US10585274B2 - Method for capturing and compensating ambient effects in a measuring microscope - Google Patents
Method for capturing and compensating ambient effects in a measuring microscope Download PDFInfo
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- US10585274B2 US10585274B2 US16/026,364 US201816026364A US10585274B2 US 10585274 B2 US10585274 B2 US 10585274B2 US 201816026364 A US201816026364 A US 201816026364A US 10585274 B2 US10585274 B2 US 10585274B2
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- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B21/00—Microscopes
- G02B21/36—Microscopes arranged for photographic purposes or projection purposes or digital imaging or video purposes including associated control and data processing arrangements
- G02B21/365—Control or image processing arrangements for digital or video microscopes
- G02B21/367—Control or image processing arrangements for digital or video microscopes providing an output produced by processing a plurality of individual source images, e.g. image tiling, montage, composite images, depth sectioning, image comparison
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B11/00—Measuring arrangements characterised by the use of optical techniques
- G01B11/02—Measuring arrangements characterised by the use of optical techniques for measuring length, width or thickness
- G01B11/026—Measuring arrangements characterised by the use of optical techniques for measuring length, width or thickness by measuring distance between sensor and object
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B11/00—Measuring arrangements characterised by the use of optical techniques
- G01B11/02—Measuring arrangements characterised by the use of optical techniques for measuring length, width or thickness
- G01B11/03—Measuring arrangements characterised by the use of optical techniques for measuring length, width or thickness by measuring coordinates of points
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B21/00—Measuring arrangements or details thereof, where the measuring technique is not covered by the other groups of this subclass, unspecified or not relevant
- G01B21/02—Measuring arrangements or details thereof, where the measuring technique is not covered by the other groups of this subclass, unspecified or not relevant for measuring length, width, or thickness
- G01B21/04—Measuring arrangements or details thereof, where the measuring technique is not covered by the other groups of this subclass, unspecified or not relevant for measuring length, width, or thickness by measuring coordinates of points
- G01B21/045—Correction of measurements
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01M—TESTING STATIC OR DYNAMIC BALANCE OF MACHINES OR STRUCTURES; TESTING OF STRUCTURES OR APPARATUS, NOT OTHERWISE PROVIDED FOR
- G01M11/00—Testing of optical apparatus; Testing structures by optical methods not otherwise provided for
- G01M11/02—Testing optical properties
- G01M11/0242—Testing optical properties by measuring geometrical properties or aberrations
- G01M11/0257—Testing optical properties by measuring geometrical properties or aberrations by analyzing the image formed by the object to be tested
- G01M11/0264—Testing optical properties by measuring geometrical properties or aberrations by analyzing the image formed by the object to be tested by using targets or reference patterns
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01M—TESTING STATIC OR DYNAMIC BALANCE OF MACHINES OR STRUCTURES; TESTING OF STRUCTURES OR APPARATUS, NOT OTHERWISE PROVIDED FOR
- G01M11/00—Testing of optical apparatus; Testing structures by optical methods not otherwise provided for
- G01M11/02—Testing optical properties
- G01M11/0242—Testing optical properties by measuring geometrical properties or aberrations
- G01M11/0271—Testing optical properties by measuring geometrical properties or aberrations by using interferometric methods
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/17—Systems in which incident light is modified in accordance with the properties of the material investigated
- G01N21/41—Refractivity; Phase-affecting properties, e.g. optical path length
- G01N21/45—Refractivity; Phase-affecting properties, e.g. optical path length using interferometric methods; using Schlieren methods
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- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B21/00—Microscopes
- G02B21/0004—Microscopes specially adapted for specific applications
- G02B21/0016—Technical microscopes, e.g. for inspection or measuring in industrial production processes
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- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F1/00—Originals for photomechanical production of textured or patterned surfaces, e.g., masks, photo-masks, reticles; Mask blanks or pellicles therefor; Containers specially adapted therefor; Preparation thereof
- G03F1/68—Preparation processes not covered by groups G03F1/20 - G03F1/50
- G03F1/82—Auxiliary processes, e.g. cleaning or inspecting
- G03F1/84—Inspecting
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/17—Systems in which incident light is modified in accordance with the properties of the material investigated
- G01N21/41—Refractivity; Phase-affecting properties, e.g. optical path length
- G01N21/45—Refractivity; Phase-affecting properties, e.g. optical path length using interferometric methods; using Schlieren methods
- G01N2021/458—Refractivity; Phase-affecting properties, e.g. optical path length using interferometric methods; using Schlieren methods using interferential sensor, e.g. sensor fibre, possibly on optical waveguide
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B27/00—Optical systems or apparatus not provided for by any of the groups G02B1/00 - G02B26/00, G02B30/00
- G02B27/62—Optical apparatus specially adapted for adjusting optical elements during the assembly of optical systems
Definitions
- the invention relates to capturing and compensating ambient effects in a measuring microscope.
