TWM654945U - Chemical separation and purification equipment - Google Patents

Abstract

The invention provides a chemical separation and purification device, which includes a distillation tower, a feed pipeline, a heater, a condenser and a collection tank, wherein the feed pipeline is connected to the bottom of the distillation tower, the heater is connected to the bottom of the distillation tower, one end of the condenser is connected to the top of the distillation tower, and the other end of the condenser is connected to the collection tank, wherein the distillation tower includes a packing part and a tray part, and the packing part and the tray part are arranged in the distillation tower in a longitudinal direction. The chemical separation and purification device provided by the invention has the effect of reducing the occupied area and reducing energy consumption.

Description

Chemical separation and purification equipment

This work is about a chemical separation and purification device, especially a chemical separation and purification device related to a distillation column.

In recent years, the semiconductor technology industry has been booming, and the semiconductor industry has been constantly pursuing the production of smaller, more energy-efficient, and more stable and reliable electronic products. However, since semiconductor components are extremely sensitive, even tiny impurities may have an adverse effect on their performance. In the complex semiconductor manufacturing process, various high-purity chemicals are relied on to control the content of impurities to ensure that the semiconductor products produced have good performance. For example, the gases used to inject equipment in the process, the materials used to deposit wafers, the cleaning products for cleaning the surface dirt of wafers, and the reagents for yellow light etching during wafer processing all require the participation of high-purity chemicals. Therefore, the purification technology of semiconductor chemicals plays a vital role in the control of the yield of semiconductor manufacturing processes.

Distillation is a common purification method in semiconductor chemical purification technology. Compared with other purification methods such as ion exchange, filtration, solution crystallization, gas phase cleaning, chemical adsorption, etc., it has two biggest advantages. First, the chemicals purified by distillation can achieve extremely high purity, often as high as 4N (i.e. 99.99%) or 5N (i.e. 99.999%). Second, distillation can further improve the purity of chemicals through repeated actions in multiple cycles. The repeatability of distillation helps to ensure that each batch of products has a highly consistent purity.

However, the technology of purifying semiconductor chemicals by distillation also has some drawbacks. For example, the floor space of the factory is limited and expensive. If plate towers, packed towers and other equipment units need to be connected in series horizontally to assemble a chemical separation and purification device, the floor space required for the entire separation and purification device will be greatly increased; furthermore, the distillation tower itself urgently requires a high-pressure and high-temperature operating environment, which will also lead to high energy consumption and manufacturing costs. Therefore, it is necessary to further study how to reduce the floor space occupied by chemical separation and purification equipment and reduce energy consumption, in order to provide a more streamlined and efficient production method for semiconductor development.

In view of the problems existing in the above-mentioned prior art, the purpose of the present invention is to provide a chemical separation and purification device, which has the effects of small footprint and low energy consumption.

To achieve the aforementioned purpose, the present invention provides a distillation tower, a feed pipeline, a heater, a condenser and a collecting tank, wherein the feed pipeline is connected to the bottom of the distillation tower, the heater is connected to the bottom of the distillation tower, one end of the condenser is connected to the top of the distillation tower, and the other end of the condenser is connected to the collecting tank, wherein the distillation tower comprises a packing portion and a plate portion, and the packing portion and the plate portion are arranged in the distillation tower along the vertical direction.

By integrating the packing part and the tray part and arranging them in the longitudinal direction, the chemical separation and purification device of the present invention can not only reduce the floor space occupied and reduce the equipment cost, but also streamline the use of energy, thereby achieving the effect of reducing energy consumption.

In one embodiment of the present invention, the packing part is located above the plate part, and the distillation tower further comprises a support plate, which is located between the plate part and the packing part and is used to support the weight of the packing part to prevent the packing part from falling. Specifically, the support plate can be a film or a porous alloy plate, but is not limited thereto.

In another embodiment of the present invention, the tray portion is located above the packing portion, and the distillation tower further comprises a support plate, which is located between the tray portion and the packing portion and is used to fix the packing portion to prevent the packing portion from floating due to the driving force of steam or exhaust gas in the distillation tower. Specifically, the support plate can be the film or the porous alloy plate, but is not limited thereto.

According to the invention, since the support plate is provided to fix the filler in the filler part so that it does not fall or float due to various thrusts in the distillation tower, the size of the holes on the support plate is smaller than the particle size of the filler. Specifically, the diameter of the holes on the support plate can be between 1.0 mm and 7.0 mm.

