to the bondhead 1 by means of magnetic force and can be exchanged in a simple manner.
- the upper end of the shaft 5 is secured to a piston 7 , which is guided in a cylindrical pressure chamber 8 .
- a predetermined pressure p as well as overpressure/vacuum can be applied to the pressure chamber 8 via a connector 9 .
- the pneumatic bearing of the chip gripper 2 on the bondhead 1 produces a pick force independent of the degree of deflection of the chip gripper 2 .
- overpressure is applied to the pressure chamber 8 , then the piston 7 is pressed against the wall 10 serving as a stop. This limit stop of the piston 7 and therefore also the chip gripper 2 is designated as the resting position of the chip gripper 2 in which the chip gripper 2 is not deflected in relation to the bondhead 1 .
- the bondhead 1 has an integrated sensor, designated as touchdown sensor that consists of a plate 11 made of metal, for example aluminium, and an electric coil 12 .
- the coil 12 preferably a flat coil on a printed-circuit board formed from a spiral shaped printed conductor, is secured to the bondhead 1 .
- the plate 11 is secured to the shaft 5 .
- the output signal of the inductive sensor is proportional to the distance between the plate 11 and the coil 12 .
- the shaft 5 is optionally rotatable on its longitudinal axis so that any rotation of the semiconductor chip can be corrected before placing onto the substrate.
- an adjustment phase and an operating phase are foreseen.
- the operating phase is interrupted and the z height of the surface of the semiconductor chips is determined in an adjustment phase. Therefore, to begin with, an adjustment phase is carried out in order to determine a height z M that corresponds to the z height of the surface of the semiconductor chips. From the height z M a height z 0 is derived that serves in the operating phase as a parameter for the lowering of the bondhead and enables an optimum z movement of the bondhead.
- This adjustment phase comprises the following steps:
- the z height of the surface of the semiconductor chip is determined from the height z j and the value ⁇ U under consideration of the characteristic curve 13 of the sensor.
- the simplified adjustment method is preferably carried out for several semiconductor chips and then the average height z M of the surface of the semiconductor chip determined.
- a height z 0 is derived from the average height z M .
- the height z 0 derived from the height z M is used in order to continually optimise the speed of the bondhead during lowering for the subsequent processing of the wafer so that, on the one hand, the time duration for lowering the bondhead up to standstill is as short as possible and that, on the other hand, the impact impulse, ie, the impulse with which the chip gripper impacts on the semiconductor chip, is small enough to exclude damage to the semiconductor chip, the chip gripper and/or the needle holder.
- the processing of the semiconductor chips can take place in various ways whereby the height z 0 detected by means of the adjustment process plays a role now explained in more detail.
- the bondhead 1 In a first phase that lasts up to the point in time t 1 , the bondhead 1 is lowered at maximum speed, braked as late as possible and, without touching the semiconductor chip 19 , brought to a standstill at height z 0 .
- a predetermined overpressure is applied to the pressure chamber 8 .
- the chip gripper 2 is in its resting position as the overpressure prevailing in the pressure chamber 8 presses the piston 7 against the wall 10 .
- the chip gripper 2 does not touch the semiconductor chip 19 .
- the needle 14 is raised so far that it just touches the underneath of the foil 18 .
- the z height of the foil 18 is designated as z f . This condition is presented in FIG. 4A.
- the bondhead 1 In a second phase that lasts from point in time t 1 up to point in time t 2 , the bondhead 1 remains at the height z 0 .
- the needle 14 is raised at a controlled speed until it reaches a predetermined height z 1 . In doing so, the needle 14 penetrates the foil 18 and raises the semiconductor chip 19 .
- the semiconductor chip 19 comes firstly into contact with the chip gripper 2 and then deflects the chip gripper 2 in relation to the bondhead 1 : The semiconductor chip 19 is now clamped between the chip gripper 2 and the needle 14 . This condition is presented in FIG. 4B.
- the pick force exerted by the chip gripper 2 on the semiconductor chip 19 is independent of the degree of deflection of the chip gripper 2 in relation to the bondhead 1 and is only dependent on the pressure prevailing in the pressure chamber 8 . In this way, the deflection of the chip gripper 2 can be kept comparatively low.
- the value of parameter ⁇ z should, on the one hand, be so large that, on lowering, the bondhead 1 does not touch the semiconductor chip 19 or, when it does touch it momentarily as the result of overswing, that the force exerted on the semiconductor chip 19 in any case remains less than the pick force.
- the parameter ⁇ z should be so small that the semiconductor chip 19 can not tilt on detaching from the foil 18 by means of the needle 14 .
- the third phase only begins after the needle 14 has reached its maximum height z 1 .
- the third phase can however be started earlier, namely as soon as the deflection of the chip gripper 2 has reached a predetermined minimum value and before the needle 14 has reached its maximum height z 1 . It must only be ensured that the chip gripper 2 remains deflected in relation to the bondhead 1 until the needle 14 has reached its maximum height z 1 .
- the point in time t 2 at which the bondhead 1 is raised again can either be programmed as a fixed time or be derived from the signal delivered by the touchdown sensor during the second phase. That means, the touchdown sensor then triggers the point in time t 2 at which the bondhead 1 is raised again.
- each time a semiconductor chip 19 is picked it is possible to measure the deflection of the chip gripper 2 in relation to the bondhead 1 at a suitable point in time and to calculate from this the actual height z ist of the surface of the picked semiconductor chip that it had before being picked.
- the suitable point in time is after the point in time t 1 when, on the one hand, the bondhead comes to a standstill at height z 0 and, on the other hand, the needle 14 has reached its set height z 1 .
- the extent of deflection of the chip gripper 2 is dependent on the actual height z 0 occupied by the bondhead 1 .
- the height z 0 can now be updated at specific points in time in that a new value z 0 ′ is calculated for the set height:
- Updating of the height z 0 based on the value z 0 ′ is preferably done by means of methods customary in statistics so that a possible individual faulty measurement does not lead to a deterioration of the pick process.
- the overtravel distance ⁇ z 1 is selected so that the height z 0 is lower than the least expected height of the surface of the semiconductor chips 19 .
- the bondhead 1 is lowered at maximum speed and brought to a standstill at height z 0 . From the point in time of impact on the semiconductor chip 19 the chip gripper 2 is increasingly deflected in relation to the bondhead 1 and exerts the pick force defined by the pressure applied in the pressure chamber 8 on the semiconductor chip 19 .
