US12092126B2 - Oil feed assembly for a vacuum pump having a venting conduit - Google Patents
Oil feed assembly for a vacuum pump having a venting conduit Download PDFInfo
- Publication number
- US12092126B2 US12092126B2 US17/288,289 US201917288289A US12092126B2 US 12092126 B2 US12092126 B2 US 12092126B2 US 201917288289 A US201917288289 A US 201917288289A US 12092126 B2 US12092126 B2 US 12092126B2
- Authority
- US
- United States
- Prior art keywords
- oil
- sump
- section
- bearing
- feed assembly
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
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Classifications
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04D—NON-POSITIVE-DISPLACEMENT PUMPS
- F04D19/00—Axial-flow pumps
- F04D19/02—Multi-stage pumps
- F04D19/04—Multi-stage pumps specially adapted to the production of a high vacuum, e.g. molecular pumps
- F04D19/042—Turbomolecular vacuum pumps
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04D—NON-POSITIVE-DISPLACEMENT PUMPS
- F04D29/00—Details, component parts, or accessories
- F04D29/05—Shafts or bearings, or assemblies thereof, specially adapted for elastic fluid pumps
- F04D29/056—Bearings
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04D—NON-POSITIVE-DISPLACEMENT PUMPS
- F04D29/00—Details, component parts, or accessories
- F04D29/05—Shafts or bearings, or assemblies thereof, specially adapted for elastic fluid pumps
- F04D29/056—Bearings
- F04D29/059—Roller bearings
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04D—NON-POSITIVE-DISPLACEMENT PUMPS
- F04D29/00—Details, component parts, or accessories
- F04D29/06—Lubrication
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04D—NON-POSITIVE-DISPLACEMENT PUMPS
- F04D29/00—Details, component parts, or accessories
- F04D29/06—Lubrication
- F04D29/063—Lubrication specially adapted for elastic fluid pumps
Definitions
- the field of the invention relates to an oil feed for a vacuum pump.
- Vacuum pumps such as turbomolecular pumps, comprise a rotor comprising a plurality of discs mounted on a rotor shaft for rotation relative to a plurality of stator discs disposed in interleaving relationship with the rotor discs.
- the rotor shaft is supported by a bearing arrangement that may comprise two bearings located at or intermediate respective ends of the shaft.
- the upper bearing may be in the form of a magnetic bearing and the lower bearing is typically a rolling bearing.
- a typical rolling bearing comprises an inner race fixed relative to the rotor shaft, an outer race and a plurality of rolling elements located between the races for allowing relative rotation of the inner race and the outer race. To prevent mutual contact between the rolling elements they are often guided and evenly spaced by a cage. Adequate lubrication is important to ensure accurate and reliable operation of rolling bearings.
- the main purpose of the lubricant is to establish a load-carrying film to separate the bearing components in rolling and sliding contact in order to minimise friction and wear. Other purposes include the prevention of oxidation or corrosion of the bearing components, the formation of a barrier to contaminants and the transfer of heat away from the bearing components.
- the lubricant is generally in the form of either oil or grease (a mixture of oil and a thickening agent).
- Vacuum pumps using oil-lubricated bearings require an oil feed system to feed oil between the contact areas of the bearing. This enables the oil to perform cooling as well as lubrication and thereby permits the bearings to run at a faster speed.
- Turbomolecular vacuum pumps have traditionally used a wicking system for supplying oil to a rolling beating.
- one or more felt wicks are supplied by an oil reservoir and feed oil via one or more stacked felts in a felt stack to a conical “oil feed” nut mounted on the shaft.
- the felt wicks may lay against respective major surfaces of the staked felts in the felt stack so that the felt wick is sandwiched between stacked felts in the felt stack.
- an oil feed assembly for a vacuum pump comprising: an oil feeder located for feeding oil to one side of a bearing of the vacuum pump; an oil sump located on the one side of the bearing and configured to receive excess oil from the oil feeder; and a venting bypass conduit fluidly coupled with the oil sump and with another side of the bearing, the venting bypass conduit having an inlet located at an elevated position above a floor of the oil sump and configured to convey gas from the oil sump to the another side of the bearing.
- the first aspect recognises that a problem with existing oil feed assemblies is that when the vacuum pump pumps down, gas trapped within the oil feed system can cause oil to be lost. This loss occurs because the gas flowing out of the oil feed system can remove oil with it, which prevents the oil from being captured for recirculation. In time, this leads to insufficient oil being present in the oil feed system, which dries out and results in damage to the pump bearings.
