TWM650249U - Evaporation machine with positioning system - Google Patents

Abstract

An evaporation machine with a positioning system, including a crucible plate, a transmission component, a first positioning sensing system, a second positioning sensing system and a control device. The transmission assembly has a chassis gear located at the bottom of the crucible plate to drive the crucible plate, a motor, a transmission shaft connected to the rotating shaft of the motor, and a transmission gear provided on the transmission shaft and used to drive the chassis gear; the first positioning The sensing system has a first positioning gear driven by the transmission shaft and a first sensing unit used to sense the rotation of the first positioning gear; the second positioning sensing system has a positioning turntable driven by the chassis gear and a second sensor for detecting the rotation of the positioning turntable; the control device compares the detection signals of the first and second positioning sensing systems to obtain the positioning detection result.

Description

Evaporation machine with positioning system

The invention relates to an evaporation machine, in particular to a evaporation machine with a positioning system.

A conventional evaporation machine (not shown) used to perform an evaporation process generally includes a rotatable crucible plate for placing evaporation materials, a transmission assembly for rotating the crucible plate, and a A positioning system for positioning and detecting the rotation of the crucible plate, and a heating source for heating the evaporation material. Wherein, the transmission assembly at least has a motor and a transmission gear set driven by the motor and in contact with the crucible plate. The crucible plate has a plurality of containers for placing different evaporation materials, and the rotation of the crucible plate can drive the containers to move to predetermined positions.

When the evaporation machine is used for evaporation, the transmission assembly drives the crucible plate to rotate first, so that one of the predetermined containers moves to a predetermined position and is located at the heating source to evaporate the evaporation material that meets the process requirements. Heat. During the process of rotating the crucible plate, the positioning system will perform positioning detection on the rotation of the transmission component to confirm whether the container to be processed is correctly aligned with the heating source, so as to avoid accidents due to incorrect alignment. Problems such as selecting evaporation materials that do not meet the process requirements or failing to fully heat the evaporation materials lead to a decrease in process yield.

However, since the positioning system and the transmission assembly are both mechanically actuated, as the operation time increases, some components (such as gears or couplings, etc.) are prone to wear, looseness, or skipped teeth, resulting in the crucible The rotation of the disk is not as expected, resulting in sensing positioning errors, or the positioning detection accuracy of the positioning system is reduced, and other problems.

Therefore, the purpose of the present invention is to provide an evaporation machine with a positioning system for positioning the crucible plate configured therein and to improve the accuracy of positioning.

Therefore, the new evaporation deposition machine with a positioning system includes a crucible plate, a transmission component, a first positioning sensing system, a second positioning sensing system, and a control device.

The crucible plate has a plurality of receptacles.

The transmission assembly includes a rotation unit for driving the crucible plate to rotate, and a transmission unit for driving the rotation unit. The rotating unit has a chassis gear arranged at the bottom of the crucible plate. The transmission unit has a motor, a transmission shaft connected to the rotating shaft of the motor, and a transmission gear arranged at an end of the transmission shaft away from the motor for driving the chassis gear.

The first positioning sensing system has a first positioning gear driven to rotate by the transmission shaft, and a first sensing unit arranged around the periphery of the first positioning gear. The first sensing unit is used to sense the rotation of the first positioning gear to obtain a first sensing signal.

The second positioning sensing system has a positioning turntable driven by the chassis gear, and a second sensor disposed on the side of the positioning turntable. The second sensor is used to detect the rotation of the positioning turntable to obtain a second sensing signal.

The control device is connected to the first sensing unit and the second sensor signal, and is used to compare the first sensing signal and the second sensing signal to obtain a positioning detection result.

The function of the present invention is to use the first positioning sensing system and the second positioning sensing system to perform positioning sensing respectively on the transmission shaft used to rotate the crucible plate and the positioning turntable driven by the chassis gear, so as to Obtain the first sensing signal and the second sensing signal, and then use the control device to perform interactive comparison and double confirmation based on the positioning results obtained by the two different detection methods, so as to improve the positioning detection of the crucible plate. measurement accuracy.

Before the present invention is described in detail, it should be noted that similar components are represented by the same numbers in the following description. The relevant technical contents, features and functions of the present invention will be clearly presented in the following detailed description of the embodiments with reference to the drawings. In addition, it should be noted that the drawings of the present invention only represent the relative structure and/or positional relationship between components, and are not related to the actual size of each component.

