TWM632453U - Capsule filter and filtration system for slurry filtration in semiconductor manufacturing process - Google Patents

Abstract

The present invention relates to a capsule filter used for filtration of grinding fluid in a semiconductor manufacturing process, comprising: a casing and a filter element fixed inside the casing, each end of the casing is provided with a joint; the joint includes a joint connected to the end of the casing The difference in thickness of the flanges of each joint between the extension and the flange at the end of the extension is between 1.5 and 2.5 mm; the end face of the flange is provided with an annular groove for installing the sealing ring, and the extension of each joint The inner hollow flow channel and the annular groove are separated by a first annular plane, the width of the sealing ring is 1.04-1.15 times the width of the annular groove, and the thickness is 1.1-1.2 times the depth of the annular groove, On the premise of ensuring reliable sealing between the joint and the groove, it ensures that the sealing ring is firmly stuck in the annular groove, so as to avoid the sealing ring in the process of removing it from the groove by rotating the capsule filter. Due to warping and partial rolling, the connector cannot be unscrewed from the slot. This creation also provides a filtration system consisting of a capsule filter and a clamp.

Description

Capsule Filters and Filtration Systems for Filtration of Grinding Liquids in Semiconductor Processes

This creation relates to the field of filtration technology, in particular to a capsule filter and a filtration system for filtration of grinding fluid in semiconductor manufacturing processes.

Chinese utility model patent CN209612354U discloses a rapidly replaceable filter, which includes a filter unit and a clamp, wherein the filter unit is used for filtration of grinding fluid in the semiconductor manufacturing process. The filter unit includes a casing, a filter element located inside the casing, and an inlet and an outlet at both ends of the casing. The inlet and the outlet have the same structure and are provided with flanges at the ends; the clamp includes a clamp main body, an end block 1 and an end block 2, The first and second end blocks are respectively provided with interfaces communicating with the fluid source and the filtrate container and sockets matching the structure of the inlet and outlet. The sockets include a U-shaped opening on the outside and a card slot on the inside. Wherein, the thicknesses of the flanges at the ends of the two joints are the same, and correspondingly, the groove widths of the clamping grooves of the two end blocks are also the same for sealing and clamping the flanges.

Since the thicknesses of the two flanges are the same, and the groove widths of the two card slots are correspondingly equal, when the filter unit is installed, it is easy to install the filter unit in reverse. Moreover, when the filter unit reaches the maximum service life, the old filter unit needs to be disassembled from the fixture. If it is pulled out quickly and directly, the liquid will splash or spill from the joints at both ends, polluting the environment or harming the human body. Therefore, often by rotating the filter unit, the two flanges are slowly unscrewed from the two grooves, so that the amount of material and liquid spilled can be effectively controlled. When the filter unit is rotated, the flange and the sealing ring installed on its end face slide outward on the inner wall of the groove, due to the unreasonable relative size design of the sealing ring and the groove at the end of the flange or the groove wall of the groove. The sealing ring cannot be clamped tightly. During this process, the sealing ring will be warped and partially rolled up, causing the flange and the partially rolled sealing ring to be stuck in a certain position of the slot and unable to continue to move outward.

Therefore, it is necessary to improve and optimize the relative size of the groove at the flange end of the joint of the sealing ring and the filter unit, and increase the clamping effect of the groove wall of the groove on the sealing ring, so as to avoid the rotation and disassembly of the filter unit. The sealing ring is warped, partially rolled up, and the flange and the sealing ring are stuck in a certain position of the groove.

The purpose of this creation is to provide a new capsule filter for filtration of polishing liquid in semiconductor manufacturing process, which optimizes the relative size relationship between the groove of the flange at the end of the joint and the sealing ring, and increases the groove The clamping effect of the groove wall on the sealing ring avoids the problems that the sealing ring is warped, partially rolled up, and the flange and sealing ring are stuck in the groove of the installation equipment when the capsule filter is rotated and disassembled. Additionally, a filtration system including the capsule filter and a clamp is also provided.

