US20010051269A1 - Method for manufacturing phosphor-coated particles and method for forming cathodoluminescent screen using the same or field emission display - Google Patents

Method for manufacturing phosphor-coated particles and method for forming cathodoluminescent screen using the same or field emission display Download PDF

Info

Publication number
US20010051269A1
US20010051269A1 US08/995,537 US99553797A US2001051269A1 US 20010051269 A1 US20010051269 A1 US 20010051269A1 US 99553797 A US99553797 A US 99553797A US 2001051269 A1 US2001051269 A1 US 2001051269A1
Authority
US
United States
Prior art keywords
cathodoluminescent
particles
field emission
emission display
srs
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
US08/995,537
Other versions
US6447908B2 (en
Inventor
Sun Jin Yun
Joong Whan Lee
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Electronics and Telecommunications Research Institute ETRI
Original Assignee
Electronics and Telecommunications Research Institute ETRI
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Electronics and Telecommunications Research Institute ETRI filed Critical Electronics and Telecommunications Research Institute ETRI
Assigned to ELECTRONICS AND TELECOMMUNICATIONS RESEARCH INSTITUTE reassignment ELECTRONICS AND TELECOMMUNICATIONS RESEARCH INSTITUTE ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS). Assignors: LEE, JOONG WHAN, YUN, SUN JIN
Publication of US20010051269A1 publication Critical patent/US20010051269A1/en
Application granted granted Critical
Publication of US6447908B2 publication Critical patent/US6447908B2/en
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Images

Classifications

    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01JELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J1/00Details of electrodes, of magnetic control means, of screens, or of the mounting or spacing thereof, common to two or more basic types of discharge tubes or lamps
    • H01J1/02Main electrodes
    • H01J1/30Cold cathodes, e.g. field-emissive cathode
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01JELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J31/00Cathode ray tubes; Electron beam tubes
    • H01J31/08Cathode ray tubes; Electron beam tubes having a screen on or from which an image or pattern is formed, picked up, converted, or stored
    • H01J31/10Image or pattern display tubes, i.e. having electrical input and optical output; Flying-spot tubes for scanning purposes
    • H01J31/12Image or pattern display tubes, i.e. having electrical input and optical output; Flying-spot tubes for scanning purposes with luminescent screen
    • H01J31/123Flat display tubes
    • H01J31/125Flat display tubes provided with control means permitting the electron beam to reach selected parts of the screen, e.g. digital selection
    • H01J31/127Flat display tubes provided with control means permitting the electron beam to reach selected parts of the screen, e.g. digital selection using large area or array sources, i.e. essentially a source for each pixel group
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01JELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J2329/00Electron emission display panels, e.g. field emission display panels
    • H01J2329/18Luminescent screens
    • H01J2329/30Shape or geometrical arrangement of the luminescent material
    • YGENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10TTECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T428/00Stock material or miscellaneous articles
    • Y10T428/29Coated or structually defined flake, particle, cell, strand, strand portion, rod, filament, macroscopic fiber or mass thereof
    • Y10T428/2982Particulate matter [e.g., sphere, flake, etc.]
    • Y10T428/2991Coated
    • YGENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10TTECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T428/00Stock material or miscellaneous articles
    • Y10T428/29Coated or structually defined flake, particle, cell, strand, strand portion, rod, filament, macroscopic fiber or mass thereof
    • Y10T428/2982Particulate matter [e.g., sphere, flake, etc.]
    • Y10T428/2991Coated
    • Y10T428/2993Silicic or refractory material containing [e.g., tungsten oxide, glass, cement, etc.]

