US20010056203A1 - O-aminophenolcarboxylic acid and o-aminothiophenolcarboxylic acid - Google Patents
O-aminophenolcarboxylic acid and o-aminothiophenolcarboxylic acid Download PDFInfo
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- US20010056203A1 US20010056203A1 US09/901,218 US90121801A US2001056203A1 US 20010056203 A1 US20010056203 A1 US 20010056203A1 US 90121801 A US90121801 A US 90121801A US 2001056203 A1 US2001056203 A1 US 2001056203A1
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- HBGCWXDXQGFHPQ-UHFFFAOYSA-N C=C=Nc1ccc(Oc2c(F)c(F)c(-c3c(F)c(F)c(Oc4ccc(C(=O)OCc5ccccc5)cc4)c(F)c3F)c(F)c2F)cc1OCc1ccccc1 Chemical compound C=C=Nc1ccc(Oc2c(F)c(F)c(-c3c(F)c(F)c(Oc4ccc(C(=O)OCc5ccccc5)cc4)c(F)c3F)c(F)c2F)cc1OCc1ccccc1 HBGCWXDXQGFHPQ-UHFFFAOYSA-N 0.000 description 1
- JLLDHHQPWYXHRO-UHFFFAOYSA-N CCC.CCC.CCC.CCC.COC.COC.COC.COC.COC.COC.COC.COC.COC.COC.COC.COC.COC.COC.COC.COC.COC.COC.COC.COC.F.F.F.c1ccc2ccccc2c1.c1ccc2ccccc2c1.c1ccc2ccccc2c1.c1ccc2ccccc2c1.c1ccccc1.c1ccccc1.c1ccccc1.c1ccccc1.c1ccccc1.c1ccccc1.c1ccccc1.c1ccccc1.c1ccccc1.c1ccccc1 Chemical compound CCC.CCC.CCC.CCC.COC.COC.COC.COC.COC.COC.COC.COC.COC.COC.COC.COC.COC.COC.COC.COC.COC.COC.COC.COC.F.F.F.c1ccc2ccccc2c1.c1ccc2ccccc2c1.c1ccc2ccccc2c1.c1ccc2ccccc2c1.c1ccccc1.c1ccccc1.c1ccccc1.c1ccccc1.c1ccccc1.c1ccccc1.c1ccccc1.c1ccccc1.c1ccccc1.c1ccccc1 JLLDHHQPWYXHRO-UHFFFAOYSA-N 0.000 description 1
- UKZPHQVWZHSCNP-UHFFFAOYSA-N COc1cc(Oc2ccc(C)cc2)ccc1N Chemical compound COc1cc(Oc2ccc(C)cc2)ccc1N UKZPHQVWZHSCNP-UHFFFAOYSA-N 0.000 description 1
- HKBDYXCFEVHPTI-UHFFFAOYSA-N Cc1cc(Oc2c(F)c(F)nc(Oc3ccc(C(=O)O)cc3)c2F)ccc1N Chemical compound Cc1cc(Oc2c(F)c(F)nc(Oc3ccc(C(=O)O)cc3)c2F)ccc1N HKBDYXCFEVHPTI-UHFFFAOYSA-N 0.000 description 1
- DUVALTZEVKHSHH-UHFFFAOYSA-N Cc1ccc(Oc2ccc(C(=O)OCc3ccccc3)cc2)cc1OCc1ccccc1 Chemical compound Cc1ccc(Oc2ccc(C(=O)OCc3ccccc3)cc2)cc1OCc1ccccc1 DUVALTZEVKHSHH-UHFFFAOYSA-N 0.000 description 1
- BSMKLKTXFZDTNS-UHFFFAOYSA-N Fc1c(F)c(F)c(C(F)(F)F)c(Oc2ccc(COOCc3ccccc3)cc2)c1F Chemical compound Fc1c(F)c(F)c(C(F)(F)F)c(Oc2ccc(COOCc3ccccc3)cc2)c1F BSMKLKTXFZDTNS-UHFFFAOYSA-N 0.000 description 1
- VZJQZKWRFRHZHZ-UHFFFAOYSA-N Nc1ccc(Cc2ccc(C(=O)O)cc2)cc1O Chemical compound Nc1ccc(Cc2ccc(C(=O)O)cc2)cc1O VZJQZKWRFRHZHZ-UHFFFAOYSA-N 0.000 description 1
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- ATFHYBKJURKORG-UHFFFAOYSA-N Nc1ccc(Oc2c(F)c(F)c(C(F)(F)F)c(Oc3ccc(CC=O)cc3)c2F)cc1O Chemical compound Nc1ccc(Oc2c(F)c(F)c(C(F)(F)F)c(Oc3ccc(CC=O)cc3)c2F)cc1O ATFHYBKJURKORG-UHFFFAOYSA-N 0.000 description 1
- HCLGNWGGMBEEHB-UHFFFAOYSA-N Nc1ccc(Oc2ccc(C(=O)O)cc2)cc1O Chemical compound Nc1ccc(Oc2ccc(C(=O)O)cc2)cc1O HCLGNWGGMBEEHB-UHFFFAOYSA-N 0.000 description 1
- BCNIYAYTJBMUTQ-UHFFFAOYSA-N O=C(OCc1ccccc1)c1ccc(Oc2c(F)c(F)c(-c3c(F)c(F)c(F)c(F)c3F)c(F)c2F)cc1 Chemical compound O=C(OCc1ccccc1)c1ccc(Oc2c(F)c(F)c(-c3c(F)c(F)c(F)c(F)c3F)c(F)c2F)cc1 BCNIYAYTJBMUTQ-UHFFFAOYSA-N 0.000 description 1
- WISYZVIJTWACKH-UHFFFAOYSA-N O=C(OCc1ccccc1)c1ccc(Oc2nc(F)c(F)c(F)c2F)cc1 Chemical compound O=C(OCc1ccccc1)c1ccc(Oc2nc(F)c(F)c(F)c2F)cc1 WISYZVIJTWACKH-UHFFFAOYSA-N 0.000 description 1
- MTYILHJPOZEVKS-UHFFFAOYSA-N O=C(OCc1ccccc1)c1ccc(Oc2nc(F)c(F)c(Oc3ccc([N+](=O)[O-])c(OCc4ccccc4)c3)c2F)cc1 Chemical compound O=C(OCc1ccccc1)c1ccc(Oc2nc(F)c(F)c(Oc3ccc([N+](=O)[O-])c(OCc4ccccc4)c3)c2F)cc1 MTYILHJPOZEVKS-UHFFFAOYSA-N 0.000 description 1
- LRJSTEIBKUFQHP-UHFFFAOYSA-N O=[N+]([O-])c1ccc(Oc2c(F)c(F)c(C(F)(F)F)c(Oc3ccc(COOCc4ccccc4)cc3)c2F)cc1OCc1ccccc1 Chemical compound O=[N+]([O-])c1ccc(Oc2c(F)c(F)c(C(F)(F)F)c(Oc3ccc(COOCc4ccccc4)cc3)c2F)cc1OCc1ccccc1 LRJSTEIBKUFQHP-UHFFFAOYSA-N 0.000 description 1
Classifications
-
- C—CHEMISTRY; METALLURGY
- C07—ORGANIC CHEMISTRY
- C07D—HETEROCYCLIC COMPOUNDS
- C07D213/00—Heterocyclic compounds containing six-membered rings, not condensed with other rings, with one nitrogen atom as the only ring hetero atom and three or more double bonds between ring members or between ring members and non-ring members
- C07D213/02—Heterocyclic compounds containing six-membered rings, not condensed with other rings, with one nitrogen atom as the only ring hetero atom and three or more double bonds between ring members or between ring members and non-ring members having three double bonds between ring members or between ring members and non-ring members
- C07D213/04—Heterocyclic compounds containing six-membered rings, not condensed with other rings, with one nitrogen atom as the only ring hetero atom and three or more double bonds between ring members or between ring members and non-ring members having three double bonds between ring members or between ring members and non-ring members having no bond between the ring nitrogen atom and a non-ring member or having only hydrogen or carbon atoms directly attached to the ring nitrogen atom
