US11249584B2 - Touch substrate, manufacturing method thereof and touch screen - Google Patents
Touch substrate, manufacturing method thereof and touch screen Download PDFInfo
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- US11249584B2 US11249584B2 US16/071,135 US201716071135A US11249584B2 US 11249584 B2 US11249584 B2 US 11249584B2 US 201716071135 A US201716071135 A US 201716071135A US 11249584 B2 US11249584 B2 US 11249584B2
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- G—PHYSICS
- G06—COMPUTING OR CALCULATING; COUNTING
- G06F—ELECTRIC DIGITAL DATA PROCESSING
- G06F3/00—Input arrangements for transferring data to be processed into a form capable of being handled by the computer; Output arrangements for transferring data from processing unit to output unit, e.g. interface arrangements
- G06F3/01—Input arrangements or combined input and output arrangements for interaction between user and computer
- G06F3/03—Arrangements for converting the position or the displacement of a member into a coded form
- G06F3/041—Digitisers, e.g. for touch screens or touch pads, characterised by the transducing means
- G06F3/0416—Control or interface arrangements specially adapted for digitisers
- G06F3/04164—Connections between sensors and controllers, e.g. routing lines between electrodes and connection pads
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- G—PHYSICS
- G06—COMPUTING OR CALCULATING; COUNTING
- G06F—ELECTRIC DIGITAL DATA PROCESSING
- G06F3/00—Input arrangements for transferring data to be processed into a form capable of being handled by the computer; Output arrangements for transferring data from processing unit to output unit, e.g. interface arrangements
- G06F3/01—Input arrangements or combined input and output arrangements for interaction between user and computer
- G06F3/03—Arrangements for converting the position or the displacement of a member into a coded form
- G06F3/041—Digitisers, e.g. for touch screens or touch pads, characterised by the transducing means
- G06F3/0412—Digitisers structurally integrated in a display
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- G—PHYSICS
- G06—COMPUTING OR CALCULATING; COUNTING
- G06F—ELECTRIC DIGITAL DATA PROCESSING
- G06F3/00—Input arrangements for transferring data to be processed into a form capable of being handled by the computer; Output arrangements for transferring data from processing unit to output unit, e.g. interface arrangements
- G06F3/01—Input arrangements or combined input and output arrangements for interaction between user and computer
- G06F3/03—Arrangements for converting the position or the displacement of a member into a coded form
- G06F3/041—Digitisers, e.g. for touch screens or touch pads, characterised by the transducing means
- G06F3/0416—Control or interface arrangements specially adapted for digitisers
-
- G—PHYSICS
- G06—COMPUTING OR CALCULATING; COUNTING
- G06F—ELECTRIC DIGITAL DATA PROCESSING
- G06F3/00—Input arrangements for transferring data to be processed into a form capable of being handled by the computer; Output arrangements for transferring data from processing unit to output unit, e.g. interface arrangements
- G06F3/01—Input arrangements or combined input and output arrangements for interaction between user and computer
- G06F3/03—Arrangements for converting the position or the displacement of a member into a coded form
- G06F3/041—Digitisers, e.g. for touch screens or touch pads, characterised by the transducing means
- G06F3/0416—Control or interface arrangements specially adapted for digitisers
- G06F3/04166—Details of scanning methods, e.g. sampling time, grouping of sub areas or time sharing with display driving
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- G—PHYSICS
- G06—COMPUTING OR CALCULATING; COUNTING
- G06F—ELECTRIC DIGITAL DATA PROCESSING
- G06F3/00—Input arrangements for transferring data to be processed into a form capable of being handled by the computer; Output arrangements for transferring data from processing unit to output unit, e.g. interface arrangements
- G06F3/01—Input arrangements or combined input and output arrangements for interaction between user and computer
- G06F3/03—Arrangements for converting the position or the displacement of a member into a coded form
- G06F3/041—Digitisers, e.g. for touch screens or touch pads, characterised by the transducing means
- G06F3/044—Digitisers, e.g. for touch screens or touch pads, characterised by the transducing means by capacitive means
- G06F3/0445—Digitisers, e.g. for touch screens or touch pads, characterised by the transducing means by capacitive means using two or more layers of sensing electrodes, e.g. using two layers of electrodes separated by a dielectric layer
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- G—PHYSICS
- G06—COMPUTING OR CALCULATING; COUNTING
