US20020024836A1 - Circuit configuration for reading a memory cell having a ferroelectric capacitor - Google Patents
Circuit configuration for reading a memory cell having a ferroelectric capacitor Download PDFInfo
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- US20020024836A1 US20020024836A1 US09/838,750 US83875001A US2002024836A1 US 20020024836 A1 US20020024836 A1 US 20020024836A1 US 83875001 A US83875001 A US 83875001A US 2002024836 A1 US2002024836 A1 US 2002024836A1
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- G11C11/00—Digital stores characterised by the use of particular electric or magnetic storage elements; Storage elements therefor
- G11C11/21—Digital stores characterised by the use of particular electric or magnetic storage elements; Storage elements therefor using electric elements
- G11C11/22—Digital stores characterised by the use of particular electric or magnetic storage elements; Storage elements therefor using electric elements using ferroelectric elements
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- the present invention relates to a circuit configuration for reading a memory cell, which has a ferroelectric capacitor.
- a ferroelectric memory cell in this case contains a ferroelectric capacitor and a selection transistor, which are disposed in a similar manner to a conventional capacitor and a selection transistor in a dynamic random access memory (DRAM) cell.
- DRAM dynamic random access memory
- U.S. Patent No. 5,999,439 is a patent specification that deals specifically with a sense amplifier for ferroelectric memory cells. There, a flip-flop with two inputs is connected to two adjacent bit lines, as a sense amplifier.
- ferroelectric memory cells are constructed such that one electrode of the ferroelectric capacitor is connected to a voltage source, and the other electrode is connected to the selection transistor.
- the gate of the selection transistor is connected to a word line, and its source-drain region, which faces away from the ferroelectric capacitor, is connected to a bit line.
- the selection transistor is opened by a suitable gate voltage, so that the ferroelectric capacitor is connected with a low impedance to the bit line.
- a voltage of the voltage source applied to the ferroelectric capacitor is then varied so that a read signal is produced on the bit line.
- the bit line has a bit line capacitance which, together with the ferroelectric capacitor, forms a capacitive voltage divider, and thus splits the available voltage into a voltage which is dropped across the bit line, and a voltage which is dropped across the ferroelectric capacitor.
- the voltage which is dropped across the bit line capacitance should be as high as possible since a downstream sense amplifier then receives a large input signal, and the status of the ferroelectric memory cell can be assessed reliably.
- bit line must be chosen to be very short, which necessitates a cell array architecture with a very large number of bit lines and sense amplifiers. This leads to a large space requirement for the ferroelectric memory.
- the circuit configuration contains a memory cell having a ferroelectric capacitor, a bit line connected to the memory cell, and a differential amplifier having a first differential amplifier input, a second differential amplifier input and a differential amplifier output.
- the first differential amplifier input is inverting and the second differential amplifier input is non-inverting, the first differential amplifier input is connected to the bit line, and the second differential amplifier input is connected to a reference signal.
- a driver circuit having a driver input connected to the differential amplifier output and a driver output connected to the bit line for regulating a potential on the bit line at a potential of the reference signal is provided.
- the achievement of the object according to the invention introduces a new assessment principle for ferroelectric memories.
- One idea in this case is for the voltage on the bit line when reading the ferroelectric memory cell to be regulated by a control loop to the value of a reference signal.
- the voltage on the bit line remains approximately constant, except for any control error.
- the voltage of the voltage source connected to the ferroelectric capacitor is varied.
- the voltage dropped across the ferroelectric capacitor is governed essentially by the voltage of the voltage source, and is independent of the ratio of the bit line capacitance to the capacitance of the ferroelectric capacitor.
- the first driver circuit is used to close the control loop and to provide the feedback from the differential amplifier output to the first differential amplifier input.
- the first driver circuit is preferably configured such that it provides an appropriate amount of charge at the first driver output as a function of the input signal at the first driver input to the ferroelectric capacitor, and thus keeps the voltage on the bit line substantially constant.
- a second driver circuit having a second driver input and a second driver output, to be disposed, and for the differential amplifier output to be connected to the second driver input.
- the second driver circuit operates, for example, in an equivalent manner to the first driver circuit. However, it is used to supply charge to a circuit configuration downstream from it.
