US10533841B2 - Measurement of surface topography of a work-piece - Google Patents
Measurement of surface topography of a work-piece Download PDFInfo
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- US10533841B2 US10533841B2 US16/271,636 US201916271636A US10533841B2 US 10533841 B2 US10533841 B2 US 10533841B2 US 201916271636 A US201916271636 A US 201916271636A US 10533841 B2 US10533841 B2 US 10533841B2
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B11/00—Measuring arrangements characterised by the use of optical techniques
- G01B11/16—Measuring arrangements characterised by the use of optical techniques for measuring the deformation in a solid, e.g. optical strain gauge
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B11/00—Measuring arrangements characterised by the use of optical techniques
- G01B11/02—Measuring arrangements characterised by the use of optical techniques for measuring length, width or thickness
- G01B11/06—Measuring arrangements characterised by the use of optical techniques for measuring length, width or thickness for measuring thickness ; e.g. of sheet material
- G01B11/0608—Height gauges
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B11/00—Measuring arrangements characterised by the use of optical techniques
- G01B11/24—Measuring arrangements characterised by the use of optical techniques for measuring contours or curvatures
Definitions
- the present disclosure generally relates to measuring surface topographies and more particularly measuring surface topographies in thin films substrates.
- Integrated circuits are formed on semiconductor wafer substrates by a number of processing steps. These steps include deposition, etching, implantation, doping, and other semiconductor processing steps well known to those skilled in the art. Thin films are typically formed on the surface of the semiconductor wafer substrates (hereinafter referred to as wafer substrates) by a deposition process. The thickness of such films may range from about a few hundred angstroms to several micrometers. Often, three or more film layers are formed on the surface of a single wafer substrate.
- the stress in the surface film of the wafer substrate can be either compressive or tensile. Assuming the film is on top of the wafer substrate, a compressive stress in a surface film may cause the wafer substrate to slightly bow in a concave direction, while a tensile stress in a surface film may cause the wafer substrate to slightly bow in a convex direction. Therefore, both compressive and tensile stresses cause the surface of the wafer substrate to deviate from exact planarity.
- the extent of the deviation from planarity can be expressed in terms of the radius of curvature of a surface of the wafer substrate. In general, the greater the magnitude of surface stresses, the smaller the radius of curvature.
- stresses in surface films on wafer substrates Due to the aforementioned problems caused by stresses in surface films on wafer substrates, it may be desirable to measure such stresses.
- the measurements can be used, for example, to identify wafer substrates that are likely to provide low yields of semiconductor devices or which might produce devices prone to early failure.
- stresses in surface films are not measured directly but, instead, are inferred from measurements of the radius of curvature of the surface of interest.
- Various techniques are available that enable measuring of curvature and consequently stress.
- the present disclosure provides an apparatus and method for measuring surface topography on a work-piece and stress thereof.
- the apparatus includes a light emitting assembly configured to emit an emitted beam of light.
- the emitted beam is emitted at a plurality of wavelengths and is modulated with a modulating frequency.
- the emitted beam is directed onto a surface of a work-piece.
- the apparatus includes a detector configured to receive a reflected beam of light that includes at least a portion of the emitted beam as reflected from the surface of the work-piece and generate a signal indicative of a position of the reflected beam on the detector.
- the apparatus includes a signal processing unit configured to remove noise from the signal thus generated based on the modulating frequency to obtain a processed signal.
- the apparatus includes a control unit configured to determine the topography of the surface based on the processed signal.
- the apparatus in another embodiment, includes a first light emitting assembly configured to emit a first emitted beam of light.
- the first emitted beam is emitted at a plurality of wavelengths and is modulated at a first modulating frequency.
- the first emitted beam is directed onto a surface of a work-piece.
- the apparatus includes a second light emitting assembly configured to emit a second emitted beam of light.
- the second emitted beam is emitted at a plurality of wavelengths and is modulated at a second modulating frequency.
- the second modulating frequency is substantially different from the first modulating frequency.
- the second emitted beam is directed onto the surface of the work-piece.
- the apparatus includes a detector configured to receive a first reflected beam of light and a second reflected beam of light.
- the first reflected beam includes at least a portion of the first emitted beam as reflected from the surface of the work-piece and the second reflected beam includes at least a portion of the second emitted beam as reflected from the surface of the work-piece.
- the detector is further configured to generate a first signal indicative of a position of the first reflected beam on the detector based on the first modulating frequency, and a second signal indicative of a position of the second reflected beam on the detector based on the second modulating frequency.
- the apparatus includes a control unit configured to determine a topography of the surface based on the first signal and the second signal.
- FIG. 1 schematically illustrates an apparatus for measuring surface topography of a work-piece, in accordance with an embodiment of the present subject matter.
