US11199268B2 - Fluid control valve - Google Patents

Fluid control valve Download PDF

Info

Publication number
US11199268B2
US11199268B2 US17/099,336 US202017099336A US11199268B2 US 11199268 B2 US11199268 B2 US 11199268B2 US 202017099336 A US202017099336 A US 202017099336A US 11199268 B2 US11199268 B2 US 11199268B2
Authority
US
United States
Prior art keywords
valve
annular
step portion
valve hole
hole
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Active
Application number
US17/099,336
Other versions
US20210156483A1 (en
Inventor
Kyomi YAMADA
Tatsushi NABEI
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
CKD Corp
Original Assignee
CKD Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Priority claimed from JP2020188673A external-priority patent/JP7472000B2/en
Application filed by CKD Corp filed Critical CKD Corp
Assigned to CKD CORPORATION reassignment CKD CORPORATION ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS). Assignors: NABEI, TATSUSHI, YAMADA, KYOMI
Publication of US20210156483A1 publication Critical patent/US20210156483A1/en
Application granted granted Critical
Publication of US11199268B2 publication Critical patent/US11199268B2/en
Active legal-status Critical Current
Anticipated expiration legal-status Critical

Links

Images

Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
    • F16K41/00—Spindle sealings
    • F16K41/10—Spindle sealings with diaphragm, e.g. shaped as bellows or tube
    • F16K41/103—Spindle sealings with diaphragm, e.g. shaped as bellows or tube the diaphragm and the closure member being integrated in one member
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
    • F16K17/00—Safety valves; Equalising valves, e.g. pressure relief valves
    • F16K17/20—Excess-flow valves
    • F16K17/22—Excess-flow valves actuated by the difference of pressure between two places in the flow line
    • F16K17/24—Excess-flow valves actuated by the difference of pressure between two places in the flow line acting directly on the cutting-off member
    • F16K17/28—Excess-flow valves actuated by the difference of pressure between two places in the flow line acting directly on the cutting-off member operating in one direction only
    • F16K17/30—Excess-flow valves actuated by the difference of pressure between two places in the flow line acting directly on the cutting-off member operating in one direction only spring-loaded
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
    • F16K31/00—Actuating devices; Operating means; Releasing devices
    • F16K31/12—Actuating devices; Operating means; Releasing devices actuated by fluid
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
    • F16K1/00—Lift valves or globe valves, i.e. cut-off apparatus with closure members having at least a component of their opening and closing motion perpendicular to the closing faces
    • F16K1/32—Details
    • F16K1/34—Cutting-off parts, e.g. valve members, seats
    • F16K1/42—Valve seats
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
    • F16K1/00—Lift valves or globe valves, i.e. cut-off apparatus with closure members having at least a component of their opening and closing motion perpendicular to the closing faces
    • F16K1/32—Details
    • F16K1/34—Cutting-off parts, e.g. valve members, seats
    • F16K1/36—Valve members
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
    • F16K1/00—Lift valves or globe valves, i.e. cut-off apparatus with closure members having at least a component of their opening and closing motion perpendicular to the closing faces
    • F16K1/32—Details
    • F16K1/34—Cutting-off parts, e.g. valve members, seats
    • F16K1/46—Attachment of sealing rings
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
    • F16K1/00—Lift valves or globe valves, i.e. cut-off apparatus with closure members having at least a component of their opening and closing motion perpendicular to the closing faces
    • F16K1/32—Details
    • F16K1/54—Arrangements for modifying the way in which the rate of flow varies during the actuation of the valve
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
    • F16K17/00—Safety valves; Equalising valves, e.g. pressure relief valves
    • F16K17/02—Safety valves; Equalising valves, e.g. pressure relief valves opening on surplus pressure on one side; closing on insufficient pressure on one side
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
    • F16K25/00—Details relating to contact between valve members and seats
    • F16K25/02—Arrangements using fluid issuing from valve members or seats
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
    • F16K27/00—Construction of housing; Use of materials therefor
    • F16K27/02—Construction of housing; Use of materials therefor of lift valves
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
    • F16K31/00—Actuating devices; Operating means; Releasing devices
    • F16K31/12—Actuating devices; Operating means; Releasing devices actuated by fluid
    • F16K31/126—Actuating devices; Operating means; Releasing devices actuated by fluid the fluid acting on a diaphragm, bellows, or the like
    • F16K31/1266—Actuating devices; Operating means; Releasing devices actuated by fluid the fluid acting on a diaphragm, bellows, or the like one side of the diaphragm being acted upon by the circulating fluid
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
    • F16K7/00—Diaphragm valves or cut-off apparatus, e.g. with a member deformed, but not moved bodily, to close the passage ; Pinch valves
    • F16K7/12—Diaphragm valves or cut-off apparatus, e.g. with a member deformed, but not moved bodily, to close the passage ; Pinch valves with flat, dished, or bowl-shaped diaphragm
    • F16K7/14—Diaphragm valves or cut-off apparatus, e.g. with a member deformed, but not moved bodily, to close the passage ; Pinch valves with flat, dished, or bowl-shaped diaphragm arranged to be deformed against a flat seat
    • F16K7/16—Diaphragm valves or cut-off apparatus, e.g. with a member deformed, but not moved bodily, to close the passage ; Pinch valves with flat, dished, or bowl-shaped diaphragm arranged to be deformed against a flat seat the diaphragm being mechanically actuated, e.g. by screw-spindle or cam
    • G—PHYSICS
    • G05—CONTROLLING; REGULATING
    • G05D—SYSTEMS FOR CONTROLLING OR REGULATING NON-ELECTRIC VARIABLES
    • G05D7/00—Control of flow
    • G05D7/06—Control of flow characterised by the use of electric means
    • G05D7/0617—Control of flow characterised by the use of electric means specially adapted for fluid materials
    • G05D7/0629—Control of flow characterised by the use of electric means specially adapted for fluid materials characterised by the type of regulator means
    • G05D7/0635—Control of flow characterised by the use of electric means specially adapted for fluid materials characterised by the type of regulator means by action on throttling means
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
    • F16K31/00—Actuating devices; Operating means; Releasing devices
    • F16K31/02—Actuating devices; Operating means; Releasing devices electric; magnetic
    • F16K31/06—Actuating devices; Operating means; Releasing devices electric; magnetic using a magnet, e.g. diaphragm valves, cutting off by means of a liquid
    • F16K31/0644—One-way valve
    • F16K31/0655—Lift valves

