US10954971B2 - Servovalve - Google Patents
Servovalve Download PDFInfo
- Publication number
- US10954971B2 US10954971B2 US15/950,213 US201815950213A US10954971B2 US 10954971 B2 US10954971 B2 US 10954971B2 US 201815950213 A US201815950213 A US 201815950213A US 10954971 B2 US10954971 B2 US 10954971B2
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- fluid
- valve spool
- spool
- valve
- servovalve
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- 239000012530 fluid Substances 0.000 claims abstract description 89
- 230000004044 response Effects 0.000 claims abstract description 13
- 238000012546 transfer Methods 0.000 claims abstract description 10
- 238000000034 method Methods 0.000 claims description 3
- 230000006835 compression Effects 0.000 claims description 2
- 238000007906 compression Methods 0.000 claims description 2
- 230000008602 contraction Effects 0.000 claims description 2
- 230000000903 blocking effect Effects 0.000 claims 2
- 238000006073 displacement reaction Methods 0.000 claims 2
- 238000011109 contamination Methods 0.000 description 3
- 238000013461 design Methods 0.000 description 2
- 238000004378 air conditioning Methods 0.000 description 1
- 230000004075 alteration Effects 0.000 description 1
- 230000000712 assembly Effects 0.000 description 1
- 238000000429 assembly Methods 0.000 description 1
- 238000005452 bending Methods 0.000 description 1
- 230000000740 bleeding effect Effects 0.000 description 1
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- 230000003247 decreasing effect Effects 0.000 description 1
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- 230000005291 magnetic effect Effects 0.000 description 1
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- 238000012986 modification Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 230000007935 neutral effect Effects 0.000 description 1
- 238000004804 winding Methods 0.000 description 1
Images
Classifications
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- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F15—FLUID-PRESSURE ACTUATORS; HYDRAULICS OR PNEUMATICS IN GENERAL
- F15B—SYSTEMS ACTING BY MEANS OF FLUIDS IN GENERAL; FLUID-PRESSURE ACTUATORS, e.g. SERVOMOTORS; DETAILS OF FLUID-PRESSURE SYSTEMS, NOT OTHERWISE PROVIDED FOR
- F15B13/00—Details of servomotor systems ; Valves for servomotor systems
- F15B13/02—Fluid distribution or supply devices characterised by their adaptation to the control of servomotors
- F15B13/04—Fluid distribution or supply devices characterised by their adaptation to the control of servomotors for use with a single servomotor
- F15B13/0401—Valve members; Fluid interconnections therefor
- F15B13/0402—Valve members; Fluid interconnections therefor for linearly sliding valves, e.g. spool valves
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- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F15—FLUID-PRESSURE ACTUATORS; HYDRAULICS OR PNEUMATICS IN GENERAL
- F15B—SYSTEMS ACTING BY MEANS OF FLUIDS IN GENERAL; FLUID-PRESSURE ACTUATORS, e.g. SERVOMOTORS; DETAILS OF FLUID-PRESSURE SYSTEMS, NOT OTHERWISE PROVIDED FOR
- F15B13/00—Details of servomotor systems ; Valves for servomotor systems
- F15B13/02—Fluid distribution or supply devices characterised by their adaptation to the control of servomotors
- F15B13/04—Fluid distribution or supply devices characterised by their adaptation to the control of servomotors for use with a single servomotor
- F15B13/042—Fluid distribution or supply devices characterised by their adaptation to the control of servomotors for use with a single servomotor operated by fluid pressure
- F15B13/043—Fluid distribution or supply devices characterised by their adaptation to the control of servomotors for use with a single servomotor operated by fluid pressure with electrically-controlled pilot valves
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- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F15—FLUID-PRESSURE ACTUATORS; HYDRAULICS OR PNEUMATICS IN GENERAL
- F15B—SYSTEMS ACTING BY MEANS OF FLUIDS IN GENERAL; FLUID-PRESSURE ACTUATORS, e.g. SERVOMOTORS; DETAILS OF FLUID-PRESSURE SYSTEMS, NOT OTHERWISE PROVIDED FOR
- F15B13/00—Details of servomotor systems ; Valves for servomotor systems
- F15B13/02—Fluid distribution or supply devices characterised by their adaptation to the control of servomotors
- F15B13/04—Fluid distribution or supply devices characterised by their adaptation to the control of servomotors for use with a single servomotor
- F15B13/042—Fluid distribution or supply devices characterised by their adaptation to the control of servomotors for use with a single servomotor operated by fluid pressure
- F15B13/043—Fluid distribution or supply devices characterised by their adaptation to the control of servomotors for use with a single servomotor operated by fluid pressure with electrically-controlled pilot valves