- FIG. 2 schematically illustrates a light emitting assembly employed in the apparatus shown in FIG. 1 , in accordance with an embodiment of the present subject matter.
- FIG. 3 a and FIG. 3 b schematically illustrates a detector employed in the apparatus shown in FIG. 1 , in accordance with an embodiment of the present subject matter.
- FIG. 4 a , FIG. 4 b , and FIG. 4 c schematically illustrates a signal processing unit employed in the apparatus shown in FIG. 1 , in accordance with an embodiment of the present subject matter.
- FIG. 5 schematically illustrates an apparatus for measuring surface topography of a work-piece, in accordance with one another embodiment of the present subject matter.
- FIG. 6 a , FIG. 6 b , FIG. 6 c , and FIG. 6 d schematically illustrate the detector employed in the apparatus shown in FIG. 5 , in accordance with one another embodiment of the present subject matter.
- FIG. 7 illustrates a flow diagram of a method for measuring surface topography of a work-piece, in accordance with an embodiment of the present subject matter.
- FIG. 8 illustrates a flow diagram of a method for measuring surface topography of a work-piece, in accordance with one another embodiment of the present subject matter.
- One common technique for measuring the curvature of a wafer substrate is by reflecting a guided beam of radiant energy, such as one generated by a laser, from a surface film of the wafer substrate.
- a detector detects a portion of the reflected beam; as the wafer or laser is moved, the deviation of the beam from a point at the detector is recorded and analyzed to detect the curvature of the surface.
- the amplitude of the reflected beam can be reduced due to destructive interference.
- the destructive interference is caused by reflection from the surface film on the wafer substrate, which includes an upper surface boundary and a lower surface boundary. A beam of light is partially reflected and partially transmitted through the upper film boundary.
- the transmitted portion of the beam is reflected by the lower film boundary and interferes with the first reflected portion of the beam due to well-known optical interference principles.
- the thickness of the surface film can cause the second reflected portion of the beam to be out-of-phase with the first reflected portion, resulting in the destructive interference.
- Destructive interference may weaken or almost completely cancel the amplitude of the reflected beam, thereby causing difficulties in detecting the reflected beam and resulting in errors in the curvature testing process.
- a dual frequency laser apparatus measures stress in a thin film.
- a laser beam composed of two different wavelengths is directed onto a surface of a wafer substrate with a thin film and reflected to a detector. If one of the wavelengths permits destructive interference to occur in the reflected beam, the other transmitted wavelength may not, and the reflected beam can be detected.
- Two separate laser beams, each of a distinct wavelength, are combined into the dual-wavelength beam by a beam splitter to accomplish this goal. However, the reflected beam may be subjected to interference from noise or thermal background light.
- the present disclosure includes an apparatus and method that reduce the destructive interference and reduce the inefficiency of using combined, multiple-frequency energy sources to measure thin films. For example, as detailed below, one or more embodiments of the present disclosure may reduce the destructive interference by creating one beam with multiple wavelengths. Further, a better beam quality is generated due to the creation of one beam with multiple wavelengths.
- one or more embodiments of the present disclosure may remove noise, e.g., stray or thermal background light, from the generated signal by modulating the emitted beam with a frequency, and therefore may enable determining the topography and the stress thereof accurately. Further, one or more embodiments of the present disclosure may enable measurement of several light beams simultaneously by modulating the emitted beams with substantially different frequencies. In addition, problems associated with light losses on inter-pixel spaces and pixel non-uniformity may be reduced or eliminated.
- a reference to operations occurring “simultaneously” may include operations that occur with a threshold time frame of each other and are not limited to truly exact simultaneously performed operations.
- FIG. 1 schematically illustrates an apparatus 100 for measuring surface topography of a work-piece 102 , in accordance with an embodiment of the present subject matter.
- topography refers to any description of a surface of the work-piece 102 , such as curvature, contours, etc.
- the work-piece 102 include, but not limited to, semiconductor wafer substrates, hard disk platters, optical blanks, etc.
- light beams are represented as a solid arrow and physical connections/couplings via coupling mechanisms are represented as dashed lines in the figures.
- the apparatus 100 includes a light emitting assembly 104 configured to emit an emitted beam 106 of light.
- the emitted beam 106 is emitted at a plurality of wavelengths and is modulated with a modulating frequency.
- the modulating frequency is in range of 100 Hz to 1 MHz.
- the emitted beam 106 is directed onto a surface S of the work-piece 102 .
- the light emitting assembly 104 is coupled a first beam directing unit 108 via a single mode optical fiber 110 .
- the first beam directing unit 108 is configured to direct the emitted beam 106 being emitted from the light emitting assembly 104 onto the surface S of the work-piece 102 .