Definitions

  • the present disclosure relates to a fluid control valve provided with a valve element, a valve chamber provided on an upstream side for accommodating the valve element, a valve hole provided on a downstream side and communicated with the valve chamber, and an annular protruding portion protruding from an inner surface of the valve chamber on a side of the valve hole along an outer periphery thereof, the annular protruding portion including a valve seat on its leading end.
  • the fluid control valve is configured to perform fluid control by bringing the valve element into and out of contact with the valve seat.
  • a flow rate control device described in JP2009-230259A and a regulator 50 shown in FIG. 4 are considered, for example.
  • the regulator 50 is to perform pressure control of a control fluid such as pure water and chemical liquid which are used for a semiconductor manufacturing process.
  • the regulator 50 includes a passage communicating an input port 511 , a valve chamber 513 , a downstream-side fluid chamber 516 a , and an output port 512 and performs the pressure control of the control fluid that is input from the input port 511 and output from the output port 512 in a manner that a contact surface 54 a of a valve element 54 connected with a diaphragm member 55 is brought into and out of contact with a valve seat 515 by operation air that is introduced into a pressure applying chamber 516 b inside a valve body 51 .
  • the above-mentioned conventional technique has the following problems. Specifically, when a difference in a control fluid pressure between an input side and an output side is large about 200 kPa, for example, a distance (i.e., a valve open degree) between the contact surface 54 a and the valve seat 515 which are separated from each other is small like 0.035 mm, and the control fluid passing through such a small clearance has high flow velocity. This increase in the flow velocity causes decrease in the pressure of the control fluid (according to the Bernoulli's principle) and the pressure falls in a negative-pressure region on a downstream side of the valve seat 515 . This leads to occurrence of foaming phenomena (cavitation) due to boil of the control fluid.
  • the foam formed by the cavitation then collapses and this collapse of the foam generates an impulsive wave to bring about oscillation in the regulator 50 .
  • the control fluid evaporated by the cavitation increases in its volume, but the increased volume returns to its original volume by the collapse of the foam. This increase and decrease in the volume of the control fluid leads to pressure oscillation in the downstream-side fluid chamber 516 a .
  • the oscillation and pressure oscillation by the impulsive wave are further transmitted to a pipe connected with the regulator 50 , which could result in noises.
  • the present disclosure has been made in view of the above circumstance, and has a purpose of providing a fluid control valve achieving prevention or suppression of oscillation that is caused by flow of a control fluid.
  • a fluid control valve according to the present disclosure has the following configuration.
  • a fluid control valve is a fluid control valve comprising: a valve element; a valve chamber on an upstream side accommodating the valve element; a valve hole on a downstream side communicated with the valve chamber; and an annular protruding portion protruding from an inner surface of the valve chamber on a side of the valve hole along an outer periphery of the valve hole, the annular protruding portion having a leading end provided with a valve seat, the fluid control valve being configured to perform fluid control by bringing the valve element into and out of contact with the valve seat, wherein the annular protruding portion is provided on its entire circumference on an inner diameter side with an annular diameter-decreasing surface decreasing an inner diameter of the annular protruding portion toward the valve hole, the valve element includes a contact surface to be in contact with the valve seat and a columnar step portion provided coaxially with the valve hole with a large diameter larger than an inner diameter of the valve hole, the step portion protruding from the contact surface toward the valve hole on an
  • a fluid flowing from the valve chamber to the valve hole passes through a portion narrowed its passage area by the valve element and the valve seat, a portion widened its passage area by a space surrounded by the annular diameter-decreasing surface, the contact surface, and an outer peripheral surface of the step portion, and a portion narrowed its passage area by the passage narrowing portion in this order.
  • Relaxation of the negative pressure state can suppress generation of the cavitation, and even if the cavitation occurs, a term from generation to disappearance of the foam can be shortened. Accordingly, it is possible to suppress generation of the oscillation caused by the cavitation, thereby suppressing noises caused by the oscillation.
  • the step portion protruding from the contact surface toward the valve hole guides the jet stream toward the valve hole, so that the jet stream is separated away from the valve element. This can achieve suppression of the oscillation in the valve element caused by the jet stream, thereby achieving suppression of the noises.
  • the fluid control valve of the present disclosure it is possible to prevent or suppress the oscillation caused by flow of the control fluid.
  • FIG. 1 is a sectional view of a regulator in a present embodiment
  • FIG. 2 is a partial enlarged view of a part E 11 of FIG. 1 ;
  • FIG. 3 is a partial enlarged view of a part E 12 of FIG. 2 ;
  • FIG. 4 is a sectional view of a regulator in a conventional art
  • FIG. 5 is a pressure distribution diagram of a control fluid in the valve seat and its vicinity of the regulator in the present embodiment
  • FIG. 6 is a pressure distribution diagram of the control fluid in the valve seat and its vicinity in a case when a clearance dimension of a second passage narrowing portion is increased;
  • FIG. 7 is a pressure distribution diagram of the control fluid in the valve seat and its vicinity of the regulator in the conventional art
  • FIG. 8 is a graph for comparing pressure values of the control fluid in the valve seat and its vicinity
  • FIG. 9 is a flow velocity distribution diagram of the control fluid in the valve seat and its vicinity of the regulator in the present embodiment.
  • FIG. 10 is a flow velocity distribution diagram of the control fluid in the valve seat and its vicinity in a case when a distance between the valve seat and a step portion is increased;
  • FIG. 11 is a flow velocity distribution diagram of the control fluid in the valve seat and its vicinity of the regulator in the conventional art
  • FIG. 12 is a pressure distribution diagram of the control fluid in the valve seat and its vicinity in a first modified example of the regulator in the present embodiment
  • FIG. 13 is a partial enlarged view of the valve seat and its vicinity of the regulator in a second modified example of the present embodiment
  • FIG. 14 is a partial enlarged view of a part E 21 of FIG. 13 ;
  • FIG. 15 is a partial enlarged view of the valve seat and its vicinity of the regulator in a third modified example of the present embodiment.
  • FIG. 16 is a partial enlarged view of a part E 31 of FIG. 15 .
  • a fluid control valve is exemplified as a regulator 1 performing pressure control of a control fluid such as chemical liquid and pure water which are used for a semiconductor manufacturing process.
  • the regulator 1 includes a valve body 11 , an upper cover (one example of a cover member) 12 , and a lower cover 13 , and the upper cover 12 and the lower cover 13 are assembled to the valve body 11 in a direction parallel to a direction in which the valve element 14 is brought into and out of contact with the valve seat 115 a (see FIG. 2 ).
  • the valve body 11 is provided with an input port 111 to which the control fluid is input and an output port 112 through which the control fluid is output.
  • the valve body 11 as a liquid-contact component is, for example, made of fluorocarbon-related synthetic resin with high corrosion resistance.
  • the upper cover 12 and the lower cover 13 which are not the liquid-contact components, are made of polypropylene resin, for example.
  • a valve chamber 113 communicated with the input port 111 via an input passage 111 a is provided in a drilled manner extending from an end face of the valve body 11 on a side of the lower cover 13 toward a side of the upper cover 12 . Further, the valve chamber 113 is communicated with a valve hole 114 and has a valve-hole-side inner surface 113 a provided with an annular protruding portion 115 protruding along an outer periphery of the valve hole 114 .
  • a leading end of the annular protruding portion 115 is, as shown in FIG. 2 , provided with the valve seat 115 a to be brought into and out of contact with the valve element 14 which will be described below, and the annular protruding portion 115 is provided on its entire circumference on an inner diameter side with an annular diameter-decreasing surface 115 b in which an inner diameter of the annular protruding portion 115 decreases toward the valve hole 114 .
  • annular diameter-decreasing surface 115 b and an inner peripheral surface of the valve hole 114 are connected by an annular recessed portion 117 which is provided coaxially with the valve hole 114 and provided in a drilled manner from the annular diameter-decreasing surface 115 b toward the valve hole 114 .
  • valve body 11 is provided with an opening portion 116 provided in a drilled manner to be communicated with the valve hole 114 on an end face on a side of the upper cover 12 .
  • the opening portion 116 is divided into a downstream-side fluid chamber 116 a which is communicated with the output port 112 via the output passage 112 a and a pressure applying chamber 116 b by a diaphragm member 15 described below.
  • a passage from the input port 111 to the output port 112 is constituted by the input passage 111 a , the valve chamber 113 , the valve hole 114 , the downstream-side fluid chamber 116 a , and the output passage 112 a.
  • the valve chamber 113 accommodates the columnar valve element 14 which is reciprocally movable in a direction parallel to an assembly direction of the upper cover 12 and the lower cover 13 .
  • the valve element 14 is provided in its axial center part with a diameter-increased portion 141 having a large diameter larger than other portions.
  • the diameter-increased portion 141 has an end face facing the valve seat 115 a as a contact surface 141 a to be contacted with the valve seat 115 a as shown in FIG. 2 .
  • the contact surface 141 a is provided with a columnar step portion 143 protruding toward the valve hole 114 provided on an inner periphery side of the valve seat 115 a .
  • the step portion 143 has a large diameter larger than an inner diameter of the valve hole 114 and is placed coaxially with the valve hole 114 .
  • first annular ridge 145 one example of an annular ridge
  • third annular ridge 118 formed by intersecting an inner peripheral surface of the annular recessed portion 117 with the annular diameter-decreasing surface 115 b .
  • the first annular ridge 145 and the third annular ridge 118 constitute a passage narrowing portion 17 .
  • a sectional area of the passage which has been narrowed by the contact surface 141 a and the valve seat 115 a is once increased by a space (first space) surrounded by the contact surface 141 a , the outer peripheral surface of the step portion 143 , and the annular diameter-decreasing surface 115 b , and then narrowed again by the passage narrowing portion 17 .
  • the upper end face of the step portion 143 is, as shown in FIG. 2 , provided with a columnar second step portion 144 having a small diameter smaller than an outer diameter of the step portion 143 in a protruding manner protruding toward the valve hole 114 .
  • This second step portion 144 is placed coaxially with the valve hole 114 .
