UA97893C2 - Method of redundant measurements of linear dimensions of nano-objects - Google Patents

Abstract

The invention relates to measuring means for development of high-accuracy digital measuring devices for linear dimensions of nano-objects. The method of excess measurements of linear dimensions of nano-objects is in illumination of the image of the nano-object with flux of radiation with given powerand wavelengthwith narrow spectral band, formation of primary spatial optical image of nano-object, its optical amplificationtimes, optical-electronic appropriate conversion of spatial primary optical image to spatial discrete-analog signal. Its integration during a given time interval, amplificationtimes and analog-digital conversion of spatial discrete-analog signal to data massif, ordered remembering, reverse conversion of those data to increased in dimensions secondary optical image, additional formation on the screen of display and bringing into coincidence with the secondary optical image obtained of images of two linear normal to each other scales with respective numerical marks and determination of the value of length by numerical marks of scales or by coordinate grid with a priori normalized dimensions of square sides. First one sets the first normalized valueof coefficient of conversion of image, with lighting the length nano-measure, image of primary optical image of the length nano-measure as vertical strips with same thicknesses is amplifiedtimes with conversion to secondary image with normalized by value separation, in electronic way one changes the scale of the main marks of two linear normal to each other scales till the value of distancebetween adjacent marks of scales becomes equal to amplifiedtimes value of distancebetween parallel vertical strips of length nano-measure, i.e. to, with bringing into coincidence the origin with one of vertical strips of the secondary image of the length nano-measure, with dividing dimensions of squares of the coordinate grid obtained to ten partsand with artificial formation of an additional fine grid with normalized by values separation, one remembers the graphical image of scales with the main and additional coordinate grids obtained at the screen of the display, with replacement of the length nano-measure with another nano-measure with linear dimension with length, that is chosen from the condition that, in same way one transforms the primary optical image of the second nano-measure to secondary one at coefficient of conversion of image equal to, with determination of lengthof the secondary optical image of the second nano-measure, the value obtained for lengthoris remembered, one replaces the second length nano-measure by the nano-object under investigation with unknown length, in same way one determines the lengthof the secondary optical image of the object under investigation, the value of lengthorobtained is remembered, with determination of the second normalized valueof coefficient of amplification of the image, with determination of lengthof the secondary optical image of the nano-object under investigation, one replaces the nano-object under investigation with unknown lengthwith the second nano-measure, at new value of coefficient of conversionone determines the lengthof the secondary optical image of the nano-measure, on the real value of length of the nano-object under investigation one makes conclusion by an equation in numeric values given. The invention provides exclusion of systematic errors of measurement.

Description

the origin of the coordinates with one of the vertical bands of the secondary image of nanometers, length, divide the dimensions of the squares of the received coordinate grid into ten parts o1) - ODANU Z Oka (AKA) artificially form an additional fine grid with a value-normalized step 'ot)nmx (Ao)nm remember the graphic image of the scales with the main and additional coordinate grids received on the display screen, replace the nanometer of length with a second nanometer with a linear dimension of length 9, which is chosen on the condition that Po) 2 (30 1, similarly transform the primary optical image of the second nanometer into the secondary with the image conversion factor equal to З, determine the length Io (o) З Zlo) of the secondary optical image of the second nanometer, the obtained value of the length M or M is memorized, replace the second nanometer with the investigated nanoobject of unknown length, determine the length I2 ( 2) With their) secondary optical image of the object under investigation similarly, the obtained value of the length Ma or M2 is memorized, update the second normalized value Zp of the image amplification factor, determine the length

From (Iz) - Bag ХУ) of the secondary optical image of the investigated nanoobject, the investigated nanoobject of unknown length is replaced by their second nanometer, at the new value of the conversion coefficient Zla, the length of the secondary optical image of this nanometer is determined. the actual value of the length of the investigated nanoobject is judged by the given equation of numerical values. The invention ensures the exclusion of systematic measurement errors. 1 and

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Drawing. Functional diagram of a digital gauge of linear sizes of nanoprojectiles

The invention belongs to nanometry and can be used in the creation of high-precision optical-electronic means of measuring the linear dimensions of nanoobjects with preliminary amplification of the optical image of the nanoobject and its visualization.

A known method of measuring the linear dimensions of nanoobjects" (see, for example,

M.N. Strykhanov, N.N. Degtyarenko, V.V. Pylyugin, and others. Review of computer visualization of nanostructures at the National Institute of Physics and Mathematics of the Russian Academy of Sciences (Fig. 14. Measurement of distances and angles). Per://5м-огпай.согп/ехатрие/ипаех.пити), based on the use of a program for interactive visualization of a nanoobject and determination of the shortest distance between atoms.

The known method is characterized by insufficiently high accuracy of measuring the linear dimensions of nano-objects or the distance between given sections (atoms), because it is based on direct measurement methods that give the measurement result reduced to the output of the measuring channel with all measurement errors. In addition, the known method is not aimed at reducing or eliminating systematic measurement errors.