- the first beam directing unit 108 may include a lens (not shown in the figure) such as a converging lens, as known in the art, that allows the emitted beam 106 to form a beam spot on the surface S of the work-piece 102 .
- the apparatus 100 further includes a detector 112 configured to receive a reflected beam 114 of light that includes at least a portion of the emitted beam 106 is reflected from the surface S of the work-piece 102 .
- the apparatus 100 further includes a second beam directing unit 116 configured to direct the reflected beam 114 from the surface S of the work-piece 102 to the detector 112 .
- Examples of the second beam directing unit 116 include, but not limited to, folding mirror and a beam splitter. As would be understood, the beam-splitter allows for the emitted beam 106 to impinge the surface S of the work-piece 102 at a normal or sufficiently normal angle to the plane of the work-piece 102 .
- the surface S of the work-piece 102 reflects a portion of the emitted beam 106 as a partially reflected beam 114 a .
- the partially reflected beam 114 a impinges upon the second beam directing unit 116 and is directed towards the detector 112 as a directed beam 114 b . Therefore, the reflected beam 114 comprises the sum of beams 114 a and 114 b .
- the detector 112 is further configured to generate a signal indicative of a position of the reflected beam on the detector 112 .
- the detector 112 is selected from a group comprising of a one-dimensional (1D) position sensitive detector (PSD) and a two-dimensional (2D) PSD.
- the detector 112 is a 1D PSD and the 1D PSD generates the signal indicative of a position of a beam spot formed by the reflected beam 114 impinging on the 1D PSD in 1D.
- the detector 112 is a 2D PSD and the 2D PSD generates the signal indicative of a position of a beam spot formed by the reflected beam 114 impinging on the 2D PSD in 2D.
- a working of the 1D PSD for measuring the position of the beam spot in accordance with the present disclosure is explained in later paragraphs.
- the PSD is a single pixel device. Therefore, in such implementations, problems associated with light losses on inter-pixel spaces and pixel non-uniformity may be reduced eliminated.
- the PSD can be significantly faster and may require less digital processing, thereby resulting in improved performance of the apparatus 100 .
- the apparatus 100 is further a signal processing unit 118 .
- the signal processing unit 118 is configured to remove the noise from the signal generated by the detector 112 based on the modulating frequency to obtain a processed signal.
- the noise can be stray light or thermal background light.
- the signal processing unit 118 rejects white noise or a thermal background having an amplitude larger (e.g., approx. 100000 ⁇ ) than an input signal. Therefore, a reference frequency of the signal processing unit 118 is synchronized with the modulating frequency using for modulating the emitted beam 106 . This enables separation of the signal generated by the detector 112 that has known frequency and phases from other sources of radiation, which are not synchronized such as the thermal background.
- the signal processing unit 118 is coupled to the light emitting assembly 104 via a coupling mechanism 120 such as a cable. As such, the signal processing unit 118 is tuned or synchronized with the modulating frequency used for modulating the emitted beam 106 .
- the signal processing unit 118 is further coupled to the detector 112 via a coupling mechanism 122 such as cable.
- the signal processing unit 118 is selected from a group comprising of a phase sensitive detector, a low-noise amplifier, analog lock-in amplifier and a digital lock-in amplifier. A working of the lock-in amplifier in the signal processing unit 118 for removing noise from the signal in accordance with the present disclosure is explained in later paragraphs.
- the apparatus further includes a control unit 124 coupled with the signal processing unit 118 via a coupling mechanism 126 such as a cable.
- the control unit 124 is configured to receive the processed signal from the signal processing unit 118 .
- the control unit 124 is configured to determine the topography of the surface based on the processed signal using techniques as described in later paragraphs.
- the control unit 124 may further be coupled with a display unit 128 to display the determined topography.
- the apparatus 100 further comprises a holder 130 configured to receive the work-piece 102 .
- the holder 130 is an XY stage capable of movement in an x-y axis.
- the holder 130 is coupled with the control unit 124 via a coupling mechanism 132 such as a cable.
- the control unit 124 is further configured to impart a linear motion in the x-y plane to the holder 130 while the light emitting assembly 104 remains stationary. As such, the emitted beam 106 is caused to scan across the surface S of the work-piece 102 in a scanning direction corresponding to the linear motion of the holder 130 .
- the detector 112 is further configured to generate a series of signals indicative of positions of the reflected beam 114 on the detector 112 .
- the control unit 124 is further configured to determine the topography of the surface based on the series of signals. Multiple scanned areas can be implemented to provide the control unit 124 with additional data to calculate a more accurate curvature of the work-piece 102 .