- the improved knowledge of the z height of the surface of the semiconductor chips 19 and the position independent pick force as a result of the pneumatic bearing of the chip gripper 2 make it possible to keep the overtravel distance ⁇ z 1 much smaller than with prior art.
- a smaller overtravel distance ⁇ z 1 means that the chip gripper 2 only impacts in the very last phase of lowering onto the semiconductor chip 19 where the bondhead 1 is already strongly braked and its speed on impact is very low.
- the lowering of the chip gripper 2 takes place indirectly during the process step a in that the chip gripper 2 is brought into a limit position, namely its resting position, with reference to the bondhead 1 and the bondhead 1 or the entire Pick and Place system with the bondhead 1 is lowered.
- the bondhead 1 is not movable in the z direction.
- a drive is present that directly controls the z position of the chip gripper 2 .
- the height z 0 is again given by the equation (1).
- the broken line 16 shows the course in time of the z height of the chip gripper 2 .
- the solid line 17 shows the course in time of the z height of the needle 14 .
- the chip gripper 2 In the first phase, which lasts up to point in time t 1 , the chip gripper 2 is lowered at maximum speed, braked as late as possible and, without touching the semiconductor chip 19 , brought to a standstill at height z 0 . In doing so, the regulator 23 works in the first operating mode in which it controls the deflection of the chip gripper 2 , ie, the z position or a value derived from it.
- the needle 14 (FIG. 4A) is raised so far that it just touches the underneath of the foil 18 .
- the chip gripper 2 In the second phase, which lasts from point in time t 1 up to point in time t 4 , the chip gripper 2 firstly remains at height z 0 .
- the needle 14 is raised at a controlled speed until it reaches a predetermined height z 1 . In doing so, the needle 14 penetrates the foil 18 and raises the semiconductor chip 19 .
- the semiconductor chip 19 At point in time t 4 , the semiconductor chip 19 firstly comes into contact with the chip gripper 2 and then deflects the chip gripper 2 in relation to the bondhead 1 : The semiconductor chip 19 is now clamped between the chip gripper 2 and the needle 14 .
- the output signal of the inductive sensor changes whereupon the regulator 23 has to increase the pressure p 1 prevailing in the first pressure chamber 20 in order to continue to keep the z height of the chip gripper 2 constantly at the height z 0 . While however, on the other hand the needle 14 has to reach the height z 1 , a change in the z height of the chip gripper 2 has to be possible and allowed. This can be made possible in different ways.
- the regulator 23 therefore continues to work in the first operating mode whereby the allowed pressure difference p 1 -p 2 is limited either from the point in time t 1 at which the chip gripper 2 has reached the height z 0 or from the point in time at which the needle 14 is raised. (During lowering of the chip gripper the pressure difference p 1 -p 2 does not have to be limited.)
- the regulator 23 tries to hold the chip gripper 2 at the height z 0 . But, because the pressure difference p 1 -p 2 is limited to the pick force, it is not able to withstand the force of the needle 14 .
- the chip gripper 2 is therefore raised.
- the pressure difference p 1 -p 2 is controlled corresponding to the pick force to be applied.
- the regulator 23 works either in the first operating mode in which it controls the z position of the chip gripper 2 or in the second operating mode in which the pressure difference p 1 -p 2 is controlled so that the chip gripper 2 is moved upwards until the piston 7 is stopped at an upper limit stop.
Abstract
The picking of a semiconductor chip from a foil takes place by means of a chip gripper which bears on a bondhead and can be deflected in a predetermined direction and with the aid of a needle. An inductive sensor serves the precise measurement of the deflection of the chip gripper with reference to the bondhead. The pick process itself is characterised by the following steps:
a) Lowering the chip gripper to a height z0, that is greater than an average height of the surface of the semiconductor chips so that the chip gripper does not yet touch the semiconductor chip,
b) Raising the needle to a predetermined height z1, whereby the needle raises the semiconductor chip in order to bring the semiconductor chip into contact with the chip gripper and then to increase the height of the chip gripper, and
c) Raising the chip gripper, whereby the semiconductor chip detaches itself from the needle.
Description
- The present application claims priority under 35 U.S.C § 119 based upon Swiss Patent Application No. 2002 2022/02 filed on Nov. 29, 2002.
- The invention concerns a method for picking semiconductor chips from a foil.
- With the mounting of semiconductor chips onto a substrate, the substrate is fed by a transport device in steps to a dispensing station where adhesive is applied and then to a bonding station where the next semiconductor chip is placed. The semiconductor chips adhere to a foil clamped in a frame and are presented on a so-called wafer table, there they are picked one after the other by a device known as a Pick and Place, transported and placed onto the substrate. The Pick and Place device comprises a bondhead with a chip gripper for picking the semiconductor chips whereby the chip gripper can be deflected in vertical direction in relation to the bondhead against a force, the so-called pick force when picking from the foil or bond force when placing onto the substrate. The picking and detaching of the semiconductor chip from the foil as well as the placing of the semiconductor chip onto the substrate are meticulous processes. When picking the semiconductor chip the problem arises that its surface is not always at the same height and therefore it is not always known at which height the chip gripper should come to a standstill. On the one hand, the chip gripper should be lowered at the highest speed possible so that the cycle time stays as short as possible. On the other hand, the chip gripper should strike the semiconductor chip with as little impulse as possible and therefore at lower speed so that the semiconductor chip is not damaged.
- Today, two methods are known in order to determine the height, designated as the z height, of the surface of the semiconductor chips when located on the foil or the height of the surface of the substrate. With the first method, instead of the chip gripper a measuring head is installed on the bondhead with which the z height at which the measuring head strikes the semiconductor chip or the substrate can be measured. With the second method, the current, which flows through the lowering drive of the bondhead, is monitored and a sudden increase in this current is interpreted as the striking of the chip gripper on the semiconductor chip or the substrate.
- The object of the invention is to further improve the process for picking the semiconductor chip from the foil.
- The picking of a semiconductor chip from a foil takes place by means of a chip gripper, which can be deflected on a bondhead in a predetermined direction designated as the z direction, and with the aid of a needle. The chip gripper bears pneumatically on the bondhead so that the pick force exerted by the chip gripper on the semiconductor chip is independent of the degree of deflection of the chip gripper. Furthermore, an inductive sensor is integrated into the bondhead for the precise measurement of the deflection of the chip gripper in z direction, ie, the z height of the chip gripper. The inductive sensor also serves as a touchdown sensor.
