UA72742C2 - An electron beam coating deposition apparatus by vapor phase condensation (variants) - Google Patents

Abstract

An electron beam physical vapor deposition (EBPVD) apparatus (10) and a method for using the apparatus (10) to produce a coating (e.g., a ceramic thermal barrier coating) on an article (20). The EBPVDapparatus (10) generally includes a coating chamber (12) that is operable at elevated temperatures and subatmospheric pressures. An electron beam gun (30) projects an electron beam (28) into the coating chamber (12) and onto a coating material (26) within the chamber (12), causing the coating material (26) to melt and evaporate. An article (20) is supported within the coating chamber (12) so that vapors of the coating material (26) deposit on the article (20). The operation of the EBPVD apparatus (10) is enhanced by the shape and intensity of the electron beam pattern on the coating material (26) and on a crucible (56) containing the molten coating material (26).

Description

Description of the invention

This application benefits from the priority of US Patent Application No. 60/147,232, 2 filed August 4, 1999.

This invention generally relates to an electron beam device for coating by condensation from the vapor phase. In particular, this invention is aimed at creating such a device for applying a coating, with the possibility of applying ceramic coatings on parts, for example, heat-insulating coatings on parts made of a heat-resistant alloy of gas turbine engines. 70 Higher operating temperatures for gas turbine engines are constantly being investigated to increase their performance. However, as operating temperatures increase, the lifetime of engine parts operating at high temperatures should also increase accordingly. While significant advantages have been achieved with the use of iron, nickel, and cobalt-based heat-resistant alloys, the individual heat-resistant capabilities of these alloys are often inadequate for components specifically located in a gas turbine engine, such as the combustion chamber and afterburner. A common solution is to perform thermal insulation of such parts to minimize their operating temperatures. For this purpose, heat-insulating coatings (TIP) applied to the outer surfaces of parts operating at high temperatures have been widely used.

To be effective, thermal insulation coatings (TIP) should have low thermal conductivity and easily adhere to the surface of the parts. Various ceramic materials are used as a TIP, in particular, zirconium dioxide (270 5), which is stabilized by yttrium oxide (U 205), magnesia (Mo90) or other oxides. Such special materials are widely used in this field of technology, as they are easily deposited when coating by plasma spraying or vapor phase condensation. An example of the latter is electron-beam deposition of a coating by vapor phase condensation (EPNPKPF), in which a heat-insulating coating is produced that has a stem-like granular structure, the subbase of which has the ability to expand, without causing at the same time damaging stresses that lead to scaling, thereby increasing the permissible level of deformation. The adhesion of the TIP to the Ge) part is often further strengthened by the presence of a metal bonding coating, such as a diffusible aluminide or an oxidation-resistant alloy such as MegAl, where M is iron, cobalt, and/or nickel.

Methods of producing TIP by EPNICPF generally include preheating the part to an acceptable temperature for coating and then immersing the part in a heated coating chamber, in which a pressure of approximately 0.005 mbar is maintained. Higher pressures are avoided because the control of the electron beam is difficult at pressures above about 0.005mbar, while a chaotic process is observed at pressures in the coating chamber above 0.01Ombar. In addition, it is believed that the lifetime of the filament of the electron beam gun will be reduced or the gun will be contaminated at a pressure above 0.005mbar. The part is held close to an ingot of a coating ceramic material (eg, zirconium oxide, stabilized with yttrium oxide) and an electron beam is projected onto the ingot in such a way as to melt the surface of the ingot and produce condensate of the coating material for deposition on the part.

The range of temperatures within which EPNIKPF methods can be carried out depends partly on the composition of the parts and the covering material. The minimum permissible operating temperature is generally set to ensure adequate evaporation of the coating material and its deposition on the part, and the maximum permissible operating temperature is generally set to avoid damage to the microstructure of the product. c During the entire deposition process, the temperature in the coating chamber continues to rise due to the presence of

From" the electron beam and the formation of a molten coating material. As a result, EPNIPCPF processes often start at a minimum specified temperature and end when the coating chamber temperature is approximately the maximum temperature at which the coating chamber is cooled and cleaned to remove the coating material deposited on the inner walls of the coating chamber. Modern EPNIPCPF devices allow you to remove coated parts from the coating chamber and replace them with preheated uncovered parts without stopping the device in order to create a continuous mode of operation. The continuous operation of the device during this time can be defined by the term "campaign" with more details, and properly covered during the campaign, corresponding to increased productivity and economic efficiency. "drive" 20 Based on the above, it is clear that there is a need to increase the number of parts coated during one campaign, to reduce the time required to insert and remove parts from the coating chamber, and to reduce the time required to carry out maintenance in the device between campaigns . However, the limited capabilities of the prototype of the present invention often lead to a relatively narrow range of acceptable coating temperatures, the difficulty of moving too hot parts to and from the coating chamber, and also difficulties in the process of performing maintenance in modern EPNPKPF devices. According to this for improvement

HF) EPNIPCPF devices and methods of their application are constantly looking for new deposition coatings, in particular ceramic ones, such as TVO. o This invention is directed to the creation of an electron-beam device for coating vapor phase condensation (EPNIPKPF) and a method of using this device to apply a coating 60 (for example, a ceramic heat-insulating coating) to a product. EPNPIPKPF devices according to the present invention generally include a coating chamber operating at elevated temperatures (for example, at least 8002) and subatmospheric pressure (for example, in the range from 1073 to 5x10"" mbar). An electron beam gun is used to project an electron beam into the coating chamber and onto the coating material located in the middle of the chamber. The function of the electron beam gun is to melt and vaporize the coating material. In addition, the device is equipped with a device for supporting the product in the middle of the coating chamber in such a way that vapors of the coating material can be deposited on the product.