- the second driver circuit advantageously makes it possible to supply a downstream circuit with an amount of charge that is equal to, proportional to or is equivalent to that of the ferroelectric capacitor.
- a further refinement of the invention contains the provision of an assessment circuit with an assessment input and an assessment output, and the assessment input being connected to the second driver output.
- the object of the assessment circuit downstream from the second driver circuit is to assess the charge signal supplied from the second driver circuit and transform it to a suitable form for downstream circuit elements, for example in the form of CMOS-compatible voltage levels.
- the bit line together with the differential amplifier and the first driver circuit are regulated to the voltage of the reference signal. Since the bit line is regulated to the value of the reference signal, the voltage on the bit line remains approximately constant. This advantageously results in that the bit line charge level need not be changed to a different voltage level, meaning that the ferroelectric memory configuration can be read quickly. It is also advantageous that the voltage dropped across the ferroelectric capacitor is governed essentially by the voltage source. In consequence, the voltage dropped across the ferroelectric capacitor is dependent neither on the bit line capacitance nor on the polarization of the ferroelectric in the ferroelectric capacitor.
- the ferroelectric memory cell to have a ferroelectric capacitor and a selection transistor with a gate connection, with a first connection of the ferroelectric capacitor connected to a voltage source, a second connection of the ferroelectric capacitor connected to a source region of the selection transistor, and the bit line connected to a drain region of the selection transistor.
- the described ferroelectric memory cell is particularly suitable for being read using the circuit configuration according to the invention.
- the described ferroelectric memory cell is compact, and contains only two components.
- the configuration according to the invention furthermore provides for the assessment device to have a comparator with a first comparator input and a second comparator input.
- the first comparator input is connected to a reference signal
- the second comparator input is connected to a measurement capacitor and to the second driver output.
- the object of the measurement capacitor is to add up the amount of charge supplied from the second driver circuit and to be charged to an appropriate level, which is equivalent to the polarization of the ferroelectric memory cells.
- the voltage change produced by the amount of charge that is supplied from the second driver circuit can be varied by the magnitude of the measurement capacitor.
- the downstream comparator compares the voltage dropped across the measurement capacitor with a reference voltage and, at its output, produces a voltage which corresponds to a logic “1” or to a logic “0”.
- the reference voltage is chosen such that the voltage dropped across the measurement capacitor for a ferroelectric capacitor which has not been repolarized and for a ferroelectric capacitor which has been repolarized is respectively less than and greater than the reference voltage.
- the circuit configuration according to the invention for reading a ferroelectric memory cell separates the step of reading the cell information and the step of assessment of the cell information. These two tasks can thus be optimized independently of one another.
- FIG. 1 is a circuit diagram of a ferroelectric memory cell according to the invention.
- FIG. 2 is a block diagram of a circuit configuration according to the invention for reading the memory cell having a ferroelectric capacitor
- FIG. 3 is a circuit diagram of the configuration of an assessment circuit according to the invention.
- FIG. 1 there is shown a ferroelectric memory cell FSPZ having a ferroelectric capacitor CF.
- the ferroelectric capacitor CF is connected to a voltage source VPL and to a selection transistor T, which is controlled via a gate connection WL and, for its part, is connected to a bit line BL.
- the bit line BL Owing to the geometric configurations of the bit line BL, the bit line BL has a parasitic bit line capacitance CBL.
- the transistor T When the transistor T is switched on, a voltage is applied, using the voltage source VPL, to the ferroelectric memory cell FSPZ so that a voltage VF is dropped across the ferroelectric capacitor CF, and a voltage VBL is dropped across the bit line capacitance CBL.
- the configuration containing the ferroelectric capacitor CF and the bit line capacitance CBL acts as a capacitance voltage divider.
- the selection transistor T In order to read the ferroelectric memory cell FSPZ, the selection transistor T is normally switched on by applying a suitable voltage to its gate connection WL, so that the ferroelectric capacitor CF is connected with a low impedance to the bit line BL. Normally, the voltage of the voltage source VPL is then varied, and a read signal is produced on the bit line BL.
- FIG. 2 shows a circuit configuration according to the invention for reading the ferroelectric memory cell.
- the circuit configuration includes a differential amplifier D, which has a first differential amplifier input DE 1 and a second differential amplifier input DE 2 .