Referring to Figures 1 and 2, an embodiment of the new evaporation deposition machine with a positioning system includes a crucible plate 2, a transmission assembly 3, a first positioning sensing system 4, and a second positioning sensing system 5 , and a control device 6. Among them, Figure 1 illustrates the relative positional relationship of the aforementioned components, but it should be noted that the evaporation machine also includes a reaction chamber 10 for accommodating the crucible tray 2, and a heating chamber 10 for placing the crucible. The heating source (not shown) of the evaporation material of the tray 2, and other detailed components. Among them, the reaction chamber 10, the heating source and other detailed components may have different shapes according to process requirements, and their structural design and component configuration conditions are known in the relevant field, and will not be described in detail here.

The crucible tray 2 has a plurality of receptacles 21 for placing evaporation materials. By rotating the crucible tray 2, one of the receptacles 21 can be driven to align with an electron beam source located on the evaporation machine. In this embodiment, the crucible plate 2 having six receiving grooves 21 with the same size is used as an example for description, but it is not limited to this.

The transmission assembly 3 includes a rotation unit 31 for driving the crucible plate 2 to rotate, and a transmission unit 32 for driving the rotation unit 31 .

The rotation unit 31 has a chassis gear 311 disposed at the bottom of the crucible plate 2 , a first gear 312 in contact with the chassis gear 311 to drive the chassis gear 311 to rotate, and a first gear 312 connected to the chassis gear 311 . The second gear 313 of the shaft. The transmission unit 32 has a motor 321, a transmission shaft 322 connected to the rotating shaft 3211 of the motor 321, a transmission gear 323 disposed at one end of the transmission shaft 322 away from the motor 321 and used to drive the chassis gear 311, and A transmission positioning gear 324 is provided on the transmission shaft 322 . The transmission gear 323 is connected with the second gear 313 of the rotation unit 31 to drive the second gear 313 to rotate. The rotating shaft 3211 of the motor 321 is connected to the transmission shaft 322 through a coupling 325. .

When the motor 321 is started to rotate, the transmission shaft 322 connected to the rotating shaft 3211 of the motor 321 will be driven to rotate synchronously, and sequentially drive the transmission gear 323, the second gear 313, the first gear 312, and the The chassis gear 311 rotates, thereby driving the crucible plate 2 to rotate.

In other embodiments, the rotating unit 31 can also use different forms of gear combinations to replace the first gear 312 and the second gear 313 , without being limited to the above examples and figures, as long as the chassis gear 311 It can be driven by the transmission gear 323. In other embodiments, the transmission gear 323 provided on the transmission shaft 322 can also be in direct contact with the chassis gear 311 without the need to additionally provide the first gear 312 and the second gear 313 .

Referring to FIG. 3 , the first positioning sensing system 4 has a first positioning gear 41 , a first sensing unit 42 , and a first positioning gear 41 disposed on the first positioning gear 41 and rotating coaxially with the first positioning gear 41 . Positioning wheel 43. The first sensing unit 42 has a plurality of first sensors 421 arranged around the first positioning gear 41 for sensing the rotation of the first positioning gear 41 . The first sensing signal measured by the first sensing unit 42 can be used to evaluate the rotation of the transmission shaft 322 and the crucible plate 2 driven by the transmission assembly 3 .

In this embodiment, the number of the first sensors 421 is the same as the number of the receptacles 21 , and the first sensors 421 are disposed correspondingly according to the distribution positions of the receptacles 21 on the crucible plate 2 . The periphery of the positioning gear 41 is taken as an example for explanation. The first sensors 421 are selected from infrared interrupters, and by sensing the positioning wheel 43, they perform positioning detection on the rotation of the first positioning gear 41 that rotates coaxially with the positioning wheel 43.

In detail, when the transmission shaft 322 rotates, the first positioning gear 41 contacts the transmission positioning gear 324 and is driven by the transmission shaft 322 to rotate, thereby driving the positioning wheel 43 to rotate coaxially. As shown in FIG. 3 , the positioning wheel 43 has a notch 431 formed on its periphery adjacent to the first sensors 421 . When the gap 431 of the positioning wheel 43 passes through one of the first sensors 421 (infrared interrupter), the infrared light source emitted by the first sensor 421 will pass through the gap 431 and be located on the other side of the gap. The first sensing signal is received by the receiver on the side. Since the first sensors 421 are arranged corresponding to the positions of the recesses 21 , the first sensing signal can be used to evaluate the relationship between the gap 431 of the positioning wheel 43 and the first sensors 421 . The relative position changes between them are used to obtain the rotation status of the crucible plate 2 and the stop positions of the receptacles 21 after rotation.

