US20030020996A1 - Optical beam steering device - Google Patents
Optical beam steering device Download PDFInfo
- Publication number
- US20030020996A1 US20030020996A1 US10/155,856 US15585602A US2003020996A1 US 20030020996 A1 US20030020996 A1 US 20030020996A1 US 15585602 A US15585602 A US 15585602A US 2003020996 A1 US2003020996 A1 US 2003020996A1
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- United States
- Prior art keywords
- mirror
- base
- actuator
- coil
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Classifications
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- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B7/00—Mountings, adjusting means, or light-tight connections, for optical elements
- G02B7/18—Mountings, adjusting means, or light-tight connections, for optical elements for prisms; for mirrors
- G02B7/182—Mountings, adjusting means, or light-tight connections, for optical elements for prisms; for mirrors for mirrors
- G02B7/1821—Mountings, adjusting means, or light-tight connections, for optical elements for prisms; for mirrors for mirrors for rotating or oscillating mirrors
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B26/00—Optical devices or arrangements for the control of light using movable or deformable optical elements
- G02B26/08—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light
- G02B26/0816—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements
Definitions
- the present invention pertains generally to optical switches. More particularly, the present invention pertains to steering mirrors that are useful for routing light beams through free space. The present invention is particularly, but not exclusively, useful as an actuator for the steering mirror of an optical switch.
- optical components are being more and more frequently used in the manufacture of data transmission and communications systems.
- these optical components include the use of optical fibers.
- these optical fibers have central cores that are made of an ultra-pure glass, and they include a cladding that surrounds the central core. Because the central cores have a higher refractive-index than that of the glass in the outer cladding, optical fibers are capable of conducting modulated light signals by total internal reflection. Further, these fibers can be used to manufacture optical fiber cables that consist of single or multiple cores, and have additional cladding and armoring for mechanical protection.
- the benefits that are obtained by using optical fibers include small diameters, high potential bandwidth and lower cost than more conventional conductors (e.g. copper wires).
- the optical system or network in order for an optical network to be effective, it must be operationally flexible. Stated differently, the optical system or network must be capable of being configured, and quickly reconfigured, with many different communications pathways. Clearly, this capability requires switches of some kind. In the particular case wherein the optical system incorporates optical fibers, the switches that are to be used must be able to direct a light beam from an end of a transmitting fiber to an end of a receiving fiber. Moreover, for the proper operation of the optical network, the switch may need to select a particular receiving fiber from a plurality of such fibers. Further, the switch may need to quickly redirect the light beam to another receiving fiber and, possibly, sequentially redirect the light beam to a plurality of receiving fibers.
- Switches that mechanically align the ends of optical fibers with each other are typically limited in their performance by certain considerations that pertain in general to any type mechanical device. Specifically, these considerations include the fact that mechanical switches can be relatively slow in their operation. Further, due to corrosion and wear, mechanical switches are prone to loosing precision in their alignments. Also, and perhaps more importantly, mechanical switches are susceptible to failure from material fatigue. In comparison, the degree to which these same imperfections may pertain to optical switches is much less significant.
- mirrors can be effectively used for purposes of directing light beams on segmented beam paths through free space. Additionally, it is known that beam paths can be routed and rerouted by using only very small movements of a steering mirror. In the context of an optical switch, this fact can be very advantageous. Specifically, when mechanical operations can be limited to only those that are necessary for the proper orientation of a steering mirror, the extent and effect of these movements can be minimized. Accordingly, attention is then more appropriately focused on optical considerations for the optical switch. Included here are considerations of size. In particular, it is appreciated that many applications for optical switches require the switch be small and of minimal size. Insofar as the steering mirror of a switch is concerned, this means that the actuator for moving the mirror must also be small.
- An actuator for moving a mirror involves the interaction of electrical, magnetic and mechanical components. Importantly, operation of the actuator results in minimal, if any, material fatigue failure. Further, an important aspect of the present invention is that the actuator is dimensioned to define a footprint that lies completely within an area that is covered by the mirror. As contemplated for the present invention, the mirror will have a reflecting surface that is characterized by a largest dimension which is in a range approximately between one millimeter and twenty millimeters.