Definitions

  • the present invention relates to a method for implementing a microencapsulation of phosphor particles or transparent conducting particles using a phosphor material to improve a luminous efficiency of a cathodoluminescent and a method for forming a cathodoluminescent screen using the same for a field emission display, and more particularly to a method for forming a cathodoluminescent screen provided with uniform cathodoluminescent phosphor-coated particles for a field emission display by a method such as an electrodeposition, a screen printing, or a spray by using the phosphor-coated particles.
  • Phosphor particles are used in a variety of applications such as a flat panel display and decoration, cathode ray tube, and fluorescent lighting fixture. Luminescence or light emission by phosphor-coated particles may be stimulated by application of heat, light, high energy radiation, or electric fields.
  • U.S. Pat. No. 4,508,760 discloses an encapsulation technique of phosphor particles by a vacuum deposition using a certain polymer.
  • U.S. Pat. No. 4,515,827 is achieved by disclosing rotating phosphor particles coated in a vacuum chamber while vapor-depositing the color modifying material on the rotating particles.
  • U.S. Pat. No. 4,585,673 discloses the formation of a continuous protective coating on phosphor particles by gas-phase chemical vapor deposition while the phosphor particles are suspended within a fluidized bed.
  • U.S. Pat. No. 4,515,827 discloses encapsulated cathodoluminescent phosphor particles by a vapor phase hydrolysis reaction of oxide precursor material.
  • U.S. Pat. No. 5,156,885 discloses encapsulated phosphor particles by a low temperature vapor phase hydrolysis reactions and deposition process.
  • the cathodoluminescent films of the cathodoluminescent screen of a cathode-ray tube are formed principally by a slurry process, and the cathodoluminescent films of the cathodoluminescent screen of some cathode-ray tubes are formed by a screens printing, a spray, or an electrodeposition process.
  • ZnO, ZnGa 2 O 4 :Mn, ZnGa O 4 :Eu, YAG:Tb, Y 2 SiO 5 :Ce, Y 2 O 3 :Eu, Y 2 O 2 S:Tb, Gd 2 O 2 S:Tb, Srs:Ce, SrTe:Ce, SrS—Sc 2 S 3 , ZnS:Ag, ZnS:Pr, SrGa 2 S 4 , ZnCdS:Cu, Al are used for cathodoluminescent materials of the cathodoluminescent screen of a field emission display.
  • the surfaces of the particles are continuously polished and are exposed to a dilution liquid, so that the surface of the same may be changed, thus forming a dead layer and decreasing the characteristic of the cathodoluminescent.
  • FIGS. 1A and 1B are cross-sectional views showing conventional phosphor particles and a cathodoluminescent screen using the same for a field emission display, respectively.
  • a transparent conduction layer 2 is formed on the transparent substrate 1 .
  • a cathodoluminescent films 3 a composed of phosphor particles 3 of the FIG. 1 on the transparent conduction layer 2 is formed by phosphor-coated particles 3 of fine powder types having a diameter of less than 10 micron in average particle size by a screen printing, a spray, or an electrodeposition process.
  • FIG. 2 is a cross-sectional schematic drawing of a field emission display showing an electron emission tip, or field emission cathode, surrounded by the self-aligned gate structures.
  • the electron emission tip 4 is integral with the single crystal semiconductor substrate 5 , and serves as a cathode conductor.
  • Gate 8 serves as a low potential anode or grid structure for its respective cathode 4 .
  • a dielectric insulating layer 7 is deposited on the conductive cathode layer 6 .
  • the insulator 7 also has an opening at the field emission site location.
  • a field emission display employing a cold cathode is depicted.
  • the substrate 5 can be comprised of glass, for example, or any of a variety of other suitable materials.
  • a single crystal silicon layer serves as a substrate 5 onto which a conductive material layer 6 , such as doped polycrystalline silicon has been deposited.
  • a conical micro-cathode 4 has been constructed on the top of the substrate 5 .
  • Surrounding the micro-cathode 4 is a low potential anode gate structure 8 . When a voltage is applied between the cathode 4 and the gate 8 , a stream of electrons 9 is emitted toward a phosphor-coated screen 1 .
  • Screen 1 is an anode and includes cathodoluminescent material 3 on its surface.
  • the display faceplate cover with the included cathodoluminescent layer is distally disposed with respect to the electron emission structure, the purpose of the electron emitting structure being to emit electrons, at least some of which will impinge upon the cathodoluminescent material, such that at least some of the energy of the emitted electrons is converted to photon energy as visible light.
  • the visible light is transmitted through the transparent conduction layer 2 and the transparent substrate 1 of the display to the viewer.
  • the purity and intensity of light is determined by composition, uniformity and surface state of the phosphor particles.
  • Luminous efficiency of the cathodoluminescent films formed by the thick film type is particularly determined by uniformity of the particle size and surface state of the particle.
  • the photoemission of the cathodoluminescent layer for a field emission display is emitted by electrons at the thinnest surface within several score nanometer.
  • an object of the present invention is to provide a method of providing phosphor-coated particles of the transparent conducting particles by an atomic layer epitaxy to improve the luminous efficiency of the cathodoluminescent films for a field emission display and which does this while avoiding the disadvantages of the prior art.
  • field emission display cathodoluminescent particles for improving a luminescent emission efficiency according to a first embodiment of the present invention, wherein the improved cathodoluminescent particles are formed by coating a uniform cathodoluminescent material on the surfaces of cathodoluminescent particles by an atomic layer epitaxy.
  • a field emission display cathodoluminescent layer forming method including a transparent substrate and a transparent electrode layer formed on the transparent substrate according to a second embodiment of the present invention, wherein the improved method is directed to forming cathodoluminescent particles, on which a uniform cathodoluminescent material is coated by an atomic layer epitaxy, on the surface of a field emission display unit by an electrophoretic deposition method.
  • a field emission display cathodoluminescent layer forming method including a transparent substrate and a transparent electrode layer formed on the transparent substrate according to a third embodiment of the present invention, wherein the improved method is directed to forming cathodoluminescent particles, on which a uniform phosphor material is coated by an atomic layer epitaxy, on the surface of a field emission display unit by a screen printing method.
  • a field emission display cathodoluminescent layer forming method including a transparent substrate and a transparent electrode layer formed on the transparent substrate according to a fourth embodiment of the present invention, wherein the improved method is directed to forming cathodoluminescent particles, on which a uniform phosphor material is coated by an atomic layer epitaxy, on the surface of a field emission display unit by a spray method.
  • field emission display cathodoluminescent particles for improving a cathodoluminescent efficient according to a fifth embodiment of the present invention, wherein the improved field emission display cathodoluminescent particles are formed by coating a uniform cathodoluminescent material on the surfaces of transparent conducting particles by an atomic layer epitaxy.
  • a field emission display cathodoluminescent layer forming method including a transparent substrate and a transparent electrode layer formed on the transparent substrate according to a sixth embodiment of the present invention, wherein the improved method is directed to forming cathodoluminescent particles, which are formed by coating an uniform cathodoluminescent material on the surface of transparent conducting particles by an atomic layer epitaxy, on a secreen of the field emission display unit by an electrophoretic deposition method.
  • a field emission display cathodoluminescent layer forming method including a transparent substrate and a transparent electrode layer formed on the transparent substrate according to a seventh embodiment of the present invention, wherein the improved method is directed to forming cathodoluminescent particles, which are formed by coating an uniform cathodoluminescent material on the surface of transparent conducting particles by an atomic layer epitaxy, on the surface of a field emission display unit by a screen printing method.
  • a field emission display cathodoluminescent layer forming method including a transparent substrate and a transparent electrode layer formed on the transparent substrate according to en eighth embodiment of the present invention, wherein the improved method is directed to forming cathodoluminescent particles, which are formed by coating an uniform cathodoluminescent material on the surface of transparent conducting particles by an atomic layer epitaxy, on the surface of a field emission display unit by a spray method.
