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Application filed by Валерий Михайлович ШараповfiledCriticalВалерий Михайлович Шарапов
Priority to UAU201303005UpriorityCriticalpatent/UA82664U/en
Publication of UA82664UpublicationCriticalpatent/UA82664U/en
Length Measuring Devices With Unspecified Measuring Means
(AREA)
Abstract
A piezoelectric scanner comprises a base, piezoactuator made of four bimorph cells fixed on the base in such a way that cross section of figure formed by bimorph cells is a rectangle, an object holder made as bimorph cell and fixed on the piezoactuator by means of resilient plates. Each bimorph cell of the piezoactuator comprises a metallic plate of triangular form, on which bimorph cell is fixed.
Method of manufacturing thin film solar cell, device for manufacturing thin film solar cell, and thin film solar cell including buffer layer manufactured by the method