- C07D213/60—Heterocyclic compounds containing six-membered rings, not condensed with other rings, with one nitrogen atom as the only ring hetero atom and three or more double bonds between ring members or between ring members and non-ring members having three double bonds between ring members or between ring members and non-ring members having no bond between the ring nitrogen atom and a non-ring member or having only hydrogen or carbon atoms directly attached to the ring nitrogen atom with hetero atoms or with carbon atoms having three bonds to hetero atoms with at the most one bond to halogen, e.g. ester or nitrile radicals, directly attached to ring carbon atoms
- C07D213/62—Oxygen or sulfur atoms
- C07D213/63—One oxygen atom
- C07D213/64—One oxygen atom attached in position 2 or 6
- C07D213/643—2-Phenoxypyridines; Derivatives thereof
-
- C—CHEMISTRY; METALLURGY
- C07—ORGANIC CHEMISTRY
- C07C—ACYCLIC OR CARBOCYCLIC COMPOUNDS
- C07C217/00—Compounds containing amino and etherified hydroxy groups bound to the same carbon skeleton
- C07C217/78—Compounds containing amino and etherified hydroxy groups bound to the same carbon skeleton having amino groups and etherified hydroxy groups bound to carbon atoms of six-membered aromatic rings of the same carbon skeleton
- C07C217/80—Compounds containing amino and etherified hydroxy groups bound to the same carbon skeleton having amino groups and etherified hydroxy groups bound to carbon atoms of six-membered aromatic rings of the same carbon skeleton having amino groups and etherified hydroxy groups bound to carbon atoms of non-condensed six-membered aromatic rings
- C07C217/82—Compounds containing amino and etherified hydroxy groups bound to the same carbon skeleton having amino groups and etherified hydroxy groups bound to carbon atoms of six-membered aromatic rings of the same carbon skeleton having amino groups and etherified hydroxy groups bound to carbon atoms of non-condensed six-membered aromatic rings of the same non-condensed six-membered aromatic ring
- C07C217/90—Compounds containing amino and etherified hydroxy groups bound to the same carbon skeleton having amino groups and etherified hydroxy groups bound to carbon atoms of six-membered aromatic rings of the same carbon skeleton having amino groups and etherified hydroxy groups bound to carbon atoms of non-condensed six-membered aromatic rings of the same non-condensed six-membered aromatic ring the oxygen atom of at least one of the etherified hydroxy groups being further bound to a carbon atom of a six-membered aromatic ring, e.g. amino-diphenylethers
-
- C—CHEMISTRY; METALLURGY
- C07—ORGANIC CHEMISTRY
- C07C—ACYCLIC OR CARBOCYCLIC COMPOUNDS
- C07C69/00—Esters of carboxylic acids; Esters of carbonic or haloformic acids
- C07C69/76—Esters of carboxylic acids having a carboxyl group bound to a carbon atom of a six-membered aromatic ring
- C07C69/84—Esters of carboxylic acids having a carboxyl group bound to a carbon atom of a six-membered aromatic ring of monocyclic hydroxy carboxylic acids, the hydroxy groups and the carboxyl groups of which are bound to carbon atoms of a six-membered aromatic ring
- C07C69/92—Esters of carboxylic acids having a carboxyl group bound to a carbon atom of a six-membered aromatic ring of monocyclic hydroxy carboxylic acids, the hydroxy groups and the carboxyl groups of which are bound to carbon atoms of a six-membered aromatic ring with etherified hydroxyl groups
Definitions
- the invention relates to novel o-aminophenolcarboxylic acids and o-aminothiophenolcarboxylic acids, which are also jointly abbreviated to o-amino(thio)phenolcarboxylic acids, and to a process for their preparation.
- o-Aminophenolcarboxylic acids are needed, in particular, for the preparation of high-temperature-stable polymers, such as polybenzoxazoles (PBOs) and their precursors.
- PBOs polybenzoxazoles
- the use of o-aminophenolcarboxylic acids has significant advantages. For example, an o-aminophenolcarboxylic acid can be reacted with itself, i.e. a second monomer is not absolutely necessary for the polymerization. This allows purity monitoring and storage to be simplified.
- the stoichiometry is predefined, i.e.
- PBO precursors in the form of a photosensitive composition can be structured inexpensively by direct methods, i.e. without an auxiliary resist.