According to the present invention, the performance of the EPNIKPF device can be increased by including or adapting one or more of its properties and/or modifying its mode of action. According to one object, the invention is aimed at regulating the working temperature due to the presence of radiation reflectors that can move in the middle of the coating chamber to increase or decrease the reflective heating of the products from the molten coating material during the coating campaign.

Regulation of working pressure is also an object of this invention, and as is known from practice according to the US patent application Registration Mo09/108,201, Kidpeu ei a). (submitted to the same authorized agent as the present invention) the working pressure can be more than 0.010mbar with minimal or no effect on the operation and reliability of the electron beam gun and with minimal deviations of the working pressure values. Mechanical and technological improvements aimed at carrying out this object of the invention include modifications of the electron beam gun, the coating chamber and the method of directing and extracting gases from the device. In addition, the advantage of the present invention is the presence of an electron beam shape on the covering material.

According to another preferred object of the invention, a crucible is used to support the coating material in the coating chamber, which preferably includes at least two parts, one of which surrounds and holds the molten coating material, and the second is attached to the first part and surrounds the unmelted part of the coating material. Both parts form an annular channel between them, tightly adjacent to the formation of 2o molten coating material in such a way that it is possible to achieve effective cooling of the crucible, reducing the rate of increase of the operating temperature in the middle of the coating chamber.

Another object of the invention is directed to a rotating magazine that supports a block of ingots of coating material under the coating chamber. The magazine is indexed in such a way that each block of one or more ingots coincides with the aperture (56) of the coating chamber (12) to sequentially feed the ingots into the coating chamber without interrupting the deposition process of the coating material.

According to another preferred object of the invention, the device includes an Indication field for observing i) the molten coating material in the middle of the coating chamber. In order to fix too high operating temperatures in the middle of the coating chamber, the display field is liquid-cooled and has a stroboscopic drum with high rotation speed and sealing with magnetic particles to ensure high-temperature vacuum sealing of the stroboscopic drum. In another object of the present invention, the display field provides a stereoscopic view of the cover camera, which can be simultaneously performed by one or more operators, delaying the stereoscopic vision. uh-

Other objects and advantages of the present invention will be better defined in the following detailed description.

Figures 1 and 2 show, respectively, a plan and a front view of an electron beam device for applying

With the coating by condensation from the vapor phase, which is used to deposit the coating material according to this invention.

Figures 3, 4 and 5 show cross-sections along line 3-3 of Figure 1 and a mobile platform used in accordance with one object of the invention.

Figures 6 and 7 show in more detail, respectively, a front and top cross-sectional view of the predominant "

Internal parts of the covering chamber of the device according to Figs. 1 and 2. Figs. 8 and 9 compare the shapes of the guide holes of the electron beam gun according to the prototype and this invention. ;" Figure 10 shows a cross-section of a crucible in which an ingot of coating material is placed, and an electron beam is projected onto the surface of the crucible and the ingot according to a preferred embodiment of the present invention.

Fig. 11 shows the crucible of Fig. 10 in plan and the preferred forms of the electron beam on the crucible and the ingot. -I Figure 12 shows the predominant intensity distribution of the electron beam shape through the surface of the ingot and the crucible shown in Figures 10 and 11, respectively. Fig. 13 shows the preferred field of indication for monitoring the process in the middle of the coating chamber -I of the device shown in Figs. 1 and 2.

Figure 14 shows a control panel for monitoring and controlling the operation of the device shown in Figures 1 and 2.

Ge Device 10 EPNPKPF according to the present invention is depicted in a general form in Figs. 1 and 2, and its various details and features in Figs. 3-14. The device 10 is particularly well suited for depositing a ceramic heat-insulating coating on a metal part intended for operation in an adverse thermal environment. Known examples of such parts include nozzles and blades of high and low pressure turbines, casings, combustion chamber parts, afterburner assemblies of gas turbine engines. Regardless of the fact that (F, the improvements achieved by this invention will be provided by the description of the process of depositing a ceramic coating on such a part, this invention can also be applied to various coating materials and parts covered by them. In order to illustrate the present invention, the device 10 EPNPKPF shown in Figures 1 and 2 includes a coating chamber 12, a pair of preheating chambers 14, and two pairs of loading chambers 16 and 18 arranged so that the device 10 has a symmetrical configuration. The front loading chambers 16 are aligned with their respective preheating chambers 14, with parts 20, and the parts 20, initially loaded on the rake mechanism 22 in the left chamber 16, move into the preheating chamber 14 and, as shown in Fig. 1, into the coating chamber 12. In a symmetrical configuration device 10, while the parts 20 loaded through the front left loading chamber 16 are coated in the coating chamber 12, the second a batch of parts in the front right chamber 16 can be preheated in the right preheating chamber 14, a third batch of parts can be loaded into the rear left loading chamber 18, and a fourth batch of parts can be unloaded from the right rear loading chamber 18. Thus, the four stages of the process can be

Perform simultaneously with the device 10 EPNIKPF according to the present invention.