  • ALE is a chemical thin film deposition method based on saturated surface reactions.
  • substrate temperature i.e. substrate temperature
  • reactant doses and lengths of pulse and purge sequence reactant doses and lengths of pulse and purge sequence, and an exact chemisorbed monolayer of the first reactant is retained on the substrate after the purge sequence.
  • This chemisorbed monolayer reacts subsequently with the other precursor dosed onto the substrate resulting in a solid film and, if compounds are exploited as precursors, gaseous byproducts.
  • the film is grown layer-by-layer.
  • the surface density of chemisorbed species remains often too low for a formation of a complete crystal layer of the film during one cycle.
  • the film thickness is still only a function of the number of deposition cycles repeated. As a result, the growth is said to be self-controlled or self-limited.
  • a method of forming a cathodoluminescent screen for a field emission display by depositing particles of a cathodoluminescent material or cathodoluminescent materials on the inner surface of a screen panel by an elctrodeposition process.
  • a method of forming a cathodoluminescent film by an electrodeposition process in accordance with the present invention forms on the inner surface of a screen panel for a field emission display comprising: immersing the screen panel in an electrodeposition solution in which particles of a cathodoluminescent material is dispersed, applying a negative voltage on the transparent conduction layer and a positive voltage a counter electrode immersed opposite to each other in an electrodeposition solution prepared by dispersing particles of a cathodoluminescent material in an electrolyte for positively or negatively charging the particles of the cathodoluminescent material, a negative voltage and a positive voltage are applied respectively to the transparent electrode of the screen panel and the counter electrode when the cathodoluminescent material is positively charged to deposit the cathodoluminescent material over the surface of the electrode, Washing and drying the screen panel after the cathodoluminescent film has been formed.
  • a method of forming a cathodoluminescent film of the cathodoluminescent screen by a screen printing or a spray deposition process in accordance with the present invention for a field emission display comprises: confusing a paste or a solvent and a phosphor-coated particles, forming on the inner surface of a screen panel by the screen printing or the spray method.
  • FIGS. 1A and 1B are cross-sectional view showing conventional phosphor particles and a cathodoluminescent screen using the same for a field emission display, respectively.
  • FIG. 2 is a cross-sectional schematic drawing of a field emission display.
  • FIGS. 3A and 3B are cross-sectional view showing phosphor-coated particles and transparent conducting particles by an atomic layer epitaxy and a cathodoluminescent screen using the same for a field emission display respectively, in a preferred embodiment according to the present invention.
  • FIG. 4A is a cross-sectional view showing a method of forming a cathodoluminescent screen for a field emission display by an electrodeposition process in accordance with an embodiment of the present invention.
  • FIG. 4B is a cross-sectional view showing a method of forming the slurry of cathodoluminescent phosphor particles for a screen for a field emission display by a screen printing or a spray process in accordance with an embodiment of the present invention.
  • FIG. 5 is a schematic diagram of ALE process used in the present invention.
  • ALE Automic layer epitaxy
  • the reactor with filled with the phosphor particles or transparent conducting particles and supported by a supporting materials.
  • the supporting material in the leading part of the reactor can distribute the gas flow evenly.
  • the supporting material in the trailing part of the reactor supports the particles. The supporting materials should not disturb the flow of reactant gases and purge gases.
  • the cathodoluminescent (or phosphor-coated) particles 30 are formed by coating a uniform cathodoluminescent material 30 b on the surface of phosphor particles 30 a by using the above-mentioned ALE.
  • the ALE for forming the cathodoluminescent films 30 b on the particles 30 a is carried out using at least one of halide precursors of Al, Ga, Sr, Ca, Si, tansition metal elements and rare earth elements including Zn, Y, Gd, Te, Sc, Cd, and Ta. Also, the ALE for forming the cathodoluminescent films 30 b on the particles 30 a is carried out using at least one of organometallic precursors of Al, Ga, Sr, Ca, Si, tansition metal elements and rare earth elements including Zn, Y, Gd, Te, Sc, Cd, and Ta.
  • the materials of the cathodoluminescent or phosphor particles 30 a are ZnO, ZnGa 2 O 4 , Y 2 SiO 5 , Y 2 O 3 , Y 2 O 3 S, Y 3 Al 5 O 12 , Gd 2 O 2 S, Ga 2 O 3 , SrS, SrTe, SrS—SC 2 S 3 , ZnS, SrGa 2 S 4 , ZnCdS, Ta 2 Zn 3 O 8 , and mixtures thereof.
  • the meterial is doped with transition metal or rare earth elements as the luminescent center.
  • the cathodoluminescent coating materials 30 b are ZnO, ZnGa 2 O 4 , Y 2 SiO 5 , Y 2 O 3 , Y 2 O 3 , Y 2 O 3 S, Y 3 Al 5 O 12 , Gd 2 O 2 S, Ga 2 O 3 , SrS, SrTe, SrS—Sc 2 S 3 , ZnS, SrGa 2 S 4 , ZnCdS, Ta 2 Zn 3 O 8 , and mixtures thereof or multilayers thereof, doped with transition metal or rare earth elements as the luminescent center.
  • the cathodoluminescent coating materials 30 b can used same as the materials of cathodoluminescent particles 30 a .
  • the diameter of chathodoluminescent particles 30 a is raging from 0.51 ⁇ m to 20 ⁇ m and the thickness of cathodoluminescent coating film 30 b is in the range of 1-100 nm.
  • the cathodoluminescent particles can be formed by coating a uniform cathodoluminescent material on the surface of transparent conducting particles (not shown) by automic layer epitaxy.
  • the material of the transparent conducting particles is used In-doped SnO 2 , Al-doped ZnO, Sb-doped SnO 2 , conducting polymer, or mixtures thereof.
  • the diameter of the transparent conducting particle is ranging from 0.5 ⁇ m to 20 ⁇ m.
  • the cathodoluminescent layer 30 a composed by the phosphor-coated particles 30 is formed on the transparent conduction layer 20 of the transparent substrate 10
  • FIG. 4A is a cross sectional view showing a method of forming a cathodoluminescent screen for a field emission display by electrodeposition process in accordance with an embodiment of the present invention.
  • a transparent conduction layer 20 is formed on the transparent surface 10 for a field emission display.
  • the negative electrode and the positive electrode 40 through the terminal 50 and 60 are connected to the transparent conduction layer 20 and the positive electrode 40 of carbon or the like, respectively.
  • the negative and positive electrode is immersed in chamber 80 confused with an electrodeposition solution 70 and a phosphor-coated particles 30 .
  • a negative voltage and a positive voltage are applied respectively to the transparent conduction layer 20 of the transparent substrate and the counter electrode 40 of carbon or the like in an electrolyte 70 for positively or negatively charging the phosphor particles 30 of the cathodoluminescent material.
  • the cathodoluminescent material is positively charged to deposit the cathodoluminescent material over the surface of the electrode.
  • a positive particles are deposited on the transparent conduction layer 20 of the transparent substrate 10 .
  • phosphor-coated particles 30 is confused in a paste or a solvent 90 , and cathodoluminescent film is formed by the screen printing or the spray method on the transparent conduction layer.
  • the present invention can be used to widen a coating range of the particle which can be realized by an epitaxial method capable of precise control of the film thickness uniformity and of composition of the phosphor particle, each having a large effect on photoemission characteristics in units of atom layers, in an epitaxy technique for realizing a fine cathodoluminescent screen structure expected to perform a high luminous efficiency. Also, this enables growth of various types of compound semiconductors, therefore, makes it possible to grow a hetero structure, essential in realization of a device. As a result, it is expected that the atom layer epitaxy method is put into particle use, and the range of its applications is widened.
  • the method of forming a cathodoluminescent screen by using phosphor-coated particles for a field emission display by electrodeposition, screen printing, or spray process in accordance with the present invention has a uniform thickness.
  • a cathodoluminescent screen forming method for forming a color cathodoluminescent screen can be selectively formed with green, blue and red cathodoluminescent materials by repeating an electrodeposition process.