The second positioning sensing system 5 has a driven gear 53 that is in contact with the chassis gear 311 and can be driven by the chassis gear 311, a second transmission gear 54 that is connected to the driven gear 53, and a second transmission gear 54 that is connected to the driven gear 53. The transmission gear 54 is in contact with the second positioning gear 55 that can be driven, a positioning turntable 51 provided on the second positioning gear 55 , and a second sensor 52 provided on the side of the positioning turntable 51 . The second sensor 52 is used to detect the rotation of the positioning turntable 51 to obtain a second sensing signal. The driven gear 53 is connected to the second transmission gear 54 via a coupling 56 .

In detail, when the chassis gear 311 rotates to drive the crucible plate 2 to rotate, it will also drive the driven gear 53, the second transmission gear 54, and the second positioning gear 55 to rotate in sequence, and then drive the rotation of the crucible plate 2. The positioning dial 51 on the second positioning gear 55 rotates. Therefore, by using the second sensor 52 to detect the second sensing signal measured by the rotation of the positioning turntable 51, the chassis gear 311 and the crucible plate driven by the chassis gear 311 can be evaluated. 2 rotation situation.

Referring to FIG. 4 , in this embodiment, a plurality of grooves 511 are formed on the side of the positioning turntable 51 and the second sensor 52 is a mechanical switch. The grooves 511 and The number of the receiving grooves 21 is the same, and the receiving grooves 21 are formed on the side of the positioning turntable 51 according to the distribution position of the receiving grooves 21 on the crucible plate 2. The second sensor 52 detects through contact sensing. These grooves 511 are used to obtain the second positioning signal. In detail, six spaced grooves 511 are formed on the side of the positioning turntable 51, and during the rotation of the positioning turntable 51, the second sensor 52 will be turned on when it contacts any groove 511. or off, and generates the second sensing signal each time when switching between on or off.

The control device 6 is connected to the first sensing unit 42 and the second sensor 52 via signals, and is used to compare the first sensing signal and the second sensing signal to obtain a positioning detection result.

In detail, the control device 6 uses the first positioning sensing system 4 and the second positioning sensing system 5 to respectively target the transmission shaft 322 used to rotate the crucible plate 2 and the position positioned by the crucible plate 2 The rotation of the driven positioning turntable 51 is measured to obtain the first sensing signal and the second sensing signal, and the rotation of the crucible plate 2 is calculated and obtained to obtain the groove of the crucible plate 2 21 positioning situation. The positioning detection results are used to compare whether the positioning results measured by two different positioning detection methods are consistent. Therefore, even if some components of the evaporation machine (such as gears or couplings, etc.) are worn, loosened or skipped during the transmission process, the rotation of the crucible plate 2 and/or one of the positioning sensors will be affected. If the detection of the system deviates, the control device 6 can perform double confirmation by comparing the first sensing signal and the second sensing signal, thereby improving the accuracy of the positioning detection of the crucible plate 2 .

In some embodiments, when the control device 6 compares the first sensing signal and the second sensing signal, and the obtained positioning detection results are consistent with each other, the control device 6 will send a stop signal to cause The crucible plate 2 stops running after rotating to a predetermined position; when the control device 6 compares the first sensing signal and the second sensing signal, and the positioning detection results obtained do not match each other, then the control device 6 Device 6 will send out a warning signal.

To sum up, the new evaporation deposition machine with a positioning system of the present invention uses the first positioning sensing system 4 and the second positioning sensing system 5 to sense the rotation of the transmission shaft 322 and the chassis gear 311 respectively. , and evaluate the rotation of the crucible disk 2 using different positioning sensing methods, and then interactively compare the first sensing signal and the second sensing signal through the control device 6 to double confirm the positioning result, and It can improve the accuracy of positioning sensing, so it can indeed achieve the purpose of cost-effectiveness.

However, the above are only examples of the present invention, and should not be used to limit the scope of the present invention. All simple equivalent changes and modifications made based on the patent scope of the present invention and the content of the patent specification are still within the scope of the present invention. Within the scope covered by this new patent.

