US20010038152A1 - Method for mounting a semiconductor chip on a substrate and semiconductor device adapted for mounting on a substrate - Google Patents
Method for mounting a semiconductor chip on a substrate and semiconductor device adapted for mounting on a substrate Download PDFInfo
- Publication number
- US20010038152A1 US20010038152A1 US09/725,431 US72543100A US2001038152A1 US 20010038152 A1 US20010038152 A1 US 20010038152A1 US 72543100 A US72543100 A US 72543100A US 2001038152 A1 US2001038152 A1 US 2001038152A1
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- conductive
- pad
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- mounting
- mounting surface
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Definitions
- This invention relates to a method for mounting a semiconductor chip on a substrate and to a semiconductor device that is adapted for mounting on a substrate.
- the applicant disclosed a method for mounting a semiconductor chip on a substrate to prepare a semiconductor device.
- the substrate has a chip-mounting region provided with a plurality of solder points.
- the semiconductor chip has a pad-mounting surface provided with a plurality of bonding pads, which are to be connected to corresponding ones of the solder points and which are disposed on the pad-mounting surface at locations that are offset from locations of the corresponding ones of the solder points on the chip-mounting region.
- the method involves the steps of forming conductive bodies in a conductor-forming mold and transferring the conductive bodies from the mold to the pad-mounting surface of the semiconductor chip via known transfer printing techniques.
- Each conductive body has an extension portion electrically connected to the respective one of the bonding pads, and a connection portion extending to the location corresponding to that of the respective one of the solder points on the chip-mounting region of the substrate.
- the applicant disclosed another method for mounting a semiconductor chip on a substrate to prepare a semiconductor device.
- the substrate has a chip-mounting region provided with a plurality of solder points.
- the semiconductor chip has a pad-mounting surface provided with a plurality of bonding pads, which are to be connected to corresponding ones of the solder points and which are disposed on the pad-mounting surface at locations that are offset from locations of the corresponding ones of the solder points on the chip-mounting region.
- the method involves the steps of forming a photoresist layer on the pad-mounting surface with a plurality of contact receiving cavities, each of which is registered with and exposes a portion of one of the bonding pads on the pad-mounting surface, and forming a plurality of conductive bodies, each of which is electrically connected to one of the bonding pads, and each of which has an anchor portion filling one of the contact receiving cavities and connected to the respective bonding pad, an extension portion extending from the anchor portion and formed on the surface of the photoresist layer, and a contact portion protruding from one end of the extension portion and formed on the surface of the photoresist layer opposite to the anchor portion.
- the contact portion is disposed at the position corresponding to a respective one of the solder points on the chip-mounting region of the substrate.
- the main object of the present invention is to provide a method of the type disclosed in the aforesaid co-pending U.S. patent application Ser. No. 09/564,989, for mounting a semiconductor chip on a substrate so as to overcome the aforesaid drawback.
- Another object of the present invention is to provide a semiconductor device of the type disclosed in the aforesaid co-pending U.S. patent application Ser. No. 09/564,989 that is capable of overcoming the aforesaid drawback.
- Still another object of the present invention is to provide a method of the type disclosed in the aforesaid co-pending U.S. patent application Ser. No. 09/688,855 for mounting a semiconductor chip on a substrate so as to overcome the aforesaid drawback.
- a further object of the present invention is to provide a semiconductor device of the type disclosed in the aforesaid co-pending U.S. patent application Ser. No. 09/688,855 that is capable of overcoming the aforesaid drawback.
- the semiconductor chip has a pad-mounting surface provided with a plurality of bonding pads, which are to be connected to corresponding ones of the solder points and which are disposed on the pad-mounting surface at locations that are offset from locations of the corresponding ones of the solder points on the chip-mounting region.