According to a preferred embodiment of the present invention, the loading chambers 16 and 18 are mounted to low-profile mobile platforms 24 so that the loading chambers 16 and 18 can be selectively aligned with their preheating chambers 14. For example, when aligning the front left loading chamber 16 with the front left preheating chamber 14 to allow parts 20 to be inserted into the coating chamber 12, the rear left loading chamber 18 is moved away from the left preheating chamber 14 so that the parts can be simultaneously loaded and unloaded from the rake mechanism 22 of the rear loading chamber 18. In addition, each platform 24 preferably has the ability to move to a maintenance position in which neither of the loading chambers 16 and 18 is aligned with its preheat chamber /5 14 in order to create access to the middle of the loading chambers 16 and 18 and the preheating chamber 14 for the possibility of their cleaning. The platforms 24 are preferably supported at least in part by roller bearings 44 mounted in the floor, although a variety of other bearings are also contemplated. Each platform 24 has a low profile elevation (projection above the floor) of no more than about 2.5cm with a rounded edge (predominantly 30 degrees from horizontal) which together virtually eliminate the potential for operator grip

With the edge of the platform 24. Stationary objects around the device 10 are preferably located at a distance from the edges of the platforms 24 to prevent the operator from being pressed by the platform when changing its position. As an alternative to the platform configuration shown, it is possible to use movable segment systems that partially overlap or extend. In addition, movable segments can slide under a fixed raised platform, surrounding a set of its parts. Finally, separate preheating chambers can be installed for loading chambers 16 and 18 in such a way that these two chambers and their preheating chambers are surrounded by a movable platform system. and)

As shown in Figs.3-5, a portion of the coating chamber 12 is also preferably configured to move relative to the preheating chamber 14 in order to facilitate cleaning of the interior of the chamber 12 between coating campaigns. As can be seen in Fig. 3, the covering chamber 12 is in its working position from p

With the display panel 28, described in more detail below, mounted in the front section of the camera 12. As shown in FIG.

4, the front section of the coating chamber 12 (as well as the ingot magazine 102 associated with the coating chamber and - described below) is moved away from the rest of the parts of this chamber 12 to allow the passage of the mobile working platform M 50, which is shown returned to the working position in Fig.5. In this position, the working platform 50 easily passes into the middle of the cover chamber 12. It is shown that the platform 50 is connected by a hinge 52 to the base c of the cover chamber 12, although the use of other acceptable structures is provided. The platform 50 may have a configuration different from that shown in Figs. 3-5, including a hinged segmental structure, button disks and other safety fittings.

The cover chamber 12, loading chambers 16 and 18, and preheating chamber 14 are connected to valves (not shown) that create a vacuum seal between these chambers. To maximize the size and number of parts 20 that can be loaded between the chambers 12, 14, 16, 18, the valves preferably have a minimum size of approximately 250mm, which is much larger than previously assumed for practical reasons. qualified specialists in this field. Due to the fact that in the covering chambers 12, loading chambers and? 16 and 18 and the preheating chambers 14 must create a different level of vacuum pressure and in some cases they move relative to each other, as explained above, the valves must have

Capable of multiple cycles at relatively high pressure. Designed seals suitable for this purpose are known in the art and are therefore not discussed in detail in this description.

Referring to Fig. b and 7, the coating is performed in the coating chamber 12 by melting and condensing the ingots 26 of ceramic material with electron beams 28 produced by the electron beam gun 30-I and focused on the ingots 26. Intense heating of the ceramic material by electron beams 28

Causes the surface of each ingot 26 to melt, forming a molten ceramic material whose molecules evaporate, condense and deposit on the surfaces of the parts 20, producing the desired ceramic

From the coating, the thickness of which will depend on the duration of the coating process. Although two ingots are shown in these figures, it is within the scope of the present invention to use one or more ingots and vaporize them over any given period of time.

EPNIKPF cover chambers are usually capable of maintaining a vacuum level of approximately 0.001 mbar (approximately 1x10 Torr) or less. In the prototype of this invention, a maximum of 0.01Ombar is pumped out, and

F, more typically about 0.005 mbar, to create a vacuum in the coating chamber during the coating process; such a limitation is due to the fact that higher pressures are known to cause arrhythmic effect of EP gun 30 and make it problematic to adjust the electron beams, assuming that the coating will result in a second bo Tatunk. In addition, it is safe to say that the life of the gun filament will be reduced or the gun will be contaminated when it is operated with pressure values in the coating chamber above 0.005mbar. However, according to co-pending U.S. Patent Application No. 09/108,201 to Kidpeu et al., assigned to the same assignee as this invention, the coating chamber 12 is preferably operated at higher pressure values, and a ceramic coating is unexpectedly obtained with improved 65 delamination and impact resistance, as well as accelerated coating deposition due to a higher ingot evaporation rate than in the prototype.

The mechanical pump 31 can pump out the coating chamber 12, loading chambers 16 and 18 and preheating chambers 14 to a preliminary vacuum.

A cryogenic pump 32 of a well-known type in this field is shown in Fig. 1 and 2, which is used as an auxiliary in evacuating the coating chamber 12 before the evaporation process. In addition, Figures 1, 3, 4 and 5 show a diffusion pump 34 known from the prior art, but modified with a throttle valve 36 to regulate the operation of the pump 34 according to the present invention. In more detail, the throttle valve 36 is activated between the open position (Figure 3) and the closed position (Figures 4 and 5), as well as in intermediate positions.

