US20040087045A1 - Etching method and etching signal layer for processing semiconductor wafers - Google Patents
Etching method and etching signal layer for processing semiconductor wafers Download PDFInfo
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- US20040087045A1 US20040087045A1 US10/653,596 US65359603A US2004087045A1 US 20040087045 A1 US20040087045 A1 US 20040087045A1 US 65359603 A US65359603 A US 65359603A US 2004087045 A1 US2004087045 A1 US 2004087045A1
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- etching
- layer
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- signal layer
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- 238000005530 etching Methods 0.000 title claims abstract description 289
- 238000000034 method Methods 0.000 title claims abstract description 214
- 239000004065 semiconductor Substances 0.000 title claims description 20
- 235000012431 wafers Nutrition 0.000 title claims description 15
- 230000008569 process Effects 0.000 claims abstract description 153
- 239000000758 substrate Substances 0.000 claims abstract description 61
- 239000000463 material Substances 0.000 claims abstract description 41
- 230000008021 deposition Effects 0.000 claims abstract description 12
- 229910052710 silicon Inorganic materials 0.000 claims abstract description 12
- 239000010703 silicon Substances 0.000 claims abstract description 12
- 229910044991 metal oxide Inorganic materials 0.000 claims abstract description 10
- 150000004706 metal oxides Chemical class 0.000 claims abstract description 10
- 238000000151 deposition Methods 0.000 claims description 14
- 229910052581 Si3N4 Inorganic materials 0.000 claims description 11
- HQVNEWCFYHHQES-UHFFFAOYSA-N silicon nitride Chemical compound N12[Si]34N5[Si]62N3[Si]51N64 HQVNEWCFYHHQES-UHFFFAOYSA-N 0.000 claims description 11
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 claims description 9
- 229910052814 silicon oxide Inorganic materials 0.000 claims description 8
- 238000005137 deposition process Methods 0.000 claims description 6
- 238000005498 polishing Methods 0.000 claims description 6
- 239000002800 charge carrier Substances 0.000 claims description 5
- MCMNRKCIXSYSNV-UHFFFAOYSA-N Zirconium dioxide Chemical compound O=[Zr]=O MCMNRKCIXSYSNV-UHFFFAOYSA-N 0.000 claims description 4
- 230000008859 change Effects 0.000 claims description 4
- 238000001514 detection method Methods 0.000 claims description 4
- 230000000694 effects Effects 0.000 claims description 4
- 238000001451 molecular beam epitaxy Methods 0.000 claims description 4
- ZKATWMILCYLAPD-UHFFFAOYSA-N niobium pentoxide Chemical compound O=[Nb](=O)O[Nb](=O)=O ZKATWMILCYLAPD-UHFFFAOYSA-N 0.000 claims description 4
- CJNBYAVZURUTKZ-UHFFFAOYSA-N hafnium(IV) oxide Inorganic materials O=[Hf]=O CJNBYAVZURUTKZ-UHFFFAOYSA-N 0.000 claims description 2
- MRELNEQAGSRDBK-UHFFFAOYSA-N lanthanum oxide Inorganic materials [O-2].[O-2].[O-2].[La+3].[La+3] MRELNEQAGSRDBK-UHFFFAOYSA-N 0.000 claims description 2
- KTUFCUMIWABKDW-UHFFFAOYSA-N oxo(oxolanthaniooxy)lanthanum Chemical compound O=[La]O[La]=O KTUFCUMIWABKDW-UHFFFAOYSA-N 0.000 claims description 2
- -1 Pr2O5 Inorganic materials 0.000 claims 1
- PNEYBMLMFCGWSK-UHFFFAOYSA-N aluminium oxide Inorganic materials [O-2].[O-2].[O-2].[Al+3].[Al+3] PNEYBMLMFCGWSK-UHFFFAOYSA-N 0.000 claims 1
- 229910052593 corundum Inorganic materials 0.000 claims 1
- 238000010438 heat treatment Methods 0.000 claims 1
- PBCFLUZVCVVTBY-UHFFFAOYSA-N tantalum pentoxide Inorganic materials O=[Ta](=O)O[Ta](=O)=O PBCFLUZVCVVTBY-UHFFFAOYSA-N 0.000 claims 1
- 229910001845 yogo sapphire Inorganic materials 0.000 claims 1
- 238000012876 topography Methods 0.000 abstract 1
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 10
- TWNQGVIAIRXVLR-UHFFFAOYSA-N oxo(oxoalumanyloxy)alumane Chemical compound O=[Al]O[Al]=O TWNQGVIAIRXVLR-UHFFFAOYSA-N 0.000 description 7
- 238000001020 plasma etching Methods 0.000 description 6
- 238000007517 polishing process Methods 0.000 description 4
- 239000000126 substance Substances 0.000 description 4
- 238000003631 wet chemical etching Methods 0.000 description 4
- 238000003486 chemical etching Methods 0.000 description 3
- 238000001312 dry etching Methods 0.000 description 3
- 238000005516 engineering process Methods 0.000 description 3
- 239000002245 particle Substances 0.000 description 3
- HBMJWWWQQXIZIP-UHFFFAOYSA-N silicon carbide Chemical compound [Si+]#[C-] HBMJWWWQQXIZIP-UHFFFAOYSA-N 0.000 description 3
- 229910010271 silicon carbide Inorganic materials 0.000 description 3
- 230000001360 synchronised effect Effects 0.000 description 3
- 238000000231 atomic layer deposition Methods 0.000 description 2
- 230000004888 barrier function Effects 0.000 description 2
- 238000004519 manufacturing process Methods 0.000 description 2
- 238000010297 mechanical methods and process Methods 0.000 description 2
- 230000005226 mechanical processes and functions Effects 0.000 description 2
- 230000004048 modification Effects 0.000 description 2
- 238000012986 modification Methods 0.000 description 2
- BPUBBGLMJRNUCC-UHFFFAOYSA-N oxygen(2-);tantalum(5+) Chemical compound [O-2].[O-2].[O-2].[O-2].[O-2].[Ta+5].[Ta+5] BPUBBGLMJRNUCC-UHFFFAOYSA-N 0.000 description 2
- 238000000623 plasma-assisted chemical vapour deposition Methods 0.000 description 2
- 238000005496 tempering Methods 0.000 description 2
- 230000006978 adaptation Effects 0.000 description 1
- 229910052782 aluminium Inorganic materials 0.000 description 1
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 description 1
- 229910021417 amorphous silicon Inorganic materials 0.000 description 1
- 229910021486 amorphous silicon dioxide Inorganic materials 0.000 description 1
- 239000007795 chemical reaction product Substances 0.000 description 1
- 239000003795 chemical substances by application Substances 0.000 description 1
- 239000011248 coating agent Substances 0.000 description 1
- 238000000576 coating method Methods 0.000 description 1
- 238000010276 construction Methods 0.000 description 1
- 239000013078 crystal Substances 0.000 description 1
- 229910021419 crystalline silicon Inorganic materials 0.000 description 1
- 239000002019 doping agent Substances 0.000 description 1
- 229910000449 hafnium oxide Inorganic materials 0.000 description 1
- WIHZLLGSGQNAGK-UHFFFAOYSA-N hafnium(4+);oxygen(2-) Chemical compound [O-2].[O-2].[Hf+4] WIHZLLGSGQNAGK-UHFFFAOYSA-N 0.000 description 1
- 238000002513 implantation Methods 0.000 description 1
- 238000010884 ion-beam technique Methods 0.000 description 1
- 150000002500 ions Chemical class 0.000 description 1
- 238000000691 measurement method Methods 0.000 description 1
- 229910052751 metal Inorganic materials 0.000 description 1
- 239000002184 metal Substances 0.000 description 1
- 229910021421 monocrystalline silicon Inorganic materials 0.000 description 1
- 230000000149 penetrating effect Effects 0.000 description 1
- 229920002120 photoresistant polymer Polymers 0.000 description 1
- 230000009467 reduction Effects 0.000 description 1
- 230000004044 response Effects 0.000 description 1
- 229910021332 silicide Inorganic materials 0.000 description 1
- 150000003377 silicon compounds Chemical class 0.000 description 1
- 235000012239 silicon dioxide Nutrition 0.000 description 1
- 239000000377 silicon dioxide Substances 0.000 description 1
- 239000011343 solid material Substances 0.000 description 1
- 229910001936 tantalum oxide Inorganic materials 0.000 description 1
- 238000007704 wet chemistry method Methods 0.000 description 1
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- H01L21/02112—Forming insulating materials on a substrate characterised by the type of layer, e.g. type of material, porous/non-porous, pre-cursors, mixtures or laminates characterised by the material of the layer
- H01L21/02172—Forming insulating materials on a substrate characterised by the type of layer, e.g. type of material, porous/non-porous, pre-cursors, mixtures or laminates characterised by the material of the layer the material containing at least one metal element, e.g. metal oxides, metal nitrides, metal oxynitrides or metal carbides
- H01L21/02175—Forming insulating materials on a substrate characterised by the type of layer, e.g. type of material, porous/non-porous, pre-cursors, mixtures or laminates characterised by the material of the layer the material containing at least one metal element, e.g. metal oxides, metal nitrides, metal oxynitrides or metal carbides characterised by the metal