- the method comprises the steps of: forming a plurality of conductive inner bumps, each of which is electrically connected to and is formed to protrude from a respective one of the bonding pads; forming a photoresist layer on the pad-mounting surface, wherein the inner bumps are embedded in the photoresist layer; forming access holes in the photoresist layer, each of which is registered with and exposes at least a portion of a respective one of the inner bumps; and forming a plurality of conductive bodies, each of which has an extension portion, and an anchor portion and a contact portion on opposite ends of the extension portion, the anchor portion filling a respective one of the access holes and connecting electrically with and encapsulating at least a portion of a respective one of the inner bumps, the contact portion being formed on an upper surface of the photoresist layer opposite to the pad-mounting surface and being disposed at the location corresponding to a respective one of the solder points on the chip-mounting region of the substrate, the extension portion being formed on the upper
- a semiconductor device is adapted for mounting on a substrate having a chip-mounting region provided with a plurality of solder points.
- the semiconductor device comprises: a semiconductor chip having a pad-mounting surface provided with a plurality of bonding pads which are disposed on the pad-mounting surface at locations that are offset from locations of corresponding ones of the solder points on the chip-mounting region; a plurality of conductive inner bumps electrically and respectively connected to and protruding from the bonding pads; a photoresist layer formed on the pad-mounting surface of the semiconductor chip, the photoresist layer being formed with a plurality of access holes registered with and exposing at least a portion of a respective one of the inner bumps on the bonding pads; and a plurality of conductive bodies, each of which has an extension portion, and an anchor portion and a contact portion on opposite ends of the extension portion, the anchor portion filling a respective one of the access holes and connecting electrically with and encapsulating at
- the semiconductor chip has a pad-mounting surface provided with a plurality of bonding pads, which are to be connected to corresponding ones of the solder points and which are disposed on the pad-mounting surface at locations that are offset from locations of the corresponding ones of the solder points on the chip-mounting region.
- the method comprises the steps of: forming a plurality of conductive inner bumps, each of which is electrically connected to and is formed to protrude from a respective one of the bonding pads; and forming a plurality of spaced apart conductive bodies, each of which has an extension portion, and an anchor portion and a contact portion on opposite ends of the extension portion, the anchor portion connecting electrically with and encapsulating a respective one of the inner bumps, the contact portion being formed on said pad-mounting surface and being disposed at the location corresponding to a respective one of the solder points on the chip-mounting region of the substrate, the extension portion being formed on the pad-mounting surface and interconnecting the anchor and contact portions.
- a semiconductor device is adapted for mounting on a substrate having a chip-mounting region provided with a plurality of solder points.
- the semiconductor device comprises: a semiconductor chip having a pad-mounting surface provided with a plurality of bonding pads which are disposed on the pad-mounting surface at locations that are offset from locations of corresponding ones of the solder points on the chip-mounting region; a plurality of conductive inner bumps electrically and respectively connected to and protruding from the bonding pads; and a plurality of conductive bodies, each of which has an extension portion, and an anchor portion and a contact portion on opposite ends of the extension portion, the anchor portion connecting electrically with and encapsulating a respective one of the inner bumps, the contact portion being formed on the pad-mounting surface and being disposed at the location corresponding to a respective one of the solder points on the chip-mounting region of the substrate, the extension portion being formed on the pad-mounting surface and interconnecting the anchor and contact
- FIG. 1 is a schematic view to illustrate an inner bump formed on a semiconductor chip, which is to be mounted on a substrate according to a method of this invention
- FIG. 2 is a schematic view to illustrate a photoresist layer formed on a pad-mounting surface of the semiconductor chip of FIG. 1 according to the method of this invention
- FIG. 3 is a schematic view to illustrate a mask used in a photolithography process for the photoresist layer of FIG. 2 according to the method of this invention
- FIG. 4 is a schematic view to illustrate an access hole formed in the photoresist layer of FIG. 3 according to the method of this invention
- FIG. 5 is a schematic view to illustrate formation of a conductive body in the access hole of FIG. 4 according to the method of this invention
- FIG. 6 is a schematic view to illustrate formation of another conductive body modified from that of FIG. 5;
- FIG. 7 is a schematic view to illustrate a modified access hole formed in the photoresist layer of FIG. 3 according to the method of this invention.