A known method of determining the linear dimensions of nanoobjects (see, for example, A.Yu. Kuzyn,

V.N. Maryutyn, V.V. Kalendyn. Methods and means of measuring linear dimensions in the nanometer range. per://papo-Tesppoiodu. ogu/papo-teyomuiu-diarazop/te!oauYi-i-ztedvima-ihtegepiu-Ipeupuin-hayategom-um-papoteigo-mhot-aiar.piti), based on the irradiation of an image of a nanoobject with a stream of optical or hard radiation of a given wavelength with a narrow spectral band or coherent light, formation of the primary spatial optical image of a nanoobject, optical-electronic amplification of it, transformation into a secondary optical image with subsequent determination of its dimensions by the method of direct measurements.

The known method is also characterized by insufficiently high accuracy of measuring the linear dimensions of nano-objects or the distance between given sections (atoms), because it is also based on direct measurement methods that provide the result of measurement brought to the output of the measuring channel. In addition, it does not ensure the reduction or elimination of systematic measurement errors, including errors due to changes in the length of the optical path.

The closest in technical essence is the method of measuring the linear dimensions of nanoobjects (see Yu.A. Novikov, A.V. Rakov, P.A. Todua. Nanotechnology and nanometrology.

From trans:/Llyamum ori. гиЯгодиог/уо! 62/L pomikom.rai), based on the irradiation of the image of the nanoobject with a stream of optical (or hard) radiation of a given power Fo and wavelength ho with a narrow spectral band or coherent light and the formation of the primary spatial optical image of the nanoobject, its optical amplification in according to times, optical-electronic regular transformation of a spatial primary optical image into a spatial discrete-analog signal, its integration (exposure) during a given time interval o s s, where 3h is the signal reading frequency, electronic amplification by 2 times, regular analog-differential transformation (with the conversion factor Kp) of a spatial discrete-analog signal into an array of data (numbers), orderly memorization of the received data (digital codes), reverse transformation (with the conversion factor ") of this data into an enlarged secondary optical image (on the screen . . . Zp - KopKek of the display) with the general conversion factor (or sub gain) equal to 7" ope, on the additional formation on the display screen and combining with the received secondary optical image the images of two linear mutually perpendicular scales with the corresponding numerical (digitized) marks set with a step A, and the image of the corresponding code-controlled coordinate grid with changing side values of squares C, determining the linear dimensions of the secondary optical image of the nanoobject by placing the cursor on the initial and final points of the optical image, the shortest distance between which is the length and is subject to determination, with the subsequent determination of the length value by the numerical marks of the scales or by the coordinate grid with a priori normalized dimensions sides of squares.

The known method does not ensure high accuracy of measuring the linear dimensions of nanoobjects or the distance between its given sections, because it is based on the method of direct measurements, which gives a measurement result reduced to the output of the measuring channel.

Therefore, all errors caused by the instability of the parameters of the optical-electronic channel affect the final measurement result. In addition, the known method does not ensure the reduction or elimination of basic and additional systematic measurement errors, including errors due to changes in the length of the optical path.

The invention is based on the task of creating such a method for determining the linear dimensions of nanoobjects, which would ensure the automatic exclusion of basic and additional systematic measurement errors caused by different lengths of the optical path, instability of the elements of the optical-electron channel, contamination and fogging of the optical elements of the optical elements of the channel, the influence fluctuations in the length of the optical path due to air turbulence and fluctuations in the intensity of the flow of optical radiation.

The set technical task is ensured by the fact that the method of redundant measurements of the linear dimensions of nanoobjects is based on the irradiation of the image of the nanoobject with a stream of optical (or hard) radiation of a given power 9 and wavelength 79 with a narrow spectral band or coherent light and the formation of a primary spatial optical image nanoobject, its optical amplification in op times, optical-electronic regular transformation of a spatial primary optical image into a spatial discrete-analog signal, its integration (exposure) during a given time interval p. . o with sec, where 33 is the frequency of reading the signal, 2-fold electronic amplification, regular analog-to-differential transformation (with the conversion factor Kp) of the spatial discrete-analog signal into an array of data (digital codes), orderly memorization of the received data, inverse transformation (with the conversion factor ") of this data into an enlarged secondary optical image, (on,, the display screen) with a total conversion factor (or amplification) equal to 7" ope, on the additional formation on the display screen and combining with the obtained secondary optical image of the images two linear mutually perpendicular scales with corresponding numerical (digitized) labels set with a step of "2, and the image of the corresponding coordinate . . . Ari x Ari nin ". grid with code-controlled values of the sides of the squares (Av o). determination of the linear dimensions of the secondary optical image nanoobject by setting the cursor on the initial and final points of the optical image, the shortest distance between which is the length and is subject to determination, followed by reading the coordinates of the points and determining the value of the length according to the numerical marks of the scales or according to the coordinate grid in a priori normalized dimensions of the sides of the squares.

