TWM632453U - Capsule filter and filtration system for slurry filtration in semiconductor manufacturing process - Google Patents
Capsule filter and filtration system for slurry filtration in semiconductor manufacturing process Download PDFInfo
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- TWM632453U TWM632453U TW111206813U TW111206813U TWM632453U TW M632453 U TWM632453 U TW M632453U TW 111206813 U TW111206813 U TW 111206813U TW 111206813 U TW111206813 U TW 111206813U TW M632453 U TWM632453 U TW M632453U
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- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
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- Y02E—REDUCTION OF GREENHOUSE GAS [GHG] EMISSIONS, RELATED TO ENERGY GENERATION, TRANSMISSION OR DISTRIBUTION
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Abstract
本創作涉及用於半導體製程中研磨液過濾的囊式過濾器,包括:外殼和固定於外殼內部的濾芯,所述外殼的兩端各設有一接頭;所述接頭包括與外殼的端部相連的延伸段和位於延伸段末端的凸緣,各接頭的凸緣的厚度的差值在1.5~2.5 mm之間;凸緣的末端面設有用於安裝密封圈的環形凹槽,各接頭的延伸段內部的中空流道和環形凹槽之間通過第一環形平面隔開,密封圈的寬度為環形凹槽的寬度的1.04~1.15倍,且厚度為環形凹槽的深度的1.1~1.2倍,其在保證接頭與卡槽間的密封性可靠的前提下,確保密封圈牢牢地卡在環形凹槽內,避免在通過旋轉囊式過濾器將其從卡槽內拆卸的過程中,密封圈由於發生翹曲、局部捲起而卡住,導致接頭不能從卡槽內旋出。本創作還提供囊式過濾器和夾具構成的過濾系統。The present invention relates to a capsule filter used for filtration of grinding fluid in a semiconductor manufacturing process, comprising: a casing and a filter element fixed inside the casing, each end of the casing is provided with a joint; the joint includes a joint connected to the end of the casing The difference in thickness of the flanges of each joint between the extension and the flange at the end of the extension is between 1.5 and 2.5 mm; the end face of the flange is provided with an annular groove for installing the sealing ring, and the extension of each joint The inner hollow flow channel and the annular groove are separated by a first annular plane, the width of the sealing ring is 1.04-1.15 times the width of the annular groove, and the thickness is 1.1-1.2 times the depth of the annular groove, On the premise of ensuring reliable sealing between the joint and the groove, it ensures that the sealing ring is firmly stuck in the annular groove, so as to avoid the sealing ring in the process of removing it from the groove by rotating the capsule filter. Due to warping and partial rolling, the connector cannot be unscrewed from the slot. This creation also provides a filtration system consisting of a capsule filter and a clamp.
Description
本創作涉及過濾技術領域,特別是一種用於半導體製程中研磨液過濾的囊式過濾器及過濾系統。This creation relates to the field of filtration technology, in particular to a capsule filter and a filtration system for filtration of grinding fluid in semiconductor manufacturing processes.
中國實用新型專利CN209612354U公開一種可快速更換的過濾器,其包括過濾單元和夾具,其中,該過濾單元用於半導體製程中研磨液過濾。所述過濾單元包括外殼、位於外殼內部的濾芯及外殼兩端的入口和出口,所述入口和出口結構相同,末端均設有凸緣;所述夾具包括夾具主體、端塊一和端塊二,端塊一和端塊二上分別設有與流體源和濾液容器相通的接口及與入口和出口的結構匹配的插口,插口包括位於外側的U形開口和內側的卡槽。其中,兩個接頭末端的凸緣的厚度相同,相應地,兩個端塊的卡槽的槽寬也相等,用於密封卡住凸緣。Chinese utility model patent CN209612354U discloses a rapidly replaceable filter, which includes a filter unit and a clamp, wherein the filter unit is used for filtration of grinding fluid in the semiconductor manufacturing process. The filter unit includes a casing, a filter element located inside the casing, and an inlet and an outlet at both ends of the casing. The inlet and the outlet have the same structure and are provided with flanges at the ends; the clamp includes a clamp main body, an
由於兩個凸緣的厚度相同,兩個卡槽的槽寬也對應相等,安裝過濾單元時,過濾單元容易裝反。並且,當過濾單元達到最大使用壽命時,需要將舊的過濾單元從夾具上拆卸下來,如果快速、直接將其拔出,料液會從兩端的接頭飛濺、灑出,污染環境或者傷害人體。因此,常常通過旋轉過濾單元,慢慢將兩個凸緣從兩個卡槽中旋出,這樣料液的灑出量可得到有效控制。在旋轉過濾單元時,凸緣及安裝於其末端面的密封圈在卡槽的內壁向外滑移,由於密封圈和凸緣末端的凹槽的相對尺寸設計不合理或者凹槽的槽壁不能卡緊密封圈,該過程中會出現密封圈翹曲、局部捲起的現象,導致凸緣和局部捲起的密封圈卡在卡槽的某一位置,無法繼續向外移動。Since the thicknesses of the two flanges are the same, and the groove widths of the two card slots are correspondingly equal, when the filter unit is installed, it is easy to install the filter unit in reverse. Moreover, when the filter unit reaches the maximum service life, the old filter unit needs to be disassembled from the fixture. If it is pulled out quickly and directly, the liquid will splash or spill from the joints at both ends, polluting the environment or harming the human body. Therefore, often by rotating the filter unit, the two flanges are slowly unscrewed from the two grooves, so that the amount of material and liquid spilled can be effectively controlled. When the filter unit is rotated, the flange and the sealing ring installed on its end face slide outward on the inner wall of the groove, due to the unreasonable relative size design of the sealing ring and the groove at the end of the flange or the groove wall of the groove. The sealing ring cannot be clamped tightly. During this process, the sealing ring will be warped and partially rolled up, causing the flange and the partially rolled sealing ring to be stuck in a certain position of the slot and unable to continue to move outward.