- the oil feed assembly may be for a vacuum pump.
- the oil feed assembly may comprise an oil feeder which is located or configured to feed oil to a first side of a bearing of the vacuum pump.
- the oil feed assembly may comprise an oil sump, chamber or pot.
- the oil sump may be located or positioned on the first side of the bearing.
- the oil sump may be configured or arranged to receive or hold excess or unretained oil which escapes from the oil feeder.
- the oil feed assembly may comprise a venting bypass conduit which may be in fluid communication with the oil sump.
- the venting bypass conduit may also be in fluid communication with a second side of the bearing.
- the venting bypass conduit may have an inlet which is located or arranged at an elevated, raised or offset position from a floor, wall or face of the oil sump.
- the venting bypass conduit may be configured or arranged to convey or communicate gas from the oil sump to the second side of the bearing. In this way, the venting bypass conduit provides an alternative path which allows gas within the oil sump to escape during pump-down.
- the location of the inlet to that venting bypass conduit helps to prevent oil within the oil sump from escaping with the gas travelling through the venting bypass conduit. This helps to prevent loss of oil from the oil feeder and prolongs the life of the bearings.
- the elevated position is higher than an expected depth of the excess oil. Accordingly, the inlet may be positioned at a height or location which is above the expected height of any excess oil within the oil sump. This helps to ensure that any oil is prevented from being drawn into the venting bypass conduit.
- the inlet is elevated in an axial direction with respect an axis of the bearing. Accordingly, the inlet may be positioned further along the axial direction of the bearing than the floor of the oil sump.
- the inlet is orientated in the axial direction with respect an axis of the bearing.
- the inlet is elevated in a radial direction with respect an axis of the bearing.
- the inlet is orientated in the radial direction.
- the inlet is located at the elevated position above each floor of the oil sump. Accordingly, the inlet may be positioned above every floor, wall or face of the oil sump. This helps to ensure that oil is prevented from escaping the oil sump irrespective of the orientation of the oil feed assembly.
- the inlet comprises drip edges configured to direct oil away from the inlet. Providing drip edges helps to prevent any oil in the vicinity of the inlet escaping through the venting bypass conduit.
- the venting bypass conduit has a sump section defining the inlet, the sump section extending from at least one floor of the oil sump. Accordingly, the venting bypass conduit may have a first portion which provides the inlet and which extends from a floor of the oil sump.
- the sump section extends further than the expected depth of the excess oil. Accordingly, the sump section may have height and/or length which is greater than the expected depth of the excess oil.
- the sump section extends in an axial direction with respect to an axis of the bearing.
- the sump section extends in a radial direction with respect to an axis of the bearing.
- the sump section is rounded to resist gathering of oil. Accordingly, the sump section may be shaped to prevent oil from gathering.
- the venting bypass conduit comprises a gallery section fluidly coupled with the sump section, extending around the oil feed cap. Accordingly, the sump section may be connected with the gallery section which surrounds the oil sump.
- the gallery section comprises an annulus extending circumferentially, concentric with the bearing. Accordingly, the gallery section may be ring-shaped and surround the oil sump.
- the oil feed assembly may comprise a plurality of sump sections, each defining one the inlet, each sump section being fluidly coupled with the gallery section. Accordingly, more than one sump section may be provided feed a common gallery section. This increases the volume of the venting bypass conduit within the oil sump and reduces the flow rate of gas from the oil sump through the inlets during pump-down.
- the venting bypass conduit comprises a coupling section fluidly coupled with the gallery section.
- the coupling section fluidly couples with the other side of the bearing.
- the coupling section extends axially with respect to an axis of the bearing.
- the coupling section is circumferentially offset from the sump section.
- the sump section and one part of the gallery section are formed as a first unitary part, and the coupling section and another part of the gallery section are formed as a second unitary part. Accordingly, the gallery section may be formed from at least two parts which couple together to form the gallery section. This simplifies manufacture of the gallery section.
- the oil sump defines at least one recess to facilitate flow of gas past the oil feeder. Providing recesses helps to facilitate the flow of gas out of the sump section.
- a vacuum pump comprising a bearing and the oil feed assembly of the first aspect.
