TWM641797U - Valve manifold assembly for specialty gases - Google Patents

Abstract

The sub-valve assembly of the special gas in this creation is provided with an installation frame and a plurality of distribution cabinets. The installation frame has a lock frame and an elevated frame, and the lock frame is provided with a first lock part and a second lock part; The cabinet is provided with an electric control box containing a controller and a valve box adjacent to the electric control box, and the valve box has a valve group pipeline inside; wherein, one of the multiple shunt cabinets is installed on the first locking part to form a The gas valve distribution cabinet, and the other of the plurality of distribution cabinets is installed on the second locking part to form a gas valve distribution cabinet, so that the two distribution cabinets are arranged in a symmetrical state. In this way, the electric control boxes of the two distribution cabinets are concentrated at a convenient height, reducing the hinterland area required for installing most distribution cabinets, and saving the semiconductor factory the cost of building a factory area or expanding production capacity.

Description

Sub-valve assembly for special gases

This creation is about a valve control device that can safely and stably supply gas to semiconductor production equipment, especially a sub-valve assembly that arranges the valve box in a mirror-like manner to improve space utilization.

As the manufacturing of products in the semiconductor field (such as wafers, panels or light-emitting diodes) becomes increasingly complex, the types of process gases used in semiconductor factories are also increasing. Semiconductor manufacturing processes include dry etching, oxidation, ion implantation, thin film deposition, etc. However, all processes require the use of a considerable amount of high-purity gases in order to significantly improve device performance and product yield. Therefore, the safe supply of high-purity Gas will be a priority for semiconductor factories.

However, the gases used in the semiconductor manufacturing process can be simply divided into general bulk gases (Bulk Gases) and some special gases (Specialty Gases). Among them, bulk gases refer to large amounts of gas such as N2, H2, O2, Ar...etc. The gas supply method is mainly to place fixed large tanks around the factory building to form an independent area, and regularly arrange gas supply tank trucks to fill them up, so that the high-pressure liquid gas can be gasified for use in the factory building.

In addition, special gases (Specialty Gases) refer to NH3, SiH4, AsH3, PH3, N2O, etc. The supply method is mainly to fill the special gas into a high-pressure cylinder, and then place the high-pressure cylinder in a gas cylinder storage cabinet , so that the special gas is supplied to a sub-valve box (VMB, Valve Manifold Box) through the gas pipeline, and then enters the point of use (POU, Point Of Use) of the process machine.

Generally, the valve manifold box (Valve Manifold Box, VMB) is connected to a gas input pipeline, a plurality of gas output pipelines and a clean gas input pipeline for the gas output or input of the semiconductor process, and a fixed Valve box support frame. Wherein, the cleaning gas input pipeline is communicated with each gas output pipeline to input the required cleaning gas (such as: nitrogen), and the gas input pipeline is communicated with the multiple gas input pipelines, so that the valve box can be controlled by a single input pipeline At the same time, the process gas is provided to different usage points connected to each gas output pipeline, so as to improve the gas usage efficiency.

However, when planning and designing the process area of a semiconductor factory, it is necessary to consider the relative position and size of the gas preparation storage space and the gas supply room. Therefore, the traditional method is to arrange most sub-valve boxes horizontally in the factory building according to the plan. , This method often results in an increase in the area of the factory building required by the semiconductor factory, and is not conducive to the expansion of production capacity in the future.

The main purpose of this creation is to provide a sub-valve assembly in which the two valve boxes are arranged in a mirror-like manner, so that the operation interface of the distribution cabinet can be concentrated at a convenient height, and the hinterland area required to install most distribution cabinets is reduced. And let the semiconductor factory save the cost of building a factory area or expanding production capacity.

The secondary purpose of this creation is to make way for the upper and lower distribution cabinets with different heights to use the same structure of the box to match the sealing baffle, so that the gas input pipes and gas can be connected in different states between the multiple distribution cabinets. The output pipe, and when the gas pipeline is not needed, the baffle can be reinstalled to the corresponding hole to greatly improve the practicability of the distribution cabinet.

Another purpose of this creation is that both the installation frame and the distribution cabinet are designed with a hook to facilitate hanging and transportation. The installation frame and the distribution cabinet can also be firmly positioned through the hook to avoid shaking and collapse.