  • a sectional area of the passage which is narrowed by the passage narrowing portion 17 is increased in a space (a second space) surrounded by the upper end face of the step portion 143 , the outer peripheral surface of the second step portion 144 , and the annular recessed portion 117 , and then narrowed again by the second passage narrowing portion 18 .
  • a clearance dimension C 1 of the passage narrowing portion 17 in a radial direction of the first annular ridge 145 is preferably set such that a value of multiplying the clearance dimension C 1 by a diametric dimension D 1 (see FIG. 2 ) in a center part (a center axis CL 11 ) of the valve seat 115 a of the annular protruding portion 115 is in a range from 0.6 to 1.2, and for example in the present embodiment, the thus multiplied value is set as 0.83.
  • a clearance dimension C 2 of the second passage narrowing portion 18 in a radial direction of the second annular ridge 146 is preferably set such that a value of multiplying the clearance dimension C 2 by the diametric dimension D 1 in the center part (the center axis CL 11 ) of the valve seat 115 a of the annular protruding portion 115 is in a range from 0.6 to 1.2, and for example in the present embodiment, the thus multiplied value is set as 0.83.
  • a distance d 1 from the center part (the center axis CL 11 ) of the valve seat 115 a to the outer peripheral surface of the step portion 143 in a range from 0.4 mm to 0.8 mm, and for example in the present embodiment, the distance d 1 is set as 0.5 mm.
  • a distance d 2 from the outer peripheral surface of the step portion 143 to the outer peripheral surface of the second step portion 144 is set in a range from 0.4 mm to 0.8 mm, and for example in the present embodiment, the distance d 2 is set as 0.4 mm.
  • a distance d 3 from the valve seat 115 a to the inner surface of the annular recessed portion 117 on the side of the valve hole 114 is preferably shorter than a distance d 4 from the contact surface 141 a to an upper end face of the second step portion 144 by 0.03 mm to 0.13 mm, and for example in the present embodiment, the distance d 3 is made shorter than the distance d 4 by 0.1 mm.
  • the valve element 14 is provided with a diaphragm part 142 formed integrally with the valve element 14 on its end portion on a side of the lower cover 13 , and attached to the diaphragm member 15 including a diaphragm part 152 on an end portion on a side of the upper cover 12 .
  • the diaphragm part 142 of the valve element 14 and the diaphragm part 152 of the diaphragm member 15 are elastically deformed in association with movement of the valve element 14 being brought into and out of contact with the valve seat 115 a .
  • the valve element 14 and the diaphragm member 15 as liquid-contact components are made of, for example, fluorocarbon-related synthetic resin with high corrosion-resistance.
  • the diaphragm member 15 is provided with the diaphragm part 152 on an outer periphery of a center portion 151 to which the valve element 14 is attached and further provided with an annular fixing portion 153 along an outer periphery of the diaphragm part 152 .
  • the annular fixing portion 153 includes an annular cutout portion 153 c formed by cutting out an entire outer periphery of the annular fixing portion 153 from the outer peripheral surface to an end face (a lower end face) of the diaphragm part 152 on a side of the valve body 11 except an end portion (an upper end face 153 b ) on a side of the upper cover 12 ,
  • a press-fitting portion 153 a is provided on a lower end face of the annular fixing portion 153 such that the press-fitting portion 153 a is allowed to be press-fitted into the opening portion 116 of the valve body 11 .
  • the diaphragm member 15 press-fitted in the opening portion 116 is fixed by holding the annular fixing portion 153 with the upper cover 12 and the valve body 11 from both sides in a direction of bringing the valve element 14 into and out of contact with the valve seat 115 a .
  • the annular cutout portion 153 c makes a thickness t 11 of the valve body 11 thick by the cut-out part of the annular fixing portion 153 which is cut out by the annular cutout portion 153 c , thereby increasing strength of the valve body 11 . Further, the annular cutout portion 153 c is formed to cut out the outer peripheral surface of the annular fixing portion 153 to the lower end face thereof other than the upper end face 153 b , and thus an area to be pressed against the upper cover 12 can be assured in the upper end face 153 b.
  • the lower cover 13 is provided with a spring accommodation chamber 131 on an opposite side from the valve chamber 113 via the diaphragm part 142 .
  • the spring accommodation chamber 131 accommodates a compression coil spring 16 .
  • the valve element 14 is constantly urged by an urging force of the compression coil spring 16 in a direction to be in contact with the valve seat 115 a .
  • the contact surface 141 a of the valve element 14 remains to be contacted with the valve seat 115 a.
  • the upper cover 12 is provided with an introduction port 121 communicated with the pressure applying chamber 116 b , and the operation air is introduced into the pressure applying chamber 116 b through this introduction port 121 .
  • a position of the valve element 14 is adjusted by controlling pressure of the operation air in the pressure applying chamber 116 b.
  • FIG. 5 and FIG. 6 show pressure distribution maps each showing pressure distribution in the contact surface 141 a , the valve seat 115 a , and their vicinity in a case that a pressure difference of the control fluid between an input side and an output side of the regulator 1 is controlled to be about 200 kPa for example, so that a valve open degree is made to be about 0.035 mm.
  • These pressure distribution maps show computational analytical results of pressure distribution by the Finite Element Method.
  • FIG. 7 is a pressure distribution map showing pressure distribution in the contact surface 54 a , the valve seat 515 , and their vicinity in a case where the regulator 50 according to the conventional art has a valve open degree of about 0.035 mm.
  • This pressure distribution map shows computational analytical results of the pressure distribution by the Finite Element Method.
  • a part represented by dots with high density indicates a low-pressure part
  • a part represented by dots with low density indicates a high-pressure part.
  • the control fluid going through such small clearance has fast flow velocity.
  • the pressure of the control fluid on the downstream side of the valve seat 515 of the conventional regulator 50 is examined at three measurement points A 21 , A 22 , and A 23 in the pressure distribution map as shown in FIG. 7 , for example. Observation result shows that all the three points are under negative pressure state. This negative state is caused by pressure reduction due to increase in the flow velocity (the Bernoulli's principle). Further, pressure values on the measurement points A 21 , A 22 , and A 23 are all less than or equal to the pressure value P 11 , thus it is confirmed that the cavitation easily occurs.
  • the valve element 14 , the valve seat 115 a , and their vicinity are under negative pressure state, but at a measurement point A 11 in the first space in the pressure distribution map corresponding to a position of the measurement point A 21 , the negative pressure state is relieved and the pressure value turns positive. This is clear from a graph shown in FIG. 8 .
  • the point is configured to be in the negative pressure state from the pressure distribution map, but the point is over the pressure value P 11 as shown in the graph of FIG. 8 , thus the state of generating the cavitation seems to be relieved.
  • all the measurement points A 11 , A 12 , and A 13 indicate pressure more than or equal to the pressure value P 11 , so that the cavitation hardly occurs.
  • the clearance dimension C 1 of the passage narrowing portion 17 in the radial direction of the first annular ridge 145 is preferably set such that a value of multiplying the clearance dimension C 1 by the diametric dimension D 1 in the center part (the center axis CL 11 ) of the valve seat 115 a of the annular protruding portion 115 is in a range of 0.6 to 1.2
  • the clearance dimension C 2 of the second passage narrowing portion 18 in the radial direction of the second annular ridge 146 is preferably set such that a value of multiplying the clearance dimension C 2 by the diametric dimension D 1 in the center part (the center axis CL 11 ) of the valve seat 115 a of the annular protruding portion 115 is in a range of 0.6 to 1.2.
  • the measurement point A 11 in the first space and the measurement point A 12 in the second space are each under the negative pressure state.
  • the pressure values at the measurement point A 11 and the measurement point A 12 go below P 11 as shown in FIG. 8 (Increase C 2 ), thus there is a possibility of generating the cavitation.
  • the valve body 11 may be configured such that no annular recessed portion 117 is provided on the annular diameter-decreasing surface 115 b .
  • the second space falls in the negative pressure state, but the first space and the valve hole 114 and its vicinity are maintained at a pressure value to an extent that no cavitation is generated, and accordingly, the configuration has an effect of suppressing generation of the cavitation.
  • FIG. 9 and FIG. 10 show distribution maps each illustrating flow velocity of the control fluid on the contact surface 141 a , the valve seat 115 a , and their vicinity when a pressure difference of the control fluid between the input side and the output side of the regulator 1 is controlled to be about 200 kPa for example, so that the valve open degree is made to be about 0.035 mm.
  • the distribution maps represent computational analytical results of the flow velocity distribution by the Finite Element Method.
  • FIG. 11 is a distribution map representing the flow velocity of the control fluid on the contact surface 54 a , the valve seat 515 , and their vicinity when the conventional regulator 50 has the open degree of 0.035 mm and representing the computational analytical results of the flow velocity distribution by the Finite Element Method.
  • a part represented by dots with high density indicates a part where the control fluid has fast flow velocity
  • a part represented by dots with low density indicates a part where the control fluid has low flow velocity.
  • a part with the high flow velocity of the control fluid extends from the clearance between the contact surface 141 a and the valve seat 115 a along the annular diameter-decreasing surface 115 b , so that the jet stream having been generated along the contact surface 54 a in the conventional regulator is resolved.
  • the step portion 143 guides the jet stream toward the valve hole 114 to separate the jet stream away from the valve element 14 . This separation of the jet stream from the valve element 14 can suppress generation of the oscillation in the valve element 14 due to the jet stream.
  • the distance d 1 from the center part (the center axis CL 11 ) of the valve seat 115 a to the outer peripheral surface of the step portion 143 is preferably in the range of 0.4 mm to 0.8 mm
  • the distance d 2 from the outer peripheral surface of the step portion 143 to the outer peripheral surface of the second step portion 144 is preferably in the range of 0.4 mm to 0.8 mm.
  • the part with high fluid velocity of the control fluid extends along the contact surface 141 a of the valve element 14 , and thus the jet stream fails to be separated away from the valve element 14 . In this state, there is a possibility that generation of the oscillation in the valve element 14 due to the jet stream cannot be prevented.
  • a contact surface 241 a is provided in a diameter-increased portion 241 of a valve element 24 , which is to be in contact with a valve seat 215 a provided on a leading end of an annular protruding portion 215 of a valve body 21 , and this contact surface 214 a may be inclined with respect to an axial center of the valve element 24 . Further, an inner surface of an annular recessed portion 217 on a side of a valve hole 214 and each end face (an upper end face) of a step portion 243 and a second step portion 244 on a side of the valve hole 214 may also be inclined.
  • first annular ridge 245 one example of an annular ridge