- FIG. 8 is a schematic view to illustrate formation of the conductive body in the modified access hole of FIG. 7;
- FIG. 9 is a schematic view to illustrate formation of another conductive body modified from that of FIG. 8;
- FIG. 10 is a schematic view to illustrate formation of the inner bump and the conductive body on the pad-mounting surface of the semiconductor chip according to a modified method of this invention.
- FIG. 11 is a schematic view to illustrate formation of another conductive body modified from that of FIG. 10.
- FIG. 1 illustrates a semiconductor chip 1 to be mounted on a substrate 7 according to the method of this invention.
- the substrate 7 has a chip-mounting region provided with a plurality of solder points 71 (only one solder point 71 is shown).
- the semiconductor chip 1 has a pad-mounting surface 10 provided with a plurality of bonding pads 11 (only one bonding pad 11 is shown), which are to be connected to corresponding ones of the solder points 71 and which are disposed on the pad-mounting surface 10 at locations that are offset from locations of the corresponding ones of the solder points 71 on the chip-mounting region of the substrate 7 .
- FIGS. 1 to 5 illustrate consecutive steps of processing the semiconductor chip 1 for forming a semiconductor device that is to be mounted on the substrate 7 according to the method of this invention.
- a plurality of conductive inner bumps 2 are respectively formed on and protrude from the bonding pads 11 on the pad-mounting surface 10 of the semiconductor chip 1 via known soldering techniques.
- a light-curable layer such as a photoresist layer 3 , is formed on the pad-mounting surface 10 such that the inner bumps 2 are embedded in the photoresist layer 3 .
- a mask 4 is superimposed on the phtoresist layer 3 , and the photoresist layer 3 is exposed at positions that are offset from the inner bumps 2 and the bonding pads 11 .
- the exposed portion of the photoresist layer 3 hardens, and forms an insulative isolating layer that covers the pad-mounting surface 10 .
- a plurality of access holes 30 are formed in the photoresist layer 3 by removing the unexposed portion of the photoresist layer 3 from the isolating layer via solvent washing. Each of the access holes 30 exposes a portion of a respective one of the inner bumps 2 . Each of the access hole 30 has a depth from an upper surface of the photoresist layer 3 to the pad-mounting surface 10 of the semiconductor chip 1 that is opposite to the upper surface of the photoresist layer 3 .
- a plurality of conductive bodies 5 are formed respectively in the access holes 30 .
- Each of the conductive bodies 5 has an extension portion 501 , and an anchor portion 500 and a contact portion 502 on opposite ends of the extension portion 501 .
- the anchor portion 500 fills a respective one of the access holes 30 , and connects electrically with and encapsulates a respective one of the inner bumps 2 .
- the contact portion 502 is formed on the upper surface of the photoresist layer 3 , and is disposed at the location corresponding to a respective one of the solder points 71 on the chip-mounting region of the substrate 7 .
- the extension portion 501 is formed on the upper surface of the photoresist layer 3 , and interconnects the anchor and contact portions 500 , 502 .
- An outer bump 6 is subsequently formed on and protrudes from the contact portion 502 of each conductive body 5 via known soldering techniques after formation of the conductive bodies 5 , and is registered with the respective one of the solder points 71 on the chip-mounting region of the substrate 7 .
- the inner and outer bumps 2 are preferably formed from tin solder, and the conductive bodies 5 are formed from conductive paste that contains a metal selected from a group consisting of gold, silver, copper, iron, tin, and aluminum.
- FIG. 6 illustrates a modified conductive body 5 for each bonding pad 11 .
- the outer bump 6 is formed integrally with the anchor and extension portions 500 , 501 of the respective conductive body 5 .