- FIG. 1 shows an oil feed cap according to one embodiment
- FIG. 3 is a cross-sectional view of the oil feed cap of FIG. 1 ;
- FIG. 4 is a view similar to FIG. 2 but with the wick holders removed;
- FIG. 5 is a cross-sectional view of the oil feed cap of FIG. 1 ;
- FIGS. 6 and 7 shows the sump section within the sump region
- FIG. 8 shows an oil feed cap according to one embodiment
- FIGS. 9 and 10 show other views of the oil feed cap of FIG. 8 ;
- FIG. 11 is a view similar to FIG. 9 but with the wick holders removed.
- FIG. 12 is a cross-sectional view of FIG. 11 .
- embodiments provide a bypass conduit which fluidly couples the void with the vacuum pump.
- the bypass conduit is provided with an inlet within the void which is located so as to help prevent any oil within the void from being removed with the gas during pump-down.
- the inlet is located at a position above any face, wall or floor of the void sump on which oil may gather. It will be appreciated that the oil may gather on different faces, depending on the orientation of the vacuum pump. This helps to prevent loss of the oil, which prolongs the life of the hearing and the vacuum pump.
- FIG. 1 shows an oil feed cap 10 which feeds oil to a bearing of a vacuum pump (not shown).
- the oil feed cap 10 has a number of wick holders 20 which extend into an oil feed reservoir within the vacuum pump.
- the wick holders 20 retain a wick 30 which conveys oil from the reservoir within the vacuum pump to a bearing aperture 40 which receives the conical surface of the nut of the bearing, thereby feeding oil to the hearing.
- a number of coupling section conduits 50 are formed in the oil feed cap 10 , which are in fluid communication with the vacuum pump.
- the wicks 30 are received by a stack of felts 60 which are stacked within a sump region 70 within the oil feed cap 10 .
- a gallery section 120 extends around the sump region 70 .
- the sump region 70 contains a sump section 80 (which forms the first part of the bypass conduit) which extends radially inwards, towards the centre of the sump region 70 and which intersects the stack of felts 60 .
- the sump section 80 defines an inlet 90 .
- the inlet 90 is elevated above a first face 100 of the sump region 70 (defined by a circular plate), elevated above a second face (not shown—defined by an opposing circular plate supporting the wick holders 20 ) and elevated above a third face 110 (defined by a tubular wall extending between the first face 100 and the third face).
- the bypass conduit defined by the sump section 80 fluidly couples with a gallery section 120 (which forms the second part of the bypass conduit) which comprises an annular chamber which concentrically surrounds the sump region 70 .
- the coupling section conduits 50 (which forms the third part of the bypass conduit) are fluidly coupled with the gallery section 120 .
- one of the coupling section conduits 50 is radially aligned with the sump section 80
- the coupling section conduit 50 is not radially aligned with the sump section 80 . That is to say that the coupling section conduit 50 may be circumferentially offset from the sump section 80 .
- gas within the sump region 70 is evacuated and flows primarily through the inlet 90 , along the sump section 80 , into the gallery section 120 and through the coupling section conduits 50 into the vacuum pump.
- the location of the inlet 90 helps to prevent the flow of oil together with the evacuating gas during pump-down.
- FIG. 8 shows an oil feed cap 10 A which feeds oil to a bearing of a vacuum pump (not shown).
- the oil feed cap 10 A has a number of wick holders 20 A which each receive a wick 30 A.
- the wicks 30 A feed a stack of felts 60 A which provide oil to a bearing aperture 40 A.
- sump sections 80 A (which form the first part of the bypass conduit) are provided, each of which have an inlet 90 A.
- the inlet 90 A is orientated in an axial direction with respect to a rotation axis of the bearing.
- the inlet 90 A is located in an elevated position with respect to the first face 100 A, the opposing second face (not shown) and the third face 110 A.
- the sump section 80 forms an axially extending conduit section 95 A which bends to form a radially extending conduit 97 A.
- Each inlet 90 A is in fluid communication with a gallery section 120 A (which forms the second part of the bypass conduit) which is an annular chamber which concentrically surrounds the sump region 70 A.
- the gallery section 120 A is enclosed by a further structure (not shown) which provides the coupling section conduits (which form the third part of the bypass conduit) in a similar manner to that described above.
- a series of recesses 130 A are formed in the first face 100 A.
- Recesses 140 A extend axially along each side of the sump section 80 A.
- gas is evacuated from the sump region 70 A, assisted by flowing along the recesses 130 A and 140 A.
