US11726134B2 - Substrate inspection device and substrate inspection method - Google Patents
Substrate inspection device and substrate inspection method Download PDFInfo
- Publication number
- US11726134B2 US11726134B2 US16/959,145 US201816959145A US11726134B2 US 11726134 B2 US11726134 B2 US 11726134B2 US 201816959145 A US201816959145 A US 201816959145A US 11726134 B2 US11726134 B2 US 11726134B2
- Authority
- US
- United States
- Prior art keywords
- substrate
- substrates
- monitoring
- measurement part
- monitoring information
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
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Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L22/00—Testing or measuring during manufacture or treatment; Reliability measurements, i.e. testing of parts without further processing to modify the parts as such; Structural arrangements therefor
- H01L22/30—Structural arrangements specially adapted for testing or measuring during manufacture or treatment, or specially adapted for reliability measurements
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/67005—Apparatus not specifically provided for elsewhere
- H01L21/67242—Apparatus for monitoring, sorting or marking
- H01L21/67253—Process monitoring, e.g. flow or thickness monitoring
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
- G01R31/00—Arrangements for testing electric properties; Arrangements for locating electric faults; Arrangements for electrical testing characterised by what is being tested not provided for elsewhere
- G01R31/26—Testing of individual semiconductor devices
- G01R31/2601—Apparatus or methods therefor
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
- G01R1/00—Details of instruments or arrangements of the types included in groups G01R5/00 - G01R13/00 and G01R31/00
- G01R1/02—General constructional details
- G01R1/04—Housings; Supporting members; Arrangements of terminals
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/67005—Apparatus not specifically provided for elsewhere
- H01L21/67242—Apparatus for monitoring, sorting or marking
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/67005—Apparatus not specifically provided for elsewhere
- H01L21/67242—Apparatus for monitoring, sorting or marking
- H01L21/67288—Monitoring of warpage, curvature, damage, defects or the like
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/673—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere using specially adapted carriers or holders; Fixing the workpieces on such carriers or holders
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/683—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping
- H01L21/687—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping using mechanical means, e.g. chucks, clamps or pinches
- H01L21/68714—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping using mechanical means, e.g. chucks, clamps or pinches the wafers being placed on a susceptor, stage or support
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L22/00—Testing or measuring during manufacture or treatment; Reliability measurements, i.e. testing of parts without further processing to modify the parts as such; Structural arrangements therefor
- H01L22/20—Sequence of activities consisting of a plurality of measurements, corrections, marking or sorting steps
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
- G01R31/00—Arrangements for testing electric properties; Arrangements for locating electric faults; Arrangements for electrical testing characterised by what is being tested not provided for elsewhere
- G01R31/26—Testing of individual semiconductor devices
- G01R31/265—Contactless testing
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L22/00—Testing or measuring during manufacture or treatment; Reliability measurements, i.e. testing of parts without further processing to modify the parts as such; Structural arrangements therefor
- H01L22/10—Measuring as part of the manufacturing process
- H01L22/12—Measuring as part of the manufacturing process for structural parameters, e.g. thickness, line width, refractive index, temperature, warp, bond strength, defects, optical inspection, electrical measurement of structural dimensions, metallurgic measurement of diffusions
Definitions
- the present disclosure herein relates to a device and a method for inspecting substrates, and more particularly, to a device and a method for monitoring substrates to determine processed states of the substrates and inspecting presence of abnormality in the processed substrates.
- the control part may perform control so that the measurement part has a linear movement path.
- a method for inspecting substrates includes: selecting a first substrate and a second substrate from among a plurality of substrates; monitoring some regions of the first substrate; monitoring some regions of the second substrate; and determining presence of abnormality from monitoring information about the first substrate and the second substrate.
- FIG. 7 is a view illustrating a state in which a device for inspecting a substrate is installed in accordance with an exemplary embodiment is installed.
- the substrate mounting part 100 mounts the substrate S to be monitored.
- the device 10 for inspecting substrates in accordance with an exemplary embodiment monitors the substrate S for which a predetermined process such as a lamination process has been performed and determines the processed state to inspect the presence of abnormality.
- the substrate S may include a dummy substrate which is not a substrate manufactured for actual use but for monitoring only, and a thin film without a pattern formed thereon may be deposited on the dummy substrate. Of course, such a dummy substrate may be reused in a later monitoring process after the monitoring is completed.
- the control part 300 controls the movement path of the measurement part 200 so that at least some regions are monitored at positions different from each other with respect to the plurality of such substrates.
- the control part 300 may control the movement path of the measurement part 200 so that at least some regions may be monitored at positions different from each other with respect to notches each formed on edges of the plurality of substrates.