- The pick process in accordance with the invention distinguishes itself by the following steps:
- a) Lowering the chip gripper to a height z0 that is greater than the average height of the surface of the semiconductor chips so that the chip gripper does not yet touch the semiconductor chip;
- b) Raising the needle to a predetermined height z1, whereby the needle raises the semiconductor chip in order to bring the semiconductor chip into contact with the chip gripper and then to increase the z position of the chip gripper, and
- c) Raise the chip gripper whereby the semiconductor chip detaches itself from the needle.
- Each time a new foil with semiconductor chips is presented for processing, the height z0 is re-determined in an adjustment phase with the aid of the inductive sensor. The height is also designated as z position.
- In addition, with certain applications, at step c the chip gripper is moved away from the needle at the highest possible speed in order to avoid turning and/or shifting of the semiconductor chip.
- Furthermore, after step b, it is possible to measure the deflection of the chip gripper in relation to the bondhead and from this to determine the actual height of the surface of the picked semiconductor chip in order to continuously or periodically update the height z0.
- As the inductive sensor is integrated into the bondhead, the height z0 can be determined with very high accuracy. For this reason, in step a, it is also possible to lower the bondhead to a height z0 which is less than the average height zM of the surface of the semiconductor chips so that the chip gripper is deflected in relation to the bondhead on striking the semiconductor chip. However an adequate condition is that the chip gripper bears pneumatically on the bondhead. The distance by which the height z0 in this case is less than the height zM, which is designated as the overtravel distance, can be kept much lower than normal in prior art on the one hand because of the precise knowledge of the height zM and on the other hand because of the pneumatic bearing of the chip gripper which delivers a force independent of the degree of deflection. In this way, when the chip gripper strikes the semiconductor chip, the bondhead is already immediately before the end of the braking phase. As a result, the striking speed of the chip gripper and therefore the impact on the semiconductor chip is less than in prior art.
- The accompanying drawings, which are incorporated into and constitute a part of this specification, illustrate one or more embodiments of the present invention and, together with the detailed description, serve to explain the principles and implementations of the invention. The figures are not to scale.
- FIG. 1 is a front elevational diagram illustrating a first embodiment of a bondhead of a Die Bonder that has an integrated touchdown sensor.
- FIG. 2 is a characteristic curve of the touchdown sensor.
- FIG. 3 is a diagram illustrating the operation of an embodiment of the invention.
- FIGS. 4A, 4B and4C are snapshots illustrating motion of the bondhead.
- FIG. 5 is a diagram illustrating the operation of an embodiment of the invention.
- FIG. 6 is a front elevational diagram illustrating a second embodiment of a bondhead of a Die Bonder.
- FIG. 7 is a diagram illustrating the operating of an embodiement of the invention.
- FIG. 1 shows a first embodiment of a
bondhead 1 of a Die Bonder whereby only those components of thebondhead 1 are presented and described that are necessary for the understanding of the invention. Thebondhead 1 belongs to a Pick and Place system, that serves to pick semiconductor chips presented on a wafer table and to place them onto a substrate. With this embodiment, thebondhead 1 is lowered in a direction designated as z direction for picking the semiconductor chip, raised again, transported to the substrate and lowered again for placing the semiconductor chip onto the substrate. For the precise movement of thebondhead 1 in z direction, a not presented drive and a not presented measuring system for measuring the z position of thebondhead 1 are present. The drive can either lower and raise thebondhead 1 in z direction in relation to the Pick and Place system or it can lower and raise the entire Pick and Place system together with thebondhead 1 in z direction. Such a Pick and Place system is known, for example, from U.S. Pat. No. 6,185,815. Thebondhead 1 comprises achip gripper 2 that can be deflected in z direction in relation to the bondhead. Thechip gripper 2 consists of ametal shaft 3 at the lower end of which asuction organ 4 is attached to which vacuum can be applied. Thechip gripper 2 bears pneumatically, as frictionless as possible in thebondhead 1. Thebondhead 1 has ashaft 5 movable in z direction at the lower end of which amagnet 6 is attached so that thechip gripper 2 is secured to thebondhead 1 by means of magnetic force and can be exchanged in a simple manner. The upper end of theshaft 5 is secured to apiston 7, which is guided in acylindrical pressure chamber 8. A predetermined pressure p as well as overpressure/vacuum can be applied to thepressure chamber 8 via aconnector 9. The pneumatic bearing of thechip gripper 2 on thebondhead 1 produces a pick force independent of the degree of deflection of thechip gripper 2. When overpressure is applied to thepressure chamber 8, then thepiston 7 is pressed against thewall 10 serving as a stop. This limit stop of thepiston 7 and therefore also thechip gripper 2 is designated as the resting position of thechip gripper 2 in which thechip gripper 2 is not deflected in relation to thebondhead 1. - The
bondhead 1 has an integrated sensor, designated as touchdown sensor that consists of aplate 11 made of metal, for example aluminium, and anelectric coil 12. Thecoil 12, preferably a flat coil on a printed-circuit board formed from a spiral shaped printed conductor, is secured to thebondhead 1. Theplate 11 is secured to theshaft 5. The output signal of the inductive sensor is proportional to the distance between theplate 11 and thecoil 12. When thechip gripper 2 is deflected in relation to thebondhead 1, then theplate 11 moves with thechip gripper 2 while the position of thecoil 12 does not change. The distance between theplate 11 and thecoil 12 therefore reduces corresponding to the degree of deflection. Theshaft 5 is optionally rotatable on its longitudinal axis so that any rotation of the semiconductor chip can be corrected before placing onto the substrate. - The integration of the touchdown sensor on the bondhead in combination with the pneumatic bearing of the chip gripper on the bondhead offers advantages which have an effect on the picking of the semiconductor chip from the foil as well as on the placing of the semiconductor chip onto the substrate. In the following, different methods are described in more detail that concern the picking of the semiconductor chip from the foil.