- the actuator of the present invention includes a base, and it has a rigid post that is mounted on the base to extend outwardly therefrom.
- a flexible connector is affixed to the end of the post that extends from the base. More specifically, this flexible connector is preferably made of an elastomeric material, such as silicone or rubber, which is capable of repetitively withstanding an extremely large number of cycles, while exhibiting substantially “zero” fatigue.
- the post and the flexible connector establish a flexible universal pivot for the actuator.
- An annular shaped permanent magnet is attached to the backside (non-reflective side) of the mirror, and is centered on the universal pivot around the permanent magnet. More specifically, the flexible connector is attached to the permanent magnet. With this connection the mirror is effectively mounted for pivotal movement on the flexible connector.
- the actuator of the present invention includes at least one electromagnetic device that can be controlled to tilt the mirror about an axis, while the mirror is attached to the flexible connector.
- this electromagnetic device includes an electric coil that is mounted on the base.
- the device includes a voltage source for sending a current through the coil. This is done to create a magnetic field that will interact with the magnetic field of the permanent magnet.
- the electromagnetic device can control the magnetic interconnection between the permanent magnet that is mounted on the mirror and the electromagnetic device that is mounted on the base.
- the electromagnetic device can control the amount the mirror is tilted.
- the actuator of the present invention will have two such electromagnetic devices that will cooperate with each other to tilt the mirror about orthogonal axes.
- an x-y-z coordinate system can be established wherein the mirror is moveable in rotation through an angle ⁇ around the x-axis, and in rotation through an angle ⁇ around the y-axis.
- one of the electromagnetic devices is used to move the mirror through the angle ⁇ around the x-axis
- the other electromagnetic device is used to move the mirror through the angle ⁇ around the y-axis.
- the angle ⁇ is moveable through a range of ⁇ 10° and, similarly, the angle ⁇ is moveable through a range of ⁇ 10°.
- the mirror may have a curved (spherical) surface and, further, the mirror can be moved in translation along the z-axis.
- FIG. 1 is a perspective view of the present invention showing a mirror in combination with an actuator
- FIG. 2A is a cross-sectional view of the actuator-mirror combination as seen along the line 2 A- 2 A in FIG. 1;
- FIG. 2B is a cross-sectional view of the actuator-mirror combination as seen along the line 2 B- 2 B in FIG. 1;
- FIG. 3 is a cross-sectional view of an alternate embodiment of an actuator-mirror for use with the present invention wherein the mirror has a curved (spherical) reflective surface.
- a device in accordance with the present invention is shown and is generally designated 10 .
- the device 10 includes an actuator 12 that is mounted or attached to a base (substrate) 14 .
- a mirror 16 having a reflective surface 18 , is mounted on the actuator 12 to distance the reflective surface 18 from the base 14 .
- the projection of the reflective surface 18 onto the base 14 defines an area 20 on the base 14 that lies under the mirror 16 .
- the actuator 12 has a footprint 22 on the base 14 .
- the footprint 22 of the actuator 12 lies within the projected area 20 of the reflective surface 18 of the mirror 16 .
- the reflective surface 18 has a maximum planar dimension in a range of approximately one to twenty millimeters.
- FIG. 2A the detail of structure for the actuator 12 will be more easily appreciated.
- a rigid post 24 is fixedly attached to the base 14 .
- a flexible connector (flexure) 26 is attached directly to the rigid post 24 .
- the connector 26 is made of an elastomeric material, such as silicone or rubber, that will experience little, if any, material fatigue when the connector 26 is minimally deformed. This should be so, even though the connector 26 may be subjected to repetitive cycles over extended periods of time (e.g. years of operation).
- FIG. 2A also shows that an annular-shaped, permanent magnet 28 is mounted on the mirror 16 .