- the surface S of the work-piece 102 is provided with a thin film (not shown in the figure) in a manner as known in the art, for manufacturing various semiconductor devices such as integrated devices, three-dimensional electronic circuits, systems-on-a-chip structures, lithographic reticles, flat panel display systems, etc.
- the control unit 124 is further configured to determine stress imparted on the film formed on the surface S of the work-piece 102 based on the determined topography. To this end, in one implementation, the control unit 124 obtains a blank topography of the work-piece 102 prior to application of the film on the surface S of the work-piece 102 . Such blank topography can be obtained in a similar manner as described above.
- the control unit 124 can save such blank topography in a memory (not shown in the figure) and then fetch the blank topography from the memory during the determination of the stress. Upon obtaining, the control unit 124 processes the blank topography and the determined topography to determine the stress imparted on the film. In an example, the control unit 124 determines a slope of the surface S from which topography is found as a vertical displacement of the work-piece based on the comparison between the blank topography and the determined topography, and detects a stress value in the film provided/deposited on the work-piece 102 based on the vertical displacement using techniques as known in the art. The control unit 124 may further display the determined stress on the display unit 128 .
- FIG. 2 schematically illustrates the light emitting assembly 104 employed in the apparatus 100 shown in FIG. 1 , in accordance with the embodiment of the present disclosure.
- the light emitting assembly 104 comprises at least three light sources 200 - 1 , 200 - 2 , and 200 - 3 (hereinafter referred as light sources 200 to denote the plural form).
- Examples of the light sources include, but not limited to, laser sources and light emitting diodes.
- Each of the at least three light sources 200 emit electromagnetic radiation at a wavelength selected from the plurality of wavelengths. As would be understood, each of light sources emits electromagnetic radiation having different wavelengths.
- the light sources can emit electromagnetic radiation at any wavelength selected from 405 nanometers (nm), 520 nm, 635 nm, 658 nm, and 780 nm.
- nm nanometers
- the description supposes three optical light sources. It will be appreciated by those of ordinary skill in the art that the various embodiments described in the present disclosure are not so limited, and that the present disclosure is applicable for any (e.g., reasonable—smaller than ten or twenty) number of optical light sources.
- the emitted beam 106 is with a modulating frequency to enable removal of noise, i.e., thermal background light, during detection of the position of the light beam on the detector 112 . Consequently, the light emitting assembly 104 modulates each of electromagnetic radiations emitting from the at least three light sources 200 with the modulating frequency. Therefore, the light emitting assembly 104 further includes a multi-frequency multichannel current supply 202 configured to provide a current for the at least three light sources 200 - 1 , 200 - 2 , and 200 - 3 , via coupling mechanisms 204 - 1 , 204 - 2 , and 204 - 3 , respectively, such as cables.
- a multi-frequency multichannel current supply 202 configured to provide a current for the at least three light sources 200 - 1 , 200 - 2 , and 200 - 3 , via coupling mechanisms 204 - 1 , 204 - 2 , and 204 - 3 , respectively, such as cables.
- the multi-frequency multichannel current supply 202 may provide reference signal synchronized with the currents driving the light sources 200 - 1 , 200 - 2 , and 200 - 3 , by means a coupling mechanism 206 such as a multi-wire electrical cable to modulate the emitted electromagnetic radiations.
- the multi-frequency multichannel current supply 202 may modulate the electromagnetic radiations using techniques as known in the art.
- the light emitting assembly 104 further includes a beam combiner 208 coupled to the at least three light sources 200 - 1 , 200 - 2 , and 200 - 3 via single mode optical fibers 210 - 1 , 210 - 2 , and 210 - 3 , respectively.
- the beam combiner 208 is configured to combine the electromagnetic radiation thus modulated into the emitted beam 106 .
- the electromagnetic radiations are modulated prior to the emitted beam 106 being directed onto the surface S of the work-piece 102 and the emitted beam 106 emerging out of the beam combiner 208 is a multicolor frequency modulated beam.
- the single mode optical fibers 210 allow nearly lossless combining of the electromagnetic radiation by the beam combiner 208 .
- maintenance of the light emitting assembly 104 is easier as a realignment of the light emitting assembly 104 may be reduced or eliminated in case any repair and/or replacement.
- the beam combiner 208 transmits the emitted beam 106 via the single mode optical fiber 110 to the first beam directing unit 108 .
- the emitted beam 106 emerging from the single mode optical fiber 110 has a better beam quality, is significantly more uniform, and may closely resemble a Gaussian beam shape.
- the emitted beam 106 may also be symmetric with respect to the rotation, or symmetric with respect to the transformation of rotation if a rotational motion is imparted on the holder 130 .
- the emitted beam 106 can be easily collimated using achromatic optics (not shown in the figure) into improved or nearly perfect collinear beam.