In order to achieve the above purpose, this creation adopts the following technical solutions:

A capsule filter used for filtration of grinding fluid in semiconductor manufacturing process, comprising a casing and a filter element fixed inside the casing, the opposite ends of the casing are respectively provided with a joint; the joint comprises an extension section connected with the end of the casing The flange at the end of the extension section has different thicknesses of the flanges of the joints, and the difference between the two thicknesses is between 1.5 and 2.5 mm; the end face of the flange is provided with an annular recess for installing the sealing ring. a groove, the interior of the extension of each joint is hollow to form a flow channel, the flow channel and the annular groove are separated by a first annular plane, and the width of the sealing ring is 1.04 of the width of the annular groove ~1.15 times, and the thickness is 1.1 ~ 1.2 times the depth of the annular groove.

This creation provides a capsule filter used for filtration of grinding fluid in semiconductor manufacturing process. In the case of a capsule filter, if the directions of the two joints are reversed, they cannot be installed, resulting in a foolproof effect; in addition, the first annular plane passes between the annular groove for installing the sealing ring and the flow channel of the joint. Spaced apart, the first annular plane is directly adjacent to the annular groove and has a certain width, and the first annular plane corresponds to a cylindrical solid portion with a certain width, so that the groove wall of the annular groove close to the flow channel can face the groove. The sealing ring forms a strong radial extrusion effect, which more firmly clamps the sealing ring in the annular groove; more importantly, the width of the sealing ring is 1.04 to 1.15 times the width of the annular groove, and its thickness It is 1.1 to 1.2 times the depth of the annular groove. On the premise of ensuring the reliable sealing between the joint and the groove, ensure that the sealing ring is firmly stuck in the annular groove, and avoid rotating the capsule filter. During the process of removing it from the card slot of the device, the sealing ring is stuck due to warping and partial roll-up, so that the joint cannot be quickly unscrewed from the card slot.

Further, the two end surfaces of the flange and its outer peripheral wall are connected by a transition through a guide surface, the guide surface is a conical surface, and the included angle with the axial direction is 40-50°.

The provision of the guide surface of the above-mentioned form makes the installation and removal of the capsule filter more labor-saving, especially the operation of screwing out the flange from the clamping groove is smoother.

Further, the outer peripheral wall between the guide surfaces of the two end faces of the flange is a cylindrical wall, and the radial width of the cylindrical wall protruding from the outer wall of the extending section is 6-6.4 mm.

The setting of the above-mentioned radial width of the cylindrical wall-shaped outer peripheral wall can ensure that the end of the flange has a sufficient size for setting the annular groove, so that a sealing ring of suitable size can be installed, thereby ensuring the flange and the clamping groove. At the same time, the radial width of the flange protruding from the extension section is as small as possible, which also facilitates the quick unscrewing of the joint.

Further, the guide surface on the end surface of the flange and the annular groove are separated by a second annular plane, and the width of the second annular plane is 1.6-2 mm.

The second annular plane is directly adjacent to the annular groove, and its radial width is 1.6-2 mm, and the second annular plane corresponds to a cylindrical solid portion with a width of 1.6-2 mm, so that the annular groove is close to the guide surface The groove wall can also form a strong enough radial extrusion effect on the sealing ring. That is to say, the inner and outer sides of the sealing ring in the annular groove are subjected to radial extrusion, which can be more firmly stuck in the annular groove. When the capsule filter is rotated and disassembled, the sealing ring will not be warped or Partially rolled up.

Further, the first annular plane is flush with the second annular plane, and the width of the first annular plane is 2.5-3.5 mm.

The two annular planes are flush, and the first annular plane corresponds to a cylindrical solid part with a width of 2.5-3.5 mm, so that the groove wall of the annular groove close to the flow channel can also form a radially strong enough strength for the sealing ring. The extrusion effect, that is, the cylindrical solid parts corresponding to the two annular planes form a radial extrusion effect with sufficient strength on the sealing ring from the inside and the outside, so that the sealing ring is firmly stuck in the annular groove and is rotated and disassembled. When a capsule filter is used, the sealing ring will not warp or partially roll up.