The advantages of the throttle valve 36 are realized when the vacuum in the coating chamber 12 is maintained at a sufficiently high pressure as used in accordance with the present invention. If necessary, the maximum performance of the operating mode of the diffusion pump 34 for vacuuming the covering chamber 12, the throttle valve 36 is opened, as shown in Fig.3. For technical support of the working process, the coating chamber should be held at the intended pressure (for example, 0.015mbar) by adjusting the throttle valve 36 to move to a predetermined throttle position some distance from the fully closed position shown in Figs. 4 and 5. As /5 shown 1, separate diffusion pumps 38, similarly equipped with throttle valves (not shown), are preferably used to evacuate the preheat chambers 14, again for the reason that it is desirable to maintain a relatively high pressure to perform the coating of the present invention. The mechanical pumps 31 preferably include a connection to a leak detector 33 to detect a vacuum leak from the system using helium or another gas that can be safely introduced through the leaks in the chambers 12, 14, 16, 18 or 2o through connected equipment.

Referring again to Figs. 17 and 2, the loading chambers 14 and 16 are generally longitudinal in shape and are equipped with loading doors 40 through which parts are loaded onto the rake mechanism 22. In addition, the loading chambers 16 and 18 are equipped with through doors 42 to the actuators (shown schematically in Fig. 1, position 46), which control the operation of the rake mechanism 22. More precisely, the parts 20, which are supported on the rake 25, preferably rotate and/or swing in the coating chamber 12 to promote the desired distribution of the coating over the parts 20. The pass-through door 42 allows the operator of the device 10 can quickly i) adjust or reconfigure the drives 46 without interfering with the work process of loading and unloading parts from the loading chambers 16 and 18.

Referring again to Figures b and 7, the interior of the cover chamber 12 should be described in more detail. In order to solve the above-mentioned problems regarding control of electron beams 28 and protection of EP guns

ZO at higher pressure values used in this invention, certain improvements were made in the coating process - the EP of the fluff 30 and the coating chamber 12. As can be seen in Fig. 6, oxygen and argon gases are introduced into the coating (M chamber through the entrance 54, located near the crucibles 56, which support the ingots 26 in the coating chamber 12 and keep in a molten state the ceramic material produced with the help of electron beams 28. s 35 The velocities of the oxygen and argon flows are individually regulated on the basis of the intended working pressure and the determined e-partial pressure of oxygen. reduction of cases of pressure fluctuations in the coating chamber, the time of adjustment of the cyclic response of these gases is reduced by the physical arrangement of the distribution valve 58 for gases, which is directly connected to the inlet 54 immediately at the exit of the coating chamber 12, as shown in Fig. 1 and 6.

Placing the distribution valves 58 so close to the coating chamber provides an unexpected significant improvement in pressure regulation by reducing pressure fluctuations in the coating chamber 12 and reducing the dislocations of the focus pt)s and the position of the electron beams 28 on the ingots 26. . To further improve the focus and shape of the electron beam, the EP gun is relatively insulated from the increased coating pressure in the coating chamber 12 with the help of a condensation hood 52, which captures most of the excess ceramic vapor that has not settled on the part 20. The hood 52 is shaped in accordance with 45 of the invention to determine the area of the coating of the parts 20, within which the increased -I is specially supported pressure desired to perform the coating. To facilitate cleaning of the device between coating campaigns, the hood 52 is preferably equipped with screens 76 with the possibility of its removal and cleaning outside the coating chamber 12. Preferably, the screens 76 are held by spring-loaded pins 78 instead of threaded fasteners to simplify the removal of the screens 76, if they were covered with a layer of coating material at the end of the campaign. Although this generally complicates the process, the condensation hood is completely removed and replaced by another hood 52. Since the hood 52 surrounds the parts 20, as can be seen in Fig.b, an aperture 62 is required for each electronic

of the beam 28 through the aperture 52. To facilitate the ability to maintain a higher pressure within the condensing aperture than in the remaining areas of the cover chamber 12, including the areas around the EP beams ZO, the apertures 62 are preferably sized no larger than necessary to allow the electron beams to pass through 28 through the aperture two 92. For this purpose, the apertures 62 are preferably cut with electron beams in the process of setting up the device

EPNIKPF so that each aperture 62 has a cross-sectional plane approximately equal to the plane

F) cross-section of the shape of the electron beam at the intersection of the shutter 52. To further isolate the EP beam 30 from the increased pressure within the condensation shutter 52, the beams 28 pass from their respective beams ZO through the chambers 64 formed between the inner walls of the covering chamber 12 and the condensation shutter 52. Preferably, the diffusion pump 34 has an inlet close to and is pneumatically connected to each chamber 64. Because of the minimal size of the apertures 62, the increased pressure within the condensing hood 52 (achieved by introducing oxygen and argon through the inlet 54) enters the chambers 64 at a greatly reduced rate to activation of the diffusion pump 34 to maintain the pressure of the chambers 64 lower than within the condensing hood 52.

Fig. 6, 8 and 9 illustrate additional protection of the EP of Z0 fluff according to the present invention. As usual, the EP guns 30 65 are equipped with a vacuum pump 66, which maintains the pressure value within the guns 30 at levels of approximately 81075 to 8X10 "mbar, which are significantly lower than outside the guns 30, that is, within the coating chamber 12 of the EPNIPCPF according to the present invention , as well as within the EPNIPCPF coating chambers of the prototype. To maintain such low pressures, the electron beams 28 must be passed through the cylindrical holes 68 before exiting the guns 30, as shown in Fig. b. A typical configuration of such holes 168 is shown in Fig. 8. For the possibility of adjustment beam focusing conditions provided by the beam focus positions A, B, and C of the beams 28 shown in Figure 8, the hole 168 has a relatively large diameter and length, such as about 3mm and about 120mm, respectively. causes the EP gun 30 to operate in the high pressure environment of the present invention device 10. During research leading to the present invention, testing has shown that the onal control of the process conditions makes it possible to identify the 7/0 optimal position of the beam focus (point O in Fig. 9) A more efficient shape of the hole 168 according to the present invention, shown in Fig. b and 9, was then developed, which, as shown in Fig. 9, has a smaller diameter and length than in the prototype hole 168 in Fig.8. A preferred diameter and length of orifice 168 is assumed to be approximately 15 and 5 Ω, respectively, although the optimum values for these dimensions may vary depending on pressure and focus values, solenoid bias current, and overall geometry.