Landscapes

  • Cathode-Ray Tubes And Fluorescent Screens For Display (AREA)
  • Luminescent Compositions (AREA)
  • Formation Of Various Coating Films On Cathode Ray Tubes And Lamps (AREA)
  • Electroluminescent Light Sources (AREA)

Abstract

A method for forming a cathodoluminescent screen by forming cathodoluminescent films on the inner surface of screen panel for a field emission display by a screen printing, a spray, or an electrodeposition process. The field emission display cathodoluminescent particles for improving a luminescent emission efficiency, wherein the improved cathodoluminescent particles are formed by coating a uniform phosphor material on the surfaces of cathodoluminescent particles by an atomic layer epitaxy.

Description

    BACKGROUND OF THE INVENTION
  • 1. Field of the Invention [0001]
  • The present invention relates to a method for implementing a microencapsulation of phosphor particles or transparent conducting particles using a phosphor material to improve a luminous efficiency of a cathodoluminescent and a method for forming a cathodoluminescent screen using the same for a field emission display, and more particularly to a method for forming a cathodoluminescent screen provided with uniform cathodoluminescent phosphor-coated particles for a field emission display by a method such as an electrodeposition, a screen printing, or a spray by using the phosphor-coated particles. [0002]
  • 2. Description of the Related Art [0003]
  • Phosphor particles are used in a variety of applications such as a flat panel display and decoration, cathode ray tube, and fluorescent lighting fixture. Luminescence or light emission by phosphor-coated particles may be stimulated by application of heat, light, high energy radiation, or electric fields. [0004]
  • It has been recognized that various improvements in the performance of phosphors can be obtained if the phosphor material is coated with a protective film or pigment. Numerous attempts have been made to coat the outer surfaces of individual particles with a protective coating material. [0005]
  • U.S. Pat. No. 4,508,760 discloses an encapsulation technique of phosphor particles by a vacuum deposition using a certain polymer. [0006]
  • U.S. Pat. No. 4,515,827 is achieved by disclosing rotating phosphor particles coated in a vacuum chamber while vapor-depositing the color modifying material on the rotating particles. [0007]
  • U.S. Pat. No. 4,585,673 discloses the formation of a continuous protective coating on phosphor particles by gas-phase chemical vapor deposition while the phosphor particles are suspended within a fluidized bed. [0008]
  • U.S. Pat. No. 4,515,827 discloses encapsulated cathodoluminescent phosphor particles by a vapor phase hydrolysis reaction of oxide precursor material. [0009]
  • U.S. Pat. No. 5,156,885 discloses encapsulated phosphor particles by a low temperature vapor phase hydrolysis reactions and deposition process. [0010]
  • In the above coating techniques, the movement, rotation, or vibration of the particles was necessary for an uniform film growth because it was very hard to deposit uniform, continuous, and stoichiometric thin film or particles. [0011]
  • Also, the cathodoluminescent films of the cathodoluminescent screen of a cathode-ray tube, such as a color cathode-ray tube or a monochromatic cathode-ray tube, are formed principally by a slurry process, and the cathodoluminescent films of the cathodoluminescent screen of some cathode-ray tubes are formed by a screens printing, a spray, or an electrodeposition process. [0012]
  • Generally, ZnO, ZnGa[0013] 2O4:Mn, ZnGaO 4:Eu, YAG:Tb, Y2SiO5:Ce, Y2O3:Eu, Y2O2S:Tb, Gd2O2S:Tb, Srs:Ce, SrTe:Ce, SrS—Sc2S3, ZnS:Ag, ZnS:Pr, SrGa2S4, ZnCdS:Cu, Al are used for cathodoluminescent materials of the cathodoluminescent screen of a field emission display.
  • However, in the conventional cathodoluminescent particles, the surfaces of the particles are continuously polished and are exposed to a dilution liquid, so that the surface of the same may be changed, thus forming a dead layer and decreasing the characteristic of the cathodoluminescent. [0014]
  • Therefore, in the industry, the technique for reducing the dead layer formed on the surface of the cathodoluminescent particle becomes an important technique. [0015]
  • The conventional invention of the thick film type will be explained with reference to FIGS. 1A and 1B. [0016]
  • FIGS. 1A and 1B are cross-sectional views showing conventional phosphor particles and a cathodoluminescent screen using the same for a field emission display, respectively. [0017]
  • As shown in FIG. 1B, a [0018] transparent conduction layer 2 is formed on the transparent substrate 1. A cathodoluminescent films 3 a composed of phosphor particles 3 of the FIG. 1 on the transparent conduction layer 2 is formed by phosphor-coated particles 3 of fine powder types having a diameter of less than 10 micron in average particle size by a screen printing, a spray, or an electrodeposition process.
  • FIG. 2 is a cross-sectional schematic drawing of a field emission display showing an electron emission tip, or field emission cathode, surrounded by the self-aligned gate structures. [0019]
  • Referring to FIG. 2, the electron emission tip [0020] 4 is integral with the single crystal semiconductor substrate 5, and serves as a cathode conductor. Gate 8 serves as a low potential anode or grid structure for its respective cathode 4. A dielectric insulating layer 7 is deposited on the conductive cathode layer 6. The insulator 7 also has an opening at the field emission site location.
  • A field emission display employing a cold cathode is depicted. The [0021] substrate 5 can be comprised of glass, for example, or any of a variety of other suitable materials, In the preferred embodiment, a single crystal silicon layer serves as a substrate 5 onto which a conductive material layer 6, such as doped polycrystalline silicon has been deposited. At a field emission site location, a conical micro-cathode 4 has been constructed on the top of the substrate 5. Surrounding the micro-cathode 4, is a low potential anode gate structure 8. When a voltage is applied between the cathode 4 and the gate 8, a stream of electrons 9 is emitted toward a phosphor-coated screen 1. Screen 1 is an anode and includes cathodoluminescent material 3 on its surface. The display faceplate cover with the included cathodoluminescent layer is distally disposed with respect to the electron emission structure, the purpose of the electron emitting structure being to emit electrons, at least some of which will impinge upon the cathodoluminescent material, such that at least some of the energy of the emitted electrons is converted to photon energy as visible light. The visible light is transmitted through the transparent conduction layer 2 and the transparent substrate 1 of the display to the viewer.
  • The purity and intensity of light is determined by composition, uniformity and surface state of the phosphor particles. Luminous efficiency of the cathodoluminescent films formed by the thick film type is particularly determined by uniformity of the particle size and surface state of the particle. Also, the photoemission of the cathodoluminescent layer for a field emission display is emitted by electrons at the thinnest surface within several score nanometer. [0022]
  • When a conventional phosphor particles of the FIG. 1 does powder type, the particle surface is formed a dead (non-luminescent) layer by continuously polishing or by opening in the delude with destructive state. Therefore, such conventional invention of the thick film type has been reduced luminous efficiency. [0023]
  • Also, if acceleration voltage by the electron-ray is low, a photoemission region is thinly formed, the thinnest surface of the cathodoluminescent layer is emitted. Therefore, the surface state of the phosphor particles have influence on the luminous efficiency. [0024]
  • Disadvantages associated with these known methods are eliminated by the method of the present invention by which a thin film coating having a desired substantially uniform thickness is formed by an atomic layer epitaxy on the outer surface of the phosphor particles or the transparent conducting particles. [0025]
  • SUMMARY OF THE INVENTION
  • Accordingly, an object of the present invention is to provide a method of providing phosphor-coated particles of the transparent conducting particles by an atomic layer epitaxy to improve the luminous efficiency of the cathodoluminescent films for a field emission display and which does this while avoiding the disadvantages of the prior art. [0026]
  • It is another object of the present invention to provide a method for forming a cathodoluminescent screen by forming cathodoluminescent films on the inner surface of screen panel for a field emission display by a method such as a screen printing, a spray and an electrodeposition process. [0027]
  • To achieve the above objects, there is provided field emission display cathodoluminescent particles for improving a luminescent emission efficiency according to a first embodiment of the present invention, wherein the improved cathodoluminescent particles are formed by coating a uniform cathodoluminescent material on the surfaces of cathodoluminescent particles by an atomic layer epitaxy. [0028]
  • To achieve the above objects, there is provided a field emission display cathodoluminescent layer forming method including a transparent substrate and a transparent electrode layer formed on the transparent substrate according to a second embodiment of the present invention, wherein the improved method is directed to forming cathodoluminescent particles, on which a uniform cathodoluminescent material is coated by an atomic layer epitaxy, on the surface of a field emission display unit by an electrophoretic deposition method. [0029]
  • To achieve the above objects, there is provided a field emission display cathodoluminescent layer forming method including a transparent substrate and a transparent electrode layer formed on the transparent substrate according to a third embodiment of the present invention, wherein the improved method is directed to forming cathodoluminescent particles, on which a uniform phosphor material is coated by an atomic layer epitaxy, on the surface of a field emission display unit by a screen printing method. [0030]
  • To achieve the above objects, there is provided a field emission display cathodoluminescent layer forming method including a transparent substrate and a transparent electrode layer formed on the transparent substrate according to a fourth embodiment of the present invention, wherein the improved method is directed to forming cathodoluminescent particles, on which a uniform phosphor material is coated by an atomic layer epitaxy, on the surface of a field emission display unit by a spray method. [0031]
  • To achieve the above objects, there is provided field emission display cathodoluminescent particles for improving a cathodoluminescent efficient according to a fifth embodiment of the present invention, wherein the improved field emission display cathodoluminescent particles are formed by coating a uniform cathodoluminescent material on the surfaces of transparent conducting particles by an atomic layer epitaxy. [0032]
  • To achieve the above objects, there is provided a field emission display cathodoluminescent layer forming method including a transparent substrate and a transparent electrode layer formed on the transparent substrate according to a sixth embodiment of the present invention, wherein the improved method is directed to forming cathodoluminescent particles, which are formed by coating an uniform cathodoluminescent material on the surface of transparent conducting particles by an atomic layer epitaxy, on a secreen of the field emission display unit by an electrophoretic deposition method. [0033]
  • To achieve the above objects, there is provided a field emission display cathodoluminescent layer forming method including a transparent substrate and a transparent electrode layer formed on the transparent substrate according to a seventh embodiment of the present invention, wherein the improved method is directed to forming cathodoluminescent particles, which are formed by coating an uniform cathodoluminescent material on the surface of transparent conducting particles by an atomic layer epitaxy, on the surface of a field emission display unit by a screen printing method. [0034]