Further, the outer shell includes a cylinder body and a first end cover and a second end cover which are sealedly connected to both ends of the cylinder body, and the joints are respectively provided on the first end cover and the second end cover, and the first end cover It has a protruding portion that protrudes outward and communicates with the corresponding joint, and the interface of the filter element is sealed and installed in the protruding portion.

The first end cap is provided with a protruding portion protruding outward, which communicates with the corresponding joint and is used to seal the interface for installing the filter element. The customer site where one end cap is installed vertically downward, because in this way, there will be no residue of material and liquid inside the capsule filter to avoid waste.

Further, the protruding portion includes a cylindrical segment and an annular plate integrally formed at the end of the cylindrical segment, the joint of the first end cap is integrally formed at the central hole of the annular plate, and serves as a filtrate outlet, the filter element. The interface is installed in the cylindrical section through the sealing ring.

The protruding part firmly seals the interface for installing the filter element through its cylindrical section, and forms a joint outwardly at the central hole of its annular plate, that is, the protruding part is integrally formed on the outside of the joint and the first end cover. Between the surfaces, the overall structure is simple, the overall strength of the first end cap can be maintained, and the manufacturing difficulty of the first end cap is not excessively increased.

Further, the width of the sealing ring is 3.4-3.6 mm, and the thickness is 3.3-3.6 mm.

The sealing ring of this size can provide a large enough sealing area and axial compression, thereby ensuring the sealing assembly between the flange and the externally provided clamping groove; at the same time, before being squeezed by the clamping groove, it is located in the annular groove The volume of the part is also large enough, so that the two groove walls of the annular groove have sufficient radial extrusion effect on both sides of the sealing ring, and when the capsule filter is rotated and disassembled, the sealing ring will not be warped or partially rolled up.

Further, the present invention also provides a filtration system, which includes a clamp and the above-mentioned capsule filter used for filtration of grinding fluid in a semiconductor manufacturing process, the clamp includes a main body and two clamping parts located at both ends of the main body, the The clamping part is used to support the joints at both ends of the capsule filter, and has a fluid channel that can communicate with the two joints.

The invention also provides a filtration system composed of a clamp and a capsule filter, the clamp can fix and support the capsule filter, and connect the capsule filter with an external pipeline, and the user's operation is more convenient.

Further, each of the clamping parts includes an end block provided with the fluid channel and a pipe holder for supporting the joint of the capsule filter, the pipe holder is fixed on the side of the end block facing the opposite end of the main body, and is connected with the end block. A clamping groove for clamping the flange of the joint is formed between the end blocks, and the difference between the widths of the clamping grooves of each clamping portion is between 1.5 mm and 2.5 mm.

The widths of the grooves at both ends of the clamp are different, and the flanges of different thicknesses at the joint end of the capsule filter are matched accordingly, so as to prevent fools when the capsule filter is installed to the clamp and avoid the inlet and outlet of the capsule filter. Anti-loaded.

In the capsule filter for the filtration of polishing liquid in the semiconductor manufacturing process provided by this creation, the thickness of the flanges of the joints at both ends of the shell has a difference of 1.5-2.5 mm, and the two flanges are matched with the corresponding slots, so that the When installing the capsule filter, if the directions of the two joints are reversed, the installation cannot be performed, resulting in a foolproof effect; The planes are separated, the first annular plane is directly adjacent to the annular groove and has a certain width, and the first annular plane corresponds to a cylindrical solid portion with a certain width, so that the groove wall of the annular groove close to the flow channel can be It forms a strong radial extrusion effect on the sealing ring, and firmly clamps the sealing ring in the annular groove; more importantly, the width of the sealing ring is 1.04 to 1.15 times the width of the annular groove, and its The thickness is 1.1 to 1.2 times the depth of the annular groove. On the premise of ensuring reliable sealing between the joint and the card groove, ensure that the sealing ring is firmly stuck in the annular groove to avoid passing through the rotating capsule filter. During the process of removing it from the card slot of the equipment, the sealing ring is stuck due to warping and partial rolling, so that the joint cannot be quickly unscrewed from the card slot.