因此,需要對密封圈和過濾單元的接頭的凸緣末端的凹槽的相對尺寸作改良、優化,並增大凹槽的槽壁對密封圈的卡緊作用,避免在旋轉拆卸過濾單元時,密封圈發生翹曲、局部捲起及凸緣和密封圈卡在卡槽的某一位置的問題。Therefore, it is necessary to improve and optimize the relative size of the groove at the flange end of the joint of the sealing ring and the filter unit, and increase the clamping effect of the groove wall of the groove on the sealing ring, so as to avoid the rotation and disassembly of the filter unit. The sealing ring is warped, partially rolled up, and the flange and the sealing ring are stuck in a certain position of the groove.
本創作所要達到的目的是提供一種新的用於半導體製程中研磨液過濾的囊式過濾器,其通過優化位於接頭末端的凸緣的凹槽和密封圈的相對尺寸關係,並增大凹槽的槽壁對密封圈的卡緊作用,避免旋轉拆卸囊式過濾器時,密封圈發生翹曲、局部捲起及凸緣和密封圈卡在安裝設備的卡槽中的問題。另外,還提供一種包括該囊式過濾器和夾具的過濾系統。The purpose of this creation is to provide a new capsule filter for filtration of polishing liquid in semiconductor manufacturing process, which optimizes the relative size relationship between the groove of the flange at the end of the joint and the sealing ring, and increases the groove The clamping effect of the groove wall on the sealing ring avoids the problems that the sealing ring is warped, partially rolled up, and the flange and sealing ring are stuck in the groove of the installation equipment when the capsule filter is rotated and disassembled. Additionally, a filtration system including the capsule filter and a clamp is also provided.
為了達到上述目的,本創作採用如下技術方案:In order to achieve the above purpose, this creation adopts the following technical solutions:
一種用於半導體製程中研磨液過濾的囊式過濾器,包括外殼和固定於外殼內部的濾芯,所述外殼相對的兩端各設有一接頭;所述接頭包括與外殼的端部相連的延伸段和位於延伸段末端的凸緣,各所述接頭的凸緣的厚度不同,二者厚度的差值在1.5~2.5 mm之間;所述凸緣的末端面設有用於安裝密封圈的環形凹槽,各所述接頭的延伸段內部中空,以形成流道,所述流道和環形凹槽之間通過第一環形平面隔開,所述密封圈的寬度為環形凹槽的寬度的1.04~1.15倍,且厚度為環形凹槽的深度的1.1~1.2倍。A capsule filter used for filtration of grinding fluid in semiconductor manufacturing process, comprising a casing and a filter element fixed inside the casing, the opposite ends of the casing are respectively provided with a joint; the joint comprises an extension section connected with the end of the casing The flange at the end of the extension section has different thicknesses of the flanges of the joints, and the difference between the two thicknesses is between 1.5 and 2.5 mm; the end face of the flange is provided with an annular recess for installing the sealing ring. a groove, the interior of the extension of each joint is hollow to form a flow channel, the flow channel and the annular groove are separated by a first annular plane, and the width of the sealing ring is 1.04 of the width of the annular groove ~1.15 times, and the thickness is 1.1 ~ 1.2 times the depth of the annular groove.