- PBO precursors offer the advantage of positive structurability and aqueous-alkaline development (see EP 0 023 662 B1 and EP 0 264 678 B1).
- the PBO precursors used must be substantially transparent at the exposure wavelength and sufficiently soluble in the developer, which preferably contains no metal ions.
- polybenzoxazoles also have the major advantage that they—compared with the cyclized final product—as readily soluble precursors, can be applied to a substrate and then cyclized, during which the solubility and thus the sensitivity to solvents and other process chemicals decreases greatly.
- o-Aminophenolcarboxylic acids are disclosed, for example, in GB 811,758 and GB 1,283,476.
- the water absorption in boiling water after 24 h is 0.77%.
- the object of the invention is to provide o-aminophenolcarboxylic acids and o-aminothiophenolcarboxylic acids which are suitable for the preparation of polymers which satisfy the greatly increased demands of microelectronics.
- the o-amino(thio)phenolcarboxylic acids should, in particular, enable the preparation of readily soluble polymer precursors which, after cyclization on a substrate, give polybenzoxazoles or polybenzothiazoles of low moisture absorption and high degree of planarization.
- a 1 to A 7 are—independently of one another—H, CH 3 , OCH 3 , CH 2 CH 3 or OCH 2 CH 3 ;
- T is O or S,; m is 0 or 1;
- Z is one of the following carbocyclic or heterocyclic aromatic radicals:
- M a single bond, (CH 2 ) n , (CF 2 ) n , CH(CH 3 ), CH(CF 3 ), CF(CH 3 ), CF(CF 3 ), C(CH 3 ) 2 , C(CF 3 ) 2 , CH(C 6 H 5 ), CH(C 6 F 5 ), CF(C 6 H 5 ), CF(C 6 F 5 ), C(CH 3 )(C 6 H 5 ), C(CH 3 )(C 6 F 5 ), C(CF 3 )(C 6 H 5 ), C(CF 3 )(C 6 F 5 ), C(C 6 H 5 ) 2 , C(C 6 F 5 ) 2 , CO, SO 2
- novel compounds have, for example, the following preferred structure:
- the ether bridges are apparently responsible for the good solubility and the good planarization properties of the polymer precursors prepared therewith.
- the characterization “A 1 -A 3 ” and “A 4 -A 7 ” in the structural formula means that the aminophenyl groups and carboxyphenyl groups contain radicals A 1 , A 2 and A 3 , and A 4 , A 5 , A 6 and A 7 respectively.
- o-amino(thio)phenolcarboxylic acids can be prepared by
- nitrophenol or nitrothiophenol (abbreviated to “nitro(thio)phenol”) of the structure
- X is a halogen atom
- E is CN or COOR 1
- R 1 alkyl (having 1 to 5 carbon atoms)
- phenyl or benzyl A 1 to A 7 , T and Z are as defined above
- R is one of the following radicals: alkyl, alkoxyalkyl, alkenyl, alkoxyalkenyl, alkynyl or alkoxyalkynyl, each having a maximum of 6 carbon atoms, phenyl, phenacyl or benzyl, and benzylalkyl, benzylalkenyl, benzyloxyalkyl, benzyloxyalkenyl, benzylalkoxyalkyl or benzylalkoxyalkenyl, each having a maximum of 4 aliphatic carbon atoms; and
- o-amino(thio)phenolcarboxylic acids can also be prepared by
- X is a halogen atom
- E is CN or COOR 1
- R 1 alkyl (having 1 to 5 carbon atoms), phenyl or benzyl
- a 1 to A 7 , T and Z are as defined above, and R is one of the above mentioned radicals
- the protecting group R is preferably an alkyl, alkoxyalkyl, phenyl or benzyl group. It is an important advantage that the radical RT is stable in the reaction between the halogen compound and the nitro(thio)phenol, but can subsequently be removed.
- the reaction between the halogen compound and the nitro (thio)phenol, in which an ether or thioether bridge is formed, is carried out in the presence of a base.
- This base is preferably a carbonate or hydrogencarbonate of an alkali metal or alkaline earth metal, such as sodium carbonate or potassium carbonate.
- Formation of the (thio ether requires at least a stoichiometric amount of the base. It may also be advantageous to use an organic base containing a tertiary N atom, for example triethylamine or pyridine.
- nitro(thio)phenol can also be replaced by a corresponding alkali metal salt, for example the potassium salt.
- a base is not absolutely necessary for the reaction with the halogen compound.
- a reaction temperature in the range from ⁇ 10 to 80° C. has proven suitable. Temperatures ⁇ 80° C. are preferred owing to the greater selectivity of the reaction.
- Suitable solvents are, in particular, dimethylformamide, diethylformamide, dimethylacetamide, dimethyl sulfoxide, N-methylpyrrolidone, ⁇ -butyrolactone, acetonitrile, tetrahydrofuran and pyridine. In principle, however, all polar aprotic solvents in which the starting compounds are soluble can be used.
- the reduction of the nitro compound can be carried out, for example, by catalytic hydrogenation using, for example hydrogen on Pd/C catalyst. In principle, however, all the processes which are suitable for reducing the nitro group to the amino group are suitable.
- the hydrolysis of the ester or nitrile group can be carried out, for example, using potassium hydroxide.
- the protecting group can be removed using, for example, trifluoroacetic acid or titanium tetrachloride. These reactions can be carried out in separate process steps; the sequence of the process steps is unimportant.
- the polymer precursors prepared from the o-amino(thio)phenolcarboxylic acids of the invention and having improved properties compared with the prior art are soluble in many organic solvents, such as acetone, cyclohexanone, N-methylpyrrolidone, diethylene glycol mono- or diethyl ether, ethyl lactate and ⁇ -butyrolactone, and in aqueous-alkaline developers containing no metal ions. They are therefore highly suitable as base polymers for dielectrics which can be photostructured positively and can be developed in aqueous-alkaline media.
- the precursors can easily be applied to substrates, such as silicone wafers, by spin-coating methods, they form uniform films, and can readily be cyclized on the substrate.
- substrates such as silicone wafers
- a particular advantage of the precursors prepared from these o-amino(thio)phenolcarboxylic acids is their high planarization capacity and low moisture absorption.