In order to more clearly understand the above objects, features and advantages of the present creation, the present creation will be further described in detail below in conjunction with the accompanying drawings and specific embodiments. It should be noted that, in the case of no conflict, the embodiments of the present invention and the features in the embodiments may be combined with each other.

In the following description, many specific details are set forth to facilitate a full understanding of the present creation. However, the present creation can also be implemented in other ways different from those described herein. Therefore, the protection scope of the present creation is not limited by the specific details disclosed below. Example limitations.

As shown in FIG. 1 , the first embodiment of the present invention provides a capsule filter 100 used for filtration of grinding fluid in a semiconductor manufacturing process. Connector 14. Wherein, the polishing liquid refers to the suspension used for chemical mechanical polishing in the semiconductor manufacturing process.

The housing 1 includes a cylinder body 13 and a first end cover 11 and a second end cover 12 that are sealedly connected to both ends of the cylinder body 13. The filter element 4 and the first end cover 11 are connected by welding; each joint 14 is respectively provided on the first end cover 11 and the second end cap 12. For example, the joint 14 on the second end cap 12 serves as the inlet of the liquid to be filtrated, and the joint 14 on the first end cap 11 serves as the outlet for the filtrate.

Wherein, each joint 14 includes an extension section 141 connected with the end of the housing 1 and a flange 142 located at the end of the extension section 141 . Moreover, the thicknesses of the flanges 142 of the joint 14 on the first end cover 11 and the joint 14 on the second end cover 12 are different, and the difference between the thicknesses is between 1.5 and 2.5 mm, that is, H1 in FIG. 2 . The difference from H2 in FIG. 3 is 1.5-2.5 mm, for example, H2 may be 1.5-2.5 mm larger than H1. The dimensions of the two flanges 142 are matched with the corresponding installation grooves, so that when the capsule filter 100 is installed, if the directions of the two joints 14 are reversed, the installation cannot be performed, thereby producing a foolproof effect.

In addition, the end face of the flange 142 is provided with an annular groove 143 for installing the sealing ring 2, and the interior of the extending section 141 of each joint 14 is hollow to form a flow channel 144. The flow channel 144 and the annular groove 143 pass through the first An annular plane 145 is separated, that is, the first annular plane 145 is directly adjacent to the annular groove 143 and the sealing ring 2 and has a certain width, and the first annular plane 145 corresponds to a cylindrical entity with a certain width Therefore, the groove wall of the annular groove 143 close to the flow channel 144 can form a stronger radial extrusion effect on the sealing ring 2, and the sealing ring 2 can be more firmly clamped in the annular groove 143.

At the same time, the width of the sealing ring 2 is 1.04-1.15 times the width of the annular groove 143, and the thickness is 1.1-1.2 times the depth of the annular groove 143. The relative size design of the sealing ring 2 and the annular groove 143 is On the premise of ensuring reliable sealing between the joint 14 and the installation groove, ensure that the sealing ring 2 is firmly clamped in the annular groove 143 to avoid the possibility of removing the capsule filter 100 from the groove of the device by rotating it. During the process, the sealing ring 2 is stuck due to warping and partial rolling up, so that the joint 14 cannot be quickly screwed out of the clamping groove.

In the capsule filter 100, by increasing the radial pressing effect of the inner groove wall of the annular groove 143 on the sealing ring 2, and by optimizing the relative size of the sealing ring 2 and the annular groove 143, the combination of the two effects will The sealing ring 2 is firmly clamped in the annular groove 143 to ensure that during the process of unscrewing the capsule filter 100, the sealing ring 2 will not be warped or partially rolled up, and the joint 14 can be quickly rotated out.