本創作提供一種用於半導體製程中研磨液過濾的囊式過濾器,其外殼兩端的接頭的凸緣的厚度具有1.5~2.5 mm差值,兩個凸緣與對應的卡槽匹配,從而在安裝囊式過濾器時,如果兩個接頭的方向反了,則無法安裝,從而產生防呆的作用;另外,用於安裝密封圈的環形凹槽和接頭的流道之間通過第一環形平面隔開,第一環形平面與環形凹槽直接相鄰、並具有一定的寬度,該第一環形平面對應具有一定寬度的柱形實體部分,從而環形凹槽靠近流道的槽壁能夠對密封圈形成強度較大的徑向擠壓作用,更牢固地將密封圈卡在環形凹槽內;更重要的是,密封圈的寬度為環形凹槽的寬度的1.04~1.15倍,且其厚度為環形凹槽的深度的1.1~1.2倍,其在保證接頭與卡槽間的密封性可靠的前提下,確保密封圈牢牢地卡在環形凹槽內,避免在通過旋轉囊式過濾器將其從設備的卡槽內拆卸的過程中,密封圈由於發生翹曲、局部捲起而卡住,導致接頭不能快速從卡槽內旋出。This creation provides a capsule filter used for filtration of grinding fluid in semiconductor manufacturing process. In the case of a capsule filter, if the directions of the two joints are reversed, they cannot be installed, resulting in a foolproof effect; in addition, the first annular plane passes between the annular groove for installing the sealing ring and the flow channel of the joint. Spaced apart, the first annular plane is directly adjacent to the annular groove and has a certain width, and the first annular plane corresponds to a cylindrical solid portion with a certain width, so that the groove wall of the annular groove close to the flow channel can face the groove. The sealing ring forms a strong radial extrusion effect, which more firmly clamps the sealing ring in the annular groove; more importantly, the width of the sealing ring is 1.04 to 1.15 times the width of the annular groove, and its thickness It is 1.1 to 1.2 times the depth of the annular groove. On the premise of ensuring the reliable sealing between the joint and the groove, ensure that the sealing ring is firmly stuck in the annular groove, and avoid rotating the capsule filter. During the process of removing it from the card slot of the device, the sealing ring is stuck due to warping and partial roll-up, so that the joint cannot be quickly unscrewed from the card slot.
進一步地,所述凸緣的兩端面與其外周壁通過導向面過渡相連,所述導向面為錐形面,其與軸向的夾角為40~50°。Further, the two end surfaces of the flange and its outer peripheral wall are connected by a transition through a guide surface, the guide surface is a conical surface, and the included angle with the axial direction is 40-50°.
上述形式的導向面的設置,使得囊式過濾器的安裝和拆卸更省力,尤其是凸緣從卡槽內旋出的操作更順暢。The provision of the guide surface of the above-mentioned form makes the installation and removal of the capsule filter more labor-saving, especially the operation of screwing out the flange from the clamping groove is smoother.
進一步地,所述凸緣的兩端面的導向面之間的外周壁為柱形壁,所述柱形壁突出於延伸段的外壁的徑向寬度為6~6.4 mm。Further, the outer peripheral wall between the guide surfaces of the two end faces of the flange is a cylindrical wall, and the radial width of the cylindrical wall protruding from the outer wall of the extending section is 6-6.4 mm.
所述柱形壁狀的外周壁的上述徑向寬度的設置,可確保凸緣的末端具有足夠的尺寸用來設置環形凹槽,以便能夠安裝合適尺寸的密封圈,進而保證凸緣和卡槽之間的密封,同時,也使得凸緣凸出於延伸段的徑向寬度盡可能的小,也便於接頭快速旋出。The setting of the above-mentioned radial width of the cylindrical wall-shaped outer peripheral wall can ensure that the end of the flange has a sufficient size for setting the annular groove, so that a sealing ring of suitable size can be installed, thereby ensuring the flange and the clamping groove. At the same time, the radial width of the flange protruding from the extension section is as small as possible, which also facilitates the quick unscrewing of the joint.
進一步地,位於所述凸緣的末端面的導向面和環形凹槽之間通過第二環形平面隔開,所述第二環形平面的寬度為1.6~2 mm。Further, the guide surface on the end surface of the flange and the annular groove are separated by a second annular plane, and the width of the second annular plane is 1.6-2 mm.
所述第二環形平面與環形凹槽直接相鄰、且其徑向寬度為1.6~2 mm,該第二環形平面對應寬度為1.6~2 mm的柱形實體部分,從而環形凹槽靠近導向面的槽壁也能夠對密封圈形成強度足夠大的徑向擠壓作用。也就是說,環形凹槽內的密封圈的內側和外側均受到徑向擠壓作用,能夠更牢固地卡在環形凹槽內,旋轉拆卸囊式過濾器時,密封圈不會發生翹曲或局部捲起。The second annular plane is directly adjacent to the annular groove, and its radial width is 1.6-2 mm, and the second annular plane corresponds to a cylindrical solid portion with a width of 1.6-2 mm, so that the annular groove is close to the guide surface The groove wall can also form a strong enough radial extrusion effect on the sealing ring. That is to say, the inner and outer sides of the sealing ring in the annular groove are subjected to radial extrusion, which can be more firmly stuck in the annular groove. When the capsule filter is rotated and disassembled, the sealing ring will not be warped or Partially rolled up.