The proposed method differs from the known ones in that the first normalized value "" of the conversion (or amplification) coefficient of the image is first set, a nanometer of length is irradiated, the image of the primary optical image of a nanometer of length in the form

From vertical bands of equal thickness (or parallel diffraction bands or in the form of an image normalized by the size of the atomic structure of the nanoscale test material) with a value-normalized step ba) the bands are amplified "n" times and converted into a secondary image with a value-normalized step AN AN) With Bats AYU strips, the scale of the main marks of two linear mutually perpendicular scales is electronically changed until the value of the distance 79 between the adjacent marks of the scales becomes equal to the value of the distance amplified by "" times

AKA) between parallel vertical strips of the nanometer of length, i.e. to (ANI - Za (A) ), combine the origin of the coordinates with one of the vertical strips of the secondary image of the nanometer of length (as a rule, from the bottom of its left side), divide the dimensions of the squares of the resulting coordinate grid into ten parts ( My) 7 ODAN) Z Ok PI and artificially form an additional (small) grid with a normalized indication with a step of S'otinmh (AoiinmM o remember the graphic image of the scales received on the display screen with the main and additional coordinate grids, replace the nanometer of length with a second nanometer with a linear with the size of the length 9, which is chosen according to the condition that Po) x (Z OA), similarly transform the primary optical image of the second nanometer into a secondary one with a conversion (or amplification) coefficient of the image equal to

Zp » determine the length Io (o) - Za Po) of the secondary optical image of the second nanometer by placing the cursor on the starting and ending points of the specified image, the shortest distance between which is its length and is subject to determination, read one or more (10-100) times and process the coordinates of these points, memorize the obtained value of the length of Mode M, replace the second nanometer of length with the investigated nanoobject of unknown length Their, determine the length I2 02) З За) of the secondary optical image of the object under investigation by placing the cursor on the starting and ending points of the secondary optical image of the object under study, the distance between which is its length and is subject to determination, read one or more (10-100) times and process the coordinates of these points, the obtained length value

Me or Mag are memorized, set the second normalized value Зп of the image amplification factor, determine the length from (from) ЗЗла them) of the secondary optical image of the investigated nanoobject by placing the cursor on its starting and ending points, read one or more (10- 100) times and process the coordinates of these points, the obtained value of the distance M or Ma. remember, replace the investigated nanoobject of unknown length with their second nanometer, at the new value of the conversion coefficient Zp, determine the length 44) Zla(o)) of the secondary optical image of this nanometer by pointing the cursor and reading one or more (10-100) coordinates the beginning and end of its image, the obtained value of the length of Ma or Ma is memorized, and the actual value of the length of the investigated nanoobject is determined by the equation of numerical values x Z Mo

Ma - M or, with the addition of random disturbances, according to the equation of numerical values

Moss - Mine) -----

Ma - Mu

We are Mo Mz. Ma J. . . where ; and the averaged length measurement results obtained by reading the coordinates of the beginning and end of the optical length image 10-100 times.

The method differs in that during the formation of secondary optical images of the second nanometer and the investigated nanoobject, one of the known methods provides equality between the two lengths of the optical path op - 5; op-32; op - PPE and op - 314; where SHI ; I2; IZ I 14 errors of setting the specified length of the optical path, i.e. ot) - Iopg) Z Popa) Z Popa) Z op) at 20. (Мп) - (Аг) - (Ав) - (Ам) - (А) - nozzles or An) - (Ag) - (Av) - (Aa) - 0

The figure shows a functional diagram of a digital meter of linear sizes of nano-objects, where 1 is a source of optical radiation; 2 - point diaphragm-source; C - optical system; 4 - subject table; 5 - research object; 6 - the first executive mechanism; 7 - confocal diaphragm; 8 - video sensor (device with charge connection or CCD matrix); 9 - voltage generator for controlling the conversion factor of the primary optical image into the secondary image); 10 - the second executive mechanism; 11 - microcontroller; 12 - non-volatile memory device; 13 - operational memory device; 14 - digital counter; 15 - graphic display; 16 - keyboard; 17 - common tire.

The essence of the proposed method of redundant measurements of the linear dimensions of a nanoobject

It consists in the following.

The proposed method of determining the linear dimensions of nanoobjects is based on the irradiation of the image of the nanoobject with a stream of optical (or hard) radiation of a given power and wavelength 79 with a narrow spectral band or coherent light and the formation of the primary spatial optical image of the nanoobject.

The use of one or another irradiation depends on the method of creating an image of the primary optical image of a nanometer length: in the form of parallel strips of equal thickness; in the form of parallel diffraction bands or in the form of an image of the size-normalized atomic structure of the nanoscale test material with the value-normalized step (x) of the bands or interatomic distances. All this is also connected with the use of a particular microscope (laser confocal optical microscope with scanning, electron microscope or other).

The primary, optical image of a nanoobject (under investigation or nanometers in length) is optically amplified in op times. After that, an optical-electronic regular transformation of the amplified optical spatial image into a spatial, discrete-analog signal is carried out. mine to m

The latter is integrated over a given time interval of 79 7 seconds. The spatial discrete-analog electrical signal is amplified by Ke times. Then a regular analog-to-digital conversion (with the conversion factor Ka) of the spatial discrete-to-analog signal into an array of data (digital codes) is carried out. The received data is memorized in an orderly manner.

The reverse conversion (with the conversion factor ") of the received data is carried out into a secondary optical image enlarged in size (on the display screen). The overall conversion (or amplification) factor becomes equal to "op,

In addition, images of two linear mutually perpendicular scales with corresponding numerical (digitized) labels, which are set with step 292, are formed on the display screen and combined with the obtained secondary optical image. At the same time, images of the corresponding coordinate grid are formed on the display screen (in the interactive space) - them: code-controlled values of the sides of squares 2/9,

Determining the linear dimensions of the secondary optical image of a nanoobject is carried out by placing the cursor on the initial and final points of the optical image, the shortest distance between which is the length and is subject to determination, followed by reading the coordinates of the points and determining the value of the length according to the numerical marks of the scales or according to the coordinate grid with a priori normalized sizes of the sides of the squares.