According to the present invention, the distillation tower may include one or more packing sections, and at least one tower plate section or at least one support plate may be arranged between the multiple packing sections, so that the multiple packing sections are not adjacent to each other; the distillation tower may include one or more tower plate sections, and at least one tower plate section or at least one support plate may be arranged between the multiple tower plate sections, so that the multiple tower plate sections are not adjacent to each other.

Generally speaking, the chemical separation and purification device of the present invention will spontaneously undergo separation and purification reactions due to the large amount of steam generated in the heater and the distillation tower. To speed up the reaction, in one embodiment of the present invention, the chemical separation and purification device further includes an exhaust system, which is disposed at the top of the distillation tower to increase the driving force of the fluid in the distillation tower. Specifically, the exhaust system can be a vacuum pump, a pressure pump or a combination thereof, but is not limited thereto.

According to the present invention, the chemical separation and purification device of the present invention may also include a reflux line, which is grafted between the condenser and the collection tank and branched into a first reflux line and a second reflux line. The first reflux line is connected to the top of the tower plate section, and the second reflux line is connected to the top of the packing section, so as to reintroduce the condensed chemicals into the tower plate section and the packing section for distillation, respectively, to improve the purity of the chemicals.

According to the present invention, the chemical separation and purification device of the present invention may further include an air inlet pipe, which is disposed at the top of the distillation tower. Before purification and separation, an inert gas is introduced into the distillation tower through the air inlet pipe, so that the gas in the distillation tower is mainly inert gas, to prevent impurities such as water vapor and oxygen in the air from reacting or mixing with chemicals and affecting the purity of the chemicals. For example, the inert gas may be nitrogen, argon or a combination thereof, but is not limited thereto.

Preferably, the distillation tower further comprises a first temperature sensor and a second temperature sensor. Specifically, the first temperature sensor is disposed on the tray portion to sense the temperature of the tray portion, and the second temperature sensor is disposed on the packing portion to sense the temperature of the packing portion. More preferably, the heater further comprises a temperature controller, which is connected to the heater and is used to receive the temperatures measured by the first temperature sensor and the second temperature sensor to adjust the heating temperature of the heater.

According to the present invention, the chemical separation and purification device of the present invention can be used to separate and purify various chemicals in semiconductor manufacturing processes. For example, it includes chemicals used in deposition, etching, surface cleaning technology, doped semiconductors, yellow light, or other semiconductor processes. Since most of these chemicals are corrosive, it is preferred that the material in the chemical separation and purification device of the present invention is an alloy. Specifically, the alloy can be Hastelloy alloy, Monel alloy, stainless steel or a combination thereof, but is not limited thereto.

In the deposition process, the chemical separation and purification device of the invention is used to purify chemicals including acetylene, ammonia, carbonyl sulfide, deuterated ammonia, deuterated silane, dichlorosilane, disilane, germanium tetrachloride, germane, hexachlorodisilane (HCDS), hydrogen sulfide, methane, nitric oxide, nitrous oxide, oxygen, propylene, silane, sulfur dioxide, trichlorosilane, triethylaluminum (TEA), trimethylaluminum (trimethylaluminum, TMA), trimethylsilane (trimethylsilane, 3MS) or tungsten hexafluoride (tungsten hexafluoride), but not limited thereto. Preferably, the separation and purification device of the present invention is used to purify the deposited chemical hexachlorosilane (hexachlorodisilane, HCDS) or nitric oxide (nitric oxide).

In the etching process and surface cleaning technology, the chemical separation and purification device of the invention is used to purify chemicals including boron trichloride, carbon monoxide, carbon dioxide, chlorine, chlorine trifluoride, tetrafluoromethane, hexafluoroethane, octafluoropropane, hexafluoro-1,3-butadiene, octafluorocyclobutane, octafluorocyclopentene, difluoromethane, trifluoromethane, fluoromethane, hydrogen bromide, fluorine, nitrogen, hydrogen chloride, hydrogen fluoride, nitrogen trifluoride, fluoride), pentafluoroethane, silicon tetrafluoride, sulphur hexafluoride or xenon difluoride, but not limited thereto. Preferably, the etching chemicals and surface cleaning technology chemicals used for purification by the separation and purification device of the present invention are boron trichloride, hexafluoro-1,3-butadiene or hydrogen bromide.