- the first differential amplifier input DE 1 is, for example, an inverting input
- the second differential amplifier input DE 2 is, for example, a non-inverting input.
- the second differential amplifier input DE 2 is connected to a reference signal VBLSOLL, and the first differential amplifier input DE 1 is connected to the bit line BL.
- a differential amplifier has one positive and one negative input.
- the second differential amplifier input DE 2 is the positive input
- the first differential amplifier input DE 1 is the negative input.
- a first driver circuit TR 1 having a first driver output TRA 1 and a first driver input TRE 1 is disposed such that the differential amplifier output DA is connected to the first driver input TRE 1 , and the first driver output TRA 1 is connected to the bit line BL.
- the feedback circuit is enclosed by a dashed line and is referred to as a control loop R.
- the first driver circuit TR 1 is used to supply the bit line BL with an amount of charge which is governed by the signal at the differential amplifier output DA. This charge is used to regulate the bit line voltage VBL at the reference value of the reference signal VBLSOLL.
- a second driver circuit TR 2 having a second driver input TRE 2 and a second driver output TRA 2 is disposed such that the differential amplifier output DA is connected to the second driver input TRE 2 .
- An assessment circuit B which has an input BE and an output BA, is disposed such that the second driver output TRA 2 is connected to the assessment input BE.
- the object of the second driver circuit TR 2 in this case is to supply the assessment circuit B with an amount of charge which is equivalent to the amount of charge supplied to the bit line EL via the first driver circuit TR 1 .
- the circuit configuration results in that the assessment circuit B is supplied with an amount of charge which is equal to, proportional to or equivalent to the amount of charge which was used, via the bit line BL, to read the ferroelectric capacitor CF of the ferroelectric memory cell FSPZ.
- the assessment output BA is in this case used as a data output DOUT from the circuit configuration according to the invention.
- FIG. 3 shows a further refinement of the assessment circuit B according to the invention.
- the assessment circuit B contains a comparator COMP having a first comparator input COMPE 1 , a second comparator input COMPE 2 and a comparator output COMPA.
- the first comparator input COMPE 1 is connected to a reference voltage VBREF.
- the second comparator input COMPE 2 is connected to the assessment input BE and to a measurement capacitor CMESS. That electrode of the measurement capacitor CMESS which faces away from the second comparator input COMPE 2 is connected to a reference ground potential.
- the comparator output COMPA is connected to the output BA of the assessment circuit B, and thus to the data output DOUT.
- the measurement capacitor CMESS is used to add up the amount of charge that is supplied via the assessment input BE to the assessment circuit B.
- the measurement capacitor CMESS is charged to a corresponding voltage level.
- the voltage level dropped across the measurement capacitor CMESS is compared with the reference voltage VBREF by the comparator COMP, and an appropriate output signal DOUT is produced.
- a transistor which is connected to the assessment input BE and to an initialization voltage source VINIT, and which is controlled via an initialization signal INIT, is used to ensure that the assessment circuit B is in a defined state at the start of an assessment process.
Abstract
Description
- The present invention relates to a circuit configuration for reading a memory cell, which has a ferroelectric capacitor.
- Memory cells having ferroelectric capacitors are known, for example, from patent specifications U.S. Pat. No. 5,986,919; U.S. Pat. No. 5,969,980; U.S. Pat. No. 5,991,188 and U.S. Pat. No. 6,002,634. A ferroelectric memory cell in this case contains a ferroelectric capacitor and a selection transistor, which are disposed in a similar manner to a conventional capacitor and a selection transistor in a dynamic random access memory (DRAM) cell. U.S. Patent No. 5,999,439 is a patent specification that deals specifically with a sense amplifier for ferroelectric memory cells. There, a flip-flop with two inputs is connected to two adjacent bit lines, as a sense amplifier.
- Normally, ferroelectric memory cells are constructed such that one electrode of the ferroelectric capacitor is connected to a voltage source, and the other electrode is connected to the selection transistor. The gate of the selection transistor is connected to a word line, and its source-drain region, which faces away from the ferroelectric capacitor, is connected to a bit line.
- Information is stored in a ferroelectric memory in the polarization of the ferroelectric material. In this case, the “remanence” of the ferroelectric capacitor represents the stored information.