- Mass spectrum molecular peak at 542. Elemental analysis: Theoretical value (in %): C: 57.6; H: 2.0. Found (in %): C: 57.5; H: 1.9. m.p.: 120° C.
- the yellow-beige solution is evaporated to half in a rotary evaporator and left to stand overnight at room temperature, during which the reaction product precipitates out in crystalline form.
- the reaction product is then separated off and dried for 48 hours under nitrogen at 40° C./10 mbar in a vacuum drying cabinet (yield: 91%).
- the organic phase is then washed three times with water, dried over sodium sulfate and evaporated in a rotary evaporator until the reaction product precipitates out.
- the reaction product is stirred in petroleum ether (boiling range 40 to 60° C.) for 2 hours, filtered off via a Buchner funnel and then dried for 48 hours under nitrogen at 40° C./10 mbar in a vacuum drying cabinet (yield: 91%).
- the crude product is washed by shaking with 300 ml of ethyl acetate and 700 ml of water, and the organic phase is washed three times with water and evaporated in a rotary evaporator until the reaction product precipitates out.
- the reaction product is then recrystallized from a mixture of ethyl acetate and n-hexane (volume ratio 1:1) and then dried for 48 hours under nitrogen at 40° C./10 mbar in a vacuum drying cabinet (yield: 92%).
- the orange solution is evaporated to half in a rotary evaporator and left to stand overnight at room temperature, during which the reaction product precipitates out in crystalline form.
- the reaction product is then dried for 48 hours under nitrogen at 40° C./10 mbar in a vacuum drying cabinet (yield: 91%).
- the clear solution obtained is evaporated in a rotary evaporator until the reaction product precipitates out.
- the reaction product is then stirred in n-hexane, filtered off through a fluted filter and then dried for 48 hours under nitrogen at 40° C./10 mbar in a vacuum drying cabinet (yield: 95%).
- the crude product is washed by shaking with 300 ml of ethyl acetate and 700 ml of water, and the organic phase is washed three times with water and evaporated in a rotary evaporator until the reaction product precipitates out.
- the reaction product is then recrystallized from a mixture of ethyl acetate and n-hexane (volume ratio 1:1) and then dried for 48 hours under nitrogen at 40° C./10 mbar in a vacuum drying cabinet (yield: 94%).
- the orange solution is evaporated to half in a rotary evaporator and left to stand overnight at room temperature, during which the reaction product precipitates out in crystalline form.
- the reaction product is then dried for 48 hours under nitrogen at 40° C./10 mbar in a vacuum drying cabinet (yield:95%).
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- Chemical & Material Sciences (AREA)
- Organic Chemistry (AREA)
- Organic Low-Molecular-Weight Compounds And Preparation Thereof (AREA)
- Pyridine Compounds (AREA)
Abstract
Description
- This is a divisional of application Ser. No. 09/161,147, filed on Sep. 24, 1998.
- 1. Field of the Invention
- The invention relates to novel o-aminophenolcarboxylic acids and o-aminothiophenolcarboxylic acids, which are also jointly abbreviated to o-amino(thio)phenolcarboxylic acids, and to a process for their preparation.
- o-Aminophenolcarboxylic acids are needed, in particular, for the preparation of high-temperature-stable polymers, such as polybenzoxazoles (PBOs) and their precursors. Compared with the preparation of polybenzoxazoles or PBO precursors from bis-o-aminophenols and dicarboxylic acids, the use of o-aminophenolcarboxylic acids has significant advantages. For example, an o-aminophenolcarboxylic acid can be reacted with itself, i.e. a second monomer is not absolutely necessary for the polymerization. This allows purity monitoring and storage to be simplified. In addition, the stoichiometry is predefined, i.e. errors in the calculation or weighing-out of the reactants, as can occur in the reaction of bis-o-aminophenols with dicarboxylic acids, are excluded if o-aminophenolcarboxylic acids are used. Furthermore, the nature of the monomer used has a strong effect on the property profile of the PBO precursor or polybenzoxazole prepared therewith. For example, not only the thermal, electrical and mechanical behavior, but also the solubility and hydrolysis stability and numerous other properties of the polymer are greatly affected by the monomer used in the preparation.
- PBO precursors in the form of a photosensitive composition can be structured inexpensively by direct methods, i.e. without an auxiliary resist. Compared with other dielectrics which can be photostructured directly, such as polyimide (PI) and benzocyclobutene (BCB), PBO precursors offer the advantage of positive structurability and aqueous-alkaline development (see EP 0 023 662 B1 and EP 0 264 678 B1). To this end, the PBO precursors used must be substantially transparent at the exposure wavelength and sufficiently soluble in the developer, which preferably contains no metal ions. Like polyimides, polybenzoxazoles also have the major advantage that they—compared with the cyclized final product—as readily soluble precursors, can be applied to a substrate and then cyclized, during which the solubility and thus the sensitivity to solvents and other process chemicals decreases greatly.
- Besides good solubility of the precursors, advantages for the use of polybenzoxazoles in microelectronics are low moisture absorption and a good planarization capacity. Production of components using a dielectric which produces good planarization allows expensive polishing procedures (chemical mechanical polishing, CMP) to be avoided.
- o-Aminophenolcarboxylic acids are disclosed, for example, in GB 811,758 and GB 1,283,476. In PBO films produced from the known monomers, the water absorption in boiling water after 24 h is 0.77%. No mention is made of the planarization behavior of the polymers produced after cyclization on the substrate or their suitability as base polymers for compositions which can be photostructured positively.
- The object of the invention is to provide o-aminophenolcarboxylic acids and o-aminothiophenolcarboxylic acids which are suitable for the preparation of polymers which satisfy the greatly increased demands of microelectronics. The o-amino(thio)phenolcarboxylic acids should, in particular, enable the preparation of readily soluble polymer precursors which, after cyclization on a substrate, give polybenzoxazoles or polybenzothiazoles of low moisture absorption and high degree of planarization.