- the permanent magnet 28 is mounted on, or attached to the side of the mirror 16 that is opposite the reflective surface 18 . Further, the permanent magnet 28 is centered on the reflective surface 18 of the mirror 16 and, importantly, it is fixedly attached to the flexible connector (flexure) 26 .
- the actuator 12 and mirror 16 define a Cartesian x-y-z coordinate system. Within this coordinate system, it will be appreciated that both the rigid post 24 and the permanent magnet 28 are centered on the z-axis.
- the mirror 16 is moveable in rotation through an angle ⁇ around the x-axis, and in rotation through an angle ⁇ around the y-axis.
- the angle ⁇ is moveable through a range of ⁇ 10°, and the angle ⁇ is also moveable through a range of ⁇ 10°.
- the permanent magnet 28 is positioned on the mirror 16 with its North pole 30 adjacent the mirror 16 , and its South pole 32 distanced from the mirror 16 .
- the poles 30 and 32 could, of course, be reversed, depending upon design considerations.
- the actuator 12 of the present invention also includes a selectively magnetic core 34 that is mounted on the base 14 .
- an electric coil 36 is wound around this core 34 , and the coil 36 is connected with a current source 38 via line 40 .
- activation of the current source 38 will send an electrical current through the coil 36 that will, in turn, magnetize the core 34 .
- the magnetic field that is generated on the core 34 will be generally perpendicular to the z-axis in the vicinity of the mirror 16 and, thus, also perpendicular to the magnetic field of permanent magnet 28 .
- the magnetic interaction between the permanent magnet 28 and the core 34 will generate forces on the mirror 16 that will cause it to tilt. More specifically, depending on the direction of current through the coil 36 , and the magnitude of this current, the tilt of mirror 16 can be controlled both in direction and in extent. As intended for the present invention, such an activation of the current source 38 will selectively move the mirror 16 in rotation through an angle ⁇ around the x-axis to positions within a range of ⁇ 10°.
- FIG. 2B shows the same actuator 12 as seen in FIG. 2A, but from a different perspective. More specifically, just as FIG. 2A shows the electromagnetic mechanism for tilting mirror 16 around the x-axis, FIG. 2B is provided to show that a tilt of the mirror 16 can be individually or simultaneously made about the y-axis. For this purpose, a core 42 , coil 44 , current source 46 and line 48 are shown in FIG. 2B. These components will act together, in concert, as an electromagnetic mechanism that tilts the mirror 16 in rotation through an angle ⁇ around the y-axis, within a range of ⁇ 10°.
- FIG. 3 An alternate embodiment for the present invention is shown in FIG. 3.
- the actuator 12 ′ of the alternate embodiment is essentially the same as was disclosed above for the actuator 12 .
- the actuator 12 ′ is used to move a mirror 16 ′ which has a curved reflective surface 18 ′.
- FIG. 3 shows that a Hall Effect device 50 , of a type well known in the pertinent art, can be employed in several different configurations with the present invention for well known purposes. This is so for both the actuator 12 and actuator 12 ′.
- the actuator 12 of the present invention may be used for a variety of applications wherein it is desirable to redirect small beams of light from one light path to another, such as in the operation of a photonic switch.
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- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Optics & Photonics (AREA)
- Mechanical Light Control Or Optical Switches (AREA)
- Switches Operated By Changes In Physical Conditions (AREA)
- Switches With Compound Operations (AREA)
Abstract
Description
- This application claims the benefit of U.S. Provisional Application No. 60/294,931 filed on May 30, 2001.
- The present invention pertains generally to optical switches. More particularly, the present invention pertains to steering mirrors that are useful for routing light beams through free space. The present invention is particularly, but not exclusively, useful as an actuator for the steering mirror of an optical switch.