In other better embodiments, as shown in FIG. 2 and FIG. 3 , the two end surfaces of the flange 142 and the outer peripheral wall thereof are transitionally connected through a guide surface 146 , and the guide surface 146 is a conical surface, which has an included angle a with the axial direction. It is 40-50°, which makes the installation and disassembly of the capsule filter 100 more labor-saving, especially the operation of screwing out the flange 142 from the clamping groove more smoothly and labor-saving.

More preferably, the outer peripheral wall between the guide surfaces 146 of the two end faces of the flange 142 is a cylindrical wall 147, and the radial width D1 of the cylindrical wall 147 protruding from the outer wall of the extension section 141 is 6-6.4 mm, which can be Make sure that the end of the flange 142 has a sufficient size to set the annular groove 143, so that a suitable size of the sealing ring 2 can be installed, thereby ensuring the sealing between the flange 142 and the groove, and at the same time, the flange 142 is also protruded Because the radial width of the extension section 141 is as small as possible, it is also convenient for the joint 14 to be quickly screwed out.

In another embodiment, as shown in FIGS. 2 and 3 , the guide surface 146 at the end face of the flange 142 and the annular groove 143 are separated by a second annular plane 148 whose The width is 1.6-2 mm, the second annular plane 148 is directly adjacent to the annular groove 143 and corresponds to a cylindrical solid part with a radial width of 1.6-2 mm, so that the annular groove 143 is close to the groove wall of the guide surface 146 A sufficiently strong radial extrusion effect can also be formed on the sealing ring 2 . That is to say, both the inner and outer sides of the sealing ring 2 in the annular groove 143 are subjected to radial compression, so that the sealing ring 2 can be more firmly stuck in the annular groove 143. When the capsule filter 100 is rotated and disassembled, the sealing ring 2 Will not warp or partially curl.

In other better embodiments, the first annular plane 145 and the second annular plane 148 are flush, the corresponding cylindrical solid parts of the two have a balanced pressing effect on the sealing ring 2, and the first annular plane 145 is The width is 2.5-3.5 mm, that is, the first annular plane 145 corresponds to a cylindrical solid part with a width of 2.5-3.5 mm, so that the groove wall of the annular groove 143 close to the flow channel 144 can also form a strong enough strength for the sealing ring 2. Radial extrusion, that is, the corresponding cylindrical solid parts of the two annular planes form a radial extrusion with sufficient strength on the sealing ring 2 from the inside and the outside, so that the sealing ring 2 is firmly stuck in the annular groove 143 Inside, when the capsule filter 100 is rotated and disassembled, the sealing ring 2 will not be warped or partially rolled up.

As shown in FIGS. 4 and 5 , in this embodiment, the width D2 of the sealing ring 2 is 3.4-3.6 mm, and the thickness H3 is 3.3-3.6 mm. The sealing ring 2 of this size can provide a sufficiently large sealing area and axial direction. The amount of compression, thereby ensuring the sealing assembly between the flange 142 and the externally provided clamping groove; at the same time, before being squeezed by the clamping groove, the volume of the part of the sealing ring 2 located in the annular groove 143 is also large enough, so that the annular groove The groove wall of the groove 143 exerts sufficient radial pressing force on both sides of the sealing ring 2, and when the capsule filter 100 is rotated and disassembled, the sealing ring 2 will not be warped or partially rolled up.

As shown in FIG. 6 and FIG. 7 , the second embodiment of the present invention provides a capsule filter 100 used for filtration of polishing liquid in a semiconductor process. The joint 14 communicates with the protruding part 15 , and the interface 41 of the filter element 4 is sealed and installed in the protruding part 15 . The first end cover 11 is provided with a protruding portion 15 protruding outward, which communicates with the corresponding joint 14 and is used to seal the interface 41 for installing the filter element 4, because the part of the interface 41 for installing the filter element 4 is protruding outward. Yes, it is suitable for some customer sites where the first end cap 11 is installed vertically downward, because in this way, no material and liquid residues will appear inside the capsule filter 100 to avoid waste.

