UA103551U - A method of manufacturing barrier contacts to semiconductor compounds a3b5 type - Google Patents
A method of manufacturing barrier contacts to semiconductor compounds a3b5 typeInfo
- Publication number
- UA103551U UA103551U UAU201505137U UAU201505137U UA103551U UA 103551 U UA103551 U UA 103551U UA U201505137 U UAU201505137 U UA U201505137U UA U201505137 U UAU201505137 U UA U201505137U UA 103551 U UA103551 U UA 103551U
- Authority
- UA
- Ukraine
- Prior art keywords
- semiconductor compounds
- type
- barrier contacts
- manufacturing barrier
- contact
- Prior art date
Links
Landscapes
- Physical Vapour Deposition (AREA)
- Electrodes Of Semiconductors (AREA)
Abstract
Спосіб виготовлення бар'єрних контактів до напівпровідникових з'єднань типу АВвключає очищення поверхні підкладки напівпровідникового з'єднання типу АВ, магнетронне напилювання контактоутворюючого та зовнішнього контактного шарів і швидкий термічний відпал при температурі 450÷550 °C. Для створення контактоутворюючого шару здійснюють магнетронне напилювання квазіаморфної плівки ТіВтовщиною 50÷200 нм при струмі ~0,4 А і додатково проводять ненагрівну мікрохвильову обробку з частотою 2,45÷24 ГГц, емітансом 1,5÷7,5 Вт/см, протягом 1÷2 с.A method of manufacturing barrier contacts to AB-type semiconductor compounds involves cleaning the substrate surface of AB-type semiconductor compounds, magnetron sputtering of contact and external contact layers, and rapid thermal annealing at 450 ÷ 550 ° C. To create a contact-forming layer, magnetron sputtering of a quasiamorphic Ti film with a thickness of 50 ÷ 200 nm at a current of ~ 0.4 A is carried out and additionally conduct a non-heating microwave treatment with a frequency of 2.45 ÷ 24 GHz, emitting 1.5 ÷ 7.5 W / cm, for 1 С 2 sec.
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
UAU201505137U UA103551U (en) | 2015-05-25 | 2015-05-25 | A method of manufacturing barrier contacts to semiconductor compounds a3b5 type |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
UAU201505137U UA103551U (en) | 2015-05-25 | 2015-05-25 | A method of manufacturing barrier contacts to semiconductor compounds a3b5 type |
Publications (1)
Publication Number | Publication Date |
---|---|
UA103551U true UA103551U (en) | 2015-12-25 |
Family
ID=55172073
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
UAU201505137U UA103551U (en) | 2015-05-25 | 2015-05-25 | A method of manufacturing barrier contacts to semiconductor compounds a3b5 type |
Country Status (1)
Country | Link |
---|---|
UA (1) | UA103551U (en) |
-
2015
- 2015-05-25 UA UAU201505137U patent/UA103551U/en unknown
Similar Documents
Publication | Publication Date | Title |
---|---|---|
JP2014158018A5 (en) | ||
JP2013175738A5 (en) | Method of manufacturing light emitting device | |
JP2011077512A5 (en) | Method of manufacturing light emitting device | |
JP2014045200A5 (en) | ||
JP2015135976A5 (en) | Method for manufacturing semiconductor device | |
JP2012033911A5 (en) | ||
JP2016001736A5 (en) | ||
JP2012009838A5 (en) | Method for manufacturing semiconductor device | |
EA201390824A1 (en) | ISOLATED METAL SUBSTRATE | |
JP2013175710A5 (en) | Method for manufacturing semiconductor device | |
JP2013042180A5 (en) | ||
TW201614717A (en) | Semiconductor device and method for fabricating the same | |
JP2013190804A5 (en) | ||
JP2011192974A5 (en) | Method for manufacturing semiconductor device | |
JP2015005734A5 (en) | ||
JP2011181906A5 (en) | Semiconductor device | |
JP2013016785A5 (en) | ||
JP2013153160A5 (en) | Method for manufacturing semiconductor device | |
JP2012256877A5 (en) | Manufacturing method of semiconductor device and semiconductor device | |
JP2015005732A5 (en) | Semiconductor device | |
JP2012067387A5 (en) | Electronic device, method of manufacturing electronic device, and sputtering target | |
TR201903254T4 (en) | Coated glass plate with heat treatment. | |
JP2015065424A5 (en) | Method for manufacturing semiconductor device | |
JP2013149953A5 (en) | ||
JP2015213072A5 (en) | Method for manufacturing display device |