- Such a collinear multicolor beam enables easier measurement of the topography of the work-piece 102 at every individual wavelength and may result in the same or substantially the same measurement value at each wavelength.
- FIG. 3 a and FIG. 3 b schematically illustrates the detector 112 employed in the apparatus 100 shown in FIG. 1 .
- the detector 112 is selected from a group comprising of 1D PSD and 2D PSD.
- the PSD is based on silicon PIN diode technology and is used to measure the position of the integral focus of an incoming light signal.
- a light spot on the PSD for instance, is converted into a continuous electrical signal corresponding to the focal position of this spot.
- the position of the beam spot is derived from the relationship between two output currents.
- the detector 112 includes PN junction 302 .
- Top part/layer 304 e.g., n layer, of the junction 302 may be thin and may have significant resistance, while lower part/layer 306 , e.g., p layer, of the junction 302 may be thick, heavily doped and its resistance may be negligible.
- the top layer 304 is connected to two ammeters, i.e., ammeter 308 - 1 at one end and ammeter 308 - 2 at another end of the junction 302 .
- the lower layer 306 of the junction 302 is connected to a voltage source 310 .
- the reflected beam 114 impinges the top layer 304 of the junction 302 at point P 1 , which is located at distance X 1 from one end of the junction 302 and distance X 2 from the other end of the junction 302 .
- the reflected beam 114 is modulated at frequency f 1 .
- the reflected beam 114 generates a current flowing through the PN junction that is proportional to light intensity, and may be modulated at the same or substantially the same frequency as intensity modulated beam.
- the illuminated spot at location P 1 behaves as a current source, where the magnitude of the current corresponds to light intensity only, and does not depend on location (values X 1 , X 2 ).
- the PSD gives a position of the incident light making it practically insensitive to light spot shape or size, as long as it is not larger than the detector. Stray light and leakage current can be compensated for, to get a good position determination as long as the PSD stays in the linear region and does not saturate.
- FIG. 3 b an example equivalent circuit 312 of the 1D PSD as the detector 112 is illustrated.
- the illuminated spot is modeled by current source 314 having frequency f 1 , which may be the same or substantially the same as frequency f 1 used for modulating the reflected beam.
- the current source 314 generates current I 1 and I 2 .
- the two resistances, R 1 and R 2 , of the top layer 304 are may be proportional (e.g., completely proportional in some instances) to the distances X 1 and X 2 , respectively, from the beam spot. This means that the ratio of the two currents, I 1 and I 2 , may give a relatively accurate position of the beam spot.
- the relationship between the currents I 1 and I 2 and the resistors R 1 and R 2 can be determined as,
- I ⁇ ⁇ 1 I ⁇ ⁇ 2 R ⁇ ⁇ 2 R ⁇ ⁇ 1
- I ⁇ ⁇ 1 I ⁇ ⁇ 2 X ⁇ ⁇ 2 X1
- the values of distances X 1 , and X 2 can be determined.
- the signal processing unit 118 can be used to reject noise from the generated signal indicative of the position given by X 1 and X 2 , as described below.
- FIG. 4 a , FIG. 4 b , and FIG. 4 c schematically illustrates the signal processing unit 118 employed in the apparatus 100 shown in FIG. 1 .
- the signal processing unit 118 is selected from a group comprising of phase sensitive detector, a low-noise amplifier, analog lock-in amplifier and a digital lock-in amplifier.
- the lock-in amplifier 400 includes an amplifier 402 , a mixer 404 , and a low pass filter 406 .
- the lock-in amplifier 400 when operating with a reference signal having a frequency much larger than the cutoff frequency of the low pass filter 406 is used to reject noise in which signal may be buried.
- V out ⁇ 0 ⁇ ⁇ V in ⁇ ( t ) ⁇ V ref ⁇ ( t ) ⁇ e t T ⁇ dt
- V in is input voltage
- V ref is reference signal normalized so it does have amplitude 1 (unit less)
- the lock-in amplifier 400 together with PSD or the detector 112 may be used to separate signal having known frequency and phase (same as current exciting light sources 200 - 1 , 200 - 2 , and 200 - 3 employed in the apparatus 100 ), from other not synchronized sources of radiation.
- the lock-in amplifiers can be typically supplied with either sinusoidal or square wave reference signals.
- the lock-in amplifier 400 is synchronized or tuned with a reference signal the same or substantially the same as the modulating frequency of the light sources 200 - 1 , 200 - 2 , and 200 - 3 .
- an example equivalent circuit 408 of the signal processing unit 118 is illustrated that will be employed with the PSD or the detector 112 for measuring current in phase sensitive, synchronized manner when the multi-wavelength beam is modulated a frequency f 1 , i.e., reflected beam 114 b , impinges on the PSD.