As noted above, the condensation hood 52 is positioned around the parts 20 to minimize the deposition of ceramic material on the inner walls of the coating chamber 12. In addition, according to the present invention, the condensation hood 52 is configured to regulate the heating of the parts 20, which is necessary to maintain the appropriate temperature of the part during cover campaign. More specifically, the hood 52 is equipped with a movable reflector plate 72 that radiates the heat emitted by the molten surfaces of the ingots 28 back onto the parts 20. At the beginning of the first campaign, during which the temperature of the coating chamber 12 is relatively low, the reflector plate 72 is positioned next to the parts 20 with an activator 74 for maximizing the heating of the parts 20. As the temperature rises within the coating chamber 12 during the next cycle, the reflective plate 72 moves away from the parts 20 (as shown in half-section in Fig. b) to reduce the amount of radiated heat, reflecting it back to the parts 20. In the same way The workpiece 20 can be more easily brought to the appropriate coating temperature (e.g., about 925232) at the beginning of the campaign, while reaching the maximum allowable coating temperature (e.g., about 114022) is delayed to stretch to the maximum campaign duration. In addition, the hood 52 and the reflector plate 72 contribute to the creation of a more uniform and stable coating temperature, and thus the desired barrel granular structure of the ceramic coating on the parts 20. To maintain the desired si

With respect to the high pressure within the condensing baffle 52 while the deflector plate 72 is in the raised position, it is shown that the water cooling band 75 surrounding the baffle plate 72 M attenuates the gas flow between the condensing baffle 52 and the plate 72 and thereby reduces the pressure loss between the baffles. /-|h« 52 and plate 72.

Figure 7 shows the manipulators 77 extending into the cover chamber 12 through the passage hole in the wall c z5 of the chamber, through a ball-and-socket joint. rch-

The manipulators 77 are used to help adjust the heating of the parts 20 by moving the ceramic or ceramic-coated reflectors 80 (shown as granular material in Figure 10) toward or away from the crucibles 56 during the coating campaign. More precisely, due to their close location to the crucibles, the reflectors 80 are in very high temperature conditions during the coating process and therefore radiate heat upwards in the direction of the parts 20. The amount of heat radiated by the reflectors 80 is generally maximum when they are located closest to the crucibles 56 and can be reduced by moving the reflectors 80 away from the crucibles 56. The reflectors 80 are preferably supported on a liquid cooling plate 81, which does not radiate appreciable heat to the part 20. As a result, the reflectors 80 can be used in conjunction with the reflector plate 72 to regulate the temperature parts 20 that are coated in the coating chamber during the next campaign. At the beginning of the cycle, the reflectors 80 are initially located near the crucibles 56 to -I maximize the heating of the parts 20, and later are moved away by the manipulators from the crucibles 56 to reduce the amount of radiated heat. o To withstand the environmental conditions of the coating chamber parts of manipulators 77 within the limits of curved chamber 12 -I are preferably made of a heat-resistant alloy, for example, an alloy with a nickel base, for example, X-15.

Instead of granular material, reflectors 80 can be of virtually any shape and configuration. For example, one or more plates covered with reflective material can be used. For

For convenience, the reflectors 80 may be relatively large pieces cut from ingots of a material similar to that being applied, although obviously other ceramic materials may be used.