- the invention relates to a method for capturing the influence of ambient conditions on an imaging scale in a measuring microscope, as is used for measuring masks or wafers for photolithography systems, for example.
- Such measuring microscopes are often used as part of a so-called mask inspection system or wafer inspection system.
- lithographic methods for producing microstructured or nanostructured components for microelectronics or microsystem engineering structures on a mask, a so-called reticle, are imaged on a semiconductor material in order thus to produce conductor tracks and semiconductor components.
- the structures In order to be able to produce structures in the nanometer range on the semiconductor material, the structures have to be produced and positioned highly precisely on the reticle.
- measurement methods and measuring microscopes as are described in DE102009019140A1 and US 2014/0307949A1, for example.
- Establishing the position of the masks is based upon an interferometric length measurement.
- special adjustment marks on a mask are captured in respect of the position thereof by use of a microscopic image.
- the individual adjustment marks or structure elements of the mask are successively driven into the center of the image field by way of a positioning stage and the position of the respective adjustment marks is established.
- the distance from the adjustment mark measured previously is established by determining the path traveled by the positioning stage between the measurements.
- the path traveled by the positioning stage is established by use of an interferometric measurement.
- the ambient conditions e.g., temperature, air pressure, humidity, . . .
- a (natural or artificially produced) change in these ambient conditions leads to a change in the optical medium within an imaging optical unit of the measuring microscope which, in general, consists of a multiplicity of lens elements with air interstices. These interstices may also be purged with nitrogen.
- the mechanical hold of the lens elements may depend on ambient conditions such as air pressure and air temperature, for example. Consequently, the scale ratios of the projection exposure apparatus change in the case of a temporal modification of the ambient conditions.
- a typical change in the optical path in a measuring microscope on account of air pressure variation lies at 20 nm/mbar. Such a change appears to be relatively small, but it is very important for highly accurate measuring appliances, as are used, for example, for measuring photolithographic masks with structures in the nanometer range.
- the present invention specifies a method, by use of which the influence of changes in the ambient conditions (e.g., temperature, air pressure, humidity, air gas composition, . . . ) on the scale ratios in a measuring microscope can be established and compensated.
- the ambient conditions e.g., temperature, air pressure, humidity, air gas composition, . . .
- a method for capturing the influence of ambient conditions on an imaging scale in a measuring microscope of a mask inspection system or a wafer inspection system is provided.
- a modification of the optical properties in the measuring microscope that is caused by a change in the ambient conditions is measured by use of a reference measurement system, and an image of a reference structure with at least one reference length that is situated on a calibration mask is produced by use of a detector of the measuring microscope.
- a change in the reference length that is caused by the change in the ambient conditions is determined in the image of the reference structure.
- a correlation is established between the modification of the optical properties of the reference measurement system and the length change in the image, produced in the detector, of the reference structure of the calibration mask.
- Implementations of the method can include the following feature.
- the deviation of an optical path from a reference value that is caused by changes in the ambient conditions can be established in the reference measurement system.