-
- in which
- A1 to A7 are—independently of one another—H, CH3, OCH3, CH2CH3 or OCH2CH3;
- T is O or S,; m is 0 or 1;
-
- wherein Q=C—A or N,
- and A=H, F, (CH2)pCH3, (CF3)pCF3, O(CH2)pCH3, O(CF2)pCF3, CO(CH2)pCH3, CO(CF2)pCF3 where p=0 to 8 (linear or branched chains, OC(CH3)3, OC(CF3)3, C6H5, C6F5, OC6H5, OC6F5, cyclopentyl, perfluorocyclopentyl, cyclohexyl or perfluorocyclohexyl,
- where, in the isolated aromatic rings, a maximum of 3 nitrogen atoms may be present per ring and only 2 nitrogen atoms may be adjacent, and, in the fused ring systems, a maximum of 2 nitrogen atoms may be present per ring,
-
- with the proviso that, when m=0, a 3-amino-4-hydroxyphenoxy group cannot be in the p-position to the carboxyl group.
-
- In compounds of this type, the ether bridges are apparently responsible for the good solubility and the good planarization properties of the polymer precursors prepared therewith. By the way, the characterization “A1-A3” and “A4-A7” in the structural formula means that the aminophenyl groups and carboxyphenyl groups contain radicals A1, A2 and A3, and A4, A5, A6 and A7 respectively.
- The o-amino(thio)phenolcarboxylic acids can be prepared by
-
-
- in the presence of at least a stoichiometric amount of a base, or with an alkali metal salt of the nitro(thio)phenol, in a solvent at a temperature between −10 and 80° C.,
- where X is a halogen atom, E is CN or COOR1, where R1=alkyl (having 1 to 5 carbon atoms), phenyl or benzyl, A1 to A7, T and Z are as defined above, and R is one of the following radicals: alkyl, alkoxyalkyl, alkenyl, alkoxyalkenyl, alkynyl or alkoxyalkynyl, each having a maximum of 6 carbon atoms, phenyl, phenacyl or benzyl, and benzylalkyl, benzylalkenyl, benzyloxyalkyl, benzyloxyalkenyl, benzylalkoxyalkyl or benzylalkoxyalkenyl, each having a maximum of 4 aliphatic carbon atoms; and
- (b) reducing and hydrolyzing the resultant nitro compound to the amino compound, and removing the group R.
- In this synthesis, which is very economical, a halogen-containing ester or a corresponding nitrile is thus reacted with a nitro(thio)phenol having an R-protected hydroxyl or mercapto group in the o-position to the nitro group. The nitro compound formed is then reduced to the corresponding amino compound, the ester or nitrile group is hydrolyzed to the carboxyl group, and the protecting group R is removed.
- Alternatively, the o-amino(thio)phenolcarboxylic acids can also be prepared by
-
-
- in the presence of at least a stoichiometric amount of a base, or with an alkali metal salt of the (thio)phenol, in a solvent at a temperature between −10 and 80° C.,
- where X is a halogen atom, E is CN or COOR1, where R1=alkyl (having 1 to 5 carbon atoms), phenyl or benzyl, A1 to A7, T and Z are as defined above, and R is one of the above mentioned radicals; and
- (b) reducing and hydrolyzing the resultant nitro compound to the amino compound, and removing the group R.
- In this preparation process, which is likewise very economical, a halogen-containing nitro compound having a protected hydroxyl or mercapto group in the opposition to the nitro group is thus reacted with a (thio)phenol containing an ester or nitrile group. The nitro compound formed is then—in the manner indicated above—subjected to a reduction, hydrolysis and removal of protecting group.
- The preparation of nitro(thio)phenols containing a protected hydroxyl or mercapto group in the o-position to the nitro group has been described in the parallel German patent application serial no. 197 42 135.0 “o-Nitro(thio)phenol derivatives, and their preparation” (docket GR 97 P 3683).
- The protecting group R is preferably an alkyl, alkoxyalkyl, phenyl or benzyl group. It is an important advantage that the radical RT is stable in the reaction between the halogen compound and the nitro(thio)phenol, but can subsequently be removed.
- The reaction between the halogen compound and the nitro (thio)phenol, in which an ether or thioether bridge is formed, is carried out in the presence of a base. This base is preferably a carbonate or hydrogencarbonate of an alkali metal or alkaline earth metal, such as sodium carbonate or potassium carbonate. Formation of the (thio ether requires at least a stoichiometric amount of the base. It may also be advantageous to use an organic base containing a tertiary N atom, for example triethylamine or pyridine.
- The nitro(thio)phenol can also be replaced by a corresponding alkali metal salt, for example the potassium salt. In this case, a base is not absolutely necessary for the reaction with the halogen compound.
- A reaction temperature in the range from −10 to 80° C. has proven suitable. Temperatures ≦80° C. are preferred owing to the greater selectivity of the reaction.
- Suitable solvents are, in particular, dimethylformamide, diethylformamide, dimethylacetamide, dimethyl sulfoxide, N-methylpyrrolidone, γ-butyrolactone, acetonitrile, tetrahydrofuran and pyridine. In principle, however, all polar aprotic solvents in which the starting compounds are soluble can be used.
- The reduction of the nitro compound can be carried out, for example, by catalytic hydrogenation using, for example hydrogen on Pd/C catalyst. In principle, however, all the processes which are suitable for reducing the nitro group to the amino group are suitable. The hydrolysis of the ester or nitrile group can be carried out, for example, using potassium hydroxide. The protecting group can be removed using, for example, trifluoroacetic acid or titanium tetrachloride. These reactions can be carried out in separate process steps; the sequence of the process steps is unimportant.
- It is also possible to remove the protecting group and carry out the hydrolysis simultaneously, i.e. in one step. In the presence of an ester group, these two reactions are particularly advantageously carried out together with the reduction of the nitro group, preferably by hydrogenation using hydrogen on Pd/C. Hydrogenation is preferably carried out at temperatures of from 25 to 50° C. Suitable solvents are esters and ethers, for example ethyl acetate and tetrahydrofuran.
- The polymer precursors prepared from the o-amino(thio)phenolcarboxylic acids of the invention and having improved properties compared with the prior art are soluble in many organic solvents, such as acetone, cyclohexanone, N-methylpyrrolidone, diethylene glycol mono- or diethyl ether, ethyl lactate and γ-butyrolactone, and in aqueous-alkaline developers containing no metal ions. They are therefore highly suitable as base polymers for dielectrics which can be photostructured positively and can be developed in aqueous-alkaline media. The precursors can easily be applied to substrates, such as silicone wafers, by spin-coating methods, they form uniform films, and can readily be cyclized on the substrate. A particular advantage of the precursors prepared from these o-amino(thio)phenolcarboxylic acids is their high planarization capacity and low moisture absorption.