- F15B13/0436—Fluid distribution or supply devices characterised by their adaptation to the control of servomotors for use with a single servomotor operated by fluid pressure with electrically-controlled pilot valves the pilot valves being of the steerable jet type
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- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F15—FLUID-PRESSURE ACTUATORS; HYDRAULICS OR PNEUMATICS IN GENERAL
- F15B—SYSTEMS ACTING BY MEANS OF FLUIDS IN GENERAL; FLUID-PRESSURE ACTUATORS, e.g. SERVOMOTORS; DETAILS OF FLUID-PRESSURE SYSTEMS, NOT OTHERWISE PROVIDED FOR
- F15B13/00—Details of servomotor systems ; Valves for servomotor systems
- F15B13/02—Fluid distribution or supply devices characterised by their adaptation to the control of servomotors
- F15B13/04—Fluid distribution or supply devices characterised by their adaptation to the control of servomotors for use with a single servomotor
- F15B13/042—Fluid distribution or supply devices characterised by their adaptation to the control of servomotors for use with a single servomotor operated by fluid pressure
- F15B13/043—Fluid distribution or supply devices characterised by their adaptation to the control of servomotors for use with a single servomotor operated by fluid pressure with electrically-controlled pilot valves
- F15B13/0438—Fluid distribution or supply devices characterised by their adaptation to the control of servomotors for use with a single servomotor operated by fluid pressure with electrically-controlled pilot valves the pilot valves being of the nozzle-flapper type
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- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
- F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
- F16K31/00—Actuating devices; Operating means; Releasing devices
- F16K31/004—Actuating devices; Operating means; Releasing devices actuated by piezoelectric means
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
- F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
- F16K31/00—Actuating devices; Operating means; Releasing devices
- F16K31/004—Actuating devices; Operating means; Releasing devices actuated by piezoelectric means
- F16K31/007—Piezoelectric stacks
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
- F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
- F16K31/00—Actuating devices; Operating means; Releasing devices
- F16K31/12—Actuating devices; Operating means; Releasing devices actuated by fluid
- F16K31/122—Actuating devices; Operating means; Releasing devices actuated by fluid the fluid acting on a piston
- F16K31/1223—Actuating devices; Operating means; Releasing devices actuated by fluid the fluid acting on a piston one side of the piston being acted upon by the circulating fluid
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
- F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
- F16K31/00—Actuating devices; Operating means; Releasing devices
- F16K31/12—Actuating devices; Operating means; Releasing devices actuated by fluid
- F16K31/122—Actuating devices; Operating means; Releasing devices actuated by fluid the fluid acting on a piston
- F16K31/124—Actuating devices; Operating means; Releasing devices actuated by fluid the fluid acting on a piston servo actuated
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
- F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
- F16K31/00—Actuating devices; Operating means; Releasing devices
- F16K31/004—Actuating devices; Operating means; Releasing devices actuated by piezoelectric means
- F16K31/007—Piezoelectric stacks
- F16K31/008—Piezoelectric stacks for sliding valves
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
- Y10T137/00—Fluid handling
- Y10T137/8593—Systems
- Y10T137/86493—Multi-way valve unit
- Y10T137/86574—Supply and exhaust
- Y10T137/86582—Pilot-actuated
- Y10T137/86614—Electric
Definitions
- the present disclosure relates to servovalves used to transfer quantities of, or manage the flow of fluid e.g. air.
- Servovalves find a wide range of applications for controlling air or other fluid flow to effect driving or control of another part e.g. an actuator.
- a servovalve assembly includes a drive assembly e.g. a motor controlled by a control current which controls flow to a valve e.g. an air valve to control an actuator.
- a servovalve transforms an input control signal into movement of an actuator cylinder.
- the actuator controls e.g. an air valve.
- a servovalve acts as a controller, which commands the actuator, which changes the position of an air valve's (e.g. a so-called butterfly valve's) flow modulating feature.
- Such mechanisms are used, for example, in various parts of aircraft where the management of air/fluid flow is required, such as in engine bleeding systems, anti-ice systems, air conditioning systems and cabin pressure systems.