- In order to read the ferroelectric memory cell, the selection transistor is opened by a suitable gate voltage, so that the ferroelectric capacitor is connected with a low impedance to the bit line. A voltage of the voltage source applied to the ferroelectric capacitor is then varied so that a read signal is produced on the bit line. By virtue of its geometrical configuration in the ferroelectric memory, the bit line has a bit line capacitance which, together with the ferroelectric capacitor, forms a capacitive voltage divider, and thus splits the available voltage into a voltage which is dropped across the bit line, and a voltage which is dropped across the ferroelectric capacitor.
- The voltage which is dropped across the bit line capacitance should be as high as possible since a downstream sense amplifier then receives a large input signal, and the status of the ferroelectric memory cell can be assessed reliably.
- In fact, the greater the voltage dropped across the bit line capacitance, the less is the voltage dropped across the ferroelectric capacitor. This becomes a problem if the voltage dropped across the ferroelectric capacitor no longer reaches the coercive voltage. In this situation, it is no longer possible to distinguish clearly between the upper and lower hysteresis curve of the ferroelectric since the opposite charge level or the “repolarization” of the ferroelectric capacitor is no longer reached completely, and is thus below the threshold value for the downstream sense amplifier.
- These two contradictory configuration conditions for the capacitance of the ferroelectric capacitor and the capacitance of the bit line limit the configuration freedom and feasibility of ferroelectric memories and memory arrays to a very major extent.
- It follows from the two contradictory conditions that there is an optimum value for the ratio of the bit line capacitance to the capacitance of the ferroelectric capacitor. If this results in a very high bit line capacitance for a given capacitance of the ferroelectric capacitor, then the bit line will be very long, which leads to a long bit line time constant. This slows down the read rate of the ferroelectric memory cell and of the ferroelectric memory to a major extent.
- If a given capacitance of the ferroelectric capacitor results in that a very small bit line capacitance should be used, then the bit line must be chosen to be very short, which necessitates a cell array architecture with a very large number of bit lines and sense amplifiers. This leads to a large space requirement for the ferroelectric memory.
- In order to achieve optimum area utilization in the ferroelectric memory cell array, it is thus necessary to use a ratio other than the optimum between the bit line capacitance and the capacitance of the ferroelectric capacitor. For the reasons mentioned above, this leads to a reduction in the read signal on the bit line.
- It is accordingly an object of the invention to provide a circuit configuration for reading a memory cell having a ferroelectric capacitor which overcomes the above-mentioned disadvantages of the prior art devices of this general type, in which a ratio of the bit line capacitance to the capacitance of the ferroelectric capacitor can be selected within a wider range.
- With the foregoing and other objects in view there is provided, in accordance with the invention, a circuit configuration for reading circuits. The circuit configuration contains a memory cell having a ferroelectric capacitor, a bit line connected to the memory cell, and a differential amplifier having a first differential amplifier input, a second differential amplifier input and a differential amplifier output. The first differential amplifier input is inverting and the second differential amplifier input is non-inverting, the first differential amplifier input is connected to the bit line, and the second differential amplifier input is connected to a reference signal. A driver circuit having a driver input connected to the differential amplifier output and a driver output connected to the bit line for regulating a potential on the bit line at a potential of the reference signal is provided.
- The achievement of the object according to the invention introduces a new assessment principle for ferroelectric memories. One idea in this case is for the voltage on the bit line when reading the ferroelectric memory cell to be regulated by a control loop to the value of a reference signal. Thus, when the ferroelectric memory cell is being read, the voltage on the bit line remains approximately constant, except for any control error. The voltage of the voltage source connected to the ferroelectric capacitor is varied. In consequence, the voltage dropped across the ferroelectric capacitor is governed essentially by the voltage of the voltage source, and is independent of the ratio of the bit line capacitance to the capacitance of the ferroelectric capacitor. The first driver circuit is used to close the control loop and to provide the feedback from the differential amplifier output to the first differential amplifier input. Since, in ferroelectric memories and ferroelectric capacitors, the amount of charge which is required to repolarize the ferroelectric capacitor represents the magnitude to be measured, the first driver circuit is preferably configured such that it provides an appropriate amount of charge at the first driver output as a function of the input signal at the first driver input to the ferroelectric capacitor, and thus keeps the voltage on the bit line substantially constant.
