UA11181A - Способ ионно-плазменной обработки - Google Patents

Способ ионно-плазменной обработки

Info

Publication number
UA11181A
UA11181A UA4947211A UA4947211A UA11181A UA 11181 A UA11181 A UA 11181A UA 4947211 A UA4947211 A UA 4947211A UA 4947211 A UA4947211 A UA 4947211A UA 11181 A UA11181 A UA 11181A
Authority
UA
Ukraine
Prior art keywords
ion
treatment method
plasma treatment
workpiece
generation
Prior art date
Application number
UA4947211A
Other languages
English (en)
Ukrainian (uk)
Inventor
Валерій Федорович Семенюк
Валерий Федорович Семенюк
Original Assignee
Спеціальне Конструкторсько-Технологічне Бюро З Експериментальним Виробництвом Інституту Ядерних Досліджень Ан Урср
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Спеціальне Конструкторсько-Технологічне Бюро З Експериментальним Виробництвом Інституту Ядерних Досліджень Ан Урср filed Critical Спеціальне Конструкторсько-Технологічне Бюро З Експериментальним Виробництвом Інституту Ядерних Досліджень Ан Урср
Priority to UA4947211A priority Critical patent/UA11181A/ru
Publication of UA11181A publication Critical patent/UA11181A/ru

Links

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  • Crystals, And After-Treatments Of Crystals (AREA)

Abstract

Способ включает воздействие на обрабатываемое изделие химически активными нейтральными и заряженными частицами, генерацию которых осуществляют в физически разделенных пространствах.
UA4947211A 1991-06-18 1991-06-18 Способ ионно-плазменной обработки UA11181A (ru)

Priority Applications (1)

Application Number Priority Date Filing Date Title
UA4947211A UA11181A (ru) 1991-06-18 1991-06-18 Способ ионно-плазменной обработки

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
UA4947211A UA11181A (ru) 1991-06-18 1991-06-18 Способ ионно-плазменной обработки

Publications (1)

Publication Number Publication Date
UA11181A true UA11181A (ru) 1996-12-25

Family

ID=74553409

Family Applications (1)

Application Number Title Priority Date Filing Date
UA4947211A UA11181A (ru) 1991-06-18 1991-06-18 Способ ионно-плазменной обработки

Country Status (1)

Country Link
UA (1) UA11181A (ru)

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