In order to achieve the aforementioned purpose, the sub-valve assembly of the special gas in this invention includes: an installation frame and multiple distribution cabinets. A vertical direction is provided with a first locking part and a second locking part; each diverter cabinet is provided with an electric control box containing a controller and a valve box adjacent to the electric control box, and the electric control box has An upper opening and a lower opening, the valve box is provided with a side through hole, an upper through hole, an upper outlet area, a lower through hole and a lower outlet area, and the valve box has a valve group pipeline inside.

Wherein, one of the plurality of distribution cabinets is installed on the first locking part to form a gas valve distribution cabinet, and the other of the plurality of distribution cabinets is installed on the second locking part to form an upper gas valve distribution cabinet. cabinet, so that the upper gas valve diverter cabinet and the lower gas valve diverter cabinet are arranged in a symmetrical mirror state.

The lower opening of the upper gas valve diverter cabinet and the upper opening of the lower gas valve diverter cabinet are all closed by a fixed baffle; The holes are adjacent, and the lower opening of the lower gas distribution cabinet is adjacent to the upper through hole of the lower gas distribution cabinet, so that the electric control box can communicate with the valve box of the same distribution cabinet.

The valve group pipelines inside the upper gas valve diverter cabinet and the lower gas valve diverter cabinet are symmetrically arranged, so that the two valve group pipelines also present the mirror image state.

In addition, the diverter cabinet is provided with a sealing plate, which covers one of the lower opening and the side through hole, so that the upper gas valve diverter cabinet is connected to a first input pipe through the upper opening, and The lower gas valve diverter cabinet is connected to a second input pipe through the side through hole. The installation frame further includes at least one supporting frame, and the at least one supporting frame is connected to one side of the locking frame to fix the second input tube.

The diverter cabinet is provided with a long baffle, and the long baffle covers one of the upper outlet area and the lower outlet area, so that a plurality of output pipes can pass through the other one of the upper outlet area and the lower outlet area. Connect the valve train tubing.

In a feasible embodiment, the diverter cabinet is further provided with a plurality of trachea clamps and an intermediate layer, and the plurality of trachea clamps are arranged in sequence in the other of the upper outlet area and the lower outlet area to respectively clamp the plurality of trachea clamps. Outlet pipe; the profile of the intermediate layer is larger than the profiles of both the upper outlet area and the lower outlet area, and the intermediate layer is clamped between the plurality of trachea clips and the splitter cabinet.

Moreover, the installation frame is further provided with a plurality of frame hooks, and the plurality of frame hooks are respectively connected to the two sides of the top of the lock bracket; at the same time, a top of the upper gas valve diverter cabinet is further provided with a plurality of cabinets hooks, and the plurality of cabinet hooks are distributed on both sides of the valve box.

The feature of this creation is that the installation frame with two locking parts is assembled with the upper gas valve diverter cabinet and the lower gas valve diverter cabinet along a vertical direction, so that the electric control box and valves of the upper and lower gas valve diverter cabinets The cabinets form a mirror arrangement with each other, so that the operation interface of the distribution cabinet can be concentrated at a convenient height position, reducing the hinterland area required to install most distribution cabinets; in addition, all the electric control boxes and valve boxes use the same The design of the opening position enables the single box structure to meet the installation requirements of the upper and lower positions, and the sealing plate is assembled in the unused opening of the cabinet to prevent foreign matter from entering the inside of the shunt cabinet.