進一步地,所述第一環形平面和第二環形平面齊平,且所述第一環形平面的寬度為2.5~3.5 mm。Further, the first annular plane is flush with the second annular plane, and the width of the first annular plane is 2.5-3.5 mm.
所述兩個環形平面齊平,且第一環形平面對應寬度為2.5~3.5 mm的柱形實體部分,從而環形凹槽靠近流道的槽壁也能夠對密封圈形成強度足夠大的徑向擠壓作用,亦即兩個環形平面各自對應的柱形實體部分分別從內側和外側對密封圈形成強度足夠大的徑向擠壓作用,使得密封圈牢牢卡在環形凹槽內,旋轉拆卸囊式過濾器時,密封圈不會發生翹曲或局部捲起。The two annular planes are flush, and the first annular plane corresponds to a cylindrical solid part with a width of 2.5-3.5 mm, so that the groove wall of the annular groove close to the flow channel can also form a radially strong enough strength for the sealing ring. The extrusion effect, that is, the cylindrical solid parts corresponding to the two annular planes form a radial extrusion effect with sufficient strength on the sealing ring from the inside and the outside, so that the sealing ring is firmly stuck in the annular groove and is rotated and disassembled. When a capsule filter is used, the sealing ring will not warp or partially roll up.
進一步地,所述外殼包括筒體和密封連接於筒體兩端的第一端蓋和第二端蓋,各所述接頭分別設於第一端蓋和第二端蓋,所述第一端蓋具有向外凸出且與對應的接頭連通的凸出部分,所述濾芯的接口密封安裝於凸出部分內。Further, the outer shell includes a cylinder body and a first end cover and a second end cover which are sealedly connected to both ends of the cylinder body, and the joints are respectively provided on the first end cover and the second end cover, and the first end cover It has a protruding portion that protrudes outward and communicates with the corresponding joint, and the interface of the filter element is sealed and installed in the protruding portion.
第一端蓋設置向外突出的凸出部分,其與相應的接頭連通,用於密封安裝濾芯的接口,由於該用於安裝濾芯的接口的部分是向外凸出的,其適合一些將第一端蓋豎直朝下安裝的客戶現場,因為這樣,囊式過濾器內部不會出現料液殘留,避免造成浪費。The first end cap is provided with a protruding portion protruding outward, which communicates with the corresponding joint and is used to seal the interface for installing the filter element. The customer site where one end cap is installed vertically downward, because in this way, there will be no residue of material and liquid inside the capsule filter to avoid waste.
進一步地,所述凸出部分包括柱形段和一體形成於柱形段末端的環形板,所述第一端蓋的接頭一體形成於環形板的中心孔處、並作為濾液出口,所述濾芯的接口通過密封圈密封安裝於柱形段內。Further, the protruding portion includes a cylindrical segment and an annular plate integrally formed at the end of the cylindrical segment, the joint of the first end cap is integrally formed at the central hole of the annular plate, and serves as a filtrate outlet, the filter element. The interface is installed in the cylindrical section through the sealing ring.
所述凸出部分通過其柱形段牢牢地密封安裝濾芯的接口,並於其環形板的中心孔處一體向外形成接頭,亦即凸出部分一體形成於接頭和第一端蓋的外表面之間,整體結構簡單,也能維持第一端蓋的整體強度,也不會過度加大第一端蓋的製造難度。The protruding part firmly seals the interface for installing the filter element through its cylindrical section, and forms a joint outwardly at the central hole of its annular plate, that is, the protruding part is integrally formed on the outside of the joint and the first end cover. Between the surfaces, the overall structure is simple, the overall strength of the first end cap can be maintained, and the manufacturing difficulty of the first end cap is not excessively increased.
進一步地,所述密封圈的寬度為3.4~3.6 mm,厚度為3.3~3.6 mm。Further, the width of the sealing ring is 3.4-3.6 mm, and the thickness is 3.3-3.6 mm.