- With these methods, as a rule an adjustment phase and an operating phase are foreseen. Each time a new foil with semiconductor chips for processing is presented on the wafer table, the operating phase is interrupted and the z height of the surface of the semiconductor chips is determined in an adjustment phase. Therefore, to begin with, an adjustment phase is carried out in order to determine a height zM that corresponds to the z height of the surface of the semiconductor chips. From the height zM a height z0 is derived that serves in the operating phase as a parameter for the lowering of the bondhead and enables an optimum z movement of the bondhead. This adjustment phase comprises the following steps:
- a) A semiconductor chip on the foil is selected and the wafer table brought into a position in which the selected semiconductor chip is located underneath the
chip gripper 2. - b) The
bondhead 1 is lowered to a predetermined z height at which thechip gripper 2 does not yet touch the semiconductor chip. An overpressure is applied to thepressure chamber 8 so that thepiston 7 rests on thewall 10 of thepressure chamber 8. Thechip gripper 2 is therefore in its resting position. The overpressure corresponds for example to the pick force desired in the following production phase. The output signal U of the inductive sensor is constant. - c) The
bondhead 1 is now lowered at a constant speed. As soon as thechip gripper 2 strikes the semiconductor chip, thechip gripper 2 stops while thebondhead 1 lowers further. Thechip gripper 2 is therefore deflected in relation to thebondhead 1 whereby the distance between theplate 11 and thecoil 12 of the inductive sensor reduces. During this phase c, the z height of thebondhead 1 and the output signal U of the inductive sensor are continuously detected and saved as value pairs (z1, U1) whereby the index i denotes a whole number. - d) As soon as the output signal of the inductive sensor reaches a predetermined value, the lowering of the
bondhead 1 stops and thebondhead 1 is raised again. - e) The value pairs (z1, U1) form a
characteristic curve 13 that typically shows the course presented in FIG. 2. From the value pairs (z1, U1) the height zM is now determined with customary mathematical methods. - The height z at which the
chip gripper 2 comes into physical contact with the semiconductor chip is designated as height zA. From FIG. 2, it can be seen that the output signal U does not diminish immediately from the height zA but only somewhat later because thesuction organ 4 itself contracts a little and the deflection of thechip gripper 2 in relation to thebondhead 1 only starts afterwards. The curvature of thecharacteristic curve 13 in the area of touchdown is characteristic for the type ofsuction organ 4 used. It is therefore preferably foreseen to determine a correction value zk for each type of suction organ and to store this on the Die Bonder so that when determining the height zM from the value pairs (z1, U1) the actual physical height zA of the upper surface of the semiconductor chip can be calculated thanks to knowledge of the correction value zk. - It is preferable to carry out the adjustment process for several different semiconductor chips in order to subsequently determine a height that is here also designated as height zM which is more characteristic of the detected height of the surface of the semiconductor chips on the foil.
- In the following, a simplified adjustment method is explained in order to determine the average z height of the surface of the semiconductor chips:
- a) A semiconductor chip on the foil is selected and the wafer table brought into a position in which the selected semiconductor chip is located underneath the
chip gripper 2. - b) The
bondhead 1 is lowered to a predetermined z height at which thechip gripper 2 does not yet touch the semiconductor chip. An overpressure is applied to thepressure chamber 8 so that thechip gripper 2 is in its resting position at which thepiston 7 rests on thewall 10 of thepressure chamber 8. The overpressure corresponds for example to the pick force desired during the following production phase. The output signal U of the inductive sensor is saved as the value U0. - c) The
bondhead 1 is now lowered at a constant speed. As soon as thechip gripper 2 strikes the semiconductor chip, thechip gripper 2 stops while thebondhead 1 lowers further. The output signal U of the inductive sensor therefore continuously diminishes. When the output signal U reaches the value U1=U0−ΔU, the z height of thebondhead 1 is read out as height zj, the lowering of thebondhead 1 stopped and thebondhead 1 raised again. - d) The z height of the surface of the semiconductor chip is determined from the height zj and the value ΔU under consideration of the
characteristic curve 13 of the sensor. - The simplified adjustment method is preferably carried out for several semiconductor chips and then the average height zM of the surface of the semiconductor chip determined.
- Subsequently, a height z0 is derived from the average height zM. The height z0 derived from the height zM is used in order to continually optimise the speed of the bondhead during lowering for the subsequent processing of the wafer so that, on the one hand, the time duration for lowering the bondhead up to standstill is as short as possible and that, on the other hand, the impact impulse, ie, the impulse with which the chip gripper impacts on the semiconductor chip, is small enough to exclude damage to the semiconductor chip, the chip gripper and/or the needle holder. The processing of the semiconductor chips can take place in various ways whereby the height z0 detected by means of the adjustment process plays a role now explained in more detail.
- Picking of the semiconductor chip from the foil takes place by means of the controlled combination of
bondhead 1,chip gripper 2 and a needle or a needle block with several needles in the following generally designated asneedle 14. FIG. 3 shows for the pick process the z height of the bondhead 1 (solid line 15), the z height of the chip gripper 2 (broken line 16) and the z height of the needle 14 (solid line 17) in the course of time t. The deflection of thechip gripper 2 with reference to thebondhead 1 is equal to the difference between thesolid line 15 and thebroken line 16. FIGS. 4A to 4C show different snapshots during the pick process. These figures show semiconductor chips 19 stuck to afoil 18 which are to be picked one after the other and placed onto a substrate, thebondhead 1, thechip gripper 2 and theneedle 14. Theneedle 14 is part of a not presented chip ejector (known in the trade as a die ejector). The chip ejector holds the underneath of thefoil 18 firmly during the pick process by means of vacuum. With this example, the height z0 is given by - z 0 =z M +Δz, (1)
- whereby the parameter Δz has a positive value.