- Servovalves are widely used to control the flow and pressure of pneumatic and hydraulic fluids to an actuator, and in applications where accurate position or flow rate control is required.
- Some examples of application are aircraft, automotive systems and in the space industry.
- servovalve systems operate by obtaining pressurised fluid from a high pressure source which is transmitted through a load from which the fluid is output as a control fluid.
- Various types of servovalves are known—see e.g. GB 2104249, US 2015/0047729 and U.S. Pat. No. 9,309,900.
- Electrohydraulic servovalves can have a first stage with a motor, e.g. an electrical or electromagnetic force motor or torque motor, controlling flow of a hydraulic fluid to drive a valve member e.g. a spool valve of a second stage, which, in turn, can control flow of hydraulic fluid to an actuator for driving a load.
- the motor can operate to position a moveable member, such as a flapper, in response to an input drive signal or control current, to drive the second stage valve member e.g. a spool valve.
- servovalves are often required to operate at various pressures and temperatures.
- fast acting air valve actuators relatively large flows are required depending on the size of the actuator and the valve slew rate.
- large valve orifice areas are required.
- ‘flapper’ type servovalves problems arise when dealing with large flows due to the fact that flow force acts in the direction of the flapper movement and the motor is forced to overcome the flow forces.
- clevis-like metering valves such as described in U.S. Pat. Nos. 4,046,061 and 6,786,238, the flow forces, proportional to the flow, act simultaneously in opposite directions so that the clevis is balanced and centered.
- the clevis however, needs to be big due to the requirement for bigger orifices to handle larger flows.
- Jet pipe servovalves provide an alternative to ‘flapper’-type servovalves. Jet pipe servovalves are usually larger than flapper type servovalves but are less sensitive to contamination.
- fluid is provided via a jet pipe to a nozzle which directs a stream of fluid at a receiver. When the nozzle is centered—i.e. no current from the motor causes it to turn, the receiver is hit by the stream of fluid from the nozzle at the centre so that the fluid is directed to both ends of the spool equally. If the motor causes the nozzle to turn, the stream of fluid from the nozzle impinges more on one side of the receiver and thus on one side of the spool more than the other causing the spool to shift.
- the spool shifts until the spring force of a feedback spring produces a torque equal to the motor torque. At this point, the nozzle is centred again, pressure is equal on both sides of the receiver and the spool is held in the centered position. A change in motor current moves the spool to a new position corresponding to the applied current.
- jet pipe servovalves are advantageous in that they are less sensitive to contamination e.g. in the supply fluid or from the valve environment. These valves are, however, more complex and bulkier. Additional joints are required for the fluid supply pipe and the supply pipe from the fluid supply to the jet pipe is mounted outside of the servovalve body in the torque motor chamber. In the event of damage to the pipe, this can result in external leakage. The pipe, being external, adds to the overall size and is more vulnerable to damage.
- European Patent Application 16461572 teaches a jet-pipe type servovalve wherein fluid is provided to the nozzle via a connector header in fluid communication with the interior of the spool, the spool being provided with one or more openings via which fluid from the supply port enters the interior of the spool and flows into the connector header and to the nozzle.
- the servovalve includes drive means for steering the nozzle in response to the control signal.
- the drive means may include a motor such as a torque motor arranged to steer the nozzle by means of an induced current. Other drive means may be used to vary the position of the nozzle.
- the drive means may be mounted in a housing attached to the valve assembly.
- EP 16461572 enables the conventional outside supply pipe to be removed and allows the jet pipe to be fed with fluid via the spool and a feedback spring.
- the present disclosure provides a servovalve comprising: a fluid transfer valve assembly comprising a supply port and a control port; a moveable valve spool arranged to regulate flow of fluid from the supply port to the control port in response to a control signal; and a drive stage assembly configured to axially move the valve spool relative to the fluid transfer assembly in response to the control signal to regulate the fluid flow; wherein the drive stage assembly comprises a piezoelectric actuator configured to vary the flow of fluid to respective ends of the valve spool in response to the control signal.
- the piezoelectric actuator may comprise a piezoelectric element and a rod, the rod arranged to move axially in response to expansion and/or contraction of the piezoelectric element depending on voltage applied to the element.