  • To achieve the above objects, there is provided a field emission display cathodoluminescent layer forming method including a transparent substrate and a transparent electrode layer formed on the transparent substrate according to en eighth embodiment of the present invention, wherein the improved method is directed to forming cathodoluminescent particles, which are formed by coating an uniform cathodoluminescent material on the surface of transparent conducting particles by an atomic layer epitaxy, on the surface of a field emission display unit by a spray method. [0035]
  • ALE is a chemical thin film deposition method based on saturated surface reactions. The unique feature of ALE is that reactant vapors—elements or compounds—are pulsed onto the substrate alternately, one at a time. Between the reactant pulses the reactor is either purged with an inert gas or evacuated. With a proper adjustment of the experiment conditions, i.e. substrate temperature, reactant doses and lengths of pulse and purge sequence, and an exact chemisorbed monolayer of the first reactant is retained on the substrate after the purge sequence. This chemisorbed monolayer reacts subsequently with the other precursor dosed onto the substrate resulting in a solid film and, if compounds are exploited as precursors, gaseous byproducts. By repeating this deposition cycle the film is grown layer-by-layer. However, due to steric hindrances of bulky precursor molecules and surface reconstructions, the surface density of chemisorbed species remains often too low for a formation of a complete crystal layer of the film during one cycle. Nevertheless, the film thickness is still only a function of the number of deposition cycles repeated. As a result, the growth is said to be self-controlled or self-limited. [0036]
  • Also, in accordance with a preferred embodiment of the present invention, there is provided a method of forming a cathodoluminescent screen for a field emission display by depositing particles of a cathodoluminescent material or cathodoluminescent materials on the inner surface of a screen panel by an elctrodeposition process. [0037]
  • A method of forming a cathodoluminescent film by an electrodeposition process in accordance with the present invention forms on the inner surface of a screen panel for a field emission display comprising: immersing the screen panel in an electrodeposition solution in which particles of a cathodoluminescent material is dispersed, applying a negative voltage on the transparent conduction layer and a positive voltage a counter electrode immersed opposite to each other in an electrodeposition solution prepared by dispersing particles of a cathodoluminescent material in an electrolyte for positively or negatively charging the particles of the cathodoluminescent material, a negative voltage and a positive voltage are applied respectively to the transparent electrode of the screen panel and the counter electrode when the cathodoluminescent material is positively charged to deposit the cathodoluminescent material over the surface of the electrode, Washing and drying the screen panel after the cathodoluminescent film has been formed. [0038]
  • Also, a method of forming a cathodoluminescent film of the cathodoluminescent screen by a screen printing or a spray deposition process in accordance with the present invention for a field emission display comprises: confusing a paste or a solvent and a phosphor-coated particles, forming on the inner surface of a screen panel by the screen printing or the spray method.[0039]
  • BRIEF DESCRIPTION OF THE DRAWINGS
  • The above and other objects, features and advantages of the present invention will become apparent from the following description of embodiments with reference to the accompanying drawings, in which: [0040]
  • FIGS. 1A and 1B are cross-sectional view showing conventional phosphor particles and a cathodoluminescent screen using the same for a field emission display, respectively. [0041]
  • FIG. 2 is a cross-sectional schematic drawing of a field emission display. [0042]
  • FIGS. 3A and 3B are cross-sectional view showing phosphor-coated particles and transparent conducting particles by an atomic layer epitaxy and a cathodoluminescent screen using the same for a field emission display respectively, in a preferred embodiment according to the present invention. [0043]
  • FIG. 4A is a cross-sectional view showing a method of forming a cathodoluminescent screen for a field emission display by an electrodeposition process in accordance with an embodiment of the present invention. [0044]
  • FIG. 4B is a cross-sectional view showing a method of forming the slurry of cathodoluminescent phosphor particles for a screen for a field emission display by a screen printing or a spray process in accordance with an embodiment of the present invention. [0045]
  • FIG. 5 is a schematic diagram of ALE process used in the present invention.[0046]
  • DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS
  • Embodiments of the present invention will be explained with reference to the drawings. [0047]
  • Automic layer epitaxy (ALE) is a chemical thin film deposition technique based on saturated surface reactions. The unique feature of ALE is that reactant gas or reactant vapors carried with inert gas—elements or compounds—are pulsed onto the substrate alternately, one at a time. Between the reactant pulses the reactor is purged with an inert gas and evacuated. The schematic diagram of A-LE process of reactants A and B is shown in FIG. 5. The pulsing sequence is source A—purge gas—source B—purge gas. With a proper adjustment of the experimental conditions, i.e., reactor temperature, reactant doses and lenghts of pulses and purge sequence, and an exactly chemisorbed monolayer of the first reactant A is retained on the surface after the purge sequence. This chemisorbed monolayer reacts subsequently with the other precursor B dosed onto the surface resulting in a solid film and, if compounds are exploited as precursors, gaseous byproducts. By repeating this deposition cycle the film is grown layer-by-layer. [0048]
  • For the embodiment of the present invention, as shown in FIG. 5, the reactor with filled with the phosphor particles or transparent conducting particles and supported by a supporting materials. The supporting material in the leading part of the reactor can distribute the gas flow evenly. The supporting material in the trailing part of the reactor supports the particles. The supporting materials should not disturb the flow of reactant gases and purge gases. [0049]
  • Reffering to FIGS. [0050] 3A, the cathodoluminescent (or phosphor-coated) particles 30 are formed by coating a uniform cathodoluminescent material 30 b on the surface of phosphor particles 30 a by using the above-mentioned ALE.
  • In the present invention, the ALE for forming the [0051] cathodoluminescent films 30 b on the particles 30 a is carried out using at least one of halide precursors of Al, Ga, Sr, Ca, Si, tansition metal elements and rare earth elements including Zn, Y, Gd, Te, Sc, Cd, and Ta. Also, the ALE for forming the cathodoluminescent films 30 b on the particles 30 a is carried out using at least one of organometallic precursors of Al, Ga, Sr, Ca, Si, tansition metal elements and rare earth elements including Zn, Y, Gd, Te, Sc, Cd, and Ta.
  • Preferably, the materials of the cathodoluminescent or [0052] phosphor particles 30 a are ZnO, ZnGa2O4, Y2SiO5, Y2O3, Y2O3S, Y3Al5O12, Gd2O2S, Ga2O3, SrS, SrTe, SrS—SC2S3, ZnS, SrGa2S4, ZnCdS, Ta2Zn3O8, and mixtures thereof. The meterial is doped with transition metal or rare earth elements as the luminescent center.
  • Also, the [0053] cathodoluminescent coating materials 30 b are ZnO, ZnGa2O4, Y2SiO5, Y2O3, Y2O3, Y2O3S, Y3Al5O12, Gd2O2S, Ga2O3, SrS, SrTe, SrS—Sc2S3, ZnS, SrGa2S4, ZnCdS, Ta2Zn3O8, and mixtures thereof or multilayers thereof, doped with transition metal or rare earth elements as the luminescent center. More preferably, the cathodoluminescent coating materials 30 b can used same as the materials of cathodoluminescent particles 30 a. The diameter of chathodoluminescent particles 30 a is raging from 0.51 μm to 20 μm and the thickness of cathodoluminescent coating film 30 b is in the range of 1-100 nm.
  • Meanwhile, the cathodoluminescent particles can be formed by coating a uniform cathodoluminescent material on the surface of transparent conducting particles (not shown) by automic layer epitaxy. At this time, the material of the transparent conducting particles is used In-doped SnO[0054] 2, Al-doped ZnO, Sb-doped SnO2, conducting polymer, or mixtures thereof. Also, the diameter of the transparent conducting particle is ranging from 0.5 μm to 20 μm.
  • Next, as shown in FIG. 3B, the [0055] cathodoluminescent layer 30 a composed by the phosphor-coated particles 30 is formed on the transparent conduction layer 20 of the transparent substrate 10
  • FIG. 4A is a cross sectional view showing a method of forming a cathodoluminescent screen for a field emission display by electrodeposition process in accordance with an embodiment of the present invention. [0056]
  • First, as shown in FIG. 4A, a [0057] transparent conduction layer 20 is formed on the transparent surface 10 for a field emission display. The negative electrode and the positive electrode 40 through the terminal 50 and 60 are connected to the transparent conduction layer 20 and the positive electrode 40 of carbon or the like, respectively. The negative and positive electrode is immersed in chamber 80 confused with an electrodeposition solution 70 and a phosphor-coated particles 30. A negative voltage and a positive voltage are applied respectively to the transparent conduction layer 20 of the transparent substrate and the counter electrode 40 of carbon or the like in an electrolyte 70 for positively or negatively charging the phosphor particles 30 of the cathodoluminescent material. The cathodoluminescent material is positively charged to deposit the cathodoluminescent material over the surface of the electrode. A positive particles are deposited on the transparent conduction layer 20 of the transparent substrate 10.
  • Also, as shown in FIG. 4B, phosphor-coated [0058] particles 30 is confused in a paste or a solvent 90, and cathodoluminescent film is formed by the screen printing or the spray method on the transparent conduction layer.
  • As has been described above, the present invention can be used to widen a coating range of the particle which can be realized by an epitaxial method capable of precise control of the film thickness uniformity and of composition of the phosphor particle, each having a large effect on photoemission characteristics in units of atom layers, in an epitaxy technique for realizing a fine cathodoluminescent screen structure expected to perform a high luminous efficiency. Also, this enables growth of various types of compound semiconductors, therefore, makes it possible to grow a hetero structure, essential in realization of a device. As a result, it is expected that the atom layer epitaxy method is put into particle use, and the range of its applications is widened. [0059]
  • As is apparent from the forgoing description, the method of forming a cathodoluminescent screen by using phosphor-coated particles for a field emission display by electrodeposition, screen printing, or spray process in accordance with the present invention has a uniform thickness. Also, a cathodoluminescent screen forming method for forming a color cathodoluminescent screen can be selectively formed with green, blue and red cathodoluminescent materials by repeating an electrodeposition process. [0060]
  • Additional advantages and modifications will readily occur to those skilled in the art. Therefore, the invention in its broader aspects is not limited to the specific details, and illustrated examples shown and described herein. Accordingly, various modifications may be made without departing from the spirit or scope of the general inventive concept as defined by the appended claims and their equivalents. [0061]