- H01L21/02178—Forming insulating materials on a substrate characterised by the type of layer, e.g. type of material, porous/non-porous, pre-cursors, mixtures or laminates characterised by the material of the layer the material containing at least one metal element, e.g. metal oxides, metal nitrides, metal oxynitrides or metal carbides characterised by the metal the material containing aluminium, e.g. Al2O3
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- H01L21/02175—Forming insulating materials on a substrate characterised by the type of layer, e.g. type of material, porous/non-porous, pre-cursors, mixtures or laminates characterised by the material of the layer the material containing at least one metal element, e.g. metal oxides, metal nitrides, metal oxynitrides or metal carbides characterised by the metal
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- H01L21/18—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer the devices having semiconductor bodies comprising elements of Group IV of the Periodic Table or AIIIBV compounds with or without impurities, e.g. doping materials
- H01L21/28—Manufacture of electrodes on semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/268
- H01L21/28008—Making conductor-insulator-semiconductor electrodes
- H01L21/28017—Making conductor-insulator-semiconductor electrodes the insulator being formed after the semiconductor body, the semiconductor being silicon
- H01L21/28026—Making conductor-insulator-semiconductor electrodes the insulator being formed after the semiconductor body, the semiconductor being silicon characterised by the conductor
- H01L21/28035—Making conductor-insulator-semiconductor electrodes the insulator being formed after the semiconductor body, the semiconductor being silicon characterised by the conductor the final conductor layer next to the insulator being silicon, e.g. polysilicon, with or without impurities
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- H01L21/28061—Making conductor-insulator-semiconductor electrodes the insulator being formed after the semiconductor body, the semiconductor being silicon characterised by the conductor the final conductor layer next to the insulator being silicon, e.g. polysilicon, with or without impurities the conductor comprising at least another non-silicon conductive layer the conductor comprising a metal or metal silicide formed by deposition, e.g. sputter deposition, i.e. without a silicidation reaction
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- H01L21/30—Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/26
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- H01L21/3105—After-treatment
- H01L21/311—Etching the insulating layers by chemical or physical means
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- H01L21/31133—Etching organic layers by chemical means
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- H01L21/30—Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/26
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- H01L21/316—Inorganic layers composed of oxides or glassy oxides or oxide based glass
- H01L21/31604—Deposition from a gas or vapour
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- H01L21/30—Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/26
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- H01L21/31604—Deposition from a gas or vapour
- H01L21/31616—Deposition of Al2O3
- H01L21/3162—Deposition of Al2O3 on a silicon body
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- H01L21/768—Applying interconnections to be used for carrying current between separate components within a device comprising conductors and dielectrics
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- H01L21/76822—Modification of the material of dielectric layers, e.g. grading, after-treatment to improve the stability of the layers, to increase their density etc.
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- H01L29/4941—Metal-insulator-semiconductor electrodes, e.g. gates of MOSFET the conductor material next to the insulator being a silicon layer, e.g. polysilicon doped with boron, phosphorus or nitrogen with a multiple layer structure, e.g. several silicon layers with different crystal structure or grain arrangement with a barrier layer between the silicon and the metal or metal silicide upper layer, e.g. Silicide/TiN/Polysilicon
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Definitions
- the invention relates to an etching method for removing material in the course of processing semiconductor wafers.
- the method includes providing a semiconductor wafer as a substrate, providing an etching signal layer at least on sections of one substrate surface of the substrate, providing a process layer at least on sections of the etching signal layer, and removing at least sections of the process layer in the course of an etching process.
- An etching signal is produced upon an exposure of sections of the etching signal layer that are located underneath the removed sections of the process layer.
- the etching process is ended as a function of the etching signal.
- the invention also relates to an etching signal layer.
- the processing of semiconductor wafers generally includes two or more process steps with etching processes, by which either layers are removed over the entire surface, or mask patterns that are produced lithographically are transferred to layers or structures located underneath them.
- Isotropic etching processes for example wet-chemical etching, remove material independently of the direction while anisotropic etching processes such as RIE and CMP in contrast remove the material in a preferred direction.
- the etching processes generally stop at etching stop layers.
- the etching stop layers are in each case provided from a material which does not recede as a result of the respectively used etching process, or which recedes at an etching rate which is very slow in comparison with that of the material to be removed.
- the material of the etching stop layer and/or of the etching stop signal layer is chosen such that the etching process for the material to be removed is as selective as possible with respect to the material of the etching stop layer and of the etching stop signal layer.
- silicon, silicon oxide (SiO 2 ) and silicon nitride (Si 3 N 4 ) and silicides can in principle be etched selectively. If materials containing silicon are provided as etching stop layers with respect to one another, then the etching stop layers are also attacked by the etching process and must be provided with a sufficient layer thickness in order to reliably prevent the etching process from penetrating into the material which is located under the etching stop layer.
- silicon nitride is used as the etching stop layer or etching stop signal layer when removing silicon oxide or silicon, then the silicon nitride layer must be provided with a thickness of several tens of nanometers. In order to assist in the removal of the etching stop layer itself, a further barrier layer is then required between the etching stop layer and the substrate, for example silicon oxide, which is located underneath it, in order to protect the substrate which is located underneath during removal of the etching stop layer.
- U.S. Pat. No. 6,593,633 discloses a method for producing a semiconductor device, in the course of which a silicon carbide layer (SiC) is deposited in a plasma-enhanced gas phase deposition method (plasma-enhanced chemical vapor deposition, PECVD) and an etching stop layer that remains in places is in consequence provided. After being used as an etching stop layer, the silicon carbide layer remains in places as an isolator layer with low permittivity between two semiconductor device structures that need to be decoupled.
- a plasma-enhanced gas phase deposition method plasma-enhanced chemical vapor deposition, PECVD
- PECVD plasma-enhanced chemical vapor deposition
- U.S. Pat. No. 6,518,671 names tantalum oxide (Ta 2 O 5 ) and aluminum oxide (Al 2 O 3 ) as materials for the etching stop layers.
- the layer thickness of the etching stop layer is 20 to 70 nanometers.
- the etching stop layer is applied to a planar surface and is structured photolithographically. The etching stop layer limits material removal in an anisotropic chemical-physical dry etching process.
- an etching method for removing material in a course of processing semiconductor wafers.
- the method includes providing a semiconductor wafer as a substrate and performing a sequential gas phase deposition process or a molecular beam epitaxy process for producing an etching signal layer at least on sections of one substrate surface of the substrate.