- It has happened that optical components are being more and more frequently used in the manufacture of data transmission and communications systems. In most instances, these optical components include the use of optical fibers. Typically, these optical fibers have central cores that are made of an ultra-pure glass, and they include a cladding that surrounds the central core. Because the central cores have a higher refractive-index than that of the glass in the outer cladding, optical fibers are capable of conducting modulated light signals by total internal reflection. Further, these fibers can be used to manufacture optical fiber cables that consist of single or multiple cores, and have additional cladding and armoring for mechanical protection. In comparison with other types of signal conductors, the benefits that are obtained by using optical fibers include small diameters, high potential bandwidth and lower cost than more conventional conductors (e.g. copper wires).
- Like all other types of communications systems, in order for an optical network to be effective, it must be operationally flexible. Stated differently, the optical system or network must be capable of being configured, and quickly reconfigured, with many different communications pathways. Clearly, this capability requires switches of some kind. In the particular case wherein the optical system incorporates optical fibers, the switches that are to be used must be able to direct a light beam from an end of a transmitting fiber to an end of a receiving fiber. Moreover, for the proper operation of the optical network, the switch may need to select a particular receiving fiber from a plurality of such fibers. Further, the switch may need to quickly redirect the light beam to another receiving fiber and, possibly, sequentially redirect the light beam to a plurality of receiving fibers.
- Switches that mechanically align the ends of optical fibers with each other are typically limited in their performance by certain considerations that pertain in general to any type mechanical device. Specifically, these considerations include the fact that mechanical switches can be relatively slow in their operation. Further, due to corrosion and wear, mechanical switches are prone to loosing precision in their alignments. Also, and perhaps more importantly, mechanical switches are susceptible to failure from material fatigue. In comparison, the degree to which these same imperfections may pertain to optical switches is much less significant.
- It is known that mirrors can be effectively used for purposes of directing light beams on segmented beam paths through free space. Additionally, it is known that beam paths can be routed and rerouted by using only very small movements of a steering mirror. In the context of an optical switch, this fact can be very advantageous. Specifically, when mechanical operations can be limited to only those that are necessary for the proper orientation of a steering mirror, the extent and effect of these movements can be minimized. Accordingly, attention is then more appropriately focused on optical considerations for the optical switch. Included here are considerations of size. In particular, it is appreciated that many applications for optical switches require the switch be small and of minimal size. Insofar as the steering mirror of a switch is concerned, this means that the actuator for moving the mirror must also be small.
- In light of the above, it is an object of the present invention to provide an actuator for moving the steering mirror of an optical switch that is compact in size and is, preferably, within the footprint of the mirror. Another object of the present invention is to provide an actuator for moving the steering mirror of an optical switch that is subjected to little, if any, material fatigue. Still another object of the present invention is to provide an actuator for moving the steering mirror of an optical switch that is relatively easy to manufacture, is simple to use and is relatively cost effective.
- An actuator for moving a mirror, in accordance with the present invention, involves the interaction of electrical, magnetic and mechanical components. Importantly, operation of the actuator results in minimal, if any, material fatigue failure. Further, an important aspect of the present invention is that the actuator is dimensioned to define a footprint that lies completely within an area that is covered by the mirror. As contemplated for the present invention, the mirror will have a reflecting surface that is characterized by a largest dimension which is in a range approximately between one millimeter and twenty millimeters.
- Structurally, the actuator of the present invention includes a base, and it has a rigid post that is mounted on the base to extend outwardly therefrom. A flexible connector is affixed to the end of the post that extends from the base. More specifically, this flexible connector is preferably made of an elastomeric material, such as silicone or rubber, which is capable of repetitively withstanding an extremely large number of cycles, while exhibiting substantially “zero” fatigue. Together, the post and the flexible connector establish a flexible universal pivot for the actuator.
- An annular shaped permanent magnet is attached to the backside (non-reflective side) of the mirror, and is centered on the universal pivot around the permanent magnet. More specifically, the flexible connector is attached to the permanent magnet. With this connection the mirror is effectively mounted for pivotal movement on the flexible connector.