- the gas flows through the inlet 90 A, along the axial section 95 A and into the radial section 97 A.
- the gas is then received within the gallery section 120 A, flows through the coupling conduits and into the vacuum pump.
- the location of the inlet 90 A helps to prevent the flow of oil together with the evacuating gas during pump-down. It can be seen that due to the location of the inlets 90 , irrespective of the orientation of the oil feed cap 10 A, the inlets 90 A are positioned above the likely level of any excess oil on any face within the sump region 70 A, thereby helping to prevent loss of the oil during pump-down.
- the exact positioning of the inlets 90 A is selected based on the expected depth of any excess oil which gathers in the sump region 70 A. Also, the dimensioning of the inlet 90 A and the sump section 80 A is set to control the velocity of the gas being pumped out of the sump region 70 A.
- Some embodiments provide a preferable gas path during pump down of a Turbo pump to prevent the oil in the oil sump reservoir or oil pot being drawn through the bearing and being lost into the pump. Some embodiments are functional in any orientation and not allow oil to drain out of the oil sump reservoir
- some embodiments create a preferential gas path to remove the gas trapped in the oil cavity during harsh venting activities. This has been achieved by connection to the gas cavity with the backing line via a complex path to avoid loss of oil for the reservoir.
- One embodiment involves slotting the lower oil felt and introducing a square tunnel section into the centre of the pot.
- a small gas inlet slot is created in the end of the tunnel to accept gas and the end is rounded so any oil that falls on the surface runs around and away from this inlet.
- the inlet is then connected via an annulus to the base cap and is vented to the wire cavity which in turn is connected to the hacking-line.
- Another embodiment is an integrated moulded solution that involves intricate channelling.
- the gas firstly passes along the slots in the base of the oil pot and reaches the inner wall where is passes up the slotted inner wall and joins any gas drawn across the top face of the upper most felt. From this point it is drawn into the four slots, equispaced around the diameter, once drawn into these it is vented to the wire cavity via an external moulded slot formed on a sliding core.
- This embodiment also includes moulded sealing edges against vacuum loss.
- Embodiments seek to avoid the loss of oil through either being drawn directly into the outlet or oil that has pooled running directly into the outlet when stored or run in a non-inverted orientation.
- Embodiments save height in the pumping system by cutting the gas exhaust path into the current oil pot constraints i.e. the pump height stays the same.
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- Engineering & Computer Science (AREA)
- Mechanical Engineering (AREA)
- General Engineering & Computer Science (AREA)
- Non-Positive Displacement Air Blowers (AREA)
- Compressors, Vaccum Pumps And Other Relevant Systems (AREA)
Abstract
Description
Claims (12)
Applications Claiming Priority (4)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| GB1817356.7 | 2018-10-25 | ||
| GB1817356 | 2018-10-25 | ||
| GB1817356.7A GB2578431B (en) | 2018-10-25 | 2018-10-25 | Oil feed for a vacuum pump |
| PCT/GB2019/053015 WO2020084302A1 (en) | 2018-10-25 | 2019-10-23 | Oil feed assembly for a vacuum pump having a venting conduit |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| US20210372421A1 US20210372421A1 (en) | 2021-12-02 |
| US12092126B2 true US12092126B2 (en) | 2024-09-17 |
Family
ID=64560416
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| US17/288,289 Active 2041-09-02 US12092126B2 (en) | 2018-10-25 | 2019-10-23 | Oil feed assembly for a vacuum pump having a venting conduit |