- the etching signal layer is a dielectric layer composed of a metal oxide or an oxide of rare earths.
- a process layer is provided at least on sections of the etching signal layer. At least sections of the process layer are removed in a course of an etching process.
- An etching signal is produced upon exposure of sections of the etching signal layer disposed underneath removed sections of the process layer and results in exposed sections.
- the etching process is ended in dependence on the etching signal.
- a semiconductor wafer is first provided as the substrate. At this time, the semiconductor wafer is typically already structured with different materials.
- An etching signal layer is provided at least in places on one substrate surface of the substrate.
- a process layer is provided at least in places on the etching signal layer.
- the process layer is either integral and homogeneous, or is an unstructured or intrinsically structured layer system.
- the process layer is removed completely or in places. If, by way of example, the process layer is produced by a deposition process, in the course of which trench structures that extend into the substrate are filled, then the process layer is removed completely above the etching signal layer.
- etching signal is produced during or after the exposure of sections of the etching signal layer that are located under those sections of the process layer which are to be removed.
- the etching process is ended as a function of the etching signal.
- the etching signal can be evaluated by an etching or polishing apparatus.
- the etching signal layer is provided by a sequential gas phase deposition (atomic layer deposition (ALD)) or molecular beam epitaxy as a dielectric layer composed of a metal oxide, including oxides of rare earths.
- ALD sequential gas phase deposition
- MBE molecular beam epitaxy
- Metal oxides and oxides of rare earths can be etched in one step with high etching selectivity with respect to all normal materials that contain silicon in semiconductor process technology, such as crystalline silicon, amorphous silicon, silicon dioxide and silicon nitride.
- Sequential gas phase deposition can be used to produce the etching signal layer even on structured substrates with a uniform layer thickness and with good edge coverage.
- Layers deposited by sequential gas phase deposition and composed of metal oxide or oxides of rare earths are on the one hand robust against normal chemical etching methods, but on the other hand can effectively be pulverized and removed in a simple manner by mechanical processes, for example by particle bombardment, particularly when the layers are very thin.
- the etching method according to the invention allows not only standardization of the etching processes which are required in the course of processing the semiconductor wafers, but also makes it very simple to remove etching signal layers which are used only temporarily.
- the etching signal layer is preferably provided with a layer thickness for which charge carrier transport based on the quantum-mechanical tunnel effect through the etching signal layer is still possible to a significant extent.
- Charge carrier transport to a significant extent may be assumed to be current densities of more than 10 ⁇ 5 A/cm 2 for isolating applications and more than 10 ⁇ 2 A/cm 2 for conductive applications, depending on the purpose and the material that is used.
- remanent sections of the etching signal layer may also be disposed between semiconductor wafer structures that have to be conductively connected to one another. Therefore, for certain applications, for example when forming vertical connecting structures (plugs), there is no need to remove the etching signal layer.
- the etching signal layer is provided in a particularly advantageous manner with a layer thickness of less than 20 nanometers. This results in the electrical contact resistance between conductive structures being increased to a comparatively minor extent. Furthermore, an etching signal layer is removed quickly and easily in comparison to conventional etching stop layers, for example silicon nitride layers. There is no need to provide a further barrier layer underneath the etching stop layer, to protect the substrate that is located underneath against removal of the etching stop layer.
- Suitable metal oxides for forming the etching signal layer are, for example, HfO 2 , ZrO 2 , Nb 2 O 5 , Ta 2 O 5 and Al 2 O 3 .
- Suitable oxides of rare earths are, for example, Pr 2 O 5 and La 2 O 3 .
- the etching signal layer is preferably formed from a material that has a signal element that is not contained in the process layer, for example a metal.
- a process surface which is in each case actually subjected to the etching process (wet-chemical, RIE, CMP) and which is formed as a function of the progress of the etching process of the process layer and/or of the etching signal layer is observed and evaluated spectroscopically.
- the etching signal is produced when the signal element is detected spectroscopically.
- the etching signal is thus produced in a simple manner, and precisely synchronized to the progress of the etching process.
- an etching rate of the etching process is recorded continuously, for example during CMP processes, and an etching signal is produced when a significant change, normally a significant reduction, occurs in the etching rate.
- the etching process irrespective of whether this is a wet-chemical process, RIE or CMP, can be ended at the same time as the etching signal or with a slight run-on, so that the etching process stops on the surface of the etching signal layer.
- the timing for the removal of the etching signal layer with respect to the previous etching signal can be controlled with very narrow tolerances, so that the substrate which is located underneath it is not damaged in the process.
- the etching process is ended after a second run-on time has elapsed.
- the second run-on time is then of such a duration that the substrate which is located underneath the etching signal layer is removed during the second run-on time as far as the depth which is required for the purpose, in sections which are located underneath the exposed sections of the etching signal layer.
- the second run-on time may then be of such a duration that, during the second run-on time, the second process layer element is actually completely removed in the sections that are located underneath the exposed sections of the etching signal layer.
- the etching signal that is produced by the etching signal layer is used for fine adjustment of an etching process that acts on the entire process layer formed by the two process layer elements.
- the etching method according to the invention is particularly advantageous when the process layer is formed from more than one stack layer, in which case at least one of the stack layers may be provided with a secondary structure having two or more stack sections composed of different materials.
- Layer systems such as these which are structured jointly at least in places, and are removed above an etching signal layer, can occur in semiconductor process technology in conjunction, for example, with connecting lines which cross in different levels, but not only in this case.
- the advantages of the etching method according to the invention are particularly applicable when the substrate is provided with a relief, which is structured on the basis of a basic structure, with trenches and webs on the substrate surface.
- the etching method according to the invention ensures that the etching signal layer is provided with a high degree of uniformity, with a thin layer thickness, homogeneously and with good edge coverage, even on the structured substrate surface, so that the advantages mentioned above are also still obtained for structured surfaces, in contrast to known etching methods.
- the method according to the invention is suitable for photolithographic methods, in the course of which a primary structure of a photolithographic mask is mapped by an etching process into the process layer.
- a mask which is structured on the basis of the primary structure is for this purpose provided on the process layer, and the primary structure is transferred by the etching process at least into the process layer.
- the secondary structure can be provided independently of the primary structure, and in a different manner to it.
- the etching process can also be carried out as a chemical-mechanical polishing method.
- sections of the process layer above a substrate edge that is defined by an upper edge of a web that is the highest with respect to the substrate surface are removed in the course of the etching process.
- the etching signal layer may also be vertically structured or may be deposited such that it is already structured in the course of the etching method according to the invention.
- the etching signal layer is for this purpose provided in a particularly preferred manner by a sequential gas phase deposition, in which two or more molecular individual layers are deposited successively, and in which the deposition process is controlled such that each individual layer is deposited in the direction from the substrate edge into the depth of the relief.
- the process of depositing each individual layer is ended prematurely before the respective individual layer completely covers the substrate that is located underneath it. Therefore, the etching signal layer is deposited in such a way that it is already vertically structured, so that there is no need for subsequent vertical structuring, for example by modification of the etching resistance by oblique implantation of dopants which influence the etching resistance of the etching signal layer.
- the etching signal layer is in certain cases compressed and hardened by a tempering or heat step.
- a tempering or heat step In conjunction with the etching of a process layer composed of material containing silicon, an aluminum oxide layer with a thickness of about 5 nanometers is provided which is hardened in a tempering step at 700 to 1,100 degrees Celsius for at least 5 seconds to a maximum duration of about 10 hours.
- the aluminum produces a unique spectroscopic etching signal.
- the aluminum oxide layer which is formed from crystallites of different crystal structure has chemical/physical characteristics which are so largely different to silicon and silicon compounds that silicon, silicon oxide and silicon nitride can be etched back jointly with high etching selectivity with respect to the etching signal layer.