- In a first phase that lasts up to the point in time t1, the
bondhead 1 is lowered at maximum speed, braked as late as possible and, without touching thesemiconductor chip 19, brought to a standstill at height z0. A predetermined overpressure is applied to thepressure chamber 8. Thechip gripper 2 is in its resting position as the overpressure prevailing in thepressure chamber 8 presses thepiston 7 against thewall 10. Thechip gripper 2 does not touch thesemiconductor chip 19. Theneedle 14 is raised so far that it just touches the underneath of thefoil 18. The z height of thefoil 18 is designated as zf. This condition is presented in FIG. 4A. - In a second phase that lasts from point in time t1 up to point in time t2, the
bondhead 1 remains at the height z0. Theneedle 14 is raised at a controlled speed until it reaches a predetermined height z1. In doing so, theneedle 14 penetrates thefoil 18 and raises thesemiconductor chip 19. Thesemiconductor chip 19 comes firstly into contact with thechip gripper 2 and then deflects thechip gripper 2 in relation to the bondhead 1: Thesemiconductor chip 19 is now clamped between thechip gripper 2 and theneedle 14. This condition is presented in FIG. 4B. The pick force exerted by thechip gripper 2 on thesemiconductor chip 19 is independent of the degree of deflection of thechip gripper 2 in relation to thebondhead 1 and is only dependent on the pressure prevailing in thepressure chamber 8. In this way, the deflection of thechip gripper 2 can be kept comparatively low. The value of parameter Δz should, on the one hand, be so large that, on lowering, thebondhead 1 does not touch thesemiconductor chip 19 or, when it does touch it momentarily as the result of overswing, that the force exerted on thesemiconductor chip 19 in any case remains less than the pick force. On the other hand, the parameter Δz should be so small that thesemiconductor chip 19 can not tilt on detaching from thefoil 18 by means of theneedle 14. - In a third phase that begins at point in time t2, the
bondhead 1 is raised again and then moved away in horizontal direction in order to place thesemiconductor chip 19 onto the substrate. In doing so, the deflection of thechip gripper 2 reduces continually. As soon as the deflection has reached the value of zero as is presented in FIG. 4C, thebondhead 1 takes thechip gripper 2 and thesemiconductor chip 19 upwards with it. - With the example shown in FIG. 3, the third phase only begins after the
needle 14 has reached its maximum height z1. The third phase can however be started earlier, namely as soon as the deflection of thechip gripper 2 has reached a predetermined minimum value and before theneedle 14 has reached its maximum height z1. It must only be ensured that thechip gripper 2 remains deflected in relation to thebondhead 1 until theneedle 14 has reached its maximum height z1. The point in time t2 at which thebondhead 1 is raised again can either be programmed as a fixed time or be derived from the signal delivered by the touchdown sensor during the second phase. That means, the touchdown sensor then triggers the point in time t2 at which thebondhead 1 is raised again. - With a further development of this method, that is explained based on FIG. 5, a further process step is foreseen that is carried out after the
needle 14 has reached its maximum height z, and before the deflection of thechip gripper 2 in relation to thebondhead 1 reaches the value zero. This process step consists of applying vacuum to thepressure chamber 8 as soon as thesemiconductor chip 19 has detached itself sufficiently from thefoil 18. In FIG. 5, this happens at point in time t3 at which theneedle 14 has already reached its set height z, but before the point in time t2 at which thebondhead 1 is raised again. This leads to thepiston 7 and therefore also thechip gripper 2 being moved away from theneedle 14 at considerably greater speed in comparison with the example according to FIG. 3, whereby thepiston 7 comes to stop at an upper stop of thebondhead 1. In doing so, detachment of thesemiconductor chip 19 from theneedle 14 is controlled and fast. This reduces the risk of thesemiconductor chip 19 shifting or turning on detaching from theneedle 14. - As the touchdown sensor is integrated into the
bondhead 1, each time asemiconductor chip 19 is picked it is possible to measure the deflection of thechip gripper 2 in relation to thebondhead 1 at a suitable point in time and to calculate from this the actual height zist of the surface of the picked semiconductor chip that it had before being picked. The suitable point in time is after the point in time t1 when, on the one hand, the bondhead comes to a standstill at height z0 and, on the other hand, theneedle 14 has reached its set height z1. The extent of deflection of thechip gripper 2 is dependent on the actual height z0 occupied by thebondhead 1. The height z0 can now be updated at specific points in time in that a new value z0′ is calculated for the set height: - z 0 ′=z ist +ΔZ. (2)
- Updating of the height z0 based on the value z0′ is preferably done by means of methods customary in statistics so that a possible individual faulty measurement does not lead to a deterioration of the pick process.
- With a further method designated as overtravel, the height z0 is determined so that it is less by a predetermined overtravel distance Δz1 than the average height zM of the surface of the semiconductor chip: z0=zM−Δz1. The overtravel distance Δz1 is selected so that the height z0 is lower than the least expected height of the surface of the semiconductor chips 19. The
bondhead 1 is lowered at maximum speed and brought to a standstill at height z0. From the point in time of impact on thesemiconductor chip 19 thechip gripper 2 is increasingly deflected in relation to thebondhead 1 and exerts the pick force defined by the pressure applied in thepressure chamber 8 on thesemiconductor chip 19. The improved knowledge of the z height of the surface of the semiconductor chips 19 and the position independent pick force as a result of the pneumatic bearing of thechip gripper 2 make it possible to keep the overtravel distance Δz1 much smaller than with prior art. A smaller overtravel distance Δz1 means that thechip gripper 2 only impacts in the very last phase of lowering onto thesemiconductor chip 19 where thebondhead 1 is already strongly braked and its speed on impact is very low. - With the examples described up to now, the lowering of the
chip gripper 2 takes place indirectly during the process step a in that thechip gripper 2 is brought into a limit position, namely its resting position, with reference to thebondhead 1 and thebondhead 1 or the entire Pick and Place system with thebondhead 1 is lowered. With the following example however, thebondhead 1 is not movable in the z direction. For this, a drive is present that directly controls the z position of thechip gripper 2. - FIG. 6 shows a
bondhead 1 with a pneumatic drive for thechip gripper 2. With this embodiment, thecoil 12 is located underneath themetallic plate 11. The pneumatic drive comprises twopressure chambers valve system 22 that is supplied with compressed air. Thevalve system 22 is controlled by aregulator 23. The inductive sensor comprising themetallic plate 11 and thecoil 12 not only serves as touchdown sensor but as displacement sensor for measurement of the deflection of thechip gripper 2 in z direction with reference to the stationary arrangedbondhead 1. Afirst pressure sensor 24 serves the measurement of the pressure p1 prevailing in thefirst pressure chamber 20, asecond pressure sensor 25 serves the measurement of the pressure p2 prevailing in thesecond pressure chamber 21. The output signals of the inductive sensor or the twopressure sensors regulator 23 as input values. Theregulator 23 delivers control signals for control of thevalve system 22. Theregulator 23 works in two operating modes. In the first operating mode, the deflection of thechip gripper 2, ie, the z position, or a value derived from it is controlled. The inductive sensor delivers a signal proportional to the deflection zist(t) as a function of time t and theregulator 23 controls the valves of thevalve system 22 according to a given characteristic zsoll(t). In the second operating mode, the pressure difference p1-p2 is controlled that produces the bond force to be applied by thechip gripper 2. Further information on such a bondhead can be taken from the European patent application No. 01204781.7 to which explicit reference is made herewith. - In the following, it is now described based on FIG. 7 how the pick process is carried out with this