Claims (26)

What is claimed is:
1. In field emission display cathodoluminescent particles for improving a luminescent emission efficiency, wherein the improved cathodoluminescent particles are formed by coating a uniform cathodoluminescent material on the surfaces of cathodoluminescent particles by an atomic layer epitaxy.
2. The particles according to
claim 1
, wherein the material of cathodoluminescent particles is at least one compound selected from the group consisting of ZnO, ZnGa2O4, Y2SiO5, Y2O3, Y2O3S, Y3Al5O12, Gd2O2S, Ga2O3, SrS, SrTe, SrS—Sc2S3, ZnS, SrGa2S4, ZnCdS, Ta2Zn3O8, and mixtures thereof, doped with transition metal or rare earth elements as the luminescent center.
3. The particles according to
claim 1
, wherein the cathodoluminescent coating material is at least one compound selected from the group consisting of ZnO, ZnGa2O4, Y2SiO5, Y2O3, Y2O3S, Y3Al5O12, Gd2O2S, Ga2O3, SrS, SrTe, SrS—Sc2S3, ZnS, SrGa2S4, ZnCdS, Ta2Zn3O8, and mixtures thereof, doped with transition metal or rare earth elements as the luminescent center.
4. The particles according to
claim 1
, wherein the diameter of cathodoluminescent particles is ranging from 0.5 μm to 20 μm.
5. The particles according to
claim 1
, wherein the thickness of cathodoluminescent film on the particles is in the range of 1-100 nm.
6. The particles according to
claim 1
, wherein the atomic layer epitaxy is carried out using at least one of halide precursurs of Al, Ga, Sr, Ca, Si, transition metal elements and rare earth elements including Zn, Y, Gd, Te, Sc, Cd, and Ta.
7. The particles according to
claim 1
, wherein the atomic layer epitaxy is carried out using at least one of organometallic precursurs of Al, Ga, Sr, Ca, Si, transition metal elements and rare earth elements including Zn, Y, Gd, Te, Sc, Cd, and Ta.
8. In field emission display cathodoluminescent ,particles for improving a cathodoluminescent efficient, wherein the improved field emission display cathodoluminescent particles are formed by coating a uniform cathodoluminescent material on the surfaces of transparent conducting particles by an atomic layer epitaxy.
9. The particles according to
claim 8
, wherein the material of the transparent conducting particles is at least one compound selected from the group consisting of In-doped SnO2, Al-doped ZnO, Sb-doped Sn2O, conducting polymer, and mixtures thereof.
10. The particles according to
claim 8
, wherein the diameter of the transparent conducting particle is ranging from 0.5 μm to 20 μm.
11. The particles according to
claim 8
, wherein the cathodoluminescent coating material is at least one compound selected from the group consisting of ZnO, ZnGa2O4, Y2SiO5, Y2O3, Y2O3S, Y3Al5O12, Gd2O2S, Ga2O3, SrS, SrTe, SrS—Sc2S3, ZnS, SrGa2S4, ZnCdS, Ta2Zn8O, and mixtures thereof, doped with transition metal or rare earth elements as the luminescent center.
12. The particles according to
claim 8
, wherein the thickness of cathodoluminescent film on the particles is in the range of 1-100 nm.
13. The particles according to
claim 8
, wherein the atomic layer epitaxy is carried out using at least one of halide precursurs of Al, Ga, Sr, Ca, Si, transition metal elements and rare earth elements including Zn, Y, Gd, Te, Sc, Cd, and Ta.
14. The particles according to
claim 8
, wherein the atomic layer epitaxy is carried out using at least one of organometallic precursurs of Al, Ga, Sr, Ca, Si, transition metal elements and rare earth elements including Zn, Y, Gd, Te, Sc, Cd, and Ta.
15. In a field emission display cathodoluminescent layer forming method including a transparent substrate and a transparent electrode layer formed on the transparent substrate, wherein the improved method is directed to forming cathodoluminescent fine particles, on which a uniform cathodoluminescent material is coated by an atomic layer epitaxy, on a screen of the field emission display unit by an electrophoretic deposition method.
16. The method according to
claim 15
, wherein said cathodoluminescent particles is formed by a screen printing method.
17. The method according to
claim 15
, wherein said cathodoluminescent particles is formed by a spray method.
18. The method according to
claim 15
, wherein the material of cathodoluminescent particles is at least one compound selected from the group consisting of ZnO, ZnGa2O4, Y2SiO5, Y2O3, Y2O3S, Y3Al5O12, Gd2O2S, Ga2O3, SrS, SrTe, SrS—Sc2S3, ZnS, SrGa2S4, ZnCdS, Ta2Zn3O8, and mixtures thereof, doped with transition metal or rare earth elements as the luminescent center.
19. The method according to
claim 15
, wherein the cathodoluminescent coating material is at least one compound selected from the group consisting of ZnO, ZnGa2O4, Y2SiO5, Y2O3, Y2O3S, Y3Al5O12, Gd2O2S, Ga2O3, SrS, SrTe, SrS—Sc2S3, ZnS, SrGa2S4, ZnCdS, Ta2Zn3O8, and mixtures thereof, doped with transition metal or rare earth elements as the luminescent center.
20. The method according to
claim 15
, wherein the diameter of cathodoluminescent particles is ranging from 0.5 μm to 20 μm.
21. The method according to
claim 15
, wherein the thickness of cathodoluminescent film on the particles is in the range of 1-100 nm.
22. In a field emission display cathodoluminescent layer forming method including a transparent substrate and a transparent electrode layer formed on the transparent substrate, wherein the improved method is directed to forming cathodoluminescent particles, which are formed by coating a uniform cathodoluminescent material on the surface of transparent conducting particles by automic layer epitaxy, on a screen of the field emission display unit by an electrophoretic deposition method.
23. The method according to
claim 22
, wherein the material of the transparent conducting particles is at least one compound selected from the group consisting of In-doped SnO2, Al-doped ZnO, Sb-doped SnO2, conducting polymer, and mixtures thereof.
24. The method according to
claim 22
, wherein the diameter of the transparent conducting particle is ranging from 0.5 μm to 20 μm.
25. The method according to
claim 22
, wherein said cathodoluminescent particles are formed by a screen printing method.
26. The method according to
claim 22
, wherein said cathodoluminescent particles are formed by a spray method.
US08/995,537 1996-12-21 1997-12-22 Method for manufacturing phosphor-coated particles and method for forming cathodoluminescent screen using the same for field emission display Expired - Fee Related US6447908B2 (en)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
KR1019960069795A KR100265859B1 (en) 1996-12-21 1996-12-21 Luminous particle for field emission display
KR96-69795 1996-12-21