10: Reaction chamber 2: Crucible plate 21: Container 3: Transmission components 31: Rotating unit 311: Chassis gear 312:First gear 313: Second gear 32: Transmission unit 321: Motor 3211:Shaft 322: Drive shaft 323: Transmission gear 324: Transmission positioning gear 325, 56: Coupling 4: First positioning sensing system 41: First positioning gear 42: First sensing unit 421: First sensor 43: Positioning wheel 431: Gap 5: Second positioning sensing system 51: Positioning turntable 511: Groove 52: Second sensor 53: Passive gear 54:Second transmission gear 55:Second positioning gear 6:Control device

Other features and functions of the present invention will be clearly presented in the embodiments with reference to the drawings, in which: Figure 1 is a schematic diagram illustrating an embodiment of the evaporation machine with a positioning system of the present invention; Figure 2 is a A top view schematic diagram illustrates a crucible plate of the evaporation deposition machine; Figure 3 is a top view schematic diagram illustrating a first positioning gear, a positioning wheel, and a first sensing unit of the evaporation deposition machine; and Figure 4 is A top view schematic diagram illustrating a positioning turntable and a second sensor of the evaporation deposition machine.

10: Reaction chamber

2: Crucible plate

3: Transmission components

31: Rotating unit

311: Chassis gear

312:First gear

313: Second gear

32: Transmission unit

321: Motor

3211:Shaft

322: Drive shaft

323: Transmission gear

324: Transmission positioning gear

325, 56: Coupling

4: First positioning sensing system

41: First positioning gear

42: First sensing unit

421: First sensor

43: Positioning wheel

5: Second positioning sensing system

51: Positioning turntable

511: Groove

52: Second sensor

53: Passive gear

54:Second transmission gear

55:Second positioning gear

6:Control device

Claims (8)

An evaporation machine with a positioning system, including: A crucible plate with multiple containers; A transmission assembly includes a rotation unit for driving the crucible plate to rotate, and a transmission unit for driving the rotation unit. The rotation unit has a chassis gear arranged at the bottom of the crucible plate, and the transmission unit has a motor. , a transmission shaft connected to the rotating shaft of the motor, and a transmission gear arranged at one end of the transmission shaft away from the motor for driving the chassis gear; A first positioning sensing system has a first positioning gear driven to rotate by the transmission shaft, and a first sensing unit arranged on the periphery of the first positioning gear, the first sensing unit is used for sensing The rotation of the first positioning gear is used to obtain a first sensing signal; A second positioning sensing system has a positioning turntable driven by the chassis gear, and a second sensor disposed on the side of the positioning turntable. The second sensor is used to detect the rotation of the positioning turntable. , to obtain a second sensing signal; and A control device is connected to the first sensing unit and the second sensor signal, and is used to compare the first sensing signal and the second sensing signal to obtain a positioning detection result. The evaporation machine with a positioning system as claimed in claim 1, wherein the first sensing unit has a plurality of first sensors, and the number of the first sensors is equal to the number of the containers. The same, and are set correspondingly according to the distribution positions of the grooves on the crucible plate. The evaporation machine with a positioning system as claimed in claim 2, wherein the first sensors are infrared interrupters, and the first positioning sensing system also has a coaxial rotation with the first positioning gear. The positioning wheel has a plurality of notches formed on its periphery. The first sensors sense the notches to evaluate the rotation of the first positioning gear and generate the first sensing signal. The evaporation machine with a positioning system as claimed in claim 1, wherein a plurality of grooves are formed on the side of the positioning turntable, and the second sensor detects the grooves in a contact sensing manner, To obtain the second sensing signal. The evaporation machine with a positioning system as described in claim 4, wherein the number of the grooves is the same as the number of the receptacles, and they are formed in the positioning position corresponding to the distribution positions of the receptacles on the crucible plate. On the side of the turntable, the second sensor is a mechanical switch. When the positioning turntable rotates and contacts one of the grooves, the second sensor will turn on or off and generate the second sensing signal. The evaporation machine with a positioning system as claimed in claim 1, wherein the control device calculates and obtains the rotational positions of the containers based on the first sensing signal and the second sensing signal, and calculates The results are compared. When the positioning detection results obtained from the first sensing signal and the second sensing signal do not match each other, the control device issues a warning signal. The evaporation machine with a positioning system as claimed in claim 1, wherein the rotation unit also has a first gear in contact with the chassis gear and used to drive the chassis gear to rotate, and a first gear connected to the first gear. The second gear of the shaft, the transmission unit also has a transmission positioning gear arranged around the transmission shaft, the transmission positioning gear is in contact with the first positioning gear of the first positioning sensing system, and is used to drive the first positioning gear. Turn. The evaporation machine with a positioning system as claimed in claim 1, wherein the second positioning sensing system also has a driven gear that is in contact with the chassis gear and can be driven by the chassis gear, and a driven gear that is connected to the driven gear. The second transmission gear of the shaft, and a second positioning gear that is in contact with the second transmission gear and can be driven. The second positioning gear is provided at the bottom of the positioning turntable to drive the positioning turntable to rotate.

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