- the notches N are generally used to distinguish upper and lower surfaces of a substrate, to determine whether the substrate has rotated, and determine the angle or direction of the rotation.
- Positions different from each other in a plurality of substrates means the positions different from each other when each of the notches N are located at the same position and are superposed with respect to the plurality of substrates as illustrated in FIG. 6 .
- a device 10 for inspecting substrates monitors each of the plurality of substrates selected from substrates on which the same predetermined process has been performed, so that the monitoring information obtained for a first substrate may be directly applied to a second substrate among the plurality of substrates, and conversely, the monitoring information obtained for the second substrate among the plurality of substrates may also be directly applied to the first substrate among the plurality of substrates.
- the substrates for which the same predetermined process has been performed may be recognized to have the same processed state as the virtual substrate S 0 illustrated in FIG. 6 , and the analysis part 400 determines the presence of abnormality of the processed state for the virtual substrate S 0 illustrated in FIG. 6 .
Abstract
Description
- (Patent document 1) KR10-2017-0068419 A
Claims (18)
Applications Claiming Priority (5)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
KR20170181351 | 2017-12-27 | ||
KR10-2017-0181351 | 2017-12-27 | ||
KR1020180169241A KR20190079560A (en) | 2017-12-27 | 2018-12-26 | Apparatus and method for inspecting substrate |
KR10-2018-0169241 | 2018-12-26 | ||
PCT/KR2018/016696 WO2019132528A1 (en) | 2017-12-27 | 2018-12-27 | Substrate inspection device and substrate inspection method |
Related Parent Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
PCT/KR2018/016696 A-371-Of-International WO2019132528A1 (en) | 2017-12-27 | 2018-12-27 | Substrate inspection device and substrate inspection method |
Related Child Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
US18/216,470 Continuation US20230341454A1 (en) | 2017-12-27 | 2023-06-29 | Substrate inspection device and substrate inspection method |
Publications (2)
Publication Number | Publication Date |
---|---|
US20200341049A1 US20200341049A1 (en) | 2020-10-29 |
US11726134B2 true US11726134B2 (en) | 2023-08-15 |
Family
ID=67225171
Family Applications (2)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
US16/959,145 Active 2039-04-26 US11726134B2 (en) | 2017-12-27 | 2018-12-27 | Substrate inspection device and substrate inspection method |
US18/216,470 Pending US20230341454A1 (en) | 2017-12-27 | 2023-06-29 | Substrate inspection device and substrate inspection method |
Family Applications After (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
US18/216,470 Pending US20230341454A1 (en) | 2017-12-27 | 2023-06-29 | Substrate inspection device and substrate inspection method |
Country Status (5)
Country | Link |
---|---|
US (2) | US11726134B2 (en) |
JP (1) | JP7295861B2 (en) |
KR (1) | KR20190079560A (en) |
CN (1) | CN111566788A (en) |
TW (2) | TWI820074B (en) |
Citations (28)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH04733A (en) | 1990-04-17 | 1992-01-06 | Fujitsu Ltd | Inspecting device for wafer |
JP2001196302A (en) | 1999-11-02 | 2001-07-19 | Tokyo Electron Ltd | Heating treatment method and heating treater |
JP2003254741A (en) | 2002-02-28 | 2003-09-10 | Shin Etsu Handotai Co Ltd | Measurement method, measurement device, manufacturing method for semiconductor epitaxial wafer, and computer program |
US20040208353A1 (en) * | 2003-02-27 | 2004-10-21 | Omron Corporation | Substrate inspecting method and substrate inspecting apparatus using the method |
US6819416B2 (en) | 2000-07-27 | 2004-11-16 | Hitachi, Ltd. | Defect inspection method and apparatus therefor |
US6927847B2 (en) * | 2001-09-13 | 2005-08-09 | Hitachi High-Technologies Corporation | Method and apparatus for inspecting pattern defects |