- In addition to the structure mentioned above, the actuator of the present invention includes at least one electromagnetic device that can be controlled to tilt the mirror about an axis, while the mirror is attached to the flexible connector. Specifically, this electromagnetic device includes an electric coil that is mounted on the base. Also, the device includes a voltage source for sending a current through the coil. This is done to create a magnetic field that will interact with the magnetic field of the permanent magnet. Depending on the current that is sent through the coil, the electromagnetic device can control the magnetic interconnection between the permanent magnet that is mounted on the mirror and the electromagnetic device that is mounted on the base. Thus, the electromagnetic device can control the amount the mirror is tilted. Preferably, the actuator of the present invention will have two such electromagnetic devices that will cooperate with each other to tilt the mirror about orthogonal axes.
- For the operation of the actuator of the present invention, an x-y-z coordinate system can be established wherein the mirror is moveable in rotation through an angle θ around the x-axis, and in rotation through an angle φ around the y-axis. In this case, one of the electromagnetic devices is used to move the mirror through the angle θ around the x-axis, and the other electromagnetic device is used to move the mirror through the angle φ around the y-axis. Preferably, the angle θ is moveable through a range of ±10° and, similarly, the angle φ is moveable through a range of ±10°. For an alternate embodiment of the present invention, the mirror may have a curved (spherical) surface and, further, the mirror can be moved in translation along the z-axis.
- The novel features of this invention, as well as the invention itself, both as to its structure and its operation, will be best understood from the accompanying drawings, taken in conjunction with the accompanying description, in which similar reference characters refer to similar parts, and in which:
- FIG. 1 is a perspective view of the present invention showing a mirror in combination with an actuator;
- FIG. 2A is a cross-sectional view of the actuator-mirror combination as seen along the
line 2A-2A in FIG. 1; - FIG. 2B is a cross-sectional view of the actuator-mirror combination as seen along the line2B-2B in FIG. 1; and
- FIG. 3 is a cross-sectional view of an alternate embodiment of an actuator-mirror for use with the present invention wherein the mirror has a curved (spherical) reflective surface.
- Referring initially to FIG. 1, a device in accordance with the present invention is shown and is generally designated10. As shown, the
device 10 includes anactuator 12 that is mounted or attached to a base (substrate) 14. Amirror 16, having areflective surface 18, is mounted on theactuator 12 to distance thereflective surface 18 from thebase 14. As indicated in FIG. 1, the projection of thereflective surface 18 onto thebase 14 defines anarea 20 on the base 14 that lies under themirror 16. Further, theactuator 12 has afootprint 22 on thebase 14. As intended for the present invention, thefootprint 22 of theactuator 12 lies within the projectedarea 20 of thereflective surface 18 of themirror 16. For purposes of the present invention, thereflective surface 18 has a maximum planar dimension in a range of approximately one to twenty millimeters. - Referring now to FIG. 2A, the detail of structure for the
actuator 12 will be more easily appreciated. In FIG. 2A it will be seen that arigid post 24 is fixedly attached to thebase 14. Also, it will be seen that a flexible connector (flexure) 26 is attached directly to therigid post 24. Preferably, theconnector 26 is made of an elastomeric material, such as silicone or rubber, that will experience little, if any, material fatigue when theconnector 26 is minimally deformed. This should be so, even though theconnector 26 may be subjected to repetitive cycles over extended periods of time (e.g. years of operation). - FIG. 2A also shows that an annular-shaped,