- FIGS. 7 to 9 illustrate a modified access hole 30 formed in the photoresist layer 3 for each conductive body 5 according to the aforesaid method of this invention.
- Each access hole 30 extends from the upper surface of the photoresist layer 3 to a level that is above the pad-mounting surface 10 and that is below a top portion of the respective inner bump 2 .
- the conductive bodies 5 shown in FIGS. 8 and 9 correspond to those shown in FIGS. 5 and 6, but with the anchor portions of the same encapsulating only portions of the inner bumps 2 .
- the remaining portions of the inner bumps 2 are embedded in the photoresist layer 3 .
- FIGS. 10 and 11 illustrate a modified method of this invention based on the previous embodiment.
- the conductive bodies 5 shown in FIGS. 10 and 11 correspond to those shown in FIGS. 5 and 6, except that no photoresist layer 3 is formed on the pad-mounting surface 10 .
- Formation of the conductive bodies 5 on the pad-mounting surface 10 in the method of FIGS. 10 and 11 can be carried out by known printing techniques as disclosed in the aforesaid co-pending applications.
- the difficulty encountered in the prior art can be abated, and the production yield can be significantly increased.
- the anchor portions 500 of the conductive bodies 5 anchoring at the inner bumps 2 the former can be held firmly in contact with the bonding pads 11 without peeling off during the subsequent processing steps, such as thermal test.
Abstract
Description
- This application is a continuation-in-part (CIP) of a co-pending U.S. patent application Ser. No. 09/564,989, filed by the applicant on May 5, 2000, and a co-pending U.S. patent application Ser. No. 09/688,855 filed by the applicant on Oct. 16, 2000, the entire disclosures of which are incorporated herein by reference.
- 1. Field of the Invention
- This invention relates to a method for mounting a semiconductor chip on a substrate and to a semiconductor device that is adapted for mounting on a substrate.
- 2. Description of the Related Art
- With the rapid advancement in semiconductor fabrication technology, the bonding pads on the surface of a semiconductor chip are getting smaller in size, and the distance between adjacent bonding pads are getting shorter. These can create difficulty when connecting the semiconductor chip to an external circuit, and can affect adversely the production yield.
- In the co-pending U.S. patent application Ser. No. 09/564,989, the applicant disclosed a method for mounting a semiconductor chip on a substrate to prepare a semiconductor device. The substrate has a chip-mounting region provided with a plurality of solder points. The semiconductor chip has a pad-mounting surface provided with a plurality of bonding pads, which are to be connected to corresponding ones of the solder points and which are disposed on the pad-mounting surface at locations that are offset from locations of the corresponding ones of the solder points on the chip-mounting region. The method involves the steps of forming conductive bodies in a conductor-forming mold and transferring the conductive bodies from the mold to the pad-mounting surface of the semiconductor chip via known transfer printing techniques. Each conductive body has an extension portion electrically connected to the respective one of the bonding pads, and a connection portion extending to the location corresponding to that of the respective one of the solder points on the chip-mounting region of the substrate.
- In the co-pending U.S. patent application Ser. No. 09/688,855, the applicant disclosed another method for mounting a semiconductor chip on a substrate to prepare a semiconductor device. Similar to the co-pending U.S. patent application Ser. No. 09/564,989, the substrate has a chip-mounting region provided with a plurality of solder points. The semiconductor chip has a pad-mounting surface provided with a plurality of bonding pads, which are to be connected to corresponding ones of the solder points and which are disposed on the pad-mounting surface at locations that are offset from locations of the corresponding ones of the solder points on the chip-mounting region. The method involves the steps of forming a photoresist layer on the pad-mounting surface with a plurality of contact receiving cavities, each of which is registered with and exposes a portion of one of the bonding pads on the pad-mounting surface, and forming a plurality of conductive bodies, each of which is electrically connected to one of the bonding pads, and each of which has an anchor portion filling one of the contact receiving cavities and connected to the respective bonding pad, an extension portion extending from the anchor portion and formed on the surface of the photoresist layer, and a contact portion protruding from one end of the extension portion and formed on the surface of the photoresist layer opposite to the anchor portion. The contact portion is disposed at the position corresponding to a respective one of the solder points on the chip-mounting region of the substrate.