- It is also possible to provide for a second driver circuit, having a second driver input and a second driver output, to be disposed, and for the differential amplifier output to be connected to the second driver input. The second driver circuit operates, for example, in an equivalent manner to the first driver circuit. However, it is used to supply charge to a circuit configuration downstream from it. The second driver circuit advantageously makes it possible to supply a downstream circuit with an amount of charge that is equal to, proportional to or is equivalent to that of the ferroelectric capacitor.
- A further refinement of the invention contains the provision of an assessment circuit with an assessment input and an assessment output, and the assessment input being connected to the second driver output. The object of the assessment circuit downstream from the second driver circuit is to assess the charge signal supplied from the second driver circuit and transform it to a suitable form for downstream circuit elements, for example in the form of CMOS-compatible voltage levels.
- According to a further embodiment of the invention, the bit line together with the differential amplifier and the first driver circuit are regulated to the voltage of the reference signal. Since the bit line is regulated to the value of the reference signal, the voltage on the bit line remains approximately constant. This advantageously results in that the bit line charge level need not be changed to a different voltage level, meaning that the ferroelectric memory configuration can be read quickly. It is also advantageous that the voltage dropped across the ferroelectric capacitor is governed essentially by the voltage source. In consequence, the voltage dropped across the ferroelectric capacitor is dependent neither on the bit line capacitance nor on the polarization of the ferroelectric in the ferroelectric capacitor.
- One development of the invention provides for the ferroelectric memory cell to have a ferroelectric capacitor and a selection transistor with a gate connection, with a first connection of the ferroelectric capacitor connected to a voltage source, a second connection of the ferroelectric capacitor connected to a source region of the selection transistor, and the bit line connected to a drain region of the selection transistor. The described ferroelectric memory cell is particularly suitable for being read using the circuit configuration according to the invention. The described ferroelectric memory cell is compact, and contains only two components.
- The configuration according to the invention furthermore provides for the assessment device to have a comparator with a first comparator input and a second comparator input. The first comparator input is connected to a reference signal, and the second comparator input is connected to a measurement capacitor and to the second driver output. The object of the measurement capacitor is to add up the amount of charge supplied from the second driver circuit and to be charged to an appropriate level, which is equivalent to the polarization of the ferroelectric memory cells. The voltage change produced by the amount of charge that is supplied from the second driver circuit can be varied by the magnitude of the measurement capacitor.
- The downstream comparator compares the voltage dropped across the measurement capacitor with a reference voltage and, at its output, produces a voltage which corresponds to a logic “1” or to a logic “0”. The reference voltage is chosen such that the voltage dropped across the measurement capacitor for a ferroelectric capacitor which has not been repolarized and for a ferroelectric capacitor which has been repolarized is respectively less than and greater than the reference voltage.
- The circuit configuration according to the invention for reading a ferroelectric memory cell separates the step of reading the cell information and the step of assessment of the cell information. These two tasks can thus be optimized independently of one another.
- Other features which are considered as characteristic for the invention are set forth in the appended claims.
- Although the invention is illustrated and described herein as embodied in a circuit configuration for reading a memory cell having a ferroelectric capacitor, it is nevertheless not intended to be limited to the details shown, since various modifications and structural changes may be made therein without departing from the spirit of the invention and within the scope and range of equivalents of the claims.
- The construction and method of operation of the invention, however, together with additional objects and advantages thereof will be best understood from the following description of specific embodiments when read in connection with the accompanying drawings.
- FIG. 1 is a circuit diagram of a ferroelectric memory cell according to the invention;
- FIG. 2 is a block diagram of a circuit configuration according to the invention for reading the memory cell having a ferroelectric capacitor; and
- FIG. 3 is a circuit diagram of the configuration of an assessment circuit according to the invention.