- The invention will be illustrated in greater detail below with reference to working examples.
-
- 37.4 g of decafluorobiphenyl (0.112 mol) are dissolved in 700 ml of dimethylformamide, the mixture is cooled to −10° C. using a cryostat, and a solution of 29.8 g of potassium 4-benzyloxycarbonylphenoxide (0.112 mol) in 300 ml of dimethylformamide is then added dropwise over the course of 2 hours. After 48 hours at −10° C., the potassium salt has reacted. The dimethylformamide is then removed in a rotary evaporator, the residue is taken up in a little tetrahydrofuran, and the solution is filtered through a silica-gel column. The clear solution obtained is evaporated in a rotary evaporator until a white solid precipitates out. The solid is then stirred in n-hexane, filtered off using a fluted filter and then dried for 48 hours under nitrogen at 40° C./10 mbar in a vacuum drying cabinet (yield: 92%).
- Characterization:
- Mass spectrum: molecular peak at 542. Elemental analysis: Theoretical value (in %): C: 57.6; H: 2.0. Found (in %): C: 57.5; H: 1.9. m.p.: 120° C.
-
- 49.9 g of the 4-(4-benzyloxycarbonylphenoxy)nonafluorobiphenyl prepared as described in Example 1 (0.092 mol) and 26.1 g of potassium 4-nitro-3-benzyloxyphenoxide (0.092 mol) are dissolved in 400 ml of dimethylformamide, and the solution is heated to 80° C.; the reaction is complete after 24 hours. The solvent is then removed in a rotary evaporator. The solid residue obtained is washed three times with methanol, filtered off via a Buchner funnel and subsequently dried for 48 hours under nitrogen at 40° C./10 mbar in a vacuum drying cabinet (yield: 94%).
- Characterization: Mass spectrum: molecular peak at 767. Elemental analysis: Theoretical value (in %): C: 61.0; H: 2.8; N: 1.8. Found (in %): C: 60.8; H: 2.7; N: 1.9. m.p.: 152° C.
-
- 49.9 g of the 4-(4-nitro-3-benzyloxyphenoxy)-4′-(4-benzyloxycarbonylphenoxy)octafluorobiphenyl prepared as described in Example 2 (0.065 mol) are dissolved in 400 ml of a mixture of tetrahydrofuran and ethyl acetate (volume ratio 1:1), and 5 g of Pd/C (palladium/carbon) are then added to the solution. The mixture is then hydrogenated using hydrogen at a pressure of 1 bar a room temperature in an autoclave with vigorous stirring; the reaction is terminated after 3 days. The yellow-beige solution is evaporated to half in a rotary evaporator and left to stand overnight at room temperature, during which the reaction product precipitates out in crystalline form. The reaction product is then separated off and dried for 48 hours under nitrogen at 40° C./10 mbar in a vacuum drying cabinet (yield: 91%).
- Characterization: Mass spectrum: molecular peak at 557. Elemental analysis: Theoretical value (in %): C: 53.9; H: 2.0; N: 2.5. Found (in %) C: 53.7; H: 2.1; N: 2.5. m.p.: 180° C. (decomposition).
-
- 24.7 g of 5-fluoro-2-nitrophenyl benzyl ether (0.1 mol) are dissolved in 250 ml of dimethyl sulfoxide, and a solution of 26.6 g of the potassium salt of benzyl 4-hydroxybenzoate (0.1 mol) in 250 ml of dimethyl sulfoxide is then slowly added dropwise with stirring at room temperature. The mixture is then stirred first at room temperature for 1 hour and then at 50° C. for 24 hours. The reaction solution is then allowed to cool to room temperature and is filtered through a fluted filter, the filtrate is diluted with 700 ml of water, and the crude product is washed by shaking with 300 ml of ethyl acetate. The organic phase is then washed three times with water, dried over sodium sulfate and evaporated in a rotary evaporator until the reaction product precipitates out. The reaction product is stirred in petroleum ether (boiling range 40 to 60° C.) for 2 hours, filtered off via a Buchner funnel and then dried for 48 hours under nitrogen at 40° C./10 mbar in a vacuum drying cabinet (yield: 91%).
- Characterization: Mass spectrum: molecular peak at 455. Elemental analysis: Theoretical value (in %): C: 71.2; H: 4.6; N: 3.1. Found (in %): C: 71.0; H: 4.7; N: 3.0. m.p.: 96° C.
-
- 46.6 g of the benzyl 4-(4-nitro-3-benzyloxyphenoxy)benzoate prepared as described in Example 4 (0.11 mol) are dissolved in 500 ml of a mixture of tetrahydrofuran and ethyl acetate, and 5 g of Pd/C (palladium/carbon) are added to the solution. The mixture is then hydrogenated using hydrogen at a pressure of 1 bar at room temperature in an autoclave with vigorous stirring; the reaction is terminated after 3 days. The pale violet solution is evaporated to half in a rotary evaporator and left to stand overnight at room temperature, during which the reaction product precipitates out in crystalline form. The reaction product is then separated off and dried for 48 hours under nitrogen at 40° C./10 mbar in a vacuum drying cabinet (yield: 93%).
- Characterization: Mass spectrum: molecular peak at 245. Elemental analysis: Theoretical value (in %): C: 63.7; H: 4.5; N: 5.7. Found (in %): C: 63.5; H: 4.5; N: 5.8. m.p.: 190° C. (decomposition).
-
- 33.8 g of pentafluoropyridine (0.2 mol) are dissolved in 500 ml of dimethylformamide, the solution is cooled to 0C by means of a cryostat, and a solution of 53.3 g of potassium 4-benzyloxycarbonylphenoxide (0.2 mol) in 400 ml of dimethylformamide is then added dropwise over the course of 2 hours. After 24 hours at 0° C., the potassium salt has reacted. The dimethylformamide is then removed in a rotary evaporator, the residue is taken up in a little tetrahydrofuran, and the solution is filtered through a silica-gel column. The clear solution obtained is evaporated in a rotary evaporator until the reaction product precipitates out. The reaction produce is then stirred in n-hexane, filtered off via a fluted filter and then dried for 48 hours under nitrogen at 40° C./10 mbar in a vacuum drying cabinet (yield: 91%).