- a method according to the invention proceeds from a measuring microscope in a mask inspection system or wafer inspection system, which comprises a detector for producing a digital image of an object to be measured, for example a calibration mask with a reference structure, that is situated in the visual field of the measuring microscope. Furthermore, provision is made of a reference measurement system, with the aid of which a modification of optical properties, in particular a change in the refractive index and/or a change in the number of wavelengths and an interferometer, that is caused by a change in the ambient conditions can be measured.
- the method for capturing the inference of ambient conditions on an imaging scale of the measuring microscope provides for, firstly, a modification of the optical properties in the measuring microscope that is caused by a change in the ambient conditions to be measured by use of the reference measurement system and, secondly, a length change of the reference structure that is caused by the change in the ambient conditions to be determined in the image of the detector of the measuring microscope. Subsequently, a correlation is established between the change in the optical properties of the reference measurement system and the length change of the reference structure. This correlation provides information about how the size ratios of the structures that are imaged in the detector of the measuring microscope change when changes in the ambient parameters (and hence changes in the optical properties) occur and forms the basis for a compensation of the changes in the imaging scale of the measuring microscope caused by ambient effects.
- This method can be applied not only to measuring microscopes but also to optical measurement systems in the most general sense.
- changes in the refractive index of the optical medium (e.g., air) present in the measuring microscope or changes in an optical path can be established in the reference measurement system, which serves to establish the modification of the optical properties in the measuring microscope that is caused by changes in the ambient conditions.
- the reference measurement system which serves to establish the modification of the optical properties in the measuring microscope that is caused by changes in the ambient conditions.
- an etalon which is integrated in the measuring microscope, which comprises an interferometer and the mirror and which facilitates a highly precise measurement of changes in the optical path (by measuring the change in the phase of laser light) is particularly suitable as a reference measurement system.
- the calibration mask has a reference structure with a periodic grid.
- a multiplicity of reference coordinate values and the length changes thereof are established in order to ensure a high measurement accuracy when establishing the reference length or length changes.
- this correction value can be used to adapt the size of picture elements in the detector by computation in such a way that the influence of changing ambient conditions on the imaging scale of the measuring microscope (and consequently on length measurements in the measuring microscope) are largely compensated.
- this correction function can be represented as a function of a complete basis of 2D vector functions.
- FIG. 1 shows an illustration of a measuring microscope according to the present invention
- FIG. 2 shows a plan view of a portion of a calibration mask with a reference structure
- FIG. 3A shows an illustration of an image, recorded by a detector of the measuring microscope, of a portion of the calibration mask of FIG. 2 at a time t0;
- FIG. 3B shows the image portion of FIG. 2 at a time t1>t0;
- FIG. 4 shows a diagram of measurement values of relative distance changes in the detector image of FIG. 3 as a function of a change in an optical path in a reference measurement system for a multiplicity of measurements under different ambient conditions;
- FIG. 5 shows a diagram of measurement values of absolute values of distance changes in the detector image of FIG. 3 as a function of the change in the optical path after a computational correction of the pixel size of the detector.
- FIG. 6 shows a flow diagram of a process for capturing the influence of ambient conditions on an imaging scale in a measuring microscope of a mask inspection system or a wafer inspection system.
- FIG. 7 shows a flow diagram of a process for calculating a relative change ( ⁇ S/S 0 ) in an imaging scale (S 0 ) for carrying out a computational adaptation of the size of picture elements of a detector for compensating the influence of ambient conditions on an imaging scale (S) in a measuring microscope.
- FIG. 8 shows a flow diagram of a process for calculating a relative change ( ⁇ S/S 0 ) in an imaging scale (S 0 ) for carrying out an adjustment of the imaging scale and/or a correction of image positions to the measured for compensating the influence of ambient conditions on an imaging scale (S) in a measuring microscope.
- FIG. 1 shows a schematic illustration of a measuring microscope 1 for measuring structured elements, for example reticles for use in lithographic apparatuses.