In the doping process, the chemical separation and purification device of the present invention is used to purify chemicals including germanium tetrafluoride, arsine, boron trifluoride, boron-11 trifluoride, diethylzinc, diborane, diborane-11, germanium hydride, phosphine, trimethyl-boron, but is not limited thereto. Preferably, the doping chemical used to be purified by the separation and purification device of the present invention is germanium tetrafluoride.

In the above-mentioned yellow light process and other semiconductor-related processes, the chemical separation and purification device of the present invention is used to purify chemicals including a mixed gas of argon, fluorine and neon, a mixed gas of krypton, fluorine and neon, a mixed gas of argon, xenon and neon, a mixed gas of krypton and neon, a mixed gas of neon, hydrogen chloride, and hydrogen, neon, xenon, argon, deuterium, helium, hydrogen or nitrogen, but is not limited to these.

Additionally, for ease of explanation, this specification may use spatially relative terms such as "located on top of," "located at the bottom of," "located between," "connected to," etc. to describe the relationship of one element or feature to another (other) element or feature. Spatially relative terms are intended to encompass different orientations of the device in use or operation in addition to the orientation depicted in the figures. The device may be otherwise oriented (rotated 90 degrees or at other orientations) and the spatially relative descriptions used herein should be interpreted accordingly.

The following is a specific example to illustrate the implementation of the present invention. Those skilled in the art can easily understand the advantages and effects that can be achieved by the present invention through the contents of this manual, and make various modifications and changes without departing from the spirit of the present invention to implement or apply the contents of the present invention.

Embodiment 1

As shown in FIG. 1 , the chemical separation and purification device of Example 1 comprises a distillation tower 1, a feed pipeline 2, a heater 3, a condenser 4, a collecting tank 5, a vacuum system 6, a reflux pipeline 7, and an air inlet pipe 8.

The distillation tower 1 comprises a tray section 11, a packing section 12, a support plate 13, a first temperature sensor 14 and a second temperature sensor 15. The tray section 11 and the packing section 12 are arranged in a longitudinal direction in the distillation tower 1, and the support plate 13 is located between the tray section 11 and the packing section 12. In this embodiment, the packing section 12 is located above the tray section 11, the first temperature sensor 14 is arranged on the tray section 11 for sensing the temperature of the tray section 11, and the second temperature sensor 15 is arranged on the packing section 12 for sensing the temperature of the packing section 12. In this embodiment, the support plate 13 is a porous alloy plate for supporting the packing section 12 to prevent the packing in the packing section 12 from falling.

The feed pipeline 2 is connected to the bottom of the distillation tower 1, and the chemical to be separated is fed into the distillation tower 1 through the feed pipeline 2.

The heater 3 is connected to the bottom of the distillation tower 1. The heater 3 can be used to heat the chemicals to be separated from the distillation tower 1 and send the heated chemicals back to the distillation tower 1. In this embodiment, after the chemicals to be separated are sent to the tray section 11 of the distillation tower 1, they can be heated by the heater 3 and then sent back to the tray section 11 for separation and purification, and then flow through the packing section 12 for separation and purification. The heater 3 has a temperature controller 31, which is connected to the heater 3 and can receive the temperatures sensed by the first temperature sensor 14 and the second temperature sensor 15, and adjust the heating temperature of the heater 3.

The condenser 4 is connected to the top of the distillation tower 1 , and the condenser 4 can be used to condense the purified chemicals obtained by distillation in the distillation tower 1 .

The collecting tank 5 is connected to the condenser 4 and is used to collect the purified chemicals condensed by the condenser 4.

The exhaust system 6 is connected to the top of the distillation tower 1. The exhaust system 6 is provided to evacuate or reduce the pressure in the distillation tower 1, thereby increasing the driving force of the gas to flow upward and accelerating the distillation reaction.

The reflux line 7 is connected between the condenser 4 and the collecting tank 5 and branches into a first reflux line 71 and a second reflux line 72. The first reflux line 71 is connected to the top of the plate portion 11, and the second reflux line 72 is connected to the top of the packing portion 12.

The air inlet pipe 8 is connected to the top of the distillation tower 1. The purpose of the air inlet pipe 8 is to make the gas in the distillation tower 1 mainly inert gas, so as to prevent impurities such as water vapor and oxygen in the air from reacting or mixing with chemicals to affect the purity.