As indicated above, ingots 26 of ceramic material are supported within the coating chamber by crucibles 56 that hold the ceramic material in a molten state created by electron beams 28. One of the crucibles 56 is shown in more detail in Figure 10, where it is three-part in shape. The upper element 82 with a suctioned upper surface 84 is assembled with the lower element 86, forming between them a cooling channel 88, through which water or other coolant passes to maintain the temperature of the crucible 56 below the melting point of the material from which it is made. A restrictor plate 90 is also shown in FIG. 10, the thickness of which is chosen to change, for example, the reduction of the cross-sectional plane of the flow channel 88 between the inlet 92 of the cooler and the outlet 94. For reasons of thermal conductivity, the preferred material of the crucible may be copper or a copper alloy, which makes it necessary to , so that the coolant flow rate through passage 88 is sufficient to maintain the temperature of the crucible wall 96 closest to the molten portion of the ingot 26 significantly below the temperature of the molten ceramic 65 material. As is evident from Fig. 10 and from the following description, referring to Figs. 11 and 12, the electron beam 28 is preferably projected onto the beveled surface 84 and also onto the ingot 26. Therefore, for adequate cooling of the outer surface of the upper part 82, the thickness of the wall 96 must be minimal to facilitate the passage of heat without adversely affecting the mechanical strength of the crucible 56. The multi-element configuration of the crucible according to the present invention facilitates the fabrication of the crucible in its optimal shape to create the cooling passageway 88, as well as to allow the wall 96 to be fabricated with acceptable impermeability (tightness). While the optimum shape depends on many factors, the preferred cooling flow rate ranges from about five to fifty gallons per minute (about twenty-two to two hundred liters per minute), using water flow at pressures of about two to six atmospheres through the passage channel 88, the cross-sectional area of which is approximately 400 mm 2 , and the maximum wall thickness 70 adjacent to the surface 84 is approximately 1 Ω, and adjacent to the ingots 26-7 mm. Figures 11 and 12 show the preferred form of electron beams 28 directed at ingots 26 to form molten ceramic material. As can be seen from Fig. 10 and 11, the beam 28 is additionally projected onto that part of the surface 84 of the crucible that immediately surrounds the entire ingot 26, the perimeter of the beam onto the surface 84 of the crucible. A preferred power distribution 98 of the electron beam 28 is shown in FIG. 12, which has peaks near the junctions of the ingot with the crucible 75 and dips or no beam power directed toward the center of the ingot 26. According to the present invention, the advantage of diverting such a high intensity beam from center of the formation of molten ceramic material is to reduce the spattering tendency, which generally occurs when droplets of molten ceramic are pushed out of this formation during heating. Such spattering is associated with the improper execution of the coating process of the parts 20, which should be avoided. Projecting the beam 28 onto the crucible 56 serves to reduce the layer of ceramic material that would otherwise collect on the crucible 56 due to spattering, and to provide a more uniform temperature distribution across the plane of the molten ceramic material as determined by infrared reflection. When using 57 as the ingot material, the peak beam intensity shown in Fig. 12 is of the order of about 0.ukW/mm? compared to a maximum level of approximately 0.01kW/mm 7? in the center of the formation of molten ceramic material. at

In addition, Fig. 10 shows that the electron beam 28 falls on the surface of the ingot 26 at an oblique angle so as to establish relative to its EP gun ZO the proximal intersection point 100 and the oppositely located peripheral intersection point 101 with the crucible 56 along the perimeter of the beam shape. As shown in Fig. 11, the predominant intensity of the beam shape on the ingot 26 and the crucible 56 decreases slightly, preferably from 3095 to 7095 relative to the rest of the perimeter of the beam shape, at locations on the crucible 56 corresponding to the proximal and peripheral points 100 and 101 of the intersection. The purpose of reducing the intensity of the beam shape at the proximal intersection point 100 is to reduce erosion of the crucibles 56 from the beam 28, while reducing the intensity of the beam at the distal intersection point 101 has been shown to reduce the height of the waves from the beams 26 directed to form with the molten ceramic material to avoid flow of molten ceramic material over the edge of the crucible 56. cm

Another advantageous feature of the electron beam control 28 according to the present invention is the ability to temporarily interrupt the beam pattern on the surface of the crucibles 56 with a separate high-intensity beam pattern 97 designed to achieve a higher evaporation rate from a small area to evaporate any amount of ceramic material that can be deposited on the crucible 56 as a result of spraying. This feature of the present invention can be realized by performing a coating with minimal or no negative

Influence on the process of its application. In a preferred embodiment, when the operator begins to perform deviations from the separate mold 97 to evaporate the accumulated layer of ceramics on the crucible 56, the mold 97 is first automatically moved to a new position from which this mold 97 can be mechanically moved under the supervision of the operator in the "" direction of accumulation. By automatically returning the mold 97 to a new position, the probability of errors that could cause damage to the crucible is reduced. on the crucible 56, which is difficult to remove by the mold 97, can be removed by the manipulator 77, as shown in Fig.7.

Magazines 102, which contain and feed ingots 26 through the base of the coating chamber 12 and into the crucible 56, -| can be seen in Fig. 1-7. As clearly shown in Figures 2, b and 7, each magazine 102 has a series of cylindrical channels 1" 50 104 in which the ingots 26 are held. The magazines 102 rotate to the marked positions of the ingots 26, which coincide with the positions of the crucibles 56. In addition, the magazines 102 can move in a rectilinear-reciprocal direction one that) to/from each other (that is, sideways relative to the walls of the coating chamber 12) to perform adjustments to the separation of the crucibles and thereby optimize the coating zone over which the coating thickness deviations are within acceptable limits.

The feeding mechanisms used to grip and feed the ingots 26 into the crucible 56 generally include gripper arms 60, each of which is angled to the horizontal and adapted to hold the vaporizing ingot 26 in a designated location upon intended rotation of the magazine 102 . The upper end of each handle 60 o engages the evaporation ingot 26 in the upward direction with the lifting device 61, preventing the handle i) the gripper 6bO from sliding down in the direction of the horizontal position, which is determined to cause jamming of the feed mechanism. In accordance with the present invention, each magazine 102 sequentially aligns the next ingot 26 with the lower end of the evaporating ingot 26 60 within the crucible 56 and the lifting device 61 feeds the next ingot 26 into the coating chamber 12 behind the evaporating ingot 26 with little or no interrupting the deposition of ceramic material on parts 20.