該尺寸的密封圈可提供足夠大的密封面積和軸向壓縮量,進而保證凸緣與外部設置的卡槽之間的密封裝配;同時,在被卡槽擠壓前,其位於環形凹槽內的部分的體積也足夠大,從而環形凹槽的兩槽壁對密封圈兩側產生的徑向擠壓作用充分,旋轉拆卸囊式過濾器時,密封圈不會發生翹曲或局部捲起。The sealing ring of this size can provide a large enough sealing area and axial compression, thereby ensuring the sealing assembly between the flange and the externally provided clamping groove; at the same time, before being squeezed by the clamping groove, it is located in the annular groove The volume of the part is also large enough, so that the two groove walls of the annular groove have sufficient radial extrusion effect on both sides of the sealing ring, and when the capsule filter is rotated and disassembled, the sealing ring will not be warped or partially rolled up.
進一步的,本創作還提供一種過濾系統,其包括夾具以及以上所述用於半導體製程中研磨液過濾的囊式過濾器,所述夾具包括主體和位於主體兩端的兩個夾持部,所述夾持部用於支撐囊式過濾器兩端的接頭,並具有可與兩接頭連通的流體通道。Further, the present invention also provides a filtration system, which includes a clamp and the above-mentioned capsule filter used for filtration of grinding fluid in a semiconductor manufacturing process, the clamp includes a main body and two clamping parts located at both ends of the main body, the The clamping part is used to support the joints at both ends of the capsule filter, and has a fluid channel that can communicate with the two joints.
本創作還提供由夾具和囊式過濾器一起構成的過濾系統,夾具對囊式過濾器產生固定和支撐作用,並將囊式過濾器與外部管路連接,且使用者的操作更便捷。The invention also provides a filtration system composed of a clamp and a capsule filter, the clamp can fix and support the capsule filter, and connect the capsule filter with an external pipeline, and the user's operation is more convenient.
進一步地,各所述夾持部包括設有所述流體通道的端塊和用於支撐囊式過濾器的接頭的管托,所述管托固定於端塊朝向主體相對端的一側,並與端塊之間形成用於卡住接頭的的凸緣的卡槽,且各夾持部的卡槽的寬度的差值在1.5~2.5 mm之間。Further, each of the clamping parts includes an end block provided with the fluid channel and a pipe holder for supporting the joint of the capsule filter, the pipe holder is fixed on the side of the end block facing the opposite end of the main body, and is connected with the end block. A clamping groove for clamping the flange of the joint is formed between the end blocks, and the difference between the widths of the clamping grooves of each clamping portion is between 1.5 mm and 2.5 mm.
夾具兩端的卡槽的寬度不同,並對應匹配囊式過濾器的接頭末端不同厚度的凸緣,從而在將囊式過濾器安裝至夾具時產生防呆作用,避免囊式過濾器的進口和出口裝反。The widths of the grooves at both ends of the clamp are different, and the flanges of different thicknesses at the joint end of the capsule filter are matched accordingly, so as to prevent fools when the capsule filter is installed to the clamp and avoid the inlet and outlet of the capsule filter. Anti-loaded.
本創作提供的用於半導體製程中研磨液過濾的囊式過濾器中,其外殼兩端的接頭的凸緣的厚度具有1.5~2.5 mm差值,兩個凸緣與對應的卡槽匹配,從而在安裝囊式過濾器時,如果兩個接頭的方向反了,則無法安裝,從而產生防呆的作用;另外,用於安裝密封圈的環形凹槽和接頭的流道之間通過第一環形平面隔開,第一環形平面與環形凹槽直接相鄰、並具有一定的寬度,該第一環形平面對應具有一定寬度的柱形實體部分,從而環形凹槽靠近流道的槽壁能夠對密封圈形成強度較大的徑向擠壓作用,更牢固地將密封圈卡在環形凹槽內;更重要的是,密封圈的寬度為環形凹槽的寬度的1.04~1.15倍,且其厚度為環形凹槽的深度的1.1~1.2倍,其在保證接頭與卡槽間的密封性可靠的前提下,確保密封圈牢牢地卡在環形凹槽內,避免在通過旋轉囊式過濾器將其從設備的卡槽內拆卸的過程中,密封圈由於發生翹曲、局部捲起而卡住,導致接頭不能快速從卡槽內旋出。In the capsule filter for the filtration of polishing liquid in the semiconductor manufacturing process provided by this creation, the thickness of the flanges of the joints at both ends of the shell has a difference of 1.5-2.5 mm, and the two flanges are matched with the corresponding slots, so that the When installing the capsule filter, if the directions of the two joints are reversed, the installation cannot be performed, resulting in a foolproof effect; The planes are separated, the first annular plane is directly adjacent to the annular groove and has a certain width, and the first annular plane corresponds to a cylindrical solid portion with a certain width, so that the groove wall of the annular groove close to the flow channel can be It forms a strong radial extrusion effect on the sealing ring, and firmly clamps the sealing ring in the annular groove; more importantly, the width of the sealing ring is 1.04 to 1.15 times the width of the annular groove, and its The thickness is 1.1 to 1.2 times the depth of the annular groove. On the premise of ensuring reliable sealing between the joint and the card groove, ensure that the sealing ring is firmly stuck in the annular groove to avoid passing through the rotating capsule filter. During the process of removing it from the card slot of the equipment, the sealing ring is stuck due to warping and partial rolling, so that the joint cannot be quickly unscrewed from the card slot.