Embodiment 2

As shown in FIG2 , the chemical separation and purification device of Example 2 is substantially the same as the chemical separation and purification device of Example 1, and also comprises a distillation tower 1, a feed pipeline 2, a heater 3, a condenser 4, a collecting tank 5, a vacuum system 6, a reflux pipeline 7 and an air inlet pipe 8. The connection relationship between the aforementioned components is substantially the same as that described in Example 1 and will not be described in detail herein.

The distillation tower 1 in this embodiment also has a tray section 11, a packing section 12, a support plate 13, a first temperature sensor 14 and a second temperature sensor 15. The tray section 11 and the packing section 12 are arranged in the vertical direction, and the support plate 13 is located between the tray section 11 and the packing section 12. In this embodiment, the tray section 11 is located above the packing section 12, the first temperature sensor 14 is arranged on the tray section 11 to sense the temperature of the tray section 11, and the second temperature sensor 15 is arranged on the packing section 12 to sense the temperature of the packing section 12. In this embodiment, the support plate 13 is a porous alloy plate to prevent the packing section 12 from floating upward due to the pushing force of steam or exhaust.

In this embodiment, the temperature controller 31 is connected to the heater 3, the reflux line 7 is grafted between the condenser 4 and the collecting tank 5, and is branched into a first reflux line 71 and a second reflux line 72, the first reflux line 71 is connected to the top of the tower plate part 11, and the second reflux line 72 is connected to the top of the packing part 12.

The chemical separation and purification device of this invention can have the following three effects by integrating the packing part and the tray part and arranging them longitudinally. First, the floor space occupied by the packing part and the tray part can be reduced. Second, the floor space occupied by multiple feed pipelines, heaters, condensers, exhaust systems, reflux pipelines or other devices and the equipment cost can be reduced. Third, the equipment units that require high energy consumption (such as heaters, exhaust systems and other devices) can be shared by the tray part and the packing part at the same time, so as to save the energy required for the entire distillation tower. For example, it is generally known that a distillation tower needs to be equipped with a heater to generate steam as a driving force for upward gas-liquid mass transfer in the distillation tower. By integrating the tray section and the packing section in the same distillation tower, the chemical separation and purification device of the present invention does not need to repeatedly install a heater in each independent distillation tower, thereby avoiding the consumption of a large amount of energy to provide a high-temperature and high-pressure operating environment in multiple distillation towers. Therefore, the chemical separation and purification device of the present invention can effectively reduce repeated operating processes, especially reduce energy consumption under high-temperature and high-pressure operating conditions.

The separation and purification process of the chemical separation and purification device of Example 1 is as follows:

First, nitrogen and argon are introduced into the distillation tower 1 through the air inlet pipe 8 to remove impurities such as water vapor and oxygen remaining in the distillation tower 1, so as to prevent the chemical from reacting or mixing with the impurities during the separation and purification process to affect the purity of the chemical. Next, a chemical is introduced into the distillation tower 1 through the feed pipeline 2, and the chemical flows into the heater 3 to be heated to boiling to generate steam. The steam passes through the plate section 11 and the packing section 12 in sequence from the bottom of the distillation tower 1 upward; at the same time, there is liquid flowing downward in the plate section 11 and the packing section 12, so that the steam and the liquid come into contact in the plate section 11 and the packing section 12, wherein the packing section 12 can remove impurities in the fluid through absorption and adsorption to improve the purity of the chemical. Finally, the vapor evaporated upward is condensed into liquid by the condenser 4. The condensed liquid chemical is partially introduced into the collecting tank 5 for storage, partially flows back into the packing part 12 through the second reflux line 72, and partially flows back into the tray part 11 through the first reflux line 71. The chemical refluxed into the distillation tower 1 continues to be distilled to obtain a chemical with a higher purity. In addition, during the distillation process, the support plate 13 can be used to support the packing part 12 to prevent the packing in the packing part 12 from falling. The first temperature sensor 14 and the second temperature sensor 15 can respectively sense the temperature of the tower plate part 11 and the packing part 12, and transmit their temperature signals back to the temperature controller 31 to adjust the temperature of the entire distillation tower 1. The exhaust system 6 can adjust the pressure in the distillation tower 1, evacuate the distillation tower 1, or reduce the pressure, thereby strengthening the driving force of the gas to flow upward and accelerating the distillation reaction.