- Characterization: Mass spectrum: molecular peak at 377. Elemental analysis: Theoretical value (in %): C: 60.5; H: 2.9; N: 3.7. Found (in %): C: 60.6; H: 2.9; N: 3.6.
-
- 40 g of the 2-(4-benzyloxycarbonylphenoxy)-3,4,5,6-tetrafluoropyridine prepared as described in Example 6 (0.106 mol) and 30 g of potassium 4-nitro-3-benzyloxyphenoxide (0.106 mol) are dissolved in 500 ml of dimethyl sulfoxide. 30 g of potassium carbonate (0.22 mol) are added in portions to the solution. The mixture is then stirred at room temperature for 24 hours, then heated at 60° C. for 24 hours, and 15 g of potassium hydrogencarbonate (0.15 mol) are then added. The reaction solution is then cooled to room temperature and filtered through a fluted filter. The crude product is washed by shaking with 300 ml of ethyl acetate and 700 ml of water, and the organic phase is washed three times with water and evaporated in a rotary evaporator until the reaction product precipitates out. The reaction product is then recrystallized from a mixture of ethyl acetate and n-hexane (volume ratio 1:1) and then dried for 48 hours under nitrogen at 40° C./10 mbar in a vacuum drying cabinet (yield: 92%).
- Characterization: Mass spectrum: molecular peak at 602. Elemental analysis: Theoretical value (in %): C: 63.8; H: 3.5; N: 4.6. Found (in %): C: 63.7; H: 3.5; N: 4.6.
-
- 40 g of the 4-(4-nitro-3-benzyloxyphenoxy)-2-(4-benzyloxycarbonylphenoxy)-3,5,6-trifluoropyridine prepared as described in Example 7 (0.066 mol) are dissolved in 600 ml of a mixture of tetrahydrofuran and ethyl acetate (volume ratio 1:1), and 4 g of Pd/C (palladium/carbon) are added to the solution. The mixture is then hydrogenated using hydrogen at a pressure of 1 bar at room temperature in an autoclave with vigorous stirring; the reaction is terminated after 3 days. The orange solution is evaporated to half in a rotary evaporator and left to stand overnight at room temperature, during which the reaction product precipitates out in crystalline form. The reaction product is then dried for 48 hours under nitrogen at 40° C./10 mbar in a vacuum drying cabinet (yield: 91%).
- Characterization: Mass spectrum: molecular peak at 392. Elemental analysis: Theoretical value (in %): C: 55.1; H: 2.8; N: 7.1. Found (in %): C: 55.1; H: 2.8; N: 7.2.
-
- 35.4 g of octafluorotoluene (0.15 mol) are dissolved in 400 ml of dimethylformamide, the solution is cooled to 0° C. using a cryostat, and a solution of 40 g of potassium 4-benzyloxycarbonylphenoxide (0.15 mol) in 300 ml of dimethylformamide is then added dropwise over the course of 2 hours. After 24 hours at 0° C., the potassium salt has reacted. The dimethylformamide is then removed in a rotary evaporator, the residue is taken up in a little tetrahydrofuran, and the solution is filtered through a silica-gel column. The clear solution obtained is evaporated in a rotary evaporator until the reaction product precipitates out. The reaction product is then stirred in n-hexane, filtered off through a fluted filter and then dried for 48 hours under nitrogen at 40° C./10 mbar in a vacuum drying cabinet (yield: 95%).
- Characterization: Mass spectrum: molecular peak at 444. Elemental analysis: Theoretical value (in %): C: 56.8; H: 2.5. Found (in %): C: 56.8; H: 2.5.
-
- 40 g of the 2-(4-benzyloxycarbonylphenoxy)-1-trifluoromethyl-3,4,5,6-tetrafluorobenzene prepared as described in Example 9 (0.09 mol) and 25.5 g of potassium 4-nitro-3-benzyloxyphenoxide (0.09 mol) are dissolved in 400 ml of dimethyl sulfoxide. 30 g of potassium carbonate (0.22 mol) are added in portions to the solution. The mixture is then stirred at room temperature for 24 hours and then heated at 60° C. for 24 hours, and 15 g of potassium hydrogencarbonate (0.15 mol) are then added. The reaction solution is then allowed to cool to room temperature and is filtered through a fluted filter. The crude product is washed by shaking with 300 ml of ethyl acetate and 700 ml of water, and the organic phase is washed three times with water and evaporated in a rotary evaporator until the reaction product precipitates out. The reaction product is then recrystallized from a mixture of ethyl acetate and n-hexane (volume ratio 1:1) and then dried for 48 hours under nitrogen at 40° C./10 mbar in a vacuum drying cabinet (yield: 94%).
- Characterization: Mass spectrum: molecular peak at 669. Elemental analysis: Theoretical value (in %): C: 61.0; H: 3.2; N: 2.1. Found (in %): C: 61.1; H: 3.2; N: 2.1.
-
- 40.4 g of the 4-(4-nitro-3-benzyloxyphenoxy)-2-(4-benzyloxycarbonylphenoxy)-1-trifluoromethyl-3,5,6-tri-fluorobenzene prepared as described in Example 10 (0.06 mol) are dissolved in 500 ml of a mixture of tetrahydrofuran and ethyl acetate (volume ratio 1:2), and 4 g of Pd/C (palladium/carbon) are added to the solution. The mixture is then hydrogenated using hydrogen at a pressure of 1 bar at room temperature in an autoclave with vigorous stirring; the reaction is terminated after 3 days. The orange solution is evaporated to half in a rotary evaporator and left to stand overnight at room temperature, during which the reaction product precipitates out in crystalline form. The reaction product is then dried for 48 hours under nitrogen at 40° C./10 mbar in a vacuum drying cabinet (yield:95%).
- Characterization: Mass spectrum: molecular peak at 459. Elemental analysis: Theoretical value (in %): C: 52.3; H: 2.4; N: 3.0. Found (in %): C: 52.3; H: 2.4; N: 3.0.