- G06F—ELECTRIC DIGITAL DATA PROCESSING
- G06F3/00—Input arrangements for transferring data to be processed into a form capable of being handled by the computer; Output arrangements for transferring data from processing unit to output unit, e.g. interface arrangements
- G06F3/01—Input arrangements or combined input and output arrangements for interaction between user and computer
- G06F3/03—Arrangements for converting the position or the displacement of a member into a coded form
- G06F3/041—Digitisers, e.g. for touch screens or touch pads, characterised by the transducing means
- G06F3/044—Digitisers, e.g. for touch screens or touch pads, characterised by the transducing means by capacitive means
- G06F3/0446—Digitisers, e.g. for touch screens or touch pads, characterised by the transducing means by capacitive means using a grid-like structure of electrodes in at least two directions, e.g. using row and column electrodes
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- G—PHYSICS
- G06—COMPUTING OR CALCULATING; COUNTING
- G06F—ELECTRIC DIGITAL DATA PROCESSING
- G06F2203/00—Indexing scheme relating to G06F3/00 - G06F3/048
- G06F2203/041—Indexing scheme relating to G06F3/041 - G06F3/045
- G06F2203/04103—Manufacturing, i.e. details related to manufacturing processes specially suited for touch sensitive devices
Definitions
- the present disclosure generally relates to the field of display technologies. More specifically, the present disclosure relates to a touch substrate, a touch screen comprising the touch substrate, and a method for manufacturing the touch substrate.
- touch screens greatly enriches the functions of display devices and brings many novel applications.
- Common capacitive touch screens have advantages such as accurate, sensitive positioning, good hand feeling, long service life, and the like, and thus have been widely used in the touch display field.
- touch screens are generally classified into One Glass Solution (OGS) touch screens, On-Cell touch screens and an In-Cell touch screens.
- OGS touch screen the touch substrate is integrated on a cover plate, and the cover plate is attached to a display panel.
- OGS touch screen the touch substrate is disposed on an outer surface of a liquid crystal cell, for example, on a surface of a color filter substrate away from the touch substrate.
- the touch substrate is disposed inside a liquid crystal cell, for example, between a color filter substrate and a liquid crystal layer.
- Embodiments of the present disclosure aim to provide an improved touch substrate, a manufacturing method thereof, and a touch screen.
- a touch substrate comprises a display area having both a display function and a touch function and a non-display area on the periphery of the display area.
- a touch electrode is disposed in the display area of the touch substrate, and a touch signal line electrically connected to the touch electrode for transmitting a touch signal sensed by the touch electrode to an analysis chip is disposed in the non-display area.
- a gate signal line and a source-drain signal line providing display signals extend in both the display area and the non-display area of the touch substrate. In general, in the display area, extending directions of the gate signal line and the source-drain signal line intersect with each other so as to implement progressive scanning of a pixel array in the display area.
- the extending directions of the gate signal line and the source-drain signal line are parallel, and the orthographic projections thereof on a substrate at least partially overlap.
- Reasons are as follows.
- a sealant in the non-display area needs to be irradiated with UV light, and the gate signal line and the source-drain signal line are usually not light-transmissive. Therefore, in order to increase the transmittance of the UV light as much as possible so as to ensure the attaching effect, the gate signal line and the source-drain signal line are arranged so that their orthographic projections on the substrate at least partially overlap.
- the inventors have realized that, since the orthographic projection of the touch signal line on the substrate in the non-display area usually intersects with the orthographic projections of the gate signal line and the source-drain signal line on the substrate, when the orthographic projections of the gate signal line and the source-drain signal line on the substrate at least partially overlap, the touch signal line will have a large mismatch gap when transitioning from an non-intersection region to an intersection region, and vice versa. Such a large mismatch gap will cause crossover open in the touch signal line, thereby affecting the normal operation of the touch substrate.
- a touch substrate comprising a display area and a non-display area on the periphery of the display area.