More specifically, the protruding portion 15 includes a cylindrical segment 151 and an annular plate 152 integrally formed at the end of the cylindrical segment 151, and the joint 14 of the first end cap 11 is integrally formed at the central hole 153 of the annular plate 152 and serves as a The filtrate outlet is used to discharge the filtrate, and the interface 41 of the filter element 4 is sealed and installed in the cylindrical section 151 through the sealing member 42 . The protruding portion 15 firmly seals the interface 41 for installing the filter element 4 through its cylindrical section 151, and forms a joint 14 at the central hole 153 of its annular plate 152, that is, the protruding portion 15 is integrally formed on the joint 14. Between the first end cap 11 and the outer surface of the first end cap 11, the overall structure is simple, the overall strength of the first end cap 11 can be maintained, and the manufacturing difficulty of the first end cap 11 is not excessively increased.

As shown in FIG. 8 and FIG. 9 , the present invention also provides a filtration system, which includes a fixture 3 and a capsule filter 100 for filtration of polishing liquid in a semiconductor manufacturing process described in the above embodiments (in the figure, the filter element 4 is not shown) , the clamp 3 includes a main body 31 and two clamping parts 32 at both ends of the main body 31 , each clamping part 32 is used to support the joints 14 at both ends of the capsule filter 100 and has a fluid channel 33 that can communicate with the two joints 14 . The fluid passages 33 can be cut or communicated for connecting or disconnecting the capsule filter 100 to external piping. In the filtration system, the clamp 3 can fix and support the capsule filter 100, and connect the capsule filter 100 with the external pipeline, and the operation of the user is more convenient.

Specifically, each clamping portion 32 includes an end block 34 provided with the above-mentioned fluid channel 33 and a tube holder 35 for supporting the joint 14 of the capsule filter 100, and the tube holder 35 has a U-shaped opening for accommodating and supporting Extension 141 of joint 14 . The tube holder 35 is fixed on the side of the end block 34 facing the opposite end of the main body 31 , and a clamping groove 36 for clamping the flange 142 of the joint 14 is formed between the end block 34 and the clamping groove 32 of each clamping part 32 The difference between the widths of 36 is between 1.5 and 2.5 mm, that is, the difference between D3 and D4 in FIG. 9 is 1.5 to 2.5 mm. For example, D3 may be 1.5 to 2.5 mm larger than D4. The widths of the grooves 36 at both ends of the clamp 3 are different, and correspond to the flanges 142 of different thicknesses at the end of the joint 14 of the capsule filter 100, so that when the capsule filter 100 is installed on the clamp 3, a foolproof effect is produced to avoid The inlet and outlet of the capsule filter 100 are reversed.

The preferred embodiments of the present creation have been described in detail above, but it should be understood that after reading the above content of the present creation, those skilled in the art can make various changes or modifications to the present creation. These equivalents also fall within the scope of the claims in this creation.

100: Capsule filter 1: Shell 11: The first end cap 12: Second end cap 13: Cylinder 14: Connector 141: Extension 142: Flange 143: Annular groove 144: runner 145: First annular plane 146: Guide surface 147: Cylindrical Wall 148: Second annular plane 15: Protruding part 151: Cylindrical segment 152: Ring Plate 153: Center hole 2: sealing ring 3: Fixtures 31: Subject 32: Clamping part 33: Fluid channel 34: End Block 35: Tube care 36: Card slot 4: filter element 41: Interface 42: Seals H1, H2, H3: Thickness D1, D2, D3, D4: Width

This creation is further described below in conjunction with the accompanying drawings: 1 is a cross-sectional view of the capsule filter provided by the first embodiment of the present creation; 2 is a cross-sectional view of the first end cap in FIG. 1; 3 is a cross-sectional view of the second end cap in FIG. 1; 4 and 5 are a side view and a cross-sectional view of the sealing ring in FIG. 1, respectively; Figure 6 and Figure 7 are respectively a side view and a cross-sectional view of the capsule filter provided by the second embodiment of the present creation; FIG. 8 is a cross-sectional view of the filtration system (the filter element of the capsule filter is not shown) provided for this creation; and FIG. 9 is a cross-sectional view of the clamp of FIG. 8 .