為了能夠更清楚地理解本創作的上述目的、特徵和優點,以下結合附圖和具體實施方式對本創作進行進一步的詳細描述。需要說明的是,在不衝突的情況下,本創作的實施例及實施例中的特徵可以相互組合。In order to more clearly understand the above objects, features and advantages of the present creation, the present creation will be further described in detail below in conjunction with the accompanying drawings and specific embodiments. It should be noted that, in the case of no conflict, the embodiments of the present invention and the features in the embodiments may be combined with each other.
在以下的描述中闡述了很多具體細節以便於充分理解本創作,但是,本創作還可以採用其他不同於在此描述的其他方式來實施,因此,本創作的保護範圍並不受以下公開的具體實施例的限制。In the following description, many specific details are set forth to facilitate a full understanding of the present creation. However, the present creation can also be implemented in other ways different from those described herein. Therefore, the protection scope of the present creation is not limited by the specific details disclosed below. Example limitations.
如圖1所示為本創作實施例一提供用於半導體製程中研磨液過濾的囊式過濾器100,其包括外殼1和固定於外殼1內部的濾芯4,外殼1相對的兩端各設有一接頭14。其中,所述的研磨液指的是半導體製程中,用於化學機械研磨的懸浮液。As shown in FIG. 1 , the first embodiment of the present invention provides a
外殼1包括筒體13和密封連接於筒體13兩端的第一端蓋11和第二端蓋12,濾芯4與第一端蓋11通過焊接連接;各接頭14分別設於第一端蓋11和第二端蓋12。例如,第二端蓋12上的接頭14作為待過濾液入口,第一端蓋11上的接頭14作為濾液出口。The
其中,各接頭14均包括與外殼1的端部相連的延伸段141和位於延伸段141末端的凸緣142。並且,第一端蓋11上的接頭14和第二端蓋12上的接頭14的凸緣142的厚度不同,二者厚度的差值在1.5~2.5 mm之間,亦即圖2中的H1和圖3中的H2的差值為1.5~2.5 mm,例如可以是H2比H1大1.5~2.5 mm。兩個凸緣142與對應的安裝卡槽尺寸匹配,從而在安裝囊式過濾器100時,如果兩個接頭14的方向反了,則無法安裝,從而產生防呆的作用。Wherein, each joint 14 includes an
並且,凸緣142的末端面設有用於安裝密封圈2的環形凹槽143,各接頭14的延伸段141內部中空,以形成流道144,該流道144和環形凹槽143之間通過第一環形平面145隔開,亦即第一環形平面145與環形凹槽143及密封圈2直接相鄰、並具有一定的寬度,該第一環形平面145對應具有一定寬度的柱形實體部分,從而環形凹槽143靠近流道144的槽壁能夠對密封圈2形成強度較大的徑向擠壓作用,更牢固地將密封圈2卡在環形凹槽143內。In addition, the end face of the
同時,密封圈2的寬度為環形凹槽143的寬度的1.04~1.15倍,且厚度為環形凹槽143的深度的1.1~1.2倍,上述密封圈2和環形凹槽143的相對尺寸設計,在保證接頭14與安裝卡槽間的密封性可靠的前提下,確保密封圈2牢牢地卡在環形凹槽143內,避免在通過旋轉囊式過濾器100將其從設備的卡槽內拆卸的過程中,密封圈2由於發生翹曲、局部捲起而卡住,導致接頭14不能快速從卡槽內旋出。At the same time, the width of the sealing
該囊式過濾器100中,通過增大環形凹槽143的內側槽壁對密封圈2的徑向擠壓作用,及通過優化密封圈2和環形凹槽143的相對尺寸,兩方面作用結合將密封圈2牢牢卡在環形凹槽143內,以保證在旋出囊式過濾器100的過程中,密封圈2不會發生翹曲或局部捲起,接頭14可快速旋出。In the
在其他更好的實施例中,如圖2和圖3所示,凸緣142的兩端面與其外周壁通過導向面146過渡相連,該導向面146為錐形面,其與軸向的夾角a為40~50°,其使得囊式過濾器100的安裝和拆卸更省力,尤其是凸緣142從卡槽內旋出的操作更順暢、更省力。In other better embodiments, as shown in FIG. 2 and FIG. 3 , the two end surfaces of the
更優地,凸緣142的兩端面的導向面146之間的外周壁為柱形壁147,該柱形壁147突出於延伸段141的外壁的徑向寬度D1為6~6.4 mm,其可確保凸緣142的末端具有足夠的尺寸用來設置環形凹槽143,以便能夠安裝合適尺寸的密封圈2,進而保證凸緣142和卡槽之間的密封,同時,也使得凸緣142凸出於延伸段141的徑向寬度盡可能的小,也便於接頭14快速旋出。More preferably, the outer peripheral wall between the guide surfaces 146 of the two end faces of the