Claims (13)
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US09/901,218 US6437178B2 (en) | 1997-09-24 | 2001-07-09 | O-aminophenolcarboxylic acid and o-aminothiophenolcarboxylic acid |
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DE19742194.6 | 1997-09-24 | ||
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US09/161,147 US6310238B1 (en) | 1997-09-24 | 1998-09-24 | O-amino(thio)phenolcarboxylic acids, and their preparation |
US09/901,218 US6437178B2 (en) | 1997-09-24 | 2001-07-09 | O-aminophenolcarboxylic acid and o-aminothiophenolcarboxylic acid |
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US20110229975A1 (en) * | 2008-05-27 | 2011-09-22 | Steen Hauge Matthiesen | Hybridization Compositions and Methods |
US20110318745A1 (en) * | 2009-02-26 | 2011-12-29 | Steen Hauge Matthiesen | Compositions and methods for performing hybridizations with separate denaturation of the sample and probe |
US10662465B2 (en) | 2011-09-30 | 2020-05-26 | Agilent Technologies, Inc. | Hybridization compositions and methods using formamide |
US11118226B2 (en) | 2011-10-21 | 2021-09-14 | Agilent Technologies, Inc. | Hybridization compositions and methods |
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DE10011608A1 (en) | 2000-03-10 | 2001-10-18 | Infineon Technologies Ag | Bis-o-aminophenols and o-aminophenol carboxylic acids |
DE10145472A1 (en) * | 2001-09-14 | 2003-04-17 | Infineon Technologies Ag | A photosensitive formulation based on polyhydroxyamides useful for photoresists, powder coatings, and films for electronics and/or microelectronics |
DE10145469B4 (en) * | 2001-09-14 | 2006-07-06 | Infineon Technologies Ag | Poly-o-hydroxyamide and process for its further processing to polybenzoxazole |
DE10145471A1 (en) * | 2001-09-14 | 2003-04-17 | Infineon Technologies Ag | A photosensitive formulation including a poly-o-hydroxyamide with free OH groups, a solvent inhibitor with polar groups and blocked with acid labile groups useful in the electronic and microelectronic industries |
US20050025993A1 (en) * | 2003-07-25 | 2005-02-03 | Thompson Mark E. | Materials and structures for enhancing the performance of organic light emitting devices |
ES2347152T3 (en) * | 2003-11-26 | 2010-10-26 | Pfizer Products Inc. | DERIVATIVES OF AMINOPIRAZOL AS INHIBITORS OF GSK-3. |
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GB811758A (en) | 1955-10-28 | 1959-04-08 | Du Pont | Polybenzoxazoles and method of preparing the same |
GB1283476A (en) | 1970-03-05 | 1972-07-26 | Holliday Co Ltd L B | Dyeing of synthetic fibres |
US4248962A (en) * | 1977-12-23 | 1981-02-03 | Eastman Kodak Company | Photographic emulsions, elements and processes utilizing release compounds |
DE2931297A1 (en) * | 1979-08-01 | 1981-02-19 | Siemens Ag | HEAT-RESISTANT POSITIVE RESISTS AND METHOD FOR PRODUCING HEAT-RESISTANT RELIEF STRUCTURES |
JPS59178459A (en) * | 1983-03-29 | 1984-10-09 | Fuji Photo Film Co Ltd | Silver halide color photosensitive material |
JPS612757A (en) * | 1984-06-14 | 1986-01-08 | Fuji Photo Film Co Ltd | Preparation of 2-amino-5-nitrophenol derivative |
DE3773110D1 (en) * | 1986-10-02 | 1991-10-24 | Hoechst Celanese Corp | POLYAMIDES WITH HEXAFLUORISOPROPYLIDEN GROUPS, THESE POSITIVELY CONTAINING LIGHT-SENSITIVE MIXTURES AND RECORDING MATERIALS THEREFORE. |
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Cited By (14)
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US20110229975A1 (en) * | 2008-05-27 | 2011-09-22 | Steen Hauge Matthiesen | Hybridization Compositions and Methods |
US11834703B2 (en) | 2008-05-27 | 2023-12-05 | Agilent Technologies, Inc. | Hybridization compositions and methods |
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US9297035B2 (en) | 2008-05-27 | 2016-03-29 | Dako Denmark A/S | Compositions and methods for detection of chromosomal aberrations with novel hybridization buffers |
US9388456B2 (en) | 2009-02-26 | 2016-07-12 | Dako Denmark A/S | Compositions and methods for performing a stringent wash step in hybridization applications |
US9309562B2 (en) * | 2009-02-26 | 2016-04-12 | Dako Denmark A/S | Compositions and methods for performing hybridizations with separate denaturation of the sample and probe |
US9303287B2 (en) | 2009-02-26 | 2016-04-05 | Dako Denmark A/S | Compositions and methods for RNA hybridization applications |
CN107574230A (en) * | 2009-02-26 | 2018-01-12 | 丹麦达科有限公司 | The composition and method for the hybridization being individually denatured for carrying out sample and probe |
CN102369295A (en) * | 2009-02-26 | 2012-03-07 | 丹麦达科有限公司 | Compositions and methods for performing hybridizations with separate denaturation of the sample and probe |
US11795499B2 (en) | 2009-02-26 | 2023-10-24 | Agilent Technologies, Inc. | Compositions and methods for performing hybridizations with separate denaturation of the sample and probe |
US20110318745A1 (en) * | 2009-02-26 | 2011-12-29 | Steen Hauge Matthiesen | Compositions and methods for performing hybridizations with separate denaturation of the sample and probe |
US10202638B2 (en) | 2009-02-27 | 2019-02-12 | Dako Denmark A/S | Compositions and methods for performing hybridizations with separate denaturation of the sample and probe |
US10662465B2 (en) | 2011-09-30 | 2020-05-26 | Agilent Technologies, Inc. | Hybridization compositions and methods using formamide |
US11118226B2 (en) | 2011-10-21 | 2021-09-14 | Agilent Technologies, Inc. | Hybridization compositions and methods |
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US6310238B1 (en) | 2001-10-30 |
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JP3681554B2 (en) | 2005-08-10 |
US6437178B2 (en) | 2002-08-20 |
EP0905123A1 (en) | 1999-03-31 |
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