The indication field 48, which was mentioned with reference to Fig. 3-5, is shown in more detail in Fig. 13. The display field is configured to allow the operator of the device 10 to monitor the coating process, including the parts to be coated, the formations with the molten ceramic material, the reflectors 80 around the crucibles 56, and the manipulators 77 for moving the reflectors 80. As shown, the display field 48 is generally an enclosure including a liquid-cooled aperture plate 106 and, if necessary, a sapphire window 108 to withstand high temperatures (roughly 8002 and above) near the plating process. Shielding gas is shown to be directed to aperture plate 106 through passageway 110 to minimize coating deposition on window 108 or equipment behind aperture plate 106. Within indication field 48, rotating stroboscopic drum 112 serves to minimize the effect of radiant heat, light, and other radiation from covering chamber 12 on the viewing window 114. According to known practice, the wall of the drum 112 has holes 116

Its drum rotates at high speed to avoid flickering in front of the operator's eyes. Window 114 is preferably made of faceted quartz glass, leaded glass, and/or colored glass. Quartz 7/0 glass provides physical strength, lead glass - protection against X-rays, and colored glass is used to reduce light intensity. In addition, the indication field 48 includes a magnetic particle seal that provides a high temperature vacuum seal for the stroboscopic drum. Another preferred feature is that the display field provides a stereoscopic view of the interior of the cover chamber 12, which can be performed by one or more operators simultaneously while maintaining a depth of perception of 75.

Fig. 14 shows a preferred control panel 118 for controlling and monitoring the EPNIPCPF device according to the present invention. The control panel 118 is shown to display a schematic of the device 10 and its parts, including pointers 120 for individual parts (eg, cover chamber 12). In addition, visual indicators 122 are shown adjacent to indicator 120 for indicating the operational status of components, and switches 20124 for changing the action of the respective components.

Control and measuring devices for calculating process parameters, for example, pressure, are located around the console. Using the control panel 118, information about the operating status of the EPNIPCPF device can be immediately and accurately noted and will allow the operator to make the necessary corrections in the device 10 and in the coating process. with

In operation, the device 10 of the present invention may have an initial appearance as shown in Figures 1 and 2. As discussed above, the parts 20 to be coated are loaded onto the rake mechanism 22 in the loading chambers 16 and 18. The parts 20 can be made of any attractive material, for example, heat-resistant alloys based on nickel or cobalt, if the parts 20 are blades of gas turbine engines. In the case of blades of gas turbine engines, before coating with the help of device 10, a binding coating of the type of primer of a known composition is usually applied to the surface of the parts, as described earlier. In addition, for the application of the TIP ceramic coating, the surface of the binding coating is preferably sandblasted with a sandblaster to clean it and produce the optimal surface required for the application of EPNIKPF frequent ceramic coatings. In addition, before applying the ceramic coating to the binder coating, an alumina scale should be formed at an elevated temperature to promote adhesion of the coating. Okalina village

335 alumina, which is often referred to as thermally growing oxides or TO, is formed by oxidation of a binding coating with aluminum content, subjecting either to elevated temperatures before or during the application of ceramic material, or to heat treatment according to a special technique. According to this invention, the parts 20 are preferably preheated to a temperature of 11002 in an argon atmosphere. In the event of failure to preheat the parts 20, the preheating chamber 14 preferably maintains a temperature of 6002 °C to minimize the temperature range to which the chamber 14 is exposed during the coating campaign. After preheating in the preheating chamber 14, the raking mechanism 22 is further introduced into the coating chamber 12. As mentioned above, the device 10 according to the present invention has a special configuration for applying a ceramic coating under conditions of increased pressure as defined by Kidpeu ). Before the start of the coating process, a quick vacuum test is preferably performed to examine the level of pumping and the pressure created in the middle of each of the chambers: the coating chamber 12, the loading chambers 14 and 16, and the pre-coating chamber 18 for a set period of time. The performance of such a test serves to determine the vacuum integrity of the device, which was carried out in the EPNIPCPF process by carrying out an oxidation test on the experimental unit, as indicated in the prototype. Chambers 12, 14, 16 and 18 were evacuated by mechanical pumps 31 from atmospheric pressure - I and then turned on the blower when the pressure dropped to approximately 20mbar. The cryogenic pump 32 is preferably turned on when the pressure reaches approx but 510" mbar. After that, the diffusion pumps 32 and 34 for the coating chambers 12 and preheating 14 are turned on when the pressure reaches about 5 x 10" "mbar. The values of the working pressure in the loading chambers 14 and 16 and the preheating chamber 18 approximately reach 10-3-10-"mbar, and the working pressure values are approximately from 102 to 5x10"mbar in the area of coverage defined by the hood 52. Two-element ionization manometer 55, equipped with a mechanical shut-off valve 57, is preferably used to measure the vacuum pressure in the coating chamber 12. (F) Using the pressure gauge 55 with independently operating elements, any element can be used without interrupting the coating process. Alternatively, you can connect two ionization manometers, separated by a valve, with the possibility of turning on any of them without interrupting the coating process. In a preferred embodiment of the present invention, the cryogenic pump 32 is preferably turned on before the diffusion pump 34, in contrast to the known practice, where both pumps 32 and 34 are usually turned on at the same time to reduce the ice layer on the cryogenic pump 32. By turning on the cryogenic pump 32 before the diffusion pump 34, it was found , which at the same time significantly reduces the time required to reach the pressure values in the coating chamber desired for the implementation of the present invention. If the inclusion of the cryogenic pump 32 to the diffusion pump 34 causes ice to build up on the cryogenic pump 32, this ice can be removed at the end of the coating campaign or at 65 any convenient time.