- a trans-impedance amplifier 410 may be placed in front of the lock-in amplifier 400 . As such, the lock-in amplifier 400 can be readily used to measure current components flowing through the input having frequency f 1 when rejecting all other current.
- the signal processing unit 118 can be used for removing noise when each of electromagnetic radiations forming the emitted beam 106 is modulated at substantially different frequencies.
- the signal processing unit 118 may include a plurality of lock-in amplifiers 400 .
- Each of the plurality of lock-in amplifiers 400 has a reference signal the same as or substantially the same as the modulating frequency of each of the light sources 200 - 1 , 200 - 2 , and 200 - 3 .
- an example equivalent circuit 412 of the signal processing unit 118 comprising of a plurality of lock-in amplifiers 400 is illustrated that is employed with the PSD or the detector 112 for measuring current in phase sensitive, synchronized manner when the multi-wavelength beam is modulated at different frequencies i.e., f 1 , f 2 , and f 3 .
- the plurality of lock-in amplifiers 400 is coupled in a parallel-connection to the output of the trans-impedance amplifier 410 . This arrangement allows simultaneous measurement of the current signals at several different frequencies, i.e., f 1 , f 2 , f 3 .
- FIG. 5 schematically illustrates the apparatus 100 for measuring surface topography of the work-piece 102 , in accordance with another embodiment of the present subject matter.
- the apparatus 100 includes at least one further light emitting assembly in addition to the light emitting assembly 104 (hereinafter referred to as first light emitting assembly 104 for sake of clarity).
- first light emitting assembly 104 includes the first light emitting assembly 104 and a second light emitting assembly 500 .
- the first light emitting assembly 104 is configured to generate a first emitted beam 106 , as described earlier.
- the first emitted beam 106 is emitted at a plurality of wavelengths and is modulated at a first modulating frequency.
- the second light emitting assembly 500 is configured to emit a second emitted beam 502 , in a manner similar to the first emitted beam 106 emitted by the first light emitting assembly 104 .
- the second emitted beam 502 is emitted at a plurality of wavelengths and is modulated at a second modulating frequency.
- the second light emitting assembly 500 comprises at least three light sources (not shown in the figure), in a manner as described in FIG. 2 .
- Each of the at least three light sources emit electromagnetic radiation at a wavelength selected from the plurality of wavelengths and modulated with the second modulating frequency.
- the second modulating frequency is substantially different from the first modulating frequency.
- the apparatus further includes a third beam directing unit 504 similar to the first beam directing unit 108 .
- the detector 112 receives a first reflected beam 114 of light and second reflected beam 506 .
- the detector 112 is disposed at a fixed position in a plane containing the first reflected beam 114 and the second reflected beam 506 .
- the first reflected beam 114 of light that includes at least a portion of the first emitted beam 106 as reflected from the surface S of the work-piece 102 .
- the second emitted beam 502 includes at least a portion of the second emitted beam 502 as reflected from the surface S of the work-piece 102 .
- the apparatus 100 includes the second beam directing unit 116 configured to direct a reflected beam from the surface S of the work-piece 102 to the detector 112 .
- the second beam directing unit 116 directs the first reflected beam 114 and the second reflected beam 506 impinge on the detector 112 simultaneously but at different positions.
- the detector 112 then generates a first signal indicative of a position of the first reflected beam 114 on the detector 112 based on the first modulating frequency. Simultaneously, the detector 112 generates a second signal indicative of a position of the second reflected beam 506 on the detector 112 based on the second modulating frequency. Since the first modulating frequency and the second modulating frequency are substantially different, the detector 112 is able to generate signals indicative of positions of the first reflected beam 114 and the second reflected beam 506 simultaneously. Thus, the detector 112 receives two reflected beams at two different positions and provides corresponding signals indicative two different positions simultaneously, as described below.
- FIG. 6 a , FIG. 6 b , FIG. 6 c , and FIG. 6 d schematically illustrate the detector 112 employed in the apparatus 100 shown in FIG. 5 for simultaneously detecting the position of multiple beams impinging on the detector 112 .
- the detector 112 is selected from a group comprising of 1D PSD and 2D PSD.
- the PSD is based on silicon PIN diode technology and is used to measure the position of the integral focus of an incoming light signal.
- a light spot on the PSD for instance, is converted into a continuous electrical signal corresponding to the focal position of this spot.
- the position of a direction is derived from the relationship between two output currents.
- the detector 112 includes PN junction 302 .
- Top part/layer 304 i.e., n layer of the junction 302 may be thin and may have significant resistance.
- Lower part/layer 306 i.e., p layer of the junction 302 may be thick, heavily doped and its resistance may be negligible.