- Aluminum oxide is stable in response to conventional chemical/physical etching processes, so that layer thicknesses of less than 20 nanometers and less than 10 nanometers are sufficient for it to act as an etching signal layer.
- Aluminum oxide layers of up to 5 nanometers or 10 nanometers can be effectively pulverized and can be removed comparatively easily, and in a manner which protects the substrate, by mechanical processes, just by particle bombardment. A similar situation applies to hafnium oxide layers used as etching signal layers.
- the process of carrying out the etching method according to the invention is associated with the etching signal layer according to the invention.
- the etching signal layer according to the invention is composed of a metal oxide or an oxide of rare earths.
- the etching signal layer is produced by sequential gas phase deposition, or by a molecular beam epitaxial method.
- the etching signal layer is provided as a layer system containing two or more monomolecular individual layers.
- the layer thickness of the etching signal layer is characterized in that a significant charge carrier transport, based on the quantum-mechanical tunnel effect, is still possible through the etching signal layer.
- the layer thickness is preferably less than 20 nm.
- FIGS. 1A and 1B are diagrammatic, sectional views of a first exemplary embodiment of an etching method according to the invention, with an anisotropic etching process that stops on an etching signal layer;
- FIG. 2 is a sectional view of the exemplary embodiment shown in FIGS. 1A and 1B, after a first etching run-on duration;
- FIG. 3 is a sectional view of the exemplary embodiment shown in FIG. 2, after a second etching run-on duration;
- FIGS. 4A and 4B are sectional views of an exemplary embodiment of the etching method according to the invention, with fine adjustment of the etching process by use of an etching signal layer;
- FIGS. 5A and 5B are sectional view of an exemplary embodiment of the etching method according to the invention, for removal of multilayer structures
- FIGS. 6A and 6B are sectional views of an exemplary embodiment of the etching method according to the invention, with a chemical-mechanical etching process
- FIGS. 7A and 7B are sectional views showing an exemplary embodiment of the etching method according to the invention as shown in FIGS. 6A and 6B, with a layer system to be removed composed of different materials;
- FIGS. 8A and 8B are sectional views showing an exemplary embodiment of the etching method according to the invention with an isotropic etching process.
- FIGS. 9A and 9B are sectional views showing an exemplary embodiment of the method according to the invention with an etching signal layer which is deposited in a vertically structured manner.
- the substrate 1 is composed of monocrystalline silicon, silicon oxide, silicon nitride, and/or some other material that is normally used in semiconductor process technology.
- the substrate 1 is homogeneous or has structures that are not shown in FIG. 1A or in the following figures.
- An etching signal layer 2 with a thickness of less than 20 nm is applied to one substrate surface 10 of the substrate 1 .
- the etching signal layer 2 was produced by sequential gas phase deposition, and is composed of two or more molecular individual layers.
- a process layer 3 is provided on the etching signal layer 2 .
- An etching mask 4 composed of a photoresist material, which has been structured by a photolithographic process is located on the process layer 3 .
- the structure of the etching mask 4 is transferred by an etching process to the process layer 3 which is located underneath it.
- the removal of the material of the process layer 3 ends at an upper edge of the etching signal layer 2 . Since it is thin, the etching signal layer 2 can be removed easily and quickly. However, by virtue of its dielectric character, the etching signal layer 2 may remain underneath a dielectric structure, which is adjacent in exposed sections, in the process layer 3 or above a dielectric structure in the substrate 1 . As a result of its conductive characteristics owing to its thin layer thickness, it may then also remain on the substrate surface 10 if it is provided between two conductive structures that need to be connected to one another.
- FIG. 2 shows the result of the etching method when the etching process, possibly in the event of a change to the process parameters, continues for a predefined time synchronized to the first occurrence of the etching signal, before it is interrupted.
- the etching signal layer 2 is removed uniformly in a comparatively short time during the run-on time, with narrow tolerances and without any damage to the substrate surface 10 of the substrate 1 . This results in the structured etching signal layer 2 ′ as shown in FIG. 2.
- the narrow etching tolerances during removal of the etching signal layer 2 also make it possible, as is shown in FIG. 3, to etch back the substrate 1 in a second run-on time in a defined manner in those sections which are located underneath the exposed sections of the etching signal layer 2 and with narrow tolerances, by a predetermined run-on dx.
- the process layer element 3 in the exemplary embodiment of the etching method according to the invention illustrated in FIGS. 4A, 4B is applied in the form of two process layer elements 31 , 32 , as is shown in FIG. 4A.
- the second process layer element 32 is located underneath the etching signal layer 2 .
- the first process layer element 31 is located on the etching layer signal 2 .
- the second process layer element 32 or parts of it, can be removed synchronized to an etching signal that is generated by the etching signal layer 2 .
- This method is particularly advantageous in conjunction with chemical-mechanical polishing methods used as the etching process.
- FIG. 4B shows the process layer elements 31 ′, 32 ′, structured by the etching process as well as the structured etching signal layer 2 ′.
- FIG. 5A shows the process layer 3 as a layer stack with a first, a second and a third stack layer 331 , 332 , 333 .
- the second stack layer 332 is structured and has first and second stack layer sections 332 a , 332 b composed of different materials.
- the material of the first stack layer is, for example, silicon oxide, and that of the third stack layer is silicon nitride.
- the materials of the first and second stack layer sections 332 a , 332 b are silicon and silicon nitride respectively.
- the second stack layer 332 is structured on the basis of a secondary structure.
- An etching mask 4 that is placed on the process layer 3 is structured on the basis of a primary structure, which is independent of the secondary structure.
- the primary structure of the etching mask 4 is mapped by an etching process, which acts on all the materials of the process layer 3 that contains silicon independently of the secondary structure provided in the process layer 3 , into the process layer 3 with the assistance of the etching signal layer 2 according to the invention.
- FIG. 5B shows the result of the structuring of the process layer, as well as the structured process layer 3 ′ that is produced in this way.
- FIGS. 5A, 5B can be combined with the exemplary embodiments in FIGS. 2 to 4 B.
- FIGS. 6A, 6B relate to a CMP process as the etching process used according to the invention.
- Trenches 61 are incorporated in the substrate 1 and, together with webs 62 , structure a substrate surface 10 of the substrate 1 in the form of a relief.
- An etching signal layer 2 is applied to the substrate surface 10 covering the substrate 1 with a maximum thickness of 20 nm, homogeneously, uniformly and with good edge coverage.
- the trenches 61 are filled during the course of a gas phase deposition process, with the filling material also being deposited above an upper edge of the trenches 61 , and forming the process layer 3 .
- the process layer 3 is removed above the substrate surface 10 in the course of a chemical-mechanical polishing process. On detection of an etching signal, which is produced by exposed sections of the etching signal layer 2 , the polishing process is ended.
- FIG. 6B shows the process layer 3 ′ that has been structured in this way and is recessed into the trenches 61 .
- FIGS. 7A, 7B shows the process layer 3 as a layer stack with the first, second and third stack layers 331 , 332 , 333 .
- FIG. 8A shows the substrate 1 with the structured surface 10 .
- the etching signal layer 2 is in the form of a conformal coating on the substrate 1 in the region of the substrate surface 10 .
- the process layer 3 with a planar surface is adjacent to the etching signal layer 2 .
- a structured etching mask 4 is applied to the process layer 3 .
- the process layer 3 is structured in accordance with the structure of the etching mask 4 , using an etching process with an isotropic component. The result is illustrated in FIG. 8B.
- the conformal configuration of the etching signal layer 2 allows even complex structures to be reliably protected against isotropic etching processes.
- a trench 61 is incorporated in the substrate 1 which has two sections 11 , 12 in FIG. 9A.
- a conductive structure is formed within the second layer element 12 of the substrate 1 and can be conductively connected to a filling in the trench 61 with a low contact resistance.
- the filling in the trench 61 is produced by a layer sequence of different materials, which are each deposited conformally. This results in the process layer 3 being in the form of a layer stack with three stack layers 331 , 332 , 333 .