US20050200841A1 (en) | 1999-01-08 | 2005-09-15 | Applied Materials, Inc. | Detection of defects in patterned substrates |
US20070177136A1 (en) * | 2006-01-23 | 2007-08-02 | Hiroyuki Nakano | Apparatus and method for inspecting defects |
JP2008103710A (en) | 2006-09-29 | 2008-05-01 | Tokyo Electron Ltd | Method of real time dynamic cd control |
US20080204736A1 (en) * | 2007-02-28 | 2008-08-28 | Hitachi High-Technologies Corporation | Defect Inspection Method and Defect Inspection Apparatus |
JP4247076B2 (en) * | 2003-08-25 | 2009-04-02 | 日本電産リード株式会社 | Substrate inspection system and substrate inspection method |
JP2009188175A (en) | 2008-02-06 | 2009-08-20 | Tokyo Seimitsu Co Ltd | External appearance inspecting apparatus and method |
US20100182589A1 (en) * | 2009-01-16 | 2010-07-22 | Hitachi, Ltd. | Spectral detection method and device, and defect inspection method and apparatus using the same |
US20110052040A1 (en) * | 2009-09-02 | 2011-03-03 | Hermes Microvision, Inc. | Substrate inspection method |
US20110310244A1 (en) * | 2009-02-27 | 2011-12-22 | Saint-Gobain Glass France | System and method for detecting a defect of a substrate |
TW201213794A (en) | 2010-04-28 | 2012-04-01 | Rigaku C0Rporation | Inspection method and inspection apparatus of color filter substrate |
KR20120133589A (en) * | 2011-05-31 | 2012-12-11 | (주)루멘시스 | Inspection apparatus for patterned sapphire substrate |
TWI420096B (en) | 2008-12-15 | 2013-12-21 | Hermes Microvision Inc | An e-beam defect review system |
US20150276623A1 (en) * | 2014-03-25 | 2015-10-01 | Hitachi High-Technologies Corporation | Defect Inspection Method and Defect Inspection Device |
US20150286001A1 (en) * | 2014-04-08 | 2015-10-08 | Hitachi High-Technologies Corporation | Defect Review Apparatus, Defect Review Method |
KR20160028954A (en) | 2014-09-04 | 2016-03-14 | 가부시키가이샤 뉴플레어 테크놀로지 | Inspection method |
JP2016076611A (en) | 2014-10-07 | 2016-05-12 | 東京エレクトロン株式会社 | Substrate inspection device and control method therefor |
US20160261786A1 (en) | 2015-03-03 | 2016-09-08 | Samsung Electronics Co., Ltd. | Wafer Inspection Apparatus Using Three-Dimensional Image |
KR20160116534A (en) | 2015-03-30 | 2016-10-10 | 삼성전자주식회사 | Method for inspecting wafer using electron beam |
KR20170068419A (en) | 2017-06-01 | 2017-06-19 | 세메스 주식회사 | Inspecting method and Apparatus for treating a substrate |
US10067067B2 (en) * | 2015-09-09 | 2018-09-04 | Samsung Electronics Co., Ltd. | Substrate inspection apparatus |
US20190131156A1 (en) * | 2017-10-31 | 2019-05-02 | Samsung Electronics Co., Ltd. | Substrate transfer apparatus and substrate inspection apparatus including the same |
US20190162756A1 (en) * | 2016-05-11 | 2019-05-30 | Wit Co., Ltd. | Multifunctional substrate inspection apparatus and multifunctional substrate inspection method |
Family Cites Families (2)
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KR101809654B1 (en) * | 2014-06-03 | 2017-12-18 | 에이피시스템 주식회사 | Substrate processing apparatus and operating method thereof |
KR101796647B1 (en) * | 2016-05-03 | 2017-11-10 | (주)에스티아이 | Substrate processing apparatus and substrate processing method |
-
2018
- 2018-12-26 KR KR1020180169241A patent/KR20190079560A/en not_active Application Discontinuation
- 2018-12-27 TW TW107147431A patent/TWI820074B/en active
- 2018-12-27 TW TW112137356A patent/TW202403442A/en unknown
- 2018-12-27 CN CN201880082146.1A patent/CN111566788A/en active Pending
- 2018-12-27 JP JP2020534576A patent/JP7295861B2/en active Active
- 2018-12-27 US US16/959,145 patent/US11726134B2/en active Active
-
2023
- 2023-06-29 US US18/216,470 patent/US20230341454A1/en active Pending
Patent Citations (29)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH04733A (en) | 1990-04-17 | 1992-01-06 | Fujitsu Ltd | Inspecting device for wafer |
US20050200841A1 (en) | 1999-01-08 | 2005-09-15 | Applied Materials, Inc. | Detection of defects in patterned substrates |
JP2001196302A (en) | 1999-11-02 | 2001-07-19 | Tokyo Electron Ltd | Heating treatment method and heating treater |