- the top layer 304 is connected to two ammeters, i.e., ammeter 308 - 1 at one end and ammeter 308 - 2 at other end of the junction 302 .
- the lower layer 306 is connected to a voltage source 310 .
- the first multi-wavelength reflected beam 114 and the second multi-wavelength reflected beam 506 have different intensities and are modulated at two different frequencies f 1 and f 2 , respectively.
- the first multi-wavelength reflected beam 114 and the second multi-wavelength reflected beam 506 simultaneously impinge on the PSD or the detector 112 at two different spots P 1 and P 2 , respectively.
- the point P 1 is located at distance X 1 from one end of the junction 302 and the point P 2 is located at distance X 2 from other end of the junction 302 .
- the distance between the points P 1 and P 2 is X 3 .
- the point P 1 is located at distance X 1 from one end of the junction 302 and at distance (X 2 +X 3 ) from the other end of the junction 302 .
- the point P 2 is located at distance X 2 from one end of the junction 302 and at distance (X 1 +X 3 ) from the other end of the junction 302 .
- the detector 112 is operating in a linear region. As such, stray light and leakage current can be compensated for, to get a good position determination.
- each spot becomes a separate and independent current source, one operating at frequency f 1 , and another operating at frequency f 2 .
- the illuminated spot P 1 is modeled with a current source 314 having frequency f 1 , which may be the same or substantially the same as frequency f 1 used for modulating the reflected beam 114 .
- the illuminated spot P 2 is modeled with a current source 604 having frequency f 2 , which may be the same or substantially the same as frequency f 2 used for modulating the reflected beam 506 .
- the current sources generate current I 1 and I 2 .
- the three resistances, R 1 , R 2 , and R 3 , of the top layer may be proportional (e.g., completely proportional in some instances) to the distances X 1 , X 2 , and X 3 , respectively. This means that the ratio of the two currents, I 1 and I 2 , may give a relatively accurate position of the beam spots.
- FIG. 6 c illustrates an example equivalent circuit 606 of the 1D PSD as the detector 112 for measuring beam spot at location P 1 .
- the current source 314 operating at the modulating frequency f 1 generates current I 1 f 1 and I 2 f 1 .
- the two resistances, R 1 , R 2 , and R 3 , of the top layer 304 may be proportional (e.g., completely proportional in some instances) to the distances X 1 , X 2 , and X 3 , respectively, from the beam spot P 1 .
- FIG. 6 d illustrates an equivalent circuit 608 of the 1D PSD as the detector 112 for measuring beam spot at location P 2 .
- the current source 604 operating at the modulating frequency f 2 generates current I 1 f 2 and I 2 f 2 .
- the two resistances, R 1 , R 2 , and R 3 , of the top layer may be completely proportional (e.g., completely proportional in some instances) to the distances X 1 , X 2 , and X 3 , respectively, from the beam spot P 2 .
- the currents I 1 f 1 and I 2 f 1 have frequency f 1 and same or substantially the same phase, while currents I 1 f 2 and I 2 f 2 have frequency f 2 and same or substantially the same phase.
- These currents can be simultaneously measured using two ammeters. From these current measurements, the position of beam spot P 1 and P 2 can be determined as described in reference to FIG. 3 b . Therefore, as can be gathered from FIG. 6 c , the relationship between the currents I 1 and I 2 generated by current source operating at modulating frequency f 1 and the resistors R 1 , R 2 , and R 3 can be determined as,
- I ⁇ ⁇ 1 I ⁇ ⁇ 2 R ⁇ ⁇ 2 R ⁇ ⁇ 1 + R ⁇ ⁇ 3
- I ⁇ ⁇ 1 I ⁇ ⁇ 2 X ⁇ ⁇ 2 X ⁇ ⁇ 1 + X ⁇ ⁇ 3
- the relationship between the currents I 1 and I 2 generated by current source operating at modulating frequency f 2 and the resistors R 1 , R 2 , and R 3 can be determined as,
- I ⁇ ⁇ 1 I ⁇ ⁇ 2 R ⁇ ⁇ 2 ⁇ + R ⁇ ⁇ 3 R ⁇ ⁇ 1
- I ⁇ ⁇ 1 I ⁇ ⁇ 2 X ⁇ ⁇ 2 ⁇ + X ⁇ ⁇ 3 X ⁇ ⁇ 1
- the positions of the two beams may be measured separately but simultaneously and yet the two beams may not interfere with each other as the PSD or the detector 112 operates in a linear region and is not saturated.
- the position of beam spots formed by multiple beams having distinct modulation frequencies impinging on the PSD can be determined.
- the apparatus 100 is configured to remove noise from a signal generated by the detector 112 .
- the apparatus 100 comprises a first signal processing unit 118 configured to remove noise from the first signal indicative of a position of the first reflected beam 114 based on the first modulating frequency.