  • annular ridge 218 where an inner peripheral surface of the annular recessed portion 217 intersects the annular diameter-decreasing surface 215 b
  • first annular ridge 245 and the third annular ridge 218 constitute a passage narrowing portion 27 .
  • a third step portion 345 and a second annular recessed portion 318 may be provided to constitute a third passage narrowing portion 39 .
  • the valve body 31 includes an annular protruding portion 315 having a valve seat 315 a on its leading end, and further includes an annular diameter-decreasing surface 315 b and an annular recessed portion 317 as similar to the above-mentioned first embodiment.
  • the valve body 31 is provided with the second annular recessed portion 318 formed in a drilled manner from an inner surface of the annular recessed portion 317 on a side of the valve hole 314 .
  • the valve element 34 includes a diameter-increased portion 341 which is provided with a contact surface 341 a to be in contact with a valve seat 315 a and provided with a step portion 343 protruding from the contact surface 341 a toward the valve hole 314 and a second step portion 344 protruding from an end face (an upper end face) of the step portion 343 on the side of the valve hole 314 toward the valve hole 314 as similar to the above-mentioned first embodiment, A third step portion 345 is formed to protrude from an end face (an upper end face) of the second step portion 344 on the side of the valve hole 314 toward the valve hole 314 .
  • the third step portion 345 has a diameter smaller than the second step portion 344 and is placed coaxially with the valve hole 314 .
  • a third annular ridge 319 formed by intersecting an inner peripheral surface of the annular recessed portion 317 with the annular diameter-decreasing surface 315 b , and the first annular ridge 346 and the third annular ridge 319 constitute a passage narrowing portion 37 .
  • a fourth annular ridge 320 where an inner surface of the annular recessed portion 317 on the side of the valve hole 314 intersects an inner peripheral surface of the second annular recessed portion 318 , and the second annular ridge 347 and the fourth annular ridge 320 constitute a second passage narrowing portion 38 .
  • a sixth annular ridge 322 where an inner surface of the second annular recessed portion 318 on the side of the valve hole 314 intersects the inner peripheral surface of the valve hole 314 , and the fifth annular ridge 348 and the sixth annular ridge 322 constitute a third passage narrowing portion 39 .
  • the regulator 1 is configured to comprise: a valve element 14 ; a valve chamber 113 on an upstream side accommodating the valve element 14 ; a valve hole 114 on a downstream side communicated with the valve chamber 113 ; and an annular protruding portion 115 protruding from an inner surface of the valve chamber 113 on a side of the valve hole 114 along an outer periphery of the valve hole 114 , the annular protruding portion 115 having a leading end provided with a valve seat 115 a , the regulator 1 being configured to perform fluid control by bringing the valve element 14 into and out of contact with the valve seat 115 a , wherein the annular protruding portion 115 is provided on its entire circumference on an inner diameter side with an annular diameter-decreasing surface 115 b decreasing an inner diameter of the annular protruding portion 115 toward the valve hole 114 , the valve element 14 includes a contact surface 141 a to be
  • a fluid flowing from the valve chamber 113 to the valve hole 114 passes through a portion narrowed its passage area by the valve element 14 and the valve seat 115 a , a portion widened its passage area by a space (first space) surrounded by the annular diameter-decreasing surface 115 b , the contact surface 141 a , and the outer peripheral surface of the step portion 143 , and a portion narrowed its passage area by the passage narrowing portion 17 in this order.
  • Relaxation of the negative pressure state can suppress generation of the cavitation, and even if the cavitation occurs, a term from generation to disappearance of the foam can be shortened. Accordingly, it is possible to suppress generation of the oscillation caused by the cavitation, thereby suppressing noises caused by the oscillation.
  • step portion 143 protruding from the contact surface 141 a toward the valve hole 114 guides the jet stream toward the valve hole 114 , so that the jet stream is separated away from the valve element 14 . This can achieve suppression of the oscillation in the valve element caused by the jet stream, thereby achieving suppression of the noises.
  • the passage narrowing portion 17 is configured such that a value of multiplying a clearance dimension C 1 in a radial direction of the first annular ridge 145 by a diametric dimension D 1 of the center part (the center axis CL 11 ) of the valve seat 115 a of the annular protruding portion 115 is in a range of 0.6 to 1.2.
  • the regulator 1 in the above (2) the applicant has confirmed by experiments that the regulator 1 can achieve better effect of suppressing the oscillation caused by the cavitation.
  • a distance from the center part (the center axis CL) of the valve seat 115 a to the outer peripheral surface of the step portion 143 is in a range from 0.4 mm to 0.8 mm.
  • the regulator 1 in the above (3) the applicant has confirmed by experiments that the regulator 1 can achieve better effect of suppressing the oscillation caused by the jet stream.
  • the valve element 14 includes a columnar second step portion 144 provided coaxially with the valve hole 114 , the second step portion 144 protruding from an end face of the step portion 143 on a side of the valve hole 114 toward the valve hole 114 with a diameter smaller than the outer diameter of the step portion 143 , and a second annular ridge 146 formed by intersecting an outer peripheral surface of the second step portion 144 with an end face of the second step portion 144 on the side of the valve hole 114 is placed in a vicinity of an inner surface of the valve hole 114 to form a second passage narrowing portion 18 .
  • the control fluid flowing from the valve chamber 113 to the valve hole 114 passes through a portion narrowed its passage area by the valve element 14 and the valve seat 115 a , a portion widened its passage area by a space (a first space) surrounded by the annular diameter-decreasing surface 115 b , the contact surface 141 a , and the outer peripheral surface of the step portion 143 , and a portion narrowed its passage area by the passage narrowing portion 17 .
  • control fluid passes further through a portion widened its passage area by the end face of the step portion 143 on a side of the valve hole 114 and the outer peripheral surface of the second step portion 144 and a portion narrowed its passage area by the second passage narrowing portion 18 in this order. Accordingly, the applicant has confirmed by experiments that the negative pressure state on the downstream side of the valve seat 115 a is further relaxed.
  • This relaxation in the negative pressure state can suppress generation of the cavitation. Suppression of the cavitation further suppresses the oscillation caused by the cavitation, and thus it is possible to prevent generation of noises due to the oscillation.
  • the second passage narrowing portion 18 is configured such that a value of multiplying a clearance dimension C 2 in a radial direction of the second annular ridge 146 by the diametric dimension D 1 of the center part (the central axis CL) of the valve seat 115 a of the annular protruding portion 115 is in a range of 0.6 to 1.2.
  • the fluid control valve can achieve better effect of suppressing the oscillation caused by the cavitation.
  • the annular diameter-decreasing surface 115 b and an inner peripheral surface of the valve hole 114 are connected via an annular recessed portion 117 provided coaxially with the valve hole 114 and formed in a drilled manner from the annular diameter-decreasing surface 115 b toward the valve hole 114 , a third annular ridge 118 formed by intersecting the inner peripheral surface of the annular recessed portion 117 with the annular diameter-decreasing surface 115 b is placed in a vicinity of the first annular ridge 145 to form the passage narrowing portion 17 with the first annular ridge 145 , and a fourth annular ridge 119 formed by an inner surface of the annular recessed portion 117 on a side of the valve hole 114 intersecting the inner peripheral surface of the valve hole 114 is placed in a vicinity of the second annular ridge 146 to form the second passage narrowing portion 18 with the second annular ridge 146 .
  • the applicant has confirmed by experiments that the annular recessed portion 117 widens a space (a second space) between the passage narrowing portion 117 and the second passage narrowing portion 18 to suppress the oscillation caused by the cavitation, thus achieving enhanced performance in the regulator 1 .
  • a distance from the center part (the central axis CL 11 ) of the valve seat 115 a to the inner surface of the annular recessed portion 117 on the side of the valve hole 114 is smaller than a distance from the contact surface 141 a to an end face of the second step portion 144 on the side of the valve hole 114 by 0.03 mm to 0.13 mm.
  • the fourth annular ridge 119 is assuredly positioned in the vicinity of the second annular ridge 146 to form the second passage narrowing portion 18 , so that the regulator 1 can achieve better effect of suppressing the oscillation caused by the cavitation.
  • a distance from the outer peripheral surface of the step portion 143 to an outer peripheral surface of the second step portion 144 is in a range from 0.4 mm to 0.8 mm.
  • the applicant has confirmed by experiments that the jet stream is assuredly introduced to the valve hole 114 , so that the regulator 1 can achieve better effect of suppressing the oscillation of the valve element 14 caused by the jet stream.
  • the regulator 1 comprises: a valve body 11 provided inside with the valve chamber 113 and the valve hole 114 ; an upper cover 12 overlapped above the valve body 11 in a direction parallel to a contact and separation direction of the valve element 14 ; and a diaphragm member 15 connected in its center portion 151 with the valve element 14 and provided with a diaphragm part 152 which is elastically deformed during contact and separation operation of the valve element 14 on an outer periphery of the center portion 151 , wherein, the valve body 11 has an opening portion 116 attached with the diaphragm member 15 on a side of the upper cover 12 , the diaphragm member 15 is provided with an annular fixing portion 153 along an outer periphery of the diaphragm part 152 , the diaphragm member 15 attached to the opening portion 116 by press-fitting the annular fixing portion 153 into the opening portion 116 is fixed in a manner that the annular fixing
  • the annular fixing portion 153 held by the upper cover 12 and the valve body 11 from both sides in a contact and separation direction is provided with the annular cutout portion 153 c formed by cutting a part from the outer peripheral surface to the end face on the side of the valve body 11 of the annular fixing portion 153 except the end portion on the side of the upper cover 12 along the entire outer circumference of the annular fixing portion 153 , and thus the upper end face 153 b of the annular fixing portion 153 on the side of the upper cover 12 can assure an area wide enough to be pressed against the upper cover 12 .
  • the annular fixing portion 153 can thus have the area wide enough to be pressed against the upper cover 12 , thus achieving assured fixation of the diaphragm member 15 , so that the oscillation generated in the valve element 14 connected to the diaphragm member 15 can be suppressed. Further, the annular fixing portion 153 is cut out by the annular cutout portion 153 c , and thus the valve body 11 can have enough thickness, thereby enhancing strength of the valve body 11 .
  • first annular ridge 145 , the second annular ridge 146 , the third annular ridge 118 , and the fourth annular ridge 119 are each of an edge-like shape, but alternatively, each of these ridges may be beveled to be a curved surface or a C-shaped curved surface.