- the measuring microscope 1 comprises a microscope body 2 , in which a measuring objective 5 is arranged.
- the measuring microscope 1 comprises a light source 4 , with which it is possible to illuminate a structured element 7 , for example a reticle with a structure to be examined, that is arranged on a displaceable platform 3 (a so-called “stage”).
- a calibration mask 20 with a reference structure 21 can be used as a structured element 7 ;
- FIG. 2 shows a plan view of a portion of such a calibration mask 20 .
- the light source 4 radiates illumination light 14 onto the calibration mask 20 via a beam splitter 13 in the microscope body 2 , wherein the illumination light 14 that is reflected by the calibration mask 20 is imaged on the detector 6 such that an image of the calibration mask with reflected-light illumination can be captured in the detector 6 .
- the light transmitted by the calibration mask 20 can be imaged on the detector 6 using transmitted-light illumination.
- the detector 6 can be a CCD camera.
- the stage 3 is movable in three independent spatial directions and the calibration mask 20 is mounted on the stage 3 by use of a three-point bearing 12 , with the calibration mask 20 preferably resting on hemispherical elements.
- the calibration mask 20 can also rest on the mask holder by use of the three-point bearing, said mask holder resting on the stage 3 .
- the stage 3 can be moved in an XY-plane perpendicular to the direction of the optical axis of the measuring microscope 1 (corresponding to the direction of the illumination light beam 14 , which is denoted by Z in FIG. 1 ). Accordingly, the calibration mask 20 can be moved on the stage in two independent spatial directions, in the X-direction and Y-direction corresponding to the Cartesian coordinate system.
- At least two interferometers 9 are used to establish the spatial position of the stage 3 and the XY-plane, only one of said interferometers, which serves to measure displacements of the stage in the X-direction, being illustrated in FIG. 1 .
- At least one further interferometer 8 is provided for establishing the position of the stage 3 in the Z-direction.
- the various measuring devices such as, e.g., the detector 6 , the device 10 for establishing the refractive index, the interferometers 8 , 9 and/or devices with drives and/or actuators, such as the stage 3 , are connected to a control and regulating device 15 comprising an evaluation unit, and so desired information items may be established from the established measurement data and at least parts of the measuring microscope 1 may be controlled accordingly on the basis of these information items.
- the measuring microscope 1 has a reference measurement system 10 , by use of which it is possible to measure modifications of the optical properties of the medium present in the measuring microscope 1 , e.g., air, that are caused by a change in the ambient conditions.
- the reference measurement system 10 is situated in the immediate vicinity of the microscope body 2 in order to capture variations in the ambient conditions, which act on the optical unit of the measuring microscope 1 , as exactly as possible.
- the reference measurement system can contain conventional sensors for air pressure p, air temperature T, and humidity F, etc. From the measurement values of these sensors, it is possible to establish the ambient refractive index n (p, T, F) by use of the following formula (the so-called Edlen formula):
- n ⁇ ( p , T , F ) 1 + ( 3.83639 ⁇ 10 - 7 ⁇ p ) ⁇ [ 1 + p ⁇ ( 0.817 - 0.0133 ⁇ T ) ⁇ 10 - 6 1 + 0.003661 ⁇ T ] - 5.607943 ⁇ 10 - 7 ⁇ F ( 1 )
- an etalon 10 ′ is used as a reference measurement system 10 in the present exemplary embodiment.
- Such an etalon 10 ′ comprises an interferometer 11 and a mirror 16 , which are situated together and at a fixed distance from one another in a thermally highly stable housing.
- An optical path W between the interferometer 11 and the mirror 16 can be measured with great accuracy with the aid of the etalon 10 ′.
- the detector 6 of the measuring microscope 1 serves to record images of the structured element 7 that is borne on the stage 3 , in particular of the calibration mask 20 .
- the detector 6 is typically a CCD camera having a multiplicity of pixels 6 ′, which are indicated schematically in FIG. 1 .