在另外的實施例中,如圖2和圖3所示,位於凸緣142的末端面的導向面146和環形凹槽143之間通過第二環形平面148隔開,該第二環形平面148的寬度為1.6~2 mm,該第二環形平面148與環形凹槽143直接相鄰、並對應徑向寬度為1.6~2 mm的柱形實體部分,從而環形凹槽143靠近導向面146的槽壁也能夠對密封圈2形成強度足夠大的徑向擠壓作用。也就是說,環形凹槽143內的密封圈2的內側和外側均受到徑向擠壓作用,從而能夠更牢固地卡在環形凹槽143內,旋轉拆卸囊式過濾器100時,密封圈2不會翹曲或局部捲起。In another embodiment, as shown in FIGS. 2 and 3 , the
在其他更好的實施例中,第一環形平面145和第二環形平面148齊平,二者對應的柱形實體部分對密封圈2的擠壓作用均衡,且第一環形平面145的寬度為2.5~3.5 mm,即第一環形平面145對應寬度為2.5~3.5 mm的柱形實體部分,從而環形凹槽143靠近流道144的槽壁也能夠對密封圈2形成強度足夠大的徑向擠壓作用,即兩個環形平面各自對應的柱形實體部分分別從內側和外側對密封圈2形成強度足夠大的徑向擠壓作用,使得密封圈2牢牢卡在環形凹槽143內,旋轉拆卸囊式過濾器100時,密封圈2不會翹曲或局部捲起。In other better embodiments, the first
如圖4和圖5所示,本實施例中,密封圈2的寬度D2為3.4~3.6 mm,厚度H3為3.3~3.6 mm,該尺寸的密封圈2可提供足夠大的密封面積和軸向壓縮量,進而保證凸緣142與外部設置的卡槽之間的密封裝配;同時,在被卡槽擠壓前,密封圈2位於環形凹槽143內的部分的體積也足夠大,從而環形凹槽143的槽壁對密封圈2兩側產生的徑向擠壓作用力充分,旋轉拆卸囊式過濾器100時,密封圈2不會翹曲或局部捲起。As shown in FIGS. 4 and 5 , in this embodiment, the width D2 of the sealing
如圖6和圖7所示為本創作實施例二提供用於半導體製程中研磨液過濾的囊式過濾器100,該囊式過濾器100的第一端蓋11具有向外凸出且與對應的接頭14連通的凸出部分15,濾芯4的接口41密封安裝於凸出部分15內。第一端蓋11設置向外突出的凸出部分15,其與相應的接頭14連通,用於密封安裝濾芯4的接口41,由於該用於安裝濾芯4的接口41的部分是向外凸出的,其適合一些將第一端蓋11豎直朝下安裝的客戶現場,因為這樣,囊式過濾器100內部不會出現料液殘留,避免造成浪費。As shown in FIG. 6 and FIG. 7 , the second embodiment of the present invention provides a
更具體地,該凸出部分15包括柱形段151和一體形成於柱形段151末端的環形板152,第一端蓋11的接頭14一體形成於環形板152的中心孔153處、並作為濾液出口,用於排出濾液,濾芯4的接口41通過密封件42密封安裝於柱形段151內。凸出部分15通過其柱形段151牢牢地密封安裝濾芯4的接口41,並於其環形板152的中心孔153處一體向外形成接頭14,亦即凸出部分15一體形成於接頭14和第一端蓋11的外表面之間,整體結構簡單,也能維持第一端蓋11的整體強度,也不會過度加大第一端蓋11的製造難度。More specifically, the protruding
如圖8和圖9所示,本創作還提供一種過濾系統,其包括夾具3和以上實施例所述用於半導體製程中研磨液過濾的囊式過濾器100(圖中,濾芯4未顯示),該夾具3包括主體31和位於主體31兩端的兩個夾持部32,各夾持部32用於支撐囊式過濾器100兩端的接頭14,並具有可與兩接頭14連通的流體通道33。流體通道33可切斷或連通,用於將囊式過濾器100與外部管路連通或斷開。該過濾系統中,夾具3對囊式過濾器100產生固定和支撐作用,並將囊式過濾器100與外部管路連接,且使用者的操作更便捷。As shown in FIG. 8 and FIG. 9 , the present invention also provides a filtration system, which includes a
具體地,各夾持部32包括設有上述流體通道33的端塊34和用於支撐囊式過濾器100的接頭14的管托35,管托35具有U型開口,用於容納和托住接頭14的延伸段141。該管托35固定於端塊34朝向主體31相對端的一側,並與端塊34之間形成用於卡住接頭14的的凸緣142的卡槽36,且各夾持部32的卡槽36的寬度的差值在1.5~2.5 mm之間,亦即圖9中的D3與D4的差值為1.5~2.5 mm。例如,可以是D3比D4大1.5~2.5 mm。夾具3兩端的卡槽36的寬度不同,並對應匹配囊式過濾器100的接頭14末端不同厚度的凸緣142,從而在將囊式過濾器100安裝至夾具3時,產生防呆作用,避免囊式過濾器100的進口和出口裝反。Specifically, each clamping
以上已詳細描述了本創作的較佳實施例,但應理解,在閱讀了本創作的上述內容之後,本領域技術人員可以對本創作作各種改變或修改。這些等效形式同樣落於本創作之請求項所界定的範圍。The preferred embodiments of the present creation have been described in detail above, but it should be understood that after reading the above content of the present creation, those skilled in the art can make various changes or modifications to the present creation. These equivalents also fall within the scope of the claims in this creation.