- The main object of the present invention is to provide a method of the type disclosed in the aforesaid co-pending U.S. patent application Ser. No. 09/564,989, for mounting a semiconductor chip on a substrate so as to overcome the aforesaid drawback.
- Another object of the present invention is to provide a semiconductor device of the type disclosed in the aforesaid co-pending U.S. patent application Ser. No. 09/564,989 that is capable of overcoming the aforesaid drawback.
- Still another object of the present invention is to provide a method of the type disclosed in the aforesaid co-pending U.S. patent application Ser. No. 09/688,855 for mounting a semiconductor chip on a substrate so as to overcome the aforesaid drawback.
- A further object of the present invention is to provide a semiconductor device of the type disclosed in the aforesaid co-pending U.S. patent application Ser. No. 09/688,855 that is capable of overcoming the aforesaid drawback.
- According to one aspect of the present invention, there is provided a method for mounting a semiconductor chip on a substrate having a chip-mounting region provided with a plurality of solder points. The semiconductor chip has a pad-mounting surface provided with a plurality of bonding pads, which are to be connected to corresponding ones of the solder points and which are disposed on the pad-mounting surface at locations that are offset from locations of the corresponding ones of the solder points on the chip-mounting region. The method comprises the steps of: forming a plurality of conductive inner bumps, each of which is electrically connected to and is formed to protrude from a respective one of the bonding pads; forming a photoresist layer on the pad-mounting surface, wherein the inner bumps are embedded in the photoresist layer; forming access holes in the photoresist layer, each of which is registered with and exposes at least a portion of a respective one of the inner bumps; and forming a plurality of conductive bodies, each of which has an extension portion, and an anchor portion and a contact portion on opposite ends of the extension portion, the anchor portion filling a respective one of the access holes and connecting electrically with and encapsulating at least a portion of a respective one of the inner bumps, the contact portion being formed on an upper surface of the photoresist layer opposite to the pad-mounting surface and being disposed at the location corresponding to a respective one of the solder points on the chip-mounting region of the substrate, the extension portion being formed on the upper surface of the photoresist layer and interconnecting the anchor and contact portions.
- According to another aspect of the present invention, a semiconductor device is adapted for mounting on a substrate having a chip-mounting region provided with a plurality of solder points. The semiconductor device comprises: a semiconductor chip having a pad-mounting surface provided with a plurality of bonding pads which are disposed on the pad-mounting surface at locations that are offset from locations of corresponding ones of the solder points on the chip-mounting region; a plurality of conductive inner bumps electrically and respectively connected to and protruding from the bonding pads; a photoresist layer formed on the pad-mounting surface of the semiconductor chip, the photoresist layer being formed with a plurality of access holes registered with and exposing at least a portion of a respective one of the inner bumps on the bonding pads; and a plurality of conductive bodies, each of which has an extension portion, and an anchor portion and a contact portion on opposite ends of the extension portion, the anchor portion filling a respective one of the access holes and connecting electrically with and encapsulating at least a portion of a respective one of the inner bumps, the contact portion being formed on an upper surface of the photoresist layer opposite to the pad-mounting surface and being disposed at the location corresponding to a respective one of the solder points on the chip-mounting region of the substrate, the extension portion being formed on the upper surface of the photoresist layer and interconnecting the anchor and contact portions.