- the reference structure 21 of the calibration mask 20 has an orthogonal grid of equidistant markers 22 , which have the form of small squares in the present exemplary embodiment.
- the reference structure 21 of the calibration mask allows the reproducible definition of at least one distance in the X-direction and one distance in the Y-direction of the image field.
- the image 25 of a portion 26 of the reference structure 21 shows a grid structure 27 with marks 28 , which corresponds to the reference structure 21 of the calibration mask 20 , but is illustrated in a magnified manner with a magnification factor (imaging scale S) of the measuring microscope 1 .
- the portion 26 comprises 15 ⁇ 15 marks 28 and has an edge length B 0 .
- This grid structure 27 is used to establish the influence of changing ambient conditions on the imaging scale of the measuring microscope 1 .
- a reference measurement is initially carried out (at the time denoted by t 0 below).
- the refractive index n has a reference value that is denoted by n 0 at this time t 0 ; however, the absolute value of said refractive index is irrelevant here since only deviations ⁇ n of the refractive index from this reference value n 0 are measured and used in the method described below.
- an image 25 of the portion 26 of the reference structure 21 of the calibration mask 20 is recorded at the time t 0 of the reference measurement. At least one reference length L 0 is established from this image 25 .
- the calibration mask 20 was typically produced in the same manner as conventional masks 7 by use of an electron beam writer.
- FIG. 1 In the present exemplary embodiment of FIG.
- a multiplicity of reference coordinate values X 0 , Y 0 of a number of a total m Max of markings 28 was determined in the coordinate system of the grid structure 27 with the coordinate origin 29 ; specifically, the coordinate values X 0 , Y 0 were established on a grid of 15 ⁇ 15 marks 28 .
- a further image 25 ′ is recorded in a manner analogous to the method described above at a later time t 1 >t 0 in order to ascertain the positions of the marks 22 of the reference structure 21 .
- the change ⁇ n in the refractive index n has as a consequence that the positions of the marks 28 ′ in the image 25 ′ of the reference structure 21 at this time t 1 have been displaced in relation to the original positions at the time t 0 and the portion 26 of the 15 ⁇ 15 marks in the image 25 ′, marked in FIG. 3A , now has an edge length B 1 , which, in the present exemplary embodiment, is greater than the edge length B 0 in the image 25 ; this is illustrated in FIG. 3B in a greatly exaggerated manner.
- the ambient changes led to the variation in the optical path length and the employed etalon 10 ′ of approximately 1.3 ⁇ m, corresponding to an air pressure change of approximately 18 mbar.
- a local correlation function is established between the modification of the optical properties of the reference measurement system 10 and the length change ⁇ L(x,y) in the image 25 , produced in the detector 6 , of the reference structure 21 of the calibration mask 20 ; with the aid of this correlation function, it is then possible, for example, to calculate a local change of the imaging scale ⁇ S(x,y)—in a manner analogous to the above-described method.
- FIG. 5 shows the results of a measurement series, in which the formula specified at (4) was used to take account of the dependence of the refractive index on ambient conditions by correcting the pixel size.
- the described method is well suited to compensate effects of changing ambient conditions on the imaging scale of the measuring microscope 1 .
- the method according to the invention can be used not only for adapting the sides of picture elements (pixels) by computation, but also for other adaptations, for example for adjusting the imaging scale, for correcting image positions to be measured, etc.
- FIG. 6 shows a flow diagram of a process for capturing the influence of ambient conditions on an imaging scale in a measuring microscope of a mask inspection system or a wafer inspection system.
- FIG. 7 shows a flow diagram of a process for calculating a relative change ( ⁇ S/S 0 ) in an imaging scale (S 0 ) for carrying out a computational adaptation of the size of picture elements of a detector for compensating the influence of ambient conditions on an imaging scale (S) in a measuring microscope.
- FIG. 7 shows a flow diagram of a process for calculating a relative change ( ⁇ S/S 0 ) in an imaging scale (S 0 ) for carrying out a computational adaptation of the size of picture elements of a detector for compensating the influence of ambient conditions on an imaging scale (S) in a measuring microscope.