- the non-display area of the touch substrate includes a substrate, a gate signal line disposed on the substrate, a source-drain signal line disposed above the gate signal line and electrically insulated therefrom, and a touch signal line disposed above the source-drain signal line and electrically insulated therefrom.
- the gate signal line has a first side and a second side opposite to each other in a direction perpendicular to its own extending direction.
- an orthographic projection of the touch signal line on the substrate intersects with orthographic projections of the gate signal line and the source-drain signal line on the substrate, respectively.
- the orthographic projection of the source-drain signal line on the substrate at most covers an orthographic projection of one of the first side and the second side of the gate signal line on the substrate.
- first side and second side of the gate signal line may refer to sides perpendicular to a plane where the gate signal line resides, respectively, but may also refer more generally to sides forming acute angles with the plane where the gate signal line resides, respectively.
- the orthographic projection of the source-drain signal line on the substrate at most covers an orthographic projection of one of the first side and the second side of the gate signal line on the substrate means that the orthographic projection of the source-drain signal line on the substrate only covers the orthographic projection of the first side of the gate signal line on the substrate, or only covers the orthographic projection of the second side of the gate signal line on the substrate, or does not cover the orthographic projection of either of the first side and the second side of the gate signal line on the substrate.
- the gate signal line and the source-drain signal line are usually made of an opaque material, in order to increase the transmittance of the UV light as much as possible so as to ensure the attaching effect, the gate signal line and the source-drain signal line are arranged so that their orthographic projections on the substrate at least partially overlap.
- an extending direction of the gate signal line is parallel to that of the source-drain signal line.
- the orthographic projections of the gate signal line and the source-drain signal line on the substrate overlap with each other in a region of the non-display area other than the intersection region.
- the gate signal line in the intersection region, is offset with respect to the source-drain signal line in a direction perpendicular to the extending direction of the gate signal line.
- the gate signal line in the region of the non-display area other than the intersection region, is straight along the extending direction of the gate signal line, and in the intersection region, the gate signal line has a lateral protrusion.
- the source-drain signal line is straight along the extending direction of the source-drain signal line, and in the intersection region, the source-drain signal line has a lateral protrusion.
- the gate signal line and the source-drain signal line are straight along their own extending directions, and in the intersection region, the gate signal line and the source-drain signal line have lateral protrusions respectively, which protrude in opposite directions.
- lateral protrusion refers to a protruding portion of a corresponding signal line in a direction perpendicular to its extending direction.
- the offset is at least 20% of the width of the gate signal line.
- the gate signal line and the source-drain signal line have a same width.
- the non-display area further includes: a gate insulating layer disposed between the gate signal line and the source-drain signal line, wherein the gate signal line and the source-drain signal line are electrically insulated from each other by the gate insulating layer; a first passivation layer disposed between the source-drain signal line and the touch signal line, wherein the source-drain signal line and the touch signal line are electrically insulated from each other by the first passivation layer; and a second passivation layer disposed on the touch signal line.
- the display area also includes the substrate. And the display area further includes a gate metal layer disposed on the substrate; a gate insulating layer disposed on the gate metal layer; an active layer and a pixel electrode layer disposed on the gate insulating layer; a source-drain metal layer disposed on the active layer; a first passivation layer disposed on the source-drain metal layer; a second passivation layer disposed on the first passivation layer; and a touch electrode disposed on the second passivation layer.
- a gate metal layer disposed on the substrate
- a gate insulating layer disposed on the gate metal layer
- an active layer and a pixel electrode layer disposed on the gate insulating layer
- a source-drain metal layer disposed on the active layer
- a first passivation layer disposed on the source-drain metal layer
- a second passivation layer disposed on the first passivation layer
- a touch electrode disposed on the second passivation layer.
- the gate metal layer and the gate signal line are disposed in a same layer, the source-drain metal layer and the source-drain signal line are disposed in a same layer, and the touch electrode is electrically connected to the touch signal line for transmitting a touch signal sensed by the touch electrode to an analysis chip.
- the touch electrode includes a transparent conductive material
- the first passivation layer and the second passivation layer include a transparent insulating material.
- the material of the touch electrode may be, for example, a transparent metal, a transparent metal alloy, a transparent metal oxide, carbon nanotubes, and graphene.