permanent magnet 28 is mounted on themirror 16. Specifically thepermanent magnet 28 is mounted on, or attached to the side of themirror 16 that is opposite thereflective surface 18. Further, thepermanent magnet 28 is centered on thereflective surface 18 of themirror 16 and, importantly, it is fixedly attached to the flexible connector (flexure) 26. Referring back to FIG. 1 for the moment, it will be seen that theactuator 12 andmirror 16 define a Cartesian x-y-z coordinate system. Within this coordinate system, it will be appreciated that both therigid post 24 and thepermanent magnet 28 are centered on the z-axis. Consequently, deformations of the connector (flexure) 26 will allow themirror 16 to tilt at the same time around either or both the x-axis and the y-axis. More specifically, with this structure themirror 16 is moveable in rotation through an angle θ around the x-axis, and in rotation through an angle φ around the y-axis. For purposes of the present invention the angle θ is moveable through a range of ±10°, and the angle φ is also moveable through a range of ±10°. - Still referring to FIG. 2A, it will be seen that the
permanent magnet 28 is positioned on themirror 16 with itsNorth pole 30 adjacent themirror 16, and itsSouth pole 32 distanced from themirror 16. Thepoles mirror 16 the magnetic field of thepermanent magnet 28 will be substantially parallel to the z-axis. With this in mind, it is seen in FIG. 2A that theactuator 12 of the present invention also includes a selectivelymagnetic core 34 that is mounted on thebase 14. Additionally, anelectric coil 36 is wound around thiscore 34, and thecoil 36 is connected with acurrent source 38 vialine 40. Consequently, in a manner well known in the pertinent art, activation of thecurrent source 38 will send an electrical current through thecoil 36 that will, in turn, magnetize thecore 34. Importantly, the magnetic field that is generated on the core 34 will be generally perpendicular to the z-axis in the vicinity of themirror 16 and, thus, also perpendicular to the magnetic field ofpermanent magnet 28. - As will be appreciated by the skilled artisan, the magnetic interaction between the
permanent magnet 28 and the core 34 (whenevercore 34 is magnetized) will generate forces on themirror 16 that will cause it to tilt. More specifically, depending on the direction of current through thecoil 36, and the magnitude of this current, the tilt ofmirror 16 can be controlled both in direction and in extent. As intended for the present invention, such an activation of thecurrent source 38 will selectively move themirror 16 in rotation through an angle θ around the x-axis to positions within a range of ±10°. - FIG. 2B, shows the
same actuator 12 as seen in FIG. 2A, but from a different perspective. More specifically, just as FIG. 2A shows the electromagnetic mechanism for tiltingmirror 16 around the x-axis, FIG. 2B is provided to show that a tilt of themirror 16 can be individually or simultaneously made about the y-axis. For this purpose, acore 42,coil 44,current source 46 andline 48 are shown in FIG. 2B. These components will act together, in concert, as an electromagnetic mechanism that tilts themirror 16 in rotation through an angle φ around the y-axis, within a range of ±10°. - An alternate embodiment for the present invention is shown in FIG. 3. In all important respects, the
actuator 12′ of the alternate embodiment is essentially the same as was disclosed above for theactuator 12. Theactuator 12′, however, is used to move amirror 16′ which has a curvedreflective surface 18′. Additionally, FIG. 3 shows that aHall Effect device 50, of a type well known in the pertinent art, can be employed in several different configurations with the present invention for well known purposes. This is so for both theactuator 12 andactuator 12′. Further, depending on the particular application, it is anticipated that it may be desirable to move themirror 16 ormirror 16′ along the z-axis. In any event, it is anticipated that theactuator 12 of the present invention may be used for a variety of applications wherein it is desirable to redirect small beams of light from one light path to another, such as in the operation of a photonic switch. - While the particular Optical Beam Steering Device as herein shown and disclosed in detail is fully capable of obtaining the objects and providing the advantages herein before stated, it is to be understood that it is merely illustrative of the presently preferred embodiments of the invention and that no limitations are intended to the details of construction or design herein shown other than as described in the appended claims.