- the drive assembly may further comprise a housing within which the piezoelectric actuator is mounted, the housing comprising first and second orifices at respective ends of the housing, the housing being connected to the fluid transfer valve assembly via a first fluid channel from the first orifice and a second fluid channel from the second orifice, the first fluid channel providing a path for the flow of fluid to a first of the respective ends of the valve spool and the second fluid channel providing a path for the flow of fluid to a second of the respective ends of the valve spool.
- the fluid transfer valve assembly may further comprise a torsion spring at each of the respective ends of the valve spool.
- the valve spool may be moveably mounted in a cylindrical housing, having an end cap at each end.
- Also provided is a method of driving a valve spool of a servovalve comprising applying a voltage to a piezoelectric actuator to cause the piezoelectric actuator to move, responsive to the applied voltage, to regulate flow of a fluid to respective end of the valve spool.
- FIG. 1 a is a schematic view of a conventional jet-pipe type servovalve
- FIG. 1 b is a schematic view of a conventional flapper type servovalve
- FIG. 1 c is a detailed view of the flapper servovalve of FIG. 1 b.
- FIG. 2 is a schematic view of a servovalve according to the present disclosure
- FIG. 3 shows a cross-section view of one embodiment of a servovalve assembly according to this disclosure.
- a servovalve as described below can, for example, be used in an actuator control system.
- the servovalve is controlled by a drive assembly to control a control flow of fluid that is output via e.g. a butterfly value to control the movement of an actuator.
- FIGS. 1 b and 1 c A typical flapper servovalve is shown in FIGS. 1 b and 1 c .
- the assembly comprises a first stage comprising the drive assembly, and a second stage comprising a spool assembly.
- FIG. 1 b also shows, at the bottom, the actuator controlled by the servovalve. Operation of the valve comprises causing the spool 2 to move to the left and/or right so as to align ports in the spool 2 with fluid channels to control the flow of fluid through the valve and out of a control port to control the actuator or other moveable part.
- the movement of the spool 2 is caused by the pressure of the hydraulic fluid (here oil supplied to the assembly from oil reservoir or supply 5 via orifices 3 , 4 , but can be any hydraulic fluid) acting on one or other of the ends of the spool 2 via channels 11 , 12 .
- the pressure at the respective ends is varied in accordance with a control signal applied to the drive assembly selected according to the desired output from the valve.
- the hydraulic fluid is returned to the supply via a return path 6 .
- control signal when the control signal is such as to cause the drive assembly to apply greater fluid pressure to one end of the spool, by diverting more fluid to that end via channel 12 , as compared to channel 11 , the spool 2 will move to the right. If greater fluid pressure is applied via channel 11 , the spool 2 will move to the left.
- the control signal is applied to a torque motor and armature 14 which causes a flapper-type drive member 13 to deflect left or right.
- the flapper 13 is positioned between orifices 9 , 10 at the ends of channels 12 , 11 respectively, as best seen in FIG. 1 c .
- control signal via armature 14 , causes the flapper 13 to move to the right thus closing off orifice 10 of channel 11 , then the hydraulic fluid will flow through channel 12 , via (open) orifice 9 , thus increasing the pressure at the left end of the spool 2 and causing the spool to move to the right. If the control signal is such as to cause the flapper 13 to move to the left, closing orifice 9 of channel 12 , then more pressure is provided to the other end of the spool 2 via channel 11 , causing the spool 2 to move to the left.
- the drive member is a flapper 13 that moves to close off a respective channel
- the drive member is a pipe with a nozzle which is deflected left or right responsive to the control signal and from which fluid is ejected to either the left or the right end of the spool.
- the arrangement comprises a servovalve assembly have a torque motor and a moveable spool mounted in a supporting block, or mounted in a cylinder mounted in a block.
- the spool is, as for the flapper type arrangement, part of a spool assembly having: supply ports, control ports PA, and a return port PB. Flow is possible between the ports via a passage through the spool.
- the torque motor provides current that causes a jet pipe to turn at its end closest to the spool, which end terminates in a nozzle.
- Supply fluid is provided from the supply port, via a supply pipe to the top of the jet pipe—i.e.
- a receiver is provided in the block below the nozzle.
- the receiver provides two channels via which fluid from the nozzle flows into the spool.
- the motor provides a control current to the jet pipe causing the nozzle to turn away from the centered position.
- the supply fluid through the nozzle then flows predominantly through one receiver channel as compared to the other channel.
- a supply pipe is also connected to the supply port and routes supply fluid external to the spool and into the top end of the jet pipe.