bondhead 1. The height z0 is again given by the equation (1). Thebroken line 16 shows the course in time of the z height of thechip gripper 2. Thesolid line 17 shows the course in time of the z height of theneedle 14. - In the first phase, which lasts up to point in time t1, the
chip gripper 2 is lowered at maximum speed, braked as late as possible and, without touching thesemiconductor chip 19, brought to a standstill at height z0. In doing so, theregulator 23 works in the first operating mode in which it controls the deflection of thechip gripper 2, ie, the z position or a value derived from it. The needle 14 (FIG. 4A) is raised so far that it just touches the underneath of thefoil 18. - In the second phase, which lasts from point in time t1 up to point in time t4, the
chip gripper 2 firstly remains at height z0. Theneedle 14 is raised at a controlled speed until it reaches a predetermined height z1. In doing so, theneedle 14 penetrates thefoil 18 and raises thesemiconductor chip 19. At point in time t4, thesemiconductor chip 19 firstly comes into contact with thechip gripper 2 and then deflects thechip gripper 2 in relation to the bondhead 1: Thesemiconductor chip 19 is now clamped between thechip gripper 2 and theneedle 14. As soon as thechip gripper 2 is deflected in relation to thebondhead 1, the output signal of the inductive sensor changes whereupon theregulator 23 has to increase the pressure p1 prevailing in thefirst pressure chamber 20 in order to continue to keep the z height of thechip gripper 2 constantly at the height z0. While however, on the other hand theneedle 14 has to reach the height z1, a change in the z height of thechip gripper 2 has to be possible and allowed. This can be made possible in different ways. - A first possibility exists in limiting the maximum allowed pressure difference p1-p2 and in fact to a value that corresponds to the pick force to be applied. The
regulator 23 therefore continues to work in the first operating mode whereby the allowed pressure difference p1-p2 is limited either from the point in time t1 at which thechip gripper 2 has reached the height z0 or from the point in time at which theneedle 14 is raised. (During lowering of the chip gripper the pressure difference p1-p2 does not have to be limited.) Theregulator 23 tries to hold thechip gripper 2 at the height z0. But, because the pressure difference p1-p2 is limited to the pick force, it is not able to withstand the force of theneedle 14. Thechip gripper 2 is therefore raised. - A second possibility exists in switching the
regulator 23 from the first operating mode to the second operating mode as soon as, after starting to raise theneedle 14, the output signal of the inductive sensor changes by more than a predetermined value which can be interpreted as the start of deflection of thechip gripper 2. In the second operating mode, the pressure difference p1-p2 is controlled corresponding to the pick force to be applied. - In the third phase which begins at point in time t3, vacuum is applied to pressure
chamber 20 and overpressure is applied to pressurechamber 21 in order to abruptly raise thechip gripper 2 until thepiston 7 is controlled at an upper position or comes to rest at an upper limit stop whereby thesemiconductor chip 19 detaches itself from theneedle 14 and then thebondhead 1 moves away in horizontal direction in order to place thesemiconductor chip 19 onto the substrate. In doing so, theregulator 23 works either in the first operating mode in which it controls the z position of thechip gripper 2 or in the second operating mode in which the pressure difference p1-p2 is controlled so that thechip gripper 2 is moved upwards until thepiston 7 is stopped at an upper limit stop. - While embodiments and applications of this invention have been shown and described, it would be apparent to those skilled in the art having the benefit of this disclosure that many more modifications than mentioned above are possible without departing from the inventive concepts herein. The invention, therefore, is not to be restricted except in the spirit of the appended claims and their equivalents.
Claims (20)
1. A method for picking a semiconductor chip from a foil whereby the semiconductor chip is picked by a chip gripper that bears movably in a z direction on a bondhead and whereby the detaching of the semiconductor chip from the foil takes place with the aid of a needle, the method comprising the following steps:
a) Lowering the chip gripper to a position z0 that is greater than an average height of the surface of the semiconductor chips so that the chip gripper does not yet touch the semiconductor chip,
b) Raising the needle to a predetermined position z1, whereby the needle raises the semiconductor chip in order to bring the semiconductor chip into contact with the chip gripper and then to increase the z position of the chip gripper, and
c) Raising the chip gripper, whereby the semiconductor chip detaches itself from the needle.
2. A method according to claim 1 , wherein the chip gripper is connected to a piston bearing pneumatically on the bondhead and movable in z direction, whereby the position of the piston and with it the z position of the chip gripper is controlled by means of a pressure prevailing in a pressure chamber, wherein a drive is present in order to move the bondhead in the z direction, whereby in step a, a predetermined pressure is applied to the pressure chamber so that the chip gripper takes up a limit position, whereby in step a, the bondhead is lowered and whereby in step b the raising of the needle has the effect that the chip gripper is moved out of the limit position.
3. A method according to claim 2 , wherein in step c, vacuum is applied to the pressure chamber in order to abruptly detach the semiconductor chip from the needle.
4. A method according to claim 1 with which the bondhead is arranged stationary with reference to the z direction and with which the chip gripper is movable in the z direction by means of a pneumatic drive formed by two pressure chambers and a piston.
5. A method according to claim 1 , wherein the z position of the chip gripper is measured after the step b in order to determine the actual z height of the surface of the picked semiconductor chip and wherein the position z0 is updated at specific points in time.
6. A method according to claim 2 , wherein the z position of the chip gripper is measured after the step b in order to determine the actual z height of the surface of the picked semiconductor chip and wherein the position z0 is updated at specific points in time.
7. A method according to claim 3 , wherein the z position of the chip gripper is measured after the step b in order to determine the actual z height of the surface of the picked semiconductor chip and wherein the position z0 is updated at specific points in time.
8. A method according to claim 4 , wherein the z position of the chip gripper is measured after the step b in order to determine the actual z height of the surface of the picked semiconductor chip and wherein the position z0 is updated at specific points in time.
9. A method according to claim 5 , wherein the z position of the chip gripper is measured by means of an inductive sensor integrated into the bondhead.
10. A method according to claim 6 , wherein the z position of the chip gripper is measured by means of an inductive sensor integrated into the bondhead.
11. A method according to claim 7 , wherein the z position of the chip gripper is measured by means of an inductive sensor integrated into the bondhead.