Country Status (6)
| Country | Link |
|---|---|
| US (1) | US12092126B2 (en) |
| EP (1) | EP3870857B1 (en) |
| JP (1) | JP7595832B2 (en) |
| CN (1) | CN112912629B (en) |
| GB (1) | GB2578431B (en) |
| WO (1) | WO2020084302A1 (en) |
Families Citing this family (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| GB2584076B (en) * | 2019-05-03 | 2022-04-20 | Edwards Ltd | Lubricant supply system and vacuum pump |
Citations (21)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US3168977A (en) | 1962-01-23 | 1965-02-09 | Snecma | Turbomolecular vacuum pump |
| US3168978A (en) * | 1961-08-04 | 1965-02-09 | Snecma | Turbomolecular vacuum pump |
| US3628894A (en) * | 1970-09-15 | 1971-12-21 | Bendix Corp | High-vacuum mechanical pump |
| US3812654A (en) * | 1972-03-02 | 1974-05-28 | K Brown | Method and apparatus for removing products of combustion from a stream of gaseous fluid |
| US4116592A (en) * | 1976-08-20 | 1978-09-26 | Viktor Yakovlevich Cherny | Turbomolecular high-vacuum pulp |
| US4181379A (en) | 1977-10-04 | 1980-01-01 | Airscrew Howden Limited | Bearing structure lubricant feed system |
| US4674952A (en) * | 1983-10-07 | 1987-06-23 | Sargent-Welch Scientific Company | Turbo molecular pump with improved bearing assembly |
| JPS62114197U (en) | 1985-12-20 | 1987-07-20 | ||
| JPS62168992A (en) | 1985-11-27 | 1987-07-25 | Shimadzu Corp | Method for exhausting corrosive gas for turbo molecular pump |
| US4806075A (en) * | 1983-10-07 | 1989-02-21 | Sargent-Welch Scientific Co. | Turbomolecular pump with improved bearing assembly |
| US5190438A (en) * | 1990-04-06 | 1993-03-02 | Hitachi, Ltd. | Vacuum pump |
| JPH07233792A (en) | 1994-02-24 | 1995-09-05 | Nippondenso Co Ltd | Rolling piston type vacuum pump |
| US20040036049A1 (en) | 2002-08-26 | 2004-02-26 | Symonds Robert D. | Fluid drain assembly |
| US6863493B2 (en) * | 2001-06-13 | 2005-03-08 | The Boc Group Plc | Lubricating systems for regenerative vacuum pumps |
| US20060088238A1 (en) * | 2002-11-29 | 2006-04-27 | Leybold Vakuum Gmbh | Ball bearing and a vacuum pump that is equipped with a bearing of this type |
| US7959423B2 (en) * | 2007-11-13 | 2011-06-14 | Pfeiffer Vacuum Gmbh | Vacuum pump with a lubricant pump |
| WO2014174273A1 (en) | 2013-04-22 | 2014-10-30 | Edwards Limited | Vacuum pump |
| JP2015206340A (en) * | 2014-04-23 | 2015-11-19 | 本田技研工業株式会社 | bi-fuel engine |
| JP2017078351A (en) | 2015-10-20 | 2017-04-27 | 株式会社島津製作所 | Vacuum pump |
| GB2553766A (en) | 2016-09-07 | 2018-03-21 | Edwards Ltd | Turbomolecular pump lubricant supply systems |
| US20190032662A1 (en) * | 2017-07-28 | 2019-01-31 | Fieldpiece Instruments, Inc. | Vacuum pump with an oil management system |
Family Cites Families (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| DE2052120A1 (en) * | 1970-10-23 | 1972-04-27 | Pfeiffer Vakuumtechnik | Bearing arrangement for molecular pumps and turbo molecular pumps |
| DE2853742A1 (en) * | 1978-12-13 | 1980-10-02 | Leybold Heraeus Gmbh & Co Kg | Turbo-molecular vacuum pump with two=part rotor spindle - has solid lubricant ejected from spindle interior towards top and bottom bearings |
| CA1240302A (en) * | 1983-10-07 | 1988-08-09 | Gordon E. Osterstrom | Turbomolecular pump with improved bearing system |
| CN104235049A (en) * | 2014-09-15 | 2014-12-24 | 邢宇 | Elastic variable volume-type pressure-adjustable pressurizer for ensuring water not to enter submerged pump motor |
| GB2584076B (en) * | 2019-05-03 | 2022-04-20 | Edwards Ltd | Lubricant supply system and vacuum pump |
-
2018
- 2018-10-25 GB GB1817356.7A patent/GB2578431B/en active Active
-
2019
- 2019-10-23 WO PCT/GB2019/053015 patent/WO2020084302A1/en not_active Ceased
- 2019-10-23 CN CN201980070361.4A patent/CN112912629B/en active Active