- the supply fluid flows down the jet pipe to the nozzle and exits to the receiver described above.
- the jet pipe is preferably mounted in a flexural tube. While the nozzle is centered, equal amounts of fluid go to the two ends of the spool.
- the assembly is arranged to control an actuator based on the fluid flow from the control port e.g. via a butterfly valve.
- the servovalve controls an actuator which, in turn, controls an air valve such as a butterfly valve.
- Supply pressure is provided to the servovalve housing via supply port and to the spool via spool supply ports.
- the pressure at return port is a return pressure which will vary depending e.g. on the altitude of the aircraft in flight.
- Control ports provide a controlled pressure, dependant on the nozzle/flapper position and resulting spool position, to be provided to an actuator.
- the spool 2 is in the form of a tubular member arranged in a valve block 1 to be moved axially by the hydraulic fluid.
- control current is provided to coils of the motor (e.g. a torque motor) creating electromagnetic torque opposing the sum of mechanical and magnetic torque already ‘present’ in the torque motor.
- a torque motor usually consists of coil windings, a ferromagnetic armature 14 , permanent magnets and a mechanical spring (e.g. two torsional bridge shafts). This arrangement provides movement of the nozzle/flapper proportional to the input control current.
- Jet-pipe arrangements can operate at high frequency but only for average pressure levels.
- the flapper arrangements can operate at higher pressures, but at lower frequency.
- the arrangement of the present disclosure replaces the entire first stage with a piezoelectric drive assembly comprising a piezoelectric actuator 7 , 8 positioned between channels 11 and 12 , the actuator 7 , 8 being activated, responsive to a control signal, to open or close orifices 9 , 10 to control fluid flow through the system.
- the actuator comprises a piezoelement 7 and a rod 8 connected thereto.
- a voltage from the control signal
- the piezoelement expands so as to close off orifice 10 .
- the hydraulic fluid is then forced to flow via channel 12 to the left end of the spool 2 causing the spool to move to the right.
- valve spool 2 is moveably mounted in a cylindrical housing 1 (also referred to herein as valve block), having an end cap 16 at each end.
- a compression spring 15 is located at each end of the spool 2 .
- the rod 8 in a neutral state, with some voltage applied to the piezoelectric actuator, the rod 8 is in a centred position so that distances a and b ( FIG. 3 b ) are substantially equal and orifices 9 and 10 are both open.
- Varying the voltage applied to the actuator causes the piezoelement 7 to expand or contract which varies the distances a and by moving rod 8 left or right depending on the voltage.
- the rest of the operation of the spool assembly is analogous to that of the flapper and jet-pipe arrangements.
- the piezoelectric drive arrangement can operate at a higher frequency than the motor drive systems (approximately three to four times faster) and is, therefore, a more responsive system.
- the force of the present system is also greater than that of conventional systems and the drive is more ‘direct’
- the drive assembly i.e. the piezoactuator 7 can be provided in the same housing as the second, spool assembly, stage.
- the design of the present system is considerably simplified and is smaller and lighter than conventional systems.
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- General Engineering & Computer Science (AREA)
- Mechanical Engineering (AREA)
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- Fluid Mechanics (AREA)
- Servomotors (AREA)
Abstract
Description
Claims (5)
Applications Claiming Priority (3)
Application Number | Priority Date | Filing Date | Title |
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EP17461558.3 | 2017-06-24 | ||
EP17461558.3A EP3418586B1 (en) | 2017-06-24 | 2017-06-24 | Servovalve |
EP17461558 | 2017-06-24 |
Publications (2)
Publication Number | Publication Date |
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US20180372128A1 US20180372128A1 (en) | 2018-12-27 |
US10954971B2 true US10954971B2 (en) | 2021-03-23 |
Family
ID=60997275
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