Landscapes

  • Engineering & Computer Science (AREA)
  • General Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Automation & Control Theory (AREA)
  • Lift Valve (AREA)
  • Details Of Valves (AREA)
  • Fluid-Driven Valves (AREA)
  • Magnetically Actuated Valves (AREA)

Abstract

A regulator performing fluid control includes an annular protruding portion having a valve seat on its leading end and an annular diameter-decreasing surface formed by decreasing an inner diameter of the annular protruding portion toward a valve hole. The regulator includes a valve element provided with a contact surface to be in contact with the valve seat and a columnar step portion provided on an inner peripheral side of the valve seat protruding from the contact surface toward the valve hole, the step portion having a diameter larger than an inner diameter of the valve hole and being coaxially formed with the valve hole. An annular ridge is formed by an outer peripheral surface of the step portion intersecting an end face of the step portion on the valve-hole side with the annular diameter-decreasing surface to constitute a passage narrowing portion.

Description

CROSS-REFERENCE TO RELATED APPLICATIONS
This application is based upon and claims the benefit of priority from the prior Japanese Patent Applications No. 2019-210288, filed Nov. 21, 2019, and No. 2020-188673 filed on Nov. 12, 2020, the entire contents of which are incorporated herein by reference.
BACKGROUND Technical Field
The present disclosure relates to a fluid control valve provided with a valve element, a valve chamber provided on an upstream side for accommodating the valve element, a valve hole provided on a downstream side and communicated with the valve chamber, and an annular protruding portion protruding from an inner surface of the valve chamber on a side of the valve hole along an outer periphery thereof, the annular protruding portion including a valve seat on its leading end. The fluid control valve is configured to perform fluid control by bringing the valve element into and out of contact with the valve seat.
Related Art
As a fluid control valve of performing fluid control by bringing the valve element into and out of contact with the valve seat, a flow rate control device described in JP2009-230259A and a regulator 50 shown in FIG. 4 are considered, for example. The regulator 50 is to perform pressure control of a control fluid such as pure water and chemical liquid which are used for a semiconductor manufacturing process. The regulator 50 includes a passage communicating an input port 511, a valve chamber 513, a downstream-side fluid chamber 516 a, and an output port 512 and performs the pressure control of the control fluid that is input from the input port 511 and output from the output port 512 in a manner that a contact surface 54 a of a valve element 54 connected with a diaphragm member 55 is brought into and out of contact with a valve seat 515 by operation air that is introduced into a pressure applying chamber 516 b inside a valve body 51.
SUMMARY Technical Problems
However, the above-mentioned conventional technique has the following problems. Specifically, when a difference in a control fluid pressure between an input side and an output side is large about 200 kPa, for example, a distance (i.e., a valve open degree) between the contact surface 54 a and the valve seat 515 which are separated from each other is small like 0.035 mm, and the control fluid passing through such a small clearance has high flow velocity. This increase in the flow velocity causes decrease in the pressure of the control fluid (according to the Bernoulli's principle) and the pressure falls in a negative-pressure region on a downstream side of the valve seat 515. This leads to occurrence of foaming phenomena (cavitation) due to boil of the control fluid. The foam formed by the cavitation then collapses and this collapse of the foam generates an impulsive wave to bring about oscillation in the regulator 50. Further, the control fluid evaporated by the cavitation increases in its volume, but the increased volume returns to its original volume by the collapse of the foam. This increase and decrease in the volume of the control fluid leads to pressure oscillation in the downstream-side fluid chamber 516 a. The oscillation and pressure oscillation by the impulsive wave are further transmitted to a pipe connected with the regulator 50, which could result in noises.
Further, when the control fluid passes through the clearance with the valve open degree of about 0.035 mm between the contact surface 54 a and the valve seat 515, the flow velocity of the control fluid increases to cause a jet stream on the downstream side of the valve seat 515. This jet stream flows along the contact surface 54 a, and thus there is a possibility of oscillating the valve element 54. This oscillation is transmitted to the pipe connected with the regulator 50, which could result in the noises.
In recent years, size reduction and high densification of a semiconductor manufacturing apparatus has demanded size reduction in a fluid control valve. In the conventional regulator 50, even when the oscillation due to the cavitation and the jet stream has occurred, the oscillation seems to have been absorbed by the diaphragm member 55 connected to the valve element 54. However, size reduction in the apparatus leads to reduction in a diameter of the diaphragm member 55 compared to the conventional apparatus and also leads to reduction in a capacity of the downstream-side fluid chamber 516 a and a capacity of the pressure applying chamber 516 b, so that it has become difficult to absorb the oscillation due to the cavitation, and therefore it is considered that the oscillation tends to occur easily.
The present disclosure has been made in view of the above circumstance, and has a purpose of providing a fluid control valve achieving prevention or suppression of oscillation that is caused by flow of a control fluid.
Means of Solving the Problems
To solve the above problem, a fluid control valve according to the present disclosure has the following configuration.
A fluid control valve according to the present disclosure is a fluid control valve comprising: a valve element; a valve chamber on an upstream side accommodating the valve element; a valve hole on a downstream side communicated with the valve chamber; and an annular protruding portion protruding from an inner surface of the valve chamber on a side of the valve hole along an outer periphery of the valve hole, the annular protruding portion having a leading end provided with a valve seat, the fluid control valve being configured to perform fluid control by bringing the valve element into and out of contact with the valve seat, wherein the annular protruding portion is provided on its entire circumference on an inner diameter side with an annular diameter-decreasing surface decreasing an inner diameter of the annular protruding portion toward the valve hole, the valve element includes a contact surface to be in contact with the valve seat and a columnar step portion provided coaxially with the valve hole with a large diameter larger than an inner diameter of the valve hole, the step portion protruding from the contact surface toward the valve hole on an inner peripheral side of the valve seat, and an annular ridge formed by intersecting an outer peripheral surface of the step portion with an end face of the step portion on a side of the valve hole is placed in a vicinity of the annular diameter-decreasing surface to form a passage narrowing portion.
According to the above fluid control valve, a fluid flowing from the valve chamber to the valve hole passes through a portion narrowed its passage area by the valve element and the valve seat, a portion widened its passage area by a space surrounded by the annular diameter-decreasing surface, the contact surface, and an outer peripheral surface of the step portion, and a portion narrowed its passage area by the passage narrowing portion in this order. Thus, the applicant has confirmed from experiments that a negative pressure state on the downstream side of the valve seat is relaxed according to the above configuration.
Relaxation of the negative pressure state can suppress generation of the cavitation, and even if the cavitation occurs, a term from generation to disappearance of the foam can be shortened. Accordingly, it is possible to suppress generation of the oscillation caused by the cavitation, thereby suppressing noises caused by the oscillation.
Further, the step portion protruding from the contact surface toward the valve hole guides the jet stream toward the valve hole, so that the jet stream is separated away from the valve element. This can achieve suppression of the oscillation in the valve element caused by the jet stream, thereby achieving suppression of the noises.
According to the fluid control valve of the present disclosure, it is possible to prevent or suppress the oscillation caused by flow of the control fluid.
BRIEF DESCRIPTION OF THE DRAWINGS
FIG. 1 is a sectional view of a regulator in a present embodiment;
FIG. 2 is a partial enlarged view of a part E11 of FIG. 1;
FIG. 3 is a partial enlarged view of a part E12 of FIG. 2;
FIG. 4 is a sectional view of a regulator in a conventional art;
FIG. 5 is a pressure distribution diagram of a control fluid in the valve seat and its vicinity of the regulator in the present embodiment;
FIG. 6 is a pressure distribution diagram of the control fluid in the valve seat and its vicinity in a case when a clearance dimension of a second passage narrowing portion is increased;
FIG. 7 is a pressure distribution diagram of the control fluid in the valve seat and its vicinity of the regulator in the conventional art;
FIG. 8 is a graph for comparing pressure values of the control fluid in the valve seat and its vicinity;
FIG. 9 is a flow velocity distribution diagram of the control fluid in the valve seat and its vicinity of the regulator in the present embodiment;
FIG. 10 is a flow velocity distribution diagram of the control fluid in the valve seat and its vicinity in a case when a distance between the valve seat and a step portion is increased;
FIG. 11 is a flow velocity distribution diagram of the control fluid in the valve seat and its vicinity of the regulator in the conventional art;
FIG. 12 is a pressure distribution diagram of the control fluid in the valve seat and its vicinity in a first modified example of the regulator in the present embodiment;
FIG. 13 is a partial enlarged view of the valve seat and its vicinity of the regulator in a second modified example of the present embodiment;
FIG. 14 is a partial enlarged view of a part E21 of FIG. 13;
FIG. 15 is a partial enlarged view of the valve seat and its vicinity of the regulator in a third modified example of the present embodiment; and
FIG. 16 is a partial enlarged view of a part E31 of FIG. 15.
 DETAILED DESCRIPTION OF THE EXEMPLARY EMBODIMENTS
An embodiment of a fluid control valve according to the present disclosure is explained in detail with reference to the accompanying drawings.
A fluid control valve according to the present embodiment is exemplified as a regulator 1 performing pressure control of a control fluid such as chemical liquid and pure water which are used for a semiconductor manufacturing process. As shown in FIG. 1, the regulator 1 includes a valve body 11, an upper cover (one example of a cover member) 12, and a lower cover 13, and the upper cover 12 and the lower cover 13 are assembled to the valve body 11 in a direction parallel to a direction in which the valve element 14 is brought into and out of contact with the valve seat 115 a (see FIG. 2). The valve body 11 is provided with an input port 111 to which the control fluid is input and an output port 112 through which the control fluid is output. The valve body 11 as a liquid-contact component is, for example, made of fluorocarbon-related synthetic resin with high corrosion resistance. The upper cover 12 and the lower cover 13, which are not the liquid-contact components, are made of polypropylene resin, for example.
On a center part of the valve body 11, a valve chamber 113 communicated with the input port 111 via an input passage 111 a is provided in a drilled manner extending from an end face of the valve body 11 on a side of the lower cover 13 toward a side of the upper cover 12. Further, the valve chamber 113 is communicated with a valve hole 114 and has a valve-hole-side inner surface 113 a provided with an annular protruding portion 115 protruding along an outer periphery of the valve hole 114.
A leading end of the annular protruding portion 115 is, as shown in FIG. 2, provided with the valve seat 115 a to be brought into and out of contact with the valve element 14 which will be described below, and the annular protruding portion 115 is provided on its entire circumference on an inner diameter side with an annular diameter-decreasing surface 115 b in which an inner diameter of the annular protruding portion 115 decreases toward the valve hole 114. The annular diameter-decreasing surface 115 b and an inner peripheral surface of the valve hole 114 are connected by an annular recessed portion 117 which is provided coaxially with the valve hole 114 and provided in a drilled manner from the annular diameter-decreasing surface 115 b toward the valve hole 114.
Further, the valve body 11 is provided with an opening portion 116 provided in a drilled manner to be communicated with the valve hole 114 on an end face on a side of the upper cover 12. The opening portion 116 is divided into a downstream-side fluid chamber 116 a which is communicated with the output port 112 via the output passage 112 a and a pressure applying chamber 116 b by a diaphragm member 15 described below. Herein, a passage from the input port 111 to the output port 112 is constituted by the input passage 111 a, the valve chamber 113, the valve hole 114, the downstream-side fluid chamber 116 a, and the output passage 112 a.
The valve chamber 113 accommodates the columnar valve element 14 which is reciprocally movable in a direction parallel to an assembly direction of the upper cover 12 and the lower cover 13. The valve element 14 is provided in its axial center part with a diameter-increased portion 141 having a large diameter larger than other portions. The diameter-increased portion 141 has an end face facing the valve seat 115 a as a contact surface 141 a to be contacted with the valve seat 115 a as shown in FIG. 2. When the valve element 14 is moved toward the annular protruding portion 115, the contact surface 141 a comes to contact with the valve seat 115 a to shut off the passage from the input port 111 to the output port 112. On the other hand, when the valve element 14 is moved to an opposite side away from the annular protruding portion 115, the contact surface 141 a is separated from the valve seat 115 a to communicate the passage from the input port 111 to the output port 112.
Further, the contact surface 141 a is provided with a columnar step portion 143 protruding toward the valve hole 114 provided on an inner periphery side of the valve seat 115 a. The step portion 143 has a large diameter larger than an inner diameter of the valve hole 114 and is placed coaxially with the valve hole 114.
As shown in FIG. 3, in a vicinity of a first annular ridge 145 (one example of an annular ridge) formed by intersecting an outer peripheral surface of the step portion 143 with an end face (an upper end face) of the step portion 143 on the side of the valve hole 114, there is placed a third annular ridge 118 formed by intersecting an inner peripheral surface of the annular recessed portion 117 with the annular diameter-decreasing surface 115 b. The first annular ridge 145 and the third annular ridge 118 constitute a passage narrowing portion 17. A sectional area of the passage which has been narrowed by the contact surface 141 a and the valve seat 115 a is once increased by a space (first space) surrounded by the contact surface 141 a, the outer peripheral surface of the step portion 143, and the annular diameter-decreasing surface 115 b, and then narrowed again by the passage narrowing portion 17.