Claims (20)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
US10/155,856 US6813055B2 (en) | 2001-05-30 | 2002-05-24 | Optical beam steering device |
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
US29493101P | 2001-05-30 | 2001-05-30 | |
US10/155,856 US6813055B2 (en) | 2001-05-30 | 2002-05-24 | Optical beam steering device |
Publications (2)
Publication Number | Publication Date |
---|---|
US20030020996A1 true US20030020996A1 (en) | 2003-01-30 |
US6813055B2 US6813055B2 (en) | 2004-11-02 |
Family
ID=23135532
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
US10/155,856 Expired - Lifetime US6813055B2 (en) | 2001-05-30 | 2002-05-24 | Optical beam steering device |
Country Status (3)
Country | Link |
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US (1) | US6813055B2 (en) |
AU (1) | AU2002344296A1 (en) |
WO (1) | WO2002097478A2 (en) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US20060158046A1 (en) * | 2005-01-18 | 2006-07-20 | Barnes Ted W | Light direction assembly shorted turn |
Families Citing this family (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US7872394B1 (en) | 2001-12-13 | 2011-01-18 | Joseph E Ford | MEMS device with two axes comb drive actuators |
US7273289B2 (en) * | 2005-05-19 | 2007-09-25 | Euv Llc | Vacuum compatible, high-speed, 2-D mirror tilt stage |
EP2708307A1 (en) * | 2012-09-14 | 2014-03-19 | Trumpf Laser Marking Systems AG | Device for deflecting a laser beam |
Family Cites Families (15)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US4560925A (en) * | 1982-09-30 | 1985-12-24 | Burroughs Corporation | Mirror position sensor and associated pivot suspension for improved track selection in optical data disk system |
US4630254A (en) | 1984-10-26 | 1986-12-16 | Trw Inc. | Controlled star network |
IL87252A (en) * | 1988-07-28 | 1992-03-29 | Israel State | Scanning device |
US5416627A (en) | 1988-09-06 | 1995-05-16 | Wilmoth; Thomas E. | Method and apparatus for two way infrared communication |
US5229593A (en) | 1991-10-08 | 1993-07-20 | International Business Machines Corporation | Apparatus and method for safe, free space laser communication |
JPH05289003A (en) | 1992-04-11 | 1993-11-05 | Sony Corp | Optical spatial transmission equipment |
JP3345526B2 (en) * | 1995-05-01 | 2002-11-18 | 三菱電機株式会社 | Object drive control device and object drive control method |
JP2987750B2 (en) * | 1995-05-26 | 1999-12-06 | 日本信号株式会社 | Planar type electromagnetic actuator |
US5777768A (en) | 1995-09-01 | 1998-07-07 | Astroterra Corporation | Multiple transmitter laser link |
US5777332A (en) | 1996-08-13 | 1998-07-07 | General Electric Company | Automatic patient alignment during nuclear imaging body contour tomography scans |
US6201629B1 (en) * | 1997-08-27 | 2001-03-13 | Microoptical Corporation | Torsional micro-mechanical mirror system |
US6188502B1 (en) * | 1998-03-26 | 2001-02-13 | Nec Corporation | Laser pointing apparatus and on-fulcrum drive apparatus |
US6118131A (en) | 1998-05-11 | 2000-09-12 | Astro Terra Corporation | Directional optics for a system for directing a laser beam toward an active area |
US6091074A (en) | 1998-05-11 | 2000-07-18 | Astroterra Corporation | System for directing a laser beam toward an active area |
US6200882B1 (en) * | 1998-06-10 | 2001-03-13 | Seagate Technology, Inc. | Method for processing a plurality of micro-machined mirror assemblies |
-
2002
- 2002-05-24 WO PCT/US2002/016473 patent/WO2002097478A2/en not_active Application Discontinuation
- 2002-05-24 US US10/155,856 patent/US6813055B2/en not_active Expired - Lifetime
- 2002-05-24 AU AU2002344296A patent/AU2002344296A1/en not_active Abandoned
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US20060158046A1 (en) * | 2005-01-18 | 2006-07-20 | Barnes Ted W | Light direction assembly shorted turn |
US7279812B2 (en) * | 2005-01-18 | 2007-10-09 | Hewlett-Packard Development Company, L.P. | Light direction assembly shorted turn |
Also Published As
Publication number | Publication date |
---|---|
WO2002097478A2 (en) | 2002-12-05 |
WO2002097478A3 (en) | 2003-10-09 |
US6813055B2 (en) | 2004-11-02 |
AU2002344296A1 (en) | 2002-12-09 |
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