- the layer stack is etched back, for example, by a chemical-mechanical polishing method, above a substrate edge 7 that is formed by an upper edge of the trench 61 .
- the etching signal layer 2 is for this purpose deposited in a vertically structured manner. The etching signal layer 2 covers horizontal sections of the substrate surface 10 in the region of the trench edge 7 , and upper vertical sections of the trench 61 .
- the process layer 3 ′ is etched back into the trenches 61 by a chemical-mechanical polishing process. No component of a dielectric etching signal layer which would increase the contact resistance between conductive end structures in the second layer element 12 and in the filling 3 ′ is located between the second layer element 12 , in which conductive structures are formed, and the filling of the trench 61 or the structured process layer 3 ′.
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Abstract
An etching signal layer which is formed by a sequential gas phase deposition with a layer thickness of less than 20 nanometers, and which is composed of a metal oxide or of an oxide of rare earths is provided between a substrate, which is located underneath it, and a process layer. The etching signal layer produces an etching signal, which is independent of the stack layer systems that are to be removed, and contains two or more materials that contain silicon, and can be removed quickly and with narrow process tolerances. One substrate surface of the substrate is protected irrespective of the topography. Etching methods based on the etching signal layer can be carried out precisely, and can be used in a variable manner.
Description
- The invention relates to an etching method for removing material in the course of processing semiconductor wafers. The method includes providing a semiconductor wafer as a substrate, providing an etching signal layer at least on sections of one substrate surface of the substrate, providing a process layer at least on sections of the etching signal layer, and removing at least sections of the process layer in the course of an etching process. An etching signal is produced upon an exposure of sections of the etching signal layer that are located underneath the removed sections of the process layer. The etching process is ended as a function of the etching signal.
- The invention also relates to an etching signal layer.
- The processing of semiconductor wafers generally includes two or more process steps with etching processes, by which either layers are removed over the entire surface, or mask patterns that are produced lithographically are transferred to layers or structures located underneath them.
- In wet-chemical etching processes, solid materials are dissolved in a chemical solution. In chemical-mechanical polishing processes (CMP), wet-chemical etching is assisted by the mechanical influence of a polishing agent on the layer or structure to be removed. In dry chemical etching processes, the material to be removed reacts with components of an etching gas, forming volatile reaction products. In the course of physical dry etching processes, the material to be removed is subjected to a particle beam, under the influence of which the material to be removed is vaporized, and individual atoms are detached from the layer or structure to be removed. For reactive ion etching (reactive ion beam etching, RIE), ions are accelerated in the direction of the material to be removed, and initiate a chemical etching process when they strike it.
- Isotropic etching processes, for example wet-chemical etching, remove material independently of the direction while anisotropic etching processes such as RIE and CMP in contrast remove the material in a preferred direction.
- The etching processes generally stop at etching stop layers. The etching stop layers are in each case provided from a material which does not recede as a result of the respectively used etching process, or which recedes at an etching rate which is very slow in comparison with that of the material to be removed.
- It is also normal to use measurement techniques to detect an etching end point by use of an etching stop signal layer. In the case of dry etching processes by way of example, the process surface which has been etched back by the etching process is for this purpose evaluated spectroscopically, or, in the case of wet-chemical etching processes, the etching rate is recorded continuously, and any significant change is evaluated.
- The material of the etching stop layer and/or of the etching stop signal layer is chosen such that the etching process for the material to be removed is as selective as possible with respect to the material of the etching stop layer and of the etching stop signal layer. Admittedly, silicon, silicon oxide (SiO2) and silicon nitride (Si3N4) and silicides can in principle be etched selectively. If materials containing silicon are provided as etching stop layers with respect to one another, then the etching stop layers are also attacked by the etching process and must be provided with a sufficient layer thickness in order to reliably prevent the etching process from penetrating into the material which is located under the etching stop layer. If silicon nitride is used as the etching stop layer or etching stop signal layer when removing silicon oxide or silicon, then the silicon nitride layer must be provided with a thickness of several tens of nanometers. In order to assist in the removal of the etching stop layer itself, a further barrier layer is then required between the etching stop layer and the substrate, for example silicon oxide, which is located underneath it, in order to protect the substrate which is located underneath during removal of the etching stop layer.
- U.S. Pat. No. 6,593,633 discloses a method for producing a semiconductor device, in the course of which a silicon carbide layer (SiC) is deposited in a plasma-enhanced gas phase deposition method (plasma-enhanced chemical vapor deposition, PECVD) and an etching stop layer that remains in places is in consequence provided. After being used as an etching stop layer, the silicon carbide layer remains in places as an isolator layer with low permittivity between two semiconductor device structures that need to be decoupled.
- U.S. Pat. No. 6,518,671 (Yang et al.) names tantalum oxide (Ta2O5) and aluminum oxide (Al2O3) as materials for the etching stop layers. The layer thickness of the etching stop layer is 20 to 70 nanometers. The etching stop layer is applied to a planar surface and is structured photolithographically. The etching stop layer limits material removal in an anisotropic chemical-physical dry etching process.
- It is accordingly an object of the invention to provide an etching method and an etching signal layer for processing semiconductor wafers that overcomes the above-mentioned disadvantages of the prior art devices of this general type, in which two or more materials which contain silicon can be removed in a single etching process, irrespective of the etching process that is used and irrespective of the surface structure of a layer or structure which is located underneath and needs to be protected against removal.
- With the foregoing and other objects in view there is provided, in accordance with the invention, an etching method for removing material in a course of processing semiconductor wafers. The method includes providing a semiconductor wafer as a substrate and performing a sequential gas phase deposition process or a molecular beam epitaxy process for producing an etching signal layer at least on sections of one substrate surface of the substrate. The etching signal layer is a dielectric layer composed of a metal oxide or an oxide of rare earths. A process layer is provided at least on sections of the etching signal layer. At least sections of the process layer are removed in a course of an etching process. An etching signal is produced upon exposure of sections of the etching signal layer disposed underneath removed sections of the process layer and results in exposed sections. The etching process is ended in dependence on the etching signal.
- In the course of the etching method according to the invention for removal of material in the course of processing semiconductor wafers, a semiconductor wafer is first provided as the substrate. At this time, the semiconductor wafer is typically already structured with different materials. An etching signal layer is provided at least in places on one substrate surface of the substrate. A process layer is provided at least in places on the etching signal layer. The process layer is either integral and homogeneous, or is an unstructured or intrinsically structured layer system. In the course of an etching process, the process layer is removed completely or in places. If, by way of example, the process layer is produced by a deposition process, in the course of which trench structures that extend into the substrate are filled, then the process layer is removed completely above the etching signal layer. If a primary structure of an etching mask is mapped into the process layer, by a photolithographic process, then the process layer is removed only in places above the etching signal layer. An etching signal is produced during or after the exposure of sections of the etching signal layer that are located under those sections of the process layer which are to be removed. The etching process is ended as a function of the etching signal. The etching signal can be evaluated by an etching or polishing apparatus.
- According to the invention, the etching signal layer is provided by a sequential gas phase deposition (atomic layer deposition (ALD)) or molecular beam epitaxy as a dielectric layer composed of a metal oxide, including oxides of rare earths.
- Metal oxides and oxides of rare earths can be etched in one step with high etching selectivity with respect to all normal materials that contain silicon in semiconductor process technology, such as crystalline silicon, amorphous silicon, silicon dioxide and silicon nitride. Sequential gas phase deposition can be used to produce the etching signal layer even on structured substrates with a uniform layer thickness and with good edge coverage. Layers deposited by sequential gas phase deposition and composed of metal oxide or oxides of rare earths are on the one hand robust against normal chemical etching methods, but on the other hand can effectively be pulverized and removed in a simple manner by mechanical processes, for example by particle bombardment, particularly when the layers are very thin.