Further, the upper end face of the step portion 143 is, as shown in FIG. 2, provided with a columnar second step portion 144 having a small diameter smaller than an outer diameter of the step portion 143 in a protruding manner protruding toward the valve hole 114. This second step portion 144 is placed coaxially with the valve hole 114.
As shown in FIG. 3, in a vicinity of a second annular ridge 146 formed by intersecting an outer peripheral surface of the second step portion 144 with an end face (an upper end face) of the second step portion 144 on the side of the valve hole 114, there is placed a fourth annular ridge 119 formed by intersecting an inner surface of the annular recessed portion 117 on the side of the valve hole 114 with the inner peripheral surface of the valve hole 114. The thus formed second annular ridge 146 and the fourth annular ridge 119 constitute a second passage narrowing portion 18. A sectional area of the passage which is narrowed by the passage narrowing portion 17 is increased in a space (a second space) surrounded by the upper end face of the step portion 143, the outer peripheral surface of the second step portion 144, and the annular recessed portion 117, and then narrowed again by the second passage narrowing portion 18.
A clearance dimension C1 of the passage narrowing portion 17 in a radial direction of the first annular ridge 145 is preferably set such that a value of multiplying the clearance dimension C1 by a diametric dimension D1 (see FIG. 2) in a center part (a center axis CL11) of the valve seat 115 a of the annular protruding portion 115 is in a range from 0.6 to 1.2, and for example in the present embodiment, the thus multiplied value is set as 0.83.
Further, a clearance dimension C2 of the second passage narrowing portion 18 in a radial direction of the second annular ridge 146 is preferably set such that a value of multiplying the clearance dimension C2 by the diametric dimension D1 in the center part (the center axis CL11) of the valve seat 115 a of the annular protruding portion 115 is in a range from 0.6 to 1.2, and for example in the present embodiment, the thus multiplied value is set as 0.83.
It is also preferable to set a distance d1 from the center part (the center axis CL11) of the valve seat 115 a to the outer peripheral surface of the step portion 143 in a range from 0.4 mm to 0.8 mm, and for example in the present embodiment, the distance d1 is set as 0.5 mm. Further, it is preferable to set a distance d2 from the outer peripheral surface of the step portion 143 to the outer peripheral surface of the second step portion 144 is set in a range from 0.4 mm to 0.8 mm, and for example in the present embodiment, the distance d2 is set as 0.4 mm.
A distance d3 from the valve seat 115 a to the inner surface of the annular recessed portion 117 on the side of the valve hole 114 is preferably shorter than a distance d4 from the contact surface 141 a to an upper end face of the second step portion 144 by 0.03 mm to 0.13 mm, and for example in the present embodiment, the distance d3 is made shorter than the distance d4 by 0.1 mm.
Further, as shown in FIG. 1, the valve element 14 is provided with a diaphragm part 142 formed integrally with the valve element 14 on its end portion on a side of the lower cover 13, and attached to the diaphragm member 15 including a diaphragm part 152 on an end portion on a side of the upper cover 12. The diaphragm part 142 of the valve element 14 and the diaphragm part 152 of the diaphragm member 15 are elastically deformed in association with movement of the valve element 14 being brought into and out of contact with the valve seat 115 a. The valve element 14 and the diaphragm member 15 as liquid-contact components are made of, for example, fluorocarbon-related synthetic resin with high corrosion-resistance.
The diaphragm member 15 is provided with the diaphragm part 152 on an outer periphery of a center portion 151 to which the valve element 14 is attached and further provided with an annular fixing portion 153 along an outer periphery of the diaphragm part 152. The annular fixing portion 153 includes an annular cutout portion 153 c formed by cutting out an entire outer periphery of the annular fixing portion 153 from the outer peripheral surface to an end face (a lower end face) of the diaphragm part 152 on a side of the valve body 11 except an end portion (an upper end face 153 b) on a side of the upper cover 12, A press-fitting portion 153 a is provided on a lower end face of the annular fixing portion 153 such that the press-fitting portion 153 a is allowed to be press-fitted into the opening portion 116 of the valve body 11. The diaphragm member 15 press-fitted in the opening portion 116 is fixed by holding the annular fixing portion 153 with the upper cover 12 and the valve body 11 from both sides in a direction of bringing the valve element 14 into and out of contact with the valve seat 115 a. There is placed an O-ring 19 between the upper end face 153 b of the annular fixing portion 153 and the upper cover 12 to hermetically close the pressure applying chamber 116 b.
The annular cutout portion 153 c makes a thickness t11 of the valve body 11 thick by the cut-out part of the annular fixing portion 153 which is cut out by the annular cutout portion 153 c, thereby increasing strength of the valve body 11. Further, the annular cutout portion 153 c is formed to cut out the outer peripheral surface of the annular fixing portion 153 to the lower end face thereof other than the upper end face 153 b, and thus an area to be pressed against the upper cover 12 can be assured in the upper end face 153 b.
The lower cover 13 is provided with a spring accommodation chamber 131 on an opposite side from the valve chamber 113 via the diaphragm part 142. The spring accommodation chamber 131 accommodates a compression coil spring 16. The valve element 14 is constantly urged by an urging force of the compression coil spring 16 in a direction to be in contact with the valve seat 115 a. Thus, the contact surface 141 a of the valve element 14 remains to be contacted with the valve seat 115 a.
The upper cover 12 is provided with an introduction port 121 communicated with the pressure applying chamber 116 b, and the operation air is introduced into the pressure applying chamber 116 b through this introduction port 121. A position of the valve element 14 is adjusted by controlling pressure of the operation air in the pressure applying chamber 116 b.
It is now explained below about a manner of the control fluid flow in a vicinity of the contact surface 141 a of the valve element 14 and the valve seat 115 a of the regulator 1 having the above-mentioned configuration.
A conventional configuration which has a problem of cavitation is firstly explained in detail with reference to FIGS. 5 to 8.
FIG. 5 and FIG. 6 show pressure distribution maps each showing pressure distribution in the contact surface 141 a, the valve seat 115 a, and their vicinity in a case that a pressure difference of the control fluid between an input side and an output side of the regulator 1 is controlled to be about 200 kPa for example, so that a valve open degree is made to be about 0.035 mm. These pressure distribution maps show computational analytical results of pressure distribution by the Finite Element Method. FIG. 7 is a pressure distribution map showing pressure distribution in the contact surface 54 a, the valve seat 515, and their vicinity in a case where the regulator 50 according to the conventional art has a valve open degree of about 0.035 mm. This pressure distribution map shows computational analytical results of the pressure distribution by the Finite Element Method. In FIGS. 5 to 7, a part represented by dots with high density indicates a low-pressure part, and a part represented by dots with low density indicates a high-pressure part.
Herein, when the pressure on a downstream side of the valve seat 115 a is low, cavitation tends to easily occur, and for example, in a state in which the pressure declines to a pressure value P11 or less (see FIG. 8), for example, the cavitation tends to easily occur.
When the valve open degree is about 0.035 mm, the control fluid going through such small clearance has fast flow velocity. In a state where the flow velocity of the control fluid gets fast, the pressure of the control fluid on the downstream side of the valve seat 515 of the conventional regulator 50 is examined at three measurement points A21, A22, and A23 in the pressure distribution map as shown in FIG. 7, for example. Observation result shows that all the three points are under negative pressure state. This negative state is caused by pressure reduction due to increase in the flow velocity (the Bernoulli's principle). Further, pressure values on the measurement points A21, A22, and A23 are all less than or equal to the pressure value P11, thus it is confirmed that the cavitation easily occurs.
On the other hand, in the regulator 1 according to the present embodiment, as shown in FIG. 5, the valve element 14, the valve seat 115 a, and their vicinity are under negative pressure state, but at a measurement point A11 in the first space in the pressure distribution map corresponding to a position of the measurement point A21, the negative pressure state is relieved and the pressure value turns positive. This is clear from a graph shown in FIG. 8.
Further, also at a measurement point A12 in the second space in the pressure distribution map corresponding to the measurement point A22, the negative pressure state is relieved and the pressure value turns positive. This is also clear from the graph in FIG. 8.
At a measurement point A13 corresponding to the measurement point A23, the point is configured to be in the negative pressure state from the pressure distribution map, but the point is over the pressure value P11 as shown in the graph of FIG. 8, thus the state of generating the cavitation seems to be relieved.
Namely, in the regulator 1 of the present embodiment, all the measurement points A11, A12, and A13 indicate pressure more than or equal to the pressure value P11, so that the cavitation hardly occurs.
As mentioned above, the clearance dimension C1 of the passage narrowing portion 17 in the radial direction of the first annular ridge 145 is preferably set such that a value of multiplying the clearance dimension C1 by the diametric dimension D1 in the center part (the center axis CL11) of the valve seat 115 a of the annular protruding portion 115 is in a range of 0.6 to 1.2, and the clearance dimension C2 of the second passage narrowing portion 18 in the radial direction of the second annular ridge 146 is preferably set such that a value of multiplying the clearance dimension C2 by the diametric dimension D1 in the center part (the center axis CL11) of the valve seat 115 a of the annular protruding portion 115 is in a range of 0.6 to 1.2. For example, when the clearance dimension C2 is increased such that the value of multiplying the clearance dimension C2 by the diametric dimension D1 in the center part (the center axis CL11) of the valve seat 115 a of the annular protruding portion 115 is out of the range of 0.6 to 1.2, as shown in FIG. 6, the measurement point A11 in the first space and the measurement point A12 in the second space are each under the negative pressure state. The pressure values at the measurement point A11 and the measurement point A12 go below P11 as shown in FIG. 8 (Increase C2), thus there is a possibility of generating the cavitation.
As a regulator according to a first modified example shown in FIG. 12, the valve body 11 may be configured such that no annular recessed portion 117 is provided on the annular diameter-decreasing surface 115 b. In this example, the second space falls in the negative pressure state, but the first space and the valve hole 114 and its vicinity are maintained at a pressure value to an extent that no cavitation is generated, and accordingly, the configuration has an effect of suppressing generation of the cavitation.
Next, generation of the jet stream that has become a problem in the conventional art is explained with reference to FIGS. 9 to 11. FIG. 9 and FIG. 10 show distribution maps each illustrating flow velocity of the control fluid on the contact surface 141 a, the valve seat 115 a, and their vicinity when a pressure difference of the control fluid between the input side and the output side of the regulator 1 is controlled to be about 200 kPa for example, so that the valve open degree is made to be about 0.035 mm. The distribution maps represent computational analytical results of the flow velocity distribution by the Finite Element Method. FIG. 11 is a distribution map representing the flow velocity of the control fluid on the contact surface 54 a, the valve seat 515, and their vicinity when the conventional regulator 50 has the open degree of 0.035 mm and representing the computational analytical results of the flow velocity distribution by the Finite Element Method. In each of the FIGS. 9 to 11, a part represented by dots with high density indicates a part where the control fluid has fast flow velocity, and a part represented by dots with low density indicates a part where the control fluid has low flow velocity.
From the analytical results of the conventional regulator 50 indicated in FIG. 11, a part having the high flow velocity of the control fluid extends along the contact surface 54 a of the valve element 54. This demonstrates generation of the jet stream along the contact surface 54 a. The jet stream generated along the contact surface 54 a causes oscillation in the valve element 54.
On the other hand, in the regulator 1 according to the present embodiment, as shown in FIG. 9, a part with the high flow velocity of the control fluid extends from the clearance between the contact surface 141 a and the valve seat 115 a along the annular diameter-decreasing surface 115 b, so that the jet stream having been generated along the contact surface 54 a in the conventional regulator is resolved. This is because the step portion 143 guides the jet stream toward the valve hole 114 to separate the jet stream away from the valve element 14. This separation of the jet stream from the valve element 14 can suppress generation of the oscillation in the valve element 14 due to the jet stream.
Herein, as mentioned above, the distance d1 from the center part (the center axis CL11) of the valve seat 115 a to the outer peripheral surface of the step portion 143 is preferably in the range of 0.4 mm to 0.8 mm, and the distance d2 from the outer peripheral surface of the step portion 143 to the outer peripheral surface of the second step portion 144 is preferably in the range of 0.4 mm to 0.8 mm. For example, in a case where the distance d1 is increased out of the range of 0.4 mm to 0.8 mm, as shown in FIG. 10, the part with high fluid velocity of the control fluid extends along the contact surface 141 a of the valve element 14, and thus the jet stream fails to be separated away from the valve element 14. In this state, there is a possibility that generation of the oscillation in the valve element 14 due to the jet stream cannot be prevented.
In a second modified example of the present embodiment shown in FIGS. 13 and 14, a contact surface 241 a is provided in a diameter-increased portion 241 of a valve element 24, which is to be in contact with a valve seat 215 a provided on a leading end of an annular protruding portion 215 of a valve body 21, and this contact surface 214 a may be inclined with respect to an axial center of the valve element 24. Further, an inner surface of an annular recessed portion 217 on a side of a valve hole 214 and each end face (an upper end face) of a step portion 243 and a second step portion 244 on a side of the valve hole 214 may also be inclined.