The proposed method differs from the known ones in that the first normalized value "7" of the conversion (or amplification) coefficient of the image is first set. Irradiate nanoscale length. The image of the primary optical image of a nanometer length in the form of parallel bands of equal thickness (or parallel diffraction bands or in the form of an image of the size-normalized atomic structure of the nanometer test material) with a value-normalized step M) of the bands is amplified "n times" and converted into a secondary image with a value-normalized step AN TSAN) Z BatsaАЮmО)Ю strips.

Electronically, the scale of the main marks of two linear mutually perpendicular scales is changed until the value of the distance 9 between adjacent marks of the scales becomes equal to the value of the distance АЮ) between parallel vertical strips of nanometer length, amplified by Зп times, that is, to (АНИ - Za A)

Combine the origin of the coordinates of the artificial scale with one of the vertical stripes of the secondary image of nanometer length. This is done, as a rule, from the bottom of its left side. To increase the accuracy of reading the measurement results, the dimensions of the squares of the obtained coordinate grid (Аз) - ODA) - Ол AII are divided into ten parts, i.e., an additional (small) grid is artificially created with a value-standardized step otinmh (Aoinm) on the display screen is a graphic image of scales with the main and additional coordinate grids.

Replace the nanometer of length used to calibrate the virtual scale by

From the display screen, the second nanometer. The linear size of the length 9 of the second nanometer is chosen by g - . conditions that Po) x (3 ODA, We believe that measurements should use a nanometer of length that is homogeneous with the nanoobject. This is necessary to take into account the identical optical properties of the investigated nanoobject and the nanometer of length.

In a similar way, the primary optical image of the second nanometer length is converted into a secondary one with a conversion (or amplification) coefficient of the radiation flux equal to "7".

The length of the secondary optical image of the second nanometer is determined by pointing the cursor at the initial (index "n") and end (index "n") points of the specified image, the shortest distance between which is its length and is subject to determination. They read one or more (1r-100) times and process the coordinates of these points. As a result, the numerical value of the nanometer length is obtained.

Y. When using only a linear CCD matrix as a sensor, this value can be described as follows; exp

M -KeKotFoe " Pokc -KeKotFe Po ku - ZtpFe Po) (1)

F. - Pho esq. m. Y de g o - radiation energy flow per unit length; sp - the length of the optical path of the flow of optical radiation; is - power absorption coefficient of the flow of optical radiation; 72 7, or them as - -

M, - KeKotFoe and "Ki Po) - KeKotikKu FeKio) - Z Fe (Po) (2)

Phew - Phew - Feb. Pop) where is the average (for 10-100 readings) value of the total energy flow; - the average (for 10-100 readings) value of the length of the optical path.

Values (1) and (2) are memorized.

It is assumed that during the measurement the value of the optical absorption coefficient is constant.

Only the length of the optical path can be changed.

I. When using a rectangular CCD matrix as a video sensor, the following three cases occur: 1) when setting the second nanometer of length parallel (index "g" from the word "horizontal") to the abscissa axis of the virtual scale by rotating the object table with the object, the result measurements are obtained in the form

M - Mp - Mk - Zp IFe) bo) (3) or 0 o

M - Mp - Mk - Zt (Fe Po) (4) where - unaveraged and averaged numerical values of the projection of the initial and final points of the nanometer length on the abscissa axis; 2) when placing the second nanometer of length parallel (the index "v" from the word "vertical") to the ordinate axis of the virtual scale by rotating the object table with the object, the measurement result is obtained in the form

In UM, In M i (Fe Io) , (5) ke 1 po

M - M vp -Mvk - Ity (Fe Mo) 6 nn (6) . M - M g. . we where Mvp Mik vp and vk - unaveraged and averaged numerical values of the projection of the initial and final points of the nanometer length on the ordinate axis; 3) when the nanoobject is placed at an angle of vertical direction to the coordinate axes (without rotating the stage), vim and

M - Mir Mr that (Mor - Mik) I (Muvov -Mivkr) - ZtiFe o) (7) or 2 2

M - MM gv YAM vr - Met Mav) that (Mvt Kb - Zt (Fe) Po) (8)

M. M. Mr. . m de "i Mik tv Mak. unaveraged and averaged numerical values of the projection . . . . . . . . . . . . . . . . . nanometers on the ordinate axis. --

The obtained value of the length of Mu or Mu is memorized.

Replace the second nanometer length with the investigated nanoobject of unknown length,

The length of the secondary optical image of the object under investigation is determined by placing the cursor on the starting and ending points of the secondary optical image of the object under investigation, the distance between which is its length and is subject to determination. They read one or more (10-100) times and process the coordinates of these points. The obtained value of the length M" of the investigated nanoobject is memorized.

When using only a linear CCD matrix as a sensor, this value can be described as follows: uk

Mo -KeKot (Foe Phiku -KeKot Fe Ph ik - Zp (Fe) (9) and their Petya

Mo - KeKop (Fo)e pt» "Pkc - KeKotiFe) PC y - ZtiFe Their) (10)

Values (9) and (10) are memorized.