- the materials of the first passivation layer and the second passivation layer may be, for example, an inorganic material such as silicon oxide (SiO 2 ), silicon nitride (SiN x ), silicon oxynitride (SiO x N y ), and the like, or an organic material such as resin.
- a touch screen comprising any of the touch substrates described above.
- a method for manufacturing a touch substrate comprising steps of forming a display area and a non-display area on the periphery of the display area.
- Forming a non-display area comprises steps of: forming a gate signal line on a substrate, the gate signal line having a first side and a second side opposite to each other in a direction perpendicular to an extending direction of the gate signal line; forming, above the gate signal line, a source-drain signal line electrically insulated from the gate signal line; forming, above the source-drain signal line, a touch signal line electrically insulated from the source-drain signal line.
- An orthographic projection of the touch signal line on the substrate intersects with orthographic projections of the gate signal line and the source-drain signal line on the substrate, respectively.
- the orthographic projection of the source-drain signal line on the substrate at most covers an orthographic projection of one of the first side and the second side of the gate signal line on the substrate.
- the step of forming a gate signal line comprises steps of: depositing a gate metal layer on the substrate; coating a photoresist on the gate metal layer, and forming a photoresist pattern by exposure and development; and forming a pattern of the gate signal line on the substrate by wet etching using the photoresist pattern as a mask.
- the gate signal line, the source-drain signal line, and the touch signal line are made of aluminum or molybdenum.
- FIG. 1 schematically illustrates a sectional view of a non-display area of a conventional touch substrate.
- FIG. 2 is a scanning electron microscope image illustrating crossover open in a touch signal line.
- FIG. 3 a schematically illustrates a sectional view of a non-display area of a touch substrate according to embodiments of the present disclosure.
- FIG. 3 b schematically illustrates a sectional view of a non-display area of a touch substrate according to embodiments of the present disclosure.
- FIG. 4 a is a top view that schematically illustrates an arrangement of a gate signal line and a source-drain signal line in a non-display area according to embodiments of the present disclosure.
- FIG. 4 b is a top view that schematically illustrates an arrangement of a gate signal line and a source-drain signal line in a non-display area according to embodiments of the present disclosure.
- FIG. 4 c is a top view that schematically illustrates an arrangement of a gate signal line and a source-drain signal line in a non-display area according to embodiments of the present disclosure.
- FIG. 5 schematically illustrates a sectional view of a touch substrate according to embodiments of the present disclosure, wherein a display area and a non-display area of the touch substrate are shown.
- FIG. 6 is a flowchart of a method for manufacturing a touch substrate according to embodiments of the present disclosure.
- FIG. 1 schematically illustrates a sectional view of a non-display area of a conventional touch substrate.
- the non-display area includes a substrate 100 , a gate signal line 102 disposed on the substrate 100 , a gate insulating layer 104 disposed on the gate signal line 102 , a source-drain signal line 106 disposed on the gate insulating layer 104 , a first passivation layer 108 disposed on the source-drain signal line 106 , and a touch signal line 110 disposed on the first passivation layer 108 .
- FIG. 1 schematically illustrates a sectional view of a non-display area of a conventional touch substrate.
- the non-display area includes a substrate 100 , a gate signal line 102 disposed on the substrate 100 , a gate insulating layer 104 disposed on the gate signal line 102 , a source-drain signal line 106 disposed on the gate insulating layer 104 , a first passivation layer 108
- orthographic projections of the gate signal line 102 and the source-drain signal line 106 on the substrate 100 at least partially overlap in order to ensure the attaching effect between the touch substrate and an upper substrate.
- Such a large mismatch gap will lead to crossover open in the touch signal line 110 , which increases the difficulty and risk of a film formation process, increases the failure of wiring due to climbing, and further affects the normal operation of the touch substrate.
- FIG. 2 which is a scanning electron microscope image illustrating crossover open in a touch signal line
- the horizontal band is the touch signal line 110
- the vertical band is the source-drain signal line 106 .
- there is significant crossover open in the touch signal line 110 there is significant crossover open in the touch signal line 110 .