12. A method according to claim 8 , wherein the z position of the chip gripper is measured by means of an inductive sensor integrated into the bondhead.
13. A method according to claim 1 , wherein in step a, the lowering of the chip gripper to a position z0 takes place that is less than an average height of the surface of the semiconductor chips so that, on impact on the semiconductor chip, the chip gripper is deflected in relation to the bondhead, wherein the chip gripper bears pneumatically on the bondhead and wherein a sensor is integrated into the bondhead for measuring the z position of the chip gripper.
14. A method according to claim 2 , wherein in step a, the lowering of the chip gripper to a position z0 takes place that is less than an average height of the surface of the semiconductor chips so that, on impact on the semiconductor chip, the chip gripper is deflected in relation to the bondhead, wherein the chip gripper bears pneumatically on the bondhead and wherein a sensor is integrated into the bondhead for measuring the z position of the chip gripper.
15. A method according to claim 3 , wherein in step a, the lowering of the chip gripper to a position z0 takes place that is less than an average height of the surface of the semiconductor chips so that, on impact on the semiconductor chip, the chip gripper is deflected in relation to the bondhead, wherein the chip gripper bears pneumatically on the bondhead and wherein a sensor is integrated into the bondhead for measuring the z position of the chip gripper.
16. A method according to claim 4 , wherein in step a, the lowering of the chip gripper to a position z0 takes place that is less than an average height of the surface of the semiconductor chips so that, on impact on the semiconductor chip, the chip gripper is deflected in relation to the bondhead, wherein the chip gripper bears pneumatically on the bondhead and wherein a sensor is integrated into the bondhead for measuring the z position of the chip gripper.
17. A method according to claim 5 , wherein in step a, the lowering of the chip gripper to a position z0 takes place that is less than an average height of the surface of the semiconductor chips so that, on impact on the semiconductor chip, the chip gripper is deflected in relation to the bondhead, wherein the chip gripper bears pneumatically on the bondhead and wherein a sensor is integrated into the bondhead for measuring the z position of the chip gripper.
18. A method according to claim 6 , wherein in step a, the lowering of the chip gripper to a position z0 takes place that is less than an average height of the surface of the semiconductor chips so that, on impact on the semiconductor chip, the chip gripper is deflected in relation to the bondhead, wherein the chip gripper bears pneumatically on the bondhead and wherein a sensor is integrated into the bondhead for measuring the z position of the chip gripper.
19. A method according to claim 7 , wherein in step a, the lowering of the chip gripper to a position z0 takes place that is less than an average height of the surface of the semiconductor chips so that, on impact on the semiconductor chip, the chip gripper is deflected in relation to the bondhead, wherein the chip gripper bears pneumatically on the bondhead and wherein a sensor is integrated into the bondhead for measuring the z position of the chip gripper.
20. A method according to claim 8 , wherein in step a, the lowering of the chip gripper to a position z0 takes place that is less than an average height of the surface of the semiconductor chips so that, on impact on the semiconductor chip, the chip gripper is deflected in relation to the bondhead, wherein the chip gripper bears pneumatically on the bondhead and wherein a sensor is integrated into the bondhead for measuring the z position of the chip gripper.
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
CH20022022/02 | 2002-11-29 | ||
CH20222002 | 2002-11-29 |
Publications (1)
Publication Number | Publication Date |
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US20040105750A1 true US20040105750A1 (en) | 2004-06-03 |
Family
ID=32331834
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
US10/719,829 Abandoned US20040105750A1 (en) | 2002-11-29 | 2003-11-20 | Method for picking semiconductor chips from a foil |
Country Status (5)
Country | Link |
---|---|
US (1) | US20040105750A1 (en) |
KR (1) | KR20040047628A (en) |
CN (1) | CN1505122A (en) |
DE (1) | DE10356700A1 (en) |
TW (1) | TW200414992A (en) |
Cited By (7)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US20050224965A1 (en) * | 2004-04-13 | 2005-10-13 | Unaxis International Trading Ltd | Method for detaching a semiconductor chip from a foil and apparatus for mounting semiconductor chips |
US20060118602A1 (en) * | 2004-12-06 | 2006-06-08 | Unaxis International Trading Ltd. | Method for mounting a semiconductor chip onto a substrate |
EP1775753A2 (en) * | 2005-10-14 | 2007-04-18 | ASM Technology Singapore Pte Ltd. | Lightweight bondhead assembly |
WO2009056469A1 (en) * | 2007-10-31 | 2009-05-07 | Oerlikon Assembly Equipment Ag, Steinhausen | Foil perforating needle for detaching a small die from a foil |
US20100107405A1 (en) * | 2008-11-05 | 2010-05-06 | Esec Ag | Die-Ejector |
US20110214819A1 (en) * | 2008-11-12 | 2011-09-08 | Esec Ag | Method For Detaching And Removing A Semiconductor Chip From A Foil |
WO2024018296A1 (en) * | 2022-07-20 | 2024-01-25 | Ismeca Semiconductor Holding Sa | A sensor assembly, a component handling assembly, and a method of delivering a component |
Citations (13)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US4494902A (en) * | 1981-07-29 | 1985-01-22 | U.S. Philips Corporation | Method of and device for feeding electric and/or electronic elements to given positions |
US4715264A (en) * | 1985-02-22 | 1987-12-29 | Kurt Stoll | Piston and cylinder unit |
US5351872A (en) * | 1992-06-24 | 1994-10-04 | Kabushiki Kaisha Toshiba | Die bonding apparatus |
US5458388A (en) * | 1994-08-03 | 1995-10-17 | Universal Instruments Incorporated | Replaceable nozzle tip with vacuum actuated mechanical gripping fingers |