- According to still another aspect of the present invention, there is provided a method for mounting a semiconductor chip on a substrate having a chip-mounting region provided with a plurality of solder points. The semiconductor chip has a pad-mounting surface provided with a plurality of bonding pads, which are to be connected to corresponding ones of the solder points and which are disposed on the pad-mounting surface at locations that are offset from locations of the corresponding ones of the solder points on the chip-mounting region. The method comprises the steps of: forming a plurality of conductive inner bumps, each of which is electrically connected to and is formed to protrude from a respective one of the bonding pads; and forming a plurality of spaced apart conductive bodies, each of which has an extension portion, and an anchor portion and a contact portion on opposite ends of the extension portion, the anchor portion connecting electrically with and encapsulating a respective one of the inner bumps, the contact portion being formed on said pad-mounting surface and being disposed at the location corresponding to a respective one of the solder points on the chip-mounting region of the substrate, the extension portion being formed on the pad-mounting surface and interconnecting the anchor and contact portions.
- According to a further aspect of the present invention, a semiconductor device is adapted for mounting on a substrate having a chip-mounting region provided with a plurality of solder points. The semiconductor device comprises: a semiconductor chip having a pad-mounting surface provided with a plurality of bonding pads which are disposed on the pad-mounting surface at locations that are offset from locations of corresponding ones of the solder points on the chip-mounting region; a plurality of conductive inner bumps electrically and respectively connected to and protruding from the bonding pads; and a plurality of conductive bodies, each of which has an extension portion, and an anchor portion and a contact portion on opposite ends of the extension portion, the anchor portion connecting electrically with and encapsulating a respective one of the inner bumps, the contact portion being formed on the pad-mounting surface and being disposed at the location corresponding to a respective one of the solder points on the chip-mounting region of the substrate, the extension portion being formed on the pad-mounting surface and interconnecting the anchor and contact portions.
- In drawings which illustrate embodiments of the invention,
- FIG. 1 is a schematic view to illustrate an inner bump formed on a semiconductor chip, which is to be mounted on a substrate according to a method of this invention;
- FIG. 2 is a schematic view to illustrate a photoresist layer formed on a pad-mounting surface of the semiconductor chip of FIG. 1 according to the method of this invention;
- FIG. 3 is a schematic view to illustrate a mask used in a photolithography process for the photoresist layer of FIG. 2 according to the method of this invention,
- FIG. 4 is a schematic view to illustrate an access hole formed in the photoresist layer of FIG. 3 according to the method of this invention;
- FIG. 5 is a schematic view to illustrate formation of a conductive body in the access hole of FIG. 4 according to the method of this invention;
- FIG. 6 is a schematic view to illustrate formation of another conductive body modified from that of FIG. 5;
- FIG. 7 is a schematic view to illustrate a modified access hole formed in the photoresist layer of FIG. 3 according to the method of this invention;
- FIG. 8 is a schematic view to illustrate formation of the conductive body in the modified access hole of FIG. 7;
- FIG. 9 is a schematic view to illustrate formation of another conductive body modified from that of FIG. 8;
- FIG. 10 is a schematic view to illustrate formation of the inner bump and the conductive body on the pad-mounting surface of the semiconductor chip according to a modified method of this invention; and
- FIG. 11 is a schematic view to illustrate formation of another conductive body modified from that of FIG. 10.