- FIGS. 3 a -3 b schematically illustrate sectional views of a non-display area of a touch substrate according to embodiments of the present disclosure.
- the non-display area of the touch substrate includes a substrate 300 , a gate signal line 302 disposed on the substrate 300 , a source-drain signal line 306 disposed above the gate signal line 302 and electrically insulated therefrom, and a touch signal line 310 disposed above the source-drain signal line 306 and electrically insulated from therefrom.
- the non-display area of the touch substrate further includes: a gate insulating layer 304 disposed between the gate signal line 302 and the source-drain signal line 306 , wherein the gate signal line 302 and the source-drain signal line 306 are electrically insulated from each other by the gate insulating layer 304 ; a first passivation layer 308 disposed between the source-drain signal line 306 and the touch signal line 310 , wherein the source-drain signal line 306 and the touch signal line 310 are electrically insulated from each other by the first passivation layer 308 ; and a second passivation layer (not shown in FIGS. 3 a -3 b ) disposed on the touch signal line 310 .
- the gate signal line 302 has a first side S 1 and a second side S 2 opposite to each other in a direction perpendicular to its own extending direction (i.e. horizontal direction in the orientation of FIGS. 3 a -3 b ).
- an orthographic projection of the touch signal line 310 on the substrate 300 intersects with orthographic projections of the gate signal line 302 and the source-drain signal line 306 on the substrate 300 , respectively.
- the orthographic projection of the source-drain signal line 306 on the substrate 300 at most covers an orthographic projection of one of the first side S 1 and the second side S 2 of the gate signal line 302 on the substrate 300 .
- the orthographic projection of the source-drain signal line 306 on the substrate 300 covers only the orthographic projection of the second side S 2 of the gate signal line 302 on the substrate 300 .
- the orthographic projection of the source-drain signal line 306 on the substrate 300 may also cover only the orthographic projection of the first side S 1 of the gate signal line 302 on the substrate 300 .
- the orthographic projection of the source-drain signal line 306 on the substrate 300 does not cover the orthographic projection of either of the first side S 1 and the second side S 2 of the gate signal line 302 on the substrate 300 , as shown in FIG. 3 b.
- the mismatch gap of the touch signal line 310 between the intersection region and the non-intersection region can be decreased, so as to avoid or at least reduce the crossover open in the touch signal line 310 and improve the reliability of the touch substrate, while still realizing good attachment between the touch substrate and an upper substrate.
- decreasing the mismatch gap helps to reduce the difficulty and risk of a film formation process, and reduce the failure of wiring due to climbing, such as disconnection of the wiring or a short circuit between wirings of different layers.
- a small mismatch gap helps to avoid scratches and defects associated with electrostatic discharge, thereby increasing the product yield.
- FIGS. 4 a -4 c are top views schematically illustrating arrangements of a gate signal line and a source-drain signal line in a non-display area according to embodiments of the present disclosure.
- FIGS. 4 a -4 c other structures of the non-display area are omitted for the sake of simplicity and clarity, and only arrangements of the gate signal line and the source-drain signal line is shown.
- the extending direction of a gate signal line 402 is parallel to that of a source-drain signal line 406 .
- the gate signal line and the source-drain signal line are generally arranged in an intersecting manner.
- the gate signal line 402 is illustrated with a dashed line and the source-drain signal line 406 is illustrated with a solid line because the gate signal line 402 is disposed below the source-drain signal line 406 .
- a region 430 of the non-display area 400 other than the intersection region 420 i.e., a non-intersection region 430 , indicated by a dotted line frame
- orthographic projections of the gate signal line 402 and the source-drain signal line 406 on the substrate overlap each other.
- the gate signal line 402 is offset with respect to the source-drain signal line 406 in a direction perpendicular to the extending direction of the gate signal line 402 (i.e. horizontal direction in the orientation of FIG. 4 a ).
- the light-transmitting area of the non-display area can be maximized, which can further enhance the attaching effect between the touch substrate and the upper substrate.
- the gate signal line and the source-drain signal line can be fabricated using mask of same pattern, thereby decreasing the complexity of fabrication.