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US15/950,213 Active 2038-06-04 US10954971B2 (en) | 2017-06-24 | 2018-04-11 | Servovalve |
Country Status (2)
Country | Link |
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US (1) | US10954971B2 (en) |
EP (1) | EP3418586B1 (en) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US20220196175A1 (en) * | 2020-12-18 | 2022-06-23 | The Boeing Company | Shape memory alloy control elements for hydraulic valves |
Families Citing this family (6)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
EP3321516B1 (en) * | 2016-11-09 | 2020-05-13 | Hamilton Sundstrand Corporation | Servovalve |
EP3660365B1 (en) * | 2018-11-27 | 2021-07-21 | Hamilton Sundstrand Corporation | Servo valve |
EP3715683B1 (en) | 2019-03-29 | 2022-05-04 | Hamilton Sundstrand Corporation | Spool servo valve |
EP3715644B1 (en) | 2019-03-29 | 2023-11-08 | Hamilton Sundstrand Corporation | Spool servo valve |
DE102020117374B3 (en) * | 2020-07-01 | 2021-10-28 | Samson Aktiengesellschaft | Pneumatically operated switching valve, valve assembly and ventilation system |
CN114321440B (en) * | 2021-12-30 | 2024-03-15 | 中航工业南京伺服控制系统有限公司 | Intelligent material driven differential redundancy servo valve and working method thereof |
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FR1183778A (en) | 1956-09-28 | 1959-07-13 | Thomson Houston Comp Francaise | Piezoelectric crystal transducer for controlling hydraulic valves |
US3152612A (en) * | 1956-09-28 | 1964-10-13 | Gen Electric | Piezoelectric crystal transducer for controlling fluid flow |
US4046061A (en) | 1975-12-03 | 1977-09-06 | The Garrett Corporation | Four-way clevis valve and method |
GB2104249A (en) | 1981-08-19 | 1983-03-02 | Moog Inc | Servovalves |
US4463727A (en) * | 1981-09-08 | 1984-08-07 | Robert Bosch Gmbh | Diesel engine fuel injection system |
US4700794A (en) * | 1986-07-14 | 1987-10-20 | Caterpillar Inc. | Vehicle steering apparatus |
US4825894A (en) | 1988-06-08 | 1989-05-02 | Moog, Inc. | Piezoelectric torque motor |
US4929859A (en) | 1987-12-25 | 1990-05-29 | Toyota Jidosha Kabushiki Kaisha | Piezoelectric actuator having parallel arrangement of a single piezoelectric element and a pair of displacement magnification arms |
EP0427981A1 (en) | 1988-10-25 | 1991-05-22 | GebràDer Sulzer Aktiengesellschaft | Electrohydraulic or pneumatic actuator |
DE4311218A1 (en) | 1993-04-05 | 1994-12-22 | Rexroth Mannesmann Gmbh | Pilot stage with specially designed baffle for reducing the leakage |
WO2001059306A1 (en) | 2000-02-08 | 2001-08-16 | Viktor Andreevich Shtykov | Electrohydraulic distributor |
US6526864B2 (en) | 2001-04-17 | 2003-03-04 | Csa Engineering, Inc. | Piezoelectrically actuated single-stage servovalve |
US6786238B2 (en) | 2002-06-11 | 2004-09-07 | Festo Ag & Co. | Solenoid valve |
WO2006070655A1 (en) | 2004-12-28 | 2006-07-06 | Fujikura Rubber Ltd. | Fluid control valve |
US20150047729A1 (en) | 2012-02-23 | 2015-02-19 | Moog Inc. | Integrated structure electro-hydraulic valve |
US9309900B2 (en) | 2012-02-09 | 2016-04-12 | Moog Inc. | Electro-hydraulic servo valve |
US20170324021A1 (en) * | 2016-05-03 | 2017-11-09 | Zodiac Hydraulics | Servo valve with asymetrical redundant piezoelectric actuator |
US20180128393A1 (en) * | 2016-11-09 | 2018-05-10 | Hamilton Sundstrand Corporation | Servovalve |
EP3321513A1 (en) | 2016-11-11 | 2018-05-16 | Hamilton Sundstrand Corporation | Servovalve |
US20190195381A1 (en) * | 2017-12-22 | 2019-06-27 | Hamilton Sundstrand Corporation | Servo valve |
US10344885B2 (en) * | 2013-08-01 | 2019-07-09 | Moog Controls Limited | Hydraulic servovalves |
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2017
- 2017-06-24 EP EP17461558.3A patent/EP3418586B1/en active Active
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2018
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US20220196175A1 (en) * | 2020-12-18 | 2022-06-23 | The Boeing Company | Shape memory alloy control elements for hydraulic valves |
US11821535B2 (en) * | 2020-12-18 | 2023-11-21 | The Boeing Company | Shape memory alloy control elements for hydraulic valves |
Also Published As
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EP3418586A1 (en) | 2018-12-26 |
US20180372128A1 (en) | 2018-12-27 |
EP3418586B1 (en) | 2021-12-08 |
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