1: Special gas distribution assembly

2: Install the frame

20: lock pay frame

201: The first lock point

202: Second lock point

203: The third locking point

204: The fourth locking point

21: Elevator

211: Bearing end face

212: Support end face

22: support frame

23: The first lock payment department

24: The second lock payment department

25:Frame hook

3: The first diversion cabinet

31: The first electric control box

311: Department

312: Operation interface

313: The first upper opening

314: The first opening

315: fixed baffle

32: The first valve box

321: box cover

322: transparent window

323: The first upper through hole

324: The first upper exit area

324a: Upper air outlet

325: The first through hole

326: The first lower exit area

326a: Lower air outlet

327: first side through hole

33: The first valve group pipeline

331: intake valve pipeline

332: Outlet valve pipeline

333: Purge valve pipeline

34: Tracheal clamp

35: Middle laminate

36: lower long baffle

37: sealing plate

38:Cabinet hook

4: Second diverter cabinet

41: Second electric control box

42: Second valve box

423: The second upper through hole

424: The second upper exit area

424a: Upper air outlet

425: The second lower through hole

426: The second lower exit area

426a: Lower air outlet

427: Second side through hole

43: Upper long baffle

44: sealing plate

50: the first input tube

51: The second input tube

60: Upper output tube

61: Lower output tube

70: clean the trachea

71: Clean the trachea

Figure 1 is the front view of the special gas sub-valve assembly of this invention; Figure 2 is the side view of the special gas sub-valve assembly of this invention; Figure 3 is the front view of the installation frame of this invention; Fig. 4 is an exploded view of the special gas sub-valve assembly of this creation; Fig. 5 is a top view of the electric control box of this creation; Fig. 6 is a vertical view of the electric control box of this creation; Fig. 7 is a view of the valve box of this creation Top view; Figure 8 is an exploded view of the top of the valve box in Figure 7; Figure 9 is a bottom view of the valve box in this creation; Figure 10 is an exploded schematic view of the bottom of the valve box in Figure 9; Figure 11 is a top view of the valve box in this creation ; Figure 12 is a bottom view of the valve box under this creation; and Figure 13 is a schematic diagram inside the valve box of this creation.

In order to further have a clear and detailed understanding and understanding of the structure, use and characteristics of this creation, a preferred embodiment is given, and the details are as follows in conjunction with the drawings: The special gas distribution assembly 1 of this creation is mainly Connected between a gas cylinder and a use end, used to transmit a process gas from the inside of the gas cylinder to a process machine such as an etching machine or a deposition machine, wherein the gas cylinder is set on a steel cylinder rack up to store the process gas.

1 and 2, the special gas distribution assembly 1 includes an installation frame 2 and a plurality of distribution cabinets, and each distribution cabinet will be connected to an input pipe and a plurality of output pipes (shown as 10, but not limited thereto) and a clean air pipe (such as: input nitrogen), in a preferred embodiment of the drawing, this special gas distribution assembly 1 has a first distribution cabinet 3 located above and a The second shunt cabinet 4 below the first shunt cabinet 3, wherein the first shunt cabinet 3 is connected with a first input pipe 50, a plurality of upper The output pipe 60 and an upper clean air pipe 70 , and the second distribution cabinet 4 is connected with a second input pipe 51 , a plurality of lower output pipes 61 and a lower clean air pipe 71 .

As shown in FIG. 3 , the installation frame 2 has a lock frame 20 , an elevated frame 21 connected under the lock frame 20 and at least one support frame 22 connected to the side of the lock frame 20 . The lock frame 20 includes a plurality of longitudinal lock bars arranged at intervals and a plurality of horizontal lock bars connected between the plurality of longitudinal lock bars, and the plurality of longitudinal lock bars are spaced from bottom to top along a vertical direction with a first lock point 201, a second locking point 202, a third locking point 203, and a fourth locking point 204, wherein the first locking point 201 and the second locking point 202 at the lower place jointly form a first locking point part 23, and the third locking point 203 and the fourth locking point 204 at the high place jointly form a second locking part 24; and the second locking point 202, the third locking point 203, the fourth locking point The points 204 are all adjacent to one of the plurality of transverse locking rods, but the first locking point 201 is adjacent to the rising frame 21 .

The elevated frame 21 includes a plurality of longitudinal support rods and a plurality of horizontal support rods, a part of the plurality of horizontal support rods is connected to the top ends of the plurality of longitudinal support rods and the plurality of longitudinal locking rods, so as to form a 3, and the remaining parts of the plurality of horizontal support rods are connected to the bottom ends of the longitudinal support rods and the bottom ends of the plurality of longitudinal locking rods to form a support end surface 212 contacting the bottom surface. The at least one support frame 22 is connected between the lock frame 20 and the second input tube 51 , so that the second input tube 51 can be fixed on one side of the lock frame 20 .

In addition, each shunt cabinet is provided with an electric control box and a valve box adjacent to the electric control box, please refer to shown in Figures 3 and 4, a first valve box 32 of the first shunt cabinet 3 is locked on the second The locking part 24, and a first electric control box 31 is arranged below the first valve box 32, so that the first valve box 32 and the first electric control box 31 jointly form an upper gas valve shunt cabinet; the second shunt A second valve box 42 of the cabinet 4 is locked on the first lock part 23, and a second electric control box 41 of the second shunt cabinet 4 is arranged on the first electric control box 31 and the first electric control box 31. Between the second valve box 42, the second valve box 42 and the second electric control box 41 jointly form a lower gas valve diverter cabinet; wherein, the upper gas valve diverter cabinet and the lower gas valve diverter cabinet are arranged in a row Symmetrical mirror state.