In this example, in a vicinity of a first annular ridge 245 (one example of an annular ridge) where an outer peripheral surface of the step portion 243 intersects the upper end face of the step portion 243, there is placed a third annular ridge 218 where an inner peripheral surface of the annular recessed portion 217 intersects the annular diameter-decreasing surface 215 b, and the first annular ridge 245 and the third annular ridge 218 constitute a passage narrowing portion 27. Further, in a vicinity of the second annular ridge 246 where an outer peripheral surface of the second step portion 244 intersects an upper end face of the second step portion 244, there is placed a fourth annular ridge 219 where the inner surface of the annular recessed portion 217 on a side of the valve hole 214 intersects an inner peripheral surface of the valve hole 214, and the second annular ridge 246 and the fourth annular ridge 219 constitute a second passage narrowing portion 28.
Further, as a third modified example shown in FIGS. 15 and 16, a third step portion 345 and a second annular recessed portion 318 may be provided to constitute a third passage narrowing portion 39.
A valve body 31 is firstly explained. The valve body 31 includes an annular protruding portion 315 having a valve seat 315 a on its leading end, and further includes an annular diameter-decreasing surface 315 b and an annular recessed portion 317 as similar to the above-mentioned first embodiment. The valve body 31 is provided with the second annular recessed portion 318 formed in a drilled manner from an inner surface of the annular recessed portion 317 on a side of the valve hole 314.
Next, a valve element 34 is explained. The valve element 34 includes a diameter-increased portion 341 which is provided with a contact surface 341 a to be in contact with a valve seat 315 a and provided with a step portion 343 protruding from the contact surface 341 a toward the valve hole 314 and a second step portion 344 protruding from an end face (an upper end face) of the step portion 343 on the side of the valve hole 314 toward the valve hole 314 as similar to the above-mentioned first embodiment, A third step portion 345 is formed to protrude from an end face (an upper end face) of the second step portion 344 on the side of the valve hole 314 toward the valve hole 314. The third step portion 345 has a diameter smaller than the second step portion 344 and is placed coaxially with the valve hole 314.
In this configuration, in a vicinity of a first annular ridge 346 (one example of an annular ridge) where an outer peripheral surface of the step portion 343 intersects the upper end face of the step portion 343, there is placed a third annular ridge 319 formed by intersecting an inner peripheral surface of the annular recessed portion 317 with the annular diameter-decreasing surface 315 b, and the first annular ridge 346 and the third annular ridge 319 constitute a passage narrowing portion 37. Further, in a vicinity of the second annular ridge 347 where an outer peripheral surface of the second step portion 344 intersects the upper end face of the second step portion 344, there is placed a fourth annular ridge 320 where an inner surface of the annular recessed portion 317 on the side of the valve hole 314 intersects an inner peripheral surface of the second annular recessed portion 318, and the second annular ridge 347 and the fourth annular ridge 320 constitute a second passage narrowing portion 38. Furthermore, in a vicinity of a fifth annular ridge 348 where an outer peripheral surface of the third step portion 345 intersects an end face of the third step portion 345 on a side of the valve hole 314, there is placed a sixth annular ridge 322 where an inner surface of the second annular recessed portion 318 on the side of the valve hole 314 intersects the inner peripheral surface of the valve hole 314, and the fifth annular ridge 348 and the sixth annular ridge 322 constitute a third passage narrowing portion 39.
As mentioned above, according to the regulator 1 of the present embodiment, (1) the regulator 1 is configured to comprise: a valve element 14; a valve chamber 113 on an upstream side accommodating the valve element 14; a valve hole 114 on a downstream side communicated with the valve chamber 113; and an annular protruding portion 115 protruding from an inner surface of the valve chamber 113 on a side of the valve hole 114 along an outer periphery of the valve hole 114, the annular protruding portion 115 having a leading end provided with a valve seat 115 a, the regulator 1 being configured to perform fluid control by bringing the valve element 14 into and out of contact with the valve seat 115 a, wherein the annular protruding portion 115 is provided on its entire circumference on an inner diameter side with an annular diameter-decreasing surface 115 b decreasing an inner diameter of the annular protruding portion 115 toward the valve hole 114, the valve element 14 includes a contact surface 141 a to be in contact with the valve seat 115 and a columnar step portion 143 provided coaxially with the valve hole 114 with a large diameter larger than an inner diameter of the valve hole 114, the step portion 143 protruding from the contact surface 141 a toward the valve hole 114 on an inner peripheral side of the valve seat 115 a, and a first annular ridge 145 formed by intersecting an outer peripheral surface of the step portion 143 with an end face of the step portion 143 on a side of the valve hole 114 is placed in a vicinity of the annular diameter-decreasing surface 115 b to form a passage narrowing portion 17.
According to the regulator 1 in the above-mentioned (1), a fluid flowing from the valve chamber 113 to the valve hole 114 passes through a portion narrowed its passage area by the valve element 14 and the valve seat 115 a, a portion widened its passage area by a space (first space) surrounded by the annular diameter-decreasing surface 115 b, the contact surface 141 a, and the outer peripheral surface of the step portion 143, and a portion narrowed its passage area by the passage narrowing portion 17 in this order. Thus, the applicant has confirmed from experiments that a negative pressure state on the downstream side of the valve seat 115 a is relaxed.
Relaxation of the negative pressure state can suppress generation of the cavitation, and even if the cavitation occurs, a term from generation to disappearance of the foam can be shortened. Accordingly, it is possible to suppress generation of the oscillation caused by the cavitation, thereby suppressing noises caused by the oscillation.
Further, the step portion 143 protruding from the contact surface 141 a toward the valve hole 114 guides the jet stream toward the valve hole 114, so that the jet stream is separated away from the valve element 14. This can achieve suppression of the oscillation in the valve element caused by the jet stream, thereby achieving suppression of the noises.
(2) In the regulator 1 described in the above (1), the passage narrowing portion 17 is configured such that a value of multiplying a clearance dimension C1 in a radial direction of the first annular ridge 145 by a diametric dimension D1 of the center part (the center axis CL11) of the valve seat 115 a of the annular protruding portion 115 is in a range of 0.6 to 1.2.
According to the regulator 1 in the above (2), the applicant has confirmed by experiments that the regulator 1 can achieve better effect of suppressing the oscillation caused by the cavitation.
(3) In the regulator 1 described in the above (1) or (2), a distance from the center part (the center axis CL) of the valve seat 115 a to the outer peripheral surface of the step portion 143 is in a range from 0.4 mm to 0.8 mm.
According to the regulator 1 in the above (3), the applicant has confirmed by experiments that the regulator 1 can achieve better effect of suppressing the oscillation caused by the jet stream.
(4) In the regulator 1 described in any one of the above (1) to (3), the valve element 14 includes a columnar second step portion 144 provided coaxially with the valve hole 114, the second step portion 144 protruding from an end face of the step portion 143 on a side of the valve hole 114 toward the valve hole 114 with a diameter smaller than the outer diameter of the step portion 143, and a second annular ridge 146 formed by intersecting an outer peripheral surface of the second step portion 144 with an end face of the second step portion 144 on the side of the valve hole 114 is placed in a vicinity of an inner surface of the valve hole 114 to form a second passage narrowing portion 18.
According to the regulator 1 described in the above (4), the control fluid flowing from the valve chamber 113 to the valve hole 114 passes through a portion narrowed its passage area by the valve element 14 and the valve seat 115 a, a portion widened its passage area by a space (a first space) surrounded by the annular diameter-decreasing surface 115 b, the contact surface 141 a, and the outer peripheral surface of the step portion 143, and a portion narrowed its passage area by the passage narrowing portion 17. Thereafter, the control fluid passes further through a portion widened its passage area by the end face of the step portion 143 on a side of the valve hole 114 and the outer peripheral surface of the second step portion 144 and a portion narrowed its passage area by the second passage narrowing portion 18 in this order. Accordingly, the applicant has confirmed by experiments that the negative pressure state on the downstream side of the valve seat 115 a is further relaxed.
This relaxation in the negative pressure state can suppress generation of the cavitation. Suppression of the cavitation further suppresses the oscillation caused by the cavitation, and thus it is possible to prevent generation of noises due to the oscillation.
(5) In the regulator 1 described in the above (4), the second passage narrowing portion 18 is configured such that a value of multiplying a clearance dimension C2 in a radial direction of the second annular ridge 146 by the diametric dimension D1 of the center part (the central axis CL) of the valve seat 115 a of the annular protruding portion 115 is in a range of 0.6 to 1.2.
According to the regulator described in the above (5), the applicant has confirmed by experiments that the fluid control valve can achieve better effect of suppressing the oscillation caused by the cavitation.
(6) In the regulator 1 described in the above (4) or (5), the annular diameter-decreasing surface 115 b and an inner peripheral surface of the valve hole 114 are connected via an annular recessed portion 117 provided coaxially with the valve hole 114 and formed in a drilled manner from the annular diameter-decreasing surface 115 b toward the valve hole 114, a third annular ridge 118 formed by intersecting the inner peripheral surface of the annular recessed portion 117 with the annular diameter-decreasing surface 115 b is placed in a vicinity of the first annular ridge 145 to form the passage narrowing portion 17 with the first annular ridge 145, and a fourth annular ridge 119 formed by an inner surface of the annular recessed portion 117 on a side of the valve hole 114 intersecting the inner peripheral surface of the valve hole 114 is placed in a vicinity of the second annular ridge 146 to form the second passage narrowing portion 18 with the second annular ridge 146.
According to the regulator 1 described in the above (6), the applicant has confirmed by experiments that the annular recessed portion 117 widens a space (a second space) between the passage narrowing portion 117 and the second passage narrowing portion 18 to suppress the oscillation caused by the cavitation, thus achieving enhanced performance in the regulator 1.
(7) In the regulator 1 in the above (6), a distance from the center part (the central axis CL11) of the valve seat 115 a to the inner surface of the annular recessed portion 117 on the side of the valve hole 114 is smaller than a distance from the contact surface 141 a to an end face of the second step portion 144 on the side of the valve hole 114 by 0.03 mm to 0.13 mm.
According to the regulator 1 described in the above (7), even at a valve open degree (for example, about 0.035 mm) having a tendency of generating the negative pressure region on the downstream side of the valve seat 115 a, the fourth annular ridge 119 is assuredly positioned in the vicinity of the second annular ridge 146 to form the second passage narrowing portion 18, so that the regulator 1 can achieve better effect of suppressing the oscillation caused by the cavitation.
(8) In the regulator 1 in any one of the above (4) to (7), a distance from the outer peripheral surface of the step portion 143 to an outer peripheral surface of the second step portion 144 is in a range from 0.4 mm to 0.8 mm.
According to the regulator 1 described in the above (8), the applicant has confirmed by experiments that the jet stream is assuredly introduced to the valve hole 114, so that the regulator 1 can achieve better effect of suppressing the oscillation of the valve element 14 caused by the jet stream.
(9) In the regulator 1 described in any one of the above (1) to (8), the regulator 1 comprises: a valve body 11 provided inside with the valve chamber 113 and the valve hole 114; an upper cover 12 overlapped above the valve body 11 in a direction parallel to a contact and separation direction of the valve element 14; and a diaphragm member 15 connected in its center portion 151 with the valve element 14 and provided with a diaphragm part 152 which is elastically deformed during contact and separation operation of the valve element 14 on an outer periphery of the center portion 151, wherein, the valve body 11 has an opening portion 116 attached with the diaphragm member 15 on a side of the upper cover 12, the diaphragm member 15 is provided with an annular fixing portion 153 along an outer periphery of the diaphragm part 152, the diaphragm member 15 attached to the opening portion 116 by press-fitting the annular fixing portion 153 into the opening portion 116 is fixed in a manner that the annular fixing portion 153 is held by the upper cover 12 and the valve body 11 from both sides in the contact and separation direction, and the annular fixing portion 153 is provided with an annular cutout portion 153 c formed by cutting out an entire outer circumference from the outer peripheral surface to an end face on a side of the valve body 11 except an end portion on the side of the upper cover 12.
According to the regulator 1 described in the above (9), the annular fixing portion 153 held by the upper cover 12 and the valve body 11 from both sides in a contact and separation direction is provided with the annular cutout portion 153 c formed by cutting a part from the outer peripheral surface to the end face on the side of the valve body 11 of the annular fixing portion 153 except the end portion on the side of the upper cover 12 along the entire outer circumference of the annular fixing portion 153, and thus the upper end face 153 b of the annular fixing portion 153 on the side of the upper cover 12 can assure an area wide enough to be pressed against the upper cover 12. The annular fixing portion 153 can thus have the area wide enough to be pressed against the upper cover 12, thus achieving assured fixation of the diaphragm member 15, so that the oscillation generated in the valve element 14 connected to the diaphragm member 15 can be suppressed. Further, the annular fixing portion 153 is cut out by the annular cutout portion 153 c, and thus the valve body 11 can have enough thickness, thereby enhancing strength of the valve body 11.
The above-mentioned embodiments are only illustration and give no limitation to the present disclosure. Therefore, the present disclosure can be made with various improvements and modifications without departing from the scope of the disclosure.
For example, in the present embodiment, the first annular ridge 145, the second annular ridge 146, the third annular ridge 118, and the fourth annular ridge 119 are each of an edge-like shape, but alternatively, each of these ridges may be beveled to be a curved surface or a C-shaped curved surface.
REFERENCE SIGNS LIST
    • 1 Regulator (one example of fluid control valve)
    • 14 Valve element
    • 17 Passage narrowing portion
    • 113 Valve chamber
    • 114 Valve hole
    • 115 Annular protruding portion
    • 115 a Valve seat
    • 115 b Annular diameter-decreasing surface
    • 143 Step portion
    • 145 First annular ridge (one example of annular ridge)