I. When using a rectangular CCD-matrix as a video sensor, the following three cases apply: 1) when the investigated nanoobject is installed parallel to the abscissa axis of the virtual scale by turning the Preduet table with the object, the measurement result is obtained in the form

Mo - Mat - dk In ?pt Fenkh) (11) or in sho

Ma - Maga - Mak - Zt (Fe) Their), (12) where Mag and Magk Mag and Mozh. unaveraged and averaged numerical values of the projection of the initial and final points of the length of the investigated nanoobject on the abscissa axis;

2) when the investigated nanoobject is placed parallel to the ordinate axis of the virtual scale, due to the rotation of the object table, the measurement result is obtained in the form of 2 - Movp - Movk - Zti ex) (13) number o

Ma - Movp - Movk - ZtiFe) Their) ,; (193

Movp: Movk Meovp i Movk PI i i i i t de i ; and - unaveraged and averaged numerical values of the projection of the initial and final points of the length of the investigated nanoobject on the ordinate axis; 3) when placing the investigated nanoobject at an angle (3 to the coordinate axes, - without

More cells: ; t measurements are obtained in the form

Ma - Mav Ya Mor - (M ogpv -Magkv) U (Maovpv - Movcr) -Zt (Fe (15) and GE - - - - is? tan -- 5 - - -- 65 0 - - x

Ma - Magv Ya Mov - M ogpv -Mhv) yati -Moaf) -Zt (FEN) (16) de Magov and Mo 28 and Mav. unaveraged and averaged numerical values of the projection - Н - Н' Н. M гвпв Н M гвкр initial and final points of the length of the investigated nanoobject on the abscissa axis; and hvpr r 28 unaveraged and averaged numerical values of the projection of the initial and final points of the length of the investigated nanoobject on the ordinate axis.

The obtained values (11)-(16) are memorized. in

Set the second normalized value pg of the image gain coefficient.

The length of the secondary optical image of the investigated nanoobject is determined by placing the cursor on its starting and ending points. They read one or more times (10-100) and process the coordinates of these points, the obtained value of the distance Mz is memorized.

Y. When using only a linear CCD matrix as a sensor, this value can be described as follows: uk

Ma -KeKopo(Fo)e 7272 Pku - KeKopafe Their Ku - ZpaFeYIh) 7) or how

Ma -KeKolg(Fo)e "275 PX ku Z KeKotiFe) them and 7 Zpo(Fe NIH) (18)

The obtained values (17) and (18) are memorized.

I. When using a rectangular CCD matrix as a video sensor, the following three cases apply: 1) when placing the investigated nanoobject parallel to the abscissa axis of the virtual scale

Ma -5 MHP -Magk - Fe i (1 9) chis what

Ma - Maga - Magk - Zp (Fe) Ph) , (20)

Mag i Magk Mag Mzgk PI i i t t de i ; - unaveraged and averaged numerical values of the projection of the initial and final points of the length of the investigated nanoobject on the abscissa axis. 2) when the inserted nanoobject is placed parallel to the ordinate axis of the virtual scale

M Ov - Mavk - Zp? IF WE (21) cis sho

Ma - Mawpa - Mavk - Zag (Fe X) , (22) from Mzvp o; Mzvk Mzvp; Mzvk PI : : - - where and ; and - unaveraged and averaged numerical values of the projection of the initial and final points of the length of the investigated nanoobject on the ordinate axis.

C) pri-rezmishchen no and in ! by the angle p to the coordinate axes, -

Ma - Mav Z Mov - (M agov -Magkv) Z (Mzvov - Mavkv) - ZpdoiFe NIH) (23) or r | 2 2 i-th saliva Yes Uch

Ma - Mav Z Mr - (Mate -Makv) I (Moto -Mzafr) - Zp» Fe NIH) (24)

M. M. Mr. . m de Zv Zp?ro bro; Mb. unaveraged and averaged numerical values of the projection - Н - Н' Н. M vpr Н M zvkr of the initial and final points of the length of the investigated nanoobject on the abscissa axis; and

Monkey Mavuo - not yet. . more . . averaged and averaged numerical values of the projection of the initial and final points of the length of the investigated nanoobject on the ordinate axis.

The investigated nanoobject of unknown length x is replaced by a second nanometer of length 9.

With the new value of the conversion coefficient Kl2, the length Ia -Klgio of the secondary optical image of this nanometer is determined by pointing the cursor and reading one or more times (10-100) the coordinates of the beginning and end of its image, the obtained length value "7 is memorized.

Я. When using only a linear CCD matrix as a sensor, this value can be described in the following way:

Ma -KeKopgiFo)e "oz, -KeKopo (Fe Po )Klo - Zp2Fe o) (25) -or how we

Ma - KeKopo(Foze 275 Douku - KeKopg (Fe) Poki - Zpa(Fe) (o) (26)

The obtained values (25) and (26) are memorized.