5 and 6, the first electric control box 31 has a door 311 and an operation interface 312 (see FIG. 1 ) on the door 311, and the door 311 can be opened to see Circuit wiring inside the first electric control box 31: the top and bottom of the first electric control box 31 are respectively provided with a first upper opening 313 and a first lower opening overlapping the first upper opening 313 below 314, wherein, the first upper opening 313 is to allow the circuit wiring to lead outward from the inside of the first electric control box 31 to the inside of the first valve box 32, and the first lower opening 314 is A fixed baffle 315 is locked to the first electric control box 31 through a plurality of screw joints (not shown).

The structure of the second electric control box 41 is the same as that of the first electric control box 31, so it is not shown in the drawings, but only for the difference, the second upper opening of the second electric control box 41 is The fixed baffle 315 is locked to the second electric control box 41 through a plurality of screw joints, and a second lower opening of the second electric control box 41 communicates with the inside of the second valve box 42 .

7 to 10, the first valve box 32 has a box cover 321 that can be opened or closed and a transparent window 322 on the box cover, allowing users to look directly at the first valve box 322 through the transparent window 322. A first valve group pipeline 33 (referring to Fig. 1) inside valve box 32, and this first valve box 32 is respectively provided with a first upper through hole 323, a first upper outlet area 324, A first lower through hole 325 , a first lower outlet area 326 and a first side through hole 327 (refer to FIG. 4 ).

As shown in Figures 7 and 8, the first upper through hole 323 is used to communicate with the first input pipe 50, and the first upper outlet area 324 has a plurality of upper air outlets 324a to communicate with the plurality of upper output pipes 60, so that The plurality of upper output pipes 60 can be connected to the first valve group pipeline 33, and each upper output pipe 60 can be connected by a plurality of gas The pipe clamps 34 are clamped and positioned together, and an intermediate layer 35 is clamped together by the plurality of air pipe clamps 34 and the first valve box 32 .

As shown in Figures 9 and 10, the first lower through hole 325 is used to communicate with the first upper opening 313 of the first electric control box 31, and the first lower outlet area 326 also has a plurality of lower air outlets 326a , but the plurality of lower air outlets 326a are covered by the lower long baffle plate 36. As shown in FIG. 4 , the first side through hole 327 is covered by a sealing plate 37 , so that the first valve box 32 can only communicate with a gas input source through the first upper through hole 323 .

Moreover, as shown in Figure 3 and Figure 4, in a preferred embodiment of the drawing, the installation frame 2 further includes a plurality of frame hooks 25, and the plurality of frame hooks 25 are respectively connected to the top of the lock frame 20 position on both sides. A top of the first valve box 32 is also provided with a plurality of cabinet hooks 38 , and the plurality of cabinet hooks 38 are distributed in the center of both sides of the first valve box 32 .

11 and 12, the second valve box 42 is respectively provided with a second upper through hole 423 and a second upper outlet area 424 at the same top, bottom and side positions as the first valve box 32. , a second lower through hole 425 , a second lower outlet area 426 and a second side through hole 427 .

The difference between the second valve box 42 and the first valve box 32 is: the second upper through hole 423 is used to communicate with the second lower opening (not shown) of the second electric control box 41, the second The plurality of upper air outlets 424a of the upper outlet area 424 will be covered by an upper long baffle plate 43, the second lower through hole 425 is covered by another sealing plate 44, and the second lower outlet area 426 has a plurality of lower outlets. The air port 426a is used to communicate with the plurality of lower output pipes 61, so that the plurality of lower output pipes 61 can be connected to a second valve group pipeline (not shown) inside the second valve box 42, and the second side through hole 427 is It is used to communicate with the second input pipe 51 (refer to FIG. 4 ).

Please refer to Fig. 13, the first valve group pipeline 33 includes an inlet valve pipeline 331 (left side) and a plurality of outlet valve pipelines 332 (10 groups), and each outlet valve pipeline is connected to a purge valve pipeline 333, wherein the inlet valve pipeline is connected to the first input pipe 50, the plurality of outlet valve pipelines are connected to the upper output pipe 60 one-to-one, and the upper clean air pipe 70 is connected to the plurality of Purge valve line.