- In all the figures of the drawing, sub-features and integral parts that correspond to one another bear the same reference symbol in each case. Referring now to the figures of the drawing in detail and first, particularly, to FIG. 1 thereof, there is shown a ferroelectric memory cell FSPZ having a ferroelectric capacitor CF. The ferroelectric capacitor CF is connected to a voltage source VPL and to a selection transistor T, which is controlled via a gate connection WL and, for its part, is connected to a bit line BL. Owing to the geometric configurations of the bit line BL, the bit line BL has a parasitic bit line capacitance CBL. When the transistor T is switched on, a voltage is applied, using the voltage source VPL, to the ferroelectric memory cell FSPZ so that a voltage VF is dropped across the ferroelectric capacitor CF, and a voltage VBL is dropped across the bit line capacitance CBL. The configuration containing the ferroelectric capacitor CF and the bit line capacitance CBL acts as a capacitance voltage divider. In order to read the ferroelectric memory cell FSPZ, the selection transistor T is normally switched on by applying a suitable voltage to its gate connection WL, so that the ferroelectric capacitor CF is connected with a low impedance to the bit line BL. Normally, the voltage of the voltage source VPL is then varied, and a read signal is produced on the bit line BL.
- FIG. 2 shows a circuit configuration according to the invention for reading the ferroelectric memory cell. The circuit configuration includes a differential amplifier D, which has a first differential amplifier input DE1 and a second differential amplifier input DE2. The first differential amplifier input DE1 is, for example, an inverting input, and the second differential amplifier input DE2 is, for example, a non-inverting input. The second differential amplifier input DE2 is connected to a reference signal VBLSOLL, and the first differential amplifier input DE1 is connected to the bit line BL. Normally, a differential amplifier has one positive and one negative input. In this exemplary embodiment, the second differential amplifier input DE2 is the positive input, and the first differential amplifier input DE1 is the negative input.
- Furthermore a first driver circuit TR1 having a first driver output TRA1 and a first driver input TRE1 is disposed such that the differential amplifier output DA is connected to the first driver input TRE1, and the first driver output TRA1 is connected to the bit line BL. In consequence, the described configuration corresponds to a differential amplifier with feedback. The feedback circuit is enclosed by a dashed line and is referred to as a control loop R. In this exemplary embodiment, the first driver circuit TR1 is used to supply the bit line BL with an amount of charge which is governed by the signal at the differential amplifier output DA. This charge is used to regulate the bit line voltage VBL at the reference value of the reference signal VBLSOLL.
- Furthermore, a second driver circuit TR2 having a second driver input TRE2 and a second driver output TRA2 is disposed such that the differential amplifier output DA is connected to the second driver input TRE2.
- An assessment circuit B, which has an input BE and an output BA, is disposed such that the second driver output TRA2 is connected to the assessment input BE. The object of the second driver circuit TR2 in this case is to supply the assessment circuit B with an amount of charge which is equivalent to the amount of charge supplied to the bit line EL via the first driver circuit TR1. The circuit configuration results in that the assessment circuit B is supplied with an amount of charge which is equal to, proportional to or equivalent to the amount of charge which was used, via the bit line BL, to read the ferroelectric capacitor CF of the ferroelectric memory cell FSPZ. The assessment output BA is in this case used as a data output DOUT from the circuit configuration according to the invention.
- FIG. 3 shows a further refinement of the assessment circuit B according to the invention. The assessment circuit B contains a comparator COMP having a first comparator input COMPE1, a second comparator input COMPE2 and a comparator output COMPA. The first comparator input COMPE1 is connected to a reference voltage VBREF. The second comparator input COMPE2 is connected to the assessment input BE and to a measurement capacitor CMESS. That electrode of the measurement capacitor CMESS which faces away from the second comparator input COMPE2 is connected to a reference ground potential. The comparator output COMPA is connected to the output BA of the assessment circuit B, and thus to the data output DOUT. The measurement capacitor CMESS is used to add up the amount of charge that is supplied via the assessment input BE to the assessment circuit B. In the process, the measurement capacitor CMESS is charged to a corresponding voltage level. The voltage level dropped across the measurement capacitor CMESS is compared with the reference voltage VBREF by the comparator COMP, and an appropriate output signal DOUT is produced. A transistor which is connected to the assessment input BE and to an initialization voltage source VINIT, and which is controlled via an initialization signal INIT, is used to ensure that the assessment circuit B is in a defined state at the start of an assessment process.