I. When using a rectangular CCD matrix as a video sensor, the following three cases occur: 1) when placing the secondary optical image of the second nanometer parallel to the abscissa axis of the virtual scale 4 - Maga -Mdak - Zp? Ife) Po) (27) number -

Ma t Mag -Mak- Zp? (Fe) (Po) ,; (28) de Magp o; Mage Moto; Mao - unaveraged and averaged numerical values of the projection of the initial and final points of the length of the investigated nanoobject on the abscissa axis; 2) when placing the secondary optical image of the second nanometer parallel to the ordinate axis of the virtual scale 4 - Mavp - Mavk - Zp2 IFe) Po) (29) number -

Ma t Mavp - Mavk - Zp? (Fe) Po) , (30) de Mavp r MavkoMavp | Mavko - unaveraged and averaged numerical values of the projection of the initial and final points of the length of the investigated nanoobject on the ordinate axis; 3) when placing the secondary optical image of the second nanometer at an angle B to the My axis

Ma - Mav Mav that UM agpv - Matv)" (M avov -Mavv)" - Zp" (Fe) (o) (31)

ZY ore Ii8- - ee ---o shk

Ma - (Mav I (Mov) - (Mate -Mahv) g hu Mar - Zdo (Fe TSI) (32)

M M g. . schi de Satro; or ato Majkb o. unaveraged and averaged numerical values of the projection of the initial and final points of the length of the secondary optical image of the second nanometer on the axis - M avpr : M avkr M avpr 1 M avkv - PI and its abscissa; and unaveraged and averaged numerical values of the projection of the initial and final points of the length of the secondary optical image of the second nanometer on the ordinate axis.

The actual value of the length of the investigated nanoobject is judged by the equation of the numerical values of sh sh

Kekopifu tyu Mene uk KeKopo (Fo) ooo ku -KeKot(Fo)e ee u obo u -M - 01 -odik od J 4 1017 KeKopoiFoze t Po ku -KeKotiFore te Poiku

Kopg Their) - Cat Their) Po - Pogretv kaltka i Pot) ts -

Kopg o) - Cat (o) to), (33) - Ma - Mo lie down, (34)

As can be seen from equations (33) and (34) of the numerical values, the measurement result does not depend on the power of the optical radiation flow, on the absorption coefficient, the length of the optical path, on the absolute values of the coefficients of optical amplification, electronic amplification and digital-to-analog conversion.

The peculiarity of the proposed method is that the final result is obtained reduced to the input of the optical-electronic channel, that is, it has a dimension in nanometers, just like a nanometer. As can be seen from (33) and (34), the measurement error depends mainly on the error of the length nanometer used.

When forming secondary optical images of the second nanometer and the investigated nanoobject, the equality of the lengths of the optical path Iop ZHAN, Iop ZA , Iop Z Az ; and Iop 7 Yad , where , A , Az and Lya are the errors of establishing the given length of the optical path, ensure one of the known methods in such a way that Pot) - Popg) - Mopz) - Popa) - Chop) at (An) - (Ag) - (Av) - (A) - (A) - sopei or (An) - ( Аг) - (Ав) - (Аа) 0 Known methods include: the method associated with fixing the focus position (in confocal microscopy) and moving only the object table along the vertical axis; the method of equalizing the length of the optical path due to the introduction of an additional path, i.e. the "gray wedge" method; a method based on the change of the first of the partial gain coefficients, which make up the total coefficient of 77 nozzles of the transformation of the primary optical image into the secondary one, depending on the change in the height of the investigated nanoobject relative to the height of the second nanometer, etc.

In the presence of random disturbances of a different physical nature, which introduce a random component of error into the final measurement result, 10-100 readings of the coordinates of the initial and final points are carried out, followed by statistical processing of the obtained results (see even numbered formulas). Based on the obtained results, the average values of the measuring lengths and their uncertainty are determined. The obtained averaged results of multiple length measurements are also processed according to the equation of numerical values (34).

Thus, the proposed method of determining the linear dimensions of nano-objects ensures the automatic exclusion of the main and additional systematic measurement errors due to the long-term instability of the elements of the optical-electron channel, contamination and fogging of the optical elements of the optical elements of the channel, which increases

З absorption coefficient, due to the influence of changes in the length of the optical path and fluctuations in the intensity of the flow of optical radiation.

We will explain the essence of the proposed method of determining the linear dimensions of nanoobjects using the example of the operation of a digital meter of the linear dimensions of nanoobjects, the structural diagram of which is shown in the figure. In the example, the optical system of a confocal microscope is used.

Using the source of optical radiation 1, a stream of optical radiation of a given wavelength in the infrared or ultraviolet range is formed. This flow passes through the point diaphragm-source 2 and, through the optical system C, enters the nanoobject (nanoscale or the nanoobject under study) and irradiates it. It should be noted that the optical system includes a translucent PPZ mirror and a SL lens system, the optical amplification factor of which can be changed to a normalized value using the output signal from the voltage generator 9.

The stream of optical radiation reflected from the nanoobject in the form of the primary optical image of the nanoobject passes back through the optical system 3, is amplified several times, is reflected from the semi-transparent mirror of the refinery and enters the input of the video sensor 8 through the confocal diaphragm 7. With the help of the last conversion, and then into a digital one, which is an array of data (number codes). The data array is sent to the parallel port "A" of the microcontroller 11. According to the given program, digital amplification of the digital image is carried out. The received array of data from the output of the "ER" port is sent to the graphic display, where it is transformed into a secondary optical image of the nanoobject, amplified by " times.