The separation and purification process of the chemical separation and purification device of Example 2 is substantially the same as that of Example 1, except that the tray portion 11 of Example 2 is on the packing portion 12. Therefore, the chemical to be purified is heated to vapor from the bottom of the distillation tower 1 by the heater 3, passes through the packing portion 12 and then the tray portion 11, and is condensed into liquid by the condenser 4, and finally is introduced into the collection tank 5 for storage, wherein, The support plate 13 can fix the packing part 12 to prevent the packing part 12 from floating due to the steam flowing upward in the distillation tower 1 or the thrust provided by the exhaust system 6. The feed pipeline 2, the first reflux pipeline 71, the second reflux pipeline 72, the first temperature sensor 14, the second temperature sensor 15, the temperature controller 31, the exhaust system 6 and the air inlet pipe 8 are arranged for the same purpose as in Example 1.

In summary, by integrating the packing part and the tray part in the same distillation tower, the chemical separation and purification device of this invention can save the occupied plant area and equipment cost, and can more efficiently utilize the energy in the distillation tower, thereby achieving the effect of reducing energy consumption.

The above embodiments are merely examples for the convenience of explanation. The scope of rights claimed by this invention should be based on the scope of the patent application, and is not limited to the above embodiments.

1: Distillation tower 11: Plate section 12: Packing section 13: Support plate 14: First temperature sensor 15: Second temperature sensor 2: Feed pipeline 3: Heater 31: Temperature controller 4: Condenser 5: Collection tank 6: Exhaust system 7: Reflux pipeline 71: First reflux pipeline 72: Second reflux pipeline 8: Inlet pipe

Please read the following detailed description in conjunction with the drawings to better understand the implementation of this invention. It should be noted that, according to the practice in the field, various features may not be drawn in actual proportion. In fact, in order to facilitate the clear identification of the technical features of this invention, the size of various components or features may be arbitrarily increased or decreased as appropriate.

FIG1 is a schematic diagram of a chemical purification and separation device according to Embodiment 1.

FIG. 2 is a schematic diagram of a chemical purification and separation device according to Embodiment 2.

1: Distillation tower

11: Plate section

12: Filling section

13: Support plate

14: First temperature sensor

15: Second temperature sensor

2: Feeding pipeline

3: Heater

31: Temperature controller

4: Condenser

5: Collection tank

6: Exhaust system

7: Reflux pipeline

71: First reflux pipeline

72: Second reflux pipeline

8: Intake pipe

Claims (9)

A chemical separation and purification device comprises a distillation tower, a feed pipeline, a heater, a condenser and a collecting tank, wherein the feed pipeline is connected to the bottom of the distillation tower, the heater is connected to the bottom of the distillation tower, one end of the condenser is connected to the top of the distillation tower, and the other end of the condenser is connected to the collecting tank, wherein the distillation tower comprises a packing part and a tray part, and the packing part and the tray part are arranged in the distillation tower along the vertical direction. A chemical separation and purification device as described in claim 1, wherein the packing portion is located above the tray portion, and the distillation tower further comprises a support plate located between the packing portion and the tray portion. A chemical separation and purification device as described in claim 2, wherein the support plate is a film or a porous alloy plate. A chemical separation and purification device as described in claim 1, wherein the tray portion is located above the packing portion, and the distillation tower further comprises a support plate located between the packing portion and the tray portion. A chemical separation and purification device as described in claim 4, wherein the support plate is a film or a porous alloy plate. A chemical separation and purification device as described in any one of claims 1 to 5, wherein the chemical separation and purification device further comprises an exhaust system connected to the top of the distillation tower. A chemical separation and purification device as described in any one of claims 1 to 5, wherein the chemical separation and purification device further comprises a reflux line, which is grafted between the condenser and the collection tank and branches into a first reflux line and a second reflux line, and the first reflux line and the second reflux line are respectively connected to the top of the tower plate section and the packing section. A chemical separation and purification device as described in any one of claims 1 to 5, wherein the distillation tower further comprises a first temperature sensor and a second temperature sensor, and the first temperature sensor and the second temperature sensor are respectively arranged on the tower plate portion and the packing portion. A chemical separation and purification device as described in any one of claims 1 to 5, wherein the distillation tower further comprises an air inlet pipe connected to the top of the distillation tower.

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