UA9014A1 - Device for cleaning semi-conductor materials - Google Patents

Device for cleaning semi-conductor materials

Info

Publication number
UA9014A1
UA9014A1 UA4779456A UA4779456A UA9014A1 UA 9014 A1 UA9014 A1 UA 9014A1 UA 4779456 A UA4779456 A UA 4779456A UA 4779456 A UA4779456 A UA 4779456A UA 9014 A1 UA9014 A1 UA 9014A1
Authority
UA
Ukraine
Prior art keywords
conductor materials
cleaning semi
semi
cleaning
heaters
Prior art date
Application number
UA4779456A
Other languages
Russian (ru)
Ukrainian (uk)
Inventor
Роман Васильович Федоров
Роман Васильевич Федоров
Original Assignee
Чернівецький Державний Університет Ім. Ю. Федьковича
Черновецкий Государственный Университет Им. Ю. Федьковича
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Чернівецький Державний Університет Ім. Ю. Федьковича, Черновецкий Государственный Университет Им. Ю. Федьковича filed Critical Чернівецький Державний Університет Ім. Ю. Федьковича
Priority to UA4779456A priority Critical patent/UA9014A1/en
Publication of UA9014A1 publication Critical patent/UA9014A1/en

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Abstract

A device contains ring zone heaters rounding a container with initial material and equipped with immovable background resistance heaters.
UA4779456A 1990-01-08 1990-01-08 Device for cleaning semi-conductor materials UA9014A1 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
UA4779456A UA9014A1 (en) 1990-01-08 1990-01-08 Device for cleaning semi-conductor materials

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
UA4779456A UA9014A1 (en) 1990-01-08 1990-01-08 Device for cleaning semi-conductor materials

Publications (1)

Publication Number Publication Date
UA9014A1 true UA9014A1 (en) 1996-09-30

Family

ID=74593880

Family Applications (1)

Application Number Title Priority Date Filing Date
UA4779456A UA9014A1 (en) 1990-01-08 1990-01-08 Device for cleaning semi-conductor materials

Country Status (1)

Country Link
UA (1) UA9014A1 (en)

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