With the help of the signal from the output of the voltage generator 9, the control of the conversion factor of the primary optical image into the secondary one is used to set the given value of the conversion factor of the optical-electronic channel - Z or Zla. The output signal depends on the code of the number received at the digital input of the generator 9 from the output of port "C » of the microcontroller 11. The measurement result is displayed on the digital counter 14 connected to the "YO" port of the microcontroller 11. The operation of the digital meter is controlled using the keyboard 16, which, through the common bus 17, is connected to the parallel port "B" of the microcontroller 11. To memorize a large array of permanent and operational data, a permanent storage device 12 and an operational storage device 13 are used. The stage 4 is controlled by a command from the microcontroller 11, which is supplied in the form of number codes to the inputs of the first 6 and the second 10 executive mechanisms With the help of the first executive mechanism b, the subject table 4 is moved vertically and its circular movement is carried out. With the help of the second executive mechanism 10, the subject table 4 is moved horizontally.

The operation of the digital meter of the linear dimensions of nanoobjects consists of four cycles of measuring the lengths of nanoobjects and one cycle of calculating the results of redundant measurements.

After pressing the "start" button on the keyboard, an image of two linear mutually perpendicular scales with corresponding numerical (digitized) labels, set with a step of To, as well as an image of the corresponding coordinate grid with code-controlled values of the sides of the squares appears on the screen of the graphic display 15.

According to the command from the microcontroller 11, the object table 4 is set in the center of the optical obj.

After that, the first value Zp of the conversion factor of the optical-electronic channel is set. In a known way, the first exemplary measure of length is set on the substrate of the object table 4. On the screen of the graphic display 15, a secondary optical image of nanometer length is obtained in the form of parallel strips of equal thickness with a value-normalized step.

Set the indicated strips of equal thickness parallel to the vertical lines of the coordinate grid. This is done by turning the stage with the first nanometer.

Then, automatically or by an operator, the vertical lines from the first nanometer are combined with the lines of the coordinate grid.

Electronically, the scale of the main marks of two linear, mutually perpendicular scales is changed until the value of the distance Ao between adjacent marks of the scales becomes equal to the value of the distance A) between parallel vertical stripes of the first nanometer length multiplied by Зп times, i.e. up to 1) 7 Zti4Ibn)).

According to the command from the microcontroller 11, the origin of the coordinates is combined with one of the vertical ones

From the bands of the secondary image of nanometer length (as a rule, from the bottom of it, on the left side), the dimensions of the squares of the obtained coordinate grid are divided into ten parts 013 7 ODA) From OK pi AK, that is, an additional (small) grid is artificially created with a step normalized by value (AIoznmykh (Mist ) nm

The graphic image of the scales with the main and additional coordinate grids received on the display screen is stored in the operational memory device 13.

The nanometer length is replaced by a second nanometer with a linear length dimension io,

The length of the secondary optical image of the second nanometer is determined by placing the cursor on the starting and ending points of its optical image, the distance between which is the length of the nanometer and is subject to determination. The coordinates of these points are read and processed. The obtained result (1) is calculated and stored in the operational memory device 13.

In the second step, the second nanometer of length is replaced by the investigated nanoobject of unknown length. This is done, for example, by moving the object table 4 in such a way that we see the investigated nanoobject 5 on the screen of the graphic display.

The length of the secondary optical image of the investigated object is determined by placing the cursor on the initial and final points of the secondary optical image of the investigated nanoobject, the distance between which is its length and is subject to determination. The coordinates of these points are read and processed. The obtained value of the length (5) of the investigated nanoobject is stored in the operational memory device 13.

In the third cycle, according to the command from the microcontroller 11, a new value of the conversion factor Zp of the optical-electronic channel is set. The length of the secondary optical image of the investigated nanoobject is determined already at the new value Zn of the conversion coefficient. The obtained length value (9) is stored in the operational memory device 13.

In the fourth step, the investigated nanoobject is replaced by a second nanometer with a linear dimension of length io by corresponding movement of the object table 4 along the abscissa axis.

Determine the length of the secondary optical image of the second nanometer at the new value of the coefficient Zp of the conversion of the optical-electronic channel. Place the cursor on the starting and ending points of its optical image. Press the "read" button on the keyboard 16 and read the coordinates of these points. The obtained result (13) is calculated and stored in the operational memory device 13.

In the fifth cycle, the results of intermediate measurements are processed according to the equation of numerical values (33). The obtained result is stored in the permanent memory device 12.

In the digital meter of the linear dimensions of nano-objects, there is also a mode of measurement in the presence of random disturbances of a different physical nature, which introduce a random component of error into the final measurement result. For this purpose, a measurement program is executed according to which 10-100 measurements are carried out in each cycle according to the command "measurement in case of disturbances", which is given by pressing the corresponding button of the keyboard 16. Based on the obtained results, the average values of the lengths in each measure and their uncertainty are determined. The obtained averaged results of multiple length measurements are processed according to the equation of numerical values (34).

To ensure the equality of optical path lengths at each measuring cycle, an optical system of a confocal microscope with high-precision fixation of the position of the focal spot was used. By moving the stage 4 along the vertical axis to the focused optical spot. Thus, the length of the optical path from the nanoobject to the video sensor 8 is equalized.

Thus, the proposed method of measuring the linear dimensions of nanoobjects provides a solution to the technical problem.