US6185815B1 (en) * | 1997-12-07 | 2001-02-13 | Esec Sa | Semiconductor mounting apparatus with a chip gripper travelling back and forth |
US6250538B1 (en) * | 1999-04-30 | 2001-06-26 | Siemens Aktiengesellschaft | Method and apparatus for mounting electrical components that employs a compensation element |
US6494667B1 (en) * | 1996-02-26 | 2002-12-17 | Matsushita Electric Industrial Co., Ltd. | Component suction method |
US6505397B1 (en) * | 1999-06-17 | 2003-01-14 | Kabushiki Kaisha Shinkawa | Die holding mechanism for a die with connecting wires thereon |
US20030101576A1 (en) * | 2001-12-05 | 2003-06-05 | Esec Trading Sa, A Swiss Corporation | Apparatus for mounting semiconductor chips |
US6616031B2 (en) * | 2001-07-17 | 2003-09-09 | Asm Assembly Automation Limited | Apparatus and method for bond force control |
US6648215B2 (en) * | 2000-09-12 | 2003-11-18 | Esec Trading Sa | Method and apparatus for mounting semiconductor chips |
US6727162B2 (en) * | 2001-12-06 | 2004-04-27 | Infineon Technologies Ag | Semiconductor chip assembly system with a suction nipple for removing a semiconductor chip |
US20050061852A1 (en) * | 2003-09-22 | 2005-03-24 | Stefan Behler | Method for aligning the bondhead of a die bonder |
-
2003
- 2003-11-20 US US10/719,829 patent/US20040105750A1/en not_active Abandoned
- 2003-11-20 TW TW092132540A patent/TW200414992A/en unknown
- 2003-11-25 KR KR1020030083974A patent/KR20040047628A/en not_active Application Discontinuation
- 2003-11-28 CN CNA200310118834A patent/CN1505122A/en active Pending
- 2003-11-28 DE DE10356700A patent/DE10356700A1/en not_active Ceased
Patent Citations (14)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US4494902A (en) * | 1981-07-29 | 1985-01-22 | U.S. Philips Corporation | Method of and device for feeding electric and/or electronic elements to given positions |
US4715264A (en) * | 1985-02-22 | 1987-12-29 | Kurt Stoll | Piston and cylinder unit |
US5351872A (en) * | 1992-06-24 | 1994-10-04 | Kabushiki Kaisha Toshiba | Die bonding apparatus |
US5458388A (en) * | 1994-08-03 | 1995-10-17 | Universal Instruments Incorporated | Replaceable nozzle tip with vacuum actuated mechanical gripping fingers |
US6494667B1 (en) * | 1996-02-26 | 2002-12-17 | Matsushita Electric Industrial Co., Ltd. | Component suction method |
US6185815B1 (en) * | 1997-12-07 | 2001-02-13 | Esec Sa | Semiconductor mounting apparatus with a chip gripper travelling back and forth |
US6250538B1 (en) * | 1999-04-30 | 2001-06-26 | Siemens Aktiengesellschaft | Method and apparatus for mounting electrical components that employs a compensation element |
US6505397B1 (en) * | 1999-06-17 | 2003-01-14 | Kabushiki Kaisha Shinkawa | Die holding mechanism for a die with connecting wires thereon |
US6760968B2 (en) * | 1999-06-17 | 2004-07-13 | Kabushiki Kaisha Shinkawa | Die packing device |
US6648215B2 (en) * | 2000-09-12 | 2003-11-18 | Esec Trading Sa | Method and apparatus for mounting semiconductor chips |
US6616031B2 (en) * | 2001-07-17 | 2003-09-09 | Asm Assembly Automation Limited | Apparatus and method for bond force control |
US20030101576A1 (en) * | 2001-12-05 | 2003-06-05 | Esec Trading Sa, A Swiss Corporation | Apparatus for mounting semiconductor chips |
US6727162B2 (en) * | 2001-12-06 | 2004-04-27 | Infineon Technologies Ag | Semiconductor chip assembly system with a suction nipple for removing a semiconductor chip |
US20050061852A1 (en) * | 2003-09-22 | 2005-03-24 | Stefan Behler | Method for aligning the bondhead of a die bonder |
Cited By (16)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US20050224965A1 (en) * | 2004-04-13 | 2005-10-13 | Unaxis International Trading Ltd | Method for detaching a semiconductor chip from a foil and apparatus for mounting semiconductor chips |
US7238593B2 (en) | 2004-04-13 | 2007-07-03 | Unaxis International Trading Ltd. | Method for detaching a semiconductor chip from a foil and device for mounting semiconductor chips |
US20070228539A1 (en) * | 2004-04-13 | 2007-10-04 | Unaxis International Trading Ltd., A Swiss Corporation | Method for detaching a semiconductor chip from a foil and device for mounting semiconductor chips |
US7719125B2 (en) | 2004-04-13 | 2010-05-18 | Unaxis International Trading Ltd. | Method for detaching a semiconductor chip from a foil and device for mounting semiconductor chips |
US20060118602A1 (en) * | 2004-12-06 | 2006-06-08 | Unaxis International Trading Ltd. | Method for mounting a semiconductor chip onto a substrate |
US7407084B2 (en) | 2004-12-06 | 2008-08-05 | Unaxis Trading Ltd | Method for mounting a semiconductor chip onto a substrate |
EP1775753A2 (en) * | 2005-10-14 | 2007-04-18 | ASM Technology Singapore Pte Ltd. | Lightweight bondhead assembly |
EP1775753A3 (en) * | 2005-10-14 | 2009-01-07 | ASM Technology Singapore Pte Ltd. | Lightweight bondhead assembly |
US20090271978A1 (en) * | 2007-10-31 | 2009-11-05 | Oerlikon Assembly Equipment Ag, Steinhausen | Foil Perforating Needle For Detaching A Small Die From The Foil |
WO2009056469A1 (en) * | 2007-10-31 | 2009-05-07 | Oerlikon Assembly Equipment Ag, Steinhausen | Foil perforating needle for detaching a small die from a foil |
US20100107405A1 (en) * | 2008-11-05 | 2010-05-06 | Esec Ag | Die-Ejector |
EP2184765A1 (en) | 2008-11-05 | 2010-05-12 | Esec AG | Die-ejector |
US8250742B2 (en) | 2008-11-05 | 2012-08-28 | Esec Ag | Die ejector |
US20110214819A1 (en) * | 2008-11-12 | 2011-09-08 | Esec Ag | Method For Detaching And Removing A Semiconductor Chip From A Foil |
US8715457B2 (en) | 2008-11-12 | 2014-05-06 | Esec Ag | Method for detaching and removing a semiconductor chip from a foil |
WO2024018296A1 (en) * | 2022-07-20 | 2024-01-25 | Ismeca Semiconductor Holding Sa | A sensor assembly, a component handling assembly, and a method of delivering a component |
Also Published As
Publication number | Publication date |
---|---|
CN1505122A (en) | 2004-06-16 |
DE10356700A1 (en) | 2004-07-01 |
TW200414992A (en) | 2004-08-16 |
KR20040047628A (en) | 2004-06-05 |
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