- The etching method according to the invention allows not only standardization of the etching processes which are required in the course of processing the semiconductor wafers, but also makes it very simple to remove etching signal layers which are used only temporarily.
- The etching signal layer is preferably provided with a layer thickness for which charge carrier transport based on the quantum-mechanical tunnel effect through the etching signal layer is still possible to a significant extent. Charge carrier transport to a significant extent may be assumed to be current densities of more than 10−5 A/cm2 for isolating applications and more than 10−2 A/cm2 for conductive applications, depending on the purpose and the material that is used.
- In conjunction with the application of the etching signal layer by sequential gas phase deposition, as a consequence of which the etching signal layer has a virtually uniform layer thickness over its entire extent, remanent sections of the etching signal layer may also be disposed between semiconductor wafer structures that have to be conductively connected to one another. Therefore, for certain applications, for example when forming vertical connecting structures (plugs), there is no need to remove the etching signal layer.
- The etching signal layer is provided in a particularly advantageous manner with a layer thickness of less than 20 nanometers. This results in the electrical contact resistance between conductive structures being increased to a comparatively minor extent. Furthermore, an etching signal layer is removed quickly and easily in comparison to conventional etching stop layers, for example silicon nitride layers. There is no need to provide a further barrier layer underneath the etching stop layer, to protect the substrate that is located underneath against removal of the etching stop layer. Suitable metal oxides for forming the etching signal layer are, for example, HfO2, ZrO2, Nb2O5, Ta2O5 and Al2O3. Suitable oxides of rare earths are, for example, Pr2O5 and La2O3.
- The etching signal layer is preferably formed from a material that has a signal element that is not contained in the process layer, for example a metal. A process surface which is in each case actually subjected to the etching process (wet-chemical, RIE, CMP) and which is formed as a function of the progress of the etching process of the process layer and/or of the etching signal layer is observed and evaluated spectroscopically. The etching signal is produced when the signal element is detected spectroscopically. The etching signal is thus produced in a simple manner, and precisely synchronized to the progress of the etching process.
- According to another preferred embodiment of the etching method according to the invention, an etching rate of the etching process is recorded continuously, for example during CMP processes, and an etching signal is produced when a significant change, normally a significant reduction, occurs in the etching rate.
- The etching process, irrespective of whether this is a wet-chemical process, RIE or CMP, can be ended at the same time as the etching signal or with a slight run-on, so that the etching process stops on the surface of the etching signal layer. However, it is particularly advantageous for the etching process to be ended after a first run-on time, which is of such duration that the etching signal layer in the exposed sections is actually completely removed during the first run-on time. This is in fact possible because the etching signal layer has a virtually uniform and very thin layer thickness since it is produced by sequential gas phase deposition. The timing for the removal of the etching signal layer with respect to the previous etching signal can be controlled with very narrow tolerances, so that the substrate which is located underneath it is not damaged in the process.
- As an alternative to this, the etching process is ended after a second run-on time has elapsed. The second run-on time is then of such a duration that the substrate which is located underneath the etching signal layer is removed during the second run-on time as far as the depth which is required for the purpose, in sections which are located underneath the exposed sections of the etching signal layer. This type of processing, for example in conjunction with RIE and CMP processes, results in relatively narrow manufacturing tolerances, since the etching signal layer is itself removed within narrow tolerances, owing to its thin layer thickness and high conformity.
- It is also advantageous to apply a first process layer element at least to sections of the etching signal layer before the provision of the etching signal layer on the substrate, and to apply a second process layer element at least to sections of the etching signal layer after the provision of the etching signal layer. The second run-on time may then be of such a duration that, during the second run-on time, the second process layer element is actually completely removed in the sections that are located underneath the exposed sections of the etching signal layer.
- In this case, the etching signal that is produced by the etching signal layer is used for fine adjustment of an etching process that acts on the entire process layer formed by the two process layer elements.
- In certain cases, adaptation of parameters of the etching process as a function of detection of the etching signal is advantageous for the various variants mentioned.
- The etching method according to the invention is particularly advantageous when the process layer is formed from more than one stack layer, in which case at least one of the stack layers may be provided with a secondary structure having two or more stack sections composed of different materials. Layer systems such as these, which are structured jointly at least in places, and are removed above an etching signal layer, can occur in semiconductor process technology in conjunction, for example, with connecting lines which cross in different levels, but not only in this case.
- The advantages of the etching method according to the invention are particularly applicable when the substrate is provided with a relief, which is structured on the basis of a basic structure, with trenches and webs on the substrate surface. The etching method according to the invention ensures that the etching signal layer is provided with a high degree of uniformity, with a thin layer thickness, homogeneously and with good edge coverage, even on the structured substrate surface, so that the advantages mentioned above are also still obtained for structured surfaces, in contrast to known etching methods.
- The method according to the invention is suitable for photolithographic methods, in the course of which a primary structure of a photolithographic mask is mapped by an etching process into the process layer. A mask which is structured on the basis of the primary structure is for this purpose provided on the process layer, and the primary structure is transferred by the etching process at least into the process layer. In this case, the secondary structure can be provided independently of the primary structure, and in a different manner to it.
- Alternatively, the etching process can also be carried out as a chemical-mechanical polishing method. In this case, sections of the process layer above a substrate edge that is defined by an upper edge of a web that is the highest with respect to the substrate surface are removed in the course of the etching process.
- In certain cases, the etching signal layer may also be vertically structured or may be deposited such that it is already structured in the course of the etching method according to the invention.
- The etching signal layer is for this purpose provided in a particularly preferred manner by a sequential gas phase deposition, in which two or more molecular individual layers are deposited successively, and in which the deposition process is controlled such that each individual layer is deposited in the direction from the substrate edge into the depth of the relief. The process of depositing each individual layer is ended prematurely before the respective individual layer completely covers the substrate that is located underneath it. Therefore, the etching signal layer is deposited in such a way that it is already vertically structured, so that there is no need for subsequent vertical structuring, for example by modification of the etching resistance by oblique implantation of dopants which influence the etching resistance of the etching signal layer.
- The etching signal layer is in certain cases compressed and hardened by a tempering or heat step. In conjunction with the etching of a process layer composed of material containing silicon, an aluminum oxide layer with a thickness of about 5 nanometers is provided which is hardened in a tempering step at 700 to 1,100 degrees Celsius for at least 5 seconds to a maximum duration of about 10 hours.
- The aluminum produces a unique spectroscopic etching signal. The aluminum oxide layer which is formed from crystallites of different crystal structure has chemical/physical characteristics which are so largely different to silicon and silicon compounds that silicon, silicon oxide and silicon nitride can be etched back jointly with high etching selectivity with respect to the etching signal layer. Aluminum oxide is stable in response to conventional chemical/physical etching processes, so that layer thicknesses of less than 20 nanometers and less than 10 nanometers are sufficient for it to act as an etching signal layer. Aluminum oxide layers of up to 5 nanometers or 10 nanometers can be effectively pulverized and can be removed comparatively easily, and in a manner which protects the substrate, by mechanical processes, just by particle bombardment. A similar situation applies to hafnium oxide layers used as etching signal layers.
- The process of carrying out the etching method according to the invention is associated with the etching signal layer according to the invention. The etching signal layer according to the invention is composed of a metal oxide or an oxide of rare earths. The etching signal layer is produced by sequential gas phase deposition, or by a molecular beam epitaxial method. The etching signal layer is provided as a layer system containing two or more monomolecular individual layers. The layer thickness of the etching signal layer is characterized in that a significant charge carrier transport, based on the quantum-mechanical tunnel effect, is still possible through the etching signal layer. The layer thickness is preferably less than 20 nm.
- Other features which are considered as characteristic for the invention are set forth in the appended claims.