Claims (2)

FORMULA OF THE INVENTION 25 The method of redundant measurements of the linear dimensions of nanoobjects is based on the irradiation of an image of a nanoobject with a stream of optical or hard radiation of a given power o and wavelength 79 with a narrow spectral band or coherent light of the same power, forming the primary spatial optical image of nanoobjects object, its optical amplification in p times, optical-electronic regular transformation of the spatial ZO of the primary optical image into a spatial, discrete-analog signal, its integration. k during a given time interval of 797 zch sec, where 3 is the frequency of reading the signal, electronic amplification in Ke times, regular analog-to-differential transformation with the conversion factor Kp of the spatial discrete-analog signal into a data array, orderly memorization of the received data, inverse transformation with by a conversion factor of 35 From these data into an enlarged secondary optical image on the screen .. . . Зп - Display coefficient with a general conversion or amplification factor equal to ; additional formation on the display screen and combining with the received secondary optical image images of two linear mutually perpendicular scales with corresponding numerical labels set with a step o, and the image of the corresponding coordinate grid with . . Aoi x Ari - oh s. 40 code-controlled values of the sides of the squares (Lo oi). determining the linear dimensions of the secondary optical image of the nanoobject by placing the cursor on the initial and final points of the optical image, the shortest distance between which is the length and is subject to determination, followed by reading the coordinates of the points and determining the value of the length according to the numerical marks of the scales or according to the coordinate grid with a priori normalized with the dimensions of 45 square sides, which differs in that the first normalized value "n of the conversion coefficient or image amplification is first set, a nanometer of length is irradiated, the image of the primary optical image of a nanometer of length in the form of vertical strips of equal thickness or parallel diffraction strips, or in the form of an image normalized by the size of the atomic structure of the test material is nanometers with a value-normalized step of 50 ba) bands, amplified by "7" times and converted into a secondary image with a value-normalized step A Ana Z ZatsAYU, electronically changing the scale of the main labels of two linear mutually perp endicular scales until the value of the distance Ao between adjacent scale marks becomes equal to the value of the distance A) between the parallel vertical strips of the nanometer length, i.e. to (Аиой) - ОМАНУ - ОКА 55 align the origin of the coordinates with one of the vertical strips of the secondary image of the nanometer lengths, as a rule, of the bottom of Her left FKU, divide the dimensions of the squares of the received coordinate grid into ten parts (Aot) WITH OD(ANU WITH Oka Akaoi artificially form an additional fine grid with a value-normalized step otinmhiAsi)nM remember the graphic image of the scales received on the display screen with the main and additional coordinate grids, replace the nanometer of length with a second nanometer with a linear dimension of length 2, which is r - . - is chosen under the condition that Po) (Z 1oAN) similarly transform the primary optical image of the second nanometer into a secondary one with a conversion or image amplification coefficient equal to Z, determine the length of the secondary optical image of the second nanometer by pointing the cursor on the initial and final points of the specified image, the shortest distance between which is its length and is subject to determination, read one or more from 10 to 100 times and process the coordinates of these points, the obtained value of the length Mu or Mi is memorized, replace the second nanometer of length with the investigated nanoob object of unknown length, determine the length 22) of the secondary optical image of the object under investigation by placing the cursor on the starting and ending points of the secondary optical image of the object under investigation, the distance between which is its length and is subject to determination, read one or several from 10 to 100 times and process the coordinates of these points, the obtained value of the length of Ma and Me remember, set the second normalized value Зп of the image amplification factor, determine the length Из (8) - Заг Х)) of the secondary optical image of the investigated nanoobject by placing the cursor on its initial and final points, read one or more times from 10 to 100 and process the coordinates of these points, memorize the obtained value of the Mz or Mz distance, replace the investigated nanoobject of unknown length with their second nanometer, at the new value of the conversion coefficient Zpg, determine the length Ia Fa) - Zla (o) of the secondary optical image of this nanometer by pointing cursor and reading one or more from 10 to 100 times the coordinates of the beginning and end of its image, the obtained value of the length of Ma or Ma is memorized, and the actual value of the length of the investigated nanoobject is judged by the number of integer values x 01 MA - M or, at kdyavmnost of random disturbances, according to the equation of numerical values x - M017/---- Ma - Mi, where Mi, Ma, Mz | Ma - the averaged results of measuring lengths obtained by reading the coordinates of the beginning and end of the optical image of length from 10 to 100 times. 2. The method according to claim 1, which differs in that during the formation of secondary optical images of the second nanometer and the investigated nanoobject, one of the known methods ensures the equality of the optical path lengths n, op 2, op ЗВ, | sop M de SP, 72, 78 roya - errors of setting the given length of the optical path, i.e. Pot) - MPopg) - Chopa) - Chopa) - Chop) at (An) - (Ag) - (Av) - (Aa) - ( A) - snot or 1) - Ag) - (Az) - (Al) - 0 . St ry-yka and KO -u Z tr r. goE u it 8 TI 14 ! with | 000 'Y; and more GU! ' and ho Chi. aTmsm ri A A ! their C | I and spodi EKO iya Y ono g Ak nosy aAya ke : Kg I NV efe "and ti ŽI; 1 12.3 16 pi shi | O1-- sleep I KAMI IKOMI GU ! Kok and ; ; with 0-55 0. ; I7 Figure, Functional diagram of a digital meter of linear sizes of nano-objects