Claims (9)

What is claimed is:
1. A fluid control valve comprising:
a valve element;
a valve chamber on an upstream side accommodating the valve element;
a valve hole on a downstream side communicated with the valve chamber; and
an annular protruding portion protruding from an inner surface of the valve chamber on a side of the valve hole along an outer periphery of the valve hole, the annular protruding portion having a leading end provided with a valve seat, the fluid control valve being configured to perform fluid control by bringing the valve element into and out of contact with the valve seat, wherein
the annular protruding portion is provided on its entire circumference on an inner diameter side with an annular diameter-decreasing surface decreasing an inner diameter of the annular protruding portion toward the valve hole,
the valve element includes a contact surface to be in contact with the valve seat and a columnar step portion provided coaxially with the valve hole with a large diameter larger than an inner diameter of the valve hole, the step portion protruding from the contact surface toward the valve hole on an inner peripheral side of the valve seat,
an annular ridge formed by intersecting an outer peripheral surface of the step portion with an end face of the step portion on a side of the valve hole is placed in a vicinity of the annular diameter-decreasing surface to form a passage narrowing portion,
the valve element includes a columnar second step portion provided coaxially with the valve hole, the second step portion protruding from an end face of the step portion on a side of the valve hole toward the valve hole with a diameter smaller than the outer diameter of the step portion, and
a second annular ridge formed by intersecting an outer peripheral surface of the second step portion with an end face of the second step portion on the side of the valve hole is placed in a vicinity of an inner surface of the valve hole to form a second passage narrowing portion.
2. The fluid control valve according to claim 1, wherein the passage narrowing portion is configured such that a value of multiplying a clearance dimension in a radial direction of the annular ridge by a diametric dimension of a center part of the valve seat of the annular protruding portion is in a range of 0.6 to 1.2.
3. The fluid control valve according to claim 2, wherein a distance from the center part of the valve seat to the outer peripheral surface of the step portion is in a range from 0.4 mm to 0.8 mm.
4. The fluid control valve according to claim 1, wherein a distance from a center part of the valve seat to the outer peripheral surface of the step portion is in a range from 0.4 mm to 0.8 mm.
5. The fluid control valve according to claim 1, wherein the second passage narrowing portion is configured such that a value of multiplying a clearance dimension in a radial direction of the second annular ridge by the diametric dimension of a center part of the valve seat of the annular protruding portion is in a range of 0.6 to 1.2.
6. The fluid control valve according to claim 1, wherein
the annular diameter-decreasing surface and an inner peripheral surface of the valve hole are connected via an annular recessed portion provided coaxially with the valve hole and formed in a drilled manner from the annular diameter-decreasing surface toward the valve hole,
a third annular ridge formed by intersecting the inner peripheral surface of the annular recessed portion with the annular diameter-decreasing surface is placed in a vicinity of the annular ridge to form the passage narrowing portion with the annular ridge, and
a fourth annular ridge formed by an inner surface of the annular recessed portion on a side of the valve hole intersecting the inner peripheral surface of the valve hole is placed in a vicinity of the second annular ridge to form the second passage narrowing portion with the second annular ridge.
7. The fluid control valve according to claim 6, wherein a distance from the valve seat to the inner surface of the annular recessed portion on the side of the valve hole is smaller than a distance from the contact surface to an end face of the second step portion on the side of the valve hole by 0.03 mm to 0.13 mm.
8. The fluid control valve according to claim 1, wherein a distance from the outer peripheral surface of the step portion to an outer peripheral surface of the second step portion is in a range from 0.4 mm to 0.8 mm.
9. The fluid control valve according to claim 1, wherein
the fluid control valve comprises:
a valve body provided inside with the valve chamber and the valve hole;
a cover member overlapped above the valve body in a direction parallel to a contact and separation direction of the valve element; and
a diaphragm member connected in its center portion with the valve element and provided with a diaphragm part which is elastically deformed during contact and separation operation of the valve element on an outer periphery of the center portion, wherein,
the valve body has an opening portion attached with the diaphragm member on a side of the cover member,
the diaphragm member is provided with an annular fixing portion along an outer periphery of the diaphragm part,
the diaphragm member attached to the opening portion by press-fitting the annular fixing portion into the opening portion is fixed in a manner that the annular fixing portion is held by the cover member and the valve body from both sides in the contact and separation direction, and
the annular fixing portion is provided with an annular cutout portion formed by cutting out an entire outer circumference from the outer peripheral surface to an end face on a side of the valve body except an end portion on the side of the cover member.
US17/099,336 2019-11-21 2020-11-16 Fluid control valve Active US11199268B2 (en)

Applications Claiming Priority (6)

Application Number Priority Date Filing Date Title
JPJP2019-210288 2019-11-21
JP2019210288 2019-11-21
JP2019-210288 2019-11-21
JP2020-188673 2020-11-12
JP2020188673A JP7472000B2 (en) 2019-11-21 2020-11-12 Fluid Control Valve
JPJP2020-188673 2020-11-12

Publications (2)

Publication Number Publication Date
US20210156483A1 US20210156483A1 (en) 2021-05-27
US11199268B2 true US11199268B2 (en) 2021-12-14

Family

ID=75906483

Family Applications (1)

Application Number Title Priority Date Filing Date
US17/099,336 Active US11199268B2 (en) 2019-11-21 2020-11-16 Fluid control valve

Country Status (3)

Country Link
US (1) US11199268B2 (en)
KR (1) KR102425974B1 (en)
CN (1) CN112824721B (en)

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE102021134320A1 (en) * 2021-12-22 2023-06-22 Gemü Gebr. Müller Apparatebau Gmbh & Co. Kommanditgesellschaft Plug diaphragm for process valve
KR102594736B1 (en) 2023-07-14 2023-10-25 손주현 Height-adjustable paper package

Citations (12)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3410524A (en) * 1966-08-01 1968-11-12 Richard E Self Control valve
US4280680A (en) * 1977-08-16 1981-07-28 Carel W. P. Niemand Fluid valves
US4487222A (en) * 1983-05-03 1984-12-11 Armco, Inc. Poppet type fluid valve with replaceable wear surface
US5826336A (en) * 1994-08-23 1998-10-27 Johnson Service Company Process for the production of series-produced valves used in heating, ventilating and air-conditioning systems
US6039071A (en) * 1997-05-27 2000-03-21 Smc Kabushiki Kaisha Valve seal mechanism
US20030098074A1 (en) * 2001-11-27 2003-05-29 Toshihiro Kayahara Valve
US20060197049A1 (en) * 2003-04-03 2006-09-07 Takeshi Hamada Fluid operating valve
US20090235993A1 (en) 2008-03-19 2009-09-24 Ckd Corporation Flow rate control device
US20140034155A1 (en) * 2012-07-31 2014-02-06 Fairchild Industrial Products Company Valve Seat For A Pressure Regulator
US20160018007A1 (en) * 2014-07-21 2016-01-21 Samson Ag Control valve
US9388773B2 (en) * 2013-11-14 2016-07-12 Aisan Kogyo Kabushiki Kaisha Exhaust gas recirculation valve
WO2018172705A1 (en) * 2017-03-23 2018-09-27 Valeo Systemes De Controle Moteur Valve for regulating a fluid flow rate

Family Cites Families (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN2425252Y (en) * 2000-06-12 2001-03-28 马建然 Stepped multi-stage throtte pressure-reducing valve
JP5113774B2 (en) * 2009-01-23 2013-01-09 Ｃｋｄ株式会社 Fluid control valve
JP5409290B2 (en) * 2009-11-18 2014-02-05 Ｃｋｄ株式会社 Fluid control valve
CN103334975B (en) * 2013-06-18 2015-10-28 福建海源自动化机械股份有限公司 A kind of press charging device of multiple flow passages complex controll
JP2016037929A (en) * 2014-08-08 2016-03-22 株式会社テージーケー Control valve

Patent Citations (13)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3410524A (en) * 1966-08-01 1968-11-12 Richard E Self Control valve
US4280680A (en) * 1977-08-16 1981-07-28 Carel W. P. Niemand Fluid valves
US4487222A (en) * 1983-05-03 1984-12-11 Armco, Inc. Poppet type fluid valve with replaceable wear surface
US5826336A (en) * 1994-08-23 1998-10-27 Johnson Service Company Process for the production of series-produced valves used in heating, ventilating and air-conditioning systems
US6039071A (en) * 1997-05-27 2000-03-21 Smc Kabushiki Kaisha Valve seal mechanism
US20030098074A1 (en) * 2001-11-27 2003-05-29 Toshihiro Kayahara Valve
US20060197049A1 (en) * 2003-04-03 2006-09-07 Takeshi Hamada Fluid operating valve
US20090235993A1 (en) 2008-03-19 2009-09-24 Ckd Corporation Flow rate control device
JP2009230259A (en) 2008-03-19 2009-10-08 Ckd Corp Flow controller
US20140034155A1 (en) * 2012-07-31 2014-02-06 Fairchild Industrial Products Company Valve Seat For A Pressure Regulator
US9388773B2 (en) * 2013-11-14 2016-07-12 Aisan Kogyo Kabushiki Kaisha Exhaust gas recirculation valve
US20160018007A1 (en) * 2014-07-21 2016-01-21 Samson Ag Control valve
WO2018172705A1 (en) * 2017-03-23 2018-09-27 Valeo Systemes De Controle Moteur Valve for regulating a fluid flow rate

Also Published As

Publication number Publication date
CN112824721A (en) 2021-05-21
US20210156483A1 (en) 2021-05-27
CN112824721B (en) 2023-03-24
KR102425974B1 (en) 2022-07-28
KR20210062571A (en) 2021-05-31

Similar Documents

Publication Publication Date Title
US11199268B2 (en) Fluid control valve
CN109477586B (en) Orifice built-in valve and pressure type flow rate control device
KR101017283B1 (en) Flow control valve
EP2851591B1 (en) Relief valve
JP6273093B2 (en) Check valve
US20080060378A1 (en) Ejector and refrigerant cycle device with ejector
JPS6088866A (en) Fuel jet apparatus
JP4625730B2 (en) Pressure control valve
US10989269B2 (en) Anti-vibration device
CN109854428B (en) Axial fluid pressure regulator
US20200300383A1 (en) Fluid control valve
CN106979337B (en) Control member for fluid control device
JP7472000B2 (en) Fluid Control Valve
US20170130862A1 (en) Pressure reducing valve
US20140216574A1 (en) Relief valve
JP2018100645A (en) Evaporated fuel treatment device
EP1455084B1 (en) Check valve for fuel pump
JP2007321677A (en) Fuel injection valve
JP2005163836A (en) Connector with built-in valve
JP2001159465A (en) Structure of seal part
JP2019039333A (en) Pressure regulator
US20200102922A1 (en) Fuel injection valve
JPH07180782A (en) Solenoid valve
JP2018076792A (en) Fuel injection valve
RU2090772C1 (en) Flow regulator

Legal Events

Date Code Title Description
AS Assignment

Owner name: CKD CORPORATION, JAPAN

Free format text: ASSIGNMENT OF ASSIGNORS INTEREST;ASSIGNORS:YAMADA, KYOMI;NABEI, TATSUSHI;REEL/FRAME:054438/0498

Effective date: 20201019

FEPP Fee payment procedure

Free format text: ENTITY STATUS SET TO UNDISCOUNTED (ORIGINAL EVENT CODE: BIG.); ENTITY STATUS OF PATENT OWNER: LARGE ENTITY

STPP Information on status: patent application and granting procedure in general

Free format text: DOCKETED NEW CASE - READY FOR EXAMINATION

STPP Information on status: patent application and granting procedure in general

Free format text: NON FINAL ACTION MAILED

STPP Information on status: patent application and granting procedure in general

Free format text: RESPONSE TO NON-FINAL OFFICE ACTION ENTERED AND FORWARDED TO EXAMINER

STPP Information on status: patent application and granting procedure in general

Free format text: NOTICE OF ALLOWANCE MAILED -- APPLICATION RECEIVED IN OFFICE OF PUBLICATIONS

STPP Information on status: patent application and granting procedure in general

Free format text: PUBLICATIONS -- ISSUE FEE PAYMENT VERIFIED

STCF Information on status: patent grant

Free format text: PATENTED CASE