Publications (2)

Publication Number Publication Date
US20010051269A1 true US20010051269A1 (en) 2001-12-13
US6447908B2 US6447908B2 (en) 2002-09-10

Family

ID=19490124

Family Applications (1)

Application Number Title Priority Date Filing Date
US08/995,537 Expired - Fee Related US6447908B2 (en) 1996-12-21 1997-12-22 Method for manufacturing phosphor-coated particles and method for forming cathodoluminescent screen using the same for field emission display

Country Status (3)

Country Link
US (1) US6447908B2 (en)
JP (1) JP4118372B2 (en)
KR (1) KR100265859B1 (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US20110039471A1 (en) * 2009-01-27 2011-02-17 Bridgelux, Inc. Phosphor housing for light emitting diode lamp

Families Citing this family (20)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR100297719B1 (en) * 1998-10-16 2001-08-07 윤종용 Method for manufacturing thin film
US6458416B1 (en) * 2000-07-19 2002-10-01 Micron Technology, Inc. Deposition methods
US7192888B1 (en) 2000-08-21 2007-03-20 Micron Technology, Inc. Low selectivity deposition methods
US7094690B1 (en) * 2000-08-31 2006-08-22 Micron Technology, Inc. Deposition methods and apparatuses providing surface activation
US6951804B2 (en) 2001-02-02 2005-10-04 Applied Materials, Inc. Formation of a tantalum-nitride layer
US6878206B2 (en) 2001-07-16 2005-04-12 Applied Materials, Inc. Lid assembly for a processing system to facilitate sequential deposition techniques
US6812636B2 (en) * 2001-03-30 2004-11-02 Candescent Technologies Corporation Light-emitting device having light-emissive particles partially coated with light-reflective or/and getter material
JP4114331B2 (en) * 2001-06-15 2008-07-09 豊田合成株式会社 Light emitting device
US7368014B2 (en) * 2001-08-09 2008-05-06 Micron Technology, Inc. Variable temperature deposition methods
JP2004083653A (en) * 2002-08-23 2004-03-18 Sharp Corp Light emitting device, phosphor and method for producing the same
JP2004107572A (en) * 2002-09-20 2004-04-08 Sharp Corp Fluorescent material, and lighting device and display device containing the same
JP2006523245A (en) * 2003-03-28 2006-10-12 オスラム オプト セミコンダクターズ ゲゼルシャフト ミット ベシュレンクテル ハフツング Method for forming a coating on particles or raw materials and product to which it belongs
US20050170073A1 (en) * 2004-01-30 2005-08-04 Teco Nanotech Co., Ltd. Phosphors spray and method for spraying the same
CN101073165B (en) * 2004-12-06 2010-05-05 皇家飞利浦电子股份有限公司 Organic electroluminescent light source
TWI249861B (en) * 2005-01-12 2006-02-21 Lighthouse Technology Co Ltd Wavelength converting substance and light emitting device and encapsulating material comprising the same
US20060158099A1 (en) * 2005-01-19 2006-07-20 Chih-Yuan Wang Thick-film electroluminescent cell
EP2607450A4 (en) * 2010-08-16 2017-01-25 Ocean's King Lighting Science&Technology Co., Ltd. Color-adjustable luminescent powder and preparation method thereof
CN103443941A (en) * 2011-03-31 2013-12-11 松下电器产业株式会社 Semiconductor light-mitting device
CN103367611B (en) * 2012-03-28 2017-08-08 日亚化学工业株式会社 Wavelength conversion inorganic formed body and its manufacture method and light-emitting device
KR102323877B1 (en) 2016-09-28 2021-11-10 한국전자통신연구원 Apparatus for electroplating