- 2019-10-23 US US17/288,289 patent/US12092126B2/en active Active
- 2019-10-23 JP JP2021521762A patent/JP7595832B2/en active Active
- 2019-10-23 EP EP19797337.3A patent/EP3870857B1/en active Active
Patent Citations (23)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US3168978A (en) * | 1961-08-04 | 1965-02-09 | Snecma | Turbomolecular vacuum pump |
| US3168977A (en) | 1962-01-23 | 1965-02-09 | Snecma | Turbomolecular vacuum pump |
| US3628894A (en) * | 1970-09-15 | 1971-12-21 | Bendix Corp | High-vacuum mechanical pump |
| US3812654A (en) * | 1972-03-02 | 1974-05-28 | K Brown | Method and apparatus for removing products of combustion from a stream of gaseous fluid |
| US4116592A (en) * | 1976-08-20 | 1978-09-26 | Viktor Yakovlevich Cherny | Turbomolecular high-vacuum pulp |
| US4181379A (en) | 1977-10-04 | 1980-01-01 | Airscrew Howden Limited | Bearing structure lubricant feed system |
| US4674952A (en) * | 1983-10-07 | 1987-06-23 | Sargent-Welch Scientific Company | Turbo molecular pump with improved bearing assembly |
| US4806075A (en) * | 1983-10-07 | 1989-02-21 | Sargent-Welch Scientific Co. | Turbomolecular pump with improved bearing assembly |
| JPS62168992A (en) | 1985-11-27 | 1987-07-25 | Shimadzu Corp | Method for exhausting corrosive gas for turbo molecular pump |
| JPS62114197U (en) | 1985-12-20 | 1987-07-20 | ||
| US5190438A (en) * | 1990-04-06 | 1993-03-02 | Hitachi, Ltd. | Vacuum pump |
| JPH07233792A (en) | 1994-02-24 | 1995-09-05 | Nippondenso Co Ltd | Rolling piston type vacuum pump |
| US6863493B2 (en) * | 2001-06-13 | 2005-03-08 | The Boc Group Plc | Lubricating systems for regenerative vacuum pumps |
| DE60216187T2 (en) | 2001-06-13 | 2007-10-11 | The Boc Group Plc, Windlesham | Lubrication device for side channel vacuum pumps |
| US20040036049A1 (en) | 2002-08-26 | 2004-02-26 | Symonds Robert D. | Fluid drain assembly |
| US20060088238A1 (en) * | 2002-11-29 | 2006-04-27 | Leybold Vakuum Gmbh | Ball bearing and a vacuum pump that is equipped with a bearing of this type |
| US7959423B2 (en) * | 2007-11-13 | 2011-06-14 | Pfeiffer Vacuum Gmbh | Vacuum pump with a lubricant pump |
| WO2014174273A1 (en) | 2013-04-22 | 2014-10-30 | Edwards Limited | Vacuum pump |
| US20160097398A1 (en) * | 2013-04-22 | 2016-04-07 | Edwards Limited | Vacuum pump |
| JP2015206340A (en) * | 2014-04-23 | 2015-11-19 | 本田技研工業株式会社 | bi-fuel engine |
| JP2017078351A (en) | 2015-10-20 | 2017-04-27 | 株式会社島津製作所 | Vacuum pump |
| GB2553766A (en) | 2016-09-07 | 2018-03-21 | Edwards Ltd | Turbomolecular pump lubricant supply systems |
| US20190032662A1 (en) * | 2017-07-28 | 2019-01-31 | Fieldpiece Instruments, Inc. | Vacuum pump with an oil management system |
Non-Patent Citations (3)
| Title |
|---|
| British Search Report dated Apr. 5, 2019 and Examination Report dated Apr. 8, 2019 for corresponding British Application No. GB1817356.7, 5 pages. |
| Japanese Notification of Reason for Rejected dated Oct. 2, 2023 for corresponding Japanese application Serial No. JP2021521762, 5 pages. |
| PCT Notification of Transmittal of the International Search Report and the Written Opinion of the International Searching Authority, or the Declaration dated Jan. 17, 2020, PCT Search Report and Written Opinion dated Jan. 17, 2020 for corresponding PCT Application No. PCT/GB2019/053015. |
Also Published As
| Publication number | Publication date |
|---|---|
| US20210372421A1 (en) | 2021-12-02 |
| JP7595832B2 (en) | 2024-12-09 |
| GB2578431A (en) | 2020-05-13 |
| CN112912629B (en) | 2023-09-01 |
| EP3870857B1 (en) | 2025-05-07 |
| CN112912629A (en) | 2021-06-04 |
| EP3870857A1 (en) | 2021-09-01 |
| JP2022505497A (en) | 2022-01-14 |
| GB2578431B (en) | 2021-09-22 |
| WO2020084302A1 (en) | 2020-04-30 |
| GB201817356D0 (en) | 2018-12-12 |
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