- Although the invention is illustrated and described herein as embodied in an etching method and an etching signal layer for processing semiconductor wafers, it is nevertheless not intended to be limited to the details shown, since various modifications and structural changes may be made therein without departing from the spirit of the invention and within the scope and range of equivalents of the claims.
- The construction and method of operation of the invention, however, together with additional objects and advantages thereof will be best understood from the following description of specific embodiments when read in connection with the accompanying drawings.
- FIGS. 1A and 1B are diagrammatic, sectional views of a first exemplary embodiment of an etching method according to the invention, with an anisotropic etching process that stops on an etching signal layer;
- FIG. 2 is a sectional view of the exemplary embodiment shown in FIGS. 1A and 1B, after a first etching run-on duration;
- FIG. 3 is a sectional view of the exemplary embodiment shown in FIG. 2, after a second etching run-on duration;
- FIGS. 4A and 4B are sectional views of an exemplary embodiment of the etching method according to the invention, with fine adjustment of the etching process by use of an etching signal layer;
- FIGS. 5A and 5B are sectional view of an exemplary embodiment of the etching method according to the invention, for removal of multilayer structures;
- FIGS. 6A and 6B are sectional views of an exemplary embodiment of the etching method according to the invention, with a chemical-mechanical etching process;
- FIGS. 7A and 7B are sectional views showing an exemplary embodiment of the etching method according to the invention as shown in FIGS. 6A and 6B, with a layer system to be removed composed of different materials;
- FIGS. 8A and 8B are sectional views showing an exemplary embodiment of the etching method according to the invention with an isotropic etching process; and
- FIGS. 9A and 9B are sectional views showing an exemplary embodiment of the method according to the invention with an etching signal layer which is deposited in a vertically structured manner.
- Referring now to the figures of the drawing in detail and first, particularly, to FIG. 1A thereof, there is shown a substrate1. The substrate 1 is composed of monocrystalline silicon, silicon oxide, silicon nitride, and/or some other material that is normally used in semiconductor process technology. The substrate 1 is homogeneous or has structures that are not shown in FIG. 1A or in the following figures.
- An
etching signal layer 2 with a thickness of less than 20 nm is applied to onesubstrate surface 10 of the substrate 1. Theetching signal layer 2 was produced by sequential gas phase deposition, and is composed of two or more molecular individual layers. Aprocess layer 3 is provided on theetching signal layer 2. Anetching mask 4, composed of a photoresist material, which has been structured by a photolithographic process is located on theprocess layer 3. - The structure of the
etching mask 4 is transferred by an etching process to theprocess layer 3 which is located underneath it. - In the example in FIG. 1B, the removal of the material of the
process layer 3 ends at an upper edge of theetching signal layer 2. Since it is thin, theetching signal layer 2 can be removed easily and quickly. However, by virtue of its dielectric character, theetching signal layer 2 may remain underneath a dielectric structure, which is adjacent in exposed sections, in theprocess layer 3 or above a dielectric structure in the substrate 1. As a result of its conductive characteristics owing to its thin layer thickness, it may then also remain on thesubstrate surface 10 if it is provided between two conductive structures that need to be connected to one another. - FIG. 2 shows the result of the etching method when the etching process, possibly in the event of a change to the process parameters, continues for a predefined time synchronized to the first occurrence of the etching signal, before it is interrupted. As a result of the thin, uniform layer thickness, resulting from the method, of the
etching signal layer 2, theetching signal layer 2 is removed uniformly in a comparatively short time during the run-on time, with narrow tolerances and without any damage to thesubstrate surface 10 of the substrate 1. This results in the structuredetching signal layer 2′ as shown in FIG. 2. - The narrow etching tolerances during removal of the
etching signal layer 2 also make it possible, as is shown in FIG. 3, to etch back the substrate 1 in a second run-on time in a defined manner in those sections which are located underneath the exposed sections of theetching signal layer 2 and with narrow tolerances, by a predetermined run-on dx. - In contrast to the previous examples, the
process layer element 3 in the exemplary embodiment of the etching method according to the invention illustrated in FIGS. 4A, 4B is applied in the form of twoprocess layer elements process layer element 32 is located underneath theetching signal layer 2. The firstprocess layer element 31 is located on theetching layer signal 2. Particularly when, for example, the layer thickness of the firstprocess layer element 31 is not known precisely, or the firstprocess layer element 31 is intended to be removed comparatively quickly, the secondprocess layer element 32, or parts of it, can be removed synchronized to an etching signal that is generated by theetching signal layer 2. This method is particularly advantageous in conjunction with chemical-mechanical polishing methods used as the etching process. - FIG. 4B shows the
process layer elements 31′, 32′, structured by the etching process as well as the structuredetching signal layer 2′. - In comparison to FIGS. 1A, 1B, FIG. 5A shows the
process layer 3 as a layer stack with a first, a second and athird stack layer second stack layer 332 is structured and has first and secondstack layer sections stack layer sections second stack layer 332 is structured on the basis of a secondary structure. Anetching mask 4 that is placed on theprocess layer 3 is structured on the basis of a primary structure, which is independent of the secondary structure. The primary structure of theetching mask 4 is mapped by an etching process, which acts on all the materials of theprocess layer 3 that contains silicon independently of the secondary structure provided in theprocess layer 3, into theprocess layer 3 with the assistance of theetching signal layer 2 according to the invention. - FIG. 5B shows the result of the structuring of the process layer, as well as the
structured process layer 3′ that is produced in this way. - The exemplary embodiment illustrated in FIGS. 5A, 5B can be combined with the exemplary embodiments in FIGS.2 to 4B.
- FIGS. 6A, 6B relate to a CMP process as the etching process used according to the invention.
Trenches 61 are incorporated in the substrate 1 and, together withwebs 62, structure asubstrate surface 10 of the substrate 1 in the form of a relief. Anetching signal layer 2 is applied to thesubstrate surface 10 covering the substrate 1 with a maximum thickness of 20 nm, homogeneously, uniformly and with good edge coverage. Thetrenches 61 are filled during the course of a gas phase deposition process, with the filling material also being deposited above an upper edge of thetrenches 61, and forming theprocess layer 3. - The
process layer 3 is removed above thesubstrate surface 10 in the course of a chemical-mechanical polishing process. On detection of an etching signal, which is produced by exposed sections of theetching signal layer 2, the polishing process is ended. FIG. 6B shows theprocess layer 3′ that has been structured in this way and is recessed into thetrenches 61. - In comparison to the exemplary embodiment illustrated in FIGS. 6A, 6B, the exemplary embodiment in FIGS. 7A, 7B shows the
process layer 3 as a layer stack with the first, second and third stack layers 331, 332, 333. - FIGS. 8A, 8B shows the etching method according to the invention in conjunction with an isotropic etching process. FIG. 8A shows the substrate1 with the structured
surface 10. Theetching signal layer 2 is in the form of a conformal coating on the substrate 1 in the region of thesubstrate surface 10. Theprocess layer 3 with a planar surface is adjacent to theetching signal layer 2. Astructured etching mask 4 is applied to theprocess layer 3. Theprocess layer 3 is structured in accordance with the structure of theetching mask 4, using an etching process with an isotropic component. The result is illustrated in FIG. 8B. The conformal configuration of theetching signal layer 2 allows even complex structures to be reliably protected against isotropic etching processes. - A
trench 61 is incorporated in the substrate 1 which has twosections second layer element 12 of the substrate 1 and can be conductively connected to a filling in thetrench 61 with a low contact resistance. The filling in thetrench 61 is produced by a layer sequence of different materials, which are each deposited conformally. This results in theprocess layer 3 being in the form of a layer stack with threestack layers substrate edge 7 that is formed by an upper edge of thetrench 61. Theetching signal layer 2 is for this purpose deposited in a vertically structured manner. Theetching signal layer 2 covers horizontal sections of thesubstrate surface 10 in the region of thetrench edge 7, and upper vertical sections of thetrench 61. - The
process layer 3′ is etched back into thetrenches 61 by a chemical-mechanical polishing process. No component of a dielectric etching signal layer which would increase the contact resistance between conductive end structures in thesecond layer element 12 and in the filling 3′ is located between thesecond layer element 12, in which conductive structures are formed, and the filling of thetrench 61 or thestructured process layer 3′.