100:囊式過濾器 1:外殼 11:第一端蓋 12:第二端蓋 13:筒體 14:接頭 141:延伸段 142:凸緣 143:環形凹槽 144:流道 145:第一環形平面 146:導向面 147:柱形壁 148:第二環形平面 15:凸出部分 151:柱形段 152:環形板 153:中心孔 2:密封圈 3:夾具 31:主體 32:夾持部 33:流體通道 34:端塊 35:管托 36:卡槽 4:濾芯 41:接口 42:密封件 H1、H2、H3:厚度 D1、D2、D3、D4:寬度 100: Capsule filter 1: Shell 11: The first end cap 12: Second end cap 13: Cylinder 14: Connector 141: Extension 142: Flange 143: Annular groove 144: runner 145: First annular plane 146: Guide surface 147: Cylindrical Wall 148: Second annular plane 15: Protruding part 151: Cylindrical segment 152: Ring Plate 153: Center hole 2: sealing ring 3: Fixtures 31: Subject 32: Clamping part 33: Fluid channel 34: End Block 35: Tube care 36: Card slot 4: filter element 41: Interface 42: Seals H1, H2, H3: Thickness D1, D2, D3, D4: Width
以下結合附圖對本創作作進一步說明: 圖1為本創作實施例一提供的囊式過濾器的剖視圖; 圖2為圖1中的第一端蓋的剖視圖; 圖3為圖1中的第二端蓋的剖視圖; 圖4和圖5分別為圖1中的密封圈的側視圖和剖視圖; 圖6和圖7分別為本創作實施例二提供的囊式過濾器的側視圖和剖視圖; 圖8為本創作提供的過濾系統(囊式過濾器的濾芯未顯示)的剖視圖;以及 圖9為圖8中的夾具的剖視圖。 This creation is further described below in conjunction with the accompanying drawings: 1 is a cross-sectional view of the capsule filter provided by the first embodiment of the present creation; 2 is a cross-sectional view of the first end cap in FIG. 1; 3 is a cross-sectional view of the second end cap in FIG. 1; 4 and 5 are a side view and a cross-sectional view of the sealing ring in FIG. 1, respectively; Figure 6 and Figure 7 are respectively a side view and a cross-sectional view of the capsule filter provided by the second embodiment of the present creation; FIG. 8 is a cross-sectional view of the filtration system (the filter element of the capsule filter is not shown) provided for this creation; and FIG. 9 is a cross-sectional view of the clamp of FIG. 8 .
100:囊式過濾器 100: Capsule filter
1:外殼 1: Shell
11:第一端蓋 11: The first end cap
12:第二端蓋 12: Second end cap
13:筒體 13: Cylinder
14:接頭 14: Connector
141:延伸段 141: Extension
142:凸緣 142: Flange
2:密封圈 2: sealing ring
4:濾芯 4: filter element
Claims (10)
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TW111206813U TWM632453U (en) | 2022-04-28 | 2022-06-27 | Capsule filter and filtration system for slurry filtration in semiconductor manufacturing process |
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TW (1) | TWM632453U (en) |
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Date | Code | Title | Description |
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GD4K | Issue of patent certificate for granted utility model filed before june 30, 2004 |