- FIG. 1 illustrates a
semiconductor chip 1 to be mounted on asubstrate 7 according to the method of this invention. Thesubstrate 7 has a chip-mounting region provided with a plurality of solder points 71 (only onesolder point 71 is shown). Thesemiconductor chip 1 has a pad-mounting surface 10 provided with a plurality of bonding pads 11 (only onebonding pad 11 is shown), which are to be connected to corresponding ones of thesolder points 71 and which are disposed on the pad-mounting surface 10 at locations that are offset from locations of the corresponding ones of thesolder points 71 on the chip-mounting region of thesubstrate 7. - FIGS.1 to 5 illustrate consecutive steps of processing the
semiconductor chip 1 for forming a semiconductor device that is to be mounted on thesubstrate 7 according to the method of this invention. - In FIG. 1, a plurality of conductive inner bumps2 (only one inner bump is shown) are respectively formed on and protrude from the
bonding pads 11 on the pad-mounting surface 10 of thesemiconductor chip 1 via known soldering techniques. - In FIG. 2, a light-curable layer, such as a
photoresist layer 3, is formed on the pad-mounting surface 10 such that theinner bumps 2 are embedded in thephotoresist layer 3. - In FIG. 3, a
mask 4 is superimposed on thephtoresist layer 3, and thephotoresist layer 3 is exposed at positions that are offset from theinner bumps 2 and thebonding pads 11. The exposed portion of thephotoresist layer 3 hardens, and forms an insulative isolating layer that covers the pad-mounting surface 10. - In FIG. 4, a plurality of access holes30 (only one is shown) are formed in the
photoresist layer 3 by removing the unexposed portion of thephotoresist layer 3 from the isolating layer via solvent washing. Each of the access holes 30 exposes a portion of a respective one of theinner bumps 2. Each of theaccess hole 30 has a depth from an upper surface of thephotoresist layer 3 to the pad-mountingsurface 10 of thesemiconductor chip 1 that is opposite to the upper surface of thephotoresist layer 3. - In FIG. 5, a plurality of conductive bodies5 (only one is shown) are formed respectively in the access holes 30. Each of the
conductive bodies 5 has anextension portion 501, and ananchor portion 500 and acontact portion 502 on opposite ends of theextension portion 501. Theanchor portion 500 fills a respective one of the access holes 30, and connects electrically with and encapsulates a respective one of theinner bumps 2. Thecontact portion 502 is formed on the upper surface of thephotoresist layer 3, and is disposed at the location corresponding to a respective one of the solder points 71 on the chip-mounting region of thesubstrate 7. Theextension portion 501 is formed on the upper surface of thephotoresist layer 3, and interconnects the anchor andcontact portions outer bump 6 is subsequently formed on and protrudes from thecontact portion 502 of eachconductive body 5 via known soldering techniques after formation of theconductive bodies 5, and is registered with the respective one of the solder points 71 on the chip-mounting region of thesubstrate 7. - The inner and
outer bumps 2 are preferably formed from tin solder, and theconductive bodies 5 are formed from conductive paste that contains a metal selected from a group consisting of gold, silver, copper, iron, tin, and aluminum. - FIG. 6 illustrates a modified
conductive body 5 for eachbonding pad 11. Instead of forming theouter bump 6 on thecontact portion 502 of eachconductive body 5 by soldering techniques, theouter bump 6 is formed integrally with the anchor andextension portions conductive body 5. - FIGS.7 to 9 illustrate a modified
access hole 30 formed in thephotoresist layer 3 for eachconductive body 5 according to the aforesaid method of this invention. Eachaccess hole 30 extends from the upper surface of thephotoresist layer 3 to a level that is above the pad-mountingsurface 10 and that is below a top portion of the respectiveinner bump 2. Theconductive bodies 5 shown in FIGS. 8 and 9 correspond to those shown in FIGS. 5 and 6, but with the anchor portions of the same encapsulating only portions of theinner bumps 2. The remaining portions of theinner bumps 2 are embedded in thephotoresist layer 3. - FIGS. 10 and 11 illustrate a modified method of this invention based on the previous embodiment. The
conductive bodies 5 shown in FIGS. 10 and 11 correspond to those shown in FIGS. 5 and 6, except that nophotoresist layer 3 is formed on the pad-mountingsurface 10. Formation of theconductive bodies 5 on the pad-mountingsurface 10 in the method of FIGS. 10 and 11 can be carried out by known printing techniques as disclosed in the aforesaid co-pending applications. - With the design of the
conductive bodies 5 according to the method of this invention, the difficulty encountered in the prior art can be abated, and the production yield can be significantly increased. Moreover, with theanchor portions 500 of theconductive bodies 5 anchoring at theinner bumps 2, the former can be held firmly in contact with thebonding pads 11 without peeling off during the subsequent processing steps, such as thermal test. - With the invention thus explained, it is apparent that various modifications and variations can be made without departing from the spirit of the present invention. It is therefore intended that the invention be limited only as recited in the appended claims.