Claims (6)
Applications Claiming Priority (3)
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DE10019481 | 2000-04-19 | ||
DE10019481.8 | 2000-04-19 | ||
DE10019481A DE10019481C1 (en) | 2000-04-19 | 2000-04-19 | Circuit arrangement for reading a memory cell with a ferroelectric capacitor |
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US20020024836A1 true US20020024836A1 (en) | 2002-02-28 |
US6434039B1 US6434039B1 (en) | 2002-08-13 |
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EP (1) | EP1148514B1 (en) |
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Cited By (2)
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US20090021839A1 (en) * | 2006-02-17 | 2009-01-22 | Carl Zeiss Smt Ag | Optical integrator for an illumination system of a microlithographic projection exposure apparatus |
EP3440674A4 (en) * | 2016-04-05 | 2019-12-11 | Micron Technology, Inc. | Charge extraction from ferroelectric memory cell |
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KR100492781B1 (en) * | 2003-05-23 | 2005-06-07 | 주식회사 하이닉스반도체 | Non-volatile ferroelectric memory device for controlling multi-bit |
JP4452631B2 (en) * | 2005-01-21 | 2010-04-21 | パトレネラ キャピタル リミテッド, エルエルシー | memory |
CN101155549B (en) * | 2005-03-21 | 2011-11-16 | 加利福尼亚大学董事会 | Functionalized magnetic nanoparticles and methods of use thereof |
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US5274583A (en) * | 1992-01-02 | 1993-12-28 | National Semiconductor Corporation | Charge-integrating preamplifier for ferroelectric memory |
FR2694119B1 (en) * | 1992-07-24 | 1994-08-26 | Sgs Thomson Microelectronics | Reading circuit for memory, with recharging and balancing before reading. |
US5905672A (en) * | 1997-03-27 | 1999-05-18 | Micron Technology, Inc. | Ferroelectric memory using ferroelectric reference cells |
US5721699A (en) * | 1996-03-18 | 1998-02-24 | Symetrix Corporation | Ferroelectric memory with feedback circuit |
KR100306823B1 (en) | 1997-06-02 | 2001-11-30 | 윤종용 | Non-volatile semiconductor memory device having ferroelectric memory cells |
US5969980A (en) | 1997-11-14 | 1999-10-19 | Ramtron International Corporation | Sense amplifier configuration for a 1T/1C ferroelectric memory |
US6002634A (en) | 1997-11-14 | 1999-12-14 | Ramtron International Corporation | Sense amplifier latch driver circuit for a 1T/1C ferroelectric memory |
US5986919A (en) | 1997-11-14 | 1999-11-16 | Ramtron International Corporation | Reference cell configuration for a 1T/1C ferroelectric memory |
IT1298939B1 (en) * | 1998-02-23 | 2000-02-07 | Sgs Thomson Microelectronics | STATIC FEEDBACK DETECTION AMPLIFIER FOR NON-VOLATILE MEMORIES |
US6215692B1 (en) * | 1998-05-13 | 2001-04-10 | Hyundai Electronics Industries Co., Ltd. | Non-volatile ferroelectric memory |
US6141237A (en) * | 1999-07-12 | 2000-10-31 | Ramtron International Corporation | Ferroelectric non-volatile latch circuits |
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2000
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2001
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- 2001-04-09 DE DE50110202T patent/DE50110202D1/en not_active Expired - Lifetime
- 2001-04-17 TW TW090109141A patent/TW530302B/en not_active IP Right Cessation
- 2001-04-19 JP JP2001121421A patent/JP3896257B2/en not_active Expired - Fee Related
- 2001-04-19 CN CNB011196424A patent/CN1197086C/en not_active Expired - Fee Related
- 2001-04-19 KR KR1020010021112A patent/KR100606646B1/en not_active IP Right Cessation
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Cited By (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US20090021839A1 (en) * | 2006-02-17 | 2009-01-22 | Carl Zeiss Smt Ag | Optical integrator for an illumination system of a microlithographic projection exposure apparatus |
EP3440674A4 (en) * | 2016-04-05 | 2019-12-11 | Micron Technology, Inc. | Charge extraction from ferroelectric memory cell |
US11087816B2 (en) | 2016-04-05 | 2021-08-10 | Micron Technology, Inc. | Charge extraction from ferroelectric memory cell |
US11322191B2 (en) | 2016-04-05 | 2022-05-03 | Micron Technology, Inc. | Charge extraction from ferroelectric memory cell |
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