- the gate signal line 402 is straight along the extending direction of the gate signal line 402 , and in the intersection region 420 , the gate signal line 402 has a lateral protrusion P 1 .
- the source-drain signal line 406 is straight along the extending direction of the source-drain signal line 406 , and in the intersection region 420 , the source-drain signal line 406 has a lateral protrusion P 2 .
- the gate signal line 402 and the source-drain signal line 406 are straight along their own extending directions, and in the intersection region 420 , the gate signal line 402 and the source-drain signal line 406 have lateral protrusions P 1 and P 2 respectively, which protrude in opposite directions.
- FIGS. 4 a and 4 b illustrate the lateral protrusions offset in the left direction
- the lateral protrusions may also be offset in the right direction.
- the lateral protrusions are not limited to the rectangular shapes shown in FIGS. 4 a -4 c , but may take any technologically achievable shape, such as a semicircular shape, a trapezoidal shape, and the like.
- the offset may be at least 20% of the width of the gate signal line, and the gate signal line and the source-drain signal line may have the same width.
- FIG. 5 schematically illustrates a sectional view of a touch substrate according to embodiments of the present disclosure, including a display area (shown on the left side of the dotted line) and a non-display area (shown on the right side of the dotted line) of the touch substrate.
- the non-display area includes a substrate 500 , a gate signal line 502 disposed on the substrate 500 , a source-drain signal line 506 disposed above the gate signal line 502 and electrically insulated therefrom, and a touch signal line 510 disposed above the source-drain signal line 506 and electrically insulated therefrom.
- the non-display area further includes: a gate insulating layer 504 disposed between the gate signal line 502 and the source-drain signal line 506 , wherein the gate signal line 502 and the source-drain signal line 506 are electrically insulated from each other by the gate insulating layer 504 ; a first passivation layer 508 disposed between the source-drain signal line 506 and the touch signal line 510 , wherein the source-drain signal line 506 and the touch signal line 510 are electrically insulated from each other by the first passivation layer 508 ; and a second passivation layer 512 disposed on the touch signal line 510 for protecting the touch substrate.
- the display area also includes a substrate 500 , a gate insulating layer 504 disposed above the substrate 500 , a first passivation layer 508 disposed above the gate insulating layer 504 , and a second passivation layer 512 disposed above the first passivation layer 508 .
- the display area further includes a gate metal layer 502 ′ disposed between the substrate 500 and the gate insulating layer 504 , wherein the gate metal layer 502 ′ and the gate signal line 502 in the non-display area may be formed with the same material in the same layer; an active layer 514 disposed between the first passivation layer 508 and the second passivation layer 512 ; a source-drain metal layer 506 ′ disposed on two sides of active layer 514 , wherein the source-drain metal layer 506 ′ and the source-drain signal line 506 in the non-display area may be formed with the same material in the same layer; a pixel electrode layer 516 disposed between the gate insulating layer 504 and the first passivation layer 508 and connected to the source-drain metal layer 506 ′; and a touch electrode 518 disposed on the second passivation layer 512 , wherein the touch electrode 518 is electrically connected to the touch signal line 510 in the non-display area so as to transmit
- the touch electrode 518 includes a transparent conductive material
- the first passivation layer 508 and the second passivation layer 512 include a transparent insulating material.
- the material of the touch electrode 518 includes a transparent metal, a transparent metal alloy, a transparent metal oxide, carbon nanotubes, graphene, and the like.
- the material of the first passivation layer 508 and the second passivation layer 512 includes an inorganic material such as silicon oxide (SiO 2 ), silicon nitride (SiN x ), silicon oxynitride (SiO x N y ), and the like, as well as an organic material such as resin.
- Embodiments of the present disclosure further provide a touch screen comprising any of the touch substrates described above.
- a touch screen can be applied to various display devices, for example, any product or component having a display function such as a mobile phone, a tablet computer, a television, a monitor, a notebook computer, a digital photo frame, a navigator, an electronic paper, and the like.
- Embodiments of the present disclosure further provide a manufacturing method for a touch substrate. As shown in FIG. 6 , the manufacturing method comprises forming a display area at step S 61 , and forming a non-display area on the periphery of the display area at step S 62 .