During the coating process, the electron beams 28 are focused on the ingots 26, thereby forming a molten ceramic material and vapors deposited on the part 20. When different coating materials can be used, the preferred ceramic materials for electron beam coating (namely, the ingots 26)

There may be zirconium oxide (2gO5) partially or completely stabilized by yttrium oxide (for example, 3-20905, preferably 4-895 M2O53), although yttrium stabilized by magnesium, cerium, calcium, scandium or other oxides can also be used. The coating process continues until the desired coating thickness of the parts 20 is formed, after which the parts 20 are moved through the preheating chamber 14 into the loading chamber 16, after which the vents are opened to expose it to natural ventilation. The ventilation openings are 70 at least 30mm in diameter to increase the ventilation rate, but generally not more than 20mm in diameter to prevent dust and other contamination from entering chambers 12, 14, 16 and 18. For this purpose, it is desirable to first ventilate through the openings using a small diameter valve and then a larger diameter.

Although this invention has been described in terms of preferred embodiments, it is apparent that those skilled in the art may employ other embodiments. Accordingly, the scope of the invention should be limited only by the following claim. shhhhhh 5th shhhhhhhhh

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Claims (10)

The formula of the invention 1. Electron beam device (10) for coating by condensation from the vapor phase, which includes a coating chamber (12) that operates under conditions of elevated temperature and subatmospheric pressure, a crucible (56), (F) is located in the middle of the coating chamber (12) ), a coating material (26) which is surrounded by a crucible (56) and contains GI therein, and the coating material (26) has a surface exposed to the action of the crucible (56), an electron beam gun (30) for projecting an electron beam (28) ) on the surface of the coating material (26), and in the form of electron beams (28) has a higher intensity (98) at the point of contact between the surface of the coating material (26) and the crucible (56) than in the central area of the surface of the coating material (26). 2. Electron beam device (10) for coating by condensation from the vapor phase according to claim 1, which is characterized by the fact that the intensity in the central area of the surface of the coating material (26) is practically zero. 65 Z. Electron beam device (10) for coating by condensation from the vapor phase according to claim 1, characterized in that the electron beam (28) is additionally projected onto the surface of the area (84) of the crucible (56) in contact with the surface of the coating material (26), and the beam shape has a higher intensity (98) on the surface of the area (84) of the crucible (56) than in the central area of the surface of the coating material (26). 4. Electron beam device (10) for applying a coating by condensation from the vapor phase according to claim 1, characterized in that the beam shape has a perimeter on the surface area (84) of the crucible (56), and the electron beam (28) is directed to the surface covering material at an oblique angle so as to establish a proximal intersection point (100) and an oppositely located peripheral intersection point (101) with respect to the electron beam gun (30) along the perimeter of the beam shape, which has an intensity at the proximal and peripheral points (100, 101) lower than the intensity (98) anywhere along the perimeter of the 7/0 beam shape. 5. Electron beam device (10) for coating by condensation from the vapor phase according to claim 4, characterized in that the intensity of the beam shape at the proximal and peripheral points (100, 101) has a value of about 30 - 7095 less than the intensity ( 98) anywhere along the perimeter of the beam shape. 6. Electron beam device (10) for applying a coating by condensation from the vapor phase according to claim 1, 7/5, which is characterized by the fact that it additionally includes means for projecting a separate form (97) of the beam onto the crucible (56) for evaporating droplets of the molten coating material (26) from the crucible (56), and the individual beam shape (97) has a higher intensity than the beam shape on the cover material (26). 7. The electron beam device (10) for applying a coating by condensation from the vapor phase includes a coating chamber (12) in which the coating material (26) is located and which is in conditions of elevated temperature of 2o and a pressure of more than 0.010 mbar, a crucible (56), located in the middle of the coating chamber (12), the coating material (26), which is surrounded by and contained in the crucible (56), and the coating material (26) has a surface exposed to the action of the crucible (56), an electron beam gun (30) for projecting an electron beam (28) onto the surface of the covering material (26) and onto the adjacent area (84) of the surface of the crucible (56), and the electron beam has a shape that is superimposed on the adjacent area (84) of the surface of the crucible (56) along the perimeter , the electron beam gun (30) melts the surface of the coating material (26) and evaporates the melted coating material (26), while the electron beam (28) has an intensity (98) higher at the point of contact with the surface of the coating material (26) ) and conjugation part (84) of the surface of the crucible (56) than in the central part of the surface of the coating material (26), and directed to the surface of the coating material at an oblique angle so as to establish the proximal point of intersection (100) with respect to the electron beam gun (30) zo and the oppositely located peripheral intersection point (101) along the perimeter of the beam shape, the electron beam (28) has an intensity at the proximal and peripheral points (100, 101) lower than the intensity - (98) anywhere along the perimeter of the beam shape. M 8. Electron beam device (10) for applying a coating by condensation from the vapor phase according to claim 7, which is characterized by the fact that the intensity in the central area of the surface of the coating material (26) is practically zero. uh- 9. Electron beam device (10) for coating by condensation from the vapor phase according to claim 7, characterized in that the intensity of the beam shape at the proximal and peripheral points (100, 101) has a value of approximately 30 - 7095 less than the intensity ( 98) anywhere along the perimeter of the beam shape. 10. Electron beam device (10) for coating by condensation from the vapor phase according to claim 8, which is characterized by the fact that it additionally includes means for projecting beams (97) of separate forms onto the crucible pl) c (56) for evaporating droplets of the molten coating material (26) from the crucible (56), and individual beam forms (97) have a higher intensity than the beam forms on the covering material (26). ;" Official bulletin "Industrial Property". Book 1 "Inventions, useful models, topographies of integrated microcircuits", 2005, M 4, 15.04.2005. State Department of Intellectual Property of the Ministry of Education and Science of Ukraine. name) -I iz 50 Ko) F) name) 60 b5