- FIG. 8 shows a flow diagram of a process for calculating a relative change ( ⁇ S/S 0 ) in an imaging scale (S 0 ) for carrying out an adjustment of the imaging scale and/or a correction of image positions to the measured for compensating the influence of ambient conditions on an imaging scale (S) in a measuring microscope.
- control and regulating device 15 can include one or more processors and one or more computer-readable media (e.g., ROM, DRAM, SRAM, SDRAM, hard disk, optical disk, and flash memory).
- the one or more processors can perform various computations described above. The computations can also be implemented using application-specific integrated circuits (ASICs).
- ASICs application-specific integrated circuits
- the term “computer-readable medium” refers to a medium that participates in providing instructions to a processor for execution, including without limitation, non-volatile media (e.g., optical or magnetic disks), and volatile media (e.g., memory) and transmission media. Transmission media includes, without limitation, coaxial cables, copper wire, fiber optics and free space.
- the memory can include any type of memory, such as ROM, DRAM, SRAM, SDRAM, and flash memory.
- a computer program is a set of instructions that can be used, directly or indirectly, in a computer to perform a certain activity or bring about a certain result.
- a computer program can be written in any form of programming language (e.g., C, Java), including compiled or interpreted languages, and it can be deployed in any form, including as a stand-alone program or as a module, component, subroutine, a browser-based web application, or other unit suitable for use in a computing environment.
- Suitable processors for the execution of a program of instructions include, e.g., general purpose microprocessors, special purpose microprocessors, digital signal processors, single-core or multi-core processors, of any kind of computer.
- a processor will receive instructions and data from a read-only memory or a random access memory or both.
- the essential elements of a computer are a processor for executing instructions and one or more memories for storing instructions and data.
- a computer will also include, or be operatively coupled to communicate with, one or more mass storage devices for storing data files; such devices include magnetic disks, such as internal hard disks and removable disks; magneto-optical disks; and optical disks.
- Storage devices suitable for tangibly embodying computer program instructions and data include all forms of non-volatile memory, including by way of example semiconductor memory devices, such as EPROM, EEPROM, and flash memory devices; magnetic disks such as internal hard disks and removable disks; magneto-optical disks; and CD-ROM, DVD-ROM, and Blu-ray BD-ROM disks.
- semiconductor memory devices such as EPROM, EEPROM, and flash memory devices
- magnetic disks such as internal hard disks and removable disks
- magneto-optical disks and CD-ROM, DVD-ROM, and Blu-ray BD-ROM disks.
- the processor and the memory can be supplemented by, or incorporated in, ASICs (application-specific integrated circuits).
- ASICs application-specific integrated circuits
Abstract
Description
ΔS=S−S 0=(a×Δn), (3)
where S0 is the imaging scale under reference ambient conditions and a is a scaling constant.
p(ΔW)=(1−a)×p 0 (4)
Claims (22)
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DE102017115367.5A DE102017115367A1 (en) | 2017-07-10 | 2017-07-10 | Method for detecting and compensating environmental influences in a measuring microscope |
DE102017115367 | 2017-07-10 | ||
DE102017115367.5 | 2017-07-10 |
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US20190011690A1 US20190011690A1 (en) | 2019-01-10 |
US10585274B2 true US10585274B2 (en) | 2020-03-10 |
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DE102016204535A1 (en) * | 2016-03-18 | 2017-09-21 | Carl Zeiss Smt Gmbh | Measuring microscope for measuring masks for lithographic processes and measuring methods and calibration methods therefor |
DE102019008989B3 (en) * | 2019-12-21 | 2021-06-24 | Abberior Instruments Gmbh | Disturbance correction procedure and laser scanning microscope with disturbance correction |
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2017
- 2017-07-10 DE DE102017115367.5A patent/DE102017115367A1/en not_active Ceased
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