- the step S 62 of forming a non-display area comprises sub-steps of: at sub-step S 621 , forming a gate signal line on a substrate, the gate signal line having a first side and a second side opposite to each other in a direction perpendicular to the extending direction of the gate signal line; at sub-step S 622 , forming, above the gate signal line, a source-drain signal line electrically insulated from the gate signal line; at sub-step S 623 , forming, above the source-drain signal line, a touch signal line electrically insulated from the source-drain signal line, so that an orthographic projection of the touch signal line on the substrate intersects with orthographic projections of the gate signal line and the source-drain signal line on the substrate, respectively, and in an intersection region where the orthographic projection of the touch signal line on the substrate intersects with the orthographic projections of the gate signal line and the source-drain signal line on the substrate, the orthographic projection of the source-drain signal line on the substrate at
- the sub-step S 621 of forming a gate signal line comprises: depositing a gate metal layer on a substrate; coating a photoresist on the gate metal layer, forming a photoresist pattern by exposure and development; and forming a pattern of the gate signal line on the substrate by wet etching using the photoresist pattern as a mask.
- the gate signal line, the source-drain signal line, and the touch signal line are made of aluminum or molybdenum.
- Embodiments of the present disclosure provide a touch substrate, a manufacturing method thereof, and a touch screen.
- a touch substrate by making the orthographic projection of the source-drain signal line on the substrate at most cover an orthographic projection of one of the first side and the second side of the gate signal line on the substrate in an intersection region where the orthographic projection of the touch signal line on the substrate intersects with the orthographic projections of the gate signal line and the source-drain signal line on the substrate, the mismatch gap of the touch signal line between the intersection region and the non-intersection region can be decreased, so as to avoid or at least reduce the crossover open in the touch signal line and improve the reliability of the touch substrate, while still realizing good attachment between the touch substrate and the upper substrate.
- decreasing the mismatch gap helps to reduce the difficulty and risk of film formation process, and reduce the failure of wiring due to climbing, such as disconnection of the wiring or a short circuit between wirings of different layers.
- a small mismatch gap helps to avoid scratches and defects associated with electrostatic discharge, thereby increasing the product yield.
- connection or “connected” and the like are not limited to physical or mechanical connections, but may include electrical connections, regardless of being direct or indirect.
- the words “upper”, “lower”, “left”, “right” and the like are only used to denote relative positional relationships. When the absolute position of a described object is changed, the relative positional relationship may also be changed accordingly. It is to be noted that the features in the above embodiments can be used in any combination in the case of causing no conflict.
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Applications Claiming Priority (3)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201710282149.7A CN107092394B (en) | 2017-04-26 | 2017-04-26 | Touch substrate, manufacturing method thereof and touch screen |
| CN201710282149.7 | 2017-04-26 | ||
| PCT/CN2017/111019 WO2018196342A1 (en) | 2017-04-26 | 2017-11-15 | Touch substrate and fabrication method therefor and touch screen |
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| US20210165514A1 US20210165514A1 (en) | 2021-06-03 |
| US11249584B2 true US11249584B2 (en) | 2022-02-15 |
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|---|---|---|---|---|
| CN107092394B (en) * | 2017-04-26 | 2020-06-30 | 京东方科技集团股份有限公司 | Touch substrate, manufacturing method thereof and touch screen |
| CN109378320B (en) * | 2018-12-05 | 2021-01-26 | 合肥鑫晟光电科技有限公司 | Array substrate and preparation method thereof |
| CN112466209B (en) * | 2020-09-30 | 2022-05-27 | 武汉天马微电子有限公司 | Display panel and display device |
| CN115145418B (en) * | 2021-03-31 | 2024-09-24 | 京东方科技集团股份有限公司 | Display substrate and display device |
| CN113053990B (en) * | 2021-04-06 | 2023-04-07 | 京东方科技集团股份有限公司 | Display panel and display device |
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Also Published As
| Publication number | Publication date |
|---|---|
| CN107092394B (en) | 2020-06-30 |
| WO2018196342A1 (en) | 2018-11-01 |
| US20210165514A1 (en) | 2021-06-03 |
| CN107092394A (en) | 2017-08-25 |
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