US6819416B2 (en) | 2000-07-27 | 2004-11-16 | Hitachi, Ltd. | Defect inspection method and apparatus therefor |
US6927847B2 (en) * | 2001-09-13 | 2005-08-09 | Hitachi High-Technologies Corporation | Method and apparatus for inspecting pattern defects |
JP2003254741A (en) | 2002-02-28 | 2003-09-10 | Shin Etsu Handotai Co Ltd | Measurement method, measurement device, manufacturing method for semiconductor epitaxial wafer, and computer program |
US20040208353A1 (en) * | 2003-02-27 | 2004-10-21 | Omron Corporation | Substrate inspecting method and substrate inspecting apparatus using the method |
JP4247076B2 (en) * | 2003-08-25 | 2009-04-02 | 日本電産リード株式会社 | Substrate inspection system and substrate inspection method |
US20070177136A1 (en) * | 2006-01-23 | 2007-08-02 | Hiroyuki Nakano | Apparatus and method for inspecting defects |
US20100265496A1 (en) * | 2006-01-23 | 2010-10-21 | Hiroyuki Nakano | Apparatus and method for inspecting defects |
JP2008103710A (en) | 2006-09-29 | 2008-05-01 | Tokyo Electron Ltd | Method of real time dynamic cd control |
US20080204736A1 (en) * | 2007-02-28 | 2008-08-28 | Hitachi High-Technologies Corporation | Defect Inspection Method and Defect Inspection Apparatus |
JP2009188175A (en) | 2008-02-06 | 2009-08-20 | Tokyo Seimitsu Co Ltd | External appearance inspecting apparatus and method |
TWI420096B (en) | 2008-12-15 | 2013-12-21 | Hermes Microvision Inc | An e-beam defect review system |
US20100182589A1 (en) * | 2009-01-16 | 2010-07-22 | Hitachi, Ltd. | Spectral detection method and device, and defect inspection method and apparatus using the same |
US20110310244A1 (en) * | 2009-02-27 | 2011-12-22 | Saint-Gobain Glass France | System and method for detecting a defect of a substrate |
US20110052040A1 (en) * | 2009-09-02 | 2011-03-03 | Hermes Microvision, Inc. | Substrate inspection method |
TW201213794A (en) | 2010-04-28 | 2012-04-01 | Rigaku C0Rporation | Inspection method and inspection apparatus of color filter substrate |
KR20120133589A (en) * | 2011-05-31 | 2012-12-11 | (주)루멘시스 | Inspection apparatus for patterned sapphire substrate |
US20150276623A1 (en) * | 2014-03-25 | 2015-10-01 | Hitachi High-Technologies Corporation | Defect Inspection Method and Defect Inspection Device |
US20150286001A1 (en) * | 2014-04-08 | 2015-10-08 | Hitachi High-Technologies Corporation | Defect Review Apparatus, Defect Review Method |
KR20160028954A (en) | 2014-09-04 | 2016-03-14 | 가부시키가이샤 뉴플레어 테크놀로지 | Inspection method |
JP2016076611A (en) | 2014-10-07 | 2016-05-12 | 東京エレクトロン株式会社 | Substrate inspection device and control method therefor |
US20160261786A1 (en) | 2015-03-03 | 2016-09-08 | Samsung Electronics Co., Ltd. | Wafer Inspection Apparatus Using Three-Dimensional Image |
KR20160116534A (en) | 2015-03-30 | 2016-10-10 | 삼성전자주식회사 | Method for inspecting wafer using electron beam |
US10067067B2 (en) * | 2015-09-09 | 2018-09-04 | Samsung Electronics Co., Ltd. | Substrate inspection apparatus |
US20190162756A1 (en) * | 2016-05-11 | 2019-05-30 | Wit Co., Ltd. | Multifunctional substrate inspection apparatus and multifunctional substrate inspection method |
KR20170068419A (en) | 2017-06-01 | 2017-06-19 | 세메스 주식회사 | Inspecting method and Apparatus for treating a substrate |
US20190131156A1 (en) * | 2017-10-31 | 2019-05-02 | Samsung Electronics Co., Ltd. | Substrate transfer apparatus and substrate inspection apparatus including the same |
Non-Patent Citations (2)
Title |
---|
International Search Report for PCT/KR2018/016696 dated Apr. 3, 2019. |
Written Opinion for PCT/KR2018/016696 dated Jul. 9, 2019. |
Also Published As
Publication number | Publication date |
---|---|
CN111566788A (en) | 2020-08-21 |
KR20190079560A (en) | 2019-07-05 |
JP7295861B2 (en) | 2023-06-21 |
JP2021509535A (en) | 2021-03-25 |
TWI820074B (en) | 2023-11-01 |
TW201928515A (en) | 2019-07-16 |
US20200341049A1 (en) | 2020-10-29 |
TW202403442A (en) | 2024-01-16 |
US20230341454A1 (en) | 2023-10-26 |
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