Claims (22)
Priority Applications (3)
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US09/725,431 US6400016B2 (en) | 2000-01-14 | 2000-11-29 | Method for mounting a semiconductor chip on a substrate and semiconductor device adapted for mounting on a substrate |
US09/765,793 US6437448B1 (en) | 2000-01-14 | 2001-01-18 | Semiconductor device adapted for mounting on a substrate |
US10/121,782 US6602732B2 (en) | 2000-01-14 | 2002-04-11 | Method for mounting a semiconductor chip on a substrate and semiconductor device adapted for mounting on a substrate |
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TW089100578A TW434848B (en) | 2000-01-14 | 2000-01-14 | Semiconductor chip device and the packaging method |
US09/564,989 US6333561B1 (en) | 2000-01-14 | 2000-05-05 | Method for mounting a semiconductor chip on a substrate, and semiconductor device adapted for mounting on a substrate |
TW089100578A02 | 2000-09-29 | ||
US09/688,855 US6420788B1 (en) | 2000-08-25 | 2000-10-16 | Method for mounting a semiconductor chip on a substrate and semiconductor device adapted for mounting on a substrate |
US09/725,431 US6400016B2 (en) | 2000-01-14 | 2000-11-29 | Method for mounting a semiconductor chip on a substrate and semiconductor device adapted for mounting on a substrate |
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US09/688,855 Continuation-In-Part US6420788B1 (en) | 2000-01-14 | 2000-10-16 | Method for mounting a semiconductor chip on a substrate and semiconductor device adapted for mounting on a substrate |
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US10/121,782 Division US6602732B2 (en) | 2000-01-14 | 2002-04-11 | Method for mounting a semiconductor chip on a substrate and semiconductor device adapted for mounting on a substrate |
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US10/121,782 Expired - Fee Related US6602732B2 (en) | 2000-01-14 | 2002-04-11 | Method for mounting a semiconductor chip on a substrate and semiconductor device adapted for mounting on a substrate |
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US8508054B2 (en) * | 2011-06-16 | 2013-08-13 | Broadcom Corporation | Enhanced bump pitch scaling |
Family Cites Families (5)
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US5632631A (en) * | 1994-06-07 | 1997-05-27 | Tessera, Inc. | Microelectronic contacts with asperities and methods of making same |
JPH08236586A (en) * | 1994-12-29 | 1996-09-13 | Nitto Denko Corp | Semiconductor device and manufacturing method thereof |
JP3060896B2 (en) * | 1995-05-26 | 2000-07-10 | 日本電気株式会社 | Structure of bump electrode |
US6200143B1 (en) * | 1998-01-09 | 2001-03-13 | Tessera, Inc. | Low insertion force connector for microelectronic elements |
TW434848B (en) * | 2000-01-14 | 2001-05-16 | Chen I Ming | Semiconductor chip device and the packaging method |
-
2000
- 2000-11-29 US US09/725,431 patent/US6400016B2/en not_active Expired - Fee Related
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2002
- 2002-04-11 US US10/121,782 patent/US6602732B2/en not_active Expired - Fee Related
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US20120153475A1 (en) * | 2010-12-16 | 2012-06-21 | Stmicroelectronics (Crolles 2) Sas | Method of assembling two integrated circuits and corresponding structure |
US8674517B2 (en) * | 2010-12-16 | 2014-03-18 | Stmicroelectronics (Crolles 2) Sas | Method of assembling two integrated circuits and corresponding structure |
Also Published As
Publication number | Publication date |
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US6602732B2 (en) | 2003-08-05 |
US6400016B2 (en) | 2002-06-04 |
US20020109225A1 (en) | 2002-08-15 |
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