- the apparatus 100 further includes a second signal processing unit 508 configured to remove noise from the second signal indicative of a position of the second reflected beam 506 based on the second modulating frequency
- the first signal processing unit 118 is synchronized or tuned with the first modulating frequency. As such, the first signal processing unit 118 is coupled with the first light emitting assembly 104 via the coupling mechanism 120 . The first signal processing unit 118 is coupled with the detector 112 via the coupling mechanism 122 . The first signal processing unit 118 is coupled with the control unit 124 via the coupling mechanism 126 . In a similar manner, the second signal processing unit 508 may be substantially synchronized or tuned with the second modulating frequency. As such, the second signal processing unit 508 is coupled with the second light emitting assembly 500 via the coupling mechanism 120 . The second signal processing unit 508 is coupled with the detector 112 via the coupling mechanism 122 .
- the second signal processing unit 508 is coupled with the control unit 124 via the coupling mechanism 126 . This enables separation of the signal generated by the detector 112 that has known frequency and phases from other sources of radiation, which are not synchronized. Thus, the second signal processing unit 508 receives the signal generated by the detector 112 and removes noise from the signal, in a manner similar to the first signal processing unit 118 as described above in reference to FIG. 4 b.
- the first signal processing unit 118 Upon removing the noise from the first signal, the first signal processing unit 118 generates a first processed signal and transmits the first processed signal to the control unit 124 , as described earlier. Similarly, upon removing the noise from the first signal, the second signal processing unit 508 generates a second processed signal and transmits the processed signal to the control unit 124 . The control unit 124 then determines the topography of the surface S of the work-piece 102 based on the first processed signal and the second processed signal. In this manner, multiple emitted beams can be directed towards the surface S of the work-piece and multiple reflected beams can be received by the detector.
- FIG. 7 illustrates a flow diagram of a method 700 for measuring surface topography of a work-piece, in accordance with an embodiment of the present subject matter.
- the method 700 comprises at step 701 , emitting an emitted beam of light, the emitted beam is emitted at a plurality of wavelengths and modulated with a modulating frequency.
- the method 700 comprises at step 702 , directing the emitted beam onto a surface of a work-piece.
- the method 700 comprises at step 703 , receiving a reflected beam of light that includes at least a portion of the emitted beam as reflected from the surface of the work-piece.
- the method 700 comprises at step 704 , generating a signal indicative of a position of the reflected beam on the detector.
- the method 700 comprises at step 705 , removing noise from the signal thus generated on the modulating frequency to obtain a processed signal.
- the method 700 comprises at step 706 , determining the topography of the surface based on the processed signal.
- the method 700 comprises emitting at least three electromagnetic radiations at a wavelength selected from the plurality of wavelengths; and combining the electromagnetic radiations into the emitted beam.
- the method 700 comprises modulating each of electromagnetic radiations with the modulating frequency.
- the method 700 further comprises combining the electromagnetic radiations thus modulated into the emitted beam.
- FIG. 8 illustrates a flow diagram of a method 800 for measuring surface topography of a work-piece, in accordance with one another embodiment of the present subject matter.
- the method 800 comprises at step 801 , emitting a first emitted beam of light, the first emitted beam being emitted at a plurality of wavelengths and modulated at a first modulating frequency.
- the method 800 comprises at step 802 , emitting a second emitted beam of light, the second emitted beam being emitted at a plurality of wavelengths and modulated at a second modulating frequency.
- the second modulating frequency is substantially different from the first modulating frequency.
- the method 800 comprises at step 803 , directing the first emitted beam and the second emitted beam onto the surface of the work-piece.
- the method 800 comprises at step 804 , receiving a first reflected beam of light and a second reflected beam of light.
- the first reflected beam includes at least a portion of the first emitted beam as reflected from the surface of the work-piece.
- the second reflected beam includes at least a portion of the second emitted beam as reflected from the surface of the work-piece.
- the method 800 comprises at step 805 , generating a first signal indicative of a position of the first reflected beam on the detector based on the first modulating frequency.
- the method 800 comprises at step 806 , generating a second signal indicative of a position of the second reflected beam on the detector based on the second modulating frequency.
- the method 800 comprises at step 807 , determining the topography of the surface based on the first signal and the second signal.
- the method 800 comprises removing noise from the first signal based on the first modulating frequency.
- the method 800 comprises removing noise from the second signal based on the second modulating frequency.
Abstract
Description
Where Vin, is input voltage;
Vref is reference signal normalized so it does have amplitude 1 (unit less); and
T is the time constant related to the cutoff frequency of the
All other components of Vin are rejected.
I1=I1f1+I1f2;
I2=I2f1+I2f2
Claims (20)
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