100: Capsule filter

1: Shell

11: The first end cap

12: Second end cap

13: Cylinder

14: Connector

141: Extension

142: Flange

2: sealing ring

4: filter element

Claims (10)

A capsule filter used for filtration of grinding fluid in a semiconductor manufacturing process, comprising: a casing and a filter element fixed inside the casing, the opposite ends of the casing are respectively provided with a joint, characterized in that: Each of the joints includes: an extension connected to the end of the housing, the extension of each of the joints being hollow inside to form a flow channel; and A flange is located at the end of the extension, and the end face of the flange is provided with an annular groove for installing a sealing ring, Wherein, the thicknesses of the flanges of the joints are different, and the difference between the two thicknesses is between 1.5 mm and 2.5 mm. wherein the flow channel and the annular groove are separated by a first annular plane, and Wherein, the width of the sealing ring is 1.04-1.15 times the width of the annular groove, and the thickness of the sealing ring is 1.1-1.2 times the depth of the annular groove. The capsule filter for filtration of polishing liquid in a semiconductor manufacturing process according to claim 1, wherein the two end surfaces of the flange are connected to the outer peripheral wall by a transitional guide surface, and the guide surface is a conical surface, which The included angle with the axial direction is 40-50°. The capsule filter for filtration of polishing liquid in a semiconductor manufacturing process according to claim 2, wherein the outer peripheral wall between the guide surfaces on both end faces of the flange is a cylindrical wall, and the column The radial width of the shaped wall protruding from the outer wall of the extending section is 6-6.4 mm. The capsule filter for filtration of polishing liquid in semiconductor manufacturing according to claim 2, wherein a second annular plane passes between the guide surface on the end face of the flange and the annular groove spaced apart, the width of the second annular plane is 1.6-2 mm. The capsule filter for filtration of polishing liquid in a semiconductor process according to claim 4, wherein the first annular plane and the second annular plane are flush, and the width of the first annular plane 2.5 to 3.5 mm. The capsule filter for filtration of grinding fluid in a semiconductor manufacturing process according to claim 1, wherein the housing comprises a cylindrical body and a first end cap and a second end sealingly connected to both ends of the cylindrical body a cover, each of the joints is respectively set on the first end cover and the second end cover, the first end cover has a protruding part that protrudes outward and communicates with the corresponding joint, the The interface of the filter element is sealingly mounted in the protruding portion. The capsule filter for filtration of polishing liquid in a semiconductor manufacturing process according to claim 6, wherein the protruding portion comprises a cylindrical segment and an annular plate integrally formed at the end of the cylindrical segment, the The joint of the first end cap is integrally formed at the central hole of the annular plate and serves as a filtrate outlet, and the interface of the filter element is sealed and installed in the cylindrical section through a seal. The capsule filter for filtration of polishing liquid in a semiconductor manufacturing process according to claim 1, wherein the sealing ring has a width of 3.4-3.6 mm and a thickness of 3.3-3.6 mm. A filtration system, comprising a fixture and the capsule filter for filtration of grinding fluid in a semiconductor manufacturing process according to any one of claims 1 to 8, wherein the fixture comprises: a subject; and Two clamping parts are located at both ends of the main body, each of the clamping parts is used to support the joints at both ends of the capsule filter, and has a fluid channel that can communicate with the two joints. The filtering system according to claim 9, wherein each of the clamping parts comprises: an end block provided with the fluid channel; A tube holder for supporting the joint of the capsule filter, the tube holder is fixed on the side of the end block facing the opposite end of the main body, and is formed with the end block for clamping A clamping groove of the flange of the joint, and the difference between the widths of the clamping grooves of the clamping portions is between 1.5 mm and 2.5 mm.

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