The second valve group pipeline is arranged symmetrically with the first valve group pipeline 33 , so that the first valve group pipeline 33 and the second valve group pipeline also present the mirror image state (not shown).

1: Special gas distribution assembly

2: Install the frame

20: lock pay frame

201: The first lock point

202: Second lock point

203: The third locking point

204: The fourth locking point

21: Elevator

211: Bearing end face

212: Support end face

22: support frame

23: The first lock payment department

24: The second lock payment department

25:Frame hook

3: The first diversion cabinet

31: The first electric control box

311: Department

32: The first valve box

321: box cover

327: first side through hole

37: sealing plate

38:Cabinet hook

4: Second diverter cabinet

41: Second electric control box

42: Second valve box

427: Second side through hole

Claims (10)

A sub-valve assembly for special gases, including: An installation frame has a lock frame and an elevated frame connected to the bottom of the lock frame, and the lock frame is provided with a first lock portion and a second lock portion along a vertical direction; Multiple distribution cabinets, each distribution cabinet is provided with an electric control box containing a controller and a valve box adjacent to the electric control box, the electric control box has an upper opening and a lower opening, and the valve box is provided with a side through hole, an upper through hole, an upper outlet area, a lower through hole and a lower outlet area, and the valve box has a valve group pipeline inside; Wherein, one of the plurality of distribution cabinets is installed on the first locking part to form a gas valve distribution cabinet, and the other of the plurality of distribution cabinets is installed on the second locking part to form an upper gas valve distribution cabinet. cabinet, so that the upper gas valve diverter cabinet and the lower gas valve diverter cabinet are arranged in a symmetrical mirror state. The sub-valve assembly for special gas as described in Claim 1, wherein the diverter cabinet is provided with a plurality of sealing plates, and the sealing plates cover one of the upper through hole, the lower through hole, and the side through hole, so that The upper gas valve distribution cabinet is connected to a first input pipe through the upper through hole, and the lower gas valve distribution cabinet is connected to a second input pipe through the side through hole. The sub-valve assembly for special gas as described in claim 2, wherein the lower opening of the upper gas valve diverter cabinet and the upper opening of the lower gas valve diverter cabinet are closed by a fixed baffle; the upper gas valve diverter The upper opening of the cabinet is adjacent to the lower through hole of the upper gas valve diverter cabinet, and the lower opening of the lower gas diverter cabinet is adjacent to the upper through hole of the lower gas diverter cabinet, so that the electric control box can be connected to the same diverter cabinet. The valve boxes communicate with each other. The sub-valve assembly for special gas according to claim 2, wherein the installation frame further includes at least one support frame, and the at least one support frame is connected to one side of the lock frame to fix the second input pipe. The sub-valve assembly for special gas as described in Claim 1, wherein, the diverter cabinet is provided with a long baffle, and the long baffle covers one of the upper outlet area and the lower outlet area, so that the plurality of output pipes can The valve block pipeline is connected through the other of the upper outlet area and the lower outlet area. The sub-valve assembly for special gas as described in claim item 5, wherein the diverter cabinet is further provided with a plurality of trachea clips, and the plurality of trachea clips are arranged in sequence in the other one of the upper outlet area and the lower outlet area to separate Hold the plurality of output tubes. The sub-valve assembly for special gas as described in Claim 6, wherein the diverter cabinet further includes an intermediate layer with a contour larger than the upper outlet area and the lower outlet area, and the intermediate layer is clamped in the plurality of gas pipes clamped between the shunt cabinets. The sub-valve assembly for special gas as described in claim item 1, wherein the valve group pipelines inside the upper gas valve diverter cabinet and the lower gas valve diverter cabinet are arranged symmetrically, so that the two valve group pipelines also present the mirror image shooting state. The sub-valve assembly for special gas as described in Claim 1, wherein the installation frame is further provided with a plurality of frame hooks, and the plurality of frame hooks are respectively connected to the two sides of the top of the lock bracket. The special gas sub-valve assembly as described in claim 1, wherein a top of the upper gas valve diverter cabinet is further provided with a plurality of cabinet hooks, and the plurality of cabinet hooks are distributed on both sides of the valve box side position.

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