Claims (24)
1. An etching method for removing material in a course of processing semiconductor wafers, which comprises the steps of:
providing a semiconductor wafer as a substrate;
performing one of a sequential gas phase deposition process and a molecular beam epitaxy process for producing an etching signal layer at least on sections of one substrate surface of the substrate, the etching signal layer being a dielectric layer composed of a material selected from the group consisting of metal oxides and oxides of rare earths;
providing a process layer at least on sections of the etching signal layer;
removing at least sections of the process layer in a course of an etching process;
producing an etching signal upon exposure of sections of the etching signal layer disposed underneath removed sections of the process layer and resulting in exposed sections; and
ending the etching process in dependence on the etching signal.
2. The etching method according to claim 1 , which further comprises forming the etching signal layer from a material selected from the group consisting of HfO2, ZrO2, Ta2O5, Al2O3, Pr2O5, La2O3 and Nb2O5.
3. The etching method according to claim 1 , which further comprises forming the etching signal layer with a layer thickness which allows significant charge carrier transport, based on a quantum-mechanical tunnel effect, through the etching signal layer.
4. The etching method according to claim 1 , which further comprises depositing the etching signal layer with a layer thickness of less than 20 nanometers.
5. The etching method according to claim 1 , which further comprises:
forming the etching signal layer from a material having a signal element not contained in the process layer;
observing spectroscopically a process surface formed as a function of progress of the etching process on the process layer and on the etching signal layer; and
producing the etching signal on spectroscopic detection of the signal element.
6. The etching method according to claim 1 , which further comprises:
recording an etching rate of the etching process continuously during the etching process; and
producing the etching signal if there is any significant change in the etching rate.
7. The etching method according to claim 1 , which further comprises stopping the etching process on detection of the etching signal.
8. The etching method according to claim 1 , which further comprises ending the etching process after a given run-on time, with the given run-on time being of such a duration that the etching signal layer is completely removed in the exposed sections during the given run-on time.
9. The etching method according to claim 1 , which further comprises ending the etching process once a given run-on time has elapsed.
10. The etching method according to claim 9 , which further comprises setting a duration of given run-on time such that, during the given run-on time, the substrate is removed in sections which are disposed underneath the exposed sections as far as a depth which is actually required for use.
11. The etching method according to claim 9 , which further comprises:
applying a first process layer element at least to sections of the etching signal layer before the etching signal layer is produced on the substrate surface;
applying a second process layer element at least to sections of the etching signal layer after provision of the etching signal layer; and
setting the duration of the given run-on time such that, during the given run-on time, the second process layer element is completely removed in the sections which are disposed underneath the exposed sections.
12. The etching method according to claim 1 , which further comprises varying parameters for the etching process in dependence on a registration of the etching signal.
13. The etching method according to claim 1 , which further comprises forming the process layer from at least two stack layers.
14. The etching method according to claim 13 , which further comprises forming at least one of the stack layers with a secondary structure having at least two stack layer sections composed of different materials.
15. The etching method according to claim 13 , which further comprises:
forming at least a first one of the stack layers in places or completely from silicon;
forming a second one of the stack layers in places or completely from silicon oxide; and
forming a third one of said stack layers in places or completely from silicon nitride.
16. The etching method according to claim 1 , which further comprises structuring the substrate with trenches and webs defining a relief, the structuring being performed on a basis of a basic structure.
17. The etching method according to claim 14 , which further comprises:
providing a mask, structured on a basis of a primary structure, on the process layer; and
transferring the primary structure at least into the process layer by the etching process.
18. The etching method according to claim 17 , which further comprises forming the secondary structure to be different than the primary structure.
19. The etching method according to claim 16 , which further comprises:
defining a substrate edge by an upper edge of one of the webs which is highest with respect to the substrate surface;
carrying out the etching process as a chemical-mechanical polishing method; and
removing sections of the process layer disposed above the substrate edge in a course of the etching process.
20. The etching method according to claim 19 , which further comprises providing the etching signal layer in a structured manner.
21. The etching method according to claim 20 , which further comprises forming the etching signal layer to have at least two molecular individual layers using the sequential gas phase deposition process, with a deposition of each individual layer being controlled in a direction from the substrate edge into a depth of the relief, and the etching signal layer being produced in a vertically structured manner by ending the deposition of each individual layer before complete coverage.
22. The etching method according to claim 1 , which further comprises compressing the etching signal layer by performing a heating process.
23. An etching signal layer, comprising:
a layer system containing at least two monomolecular individual layers with a layer thickness for which significant charge carrier transport, based on a quantum-mechanical tunnel effect, through the etching signal layer being possible, said layer system formed of an oxide selected from the group consisting of metal oxides and oxides of rare earths, said layer system formed by one of a sequential gas phase deposition and molecular beam epitaxy.
24. The etching signal layer according to claim 23 , wherein said layer system has a layer thickness of less than 20 nanometers.
Applications Claiming Priority (2)
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DE10240106A DE10240106A1 (en) | 2002-08-30 | 2002-08-30 | Forming an electrical connection between structures in a semiconductor substrate |
DE10240106.3 | 2002-08-30 |
Publications (1)
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US20040087045A1 true US20040087045A1 (en) | 2004-05-06 |
Family
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Family Applications (2)
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US10/653,599 Expired - Fee Related US7157371B2 (en) | 2002-08-30 | 2003-09-02 | Barrier layer and a method for suppressing diffusion processes during the production of semiconductor devices |
US10/653,596 Abandoned US20040087045A1 (en) | 2002-08-30 | 2003-09-02 | Etching method and etching signal layer for processing semiconductor wafers |
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US10/653,599 Expired - Fee Related US7157371B2 (en) | 2002-08-30 | 2003-09-02 | Barrier layer and a method for suppressing diffusion processes during the production of semiconductor devices |
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Country | Link |
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US (2) | US7157371B2 (en) |
EP (2) | EP1394843A3 (en) |
DE (1) | DE10240106A1 (en) |
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KR100655774B1 (en) | 2004-10-14 | 2006-12-11 | 삼성전자주식회사 | Etching stop structure, method of manufacturing the etching stop structure, semiconductor device having the etching stop structure and method of manufacturing the semiconductor device |
US20060267113A1 (en) * | 2005-05-27 | 2006-11-30 | Tobin Philip J | Semiconductor device structure and method therefor |
US7510956B2 (en) * | 2006-01-30 | 2009-03-31 | Fressscale Semiconductor, Inc. | MOS device with multi-layer gate stack |
JP2008078390A (en) * | 2006-09-21 | 2008-04-03 | Fujitsu Ltd | Semiconductor device and its manufacturing method |
JP5211730B2 (en) * | 2008-02-12 | 2013-06-12 | 富士通セミコンダクター株式会社 | Semiconductor device and manufacturing method thereof |
JP6056150B2 (en) * | 2011-04-08 | 2017-01-11 | 日亜化学工業株式会社 | Semiconductor light emitting device |
US11328749B2 (en) | 2019-12-18 | 2022-05-10 | Micron Technology, Inc. | Conductive interconnects and methods of forming conductive interconnects |
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Also Published As
Publication number | Publication date |
---|---|
US7157371B2 (en) | 2007-01-02 |
EP1394843A2 (en) | 2004-03-03 |
EP1394848A2 (en) | 2004-03-03 |
US20040082166A1 (en) | 2004-04-29 |
EP1394848A3 (en) | 2009-02-25 |
EP1394843A3 (en) | 2009-02-25 |
DE10240106A1 (en) | 2004-03-11 |
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