Family Cites Families (33)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3875449A (en) 1969-10-02 1975-04-01 U S Radium Corp Coated phosphors
US4515827A (en) 1980-09-19 1985-05-07 Gte Products Corporation Method of vapor coating phosphor particles
US4508760A (en) 1983-06-10 1985-04-02 Nova Tran Corporation Method and apparatus for microencapsulation
JPS60109164A (en) * 1983-11-17 1985-06-14 Toshiba Corp Fluorescent lamp
US4585673A (en) * 1984-05-07 1986-04-29 Gte Laboratories Incorporated Method for coating phosphor particles
US4904901A (en) * 1984-12-03 1990-02-27 Lumel, Inc. Electrolumescent panels
US4713577A (en) * 1985-12-20 1987-12-15 Allied Corporation Multi-layer faceted luminescent screens
US4835437A (en) * 1986-02-10 1989-05-30 American Telephone And Telegraph Company, At&T Bell Laboratories Cathode ray tube with single crystal target
US4894583A (en) * 1986-07-14 1990-01-16 American Telephone And Telegraph Company, At&T Bell Laboratories Display devices with yttrium orthosilicate phosphors
US4961956A (en) * 1987-11-24 1990-10-09 Lumel, Inc. Electroluminescent lamps and phosphors
US5166092A (en) * 1988-01-28 1992-11-24 Fujitsu Limited Method of growing compound semiconductor epitaxial layer by atomic layer epitaxy
DE68906335T2 (en) * 1988-08-29 1993-12-02 Matsushita Electric Ind Co Ltd Fluorescent materials containing zinc oxide whiskers.
JPH0325850A (en) * 1989-06-21 1991-02-04 Toshiba Lighting & Technol Corp Duplex tube type fluorescent electric-discharge lamp
US4990371A (en) 1989-08-01 1991-02-05 Gte Products Corporation Process for coating small solids
JPH0828498B2 (en) * 1989-10-02 1996-03-21 株式会社東芝 Semiconductor device and manufacturing method thereof
US5156885A (en) * 1990-04-25 1992-10-20 Minnesota Mining And Manufacturing Company Method for encapsulating electroluminescent phosphor particles
FI84960C (en) * 1990-07-18 1992-02-10 Planar Int Oy LYSAEMNESSKIKT FOER ELEKTROLUMINESCENSDISPLAY.
EP0503638B1 (en) * 1991-03-13 1996-06-19 Sony Corporation Array of field emission cathodes
US5270247A (en) * 1991-07-12 1993-12-14 Fujitsu Limited Atomic layer epitaxy of compound semiconductor
US5206877A (en) * 1992-02-18 1993-04-27 Eastman Kodak Company Distributed feedback laser diodes with selectively placed lossy sections
US5432015A (en) * 1992-05-08 1995-07-11 Westaim Technologies, Inc. Electroluminescent laminate with thick film dielectric
TW261631B (en) * 1993-08-03 1995-11-01 Futaba Denshi Kogyo Kk
JP3341385B2 (en) 1993-08-18 2002-11-05 ソニー株式会社 Phosphor electrodeposition method for field emission display
GB9317408D0 (en) * 1993-08-20 1993-10-06 Ultra Silicon Techn Uk Ltd Ac thin film electroluminescent device
FR2726581B1 (en) * 1994-11-08 1996-12-06 Commissariat Energie Atomique SUSPENSION FOR THE DEPOSITION OF LUMINESCENT MATERIALS BY ELECTROPHORESIS, IN PARTICULAR FOR THE PRODUCTION OF FLAT SCREENS
US5834053A (en) * 1994-11-30 1998-11-10 The Regents Of The University Of California Blue light emitting thiogallate phosphor
US5582703A (en) 1994-12-12 1996-12-10 Palomar Technologies Corporation Method of fabricating an ultra-high resolution three-color screen
US5602445A (en) * 1995-05-12 1997-02-11 Oregon Graduate Institute Of Science And Technology Blue-violet phosphor for use in electroluminescent flat panel displays
US5667655A (en) 1996-04-15 1997-09-16 Zenith Electronics Corporation Method of making color screens for FED and other cathodoluminscent displays
US6015326A (en) * 1996-09-03 2000-01-18 Advanced Vision Technologies,Inc. Fabrication process for electron field-emission display
US5939825A (en) * 1996-12-02 1999-08-17 Planar Systems, Inc. Alternating current thin film electroluminescent device having blue light emitting alkaline earth phosphor
US5879459A (en) * 1997-08-29 1999-03-09 Genus, Inc. Vertically-stacked process reactor and cluster tool system for atomic layer deposition
US5982082A (en) * 1997-05-06 1999-11-09 St. Clair Intellectual Property Consultants, Inc. Field emission display devices

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US20110039471A1 (en) * 2009-01-27 2011-02-17 Bridgelux, Inc. Phosphor housing for light emitting diode lamp

Also Published As

Publication number Publication date
JP4118372B2 (en) 2008-07-16
JPH10188840A (en) 1998-07-21
KR19980050947A (en) 1998-09-15
US6447908B2 (en) 2002-09-10
KR100265859B1 (en) 2000-09-15

Similar Documents

Publication Publication Date Title
US6447908B2 (en) Method for manufacturing phosphor-coated particles and method for forming cathodoluminescent screen using the same for field emission display
US5821685A (en) Display with UV-light emitting phosphor
US5882779A (en) Semiconductor nanocrystal display materials and display apparatus employing same
US6991949B2 (en) Manufacturing method of an electron emitting apparatus
US6077458A (en) Phosphor, and cathode-ray tube and display using the same
US6069439A (en) Phosphor material, method of manufacturing the same and display device
JPH10312742A (en) Electron emitting element and display device with it
Kang et al. Optical characteristics of the phosphor screen in field-emission environments
US6171464B1 (en) Suspensions and methods for deposition of luminescent materials and articles produced thereby
JPH0717899B2 (en) Luminescent composition
JP2971496B2 (en) Method for producing slow electron beam excited phosphor
KR100803210B1 (en) Field emission electrode using carbon nanotubes and method of fabricating the same
JPH08302342A (en) Phosphor
KR20070036910A (en) Method of preparing electron emission display device
WO2006120952A1 (en) Blue light emitting phosphor for display unit and field emission display unit
JPH0834126B2 (en) Phosphor thin film manufacturing method and thin film EL device
JP2897716B2 (en) Phosphor
JP3417831B2 (en) Manufacturing method of phosphor material
KR100318372B1 (en) A field emission display and method of manufacturing the same
US20120237762A1 (en) Device constructs and methods of coating luminescent phosphors for display and lighting applications
KR100315221B1 (en) Field emission display
KR100223518B1 (en) A znga204(:mn) phosphor for low-voltage and a method for manufacturing a phosphor screen by using it
JPS58222180A (en) Blue fluophor to be excited with low-velocity electron beam and display tube employing the fluophor
JPH10279933A (en) Fluorescent body and display tube
JP2006024461A (en) High brightness light emitting device

Legal Events

Date Code Title Description
AS Assignment

Owner name: ELECTRONICS AND TELECOMMUNICATIONS RESEARCH INSTIT

Free format text: ASSIGNMENT OF ASSIGNORS INTEREST;ASSIGNORS:YUN, SUN JIN;LEE, JOONG WHAN;REEL/FRAME:009099/0737

Effective date: 19971128

FEPP Fee payment procedure

Free format text: PAYOR NUMBER ASSIGNED (ORIGINAL EVENT CODE: ASPN); ENTITY STATUS OF PATENT OWNER: SMALL ENTITY

FPAY Fee payment

Year of fee payment: 4

FEPP Fee payment procedure

Free format text: PAYER NUMBER DE-ASSIGNED (ORIGINAL EVENT CODE: RMPN); ENTITY STATUS OF PATENT OWNER: SMALL ENTITY

Free format text: PAYOR NUMBER ASSIGNED (ORIGINAL EVENT CODE: ASPN); ENTITY STATUS OF PATENT OWNER: SMALL ENTITY

REMI Maintenance fee reminder mailed
LAPS Lapse for failure to pay maintenance fees
STCH Information on status: patent discontinuation

Free format text: PATENT EXPIRED DUE TO NONPAYMENT OF MAINTENANCE FEES UNDER 37 CFR 1.362

FP Lapsed due to failure to pay maintenance fee

Effective date: 20100910